JP2019182737A - Hexagonal boron nitride powder and manufacturing method therefor - Google Patents
Hexagonal boron nitride powder and manufacturing method therefor Download PDFInfo
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Abstract
【課題】 製造方法に起因して、高純度化が困難な、低アスペクト比の六方晶窒化ホウ素粉末において、粒子表面に存在するカルシウム等の金属元素や塩素等の不純物および可溶性ホウ素が著しく低減され、また、含有する水分量も極めて少ない六方晶窒化ホウ素粉末を提供する。【解決手段】 単粒子の平均アスペクト比が、1.5〜10の範囲にあり、0.5mol/Lの濃度の硫酸水溶液に25℃で120分浸漬後における、溶出ホウ素量が、B2O3に換算して100ppm以下、溶出カルシウム量が50ppm以下、溶出ナトリウム量および溶出銅量がそれぞれ5ppm以下、160℃の水に30時間浸漬後の溶出塩素量が10ppm以下、更に、含水率が0.1質量%以下である六方晶窒化ホウ素粉末であり、特に、湿度90%、温度50℃の雰囲気下で、10日間放置後の前記溶出ホウ素量の増加率が、10%以下であるものが好ましい。【選択図】 なしPROBLEM TO BE SOLVED: To provide a hexagonal boron nitride powder having a low aspect ratio, which is difficult to be highly purified due to a production method, in which metal elements such as calcium, impurities such as chlorine, and soluble boron present on the particle surface are significantly reduced. Further, the present invention provides a hexagonal boron nitride powder containing very little water. SOLUTION: The average aspect ratio of single particles is in the range of 1.5 to 10, and the amount of eluted boron after being immersed in a 0.5 mol / L sulfuric acid aqueous solution at 25 ° C for 120 minutes is converted to B2O3. 100 ppm or less, the amount of eluted calcium is 50 ppm or less, the amount of eluted sodium and the amount of eluted copper are each 5 ppm or less, the amount of eluted chlorine after immersion in water at 160 ° C. for 30 hours is 10 ppm or less, and the water content is 0.1 mass or less. % Or less, and in particular, a powder in which the rate of increase in the amount of the eluted boron after standing for 10 days in an atmosphere at a humidity of 90% and a temperature of 50 ° C. is 10% or less. [Selection diagram] None
Description
本発明は、新規な六方晶窒化ホウ素粉末およびその製造方法に関する。 The present invention relates to a novel hexagonal boron nitride powder and a method for producing the same.
六方晶窒化ホウ素粉末は、一般に黒鉛と同様の六方晶系の層状構造を有する白色粉末であり、高熱伝導性、高電気絶縁性、高潤滑性、耐腐食性、離型性、高温安定性、化学的安定性等の多くの特性を有する。そのため、六方晶窒化ホウ素粉末を充填した樹脂組成物は、成形加工することで熱伝導性絶縁シートとして好適に使用されている。 Hexagonal boron nitride powder is generally a white powder having a hexagonal layered structure similar to graphite, and has high thermal conductivity, high electrical insulation, high lubricity, corrosion resistance, release properties, high temperature stability, It has many properties such as chemical stability. Therefore, the resin composition filled with hexagonal boron nitride powder is suitably used as a heat conductive insulating sheet by molding.
上記六方晶窒化ホウ素の製造方法としては、
(i)ホウ素を窒素、アンモニア等を用いて直接窒化する方法、
(ii)ハロゲン化ホウ素をアンモニアやアンモニウム塩と反応させる方法、
(iii)ホウ酸、酸化ホウ素等のホウ素化合物とメラミン等の含窒素化合物とを800℃程度の温度で反応させるメラミン法、
(iv)窒素雰囲気下、含酸素ホウ素化合物とカーボン源を1600℃以上の高温に加熱して、含酸素ホウ素化合物を還元窒化する還元窒化法、
(V)炭化ホウ素を窒素雰囲気下で焼成した後、三酸化ホウ素と混合して再焼成する方法、
などが挙げられる。
As a method for producing the hexagonal boron nitride,
(I) a method of directly nitriding boron using nitrogen, ammonia or the like,
(Ii) a method of reacting boron halide with ammonia or ammonium salt,
(Iii) a melamine method in which a boron compound such as boric acid and boron oxide is reacted with a nitrogen-containing compound such as melamine at a temperature of about 800 ° C.
(Iv) a reduction nitriding method in which the oxygen-containing boron compound and the carbon source are heated to a high temperature of 1600 ° C. or higher in a nitrogen atmosphere to reduce and nitride the oxygen-containing boron compound;
(V) A method in which boron carbide is fired in a nitrogen atmosphere and then mixed with boron trioxide and refired.
Etc.
上記方法により得られる六方晶窒化ホウ素粉末は、結晶構造に由来する鱗片状粒子よりなる一次粒子を含み、該鱗片状粒子は熱的異方性を有している。通常、上記鱗片状粒子を含む窒化ホウ素粉末を充填剤として用いた熱伝導性絶縁シートの場合、該熱伝導性絶縁シートの面方向に鱗片状粒子が配向するため、鱗片状粒子の熱伝導率の低いc軸方向に熱が伝わり、該熱伝導性絶縁シートの厚さ方向の熱伝導率は低い。また、鱗片状の六方晶窒化ホウ素粒子は、凝集し易く、樹脂に充填した際、凝集体の内部には気泡を含有し、得られる樹脂成形体の絶縁耐性を低下させるという問題をも有する。 The hexagonal boron nitride powder obtained by the above method includes primary particles composed of scaly particles derived from a crystal structure, and the scaly particles have thermal anisotropy. Usually, in the case of a thermally conductive insulating sheet using boron nitride powder containing the above flaky particles as a filler, since the flaky particles are oriented in the surface direction of the thermally conductive insulating sheet, the thermal conductivity of the flaky particles Heat is transmitted in the low c-axis direction, and the thermal conductivity in the thickness direction of the thermally conductive insulating sheet is low. In addition, the scale-like hexagonal boron nitride particles are easy to aggregate, and when filled in the resin, there is a problem that bubbles are contained in the aggregate and the insulation resistance of the resulting resin molded product is lowered.
このような鱗片状の構造を有する六方晶窒化ホウ素粒子の熱的異方性を改善するために、該粒子のアスペクト比が低い、いわゆる「厚肉粒子」を含む六方晶窒化ホウ素粉末を得る試みが成されている(特許文献1参照)。即ち、上記低アスペクト比の六方晶窒化ホウ素粉末は、樹脂内で配向し難く、また、凝集体が生成したとしても、その凝集は弱いため、フィラーとして使用した場合、樹脂内に高分散させることができ、また、配向が少ないことから、樹脂成形体の熱伝導性を著しく低下させることがなく、また、気泡による絶縁耐性の低下も抑制することができる。 In order to improve the thermal anisotropy of hexagonal boron nitride particles having such a scale-like structure, an attempt to obtain hexagonal boron nitride powder containing so-called “thick particles” with a low aspect ratio of the particles (See Patent Document 1). That is, the hexagonal boron nitride powder having a low aspect ratio is difficult to be oriented in the resin, and even if an aggregate is formed, the aggregation is weak. Therefore, when used as a filler, the powder should be highly dispersed in the resin. In addition, since the orientation is small, the thermal conductivity of the resin molded body is not significantly reduced, and a decrease in insulation resistance due to bubbles can be suppressed.
しかしながら、六方晶窒化ホウ素の厚肉粒子は、原料として含カルシウム化合物を必須とし、生成物中に未反応の含カルシウム化合物等のカルシウム成分が大量に残存する。上記カルシウム成分を除去するため、塩酸水溶液による洗浄が行われるが、この操作により、塩素も六方晶窒化ホウ素粉末に付着し、不純物として残存する。 However, the thick particles of hexagonal boron nitride require a calcium-containing compound as a raw material, and a large amount of calcium components such as unreacted calcium-containing compounds remain in the product. In order to remove the calcium component, washing with an aqueous hydrochloric acid solution is performed. By this operation, chlorine also adheres to the hexagonal boron nitride powder and remains as an impurity.
従来、上記酸洗後、水洗工程を設けてこれらの不純物を除去することは行われているが、かかる工程において、得られる六方晶窒化硼素粉末について、前記高度な絶縁耐性を意識したレベルの洗浄は成されていないのが現状である。 Conventionally, after the pickling, a water washing step is provided to remove these impurities. In such a step, the obtained hexagonal boron nitride powder is washed at a level that is conscious of the high insulation resistance. Is not made.
一方、六方晶窒化ホウ素粉末において、可溶性ホウ素も、前記樹脂に充填した際の絶縁耐性を低下させるために問題となる。かかる可溶性ホウ素は、六方晶窒化ホウ素粉末の乾燥時に、窒化ホウ素が加水分解を起こして生成することが報告されている(特許文献2)。上記特許文献2は、主に、立方晶窒化ホウ素の原料としての六方晶窒化ホウ素粉末を提供するものであるが、可溶性ホウ素の生成を防止するために、100℃以下の低温、実施例においては、80℃で長時間乾燥することが記載されている。 On the other hand, in the hexagonal boron nitride powder, soluble boron also poses a problem because it reduces the insulation resistance when the resin is filled. It has been reported that such soluble boron is produced by hydrolysis of boron nitride when the hexagonal boron nitride powder is dried (Patent Document 2). The above-mentioned Patent Document 2 mainly provides hexagonal boron nitride powder as a raw material for cubic boron nitride, but in order to prevent the formation of soluble boron, the temperature is 100 ° C. or lower. And drying at 80 ° C. for a long time.
しかしながら、上記乾燥は、十分に水分を除去することができず、たとえ可溶性ホウ素を低減できたとしても、本発明の対象とするフィラーとしての用途において、樹脂に充填した際の水分による気泡の発生の原因となり、絶縁耐性の低下をもたらす虞がある。 However, the above-mentioned drying does not sufficiently remove moisture, and even if soluble boron can be reduced, generation of bubbles due to moisture when the resin is filled in use as a filler targeted by the present invention. This may cause a decrease in insulation resistance.
また、上記水分の除去するために、得られた六方晶窒化ホウ素粉末を再度高温加熱処理する方法も考えられるが、その分、製造工程が煩雑になるばかりでなく、製造コストも挙がることが懸念される。しかも、過度の加熱は、六方晶窒化ホウ素粉末の粒子表面に酸化膜が生成し、また、更に高温での加熱を行うと、粒子同士の焼結が起こり、気泡を含む焼結粒子の発生を招く虞もある。 Moreover, in order to remove the water, a method of heat-treating the obtained hexagonal boron nitride powder again can be considered, but not only the manufacturing process becomes complicated, but also the manufacturing cost may increase. Is done. Moreover, excessive heating generates an oxide film on the particle surface of the hexagonal boron nitride powder, and further heating at higher temperatures causes sintering of the particles and generation of sintered particles containing bubbles. There is also a risk of inviting.
従って、本発明の目的は、その製造方法に起因して、高純度化が困難な、低アスペクト比の六方晶窒化ホウ素粉末において、粒子表面に存在するカルシウム等の金属元素や塩素等の不純物および可溶性ホウ素が著しく低減され、また、含有する水分量も極めて少ない六方晶窒化ホウ素粉末を提供することにある。 Accordingly, an object of the present invention is to reduce impurities in impurities such as metal elements such as calcium and chlorine present on the particle surface in the hexagonal boron nitride powder having a low aspect ratio, which is difficult to achieve high purity due to the manufacturing method. It is an object of the present invention to provide a hexagonal boron nitride powder in which soluble boron is remarkably reduced and the water content is extremely small.
本発明者等は、上記課題を解決するため鋭意検討を行った。その結果、含酸素ホウ素化合物、カーボン源および含酸素カルシウム化合物を使用した還元窒化反応により、特定の低アスペクト比を有する粗六方晶窒化ホウ素粉末を得た後、該粗六方晶窒化ホウ素粉末に対して、特定の洗浄方法および特定の乾燥方法を適用することにより、前記目的を全て達成し得る新規な六方晶窒化ホウ素粉末が得られることを見出し、本発明を完成するに至った。 The present inventors have intensively studied to solve the above problems. As a result, after obtaining a rough hexagonal boron nitride powder having a specific low aspect ratio by a reductive nitriding reaction using an oxygen-containing boron compound, a carbon source and an oxygen-containing calcium compound, Thus, it has been found that by applying a specific cleaning method and a specific drying method, a novel hexagonal boron nitride powder capable of achieving all of the above objects can be obtained, and the present invention has been completed.
即ち、本発明によれば、単粒子の平均アスペクト比が、1.5〜10の範囲にあり、0.5mol/Lの濃度の硫酸水溶液に25℃で120分浸漬後における、溶出ホウ素量が、B2O3に換算して100ppm以下、溶出カルシウム量が50ppm以下、溶出ナトリウム量および溶出銅量がそれぞれ5ppm以下、160℃の水に30時間浸漬後の溶出塩素量が10ppm以下、更に、含水率が0.1質量%以下であることを特徴とする六方晶窒化ホウ素粉末が提供される。 That is, according to the present invention, the average aspect ratio of single particles is in the range of 1.5 to 10, and the amount of dissolved boron after immersion in a sulfuric acid aqueous solution having a concentration of 0.5 mol / L at 25 ° C. for 120 minutes. In terms of B2O3, 100 ppm or less, eluted calcium amount is 50 ppm or less, eluted sodium amount and eluted copper amount are each 5 ppm or less, eluted chlorine amount after immersion in water at 160 ° C. for 30 hours is 10 ppm or less, and the moisture content is A hexagonal boron nitride powder characterized by being 0.1% by mass or less is provided.
尚、上記各不純物の溶出量は、六方晶窒化ホウ素粉末の質量を基準とした値である。 The amount of each impurity eluted is a value based on the mass of the hexagonal boron nitride powder.
前記六方晶窒化ホウ素粉末は、平均粒径が5〜20μmの範囲にあることが好ましい。 The hexagonal boron nitride powder preferably has an average particle size in the range of 5 to 20 μm.
また、前記六方晶窒化ホウ素粉末は、湿度90%、温度50℃の雰囲気下で、10日間放置後の前記溶出ホウ素量の増加率が、10%以下という特性をも有する。 Further, the hexagonal boron nitride powder has a characteristic that the increase rate of the eluted boron amount after standing for 10 days in an atmosphere of 90% humidity and 50 ° C. is 10% or less.
本発明の上記六方晶窒化ホウ素粉末は、含酸素ホウ素化合物、カーボン源および含酸素カルシウム化合物を含む原料混合物を窒素雰囲気下にて1700〜2200℃の温度に加熱して還元窒化することにより、平均アスペクト比が10以下の粗六方晶窒化ホウ素粉末を製造した後、上記粗六方晶窒化ホウ素粉末を塩酸水溶液にて洗浄し、次いで、25℃における比抵抗が0.2MΩ・cm以上の純水にて洗浄し、更に、洗浄後の六方晶窒化ホウ素粉末を20kPaA以下、特に10kPaA以下の圧力下、温度140℃〜500℃で、8時間以上、特に、10時間以上加熱処理することにより得ることが可能である。 The above hexagonal boron nitride powder of the present invention is obtained by subjecting a raw material mixture containing an oxygen-containing boron compound, a carbon source and an oxygen-containing calcium compound to a temperature of 1700 to 2200 ° C. in a nitrogen atmosphere and reducing and nitriding the average. After producing a crude hexagonal boron nitride powder having an aspect ratio of 10 or less, the crude hexagonal boron nitride powder is washed with an aqueous hydrochloric acid solution, and then purified into pure water having a specific resistance at 25 ° C. of 0.2 MΩ · cm or more. Further, the washed hexagonal boron nitride powder can be obtained by heat treatment at a temperature of 140 ° C. to 500 ° C. under a pressure of 20 kPaA or less, particularly 10 kPaA or less, for 8 hours or more, particularly for 10 hours or more. Is possible.
また、上記製造方法において、前記原料混合物は、該含酸素ホウ素化合物に含まれるホウ素とカーボン源との元素比(B/C)が0.60〜0.85、前記含酸素ホウ素化合物と含酸素カルシウム化合物との酸化物換算のモル比(B2O3/CaO)が4〜6となる割合であることが低アスペクト比を有する六方晶窒化ホウ素粉末を確実に製造するために好ましい。 In the manufacturing method, the raw material mixture has an element ratio (B / C) of boron to a carbon source contained in the oxygen-containing boron compound of 0.60 to 0.85, and the oxygen-containing boron compound and oxygen-containing material. In order to reliably produce a hexagonal boron nitride powder having a low aspect ratio, it is preferable that the molar ratio (B 2 O 3 / CaO) in terms of oxide to the calcium compound is 4 to 6.
更に、前記加熱処理において、加熱温度が100℃に到達してから、六方晶窒化ホウ素粉末の含水量が5質量%以下になるまでの時間が2時間以内となるように加熱を行うことが、得られる六方晶窒化ホウ素粉末の可溶性ホウ素をより低減することができ、好ましい。 Furthermore, in the heat treatment, heating is performed such that the time from when the heating temperature reaches 100 ° C. until the water content of the hexagonal boron nitride powder is 5% by mass or less is within 2 hours, The soluble boron in the obtained hexagonal boron nitride powder can be further reduced, which is preferable.
本発明によれば、低アスペクト比を有しながら、前記溶出不純物量、水分量が極めて低い、新規な六方晶窒化ホウ素粉末が提供される。 According to the present invention, there is provided a novel hexagonal boron nitride powder having a low aspect ratio and a very low amount of the eluted impurities and water.
それ故、上記本発明の六方晶窒化ホウ素粉末は、樹脂に充填して樹脂成形体を構成した際、低アスペクト比に起因して、粒子の配向性が低く、該樹脂成形体の熱伝導性の低下が防止されると共に、強い凝集性を持たないことから、凝集体による気泡の巻き込みも少なく、前記樹脂成形体の絶縁耐性の低下も防止される。 Therefore, when the hexagonal boron nitride powder of the present invention is filled with a resin to form a resin molded body, the orientation of the particles is low due to the low aspect ratio, and the thermal conductivity of the resin molded body is low. In addition, since it does not have strong cohesiveness, bubbles are not caught by the aggregate, and the insulation resistance of the resin molded body is also prevented from being lowered.
しかも、本発明の六方晶窒化ホウ素粉末は、上記低アスペクト比を有しているにも拘わらず、カルシウム等の金属元素や塩素などの不純物量が極めて少ないこと、更には、気泡を生成する原因となる水分も低く抑えられることから、前記樹脂成形体の絶縁耐性の低下を更に効果的に抑制することが可能となる。
また、本発明の製造方法によれば、反応によって得られる特定のアスペクト比を有する粗六方晶窒化ホウ素粉末について、特定の洗浄方法、特定の加熱処理による乾燥方法を採用することにより、乾燥後の再加熱等の複雑な工程を経ることなく、前記特性を有する六方晶窒化ホウ素粉末を工業的に有利に製造することが可能である。
Moreover, despite the fact that the hexagonal boron nitride powder of the present invention has the above low aspect ratio, the amount of impurities such as metal elements such as calcium and chlorine, and the cause of generating bubbles is further reduced. Therefore, it is possible to further effectively suppress a decrease in the insulation resistance of the resin molded body.
In addition, according to the production method of the present invention, the crude hexagonal boron nitride powder having a specific aspect ratio obtained by the reaction is subjected to a specific cleaning method and a specific heat treatment drying method, thereby enabling The hexagonal boron nitride powder having the above characteristics can be advantageously produced industrially without going through a complicated process such as reheating.
(六方晶窒化ホウ素粉末)
本発明の六方晶窒化ホウ素粉末は、
(1)単粒子の平均アスペクト比が、1.5〜10の範囲にあること、
0.5mol/Lの濃度の硫酸水溶液に25℃で120分浸漬後における
(2)溶出ホウ素量が、B2O3に換算して100ppm以下であること、
(3)溶出カルシウム量が50ppm以下であること、
(4)溶出ナトリウム量および溶出銅量がそれぞれ5ppm以下であること、
160℃の水に30時間浸漬後における
(5)溶出塩素量が10ppm以下であること、
(6)含水率が0.1質量%以下であること、
の全ての特性を満足することを特徴とする。以下、各特性について説明する。
(Hexagonal boron nitride powder)
The hexagonal boron nitride powder of the present invention is
(1) The average aspect ratio of single particles is in the range of 1.5 to 10,
(2) The amount of eluted boron after being immersed in a sulfuric acid aqueous solution having a concentration of 0.5 mol / L at 25 ° C. for 120 minutes is 100 ppm or less in terms of B2O3,
(3) The amount of calcium eluted is 50 ppm or less,
(4) The amount of eluted sodium and the amount of eluted copper are each 5 ppm or less,
(5) The amount of eluted chlorine is 10 ppm or less after being immersed in water at 160 ° C. for 30 hours.
(6) The water content is 0.1% by mass or less,
It is characterized by satisfying all the characteristics of Hereinafter, each characteristic will be described.
本発明の六方晶窒化ホウ素粉末は、前記(1)に示すように、単粒子の平均アスペクト比は、1.5〜10、好ましくは、2〜5の範囲にあることが必要である。即ち、上記平均アスペクト比が10を超える場合、樹脂に充填した場合、配向性が高くなり、また、粒子間の凝集性も高くなるため、本発明の目的を達成することができない。また、上記平均アスペクト比が、1.5より小さいものは、製造が困難である。 In the hexagonal boron nitride powder of the present invention, as shown in (1) above, the average aspect ratio of single particles needs to be in the range of 1.5 to 10, preferably 2 to 5. That is, when the average aspect ratio exceeds 10, when the resin is filled, the orientation becomes high and the cohesion between particles becomes high, so the object of the present invention cannot be achieved. In addition, it is difficult to manufacture a product having an average aspect ratio of less than 1.5.
また、上記低アスペクト比を有する六方晶窒化ホウ素粉末とすることにより、後述する特定の洗浄方法において、清浄化効果が顕著に発現し、不純物の高い除去効果が発揮されると共に、特定の加熱処理による乾燥方法においても、可溶性ホウ素の生成を効果的に抑制することができる。 Further, by using the hexagonal boron nitride powder having the above low aspect ratio, in a specific cleaning method described later, a cleaning effect is remarkably exhibited, a high impurity removal effect is exhibited, and a specific heat treatment is performed. Also in the drying method according to, production of soluble boron can be effectively suppressed.
尚、上記平均アスペクト比は、六方晶窒化ホウ素粉末より任意に100サンプル取り出し、一次粒子の長軸の長さを厚み方向の長さにて除することにより算出されたものである。 The average aspect ratio was calculated by arbitrarily taking 100 samples from hexagonal boron nitride powder and dividing the length of the major axis of the primary particles by the length in the thickness direction.
本発明の六方晶窒化ホウ素粉末は、後述する製造方法において、洗浄後に得られる六方晶窒化ホウ素粉末に対して、特定の加熱処理による乾燥方法を適用することにより、乾燥時における可溶性ホウ素の原因となるB2O3の生成量を極めて低く抑制でき、0.5mol/Lの濃度の硫酸水溶液に、25℃で120分浸漬後の溶出ホウ素量が、B2O3に換算して100ppm以下、特に、50ppm以下という極めて低い値を達成することができる。そして、かかる値を満足することにより、六方晶窒化ホウ素粉末を樹脂に充填して得られる樹脂成形体の絶縁耐性の低下を極めて効果的に抑制することができる。 The hexagonal boron nitride powder of the present invention is a cause of soluble boron at the time of drying by applying a drying method by specific heat treatment to the hexagonal boron nitride powder obtained after washing in the manufacturing method described later. The amount of B 2 O 3 produced can be suppressed very low, and the amount of dissolved boron after immersion in a sulfuric acid aqueous solution having a concentration of 0.5 mol / L at 25 ° C. for 120 minutes is 100 ppm or less in terms of B 2 O 3 , In particular, an extremely low value of 50 ppm or less can be achieved. By satisfying such a value, it is possible to extremely effectively suppress a decrease in insulation resistance of a resin molded body obtained by filling a resin with hexagonal boron nitride powder.
また、本発明の六方晶窒化ホウ素粉末は、前記低アスペクト比を有するため、粉体の粒径に対する比表面積が小さく、吸湿し難い性質を有することより、湿度90%、温度50℃の雰囲気下で、10日間放置後の前記溶出ホウ素量の増加率が、10%以下、特に、5%以下という優れた特性をも有する。 In addition, since the hexagonal boron nitride powder of the present invention has the low aspect ratio, the specific surface area with respect to the particle size of the powder is small, and it is difficult to absorb moisture. In addition, the rate of increase in the amount of eluted boron after standing for 10 days is 10% or less, particularly 5% or less.
ところで、前記低アスペクト比を有する六方晶窒化ホウ素粉末は、従来から提案されてはいるが、その製造方法は、後述する製造方法にも示すように、含酸素カルシウム化合物を必須とし、得られる六方晶窒化ホウ素粉末は、一様に大量のカルシウム成分およびこれに付随する不純物を含有する。かかるカルシウム成分は、酸により除去可能であり、かかる酸としては、硫酸、硝酸、塩酸あるいは弱酸が挙げられるが、硫酸や弱酸では不溶性の塩が発生し、硝酸では酸化力が強くホウ素酸化物を生じやすく、乾燥後に溶出性のホウ素を生じる可能性があるため使用が困難である。以上の理由により、塩酸が使用される。 By the way, although the hexagonal boron nitride powder having the low aspect ratio has been proposed in the past, the production method includes an oxygen-containing calcium compound as shown in the production method described later, and the obtained hexagonal Crystalline boron nitride powder contains a uniformly large amount of calcium component and associated impurities. Such a calcium component can be removed by an acid. Examples of such an acid include sulfuric acid, nitric acid, hydrochloric acid, and weak acid. Insoluble salts are generated in sulfuric acid and weak acid, and nitric acid has strong oxidizing power. It is difficult to use because it is prone to occur and can cause eluting boron after drying. For these reasons, hydrochloric acid is used.
それ故、前記低アスペクト比を有する六方晶窒化ホウ素粉末は、このような製造方法に起因して、多くの不純物が残存し易く、その純度は、高々98%台に止まっていた。 Therefore, in the hexagonal boron nitride powder having the low aspect ratio, many impurities are likely to remain due to such a manufacturing method, and the purity thereof is limited to 98% at most.
本発明においては、六方晶窒化ホウ素粉末において、前記低アスペクト比の選定と後述する特定の洗浄方法の採用により、前記(3)〜(5)の特性を実現することが可能である。 In the present invention, in the hexagonal boron nitride powder, the characteristics (3) to (5) can be realized by selecting the low aspect ratio and adopting a specific cleaning method described later.
即ち、前記(3)〜(5)に示す不純物は、六方晶窒化ホウ素粉末を構成する粒子の表面および粒子間に存在するが、前記低アスペクト比を有する六方晶窒化ホウ素粉末は、その形状により、洗浄液である、塩酸水溶液や水との接触が十分行われ、更に、洗浄用の水として、高純度の水を使用することにより、その清浄化作用が高まり、前記不純物が極めて効果的に除去せしめられる。 That is, the impurities shown in the above (3) to (5) exist between and between the surfaces of the particles constituting the hexagonal boron nitride powder, but the hexagonal boron nitride powder having the low aspect ratio depends on its shape. The cleaning solution is sufficiently contacted with an aqueous hydrochloric acid solution or water, and further, by using high-purity water as cleaning water, its cleaning action is enhanced and the impurities are removed extremely effectively. To be sedated.
本発明において、前記(3)〜(5)に記載の不純物濃度を満足することにより、六方晶窒化ホウ素粉末を樹脂に充填して得られる樹脂成形体の絶縁耐性の低下を極めて効果的に抑制することができるが、前記溶出カルシウム量は、40ppm以下であることが好ましく、溶出ナトリウム量および溶出銅量は、それぞれ3ppm以下であることが好ましい。また、前記溶出塩素量は5ppm以下であることが好ましい。 In the present invention, by satisfying the impurity concentrations described in the above (3) to (5), a decrease in insulation resistance of a resin molded product obtained by filling a resin with hexagonal boron nitride powder is extremely effectively suppressed. However, the eluted calcium amount is preferably 40 ppm or less, and the eluted sodium amount and the eluted copper amount are each preferably 3 ppm or less. Moreover, it is preferable that the said elution chlorine amount is 5 ppm or less.
また、本発明の六方晶窒化ホウ素粉末において、前記(6)の含水率は、洗浄後の六方晶窒化ホウ素粉末を20kPaA以下、特に10kPaA以下の圧力下、温度140℃〜500℃で、8時間以上、特に10時間以上加熱処理することによって達成される。 In the hexagonal boron nitride powder of the present invention, the water content of the above (6) is such that the washed hexagonal boron nitride powder has a pressure of 20 kPaA or less, particularly 10 kPaA or less, at a temperature of 140 ° C. to 500 ° C. for 8 hours. As described above, the heat treatment is achieved particularly by heating for 10 hours or more.
本発明の六方晶窒化ホウ素粉末の含水率は、樹脂に充填した際の樹脂成形体の絶縁耐性に影響を及ぼす。即ち、上記含水率を低くすることにより、樹脂に充填した際の水分による水蒸気の発生が抑制され、樹脂成形体の絶縁耐性の低下を抑制することができる。かかる含水量は0.1質量%まで許容できるが、0.02質量%以下、特に、0.01質量%以下であることが好ましい。 The water content of the hexagonal boron nitride powder of the present invention affects the insulation resistance of the resin molded body when the resin is filled. That is, by lowering the water content, generation of water vapor due to moisture when the resin is filled is suppressed, and a decrease in insulation resistance of the resin molded body can be suppressed. The water content is acceptable up to 0.1% by mass, but is preferably 0.02% by mass or less, and particularly preferably 0.01% by mass or less.
本発明の六方晶窒化ホウ素粉末の平均粒子径は、特に制限されないが、樹脂に充填するためのフィラーとしての用途においては、5〜20μm、特に、7〜15μm程度が好ましい。 Although the average particle diameter of the hexagonal boron nitride powder of the present invention is not particularly limited, it is preferably about 5 to 20 μm, particularly about 7 to 15 μm, for use as a filler for filling a resin.
また、上記フィラーとしての用途において、充填する樹脂としては、塩化ビニル樹脂、フッ素樹脂、ナイロン等の熱可塑性樹脂、エポキシ樹脂、メラミン樹脂、不飽和ポリエステル樹脂、シリコーン樹脂等のエネルギー(熱、光等)硬化性樹脂などが挙げられる。また、樹脂に対する充填量は、樹脂100質量部に対して、50〜1000質量部、好ましくは、200〜700質量部が適当である。 In addition, in the use as the filler, as the resin to be filled, energy (heat, light, etc.) such as thermoplastic resin such as vinyl chloride resin, fluorine resin, nylon, epoxy resin, melamine resin, unsaturated polyester resin, silicone resin, etc. ) Curable resin. Moreover, the filling amount with respect to resin is 50-1000 mass parts with respect to 100 mass parts of resin, Preferably, 200-700 mass parts is suitable.
勿論、本発明の六方晶窒化ホウ素粉末は、樹脂への充填に際し、他の粉末と併用して使用することも可能である。 Of course, the hexagonal boron nitride powder of the present invention can be used in combination with other powders when filling the resin.
(六方晶窒化ホウ素粉末の製造方法)
本発明の六方晶窒化ホウ素粉末は、含酸素ホウ素化合物、カーボン源および含酸素カルシウム化合物を含む原料混合物を窒素雰囲気下にて1700〜2200℃の温度に加熱して還元窒化することにより、平均アスペクト比が10以下の粗六方晶窒化ホウ素粉末を製造した後、上記粗六方晶窒化ホウ素粉末を塩酸水溶液にて洗浄し、次いで、25℃における比抵抗が1MΩ・cm以上の純水にて洗浄し、更に、洗浄後の六方晶窒化ホウ素粉末を20kPaA以下、特に10kPaA以下の圧力下、温度140℃〜500℃で、8時間以上、特に、10時間以上加熱処理することにより得られる。
(Method for producing hexagonal boron nitride powder)
The hexagonal boron nitride powder of the present invention has an average aspect ratio obtained by reducing and nitriding a raw material mixture containing an oxygen-containing boron compound, a carbon source and an oxygen-containing calcium compound at a temperature of 1700 to 2200 ° C. in a nitrogen atmosphere. After producing a crude hexagonal boron nitride powder having a ratio of 10 or less, the crude hexagonal boron nitride powder is washed with an aqueous hydrochloric acid solution, and then washed with pure water having a specific resistance at 25 ° C. of 1 MΩ · cm or more. Furthermore, the hexagonal boron nitride powder after washing can be obtained by heat treatment at a temperature of 140 ° C. to 500 ° C. for 8 hours or more, particularly 10 hours or more under a pressure of 20 kPaA or less, particularly 10 kPaA or less.
本発明の製造方法において、含酸素ホウ素化合物としては、酸化ホウ素(B2O3)が、カーボン源としては、カーボンブラック(C)が、更に、含酸素カルシウム化合物としては、炭酸カルシウムが使用される。 In the production method of the present invention, boron oxide (B 2 O 3 ) is used as the oxygen-containing boron compound, carbon black (C) is used as the carbon source, and calcium carbonate is used as the oxygen-containing calcium compound. The
また、上記製造方法において、原料混合物の量比は、該含酸素ホウ素化合物に含まれるホウ素とカーボン源との元素比(B/C)が0.60〜0.85、好ましくは、0.65〜0.80である。上記B/Cが0.60より小さい場合は、未反応のカーボン源の存在割合が増加し、目的とする六方晶窒化ホウ素粒子が得られず、0.85より大きい場合は、還元されずに揮散するホウ素化合物の割合が増加し収率が低下するばかりでなく、上記揮発成分により排気ラインが閉塞し、製造ラインに悪影響を及ぼすこととなる。 In the above production method, the amount ratio of the raw material mixture is such that the elemental ratio (B / C) between boron and the carbon source contained in the oxygen-containing boron compound is 0.60 to 0.85, preferably 0.65. ~ 0.80. When the B / C is less than 0.60, the proportion of the unreacted carbon source is increased, and the desired hexagonal boron nitride particles cannot be obtained. Not only does the proportion of the volatilized boron compound increase and the yield decreases, but the exhaust line is blocked by the volatile components, which adversely affects the production line.
また、前記含酸素ホウ素化合物と含酸素カルシウム化合物との酸化物換算のモル比(B2O3/CaO)が4〜6、好ましくは、4.5〜5.5である。 The molar ratio (B 2 O 3 / CaO) in terms of oxide between the oxygen-containing boron compound and the oxygen-containing calcium compound is 4 to 6, preferably 4.5 to 5.5.
上記B2O3/CaOが4より小さい場合、カルシウム由来の不純物が残存する虞があるだけでなく、板状六方晶窒化ホウ素が粒子成長し難く好ましくない。また、6より大きい場合は、還元されずに揮散するホウ素化合物の割合が増加し、収率が低下するばかりでなく、上記揮発成分により排気ラインが閉塞し、製造ラインに悪影響を及ぼし、好ましくない。 When the B 2 O 3 / CaO is less than 4, not only calcium-derived impurities may remain, but plate-like hexagonal boron nitride is difficult to grow, which is not preferable. On the other hand, when the ratio is larger than 6, the ratio of the boron compound volatilized without being reduced is increased, the yield is lowered, and the exhaust line is blocked by the volatile components, which adversely affects the production line. .
上記原料の混合方法は、各原料が均一に混合される方法が好適に採用される。具体的には、振動ミル、ボールミル、ドラムミキサー振動撹拌機等の混合装置を使用した混合方法が好ましい。 As a method for mixing the raw materials, a method in which the respective raw materials are uniformly mixed is suitably employed. Specifically, a mixing method using a mixing device such as a vibration mill, a ball mill, or a drum mixer vibration stirrer is preferable.
前記原料混合物は、窒素雰囲気下にて1700〜2200℃、好ましくは、1800〜2100℃の温度に加熱して還元窒化される。上記温度が1700℃より低い場合、十分な還元窒化を行うことが困難であり、また、2200℃より高い場合、生成した窒化ホウ素が揮散してしまう虞がある。 The raw material mixture is reduced and nitrided by heating to a temperature of 1700 to 2200 ° C., preferably 1800 to 2100 ° C., under a nitrogen atmosphere. When the temperature is lower than 1700 ° C., it is difficult to perform sufficient reductive nitriding, and when it is higher than 2200 ° C., the generated boron nitride may be volatilized.
かかる還元窒化は、公知の装置を使用した方法が特に制限なく採用される。例えば、高周波誘導加熱やヒーター加熱により加熱処理を行う雰囲気制御高温炉が挙げられ、バッチ炉の他、プッシャー式トンネル炉、竪型反応炉等の連続炉も使用可能である。 For such reduction nitriding, a method using a known apparatus is employed without any particular limitation. For example, an atmosphere-controlled high-temperature furnace that performs heat treatment by high-frequency induction heating or heater heating can be used. In addition to a batch furnace, a continuous furnace such as a pusher type tunnel furnace or a vertical reactor can be used.
また、上記方法によって得られる六方晶窒化ホウ素がバルクで得られる場合は、解砕して粉末とする。上記解砕には、ボールミル等の粉砕装置が使用され、ほぼ一次粒子の粒径まで解砕することが好ましい。 When the hexagonal boron nitride obtained by the above method is obtained in bulk, it is crushed into powder. For the pulverization, a pulverizing apparatus such as a ball mill is used, and it is preferable to pulverize to a primary particle size.
以上の方法により、平均アスペクト比が5以下、好ましくは、2〜4の粗六方晶窒化ホウ素粉末が製造される。 By the above method, a crude hexagonal boron nitride powder having an average aspect ratio of 5 or less, preferably 2 to 4 is produced.
(酸洗浄)
本発明の六方晶窒化ホウ素粉末の製造方法において、還元窒化により得られた粗六方晶窒化ホウ素粉末は、塩酸水溶液にて洗浄し、次いで、25℃における比抵抗が0.2MΩ・cm以上の純水にて洗浄することにより清浄化される。
(Acid cleaning)
In the method for producing hexagonal boron nitride powder of the present invention, the crude hexagonal boron nitride powder obtained by reductive nitridation is washed with an aqueous hydrochloric acid solution, and then purified at 25 ° C. with a specific resistance of 0.2 MΩ · cm or more. It is cleaned by washing with water.
上記塩酸水溶液による洗浄において、使用する水溶液中の塩酸濃度は、10〜15質量%が好ましく、粗六方晶窒化ホウ素粉末1g当たり、10ccの塩酸水溶液と接触せしめることが、粗六方晶窒化ホウ素粉末に含まれる未反応の含ホウ素化合物、未反応の含カルシウム化合物等のカルシウム成分、その他金属成分を十分除去するために好ましい。また、洗浄温度は、20〜60℃、洗浄時間は、12〜15時間が適当である。好ましい態様として、撹拌翼等を用いて撹拌しながら洗浄する態様が挙げられる。 In the washing with the hydrochloric acid aqueous solution, the hydrochloric acid concentration in the aqueous solution to be used is preferably 10 to 15% by mass, and contact with 10 cc of the hydrochloric acid aqueous solution per 1 g of the crude hexagonal boron nitride powder results in the crude hexagonal boron nitride powder. This is preferable for sufficiently removing calcium components such as unreacted boron-containing compounds and unreacted calcium-containing compounds, and other metal components. The washing temperature is suitably 20 to 60 ° C., and the washing time is suitably 12 to 15 hours. As a preferred embodiment, an embodiment in which washing is performed with stirring using a stirring blade or the like can be mentioned.
塩酸水溶液により洗浄後、六方晶窒化ホウ素粉末は、塩酸水溶液を可及的に、具体的には、塩素濃度で10ppm以下となるまで除去して純水による洗浄に供することが好ましい。上記塩酸水溶液の除去方法は、遠心分離等による脱液による除去方法、水による予備洗浄による除去方法などが適宜実施される。 After washing with an aqueous hydrochloric acid solution, the hexagonal boron nitride powder is preferably subjected to washing with pure water by removing the aqueous hydrochloric acid solution as much as possible, specifically, until the chlorine concentration is 10 ppm or less. As the method for removing the hydrochloric acid aqueous solution, a removal method by removing liquid by centrifugation or the like, a removal method by preliminary washing with water, and the like are appropriately performed.
また、純水による洗浄において、使用する水は、25℃における比抵抗が0.2MΩ・cm以上、好ましくは、1MΩ・cm以上の純水であることが必要である。即ち、上記水の比抵抗が上記範囲より小さい場合、六方晶窒化ホウ素粉末に付着している不純物成分を十分に除去することができない。洗浄は、六方晶窒化ホウ素粉末1g当たり、300ccの純水と接触せしめることが好ましく、また、洗浄温度は、20〜60℃が適当である。洗浄に使用する水として、例えば水道水などの比抵抗が0.1MΩ・cmを下回る水を使用した場合、水道水中に含まれる塩素やナトリウムおよび銅などが六方晶窒化ホウ素粉末に残存する虞があるため、適切ではない。 In the cleaning with pure water, the water to be used needs to be pure water having a specific resistance at 25 ° C. of 0.2 MΩ · cm or more, preferably 1 MΩ · cm or more. That is, when the specific resistance of water is smaller than the above range, the impurity component adhering to the hexagonal boron nitride powder cannot be sufficiently removed. The washing is preferably performed with 300 cc of pure water per 1 g of hexagonal boron nitride powder, and the washing temperature is appropriately 20 to 60 ° C. As water used for cleaning, for example, when water with a specific resistance of less than 0.1 MΩ · cm, such as tap water, is used, chlorine, sodium, copper, etc. contained in tap water may remain in the hexagonal boron nitride powder. Because it is, it is not appropriate.
純水による洗浄後、六方晶窒化ホウ素粉末は、濾過により可及的に脱水を行うことが好ましい。具体的には、濾過後の含水率が40wt%以下になるまで脱水されることが好ましい。濾過方法には、吸引による減圧濾過、遠心分離による濾過などが適宜実施される。 After washing with pure water, the hexagonal boron nitride powder is preferably dehydrated as much as possible by filtration. Specifically, it is preferable to dehydrate until the water content after filtration becomes 40 wt% or less. As the filtration method, vacuum filtration by suction, filtration by centrifugation, and the like are appropriately performed.
前記還元窒化反応において、六方晶窒化ホウ素粉末は、平均アスペクト比が5以下に調整されているため、上記洗浄による浄化作用が極めて効果的に作用し、従来の六方晶窒化ホウ素粉末では達成できない高純度の六方晶窒化ホウ素粉末を得ることができる。 In the reduction nitriding reaction, since the average aspect ratio of the hexagonal boron nitride powder is adjusted to 5 or less, the cleaning action by the above cleaning works extremely effectively, which cannot be achieved with the conventional hexagonal boron nitride powder. A pure hexagonal boron nitride powder can be obtained.
(乾燥)
本発明において、上記洗浄後の六方晶窒化ホウ素粉末は、20kPaA以下、特に10kPaA以下、好ましくは、5kPaA以下の圧力下、温度140℃〜500℃、好ましくは、150〜250℃で、8時間以上、特に、10時間以上、好ましくは、10〜20時間加熱処理して乾燥することが、溶出ホウ素量が抑制され、耐水性に富む六方晶窒化ホウ素粉末を得るために必要である。
(Dry)
In the present invention, the washed hexagonal boron nitride powder has a pressure of 20 kPaA or less, particularly 10 kPaA or less, preferably 5 kPaA or less, a temperature of 140 ° C. to 500 ° C., preferably 150 to 250 ° C., and more than 8 hours. In particular, it is necessary to obtain heat-treated hexagonal boron nitride powder that is suppressed in the amount of dissolved boron and rich in water resistance by drying for 10 hours or more, preferably 10 to 20 hours.
なお、上記濾過工程により、含水率を40wt%以下にすることにより、乾燥時の水蒸気分圧を低下させ、可溶性ホウ素の生成を抑制するために効果的である。 In addition, it is effective in order to reduce the water vapor partial pressure at the time of drying, and to suppress the production | generation of soluble boron by making a moisture content into 40 wt% or less by the said filtration process.
更に、前記加熱処理において、加熱温度が100℃に到達してから、六方晶窒化ホウ素粉末の含水量が5質量%以下になるまでの時間が2時間以内となるように加熱を行うことが、得られる六方晶窒化ホウ素粉末の可溶性ホウ素をより低減することができ、好ましい。 Furthermore, in the heat treatment, heating is performed such that the time from when the heating temperature reaches 100 ° C. until the water content of the hexagonal boron nitride powder is 5% by mass or less is within 2 hours, The soluble boron in the obtained hexagonal boron nitride powder can be further reduced, which is preferable.
以下、本発明を更に具体的に説明するために実施例を示すが、本発明は、これらの実施例に限定されるものではない。 EXAMPLES Hereinafter, examples will be shown to describe the present invention more specifically, but the present invention is not limited to these examples.
尚、実施例において、測定は以下の方法によるものである。 In the examples, the measurement is performed by the following method.
(1)平均アスペクト比
得られた六方晶窒化ホウ素粉末について、倍率200倍のSEM観察像から、任意の板状六方晶窒化ホウ素粒子100個を選び、板状六方晶窒化ホウ素単粒子の長軸の長さ(l:平均粒子径)及び厚みを測定し、長径/厚み(A)の平均値を算出して求めた。
(1) Average aspect ratio About the obtained hexagonal boron nitride powder, 100 arbitrary plate-shaped hexagonal boron nitride particles were selected from an SEM observation image at a magnification of 200 times, and the long axis of the plate-shaped hexagonal boron nitride single particle The length (l: average particle diameter) and thickness were measured, and the average value of the long diameter / thickness (A) was calculated.
(2)平均粒子径
得られた六方晶粉末1.0gをエタノール20gと共に50ccのスクリュー管に投入し、振盪撹拌により分散させた六方晶窒化ホウ素懸濁液について、レーザー回折/散乱式粒子径分布測定装置(HORIBA製LA−950V2)を用いて粒度分布を測定し、D50を求めて、六方晶窒化ホウ素粉末の平均粒子径とした。
(2) Average particle size 1.0 g of the obtained hexagonal powder was introduced into a 50 cc screw tube together with 20 g of ethanol, and the hexagonal boron nitride suspension dispersed by shaking and stirring was subjected to laser diffraction / scattering particle size distribution. The particle size distribution was measured by using a measuring device (LA-950V2 manufactured by HORIBA), and D50 was obtained to obtain the average particle size of the hexagonal boron nitride powder.
(3)溶出ホウ素量
50ccのビーカーに、0.5mol/Lの濃度の硫酸水溶液50g、六方晶窒化ホウ素粉末2gを投入し、液の温度を25℃に調整しながら、振盪撹拌する。120分静置した後、得られた液中のホウ素をICP発光分光分析装置(THERMO FISHER社製iCAP6500)により分析して溶出ホウ素量をB2O3に換算し、これを前記六方晶窒化ホウ素粉末の質量で除して溶出ホウ素量(ppm)を求めた。
(3) Amount of dissolved boron 50 g of sulfuric acid aqueous solution having a concentration of 0.5 mol / L and 2 g of hexagonal boron nitride powder are put into a 50 cc beaker, and the mixture is shaken and stirred while adjusting the temperature of the solution to 25 ° C. After standing for 120 minutes, boron in the obtained liquid was analyzed with an ICP emission spectroscopic analyzer (iCAP6500 manufactured by THERMO FISHER) to convert the eluted boron amount to B 2 O 3 , which was converted into the hexagonal boron nitride. The amount of dissolved boron (ppm) was determined by dividing by the mass of the powder.
(4)溶出カルシウム量、溶出ナトリウム量および溶出銅量
溶出ホウ素量の測定方法と同様に分析し、溶出カルシウム量(ppm)、溶出ナトリウム量(ppm)および溶出銅量(ppm)を求めた。
(4) The amount of eluted calcium, the amount of eluted sodium and the amount of eluted copper were analyzed in the same manner as described above, and the amount of eluted calcium (ppm), the amount of eluted sodium (ppm) and the amount of eluted copper (ppm) were determined.
(5)溶出塩素量
得られた六方晶窒化ホウ素粉末0.5gと超純水10mLを加圧分解用のPTFE製耐圧容器の中に投入し、160℃で、30時間加熱した後、濾過により分離した濾液をイオンクロマトグラフ(日本ダイオネクスト社製 ICS−2100)により溶出塩素量(ppm)を求めた。
(5) Amount of eluted chlorine 0.5 g of the obtained hexagonal boron nitride powder and 10 mL of ultrapure water were placed in a pressure-resistant PTFE pressure vessel for pressure decomposition, heated at 160 ° C. for 30 hours, and then filtered. The separated filtrate was subjected to ion chromatograph (ICS-2100, manufactured by Nippon Dionest Co., Ltd.) to determine the amount of eluted chlorine (ppm).
(7)含水率
乾燥後の六方晶窒化ホウ素粉末10gを水分計(エーアンドデイ製MX−50)を用いて水分量を求めた。
(7) Moisture content The moisture content of 10 g of hexagonal boron nitride powder after drying was determined using a moisture meter (MX-50 manufactured by A & D).
実施例1
酸化ホウ素1950g、カーボンブラックを830g、炭酸カルシウム600gをボールミルにて混合した。黒鉛性タンマン炉を用い、該混合物を窒素ガス雰囲気下、15℃/分で1400℃まで昇温し、1400℃で8時間保持した。1400℃保持後、15℃/分で1800℃まで昇温し、1800℃で2時間保持し、還元窒化処理した。
Example 1
1950 g of boron oxide, 830 g of carbon black, and 600 g of calcium carbonate were mixed in a ball mill. Using a graphitic Tamman furnace, the mixture was heated to 1400 ° C. at 15 ° C./min in a nitrogen gas atmosphere and held at 1400 ° C. for 8 hours. After holding at 1400 ° C., the temperature was raised to 1800 ° C. at 15 ° C./min, held at 1800 ° C. for 2 hours, and subjected to reduction nitriding treatment.
次いで、得られた粗六方晶窒化ホウ素粉末をポリエチレン製の容器へ投入し、粗六方晶窒化ホウ素の10倍量の塩酸水溶液(10重量%HCl)を加え、回転数300rpmで15時間撹拌した。該酸洗浄の後、酸を濾過し、投入した粗六方晶窒化ホウ素の300倍量の25℃における比抵抗が1MΩ・cmの純水を用いて再度洗浄の後、吸引による濾過により濾過後の粉末中含水率が40wt%以下になるまで脱水を行った。 Next, the obtained crude hexagonal boron nitride powder was put into a polyethylene container, 10 times the amount of hydrochloric acid aqueous solution (10 wt% HCl) of the crude hexagonal boron nitride was added, and the mixture was stirred at a rotation speed of 300 rpm for 15 hours. After the acid cleaning, the acid was filtered, and after washing again with pure water having a specific resistance of 1 MΩ · cm at 25 ° C. of 300 times the amount of the added crude hexagonal boron nitride, filtration by suction was performed. Dehydration was performed until the moisture content in the powder was 40 wt% or less.
該純水洗浄の後、得られた粉末を1kPaAの圧力のもと、200℃で15時間、減圧乾燥させ、白色の六方晶窒化ホウ素を得た。 After washing with pure water, the obtained powder was dried under reduced pressure at 200 ° C. for 15 hours under a pressure of 1 kPaA to obtain white hexagonal boron nitride.
尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は3.3wt%であった。 During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 3.3 wt%.
乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。 The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1.
得られた六方晶窒化ホウ素粉末を湿度90%、温度50℃の恒温槽に入れ、10日間経過した後に前記(3)と同様に溶出ホウ素量を測定し、B2O3に換算した値は24ppmであった。 The obtained hexagonal boron nitride powder was placed in a thermostat with a humidity of 90% and a temperature of 50 ° C., and after 10 days, the amount of dissolved boron was measured in the same manner as in (3) above, and the value converted to B 2 O 3 was It was 24 ppm.
実施例2
洗浄に用いる純水の比抵抗を0.5MΩ・cm、乾燥時間を12時間とした以外は実施例1と同様にして白色の六方晶窒化ホウ素を得た。
Example 2
White hexagonal boron nitride was obtained in the same manner as in Example 1 except that the specific resistance of pure water used for washing was 0.5 MΩ · cm and the drying time was 12 hours.
尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は3.8wt%であった。 During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 3.8 wt%.
乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。 The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1.
得られた六方晶窒化ホウ素粉末を湿度90%、温度50℃の恒温槽に入れ、10日間経過した後に前記(3)と同様に溶出ホウ素量を測定し、B2O3に換算した値は19ppmであった。 The obtained hexagonal boron nitride powder was placed in a thermostat with a humidity of 90% and a temperature of 50 ° C., and after 10 days, the amount of dissolved boron was measured in the same manner as in (3) above, and the value converted to B 2 O 3 was It was 19 ppm.
実施例3
乾燥時の圧力を5kPaAとしたことと、乾燥温度を180℃とした以外は実施例1と同様にして白色の六方晶窒化ホウ素を得た。
Example 3
White hexagonal boron nitride was obtained in the same manner as in Example 1 except that the pressure during drying was 5 kPaA and the drying temperature was 180 ° C.
尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は4.4wt%であった。 During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 4.4 wt%.
乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。 The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1.
得られた六方晶窒化ホウ素粉末を湿度90%、温度50℃の恒温槽に入れ、10日間経過した後に前記(3)と同様に溶出ホウ素量を測定し、B2O3に換算した値は35ppmであった。 The obtained hexagonal boron nitride powder was placed in a thermostat with a humidity of 90% and a temperature of 50 ° C., and after 10 days, the amount of dissolved boron was measured in the same manner as in (3) above, and the value converted to B 2 O 3 was It was 35 ppm.
実施例4
酸化ホウ素2100g、カーボンブラックを800g、炭酸カルシウム700gをボールミルにて混合した。該混合物を黒鉛性タンマン炉を用い、窒素ガス雰囲気下、15℃/分で1400℃まで昇温し、1400℃で8時間保持した。1400℃保持後、15℃/分で1850℃まで昇温し、1850℃で2時間保持し、還元窒化処理した。
Example 4
2100 g of boron oxide, 800 g of carbon black, and 700 g of calcium carbonate were mixed in a ball mill. The mixture was heated to 1400 ° C. at 15 ° C./min in a nitrogen gas atmosphere using a graphitic Tamman furnace, and held at 1400 ° C. for 8 hours. After holding at 1400 ° C., the temperature was raised to 1850 ° C. at 15 ° C./min, held at 1850 ° C. for 2 hours, and subjected to reduction nitriding treatment.
次いで、得られた粗六方晶窒化ホウ素粉末をポリエチレン製の容器へ投入し、粗六方晶窒化ホウ素の10倍量の塩酸水溶液(10重量%HCl)を加え、回転数300rpmで15時間撹拌した。該酸洗浄の後、酸を濾過し、投入した粗六方晶窒化ホウ素の300倍量の25℃における比抵抗が1MΩ・cmの純水を用いて再度洗浄の後、吸引による濾過により濾過後の粉末中含水率が40wt%以下になるまで脱水を行った。 Next, the obtained crude hexagonal boron nitride powder was put into a polyethylene container, 10 times the amount of hydrochloric acid aqueous solution (10 wt% HCl) of the crude hexagonal boron nitride was added, and the mixture was stirred at a rotation speed of 300 rpm for 15 hours. After the acid cleaning, the acid was filtered, and after washing again with pure water having a specific resistance of 1 MΩ · cm at 25 ° C. of 300 times the amount of the added crude hexagonal boron nitride, filtration by suction was performed. Dehydration was performed until the moisture content in the powder was 40 wt% or less.
該純水洗浄の後、得られた粉末を1kPaAの圧力のもと、150℃で15時間、減圧乾燥させ、白色の六方晶窒化ホウ素を得た。 After washing with pure water, the obtained powder was dried under reduced pressure at 150 ° C. for 15 hours under a pressure of 1 kPaA to obtain white hexagonal boron nitride.
尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は4.8wt%であった。 During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 4.8 wt%.
乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。 The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1.
得られた六方晶窒化ホウ素粉末を湿度90%、温度50℃の恒温槽に入れ、10日間経過した後に前記(3)と同様に溶出ホウ素量を測定し、B2O3に換算した値は75ppmであった。 The obtained hexagonal boron nitride powder was placed in a thermostat with a humidity of 90% and a temperature of 50 ° C., and after 10 days, the amount of dissolved boron was measured in the same manner as in (3) above, and the value converted to B 2 O 3 was It was 75 ppm.
実施例5
酸化ホウ素1800g、カーボンブラックを900g、炭酸カルシウム700gをボールミルにて混合した。該混合物を黒鉛性タンマン炉を用い、窒素ガス雰囲気下、15℃/分で1400℃まで昇温し、1400℃で8時間保持した。1400℃保持後、15℃/分で1900℃まで昇温し、1900℃で2時間保持し、還元窒化処理した。
Example 5
1800 g of boron oxide, 900 g of carbon black, and 700 g of calcium carbonate were mixed in a ball mill. The mixture was heated to 1400 ° C. at 15 ° C./min in a nitrogen gas atmosphere using a graphitic Tamman furnace, and held at 1400 ° C. for 8 hours. After holding at 1400 ° C., the temperature was raised to 1900 ° C. at 15 ° C./min, held at 1900 ° C. for 2 hours, and subjected to reduction nitriding treatment.
次いで、得られた粗六方晶窒化ホウ素粉末をポリエチレン製の容器へ投入し、粗六方晶窒化ホウ素の10倍量の塩酸水溶液(10重量%HCl)を加え、回転数300rpmで15時間撹拌した。該酸洗浄の後、酸を濾過し、投入した粗六方晶窒化ホウ素の300倍量の25℃における比抵抗が1MΩ・cmの純水を用いて再度洗浄の後、吸引による濾過により濾過後の粉末中含水率が40wt%以下になるまで脱水を行った。 Next, the obtained crude hexagonal boron nitride powder was put into a polyethylene container, 10 times the amount of hydrochloric acid aqueous solution (10 wt% HCl) of the crude hexagonal boron nitride was added, and the mixture was stirred at a rotation speed of 300 rpm for 15 hours. After the acid cleaning, the acid was filtered, and after washing again with pure water having a specific resistance of 1 MΩ · cm at 25 ° C. of 300 times the amount of the added crude hexagonal boron nitride, filtration by suction was performed. Dehydration was performed until the moisture content in the powder was 40 wt% or less.
該純水洗浄の後、得られた粉末を1kPaAの圧力のもと、200℃で15時間、減圧乾燥させ、白色の六方晶窒化ホウ素を得た。 After washing with pure water, the obtained powder was dried under reduced pressure at 200 ° C. for 15 hours under a pressure of 1 kPaA to obtain white hexagonal boron nitride.
尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は3.0wt%であった。 During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 3.0 wt%.
乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。 The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1.
得られた六方晶窒化ホウ素粉末を湿度90%、温度50℃の恒温槽に入れ、10日間経過した後に前記(3)と同様に溶出ホウ素量を測定し、B2O3に換算した値は29ppmであった。 The obtained hexagonal boron nitride powder was placed in a thermostat with a humidity of 90% and a temperature of 50 ° C., and after 10 days, the amount of dissolved boron was measured in the same manner as in (3) above, and the value converted to B 2 O 3 was It was 29 ppm.
実施例6
洗浄に用いる純水の比抵抗を10MΩ・cm、乾燥温度を200℃、乾燥時間を12時間とした以外は実施例5と同様にして白色の六方晶窒化ホウ素を得た。
Example 6
White hexagonal boron nitride was obtained in the same manner as in Example 5 except that the specific resistance of pure water used for washing was 10 MΩ · cm, the drying temperature was 200 ° C., and the drying time was 12 hours.
尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は3.7wt%であった。 During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 3.7 wt%.
乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。 The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1.
得られた六方晶窒化ホウ素粉末を湿度90%、温度50℃の恒温槽に入れ、10日間経過した後に前記(3)と同様に溶出ホウ素量を測定し、B2O3に換算した値は43ppmであった。 The obtained hexagonal boron nitride powder was placed in a thermostat with a humidity of 90% and a temperature of 50 ° C., and after 10 days, the amount of dissolved boron was measured in the same manner as in (3) above, and the value converted to B 2 O 3 was It was 43 ppm.
実施例7
実施例1で得られた洗浄後乾燥前窒化ホウ素粉末を1kPaAの圧力のもと、140℃で9時間、減圧乾燥させ、白色の六方晶窒化ホウ素を得た。乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。 尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は4.9wt%であった。得られた六方晶窒化ホウ素粉末を湿度90%、温度50℃の恒温槽に入れ、10日間経過した後に前記(3)と同様に溶出ホウ素量を測定し、B2O3に換算した値は89ppmであった。
Example 7
The boron nitride powder before washing and after drying obtained in Example 1 was dried under reduced pressure at 140 ° C. for 9 hours under a pressure of 1 kPaA to obtain white hexagonal boron nitride. The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1. During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 4.9 wt%. The obtained hexagonal boron nitride powder was placed in a thermostat with a humidity of 90% and a temperature of 50 ° C., and after 10 days, the amount of dissolved boron was measured in the same manner as in (3) above, and the value converted to B 2 O 3 was It was 89 ppm.
実施例8
実施例3で得られた洗浄後乾燥前窒化ホウ素粉末を15kPaAの圧力のもと、180℃で15時間、減圧乾燥させ、白色の六方晶窒化ホウ素を得た。乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は4.7wt%であった。得られた六方晶窒化ホウ素粉末を湿度90%、温度50℃の恒温槽に入れ、10日間経過した後に前記(3)と同様に溶出ホウ素量を測定し、B2O3に換算した値は99ppmであった。
Example 8
The boron nitride powder after washing and before drying obtained in Example 3 was dried under reduced pressure at 180 ° C. for 15 hours under a pressure of 15 kPaA to obtain white hexagonal boron nitride. The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1. During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 4.7 wt%. The obtained hexagonal boron nitride powder was placed in a thermostat with a humidity of 90% and a temperature of 50 ° C., and after 10 days, the amount of dissolved boron was measured in the same manner as in (3) above, and the value converted to B 2 O 3 was It was 99 ppm.
実施例9
実施例4で得られた洗浄後乾燥前窒化ホウ素粉末を1kPaAの圧力のもと、150℃で12時間、減圧乾燥させ、白色の六方晶窒化ホウ素を得た。乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は4.8wt%であった。得られた六方晶窒化ホウ素粉末を湿度90%、温度50℃の恒温槽に入れ、10日間経過した後に前記(3)と同様に溶出ホウ素量を測定し、B2O3に換算した値は78ppmであった。
Example 9
The boron nitride powder before washing and after drying obtained in Example 4 was dried under reduced pressure at 150 ° C. for 12 hours under a pressure of 1 kPaA to obtain white hexagonal boron nitride. The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1. During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 4.8 wt%. The obtained hexagonal boron nitride powder was placed in a thermostat with a humidity of 90% and a temperature of 50 ° C., and after 10 days, the amount of dissolved boron was measured in the same manner as in (3) above, and the value converted to B 2 O 3 was It was 78 ppm.
比較例1
酸化ホウ素1600g、カーボンブラックを960g、炭酸カルシウム600gをボールミルにて混合した。該混合物を黒鉛性タンマン炉を用い、窒素ガス雰囲気下、15℃/分で1400℃まで昇温し、1400℃で8時間保持した。1400℃保持後、15℃/分で1800℃まで昇温し、1800℃で2時間保持し、窒化処理した。
Comparative Example 1
1600 g of boron oxide, 960 g of carbon black, and 600 g of calcium carbonate were mixed in a ball mill. The mixture was heated to 1400 ° C. at 15 ° C./min in a nitrogen gas atmosphere using a graphitic Tamman furnace, and held at 1400 ° C. for 8 hours. After holding at 1400 ° C., the temperature was raised to 1800 ° C. at 15 ° C./min, held at 1800 ° C. for 2 hours, and nitrided.
次いで、得られた粗六方晶窒化ホウ素粉末をポリエチレン製の容器へ投入し、粗六方晶窒化ホウ素の10倍量の塩酸水溶液(10重量%HCl)を加え、回転数300rpmで15時間撹拌した。該酸洗浄の後、酸を濾過し、投入した粗六方晶窒化ホウ素の300倍量の25℃における比抵抗が1MΩ・cmの純水を用いて再度洗浄、吸引による濾過により濾過後の粉末中含水率が40wt%以下になるまで脱水を行った。 Next, the obtained crude hexagonal boron nitride powder was put into a polyethylene container, 10 times the amount of hydrochloric acid aqueous solution (10 wt% HCl) of the crude hexagonal boron nitride was added, and the mixture was stirred at a rotation speed of 300 rpm for 15 hours. After the acid cleaning, the acid is filtered, and the purified hexagonal boron nitride is washed 300 times more with pure water having a specific resistance of 1 MΩ · cm at 25 ° C. In the powder after filtration by suction filtration Dehydration was performed until the water content was 40 wt% or less.
該純水洗浄の後、得られた粉末を1kPaAの圧力のもと、200℃で15時間、減圧乾燥させ、白色の六方晶窒化ホウ素を得た。 After washing with pure water, the obtained powder was dried under reduced pressure at 200 ° C. for 15 hours under a pressure of 1 kPaA to obtain white hexagonal boron nitride.
尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は3.0wt%であった。 During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 3.0 wt%.
乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。 The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1.
比較例2
酸化ホウ素1950g、カーボンブラックを830g、炭酸カルシウム600gをボールミルにて混合した。該混合物を黒鉛性タンマン炉を用い、窒素ガス雰囲気下、15℃/分で1400℃まで昇温し、1400℃で8時間保持した。1400℃保持後、15℃/分で1800℃まで昇温し、1800℃で2時間保持し、窒化処理した。
Comparative Example 2
1950 g of boron oxide, 830 g of carbon black, and 600 g of calcium carbonate were mixed in a ball mill. The mixture was heated to 1400 ° C. at 15 ° C./min in a nitrogen gas atmosphere using a graphitic Tamman furnace, and held at 1400 ° C. for 8 hours. After holding at 1400 ° C., the temperature was raised to 1800 ° C. at 15 ° C./min, held at 1800 ° C. for 2 hours, and nitrided.
次いで、得られた粗六方晶窒化ホウ素粉末をポリエチレン製の容器へ投入し、粗六方晶窒化ホウ素の10倍量の塩酸水溶液(10重量%HCl)を加え、回転数300rpmで15時間撹拌した。該酸洗浄の後、酸を濾過し、投入した粗六方晶窒化ホウ素の300倍量の25℃における比抵抗が0.01MΩ・cmの上水を用いて再度洗浄の後、吸引による濾過により濾過後の粉末中含水率が40wt%以下になるまで脱水を行った。 Next, the obtained crude hexagonal boron nitride powder was put into a polyethylene container, 10 times the amount of hydrochloric acid aqueous solution (10 wt% HCl) of the crude hexagonal boron nitride was added, and the mixture was stirred at a rotation speed of 300 rpm for 15 hours. After the acid cleaning, the acid is filtered, and after washing again with water having a specific resistance at 25 ° C. of 0.01 MΩ · cm, which is 300 times the amount of the added crude hexagonal boron nitride, filtration is performed by suction filtration. Dehydration was performed until the water content in the powder afterwards became 40 wt% or less.
該純水洗浄の後、得られた粉末を1kPaAの圧力のもと、120℃で15時間、減圧乾燥させ、白色の六方晶窒化ホウ素を得た。 After washing with pure water, the obtained powder was dried under reduced pressure at 120 ° C. for 15 hours under a pressure of 1 kPaA to obtain white hexagonal boron nitride.
尚、乾燥時に、乾燥温度が100℃を超えて2時間経過した時の乾燥中六方晶窒化ホウ素粉末の水分率は12.0wt%であった。 During drying, the moisture content of the hexagonal boron nitride powder during drying when the drying temperature exceeded 100 ° C. for 2 hours was 12.0 wt%.
乾燥後の粉末を目開き90μmの篩にかけて、粗大粒子を除去し、得られた窒化ホウ素粉末について、前記(1)〜(7)の各測定値を表1に示した。 The dried powder was passed through a sieve having an opening of 90 μm to remove coarse particles, and the obtained boron nitride powder was measured for each of the above (1) to (7) in Table 1.
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