JP2019100719A - Optical scan height measuring device - Google Patents

Abstract

To provide an optical scan height measuring device with which it is possible to efficiently measure the shape of a desired portion of a measurement object.SOLUTION: In response to a measurement instruction, a target point that corresponds to a designated point on a reference image is set on the basis of the reference image. The light emitted from a light emitting unit 231 is deflected by a scan unit 270, and a portion of a measurement object S that corresponds to the target point is irradiated with the light. The value of a measurement item including the height of the portion of the measurement object S that corresponds to the target point is calculated on the basis of the deflection direction of the scan unit 270 or the position irradiated by the light deflected by the scan unit 270 and the received light signal outputted by a measurement unit 232. The value of measurement item calculated for each measurement instruction is recorded by a recording unit. The measured image, the value of measurement item, and statistical data based on the values of one or a plurality of measurement items already recorded in the recording unit are displayed on a display unit.SELECTED DRAWING: Figure 3

Description

  The present invention relates to an optical scanning height measurement device that measures the surface shape of a measurement object.

  An optical scanning height measuring device is used to measure the surface shape of the measurement object. For example, in the dimension measurement device described in Patent Document 1, light emitted from a white light source is divided into a measurement light beam and a reference light beam by an optical coupler. The measurement light beam is scanned by the measurement object scanning optical system and irradiated to any measurement point on the surface of the object to be measured. The reference light beam is irradiated to the reference light scanning optical system. The surface height of the measurement point of the object to be measured is determined based on the interference between the measurement light flux reflected by the object to be measured and the reference light flux.

JP, 2010-43954, A

  By using the dimension measurement device of Patent Document 1, it is possible to measure the shape of the desired part of the measurement object. In this case, in order to irradiate the measurement light flux to the part, it is necessary to accurately determine the position and posture of the measurement object with respect to the dimension measurement device, and to prepare the position coordinates of the part in advance. However, the operation of placing the measurement object while maintaining the position and posture accurately is troublesome. Therefore, the desired part of the measurement object can not be easily designated, and the part can not be measured efficiently.

  An object of the present invention is to provide a light scanning height measuring device capable of efficiently measuring the shape of a desired portion of a measurement object.

  (1) An optical scanning height measuring device according to the first invention comprises: a reference image including a measurement object; and an information acquiring unit acquiring position information indicating a position of a designated point designated on the reference image; A measurement image acquisition unit for acquiring a measurement image including an object, a light emission unit for emitting light, a deflection unit for deflecting light emitted from the light emission unit and irradiating the object to be measured, and A light receiving unit that receives light and outputs a light receiving signal indicating a light receiving amount, a measurement instructing unit that receives a measurement instruction, and a reference image on the basis of a reference image acquired by the information acquiring unit in response to the measurement instruction. A target point setting unit for setting a target point corresponding to a designated point of the light source, and drive control for controlling the deflection unit such that light is irradiated to the portion of the measurement target corresponding to the target point set by the target point setting unit And the deflection direction of the deflection unit or the deflection unit An item value calculation unit that calculates the height of the portion of the measurement object corresponding to the target point as the value of the measurement item based on the irradiation position of the received light and the light reception signal output by the light reception unit; A recording unit for recording the value of the measurement item calculated by the item value calculation unit, a measurement image, the value of the measurement item calculated by the item value calculation unit, and one or more measurements already recorded in the recording unit And a display unit for displaying statistical data based on the value of the item.

  In the optical scanning height measuring device, the information acquiring unit acquires a reference image including the measurement object and position information indicating the position of a designated point designated on the reference image. In addition, a measurement image including a measurement object is acquired by the measurement image acquisition unit. A measurement instruction is received by the measurement instruction unit.

  In response to the measurement instruction, a target point corresponding to the designated point on the reference image is set by the target point setting unit based on the reference image acquired by the information acquisition unit. The light emitted from the light emitting unit is deflected by the deflecting unit and is irradiated to the object to be measured. The deflection unit is controlled by the drive control unit such that light is irradiated to the portion of the measurement target corresponding to the target point set by the target point setting unit. The light from the object to be measured is received by the light receiving unit, and a light receiving signal indicating the amount of light received is output. Based on the deflection direction of the deflection unit or the irradiation position of light deflected by the deflection unit and the light reception signal output by the light reception unit, the height of the portion of the measurement object corresponding to the target point is an item as the value of the measurement item Calculated by the value calculator.

  According to this configuration, for each measurement instruction, the target point is set corresponding to the designated point specified on the reference image, and the height of the portion of the measurement object corresponding to the set target point is the measurement item. Calculated automatically as a value. In this case, it is not necessary for the user to place the measurement object in a state where the position and attitude with respect to the optical scanning height measurement device are accurately adjusted, and it is not necessary to prepare the position coordinates of the target point in advance. Therefore, the user can measure the measurement items of a plurality of measurement objects sequentially by repeatedly placing the measurement object and the measurement instruction.

  In addition, the value of the measurement item calculated by the item value calculation unit is recorded by the recording unit for each measurement instruction. The measurement image, the value of the measurement item calculated by the item value calculation unit, and statistical data based on the value of one or more measurement items already recorded in the recording unit are displayed on the display unit. The user can issue a measurement instruction while judging whether the measurement result of the measurement object is appropriate or not by visually observing the measurement image, the value of the measurement item and the statistical data displayed on the display unit. . As a result, the shape of the desired part of the measurement object can be efficiently measured.

  (2) The light scanning height measuring apparatus is configured to selectively operate in the setting mode and the measurement mode, and in the setting mode, a reference image acquiring unit that acquires a reference image including a reference target image, and the setting mode A position information acquiring unit that generates position information by receiving designation of a designated point on the reference image acquired by the reference image acquiring unit; and a reference indicating the reference image acquired by the reference image acquiring unit in the setting mode The information acquisition unit further includes: a registration information generation unit that generates registration information by associating the image data with the position information generated by the position information acquisition unit, and providing the generated registration information to the information acquisition unit. The measurement instruction unit, the target point setting unit, the drive control unit, the item value calculation unit, the recording unit, and the display unit operate in the measurement mode. , The information acquisition unit may acquire the reference image and the position information from the registration information generated in the setting mode by the registration information generation unit.

  In this case, the optical scanning height measuring device selectively operates in the setting mode and the measuring mode. In the setting mode, registration information is generated by designating a designated point on the reference image. In the measurement mode, for each measurement instruction, a target point is set corresponding to the designated point designated on the reference image. The height of the portion of the measurement object corresponding to the set target point is automatically calculated as the value of the measurement item, and the calculated value of the measurement item is recorded by the recording unit. Therefore, by generating registration information in the setting mode, a skilled user can uniformly obtain the calculation result of the height of a desired portion even in the measurement mode, even when the user is not skilled. it can. This makes it possible to efficiently measure the shape of the desired part of the measurement object.

  (3) The optical scanning height measuring device according to the second aspect of the present invention is a reference image including a measurement object, position information indicating the position of a designated point designated on the reference image, and an information acquiring unit for acquiring a measurement item A measurement image acquisition unit for acquiring a measurement image including a measurement object, a light emission unit for emitting light, a deflection unit for deflecting light emitted from the light emission unit and irradiating the measurement object with the light, A light receiving unit that receives light from an object and outputs a light receiving signal indicating a light receiving amount, a measurement instructing unit that receives a measurement instruction, and a reference image acquired by the information acquiring unit in response to the measurement instruction A target point setting unit configured to set a target point corresponding to a designated point on the reference image; and a deflection unit configured to irradiate light to a portion of the measurement target corresponding to the target point set by the target point setting unit. Drive control unit to control, deflection direction or deflection unit of deflection unit Acquired by a height calculation unit that calculates the height of the portion of the measurement object corresponding to the target point based on the irradiation position of the light deflected by the light source and the light reception signal output by the light reception unit; The item value calculation unit which calculates the value of the measurement item based on the measured item and the height corresponding to the target point calculated by the height calculation unit, and the measurement item calculated by the item value calculation unit for each measurement instruction Display a recording unit for recording values, a measurement image, values of measurement items calculated by the item value calculation unit, and statistical data based on values of one or more measurement items already recorded in the recording unit And a display unit.

  In this optical scanning height measuring device, a reference image including a measurement object, position information indicating the position of a designated point designated on the reference image, and a measurement item are acquired by the information acquisition unit. In addition, a measurement image including a measurement object is acquired by the measurement image acquisition unit. A measurement instruction is received by the measurement instruction unit.

  In response to the measurement instruction, a target point corresponding to the designated point on the reference image is set by the target point setting unit based on the reference image acquired by the information acquisition unit. The light emitted from the light emitting unit is deflected by the deflecting unit and is irradiated to the object to be measured. The deflection unit is controlled by the drive control unit such that light is irradiated to the portion of the measurement target corresponding to the target point set by the target point setting unit. The light from the object to be measured is received by the light receiving unit, and a light receiving signal indicating the amount of light received is output. Based on the deflection direction of the deflection unit or the irradiation position of light deflected by the deflection unit and the light reception signal output by the light reception unit, the height calculation unit calculates the height of the portion of the measurement object corresponding to the target point Be done. The value of the measurement item is calculated by the item value calculation unit based on the measurement item acquired by the information acquisition unit and the height corresponding to the target point calculated by the height calculation unit.

  According to this configuration, for each measurement instruction, the target point is set corresponding to the designated point specified on the reference image, and the height of the portion of the measurement object corresponding to the set target point is automatically set. It is calculated. Also, the value of the measurement item is automatically calculated based on the calculated height. In this case, it is not necessary for the user to place the measurement object in a state where the position and attitude with respect to the optical scanning height measurement device are accurately adjusted, and it is not necessary to prepare the position coordinates of the target point in advance. Therefore, the user can measure the measurement items of a plurality of measurement objects sequentially by repeatedly placing the measurement object and the measurement instruction.

  In addition, the value of the measurement item calculated by the item value calculation unit is recorded by the recording unit for each measurement instruction. The measurement image, the value of the measurement item calculated by the item value calculation unit, and statistical data based on the value of one or more measurement items already recorded in the recording unit are displayed on the display unit. The user can issue a measurement instruction while judging whether the measurement result of the measurement object is appropriate or not by visually observing the measurement image, the value of the measurement item and the statistical data displayed on the display unit. . As a result, the shape of the desired part of the measurement object can be efficiently measured.

  (4) The values of the measurement items may include values relating to one or more planes specified by the representative heights of the plurality of designated points, the differences in height of the plurality of designated points, or the plurality of designated points. In this case, it is possible to measure values of various measurement items including representative heights of a plurality of designated points, height differences of a plurality of designated points, or values of one or more planes identified by a plurality of designated points. it can.

  (5) The light scanning height measuring device is configured to selectively operate in the setting mode and the measurement mode, and in the setting mode, a reference image acquiring unit that acquires a reference image including a reference target image, and the setting mode A position information acquisition unit that generates position information by receiving designation of a designated point on the reference image acquired by the reference image acquisition unit; and measurement based on the designated point received by the position information acquisition unit in the setting mode Reference image data indicating a reference image acquired by the reference image acquisition unit in the measurement item acquisition unit acquiring an item and the setting mode, position information generated by the position information acquisition unit, and measurement acquired by the measurement item acquisition unit And a registration information generation unit that generates registration information by associating the items, and gives the generated registration information to the information acquisition unit. The information acquisition unit, the measurement image acquisition unit, the measurement instruction unit, the target point setting unit, the drive control unit, the height calculation unit, the item value calculation unit, the recording unit, and the display unit operate in the measurement mode. The acquisition unit may acquire the reference image, the position information, and the measurement item from the registration information generated in the setting mode by the registration information generation unit.

  In this case, the optical scanning height measuring device selectively operates in the setting mode and the measuring mode. In the setting mode, registration information is generated by designating a designated point on the reference image. In the measurement mode, for each measurement instruction, a target point is set corresponding to the designated point designated on the reference image. The height of the portion of the measurement object corresponding to the set target point is calculated, the value of the measurement item is automatically calculated based on the calculated height, and the calculated value of the measurement item is recorded by the recording unit. It is recorded. Therefore, even if the user is not skilled in the measurement mode, a skilled user generates registration information in the setting mode, and uniformly obtains calculation results of values of measurement items of desired portions. be able to. This makes it possible to efficiently measure the shape of the desired part of the measurement object.

  (6) The optical scanning height measuring device acquires the input of the allowable value of the measurement item of the part of the measurement object corresponding to the designated point in the setting mode, and the item value calculation unit in the measurement mode The inspection apparatus may further include an inspection unit that determines the quality of the measurement object based on the value of the measurement item calculated by the calculation unit and the tolerance value acquired by the tolerance value acquisition unit.

  In this case, in the setting mode, the tolerance acquisition unit acquires the tolerance of the measurement item of the part of the measurement object corresponding to the designated point. Further, in the measurement mode, based on the tolerance value acquired by the tolerance value acquisition unit, the quality of the measurement object is determined by the inspection unit. Therefore, even if the user is not skilled in the measurement mode, the skilled user can input the tolerance value of the measurement item of the portion of the measurement object corresponding to the designated point in the setting mode. The determination result of the quality can be uniformly acquired. This makes it possible to inspect the measurement object accurately and easily.

  (7) The optical scanning height measurement apparatus is configured to selectively operate in the statistical mode, and the display unit is configured to, in the statistical mode, the values of one or more measurement items recorded in the recording unit in the measurement mode. Based on the statistical data may be displayed. In this case, in the statistical mode, the user can visually recognize statistical data based on the value of one or more measurement items recorded in the recording unit in the measurement mode. Thus, the user can confirm whether the measurement result of the measurement object is appropriate.

  (8) The statistical data may include a histogram, a trend graph or a statistical value list. In this case, the user can issue the measurement instruction while visually recognizing the histogram, the trend graph, or the statistical value list based on the value of the measurement item.

  According to the present invention, it is possible to efficiently measure the shape of the desired part of the measurement object.

FIG. 1 is a block diagram showing an entire configuration of an optical scanning height measurement device according to an embodiment of the present invention. It is an external appearance perspective view which shows the stand part of FIG. It is a block diagram which shows the structure of a stand part and a measurement head. It is a schematic diagram which shows the structure of a measurement part. It is a schematic diagram which shows the structure of a reference part. It is a schematic diagram which shows the structure of a focusing part. It is a schematic diagram which shows the structure of a scanning part. It is a figure which shows an example of the selection screen displayed on the display part of an optical scanning height measurement apparatus. It is a figure which shows the content of the data transmitted between a control part and a control board in each operation mode. It is a block diagram which shows the control system of the optical scanning height measurement apparatus of FIG. It is a figure which shows an example of the report produced by a report production part. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the designation | designated measurement process by a control board. It is a flowchart which shows an example of the designation | designated measurement process by a control board. FIG. 19 is an explanatory diagram for describing the designated measurement process of FIGS. 17 and 18; FIG. 19 is an explanatory diagram for describing the designated measurement process of FIGS. 17 and 18; It is a flowchart which shows the other example of the designation | designated measurement process by a control board. It is a flowchart which shows the other example of the designation | designated measurement process by a control board. FIG. 23 is an explanatory diagram for describing the designated measurement process of FIGS. 21 and 22. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure which shows an example of the display screen of the display part in statistical data mode. It is a block diagram showing a control system of a light scanning height measuring device concerning a modification.

(1) Overall Configuration of Light Scanning Height Measuring Device Hereinafter, a light scanning height measuring device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing an entire configuration of an optical scanning height measuring device according to an embodiment of the present invention. FIG. 2 is an external perspective view showing the stand unit 100 of FIG. As shown in FIG. 1, the optical scanning height measuring device 400 includes a stand unit 100, a measuring head 200 and a processing device 300.

  The stand unit 100 has an L-shaped longitudinal cross section, and includes an installation unit 110, a holding unit 120, and an elevation unit 130. The installation unit 110 has a horizontal flat plate shape and is installed on the installation surface. As shown in FIG. 2, a square optical surface plate 111 on which the measurement object S is mounted is provided on the upper surface of the installation unit 110. Above the optical surface plate 111, a measurement area V in which the measurement object S can be measured by the measurement head 200 is defined. In FIG. 2, the measurement area V is illustrated by a dotted line.

  A plurality of screw holes are formed in the optical surface plate 111 at equal intervals in two directions orthogonal to each other. Thereby, the measuring object S can be fixed to the optical surface plate 111 in a state where the surface of the measuring object S is positioned in the measuring area V using the clamp member and the screw member.

  The holding portion 120 is provided to extend upward from one end of the installation portion 110. The measuring head 200 is attached to the upper end portion of the holding portion 120 so as to face the upper surface of the optical surface plate 111. In this case, since the measurement head 200 and the installation unit 110 are held by the holding unit 120, the handling of the light scanning height measurement apparatus 400 is facilitated. In addition, by placing the measurement target S on the optical surface plate 111 on the installation unit 110, the measurement target S can be easily positioned in the measurement area V.

  As shown in FIG. 1, the elevation unit 130 is provided inside the holding unit 120. The elevation unit 130 can move the measurement head 200 in the vertical direction (the height direction of the measurement object S) with respect to the measurement object S on the optical surface plate 111. The measurement head 200 includes a control substrate 210, an imaging unit 220, an optical unit 230, a light guide unit 240, a reference unit 250, a focusing unit 260, and a scanning unit 270. The control board 210 includes, for example, a CPU (central processing unit), a ROM (read only memory) and a RAM (random access memory). The control substrate 210 may be configured by a microcomputer.

  The control substrate 210 is connected to the processing apparatus 300, and controls operations of the elevation unit 130, the imaging unit 220, the optical unit 230, the reference unit 250, the focusing unit 260, and the scanning unit 270 based on an instruction from the processing apparatus 300. . The control substrate 210 also gives the processing apparatus 300 various information acquired from the imaging unit 220, the optical unit 230, the reference unit 250, the focusing unit 260, and the scanning unit 270. The imaging unit 220 generates image data of the measurement object S by imaging the measurement object S placed on the optical surface plate 111, and gives the generated image data to the control substrate 210.

  The optical unit 230 emits outgoing light having temporally low coherence to the light guiding unit 240. The light guiding unit 240 divides the light emitted from the optical unit 230 into reference light and measurement light, guides the reference light to the reference unit 250, and guides the measurement light to the focusing unit 260. The reference unit 250 reflects the reference light to the light guide 240. The focusing unit 260 focuses the measurement light passing through the focusing unit 260. The scanning unit 270 scans the measurement light focused by the focusing unit 260 to irradiate the measurement light to a desired portion of the measurement object S.

  A part of the measurement light irradiated to the measurement object S is reflected by the measurement object S, and is guided to the light guiding unit 240 through the scanning unit 270 and the focusing unit 260. The light guiding unit 240 generates interference light between the reference light reflected by the reference unit 250 and the measurement light reflected by the measurement object S, and guides the interference light to the optical unit 230. The optical unit 230 detects the amount of light received for each wavelength of the interference light, and provides a signal indicating the detection result to the control substrate 210. Details of the measurement head 200 will be described later.

  The processing device 300 includes a control unit 310, a storage unit 320, an operation unit 330, and a display unit 340. Control unit 310 includes, for example, a CPU. The storage unit 320 includes, for example, a ROM, a RAM, and an HDD (Hard Disk Drive). The storage unit 320 stores system programs. The storage unit 320 is also used for storing various data and processing the data.

  Control unit 310 controls the operation of imaging unit 220, optical unit 230, reference unit 250, focusing unit 260 and scanning unit 270 of measurement head 200 based on the system program stored in storage unit 320. To the control substrate 210. Further, the control unit 310 acquires various information from the control substrate 210 of the measurement head 200 and causes the storage unit 320 to store the information.

  The operation unit 330 includes a mouse, a touch panel, a pointing device such as a trackball or a joystick, and a keyboard, and is operated by the user to give an instruction to the control unit 310. The display unit 340 includes, for example, an LCD (liquid crystal display) panel or an organic EL (electroluminescence) panel. The display unit 340 displays an image, a measurement result, and the like based on the image data stored in the storage unit 320.

(2) Lifting Unit and Light Guide Unit FIG. 3 is a block diagram showing the configuration of the stand unit 100 and the measuring head 200. As shown in FIG. In FIG. 3, detailed configurations of the elevation unit 130, the optical unit 230, and the light guide unit 240 are shown. As shown in FIG. 3, the elevation unit 130 includes a drive unit 131, a drive circuit 132, and a reading unit 133.

  The drive unit 131 is, for example, a motor, and moves the measurement head 200 in the vertical direction with respect to the measurement object S on the optical surface plate 111, as indicated by a thick arrow in FIG. Thus, the optical path length of the measurement light can be adjusted over a wide range. Here, the optical path length of the measurement light is an optical length until the measurement light reflected by the measurement object S is input to the port 245 d after the measurement light is output from the port 245 d of the light guide 240 described later. It is the length of the light path.

  The drive circuit 132 is connected to the control substrate 210 and drives the drive unit 131 based on control by the control substrate 210. The reading unit 133 is, for example, an optical linear encoder, and detects the amount of drive of the drive unit 131 to detect the position of the measuring head 200 in the vertical direction. Further, the reading unit 133 gives the detection result to the control board 210.

  The optical unit 230 includes a light emitting unit 231 and a measuring unit 232. The light emitting unit 231 includes, for example, an SLD (super luminescent diode) as a light source, and emits emitted light having relatively low coherence. Specifically, the coherence of emitted light is higher than the coherence of light emitted by an LED (light emitting diode) or white light, and lower than the coherence of laser light. Therefore, the emitted light has a wavelength bandwidth narrower than the wavelength bandwidth of the light emitted by the LED or the white light and wider than the wavelength bandwidth of the laser light. Light emitted from the optical unit 230 is input to the light guide unit 240.

  Interference light is output from the light guiding unit 240 to the measuring unit 232. FIG. 4 is a schematic view showing the configuration of the measurement unit 232. As shown in FIG. As shown in FIG. 4, the measuring unit 232 includes lenses 232a and 232c, a spectral unit 232b, and a light receiving unit 232d. The interference light output from the optical fiber 242 of the light guide 240 described later is substantially collimated by passing through the lens 232 a and is incident on the light splitting unit 232 b. The spectral unit 232 b is, for example, a reflective diffraction grating. The light incident on the light splitting unit 232b is split to reflect light at different angles for each wavelength, and is focused at a different one-dimensional position for each wavelength by passing through the lens 232c.

  The light receiving unit 232 d includes, for example, an imaging device (one-dimensional line sensor) in which a plurality of pixels are arranged in a one-dimensional manner. The imaging device may be a multi-split PD (photodiode), a CCD (charge coupled device) camera, a CMOS (complementary metal oxide semiconductor) image sensor, or another device. The light receiving unit 232 d is disposed such that the plurality of pixels of the imaging device receive light at a plurality of focusing positions that are different for each wavelength formed by the lens 232 c.

  An analog electric signal (hereinafter referred to as a light reception signal) corresponding to the amount of light received is output from each pixel of the light receiving unit 232 d and is applied to the control substrate 210 in FIG. 3. Thereby, the control substrate 210 acquires data indicating the relationship between each pixel (wavelength of interference light) of the light receiving unit 232 d and the light receiving amount. The control substrate 210 calculates the height of the portion of the measurement target S by performing predetermined calculations and processing on the data.

  As shown in FIG. 3, the light guide 240 includes four optical fibers 241, 242, 243 and 244, a fiber coupler 245 and a lens 246. The fiber coupler 245 has a so-called 2 × 2 configuration, and includes four ports 245a, 245b, 245c, 245d and a main body 245e. The ports 245a and 245b and the ports 245c and 245d are provided in the main body 245e so as to face each other with the main body 245e interposed therebetween.

  The optical fiber 241 is connected between the light emitting unit 231 and the port 245a. The optical fiber 242 is connected between the measurement unit 232 and the port 245b. The optical fiber 243 is connected between the reference unit 250 and the port 245c. The optical fiber 244 is connected between the focusing unit 260 and the port 245d. In the present embodiment, the optical fiber 243 is longer than the optical fibers 241, 242 and 244. The lens 246 is disposed on the optical path between the optical fiber 243 and the reference unit 250.

  The light emitted from the light emitting unit 231 is input to the port 245 a through the optical fiber 241. A part of the emitted light input to the port 245a is output from the port 245c as a reference light. The reference light is substantially collimated by passing through the optical fiber 243 and the lens 246, and is guided to the reference unit 250. Also, the reference light reflected by the reference unit 250 is input to the port 245 c through the lens 246 and the optical fiber 243.

  The other part of the emitted light input to the port 245a is output as measurement light from the port 245d. The measurement light is irradiated to the measurement object S through the optical fiber 244, the focusing unit 260 and the scanning unit 270. Also, part of the measurement light reflected by the measurement target S is input to the port 245 d through the scanning unit 270, the focusing unit 260 and the optical fiber 244. The reference light input to the port 245 c and the measurement light input to the port 245 d are output as interference light from the port 245 b, and are guided to the measurement unit 232 through the optical fiber 242.

(3) Reference Section FIG. 5 is a schematic view showing the configuration of the reference section 250. As shown in FIG. As shown in FIG. 5, the reference unit 250 includes a fixed unit 251, a linear guide 251g linearly extending, movable units 252a and 252b, a fixed mirror 253, movable mirrors 254a, 254b and 254c, drive units 255a and 255b, and a drive circuit. 256a, 256b and a reading unit 257a, 257b. The fixing portion 251 and the linear guide 251 g are fixed to the main body of the measuring head 200. The movable portions 252a and 252b are attached to the linear guide 251g so as to be movable along the direction in which the linear guide 251g extends.

  The fixed mirror 253 is attached to the fixed portion 251. The movable mirrors 254a and 254c are attached to the movable portion 252a. The movable mirror 254b is attached to the movable portion 252b. The movable mirror 254c is used as a so-called reference mirror. The movable mirror 254c is preferably configured by a corner cube. In this case, the arrangement of the optical members can be easily performed.

  The reference light output from the optical fiber 243 is substantially collimated by passing through the lens 246, and then sequentially reflected by the fixed mirror 253, the movable mirror 254a, the movable mirror 254b, and the movable mirror 254c. The reference light reflected by the movable mirror 254 c is sequentially reflected by the movable mirror 254 b, the movable mirror 254 a and the fixed mirror 253, and is input to the optical fiber 243 through the lens 246.

  The driving units 255a and 255b are, for example, voice coil motors, and move the movable units 252a and 252b with respect to the fixed unit 251 along the direction in which the linear guide 251g extends, as indicated by the white arrows in FIG. . In this case, the distance between the fixed mirror 253 and the movable mirror 254a, the distance between the movable mirror 254a and the movable mirror 254b, and the movable mirror 254b and the movable mirror 254c in the direction parallel to the moving direction of the movable portions 252a and 252b. The distance between and changes. Thereby, the optical path length of the reference light can be adjusted.

  Here, the optical path length of the reference light is an optical path length until the reference light reflected by the movable mirror 254 c is input to the port 245 c after the reference light is output from the port 245 c of FIG. 3 is there. When the difference between the optical path length of the reference light and the optical path length of the measurement light is smaller than a predetermined value, interference light between the reference light and the measurement light is output from the port 245b of FIG.

  In the present embodiment, the movable parts 252a and 252b move in the opposite direction to each other along the direction in which the linear guide 251g extends, but the present invention is not limited to this. Only one of the movable portion 252a and the movable portion 252b may move along the direction in which the linear guide 251g extends, and the other may not move. In this case, the other non-moving movable portions 252a and 252b may be fixed as the non-movable portion to the fixed portion 251 or the main body of the measurement head 200 instead of the linear guide 251g.

  The drive circuits 256a and 256b are connected to the control substrate 210 of FIG. 3 and drive the drive units 255a and 255b based on the control of the control substrate 210. The reading units 257a and 257b are, for example, optical linear encoders. The reading unit 257a detects the relative position of the movable unit 252a with respect to the fixed unit 251 by reading the driving amount of the driving unit 255a, and gives the detection result to the control substrate 210. The reading unit 257 b detects the relative position of the movable unit 252 b with respect to the fixed unit 251 by reading the driving amount of the driving unit 255 b, and gives the detection result to the control substrate 210.

(4) Focusing Unit FIG. 6 is a schematic view showing a configuration of the focusing unit 260. As shown in FIG. As shown in FIG. 6, the focusing unit 260 includes a fixed unit 261, a movable unit 262, a movable lens 263, a drive unit 264, a drive circuit 265, and a reading unit 266. The movable portion 262 is attached to the fixed portion 261 so as to be movable along one direction. The movable lens 263 is attached to the movable portion 262. The movable lens 263 is used as an objective lens to focus the measurement light passing therethrough.

  The measurement light output from the optical fiber 244 is guided to the scanning unit 270 in FIG. 3 through the movable lens 263. In addition, a part of the measurement light reflected by the measurement target S in FIG. 3 passes through the scanning unit 270 and is then input to the optical fiber 244 through the movable lens 263.

  The drive unit 264 is, for example, a voice coil motor, and moves the movable unit 262 in one direction (the traveling direction of the measurement light) with respect to the fixed unit 261, as indicated by a thick arrow in FIG. Thereby, the focus of the measurement light can be located on the surface of the measurement object S.

  The drive circuit 265 is connected to the control substrate 210 of FIG. 3 and drives the drive unit 264 based on control by the control substrate 210. The reading unit 266 is, for example, an optical linear encoder, and detects the relative position of the movable unit 262 (movable lens 263) with respect to the fixed unit 261 by reading the driving amount of the drive unit 264. Further, the reading unit 266 gives the detection result to the control substrate 210.

  A collimator lens may be disposed between the optical fiber 244 and the movable lens 263 to collimate the measurement light output from the optical fiber 244. In this case, the measurement light incident on the movable lens 263 is collimated, and the beam diameter of the measurement light does not change regardless of the movement position of the movable lens, so that the movable lens can be formed in a small size.

(5) Scanning Unit FIG. 7 is a schematic view showing a configuration of the scanning unit 270. As shown in FIG. As shown in FIG. 7, the scanning unit 270 includes deflection units 271 and 272, drive circuits 273 and 274, and reading units 275 and 276. The deflection unit 271 is formed of, for example, a galvano mirror, and includes a drive unit 271a and a reflection unit 271b. The drive unit 271a is, for example, a motor having a substantially vertical rotation axis. The reflective portion 271b is attached to the rotation shaft of the drive portion 271a. The measurement light which has passed through the focusing unit 260 from the optical fiber 244 of FIG. 3 is guided to the reflecting unit 271 b. When the drive unit 271a rotates, the reflection angle of the measurement light reflected by the reflection unit 271b changes in a substantially horizontal plane.

  The deflecting unit 272 is, for example, a galvano mirror similar to the deflecting unit 271, and includes a drive unit 272a and a reflecting unit 272b. The drive unit 272a is, for example, a motor having a horizontal rotation axis. The reflective portion 272b is attached to the rotation axis of the drive portion 272a. The measurement light reflected by the reflection unit 271 b is guided to the reflection unit 272 b. As the drive unit 272a rotates, the reflection angle of the measurement light reflected by the reflection unit 272b changes in a substantially vertical plane.

  Thus, when the drive units 271a and 272a rotate, the measurement light is scanned in two directions orthogonal to each other on the surface of the measurement object S in FIG. Thereby, measurement light can be irradiated to arbitrary positions on the surface of measurement subject S. The measurement light irradiated to the measurement object S is reflected on the surface of the measurement object S. A part of the reflected measurement light is sequentially reflected by the reflecting portion 272b and the reflecting portion 271b, and is then guided to the focusing portion 260 in FIG.

  The drive circuits 273 and 274 are connected to the control substrate 210 of FIG. 3 and drive the drive units 271 a and 272 a based on the control of the control substrate 210. The reading units 275 and 276 are, for example, optical rotary encoders. The reading unit 275 detects the angle of the reflecting unit 271 b by reading the driving amount of the driving unit 271 a, and gives the detection result to the control substrate 210. The reading unit 276 detects the angle of the reflecting unit 272 b by reading the driving amount of the driving unit 272 a, and gives the detection result to the control substrate 210.

(6) Operation Mode The optical scanning height measurement apparatus 400 of FIG. 1 operates in an operation mode selected by the user from a plurality of operation modes. Specifically, operation modes include setting mode, measurement mode, height gauge mode and statistical data mode. FIG. 8 is a view showing an example of the selection screen 341 displayed on the display unit 340 of the light scanning height measuring device 400. As shown in FIG.

  As shown in FIG. 8, on the selection screen 341 of the display unit 340, a setting button 341a, a measurement button 341b, a height gauge button 341c, and a statistical data mode button 341d are displayed. When the user operates the setting button 341a, the measurement button 341b, the height gauge button 341c, and the statistical data mode button 341d using the operation unit 330 of FIG. 1, the light scanning height measuring device 400 has a setting mode, a measurement mode, and a height gauge. Operate in mode and statistical data mode respectively.

  In the following description, among the users, a skilled user who manages the measurement operation of the measurement object S is appropriately referred to as a measurement manager, and a user who performs the measurement operation of the measurement object S under the management of the measurement administrator. Is appropriately called a measurement worker. The setting mode is mainly used by the measurement manager, and the measurement mode is mainly used by the measurement operator.

  Here, in the optical scanning height measuring device 400, a three-dimensional coordinate system unique to the space including the measurement area V of FIG. 2 is defined in advance by the X axis, the Y axis, and the Z axis. Here, the X axis and the Y axis are parallel to and orthogonal to the optical surface plate 111 of FIG. 2, and the Z axis is orthogonal to the X axis and the Y axis. In each operation mode, data of coordinates specified by the above-mentioned coordinate system and data of plane coordinates on an image acquired by imaging of the imaging unit 220 are transmitted between the control unit 310 and the control substrate 210. FIG. 9 is a diagram showing the contents of data transmitted between control unit 310 and control substrate 210 in each operation mode.

  In the setting mode, the measurement manager can register information on the desired measurement object S in the light scanning height measurement device 400. Specifically, the measurement manager places the desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. Further, the measurement manager designates a portion to be measured of the measurement target S displayed on the display unit 340 of FIG. 1 as a measurement point on the image. In this case, as shown in FIG. 9A, the control unit 310 gives plane coordinates (Ua, Va) specified by the measurement point specified on the image to the control substrate 210.

  The control board 210 specifies three-dimensional coordinates (Xc, Yc, Zc) of the position corresponding to the plane coordinates (Ua, Va) in the measurement area V of FIG. 2, and specifies the specified three-dimensional coordinates (Xc, Yc, Zc) is given to the control unit 310. The control unit 310 stores the three-dimensional coordinates (Xc, Yc, Zc) given by the control substrate 210 in the storage unit 320 of FIG. In addition, the control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xc, Yc, Zc) stored in the storage unit 320 and information such as a reference surface described later, and the calculation result Are stored in the storage unit 320.

  The measurement mode is used to measure the height of the portion corresponding to the measurement point for the measurement object S of the same type as the measurement object S whose information is registered in the optical scanning height measurement apparatus 400 in the setting mode. . Specifically, the measurement worker places, on the optical surface plate 111, the measurement target S of the same type as the measurement target S whose information is registered in the optical scanning height measurement apparatus 400 in the setting mode, and captures an image. The image is taken by the unit 220. In this case, as shown in FIG. 9B, the control unit 310 gives the control board 210 three-dimensional coordinates (Xc, Yc, Zc) stored in the storage unit 320 in the setting mode.

  The control substrate 210 calculates three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement target S corresponding to the measurement point based on the acquired three-dimensional coordinates (Xc, Yc, Zc). Further, the control board 210 gives the calculated three-dimensional coordinates (Xb, Yb, Zb) to the control unit 310. The control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xb, Yb, Zb) given by the control substrate 210 and information such as a reference surface described later. Further, the control unit 310 causes the display unit 340 of FIG. 1 to display the calculation result.

  Thus, in the measurement mode, the measurement operator can acquire the height of the position without specifying the portion of the measurement object S to be measured. Therefore, even if the measurement operator is not skilled, it is possible to easily and accurately measure the shape of the desired part of the measurement object. In addition, since the three-dimensional coordinates (Xc, Yc, Zc) are stored in the storage unit 320 in the setting mode, in the measurement mode, corresponding to the measurement points based on the stored three-dimensional coordinates (Xc, Yc, Zc) Can be identified quickly.

  In the measurement mode, the heights of the portions corresponding to the measurement points can be sequentially calculated for the plurality of measurement objects S based on the instruction of the measurement worker. Here, the height calculated for each measurement instruction is recorded. Thereby, it is possible to display statistical data of heights calculated for a plurality of measurement objects S on the display unit 340. Details will be described later.

  In the present embodiment, three-dimensional coordinates (Xc, Yc, Zc) corresponding to plane coordinates (Ua, Va) are specified in the setting mode and stored in storage unit 320, but the present invention is not limited to this. . In the setting mode, plane coordinates (Xc, Yc) corresponding to plane coordinates (Ua, Va) may be specified, and the component Zc of the Z axis may not be specified. In this case, the specified plane coordinates (Xc, Yc) are stored in the storage unit 320. In the measurement mode, the plane coordinates (Xc, Yc) stored in the storage unit 320 are given to the control substrate 210.

  The height gauge mode is used to designate the desired part of the measurement object S as a measurement point on the screen while the user confirms the measurement object S on the screen, and to measure the height of the part. Specifically, the user mounts the desired measurement target S on the optical surface plate 111, and images the measurement target S by the imaging unit 220. In addition, the user designates a portion to be measured on the image of the measurement object S displayed on the display unit 340 as a measurement point. In this case, as shown in FIG. 9C, the control unit 310 gives plane coordinates (Ua, Va) specified by the measurement point designated on the image to the control substrate 210.

  The control board 210 specifies three-dimensional coordinates (Xc, Yc, Zc) of the position corresponding to the plane coordinates (Ua, Va) in the measurement area V of FIG. 2, and specifies the specified three-dimensional coordinates (Xc, Yc, Based on Zc), three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S corresponding to the measurement point are calculated. Further, the control board 210 gives the calculated three-dimensional coordinates (Xb, Yb, Zb) to the control unit 310. The control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xb, Yb, Zb) given by the control substrate 210 and information such as a reference surface described later, and displays the calculation result It is displayed on the part 340.

  Coordinate conversion information and position conversion information are stored in advance in the storage unit 320 of FIG. The coordinate conversion information indicates plane coordinates (Xc, Yc) corresponding to plane coordinates (Ua, Va) at each position in the height direction (Z-axis direction) in the measurement area V. Further, the control substrate 210 can irradiate the measurement light to a desired position in the measurement area V by controlling the positions of the movable portions 252a and 252b in FIG. 5 and the angles of the reflection portions 271b and 272b in FIG. it can. The position conversion information indicates the relationship between the coordinates in the measurement area V, the positions of the movable portions 252a and 252b, and the angles of the reflecting portions 271b and 272b.

  The control system configured by the control unit 310 and the control substrate 210 uses three-dimensional coordinates (Xc, Yc, Zc) and three-dimensional coordinates (Xb) of positions corresponding to measurement points by using coordinate conversion information and position conversion information. , Yb, Zb) can be identified. Details of coordinate conversion information and position conversion information will be described later.

  The statistical data mode is a mode for displaying statistical data based on one or more heights recorded in the measurement mode. The statistical data mode is mainly used by a measurement manager to analyze the cause, for example, when there is a defect in the measurement result of the measurement object S. Details of the statistical data mode will be described later.

(7) Control System of Optical Scanning Height Measurement Device (a) Overall Configuration of Control System FIG. 10 is a block diagram showing a control system of the optical scanning height measurement device 400 of FIG. As shown in FIG. 10, the control system 410 includes a reference image acquisition unit 1, a position information acquisition unit 2, a drive control unit 3, a reference surface acquisition unit 4, an allowance acquisition unit 5, a registration unit 6 and a deflection direction acquisition unit 7. , Detection unit 8 and image analysis unit 9. The control system 410 also includes a reference position acquisition unit 10, a light reception signal acquisition unit 11, a distance information calculation unit 12, a coordinate calculation unit 13, a determination unit 14, a height calculation unit 15, a measurement image acquisition unit 16, and a target point setting unit And 17, an inspection unit 18 and a report preparation unit 19. Further, control system 410 further includes measurement instruction unit 22, recording unit 23 and display instruction unit 24.

  When the control board 210 and the control unit 310 in FIG. 1 execute the system program stored in the storage unit 320, the functions of the components of the control system 410 described above are realized. In FIG. 10, the flow of common processing in all the operation modes is indicated by a solid line, the flow of processing in the setting mode is indicated by an alternate long and short dashed line, and the flow of processing in the measurement mode is indicated by a dotted line. The same applies to FIG. 38 described later. The flow of processing in the height cage mode is substantially equal to the flow of processing in the setting mode. Hereinafter, in order to facilitate understanding, each component of the control system 410 will be described separately in the setting mode and the measurement mode.

(B) Setting Mode The measurement manager places the desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. The reference image acquisition unit 1 acquires image data generated by the imaging unit 220 as reference image data, and causes the display unit 340 in FIG. 1 to display an image based on the acquired reference image data as a reference image. The reference image displayed on the display unit 340 may be a still image or a moving image that is sequentially updated. The measurement manager can designate a part to be measured as a measurement point and also designate a reference point on the reference image displayed on the display unit 340. The reference point is a point for defining a reference plane which is a reference when calculating the height of the measurement object S.

  Hereinafter, the measurement points and the reference points are collectively referred to as designated points. The position information acquisition unit 2 receives the designation of the designated point on the reference image acquired by the reference image acquisition unit 1 and acquires the position (the above-mentioned plane coordinates (Ua, Va) of the designated point received). The position information acquisition unit 2 can also receive a plurality of designated points.

  The drive control unit 3 acquires the position of the measurement head 200 from the reading unit 133 of the elevating unit 130 in FIG. 3 and controls the drive circuit 132 in FIG. 3 based on the acquired position of the measurement head 200. As a result, the measuring head 200 is moved to a desired position in the vertical direction. Further, the drive control unit 3 acquires the position of the movable lens 263 from the reading unit 266 of the focusing unit 260 in FIG. 6, and controls the drive circuit 265 in FIG. 6 based on the acquired position of the movable lens 263. Thereby, the movable lens 263 is moved so that the measurement light is focused in the vicinity of the surface of the measurement object S.

  Further, the drive control unit 3 drives the drive circuits 273 and 274 in FIG. 7 and FIG. 5 based on the position conversion information stored in the storage unit 320 in FIG. 1 and the position acquired by the position information acquisition unit 2. The circuits 256a and 256b are controlled. As a result, the angles of the reflection portions 271b and 272b of the deflection portions 271 and 272 in FIG. 7 are adjusted, and the measurement light is irradiated to the portion of the measurement target S corresponding to the designated point. Further, in response to the change in the optical path length of the measurement light, the optical path length of the reference light is adjusted such that the difference between the optical path length of the measurement light and the optical path length of the reference light becomes equal to or less than a predetermined value.

  By the operation of the drive control unit 3 described above, the coordinates of the portion of the measurement object S corresponding to the designated point are calculated by the coordinate calculation unit 13 as described later. Details of the operation of the drive control unit 3 will be described later.

  The reference surface acquisition unit 4 acquires a reference surface based on one or more coordinates calculated by the coordinate calculation unit 13 corresponding to one or more reference points acquired by the position information acquisition unit 2. The measurement manager can input an allowable value for the height of the measurement point acquired by the position information acquisition unit 2. The tolerance value is used to inspect the measurement object S in the measurement mode described later, and includes a design value and a tolerance from the design value. The allowable value acquisition unit 5 receives the input allowable value.

  The registration unit 6 registers the reference image data acquired by the reference image acquisition unit 1, the position acquired by the position information acquisition unit 2 and the tolerance value set by the tolerance value acquisition unit 5 in association with each other. Specifically, the registration unit 6 causes the storage unit 320 to store registration information indicating the relativity between the reference image data, the position of the designated point, and the tolerance value corresponding to each measurement value. Multiple reference planes may be set. In this case, the registration unit 6 associates and registers, for each reference surface, a reference point corresponding to the reference surface, a measurement point corresponding to the reference surface, and an allowance corresponding to each measurement value.

  The deflection direction acquisition unit 7 acquires the angles of the reflection units 271b and 272b from the reading units 275 and 276 in FIG. The detection unit 8 detects the deflection directions of the deflection units 271 and 272 based on the angles of the reflection units 271 b and 272 b acquired by the deflection direction acquisition unit 7. Further, as the imaging by the imaging unit 220 is continued, the measurement light on the measurement object S appears in the reference image. The image analysis unit 9 analyzes the reference image data acquired by the reference image acquisition unit 1. The detection unit 8 detects plane coordinates indicating the irradiation position on the reference image of the measurement light deflected by the deflection units 271 and 272 based on the analysis result of the image analysis unit 9.

  The reference position acquisition unit 10 acquires the positions of the movable units 252a and 252b from the reading units 257a and 257b of the reference unit 250 in FIG. The light reception signal acquisition unit 11 acquires a light reception signal from the light reception unit 232 d of FIG. 4. The distance information calculation unit 12 performs predetermined calculation and processing on data indicating the relationship between the wavelength of the interference light and the light reception amount based on the light reception signal acquired by the light reception unit 232 d. This operation and processing include, for example, wavelength-to-wavenumber frequency axis conversion and wavenumber Fourier transform.

  The distance information calculation unit 12 outputs the measurement light emission position and the measurement target in the measurement head 200 of FIG. 2 based on the data obtained by the processing and the positions of the movable portions 252a and 252b acquired by the reference position acquisition unit 10. Distance information indicating the distance between the object S and the irradiation position of the measurement light is calculated. The emission position of the measurement light in the measurement head 200 is, for example, the position of the port 245 d of the fiber coupler 245 in FIG. 3.

  The coordinate calculation unit 13 detects the irradiation position of the measurement light on the measurement object S based on the deflection directions of the deflection units 271 and 272 detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xc, Yc, Zc) are calculated. The three-dimensional coordinates (Xc, Yc, Zc) of the irradiation position of the measurement light are made up of coordinates Zc in the height direction and plane coordinates (Xc, Yc) in a plane orthogonal to the height direction.

  The coordinate calculation unit 13 is an object to be measured based on plane coordinates indicating the irradiation position on the reference image of the measurement light detected by the detection unit 8 and the deflection directions of the deflection units 271 and 272 using, for example, a triangular distance measurement method. The three-dimensional coordinates of the irradiation position of the measurement light on the object S may be calculated. Alternatively, the coordinate calculation unit 13 is located on the measurement object S based on plane coordinates indicating the irradiation position on the reference image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates of the irradiation position of the measurement light may be calculated.

  The determination unit 14 determines whether or not the portion of the measurement target S corresponding to the designated point or a portion in the vicinity thereof is irradiated with the measurement light. Specifically, based on the calculated coordinate in the height direction and the coordinate conversion information stored in the storage unit 320, the coordinate calculation unit 13 calculates the plane coordinates corresponding to the designated point registered by the registration unit 6 The plane coordinates (Xa ′, Ya ′) described later are acquired. In addition, the determination unit 14 determines whether or not the plane coordinates (Xc, Yc) calculated by the coordinate calculation unit 13 are within a predetermined range from plane coordinates (Xa ′, Ya ′) corresponding to the designated point. judge.

  Alternatively, the image analysis unit 9 may specify plane coordinates (plane coordinates (Uc, Vc) described later) of the irradiation position of the measurement light in the reference image by analyzing the reference image data. In this case, the determination unit 14 determines in advance the plane coordinates (Uc, Vc) of the irradiation position of the measurement light specified by the image analysis unit 9 from the plane coordinates (Ua, Va) of the designated point registered by the registration unit 6. It is determined whether or not it is within the specified range.

  When the determination unit 14 determines that the measurement light is not irradiated to the portion of the measurement target S corresponding to the designated point and the portion in the vicinity thereof, the drive control unit 3 moves the irradiation position of the measurement light In this way, drive circuits 273 and 274 of FIG. 7 and drive circuits 256a and 256b of FIG. 5 are controlled. When the determination unit 14 determines that the measurement light is irradiated to the portion of the measurement target S corresponding to the designated point or a portion in the vicinity thereof, the drive control unit 3 fixes the irradiation position of the measurement light Thus, the drive circuits 273 and 274 and the drive circuits 256a and 256b are controlled.

  The coordinate calculation unit 13 gives the reference surface acquisition unit 4 the coordinates calculated for the reference point. The height calculation unit 15 uses the reference plane acquired by the reference plane acquisition unit 4 as a reference based on the three-dimensional coordinates (Xc, Yc, Zc) calculated by the coordinate calculation unit 13 corresponding to the measurement points. The height of the portion of the measurement object S is calculated. For example, when the reference plane is a plane, the height calculation unit 15 measures the length from the reference plane to the three-dimensional coordinates (Xc, Yc, Zc) in the vertical line of the reference plane passing through the three-dimensional coordinates (Xc, Yc, Zc). Is calculated as height. The height calculator 15 causes the display 340 to display the calculated height. The registration unit 6 calculates the three-dimensional coordinates (Xc, Yc, Zc) calculated by the coordinate calculation unit 13 and the height calculated by the height calculation unit 15 as reference image data, the position of the measurement point, the position of the reference point, Register as registration information in association with the tolerance value.

(C) Measurement mode The measurement operator places the measurement object S of the same type as the measurement object S whose registration information is registered in the setting mode on the optical surface plate 111 of FIG. 2, and the imaging unit of FIG. An image is taken at 220. The measurement image acquisition unit 16 acquires image data generated by the imaging unit 220 as measurement image data, and causes the display unit 340 in FIG. 1 to display an image based on the acquired measurement image data as a measurement image.

  The measurement instruction unit 22 receives a measurement instruction from a measurement operator. The measurement operator can use the operation unit 330 of FIG. 1 to issue a measurement instruction of the measurement object S placed on the optical surface plate 111. When the measurement instruction unit 22 receives the measurement instruction, the target point setting unit 17 corrects the deviation of the measurement image data with respect to the reference image data based on the registration information registered by the registration unit 6. Thereby, the target point setting unit 17 sets a designated point corresponding to the registration information registered by the registration unit 6 in the measurement image data as a target point. The target points include target measurement points corresponding to the measurement points and target reference points corresponding to the reference points.

  The drive control unit 3 drives the drive circuits 273 and 274 in FIG. 7 and the drive circuit 256 a in FIG. 5 based on the registration information registered by the registration unit 6 in the setting mode and the target point set by the target point setting unit 17. Control 256b. Thereby, the measurement light is irradiated to the portion of the measurement target S corresponding to the target point set by the target point setting unit 17, and the three-dimensional coordinates of the portion are calculated by the coordinate calculation unit 13. Here, since the drive control unit 3 performs control based on the three-dimensional coordinates and height registered in the setting mode, the coordinate calculation unit 13 performs measurement corresponding to the target point set by the target point setting unit 17. The three-dimensional coordinates of the portion of the object S can be efficiently calculated.

  The processing of the deflection direction acquisition unit 7 and the detection unit 8 in the measurement mode is the same as the processing of the deflection direction acquisition unit 7 and the detection unit 8 in the setting mode. The processing of the image analysis unit 9 in the measurement mode is the image analysis in the setting mode except that the measurement image data acquired by the measurement image acquisition unit 16 is used instead of the reference image data acquired by the reference image acquisition unit 1 It is similar to the process of part 9. The processes of the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12 in the measurement mode are the same as the processes of the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12 in the setting mode. is there.

  The coordinate calculation unit 13 detects the irradiation position of the measurement light on the measurement object S based on the deflection directions of the deflection units 271 and 272 detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xb, Yb, Zb) are calculated. The coordinate calculation unit 13 measures the measurement light on the measurement object S based on plane coordinates indicating the irradiation position on the measurement image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position of may be calculated. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position of the measurement light are composed of the coordinate Zb in the height direction and the plane coordinates (Xb, Yb) in a plane orthogonal to the height direction.

  The process of the determination unit 14 in the measurement mode is a point using the target point set by the target point setting unit 17 instead of the designated point registered by the registration unit 6 and the three-dimensional coordinates (Xc, Yc, Zc) The processing is the same as the processing of the determination unit 14 in the setting mode except that the three-dimensional coordinates (Xb, Yb, Zb) are used. Thereby, the coordinate calculation unit 13 calculates the coordinates corresponding to the target point set by the target point setting unit 17.

  The reference surface acquisition unit 4 acquires a reference surface based on the coordinates corresponding to the target reference point calculated by the coordinate calculation unit 13. The height calculation unit 15 uses the reference plane acquired by the reference plane acquisition unit 4 as a reference based on the three-dimensional coordinates (Xb, Yb, Zb) corresponding to the target measurement point calculated by the coordinate calculation unit 13 The height of the portion of the measurement object S is calculated. The height calculated by the height calculation unit 15 is displayed on the display unit 340 so as to correspond to the target measurement point on the measurement image of the measurement object S under measurement.

  The recording unit 23 records the height calculated by the height calculation unit 15 each time the measurement instruction unit 22 receives a measurement instruction. The display instruction unit 24 receives an instruction to display statistical data from the measurement worker. The measurement worker can use the operation unit 330 to instruct the display instruction unit 24 to display statistical data. When an instruction to display statistical data is received, the display instruction unit 24 displays the measurement image of the measurement object S under measurement, the height calculated corresponding to the target point on the measurement image, and the recording unit 23. The display unit 340 simultaneously displays statistical data based on one or more heights that have already been recorded.

  The inspection unit 18 inspects the measurement object S based on the height of the portion of the measurement object S calculated by the height calculation unit 15 and the tolerance value registered in the registration unit 6. Specifically, when the calculated height is within the range of tolerance based on the design value, the inspection unit 18 determines that the measurement object S is a non-defective item. On the other hand, when the calculated height is out of the range of the tolerance based on the design value, the inspection unit 18 determines that the measurement object S is a defective product.

  The report creation unit 19 creates a report based on the inspection result by the inspection unit 18 and the measurement image acquired by the measurement image acquisition unit 16. Thereby, the measurement worker can easily report the measurement value of the height or the test result of the measurement object S to the measurement manager or other users using the report. The report is prepared according to a pre-determined writing style. FIG. 11 is a view showing an example of a report prepared by the report preparation unit 19.

  In the description format of FIG. 11, the report 420 includes a name display field 421, an image display field 422, a status display field 423, a result display field 424, and a guarantee display field 425. In the name display field 421, the name of the report 420 (in the example of FIG. 11, "inspection report") is displayed. In the image display column 422, a measurement image of an inspection object is displayed. The status display column 423 displays the name of the inspection target, the identification number of the inspection target, the name of the measurement worker, the inspection date and the like.

  In the result display column 424, the inspection result on the inspection object is displayed. Specifically, in the result display column 424, names of various inspection items set as inspection objects, measurement values and determination results are displayed in the form of a list in a state of being associated with design values and tolerances. Ru. The warranty display field 425 is a blank for being signed or sealed. The measurement operator and the measurement manager can guarantee the inspection result by signing or sealing the warranty display section 425.

  The report creation unit 19 may create the report 420 only for the measurement target S determined to be non-defective by the inspection unit 18. Such a report 420 is attached to a delivery note to guarantee the quality of the product when delivering the product to be inspected to the customer. Further, the report creation unit 19 may create the report 420 only for the measurement target S determined to be a defective product by the inspection unit 18. Such a report 420 is used in-house to analyze the cause that the product to be inspected is determined to be defective.

  In the present embodiment, the result display column 424 of the report 420 is displayed in a state where the measured value of the height of the portion of the measurement object S and the determination result of the inspection item set for the portion are associated. However, the present invention is not limited thereto. One of the measurement value of the height and the determination result of the inspection item may be displayed in the result display field 424 of the report 420, and the other may not be displayed.

(D) Height Gauge Mode The user places a desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. The reference image acquisition unit 1 acquires the image data generated by the imaging unit 220, and causes the display unit 340 in FIG. 1 to display an image based on the acquired image data. The user designates a designated point on the image displayed on the display unit 340.

  The position information acquisition unit 2 receives the designation of the designated point on the image acquired by the reference image acquisition unit 1 and acquires the position (the above-mentioned plane coordinates (Ua, Va)) of the accepted designated point. The position information acquisition unit 2 can also receive a plurality of designated points.

  Drive control unit 3 generates drive circuits 273 and 274 of FIG. 7 and drive circuit 256a of FIG. 5 based on the position conversion information stored in storage unit 320 of FIG. 1 and the position acquired by position information acquisition unit 2. , 256b. Thereby, the measurement light is irradiated to the portion of the measurement target S corresponding to the designated point, and the optical path length of the reference light is adjusted.

  The coordinates of the portion of the measurement target S corresponding to the designated point are calculated by the coordinate calculation unit 13 by the operation of the drive control unit 3 described above. The reference plane acquisition unit 4 acquires a reference plane based on the coordinates calculated by the coordinate calculation unit 13 in correspondence with the reference points acquired by the position information acquisition unit 2.

  The processes of the deflection direction acquisition unit 7, the detection unit 8, the image analysis unit 9, the reference position acquisition unit 10, the light reception signal acquisition unit 11 and the distance information calculation unit 12 in the height gauge mode are the deflection direction acquisition unit 7 and the detection unit in the setting mode. The processing is the same as the processing of the image analysis unit 9, the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12.

  The coordinate calculation unit 13 measures the measurement object S based on the deflection direction of the deflection units 271 and 272 detected by the detection unit 8 or the irradiation position of the measurement light and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xb, Yb, Zb) of the light irradiation position are calculated. The coordinate calculation unit 13 measures the measurement light on the measurement object S based on plane coordinates indicating the irradiation position on the measurement image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position of may be calculated. The processes of the determination unit 14 and the height calculation unit 15 in the height gauge mode are the same as the processes of the determination unit 14 and the height calculation unit 15 in the setting mode.

(8) Overall Operation Flow of Control System FIGS. 12 to 16 are flowcharts showing an example of an optical scanning height measurement process performed in the optical scanning height measurement device 400 of FIG. A series of processes described below are executed by the control unit 310 and the control substrate 210 in a constant cycle when the power of the optical scanning height measurement apparatus 400 is in the on state. The light scanning height measurement process includes a designated measurement process and an actual measurement process described later. In the following description, the designated measurement process and the actual measurement process of the light scanning height measurement process are performed by the control substrate 210, and the other processes of the light scanning height measurement process are performed by the control unit 310. The invention is not limited to this. For example, all processing of the light scanning height measurement processing may be performed by the control substrate 210 or the control unit 310.

  In the initial state, it is assumed that the power of the optical scanning height measuring device 400 is turned on in a state where the measurement object S is placed on the optical surface plate 111 of FIG. At this time, the selection screen 341 of FIG. 8 is displayed on the display unit 340 of FIG.

  When the light scanning height measurement process is started, the control unit 310 determines whether the setting mode is selected by the operation of the operation unit 330 by the user (step S101). More specifically, control unit 310 determines whether or not the setting button 341a of FIG. 8 has been operated by the user.

  When the setting mode is not selected, the control unit 310 proceeds to the process of step S201 of FIG. 15 described later. On the other hand, when the setting mode is selected, the control unit 310 causes the display unit 340 of FIG. 1 to display a setting screen 350 of FIG. 24 described later (step S102). On the setting screen 350, the reference image of the measurement area V of FIG. 2 acquired at a constant cycle by the imaging unit 220 is displayed in real time.

  In the optical scanning height measuring apparatus 400 according to the present embodiment, in order to realize the correction function of the target point setting unit 17 of FIG. 10, it is necessary to set the pattern image and the search area in the setting mode. The pattern image means an image of a portion including at least the measurement object S in the entire region of the reference image displayed at the time designated by the user. Further, the search area means a range (a range within the imaging field of the imaging unit 220) in which a portion similar to the pattern image is searched in the measurement image after the pattern image is set in the setting mode.

  Therefore, control unit 310 determines whether or not the search area has been designated by the operation of operation unit 330 by the user (step S103). If no search area is specified, the control unit 310 proceeds to the process of step S105 described later. On the other hand, when the search area is specified, the control unit 310 sets information of the specified search area by storing the information in the storage unit 320 (step S104).

  Next, the control unit 310 determines whether or not the pattern image has been designated by the operation of the operation unit 330 by the user (step S105). If no pattern image is specified, the control unit 310 proceeds to the process of step S107 described later. On the other hand, when the pattern image is designated, the control unit 310 sets information of the designated pattern image by storing the information in the storage unit 320 (step S106). The information on the pattern image also includes information indicating the position of the pattern image in the reference image. A specific setting example of the pattern image and the search area by the user will be described later.

  Next, the control unit 310 determines whether or not the search area and the pattern image have been set by the processes of steps S104 and S106 (step S107). When at least one of the search area and the pattern image is not set, the control unit 310 returns to the process of step S103. On the other hand, when the search area and the pattern image are set, control unit 310 determines whether or not the setting of the reference surface is accepted (step S108).

  When control unit 310 receives the setting of the reference surface in step S108, control unit 310 determines whether or not the reference point is designated on the reference image displayed on display unit 340 by the operation of operation unit 330 by the user (step S109). When the reference point is not designated, the control unit 310 proceeds to the process of the subsequent step S111. On the other hand, when the reference point is designated, the control unit 310 instructs the control substrate 210 to perform designated measurement processing and gives plane coordinates (Ua, Va) specified by the designated reference point on the image (see FIG. See FIG. 9 (a)). Thereby, the control substrate 210 performs the designated measurement process (step S110), and gives the coordinates (Xc, Yc, Zc) specified by the designated measurement process to the control unit 310. Details of the designated measurement process will be described later.

  Thereafter, the control unit 310 determines whether designation of the reference point is completed by the operation of the operation unit 330 by the user (step S111). When the designation of the reference point is not completed, the control unit 310 returns to the process of step S109. On the other hand, when designation of the reference point is completed, the control unit 310 sets a reference plane based on one or more coordinates (Xc, Yc, Zc) acquired in the designated measurement process of step S110 (step S112). . In this example, information indicating the coordinates of the reference plane based on the coordinates (Xc, Yc, Zc) corresponding to one or more reference points, for example, plane coordinates (Xc, Yc) corresponding to each reference point or each reference The coordinates (Xc, Yc, Zc) corresponding to the point are stored in the storage unit 320.

  Here, the information indicating the coordinates of the reference surface may include a reference surface constraint condition for determining the reference surface. The reference surface restraint conditions include, for example, conditions such that the reference surface is parallel to the mounting surface, or that the reference surface is parallel to another surface stored in advance. In the case of a reference surface constraint condition that the reference surface is parallel to the mounting surface, if coordinates (Xb, Yb, Zb) for one reference point are specified, the plane represented by Z = Zb is acquired as the reference surface It will be done.

  After the process of step S112 described above or when the setting of the reference plane is not received in step S108, the control unit 310 determines whether the accepted setting is a setting related to the measurement of the measurement object S (step S121). . More specifically, control unit 310 determines whether or not the accepted setting is a setting for specifying the portion of measurement object S whose height is to be measured.

  If the accepted setting is not a setting regarding measurement, control unit 310 acquires information regarding the setting by the operation of operation unit 330 by the user, and stores the information in storage unit 320 (step S130). The information acquired here includes, for example, information such as the above-mentioned allowable value, an index to be displayed on the measurement image in the measurement mode, and a comment. Thereafter, the control unit 310 proceeds to the process of step S126 described later.

  When the setting accepted in step S121 is the setting regarding measurement, control unit 310 determines whether or not the measurement point is designated on the reference image displayed on display unit 340 by the operation of operation unit 330 by the user. (Step S122). When the measurement point is not designated, the control unit 310 proceeds to the process of the subsequent step S124. On the other hand, when the measurement point is designated, the control unit 310 instructs the control substrate 210 to perform the designated measurement process as in step S110 described above, and the plane coordinates specified by the designated measurement point on the image Give (Ua, Va). Thus, the control board 210 performs the designated measurement process (step S123), and gives the coordinates (Xc, Yc, Zc) specified by the designated measurement process to the control unit 310.

  Thereafter, the control unit 310 determines whether designation of the measurement point is completed by the operation of the operation unit 330 by the user (step S124). When the designation of the measurement point is not completed, the control unit 310 returns to the process of step S122.

  On the other hand, when designation of the measurement point is completed, the control unit 310 stores in the storage unit 320 the coordinates (Xc, Yc, Zc) of one or more measurement points acquired in the designated measurement process of step S123. The measurement point is set (step S125).

  After the process of any one of steps S125 and S130, control unit 310 determines whether the completion of the setting has been instructed or a new setting has been instructed (step S126). When a new setting is instructed, that is, when the completion of the setting is not instructed, control unit 310 returns to the process of step S108.

  On the other hand, when the completion of setting is instructed, control unit 310 associates the information set in any of steps S103 to S112, S121 to S125, and S130 with each other and registers the information as registration information (step S127). Thereafter, the optical scanning height measurement process ends in the setting mode. The file of registration information to be registered is stored in the storage unit 320 after being given a specific file name by the user. At this time, the information temporarily stored in the storage unit 320 for setting may be deleted in any of steps S103 to S112, S121 to S125, and S130.

  Here, in step S127, when the reference plane is set in the process of step S112, the control unit 310 sets the height of the measurement point based on the reference plane and the specified coordinates (Xc, Yc, Zc). Is calculated and the calculation result is included in the registration information. If the reference plane is already set at the time of step S125, the height of the measurement point is determined based on the set reference plane and the specified coordinates (Xc, Yc, Zc) in step S125. It may be calculated. In this case, the calculation result may be displayed on the setting screen 350 (FIG. 29 described later) as the height of the measurement point.

  If the setting mode is not selected in step S101 described above, the control unit 310 determines whether the measurement mode is selected by the operation of the operation unit 330 by the user (step S201). More specifically, control unit 310 determines whether or not the measurement button 341b of FIG. 8 has been operated by the user. When the measurement mode is selected, the control unit 310 causes the display unit 340 of FIG. 1 to display a measurement screen 360 of FIG. 33 described later (step S202). On the measurement screen 360, the measurement image of the measurement area V of FIG. 2 acquired at a constant cycle by the imaging unit 220 is displayed in real time.

  Next, the control unit 310 determines whether the file of the registration information is designated by the operation of the operation unit 330 by the user (step S203). Specifically, it is determined whether or not the user has specified a file name of registration information. When no file is specified, the control unit 310 is in a standby state until the file specification is received. On the other hand, when receiving the designation of the file, control unit 310 reads the file of the designated registration information from storage unit 320 (step S204). When the file of the designated registration information is not stored in the storage unit 320, the control unit 310 may display information indicating that the designated file does not exist on the display unit 340.

  Next, the control unit 310 acquires information of the registered pattern image from the read registration information, and superimposes and displays the acquired pattern image on the measurement image displayed on the display unit 340 (step S205). At this time, the control unit 310 acquires a search area in addition to the pattern image. As described above, the information on the pattern image also includes information indicating the position of the pattern image in the reference image. Therefore, the pattern image is superimposed on the measurement image at the same position as the position set in the setting mode.

  Here, the pattern image may be displayed semi-transparently. In this case, the user can easily compare the measurement image of the measurement object S currently imaged and the reference image of the measurement object S acquired in the setting mode. Then, the user can perform the positioning operation of the measuring object S on the optical surface plate 111.

  Next, the control unit 310 determines whether measurement has been instructed by the operation of the operation unit 330 by the user (step S206). When the measurement is instructed, the control unit 310 compares the pattern image and the measurement image (step S207). Specifically, the control unit 310 extracts the edge of the measurement target S in the pattern image as a reference edge, and searches whether there is an edge having a shape corresponding to the reference edge in the acquired search area. Do.

  In this case, the edge portion of the measurement object S in the measurement image is considered to be most similar to the reference edge. Therefore, when the portion of the measurement image most similar to the reference edge is detected, the control unit 310 calculates how much the detected portion deviates from the reference edge on the image, and the detected portion is The amount of rotation from the reference edge on the image is calculated (step S208).

  Next, the control unit 310 acquires information of the designated point registered from the read registration information, and sets the target point based on the calculated amount of deviation and the amount of rotation of the acquired designated point information (step S209). The processes of steps S207 to S209 correspond to the function of the target point setting unit 17 of FIG. According to this configuration, even when the measurement object in the measurement image is displaced or rotated relative to the measurement object in the pattern image, the designated point can be easily identified with high accuracy, and the target point can be set. .

  Next, the control unit 310 instructs the control substrate 210 to perform an actual measurement process for each target point, and gives the coordinates (Xc, Yc, Zc) of the target point (see FIG. 9B). Thereby, the control substrate 210 performs an actual measurement process (step S210) and gives the coordinates (Xb, Yb, Zb) specified by the actual measurement process to the control unit 310. Details of the actual measurement process will be described later.

  Next, the control unit 310 acquires information of the registered reference surface, and calculates the height of the target measurement point based on the reference surface and the acquired coordinates (Xb, Yb, Zb) (step S211). . Here, in the case where the read registration information includes an allowable value, an inspection process may be further performed to determine whether the calculation result of the height is within the tolerance range set by the allowable value. .

  Thereafter, the control unit 310 records the height calculated in step S211 in the recording unit 23 (step S212). Further, the control unit 310 causes the display unit 340 to display the height calculated in step S211 so as to correspond to the target measurement point on the measurement image of the measurement object S under measurement (step S213).

  Here, the control unit 310 determines whether or not display of statistical data is instructed (step S214). The user can use the operation unit 330 to select one of the target measurement points and designate display of one or more height-based statistical data corresponding to the selected target measurement point. When the display of statistical data is not instructed, the control unit 310 returns to the process of step S206.

  On the other hand, when the display of statistical data is instructed, control unit 310 causes display unit 340 to display statistical data. Thereby, a statistic based on the measurement image of the measurement object S under measurement, the height corresponding to the target measurement point set on the measurement image, and one or more heights already recorded in the recording unit 23 The data and the data are simultaneously displayed on the display unit 340. Thereafter, the control unit 310 returns to the process of step S206. If measurement is not instructed in step S206, the light scanning height measurement process ends in the measurement mode.

  When the measurement mode is not selected in step S201, the control unit 310 determines whether the height gauge mode is selected by the operation of the operation unit 330 by the user (step S301). More specifically, control unit 310 determines whether or not the height gauge button 341c of FIG. 8 has been operated by the user. When the height gauge mode is not selected, the control unit 310 returns to the process of step S101.

  On the other hand, when the height gauge mode is selected, control unit 310 causes display unit 340 in FIG. 1 to display setting screen 350 in FIG. 25 described later (step S302). Thereafter, the control unit 310 sets the reference plane based on the operation of the operation unit 330 by the user (step S303). This setting process is the same as the process of steps S109 to S112 described above.

  Thereafter, when the control unit 310 receives designation of the designated point, it instructs the control substrate 210 to perform designated measurement processing, and gives plane coordinates (Ua, Va) specified by the designated point designated on the image. (See FIG. 9 (c)). Thus, the control board 210 performs designated measurement processing (step S304). In addition, the control board 210 controls the positions of the movable parts 252a and 252b in FIG. 5 and the reflection parts 271b and 272b in FIG. 7 based on the coordinates (Xc, Yc, Zc) specified by the designated measurement process and the position conversion information. The angle is adjusted to irradiate the measuring light (step S305).

  Subsequently, the control substrate 210 measures the object based on the light receiving signal output from the light receiving unit 232 d of FIG. 4, the positions of the movable units 252 a and 252 b of FIG. 5, and the deflection directions of the deflection units 271 and 272 of FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the object S to be irradiated with the measurement light are calculated and given to the control unit 310 (step S306).

  Note that, in step S305 described above, the control substrate 210 receives the light reception signal output from the light reception unit 232d in FIG. 4, the positions of the movable units 252a and 252b in FIG. 5, and the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light may be calculated based on the plane coordinates indicating the irradiation position of the measurement light.

  Next, the control unit 310 acquires information of the set reference plane, and a portion to which the measurement light is irradiated on the measurement object S based on the reference plane and the acquired coordinates (Xb, Yb, Zb) The calculated height is displayed on the display unit 340 as the measurement result. For example, when the reference plane is a plane, the control unit 310 extends from the reference plane when the perpendicular of the reference plane passing through the acquired coordinates (Xb, Yb, Zb) to the coordinates (Xb, Yb, Zb) The length of the perpendicular is calculated as the height, and the calculation result is displayed on the display unit 340 as the measurement result. In addition, the control unit 310 is a measurement target corresponding to the measurement point at a plane coordinate indicating the irradiation position of the measurement light on the image acquired by the imaging unit 220 or at a plane coordinate specified by the measurement point specified on the image. A green "+" mark indicating that the height of the part of the object S has been calculated is displayed on the display unit 340 (step S307).

  Subsequently, the control unit 310 determines whether an additional measurement point is designated by the operation of the operation unit 330 by the user (step S308). If an additional measurement point is designated, the control unit 310 returns to the process of step S304. Thus, the processes of steps S304 to S308 are repeated until no additional measurement point is specified. If no additional measurement points are specified, the optical scan height measurement process ends in height gauge mode.

  According to the above-mentioned height gauge mode, the user can designate the reference plane by designating the reference point on the image. Also, the user can acquire the measurement result of the height by designating the measurement point on the screen. Furthermore, the user can continue measurement while maintaining the reference surface by specifying a plurality of measurement points.

(9) Example of Specified Measurement Process FIGS. 17 and 18 are flowcharts showing an example of the specified measurement process by the control board 210. FIG. 19 and 20 are explanatory diagrams for describing the designated measurement process of FIGS. 17 and 18. In each of FIGS. 19 (a), (b) and (c) and FIGS. 20 (a) and 20 (b), the measurement object S mounted on the optical surface plate 111 on the left side, the imaging unit 220 and the scanning unit While the positional relationship with 270 is shown by a side view, the image displayed on the display part 340 by the imaging of the imaging part 220 is shown on the right side. The image displayed on the display unit 340 includes the image SI of the measurement object S. In the following description, plane coordinates on the image displayed on the display unit 340 will be referred to as screen coordinates.

  The control board 210 starts the designated measurement process by receiving a command of the designated measurement process from the control unit 310. Therefore, the control board 210 acquires screen coordinates (Ua, Va) given along with a command from the control unit 310 (step S401).

  On the right side of FIG. 19A, screen coordinates (Ua, Va) are shown on the image displayed on the display unit 340. Further, on the left side of FIG. 19A, a portion of the measurement target S corresponding to the screen coordinates (Ua, Va) is indicated by a point P0.

  In step S401, among the coordinates of the point P0 corresponding to the screen coordinates (Ua, Va), the Z-axis component (the component in the height direction) is unknown. Therefore, the control board 210 assumes that the component of the Z axis of the point P0 designated by the user is “Za” (step S402). In this case, as shown in FIG. 19B, the assumed Z-axis component does not necessarily match the Z-axis component of the actually designated point P0.

  Next, the control board 210 calculates planar coordinates (Xa, Ya) corresponding to the screen coordinates (Ua, Va) when the component of the Z axis is assumed to be “Za” based on the above coordinate conversion information. (Step S403). Thus, as shown in FIG. 19B, the screen coordinates (Ua, Va) and the coordinates (Xa, Ya, Za) of the virtual point P1 corresponding to the assumed Z-axis component are obtained. In the present example, “Za” is an intermediate position in the Z direction in the measurement area V of FIG.

  Next, on the basis of the coordinates (Xa, Ya, Za) and position conversion information obtained by the process of step S403, the control substrate 210 controls the positions of the movable portions 252a and 252b in FIG. 5 and the positions of the reflective portions 271b and 272b in FIG. The angle is adjusted to irradiate measurement light (step S404).

  In this case, if the component of the Z-axis assumed in step S402 is largely deviated from the component of the Z-axis of the actually designated point P0, as shown in the side view on the left side of FIG. The irradiation position of the measurement light on the object S is largely deviated from the actually designated point P0. Therefore, the following processing is performed.

  By the process of step S404, an irradiation portion (light spot) of the measurement light emitted from the scanning unit 270 to the measurement object S appears on the image acquired by the imaging unit 220. In this case, the screen coordinates of the irradiated portion of the measurement light can be easily detected using image processing or the like. In the diagram on the right side of FIG. 19C, the irradiated portion (light spot) of the measurement light appearing on the image displayed on the display unit 340 is indicated by a circle.

  After the processing of step S404, the control substrate 210 detects plane coordinates indicating the irradiation position of the measurement light on the image acquired by the imaging unit 220 as screen coordinates (Uc, Vc), and also reflects the reflection unit 271b in FIG. The deflection direction of the measurement light is detected from the angle 272b (step S405).

  Next, the control substrate 210 coordinates (Xc, Yc, coordinates) coordinates of the irradiation position P2 of the measurement light on the measurement object S or the optical surface plate 111 based on the detected screen coordinates (Uc, Vc) and the deflection direction. It is assumed that Zc) (step S406).

  Here, as shown in FIG. 19C, when the irradiation position P2 deviates from the point P0, the screen coordinates (Uc, Vc) also deviate from the screen coordinates (Ua, Va). Therefore, the control board 210 calculates an error (Ua-Uc, Va-Vc) of the detected screen coordinates (Uc, Vc) with respect to the screen coordinates (Ua, Va), and the calculated error is predetermined. It is determined whether it is within the determination range (step S407). The determination range used at this time may be set by the user, or may be set in advance at the factory shipment of the optical scanning height measuring device 400.

  In step S407, when the error (Ua-Uc, Va-Vc) is within the predetermined determination range, the control board 210 uses the coordinates (Xc, Yc, Zc) determined in the previous step S406 as the user. Are specified as coordinates designated by the (step S408), and the designated measurement process is ended. Thereafter, the control substrate 210 gives the identified coordinates (Xc, Yc, Zc) to the control unit 310.

  In step S407, when the error (Ua-Uc, Va-Vc) is out of the predetermined determination range, the control substrate 210 deflects the measurement light based on the above-mentioned error (Ua-Uc, Va-Vc). The direction is adjusted (step S409). Specifically, for example, the relationship between the error on the screen coordinates corresponding to the X axis and the Y axis and the angle to be adjusted of the reflection units 271b and 272b is stored in advance in the storage unit 320 as an error correspondence relationship. Furthermore, as shown by the white arrow in FIG. 20A, the control substrate 210 deflects the measurement light based on the calculated errors (Ua-Uc, Va-Vc) and the error correspondence relationship. Fine-tune the

  Thereafter, the control board 210 returns to the process of step S405. Thus, the processing of steps S405 to S407 is performed again after the deflection direction of the measurement light is finely adjusted. As a result, finally, as shown in FIG. 20 (b), when the error (Ua-Uc, Va-Vc) falls within the determination range, the coordinates (Xc) corresponding to the designated point designated by the user , Yc, Zc) are identified.

  In this example, the coordinates of the coordinates (Xc, Yc, Zc) of the irradiation position P2 are calculated by the process of step S406, but the present invention is not limited to this. The coordinates (Xc, Yc, Zc) of the irradiation position P2 may be calculated by the processes of steps S505 and S506 in the designated measurement process of FIGS. 21 and 22 described later.

(10) Another Example of Specified Measurement Process FIGS. 21 and 22 are flowcharts showing another example of the specified measurement process by the control board 210. FIG. FIG. 23 is an explanatory diagram for describing the designated measurement process of FIG. 21 and FIG. In each of FIGS. 23A and 23B, the positional relationship between the measurement object S mounted on the optical surface plate 111 on the left side and the imaging unit 220 and the scanning unit 270 is shown in a side view, and The image displayed on the display unit 340 by the imaging of the imaging unit 220 is shown in FIG.

  When the designated measurement process is started, the control board 210 acquires screen coordinates (Ua, Va) given along with a command from the control unit 310 (step S501). Subsequently, the control board 210 assumes that the component of the Z axis of the point P0 designated by the user is “Za” (step S502), as in the process of step S402 described above. In this case, as in the example of FIG. 19B, the assumed Z-axis component does not necessarily coincide with the Z-axis component of the actually designated point P0.

  Next, in the control substrate 210, plane coordinates (Xa, Ya) corresponding to the screen coordinates (Ua, Va) when the component of the Z axis is assumed to be “Za” as in the process of step S403 described above. Is calculated (step S503). Further, the control board 210 controls the movable portion 252a of FIG. 5 based on the coordinates (Xa, Ya, Za) of the virtual point P1 obtained by the process of step S503 and the position conversion information, as in the process of step S404. The position of 252b and the angles of the reflecting portions 271b and 272b in FIG. 7 are adjusted to irradiate measurement light (step S504). In step S504, the relationship between the point P0 designated by the user and the irradiation position of the measurement light irradiated to the measurement object S is the same as the state shown in FIG. 19C. Thereafter, the subsequent processing is performed such that the irradiation position of the measurement light on the measurement object S actually coincides with or approaches the designated point P0.

  First, the control substrate 210 detects the positions of the movable parts 252a and 252b in FIG. 5 and detects the deflection direction of the measurement light from the angles of the reflection parts 271b and 272b in FIG. 7 (step S505).

  Next, the control substrate 210 outputs the measurement light emission position and the measurement object S based on the positions of the movable portions 252a and 252b detected in the immediately preceding step S505 and the light reception signal acquired by the light reception portion 232d of FIG. Calculate the distance between the measurement light and the irradiation position of In addition, the control substrate 210 coordinates the coordinates of the irradiation position P2 of the measurement light on the measurement target S or the optical surface plate 111 based on the calculated distance and the deflection direction of the measurement light detected in the previous step S505. It is assumed that Xc, Yc, Zc) (step S506).

  By the process of step S506 described above, it is estimated that the component "Zc" of the Z axis of the irradiation position P2 of the measurement light matches or is close to the component of the Z axis of the point P0 designated by the user. . Therefore, the control board 210 calculates plane coordinates (Xa ′, Ya ′) corresponding to the screen coordinates (Ua, Va) when the component of the Z axis is assumed “Zc” based on the coordinate conversion information. (Step S507). As a result, as shown in FIG. 23A, the screen coordinates (Ua, Va) and the coordinates (Xa ', Ya', Zc) of the virtual point P3 corresponding to the assumed Z-axis component are obtained.

  Next, the control substrate 210 calculates an error (Xa′−Xc, Ya′−Yc) of the plane coordinates (Xc, Yc) of the irradiation position P2 with respect to the plane coordinates (Xa ′, Ya ′) of the virtual point P3. Then, it is determined whether the calculated error is within a predetermined determination range (step S508). The determination range used at this time may be set by the user, or may be set in advance at the factory shipment of the optical scanning height measuring device 400.

  In step S508, when the error (Xa'-Xc, Ya'-Yc) is within the predetermined determination range, the control substrate 210 determines the coordinates (Xc, Yc) of the irradiation position P2 determined in the previous step S506. , Zc) as coordinates designated by the user (step S509), and the designated measurement process is ended. Thereafter, the control substrate 210 gives the identified coordinates (Xc, Yc, Zc) to the control unit 310.

  In step S508, when the error (Xa'-Xc, Ya'-Yc) is out of the predetermined determination range, the control substrate 210 determines the coordinates (Xa ', X' of the virtual point P3 obtained in the previous step S507. Ya 'and Zc are set as coordinates (Xa, Ya, Za) to be irradiated with the measurement light in step S504 described above (step S510). Thereafter, the control substrate 210 returns to the process of step S504 described above.

  Thus, after the deflection direction of the measurement light is changed, the processes of steps S504 to S508 are performed again. As a result, finally, as shown in FIG. 23 (b), when the error (Xa'-Xc, Ya'-Yc) falls within the determination range, the coordinates corresponding to the designated point designated by the user (Xc, Yc, Zc) is identified.

  In this example, the coordinates of the coordinates (Xc, Yc, Zc) of the irradiation position P2 are calculated by the processing of steps S505 and S506, but the present invention is not limited to this. The coordinates of the coordinates (Xc, Yc, Zc) of the irradiation position P2 may be calculated by the process of step S406 in the designated measurement process of FIGS. 17 and 18.

(11) Actual Measurement Process The control substrate 210 starts the actual measurement process by receiving an instruction of the actual measurement process from the control unit 310. When the actual measurement process is started, the control board 210 first acquires coordinates (Xc, Yc, Zc) of a designated point given along with a command from the control unit 310.

  Here, even if the measuring light is irradiated based on the coordinates (Xc, Yc, Zc) of the designated point set in the setting mode and the position conversion information, depending on the shape of the measuring object S measured in the measuring mode The plane coordinates of the irradiation position of the measurement light on the measurement object S may be largely deviated from the coordinates of the target point.

  For example, if the Z-axis component of the portion of the measurement target S corresponding to the target point is largely deviated from “Zc”, the plane coordinates of the target point for which the plane coordinates of the irradiation position of the measurement light are also set (Xc, Yc Greatly deviate from). Therefore, in the actual measurement process, the plane coordinates of the irradiation position of the measurement light are adjusted to be within a certain range from the plane coordinates (Xc, Yc) of the target point.

  Specifically, the control board 210 sets, for example, (Ua, Va) the screen coordinates corresponding to the acquired coordinates (Xc, Yc, Zc) of the designated points, and then the coordinates (Xc) of the designated points acquired. , Yc, Zc) are coordinates (Xa, Ya, Za) of the virtual point P1 obtained by the process of step S403 in FIG. Next, the control substrate 210 performs the processing of steps S404 to S408 in FIGS. 17 and 18. Subsequently, based on the coordinates (Xc, Yc, Zc) specified in the process of step S 408 and the position conversion information, the control board 210 positions the movable parts 252 a and 252 b in FIG. 5 and the reflection part 271 b in FIG. The measurement light is irradiated by adjusting the angle 272 b.

  Subsequently, the control substrate 210 measures the object based on the light receiving signal output from the light receiving unit 232 d of FIG. 4, the positions of the movable units 252 a and 252 b of FIG. 5, and the deflection directions of the deflection units 271 and 272 of FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion on the object S irradiated with the measurement light are calculated and given to the control unit 310. Thus, the actual measurement process ends. The control substrate 210 is a light receiving signal output from the light receiving unit 232 d in FIG. 4, the positions of the movable units 252 a and 252 b in FIG. 5, and the irradiation position of measurement light on the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light may be calculated based on the plane coordinates indicating.

  Alternatively, the control substrate 210 may execute the actual measurement process as follows. The control board 210 sets, for example, the coordinates (Xc, Yc, Zc) of the designated point obtained after setting the screen coordinates corresponding to the coordinates (Xc, Yc, Zc) of the designated point obtained as (Ua, Va). The coordinates (Xa, Ya, Za) of the virtual point P1 obtained in the process of step S503 in FIG. Next, the control board 210 performs the processes of steps S504 to S509 in FIG. 21 and FIG. Subsequently, based on the coordinates (Xc, Yc, Zc) identified in the process of step S 508 and the position conversion information, the control board 210 positions the movable parts 252 a and 252 b in FIG. 5 and the reflection part 271 b in FIG. The measurement light is irradiated by adjusting the angle 272 b.

  After that, the control substrate 210 receives the light receiving signal output from the light receiving unit 232 d in FIG. 4, the positions of the movable units 252 a and 252 b in FIG. 5, and the deflection directions of the deflection units 271 and 272 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light are calculated based on the above, and are given to the control unit 310. Alternatively, the control substrate 210 may be a light receiving signal output from the light receiving unit 232 d in FIG. 4, the positions of the movable units 252 a and 252 b in FIG. 5, and the irradiation position of measurement light on the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light are calculated based on the plane coordinates indicating.

(12) Operation Example Using Setting Mode, Measurement Mode, and Statistical Data Mode FIGS. 24 to 29 are diagrams for describing an operation example of the optical scanning height measuring device 400 in the setting mode. In the following, the user of the optical scanning height measurement apparatus 400 will be described separately for the measurement manager and the measurement worker.

  First, the measurement manager positions the measurement target S, which is the reference of height measurement, on the optical surface plate 111, and operates the setting button 341a of FIG. 8 using the operation unit 330 of FIG. Thus, the optical scanning height measuring device 400 starts the operation of the setting mode. In this case, for example, as shown in FIG. 24, a setting screen 350 is displayed on the display unit 340 of FIG. The setting screen 350 includes an image display area 351 and a button display area 352. In the image display area 351, an image of the measurement object S currently captured is displayed as a reference image RI. In each of FIGS. 24 to 29 and each of FIGS. 30 to 36, which will be described later, a contour indicating the shape of the measurement target S in the reference image RI displayed in the image display area 351 and the measurement image MI described later It is indicated by a thick solid line.

  At the start time of the setting mode, a search area button 352 a, a pattern image button 352 b and a setting completion button 352 c are displayed in the button display area 352. The measurement manager operates, for example, the search area button 352 a and performs a drag operation or the like on the image display area 351. Thus, the search area SR is set as shown by a dotted line in FIG. Also, the measurement manager operates, for example, the pattern image button 352 b to perform a drag operation or the like on the image display area 351. Thereby, the pattern image PI can be set as indicated by an alternate long and short dash line in FIG.

  After setting the search area SR and the pattern image PI, the measurement manager operates the setting completion button 352 c. Thereby, the setting of the search area SR and the pattern image PI is completed, and the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, the index indicating the set search area SR and the pattern image PI is removed. Further, in the button display area 352, in place of the search area button 352a and the pattern image button 352b of FIG. 24, a point designation button 352d and a reference surface setting button 352e are displayed.

  The measurement manager operates the point designation button 352 d to perform a click operation or the like on the image display area 351. Thereby, one or more (three in this example) reference points are designated as indicated by “+” marks in FIG. Thereafter, the measurement manager operates the reference surface setting button 352 e. As a result, a reference plane including one or more designated reference points is set, and an index indicating the reference plane RF set in the image display area 351 is displayed as shown by a two-dot chain line in FIG. Here, when four or more reference points are designated, all four or more reference points need not necessarily be included in the reference plane RF. In this case, the reference plane RF is set, for example, such that the distance between the plurality of reference points is entirely reduced. Similarly, when a reference surface constraint condition for determining a reference surface is defined, for example, the reference surface is parallel to the mounting surface, or the reference surface is parallel to another surface previously stored. In the case where two or more reference points are designated in the case where conditions such as that are defined, it is not necessary that all the two or more reference points be included in the reference plane RF. A plurality of reference planes RF may be set by repeating the operations of the point designation button 352d and the reference plane setting button 352e.

  Thereafter, the measurement manager operates the setting completion button 352 c. Thereby, the setting of the reference plane RF is completed, and the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, an index indicating one or more reference points used for setting the reference plane RF is removed. Further, in the button display area 352, an allowance value button 352g is displayed in place of the reference surface setting button 352e of FIG.

  The measurement manager operates the point designation button 352 d to perform a click operation or the like on the image display area 351. Thereby, measurement points are designated as shown by “+” marks in FIG. At this time, in the case where a plurality of reference planes RF are set, one selection is accepted from among the plurality of reference planes RF set as the reference planes RF as the reference of the designated measurement point. In addition, when the above-mentioned designated measurement processing is performed for the designated measurement point and the height of the portion of the measurement target S corresponding to the measurement point can be calculated, the portion of the measurement target S corresponding to the measurement point The height is displayed on the image display area 351. At this time, it may be shown that the height of the portion of the measurement object S corresponding to the measurement point can be calculated by changing the color of the “+” mark, for example, to green.

  On the other hand, when the designated measurement process described above is performed for the designated measurement point and the height of the portion of the measurement object S corresponding to the measurement point can not be calculated, an error message such as “FAIL” appears on the image display area 351. May be displayed. At this time, it may be indicated that the height of the portion of the measurement object S corresponding to the measurement point can not be calculated by changing the color of the “+” mark to, for example, red.

  When a plurality of measurement points are designated, it may be possible to designate measurement path information. For example, it may be possible to set information such as setting measurement paths in accordance with the designation order of a plurality of measurement points, or setting measurement paths such that the measurement path is shortest.

  At the time of designation of the measurement point, the measurement manager can further set the design value and the tolerance as the tolerance value for each measurement point by operating the tolerance value button 352g. Finally, the measurement manager operates the setting completion button 352c. Thereby, a series of information including a plurality of measurement points and tolerance values are associated with each other and stored in the storage unit 320 as registration information. At this time, the registration information is given a specific file name. The file name may be set by the measurement manager.

  As shown in FIGS. 26 to 29, on the reference image RI, the reference point designated by the measurement manager and the index “+” indicating the position of the measurement point are superimposed and displayed. Thereby, the measurement manager can easily confirm the designated reference point and measurement point by visually recognizing the index superimposed and displayed on the reference image RI of the measurement object S.

  Here, in the present invention, the order of setting of the reference point and the measurement point in the setting mode is not limited to the above example. The setting of the reference point and the measurement point may be performed as follows.

  30 to 32 are diagrams for explaining another operation example of the light scanning height measuring device 400 in the setting mode. In this example, after setting the search area SR and the pattern image PI, as shown in FIG. 30, in the button display area 352, a setting completion button 352c, point specification button 352d, reference surface setting button 352e, tolerance value button 352g, reference The point setting button 352 h and the measurement point setting button 352 i are displayed.

  In this state, the measurement manager operates the point designation button 352 d to perform a click operation or the like on the image display area 351. At this time, the measurement manager designates a plurality of (five in the present example) designated points, as shown by “+” marks in FIG.

  Next, the measurement manager operates the reference point setting button 352 h or the measurement point setting button 352 i for each designated point to determine whether the designated point is used as a reference point or as a measurement point. Furthermore, the measurement manager operates the reference surface setting button 352 e after determining one or more points as the reference points. As a result, as shown in FIG. 31, one or more (three in this example) reference points are displayed in the image display area 351 as indicated by a dotted “+” mark. In addition, as indicated by a two-dot chain line, a reference plane based on one or more reference points is displayed. Furthermore, one or more (two in this example) measurement points are displayed as indicated by a solid "+" mark.

  Thereafter, as shown in FIG. 32, the height of the portion of the measurement target S corresponding to the designated measurement point is displayed on the image display area 351. At this time, the measurement manager can set the design value and the tolerance as the allowable value for each measurement point by operating the allowable value button 352 g as in the above example. Finally, the measurement manager operates the setting completion button 352c.

  33 to 36 are diagrams for describing an operation example of the optical scanning height measuring device 400 in the measurement mode. The measurement operator positions the measurement object S to be measured for height measurement on the optical surface plate 111, and operates the measurement button 341b of FIG. 8 using the operation unit 330 of FIG. Thereby, the optical scanning height measuring device 400 starts the operation in the measurement mode. In this case, for example, as shown in FIG. 33, a measurement screen 360 is displayed on the display unit 340 of FIG. The measurement screen 360 includes an image display area 361 and a button display area 362. In the image display area 361, an image of the measurement object S currently captured is displayed as a measurement image MI.

  At the start time of the measurement mode, a file read button 362 a is displayed in the button display area 362. The measurement worker operates the file read button 362 a to select the file name instructed by the measurement manager. Thereby, registration information of height measurement corresponding to the measurement object S placed on the optical surface plate 111 is read.

  When the registration information is read, as shown in FIG. 34, a pattern image PI corresponding to the read registration information is superimposed and displayed on the measurement image MI of the image display area 361 in a semitransparent state. Further, the measurement button 362 b is displayed in the button display area 362. In this case, the measurement operator can position the measuring object S at a more appropriate position on the optical surface plate 111 with reference to the pattern image PI.

  The measurement operator operates the measurement button 362 b after performing the positioning operation of the measurement object S more accurately. Thereby, a plurality of target points respectively corresponding to a plurality of designated points of the read registration information are set. Moreover, the height from the reference plane of the plurality of portions of the measurement target S corresponding to the plurality of target measurement points is measured. The height of each portion of the measured object S measured (calculated) is recorded in the recording unit 23 of FIG.

  If the read registration information includes an allowable value, the quality of the corresponding portion of the target measurement point is determined based on the allowable value (inspection process). As a result, as shown in FIG. 35, the height of the portion of the measurement target S corresponding to each of the set target measurement points is displayed on the image display area 361. While the height of the portion of the measurement target S corresponding to each set target measurement point is displayed on the button display area 362, the result of the quality determination based on the tolerance value is displayed as the inspection result. In addition to the measurement button 362b, a statistics button 362c is displayed in the button display area 362.

  When the measurement worker continues the measurement for another measurement object S, the measurement worker recovers the measurement object S after the measurement from the optical surface plate 111, and the other measurement object S at the appropriate position of the optical surface plate 111. Place on In this state, by operating the measurement button 362b, the height of each part of the measurement object S is measured, and the quality determination of each part of the measurement object S is performed. Also, the measured height is recorded in the recording unit 23. Thereby, the history of the measured height is accumulated in the recording unit 23.

  On the other hand, the measurement worker may want to confirm the history of the height of each portion of the measured object S that has been measured. In this case, the measurement worker operates (for example, clicks) a desired measurement result among the measurement results of the plurality of heights displayed in the image display area 361 or the button display area 362 using the operation unit 330. , Select the desired part. In this state, the measurement worker operates the statistics button 362c to further display statistical data based on one or more heights already recorded in the recording unit 23 for the selected portion in the image display area 361. It can be done.

  Note that statistical data may be displayed when any of the measurement results of the plurality of heights displayed in the image display area 361 or the button display area 362 is operated (for example, clicked). In this case, the measurement worker does not have to operate the statistics button 362c. Therefore, the statistics button 362 c may not be displayed in the button display area 362.

  In the example of FIG. 36, a trend graph is displayed in the image display area 361 as the statistical data SD. The horizontal axis of the statistical data SD indicates the number (number) of the measured object S measured for the past one minute, and the vertical axis of the statistical data SD indicates the height of the selected part of the plurality of measured objects S Show. When the measurement worker determines that any part of the measurement object S is defective in the inspection process, the visual inspection of the statistical data SD for that part makes the determination of the defect one-off. It can be checked if there is any.

  If the determination of failure is single-shot, the measurement may be continued. Therefore, the measurement operator can continue the measurement of the measurement object S by operating the measurement button 362b. When the measurement button 362 b is operated and measurement is continued, the statistical data SD is removed from the image display area 361. On the other hand, when the determination of the defect is not one-off, there is a possibility that the registration information is defective. In such a case, the measurement worker can cope with the cause of the determination of the failure by contacting the measurement manager.

  The measurement manager operates the statistical data mode button 341d on the selection screen 341 of FIG. 8 after finishing the light scanning height measurement process in the measurement mode. In this case, the optical scanning height measuring device 400 starts operation in the statistical data mode. FIG. 37 is a diagram showing an example of a display screen of the display unit 340 in the statistical data mode.

  As shown in FIG. 37, in the statistical data mode, a statistical data screen 370 is displayed on the display unit 340. The statistical data screen 370 includes an extraction condition selection area 371 and a data display area 372. In the extraction condition selection area 371, a pull-down menu and a plurality of buttons are displayed. The measurement manager can extract the history of the desired height in the desired period recorded in the recording unit 23 of FIG. 10 by operating the pull-down menu and the button displayed in the extraction condition selection area 371. .

  When a history of height is extracted in the extraction condition selection area 371, a statistics value button 373, a trend graph button 374, a histogram button 375, and one or more measurement item selection buttons 376 are displayed in the data display area 372. The one or more measurement item selection buttons 376 correspond to one or more portions of the measurement object S whose height has been measured in the measurement mode.

  The measurement manager operates the statistical value button 373 and operates the desired measurement item selection button 376 to select the height statistical value list corresponding to the operated measurement item selection button 376 in the data display area 372. It can be displayed. In the statistics value list of height in FIG. 37, “data number”, “effective measurement number”, “ineffective measurement number”, “OK number”, “NG number”, “NG rate”, “design value” as statistical values. “Upper limit standard value”, “lower limit standard value”, “maximum value”, “minimum value”, “average value”, “range (maximum-minimum)”, “6σ”, “4σ”, “3σ”, “Σ (standard deviation)”, “CP” and “CPK” are included.

  Also, the measurement manager operates the trend graph button 374 and operates the desired measurement item selection button 376 to display a trend graph of the height corresponding to the operated measurement item selection button 376 in the data display area 372. Can be displayed. Furthermore, the measurement manager operates the histogram button 375 and operates the desired measurement item selection button 376 to display a histogram of the height corresponding to the operated measurement item selection button 376 in the data display area 372 It can be done.

  Every time the statistical value button 373, the trend graph button 374, the histogram button 375 or the measurement item selection button 376 is operated, the display of the statistical value list, the trend graph or the histogram in the data display area 372 is switched. The measurement manager can determine whether the registered information is defective by visually recognizing the statistical value list, the trend graph, or the histogram displayed in the data display area 372. In addition, when there is a defect in the registration information, the measurement manager can appropriately correct the registration information in the setting mode.

  In the example of FIG. 36, the statistical data SD is a trend graph, but the present invention is not limited to this. The statistical data SD may be a statistical value list or a histogram as well as statistical data in the statistical data mode. In this case, the types of statistical values in the statistical value list in the statistical data SD may be smaller than the types of statistical values in the statistical value list in the statistical data mode. For example, the statistical value list in the statistical data SD may include only a small number of statistical values such as "maximum value", "minimum value", "mean value" or "σ (standard deviation)".

(13) Modification In the present embodiment, the height of the measurement object S corresponding to the target measurement point is recorded as the measurement item in the recording unit 23, but the present invention is not limited to this. The height of the measurement object S corresponding to the target reference point may be recorded in the recording unit 23. Alternatively, values of other measurement items may be calculated, and the values of the calculated measurement items may be recorded in the recording unit 23.

  FIG. 38 is a block diagram showing a control system 410 of the optical scanning height measuring device 400 according to the modification. The control system 410 of FIG. 38 will be described in terms of differences from the control system 410 of FIG. As shown in FIG. 38, in the modification, the control system 410 further includes a measurement item acquisition unit 20 and an item value calculation unit 21.

  In the setting mode, the measurement item acquisition unit 20 receives the specification of the measurement item related to the position of the designated point acquired by the position information acquisition unit 2. The user can designate a desired measurement item by operating the operation unit 330. Here, the measurement items related to the position of the designated point are various items specified based on the height of the portion of the measurement object S corresponding to the designated point.

  The measurement items include, for example, the maximum height, the minimum height, the average height, the difference between the maximum height and the minimum height, or the difference in height between two points of the designated point. Also, the measurement items include the flatness of the plane based on the designated point, the parallelism, the distance between the two surfaces, or the angle formed by the two surfaces. Alternatively, the measurement item may be identifiable by performing an arbitrary operation using the height of the designated point. The tolerance value corresponding to the received measurement item may be further input to the tolerance value acquisition unit 5.

  The registration unit 6 registers the measurement item received by the measurement item acquisition unit 20 in association with the designated point. When the tolerance value corresponding to the measurement item is input to the tolerance value acquisition unit 5, the registration unit 6 registers the tolerance value received by the tolerance value acquisition unit 5 in association with the measurement item. The item value calculation unit 21 calculates the value of the measurement item registered in the registration unit 6 based on the height corresponding to the designated point calculated by the height calculation unit 15.

  In the measurement mode, the item value calculation unit 21 calculates the value of the measurement item registered in the registration unit 6 based on the height corresponding to the target point calculated by the height calculation unit 15. The value of the measurement item calculated by the item value calculation unit 21 is displayed on the display unit 340 so as to correspond to the target point on the measurement image of the measurement object S under measurement.

  The recording unit 23 records the value of the measurement item calculated by the item value calculation unit 21 each time the measurement instruction unit 22 receives an instruction to start measurement. When the value of the measurement item calculated in the recording unit 23 is recorded, the height calculated by the height calculating unit 15 may not be recorded in the recording unit 23.

  The display instruction unit 24 receives an instruction to display statistical data from the measurement worker. When an instruction to display statistical data is received, the display instruction unit 24 records the measurement image of the measurement object S under measurement, the value of the measurement item calculated corresponding to the target point on the measurement image, and the recording The display unit 340 simultaneously displays statistical data based on the values of one or more measurement items already recorded in the unit 23.

  According to this configuration, the measurement manager designates the measurement item in the setting mode to calculate the value of the measurement item of the corresponding part of the measurement object S even if the measurement operator is not skilled in the measurement mode. The results can be obtained uniformly. This makes it possible to easily measure values on one or more planes specified by the representative heights of the plurality of target points, the height differences of the plurality of target points, or the plurality of target points. As a result, it becomes possible to accurately and easily measure various measurement items including the flatness or the assembly dimension of the measurement object S.

  When the tolerance value corresponding to the measurement item is registered in the registration unit 6, the inspection unit 18 determines the value of the measurement item calculated by the item value calculation unit 21 and the tolerance value registered in the registration unit 6. The inspection object S is further inspected on the basis of. Specifically, when the calculated value of the measurement item is within the tolerance range based on the design value, the inspection unit 18 determines that the measurement object S is a non-defective item. On the other hand, when the value of the calculated measurement item is out of the range of the tolerance based on the design value, the inspection unit 18 determines that the measurement object S is a defective product.

  When it is determined that one of the measurement items is defective in the inspection process, the measurement worker can cause the display unit 340 to display statistical data about the measurement item. In addition, by visually observing the statistical data displayed on the display unit 340, the measurement worker can confirm whether the determination of the failure is one-off.

  The report creation unit 19 creates the report 420 of FIG. 11 based on the inspection result by the inspection unit 18 and the reference image acquired by the measurement image acquisition unit 16. In this case, the report 420 describes the test results of various measurement items other than the height. In the example of FIG. 11, in addition to the height of the portion of the measurement object S, flatness, level difference, and angle are described as measurement items. Thereby, the measurement worker can inspect the assembled dimensions of the measurement object S, and can easily report the inspection result to the measurement manager or other users using the report 420.

(14) Effects In the optical scanning height measuring device 400 according to the present embodiment, a target point is set and set on the measurement image corresponding to the designated point designated on the reference image for each measurement instruction. The height of the portion of the measurement object S corresponding to the target point is automatically calculated. In this case, it is not necessary for the user to place the measurement object S in a state where the position and attitude with respect to the optical scanning height measurement device 400 are accurately adjusted, and it is not necessary to prepare position coordinates of target points in advance. Therefore, the user can measure the heights of the plurality of measurement objects S sequentially by repeatedly placing the measurement object S and the measurement instruction.

  Further, the height calculated for each measurement instruction is recorded by the recording unit 23. The measurement image, the calculated height, and statistical data based on one or more heights already recorded in the recording unit 23 are displayed on the display unit 340. By visually recognizing the measurement image, height and statistical data displayed on the display unit 340, the user can issue a measurement instruction while judging whether the measurement result of the measurement object S is appropriate or not. . As a result, it is possible to efficiently measure the shape of the desired part of the measurement object S.

  Further, in the statistical mode, statistical data 430 is displayed based on the values of one or more measurement items recorded in the recording unit 23 in the measurement mode. Therefore, the user can visually recognize statistical data based on the values of one or more measurement items recorded in the recording unit 23 in the measurement mode in the statistical mode. Thereby, the user can confirm whether or not the measurement result of the measurement object S is appropriate.

(15) Other Embodiments (a) The height calculator 15 determines the height of the portion of the measurement object S based on the origin in the unique three-dimensional coordinate system defined in the optical scanning height measurement device 400. May be calculated. In this case, the user can obtain the absolute value of the height of the portion of the measurement object S in the unique three-dimensional coordinate system. In addition, the height calculation unit 15 calculates the relative value of the height relative to the reference surface in the relative value calculation mode and the absolute value calculation mode in which the absolute value of the height in the unique three-dimensional coordinate system is calculated. It may be selectively operable. In the absolute value calculation mode, the reference point may not be designated because the reference plane is not necessary.

  (B) The height calculation unit 15 may cause the display unit 340 to display an error message such as “FAIL” when the height of the portion of the measurement target S corresponding to the designated point can not be calculated in the setting mode. . In this case, the measurement manager can recognize that the height of the portion of the measurement target S corresponding to the designated point can not be calculated by viewing the display unit 340. Thereby, the measurement manager changes the position of the measurement object S or the optical scanning height measuring device 400 so that the height of the portion of the measurement object S can be calculated, or the position of the designated point designated. Can be changed.

  (C) The optical scanning height measuring device 400 may be configured to be able to insert a drawing and a comment into a reference image acquired in the setting mode or a measurement image acquired in the measurement mode. Thereby, the measurement condition of the measuring object S can be recorded in more detail. Further, the drawing and the comment inserted into the reference image may be registered as registration information.

  For example, a frame line indicating a search area set in the setting mode may be drawn on the reference image. In this case, in the measurement mode, the frame line is displayed on the measurement image. Thereby, in the measurement mode, it becomes easy for the measurement worker to place the measurement object S on the optical surface plate 111 so that the measurement object S fits within the frame line displayed in the measurement image. As a result, it is possible to efficiently correct the deviation of the measurement image data with respect to the reference image data.

  (D) The reference image acquisition unit 1 may cause the display unit 340 to display a bird's-eye view by performing image processing on the acquired reference image. Similarly, the measurement image acquisition unit 16 may display the bird's eye view on the display unit 340 by performing image processing on the acquired measurement image.

  (E) In the above embodiment, the reference image acquisition unit 1 and the measurement image acquisition unit 16 acquire the captured image of the measurement object S by the imaging unit 220 as the reference image and the measurement image, respectively. It is not limited. The reference image acquisition unit 1 and the measurement image acquisition unit 16 may acquire CAD (Computer Aided Design) images of the measurement object S prepared in advance as a reference image and a measurement image, respectively.

  Alternatively, when the measurement light is irradiated to a plurality of portions of the measurement target S, the height calculation unit 15 can calculate the heights of the plurality of portions of the measurement target S. Therefore, the reference image acquisition unit 1 and the measurement image acquisition unit 16 may acquire the distance image of the measurement object S as the reference image and the measurement image based on the heights of the plurality of portions of the measurement object S. .

  When a CAD image or a distance image is used as the reference image, the measurement manager may correctly designate a desired designated point on the CAD image or the distance image while recognizing the three-dimensional shape of the measurement object S. it can. In addition, when a distance image is used as the reference image and the measurement image, the distance image may be generated at high speed by reducing the resolution.

  (F) In the above embodiment, the measurement operator designates the file of registration information at the start of the measurement mode, but the present invention is not limited to this. For example, an ID (Identification) tag corresponding to a file of registration information may be attached to the measurement object S. In this case, when the measurement object S and the ID tag are imaged by the imaging unit 220 at the start of the measurement mode, the file of the registration information corresponding to the tag is automatically designated. According to this configuration, the measurement operator does not have to specify a file of registration information at the start of the measurement mode. Therefore, the process of step S203 of FIG. 15 is omitted.

  (G) In the above embodiment, the height of the measurement object S is calculated by the spectral interference method, but the present invention is not limited to this. The height of the measurement object S may be calculated by another method such as a white light interference method, a confocal method, a triangular distance measurement method, or a TOF (Time Of Flight) method.

  (H) In the above embodiment, the operation mode of the light scanning height measurement device 400 includes a plurality of operation modes, and the light scanning height measurement device 400 operates in the operation mode selected by the user. Is not limited to this. The operation mode of the light scanning height measurement device 400 does not include a plurality of operation modes and includes only a single operation mode, and the light scanning height measurement device 400 may operate in the operation mode. For example, the operation mode of the light scanning height measurement device 400 does not include the height gauge mode, and the light scanning height measurement device 400 may operate in the setting mode and the measurement mode. Further, when the optical scanning height measuring device 400 can obtain registration information from the outside, the operation mode of the optical scanning height measuring device 400 does not include the setting mode, and the optical scanning height measuring device 400 does not include the measuring mode. You may operate at

  (I) In the above embodiment, the light guide 240 includes the optical fibers 241 to 244 and the fiber coupler 245, but the present invention is not limited thereto. The light guiding unit 240 may include a half mirror instead of the optical fibers 241 to 244 and the fiber coupler 245.

(16) Correspondence Between Each Component of the Claim and Each Part of the Embodiment Hereinafter, an example of the correspondence between each component of the claim and each part of the embodiment will be described, but the present invention is not limited to the following example. It is not limited. As each component of a claim, other various elements having the configuration or function described in the claim can also be used.

  In the above embodiment, the measurement object S is an example of a measurement object, the registration unit 6 is an example of an information acquisition unit and a registration information generation unit, and the measurement image acquisition unit 16 is an example of a measurement image acquisition unit. The light emitting portion 231 is an example of the light emitting portion. The deflecting units 271 and 272 are examples of the deflecting unit, the light receiving unit 232 d is an example of the light receiving unit, the measurement instructing unit 22 is an example of the measurement instructing unit, and the target point setting unit 17 is an example of the target point setting unit. The drive control unit 3 is an example of the drive control unit.

  The height calculation unit 15 is an example of a height calculation unit or an item value calculation unit, the measurement instruction unit 22 is an example of a recording unit, and the display unit 340 is an example of a display unit. Is an example of the optical scanning height measuring device. The reference image acquisition unit 1 is an example of a reference image acquisition unit, the position information acquisition unit 2 is an example of a position information acquisition unit, and the measurement item acquisition unit 20 is an example of an item information acquisition unit. Is an example of the tolerance acquisition unit, and the inspection unit 18 is an example of the inspection unit.

  DESCRIPTION OF SYMBOLS 1 ... Reference | standard image acquisition part, 2 ... Position information acquisition part, 3 ... Drive control part, 4 ... Reference surface acquisition part, 5 ... Tolerance value acquisition part, 6 ... Registration part, 7 ... Deflection direction acquisition part, 8 ... Detection part , 9 ... image analysis unit, 10 ... reference position acquisition unit, 11 ... light reception signal acquisition unit, 12 ... distance information calculation unit, 13 ... coordinate calculation unit, 14 ... determination unit, 15 ... height calculation unit, 16 ... measurement image Acquisition part, 17 ... Target point setting part, 18 ... Inspection part, 19 ... Report preparation part, 20 ... Measurement item acquisition part, 21 ... Item value calculation part, 22 ... Measurement instruction part, 23 ... Recording part, 24 ... Display Instruction unit 100 Stand unit 110 Installation unit 111 Optical surface plate 120 Holding unit 130 Lifting unit 131, 255a, 255b, 264, 271a, 272a Drive unit 132, 256a, 256b, 265, 273, 274 ... drive circuit, 133, 257a, 57b, 266, 275, 276 ... reading unit, 200 ... measuring head, 210 ... control substrate, 220 ... imaging unit, 230 ... optical unit, 231 ... light emitting unit, 232 ... measuring unit, 232a, 232c ... lens, 232b ... Spectroscopic part, 232 d: light receiving part, 240: light guiding part, 241 to 244: optical fiber, 245: fiber coupler, 245 a to 245 d: port, 245 e: main part, 246: lens, 250: reference part, 251, 261 Fixed part, 251g ... Linear guide, 252a, 252b, 262 ... Movable part, 253 ... Fixed mirror, 254a, 254b, 254c ... Movable mirror, 260 ... Focusing part, 263 ... Movable lens, 270 ... Scanning part, 271, 272 ... Deflecting unit, 271b ... Reflecting unit, 300 ... Processing device, 310 ... Control unit, 320 ... Storage unit, 330 ... Operation unit, 34 ... Display section, 341 ... Selection screen, 341a ... Setting button, 341b, 362b ... Measurement button, 341c ... Height gauge button, 341d ... Statistics data mode button, 350 ... Setting screen, 351, 361 ... Image display area, 352, 362 ... Button display area, 352a ... Search area button, 352b ... Pattern image button, 352c ... Setting complete button, 352d ... Point specification button, 352e ... Reference surface setting button, 352g ... Tolerance value button, 352h ... Reference point setting button, 352i ... Measurement point setting button, 360 ... measurement screen, 362a ... file read button, 362c ... statistics button, 370 ... statistical data screen, 371 ... extraction condition selection area, 372 ... data display area, 373 ... statistical value button, 374 ... trend graph Button, 375 ... histogram button, 376 ... measurement item selection button, 400 ... light scanning height measuring device, 410 ... control system, 420 ... report, 421 ... name display column, 422 ... image display column, 423 ... status display column, 424 ... result display column, 425: warranty display column, MI: measurement image, PI: pattern image, RI: reference image, S: measurement object, SD: statistical data, SI: image, SR: search area, V: measurement area

Claims (8)

An information acquisition unit that acquires position information indicating a reference image including a measurement object and a position of a designated point designated on the reference image;
A measurement image acquisition unit that acquires a measurement image including a measurement object;
A light emitting unit that emits light;
A deflecting unit that deflects the light emitted from the light emitting unit and irradiates it onto the object to be measured;
A light receiving unit that receives light from an object to be measured and outputs a light receiving signal indicating a light receiving amount;
A measurement instruction unit that receives a measurement instruction;
A target point setting unit configured to set a target point corresponding to a designated point on a reference image based on the reference image acquired by the information acquisition unit in response to a measurement instruction;
A drive control unit that controls the deflection unit such that light is irradiated to a portion of the measurement target corresponding to the target point set by the target point setting unit;
The height of the portion of the measurement object corresponding to the target point is a measurement item based on the deflection direction of the deflection unit or the irradiation position of the light deflected by the deflection unit and the light reception signal output by the light reception unit. An item value calculation unit that calculates as a value;
A recording unit that records the value of the measurement item calculated by the item value calculation unit for each measurement instruction;
A display unit configured to display a measurement image, values of measurement items calculated by the item value calculation unit, and statistical data based on values of one or more measurement items already recorded in the recording unit; Optical scanning height measuring device. Configured to selectively operate in setup mode and measurement mode,
A reference image acquisition unit that acquires a reference image including a reference target image in the setting mode;
A position information acquisition unit that generates position information by receiving designation of a designated point on the reference image acquired by the reference image acquisition unit in the setting mode;
In the setting mode, registration information is generated by correlating reference image data indicating the reference image acquired by the reference image acquisition unit with position information generated by the position information acquisition unit, and the generated registration information is And a registration information generation unit to be given to the information acquisition unit,
The information acquisition unit, the measurement image acquisition unit, the measurement instruction unit, the target point setting unit, the drive control unit, the item value calculation unit, the recording unit, and the display unit operate in the measurement mode.
The optical scanning height measurement device according to claim 1, wherein, in the measurement mode, the information acquisition unit acquires the reference image and the position information from the registration information generated in the setting mode by the registration information generation unit. . A reference image including a measurement object, position information indicating a position of a designated point designated on the reference image, and an information acquisition unit for acquiring a measurement item;
A measurement image acquisition unit that acquires a measurement image including a measurement object;
A light emitting unit that emits light;
A deflecting unit that deflects the light emitted from the light emitting unit and irradiates it onto the object to be measured;
A light receiving unit that receives light from an object to be measured and outputs a light receiving signal indicating a light receiving amount;
A measurement instruction unit that receives a measurement instruction;
A target point setting unit configured to set a target point corresponding to a designated point on a reference image based on the reference image acquired by the information acquisition unit in response to a measurement instruction;
A drive control unit that controls the deflection unit such that light is irradiated to a portion of the measurement target corresponding to the target point set by the target point setting unit;
The height of the portion of the measurement object corresponding to the target point is calculated based on the deflection direction of the deflection unit or the irradiation position of the light deflected by the deflection unit and the light reception signal output by the light reception unit Calculation unit,
An item value calculation unit that calculates the value of the measurement item based on the measurement item acquired by the information acquisition unit and the height corresponding to the target point calculated by the height calculation unit;
A recording unit that records the value of the measurement item calculated by the item value calculation unit for each measurement instruction;
A display unit configured to display a measurement image, values of measurement items calculated by the item value calculation unit, and statistical data based on values of one or more measurement items already recorded in the recording unit; Optical scanning height measuring device. The light scanning according to claim 3, wherein the values of the measurement items include values relating to one or more planes specified by representative heights of a plurality of designated points, height differences of a plurality of designated points, or a plurality of designated points. Height measuring device. Configured to selectively operate in setup mode and measurement mode,
A reference image acquisition unit that acquires a reference image including a reference target image in the setting mode;
A position information acquisition unit that generates position information by receiving designation of a designated point on the reference image acquired by the reference image acquisition unit in the setting mode;
A measurement item acquisition unit for acquiring a measurement item based on the designated point received by the position information acquisition unit in the setting mode;
In the setting mode, registration is performed by correlating reference image data indicating a reference image acquired by the reference image acquisition unit, position information generated by the position information acquisition unit, and measurement items acquired by the measurement item acquisition unit. And a registration information generation unit that generates information and supplies the generated registration information to the information acquisition unit.
The information acquisition unit, the measurement image acquisition unit, the measurement instruction unit, the target point setting unit, the drive control unit, the height calculation unit, the item value calculation unit, the recording unit, and the display unit Operate in mode
5. The measurement mode according to claim 3, wherein the information acquisition unit acquires the reference image, the position information, and the measurement item from the registration information generated in the setting mode by the registration information generation unit. Optical scanning height measuring device. A tolerance acquisition unit that acquires, in the setting mode, the input of the tolerance of the measurement item of the part of the measurement object corresponding to the designated point;
The inspection mode further includes an inspection unit that determines the quality of the measurement object based on the value of the measurement item calculated by the item value calculation unit and the tolerance value acquired by the tolerance value acquisition unit in the measurement mode. The optical scanning height measuring device according to claim 2 or 5. Configured to operate selectively in statistical mode,
7. The optical scanning height measurement according to claim 2, wherein the display unit displays statistical data based on the value of one or more measurement items recorded in the recording unit in the measurement mode in the statistical mode. apparatus. The optical scanning height measurement device according to any one of claims 1 to 7, wherein the statistical data includes a histogram, a trend graph or a statistical value list.

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