JP2019197010A - Probe card storage case - Google Patents

Abstract

To prevent a risk of damaging a probe card board because the probe card storage case has been made of metal and hence has been energized conventionally.SOLUTION: A probe card storage case is formed from an electrification prevention member. The probe card storage case comprises one case part for storing a probe card and the other case part for blocking an opening of the one case part, and the one case part and the other case part are formed from an electrification prevention member.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a case for storing a probe card for semiconductor wafer inspection.

(1. Conventional explanation)

  In the semiconductor manufacturing field, in a final inspection in a post process, a manufactured semiconductor chip (wafer) is contacted with a probe card attached to a prober inspection machine, and the quality of the semiconductor chip is measured. The semiconductor chip is required to have extremely high quality, and the probe (probe) of the probe card is also highly accurate.

  In recent years, silicon wafers have gradually become larger in diameter, so that the size of the probe card has been increased, the weight of the probe card itself has become 20 kg or more, and movement of the probe card requires movement in the probe card storage case.

  In addition, even if extremely light probe cards of 1.5 kg or less will become mainstream in the future, there is a high need for a probe card storage case for moving and transporting precision instruments and protecting them from dust and the like.

  3 and 4 show a conventional probe card storage case 1 made of a metal member such as aluminum, and a probe card 2 stored in the storage case 1.

  The storage case 1 stores the probe card 2, for example, one case portion made of an aluminum member having an opening for inserting a probe card, and aluminum that covers the opening of the one case portion in an openable and closable manner. For example, the one case part is composed of a lower case part 3 which is placed on the floor and has an open upper surface on which the probe card 2 is accommodated, and the other case part. The part is composed of an upper case part 4 that covers the upper surface opening of the lower case part 3 so as to be freely opened and closed.

The one case portion and the other case portion are formed so that the probe card 2 can be stored in the storage case 1 by closing the opening of the one case portion with the other case portion. Is done.

The lower case portion 3 includes, for example, a plate body serving as a rectangular bottom plate 3a and a side wall portion 3b erected from an outer peripheral edge portion of the bottom plate 3a, and is formed in a rectangular box shape. The probe card 2 is placed at a desired height from the bottom surface 3a at the edge of the peripheral portion of the upper surface of the bottom plate 3a, for example, at four positions, and is supported by positioning. A stand 5 is provided.

  For example, as shown in FIG. 4, the probe card 2 includes a disk-shaped probe card substrate 6, a large number of probes (probes) 7 provided at the center of the lower surface of the probe card substrate 6, For example, a stiffener (reinforcing material) 8 formed in a ring shape for reinforcing the substrate is fixed to the upper surface of the probe card substrate 6.

  The stiffener 8 is formed larger than the outer periphery of the probe card substrate 6 and is supported on the mounting table 5 of the storage case 1 by an edge protruding outward from the probe card substrate 6. Will come to be.

  Note that the upper surface of the mounting table 5 may be formed of a protective member such as an elastic member such as rubber.

  Moreover, the said upper side case part 4 consists of the board | plate body used as the rectangular ceiling board 4a, and the side wall part 4b suspended from the outer peripheral edge part of this ceiling board 4a, for example. Then, the upper end of the side wall portion 3b of the lower case portion 3 and the lower end of the side wall portion 4b of the upper case portion 4 come into contact with each other, so that the upper surface of the lower case portion 3 is moved by the upper case portion 4. It becomes blocked.

  Further, a pressing member 9 protruding downward is formed on the lower surface of the ceiling plate 4a, and when the upper case part 4 is closed by the lower case part 3, the pressing member 9 is connected to the lower case part. The probe card 2 is placed on the mounting table 5 so that the probe card 2 can be fixed to the storage case 1 by pressing down the stiffener 8 of the probe card 2 from above. Note that the lower end of the pressing member 9 may be formed by a protective member 10 such as an elastic member such as rubber.

  Note that the means for fixing the probe card 2 to the storage case 1 is not limited to the pressing member 9 but may be fixed by means of fixing means (not shown) provided on the mounting table 5 or the lower case portion 3. It may be clamped and fixed.

  Reference numeral 11 denotes a hinge portion provided on one side surface of the storage case 1, and the hinge portion 11 connects one side surface of the lower case portion 3 and one side surface of the upper case portion 4. The upper case part 4 can be opened and closed freely.

  The lower case portion 3 and the upper case portion 4 may be connected by other means or may be connected so as to be separable.

  Further, after the lower case portion 3 is closed by the upper case portion 4, the lower case portion 3 and the upper case portion 4 are fixed by fixing means (not shown).

  Moreover, you may provide a handle (not shown) in the one side surface or other side surface of the said storage case 1, as needed.

  For example, there is Patent Document 1 as a conventional probe card storage case.

Utility Model Registration No. 3171687

  Since the conventional probe card storage case 1 is made of a metal member such as aluminum, the probe card substrate stored in the storage case may be energized to damage the substrate or cause malfunction. .

  Further, when the storage case is not formed of a metal member but is formed of a resin member, static electricity may accumulate in the storage case and the probe card may be damaged.

In particular, even if one of a large number of probes (probes) is damaged or cannot be used, there is a possibility that it cannot be used as a whole. Therefore, the storage case is highly important.

  The present invention aims to eliminate the above drawbacks.

  The probe card storage case of the present invention is formed of an antistatic member.

  The probe card storage case of the present invention comprises one case portion for storing the probe card and the other case portion that closes the opening of the one case portion, and the one case portion and the other case. The portion is formed of an antistatic member.

Further, the antistatic member is a member having an electric resistance value in a range of 10 ⁺⁵ to 10 ⁺¹⁴ Ω.

The antistatic member is a member having an electric resistance value in a range of 10 ⁺¹⁰ to 10 ⁺¹³ Ω.

  The antistatic member is made of an antistatic resin.

  Further, the antistatic part resin is made of a resin formed by mixing carbon particles or carbon fibers.

  The antistatic part resin is made of a resin formed by mixing metal particles.

  Further, a transparent part or a semi-transparent part is provided in all or part of the one case part and the other case.

  According to the present invention, the probe card is not energized and can be prevented from being damaged by static electricity.

  In addition, dust does not stick to the storage case, and there is no worry of dust on the probe card when taking out the probe card.

  Further, the probe card can be identified while the probe card is stored in the storage case.

It is a vertical side view in the state where the probe card of the probe card storage case of the present invention was stored. It is a vertical side view of the other Example of the probe card storage case of this invention. It is a vertical side view of the conventional probe card storage case. It is a vertical side view of a probe card.

  Embodiments of the present invention will be described below with reference to the drawings.

  In addition, the same code | symbol is attached | subjected to the same part as the said prior art example, and description is abbreviate | omitted.

(2. Description of the present invention)

  FIG. 1 shows a probe card storage case 12 of the present invention. In the probe card storage case 12, the conventional probe card storage case 1 is not formed of a metal member but is formed of an antistatic member having a desired electrical resistance.

The desired electrical resistance value (surface resistivity, surface resistance value) is a range in which no current is applied to the substrate stored from the probe card storage case and the substrate is not affected by static electricity. For example, 10 ⁺⁵ The range of 10 ⁺¹⁴ Ω, particularly 10 ⁺¹⁰ to 10 ⁺¹³ Ω is preferred.

  The antistatic member is made of, for example, an antistatic resin, and the antistatic resin is, for example, a synthetic resin (plastic) mixed with a desired amount of a conductive material such as carbon particles or carbon particles such as carbon particles or carbon fibers. It becomes more.

  The antistatic resin is formed by mixing a conductive material with the synthetic resin so that the electric resistance value falls within the range of the desired value.

(3. Explanation of transparent part)

  In addition, as shown in FIG. 2, the plate body of the case part on the side facing the probe 7 of the stored probe card 2 among the one case part and the other case part of the probe card storage case 12, for example, The bottom plate 3a of the lower case portion 3 may be provided with a transparent portion 13 formed so as to be able to observe at least all the probes 7 stored in the storage case 1 from outside the storage case 1. .

  The transparent portion 13 includes, for example, an opening portion 14 provided in the center portion of the bottom plate 3a of the integrally formed lower case portion 3, and a transparent member 15 that closes the opening portion 14. Is provided at a position facing the probe 7 and is formed in a size that allows observation of the entire area where the probe is installed. For example, the size is the same as or larger than the probe installation area. Through the transparent member 15, all of the probes 7 of the internal probe card 2 can be observed from the outside of the probe card storage case 12.

  The entire lower case part 3 may be transparent. Moreover, in the integral molding of the lower case part 3, since the transparency of the transparent part 13 may be reduced or distorted, the transparent part 13 may be a separate member or a separate material from the bottom plate 3a. preferable.

  Moreover, transparent parts, such as the said transparent part 13 (or transparent member 15), consist of glass, such as tempered glass, transparent resin etc., for example, as this transparent resin, it is high in transparency and low in deformation. Polycarbonate resin, acrylic resin, and polypropylene resin are preferable.

  Note that all or part of the one case portion and the other case portion may be transparent or translucent.

  The outer surface 13a of the transparent portion 13 is preferably provided so as to be located above the floor surface 3c of the probe card storage case 12 to prevent the transparent portion 13 from being damaged.

  The transparent portion 13 may also be formed from the conductive member.

  Since the probe card storage case of the present invention is not made of metal, electricity does not flow directly to the probe card substrate stored in the storage case. Therefore, there is no possibility of damaging the probe card substrate or causing malfunction.

In addition, since static electricity does not accumulate, the probe card can be prevented from being damaged.

Further, since static electricity does not accumulate, dust does not stick to the outer periphery of the storage case, and therefore, when removing the probe card from the storage case, the probe card does not get dust.

DESCRIPTION OF SYMBOLS 1 Probe card storage case 2 Probe card 3 Lower case part 3a Bottom plate 3b Side wall part 3c Floor surface mounting surface 4 Upper case part 4a Ceiling board 4b Side wall part 5 Mounting base 6 Probe card board 7 Probe 8 Stiffener 9 Holding member 10 Protection Member 11 Hinge portion 12 Probe card storage case 13 Transparent portion 13a Outer surface 14 Opening portion 15 Transparent member

Claims (8)

  A probe card storage case formed of an antistatic member. Containing the probe card, it is composed of one case part and the other case part closing the opening of the one case part.
The one case part and the other case part are formed of an antistatic member. The probe card storage case according to claim 1 or 2, wherein the antistatic member is a member having an electric resistance value in a range of 10 ⁺⁵ to 10 ⁺¹⁴ Ω. 3. The probe card storage case according to claim 1, wherein the antistatic member is a member having an electric resistance value in a range of 10 ⁺¹⁰ to 10 ⁺¹³ Ω.   The probe card storage case according to any one of claims 1 to 4, wherein the antistatic member is made of an antistatic resin.   6. The probe card storage case according to claim 5, wherein the antistatic portion resin is made of a resin formed by mixing carbon particles or carbon fibers.   6. The probe card storage case according to claim 5, wherein the antistatic part resin is made of a resin formed by mixing metal particles.   The probe card storage case according to any one of claims 1 to 7, wherein a transparent part or a semi-transparent part is provided in all or a part of the one case part and the other case.

Images