JP2019107779A - Pickup unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pickup unit capable of picking up a unit substrate from a mother substrate without causing twisting or the like with a scrap area. SOLUTION: A unit main body 2 arranged so as to be vertically movable above a mother board M placed on a table 1, an air suction board 3 formed on the unit main body 2 and sucking an upper surface of the unit board M1. A suction air source P communicated to the suction port 3a of the air suction plate 3 via an air duct 4a, and a pressing member that is held by the unit body 2 around the air suction plate 3 and presses the upper surface of the end material region T. It consists of 6. When the unit body 2 descends and the unit substrate M1 is adsorbed by the air suction plate 3, the pressing member 6 moves downward toward the end material region T and presses the unit body 2, and the unit body 2 enters the ascending process and is adsorbed. After the substrate M1 is separated from the end material region T, it is separated from the end material region T and rises together with the unit main body 2. [Selection diagram] Fig. 2

Description

  The present invention relates to a pickup unit that picks up and picks up unit substrates divided by break lines after processing a grid-like break line (division line) on the surface of a mother substrate made of a brittle material such as glass. The substrate to be processed according to the present invention is a single substrate, a bonded substrate obtained by bonding two thin plates, and a substrate having a three-layer structure in which thin resin plates are stacked on both sides of a glass plate. In the following, they are collectively referred to as "substrate".

  When cutting out a unit substrate from a mother substrate, a cutter wheel or a laser beam is used to process break lines in the X direction and Y direction orthogonal to each other on the surface of the substrate, and unit substrates cut along the break lines in the next step. Are picked up and taken out by a pickup unit or the like (see Patent Documents 1 and 2).

  Generally, when cutting out a unit substrate from a mother substrate, a cutter wheel or laser light is scribed along a line to be broken to form a crack that penetrates in the thickness direction of the substrate, and the substrate is cut by a break bar or the like in the next step. There are a method of bending and dividing along a break line (crack) and a method of processing a break line in a completely divided state (hereinafter referred to as "full cut"). These methods are selectively used depending on the type and thickness of the substrate and the application.

  Also, in order to improve the end surface accuracy of the cut unit substrate, as shown in FIG. 5, an end material region T is formed around the unit substrate M1 divided by the break line S1 in the X direction and the break line S2 in the Y direction. It is being formed. The scrap material area T is separated and discarded at the time of pickup.

Japanese Patent Application Publication No. 2007-141998 JP 2000-269239 A

  However, in the method of processing the break line in the fully cut state, when forming the above-mentioned end material region around the unit substrate, when picking up and taking out the unit substrate, a part of the end material region is dragged to the unit substrate May be lifted. This is because when processing a break line with a cutter wheel or a laser beam, a part of the periphery of the unit substrate is insufficiently divided and there remains a connected portion, or the unit substrate and the edge material region of the periphery thereof This is caused by contact between the end faces of the

  Uncut portions of break lines are likely to occur on laminated substrates such as bonded substrates. In particular, when processing a break line on a substrate having a three-layer structure in which resin layers are laminated on both sides of a glass plate, the resin layer on the surface is first scribed by laser light and divided, and then the intermediate glass plate is cut. After scribing and dividing with the wheel, the substrate is inverted to scribe and divide the resin layer on the opposite side with laser light, so the risk of occurrence of uncut parts becomes high.

  If a lifting phenomenon of the end material region occurs at the time of picking up the unit substrate due to such uncut or end face contact, the end surfaces are distorted between the unit substrate M1 and the end material region T, and the end surface of the unit substrate M1 is damaged. As a result, defects such as reduction in end face strength occur to deteriorate the quality and the product yield.

  Therefore, in view of the above problems, it is an object of the present invention to provide a pick-up unit which can be taken out without causing distortion and the like with the end material region by a simple mechanism when picking up a unit substrate from a mother substrate. Do.

In order to solve the above problems, the present invention takes the following technical measures. That is, the pickup unit of the present invention is a pickup unit for taking out from the mother substrate the unit substrates divided by the full cut break lines orthogonal to each other while leaving the end material regions in the periphery, and transporting them to the next process A unit main body disposed vertically movable above a mother substrate placed on a table, an air suction disk formed on the unit main body and suctioning the upper surface of the unit substrate, and a suction port of the air suction disk A suction air source communicated via an air duct, and a liftable pressing member held by the unit main body around the air suction disc and pressing the upper surface of the end material area, the pressing member comprising When the unit body descends and the unit substrate is adsorbed by the air suction disc, the unit substrate moves downward toward the end material area to The unit substrate is moved up and absorbed, and the unit substrate is separated from the end region and separated from the end region to be lifted together with the unit body. .
Here, a plurality of the air suction disks are installed to simultaneously suction a plurality of unit substrates formed on the mother substrate, and the pressing member is a surface of an end material area adjacent to the periphery of the unit substrates to be suctioned. Preferably, a plurality of components are arranged so that the portions can be pressed.

  In the present invention, when the unit main body descends and the unit substrate is adsorbed by the air suction disc, the pressing member moves downward toward the end material area to press the end material area, and the unit main body enters the rising process and adsorbs. Since the pressing member is formed so as to be separated from the end material area and lifted with the unit main body after the unit substrate is separated from the end material area, the end material area is pulled and lifted when the unit substrate is lifted. It can be reliably stopped. As a result, it is possible to reduce the occurrence of flaws on the end face of the unit substrate to enhance the end face strength, and to obtain a high quality product.

In the present invention, it is preferable that the unit main body be constituted by a plurality of unit members which are disposed in parallel on the same plane and held detachably by a common support shaft.
As a result, a plurality of unit substrates can be picked up at the same time, and the number of unit members can be adjusted to adjust the number of unit substrates to be picked up, if necessary, to improve the transport efficiency.

In the present invention, preferably, the pressing member is formed of an air cylinder, and a tip of a piston of the air cylinder is formed to be in contact with the surface of the end material region.
As a result, even after the unit main body enters an ascending process and the unit substrate lifts up with the air suction disc, the piston can advance forward by the piston stroke of the air cylinder to continue pushing the scrap area, so that the scrap area It can be reliably prevented from being pulled and lifted.

In the present invention, the air cylinder is in communication with the same suction air source as the suction air of the air suction disk, and the piston of the air cylinder is simultaneously driven when the suction air is operated to the air suction disk. It is good to do.
As a result, the same suction air source as the air suction disc can be used to save power of incidental equipment, and the synchronous operation of the air cylinder and the air suction disc can be easily performed.

FIG. 1 is a schematic perspective view showing an embodiment of a pickup unit according to the present invention. Sectional drawing which shows the principal part of the pick-up unit of FIG. FIG. 7 is a cross-sectional view showing a first operation process of the pickup unit of FIG. 1; FIG. 7 is a cross-sectional view showing a second operation process of the pickup unit of FIG. 1; FIG. 2 is a plan view showing an example of a substrate to be picked up. Explanatory drawing which shows one Example of the raising / lowering mechanism of the pick-up unit which concerns on this invention. The partially expanded front view of the raising / lowering mechanism of FIG. FIG. 7 is a cross-sectional view showing a first operation process of the lifting and lowering mechanism of FIG. 6; FIG. 7 is a cross-sectional view showing a second operation process of the lifting and lowering mechanism of FIG. 6;

The details of the pickup unit of the present invention will be described below.
FIG. 5 is a plan view showing an example of a mother substrate picked up by the pickup unit of the present invention. In the mother substrate M shown here, four unit substrates M1 divided by full-cut break lines S1 and S2 extending in the X direction and Y direction are formed while leaving the end material regions T around the four sides. ing. The break lines S1 and S2 are formed at the boundary between the end material region T and the unit substrate M1. The mother substrate M is a single plate made of one brittle material plate such as glass, a bonded substrate obtained by bonding two thin brittle material plates, and a thin resin plate on both the front and back sides of the glass plate. And a laminated substrate having a three-layer structure in which

The pickup unit of the present invention, as shown in FIGS. 2 to 4, comprises a unit main body 2 which is vertically movable above and below a mother substrate M placed on a table 1 by an elevating mechanism. On the lower surface of the unit body 2, a plurality of air suction disks 3 for suctioning the unit substrates M1 are provided. The suction port 3a of the air suction disc 3 is in communication with a suction air source (vacuum pump) P via an air duct 4a.
In the present embodiment, as shown in FIG. 1, the unit body 2 is disposed in parallel on the same plane by a plurality of thick plate-like unit members 2a detachably held by two parallel support shafts 5 In order to be able to increase or decrease the unit members 2a as necessary, the number of unit substrates M1 to be picked up simultaneously can be adjusted.

  Furthermore, a plurality of pressing members 6 for pressing the upper surface of the end material area T around the air suction disc 3 are provided in a state of being held by the unit main body 2. The pressing members 6 are arranged to be able to press the upper surface portions of all the end material regions in the periphery of the unit substrate M1, that is, all the end material regions T formed along the X direction and the Y direction. Then, when the unit body 2 descends and the unit substrate M1 is absorbed by the air suction disc 3, the pressing member 6 moves downward toward the end material area T to press the end material area T, and the unit main body 2 moves up. After the unit substrate M1 which has come in and adsorbed is separated from the end material region T, the pressing member 6 is separated from the end material region T and ascends together with the unit main body 2.

  In the present embodiment, the pressing member 6 is constituted by an air cylinder operated by suction air. The air cylinder as the pressing member 6 includes a cylinder 6a and a piston 6b which reciprocates by a predetermined stroke, and the piston 6b is always retracted by a spring 6c mounted in the cylinder 6a. When a negative pressure is generated by the suction air, the piston 6b is advanced in the projecting direction against the spring pressure so that the tip thereof contacts the surface of the material region T. The inside of the cylinder 6a is in communication with the same suction air source P as the suction air of the air suction disc 3 by the air duct 4b, and when the suction air acts on the air suction disc 3, the piston 6b of the air cylinder is simultaneously driven forward. It is formed as.

  Here, FIG. 2 shows a state in which the air suction disc 3 is lowered to a position where it contacts the surface of the mother substrate M. In this state, the piston 6b of the air cylinder is elevated and is not in contact with the mother substrate M. When the suction port 3a and the inside of the cylinder 6a of the air cylinder are suctioned by the suction air from the suction air source P at this position, as shown in FIG. 6b moves downward to press the surface of the scrap material area T.

  When the unit main body 2 is raised from this state, as shown in FIG. 4, the unit substrate M1 adsorbed by the air suction disc 3 is elevated, but the end material region T is maintained in the pressed state by the piston 6b. . Accordingly, it is possible to reliably prevent the end material region T from being pulled and lifted when the unit substrate M1 is lifted. When the unit body 2 is further raised, the forward stroke of the piston 6 b reaches its limit and ascends with the unit body 2. The amount of forward stroke of the piston 6b is set such that the end edge of the lifted unit substrate M1 can be completely released from the adjacent end material region T, as shown in FIG.

  As described above, in the present invention, when the unit main body 2 is lowered and the unit substrate M1 is adsorbed by the air suction disc 3, the piston 6b as a pressing member moves downward toward the end material area T to end material area T Is formed so that the piston 6b separates from the end material region T and ascends with the unit main body 2 after the unit substrate 2 enters the ascending process and the unit substrate M1 adsorbed is separated from the end material region T. Therefore, it is possible to reliably prevent the scrap material region T from being pulled and lifted when the unit substrate M1 is lifted. As a result, the occurrence of flaws on the end face of the unit substrate M1 can be reduced, the end face strength can be enhanced, and a high quality product can be obtained.

  6 to 9 show an example of the lifting and lowering mechanism of the pickup unit according to the present invention. In this embodiment, the unit body 2 of the pickup unit is configured to move up and down by a swing operation. The schematic configuration will be described below based on the drawings. In the drawing, the air suction disc 3 of the unit main body 2 and the pressing member 6 are not shown.

  The two support shafts 5 holding the unit body 2 are fixed to the left and right holders 7 at both ends in the X direction, and the left and right holders 7 are connected by a common shaft 8 extending in the X direction. The holder 7 is provided with two guide rods 9 extending in a direction perpendicular to the shaft 8 with the shaft 8 interposed therebetween, and the guide rods 9 are slidably inserted into the supporters 10. The supporter 10 is pivotally supported by a main shaft 11 extending in the X direction, and the main shaft 11 is fixed to the left and right traveling members 12 at both ends thereof. Further, a tip end portion of a swing arm 14 which is swung by a servomotor 13 attached to the traveling member 12 is connected to a shaft 8 together with a planetary gear 16 which rolls on a fan-shaped fixed gear 15.

  In FIG. 6, the unit main body 2 of the pickup unit is lowered to be attracted to a mother substrate (not shown). When the swing arm 14 pivots in the counterclockwise direction in the drawing from this state, the unit body 2 ascends to the posture of FIG. 9 while swinging around the main shaft 11 as shown in FIG. Thereafter, the unit substrate attracted to the air suction plate is delivered to the next work stage.

  The mechanism for moving the unit body 2 up and down is not limited to the above mechanism, and can be performed by a mechanism such as a lifting and lowering mechanism by a fluid cylinder and a robot arm.

  As mentioned above, although the typical Example of this invention was described, this invention is not necessarily specified only in said Example structure. For example, in the above embodiment, the unit main body 2 is configured by a plurality of thick plate-like unit members 2a, and the unit members 2a can be increased or decreased as needed. It is possible. Further, although the air cylinder as the pressing member is operated by suction air in the above embodiment, it may be formed by a general fluid cylinder operated by fluid pressure such as compressed air or oil. In addition, in the present invention, the object can be achieved, and the present invention can be appropriately modified or changed without departing from the scope of the claims.

  The present invention can be used by being assembled to a mother substrate breaking device as a pickup unit which picks up and takes out a unit substrate divided from a mother substrate by a full cut break line.

M mother substrate M1 unit substrate T end material region 1 table 2 unit main body 2a unit member 3 air suction board 3a suction port 4a, 4b air duct 5 support shaft 6 pressing member 6a cylinder 6b piston 6c spring

Claims (7)

A pick-up unit which takes out unit substrates divided by full-cut break lines orthogonal to one another while leaving an end material region around them from a mother substrate and transports them to the next process,
A unit main body disposed vertically movable above the mother substrate placed on the table;
An air suction disk formed on the unit body and sucking the upper surface of the unit substrate;
A suction air source communicated to the suction port of the air suction disc via an air duct;
It comprises a pressing member which is held by the unit body around the air suction disc and which can press the upper surface of the end material area.
The pressing member moves downward toward the end material area when the unit body descends and adsorbs the unit substrate by the air suction disc to press the end material area, and the unit body enters an ascending process. A pickup unit formed so that the unit substrate adsorbed and separated is separated from the end material area and separated from the end material area and raised with the unit main body.   A plurality of air suction disks are installed to simultaneously suction a plurality of unit substrates formed on the mother substrate, and the pressing member presses the surface portion of the end material region adjacent to the periphery of the unit substrates to be sucked. The pickup unit according to claim 1, wherein a plurality of the pickup units are arranged so as to be able to.   The pickup unit according to claim 1 or 2, wherein the unit main body is constituted by a plurality of unit members arranged in parallel on the same plane and held detachably by a common support shaft.   The pick-up unit according to any one of claims 1 to 3, wherein the pressing member is formed of an air cylinder, and a piston tip of the air cylinder is formed in contact with the surface of the end material region.   The air cylinder is in communication with the same suction air source as the suction air of the air suction disc, and is formed so that the piston of the air cylinder is simultaneously driven when the suction air is activated to the air suction disc. The pickup unit according to Item 4.   The piston of the air cylinder is always retracted by a spring mounted in the cylinder, and is formed to advance in the projecting direction against the spring pressure when the pressure in the cylinder is negative by suction air. The pickup unit according to claim 5.   The air cylinder is connected to a compressed air supply source via a duct, and the piston of the air cylinder is formed to be driven by the compressed air when suction air is operated to the air suction disc. Pickup unit as described in.

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