JP2019200959A - Flash lamp irradiation processing device of vuv light - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable an arrangement with a small inductance even when a plurality of capacitors are connected in parallel. A lamp lighting chamber (3) and a capacitor chamber (5) are composed of independent housings. An O-ring is provided on the partition wall 21 side of the partition wall 21 to prevent ozone from entering. Therefore, the VUV light from the lamp lighting chamber 3 can be blocked by the partition wall 21, and it is not necessary to introduce an inert gas for preventing ozone generation in the lamp lighting chamber 3. A plurality of capacitors 31 are arranged in the capacitor chamber 5 in the lamp arrangement direction and in a direction orthogonal to the lamp arrangement direction. Therefore, it is possible to shorten the wirings 41 and 43 connected to both electrodes of the lamp 11. [Selection diagram] Fig. 4

Description

  The present invention relates to a flash lamp irradiation processing apparatus for VUV light, and more particularly to the arrangement of a plurality of capacitors.

  Patent Document 1 discloses a flash lamp irradiation processing apparatus for VUV light that irradiates a workpiece with VUV (vacuum ultraviolet) light.

  In the apparatus of Patent Document 1, a barge BOX is provided in a housing (see FIG. 5 of the publication). Barge BOX is supplied with an inert gas to prevent the generation of ozone. Thereby, it can prevent that the capacitor | condenser containing organic resin, a trigger circuit, etc. deteriorate with ozone.

JP 2015-126044

  The inventor studied to increase the capacity of the capacitor in order to enable higher output irradiation of the above-described VUV light flash lamp irradiation processing apparatus.

  However, in order to increase the capacity, the following problems must be solved.

  1) Since the upper limit of the capacitor used in the short arc flash lamp is 70 μF at most, the discharge energy is about several joules. On the other hand, in order to release discharge energy of about 50 joules, it is necessary to prepare a capacitor of about 400 μF. In this case, it can be solved by connecting about 4 to 6 conventional capacitors of about 70 μF in parallel, but these capacitors must be arranged close to the lamp.

  2) When the discharge energy increases, the deterioration rate of the capacitor increases and the replacement frequency increases. Therefore, it is necessary to facilitate the replacement work of the capacitor. This is particularly noticeable when a plurality of capacitors are used.

  3) When the discharge energy increases, the emitted VUV light also becomes stronger. Such VUV light degrades the organic resin used in capacitors, coils and the like.

  An object of the present invention is to solve the above-mentioned conflicting problems and to provide a VUV light flash lamp irradiation processing apparatus in which a plurality of capacitors can be arranged close to a lamp even when capacitors are connected in parallel.

  It is another object of the present invention to provide a flash lamp irradiation processing apparatus for VUV light that can be easily replaced and can be prevented from being deteriorated by VUV light.

  1) A VUV light flash lamp irradiation processing apparatus according to the present invention includes a short arc flash lamp that emits VUV light with a cathode and an anode facing each other, a capacitor unit that supplies power to the short arc flash lamp, and the short arc flash lamp And a VUV light flash lamp irradiation processing apparatus comprising a storage housing for storing the capacitor unit, wherein the short arc flash lamp and the capacitor unit are stored in a space separated by a partition wall. The partition wall forms a lamp storage part and a capacitor part storage part, and the short arc flash lamp is held in the lamp storage part with the direction of a straight line connecting the cathode and the anode as a lamp arrangement direction. And the capacitor section is composed of a plurality of capacitors. And the positive side connection for electrically connecting the positive side of the plurality of capacitors, wherein the positive side of the plurality of capacitors is further stored so that at least a part of the plurality is arranged in the lamp arrangement direction. A conductor, a minus side connecting conductor for electrically connecting minus sides of the plurality of capacitors, a reflection mirror part for reflecting the irradiation light of the short arc flash lamp as parallel light in the lamp arrangement direction, and a lead rod end of the cathode From the vicinity of the part, the first side of the cathode side wire passing through the partition wall so as to be substantially orthogonal and connected to the negative side connection conductor, and passing through the partition wall so as to be substantially orthogonal from the vicinity of the end portion of the lead rod of the anode A first anode-side wiring connected to the positive-side connecting conductor, a lamp-side opening / closing part provided on the opposite side of the partition wall in the lamp housing part, the condenser A capacitor part side opening / closing part provided on the opposite side of the partition wall in the part storage part, wherein the plus side connection conductor and the minus side connection conductor are more inductive than the cathode side first wiring and the anode side first wiring. Is small.

  Therefore, it is possible to provide a VUV light flash lamp irradiation processing apparatus in which a plurality of capacitors can be arranged close to a lamp even when capacitors are connected in parallel.

  2) In the flash lamp irradiation processing apparatus for VUV light according to the present invention, the plurality of capacitors in the capacitor section are arranged on the plane parallel to the partition walls in the lamp arrangement direction and the direction orthogonal thereto. Therefore, even when capacitors are connected in parallel, a plurality of capacitors can be arranged close to the lamp.

  3) In the flash lamp irradiation processing apparatus for VUV light according to the present invention, the plus side connecting conductor and the minus side connecting conductor are configured independently for each capacitor and are on a plane parallel to the partition wall. Are the anode-side second wiring and the cathode-side second wiring arranged in FIG. Therefore, it is possible to provide a VUV light flash lamp irradiation processing apparatus in which the capacitor can be easily replaced.

  4) A VUV light flash lamp irradiation processing apparatus according to the present invention includes a short arc flash lamp that emits VUV light with a cathode and an anode arranged opposite to each other, a capacitor unit that supplies power to the short arc flash lamp, and the short arc flash lamp And a VUV light flash lamp irradiation processing apparatus comprising a storage housing for storing the capacitor unit, wherein the short arc flash lamp and the capacitor unit are stored in a space separated by a partition wall. The partition wall forms a lamp storage part and a capacitor part storage part, and the short arc flash lamp is held in the lamp storage part with the direction of a straight line connecting the cathode and the anode as a lamp arrangement direction. And the capacitor section is composed of a plurality of capacitors. In addition, the capacitor is stored in the capacitor unit storage unit so that at least a part of the plurality is arranged in the lamp arrangement direction, and further, the partition is substantially orthogonal from the vicinity of the end of the lead rod of the cathode. The cathode side wiring that passes through and is electrically connected to the plurality of capacitors, from the vicinity of the end portion of the lead rod of the anode, passes through the partition so as to be substantially orthogonal, and is electrically connected to the plurality of capacitors. Wiring on the anode side.

  Therefore, it is possible to provide a VUV light flash lamp irradiation processing apparatus in which a plurality of capacitors can be arranged close to a lamp even when capacitors are connected in parallel.

  5) A VUV light flash lamp irradiation processing apparatus according to the present invention includes: A) a lamp storage portion for storing a short arc flash lamp in which a cathode and an anode are opposed to each other and emitting VUV light; and B) a capacitor portion below. A capacitor unit storage unit for storing, b1) a capacitor unit for supplying electric power to the short arc flash lamp, and a CUV flash lamp irradiation treatment apparatus comprising: D) the short arc flash lamp and the capacitor unit; Is stored in a space separated by a partition wall, and the lamp storage unit and the capacitor unit storage unit are formed by the partition wall, and E) a short arc flash lamp stored in the lamp storage unit is A direction of a straight line connecting the cathode and the anode is a lamp arrangement direction, and is held in the lamp storage unit, and F) the capacitor unit A plurality of capacitors, and at least some of the plurality are stored in the capacitor unit storage portion so as to be arranged in the lamp arrangement direction, and further, G) a lead rod end of the cathode From the vicinity of the part, the wiring on the cathode side that passes through the partition substantially orthogonally and is electrically connected to the plurality of capacitors, H) From the vicinity of the end of the lead rod of the anode, the partition is substantially orthogonal And wiring on the anode side that passes through and is electrically connected to the plurality of capacitors.

  Therefore, it is possible to provide a VUV light flash lamp irradiation processing apparatus in which a plurality of capacitors can be arranged close to a lamp even when capacitors are connected in parallel.

  Terms used in this specification will be described.

  The “anode-side wiring” corresponds to the anode-side first wiring 41 and the copper bus bar 39a in the first embodiment. The “cathode side wiring” corresponds to the cathode side first wiring 43 and the copper bus bar 39b in the first embodiment.

  The “plus side connection conductor” corresponds to the copper bus bar 39a in the first embodiment and the anode side second wiring 81 in the second embodiment. The minus side connection conductor corresponds to the copper bus bar 39b in the first embodiment, and corresponds to the cathode side second wiring 82 in the second embodiment.

1 is an external perspective view of a flash lamp irradiation processing apparatus 1 according to the present invention. It is the front view which opened the door 4 of the lamp lighting chamber 3. FIG. It is the front view which opened the door 6 of the capacitor | condenser chamber 5. FIG. It is a side view which shows the state which removed the side wall 8 in FIG. It is a figure for demonstrating the relationship between the wiring which connects a capacitor | condenser and a lamp, and a partition. 3 is a circuit diagram for lighting the flash lamp 10. FIG. The modified embodiment which does not employ | adopt a copper bus bar is shown. It is a figure which shows the depth direction in FIG.

  FIG. 1 shows an external perspective view of a flash lamp irradiation processing apparatus 1 according to the present invention. The flash lamp irradiation processing apparatus 1 includes a housing 2 having doors 4 and 6 that can be freely opened and closed. As will be described later, the casing 2 is separated by a partition wall, so that a lamp lighting chamber 3 and a capacitor chamber 5 are configured.

  A lock mechanism is provided between the door 4 and the housing 2 so that the locked state can be maintained. The same applies to the door 6.

  FIG. 2 shows the lamp lighting chamber 3 with the lock mechanism removed and the door 4 opened. The lamp lighting chamber 3 includes a flash-type short arc flash lamp 11, a reflection ellipse mirror 13, a holder 17 that holds the short arc flash lamp 11 and the reflection ellipse mirror 13, a lab jack 15 that holds a workpiece, and a holder 17. The mounting plate 19 to be held is stored.

  In this embodiment, the short arc flash lamp 11 is arranged vertically (the cathode side is the lower side and the anode side is the upper side). That is, the short arc flash lamp 11 is held in the lamp lighting chamber 3 so that the direction of the straight line connecting the cathode and the anode is the lamp arrangement direction α, and the lamp arrangement direction α is the vertical direction. The mounting plate 19 is screwed to the partition wall 21 as will be described later.

  FIG. 3 shows the capacitor chamber 5 with the door 6 opened. The capacitor chamber 5 includes a mounting plate 29, a capacitor portion 32 composed of a plurality of capacitors 31, a trigger coil 33, a multi-circuit energy monitor 35, and a diode 37.

  The capacitor part 32 is arranged in a matrix with six capacitors 31 in total, three vertically and two horizontally. Each capacitor 31 is connected in parallel by a copper bus bar 39.

  FIG. 4 shows a state where the side wall 8 in FIG. 1 is removed in order to explain the state where the lamp lighting chamber 3 and the capacitor chamber 5 are separated by the partition wall 21.

  Mounting plates 19 and 29 are screwed to the partition wall 21 (not shown). The anode-side first wiring 41, the cathode-side first wiring 43, and the trigger wire wiring 45 pass through the partition wall 21.

  The relationship between the anode side first wiring 41, the cathode side first wiring 43, the trigger wire wiring 45, and the partition wall 21 will be described with reference to FIG. This figure is an enlarged view showing only the necessary part of FIG. The anode-side distribution first line 41 includes a covered electric wire 51, a glass tube 52, and a covered electric wire 53. The reason for adopting the glass tube is as follows. Ozone is generated in the lamp lighting chamber 3 as will be described later. This is because when the covered electric wire 53 deteriorates, there is a possibility that electric leakage occurs in the mounting plates 19 and 29. Similarly, the cathode-side first wiring 43 includes a covered electric wire 61, a glass tube 62, and a covered wire 63.

  The trigger wire wiring 45 includes a covered electric wire 71, a glass tube 72, a covered electric wire 74, a metal connector 77, and a glass fiber covered wire 73.

  The reason why the trigger wire wiring 45 is made of a glass fiber coated wire is as follows. When the flash lamp is turned on, a high voltage of 10 to 30 kV is applied to the trigger wire, and therefore it is necessary to provide an insulating coating so as not to discharge to other places. Therefore, a glass fiber covered electric wire that is less susceptible to ozone degradation than a silicon covered electric wire is used.

  The thin line is configured because the current value flowing through the flash lamp electrode wiring is several thousand A or more, whereas the current value flowing through the trigger line is as low as several hundred mA. In addition, as long as it has ozone resistance, heat resistance, and voltage resistance, the covered electric wire of another material may be sufficient.

  The glass tubes 52, 62, 72 pass through the mounting plates 19, 29 and the partition wall 21. Further, O-rings 54, 64, 74 of fluororesin processing coating are provided on the capacitor chamber 5 side of the partition wall 21 in order to prevent entry of harmful gases such as ozone.

  In the present embodiment, the partition wall 21 is formed by the rear surfaces 21a and 21b of the two casings constituting the lamp lighting chamber 3 and the capacitor chamber 5, respectively. In this manner, the lamp lighting chamber 3 and the capacitor chamber 5 are spatially independent by configuring with different housings. Therefore, the VUV light from the lamp lighting chamber 3 can be blocked by the partition wall 21. Further, even if harmful gas is generated in the lamp lighting chamber 3, the glass tube that penetrates the partition wall 21 is provided with an O-ring so that the capacitor chamber 5 is not affected by the generated gas. Therefore, no harmful gas flows into the capacitor chamber 5.

  As described above, the partition wall 21 may be provided in one housing instead of two housings, and thereby the lamp lighting chamber 3 and the capacitor chamber 5 may be divided.

  Further, the ozone generated in the lamp chamber 3 is also prevented from flowing into the capacitor chamber 5 by the partition wall 21, and deterioration of the capacitor 31 and the resin-coated electric cable can be prevented.

  In the present embodiment, a plurality of capacitors 31 are arranged in the capacitor chamber 5 in the lamp arrangement direction α and in a direction orthogonal thereto. Therefore, the wiring connected to both poles of the short arc flash lamp 11 can be shortened. In addition, since the plurality of capacitors are connected by the copper bus bar 39 having a low resistance, the inductance by the copper bus bar 39 has almost no influence.

The short arc flash lamp 11 is held in the lamp lighting chamber 3 with the direction of the straight line connecting the cathode and the anode as the lamp arrangement direction α, and the capacitor portion 32 is composed of a plurality of capacitors 31, At least a part of the capacitors is stored in the capacitor chamber 5 so as to be arranged in parallel with the lamp arrangement direction α. Further, the cathode-side first wiring 61 passes through the partition wall 29 from the vicinity of the end of the lead rod of the cathode of the short arc flash lamp 11 so as to be substantially orthogonal to each other and is arranged in parallel with the lamp arrangement direction α. Electrically connected with,
Also, the anode-side first wiring 41 passes through the partition wall 29 from the vicinity of the end portion of the lead rod of the anode so as to be substantially orthogonal, and is arranged in parallel with the lamp arrangement direction α via the copper bus bar 39. It is electrically connected to the capacitor.

  As described above, even when a plurality of capacitors are connected in parallel, the anode-side first wiring 41 and the cathode-side first wiring 43 can be made as short as possible, so that the inductance can be lowered.

  In this embodiment, the inductance based on the wiring connecting the negative anode of the short arc flash lamp 11 and both terminals of the capacitor and the impedance in the lamp is set to 5 μH or less. With such a setting, the peak current of the flash discharge becomes extremely large, and the flash lamp and the capacitor are used under severe conditions. The configuration of the present invention is significant when lighting under such conditions.

  Further, the plurality of capacitors 31 constituting the capacitor portion 32 are arranged on the surface of the mounting plate 29 arranged substantially parallel to the partition wall 21 in the lamp arrangement direction α or a direction orthogonal thereto. Therefore, the replacement of the capacitor 31 is facilitated by providing the door 6.

  Although the lighting mechanism of the short arc flash lamp 11 in this embodiment is not particularly different from that of the conventional trigger wire type short arc flash lamp, it will be briefly described.

  As shown in FIG. 6, the present embodiment includes two circuits, a lamp lighting circuit 91 and a trigger circuit 93. The lamp lighting circuit 91 is applied with a predetermined voltage from a direct-current high-voltage power supply, and thereby the capacitor 98 is charged with energy. The trigger circuit 93 applies a high voltage to the trigger wire 97 stretched along the envelope outside the lamp by the trigger coil 95. As a result, the sealed gas inside the short arc flash lamp 11 is broken down, and a spark streamer along the trigger line 97 is generated between the electrodes inside the short arc flash lamp 11. When dielectric breakdown occurs inside the short arc flash lamp 11, the energy charged in the capacitor 98 is supplied to the short arc flash lamp 11.

  When the charged energy is supplied to the capacitor 98, main discharge is started, and electrons and ions increase with time. As a result, the plasma flow grows greatly and the discharge current increases rapidly. At this time, the electrode is also gradually heated under certain conditions to start thermionic emission from the cathode tip and the electron emission from the cathode tip due to the photoelectric effect, and at some point near the inner wall of the arc tube along the trigger line 97 The curved main discharge shifts to a straight main discharge between the electrode tips.

Note that the total inductance (L) of the wiring connecting the capacitor terminal and the negative anode of the flash lamp and the lamp (L) can be obtained from the actual measurement of the current waveform from the formula of pulse half-value width T = 2.1 (LC) ^1/2. Good.

  FIG. 7 shows a second embodiment. In the first embodiment, the terminals of a plurality of capacitors are connected by copper bus bars. However, in this embodiment, the anode-side second wiring 81 and the cathode-side arranged in a plane substantially parallel to the partition wall 21 in the capacitor chamber 5. The second wiring 82 is connected. This eliminates the need for a copper bus bar and facilitates replacement of the capacitor. This is because, when the capacitor is replaced, if only the terminal of the capacitor to be replaced is removed, the capacitor to be replaced can be removed without removing the anode-side second wiring and the cathode-side second wiring of the other capacitors.

  FIG. 8 shows an enlarged side view from the direction of arrow β in FIG. In this way, the anode-side first wiring 41 and the anode-side second wiring 81 are connected to the tip of the support column 83, and the cathode-side first wiring 43 and the cathode-side second wiring 82 are connected to the tip of the support column 84, respectively. .

  In the present embodiment, the anode-side second wiring 81 and the cathode-side second wiring 82 are also connected in a substantially straight line. Therefore, in each capacitor, the wiring in the capacitor chamber and the wiring to the lamp cathode are made as a whole. Since it can be shortened, the inductance as a whole can be reduced.

  As described above, the holes for the anode-side first wiring and the cathode-side first wiring from the lamp lighting chamber are positioned between the capacitors arranged in a matrix of 3 × 2 in the vertical direction, thereby lengthening the wiring. Without being connected to each capacitor in the capacitor chamber 5.

  In the present embodiment, six capacitors are connected in parallel, but the present invention is not limited to this, and may be increased or decreased.

  In this case, since the anode-side first wiring and the cathode-side first wiring are arranged apart from each other in the lamp arrangement direction α of the short arc flash lamp 11, the holes for the wiring are arranged so as to be surrounded by capacitors arranged in a matrix. That's fine. As a typical example, 2 * 2 4 capacitors and 2 * 4 8 capacitors can be arranged in parallel.

  In the present embodiment, the case where the lamp arrangement direction α of the short arc flash lamp 11 is the vertical direction has been described, but the same applies to a flash lamp irradiation processing apparatus in which the lamp arrangement direction α is the horizontal direction. be able to.

  Details of the short arc flash lamp employed in the present embodiment will be described. A hydrous synthetic quartz glass tube having an outer diameter of 11 mm and an inner diameter of 8 mm was swelled into an ellipsoid having a short axis of 10 mm and a long axis of 20 mm with an oxyhydrogen burner to form a sealed body.

The shape of each of the cathode and the anode was a cylindrical shape having a diameter of 6 mm and a length of 6 mm, and each tip was cut into a conical shape at an angle of 130 degrees. The anode material was 2% lanthanum oxide-doped tungsten, and the cathode used was a press-sintered electrode obtained by mixing Ba ₃ WO ₆ powder and tungsten powder, press-molding, and then sintering at 2000 ° C. for 3 hours.

  A φ2 mm tungsten core wire is joined to both electrodes via nickel, and the core wire and the end of the side tube are joined together with GE No. One glass was used for step joining. The distance between the electrodes was 10 mm, the sealed gas was Xe, and the sealed pressure was 60,000 Pa. The power consumption is about 200 to 500 W, but is not limited to this.

Further, in the present embodiment, the case where a trigger wire type flash type short arc flash lamp is used has been described, but the present invention can also be applied to a trigger probe method.

DESCRIPTION OF SYMBOLS 1 ... Flash lamp irradiation processing apparatus 2 ... Case 3 ... Lamp lighting chamber 4 ... Door 5 ... Capacitor chamber 6 ... Door 8 ... Side wall DESCRIPTION OF SYMBOLS 11 ... Short arc flash lamp 13 ... Reflection ellipse mirror 15 ... Lab jack 17 ... Holder 19 ... Mounting plate 29 ... Mounting plate 31 ... Capacitor 33 ... Trigger coil 35 ... Multi-circuit energy monitor 37 ... Diode 39a ... Copper bus bar 39b ... Copper bus bar 41 ... Anode-side first wiring 43 ... Cathode-side first wiring 45 ... Trigger wire wiring 51 ··· covered wire 52 ··· glass tube 53 ··· bare wire 54 ··· O ring 61 ··· covered wire 62 ··· glass tube 63 ··· Bare wire 64 ... O-ring 71 ... Coated wire 72 ··· Glass tube 73 ··· Glass fiber coated wire 74 ··· O-ring 81 ··· Anode-side second wire 82 ··· Cathode-side second wire 83 ··· Column 84 ... Still 91 ... Lamp lighting circuit 93 ... Trigger circuit 95 ... Trigger coil 97 ... Trigger wire 98 ... Condenser

Claims (5)

A short arc flash lamp that emits VUV light, with the cathode and anode facing each other.
A capacitor for supplying power to the short arc flash lamp;
A housing for storing the short arc flash lamp and the capacitor unit;
A VUV light flash lamp irradiation processing apparatus comprising:
The short arc flash lamp and the capacitor unit are stored in a space separated by a partition wall, and a lamp storage unit and a capacitor unit storage unit are formed by the partition wall,
The short arc flash lamp is held in the lamp storage unit with the direction of a straight line connecting the cathode and the anode as a lamp arrangement direction,
The capacitor unit is composed of a plurality of capacitors, and is stored in the capacitor unit storage unit so that at least a part of the plurality is arranged in the lamp arrangement direction,
further,
A positive connection conductor for electrically connecting the positive sides of the plurality of capacitors;
A negative side connection conductor for electrically connecting the negative side of the plurality of capacitors, a reflection mirror part for reflecting the irradiation light of the short arc flash lamp as parallel light in the lamp arrangement direction,
From the vicinity of the end portion of the lead rod of the cathode, the cathode-side first wiring that passes through the partition so as to be substantially orthogonal to the negative-side connection conductor;
From the vicinity of the end of the lead rod of the anode, the anode-side first wiring that passes through the partition so as to be substantially orthogonal and is connected to the plus-side connection conductor;
A lamp-side opening / closing part provided on the opposite side of the partition wall in the lamp storage part,
A capacitor part side opening / closing part provided on the opposite side of the partition wall in the capacitor part storage part,
With
The plus side connecting conductor and the minus side connecting conductor have a smaller inductance than the cathode side first wiring and the anode side first wiring;
VUV light flash lamp irradiation processing equipment. In the flash lamp irradiation processing apparatus of the VUV light of Claim 1,
The plurality of capacitors in the capacitor unit are disposed on a plane parallel to the partition wall in the lamp disposition direction and a direction orthogonal thereto.
VUV light flash lamp irradiation processing equipment. In the flash lamp irradiation processing apparatus of the VUV light of Claim 1,
The plus side connection conductor and the minus side connection conductor are configured independently for each capacitor, and are anode side second wiring and cathode side second wiring wiring arranged on a plane parallel to the partition wall. There is,
VUV light flash lamp irradiation processing equipment. A short arc flash lamp that emits VUV light, with the cathode and anode facing each other.
A capacitor for supplying power to the short arc flash lamp;
A housing for storing the short arc flash lamp and the capacitor unit;
A VUV light flash lamp irradiation processing apparatus comprising:
The short arc flash lamp and the capacitor unit are stored in a space separated by a partition wall, and a lamp storage unit and a capacitor unit storage unit are formed by the partition wall,
The short arc flash lamp is held in the lamp storage unit with the direction of a straight line connecting the cathode and the anode as a lamp arrangement direction,
The capacitor unit is composed of a plurality of capacitors, and is stored in the capacitor unit storage unit so that at least a part of the plurality is arranged in the lamp arrangement direction,
further,
From the vicinity of the end portion of the lead rod of the cathode, wiring on the cathode side passing through the partition so as to be substantially orthogonal and electrically connected to the plurality of capacitors,
From the vicinity of the end of the lead rod of the anode, wiring on the anode side that passes through the partition so as to be substantially orthogonal and is electrically connected to the plurality of capacitors,
A VUV light flash lamp irradiation processing apparatus characterized by comprising: A) A lamp storage unit for storing a short arc flash lamp that emits VUV light, with the cathode and anode facing each other.
B) Capacitor storage part for storing the following capacitor part,
b1) a capacitor unit for supplying power to the short arc flash lamp,
C) a VUV light flash lamp irradiation processing apparatus comprising:
D) The short arc flash lamp and the capacitor unit are stored in a space separated by a partition wall, and the lamp storage unit and the capacitor unit storage unit are formed by the partition wall,
E) The short arc flash lamp stored in the lamp storage unit is held in the lamp storage unit with the direction of the straight line connecting the cathode and the anode as the lamp arrangement direction,
F) The capacitor unit is composed of a plurality of capacitors, and is stored in the capacitor unit storage unit so that at least a part of the plurality is arranged in the lamp arrangement direction,
further,
G) From the vicinity of the end of the lead rod of the cathode, wiring on the cathode side passing through the partition so as to be substantially orthogonal and electrically connected to the plurality of capacitors,
H) From the vicinity of the end of the lead rod of the anode, the anode side wiring that passes through the partition so as to be substantially orthogonal and is electrically connected to the plurality of capacitors,
VUV light flash lamp irradiation processing apparatus characterized by comprising I).

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