JP2019209440A - Slit nozzle manufacturing method and slit nozzle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a nozzle in which a width of a slit is difficult to widen due to a pressure of a fluid applied to a pipe material during use. SOLUTION: The step of preparing a cutting blade 26, the step of preparing a tubular pipe material 13, the cutting blade of the cutting blade is positioned along the axial direction of the pipe material, The cutting blade of the cutting blade is cut into the pipe material, and then the cutting blade is pulled out from the pipe material to form the first slit 15a, and the cutting blade and the pipe material are relatively moved along the axial direction. The step of moving, positioning the cutting blade along the axial direction of the pipe material, making the cutting edge of the cutting blade cut into the pipe material from the outside in the radial direction of the pipe material, and then pulling out the cutting blade from the pipe material, A step of forming a second slit so as to be discontinuous with respect to the first slit on an extension line of the length direction of the one slit; To provide. [Selection diagram] Fig. 6

Description

  The present invention relates to a slit nozzle that ejects fluid from a plurality of slits and a method of manufacturing the slit nozzle.

  2. Description of the Related Art A cutting apparatus that cuts a plate-like workpiece such as a semiconductor wafer, a ceramic substrate, or a resin package substrate with an annular cutting blade is known. The workpiece is cut along the movement path by relatively moving the cutting blade and the workpiece while cutting the cutting blade rotated at a high speed with respect to the workpiece.

  There is also known a grinding apparatus that thins the workpiece by grinding. The grinding apparatus includes, for example, a chuck table that sucks and holds a workpiece, and a grinding wheel that is disposed above the chuck table and has a grinding wheel fixed to the lower surface. The workpiece is thinned by lowering the grinding wheel and pressing the grinding wheel against the workpiece while rotating the chuck table and the grinding wheel.

  When a workpiece is processed by a processing device such as the above-described cutting device or grinding device, the workpiece is processed while supplying a processing liquid to the workpiece. By supplying the machining fluid, it is possible to suppress heat generation at a machining point that is a contact portion between the machining device being worked on and the workpiece, and further, it is possible to promote the discharge of machining waste. Since the machining fluid remains on the workpiece after completion of processing, it is known that air is jetted from the drying means to the workpiece in order to remove the remaining machining fluid (for example, Patent Documents). 1).

  In addition, a cleaning device that removes processing waste generated after processing from the workpiece is used. In the cleaning apparatus, the workpiece is cleaned by high-pressure cleaning using pressurized water or the like, or two-fluid cleaning in which air and water are mixed. Since the machining fluid remains on the workpiece after completion of cleaning, it is known that air is jetted from the drying means to the workpiece in order to remove the remaining machining fluid (for example, Patent Documents). 2).

  Patent Document 2 describes, as a drying unit, an air injection unit in which a plurality of spot-shaped injection ports are provided at regular intervals on the side surface of the pipe material along the axial direction of the cylindrical pipe material. Has been. The air jetting means can form so-called dry air walls by the air jetted from each jet port, and the machining liquid remaining on the workpiece is removed by the dry air walls.

  The plurality of injection ports are provided at regular intervals along the axial direction of the pipe material, and the spot diameter of each injection port is minute compared to the area of the side surface of the pipe material. Therefore, the above-described dry air wall is intermittently formed along the axial direction of the pipe material (that is, formed in a fence shape), and the flow rate of the injected air is often relatively low. .

  On the other hand, an air knife nozzle that injects air at a high flow rate from a slit continuously provided in a specific direction is known. The slit of the air knife nozzle has, for example, a depth of about 1 mm to several mm continuous from a predetermined position in the height direction of the first side surface to the bottom on the first side surface of the first body portion having a rectangular parallelepiped shape. A continuous concave portion is formed along the length direction of the slit, and the flat second side surface of the rectangular parallelepiped second main body portion is bonded to the first side surface of the first main body portion.

  In this case, the above-mentioned recess, which is a gap between the first side surface and the second side surface, serves as an air outlet. Since this air knife nozzle is formed by combining a plurality of main body portions, its volume is larger than that of an elongated pipe material or the like. Therefore, it may be difficult to arrange in the processing apparatus. Moreover, it is generally difficult to manufacture an air knife nozzle having a narrow slit in which the depth of the recess is further smaller than 1 mm.

JP 2017-84950 A JP2015-115472A

  On the other hand, by providing a continuous slit along the axial direction of the pipe material on the side surface of the elongated pipe material and injecting air from the slit, continuous air flow along the axial direction is achieved. It is conceivable to produce slit nozzles that form walls.

  In this slit nozzle, an elongated slit is formed along the axial direction of the pipe material, and the slit width in the direction perpendicular to the axial direction of the pipe material is narrowed so that the air flow rate can be increased. Seem.

  However, even if narrow slits are continuously formed along the axial direction of the pipe material, the slit edges are partially deformed due to the pressure of the fluid applied to the pipe material during use of the slit nozzle. Thus, there is a concern that the width of the slit widens and the flow rate becomes slow.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a nozzle in which the width of the slit is difficult to spread during use of the slit nozzle.

  According to one aspect of the present invention, there is provided a manufacturing method of a slit nozzle that ejects fluid from a plurality of slits having a predetermined width, the cutting blade having a cutting blade having a thickness corresponding to the predetermined width of the slit A cutting blade preparation step for preparing a pipe material, a pipe material preparation step for preparing a cylindrical pipe material, and the cutting blade is positioned along the axial center direction of the pipe material, and the pipe material is formed from outside in the radial direction of the pipe material. A first slit that is long in a direction perpendicular to the predetermined width is formed by cutting the cutting blade of the cutting blade into a material and pulling out the cutting blade of the cutting blade that has been cut out from the pipe material. A first slit forming step for forming the cutting blade, a moving step for relatively moving the cutting blade and the pipe material along the axial direction after the first slit forming step, After cutting, the cutting blade is positioned along the axial direction of the pipe material, and the cutting blade of the cutting blade is cut into the pipe material from outside in the radial direction of the pipe material. The second slit is formed by pulling out the cutting blade of the cutting blade from the pipe material and forming the second slit so as to be discontinuous with respect to the first slit on the extended line in the length direction of the first slit. And a step of manufacturing a slit nozzle.

  Preferably, the predetermined width of the first slit and the second slit is 30 μm or more and 200 μm or less.

  According to another aspect of the present invention, there is provided a slit nozzle that ejects fluid from a plurality of slits provided in a tubular pipe material, and is provided on a side wall portion of the pipe material along the axial direction of the pipe material. The first slit and the second slit, and the remaining portion that is provided between the first slit and the second slit and is a part of the side wall portion of the pipe material, and the length of the remaining portion in the axial direction Is provided with a slit nozzle that becomes shorter from the axial center of the pipe material toward the outside in the radial direction of the pipe material.

  According to the manufacturing method of the slit nozzle according to the present invention, the second slit is formed so as to be discontinuous with respect to the first slit, so that the slit nozzle is compared with the case where the first slit and the second slit are continuous. It is possible to prevent the slit width from expanding according to the fluid ejection time. Similarly, according to the slit nozzle according to the present invention, since the remaining portion is provided between the first slit and the second slit, it is possible to prevent the width of the slit from expanding according to the fluid ejection time of the slit nozzle.

1A is a bottom view of the slit nozzle, and FIG. 1B is a cross-sectional view taken along the line II of FIG. 1A. It is a side view of a slit nozzle. It is a side view of a cutting means. It is a perspective view of a pipe material. It is sectional drawing of the pipe material in the plane orthogonal to the axial center direction when making a cutting blade cut into a pipe material. 6A is a cross-sectional view of the pipe material on a plane orthogonal to the width direction when the cutting blade is cut into the pipe material, and FIG. 6B is a drawing of the cutting blade cut into the pipe material. It is sectional drawing of a pipe material when extracting from. It is sectional drawing of a pipe material which shows the movement step which moves a cutting blade and a pipe material relatively along an axial center direction. FIG. 8A is a cross-sectional view of the pipe material on a plane perpendicular to the width direction when the cutting blade is cut into the pipe material at a position away from the first slit, and FIG. It is sectional drawing of a pipe material when extracting the inserted cutting blade from a pipe material. It is a flowchart which shows the manufacturing method of a slit nozzle. FIG. 10A is a bottom view before using the slit nozzle according to the comparative example, and FIG. 10B is a bottom view after using the slit nozzle according to the comparative example for a predetermined time period. It is a figure which shows the mode of other embodiment which moves a pipe material to an axial center direction in the state which cut the cutting blade in the pipe material.

  A slit nozzle 11 according to an embodiment of the present invention will be described with reference to FIGS. 1A is a bottom view of the slit nozzle 11, and FIG. 1B is a cross-sectional view taken along the line II of FIG. 1A. FIG. 2 is a side view of the slit nozzle 11. In the present embodiment, the portion of the side surface of the slit nozzle 11 or the pipe material 13 where the slit 15a and the like are provided is referred to as the bottom surface for convenience.

  The slit nozzle 11 of the present embodiment has a cylindrical pipe member 13 made of metal such as stainless steel and having a hollow inside. However, the pipe material 13 may have a prismatic shape with a hollow inside. In the present embodiment, the thickness of the side wall portion 13d of the pipe material 13 is about 1 mm, and the length in the axial direction A substantially parallel to the axis 13a of the pipe material 13 is about 300 mm.

  The slit nozzle 11 includes a plurality of (three in this embodiment) slits 15 a, 15 b, and 15 c in the side wall portion 13 d of the pipe material 13. The slits 15 a, 15 b and 15 c are provided so as to penetrate from the inner side surface 13 c of the pipe material 13 to the outer side surface 13 b of the pipe material 13, and connect the inside of the pipe material 13 to the outside of the pipe material 13.

  Each of the slits 15 a, 15 b and 15 c has a predetermined width D along the width direction C of the pipe material 13. The predetermined width D is several tens of μm to several hundreds of μm, for example, 30 μm to 200 μm.

  Each of the plurality of slits 15 a, 15 b, and 15 c is long along the axial direction A of the pipe material 13. A slit 15b is provided on an extension line in the length direction (namely, axial direction A) of the slit 15a, and a slit 15c is provided on an extension line in the length direction (namely, axial direction A) of the slit 15b. The plurality of slits 15a, 15b, and 15c are provided at positions separated from each other along the axial direction A, and the length of each axial direction A is, for example, about 80 mm.

  In the present embodiment, as shown in FIG. 1 (A), the direction of the pipe member 13 is defined as a direction perpendicular to the axial direction A and passing through the axial direction A and the center of the slit (for example, the slit 15a). This is referred to as a height direction B. A direction orthogonal to both the axial direction A and the height direction B is referred to as a width direction C of the pipe material 13.

  Between the slits 15a and 15b adjacent to each other along the axial direction A and between the slits 15b and 15c, remaining portions (remaining portions) 17b and 17c which are part of the side wall portion 13d of the pipe material 13 are provided. It is done. The maximum length t along the axial direction A of the remaining portions 17b and 17c is typically 1 mm or more and 10 mm or less, for example, 2 mm or more and 5 mm or less.

  Between the slit 15a and the left end portion of the pipe material 13, there is a remaining portion 17a whose length along the axial direction A is about half (t / 2) of the length t of the remaining portions 17b and 17c. Provided. Similarly, a remaining portion 17d whose length along the axial direction A is about half of the length t (t / 2) is also provided between the slit 15c and the right end portion of the pipe member 13.

  As shown in FIG. 1B, the length of each of the remaining portions 17a, 17b, 17c and 17d in the axial direction A is the radial direction of the pipe material 13 from the axial center 13a of the pipe material 13 (that is, FIG. 1). It becomes shorter as it goes to the outside in the height direction B) of the pipe material 13 shown in (B).

  The remaining portions 17b and 17c have a length t in the axial center direction A on the inner side surface 13c of the pipe member 13, and the length in the axial center direction A gradually decreases as the height proceeds outward along the height direction B. Thus, the length in the axial direction A on the outer side surface 13b of the pipe material 13 is sufficiently smaller than the length t. The length in the axial direction A on the outer side surface 13b of the pipe material 13 is, for example, substantially zero.

  That is, the remaining portions 17b and 17c exposed on the outer side surface 13b of the pipe member 13 are part of the side wall portion 13d remaining in a linear shape (dotted in the cross-sectional view shown in FIG. 1B) along the width direction C. It is. The remaining portions 17a and 17d have a length in the axial direction A on the inner side surface 13c that is about half (t / 2) of the length t. Similarly, the axial direction A on the outer side surface 13b of the pipe material 13 Is sufficiently smaller than about half of the length t (t / 2), for example, substantially zero.

  The cross-sections of the remaining portions 17b and 17c have a substantially triangular shape with the inner side surface 13c as the base, but the two sides of the triangular shape are not straight but concave toward the base, and the concave portions are circles described later. It has a curvature corresponding to the curvature of the ring-shaped cutting blade 26.

  In the remaining portion 17a, the surface constituting the slit 15a is recessed toward the inner side surface 13c. Similarly, in the remaining portion 17d, the surface constituting the slit 15c is recessed toward the inner side surface 13c. The recessed portions of the remaining portion 17 a and the remaining portion 17 d have a curvature corresponding to the curvature of the cutting blade 26. The remaining portions 17a, 17b, 17c and 17d also have the same width D as the slits 15a, 15b and 15c in the width direction C of the pipe material 13.

  A fluid is fed into the pipe member 13 at a predetermined pressure and flow rate, and the fluid is ejected from the plurality of slits 15a, 15b and 15c. The fluid is, for example, a gas such as air or a liquid such as water. In this embodiment, since air E is supplied into the cavity of the pipe material 13, air E is injected from the plurality of slits 15a, 15b, and 15c.

  In the present embodiment, by setting the width D to 30 μm or more and 200 μm or less, the flow rate of the air E ejected from the slit 15a or the like can be increased as compared with the case where the width D is 1 mm, and the processing liquid or cleaning liquid or the like The removal effect can be enhanced.

  A state in which the air E is injected is shown in FIG. FIG. 2 shows a state in which the slit nozzle 11 shown in FIG. 1B is rotated 180 degrees around the axis 13a, and a plurality of slits 15a, 15b and 15c are arranged downward.

  Each of the slits 15a, 15b, and 15c is formed so that the length in the axial direction A increases from the inner side surface 13c of the pipe material 13 toward the outer side surface 13b. Air E is sprayed so as to spread in the axial direction A as it advances. Therefore, the slit nozzle 11 can supply air E directly below the remaining portions 17a, 17b, 17c and 17d, and can form a continuous wall of air E along the axial direction A.

  Moreover, in this embodiment, since the cross section of the pipe material 13 in the plane parallel to the height direction B and the width direction C is annular, compared with the case where the cross section of the pipe material 13 is a square frame shape, The pressure resistance against the air E sent into the cavity of the material 13 is increased.

  Although both ends of the pipe material 13 shown in FIGS. 1A and 1B are in an open state, as shown in FIG. 2, air E is supplied to the pipe material 13 and a plurality of slits 15a, 15b and When air E is injected from 15c, the upstream side of both ends of the pipe material 13 is opened, and the downstream side is closed. For example, the downstream side of the pipe material 13 is sealed with a cap or the like to be in a closed state.

  Here, the manufacturing method of the slit nozzle 11 is demonstrated with reference to FIGS. First, in order to form a cut in the pipe material 13, a cutting means 20 having a cutting blade 26 is prepared (cutting blade 26 preparation step S10). FIG. 3 is a side view of the cutting means 20.

  The cutting means 20 is a cutting unit provided in a processing apparatus used for cutting a semiconductor wafer and a resin package substrate, for example. The cutting means 20 has a spindle 22 serving as a rotation axis substantially parallel to the Y-axis direction.

  The spindle 22 is partially accommodated in a cylindrical spindle housing (not shown), and the spindle housing can rotatably support the spindle 22 by a so-called air bearing.

  The cutting means 20 has a rotational drive source (not shown) including a motor connected to one end side of the spindle 22. The cutting means 20 has an annular blade mount 24 attached to the other end of the spindle 22 exposed to the outside of the spindle housing.

  A cutting blade 26 is provided on the front surface of the blade mount 24 in the Y-axis direction. The cutting blade 26, the blade mount 24, and the spindle 22 are integrally fixed in a manner that can be rotated by a fixing means such as a bolt.

  The cutting blade 26 of the present embodiment is a so-called hub blade, and has an annular base 26b and an annular cutting blade 26a provided on the outer periphery of the base 26b. In the present embodiment, the difference between the outer diameter and the inner diameter of the annular cutting blade 26a (that is, the radial length of the cutting blade 26a) is greater than the thickness of the pipe material 13 of about 1 mm.

  The cutting blade 26a is formed, for example, by mixing abrasives such as diamond and CBN (Cubic Boron Nitride) in a bond material (bonding material) such as metal or resin. As the cutting blade 26, a washer blade composed only of a cutting blade may be used.

  The cutting blade 26a of the cutting blade 26 has a predetermined thickness F. The thickness F of the cutting blade 26a of this embodiment is substantially parallel to the Y-axis direction when the cutting blade 26 is mounted on the spindle 22, and corresponds to each width D of the plurality of slits 15a, 15b, and 15c. Yes.

  The width D may be one or more times the thickness of the cutting blade 26a due to the influence of processing accuracy. For example, the width D is at most 1.2 times the thickness of the cutting blade 26a. Of course, the kerf width formed by cutting a part of the pipe material 13 with the cutting blade 26a is equal to the width D of the slit 15a and the like.

  The cutting means 20 has a pair of cutting fluid supply nozzles 28 located below the spindle 22 and sandwiching the cutting blade 26. Each of the pair of cutting fluid supply nozzles 28 has an injection port 28a located on the cutting blade 26a side. The cutting fluid supply nozzle 28 supplies the cutting fluid to the cutting blade 26 a during cutting, and the cutting fluid travels through the cutting blade 26 a and reaches a processing point that is a contact area between the cutting blade 26 a and the pipe material 13.

  Next, the pipe material 13 for cutting the cutting blade 26a of the cutting means 20 is prepared (pipe material 13 preparation step S20). FIG. 4 is a perspective view of the pipe material 13. FIG. 4 shows the pipe material 13 before forming the slits 15a and the like. Note that either the cutting blade 26 preparation step S10 or the pipe material 13 preparation step S20 described above may be performed first.

  In the present embodiment, after the pipe material 13 preparation step S20, the cutting blade 26 rotated at a high speed is cut into the bottom surface of the pipe material 13. FIG. 5 is a cross-sectional view of the pipe material 13 in a plane orthogonal to the axial direction A when the cutting blade 26 is cut into the pipe material 13, and FIG. It is sectional drawing of the pipe material 13 in the plane orthogonal to the width direction C when making cut.

  5 and 6A, the axial direction A of the pipe material 13 is substantially parallel to the X-axis direction of the cutting means 20, and the height direction B of the pipe material 13 is Z of the cutting means 20. The width direction C of the pipe material 13 is substantially parallel to the Y-axis direction of the cutting means 20.

  The pipe material 13 is fixed by a jig 30 so as not to move in the axial direction A. The jig 30 has, for example, a recess that fits with a part of the pipe material 13, and the pipe material 13 is fixed to the jig 30 by being fitted into the recess.

  The jig 30 has, for example, a shape corresponding to one of the cut pipe members 13 when the pipe member 13 is cut in two on a plane passing through the shaft center 13a and parallel to the axial direction A and the width direction C. Have The jig 30 of the present embodiment has a semi-cylindrical concave portion that fits on the opposite side to the bottom surface side of the pipe material 13 provided with the slits 15a (that is, the upper surface side of the pipe material 13).

  A chuck table 32 is disposed below the jig 30. The chuck table 32 is made of porous ceramics or the like having pores, and has a rectangular porous plate 32b in a top view. The pores of the porous plate 32b are connected to a flow path 32c, and the flow path 32c is connected to suction means (not shown) such as a vacuum pump via a valve or the like (not shown).

  Due to the negative pressure of the suction means, the bottom surface of the jig 30 is sucked and held by the holding surface 32a of the porous plate 32b. Thereby, the jig 30 and the pipe material 13 are fixed to the chuck table 32 fixed in the processing apparatus.

  When the cutting blade 26 rotated at a high speed is cut into the pipe material 13 for cutting, the cutting blade 26 is first positioned along the axial direction A of the pipe material 13. That is, the XZ plane direction of the cutting blade 26 a orthogonal to the thickness direction (Y-axis direction) of the cutting blade 26 a of the cutting blade 26 is positioned along the axial direction A of the pipe material 13.

  Then, the cutting blade 26 a is cut into the pipe material 13 by relatively moving the pipe material 13 and the cutting means 20 along the Z-axis direction. At the time of cutting, the cutting fluid G is supplied from the injection port 28a of the cutting fluid supply nozzle 28 to the cutting blade 26a.

  In this embodiment, by moving the cutting blade 26 downward along the Z-axis direction, cutting is performed from the outside in the radial direction of the pipe material 13 (that is, the height direction B of the pipe material 13) toward the pipe material 13. The blade 26 is cut.

  Thereafter, the cutting blade 26 is moved upward along the Z-axis direction without relatively moving the cutting blade 26 and the pipe material 13 in the X-axis direction, so that the cut cutting blade 26 is moved to the pipe material 13. Pull out from the so-called chopper cut. FIG. 6B is a cross section of the pipe material 13 when the cut cutting blade 26 is pulled out from the pipe material 13.

  As described above, in the present embodiment, not all of the wall thickness of the side wall portion 13 d of the pipe material 13 is cut along the height direction B by chopper cutting using the cutting blade 26. Thereby, the slit 15a is formed in the pipe material 13 (slit 15a formation step S30).

  For example, the cutting depth of the cutting blade 26a when forming the slit 15a is calculated as follows. In addition, the length of the slit 15a formed in the outer side surface 13b and the inner side surface 13c along the axial direction A is determined according to the cutting depth of the cutting blade 26a.

  The radius r of the cutting blade 26 a is determined in advance according to the cutting blade 26. The height position of the cutting blade 26a with respect to the chuck table 32 is determined in advance according to the processing apparatus, and the distance L from the rotation axis of the cutting blade 26a (that is, the axis of the spindle 22) to the outer side surface 13b is also cured. It can be calculated from information such as the shape and size of the tool 30 and the pipe material 13.

  Therefore, the cutting depth with respect to the outer side surface 13b of the cutting blade 26a can be obtained from the difference (r−L) between the radius r and the distance L. Further, the length of the slit 15a in the axial direction A of the outer side surface 13b is also determined.

  Furthermore, since the wall thickness Δ of the pipe material 13 is also determined in advance, the depth of cut (r− (r− ( L + Δ)) is determined. Further, the length of the slit 15a in the axial direction A of the inner side surface 13c is also determined.

  After the slit 15a formation step S30, the cutting blade 26 and the pipe material 13 are relatively moved along the axial direction A. FIG. 7 is a cross-sectional view of the pipe material 13 showing a moving step (S40) in which the cutting blade 26 and the pipe material 13 are relatively moved along the axial direction A.

  After the moving step S40, the cutting blade 26 is positioned along the axial direction A of the pipe material 13. That is, the surface of the cutting blade 26 a orthogonal to the thickness direction (Y-axis direction) of the cutting blade 26 a, that is, the XZ plane direction is positioned along the axial direction A of the pipe material 13. Then, the cutting blade 26 is cut from the outside in the radial direction of the pipe material 13 (that is, the height direction B of the pipe material 13) toward the pipe material 13.

  FIG. 8A is a cross-sectional view of the pipe material 13 on a plane orthogonal to the width direction C when the cutting blade 26 is cut at a position away from the slit 15a of the pipe material 13, and FIG. These are sectional drawings of the pipe material 13 when the cut cutting blade 26 is pulled out from the pipe material 13. In this way, the slit 15b is formed by chopper cutting (slit 15b forming step S50). Since the remaining portion 17b exists between the slit 15a and the slit 15b, the slit 15a and the slit 15b are not continuous but discontinuous.

  After the slit 15b forming step, the cutting blade 26 and the pipe material 13 are moved relative to each other along the axial direction A (S60), and the cutting blade 26 is moved to the pipe material 13 at a position away from the slit 15b. Cut and then pull out. Thus, the slit 15c is formed by chopper cutting (slit 15c formation step S70). Since the remaining portion 17c exists between the slit 15b and the slit 15c, the slit 15b and the slit 15c are not continuous but discontinuous.

  In this embodiment, the cutting blade 26 preparation step S10 (FIG. 3), the pipe material 13 preparation step S20 (FIG. 4), the slit 15a formation step S30 (FIGS. 5, 6A, 6B), movement The slit nozzle 11 is manufactured through the step S40 (FIG. 7), the slit 15b forming step S50 (FIGS. 8A and 8B), the moving step S60, and the slit 15b forming step S70. FIG. 9 is a flowchart showing a method for manufacturing the slit nozzle 11.

  In the present embodiment, each of the plurality of slits 15a, 15b, and 15c has the same width D, and the remaining portions 17b and 17c are formed between two adjacent slits. Therefore, the length of each slit in the axial direction A is shorter than that in the case where slits are continuously formed along the axial direction A (for example, when there are no remaining portions 17b and 17c).

  Therefore, the resistance against the pressure of the air E applied to the pipe material 13 during use of the slit nozzle 11 (that is, the pressure resistance) is increased, and each slit is compared with the case where the slits are continuously formed along the axial direction A. The width D in the width direction C is difficult to spread.

  In addition, since the width D of each slit is difficult to expand, air having a substantially uniform flow rate along the axial direction A for a longer time than when the slits are continuously formed along the axial direction A. E can be injected.

  Moreover, since the slit nozzle 11 of this embodiment is formed from the one pipe material 13, the 1st main body part which has a recessed part in a 1st side surface, and the 2nd main body part 2nd flat side surface like the past Compared to an air knife nozzle formed by bonding together, the structure such as the cutting means 20 is not hindered even if it is arranged in the processing apparatus. Therefore, it is very suitable to arrange in a processing apparatus.

  In the present embodiment, the case where the three slits 15a, the slit 15b, and the slit 15c are provided has been described, but two slits may be provided. In this case, the total length of the pipe material 13 may be about 200 mm. The number of slits provided in the pipe material 13 may be four or more.

  Here, a comparative example in which slits are continuously formed along the axial direction A of the pipe material 43 will be described. FIG. 10A is a bottom view before using the slit nozzle 41 according to the comparative example, and FIG. 10B is a bottom view after using the slit nozzle 41 according to the comparative example for a predetermined time.

  As shown in FIG. 10A, the slit 45 has a length D1 in the width direction C at an arbitrary position along the axial direction A. Since the slit nozzle 41 according to the comparative example does not have the remaining portions 17b and 17c, unlike the slit nozzle 11 according to the present invention, the pipe at the opening edge portion of the slit 45 at the position corresponding to the remaining portions 17b and 17c. The pressure resistance of the material 43 is weaker than that of the slit nozzle 11.

  As a result, after the slit nozzle 41 has been used for a predetermined time, the shape of the slit 45 is more easily deformed than the slit 15a and the like. For example, as shown in FIG. It becomes.

  In particular, the length in the width direction C at an intermediate position in the axial direction A is larger than in other locations. The length in the width direction C at the intermediate position is a length D2 that is larger than the initial length D1. When the slit 45 is deformed as shown in FIG. 10B, the slit nozzle 41 cannot eject the air E at a substantially uniform flow rate in the axial direction A.

  On the other hand, since the slit nozzle 11 according to the embodiment of the present invention has the remaining portions 17b and 17c, the width D of each of the slits 15a, 15b, and 15c is difficult to expand compared to the slit nozzle 41 according to the comparative example. The air E having a substantially uniform flow rate along the axial direction A can be provided for a longer time.

  In the above-described embodiment of the present invention, the slits 15a, 15b, and 15c are formed by chopper cutting of the cutting blade 26. However, after the cutting blade 26 is cut into the pipe material 13, the cutting blade 26 and the pipe material 13 are relatively moved along the axial direction A, and then the cutting blade 26 is pulled out from the pipe material 13, A slit 15a or the like may be formed.

  FIG. 11 is a diagram showing a state of another embodiment in which the pipe material 13 is moved in the axial direction A in a state where the cutting blade 26 is cut into the pipe material 13. In the present specification, traversing is performed by moving the workpiece in the machining feed direction (that is, the X-axis direction or the axial direction A) after the cutting blade 26 is cut into the workpiece. This is called a traverse cut.

  In this other embodiment, the cutting depth of the cutting blade 26 is reduced as compared with the above-described embodiment, and the length in the axial direction A of each of the slits 15a, 15b and 15c is adjusted by traverse cutting.

  In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented without departing from the scope of the object of the present invention. For example, although the slit nozzle 11 of the above-mentioned embodiment injects the air E, when using the slit nozzle 11 as a washing | cleaning liquid injection nozzle, the slit nozzle 11 may inject liquids, such as water.

  Even when the slit nozzle 11 ejects a liquid such as water, as described above, it is possible to obtain an advantageous effect that the resistance to the pressure of the liquid is increased and the width D of each slit is difficult to expand.

11 slit nozzle 13 pipe material 13a shaft center 13b outer side surface 13c inner side surface 13d side wall portion 15a, 15b, 15c slit 17a, 17b, 17c, 17d remaining portion (remaining portion)
20 Cutting means 22 Spindle 24 Blade mount 26 Cutting blade 26a Cutting blade 26b Base 28 Cutting fluid supply nozzle 28a Injection port 30 Jig 32 Chuck table 32a Holding surface 32b Porous plate 32c Flow path 41 Slit nozzle 43 Pipe material 45 Slit A Axis Center direction B Height direction C Width direction D Width E Air F Thickness G Cutting fluid

Claims (3)

A method of manufacturing a slit nozzle that ejects fluid from a plurality of slits having a predetermined width,
A cutting blade preparation step of preparing a cutting blade having a cutting blade having a thickness corresponding to the predetermined width of the slit;
A pipe material preparation step for preparing a tubular pipe material;
The cutting blade is positioned along the axial direction of the pipe material, the cutting blade of the cutting blade is cut into the pipe material from outside in the radial direction of the pipe material, and the cutting blade of the cut blade is cut. A first slit forming step of forming a first slit long in a direction orthogonal to the predetermined width by pulling a cutting blade out of the pipe material;
After the first slit forming step, a moving step of relatively moving the cutting blade and the pipe material along the axial direction;
After the moving step, the cutting blade is positioned along the axial direction of the pipe material, and the cutting blade of the cutting blade is cut into the pipe material from outside in the radial direction of the pipe material. A second slit that draws the cutting blade of the cutting blade from the pipe material and forms a second slit so as to be discontinuous with respect to the first slit on an extension line in the lengthwise direction of the first slit. Forming steps;
A method of manufacturing a slit nozzle, comprising:   2. The method of manufacturing a slit nozzle according to claim 1, wherein the predetermined width of the first slit and the second slit is not less than 30 μm and not more than 200 μm. A slit nozzle that ejects fluid from a plurality of slits provided in a cylindrical pipe material,
A first slit and a second slit provided in a side wall portion of the pipe material along the axial direction of the pipe material;
A remaining portion that is provided between the first slit and the second slit and is a part of the side wall portion of the pipe material;
A slit nozzle characterized in that the length of the remaining portion in the axial direction is shortened from the axial center of the pipe material toward the outside in the radial direction of the pipe material.