JP2020071032A - Linear motor drive device and surface shape measuring device - Google Patents

Abstract

To provide a linear motor drive device and a surface shape measuring device which can suppress the yoking of a driven part that occurs when the driven part moves.SOLUTION: A linear motor 12, a driven part 40 and a holder 116 are arranged along a straight line that is parallel to a second direction Z orthogonal to a first direction X that is the direction in which the driven part 40 moves when the linear motor 12, the driven part 40, a direct-acting guide 42 and the holder 116 are viewed from the first direction.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a linear motor drive device and a surface profile measuring device, and more particularly to a linear motor drive device and a surface profile measuring device having a linear motor and a driven part driven by the linear motor.

  As a linear motor, for example, a linear motor disclosed in Patent Document 1 has a stator that is a bar-shaped magnet, and a coil member that is fitted to the stator and that moves linearly along the stator. And have children.

  Further, Patent Document 1 discloses a surface shape measuring apparatus in which a linear motor driving device is applied to a driving device of a detector. This linear motor drive device includes a linear motor, a driven portion driven by the linear motor, and a linear motion guide that guides the driven portion in a moving direction. The driven portion is a holder to which a detector is attached. have. The driven part is connected to a balance weight via a wire wound around a pulley, and a mover is fixed to the balance weight. Therefore, according to this linear motor drive device, the detector can be moved via the balance weight, the wire, and the driven part by linearly moving the mover along the stator. By applying the linear motor drive device as the drive device of the detector in this way, there is no wear part, low vibration drive is possible, a wide speed range can be taken, high rigidity, simple structure, Advantageous effects such as no rush can be obtained.

JP, 2004-297978, A

  However, in the linear motor drive device of Patent Document 1, the driven part may yaw when the driven part moves, and when the driven part yaws, the roughness measurement accuracy may be affected.

  The present invention has been made in view of such circumstances, and an object of the present invention is also to provide a linear motor drive device and a surface profile measuring device that can suppress yawing of a driven part that occurs when the driven part moves. And

  In order to achieve the object of the present invention, a linear motor driving device of the present invention comprises a stator extending along a first direction in a main body of the device, and a stator fitted and moved along the stator. A linear motor having a movable element, a driven part that is slidably provided in the main body of the apparatus along the first direction, has a sliding surface, and is arranged adjacent to the driving part, and slides. A linear guide having a reference surface that is in sliding contact with a surface, a holder that is fixed to a driven part and to which a detector having a measuring element is attached, one end of which is connected to the moving element, and the other end of which is connected via a pulley. A linear motor, which includes a power transmission member connected to the drive unit and a balance weight fixed to the mover, when viewed from the first direction of the linear motor, the driven unit, the linear guide and the holder, The driven part and the holder are flat with the second direction orthogonal to the first direction. They are arranged along a straight line.

  In order to achieve the object of the present invention, a linear motor driving device of the present invention comprises a stator extending along a first direction in a main body of the device, and a stator fitted and moved along the stator. A linear motor having a movable element, a driven part having a sliding surface fixed to the movable element, and a reference surface arranged adjacent to the driven part and in sliding contact with the sliding surface. The linear guide, the holder fixed to the driven part, to which the detector having the probe is attached, the balance weight movable along the first direction in the device body, and one end connected to the driven part, A power transmission member whose other end is connected to a balance weight via a pulley, and when the linear motor, the driven part, the linear guide and the holder are viewed from the first direction, the linear motor, the driven part And the holder has a second direction orthogonal to the first direction. They are arranged along a row on a straight line.

  In one mode of the present invention, it is preferable that the first direction is a horizontal direction and the second direction is a vertical direction.

  In one mode of the present invention, it is preferable that the first direction is a vertical direction and the second direction is a horizontal direction.

  In order to achieve the object of the present invention, a surface profile measuring device of the present invention is a surface profile measuring device comprising a linear motor driving device of the present invention, a detector attached to a holder of the linear motor driving device, A probe attached to the detector and displaceable in the second direction.

  According to the present invention, it is possible to suppress yawing of the driven part that occurs when the driven part moves.

1 is a perspective view of a surface roughness measuring device provided in a linear motor drive device according to a first embodiment. Block diagram showing the configuration of the surface roughness measuring device shown in FIG. Front view showing the configuration of the linear motor drive device shown in FIG. Sectional drawing of the linear motor drive device which follows the AA line of FIG. 3 is an enlarged cross-sectional view of a main part of a linear motor that constitutes the linear motor drive device of FIG. The front view which showed the structure of the linear motor drive device of 2nd Embodiment. Enlarged sectional view of the linear motor drive device taken along the line C-C in FIG. The front view which showed the structure of the linear motor drive device of 3rd Embodiment. The expanded sectional view of the linear motor drive device which follows the DD line of FIG. The front view which showed the structure of the linear motor drive device of 4th Embodiment. Enlarged cross-sectional view of the linear motor drive device taken along the line FF of FIG.

  Embodiments of a linear motor driving device and a surface shape measuring device according to the present invention will be described below with reference to the accompanying drawings.

  FIG. 1 is an overall perspective view of a surface roughness measuring device 100 in which the linear motor driving device 10 of the first embodiment is applied to the driving device of the detector 112. FIG. 2 is a block diagram showing the configuration of the surface roughness measuring device 100 shown in FIG.

  For easy understanding, the scale of each member in the drawings may differ from the actual scale. Further, in the present specification, a three-dimensional orthogonal coordinate system in three axis directions (X axis direction, Y axis direction, Z axis direction) is used, and the horizontal movement direction of the detector 112 moved by the linear motor drive device 10 is X. The horizontal direction orthogonal to the X-axis direction is the Y-axis direction, and the vertical direction orthogonal to the X-axis direction and the Y-axis direction is the Z-axis direction. The surface roughness measuring device 100 is an example of the surface shape measuring device of the present invention.

  As shown in FIG. 1, the surface roughness measuring device 100 includes a linear motor driving device 10, a measuring unit 102, a data processing device 104, an input device 106, a monitor 108, and the like. The measuring unit 102 has a detector 112 that measures the surface roughness of the work W of FIG. 2 placed on the upper surface of the measuring table 110. The detector 112 is a holder 116 (of the linear motor driving device 10). (See FIG. 1).

  A probe (also referred to as a stylus) 114 that can be displaced in the Z-axis direction (vertical direction) is attached to the end of the detector 112, and the amount of displacement of the probe 114 in the Z-axis direction is the detector. The voltage is converted into a voltage by a differential transformer (not shown) built in 112. Then, this voltage value is A / D converted by an A / D converter (not shown) and output to a CPU (central processing unit) 118 of the data processing device 104 in FIG.

  The data processing device 104 is configured by each arithmetic processing circuit including a CPU 118 and a memory 120 such as a ROM (Read Only Memory) or a RAM (Random Access Memory). A program stored in the memory 120 is executed by the CPU 118. As a result, the function of each unit of the data processing device 104 is realized, and the measurement data indicating the surface roughness of the work W is acquired. The measurement data is output to the monitor 108 by the roughness output means 122 of the data processing device 104 and displayed on the monitor 108.

  As shown in FIG. 1, the linear motor driving device 10 is attached to a column 124 that is erected on the measuring table 110 in the Z-axis direction. Then, according to an instruction from the CPU 118 of FIG. 2, a motor (not shown) for moving in the Z-axis direction is driven, so that the entire linear motor driving device 10 is moved in the Z-axis direction along the column 124. Further, the holder 116 is moved in the X-axis direction by driving the linear motor 12 (see FIG. 5) of the linear motor driving device 10 in accordance with an instruction from the CPU 118. As a result, the tracing stylus 114 is moved along with the detector 112 in the X-axis direction. The joystick 126 mounted on the front surface of the measuring table 110 can be used to manually operate the motor for moving in the Z-axis direction and the linear motor 12 for moving in the X-axis direction.

  Next, the linear motor drive device 10 of the first embodiment will be described.

  FIG. 3 is a front view showing the configuration of the linear motor drive device 10, and its main parts are shown as a cross-sectional view. FIG. 4 is an enlarged cross-sectional view taken along the line AA of FIG. FIG. 5 is an enlarged cross-sectional view of a main part of the linear motor 12 that constitutes the linear motor drive device 10.

  The linear motor drive device 10 includes a linear motor 12 mainly including a stator 14 and a mover 16, a housing 18 that is a main body of the device, and fixing fittings 20 and 20 that fix both ends of the stator 14 to the housing 18. And are equipped with. Although not shown, the linear motor drive device 10 has a cable bear (registered trademark) for supplying power to the mover 16, an encoder for detecting the moving direction position of the mover 16, and an encoder in addition to the above-described configuration. It has a scale and limit sensors that are provided near both ends of the stator 14 and that detect the end limits of the mover 16.

  First, an example of the linear motor 12 will be described with reference to FIG.

  The linear motor 12 is a so-called shaft type linear motor. The linear motor 12 has a stator 14 which is a linear rod-shaped shaft member on which a field magnet is formed, and a mover 16 which is an annular member having a coil member as a main part is fitted to the stator 14. It is configured by

  The stator 14 is made of a magnetizable material, for example, a Fe—Cr—Co type metal, and has a circular cross section. Further, the stator 14 is magnetized so as to have a uniform magnetic flux distribution, preferably a substantially rectangular shape, along the longitudinal direction thereof. As a result, the stator 14 is provided with a magnetizing portion for driving in which N poles and S poles are alternately arranged along the longitudinal direction with the same magnetic pole width P, and this constitutes a magnet for field magnetism. Has been done. The magnetic pole width P is set to 30 mm, for example. The stator 14 thus configured extends in the X-axis direction as shown in FIGS. 3 and 4.

  The coil member 30 of the mover 16 is composed of two sets of coil groups (a first set of coil groups and a second set of coil groups) each including three U-phase, V-phase, and W-phase coils. The first group of coils is composed of coils U1, V1, and W1 and is arranged in this order in the longitudinal direction of the stator 14. The second set of coil groups includes coils U2, V2, and W2, which are arranged in this order in the longitudinal direction of the stator 14. Each of these coils is formed to have a width of 1/3 of the magnetic pole width P.

  These coils forming the coil member 30 are fixed and integrated so that the outer peripheral surface thereof is coated with an adhesive. The coil member 30 is built in the hollow portion of the hollow rectangular parallelepiped moving element frame 32, and is integrally supported by the inner peripheral surface of the moving element frame 32.

  Bearings 34, 34 fitted to the stator 14 and slidable on the stator 14 are provided at both ends of the mover frame 32 in the horizontal direction. By the action of the bearing portions 34, 34, the mover 16 slides along the stator 14.

  According to this linear motor 12, when current is supplied to the coil member 30 of the mover 16 from the above-described cable bear, the current flowing in the coil member 30 of the mover 16 and the magnetic flux of the stator 14 interact with each other. According to Fleming's left-hand rule, the mover 16 linearly moves along the stator 14 in the X-axis direction. The linear motor 12 of FIG. 5 is an example, and linear motors of other configurations can be applied to the linear motor drive device 10 of the present invention. An example of a linear motor having another configuration is one in which the stator 14 side is configured by the coil member 30 and the mover 16 side is configured by the drive magnetizing portion.

  As shown in FIGS. 3 and 4, the linear motor driving device 10 includes a driven portion 40, a linear guide 42, belts 44 and 46 that are power transmission members, and a balance weight 70, in addition to the linear motor 12. , A holder 116. Further, according to the linear motor driving device 10, as shown in FIG. 4, the linear motor 12, the driven portion 40, the linear guide 42 and the holder 116 are viewed from the direction of the moving axis of the driven portion 40 (X-axis direction). At this time, the linear motor 12, the driven part 40, and the holder 116 are arranged along a straight line B parallel to the Z-axis direction (vertical direction) orthogonal to the X-axis direction. The configuration of each member will be described below.

  The driven part 40 includes a block fixing member 48, a connecting block 50, and a holder mounting member 52, and the block fixing member 48, the connecting block 50, and the holder mounting member 52 are continuously provided along a straight line B. ing.

  The block fixing member 48 is formed in a plate shape, and the connecting block 50 is fixed to the lower portion thereof.

  The block fixing member 48 has lower surfaces 48A and 48A, and these lower surfaces 48A and 48A are configured as sliding surfaces having high flatness.

  The linear guide 42 is formed in a substantially rectangular parallelepiped shape and is arranged along the X-axis direction. A slit 42A (see FIG. 3) along the X-axis direction is formed through the linear guide 42 in the Z-axis direction, and a guide block 50 is inserted and arranged in the slit 42A. Further, the linear guide 42 has side surfaces 42B, 42B (see FIG. 4) that define a slit 42A and have a vertical line in the Y-axis direction. Further, the linear motion guide 42 has upper surfaces 42C and 42C, and the upper surfaces 42C and 42C are configured as high-flat reference surfaces that are in sliding contact with the lower surfaces 48A and 48A. Therefore, the driven portion 40 is moved in the X-axis direction with high accuracy in the X-axis direction by the lower surfaces 48A, 48A of the block fixing member 48 slidingly contacting the upper surfaces 42C, 42C of the linear guide 42. Be moved.

  The holder mounting member 52 has a substantially rectangular parallelepiped shape, and is connected to the lower portion of the connection block 50 by a plurality of screws 54, 54, .... Further, a dovetail groove 52A for mounting the holder 116 is provided in the lower portion of the holder mounting member 52, and the dovetail portion 116A of the holder 116 is engaged with the dovetail groove 52A so that the holder 116 becomes the holder mounting member 52. It is installed.

  The holder 116 is formed in a substantially rectangular parallelepiped shape and has an arcuate slit 116B formed along the X-axis direction. A detector 112 having a substantially cylindrical outer shape is fitted in the slit 116B, and the detector 112 is pressed against the inner peripheral surface of the slit 116B by a screw 56 screwed into the slit 116B from the outside of the holder 116. Fixed. At this time, the tracing stylus 114 can be displaced in the Z-axis direction.

  On the other hand, the mover 16 of the linear motor 12 is fixed to the upper surface of the plate-shaped table 58. Blocks 60, 60 forming a linear guide (for example, LM Guide (registered trademark) manufactured by THK Co., Ltd.) are arranged on the lower surface of the table 58 along a straight line parallel to the X-axis direction. The blocks 60, 60 are movably attached to a rail 62 arranged along the X-axis direction. The rail 62 is a member that forms a linear guide together with the block 60, and is laid on a plate 64 fixed inside the housing 18.

  As shown in FIG. 3, the belt 44 has one end fixed to the right end portion 16A of the moving element 16 and the other end fixed to the right end portion 50B of the connecting block 50 via the pulley 66. The belt 46 has one end fixed to the left end 16B of the mover 16 and the other end fixed to the left end 50C of the connecting block 50 via the pulley 68. The pulleys 66 and 68 are arranged apart from each other in the X-axis direction, and the rotation shafts 66A and 68A of the pulleys 66 and 68 are provided along the Y-axis direction. Therefore, when the mover 16 is moved along the stator 14 in the X-axis direction, the driven portion 40 is moved in the X-axis direction opposite to the moving direction of the mover 16.

  As shown in FIG. 4, balance weights 70, 70 are fixed to the mover 16. The balance weights 70, 70 are fixed to the side surfaces 16C, 16C of the side surface of the mover 16 which have a vertical line in the Y direction. The balance weights 70, 70 are set to a weight that balances with the own weight of the driven portion 40 including the detector 112 and the holder 116 when fixed to the mover 16. That is, the balance weights 70, 70 are set such that the total weight of the balance weights 70, 70 and the mover 16 is substantially the same as the weight of the driven part 40 including the detector 112 and the holder 116. There is. By fixing the balance weights 70, 70 to the mover 16, even if the stator 14 is arranged at an angle inclined with respect to the horizontal direction, the mover 16 is It is possible to move with a stable thrust without being affected by the weight of the moving element 16.

  The operation of the linear motor drive device 10 configured as described above will be described.

  As shown in FIG. 4, the linear motor drive device 10 includes the linear motor 12, the driven portion 40, the linear guide 42, and the holder 116 from the X-axis direction (horizontal direction) which is the movement axis of the driven portion 40. When viewed, the linear motor 12, the driven portion 40, and the holder 116 are arranged along the straight line B parallel to the Z-axis direction (vertical direction) orthogonal to the X-axis direction. Can move in the X-axis direction without yawing or with yawing suppressed.

  Here, the linear motor drive device 10 and the linear motor drive device of Patent Document 1 will be compared.

  The linear motor drive device of Patent Document 1 includes a linear motor, a driven portion, and a holder when the linear motor, the driven portion, the linear guide, and the holder are viewed from the direction of the moving axis of the driven portion (X-axis direction). Are not arranged along a straight line parallel to an axis (Y-axis or Z-axis direction) orthogonal to the X-axis direction. For this reason, the driven part moves while receiving a force in the rotational direction from the wire, so that it is easy to yaw around the Z axis during the movement. That is, when the driven part moves along the X-axis direction, which is the moving direction, the driven part easily swings in the rotation direction about the Z-axis via the wire.

  On the other hand, as shown in FIG. 4, the linear motor drive device 10 sees the linear motor 12, the driven portion 40, the linear guide 42 and the holder 116 from the direction of the moving axis of the driven portion 40 (X-axis direction). At this time, the linear motor 12, the driven portion 40, and the holder 116 are arranged along the straight line B parallel to the Z axis. That is, since the linear motor 12, the driven part 40, and the holder 116 are balanced in weight, the driven part 40 moves without receiving a force in the rotational direction from the wire. Accordingly, the driven portion 40 can move in the X-axis direction without yawing or with yawing suppressed.

  The linear motor 12, the driven part 40, the linear guide 42 and the holder 116 are arranged along the straight line B to mean that the linear motor 12, the driven part 40, the linear guide 42 and the holder 116 are arranged. It is the most preferable form to arrange the respective centers of gravity along the straight line B, but the present invention is not limited to this form, and the linear motor 12, the driven portion 40, the linear guide 42, and the holder 116 are respectively arranged. A part of them may be arranged on the straight line B in an overlapping state. Thereby, it becomes possible to reduce the yawing of the driven part 40 as compared with the configuration of Patent Document 1 in which the linear motor, the driven part, and the holder are not arranged in a straight line. As an example, if the shapes of the linear motor 12, the driven portion 40, the linear motion guide 42, and the holder 116 are symmetrical with respect to the straight line B, the linear motor 12, the driven portion 40, and the holder 116 will be respectively. It is possible to arrange the center of gravity along the straight line B.

  Further, according to the linear motor drive device 10 of the first embodiment, as shown in FIG. 4, the linear motor 12 is arranged at a position higher than the driven portion 40 and the linear guide 42. As a result, most of the heat of the linear motor 12 generated by the supply (excitation) of the current is radiated upward from the upper portion of the linear motor 12, so that the heat of the linear motor 12 is driven by the driven portion 40 and the linear guide. It is possible to suppress the transmission to 42. With such an arrangement configuration of the linear motor 12, it is possible to suppress thermal deformation of the lower surfaces 48A and 48A of the block fixing member 48, which are sliding surfaces, and the upper surfaces 42B and 42B of the linear motion guide 42, which is a reference surface. The dimensional error due to the heat generation of the linear motor 12 can be suppressed.

  Further, in order to more effectively block the heat transmitted from the linear motor 12 to the driven portion 40 and the linear motion guide 42, for example, the block fixing member 48 is preferably made of a heat insulating member. Thereby, the dimensional error caused by the heat generation of the linear motor 12 can be suppressed more effectively. Examples of the above-mentioned heat insulating member include a fiber heat insulating material or a foam heat insulating material sandwiched between two metal plates (for example, aluminum plates).

  Further, according to the surface roughness measuring device 100 having such a linear motor driving device 10, since the linear motor driving device 10 suppresses the yawing of the driven portion 40, the dimensional error due to the yawing is reduced. be able to.

  Next, the linear motor drive device 200 of the second embodiment will be described.

  FIG. 6 is a front view showing a configuration of the linear motor drive device 200, and its main part is shown as a cross-sectional view. FIG. 7 is an enlarged cross-sectional view taken along the line CC of FIG. In the description of the linear motor drive device 200, the same or similar members as those of the linear motor drive device 10 described with reference to FIGS. 3 and 4 are denoted by the same reference numerals, and description thereof is omitted. There is also.

  The difference between the linear motor drive device 10 and the linear motor drive device 10 is that the driven part 40 is directly connected to the mover 16 and the driven part 40 is directly moved in the horizontal direction by the mover 16, and The balance weight 70 is connected to the drive unit 40 via belts 44 and 46.

  That is, as shown in FIG. 6 and FIG. 7, the linear motor drive device 200 includes a linear motor 12, a driven portion 40 that is fixed to the mover 16 and has upper surfaces 40C and 40C as sliding surfaces, and a driven portion 40. The linear motion guide 42, which is disposed adjacent to the portion 40 and has lower surfaces 42D and 42D as reference surfaces that are in sliding contact with the upper surfaces 40C and 40C, the balance weight 70, and one end of which is connected to the driven portion 40, and the like. The belts 44 and 46 whose ends are connected to the balance weight 70 via the pulleys 66 and 68, and the holder 116 fixed to the driven portion 40 are provided.

  Further, as shown in FIG. 7, the linear guide 42 is formed in a gate shape so as to straddle the linear motor 12, and the lower surfaces 42D, 42D of the pair of leg portions 43, 43 are formed as reference surfaces. There is. Further, the lower surface 42D and the upper surface 40C are relatively slidably contacted by being connected via a linear guide including the rail 202 and the block 204. The balance weight 70 is fixed to the upper surface of the table 58.

  As shown in FIG. 7, the linear motor driving device 200, when the linear motor 12, the driven portion 40, the linear guide 42, and the holder 116 are viewed from the X-axis direction (horizontal direction), The driven part 40 and the holder 116 are arranged along a straight line B parallel to the second direction (vertical direction).

  Accordingly, the driven portion 40 of the linear motor driving device 200 can move in the X-axis direction without yawing or in a state where yawing is suppressed.

  Next, an example in which the linear motor driving device of the present invention is applied to the driving device of the roundness measuring device will be described by exemplifying the following third embodiment and fourth embodiment. The roundness measuring device is a device in which the probe 114 of the detector 112 is brought into contact with the peripheral surface of the measured object to measure the circularity of the peripheral surface.

  FIG. 8 is a front view showing the configuration of the linear motor drive device 210 of the third embodiment, and the main parts thereof are shown as a sectional view. FIG. 9 is an enlarged sectional view taken along the line DD of FIG. In the description of the linear motor drive device 210, the same or similar members as those of the linear motor drive device 10 described with reference to FIGS. 3 and 4 will be denoted by the same reference numerals and will not be described. There is also.

  The difference between the linear motor driving device 210 and the linear motor driving device 210 is that the stator 14 of the linear motor 12 is extended along the vertical direction (Z-axis direction) which is the first direction, and the driven part 40. Is movably provided along the linear guide 42 in the vertical direction (Z-axis direction).

  That is, as shown in FIGS. 8 and 9, the linear motor driving device 210 is provided with the linear motor 12 so as to be slidable along the vertical direction and has inner wall surfaces 40E and 40D as sliding surfaces. One end is connected to the mover 16 and a linear motion guide 42 that is disposed adjacent to the driven part 40 and has side surfaces 42E and 42E as reference surfaces that are in sliding contact with the inner wall surfaces 40E and 40E. Belts 44 and 46, the other ends of which are connected to the driven portion 40 via pulleys 66 and 68, balance weights 70 and 70 fixed to the moving element 16, and the measuring element 114 fixed to the driven portion 40. And a holder 116 to which the detector 112 is attached.

  Further, as shown in FIG. 9, the driven portion 40 has a concave groove 41 for accommodating the linear guide 42 having a rectangular cross section, and a cap 212 for sealing the concave groove 41.

  As shown in FIG. 9, the linear motor driving device 210, when the linear motor 12, the driven portion 40, the linear guide 42 and the holder 116 are viewed from the Z-axis direction (vertical direction), The driven portion 40, the linear motion guide 42, and the holder 116 are arranged along a straight line E parallel to the X-axis direction (horizontal direction) that is the second direction orthogonal to the Z-axis direction (vertical direction). ..

  As a result, the driven portion 40 of the linear motor driving device 210 can move in the Z-axis direction without yawing or with yawing suppressed. That is, when the driven part 40 moves along the Z-axis direction which is the moving direction, the driven part 40 does not swing in the rotation direction around the X-axis or the swinging is suppressed in the Z-axis direction. Move to.

  The end portion of the belt 44 is preferably fixed to the center of gravity of the moving body including the driven portion 40, the holder 116 and the detector 112. As a result, the rotational moment generated in the driven part 40 (the force generated by the thrust of the linear motor 12) can be reduced, so that the inner wall surfaces 40E, 40E of the driven part 40 are aligned with the side surfaces 42E, 42E of the linear guide 42. It is possible to reduce the pressurizing force for copying.

  FIG. 10 is a front view showing the configuration of the linear motor drive device 220 of the fourth embodiment, and the main parts thereof are shown as a sectional view. 11 is an enlarged cross-sectional view taken along the line FF of FIG. In the description of the linear motor drive device 220, the same or similar members as those of the linear motor drive device 200 described with reference to FIGS. 6 and 7 will be denoted by the same reference numerals, and description thereof will be omitted. There is also.

  The difference between the linear motor drive device 200 and the linear motor drive device 220 is that the stator 14 of the linear motor 12 is extended in the vertical direction (Z-axis direction) which is the first direction, and the driven part 40 is linear. This is a point provided movably in the vertical direction (Z-axis direction) along the motion guide 42.

  That is, as shown in FIGS. 10 and 11, the linear motor driving device 220 includes the linear motor 12, the driven portion 40 fixed to the moving element 16 and having side surfaces 40F and 40F as sliding surfaces, and the driven portion 40. The linear motion guide 42, which is arranged adjacent to the portion 40 and has side surfaces 42F and 42F as reference surfaces that are in sliding contact with the side surfaces 40F and 40F, the balance weight 70, and one end of which is connected to the driven portion 40, and the like. The belts 44 and 46 whose ends are connected to the balance weight 70 via the pulleys 66 and 68, and the holder 116 fixed to the driven portion 40 are provided.

  Further, the side surface 40F and the side surface 42F are relatively slidably brought into contact with each other by being connected via a linear guide including the rail 202 and the block 204. The balance weight 70 is fixed to the side surface of the table 58.

  Then, as shown in FIG. 11, the linear motor driving device 220, when the linear motor 12, the driven portion 40, the linear guide 42 and the holder 116 are viewed from the Z-axis direction (vertical direction), The driven portion 40, the linear motion guide 42, and the holder 116 are arranged along a straight line E parallel to the X-axis direction (horizontal direction) that is the second direction orthogonal to the Z-axis direction (vertical direction). ..

  Accordingly, the driven portion 40 of the linear motor drive device 220 can move in the Z-axis direction without yawing or in a state where yawing is suppressed.

  The end portion of the belt 44 is preferably fixed to the driven portion 40 located immediately above the moving element 16. As a result, the rotational moment (force generated by the thrust of the linear motor 12) generated in the driven portion 40 can be reduced, so that the side surfaces 40E, 40E of the driven portion 40 are changed to the side surfaces 42D, 42D of the linear guide 42. The pressurization for copying can be reduced.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above examples, and it is needless to say that various improvements and modifications may be made without departing from the scope of the present invention. ..

  10 ... Linear motor drive device, 12 ... Linear motor, 14 ... Stator, 16 ... Mover, 18 ... Housing, 20 ... Fixing metal fitting, 30 ... Coil member, 32 ... Mover frame, 34 ... Bearing part, 40 ... Driven part, 41 ... Recessed groove, 42 ... Linear motion guide, 44 ... Belt, 46 ... Belt, 48 ... Block fixing member, 50 ... Connection block, 52 ... Holder mounting member, 54 ... Screw, 56 ... Screw, 58 ... Table, 60 ... Block, 62 ... Rail, 64 ... Plate, 66 ... Pulley, 68 ... Pulley, 70 ... Balance weight, 100 ... Surface roughness measuring device, 102 ... Measuring unit, 104 ... Data processing device, 106 ... Input device , 108 ... Monitor, 110 ... Measuring stand, 112 ... Detector, 114 ... Measuring element, 116 ... Holder, 118 ... CPU, 120 ... Memory, 122 ... Roughness output means, 124 ... Arm, 126 ... joystick, 200 ... linear motor drive, 202 ... rails, 204 ... block, 210 ... linear motor drive, 212 ... Cap, 220 ... linear motor drive

Claims (5)

A linear motor having a stator extending in the device body along a first direction, and a slider fitted to the stator and movable along the stator,
A driven part slidably provided on the device body along the first direction and having a sliding surface;
A linear guide having a reference surface that is arranged adjacent to the driven portion and is in sliding contact with the sliding surface,
A holder fixed to the driven part, to which a detector having a probe is attached,
A power transmission member having one end connected to the mover and the other end connected to the driven part via a pulley;
A balance weight fixed to the mover,
Equipped with
When the linear motor, the driven portion, the linear guide and the holder are viewed from the first direction, the linear motor, the driven portion and the holder are orthogonal to the first direction. A linear motor drive device arranged along a straight line parallel to the direction of 2. A linear motor having a stator extending in the device body along a first direction, and a slider fitted to the stator and movable along the stator,
A driven part having a sliding surface that is fixed to the mover;
A linear guide having a reference surface that is arranged adjacent to the driven portion and is in sliding contact with the sliding surface,
A holder fixed to the driven part, to which a detector having a probe is attached,
A balance weight that is movable in the device body along the first direction;
A power transmission member having one end connected to the driven part and the other end connected to the balance weight via a pulley;
Equipped with
When the linear motor, the driven portion, the linear guide and the holder are viewed from the first direction, the linear motor, the driven portion and the holder are orthogonal to the first direction. A linear motor drive device arranged along a straight line parallel to the direction of 2. The first direction is a horizontal direction, and the second direction is a vertical direction,
The linear motor drive device according to claim 1. The first direction is a vertical direction, and the second direction is a horizontal direction,
The linear motor drive device according to claim 1. A surface profile measuring device comprising the linear motor driving device according to claim 1.
A detector attached to the holder of the linear motor drive,
A probe attached to the detector and displaceable in the second direction,
A surface profile measuring device.

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