JP2019132574A - Vapor chamber, electronic apparatus and sheet for vapor chamber - Google Patents

Abstract

An object of the present invention is to provide a vapor chamber capable of suppressing breakage of wall portions between flow paths while increasing productivity. Also provided are an electronic device comprising this vapor chamber and a sheet for the vapor chamber. A wall portion provided between a plurality of first flow paths and a plurality of second flow paths provided between adjacent first flow paths, and disposed between the adjacent second flow paths. wherein the length of the joining interface of the sheets at the wall is greater than the minimum width of the wall at the cross-section. [Selection drawing] Fig. 27

Description

  The present disclosure relates to a vapor chamber that transports heat by recirculating a working fluid enclosed in a sealed space with a phase change.

  The amount of heat generated from electronic components such as CPUs (central processing units) provided in portable terminals such as personal computers and mobile phones and tablet terminals tends to increase due to the improvement of information processing capability, and cooling technology is important. is there. A heat pipe is well known as a means for such cooling. In this method, the working fluid sealed in the pipe diffuses the heat in the heat source by transporting it to other parts, thereby cooling the heat source.

  On the other hand, in recent years, thinning is particularly remarkable in portable terminals and the like, and cooling means thinner than conventional heat pipes has become necessary. On the other hand, for example, a vapor chamber as described in Patent Document 1 has been proposed.

  The vapor chamber is a device that develops the concept of heat transport by heat pipes into a flat member. That is, the working fluid is sealed between the opposing flat plates in the vapor chamber, and the working fluid recirculates with a phase change to perform heat transport, and transport and diffuse the heat in the heat source to Cooling.

More specifically, a steam channel and a condensate channel are provided between the opposing flat plates of the vapor chamber, and a working fluid is sealed therein. When the vapor chamber is disposed in the heat source, the working fluid receives the heat from the heat source and evaporates in the vicinity of the heat source to become a gas (vapor) and move through the vapor flow path. Thereby, the heat from the heat source is smoothly transported to a position away from the heat source, and as a result, the heat source is cooled.
The working fluid in a gaseous state that has transported heat from the heat source moves to a position away from the heat source, and is cooled and condensed by absorbing the heat to the surroundings, and changes into a liquid state. The phase-change working fluid in the liquid state passes through the condensate flow path, returns to the position of the heat source, receives the heat from the heat source, and evaporates to change to a gas state.
The heat generated from the heat source by the above circulation is transported to a position away from the heat source, and the heat source is cooled.

  Patent Document 1 discloses a vapor chamber formed by joining two flat plates as described above in order to form a steam channel and a condensate channel.

JP 2009-0776650 A

  This indication makes it a subject to provide the vapor chamber which can suppress the fracture | rupture of the wall part between flow paths, improving productivity. In addition, an electronic device including the vapor chamber and a sheet for the vapor chamber are provided.

  As a result of intensive studies, the inventor has obtained the knowledge that the fracture of the wall between the flow paths starts from the crystal grain boundary, and even if diffusion bonding is performed under conditions of high productivity so that the bonding interface does not disappear. The structure which can suppress the fracture | rupture of the wall part between roads was actualized.

One aspect of the present disclosure is a vapor chamber in which a working fluid is sealed in a sealed space inside the stack of a plurality of sheets, and the sealed space includes a plurality of first flow paths and adjacent first channels. and a second flow path provided between the first flow path, and the average of the flow path cross-sectional area of the two first flow path adjacent the a _g, disposed between the first flow path adjacent a plurality of the average flow path cross-sectional area of the second flow path when the a _l was, a _l at least a portion is not more than 0.5 times the a _g, is arranged between the second flow path adjacent In the cross section of the wall section, the length of the joining interface of the sheet in the wall section is longer than the minimum width of the wall section in the cross section.

  Another aspect of the present disclosure is a vapor chamber in which a working fluid is sealed in a sealed space inside the stack of a plurality of sheets, and a plurality of first fluids in which a gaseous working fluid flows in the sealed space. A cross section of a wall portion provided between the adjacent second flow paths, and a plurality of flow paths and a second flow path provided between the adjacent first flow paths, through which a working fluid in a liquid state flows. In the vapor chamber, the length of the joining interface of the sheet in the wall is longer than the minimum width of the wall in the cross section.

  In the vapor chamber, the length of the joining interface of the sheet in the wall portion is a cross section of the wall portion arranged between the adjacent first flow path and the second flow path, and the first flow path and the second flow path. You may comprise so that it may become longer than the minimum width of the wall part in the said cross section arrange | positioned between flow paths.

  Another aspect of the present disclosure is an electronic device including a housing, an electronic component disposed inside the housing, and the vapor chamber disposed in the electronic component.

Another aspect of the present disclosure is a vapor chamber sheet having a hollow portion in a laminate of a plurality of sheets, and the hollow portion is provided between the first flow paths adjacent to the plurality of first flow paths. and a second flow path that is, two of the adjacent an average of the flow path cross-sectional area of the first flow path and a _g, a plurality which are disposed between the adjacent first flow path the second when the average of the flow path cross-sectional area of the second flow path and the a _l, the a _l at least a portion is 0.5 times or less of a _g, walls are disposed between second channel adjacent section In this cross section, the length of the bonding interface of the sheet in the wall is longer than the minimum width of the wall in the cross section.

  Another aspect of the present disclosure is a vapor chamber sheet having a hollow portion that is a laminate of a plurality of sheets, and the hollow portion includes a plurality of first flows serving as vapor flow paths through which a working fluid in a gaseous state flows. And a second flow path provided as a condensate flow path through which a working fluid in a liquid state flows, and disposed between the adjacent second flow paths. In the cross section of the wall portion, the length of the bonding interface of the sheet in the wall portion is longer than the minimum width of the wall portion in the cross section.

  In the vapor chamber sheet, in the cross section of the wall portion disposed between the adjacent first flow path and the second flow path, the length of the bonding interface of the sheet in the wall portion is equal to the first flow path. It can comprise longer than the minimum width | variety of the wall part in the said cross section arrange | positioned between 2nd flow paths.

  According to the vapor chamber of the present disclosure, conditions for diffusion bonding can be relaxed, time can be shortened, and productivity can be increased.

FIG. 1 is a perspective view of a vapor chamber. FIG. 2 is an exploded perspective view of the vapor chamber. FIG. 3 is a perspective view of the first sheet. FIG. 4 is a plan view of the first sheet. FIG. 5 is a cut surface of the first sheet. FIG. 6 is another cut surface of the first sheet. FIG. 7 is another cut surface of the first sheet. FIG. 8 is an enlarged view of a part of the outer peripheral liquid flow path section in plan view. FIG. 9 is an enlarged view of a cross section of one liquid channel groove. FIG. 10 is an enlarged view of a cross section of one convex portion. FIG. 11 is an enlarged view of a part of an outer peripheral liquid flow path portion of another example in plan view. FIG. 12 is an enlarged view of a part of the outer peripheral liquid flow path portion of another example in plan view. FIG. 13 is an enlarged view of a part of the peripheral liquid channel portion of another example in plan view. FIG. 14 is an enlarged view of a part of an outer peripheral liquid flow path portion of another example in plan view. FIG. 15 is a cut surface focusing on one inner liquid flow path portion. FIG. 16 is an enlarged view of a cross section of one liquid channel groove. FIG. 17 is a diagram focusing on one convex portion. FIG. 18 is an enlarged view of a part of the inner liquid flow path section in plan view. FIG. 19 is a perspective view of the second sheet. FIG. 20 is a plan view of the second sheet. FIG. 21 is a cut surface of the second sheet. FIG. 22 is a cut surface of the second sheet. FIG. 23 is a cut surface of the vapor chamber. FIG. 24 is an enlarged view of a part of FIG. FIG. 25 is another cut surface of the vapor chamber. FIG. 26 is an enlarged view of the vicinity of one condensate flow path. FIG. 27 is an enlarged view of the vicinity of one wall portion. FIG. 28 is a diagram for explaining an example of a boundary form. FIG. 29 is a diagram illustrating an example of a boundary form. FIG. 30 is a diagram illustrating an example of a boundary form. FIG. 31 is a diagram illustrating an example of a boundary form. FIG. 32 is a diagram for explaining an example of the form of the boundary. FIG. 33 illustrates an electronic device. FIG. 34 is a diagram illustrating the flow of the working fluid. FIG. 35 is a view for explaining a vapor chamber according to another embodiment. FIG. 36 is a view for explaining a vapor chamber according to another embodiment.

  Hereinafter, the present disclosure will be described based on the embodiments shown in the drawings. In the drawings shown below, the size and ratio of members may be changed or exaggerated for easy understanding. In addition, for ease of viewing, illustrations of parts unnecessary for description and repetitive symbols may be omitted.

  FIG. 1 is an external perspective view of a vapor chamber 1 according to one embodiment, and FIG. 2 is an exploded perspective view of the vapor chamber 1. In these figures and the following figures, arrows (x, y, z) indicating directions are also displayed for convenience as necessary. Here, the xy in-plane direction is the plate surface direction of the vapor chamber 1 having a flat plate shape, and the z direction is the thickness direction.

  The vapor chamber 1 has a first sheet 10 and a second sheet 20 as can be seen from FIGS. 1 and 2. As described later, the first sheet 10 and the second sheet 20 are overlapped and diffusion-bonded to form a sealed space 2 between the first sheet 10 and the second sheet 20. (For example, refer FIG. 23) The working fluid is enclosed in this sealed space 2.

In this embodiment, the first sheet 10 is a sheet-like member as a whole. 3 is a perspective view of the first sheet 10 viewed from the inner surface 10a side, and FIG. 4 is a plan view of the first sheet 10 viewed from the inner surface 10a side. FIG. 5 shows a cut surface of the first sheet 10 when cut along III-III in FIG.
The first sheet 10 includes an inner surface 10a, an outer surface 10b opposite to the inner surface 10a, and a side surface 10c that connects the inner surface 10a and the outer surface 10b to form a thickness, and the working fluid flows back to the inner surface 10a side. A pattern for the flow path is formed. As will be described later, a hollow portion is formed by overlapping the inner surface 10a of the first sheet 10 and the inner surface 20a of the second sheet 20 so as to face each other, and a sealed space is formed by sealing the working fluid therein. 2 is formed.

Such a first sheet 10 includes a main body 11 and an injection part 12. The main body 11 has a sheet shape that forms a portion where the working fluid recirculates. In this embodiment, the main body 11 has a rectangular shape with a circular arc (so-called R) in plan view.
However, the main body 11 of the first sheet 10 is a quadrilateral shape as in the present embodiment, a circular shape, an elliptical shape, a triangular shape, other polygonal shapes, and a shape having a bent portion, for example, an L shape, a T shape, It may be a crank type or the like. Moreover, it can also be set as the shape which combined at least 2 of these.

  The injection part 12 is a part that injects a working fluid into the hollow part formed by the first sheet 10 and the second sheet 20 to form the sealed space 2 (see, for example, FIG. 23). It is a sheet shape of a square in plan view that protrudes from one side that is a rectangular shape.

The thickness of the first sheet 10 is not particularly limited, but is preferably 1.0 mm or less, may be 0.75 mm or less, and may be 0.5 mm or less. On the other hand, the thickness is preferably 0.02 mm or more, may be 0.05 mm or more, and may be 0.1 mm or more. The thickness range may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. Further, the thickness range may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
Thereby, the scene which can be applied as a thin vapor chamber can be increased.

Moreover, although the material which comprises the 1st sheet | seat 10 is not specifically limited, It is preferable that it is a metal with high heat conductivity. Examples of this include copper and copper alloys.
However, it is not necessarily a metal material, and ceramics such as AlN, Si ₃ N ₄ , or Al ₂ O ₃ , and resins such as polyimide and epoxy are also possible.
Moreover, what laminated | stacked two or more types of materials within one sheet | seat may be used, and material may differ with parts.

  On the inner surface 10a side of the main body 11, a structure for returning the working fluid is formed. Specifically, on the inner surface 10a side of the main body 11, an outer peripheral joint portion 13, an outer peripheral liquid flow passage portion 14, an inner liquid flow passage portion 15, a vapor flow passage groove 16, and a vapor flow passage communication groove 17 are provided. Configured.

The outer peripheral joint 13 is a surface formed on the inner surface 10 a side of the main body 11 along the outer periphery of the main body 11. The outer peripheral joint 13 overlaps with the outer peripheral joint 23 of the second sheet 20 and is diffusion bonded to form a hollow portion between the first sheet 10 and the second sheet 20, and the working fluid is enclosed therein. Thus, the sealed space 2 is obtained.
The width of the outer peripheral joint portion 13 indicated by A in FIGS. 4 and 5 (the size in the direction orthogonal to the direction in which the outer peripheral joint portion 13 extends and the width at the joint surface with the second sheet 20) is appropriately determined as necessary. Although it can be set, the width A is preferably 3 mm or less, may be 2.5 mm or less, and may be 2.0 mm or less. If the width A is larger than 3 mm, the internal volume of the sealed space is reduced, and there is a possibility that a sufficient steam flow path or condensate flow path cannot be secured. On the other hand, the width A is preferably 0.2 mm or more, may be 0.6 mm or more, and may be 0.8 mm or more. If the width A is smaller than 0.2 mm, the joining area may be insufficient when a positional shift occurs during joining of the first sheet and the second sheet. The range of the width A may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. Further, the range of the width A may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.

  In addition, holes 13 a penetrating in the thickness direction (z direction) are provided at the four corners of the main body 11 in the outer peripheral joint portion 13. The hole 13a functions as a positioning means when overlapping with the second sheet 20.

  The outer peripheral liquid flow path part 14 functions as a liquid flow path part, and is a part constituting a part of the condensate flow path 3 that is a second flow path through which the working fluid is condensed and liquefied. 6 shows a portion indicated by an arrow IVa in FIG. 5, and FIG. 7 shows a cut surface of a portion cut by IVb-IVb in FIG. In any of the drawings, the cross-sectional shape of the outer peripheral liquid flow path portion 14 appears. FIG. 8 shows an enlarged view of the outer peripheral liquid flow path portion 14 as seen from the direction indicated by the arrow V in FIG.

  As can be seen from these drawings, the outer peripheral liquid flow path portion 14 is formed along the inner side of the outer peripheral joint portion 13 and along the outer periphery of the sealed space 2 in the inner surface 10 a of the main body 11. Further, the outer peripheral liquid flow path portion 14 is formed with a liquid flow path groove 14a that is a plurality of grooves extending along the outer peripheral direction of the main body 11, and the plurality of liquid flow path grooves 14a are formed by the liquid flow path grooves 14a. They are arranged at a predetermined interval in a direction different from the extending direction. Therefore, as can be seen from FIG. 6 and FIG. 7, the outer peripheral liquid flow path portion 14 is uneven on the inner surface 10a side in the cross section with the liquid flow channel groove 14a that is a concave portion and the convex portion 14b that is between the liquid flow channel grooves 14a. Is formed repeatedly.

  By providing a plurality of liquid flow channel grooves 14a in this way, the depth and width of each liquid flow channel groove 14a are reduced, and the condensate flow channel 3 that is the second flow channel (see FIG. 24 and the like). It is possible to use a large capillary force by reducing the cross-sectional area of the channel. On the other hand, by providing a plurality of liquid flow channel grooves 14a, the total flow cross-sectional area of the condensate flow channel 3 is ensured to have a suitable size, and a condensate having a necessary flow rate can flow.

Here, since the liquid channel groove 14a is a groove, in the cross-sectional shape thereof, the liquid channel groove 14a includes a bottom portion provided on the outer surface 10b side, and an opening provided on the inner surface 10a side opposite to the bottom portion. Yes. FIG. 9 is an enlarged view of one liquid channel groove 14a in FIG.
In this embodiment, the liquid channel groove 14a has a semi-elliptical cross section. However, the cross-sectional shape is not limited to a semi-elliptical shape, but a circle, a rectangle, a square, a quadrangle such as a trapezoid, other polygons, other geometric shapes, or a combination of any of these. It may be.

  FIG. 10 shows an enlarged portion of one convex portion 14b in FIG. The convex portion 14b of this embodiment is a convex portion formed between adjacent liquid flow channel grooves 14a, and a convex portion formed between the vapor flow channel groove 16 and the liquid flow channel groove 14a. The top is a flat surface before joining to the second sheet 20. This convex part 14b becomes the wall part 3a of the condensate flow path 3, which is the adjacent second flow path, and the wall part 3a between the vapor flow path 4 and the condensate flow path 3.

Furthermore, in this embodiment, as can be seen from FIG. 8, in the outer peripheral liquid flow path section 14, the adjacent liquid flow path grooves 14a communicate with each other through a communication opening 14c at a predetermined interval. Thereby, equalization of the amount of condensate is promoted between the plurality of liquid flow channel grooves 14a, the condensate can be efficiently flowed, and the working fluid can be smoothly circulated.
In this embodiment, as shown in FIG. 8, the communication opening 14c is arranged so as to face the same position in the direction in which the liquid flow channel groove 14a extends across the groove of one liquid flow channel groove 14a. However, the present invention is not limited to this. For example, as shown in FIG. 11, the communication opening 14 c may be arranged at a different position in the direction in which one liquid flow channel groove 14 a extends. That is, the convex portions 14b and the communication openings 14c may be alternately arranged along a direction orthogonal to the direction in which the liquid flow channel groove 14a extends.

In addition, it can also be set as a form as described, for example in FIGS. 12 to 14 show one condensate channel 14a, two convex portions 14b sandwiching the condensate flow channel 14a, and one communication opening 14c provided in each convex portion 14b from the same viewpoint as FIG. The figure is shown. In any of these, the shape of the convex portion 14b is different from the example of FIG. 8 at the viewpoint (plan view).
That is, in the convex part 14b shown in FIG. 8, the width | variety is the same as that of another site | part also in the edge part in which the communication opening part 14c is formed, and is constant. On the other hand, in the convex part 14b of the shape shown in FIGS. 12-14, the width | variety is formed in the edge part in which the communication opening part 14c is formed so that it may become smaller than the maximum width of the convex part 14b. . More specifically, in the example of FIG. 12, the corners are arcuate at the end and the width of the end is reduced by forming R at the corner, and FIG. 13 is semicircular at the end. This is an example in which the width of the end portion is reduced, and FIG. 14 is an example in which the end portion is tapered so as to be sharp.

  As shown in FIG. 12 to FIG. 14, the end of the convex portion 14 b where the communication opening 14 c is formed has a width that is smaller than the maximum width of the convex portion 14 b, thereby allowing communication. The working fluid can easily move through the opening 14c, and the working fluid can be easily moved to the adjacent condensate flow path 3.

It is preferable that the outer periphery liquid flow path part 14 provided with the above structures is further provided with the following structure.
The width of the outer peripheral liquid flow path portion 14 indicated by B in FIGS. 4 to 7 (the size in the direction in which the liquid flow path portions 14a are arranged and the width at the joint surface with the second sheet 20) is the entire vapor chamber. The width B is preferably 3.0 mm or less, may be 1.5 mm or less, and may be 1.0 mm or less. If the width B exceeds 2 mm, there is a risk that sufficient space for the inner liquid flow path and the vapor flow path cannot be obtained. On the other hand, the width B is preferably 0.1 mm or more, may be 0.2 mm or more, and may be 0.4 mm or more. If the width B is smaller than 0.1 mm, there is a possibility that a sufficient amount of the liquid refluxing outside cannot be obtained. The range of the width B may be determined by any one of the plurality of upper limit candidate values and one combination of the plurality of lower limit candidate values. The range of the width B may be determined by combining any two of the plurality of upper limit candidate values or by combining any two of the plurality of lower limit candidate values.
And the said width B may be the same as the width | variety S (refer FIG. 21) of the outer periphery liquid flow-path part 24 of the 2nd sheet | seat 20, and may be large or small. In this embodiment, it is the same.

For liquid flow path grooves 14a, 6, 8, the groove width shown in C ₁ in FIG. 9 (liquid flow path groove 14a is the direction of the magnitude to be arranged, the width of the opening surface of the groove) is a 1000μm or less Preferably, it may be 500 μm or less, or 200 μm or less. On the other hand, it is preferable that the width _{C 1} is 20μm or more, may also be 45μm or more, may be 60μm or more. Range of the width C ₁ is any one of the candidate values of said plurality of upper limit may be determined by one combination of the candidate value of the plurality of lower limit. Further, the range of the width C ₁ combines any two of the candidate value of the plurality of upper or may be defined by any combination of two candidate values for the plurality of lower limit.
In addition, the depth of the groove indicated by D in FIGS. 6, 7, and 9 is preferably 200 μm or less, may be 150 μm or less, and may be 100 μm or less. On the other hand, the depth D is preferably 5 μm or more, may be 10 μm or more, and may be 20 μm or more. The range of the depth D may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. The range of the depth D may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
By comprising as mentioned above, the capillary force of the condensate flow path required for reflux can be exhibited more strongly.

From the viewpoint of exhibiting stronger capillary force of the condensate flow path, the aspect ratio of the represented passage cross section divided by the depth D of the groove width C ₁ (aspect ratio) is greater than 1.0 Is preferred. This ratio may be 1.5 or more, or 2.0 or more. Alternatively, the aspect ratio may be smaller than 1.0. This ratio may be 0.75 or less, and may be 0.5 or less.
Among these, C ₁ is preferably larger than D from the viewpoint of production, and from this viewpoint, the aspect ratio is preferably larger than 1.3.

Moreover, it is preferable that the pitch of the adjacent liquid flow path groove 14a in the some liquid flow path groove 14a is 1100 micrometers or less, and may be 550 micrometers or less, and may be 220 micrometers or less. On the other hand, the pitch is preferably 30 μm or more, may be 55 μm or more, and may be 70 μm or more. The pitch range may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. Further, the pitch range may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
Thereby, it is possible to prevent the condensate flow path from being crushed due to deformation during joining or assembly while increasing the density of the condensate flow path.

For convex portion 14b, 6, 8, (size in the direction in which the direction orthogonal to the direction in which the protrusion extends, a plurality of protrusions 14b are arranged) width of the convex portion 14b shown in FIG. 10 C ₂ is It is preferably 400 μm or less, may be 300 μm or less, and may be 200 μm or less. On the other hand, it is preferred that the width _{C 2} is 10μm or more, may also be 20μm or more, may be 30μm or more. The range of the width C ₂ may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. Further, the range of the width C ₂ combines any two of the candidate value of the plurality of upper or may be defined by any combination of two candidate values for the plurality of lower limit.

  Regarding the communication opening 14c, the size of the opening along the direction in which the liquid flow channel 14a shown by E in FIG. 8 extends is preferably 1100 μm or less, may be 550 μm or less, and may be 220 μm or less. May be. On the other hand, the size E is preferably 30 μm or more, may be 55 μm or more, and may be 70 μm or more. The range of the magnitude E may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. The range of the magnitude E may be determined by combining any two of a plurality of upper limit candidate values, or by combining any two of a plurality of lower limit candidate values.

  Further, the pitch of the adjacent communication openings 14c in the direction in which the liquid flow channel groove 14a shown by F in FIG. 8 extends is preferably 2700 μm or less, may be 1800 μm or less, and may be 900 μm or less. . On the other hand, the pitch F is preferably 60 μm or more, 110 μm or more, or 140 μm or more. The pitch range may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. Further, the pitch range may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.

  Returning to FIGS. 3 to 5, the inner liquid flow path portion 15 will be described. The inner liquid flow path portion 15 also functions as a liquid flow path portion, and is a part constituting a part of the condensate flow path 3 that is a second flow path through which the working fluid is condensed and liquefied. FIG. 15 shows a portion indicated by an arrow VIII in FIG. Also in this figure, the cross-sectional shape of the inner liquid flow path portion 15 appears. FIG. 18 shows an enlarged view of the inner liquid flow path portion 15 as viewed from the direction indicated by the arrow X in FIG.

As can be seen from these drawings, the inner liquid flow path portion 15 is formed on the inner surface 10 a of the main body 11 on the inner side of the annular ring of the outer peripheral liquid flow path portion 14. As can be seen from FIG. 3 and FIG. 4, the inner liquid flow path portion 15 of the present embodiment is a wall extending in a direction (x direction) parallel to the long side of the main body 11 in a plan view rectangle. Are arranged at a predetermined interval in a direction (y direction) parallel to the short side.
Each inner liquid flow path section 15 is formed with a liquid flow path groove 15a that is a groove parallel to the direction in which the inner liquid flow path section 15 extends, and a plurality of liquid flow path grooves 15a includes the liquid flow path grooves 15a. They are arranged at a predetermined interval in a direction different from the extending direction. Therefore, as can be seen from FIG. 5 and FIG. 15, the inner liquid flow path portion 15 has, on its inner surface 10a side in the cross section, a convex line formed by the liquid flow groove 15a that is a concave portion and the convex portion 15b that is between the liquid flow groove 15a. Are repeatedly formed with unevenness.

  By providing the plurality of liquid flow channel grooves 15a in this way, the depth and width of each liquid flow channel groove 15a are reduced, and the condensate flow channel 3 as the second flow channel (see FIG. 24 and the like). It is possible to use a large capillary force by reducing the cross-sectional area of the channel. Further, the condensate flow path 3 can be formed with a further minute groove on its inner surface, thereby obtaining a larger capillary force. On the other hand, by providing a plurality of liquid flow channel grooves 15a, the flow channel cross-sectional area of the condensate flow channel 3 as a whole is ensured to have a suitable size, and a necessary flow rate of the condensate can be flowed.

Here, since the liquid flow channel groove 15a is a groove, in the cross-sectional shape thereof, an opening provided on the inner surface 10a side at a bottom portion provided on the outer surface 10b side and an opposite side portion facing the bottom portion is provided. I have. FIG. 16 is an enlarged view of one liquid channel groove 15a in FIG.
In this embodiment, the liquid channel groove 15a has a semi-elliptical cross section. However, the cross-sectional shape is not limited to a semi-elliptical shape, but is a circle, a rectangle, a square, a quadrangle such as a trapezoid, other polygons, other geometric shapes, or a combination of any of these. Form may be sufficient.

  FIG. 17 shows an enlarged portion of one convex portion 15b in FIG. The convex portion 15b of the present embodiment is a convex portion formed between the adjacent liquid flow channel grooves 15a and between the vapor flow channel groove 16 and the liquid flow channel groove 15a. The surface is flat before joining. This convex portion 15 b becomes a wall portion 3 a of the condensate flow path 3 adjacent to each other, and a wall portion 3 a between the vapor flow path 4 and the condensate flow path 3.

Further, as can be seen from FIG. 18, the adjacent liquid flow channel grooves 15a communicate with each other through a communication opening 15c at a predetermined interval. Thereby, equalization of the amount of condensate is promoted between the plurality of liquid passage grooves 15a, and the condensate can be efficiently flowed, so that the working fluid can be smoothly recirculated.
Similarly to the communication opening 14c, the communication opening 15c is similar to the example shown in FIG. 11 in that the protrusion 15b and the communication opening 15c are aligned along the direction orthogonal to the direction in which the liquid flow channel 15a extends. May be arranged alternately. Moreover, it is good also as a shape of the communication opening part 15c and the convex part 15b according to the example of FIGS.

It is preferable that the inner liquid flow path part 15 provided with the above configuration further includes the following configuration.
The width of the inner liquid channel portion 15 indicated by G in FIGS. 4, 5, and 15 (the size in the direction in which the inner liquid channel portion 15 and the vapor channel groove 16 are arranged, The width at the bonding surface is preferably 3000 μm or less, may be 1500 μm or less, and may be 1000 μm or less. On the other hand, the width G is preferably 100 μm or more, may be 200 μm or more, and may be 400 μm or more. The range of the width G may be determined by any one of the plurality of upper limit candidate values and one combination of the plurality of lower limit candidate values. The range of the width G may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
The width G may be the same as or different from the width T (see FIG. 21) of the inner liquid flow path portion 25 of the second sheet 20. In this embodiment, it is the same.

Further, the pitch of the plurality of inner liquid flow path portions 15 is preferably 4000 μm or less, may be 3000 μm or less, and may be 2000 μm or less. On the other hand, the pitch is preferably 200 μm or more, may be 400 μm or more, and may be 800 μm or more. The pitch range may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. Further, the pitch range may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
Thereby, the channel resistance of the steam channel can be lowered, and the movement of the steam and the reflux of the condensate can be performed in a balanced manner.

For liquid flow path grooves 15a, Figure 17, (a size in a direction where the liquid flow path grooves 15a are arranged, the width of the opening surface of the groove) groove width shown in the H ₁ in FIG. 18 that is 1000μm or less It may be preferably 500 μm or less, or 200 μm or less. On the other hand, the width H is preferably 20 μm or more, may be 45 μm or more, and may be 60 μm or more. The scope of the width H ₁ is any one of the candidate values of said plurality of upper limit may be determined by one combination of the candidate value of the plurality of lower limit. Further, the range of the width H ₁ combines any two of the candidate value of the plurality of upper or may be defined by any combination of two candidate values for the plurality of lower limit.
Further, the depth of the groove indicated by J in FIGS. 15 and 16 is preferably 200 μm or less, may be 150 μm or less, and may be 100 μm or less. On the other hand, the depth J is preferably 5 μm or more, may be 10 μm or more, and may be 20 μm or more. The range of the depth J may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. The range of the depth J may be determined by combining any two of the plurality of upper limit candidate values or by combining any two of the plurality of lower limit candidate values.
Thereby, the capillary force of the condensate flow path required for reflux can be exerted strongly.

From the viewpoint of exhibiting stronger capillary force of the channel, the aspect ratio of the passage cross-section represented by the value obtained by dividing the depth J of the groove width H ₁ (aspect ratio) is preferably greater than 1.0 . It may be 1.5 or more, or 2.0 or more. Or it may be smaller than 1.0, may be 0.75 or less, and may be 0.5 or less.
Is preferably larger than the groove width H ₁ is the depth J from a manufacturing point of view, among them, the aspect ratio from this standpoint is preferably greater than 1.3.

Further, the pitch of the adjacent liquid flow channel grooves 15a in the plurality of liquid flow channel grooves 15a is preferably 1100 μm or less, may be 550 μm or less, and may be 220 μm or less. On the other hand, this pitch is preferably 30 μm or more, 55 μm or more, or 70 μm or more. The pitch range may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. Further, the pitch range may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
Thereby, it is possible to prevent the flow path from being crushed due to deformation during joining or assembly while increasing the density of the condensate flow path.

  Further, with respect to the communication opening 15c, the size of the opening along the direction in which the liquid flow channel 15a indicated by K in FIG. 18 extends is preferably 1100 μm or less, and may be 550 μm or less, or 220 μm or less. It may be. On the other hand, the size K is preferably 30 μm or more, may be 55 μm or more, and may be 70 μm or more. The range of the magnitude K may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. Further, the range of the magnitude K may be determined by combining any two of a plurality of upper limit candidate values, or by combining any two of a plurality of lower limit candidate values.

  Further, the pitch of adjacent communication openings 15c indicated by L in FIG. 18 in the direction in which the liquid channel groove 15a extends is preferably 2700 μm or less, may be 1800 μm or less, and may be 900 μm or less. Good. On the other hand, the pitch L is preferably 60 μm or more, may be 110 μm or more, and may be 140 μm or more. The pitch range may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. The pitch range may be determined by combining any two of a plurality of upper limit candidate values, or by combining any two of a plurality of lower limit candidate values.

  The liquid flow channel groove 14a and the liquid flow channel groove 15a of the present embodiment described above are spaced apart at equal intervals and parallel to each other. However, the present invention is not limited to this. The pitch may vary, and the grooves do not have to be parallel.

  Next, the steam channel groove 16 will be described. The steam channel groove 16 is a portion through which vapor vaporized by evaporation of the working fluid passes and constitutes a part of the steam channel 4 (see FIG. 23 and the like) that is the first channel. FIG. 4 shows the shape of the steam channel groove 16 in plan view, and FIG. 5 shows the cross-sectional shape of the steam channel groove 16.

As can be seen from these drawings, the steam channel groove 16 is constituted by a groove formed inside the annular ring of the outer peripheral liquid channel portion 14 in the inner surface 10 a of the main body 11. Specifically, the steam channel groove 16 of the present embodiment is formed between the adjacent inner liquid channel portions 15 and between the outer peripheral liquid channel portion 14 and the inner liquid channel portion 15, and is a plan view of the main body 11. It is a rectangular groove extending in the direction parallel to the long side (x direction). A plurality (four in this embodiment) of the steam flow channel 16 are arranged in a direction (y direction) parallel to the short side. Therefore, as can be seen from FIG. 5, the first sheet 10 has the ridges of the outer peripheral liquid flow path portion 14 and the inner liquid flow path portion 15 and the concave and convex portions having the vapor flow path groove 16 as the ridges in the y direction. It has a shape.
Here, since the steam channel groove 16 is a groove, in the cross-sectional shape thereof, the bottom portion on the outer surface 10b side and the opening on the inner surface 10a side on the opposite side facing the bottom portion are provided.

The steam channel groove 16 having such a configuration preferably further has the following configuration.
The width of the steam channel groove 16 indicated by M in FIGS. 4 and 5 (the size in the direction in which the inner liquid channel portion 15 and the steam channel groove 16 are arranged and the width at the opening surface of the groove) is at least The liquid channel grooves 14a and 15a described above are formed larger than the width C ₁ and the width H ₁ , preferably 2000 μm or less, may be 1500 μm or less, and may be 1000 μm or less. On the other hand, the width M is preferably 100 μm or more, may be 200 μm or more, and may be 400 μm or more. The range of the width M may be determined by any one of the plurality of upper limit candidate values and one combination of the plurality of lower limit candidate values. The range of the width M may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
In general, the pitch of the steam channel grooves 16 is determined by the pitch of the inner liquid channel portion 15.

On the other hand, the depth of the steam channel groove 16 indicated by N in FIG. 5 is formed to be at least larger than the depth D and the depth J of the liquid channel grooves 14a and 15a described above, and is preferably 300 μm or less. It may be 200 μm or less, or 100 μm or less. On the other hand, the depth N is preferably 10 μm or more, may be 25 μm or more, and may be 50 μm or more. The range of the depth N may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. The range of the depth N may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
In this way, by making the flow channel cross-sectional area of the vapor flow channel groove larger than that of the liquid flow channel groove, the vapor having a volume larger than that of the condensate can be smoothly refluxed due to the nature of the working fluid.

  In this embodiment, the cross-sectional shape of the steam channel groove 16 is a semi-elliptical shape. However, the shape is not limited to this. The shape which combined any one of these may be sufficient. Since the steam flow path can smoothly recirculate the working fluid by reducing the flow resistance of the steam, the shape of the cross section of the flow path can also be determined from this viewpoint.

In the present embodiment, an example in which one vapor channel groove 16 is formed between adjacent inner liquid channel portions 15 has been described. However, the present invention is not limited to this. The steam flow channel grooves may be arranged side by side.
Further, as long as the steam flow path groove is formed in the second sheet 20, a form in which the steam flow path groove is not formed in part or all of the first sheet 10 may be employed.

  The steam channel communication groove 17 is a groove that allows the plurality of steam channel grooves 16 to communicate with each other. As a result, the steam in the plurality of steam channel grooves 16 can be equalized, or the steam can be transported to a wider range and more condensate channels 3 can be used efficiently. It becomes possible to make the recirculation | reflux of smoother.

As can be seen from FIGS. 3 and 4, the steam channel communication groove 17 of this embodiment is provided between the inner liquid channel portion 15 and both ends in the direction in which the steam channel groove 16 extends and the outer peripheral fluid channel portion 14. Is formed. Further, FIG. 7 shows a cross section perpendicular to the communication direction of the steam flow channel communication groove 17 at a cut surface along a line indicated by IVb-IVb in FIG.
In FIG. 2 to FIG. 4, a dotted line is attached to a portion that should be a boundary between the steam flow path groove 16 and the steam flow path communication groove 17 for easy understanding. However, this line is not necessarily a line that appears depending on the shape, but a virtual line that is attached for the sake of clarity.

The steam channel communication groove 17 only needs to be formed so that adjacent steam channel grooves 16 communicate with each other, and the shape thereof is not particularly limited. For example, the steam channel communication groove 17 may have the following configuration. .
4 and 7, the width of the steam flow channel communication groove 17 (the size in the direction orthogonal to the communication direction and the width of the groove opening surface) is preferably 1000 μm or less, and preferably 750 μm or less. It may be 500 μm or less. On the other hand, the width P is preferably 100 μm or more, may be 150 μm or more, and may be 200 μm or more. The range of the width P may be determined by any one of the plurality of upper limit candidate values and one combination of the plurality of lower limit candidate values. The range of the width P may be determined by combining any two of the plurality of upper limit candidate values or by combining any two of the plurality of lower limit candidate values.
In addition, the depth of the steam flow path communication groove 17 indicated by Q in FIG. 7 is preferably 300 μm or less, may be 225 μm or less, and may be 150 μm or less. On the other hand, the depth Q is preferably 10 μm or more, may be 25 μm or more, and may be 50 μm or more. The range of the depth Q may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. The range of the depth Q may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.

In this embodiment, the cross-sectional shape of the steam channel communication groove 17 is a semi-elliptical shape, but is not limited to this, a rectangle, a square, a quadrangle such as a trapezoid, a triangle, a semi-circle, a bottom is a semi-circle, Any combination of these may be used.
Since the steam channel communication groove can reduce the flow resistance of the steam, the working fluid can be smoothly recirculated, so that the shape of the channel cross section can be determined from this viewpoint.

Next, the second sheet 20 will be described. In this embodiment, the second sheet 20 is also a sheet-like member as a whole. FIG. 19 is a perspective view of the second sheet 20 viewed from the inner surface 20a side, and FIG. 20 is a plan view of the second sheet 20 viewed from the inner surface 20a side. FIG. 21 shows a cut surface of the second sheet 20 when cut by XIIa-XIIa in FIG. FIG. 22 shows a cut surface of the second sheet 20 when cut by XIIb-XIIb in FIG.
The second sheet 20 includes an inner surface 20a, an outer surface 20b opposite to the inner surface 20a, and a side surface 20c that connects the inner surface 20a and the outer surface 20b to form a thickness, and a pattern in which the working fluid flows back to the inner surface 20a side. Is formed. As will be described later, a hollow portion is formed by overlapping the inner surface 20a of the second sheet 20 and the inner surface 10a of the first sheet 10 so as to face each other.

Such a second sheet 20 includes a main body 21 and an injection part 22. The main body 21 is a sheet-like part that forms a part where the working fluid recirculates. In this embodiment, the main body 21 has a rectangular shape with circular arcs (so-called R) formed in a plan view.
However, the main body 21 of the second sheet 20 is rectangular as in the present embodiment, circular, elliptical, triangular, other polygons, and a shape having a bent portion, for example, an L shape, a T shape, It may be a crank type or the like. Moreover, it can also be set as the shape which combined at least 2 of these.

The injection part 22 is a part that injects a working fluid into the hollow part formed by the first sheet 10 and the second sheet 20 to form a sealed space 2 (see FIG. 23). It is a sheet shape of a square in plan view that protrudes from one side that is a rectangular shape. In this embodiment, the injection groove 22a is formed on the inner surface 20a side in the injection portion 22 of the second sheet 20, and the side surface 20c of the second sheet 20 communicates with the inside of the main body 21 (the portion to be the sealed space 2). doing.
The thickness and material of the second sheet 20 can be considered in the same manner as the first sheet 10. However, the first sheet 10 and the second sheet 20 do not necessarily have the same thickness and material.

  On the inner surface 20a side of the main body 21, a structure for returning the working fluid is formed. Specifically, on the inner surface 20a side of the main body 21, an outer peripheral joint portion 23, an outer peripheral liquid flow passage portion 24, an inner liquid flow passage portion 25, a vapor flow passage groove 26, and a vapor flow passage communication groove 27 are provided. ing.

The outer peripheral joint portion 23 is a surface formed on the inner surface 20 a side of the main body 21 along the outer periphery of the main body 21. The outer peripheral joint 23 overlaps with the outer peripheral joint 13 of the first sheet 10 and is diffusion bonded to form a hollow portion between the first sheet 10 and the second sheet 20, and the working fluid is enclosed therein. Thus, the sealed space 2 is obtained.
The width of the outer peripheral joint 23 indicated by R in FIGS. 20 to 22 (the width in the direction orthogonal to the direction in which the outer peripheral joint 23 extends and the width at the joint surface with the first sheet 10) is particularly limited. However, it is preferably the same as the width A of the outer peripheral joint 13 of the main body 11 described above. However, they are not necessarily the same, and may be large or small.

  In addition, holes 23 a penetrating in the thickness direction (z direction) are provided at the four corners of the main body 21 in the outer peripheral joint portion 23. The hole 23a functions as a positioning means when overlapping with the first sheet 10.

  The outer peripheral liquid flow path portion 24 is a liquid flow path portion, and is a part constituting a part of the condensate flow path 3 that is a second flow path through which the working fluid is condensed and liquefied.

The outer peripheral liquid flow path portion 24 is formed along the inner side of the outer peripheral joint portion 23 in the inner surface 20 a of the main body 21. In this embodiment, the outer peripheral liquid flow path portion 24 of the second sheet 20 is a flat surface and is flush with the outer peripheral joint portion 23 before joining to the first sheet 10 as can be seen from FIGS. 21 and 22. As a result, the openings of the plurality of liquid flow channel grooves 14 a of the first sheet 10 are closed to form the condensate flow channel 3. Detailed aspects regarding the combination of the first sheet 10 and the second sheet 20 will be described later.
In this way, in the second sheet 20, the outer peripheral joint portion 23 and the outer peripheral liquid flow passage portion 24 are flush with each other. However, for the sake of simplicity, the boundary between the two is represented by a dotted line in FIGS.

It is preferable that the outer periphery liquid flow path part 24 is provided with the following structures.
20 to 22, the width of the outer peripheral liquid flow path portion 24 indicated by S (the width in the direction orthogonal to the direction in which the outer peripheral liquid flow path portion 24 extends and the width at the joint surface with the first sheet 10) is: It may be the same as the width B of the outer peripheral liquid flow path portion 14 of the first sheet 10, or may be larger or smaller.

  Next, the inner liquid flow path part 25 will be described. The inner liquid flow path portion 25 is also a liquid flow path portion, and is one part constituting the condensate flow path 3 that is the second flow path.

As can be seen from FIG. 19 to FIG. 22, the inner liquid flow path portion 25 is formed inside the annular ring of the outer peripheral liquid flow path portion 24 in the inner surface 20 a of the main body 21. The inner liquid flow path portion 25 of the present embodiment is a wall extending in a direction parallel to the long side (x direction) in a rectangular shape in plan view of the main body 21, and a plurality (three in this embodiment) of the inner liquid flow path portions 25 are provided. They are arranged at a predetermined interval in a direction (y direction) parallel to the short side.
In this embodiment, each inner liquid flow path portion 25 has a surface on the inner surface 20 a side formed by a flat surface before joining to the first sheet 10. Thereby, the openings of the plurality of liquid flow channel grooves 15a of the first sheet 10 are closed to form the condensate flow channel 3.

  20 and FIG. 21, the width of the inner liquid passage portion 25 indicated by T (the size in the direction in which the inner liquid passage portion 25 and the vapor passage groove 26 are arranged, on the joint surface with the first sheet 10. The width) may be the same as the width G of the inner liquid flow path portion 15 of the first sheet 10, or may be larger or smaller. In this embodiment, it is the same.

  In this embodiment, each inner liquid flow path portion 25 is formed with a flat surface before joining, but a liquid flow path groove may be formed in the same manner as the first sheet. In this case, the liquid flow channel grooves may be at the same position in plan view or may be shifted.

  Next, the steam channel groove 26 will be described. The steam channel groove 26 is a portion through which vapor vaporized by evaporation of the working fluid passes and constitutes a part of the steam channel 4. FIG. 20 shows the shape of the steam channel groove 26 in plan view, and FIG. 21 shows the cross-sectional shape of the steam channel groove 26.

As can be seen from these drawings, the steam flow path groove 26 is constituted by a groove formed on the inner surface 20a of the main body 21 inside the annular ring of the outer peripheral liquid flow path portion 24. Specifically, the steam channel groove 26 of this embodiment is formed between the adjacent inner liquid channel portions 25 and between the outer peripheral liquid channel portion 24 and the inner liquid channel portion 25, and is a plan view of the main body 21. It is a rectangular groove extending in the direction parallel to the long side (x direction). A plurality (four in this embodiment) of steam flow channel grooves 26 are arranged in a direction (y direction) parallel to the short side. Therefore, as can be seen from FIG. 21, the second sheet 20 has, in the y direction, a convexity by the walls that are the outer peripheral liquid flow path portion 24 and the inner liquid flow path portion 25 and a concaveity by the groove that is the vapor flow path groove 26. , These irregularities have a repeated shape.
Here, since the steam channel groove 26 is a groove, in the cross-sectional shape thereof, a bottom portion on the outer surface 20b side and an opening on the inner surface 20a side at a portion opposite to the bottom portion are provided. .

  It is preferable that the steam channel groove 26 is disposed at a position overlapping the steam channel groove 16 of the first sheet 10 in the thickness direction when combined with the first sheet 10. Thereby, the steam channel 4 can be formed by the steam channel groove 16 and the steam channel groove 26.

The width of the steam channel groove 26 indicated by U in FIGS. 20 and 21 (the size in the direction in which the inner liquid channel portion 25 and the steam channel groove 26 are arranged and the width at the opening surface of the groove) is It may be the same as the width M of the steam channel groove 16 of one sheet 10, or may be larger or smaller.
In addition, the depth of the vapor channel groove 26 indicated by V in FIG. 21 is preferably 300 μm or less, may be 225 μm or less, and may be 150 μm or less. On the other hand, the depth V is preferably 10 μm or more, may be 25 μm or more, and may be 50 μm or more. The range of the depth V may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. The range of the depth V may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
Further, the depth of the steam passage groove 16 of the first sheet 10 and the depth of the steam passage groove 26 of the second sheet 20 may be the same, and may be large or small.

  In this embodiment, the cross-sectional shape of the steam channel groove 26 is semi-elliptical, but rectangular, square, trapezoidal, etc., triangle, semi-circle, bottom semi-circular, bottom semi-elliptical, or some of these It may be a combined shape. Since the steam flow path can smoothly recirculate the working fluid by reducing the flow resistance of the steam, the shape of the cross section of the flow path can also be determined from this viewpoint.

In the present embodiment, the example in which one vapor channel groove 26 is formed between the adjacent inner liquid channel portions 25 has been described. The steam flow channel grooves may be arranged side by side.
Further, as long as the steam flow path groove is formed in the first sheet 10, a form in which the steam flow path groove is not formed in part or all of the second sheet 20 may be employed.

  The steam channel communication groove 27 is a groove that allows the plurality of steam channel grooves 26 to communicate with each other, and constitutes a part of the steam channel 4. As a result, the vapors of the plurality of vapor channels 4 are equalized, or the vapors are transported to a wider range, so that many condensate channels 3 can be used efficiently. The reflux can be made smoother.

  As can be seen from FIGS. 19, 20, and 22, the steam channel communication groove 27 of the present embodiment includes an inner liquid channel part 25, an end in the direction in which the steam channel groove 26 extends, and an outer peripheral liquid channel part. 24. FIG. 22 shows a cross section perpendicular to the communication direction of the steam flow channel communication groove 27.

The width of the steam channel communication groove 27 indicated by W in FIGS. 20 and 22 (the size in the direction orthogonal to the communication direction and the width at the opening surface of the groove) is the width of the steam channel communication groove 17 of the first sheet 10. The width P may be the same or different. Further, the depth of the steam flow path communication groove 27 indicated by X in FIG. 22 is preferably 300 μm or less, may be 225 μm or less, and may be 150 μm or less. On the other hand, the depth X is preferably 10 μm or more, may be 25 μm or more, and may be 50 μm or more. The range of the depth X may be determined by any one of the plurality of upper limit candidate values and one combination of the plurality of lower limit candidate values. The range of the depth X may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.
Moreover, the depth of the steam flow path communication groove 17 of the first sheet 10 and the depth of the steam flow path communication groove 27 of the second sheet 20 may be the same, and may be large or small.

  In this embodiment, the cross-sectional shape of the steam flow path communication groove 27 is a semi-elliptical shape, but is not limited to this, a rectangular shape, a square shape, a square shape such as a trapezoidal shape, a triangular shape, a semi-circular shape, a semi-circular shape at the bottom, a semi-elliptical shape at the bottom, or The shape may be a combination of some of these. Since the steam channel can be smoothly recirculated by reducing the flow resistance of the steam, the shape of the channel cross section can be determined from this viewpoint.

Next, the structure when the first sheet 10 and the second sheet 20 are combined into the vapor chamber 1 will be described. From this description, the arrangement, size, shape, and the like of each component included in the first sheet 10 and the second sheet 20 are further understood.
FIG. 23 shows a cut surface obtained by cutting the vapor chamber 1 in the thickness direction along the y direction indicated by XIII-XIII in FIG. This figure is a combination of the figure shown in FIG. 5 on the first sheet 10 and the figure shown in FIG. 21 on the second sheet 20 to represent the cut surface of the vapor chamber 1 at this part.
24 is an enlarged view of a portion indicated by an arrow XIV in FIG. 23, and FIG. 25 is a cross-sectional view cut in the thickness direction of the vapor chamber 1 along the x direction indicated by XV-XV in FIG. expressed. This figure is a combination of the figure shown in FIG. 7 for the first sheet 10 and the figure shown in FIG. 22 for the second sheet 20 to represent the cut surface of the vapor chamber 1 at this site.

  As can be seen from FIG. 1, FIG. 2, and FIGS. 23 to 25, the first sheet 10 and the second sheet 20 are arranged so as to be overlapped and diffusion bonded to form the vapor chamber 1. At this time, the inner surface 10a of the first sheet 10 and the inner surface 20a of the second sheet 20 are arranged so as to face each other, the main body 11 of the first sheet 10 and the main body 21 of the second sheet overlap, The injection part 12 and the injection part 22 of the second sheet 20 overlap. In this embodiment, the relative positional relationship between the first sheet 10 and the second sheet 20 is configured to be appropriate by aligning the positions of the hole 13a of the first sheet 10 and the hole 23a of the second sheet 20. ing.

  With such a laminate of the first sheet 10 and the second sheet 20, the components included in the main body 11 and the main body 21 are arranged as shown in FIGS. 23 to 25. Specifically, it is as follows.

  It arrange | positions so that the outer periphery junction part 13 of the 1st sheet | seat 10 and the outer periphery junction part 23 of the 2nd sheet | seat 20 may overlap, and both are joined by diffusion bonding. Thereby, a hollow part is formed between the 1st sheet | seat 10 and the 2nd sheet | seat 20, and it is set as the sealed space 2 by sealing a working fluid here.

It arrange | positions so that the outer periphery liquid flow-path part 14 of the 1st sheet | seat 10 and the outer periphery liquid flow-path part 24 of the 2nd sheet | seat 20 may overlap. As a result, the condensate channel 3 is formed as the second channel through which the condensate in which the working fluid is condensed and liquefied is formed by the liquid channel groove 14a of the outer periphery liquid channel portion 14 and the outer periphery liquid channel portion 24. Is done.
Similarly, it arrange | positions so that the inner side liquid flow-path part 15 of the 1st sheet | seat 10 and the inner side liquid flow-path part 25 of the 2nd sheet | seat 20 may overlap. As a result, the condensate channel 3, which is the second channel through which the condensate flows, is formed by the liquid channel groove 15 a of the inner liquid channel unit 15 and the inner liquid channel unit 25.
Thus, since the condensate flow path 3 is formed separately from the vapor flow path 4 which is the first flow path, the working fluid can be circulated smoothly. Moreover, by forming a condensate flow path 3 with a narrow flow path surrounded by walls in the cross section, the condensate can be moved with a strong capillary force, thereby enabling smooth circulation.

Furthermore, in this embodiment, after joining, the wall 3a formed between the condensate flow path 3 and the adjacent condensate flow path 3 is configured as follows. FIG. 26 shows an enlarged cross section of one condensate flow path 3. In FIG. 27, the cross section of the wall part 3a formed between the adjacent condensate flow paths 3 was expanded and represented. The wall portion 3 a is formed by overlapping the convex portion 15 b of the inner liquid flow path portion 15 and the surface of the inner liquid flow path portion 25.
Here, the liquid flow channel groove 15a of the inner liquid flow channel portion 15, the condensate flow channel 3 including the convex portion 15b and the inner liquid flow channel portion 25, and the wall portion 3a will be described. The condensate flow path 3 and the wall 3a by the outer peripheral liquid flow path section 24 can be considered in the same manner. Moreover, although the wall part 3a between the adjacent condensate flow paths 3 is demonstrated here, the wall part 3a formed between the vapor | steam flow path 4 and the condensate flow path 3 can also be considered similarly. .

A boundary 3b between the first sheet 10 and the second sheet 20 in the wall 3a indicated by reference numeral 3b in FIG. 27 is formed so as to be longer than the dotted line without matching the dotted line XVIb shown in FIG. Here, a dotted line XVIb represents a line having the smallest width in the wall 3a.
That is, in the wall 3a formed between adjacent condensate flow paths, the length in the width direction of the wall 3a of the boundary 3b between the first sheet 10 and the second sheet 20 in the cross-sectional view is the wall. It is longer than the minimum width of 3a. Here, the “minimum width of the wall portion” is the smallest of the length of the wall portion in the direction in which the condensate flow path 3 and the vapor flow path 4 are arranged in the cross section of the wall portion 3a. means. And in the same cross section as this minimum width | variety, the length of the boundary 3b is made larger than the said minimum width | variety.
Thereby, even if the binding force of the 1st sheet | seat 10 and the 2nd sheet | seat 20 in the wall part 3a is raised, the internal pressure of the sealed space 2 increases, and water is contained as a working fluid, it is in the environment below freezing point. Even if the volume increases due to ice, the breakage of the wall 3a can be suppressed.
In addition, this makes it possible to obtain high bonding strength without performing diffusion bonding in which crystal grains are grown so as to cross the bonding interface between the first sheet and the second sheet. Therefore, the conditions for diffusion bonding can be relaxed and the time can be shortened, and the productivity can be increased.

In this embodiment, as can be seen from FIG. 27, the boundary 3b is curved at both end portions thereof, and the top of the convex portion 15b forming the wall portion 3a is concave so that it is smaller than the minimum width of the wall portion 3a. It is formed long. However, the form of the boundary 3b is not limited to this, and may be longer than the minimum width of the wall portion. 28 to 32 show examples of the boundary 3b according to another example. Each of the drawings described in FIGS. 28 to 32 corresponds to FIG. 27, and the dotted line shown in each drawing represents a portion having the smallest width of the wall 3a.
In the example of FIG. 28, both ends of the boundary 3b are curved and the top of the convex portion 15b forming the wall 3a is convex, so that the boundary 3b is formed longer than the minimum width of the wall 3a. ing.
In the example of FIG. 29, the boundary 3b is curved at both ends of the boundary 3b, and the top of the convex portion 15b forming the wall portion 3a is convex and concave between the convex portions. It is formed longer than the minimum width of 3a.
In the example of FIG. 30, the boundary 3b is curved to be convex at one end of the boundary 3b and is curved to be concave at the other end, so that the boundary 3b is longer than the minimum width of the wall 3a. Has been.
In the example of FIG. 31, the top of the convex portion 15 b that forms the wall portion 3 a at the boundary 3 b has one convex portion, and is asymmetric in the width direction so that the apex approaches one end side.
In the example of FIG. 32, in the width direction, the top of the convex portion 15b forming the wall portion 3a at the boundary 3b has two convex portions, and the vertex of one convex portion is lower than the vertex of the other convex portion. It is asymmetric.

The boundary shape as described above can be confirmed as follows, for example.
The target vapor chamber is cut with a wire saw so as to be 10 mm long and horizontal square pieces. At this time, it cut | disconnects so that the cross section of a vapor | steam flow path and a condensate flow path may be obtained easily later.
The end face of the obtained square piece is shaved with a microtome, and the flow path cross section is obtained. At this time, it is preferable to cut the resin so that the resin can easily enter the flow path.
Thereafter, the square pieces are embedded in a resin while vacuum degassing.
Trimming is performed with a diamond knife so as to obtain a necessary cross section for the resin-embedded square piece. At this time, using a microtome (for example, an ultramicrotome manufactured by Leica Microsystems), trimming is performed to a portion 40 μm away from the measurement target position.
By cutting the trimmed cut surface, an observation cut surface is produced. At this time, using a cross-section sample preparation device (for example, a cross section polisher manufactured by JOEL), the protruding width is set to 40 μm, the voltage is set to 5 kV, the time is set to 6 hours, and the cut surface is cut by ion beam processing.
The cut surface of the sample thus obtained is measured. At this time, using a scanning electron microscope (for example, a scanning electron microscope manufactured by Carl Zeiss), the voltage is set to 5 kV, the working distance is set to 3.0 mm, the observation magnification is set to 500 times or 2000 times, and the cut surface is cut. Observe. The observation magnification reference at the time of photographing is Polaroid 545.

Note that the aspect ratio in the cross section of the flow path represented by the value obtained by dividing the width of the flow path by the height of the flow path from the viewpoint of exerting the capillary force of the flow path more strongly in the condensate flow path 3 of the example described above ( The aspect ratio is preferably larger than 1.0. This ratio may be 1.5 or more, or 2.0 or more. Alternatively, the aspect ratio may be smaller than 1.0. This ratio may be 0.75 or less, and may be 0.5 or less.
Among them, the flow path width is preferably larger than the flow path height from the viewpoint of manufacturing, and from this viewpoint, the aspect ratio is preferably larger than 1.3.

Returning to FIG. 23 to FIG. 25, other parts will be described. As can be seen from FIG. 23 and FIG. 24, the opening of the steam passage groove 16 of the first sheet 10 and the opening of the steam passage groove 26 of the second sheet 20 are overlapped to form a passage, which is the steam. It becomes the steam flow path 4 which is the 1st flow path through which.
The cross-sectional area of the condensate flow path 3 that is the second flow path described above is made smaller than the cross-sectional area of the vapor flow path 4 that is the first flow path. More specifically, the average channel cross-sectional area of two adjacent steam channels 4 (a channel formed by one steam channel groove 16 and one steam channel groove 26 in this embodiment) is represented by _Ag. And a plurality of condensate flow paths 3 (in this embodiment, formed by one inner liquid flow path portion 15 and one inner liquid flow path groove 25) disposed between two adjacent vapor flow paths 4. when the average of the flow path cross-sectional area of the plurality of condensate channel 3) was a _l, a condensate flow path 3 and the steam path 4, a _l is 0.5 times the relation of a _g It is assumed that it is preferably 0.25 times or less. Accordingly, the working fluid can easily selectively pass through the first flow path and the second flow path depending on the phase mode (gas phase, liquid phase).
This relationship may be satisfied in at least a part of the entire vapor chamber, and it is more preferable that this is satisfied in the entire vapor chamber.

  Similarly, as can be seen from FIG. 25, the overlapping flow path is formed so that the opening of the steam flow path communication groove 17 of the first sheet 10 and the opening of the steam flow path communication groove 27 of the second sheet 20 face each other.

On the other hand, as shown in FIG. 1, the injection portions 12 and 22 overlap so that the inner surfaces 10a and 20a face each other, and the opening on the opposite side to the bottom of the injection groove 22a of the second sheet 20 is the first sheet. An injection flow path 5 is formed which is closed from the inner surface 10 a of the 10 injection portions 12 and communicates the outside with the hollow portion between the main bodies 11 and 21.
However, after injecting the working fluid from the injection flow path 5 into the hollow portion to form the sealed space 2, the injection flow path 5 is closed. Not communicated with.

  In this embodiment, the injection part 12, the injection part 22, and the injection flow path 5 thereby are shown as examples provided at one end of a pair of end parts in the longitudinal direction of the vapor chamber 1, It is not restricted to this, It may be arrange | positioned at the other one edge part, and multiple may be arrange | positioned. In the case of a plurality of arrangements, for example, they may be arranged at each of a pair of ends in the longitudinal direction of the vapor chamber 1, or may be arranged at one end of the other pair of ends.

  A working fluid is sealed in the sealed space 2 of the vapor chamber 1. Although the kind of working fluid is not specifically limited, The working fluid used for a normal vapor chamber, such as a pure water, ethanol, methanol, acetone, and mixtures thereof, can be used.

The vapor chamber as described above can be manufactured as follows, for example.
Liquid channel grooves 14a, 15a, vapor channel grooves 16, 26, and vapor channel communication grooves 17, 27 are formed by half etching on the metal sheet having the outer peripheral shape of the first sheet 10 and the second sheet 20. To do. Half-etching is performed halfway without penetrating in the thickness direction.
Next, the inner surface 10a of the first sheet 10 and the inner surface 20a of the second sheet 20 are overlapped so as to face each other, positioning is performed using the holes 13a and 23a as positioning means, and temporary fixing is performed. The method of temporary fixing is not particularly limited, and examples thereof include resistance welding, ultrasonic welding, and adhesion using an adhesive.
Then, diffusion bonding is performed after temporary fixing, and the first sheet 10 and the second sheet 20 are permanently bonded. This is a vapor chamber sheet. By adjusting the conditions during the diffusion bonding, the boundary 3b between the first sheet 10 and the second sheet 20 is deformed so as to be longer than the minimum width of the wall 3a as described above. This condition is relaxed compared to diffusion bonding in which crystal grains are grown beyond the boundary, and the time can be shortened. Therefore, productivity can be increased.
Here, the term “permanently joined” is not limited to a strict meaning, and the inner surface 10a of the first sheet 10 can be maintained to the extent that the hermeticity of the sealed space 2 can be maintained during operation of the vapor chamber 1. It means that it is joined to such an extent that the joining with the inner surface 20a of the second sheet 20 can be maintained.

  After joining, evacuation is performed from the formed injection channel 5 to decompress the hollow part. Thereafter, the working fluid is injected from the injection flow path 5 into the decompressed hollow portion, and the working fluid is put into the hollow portion. Then, the injection flow path 5 is closed by using laser melting or caulking the injection section 12 and the injection section 22. Thereby, it becomes the sealed space 2, and a working fluid is stably hold | maintained inside it.

  In the vapor chamber of this embodiment, since the internal liquid flow path portion 15 and the inner liquid flow path portion 25 overlap with each other to function as a support column, it is possible to prevent the sealed space from being crushed during joining and decompression.

  Next, the operation of the vapor chamber 1 will be described. FIG. 33 schematically shows a state in which the vapor chamber 1 is arranged inside a portable terminal 40 that is one form of the electronic apparatus. Here, since the vapor chamber 1 is disposed inside the casing 41 of the portable terminal 40, it is represented by a dotted line. Such a portable terminal 40 includes a housing 41 that contains various electronic components, and a display unit 42 that is exposed so that an image can be seen through the opening of the housing 41. As one of these electronic components, an electronic component 30 to be cooled by the vapor chamber 1 is disposed in the housing 41.

The vapor chamber 1 is installed in a housing of a portable terminal or the like, and is attached to an electronic component 30 that is an object to be cooled such as a CPU. The electronic component 30 is attached to the outer surface 10b or the outer surface 20b of the vapor chamber 1 directly or via another member such as an adhesive, a sheet, or a tape having high thermal conductivity. The position at which the electronic component 30 is attached to the outer surface 10b or the outer surface 20b is not particularly limited, and is appropriately set depending on the relationship with the arrangement of other members in the portable terminal or the like. In this embodiment, as indicated by a dotted line in FIG. 1, the electronic component 30 that is a heat source to be cooled is arranged in the center of the main body 11 in the xy direction on the outer surface 10 b of the first sheet 10. Accordingly, in FIG. 1, the electronic component 30 is represented by a dotted line because it is a position that cannot be seen as a blind spot.
FIG. 34 shows a diagram for explaining the flow of the working fluid. For ease of explanation, the second sheet 20 is omitted in this figure, and the inner surface 10a of the first sheet 10 is shown so that it can be seen.

  When the electronic component 30 generates heat, the heat is transmitted through the first sheet 10 by heat conduction, and the condensate present at a position close to the electronic component 30 in the sealed space 2 receives heat. The condensate that has received this heat absorbs the heat and evaporates. Thereby, the electronic component 30 is cooled.

The vaporized working fluid becomes steam and flows and moves in the steam flow path 4 as indicated by a solid straight arrow in FIG. Since this flow is generated in a direction away from the electronic component 30, the vapor moves in a direction away from the electronic component 30.
The vapor in the vapor flow path 4 moves away from the electronic component 30 that is a heat source, moves to the outer peripheral portion of the vapor chamber 1 having a relatively low temperature, and sequentially heats the first sheet 10 and the second sheet 20 during the movement. It is cooled while being taken away. The first sheet 10 and the second sheet 20 that have taken heat from the steam conduct heat to the casing of the portable terminal device that is in contact with the outer surfaces 10b and 20b, and finally the heat is released to the outside air.

The working fluid deprived of heat while moving through the steam flow path 4 is condensed and liquefied. This condensate adheres to the wall surface of the steam channel 4. On the other hand, since the steam flows continuously in the steam flow path 4, the condensate moves to the condensate flow path 3 so as to be pushed by the steam as shown by an arrow Z in FIGS. Since the condensate flow path 3 of this embodiment includes the communication opening 14c and the communication opening 15c as shown in FIGS. 8 and 18, the condensate has the communication opening 14c and the communication opening 15c. It passes through and is distributed to a plurality of condensate flow paths 3.
In this embodiment, since the condensate flow path 3 and the vapor flow path 4 are configured separately, the working fluid smoothly circulates.

The condensate that has entered the condensate flow path 3 approaches the electronic component 30 that is a heat source, as indicated by the dotted straight arrows in FIG. 34, due to capillary action by the condensate flow path and pressing from the steam. Moving.
At this time, since the condensate flow path 3 has the openings of the liquid flow path grooves 14a and 15a closed by the second sheet 20, the four sides become walls in the cross section, and the capillary force can be increased. Thereby, smooth movement of the condensate is possible.
And it repeats the above by vaporizing with the heat from the electronic component 30 which is a heat source again.

  As described above, according to the vapor chamber 1, the reflux of the condensate is good with a high capillary force in the condensate flow path, and the amount of heat transport can be increased.

In the above embodiment, the liquid channel groove 14a and the liquid channel groove 15a are provided only in the first sheet 10, but as shown in FIG. 35, the liquid channel groove 24a, 25a may be provided. At that time, it can be considered in the same manner as the liquid flow channel grooves 14a and 15a of the first sheet 10 described above.
In the example shown in FIG. 35, the liquid flow channel groove 14a and the liquid flow channel groove 24a, and the liquid flow channel groove 15a and the liquid flow channel groove 25a overlap to form the condensate flow channel 3 that is the second flow channel. Further, the convex portion 14b between the adjacent liquid flow channel grooves 14a and the convex portion 24b between the adjacent liquid flow channel grooves 24a are joined so as to have the above-described interface 3b (bonding interface), and the adjacent liquid flow channels are formed. The convex portions 15b between the grooves 15a and the convex portions 25b between the adjacent liquid flow channel grooves 25a are joined so as to have the above-described interface 3b (joining interface).

  In this example, the vapor chamber of the present disclosure can be used.

  The vapor chamber 1 thus far has been described with respect to the example including the two sheets of the first sheet 10 and the second sheet 20. However, the present invention is not limited to this, and a vapor chamber with three sheets may be used as shown in FIG.

The vapor chamber shown in FIG. 36 is a laminated body of the first sheet 10, the second sheet 20, and the intermediate sheet 50 (third sheet).
The intermediate sheet 50 is disposed so as to be sandwiched between the first sheet 10 and the second sheet 20, and each is joined.

In this example, both the inner surface 10a and the outer surface 10b of the first sheet 10 are flat. Similarly, both the second sheet 20 and the inner surface 20a and the outer surface 20b are flat.
At this time, the thickness of the first sheet 10 and the second sheet 20 is preferably 1.0 mm or less, may be 0.5 mm or less, and may be 0.1 mm or less. On the other hand, the thickness is preferably 0.005 mm or more, may be 0.015 mm or more, and may be 0.030 mm or more. The thickness range may be determined by a combination of any one of the plurality of upper limit candidate values and one of the plurality of lower limit candidate values. Further, the thickness range may be determined by combining any two of a plurality of upper limit candidate values or by combining any two of a plurality of lower limit candidate values.

The intermediate sheet 50 includes a steam channel groove 51, a wall 52, a liquid channel groove 53, and a convex portion 54.
The steam channel groove 51 is a groove that penetrates the intermediate sheet 50 in the thickness direction, and the above-described steam channel groove 16 and the steam channel groove 26 are overlapped to form the steam channel 4 that is the first channel. Then, it is the same groove | channel, and it arrange | positions with the form corresponded to this.
The wall 52 is a wall provided between the adjacent vapor flow channel grooves 51, and the above-described outer peripheral liquid flow channel portion 14 and the outer peripheral liquid flow channel portion 24, and the inner liquid flow channel portion 15 and the inner liquid flow channel. It arrange | positions in the form corresponded to the wall which piled up the part 25. FIG.
The liquid channel groove 53 is a groove disposed on the surface of the wall 52 facing the first sheet 10, and is disposed in a form corresponding to the liquid channel grooves 14a and 15a described above. The condensate flow path 3 that is the second flow path is formed by the liquid flow path groove 53.
The convex part 54 is a convex part arrange | positioned between the adjacent liquid flow-path grooves 53, and is arrange | positioned with the form corresponded to above-described convex part 14b, 15b.

  And when the 1st sheet | seat 10, the 2nd sheet | seat 20, and the intermediate | middle sheet | seat 50 are joined, the convex part 54 is joined to the inner surface 10a of the 1st sheet | seat 10, for example, as shown in FIGS. An interface 3b (bonding interface) is provided.

  The example of each form of the present disclosure is not limited as it is, and can be embodied by modifying the constituent elements without departing from the gist thereof. Further, various forms can be obtained by appropriately combining a plurality of constituent elements disclosed in the above form. You may delete some components from all the components shown by each form.

1 Vapor chamber 2 Sealed space 3 Condensate flow path 3a Wall 3b Boundary (bonding interface)
4 Steam channel 10 First sheet 10a Inner surface 10b Outer surface 10c Side surface 11 Main body 12 Injecting portion 13 Outer peripheral joint portion 14 Outer peripheral fluid channel portion 14a Liquid channel groove 14b Convex portion 14c Communication opening 15 Inner liquid channel portion 15a Liquid flow Road groove 15b Protruding portion 15c Communication opening 16 Steam channel groove 17 Steam channel communication groove 20 Second sheet 20a Inner surface 20b Outer surface 20c Side surface 21 Main body 22 Injecting portion 23 Outer peripheral joint portion 24 Outer peripheral liquid channel portion 25 Inner liquid flow channel 26 Steam channel groove 27 Steam channel communication groove

Claims (7)

A vapor chamber in which a working fluid is sealed in a sealed space inside the laminated body of a plurality of sheets,
In the sealed space,
A plurality of first flow paths and a second flow path provided between the adjacent first flow paths,
The average of the flow path cross-sectional area of two of said first flow path adjacent the A _g, an average of the flow path cross-sectional area of the plurality of the second flow path disposed between the adjacent first flow path A when the _{l, a l} at least a portion is not more than 0.5 times the _{a g,}
A vapor chamber, wherein a length of a joining interface of the sheet in the wall portion is longer than a minimum width of the wall portion in the cross section in a cross section of the wall portion disposed between the adjacent second flow paths. A vapor chamber in which a working fluid is sealed in a sealed space inside the laminated body of a plurality of sheets,
In the sealed space,
A plurality of first flow paths through which the working fluid in a gas state flows;
A plurality of adjacent first flow paths, and a second flow path through which the working fluid in a liquid state flows.
A vapor chamber, wherein a length of a joining interface of the sheet in the wall portion is longer than a minimum width of the wall portion in the cross section in a cross section of the wall portion disposed between the adjacent second flow paths.   In the cross section of the wall portion disposed between the adjacent first flow path and the second flow path, the length of the joining interface of the sheet in the wall portion is the first flow path and the second flow path. The vapor chamber according to claim 1 or 2, wherein the vapor chamber is longer than a minimum width of the wall portion in the cross section disposed between the flow path and the flow path. A housing,
An electronic component disposed inside the housing;
An electronic device comprising: the vapor chamber according to any one of claims 1 to 3 disposed in the electronic component. A laminate of a plurality of sheets, a vapor chamber sheet having a hollow portion,
In the hollow part,
A plurality of first flow paths and a second flow path provided between the adjacent first flow paths,
The average of the flow path cross-sectional area of two of said first flow path adjacent the A _g, an average of the flow path cross-sectional area of the plurality of the second flow path disposed between the adjacent first flow path A when the _{l, a l} at least a portion is not more than 0.5 times the _{a g,}
In the cross section of the wall portion disposed between the adjacent second flow paths, the length of the joining interface of the sheet in the wall portion is longer than the minimum width of the wall portion in the cross section. . A laminate of a plurality of sheets, a vapor chamber sheet having a hollow portion,
In the hollow part,
A plurality of first flow paths serving as vapor flow paths through which the working fluid in a gaseous state flows;
A plurality of second flow paths that are provided between the adjacent first flow paths and serve as a condensate flow path through which the working fluid in a liquid state flows.
In the cross section of the wall portion disposed between the adjacent second flow paths, the length of the joining interface of the sheet in the wall portion is longer than the minimum width of the wall portion in the cross section. .   In the cross section of the wall portion disposed between the adjacent first flow path and the second flow path, the length of the joining interface of the sheet in the wall portion is the first flow path and the second flow path. The sheet for a vapor chamber according to claim 5 or 6, wherein the sheet is longer than a minimum width of the wall portion in the cross section disposed between the flow path and the flow path.

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