JP2019128128A - Air cleaning system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air cleaning system capable of reducing system construction cost and operation cost. SOLUTION: An air cleaning system 10 includes air cleaning devices 16a to 16e respectively provided corresponding to areas A1 to A5 in a clean room 12, and a human sensor 18a provided respectively corresponding to areas A1 to A5. .About.18e. The air purifiers 16a to 16e are combined with the motion sensors 18a to 18e. The air purifiers 16a to 16e clean the air based on the presence/absence signals of the human sensors 18a to 18e. The human presence sensors 18a to 18e are fixed to the air cleaners 16a to 16e, and the air cleaners 16a to 16e are directly supplied with human presence signals from the human presence sensors 18a to 18e. [Selection diagram] Figure 1

Description

  The present invention relates to an air purification system for purifying indoor air.

  Although clean rooms for manufacturing semiconductors and precision instruments are required to have high air cleanliness, it is not preferable that excess air cleanliness increases the cost of equipment and operation. Therefore, the present applicant has proposed systems described in Patent Document 1 and Patent Document 2.

  In the system described in Patent Document 1, it becomes possible to separate the heat exchange device and the air cleaning device, and to perform temperature control and air cleaning individually and to the required limit, and either one is influenced by the other. You will not be driven by excessive capacity. In addition, the air flow can be circulated and convective in the clean room, and the air flow path under the floor and under the ceiling becomes unnecessary.

  In the system described in Patent Document 2, when a plurality of production devices and a plurality of air cleaning devices are provided in a clean room, a dedicated air cleaning device is required for a production device that requires particularly high air cleanliness. It can be provided and cleaned locally. And the excessive air cleaning is not made | formed with respect to the location in which the other production apparatus is provided.

  In the clean room, the presence of a person causes a reduction in cleanliness. In the system described in Patent Document 3, a human sensor is provided at the entrance of the clean room, and the human sensor detects the presence or absence of a person to change the operation state of the air cleaning device.

JP 2004-278887 A JP 2006-112755 A JP 2012-149787 A

  In the systems described in Patent Document 1 and Patent Document 2, by monitoring the cleanliness in the clean room with a particle sensor, the air cleaning device at a specific position is controlled based on the particle sensor at a specific position, and the particle sensor at the specific position is detected. It is also possible to control a plurality of air cleaning devices based on that, or to control all the air cleaning devices in a clean room based on the average value of the signals of a plurality of particle sensors. However, in such a system, complicated centralized control is performed in the central monitoring unit, so that system construction is expensive.

  Further, in the system described in Patent Document 3, only a human sensor is provided at the entrance of the clean room, and it is not possible to identify up to the place where the person exists in the clean room, and the air cleaning with reduced points is Can not. Therefore, uniform air cleaning is performed including a part where no person exists, which is not efficient.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide an air purification system capable of reducing the system construction cost and the operation cost.

  In order to solve the problems described above and achieve the object, an air purification system according to the present invention comprises an air purification device provided respectively corresponding to a plurality of air purification areas in a room, and a plurality of people in the room The air cleaning device having a human sensor provided corresponding to each area, and corresponding to the air clean area at the overlapping portion between the air clean area and the human detection area; In combination with the human sensor corresponding to the detection area, the air cleaning device is characterized in that the air is cleaned based on a human presence / absence signal by the human sensor combined.

  The air purification area and the human detection area may correspond one-to-one.

  The human sensor may be fixed to the air cleaner.

  The air cleaning device may be directly supplied with the human presence signal from the human sensor.

  The air cleaning device may stop or operate at a low output when the combined human sensor does not detect a person, and may operate at an output according to the rated output operation or the number of detected people when a person is detected. .

  The air cleaner has a particle sensor for detecting the cleanliness of the room, and the air cleaning device is in a stopped state or low output operation when the combined human sensor does not detect a person, and the particle sensor when a person is detected. It may drive based on the degree of cleanliness detected by.

  The air cleaner has a particle sensor for detecting the cleanliness of the room, and the air cleaner operates based on the cleanliness detected by the particle sensor when the combined human sensor does not detect a person, When detected, it may be operated once at the rated output, and then returned to the operation based on the cleanliness detected by the particle sensor.

  When any one of the human sensors detects movement of a person above a threshold value, all the air cleaning devices may be operated at a rated output.

  The air cleaning device may adjust a driving output according to a person's work type detected by the human sensor.

  In the air cleaning system according to the present invention, an air cleaning device corresponding to the air cleaning area at an overlapping portion between the air cleaning area and the human detection area corresponds to the human sensor corresponding to the human detection area. Combined, the air cleaning device cleans air based on a human presence / absence signal from the combined human sensor. Thereby, the efficient driving | running which considered the person's presence location is implement | achieved, and driving | running cost can be reduced. Further, the system construction cost is reduced because complicated centralized control by the central monitoring unit is unnecessary.

FIG. 1 is a schematic diagram showing an air cleaning system according to an embodiment of the present invention. FIG. 2 is a schematic view showing an air purification system according to a modification.

  Embodiments of an air cleaning system according to the present invention will be described below in detail with reference to the drawings. The present invention is not limited by this embodiment.

  FIG. 1 is a side view showing an air cleaning system 10 according to an embodiment of the present invention. The air cleaning system 10 is a system for cleaning the air in a clean room (room) 12. The clean room 12 is provided with a manufacturing apparatus 14 for semiconductors and precision instruments, and an environment in which air is purified is required.

  In the air cleaning system 10, the inside of the clean room 12 is divided into areas A1, A2, A3, A4, and A5, and air cleaning is performed on these areas A1 to A5. Although the regions A1 to A5 are in series in the left and right direction in FIG. 1, in actuality, the regions A1 to A5 may be in a grid shape including the depth direction. The regions A1 to A5 are not strictly divided and may have overlapping portions. The areas A1 to A5 may have different areas.

  The air cleaning system 10 includes air sensors 16a, 16b, 16c, 16d and 16e provided corresponding to the areas A1 to A5, and human sensors 18a and 18b provided corresponding to the areas A1 to A5, respectively. , 18c, 18d, 18e, particle sensors 20a, 20b, 20c, 20d, 20e provided corresponding to the regions A1 to A5, and heat exchange devices 22a, 22b, 22c, 22d. The air cleaning devices 16a to 16e, the human sensors 18a to 18e, the particle sensors 20a to 20e, the heat exchange devices 22a to 22d, and the areas A1 to A5 are representative of the air cleaner 16, the human sensor 18, and the particle sensor 20, respectively. , Heat exchange device 22 and region A.

  In the air cleaning system 10, the air cleaning area to which the air cleaning devices 16a to 16e correspond is the areas A1 to A5, and the human detection area to which the human sensor 18 corresponds is also the areas A1 to A5. I'm doing it.

  The air cleaner 16 is disposed above the clean room 12 and slightly below the top surface 12a, and includes a fan 24 provided at the top and a high efficiency particulate air (HEPA) 26 provided at the bottom. Have. The air cleaning device 16 cleans the air sucked from above by the fan 24 with the HEPA 26 and blows it toward the lower areas A1 to A5. The fan 24 is a rotational speed variable drive type. The air cleaning device 16 includes a control unit (not shown), and can control the rotational speed of the fan 24 according to the situation. The air cleaning device 16 is also called FFU (Fan Filter Unit).

  The human sensor 18 is a sensor that detects whether or not a human H is present in the area A, and may be, for example, an infrared sensor, an electromagnetic sensor, or a camera. The human sensor 18 can also detect the number of humans H present in the region A. Further, the human sensor 18 can detect not only the number of people H but also the motion, and can determine the type of work based on the type and frequency of the motion. Detectable motion includes walking. The human sensors 18a to 18e are integrally fixed to the air cleaning devices 16a to 16e, and supply detection signals to the control units of the corresponding air cleaning devices 16.

  The particle sensor 20 is a sensor that detects the cleanliness of the area A, that is, the particle concentration, and is disposed at a location lower than the air cleaner 16, for example, immediately below the air cleaner 16. The particle sensor 20 may be provided with a temperature sensor. The particle sensors 20a to 20e supply detection signals to the control units of the corresponding air cleaning devices 16. The temperature signal is supplied to the heat exchangers 22a-22d.

  The heat exchange device 22 is disposed above the air cleaning device 16 and in the vicinity of the top surface 12a, and exchanges heat (heat removal) with the air sucked from below and blows it out to the side. The heat exchange device 22 is provided at an intermediate position of each air cleaning device 16. The heat exchanging device 22 includes a control unit (not shown), and can adjust the set temperature and the wind speed according to the signal and status of the temperature sensor. The air after the heat exchange device 22 blows out does not short to the air suction port of the heat exchange device 22 and has a wind speed sufficiently sucked into the air suction port of the air cleaning device 16. The heat exchange device 22 is also called a FCU (Fan Coil Unit).

  In the air purification system 10 configured as described above, the air purifiers 16a to 16e clean the air in the areas A1 to A5 to which they share, based on the human presence / absence signals of the human sensors 18a to 18e. The air in the clean room 12 is sucked from above the air cleaning devices 16a to 16e, cleaned and blown downward, warmed by a heat source such as the manufacturing device 14 or a person H, and then folded back at the floor surface 12b to rise. To do. The elevated air is sucked into the heat exchange devices 22a to 22d disposed in the middle of the air cleaning devices 16, and after being heat-exchanged, the air is blown out sideways and sucked into the air cleaners 16a to 16e again to convect. It will be. In FIGS. 1 and 2, the flow of air in the clean room 12 is indicated by arrows.

  In the air purification system 10, since the air purification device 16 and the heat exchange device 22 are separated, it becomes possible to perform temperature control and air purification individually and to the required limit, and one of them is the other. It is not driven by excess capacity by the influence. In addition, the flow of air can be circulated and convective in the clean room 12, and the air flow path under the floor or under the ceiling becomes unnecessary.

  Furthermore, the air purification system 10 individually cleans the air in the areas A1 to A5 in consideration of the location of a person based on the human presence / absence signals of the human sensors 18a to 18e to which the air cleaners 16a to 16e are respectively attached. By doing so, efficient cleaning is performed.

  The air cleaning devices 16a to 16e basically operate based on the presence / absence signals of the human sensors 18a to 18e, and for example, the air cleaning devices 16a and 16d sharing the areas A1 and A4 without human H operate. Stop or operate at low power. Further, when there is a person H, the vehicle is driven with an output corresponding to the detected number of people. For example, the air cleaning devices 16c and 16e sharing the areas A3 and A5 in which one person H is detected are intermediate output operation, and the air cleaning devices 16b sharing the area A2 in which two people H are detected are rated output operation and To do. Thereby, appropriate air cleaning according to the number of people for each region A is performed, and there is no waste. Furthermore, the operation output of the air cleaner 16 may be adjusted based on the operation / work of the person H determined by the human sensors 18a to 18e. The amount of dust differs depending on the operation and work of the human being H.

  By integrating the air cleaning device 16 and the human detection sensor 18, the area in which the air cleaning device 16 cleans the air and the area in which the human detection sensor 18 detects the presence or absence of the human H correspond one to one. Thus, individual air cleaning can be appropriately performed for each region A. Since the air cleaning device 16 and the human sensor 18 can be operated independently as one set, there is no need to perform complicated central control in the central monitoring unit, and the system can be simplified and cost can be reduced. The air cleaning device 16 is directly supplied with a human presence / absence signal from the human sensor 18 provided side by side, and the wiring of the signal line is unnecessary and installation is simple.

  The operation of the air cleaning device 16 can take various forms as follows. For example, when the combined human sensor 18 does not detect the human H, the air cleaning device 16 stops or performs low-power operation, and when the human H is detected, the air cleaner 16 outputs based on the cleanliness detected by the particle sensor 20 You may drive while adjusting. Thereby, the composite air purification based on the presence or absence of the person H and the cleanliness in the clean room 12 is performed.

  In addition, the air cleaning device 16 operates based on the cleanliness detected by the particle sensor 20 when the combined human sensor 18 does not detect the human H, and operates once at the rated output when the human H is detected. Then, the operation may be returned to the operation based on the cleanliness detected by the particle sensor 20. As a result, when human H enters the clean room 12, intensive air purification is performed, and high cleanliness can be maintained.

  It takes some time (for example, about 1 minute) for the air purifier 16 to stabilize from the low output operation to the rated output operation. Therefore, when the human H walks and moves between the areas A1 to A5, it may not be in time to shift to the rated operation after detecting the human H. Therefore, it is preferable to divide the detection of the human H by the human sensors 18a to 18e.

  For example, it is assumed that many people H move at one time at the start of work, at the time of rest, at the end of work, etc., and the amount of dust generation as a whole in the clean room 12 increases. At this time, it is detected that a plurality (the threshold value) of people H walk in any one or more of the areas A1 to A5, so that all the air cleaning devices 16a to 16e in the clean room 12 are rated. Good. In this case, the air purifiers 16a to 16e may be configured to communicate with each other.

  In addition, when there are few people H who walk at the start of work, at rest, and at the end of work, the air cleaning device 16 may adjust the operation output individually based on the above-described operation method. That is, air may be cleaned based on the human presence / absence signal from the human sensor 18, or operation may be performed based on the degree of cleanliness detected by the particle sensor 20 when human H is detected.

  Furthermore, the air cleaning device 16 may adjust the operation output according to the type of work of the human being H detected by the human sensor 18 (for example, a large movement, a medium degree, a movement with almost no movement but only an arm) .

  In the air purification system 10 shown in FIG. 1, although the air purification area to which the air purification device 16 corresponds and the human detection area to which the human sensor 18 corresponds, the two are not necessarily the same. Good. For example, as shown in FIG. 2, the human sensors 18 a to 18 d may be provided in the heat exchange devices 22 a to 22 d to detect a human H from a high position. In this case, although the human detection areas SA1 to SA4 by the human sensors 18a to 18d do not coincide with the above areas A1 to A5, the air cleaning device 16 of the area A overlaps the area A. It may be combined with the human sensor 18. For example, since the air cleaning device 16c corresponds to the area A3 and the area A3 overlaps with the human detection areas SA2 and SA3, the air cleaning apparatus 16c is a human presence / absence signal of the human sensor 18b and the human sensor 18c. The driving state may be determined based on the above.

  The present invention is not limited to the above-described embodiment, and it goes without saying that the present invention can be freely modified without departing from the scope of the present invention.

REFERENCE SIGNS LIST 10 air cleaning system 12 clean room 14 manufacturing apparatus 16, 16 a to 16 e air cleaning apparatus 18, 18 a to 18 e human sensor 20, 20 a to 20 e particle sensor 22, 22 a to 22 d heat exchange apparatus A1 to A5 area H human being

Claims (9)

An air cleaning device provided for each of a plurality of air cleaning areas in the room;
A human sensor provided respectively corresponding to a plurality of human detection areas in the room;
Have
The air cleaning device corresponding to the air cleaning area is combined with the human sensor corresponding to the human detection area at the overlapping point between the air cleaning area and the human detection area.
The air purifier is configured to purify air based on a human presence / absence signal from the combined human sensor. The air purification system according to claim 1,
An air purification system, wherein the air purification area and the human detection area correspond one to one. The air purification system according to claim 2,
The air purification system, wherein the human sensor is fixed to the air cleaner. In the air purification system according to claim 1,
The air cleaning system is characterized in that the human presence / absence signal is directly supplied from the human sensor. The air purification system according to claim 1,
The air cleaning device is characterized by stopping or low power operation when the combined human sensor does not detect a person, and operating with rated output operation or an output according to the number of detected people when detecting a person. And an air purification system. The air purification system according to claim 1,
A particle sensor for detecting the cleanliness of the room;
The air cleaning device is characterized by stopping or low power operation when the combined human sensor does not detect a person, and operates based on the degree of cleanliness detected by the particle sensor when detecting a person. And air purifying system. The air purification system according to claim 1,
A particle sensor for detecting the cleanliness of the room;
The air cleaning device operates based on the cleanliness detected by the particle sensor when the combined human sensor does not detect a person, and operates once at a rated output when a person is detected, and then the particles An air purification system characterized by returning to operation based on the degree of cleanliness detected by a sensor. The air purification system according to claim 1,
An air purification system characterized by operating all the air purification devices at a rated output when any one of the human sensors detects a movement of a person above a threshold. The air purification system according to claim 1,
The air cleaning system adjusts the driving output according to the type of work of a person detected by the human sensor.

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