JP2019113332A - pressure sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressure sensor capable of fixing a metal sensor support member and a non-metal cover to each other with high reliability. SOLUTION: A sensor element 5 and a sensor element 5 are mounted and attached to a sensor support member 4 made of a metal material, a terminal 6 penetrating the sensor support member 4, and a sensor support member 4, and the non-metal material. The sensor support member 4 and the case 9 have a blocking portion 20 for preventing the sensor support member 4 and the case 9 from separating from each other. [Selection diagram] Fig. 2

Description

  The present invention relates to a pressure sensor.

  BACKGROUND Conventionally, pressure sensors for detecting the pressure of a fluid such as liquid or gas are known. For example, the pressure sensor described in Patent Document 1 includes a semiconductor pressure detection element, a base, a receiving member disposed opposite to the base, and a diaphragm interposed between the base and the receiving member, which are provided in the cover. Housed in Here, a pressure receiving space in which oil is enclosed is formed between the base and the diaphragm. The semiconductor pressure detection element is provided on the base in a state of being disposed in the pressure receiving space. The base, the receiving member and the diaphragm are each made of metal. The cover is made of metal such as stainless steel and is joined to the outer peripheral portion of the receiving member by laser welding. The inside of the cover is filled with an epoxy resin or a urethane resin.

JP, 2016-45172, A

  In the pressure sensor described in Patent Document 1, since the cover is made of metal such as stainless steel, it is difficult to reduce the weight. Therefore, it is considered that the cover is made of nonmetal such as resin. However, in the pressure sensor described in Patent Document 1, when the cover is made of non-metal, the cover is fixed to the base only by the adhesive force of the resin filled in the cover. In such a case, if the adhesive strength is lowered, the cover may be detached from the base together with the resin and parts in the cover, which may cause failure.

  An object of the present invention is to provide a pressure sensor capable of reliably fixing a metal sensor support member and a nonmetal cover to each other with high reliability.

An exemplary invention of the present application is a sensor element that outputs a signal according to the pressure of fluid.
A sensor support member having a first main surface on one side and a second main surface on the other side opposite to the first main surface, the sensor element being mounted on the first main surface, and made of a metal material When,
A terminal electrically connected to the sensor element and penetrating the sensor support member from the one side to the other side;
And covering the second main surface of the sensor support member and a case attached to the sensor support member and made of a non-metallic material,
The pressure sensor, wherein the sensor support member and the case have a blocking portion that prevents the sensor support member and the case from separating from each other.

  According to an exemplary invention of the present application, the sensor support member and the case have a blocking portion that prevents the sensor support member and the case from moving away from each other, so that the metal sensor support member and the nonmetallic cover Can be fixed to each other with high reliability.

FIG. 1 is a longitudinal sectional view (a view cut along an axis ax) showing a schematic configuration of a pressure sensor according to a first embodiment of the present invention. FIG. 2 is a longitudinal sectional view (a partially enlarged view of FIG. 1) showing a sensor support member and a case. FIG. 3 is a longitudinal sectional view schematically showing a fixed state of the sensor support member and the case. FIG. 4 is a plan view schematically showing a fixed state of the sensor support member and the case. FIG. 5 is a longitudinal sectional view schematically showing the sensor support member before being fixed to the case. FIG. 6 is a longitudinal sectional view schematically showing another example of the sensor support member before being fixed to the case. FIG. 7 is a plan view (as viewed from the direction along the axis ax) schematically showing a fixed state of the sensor support member and the case provided in the pressure sensor according to the second embodiment of the present invention. FIG. 8 is a longitudinal cross-sectional view (a view cut along an axis ax) schematically showing a fixed state of a sensor support member and a case provided in a pressure sensor according to a third embodiment of the present invention.

  Hereinafter, the pressure sensor of the present invention will be described in detail based on an embodiment shown in the attached drawings.

First Embodiment
FIG. 1 is a longitudinal sectional view (a view cut along an axis ax) showing a schematic configuration of a pressure sensor according to a first embodiment of the present invention. FIG. 2 is a longitudinal sectional view (a partially enlarged view of FIG. 1) showing a sensor support member and a case. First, based on FIG. 1 and FIG. 2, the outline of the pressure sensor 1 shown to these figures is demonstrated.

  In the following, for convenience of explanation, the description will be made using axis ax shown in FIG. 1 as appropriate. Here, the direction parallel to the axis ax (vertical direction in FIG. 1) is "axial direction", the direction orthogonal to the axis ax is "radial direction", and the direction around the axis centered on the axis ax is "circumferential" Say. Further, in the axial direction, the side (attachment member 2 side) closer to the mounting body described later is “one side” or “lower side”, and the far side (opposite side to attachment member 2) is “other side” or “upper side” Say.

  The axis ax is a central axis of the pressure sensor 1, and is a line segment passing through the center of the sensor support member 4 described later and extending in the thickness direction of the sensor support member 4. Also, “upper side” and “lower side” do not indicate the positional relationship and direction when the pressure sensor 1 is actually attached to the mounted body.

  The pressure sensor 1 shown in FIG. 1 is a sensor that is used by being attached to a mount (not shown) and detects the pressure of fluid from the mount. Here, the mounted body is not particularly limited, and is, for example, an on-vehicle control valve used for an automatic transmission (AT) or a continuously variable transmission (CVT) of an automobile. Further, the fluid (fluid to be measured) is not particularly limited, and may be either gas or liquid. Furthermore, conditions such as the type of fluid, temperature, pressure and the like are not limited, but, for example, in the case where the mounted body is the above-described on-vehicle control valve, the fluid is oil such as ATF (Automatic Transmission Fluid).

  The pressure sensor 1 includes, as shown in FIG. 1, an attachment member 2 detachably attached to a mount, a sensor support member 4 joined to the attachment member 2 via a diaphragm 3, and a sensor support member 4. It has the sensor element 5 mounted, and the case 9 attached to the sensor support member 4.

  The mounting member 2 is disposed on one side (lower side) with respect to the sensor support member 4 and has a through hole 21 penetrating along the axial direction. The fluid from the mounted body is introduced into the through hole 21 from the lower side. That is, the through holes 21 constitute a flow path for guiding the fluid from the mounted body toward the sensor element 5. The mounting member 2 also has an external thread 22 disposed along the axial direction, and a head 23 provided at the upper end of the external thread 22. The male screw portion 22 is screwed into a female screw provided on the mounted body. The head 23 has, for example, a hexagonal shape when viewed in the axial direction, and can be sandwiched by a tool such as a spanner.

  With the pressure sensor 1 having such a mounting member 2, the pressure sensor 1 can be attached to the mounting body relatively easily. In addition, the pressure sensor 1 can be removed from the mounted body to perform maintenance and the like. Further, an O-ring 14 made of, for example, rubber is disposed at an end of the male screw portion 22 on the head 23 side. The O-ring 14 can ensure sealing performance between the pressure sensor 1 and the mounted body in a state where the pressure sensor 1 is attached to the mounted body. In addition, the attachment member 2 should just be attached to a to-be-attached body, and is not limited to the form which has the external thread part 22 mentioned above.

  The mounting member 2 is made of a metal material. The metal material is not particularly limited, but for example, stainless steel such as SUS304 is preferably used. By forming the mounting member 2 with such a metal material, the heat resistance of the mounting member 2, resistance to fluid, and the like can be enhanced. The mounting member 2 is manufactured, for example, by casting and cutting.

  The sensor support member 4 is attached to the upper end of the attachment member 2 via the diaphragm 3. Here, the diaphragm 3 and the sensor support member 4 are each made of a metal material such as stainless steel, and are joined to the mounting member 2 by welding.

  As described above, if all of the mounting member 2, the diaphragm 3, and the sensor support member 4 are made of a metal material, for example, when the mounted body is a vehicle-mounted control valve, the measurement of the pressure sensor 1 is performed. Even if the fluid is high temperature oil, the pressure sensor 1 can exhibit excellent durability.

  The diaphragm 3 has a plate shape or a sheet shape, is disposed between the mounting member 2 and the sensor support member 4, and closes the other opening of the through hole 21 of the mounting member 2 described above. Therefore, on the lower side of the diaphragm 3, a first chamber S1 is formed by the through hole 21 of the mounting member 2 described above. Then, the diaphragm 3 is bent and deformed by the pressure of the fluid in the first chamber S1. On the other hand, above the diaphragm 3, a second chamber S <b> 2 is formed between the diaphragm 3 and the sensor support member 4. In the second chamber S2, a sensor element 5 is accommodated, and a pressure transmission medium for transmitting the pressure, which the diaphragm 3 receives from the liquid in the first chamber S1, to the sensor element 5 is filled (accommodated).

  Thus, by transmitting the pressure of the fluid to the sensor element 5 using the diaphragm 3 and the pressure transfer medium, even if the sensor element 5 is not resistant to the fluid, the sensor element 5 is not damaged by the fluid. The pressure of the fluid can be detected while preventing. A liquid is suitably used as the pressure transfer medium. In particular, it is preferable to use, for example, a liquid such as silicone oil as the pressure transfer medium from the viewpoint of reducing the adverse effect on the sensor element 5 and reducing the characteristic change of the pressure transfer medium due to temperature change. It is because silicone oil has good insulation, excellent chemical stability and high boiling point. If the sensor element 5 is resistant to fluid, the diaphragm 3 and the pressure transfer medium may be omitted.

  Further, the sensor support member 4 is formed of a plate having a thickness direction in the axial direction, and is formed, for example, by press processing so that the central portion is dome-shaped toward the other side (upper side). The sensor support member 4 has a first main surface 43 on one side and a second main surface 44 on the other side facing the first main surface 43. The first major surface 43 forms a second chamber S <b> 2 between itself and the diaphragm 3. The sensor element 5 is mounted on the central portion of such a first main surface 43. Here, the sensor element 5 is bonded to the first major surface 43 by an adhesive such as a fluorine-based adhesive.

  The sensor element 5 is an element that outputs a signal according to the pressure reception. Although not shown, the sensor element 5 has, for example, a silicon substrate having a diaphragm in which a piezoresistive element is disposed, and a glass substrate joined to the silicon substrate. A sealed space is formed between these substrates, and the diaphragm is bent and deformed by pressure receiving on the basis of the pressure in the space. Then, the piezoresistive element outputs a signal corresponding to the bending deformation. In addition, the system which detects the bending deformation of the said diaphragm is not limited to the system which used the piezoresistance element, For example, an electrostatic capacitance system etc. may be sufficient.

  Further, the sensor support member 4 has a plurality of through holes 45 opened in the first major surface 43 and the second major surface 44. The terminals 6 pass through the plurality of through holes 45, and the sealing material 7 is filled in the gaps between the wall surfaces defining the through holes 45 and the terminals 6. The terminal 6 is a lead pin, and is made of, for example, a metal material such as an iron-nickel alloy. Lower ends of at least two of the plurality of terminals 6 are connected to the sensor element 5 via bonding wires. The sealing material 7 is made of, for example, a glass material such as borosilicate glass, and seals the gap described above.

  The case 9 is attached to the second major surface 44 of the sensor support member 4. Here, the case 9 is adhered to the second major surface 44 by an adhesive 15 such as an epoxy adhesive. Thus, the sensor support member 4 and the case 9 are joined via the adhesive 15. Thereby, the case 9 can be fixed to the sensor support member 4. Further, by filling the gap between the sensor support member 4 and the case 9 with the adhesive 15, the sealing performance in the case 9 can be enhanced.

  Also, the sensor support member 4 and the case 9 have a blocking portion 20 that prevents the sensor support member 4 and the case 9 from separating from each other. Thus, even if the adhesive 15 is deteriorated, the possibility of the sensor support member 4 and the case 9 separating can be reduced. The blocking unit 20 and matters related thereto will be described in detail later.

  As shown in FIG. 2, the case 9 has a bottomed cylindrical case main body 91 that opens downward. The case main body 91 is provided with a concave portion 93 opened to the sensor support member 4 side. Further, as shown in FIG. 1, the case 9 has a recess 131 into which a male connector (not shown) is inserted, and a terminal 12 projecting into the recess 131. The terminal 12 is electrically connected to the terminal 6 described above. The terminal 12 may be directly connected to the terminal 6 or may be connected to the terminal 6 via an electronic component such as a circuit board.

  The outline of the pressure sensor 1 has been described above. As described above, the pressure sensor 1 includes the sensor element 5 that outputs a signal according to the pressure of the fluid, the sensor support member 4 on which the sensor element 5 is mounted, and the sensor support member 4 from one side to the other side. It has the terminal 6 penetrated and the case 9 attached to the sensor support member 4.

  The sensor support member 4 has a first main surface 43 on one side and a second main surface 44 on the other side facing the first main surface 43, and is made of a metal material. The sensor element 5 is mounted on the central portion of the first major surface 43. Moreover, the terminal 6 penetrates the sensor support member 4 from one side to the other side. On the other hand, the case 9 covers the second main surface 44 of the sensor support member 4 and is made of a nonmetallic material.

  As described above, the sensor support member 4 and the case 9 have the blocking portion 20 that prevents the sensor support member 4 and the case 9 from separating from each other. The portion on the sensor support member 4 side constituting the blocking portion 20 (each projecting portion 42 described later) clamps the portion 9 on the case 9 side constituting the blocking portion 20 (flange portion 92 described later) in the thickness direction by caulking Thus, the case 9 is axially supported with respect to the sensor support member 4. In addition, the inclined surface of the second main surface 44 of the sensor support member 4 (the outer peripheral surface of the portion where the outer diameter of the sensor support member 4 decreases toward the upper side in the axial direction) and the inclined surface of the inner peripheral surface of the case main body 91 A state in which the case body 91 (case 9) is centered in the central axis ax direction and axially aligned by contact with (the inner peripheral surface of a portion where the inner diameter of the case body 91 decreases in the axial direction upwards) Become. Therefore, the nonmetallic case 9 is stably fixed to the metal sensor support member 4. Hereinafter, the blocking unit 20 and matters related thereto will be described in detail with reference to FIGS. 2 to 6.

  FIG. 3 is a longitudinal sectional view schematically showing a fixed state of the sensor support member and the case. FIG. 4 is a plan view schematically showing a fixed state of the sensor support member and the case. FIG. 5 is a longitudinal sectional view schematically showing the sensor support member before being fixed to the case. FIG. 6 is a longitudinal sectional view schematically showing another example of the sensor support member before being fixed to the case.

  As shown in FIG. 3, the case 9 includes a bottomed cylindrical case main body 91 opened downward, and a flange 92 provided at the lower end of the case main body 91 and radially projecting. Have. The case main body 91 is provided with a concave portion 93 opened to the sensor support member 4 side. The flange portion 92 is provided at an end of the case 9 on the sensor support member 4 side, and is provided over the entire region in the circumferential direction of the case main body 91. As described above, the case 9 has the flange portion 92 as a first projecting portion that protrudes radially outward at the peripheral edge in contact with the sensor support member 4.

  Here, the flange portion 92 is a portion fixed to a protruding portion 42 of the sensor support member 4 described later. As described above, the flange portion 92 is provided at the end of the case 9 on the side of the sensor support member 4 (one side). As a result, the distance between the flange 92 and the projection 42 can be shortened, so that the flange 92 can be relatively easily fixed to the projection 42.

  In the present embodiment, the flange portion 92 corresponds to the “first protrusion”, and the number of “first protrusions” is one, but the number of “first protrusions” is plural. It may be. In this case, the plurality of first protrusions may be arranged in the circumferential direction of the case main body 91. Also, the “first protrusion” may be provided on a part of the case main body 91 in the circumferential direction.

  From the viewpoint of reducing the weight of the case 9, the constituent material of the case 9 may be a nonmetal material and may be a ceramic material or the like, but is preferably a resin material. By making the case 9 out of a resin material, not only the weight reduction of the case 9 can be achieved, but even if the shape of the case 9 is complicated, for example, the case 9 can be formed easily and accurately by injection formation. be able to. Moreover, the adhesiveness by the adhesive 15 of case 9 can also be improved. The resin material is not particularly limited, and examples thereof include PPS (polyphenylene sulfide) resin and the like which are excellent in heat resistance. In addition, fibers such as glass fibers and carbon fibers, and inorganic fillers such as alumina particles and zirconia particles may be added to the resin material.

  On the other hand, the sensor support member 4 is shaped such that the central portion is dome-shaped toward the upper side in the axial direction, and from the outer peripheral portion of the main portion 41 on which the sensor element 5 is mounted And a plurality of projections 42 as second projections projecting outward.

  Each projecting portion 42 fixes the flange portion 92, and the plurality of projecting portions 42 and the flange portion 92 constitute a blocking portion 20. That is, the blocking portion 20 has a plurality of projecting portions 42 and a flange portion 92. As described above, by fixing the flange portions 92 to the respective protruding portions 42, the outer peripheral portions of the case 9 and the sensor support member 4 can be fixed to each other. Therefore, it is possible to reduce the complication of the shapes of the case 9 and the portion other than the outer peripheral portion of the sensor support member 4. Therefore, a space for installing other components in the case 9 and on the second main surface 44 of the sensor support member 4 can be sufficiently secured, as a result, the design becomes easy. Further, since the flange portion 92 exists along the circumferential direction of the case 9, alignment in the circumferential direction between the sensor support member 4 and the case 9 becomes unnecessary or easy.

  In the present embodiment, each protrusion 42 is in contact with the upper surface of the flange 92, and is crimped and fixed to the upper surface of the main body 41 with the flange 92 interposed therebetween. By such caulking, the flange portion 92 and the protrusions 42 can be firmly fixed to each other with a relatively simple configuration. Such a projection 42 may extend radially as shown in FIG. 5 before being crimped, or may extend axially upward as shown in FIG. The embodiment as shown in FIG. 5 has an advantage that the sensor support member 4 can be easily formed by pressing. Moreover, in the form as shown in FIG. 6, there is an advantage that it is easy to caulk.

  Further, as shown in FIG. 4, the plurality of projecting portions 42 are arranged side by side along the circumferential direction of the flange portion 92. In the present embodiment, the number of the protrusions 42 is three, and the three protrusions 42 are arranged at equal angular intervals in the circumferential direction. Such an arrangement can reduce the positional deviation between the case 9 and the sensor support member 4 in the radial direction.

  The number of the projecting portions 42 is not limited to three, and may be two or less or four or more, but in the case of three or more, the radial direction of the case 9 and the sensor support member 4 The effect of reducing misalignment can be suitably enhanced. Further, the positions of the protrusions 42 in the circumferential direction may not be at equal angular intervals. Moreover, although the width | variety (length in the circumferential direction) of the some protrusion part 42 is mutually equal in illustration, mutually may differ.

  The thickness t2 of each protrusion 42 is thinner than the thickness t1 of the main body 41. By making the thicknesses t1 and t2 have such a magnitude relationship, it is possible to make the protrusions 42 thinner and to facilitate caulking while increasing the rigidity of the main body 41.

  Here, each projecting portion 42 is disposed at a position biased to the case 9 side (the other side) of the main body portion 41. By arranging the protrusions 42 in this manner, a space corresponding to the difference between the thicknesses t1 and t2 can be formed on the lower side with respect to the protrusions 42. This space can be used as a working space when joining the mounting member 2 to the first major surface 43 of the sensor support member 4 by welding. Therefore, such welding can be easily performed.

  The ratio (t2 / t1) of the thickness t2 to the thickness t1 is not particularly limited, but is preferably 0.1 or more and 0.7 or less, and more preferably 0.2 or more and 0.5 or less preferable. By setting it as such a ratio, coexistence with the required rigidity of the main-body part 41 and the easiness of crimping of each protrusion part 42 can be aimed at, without thickening the main-body part 41 more than necessary. Moreover, the weldable space as described above can be easily formed.

  The constituent material of such a sensor support member 4 is not particularly limited as long as it is a metal material, but iron-based materials are preferable from the viewpoint of being relatively inexpensive and excellent in processability, and excellent in corrosion resistance. From the viewpoint, stainless steel such as SUS304 is preferable.

Second Embodiment
FIG. 7 is a plan view (as viewed from the direction along the axis ax) schematically showing a fixed state of the sensor support member and the case provided in the pressure sensor according to the second embodiment of the present invention. Hereinafter, although 2nd Embodiment shown in FIG. 7 is described, the description is abbreviate | omitted about the matter similar to 1st Embodiment mentioned above. In FIG. 7, the same components as those in the above-described embodiment are denoted by the same reference numerals.

  The pressure sensor 1A shown in FIG. 7 has a case 9A in place of the case 9 of the first embodiment described above. The case 9A has a case main body 91 and a flange portion 92A provided at the lower end of the case main body 91. The plurality of projecting portions 42 and the flange portion 92A constitute a blocking portion 20A. Here, the flange portion 92 </ b> A is provided with a plurality of cutout portions 94 which are cut out in a rectangular shape corresponding to the plurality of projecting portions 42 of the sensor support member 4. The notch 94 has a surface facing the side surface of the protrusion 42 in the circumferential direction.

  Thus, the flange portion 92A has the cutaway portion 94 in which at least a portion of the protrusion 42 is accommodated. By accommodating the projecting portion 42 in the notch portion 94, it is possible to prevent a change in the posture of the case 9A in the circumferential direction with respect to the sensor support member 4. In addition, when fixing the case 9A and the sensor support member 4, the circumferential alignment of the case 9A and the sensor support member 4 can be performed.

  In addition, in FIG. 7, although the number of the protrusion parts 42 and the number of the notch parts 94 are equal, these numbers may differ. Also, there may be a protrusion 42 not accommodated in the notch 94 or a notch 94 not containing the protrusion 42. Further, the number of the protrusions 42 and the notches 94 may be two or less or four or more. Further, the notch 94 is not limited to the illustrated shape, size, and the like. Although the shapes, sizes, etc. of the plurality of notches 94 are equal to each other in the drawing, they may be different from each other.

  Also in the second embodiment as described above, as in the first embodiment described above, the metal sensor support member 4 and the nonmetal case 9A can be fixed to each other with high reliability.

Third Embodiment
FIG. 8 is a longitudinal cross-sectional view (a view cut along an axis ax) schematically showing a fixed state of a sensor support member and a case provided in a pressure sensor according to a third embodiment of the present invention. Hereinafter, although 3rd Embodiment shown in FIG. 8 is described, the description is abbreviate | omitted about the matter similar to 1st Embodiment mentioned above. In FIG. 8, the same components as those in the above-described embodiment are denoted by the same reference numerals.

  The pressure sensor 1B shown in FIG. 8 has a sensor support member 4B and a case 9B in place of the sensor support member 4 and the case 9 of the first embodiment described above. The case 9B includes a case main body 91, a flange portion 92 provided at a lower end of the case main body 91, and a plurality of claw portions 95 projecting downward from the flange portion 92. The plurality of claws 95 and the main body 41 of the sensor support member 4B constitute a blocking unit 20B. Here, the tip end of the claw portion 95 protrudes radially inward and is in contact with the lower surface of the main body portion 41. The main body 41 of the sensor support member 4B is provided with a recess 47 which is open to the lower side and the outer side in the radial direction, and the tip of the claw 95 is inserted in the recess 47. The recess 47 may be omitted as long as the tip end of the claw 95 can be brought into contact with the lower surface of the main body 41.

  Thus, the blocking portion 20B has the claw portion 95 provided on the case 9B and in contact with the first major surface 43 of the sensor support member 4B. The case 9B having such a claw 95 can be attached to the sensor support member 4B by elastically deforming the claw 95. Therefore, the attachment of the case 9B to the sensor support member 4B can be simplified.

  According to the third embodiment as described above, as in the first embodiment described above, the metal sensor support member 4B and the nonmetal case 9B can be fixed to each other with high reliability. The third embodiment may be combined with the first embodiment or the second embodiment described above.

  Although the pressure sensor of the present invention has been described above based on the illustrated embodiment, the present invention is not limited to this, and the configuration of each part may be replaced with an arbitrary configuration having the same function. Can. In addition, any other component may be added to the present invention.

DESCRIPTION OF SYMBOLS 1 ... pressure sensor 1A ... pressure sensor 1B ... pressure sensor 2 ... attachment member 3 ... diaphragm 4 ... sensor support member 4B ... sensor support member 5 ... sensor element 6 ... terminal 7 ... sealing material 9 ... case 9 A ... case 9 B ... case 12 Terminal 14 O-ring 15 Adhesive 20 Blocking part 20A Blocking part 20B Blocking part 21 Through hole 22 Male thread 23 Head 41 Main body 42 Projection 43 First main surface 44 second main surface 45 through hole 47 concave portion 91 case main body 92 flange portion 92A flange portion 93 concave portion 94 cut portion 95 claw portion 131 concave portion S1 first chamber S2 second chamber ax ... axis

Claims (15)

A sensor element that outputs a signal according to the pressure of the fluid;
A sensor support member having a first main surface on one side and a second main surface on the other side opposite to the first main surface, the sensor element being mounted on the first main surface, and made of a metal material When,
A terminal electrically connected to the sensor element and penetrating the sensor support member from the one side to the other side;
And covering the second main surface of the sensor support member and a case attached to the sensor support member and made of a non-metallic material,
The pressure sensor, wherein the sensor support member and the case have a blocking portion that prevents the sensor support member and the case from separating from each other. The case has at least one first protrusion projecting radially outward at a periphery of the one side contacting the sensor support member,
The sensor support member has a main body portion on which the sensor element is mounted, and at least one second projecting portion that protrudes radially outward from an outer peripheral portion of the main body portion and fixes the first projecting portion. ,
The pressure sensor according to claim 1, wherein the blocking portion includes the first protrusion and the second protrusion. The case has a flange portion protruding radially outward at a periphery of the one side contacting the sensor support member,
The sensor support member has a main body portion on which the sensor element is mounted, and at least one protrusion protruding radially outward from an outer peripheral portion of the main body portion and fixing the flange portion.
The pressure sensor according to claim 1, wherein the blocking portion includes the flange portion and the protruding portion.   The pressure sensor according to claim 3, wherein the projecting portion crimps and fixes the flange portion by sandwiching the flange portion in a thickness direction.   The pressure sensor according to claim 3, wherein the at least one protrusion includes a plurality of the protrusions aligned along a circumferential direction of the flange.   The pressure sensor according to any one of claims 3 to 5, wherein the flange portion has a notch portion in which at least a part of the protrusion portion is accommodated.   The pressure sensor according to any one of claims 3 to 6, wherein the flange portion is provided at an end of the one side of the case.   The pressure sensor according to any one of claims 3 to 7, wherein a thickness of the protrusion is thinner than a thickness of the main body.   The pressure sensor according to claim 8, wherein the protrusion is disposed at a position biased to the other side of the main body.   The pressure sensor according to any one of claims 1 to 9, wherein the blocking portion is provided in the case and has a claw portion contacting the first main surface of the sensor support member.   The pressure sensor according to any one of claims 1 to 10, wherein the nonmetal material is a resin material.   The pressure sensor according to any one of claims 1 to 11, wherein the sensor support member and the case are joined via an adhesive.   The flow path which arrange | positions the said one side with respect to the said sensor support member, and which guide | induces the said fluid to the said sensor element is provided, It has an attachment member detachably attached to a to-be-attached body. The pressure sensor according to item 1. A diaphragm disposed between the mounting member and the sensor support member;
14. The pressure sensor according to claim 13, further comprising: a pressure transmission medium accommodated in a space formed between the diaphragm and the sensor support member and transmitting a pressure of the fluid applied to the diaphragm to the sensor element. . The pressure sensor according to claim 13, wherein the mounting body is a control valve for mounting on a vehicle.