JP2019112656A - Cvd apparatus for carbon nanostructure growth and method for manufacturing carbon nanostructure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To continuously grow carbon nanostructures on a base material surface while transferring this base material even when a band-shaped copper foil having a catalyst layer on the surface is used as the base material, for example. Provided are a CVD apparatus for structure growth and a method for manufacturing a carbon nanostructure. SOLUTION: The growth of carbon nanostructures of the present invention is carried out by transferring a band-shaped base material Fm in a processing furnace 1 in a heated atmosphere into which a carbon-containing raw material gas is introduced and growing carbon nanostructures on the surface of the base material. The CVD device M for use is a feeding means 2 that unwinds a strip-shaped base material wound in a roll shape at a predetermined speed, and a winding base material having a carbon nanostructure grown on its surface by passing through a processing furnace. Loosening means 5a and 5b provided between the means 3 and the feeding means and the winding means to cancel and loosen the tension applied to the portion of the base material existing in the processing furnace, and the loosened base material portion. It is provided with a belt conveyor 6 for transferring while carrying the above. [Selection diagram] Fig. 1

Description

  The present invention relates to a CVD apparatus for carbon nanostructure growth for growing carbon nanostructures such as carbon nanotubes and graphene on the surface of a substrate, and a method for producing carbon nanostructures.

  For example, Patent Document 1 discloses a CVD apparatus for growing carbon nanostructures of this type. In this process, a carbon-containing raw material gas is introduced into the processing furnace and heated to make the inside of the processing furnace a heating atmosphere (for example, a heating temperature of 700 ° C.). Substrates of the area are sequentially transported at fixed intervals to grow carbon nanostructures on the surface of each substrate.

  Here, in order to obtain carbon nano-structures with high productivity, a strip-like thin substrate is used instead of the substrate, and the carbon nano-structures are transferred to the surface of the base while being transferred in a processing furnace. It is possible to make it grow continuously. In such a case, the strip-like base material wound in a roll shape is fed out at a predetermined speed by the feeding means, and the fed-out base material is transferred in the processing furnace and passes through the processing furnace. The base material on the surface of which the carbon nanostructure has grown is rolled up by the winding means, and the base material is passed from the feeding means to the processing furnace and taken up by the winding means. Usually, a constant tension will be applied.

  However, in order to effectively grow carbon nanostructures, for example, when using a strip-like copper foil having a catalyst layer on the surface, the substrate is passed through a processing furnace in a heating atmosphere. Is heated and softened, and is plastically deformed due to the tension applied to the substrate (in this case, it becomes difficult to wind around the winding means so that wrinkles and the like are not generated on the substrate on which the carbon nanostructure has grown) In some cases, there is a problem that the substrate breaks (in this case, the production is interrupted and the productivity is reduced).

Patent No. 4581146 gazette

  In the present invention, in view of the above points, even when using, for example, a strip-like copper foil having a catalyst layer on the surface as a substrate, the carbon nanostructure is continuously formed on the substrate surface while transferring the substrate. It is an object of the present invention to provide a CVD apparatus for carbon nanostructure growth that can be grown and a method for producing a carbon nanostructure.

  In order to solve the above problems, the carbon nanostructure according to the present invention, wherein a band-like base material is transferred in a processing furnace of a heating atmosphere introduced with a carbon-containing source gas, and carbon nanostructures are grown on the surface of the base material. The CVD apparatus for body growth comprises a feeding means for feeding out a belt-like base material wound in a roll at a predetermined speed, and a base material having a carbon nanostructure grown on its surface by passing through a processing furnace. Means, slackening means provided between the feeding means and the winding means to cancel and slacken the tension applied to the portion of the substrate existing in the processing furnace, and supporting the slack portion of the substrate And conveying a belt conveyor.

  According to the present invention, by adopting the configuration provided with the slackening means, the tension of the portion of the base material existing in the processing furnace from the feeding means through the processing furnace until it is taken up by the winding means So that it is canceled by gravity. And the structure which provides a belt conveyor is employ | adopted and it conveys the inside of a processing furnace, hold | maintaining the part of this loose base material by a belt conveyor. As a result, even if the portion of the substrate passing through the processing chamber is heated and softened, no tension other than the tension caused by its own weight acts on the portion of the substrate, so the substrate is plastically deformed or There is no problem such as breakage or breakage. As a result, even when using, for example, a strip-shaped copper foil having a catalyst layer on the surface as a substrate, carbon nanostructures can be continuously grown on the substrate surface while transferring the substrate, Productivity can be dramatically improved as compared with the prior art.

  In the present invention, the slackening means is preferably an elastic roller which applies a frictional force to the substrate transported at a predetermined speed.

  In the present invention, when the belt portion of the belt conveyor is configured by assembling a wire having a predetermined diameter, a belt shape configured by assembling a wire having a diameter smaller than the wire of the belt portion in a lattice between the substrate and the belt portion. The carbon nanostructure can be grown also on the surface on the belt portion side of the base material by interposing the mesh body of the above, but when the wire forming the mesh body is softened by heating, the tension relative to the mesh body If it is added, there is a risk that the mesh body may not expand and return or break. In this case, it is preferable to further include a running means for running the mesh body while being interposed between the base material and the belt conveyor in synchronization with the circumferential movement of the belt portion. According to this, since tension is not applied to the mesh body traveling in the processing furnace, it is possible to prevent the elongation and breakage of the mesh body even when the wire material constituting the mesh body is softened by heating, which is advantageous. It is.

  The method for producing a carbon nanostructure according to the present invention for growing a carbon nanostructure on the surface of a belt-like base material using the above-described CVD apparatus for carbon nanostructure growth introduces a carbon-containing source gas into a processing furnace. The step of heating the inside of the processing furnace by heating, the strip-like base material wound in a roll is drawn out at a predetermined speed, and the drawn-out base material is passed through the processing furnace and wound up. The process of canceling and loosening the tension applied to the portion of the base material existing inside, and supporting the slack portion of the base material by the belt portion of the belt conveyor, the processing atmosphere of the heating atmosphere along with the circumferential movement of the belt portion And D. passing the substrate to grow carbon nanostructures on the surface of the substrate.

  The method for producing a carbon nanostructure according to the present invention for growing a carbon nanostructure on the surface of a belt-like base material using the above-described CVD apparatus for carbon nanostructure growth introduces a carbon-containing source gas into a processing furnace. The step of heating the inside of the processing furnace by heating, the strip-like base material wound in a roll is drawn out at a processing speed, and the drawn-out base material is passed through the processing furnace and wound up. In the step of canceling and loosening the tension applied to the portion of the base material existing inside, and supporting the slack portion of the base material by the belt portion of the belt conveyor via the belt-like mesh body, And d) passing the inside of the processing atmosphere of the heating atmosphere along with the traveling of the mesh body in synchronization to grow carbon nanostructures on the surface of the substrate.

BRIEF DESCRIPTION OF THE DRAWINGS Typical sectional drawing which shows the CVD apparatus of embodiment of this invention. (A)-(c) is a schematic diagram explaining the manufacturing method of the carbon nanostructure of embodiment of this invention. Typical sectional drawing which shows the CVD apparatus of other embodiment of this invention. (A)-(c) is a schematic diagram explaining the manufacturing method of the carbon nanostructure of embodiment of this invention.

  Hereinafter, referring to the drawings, the strip-like base material is a copper foil (hereinafter referred to as “base material Fm”) having a catalyst layer (not shown) on the surface, carbon on the surface of base material Fm passing through the processing furnace 1 The embodiment of the CVD apparatus of the present invention will be described by taking, as an example, the case of growing carbon nanotubes Ct which are nanostructures.

  Referring to FIG. 1, M is a CVD apparatus according to an embodiment of the present invention. The CVD apparatus M includes a cylindrical processing furnace 1 for growing carbon nanotubes Ct on a substrate Fm. In the processing furnace 1, a tip end of a gas pipe 12 in which a mass flow controller 11 is opened and which communicates with a gas source (not shown) is disposed, and a heating means 13 is provided outside the processing furnace 1. As the heating means 13, known ones such as a lamp and a heating wire can be used, so the detailed description is omitted here. As a result, the carbon-containing source gas is introduced into the processing furnace 1 at a predetermined flow rate, and heating is performed by the heating means 13 so that the inside of the processing furnace 1 can be made into a heating atmosphere. The heating temperature is appropriately set, for example, in the range of 600 to 700 ° C. according to the type of carbon nanostructure to be grown. Upper and lower heat insulators 14 a and 14 b are provided outside the heating means 13. In the following, the direction in which the base material Fm is transferred in the processing furnace 1 is on the right side in the X-axis direction (horizontal direction in FIG. 1), and the width direction of the base material Fm is in the Y-axis direction (direction orthogonal to the sheet of FIG. 1) A direction orthogonal to a plane including the X-axis direction and the Y-axis direction will be described as a Z-axis direction (vertical direction in FIG. 1).

  On the left side of the processing furnace 1, there is provided a feeding means 2 for drawing out a strip-like base material Fm wound in a roll at a predetermined speed, and on the right side of the processing furnace 1 by passing through the processing furnace 1. A winding means 3 is provided for winding the base material Fm on which the carbon nanotubes Ct are grown in a roll. The feeding means 2 includes a plurality of rollers 21a, 21b, 21c and 21d which are disposed at intervals. A rotating shaft (not shown) of a feeding motor 22a is connected to the feeding roller 21a, and when the feeding roller 21a is rotationally driven by the motor 22a, the base material Fm is fed at a predetermined speed. There is. The roller 21b is additionally provided with a meandering suppression mechanism 23 for suppressing the meandering of the fed-out base material Fm. The roller 21c is a dancer roller which can move in the Z-axis direction, and can adjust the tension of the substrate Fm to be fed out. The meandering suppression mechanism 23 has a configuration similar to that of a known web guide so that the position of the substrate Fm in the Y-axis direction can be freely moved according to the position in the Y direction where the substrate Fm of the roller 21b contacts. There is. Further, the rotation shaft of the motor 22b is connected to the roller 21d closest to the processing furnace 1, and the coefficient of friction existing between the substrate Fm and the roller 21d with respect to the substrate Fm drawn out at a predetermined speed The substrate Fm can be sent to the processing furnace 1 by applying a force corresponding to the above.

  The winding means 3 comprises a plurality of rollers 31a, 31b, 31c, 31d arranged at intervals. The rotating shaft (not shown) of the motor 32a is connected to the roller 31a closest to the processing furnace 1 and exists between the substrate Fm and the roller 31a with respect to the substrate Fm drawn out at a predetermined speed. The substrate Fm can be fed to the winding roller 31d by applying a force corresponding to the coefficient of friction. The rotation of the roller 31 a is basically synchronized with the rotation of the roller 21 d of the feeding means 2. The synchronization method can use not only synchronization by controlling the number of rotations of the motor 22b and the motor 32a, but also mechanical position synchronization using a timing belt. Here, the number of rotations of both motors 22b and 32a does not have to be exactly the same, and the number of rotations of motor 32a can be adjusted according to the amount of deflection of substrate Fm measured by deflection amount measuring means 33 . As a structural example in the case of mechanical position synchronization, it can be adjusted by changing the diameter of the timing pulley by known means. For example, when the deflection amount of the substrate Fm exceeds a predetermined value, control can be performed to increase the number of rotations of the motor 32a by a predetermined amount. As the deflection amount measuring means 33, a known eddy current sensor capable of measuring the distance to the surface of the substrate Fm, preferably the surface of the portion where the catalyst layer is not formed can be used. The deflection amount measuring means 33 is provided between the roller 21d and the roller 62a, and the number of rotations of the motor 32a is similarly adjusted according to the deflection amount of the substrate Fm measured by the deflection amount measuring means 33. It is also good. The roller 31 b is a dancer roller movable in the Z-axis direction, and adjusts the tension of the base material Fm to be taken up by the take-up roller 31 d. A rotating shaft (not shown) of the motor 32b is connected to the winding roller 31d, so that the substrate Fm can be wound in a roll at a predetermined speed.

  Thus, the base material Fm is usually between the rollers 21a to 21d, between the rollers 21d to 31a, and between the rollers 31a to 31d until it passes from the feeding means 2 through the processing furnace 1 and is taken up by the winding means 3. In each of the three regions (hereinafter referred to as "first region", "second region" and "third region" respectively), constant tension is applied respectively, but it passes through the processing furnace 1 of the heating atmosphere When the base material Fm is heated and softened sometimes, there arises a problem that the base material Fm is plastically deformed or broken.

  Therefore, the CVD apparatus M of the present embodiment is provided between the feeding means 2 and the winding means 3 and is a slackening means 5a that cancels and slackens the tension applied to the portion of the base material Fm existing in the processing furnace 1. , 5b, and a belt conveyor 6 for transporting while carrying the portion of the slack base material Fm. The slackening means 5a, 5b can be composed of an elastic roller having a configuration in which the normal force is increased between the base material Fm to the roller 21d transferred at a predetermined speed to increase the frictional force. The elastic roller can be realized, for example, by a configuration in which a rubber roller is driven by an air cylinder. The belt conveyor 6 has an endless belt portion 61, and a plurality of (four in the present embodiment) rollers 62a, 62b, 62c, 62d arranged at intervals, around which the belt portion 61 is wound. A rotating shaft (not shown) of a motor 63 is connected to the roller 62a, and when the roller 62a is rotationally driven by the motor 63, the belt portion 61 moves at a predetermined speed. At this time, since a predetermined tension (for example, 20 to 80 N) is applied to the belt portion 61, the outer diameter (wire diameter) d1 (see FIG. 2A) is used as the wire W1 constituting the belt portion 61. Mechanical strength is given by assembling relatively large ones. When the belt conveyor 6 receives the weight of the base material Fm, it is possible to cancel the increase in tension between the rollers 21d to 31a due to the weight of the base material Fm between the rollers 62a and 62b. Further, in the belt portion 61, a plurality of openings which allow the growth of carbon nanotubes Ct on the mounting surface Fm1 side of the base material Fm are formed.

  According to the above-described configuration, the dancers can not work on the base material Fm in the first regions 21a to 21d and the third regions 31a to 31d until they pass through the processing furnace 1 from the feeding means 2 and are taken up by the winding means 3. The tension values set on the rollers 21c and 31b are basically reflected, but by adopting the configuration including the slackening means 5a and 5b, the tensions of the first regions 21a to 21d and the third regions 31a to 31d Can be insulated to make the tension of the second regions 21d to 31a substantially zero. This means that the vertical drag of the rollers 21d and 31a will be substantially zero, assuming that the tension in the second regions 21d to 31a is zero without the slackening means 5a and 5b. It is because it becomes impossible to give effective power according to a coefficient of friction to substrate Fm. To be precise, since tension caused by the weight of the base material Fm existing between the rollers 21d to 62a and between the rollers 62b to 31a is generated, the tension of the second regions 21d to 31a does not completely become zero. That is, the slackening means 5a and 5b and the belt conveyor 6 apply only the tension due to the weight of the base material Fm between the rollers 21d to 31a, and realize that the elongation of the base material Fm is minimized. It can be said that stable delivery and winding can be realized by allowing tension to be applied to the first area and the third area above the induced tension value. Since the tension of the portion of the base material Fm present in the processing furnace 1 is canceled, the downward slack shape is suspended between the rollers 21d to 62a and the rollers 62b to 31a due to the self weight of the base material Fm. The rollers 62a and 62b have a shape that follows a suspension line by the combined force of the weight and tension of the belt portion 61 wound around the belt conveyor 6. The deflection amount measuring means 33 is controlled with the position in the direction of the intersection Z of the suspension line as the zero position. That is, the tension increase occurs in the Z-axis direction above the position, and the tension increase due to its own weight in the Z-axis direction below the position. However, since its own weight is not so heavy, it is preferable to control a position lower in the Z-axis direction by α than the position as a zero position. The reason is that although the increase in weight is not large, the increase in tension caused by the motor such as the motor 22b is because the amount of increase in tension per unit time is large. And the structure which provides the belt conveyor 6 is employ | adopted, and the inside of the processing furnace 1 is transferred, hold | maintaining the part of this slack base material Fm by the belt conveyor 6. FIG. Thereby, even if the portion of the substrate Fm passing through the processing chamber 1 is heated and softened, no tension other than the tension caused by its own weight acts on the portion of the substrate Fm. Does not cause problems such as plastic deformation or breakage. As a result, even when using, for example, a strip-shaped copper foil having a catalyst layer on the surface as the substrate Fm, continuously growing carbon nanostructures on the surface of the substrate Fm while transferring the substrate Fm. Thus, the productivity can be dramatically improved as compared with the prior art.

  The CVD apparatus M has known control means provided with a microcomputer, sequencer, etc., and the control means operates the mass flow controller 11, operates the heating means 13, and controls the motors 22a, 22b, 32a, 32b, 63. Management of the operation of the Hereinafter, referring also to FIG. 2, using the above-mentioned CVD apparatus M, the substrate Fm is a copper foil having a catalyst layer formed on the surface, and carbon nanotubes Ct are grown on the surface of the substrate Fm. An embodiment of a method for producing a carbon nanostructure will be described. An Fe film can be used as the catalyst layer.

  The mass flow controller 11 is controlled to introduce the carbon-containing gas into the processing furnace 1 at a predetermined flow rate (for example, 100 to 2000 sccm) (at this time, the pressure in the processing furnace 1 is, for example, 1 kPa to atmospheric pressure). As the carbon-containing source gas, hydrocarbons such as ethylene gas, acetylene gas and methane gas, and alcohols such as ethanol can be used. A dilution gas may be introduced into the processing furnace 1 together with such a source gas, and as the dilution gas, hydrogen gas, nitrogen gas, or a rare gas such as argon can be used. In this state, the heating means 13 is operated and heated to make the inside of the processing furnace 1 a heating atmosphere. The heating temperature can be appropriately set in the range of 400 to 1050 ° C. depending on the type of the source gas. For example, the temperature can be set to 750 ° C. when ethylene gas is used, 720 ° C. when acetylene gas is used, and 800 ° C. when methane gas is used. Thereby, carbon nanotubes Ct as the napping layer Rr grow in random directions on the surface of the belt portion 61 (see FIG. 2A). By growing the napping layer Rr to a predetermined thickness in this manner, carbon nanotubes can be grown on the surface (both sides) of the base material Fm as described later. Next, the motors 22a, 22b, 32a, 32b are driven (at this time, the motors 22b, 32a are synchronized), and the feeding roller 21a is rotated to feed the strip-like base material Fm at a predetermined speed and feed it. Are passed through the processing furnace 1 and wound around the winding roller 31d. At the same time, the slackening means 5a and 5b are brought into contact with the base material Fm to cancel and slacken the tension applied to the portion of the base material Fm existing in the processing furnace 1.

  Then, while the slack portion of the base material Fm is carried by the belt portion 61 of the belt conveyor 6, the inside of the processing furnace 1 of the heating atmosphere is passed along with the circumferential movement of the belt portion 61. Thereby, as shown in FIGS. 2B and 2C, carbon nanotubes Ct grow so as to be oriented in the direction orthogonal to the surface (both sides) of the base material Fm. The time for the base material Fm to pass through the processing furnace 1 can be appropriately set according to the length (for example, 125 μm) of the carbon nanotube Ct grown from the surface of the base material Fm. Here, since the napping layer Rr interposed between the mesh belt Vm and the metal foil Fm is not always given a predetermined tension, it is not necessary to consider the mechanical strength. Then, the heated source gas can be made to spread over the entire surface on the mounting surface Fm1 side of the base material Fm through the gap existing in the raising layer Rr. As a result, carbon nanotubes Ct can be grown over the entire surface of the substrate Fm. The carbon nanotubes Ct as the napping layer Rr grow in random directions, whereas the carbon nanotubes Ct grow in the direction perpendicular to the surface of the base material Fm. Even if the front end of the lower case enters into the interior of the raising layer Rr, the two do not get entangled. Therefore, when the base material Fm is wound up by the winding roller 31d, the napping layer Rr is not peeled off from the belt portion 61. Although the motors 22b and 32a are synchronized, the transfer amount of the base material Fm per unit time is not synchronized due to the change of friction and thermal contraction amount, and as a result, the transfer amount balance of the third region is zero In some cases, it may increase or decrease per unit time. This increase or decrease is reflected on the measurement value of the deflection amount measuring means 33 in an integral manner. In other words, stable transfer of the base material Fm can be realized by correcting the synchronization amount of the motors 22b and 32a using the measurement value of the deflection amount measuring means 33.

  Next, a CVD apparatus M2 according to another embodiment of the present invention will be described with reference to FIG. In the CVD apparatus M2 of the present embodiment, a belt-like mesh body (for example, a mesh belt) Bm configured by assembling wire rods W2 smaller in diameter than the wire rod W1 of the belt portion 61 in a grid shape and the circumferential movement of the belt portion 61 Synchronously, traveling means 7, 8 for traveling the mesh body Bm in a state of being interposed between the base material Fm and the belt conveyor 6 are further provided.

  Referring also to FIG. 4A, the outer diameter d2 of the wire W2 of the mesh body Bm is preferably set in the range of 0.01 to 0.1 mm. If the outer diameter d2 is less than 0.01 mm, the temperature rises and the wire W2 extends and hangs down to the belt conveyor 6 side, and the effect of using the mesh body Bm may be reduced, while the outer diameter d2 is When it exceeds 0.1 mm, the base material Fm can not be sufficiently floated from the wire W2, and a trace of the shape of the mesh body Bm may be attached. Moreover, it is preferable that the aperture ratio of mesh body Bm is set to 50 to 99.8% of range. If the opening ratio is less than 50%, the raw material gas may not be sufficiently supplied, and the growth of carbon nanotubes Ct may be deteriorated or the shape of the mesh body Bm may be attached, but the opening ratio is 99.8% When it exceeds, the mechanical strength of mesh body Bm may fall.

  The traveling means is constituted by the feeding means 7 and the winding means 8. The feeding means 7 includes a plurality of rollers 71a to 71f arranged at intervals. A rotating shaft (not shown) of a feeding motor 72a is connected to the feeding roller 71a, and when the feeding roller 71a is rotationally driven by the motor 72a, the base material Fm is fed at a predetermined speed. There is. Further, the rotation shaft of the motor 72 b is connected to the roller 71 f closest to the processing furnace 1 so that the mesh body Bm can be sent to the processing furnace 1 with a predetermined tension.

  The winding means 8 comprises a plurality of spaced apart rollers 81a-81f. The rotating shaft (not shown) of the motor 82a is connected to the roller 81a closest to the processing furnace 1 so that the mesh body Bm can be fed to the winding roller 81f with a predetermined tension. The rotation of the roller 81 a is synchronized with the rotation of the roller 71 f of the feeding means 7. The synchronization method can use mechanical position synchronization using a timing belt as well as synchronization by controlling the number of rotations of the motor 72b and the motor 82a. Further, in order to prevent the slip between the base material Fm and the mesh body Bm, the rotations of the rollers 31a, 21d, 71f, 81a are preferably synchronized, and the synchronization method is made of the motors 22b, 32a and the motors 72b, 82a. Mechanical position synchronization can be used using synchronization by controlling the number of rotations or using a timing belt. The mesh body Bm is heated and softened in the processing furnace 1 depending on the outer diameter d2 and the like of the wire W2 of the mesh body Bm to be run by the running means 7 and 8, and not only plastic deformation or breakage occurs. There is a possibility that slip may occur between the material Fm and the mesh body Bm. In this case, a second slackening means (not shown) having the same configuration as the slackening means 5a and 5b is provided between the feeding means 7 and the winding means 8, and the mesh body existing in the processing furnace 1 is provided. You may comprise so that the tension added to the part of Bm may be canceled.

  Next, referring also to FIG. 4, using the above-mentioned CVD apparatus M2, the substrate Fm is a copper foil having a catalyst layer formed on the surface, and carbon nanotubes Ct are grown on the surface of the substrate Fm. By way of example, an embodiment of a method of producing a carbon nanostructure will be described.

  As in the above embodiment, after the inside of the processing furnace 1 is heated, the motors 22a, 22b, 32a, 32b are driven (at this time, the motors 22b, 32a are synchronized), and the feeding roller 21a is rotated. The strip-like base material Fm is fed at a predetermined speed, and the fed-out base material Fm is allowed to pass through the processing furnace 1 and wound around the winding roller 31d. At the same time, the slackening means 5a and 5b are brought into contact with the base material Fm to cancel and slacken the tension applied to the portion of the base material Fm existing in the processing furnace 1. In this embodiment, at the same time, the motors 72a, 72b, 82a, 82b are driven (at this time, the motors 72b, 82a are also synchronized with the motors 22b, 32a), and the belt-like mesh body Bm is drawn out.

  Then, while the slack portion of the base material Fm is supported by the belt portion 61 of the belt conveyor 6 via the band-like mesh body Bm (see FIG. 4A), the mesh body synchronized with the circumferential movement of the belt portion 61 With the traveling of Bm, the inside of the processing furnace 1 of the heating atmosphere is passed. Thereby, as shown in FIG. 4, carbon nanotubes Ct grow so as to be oriented in the direction orthogonal to the surface (both sides) of the base material Fm. The growing step includes the first step (see FIG. 4A) in which carbon nanotubes Ct grown on the mounting surface Fm1 side of the base material Fm are in contact with the respective wires W2 constituting the mesh body Bm. The carbon nanotubes Ct in contact with W2 further grow, and the carbon nanotubes Ct are grown through the second stage of supporting the base material Fm by the grown carbon nanotubes Ct. When the base material Fm is supported by the carbon nanotubes Ct in the second step, a gap S is formed between the mesh body Bm and the base material Fm, and the base material Fm on the mounting surface Fm1 side via the gap S The source gas heated reliably to the projection plane of the wire W2 can be made to reach and reach. Thereby, the carbon nanotube Ct can be grown over the entire surface on the mounting surface side of the base material Fm as in the above embodiment.

  Also in the present embodiment, even if the portion of the substrate Fm passing through the processing chamber 1 is heated and softened, no tension acts on the portion of the substrate Fm, so the substrate Fm is plastically deformed. No trouble such as breaking or breaking occurs. As a result, even when using, for example, a strip-shaped copper foil having a catalyst layer on the surface as the substrate Fm, continuously growing carbon nanostructures on the surface of the substrate Fm while transferring the substrate Fm. Thus, the productivity can be dramatically improved as compared with the prior art.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment, In the range which does not deviate from the range of this invention, it can deform | transform suitably. Although the case where a copper foil is used as the substrate Fm has been described as an example in the above embodiment, the present invention is not limited to this, and it is preferable when using a substrate which is softened by heating in the heating atmosphere in the processing furnace 1. It can apply.

  Although the above embodiment has been described by way of example in which the raw material gas introduced into the processing furnace 1 is heated by the heating means 13, the raw material gas heated outside the processing furnace 1 is introduced into the processing furnace 1 and heated. It may be an atmosphere.

  Although the case where the pressure at the time of carbon nanotube Ct growth was 1 kPa-atmospheric pressure was explained to the example in the above-mentioned embodiment, the present invention is applicable also when growing carbon nanotube Ct under pressure reduction. In this case, an evacuation unit constituted by a vacuum pump may be connected to an exhaust port opened on the wall of the processing furnace 1 and a vacuum sealing unit may be provided as appropriate. A well-known thing can be used as these evacuation means and a vacuum sealing means, Therefore The further detailed description is abbreviate | omitted.

  In the above embodiment, the case of growing carbon nanotubes Ct has been described as an example, but the present invention is also applied to the case of growing (vapor phase growth) other carbon nanostructures such as graphene and diamond like carbon. Can.

  In the above embodiment, although the case where the cross section of the wire W2 of the mesh body Bm is a true circle has been described as an example, the cross section of the wire W2 is not limited to this, and a wire having an elliptical, triangular or rhombus cross section may be used. Although it is possible, it is preferable to use a wire W2 having a cross section in line contact with the mounting surface Fm1 of the base material Fm.

  Bm: mesh body, Fm: base material, M: CVD device, 1: processing furnace, 2: delivery means, 3: winding means, 5a, 5b: slackening means, elastic roller, 6: belt conveyor, 61: belt Department.

Claims (5)

In a CVD apparatus for growing carbon nanostructures, a band-like base material is transferred in a processing furnace of a heating atmosphere into which a carbon-containing source gas is introduced, and carbon nanostructures are grown on the surface of the base material,
A feeding means for feeding a belt-like base wound in a roll at a predetermined speed, a winding means for taking up a base having a carbon nanostructure grown on the surface by passing through a treatment furnace, a feeding means and a winding A slack means provided between the take-up means to cancel and slacken the tension applied to the portion of the substrate existing in the processing furnace, and a belt conveyor for carrying and transporting the portion of the slack substrate CVD apparatus for carbon nanostructure growth characterized in that.   The CVD apparatus for carbon nanostructure growth according to claim 1, wherein the slackening means is an elastic roller which applies a frictional force to the base material transferred at a predetermined speed. The CVD apparatus for carbon nanostructure growth according to claim 1 or 2, wherein the belt portion of the belt conveyor is configured by assembling a wire having a predetermined diameter,
A band-like mesh body configured by assembling in a grid shape a wire rod having a diameter smaller than that of the belt portion;
A CVD apparatus for carbon nanostructure growth, further comprising: running means for running the mesh body in a state interposed between the base material and the belt conveyor in synchronization with the circumferential movement of the belt portion. A method of producing a carbon nanostructure, comprising: growing a carbon nanostructure on a surface of a belt-like substrate using the CVD apparatus for carbon nanostructure growth according to claim 1;
Introducing a carbon-containing source gas into the processing furnace and heating the inside of the processing furnace to a heating atmosphere;
The strip-like base material wound in a roll is drawn out at a predetermined speed, and the drawn-out base material is passed through the processing furnace and wound up, and the tension applied to the part of the base material existing in the processing furnace is canceled and slackened. Process,
And a step of causing the carbon nanostructure to grow on the surface of the substrate by passing through the inside of the processing furnace of the heating atmosphere as the belt portion rotates while supporting the slack portion of the substrate by the belt portion of the belt conveyor. A method for producing a carbon nano structure, comprising: A method for producing a carbon nanostructure, comprising: growing a carbon nanostructure on a surface of a belt-like substrate using the CVD apparatus for carbon nanostructure growth according to claim 3;
Introducing a carbon-containing source gas into the processing furnace and heating the inside of the processing furnace to a heating atmosphere;
The strip-like base material wound in a roll is drawn out at a processing speed, and the drawn-out base material is passed through the processing furnace to wind it up and cancel the tension applied to the part of the base material existing in the processing furnace to loosen it. Process,
While carrying the slack portion of the base material by the belt portion of the belt conveyor via the belt-like mesh body, pass through the inside of the processing atmosphere of the heating atmosphere as the mesh body moves in synchronization with the circumferential movement of the belt portion And C. growing a carbon nanostructure on the surface of a substrate.

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