JP2019132688A - Physical quantity sensor, physical quantity sensor device, composite sensor device, inertia measuring device, moving body positioning device, portable electronic apparatus, electronic apparatus, and moving body - Google Patents

Abstract

Provided are a physical quantity sensor, a physical quantity sensor device, a composite sensor device, an inertial measurement device, a mobile body positioning device, a portable electronic device, an electronic device, and a mobile body that can reduce a decrease in physical quantity detection characteristics due to quadrature. . A physical quantity sensor includes a movable body and a detection electrode arranged to face the movable body. The vibration of the movable body has a drive vibration mode in which the vibration in the Z-axis direction and the vibration in the X-axis direction are combined. In the drive vibration mode, the movable body is positioned on the negative side in the X-axis direction with respect to the reference position. And the 1st state located in the Z-axis direction plus side and the 2nd state where the movable body is located on the X-axis direction plus side with respect to the reference position and located on the Z-axis direction minus side are repeated. The main surface of the detection electrode has a plurality of surfaces arranged along the X-axis direction, and the surface on the plus side of the surface adjacent to the X-axis direction among the plurality of surfaces is the minus of the surface adjacent to the X-axis direction. The separation distance from the movable body is larger than the surface on the side. [Selection] Figure 5

Description

  The present invention relates to a physical quantity sensor, a physical quantity sensor device, a composite sensor device, an inertial measurement device, a mobile body positioning device, a portable electronic device, an electronic device, and a mobile body.

  An angular velocity sensor described in Patent Document 1 includes a movable drive electrode, a fixed drive electrode that vibrates the movable drive electrode, a movable detection electrode connected to the movable drive electrode via a vibration amount amplification unit, and a movable detection electrode. And a fixed detection electrode arranged opposite to each other. In the angular velocity sensor having such a configuration, an electrostatic attractive force is generated between the movable drive electrode and the fixed drive electrode to vibrate the movable detection electrode and the movable detection electrode in the Y-axis direction (this vibration mode is referred to as “drive vibration”). When the angular velocity around the X-axis is applied in this state, the movable detection electrode vibrates in the Z-axis direction due to the Coriolis force (this vibration mode is referred to as the “detection vibration mode”) and changes accordingly. The angular velocity around the X axis can be detected based on the electrostatic capacitance between the movable detection electrode and the fixed detection electrode.

Such an angular velocity sensor can be formed using, for example, a silicon deep groove etching technique (Bosch process) described in Patent Document 2. The deep groove etching technology of silicon means that the etching process and the sidewall protective film forming process are alternately switched by alternately switching the gas of SF ₆ (etching gas) and C ₄ F ₈ (side wall protective film forming gas). This is a technique for forming a deep groove (through hole) in silicon by repeating the above. According to such a deep groove etching technique, a groove having a high aspect ratio can be formed with excellent verticality of the groove side surface.

JP 2009-175079 A JP 7-503815 A

  However, when the deep groove etching technique described in Patent Document 2 is used, for example, depending on the position in the chamber of the wafer to be etched, the through-holes are inclined in an oblique direction with respect to the normal direction of the etching surface of the wafer to be etched. May be formed. Thus, if the through-hole is formed obliquely, the cross-sectional shape of the vibration amount amplifying unit is deviated from a rectangle (for example, a parallelogram), and the movable detection electrode is in the Y-axis direction in the drive vibration mode. In addition to vibration in the Z-axis direction, the angular velocity detection characteristics are degraded. Note that the vibration in the Z-axis direction (unnecessary vibration) of the movable detection electrode in the drive vibration mode is also referred to as “quadrature”, and the noise signal resulting from this quadrature is also referred to as “quadrature signal”. Yes.

  An object of the present invention is to provide a physical quantity sensor, a physical quantity sensor device, a composite sensor device, an inertial measurement device, a mobile body positioning device, a portable electronic device, an electronic device, and a mobile body that can reduce a decrease in physical quantity detection characteristics due to quadrature. Is to provide.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following inventions.

The physical quantity sensor of the present invention includes a movable body,
A detection electrode disposed opposite to the movable body;
Including
The direction in which the movable body and the detection electrode are arranged is a first direction,
When the direction orthogonal to the first direction is the second direction,
The vibration of the movable body has a drive vibration mode in which the vibration in the first direction and the vibration in the second direction are combined.
In the driving vibration mode,
A first state in which the movable body is located on one side in the second direction with respect to a reference position and located on the opposite side of the detection electrode in the first direction;
A second state in which the movable body is located on the other side in the second direction with respect to the reference position and located on the detection electrode side in the first direction;
Is repeated,
The main surface of the detection electrode facing the movable body has a plurality of surfaces arranged along the second direction,
Of the plurality of surfaces, the surface on the other side of the surfaces adjacent in the second direction has a separation distance from the movable body larger than the surface on the one side of the surfaces adjacent in the second direction. It is large.
Thereby, the difference between the separation distance between the movable body and the detection electrode in the first state and the separation distance between the movable body and the detection electrode in the second state can be reduced. For this reason, the quadrature signal can be reduced, and the physical quantity sensor can reduce the deterioration of the physical quantity detection characteristic due to the quadrature.

In the physical quantity sensor of the present invention, the direction orthogonal to the first direction and the second direction is the third direction, and in a cross-sectional view viewed from the third direction,
Of the plurality of surfaces, an end located on the other side in the second direction of the surface on the most one side in the second direction and the second on the surface on the most other side in the second direction. It is preferable that a virtual line connecting the end located on the other side of the direction is parallel to the vibration direction of the movable body in the drive vibration mode.
Thereby, the difference between the separation distance between the movable body and the detection electrode in the first state and the separation distance between the movable body and the detection electrode in the second state can be further reduced.

In the physical quantity sensor according to the aspect of the invention, it is preferable that an inclination of the imaginary line with respect to the second direction is not less than 0.1 ° and not more than 3.0 °.
Thereby, the difference between the separation distance between the movable body and the detection electrode in the first state and the separation distance between the movable body and the detection electrode in the second state can be further reduced.

In the physical quantity sensor of the present invention, the number of the surfaces is preferably 3 or more and 10 or less.
Thereby, the quadrature signal can be sufficiently reduced, and the complication of the formation of the detection electrode can be sufficiently reduced.

In the physical quantity sensor of the present invention, when the shift amount in the first direction of the two surfaces adjacent in the second direction is D,
10 nm ≦ D ≦ 100 nm
It is preferable to satisfy this relationship.
Thereby, the number of surfaces of the main surface can be sufficiently increased, and the detection electrodes can be formed with high accuracy.

In the physical quantity sensor of the present invention, including a substrate facing the movable body,
The detection electrode is preferably provided on the substrate.
Accordingly, the detection electrode can be disposed to face the movable body with a simple configuration.

In the physical quantity sensor of the present invention, the substrate is preferably a glass substrate.
Thereby, finer processing of the substrate becomes possible, and the detection electrode can be formed with high accuracy.

In the physical quantity sensor of the present invention, when the direction orthogonal to the first direction and the second direction is the third direction,
It is preferable that the angular velocity around the detection axis along the third direction can be detected.
Thereby, it becomes a convenient physical quantity sensor.

The physical quantity sensor device of the present invention includes the physical quantity sensor of the present invention,
Circuit elements;
It is characterized by including.
Thereby, the physical quantity sensor device of the present invention can be enjoyed, and a highly reliable physical quantity sensor device can be obtained.

The composite sensor device of the present invention includes a first physical quantity sensor that is a physical quantity sensor of the present invention,
A second physical quantity sensor for detecting a physical quantity different from the first physical quantity sensor;
It is characterized by including.
Thereby, the effect of the physical quantity sensor of the present invention can be enjoyed, and a highly reliable composite sensor device can be obtained.

In the composite sensor device of the present invention, the first physical quantity sensor is a sensor capable of detecting angular velocity,
The second physical quantity sensor is preferably a sensor capable of detecting acceleration.
Thereby, it becomes a highly convenient composite sensor device.

The inertial measurement device of the present invention includes the physical quantity sensor of the present invention,
A control circuit for controlling driving of the physical quantity sensor;
It is characterized by including.
Thereby, the effect of the physical quantity sensor of the present invention can be enjoyed, and a highly reliable inertial measurement device can be obtained.

The mobile body positioning device of the present invention, the inertial measurement device of the present invention,
A receiving unit for receiving a satellite signal on which position information is superimposed from a positioning satellite;
An acquisition unit that acquires position information of the reception unit based on the received satellite signal;
Based on the inertial data output from the inertial measurement device, a calculation unit that calculates the posture of the moving body;
A calculation unit that calculates the position of the moving body by correcting the position information based on the calculated posture;
It is characterized by including.
Thereby, the effect of the inertial measurement device of the present invention can be enjoyed, and a highly reliable mobile body positioning device can be obtained.

The portable electronic device of the present invention includes the physical quantity sensor of the present invention,
A case containing the physical quantity sensor;
A processing unit housed in the case and processing output data from the physical quantity sensor;
A display unit housed in the case;
A translucent cover closing the opening of the case;
It is characterized by including.
Thereby, the effect of the physical quantity sensor of the present invention can be enjoyed, and a highly reliable portable electronic device can be obtained.

The portable electronic device of the present invention includes a satellite positioning system,
It is preferable to measure the movement distance and movement trajectory of the user.
This improves the convenience of the portable electronic device.

The electronic device of the present invention includes the physical quantity sensor of the present invention,
A control unit that performs control based on a detection signal output from the physical quantity sensor;
It is characterized by including.
Thereby, the effect of the physical quantity sensor of the present invention can be enjoyed, and a highly reliable electronic device can be obtained.

The moving body of the present invention includes the physical quantity sensor of the present invention,
A control unit that performs control based on a detection signal output from the physical quantity sensor;
A moving object comprising:
Thereby, the effect of the physical quantity sensor of this invention can be enjoyed and a reliable mobile body is obtained.

The moving body of the present invention includes at least one of an engine system, a brake system, and a keyless entry system,
Preferably, the control unit controls the system based on the detection signal.
Thereby, the system can be controlled with high accuracy.

It is a top view which shows the physical quantity sensor which concerns on 1st Embodiment of this invention. It is the sectional view on the AA line in FIG. It is a top view which shows the sensor element which the physical quantity sensor of FIG. 1 has. It is a figure which shows the voltage applied to the physical quantity sensor of FIG. FIG. 5 is a sectional view taken along line BB in FIG. 3. It is sectional drawing which shows a conventional structure and respond | corresponds to FIG. It is sectional drawing which shows the area | region C in FIG. It is sectional drawing which shows the area | region C in FIG. It is sectional drawing which shows the area | region C in FIG. It is sectional drawing which shows the area | region C in FIG. It is sectional drawing which shows the modification of the fixed detection electrode shown in FIG. It is sectional drawing which shows the modification of the fixed detection electrode shown in FIG. It is sectional drawing which shows the modification of the fixed detection electrode shown in FIG. It is sectional drawing which shows the physical quantity sensor device which concerns on 2nd Embodiment of this invention. It is a top view which shows the composite sensor device which concerns on 3rd Embodiment of this invention. It is sectional drawing of the composite sensor device shown in FIG. It is a disassembled perspective view which shows the inertial measurement apparatus which concerns on 4th Embodiment of this invention. It is a perspective view of the board | substrate which the inertial measurement apparatus shown in FIG. 17 has. It is a block diagram which shows the whole system of the mobile positioning device which concerns on 5th Embodiment of this invention. It is a figure which shows the effect | action of the mobile body positioning apparatus shown in FIG. It is a perspective view which shows the electronic device which concerns on 6th Embodiment of this invention. It is a perspective view which shows the electronic device which concerns on 7th Embodiment of this invention. It is a perspective view which shows the electronic device which concerns on 8th Embodiment of this invention. It is a top view which shows the portable electronic device which concerns on 9th Embodiment of this invention. FIG. 25 is a functional block diagram illustrating a schematic configuration of the portable electronic device illustrated in FIG. 24. It is a perspective view which shows the mobile body which concerns on 10th Embodiment of this invention.

  Hereinafter, a physical quantity sensor, a physical quantity sensor device, a composite sensor device, an inertial measurement device, a mobile body positioning device, a portable electronic device, an electronic device, and a mobile body of the present invention will be described in detail based on embodiments shown in the accompanying drawings.

<First Embodiment>
First, the physical quantity sensor according to the first embodiment of the invention will be described.

  FIG. 1 is a plan view showing a physical quantity sensor according to the first embodiment of the present invention. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a plan view showing a sensor element included in the physical quantity sensor of FIG. FIG. 4 is a diagram illustrating a voltage applied to the physical quantity sensor of FIG. 5 is a cross-sectional view taken along line BB in FIG. FIG. 6 shows a conventional configuration and is a cross-sectional view corresponding to FIG. 7 to 10 are cross-sectional views showing a region C in FIG. 11 to 13 are cross-sectional views showing modifications of the fixed detection electrode shown in FIG.

  In each figure, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. Also, the direction parallel to the X axis is “X axis direction (second direction)”, the direction parallel to the Y axis is “Y axis direction (third direction)”, and the direction parallel to the Z axis is “Z axis direction ( (First direction) ". Further, the arrow tip side of each axis is also referred to as “plus side”, and the opposite side is also referred to as “minus side”. Further, the Z axis direction plus side is also referred to as “upper”, and the Z axis direction minus side is also referred to as “lower”.

  In addition, in this specification, “orthogonal” intersects at an angle slightly inclined from 90 ° (for example, 90 ° ± 5 ° (85 ° to 95 °)) in addition to the case of intersecting at 90 °. Including cases. Specifically, when the X axis is inclined about ± 5 ° with respect to the normal direction of the YZ plane, when the Y axis is inclined about ± 5 ° with respect to the normal direction of the XZ plane, the Z axis is The case where it is inclined by about ± 5 ° with respect to the normal direction of the XY plane is also included in “orthogonal”.

  A physical quantity sensor 1 shown in FIG. 1 is an angular velocity sensor that can detect an angular velocity ωy about the Y axis. The physical quantity sensor 1 includes a substrate 2, a lid 3, and a sensor element 4.

  As shown in FIG. 1, the substrate 2 has a rectangular plan view shape. In addition, the substrate 2 has a recess 21 that opens to the upper surface. The recess 21 functions as an escape portion for preventing contact between the sensor element 4 and the substrate 2. The substrate 2 also has a plurality of mounts 221, 222, and 224 that protrude from the bottom surface of the recess 21. And the sensor element 4 is joined to the upper surface of these mounts 221, 222, and 224. Thereby, the sensor element 4 can be supported in a state in which contact with the substrate 2 is prevented.

  In addition, fixed detection electrodes 71 and 72 (detection electrodes) are disposed on the bottom surface of the recess 21. Moreover, the board | substrate 2 has a groove part opened on the upper surface, and wiring 73, 74, 75, 76, 77, 78 is arrange | positioned. Also, one end portions of the wirings 73, 74, 75, 76, 77, and 78 are exposed to the outside of the lid 3 and function as electrode pads P that are electrically connected to an external device.

  Such a substrate 2 is made of, for example, a glass material containing alkali metal ions (sodium ions), specifically, borosilicate glass such as Tempax glass (registered trademark) or Pyrex glass (registered trademark). A glass substrate can be used. However, the constituent material of the substrate 2 is not particularly limited, and a silicon substrate, a ceramic substrate, or the like may be used.

  As shown in FIG. 1, the lid 3 has a rectangular plan view shape. Moreover, as shown in FIG. 2, the cover body 3 has the recessed part 31 opened to the lower surface. The lid 3 is bonded to the upper surface of the substrate 2 so as to accommodate the sensor element 4 in the recess 31. A storage space S for storing the sensor element 4 is formed inside the cover 3 and the substrate 2. The storage space S is preferably in a reduced pressure state, particularly in a vacuum state. Thereby, viscous resistance decreases and the sensor element 4 can be vibrated efficiently.

  As such a lid 3, for example, a silicon substrate can be used. However, the lid 3 is not particularly limited, and for example, a glass substrate or a ceramic substrate may be used. Moreover, it does not specifically limit as a joining method of the board | substrate 2 and the cover body 3, What is necessary is just to select suitably according to the material of the board | substrate 2 and the cover body 3, For example, the joining surface activated by anodic bonding and plasma irradiation Examples include activation bonding for bonding together, bonding with a bonding material such as glass frit, diffusion bonding for bonding metal films formed on the upper surface of the substrate 2 and the lower surface of the lid 3, and the like. In the present embodiment, the substrate 2 and the lid 3 are bonded via a glass frit 39 (low melting point glass).

  The sensor element 4 is disposed in the storage space S and is joined to the upper surface of each mount 221, 222, 224. The sensor element 4 is formed by patterning a conductive silicon substrate doped with impurities such as phosphorus (P), boron (B), and arsenic (As) by a dry etching method (particularly, “Bosch process”). Can be formed.

  Hereinafter, the configuration of the sensor element 4 will be described with reference to FIG. Hereinafter, a straight line that intersects the center O of the sensor element 4 and extends in the Y-axis direction in a plan view from the Z-axis direction is also referred to as a “virtual straight line α”.

  As shown in FIG. 3, the shape of the sensor element 4 is symmetric with respect to the virtual straight line α. Such a sensor element 4 has two drive parts 41A and 41B arranged on both sides of the virtual straight line α. The drive unit 41A includes a comb-like movable drive electrode 411A and a fixed drive electrode 412A that has a comb-like shape and is arranged to mesh with the movable drive electrode 411A. Similarly, the drive unit 41B includes a comb-like movable drive electrode 411B, and a fixed drive electrode 412B that has a comb-like shape and is arranged to mesh with the movable drive electrode 411B.

  The fixed drive electrodes 412A and 412B are bonded to the upper surface of the mount 221 and fixed to the substrate 2, respectively. The fixed drive electrodes 412A and 412B are electrically connected to the wiring 74, respectively.

  In addition, the sensor element 4 includes four fixed portions 42A disposed around the drive portion 41A and four fixed portions 42B disposed around the drive portion 41B. The fixing portions 42 </ b> A and 42 </ b> B are bonded to the upper surface of the mount 222 and fixed to the substrate 2. The sensor element 4 includes four drive springs 43A that connect the fixed portions 42A and the movable drive electrodes 411A, and four drive springs 43B that connect the fixed portions 42B and the movable drive electrodes 411B. ing.

  The sensor element 4 includes a detection unit 44A positioned between the drive unit 41A and the virtual straight line α, and a detection unit 44B positioned between the drive unit 41B and the virtual straight line α. The detection unit 44A includes a plate-shaped movable detection electrode 441A. Similarly, the detection unit 44B includes a plate-shaped movable detection electrode 441B. In addition, on the bottom surface of the recess 21, a fixed detection electrode 71 that faces the movable detection electrode 441 A and is electrically connected to the wiring 75, and a fixed detection that faces the movable detection electrode 441 B and is electrically connected to the wiring 76. A detection electrode 72 is disposed. When the physical quantity sensor 1 is driven, the capacitance Ca is formed between the movable detection electrode 441A and the fixed detection electrode 71, and the capacitance Cb is formed between the movable detection electrode 441B and the fixed detection electrode 72. The

  In addition, the sensor element 4 has a frame 48 located in the center (between the detection units 44A and 44B). The frame 48 has an “H” shape, and has a missing portion 481 located on the Y axis direction plus side and a missing portion 482 located on the Y axis direction minus side. And the fixing | fixed part 451 is arrange | positioned over the inside and outside of the defect | deletion part 481, and the fixation part 452 is arrange | positioned over the inside and outside of the defect | deletion part 482. FIG. Accordingly, the fixing portions 451 and 452 can be formed long in the Y-axis direction, and accordingly, the bonding area with the substrate 2 is increased, and the bonding strength between the substrate 2 and the sensor element 4 is increased. Further, the fixing portions 451 and 452 are electrically connected to the wiring 73, respectively.

  The sensor element 4 includes four detection springs 46A that connect the movable detection electrode 441A and the fixed portions 42A, 451, and 452, and four detection springs that connect the movable detection electrode 441B and the fixed portions 42B, 451, and 452. 46B. The sensor element 4 is positioned between the movable drive electrode 411A and the movable detection electrode 441A, and is positioned between the beam 47A that connects them, the movable drive electrode 411B, and the movable detection electrode 441B, and connects them. And a beam 47B. Hereinafter, an assembly of the movable drive electrode 411A, the movable detection electrode 441A, and the beam 47A is also referred to as “movable body 4A”, and an assembly of the movable drive electrode 411B, the movable detection electrode 441B, and the beam 47B is referred to as “movable body 4B”. Also say.

  In addition, the sensor element 4 has a frame 48 located in the center (between the detection units 44A and 44B). The sensor element 4 is positioned between the fixing portion 451 and the frame 48, and a frame spring 488 connecting them, and a frame spring 489 positioned between the fixing portion 452 and the frame 48 and connecting them. ,have.

  The sensor element 4 includes a connection spring 40A that connects the frame 48 and the movable detection electrode 441A, and a connection spring 40B that connects the frame 48 and the movable detection electrode 441B. The connection spring 40A supports the movable detection electrode 441A together with the detection spring 46A, and the connection spring 40B supports the movable detection electrode 441B together with the detection spring 46B. Thereby, the movable detection electrodes 441A and 441B can be supported in a more stable posture, and unnecessary vibration of the movable detection electrodes 441A and 441B can be reduced.

  For example, when the voltage V1 shown in FIG. 4 is applied to the movable bodies 4A and 4B via the wiring 73 and the voltage V2 shown in FIG. 4 is applied to the fixed drive electrodes 412A and 412B via the wiring 74, the voltage V1 acts between them. Due to the electrostatic attractive force, the movable body 4A and the movable body 4B vibrate in opposite phases so as to repeatedly approach and separate in the X-axis direction (drive vibration mode). When the angular velocity ωy is applied to the sensor element 4 in a state where the movable body 4A and the movable body 4B are oscillating in opposite phases in the X-axis direction, the movable detection electrodes 441A and 441B are moved in the Z-axis direction by Coriolis force. And the capacitances Ca and Cb change in accordance with this vibration (detection vibration mode). Therefore, the angular velocity ωy can be obtained based on changes in the capacitances Ca and Cb.

  In the detection vibration mode, the capacitance Cb decreases as the capacitance Ca increases, and conversely, the capacitance Cb increases as the capacitance Ca decreases. For this reason, a differential calculation (a signal corresponding to the magnitude of the capacitance Ca) and a detection signal (a signal corresponding to the magnitude of the capacitance Cb) obtained from the wiring 76 are obtained by differential calculation (a signal corresponding to the magnitude of the capacitance Ca). By performing the subtraction process (Ca-Cb), noise can be canceled and the angular velocity ωy can be detected with higher accuracy.

  Note that the voltages V1 and V2 are not particularly limited as long as the drive vibration mode can be excited. Further, in the physical quantity sensor 1 of the present embodiment, an electrostatic drive system that excites the drive vibration mode by electrostatic attraction is used, but the system that excites the drive vibration mode is not particularly limited. For example, the piezoelectric drive system In addition, an electromagnetic drive system using a Lorentz force of a magnetic field can be applied.

  The sensor element 4 includes monitor units 49A and 49B for detecting the vibration state of the movable bodies 4A and 4B in the drive vibration mode. The monitor unit 49A includes a comb-like movable monitor electrode 491A disposed on the movable detection electrode 441A, and fixed monitor electrodes 492A and 493A arranged in mesh with the movable monitor electrode 491A. Yes. Similarly, the monitor unit 49B includes a comb-like movable monitor electrode 491B arranged on the movable detection electrode 441B, and fixed monitor electrodes 492B and 493B arranged in mesh with the movable monitor electrode 491B. Have. In addition, the fixed monitor electrodes 492A, 493A, 492B, and 493B are each pulled out to the outside of the recess 21 and bonded to the upper surface of the substrate 2 and are fixed to the substrate 2.

  The fixed monitor electrodes 492A and 492B are electrically connected to the wiring 77, and the fixed monitor electrodes 493A and 493B are electrically connected to the wiring 78. When the physical quantity sensor 1 is driven, a capacitance Cc is formed between the movable monitor electrode 491A and the fixed monitor electrode 492A and between the movable monitor electrode 491B and the fixed monitor electrode 492B. A capacitance Cd is formed between the electrode 493A and between the movable monitor electrode 491B and the fixed monitor electrode 493B. When the movable bodies 4A and 4B vibrate in the X-axis direction in the drive vibration mode, the capacitances Cc and Cd change accordingly. Therefore, a detection signal is output based on changes in the capacitances Cc and Cd, and the vibration state of the movable bodies 4A and 4B can be detected based on the output detection signal.

  The vibration state (amplitude) of the movable bodies 4A and 4B detected by the outputs from the monitor units 49A and 49B is fed back to the drive circuit that applies the voltage V2 to the movable bodies 4A and 4B. The drive circuit changes the frequency of the voltage V2 and the duty ratio so that the amplitudes of the movable bodies 4A and 4B become target values. Thereby, movable body 4A, 4B can be vibrated efficiently, and the detection precision of angular velocity (omega) y improves.

  The sensor element 4 has been described above. As described above, the sensor element 4 can be formed by processing (patterning) a silicon substrate by a Bosch process. However, when the Bosch process is used, for example, the through hole is dug in an oblique direction inclined with respect to the vertical direction depending on the position in the chamber, the mask shape, and the like. When the through hole is inclined, the cross-sectional shape of each part is broken from a rectangle, and in this embodiment, the detection springs 46A and 46B are parallelograms as shown in FIG.

  When the cross-sectional shape of each of the detection springs 46A and 46B collapses from the rectangle, as shown by the arrows in FIG. 5, in the driving vibration mode, the movable bodies 4A and 4B vibrate not only in the X axis direction but also in the Z axis direction. (Quadrature occurs), and vibrates in an oblique direction inclined with respect to the X axis and the Z axis (hereinafter also simply referred to as “diagonal vibration”). Therefore, in the driving vibration mode, the movable body 4A is positioned on the X axis direction minus side and the Z axis direction plus side with respect to the reference position Q0 (natural state where the voltages V1 and V2 are not applied) and is movable. The first state Q1 in which the body 4B is located on the X axis direction plus side with respect to the reference position Q0 and the Z axis direction minus side, and the movable body 4A is located on the X axis direction plus side with respect to the reference position Q0. In addition, the second state Q2 in which the movable body 4B is located on the minus side in the X axis direction and located on the plus side in the Z axis direction with respect to the reference position Q0 is repeated.

  Here, as shown in FIG. 6, when the fixed detection electrodes 71 and 72 are arranged in parallel with the movable bodies 4A and 4B as in the prior art, the movable bodies 4A and 4B vibrate obliquely in the drive vibration mode. The electrostatic capacitances Ca and Cb change, and a noise signal (quadrature signal) is output accordingly. Therefore, the quadrature signal is mixed in the detection signal, and the detection accuracy of the angular velocity ωy is lowered. Therefore, in the present embodiment, the configuration of the fixed detection electrodes 71 and 72 is devised to reduce the quadrature signal due to the above-described quadrature.

  Conventionally, after the sensor element 4 is formed by the Bosch process, each of the drive springs 43A, 43B, each of the detection springs 46A, 46B, and each of the connection springs 40A, 40B is laser-processed, and each of these springs 43A, 43B, Although the quadrature itself of the sensor element 4 is reduced by correcting the cross-sectional shapes of 46A, 46B, 40A, and 40B, such a method requires a high-precision processing technique and a laser. The manufacturing process becomes complicated due to the processing. Further, by processing each of the springs 43A, 43B, 46A, 46B, 40A, 40B, these spring constants change, and accordingly, the driving frequency (resonance frequency) of the movable bodies 4A, 4B changes. There is also a problem. In contrast, in the present embodiment, the sensor element 4 is not processed to reduce the quadrature itself as in the prior art, but the quadrature itself is left as it is, and the configuration of the fixed detection electrodes 71 and 72 is devised. The quadrature signal is reduced. Therefore, it is possible to suppress a decrease in detection accuracy of the angular velocity ωy by a simpler method than before.

  Hereinafter, the fixed detection electrodes 71 and 72 will be described in detail. Since the fixed detection electrodes 71 and 72 have the same configuration as each other, the fixed detection electrode 71 will be described below as a representative. The description of is omitted.

  As shown in FIG. 7, the main surface 711 of the fixed detection electrode 71 has a plurality of surfaces 712 arranged in the X-axis direction, and the plurality of surfaces 712 are arranged in a step shape. Further, each of the plurality of surfaces 712 is a surface parallel to the XY plane. The distance G from the movable detection electrode 441A is smaller on the surface 712 on the negative side in the X-axis direction. In the present embodiment, the main surface 711 has four surfaces 712a, 712b, 712c, and 712d arranged in the X-axis direction, and the surfaces 712a, 712b, 712c, and 712d are arranged in this order from the minus side in the X-axis direction. . When the movable detection electrode 441A is at the reference position Q0, the separation distance between the surface 712a and the movable detection electrode 441A is Ga, the separation distance between the surface 712b and the movable detection electrode 441A is Gb, and the surface 712c and the movable detection electrode. When the separation distance from 441A is Gc and the separation distance between the surface 712d and the movable detection electrode 441A is Gd, the relationship of Ga <Gb <Gc <Gd is satisfied. However, it is only necessary to satisfy the relationship of Ga ≦ Gb ≦ Gc ≦ Gd (except for the case of Ga = Gb = Gc = Gd).

  By satisfying the relationship of Ga <Gb <Gc <Gd, as shown in FIGS. 8 and 9, the distance between the movable detection electrode 441A and the fixed detection electrode 71 when the movable detection electrode 441A is in the first state Q1. Since the difference ΔG between G1 and the distance G2 between the movable detection electrode 441A and the fixed detection electrode 71 when the movable detection electrode 441A is in the second state Q2 is small (preferably zero), the drive detection vibration mode The change in the capacitance Ca is reduced, and accordingly, the quadrature signal can be reduced. For example, the separation distance G1 means an average value of the separation distances Ga, Gb, Gc, and Gd when the movable detection electrode 441A is in the first state Q1, and the separation distance G2 is the second state in which the movable detection electrode 441A is in the second state. It means the average value of the separation distances Ga, Gb, Gc, Gd at Q2.

  Further, the difference ΔG between the separation distances G1 and G2 is not particularly limited. For example, in the configuration in which the main surface 711 of the fixed detection electrode 71 is a flat surface as shown in FIG. 6, it is movable in the first state Q1. When the difference between the separation distance G1 ′ between the detection electrode 441A and the fixed detection electrode 71 and the separation distance G2 ′ between the movable detection electrode 441A and the fixed detection electrode 71 in the second state Q2 is ΔG ′, ΔG ′ It is preferable to be smaller than '. That is, it is preferable that ΔG <ΔG ′. Thereby, a quadrature signal can be reduced more reliably than the conventional configuration shown in FIG. Note that ΔG <0.5ΔG ′ is more preferable, and ΔG <0.1ΔG ′ is even more preferable. Thereby, the effect mentioned above can be exhibited more notably.

  Here, the number of the surfaces 712 included in the main surface 711 is not particularly limited as long as it is 2 or more, but is preferably 3 or more and 10 or less. As a result of experiments, it is known that the quadrature signal can be reduced as the number of the surfaces 712 increases. However, if the number of the surfaces 712 is increased, the formation of the fixed detection electrode 71 becomes more complicated. From this viewpoint, by setting the number of the surfaces 712 to 3 or more and 10 or less, the quadrature signal can be sufficiently reduced and the formation of the fixed detection electrode 71 can be sufficiently suppressed. The number of surfaces 712 is more preferably 3 or more and 8 or less, and further preferably 3 or more and 6 or less. Thereby, the effect mentioned above can be exhibited more notably.

  Further, as shown in FIG. 10, in a cross-sectional view from the Y-axis direction, an end 712a ′ on the X-axis direction plus side of the surface 712a located on the most minus side in the X-axis direction and located on the most plus side in the X-axis direction An imaginary line L connecting the end 712d ′ on the positive side in the X-axis direction of the surface 712d is parallel to the oblique vibration direction Dm of the movable detection electrode 441A. Thus, since the difference ΔG between the separation distances G1 and G2 can be further reduced by making the virtual line L and the direction Dm of the oblique vibration parallel, the quadrature signal can be reduced more effectively. it can. Note that “the imaginary line L and the direction Dm of the oblique vibration are parallel” includes the case where there is a slight deviation from the parallel, such as a deviation that may occur in manufacturing. It means that the inclination with respect to the direction Dm is within 2 °.

  In particular, in the present embodiment, for the two surfaces 712b and 712c positioned between the surfaces 712a and 712d, their positive ends 712b ′ and 712c ′ are positioned on the imaginary line L. . Therefore, since the difference ΔG between the separation distances G1 and G2 can be further reduced, the quadrature signal can be more effectively reduced. In the present embodiment, the width W (length in the X-axis direction) of the surface 712a, the surface 712b, the surface 712c, and the surface 712d is substantially equal to each other, and further, adjacent surfaces (surface 712a and surface 712b, surface 712b and surface 712b) 712c, and the amount of deviation D in the Z-axis direction of the surface 712c and the surface 712d) is substantially equal to each other. Therefore, the ends 712 a ′, 712 b ′, 712 c ′, and 712 d ′ can be positioned on the virtual line L with a simple design.

  Further, the inclination of the imaginary line L with respect to the X-axis direction (angle θ1 formed by the imaginary line L and the X axis) is not particularly limited, but is preferably 0.1 ° or more and 3.0 ° or less, for example. Generally, the inclination of the oblique vibration generated by the Bosch process with respect to the X-axis direction (the angle formed by the oblique vibration direction Dm and the X-axis) is 0.1 ° or more and 3.0 ° or less. By setting the inclination with respect to the axial direction within the above range, the imaginary line L can be easily made parallel to the oblique vibration direction Dm. Therefore, the difference ΔG between the separation distances G1 and G2 can be further reduced, and the quadrature signal can be reduced more effectively.

  In the present embodiment, a straight line connecting the ends 712a ′ and 712d ′ is the imaginary line L. However, the present invention is not limited to this. For example, a straight line connecting the ends 712a ′ and 712b ′ is the imaginary line L. Alternatively, a straight line connecting the end 712b ′ and the end 712d ′ may be used as the virtual line L. That is, a line connecting the ends of at least two surfaces 712 that are arbitrarily selected can be used as the virtual line L.

  Further, the displacement amount D in the Z-axis direction between adjacent surfaces is not particularly limited, but is preferably, for example, 10 nm ≦ D ≦ 100 nm, more preferably 20 nm ≦ D ≦ 90 nm, More preferably, 30 nm ≦ D ≦ 70 nm. By setting the upper limit of the deviation amount D to the above value, the number of the surfaces 712 included in the main surface 711 can be sufficiently increased. Moreover, the fixed detection electrode 71 can be accurately formed by setting the lower limit of the deviation amount D to the above value. Specifically, in the present embodiment, the fixed detection electrode 71 is formed by processing the bottom surface of the recess 21 formed in the substrate 2 in a step shape and forming a metal film with a substantially uniform thickness thereon. Has been. That is, the height of the step formed on the bottom surface of the recess 21 is substantially equal to the shift amount D. The substrate 2 is processed by wet etching. If the height is 10 nm or more, the bottom surface of the recess 21 can be processed in a stepped manner with sufficiently high processing accuracy. Therefore, the fixed detection electrode 71 can be accurately formed by setting the lower limit of the deviation amount D to the above value.

  In particular, in the present embodiment, the substrate 2 is made of a glass substrate. Since the glass substrate has a relatively low etching rate, finer processing is possible, and the above-described step-like processing can be easily and accurately performed.

  The physical quantity sensor 1 has been described above. As described above, the physical quantity sensor 1 includes the movable body 4A and the fixed detection electrode 71 (detection electrode) arranged to face the movable body 4A. When the direction in which the movable body 4A and the fixed detection electrode 71 are arranged is the Z-axis direction (first direction) and the direction orthogonal to the Z-axis direction is the X-axis direction (second direction), the vibration of the movable body 4A Has a driving vibration mode in which the vibration in the Z-axis direction and the vibration in the X-axis direction are combined. In the driving vibration mode, the movable body 4A is located on the minus side (one side) in the X-axis direction with respect to the reference position Q0 and on the plus side in the Z-axis direction (the side opposite to the fixed detection electrode 71 side). The first state Q1 that is positioned and the second position in which the movable body 4A is positioned on the plus side (the other side) in the X-axis direction with respect to the reference position Q0 and on the minus side (the fixed detection electrode 71 side) in the Z-axis direction State Q2 is repeated. Furthermore, the main surface 711 on the side of the fixed detection electrode 71 facing the movable body 4A has a plurality of surfaces 712 arranged along the X-axis direction, and among the plurality of surfaces 712, the main surface 711 is adjacent to the X-axis direction. The surface 712 on the positive side of the surface has a larger distance G from the movable body 4A than the surface 712 on the negative side of the surface adjacent in the X-axis direction. The same applies to the main surface 721 of the fixed detection electrode 72 facing the movable body 4B. By adopting such a configuration, the difference ΔG between the separation distance G1 in the first state Q1 and the separation distance G2 in the second state Q2 is made smaller than that in the conventional configuration as shown in FIG. Therefore, the quadrature signal can be reduced.

  Further, as described above, the direction orthogonal to the Z-axis direction and the X-axis direction is defined as the Y-axis direction (third direction), and the X-axis direction among the plurality of surfaces 712 is a cross-sectional view as viewed from the Y-axis direction. An end 712a ′ positioned on the plus side in the X-axis direction of the surface 712a on the most negative side is connected to an end 712d ′ positioned on the plus side in the X-axis direction of the surface 712d located on the most plus side in the X-axis direction. The imaginary line L is parallel to the vibration direction of the movable body 4A in the drive vibration mode (direction of oblique vibration Dm). Thereby, ΔG can be made smaller, and the quadrature signal can be reduced more effectively.

  Further, as described above, the inclination of the virtual line L with respect to the X-axis direction is not less than 0.1 ° and not more than 3.0 °. Generally, the inclination of the oblique vibration generated by the Bosch process with respect to the X-axis direction (the angle formed by the oblique vibration direction Dm and the X-axis) is 0.1 ° or more and 3.0 ° or less. By setting the inclination with respect to the axial direction within the above range, the imaginary line L can be easily made parallel to the oblique vibration direction Dm. Therefore, ΔG can be made smaller, and the quadrature signal can be reduced more effectively.

  Further, as described above, the number of the surfaces 712 is 3 or more and 10 or less. Thereby, the quadrature signal can be sufficiently reduced, and the complicated formation of the fixed detection electrode 71 can be sufficiently suppressed.

  Further, as described above, the relationship of 10 nm ≦ D ≦ 100 nm is satisfied, where D is the amount of deviation in the Z-axis direction between two surfaces 712 adjacent in the X-axis direction. By setting it as such a range, while being able to fully increase the number of the surfaces 712 which the main surface 711 has, the fixed detection electrode 71 can be formed accurately.

  Further, as described above, the physical quantity sensor 1 includes the substrate 2 facing the movable bodies 4A and 4B, and the fixed detection electrodes 71 and 72 are provided on the substrate 2. Thereby, the fixed detection electrodes 71 and 72 can be arranged to face the movable bodies 4A and 4B with a simple configuration.

  As described above, the substrate 2 is a glass substrate. Since the glass substrate has a relatively low etching rate, finer processing is possible, and the above-described step-like processing can be easily and accurately performed.

  As described above, the physical quantity sensor 1 can detect the angular velocity ωy around the detection axis (Y axis) along the Y axis direction. As a result, the physical quantity sensor 1 is highly convenient.

  Note that the configuration of the fixed detection electrode 71 is not limited to the configuration of the present embodiment described above. For example, as shown in FIGS. 11 and 12, at least one of the ends 712 a ′, 712 b ′, 712 c ′, and 712 d ′ may not be located on the virtual line L. Further, for example, as shown in FIG. 11, at least one width W of the surfaces 712a, 712b, 712c, 712d may be different from the width W of the other surfaces, or as shown in FIG. At least one of the shift amounts D in the Z-axis direction between the mating surfaces 712 may be different from the other shift amounts D.

  Further, as described above, in the present embodiment, the bottom surface of the recess 21 is processed into a step shape, and the fixed detection electrode 71 is formed thereon, thereby forming the step-shaped fixed detection electrode 71. However, the present invention is not limited to this. For example, as shown in FIG. 13, by changing the thickness of the fixed detection electrode 71 stepwise along the X-axis direction, the stepped fixed detection electrode 71 is formed. Also good. The same applies to the fixed detection electrode 72.

<Second Embodiment>
Next, a physical quantity sensor device according to a second embodiment of the invention will be described.

FIG. 14 is a cross-sectional view showing a physical quantity sensor device according to the second embodiment of the present invention.
As illustrated in FIG. 14, the physical quantity sensor device 5000 includes a physical quantity sensor 1, a semiconductor element 5900 (circuit element), and a package 5100 that houses the physical quantity sensor 1 and the semiconductor element 5900.

  The package 5100 includes a cavity-shaped base 5200 and a lid 5300 bonded to the upper surface of the base 5200. The base 5200 has a recess 5210 that opens on the upper surface thereof. In addition, the recess 5210 has a first recess 5211 that opens to the top surface of the base 5200 and a second recess 5212 that opens to the bottom surface of the first recess 5211.

  On the other hand, the lid 5300 has a plate shape and is joined to the upper surface of the base 5200 so as to close the opening of the recess 5210. Thus, the storage space S2 is formed in the package 5100 by closing the opening of the recess 5210 with the lid 5300, and the physical quantity sensor 1 and the semiconductor element 5900 are stored in the storage space S2. In addition, it does not specifically limit as a joining method of the base 5200 and the cover body 5300, In this embodiment, the seam welding via the seam ring 5400 is used.

  The storage space S2 is hermetically sealed. The atmosphere of the storage space S2 is not particularly limited. For example, it is preferable that the atmosphere is the same as the storage space S of the physical quantity sensor 1. Thereby, even if the airtightness of the storage space S collapses and the storage spaces S and S2 communicate with each other, the atmosphere of the storage space S can be maintained as it is. Therefore, the change in the detection characteristics of the physical quantity sensor 1 due to the change in the atmosphere of the storage space S can be reduced, and stable detection characteristics can be exhibited.

  A constituent material of the base 5200 is not particularly limited, and for example, various ceramics such as alumina, zirconia, and titania can be used. The constituent material of the lid 5300 is not particularly limited, but may be a member whose linear expansion coefficient approximates that of the constituent material of the base 5200. For example, when the constituent material of the base 5200 is a ceramic as described above, an alloy such as Kovar is preferably used.

  The base 5200 has a plurality of internal terminals 5230 disposed in the storage space S2 (the bottom surface of the first recess 5211) and a plurality of external terminals 5240 disposed on the bottom surface. Each internal terminal 5230 is electrically connected to a predetermined external terminal 5240 via an internal wiring (not shown) disposed in the base 5200.

  The physical quantity sensor 1 is fixed to the bottom surface of the recess 5210 via the die attach material DA, and the semiconductor element 5900 is disposed on the top surface of the physical quantity sensor 1 via the die attach material DA. The physical quantity sensor 1 and the semiconductor element 5900 are electrically connected via the bonding wire BW1, and the semiconductor element 5900 and the internal terminal 5230 are electrically connected via the bonding wire BW2.

  The semiconductor element 5900 includes, for example, a drive circuit that applies a drive voltage to the sensor element 4, a detection circuit that detects the angular velocity ωy based on an output from the sensor element 4, and a signal from the detection circuit as a predetermined signal. An output circuit that converts the data into an output and the like are included as necessary.

  The physical quantity sensor device 5000 has been described above. Such a physical quantity sensor device 5000 includes a physical quantity sensor 1 and a semiconductor element 5900 (circuit element). Therefore, the effect of the physical quantity sensor 1 can be enjoyed, and a highly reliable physical quantity sensor device 5000 can be obtained.

<Third Embodiment>
Next, a composite sensor device according to a third embodiment of the present invention will be described.

  FIG. 15 is a plan view showing a composite sensor device according to the third embodiment of the present invention. FIG. 16 is a cross-sectional view of the composite sensor device shown in FIG.

  As shown in FIGS. 15 and 16, the composite sensor device 4000 includes a base substrate 4100 and a semiconductor element 4200 (circuit element) attached to the upper surface of the base substrate 4100 via a die attach material DA (resin adhesive). The acceleration sensor 4300 (second physical quantity sensor) and the angular velocity sensor 4400 (first physical quantity sensor) attached to the upper surface of the semiconductor element 4200 via a die attach material cover the semiconductor element 4200, the acceleration sensor 4300, and the angular velocity sensor 4400. And a resin package 4500. The acceleration sensor 4300 is a triaxial acceleration sensor that can independently detect accelerations of three axes (X axis, Y axis, and Z axis) orthogonal to each other. The angular velocity sensor 4400 is a three-axis angular velocity sensor that can independently detect angular velocities of three axes (X axis, Y axis, and Z axis) orthogonal to each other. The physical quantity sensor 1 of the present invention can be applied as the acceleration sensor 4300 and the angular velocity sensor 4400.

  The base substrate 4100 has a plurality of connection terminals 4110 on its upper surface and a plurality of external terminals 4120 on its lower surface. Each connection terminal 4110 is electrically connected to a corresponding external terminal 4120 via an internal wiring (not shown) disposed in the base substrate 4100. A semiconductor element 4200 is disposed on the upper surface of the base substrate 4100.

  The semiconductor element 4200 independently detects the acceleration in the X-axis direction, the acceleration in the Y-axis direction, and the acceleration in the Z-axis direction based on a drive circuit that drives the acceleration sensor 4300 and the angular velocity sensor 4400, and an output from the acceleration sensor 4300. From the angular velocity detection circuit, the acceleration detection circuit, and the angular velocity detection circuit that independently detect the angular velocity around the X axis, the angular velocity around the Y axis, and the angular velocity around the Z axis based on the output from the angular velocity sensor 4400 An output circuit for converting the above signal into a predetermined signal and outputting it is included as necessary.

  Such a semiconductor element 4200 is electrically connected to the acceleration sensor 4300 via the bonding wire BW3, is electrically connected to the angular velocity sensor 4400 via the bonding wire BW4, and is connected to the base substrate 4100 via the bonding wire BW5. The connection terminal 4110 is electrically connected. An acceleration sensor 4300 and an angular velocity sensor 4400 are arranged side by side on the upper surface of the semiconductor element 4200.

  The composite sensor device 4000 has been described above. As described above, the composite sensor device 4000 includes the angular velocity sensor 4400 (first physical quantity sensor) and the acceleration sensor 4300 (second physical quantity sensor) that detects a physical quantity different from the angular velocity sensor 4400. . As a result, different types of physical quantities can be detected, and the composite sensor device 4000 is highly convenient. In particular, in the present embodiment, the first physical quantity sensor is an angular velocity sensor 4400 that can detect angular velocity, and the second physical quantity sensor is an acceleration sensor 4300 that can detect acceleration. Therefore, for example, the composite sensor device 4000 can be suitably used for a motion sensor or the like and is extremely convenient.

  Note that the arrangement of the acceleration sensor 4300 and the angular velocity sensor 4400 is not particularly limited. For example, the acceleration sensor 4300 and the angular velocity sensor 4400 may be attached to the upper surface of the base substrate 4100 with the semiconductor element 4200 interposed therebetween. Good. With this configuration, the composite sensor device 4000 can be reduced in height. Further, as described above, in the present embodiment, the angular velocity sensor 4400 is a first physical quantity sensor and the acceleration sensor 4300 is a second physical quantity sensor, but the opposite may be possible. That is, the angular velocity sensor 4400 may be a second physical quantity sensor, and the acceleration sensor 4300 may be a first physical quantity sensor.

<Fourth embodiment>
Next, an inertial measurement apparatus according to a fourth embodiment of the present invention will be described.

  FIG. 17 is an exploded perspective view showing an inertial measurement device according to the fourth embodiment of the present invention. 18 is a perspective view of a substrate included in the inertial measurement apparatus shown in FIG.

  An inertial measurement device 2000 (IMU: Inertial Measurement Unit) illustrated in FIG. 17 is an inertial measurement device that detects the posture and behavior (inertial momentum) of a moving body (a device to be mounted) such as an automobile or a robot. The inertial measurement device 2000 functions as a so-called 6-axis motion sensor including a 3-axis acceleration sensor and a 3-axis angular velocity sensor.

  Inertial measuring apparatus 2000 is a rectangular parallelepiped having a substantially square planar shape. Further, screw holes 2110 as fixing portions are formed in the vicinity of two apexes located in the diagonal direction of the square. The inertial measurement device 2000 can be fixed to a mounting surface of a mounting body such as an automobile through two screws through the two screw holes 2110. Note that the size can be reduced to a size that can be mounted on, for example, a smartphone or a digital camera by selecting a part or changing a design.

  The inertial measurement device 2000 includes an outer case 2100, a joining member 2200, and a sensor module 2300. The sensor module 2300 is inserted into the outer case 2100 with the joining member 2200 interposed therebetween. Yes. The sensor module 2300 includes an inner case 2310 and a substrate 2320.

  The outer shape of the outer case 2100 is a rectangular parallelepiped having a substantially planar shape, similar to the overall shape of the inertial measurement device 2000 described above, and screw holes 2110 are formed in the vicinity of two apexes located in the diagonal direction of the square. Has been. The outer case 2100 is box-shaped, and the sensor module 2300 is accommodated therein.

  The inner case 2310 is a member that supports the substrate 2320 and has a shape that fits inside the outer case 2100. Further, the inner case 2310 is formed with a recess 2311 for preventing contact with the substrate 2320 and an opening 2312 for exposing a connector 2330 described later. Such an inner case 2310 is joined to the outer case 2100 via a joining member 2200 (for example, a packing impregnated with an adhesive). A substrate 2320 is bonded to the lower surface of the inner case 2310 via an adhesive.

  As shown in FIG. 18, on the upper surface of the substrate 2320, there are a connector 2330, an angular velocity sensor 2340z that detects an angular velocity around the Z axis, an acceleration sensor 2350 that detects acceleration in each of the X, Y, and Z axes. Has been implemented. On the side surface of the substrate 2320, an angular velocity sensor 2340x that detects an angular velocity around the X axis and an angular velocity sensor 2340y that detects an angular velocity around the Y axis are mounted. The physical quantity sensor 1 of the present invention can be applied as the sensors 2340z, 2340x, 2340y, and 2350.

  A control IC 2360 is mounted on the lower surface of the substrate 2320. The control IC 2360 is an MCU (Micro Controller Unit) and includes a storage unit including a nonvolatile memory, an A / D converter, and the like, and controls each unit of the inertial measurement device 2000. The storage unit stores a program that defines the order and contents for detecting acceleration and angular velocity, a program that digitizes detection data and incorporates it into packet data, and accompanying data. Note that a plurality of other electronic components are mounted on the substrate 2320.

  The inertia measuring device 2000 has been described above. As described above, the inertial measurement apparatus 2000 includes the angular velocity sensors 2340z, 2340x, and 2340y as the physical quantity sensors, the acceleration sensor 2350, and the control IC 2360 (control) that controls the driving of these sensors 2340z, 2340x, 2340y, and 2350. Circuit). Thereby, the effect of the physical quantity sensor of the present invention can be enjoyed, and a highly reliable inertial measurement device 2000 can be obtained.

<Fifth Embodiment>
Next, a mobile unit positioning apparatus according to a fifth embodiment of the present invention will be described.

  FIG. 19 is a block diagram showing the entire system of the mobile body positioning device according to the fifth embodiment of the present invention. FIG. 20 is a diagram showing the operation of the mobile body positioning device shown in FIG.

  A mobile body positioning device 3000 shown in FIG. 19 is a device that is used by being mounted on a mobile body and performs positioning of the mobile body. The moving body is not particularly limited, and may be any of a bicycle, an automobile (including a four-wheel automobile and a motorcycle), a train, an airplane, a ship, and the like, but in the present embodiment, it will be described as a four-wheel automobile. The mobile body positioning device 3000 includes an inertial measurement device 3100 (IMU), an arithmetic processing unit 3200, a GPS receiving unit 3300, a receiving antenna 3400, a position information acquiring unit 3500, a position synthesizing unit 3600, and a processing unit 3700. A communication unit 3800 and a display unit 3900. As the inertial measurement device 3100, for example, the inertial measurement device 2000 described above can be used.

  The inertial measurement device 3100 includes a triaxial acceleration sensor 3110 and a triaxial angular velocity sensor 3120. The arithmetic processing unit 3200 receives the acceleration data from the acceleration sensor 3110 and the angular velocity data from the angular velocity sensor 3120, performs inertial navigation arithmetic processing on these data, and obtains inertial navigation positioning data (data including acceleration and attitude of the moving object). ) Is output.

  The GPS receiving unit 3300 receives a signal from a GPS satellite (a GPS carrier wave, a satellite signal on which position information is superimposed) via a receiving antenna 3400. The position information acquisition unit 3500 also outputs GPS positioning data representing the position (latitude, longitude, altitude), speed, and direction of the mobile positioning device 3000 (moving body) based on the signal received by the GPS receiving unit 3300. To do. This GPS positioning data also includes status data indicating the reception state, reception time, and the like.

  Based on the inertial navigation positioning data output from the arithmetic processing unit 3200 and the GPS positioning data output from the position information acquisition unit 3500, the position synthesizing unit 3600 determines the position of the moving object, specifically, the position of the moving object on the ground. Calculate whether you are traveling through the position. For example, even if the position of the moving body included in the GPS positioning data is the same, as shown in FIG. 20, if the position of the moving body is different due to the influence of the inclination of the ground, the position of the ground is different. The moving body is running. Therefore, the exact position of the moving body cannot be calculated only with the GPS positioning data. Therefore, the position synthesis unit 3600 calculates which position on the ground the mobile body is traveling using inertial navigation positioning data (particularly, data related to the posture of the mobile body). This determination can be made relatively easily by calculation using a trigonometric function (inclination θ with respect to the vertical direction).

  The position data output from the position synthesizing unit 3600 is subjected to a predetermined process by the processing unit 3700 and is displayed on the display unit 3900 as a positioning result. Further, the position data may be transmitted to the external device by the communication unit 3800.

  The mobile body positioning device 3000 has been described above. As described above, such a mobile body positioning device 3000 includes an inertial measurement device 3100, a GPS receiving unit 3300 (receiving unit) that receives a satellite signal on which position information is superimposed from a positioning satellite, and a received satellite signal. Based on the position information acquisition unit 3500 (acquisition unit) for acquiring the position information of the GPS reception unit 3300 and the inertial navigation positioning data (inertia data) output from the inertial measurement device 3100. A calculation processing unit 3200 (calculation unit) that performs calculation, and a position synthesis unit 3600 (calculation unit) that calculates the position of the moving body by correcting the position information based on the calculated posture are included. Thereby, the effect of the inertial measurement device 2000 described above can be enjoyed, and a highly reliable mobile body positioning device 3000 can be obtained.

<Sixth Embodiment>
Next, an electronic apparatus according to a sixth embodiment of the invention will be described.

FIG. 21 is a perspective view showing an electronic apparatus according to the sixth embodiment of the present invention.
A mobile (or notebook) personal computer 1100 shown in FIG. 21 is an application of the electronic apparatus of the present invention. The personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1108. The display unit 1106 is rotatable with respect to the main body portion 1104 via a hinge structure portion. It is supported. The personal computer 1100 includes a physical quantity sensor 1 and a control circuit 1110 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1.

  Such a personal computer 1100 (electronic device) includes a physical quantity sensor 1 and a control circuit 1110 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the effect of the physical quantity sensor 1 described above can be enjoyed and high reliability can be exhibited.

<Seventh embodiment>
Next, an electronic apparatus according to a seventh embodiment of the invention will be described.

FIG. 22 is a perspective view showing an electronic apparatus according to the seventh embodiment of the present invention.
A smartphone 1200 (mobile phone) shown in FIG. 22 is an application of the electronic device of the present invention. The smartphone 1200 includes a physical quantity sensor 1 and a control circuit 1210 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Detection data (angular velocity data) detected by the physical quantity sensor 1 is transmitted to the control circuit 1210. The control circuit 1210 recognizes the posture and behavior of the smartphone 1200 from the received detection data, and is displayed on the display unit 1208. The displayed image can be changed, a warning sound or sound effect can be generated, or the main body can be vibrated by driving a vibration motor.

  Such a smartphone 1200 (electronic device) includes the physical quantity sensor 1 and a control circuit 1210 (control unit) that performs control based on the detection signal output from the physical quantity sensor 1. Therefore, the effect of the physical quantity sensor 1 described above can be enjoyed and high reliability can be exhibited.

<Eighth Embodiment>
Next, an electronic apparatus according to an eighth embodiment of the invention will be described.

FIG. 23 is a perspective view showing an electronic apparatus according to the eighth embodiment of the present invention.
A digital still camera 1300 shown in FIG. 23 is an application of the electronic apparatus of the present invention. The digital still camera 1300 includes a case 1302, and a display unit 1310 is provided on the back surface of the case 1302. The display unit 1310 is configured to perform display based on an imaging signal from the CCD, and functions as a finder that displays the subject as an electronic image. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302. When the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. The digital still camera 1300 includes a physical quantity sensor 1 and a control circuit 1320 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. The physical quantity sensor 1 is used for camera shake correction, for example.

  Such a digital still camera 1300 (electronic device) includes the physical quantity sensor 1 and a control circuit 1320 (control unit) that performs control based on the detection signal output from the physical quantity sensor 1. Therefore, the effect of the physical quantity sensor 1 described above can be enjoyed and high reliability can be exhibited.

  The electronic device of the present invention includes, for example, a smart phone, a tablet terminal, a watch (including a smart watch), an ink jet discharge, in addition to the personal computer and mobile phone of the above-described embodiment and the digital still camera of the present embodiment. Wearable terminals such as devices (for example, inkjet printers), laptop personal computers, televisions, HMDs (head-mounted displays), video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic Dictionary, calculator, electronic game device, word processor, workstation, video phone, security TV monitor, electronic binoculars, POS terminal, medical device (eg electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasound diagnosis Device, electronic endoscope), fish finder, various measuring equipment, mobile terminal base station equipment, instruments (eg, vehicles, aircraft, ship instruments), flight simulator, network server, etc. it can.

<Ninth Embodiment>
Next, a portable electronic device according to a ninth embodiment of the invention will be described.

  FIG. 24 is a plan view showing a portable electronic device according to the ninth embodiment of the present invention. FIG. 25 is a functional block diagram showing a schematic configuration of the portable electronic device shown in FIG.

  A wristwatch-type activity meter 1400 (active tracker) shown in FIG. 24 is a wrist device to which the portable electronic device of the present invention is applied. The activity meter 1400 is attached to a part (subject) such as a user's wrist by a band 1401. The activity meter 1400 includes a display unit 1402 for digital display and wireless communication is possible. The physical quantity sensor 1 according to the present invention is incorporated in the activity meter 1400 as an acceleration sensor 1408 for measuring acceleration and an angular velocity sensor 1409 for measuring angular velocity.

  The activity meter 1400 is accommodated in a case 1403 in which an acceleration sensor 1408 and an angular velocity sensor 1409 are accommodated, a case 1403, a processing unit 1410 that processes output data from the acceleration sensor 1408 and the angular velocity sensor 1409, and an accommodation in the case 1403. And a translucent cover 1404 that closes the opening of the case 1403. A bezel 1405 is provided outside the translucent cover 1404. A plurality of operation buttons 1406 and 1407 are provided on the side surface of the case 1403.

  As shown in FIG. 25, the acceleration sensor 1408 detects the respective accelerations in the triaxial directions that intersect (ideally orthogonal) with each other, and a signal (acceleration) corresponding to the magnitude and direction of the detected triaxial acceleration. Signal). Further, the angular velocity sensor 1409 detects each angular velocity in the three axial directions intersecting each other (ideally orthogonal), and outputs a signal (angular velocity signal) corresponding to the magnitude and direction of the detected three axial angular velocity. .

  In a liquid crystal display (LCD) constituting the display unit 1402, for example, position information using the GPS sensor 1411 or the geomagnetic sensor 1412, a moving amount, an acceleration sensor 1408, an angular velocity sensor 1409, or the like is used according to various detection modes. Exercise information such as the amount of exercise, biological information such as the pulse rate using the pulse sensor 1413, or time information such as the current time is displayed. The environmental temperature using the temperature sensor 1414 can also be displayed.

  The communication unit 1415 performs various controls for establishing communication between the user terminal and an information terminal (not shown). The communication unit 1415 includes, for example, Bluetooth (registered trademark) (including BTLE: Bluetooth Low Energy), Wi-Fi (registered trademark) (Wireless Fidelity), Zigbee (registered trademark), NFC (Near field communication), and ANT + (registered). (Trademark) etc., and a connector corresponding to a communication bus standard such as USB (Universal Serial Bus).

  The processing unit 1410 (processor) is configured by, for example, an MPU (Micro Processing Unit), a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), or the like. The processing unit 1410 executes various processes based on a program stored in the storage unit 1416 and a signal input from the operation unit 1417 (for example, the operation buttons 1406 and 1407). The processing by the processing unit 1410 includes a GPS sensor 1411, a geomagnetic sensor 1412, a pressure sensor 1418, an acceleration sensor 1408, an angular velocity sensor 1409, a pulse sensor 1413, a temperature sensor 1414, and data processing for each output signal of the time measuring unit 1419, a display unit 1402. Display processing for displaying an image on the screen, sound output processing for outputting sound to the sound output unit 1420, communication processing for communicating with the information terminal via the communication unit 1415, power control processing for supplying power from the battery 1421 to each unit, etc. Is included.

Such an activity meter 1400 can have at least the following functions.
1. Distance: The total distance from the start of measurement is measured by a highly accurate GPS function.
2. Pace: Displays the current running pace from the pace distance measurement.
3. Average speed: Average speed from the start of average speed driving to the present is calculated and displayed.
4). Elevation: The altitude is measured and displayed by the GPS function.
5). Stride: Steps are measured and displayed even in tunnels where GPS signals do not reach.
6). Pitch: Measures and displays the number of steps per minute.
7). Heart rate: The heart rate is measured and displayed by the pulse sensor.
8). Slope: Measures and displays the slope of the ground during mountain training and trail runs.
9. Auto lap: lap measurement is automatically performed when a predetermined distance or time is set.
10. Exercise calorie consumption: Displays the calorie consumption.
11. Number of steps: Displays the total number of steps from the start of exercise.

  Such an activity meter 1400 (portable electronic device) includes a physical quantity sensor 1, a case 1403 in which the physical quantity sensor 1 is accommodated, and a processing unit 1410 that is accommodated in the case 1403 and processes output data from the physical quantity sensor 1. And a display portion 1402 accommodated in the case 1403 and a translucent cover 1404 closing the opening of the case 1403. Therefore, the effect of the physical quantity sensor 1 described above can be enjoyed and high reliability can be exhibited.

  As described above, the activity meter 1400 includes the GPS sensor 1411 (satellite positioning system), and can measure the movement distance and movement locus of the user. Therefore, a highly convenient activity meter 1400 can be obtained.

  The activity meter 1400 can be widely applied to a running watch, a runner's watch, a runner's watch compatible with multi-sports such as duathlon and triathlon, an outdoor watch, and a satellite positioning system such as a GPS watch equipped with GPS.

  In the above description, GPS (Global Positioning System) is used as the satellite positioning system, but other Global Navigation Satellite System (GNSS) may be used. For example, one or more satellite positioning systems such as EGNOS (European Geostationary-Satellite Navigation Overlay Service), QZSS (Quasi Zenith Satellite System), GLONASS (GLObal NAvigation Satellite System), GALILEO, BeiDou (BeiDou Navigation Satellite System) May be used. Also, using satellite-based augmentation systems (SBAS) such as WAAS (Wide Area Augmentation System) and EGNOS (European Geostationary-Satellite Navigation Overlay Service) for at least one of the satellite positioning systems Also good.

<Tenth Embodiment>
Next, a mobile unit according to a tenth embodiment of the present invention is described.

FIG. 26 is a perspective view showing a moving body according to the tenth embodiment of the invention.
An automobile 1500 shown in FIG. 26 is an automobile to which the moving body of the present invention is applied. In this figure, an automobile 1500 includes a system 1510 of at least one of an engine system, a brake system, and a keyless entry system. In addition, the automobile 1500 has a built-in physical quantity sensor 1, and the physical quantity sensor 1 can detect the posture of the vehicle body 1501. The detection signal of the physical quantity sensor 1 is supplied to the control device 1502, and the control device 1502 can control the system 1510 based on the signal.

  Such an automobile 1500 (moving body) includes the physical quantity sensor 1 and a control device 1502 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the effect of the physical quantity sensor 1 described above can be enjoyed and high reliability can be exhibited. Further, the automobile 1500 includes at least one of an engine system, a brake system, and a keyless entry system, and the control device 1502 controls the system 1510 based on the detection signal. Thereby, the system 1510 can be controlled with high accuracy.

  In addition, the physical quantity sensor 1 includes a car navigation system, a car air conditioner, an anti-lock brake system (ABS), an air bag, a tire pressure monitoring system (TPMS), an engine control, and a hybrid vehicle. It can be widely applied to electronic control units (ECU) such as battery monitors for electric vehicles and electric vehicles.

  Further, the moving body is not limited to the automobile 1500, and can be applied to, for example, an unmanned airplane such as an airplane, a rocket, an artificial satellite, a ship, an AGV (automated guided vehicle), a bipedal walking robot, and a drone. .

  The physical quantity sensor, physical quantity sensor device, composite sensor device, inertial measurement device, mobile body positioning device, portable electronic device, electronic device, and mobile body of the present invention have been described based on the illustrated embodiments. However, the present invention is not limited to this, and the configuration of each part can be replaced with any configuration having a similar function. In addition, any other component may be added to the present invention. Moreover, you may combine embodiment mentioned above suitably.

  In the above-described embodiment, the configuration in which the physical quantity sensor detects the angular velocity around the Y axis has been described. However, the configuration is not limited to this, and the configuration may be such that the angular velocity around the X axis is detected. The angular velocity may be detected. In the above-described embodiment, the configuration in which the physical quantity sensor detects the angular velocity has been described. However, the physical quantity detected by the physical quantity sensor is not particularly limited, and may be acceleration, pressure, or the like. Further, the physical quantity sensor may be capable of detecting a plurality of physical quantities. A plurality of physical quantities are the same kind of physical quantities with different detection axes (for example, acceleration in the X-axis direction, acceleration in the Y-axis direction, acceleration in the Z-axis direction, angular velocity around the X axis, angular velocity around the Y axis, and Z Angular velocity around the axis) or different physical quantities (for example, angular velocity around the X axis and acceleration in the X axis direction).

  DESCRIPTION OF SYMBOLS 1 ... Physical quantity sensor, 2 ... Board | substrate, 21 ... Recessed part, 221, 222, 224 ... Mount, 3 ... Cover body, 31 ... Recessed part, 39 ... Glass frit, 4 ... Sensor element, 4A, 4B ... Movable body, 40A, 40B ... connection springs, 41A, 41B ... drive part, 411A, 411B ... movable drive electrode, 412A, 412B ... fixed drive electrode, 42A, 42B ... fixed part, 43A, 43B ... drive spring, 44A, 44B ... detection part, 441A, 441B ... movable detection electrode, 451, 452 ... fixed part, 46A, 46B ... detection spring, 47A, 47B ... beam, 48 ... frame, 481, 482 ... defect part, 488,489 ... frame spring, 49A, 49B ... monitor part 491A, 491B ... movable monitor electrode, 492A, 492B, 493A, 493B ... fixed monitor electrode, 71, 72 ... fixed test Electrodes, 711, 721 ... main surface, 712, 712a, 712b, 712c, 712d ... surface, 712a ', 712b', 712c ', 712d' ... end, 73, 74, 75, 76, 77, 78 ... wiring, 1100 ... Personal computer, 1102 ... Keyboard, 1104 ... Main unit, 1106 ... Display unit, 1108 ... Display unit, 1110 ... Control circuit, 1200 ... Smartphone, 1208 ... Display unit, 1210 ... Control circuit, 1300 ... Digital still camera, 1302 ... Case, 1304 ... Light receiving unit, 1306 ... Shutter button, 1308 ... Memory, 1310 ... Display unit, 1320 ... Control circuit, 1400 ... Activity meter, 1401 ... Band, 1402 ... Display unit, 1403 ... Case, 1404 ... Translucent cover 1405 ... Bezel, 1406 ... Manipulation Button, 1407 ... Operation button, 1408 ... Acceleration sensor, 1409 ... Angular velocity sensor, 1410 ... Processing unit, 1411 ... GPS sensor, 1412 ... Geomagnetic sensor, 1413 ... Pulse sensor, 1414 ... Temperature sensor, 1415 ... Communication unit, 1416 ... Memory , 1417 ... operation unit, 1418 ... pressure sensor, 1419 ... timing unit, 1420 ... sound output unit, 1421 ... battery, 1500 ... automobile, 1501 ... vehicle body, 1502 ... control device, 1510 ... system, 2000 ... inertial measurement device, 2100 ... Outer case, 2110 ... Screw hole, 2200 ... Joining member, 2300 ... Sensor module, 2310 ... Inner case, 2311 ... Recess, 2312 ... Opening, 2320 ... Substrate, 2330 ... Connector, 2340x, 2340y, 2340z ... Angular speed Degree sensor, 2350 ... Acceleration sensor, 2360 ... Control IC, 3000 ... Moving body positioning device, 3100 ... Inertial measurement device, 3110 ... Acceleration sensor, 3120 ... Angular velocity sensor, 3200 ... Arithmetic processing unit, 3300 ... GPS receiving unit, 3400 ... Receiving antenna, 3500 ... position information acquisition unit, 3600 ... position synthesis unit, 3700 ... processing unit, 3800 ... communication unit, 3900 ... display unit, 4000 ... composite sensor device, 4100 ... base substrate, 4110 ... connection terminal, 4120 ... external Terminal, 4200 ... Semiconductor element, 4300 ... Acceleration sensor, 4400 ... Angular velocity sensor, 4500 ... Resin package, 5000 ... Physical quantity sensor device, 5100 ... Package, 5200 ... Base, 5210 ... Recess, 5211 ... First recess, 5212 ... Second Recess, 5230 ... Part terminal, 5240 ... external terminal, 5300 ... lid, 5400 ... seam ring, 5900 ... semiconductor element, BW1, BW2, BW3, BW4, BW5 ... bonding wire, D ... deviation amount, DA ... die attach material, Dm ... direction , G, G1, G2, Ga, Gb, Gc, Gd ... separation distance, L ... virtual line, O ... center, P ... electrode pad, Q0 ... reference position, Q1 ... first state, Q2 ... second state, S ... Storage space, S2 ... Storage space, T ... Height, V1, V2 ... Voltage, W ... Width, α ... Virtual straight line, θ ... Inclination, θ1 ... Angle, ωy ... Angular velocity

Claims (18)

A movable body,
A detection electrode disposed opposite to the movable body;
Including
The direction in which the movable body and the detection electrode are arranged is a first direction,
When the direction orthogonal to the first direction is the second direction,
The vibration of the movable body has a drive vibration mode in which the vibration in the first direction and the vibration in the second direction are combined.
In the driving vibration mode,
A first state in which the movable body is located on one side in the second direction with respect to a reference position and located on the opposite side of the detection electrode in the first direction;
A second state in which the movable body is located on the other side in the second direction with respect to the reference position and located on the detection electrode side in the first direction;
Is repeated,
The main surface of the detection electrode facing the movable body has a plurality of surfaces arranged along the second direction,
Of the plurality of surfaces, the surface on the other side of the surfaces adjacent in the second direction has a separation distance from the movable body larger than the surface on the one side of the surfaces adjacent in the second direction. A physical quantity sensor characterized by being large. In claim 1,
A direction orthogonal to the first direction and the second direction is a third direction, and in a cross-sectional view viewed from the third direction,
Of the plurality of surfaces, an end located on the other side in the second direction of the surface on the most one side in the second direction and the second on the surface on the most other side in the second direction. An imaginary line connecting the end located on the other side of the direction is parallel to the vibration direction of the movable body in the drive vibration mode. In claim 2,
The physical quantity sensor, wherein an inclination of the virtual line with respect to the second direction is not less than 0.1 ° and not more than 3.0 °. In any one of Claims 1 thru | or 3,
The physical quantity sensor characterized in that the number of the surfaces is 3 or more and 10 or less. In any one of Claims 1 thru | or 4,
When the amount of deviation in the first direction of the two surfaces adjacent to each other in the second direction is D,
10 nm ≦ D ≦ 100 nm
A physical quantity sensor characterized by satisfying the relationship. In any one of Claims 1 thru | or 5,
Including a substrate facing the movable body,
The physical quantity sensor, wherein the detection electrode is provided on the substrate. In claim 6,
The physical quantity sensor, wherein the substrate is a glass substrate. In any one of Claims 1 thru | or 7,
When the direction orthogonal to the first direction and the second direction is the third direction,
A physical quantity sensor capable of detecting an angular velocity around a detection axis along the third direction. A physical quantity sensor according to any one of claims 1 to 8,
Circuit elements;
A physical quantity sensor device comprising: A first physical quantity sensor which is the physical quantity sensor according to any one of claims 1 to 8,
A second physical quantity sensor for detecting a physical quantity different from the first physical quantity sensor;
A composite sensor device comprising: In claim 10,
The first physical quantity sensor is a sensor capable of detecting angular velocity,
The composite sensor device, wherein the second physical quantity sensor is a sensor capable of detecting acceleration. A physical quantity sensor according to any one of claims 1 to 8,
A control circuit for controlling driving of the physical quantity sensor;
An inertial measurement device comprising: An inertial measurement device according to claim 12,
A receiving unit for receiving a satellite signal on which position information is superimposed from a positioning satellite;
An acquisition unit that acquires position information of the reception unit based on the received satellite signal;
Based on the inertial data output from the inertial measurement device, a calculation unit that calculates the posture of the moving body;
A calculation unit that calculates the position of the moving body by correcting the position information based on the calculated posture;
A mobile body positioning device comprising: A physical quantity sensor according to any one of claims 1 to 8,
A case containing the physical quantity sensor;
A processing unit housed in the case and processing output data from the physical quantity sensor;
A display unit housed in the case;
A translucent cover closing the opening of the case;
A portable electronic device comprising: In claim 14,
Including satellite positioning system,
A portable electronic device characterized by measuring a user's movement distance and movement trajectory. A physical quantity sensor according to any one of claims 1 to 8,
A control unit that performs control based on a detection signal output from the physical quantity sensor;
An electronic device comprising: A physical quantity sensor according to any one of claims 1 to 8,
A control unit that performs control based on a detection signal output from the physical quantity sensor;
A moving object comprising: In claim 17,
Including at least one of an engine system, a brake system, and a keyless entry system,
The said control part controls the said system based on the said detection signal, The moving body characterized by the above-mentioned.

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