JP2019171812A - Film plate, and method for producing droplet transportation structure using the same - Google Patents

Abstract

Disclosed is a droplet transporting structure for transporting droplets based on a difference in contact angle, and a droplet transporting structure suitable for manufacturing, and a method for manufacturing the same.
In the compartmentalized droplet transport structure, a convex or concave aggregate having at least an average distance between the centers of the structures of 100 nm or more and 400 nm or less is formed, and contact in terms of water is achieved. A section having a relatively low angle and a section having at least an average distance between the centers of the structures of 1 μm or more and 100 μm or less, and having a relatively high contact angle in terms of water Is formed.
[Selection] Figure 2

Description

  The present invention relates to a film plate for manufacturing a three-dimensional object surface having a droplet transport structure for transporting droplets attached to the surface in a specific direction, and a droplet transport structure using the film plate. It relates to a manufacturing method.

In recent years, water-repellent and hydrophilic coatings for preventing adhesion of droplets have been applied to automobiles, solar battery panels, buildings, and the like.
In the case of a water-repellent coating, for example, a fluororesin material can be applied to the surface of the object to increase the contact angle with water and suppress wetting. Without droplets, the droplets do not move and remain on the surface, and when the light transmittance is reduced or dirt such as dust enters the droplets, the dirt adheres to the surface by drying.

  In contrast, a super-water-repellent surface with a concavo-convex structure using the lotus leaf effect has a self-cleaning property in which dirt such as dust adhering to the surface is washed away by the driving force of the liquid droplets as the liquid droplets slide down. For example, when a droplet exists on a horizontal surface, or when there are two or more external forces that contribute to sliding, and these cancel out and balance, the droplet stays on the surface, so that the light transmittance decreases, When dirt such as dust enters the droplet, the dirt adheres to the surface by drying.

On the other hand, in the case of a hydrophilic coating, for example, a dispersion liquid containing silicon dioxide fine particles is applied to the surface of an object and dried, thereby reducing the contact angle with water and forming a water film on the surface. Since it does not exist on the surface, it is possible to suppress a decrease in light transmittance, but when dirt such as dust enters the water film, if the dirt cannot be discharged by the flow of liquid in the water film, Surface contamination occurs due to drying.
Therefore, by transporting droplets attached to the surface of the object in any direction, it is possible to suppress a decrease in light transmittance due to the stay of the droplets on the surface, and to remove dirt attached to the object surface etc. This makes it possible to realize a surface that also has a self-cleaning property to be washed away.

In order to realize the transport of the droplet, a droplet transport device in which the droplet moves from the upstream to the downstream by gradually increasing the area of the region where the contact angle is small from the upstream to the downstream is disclosed in Patent Literature 1 is disclosed. The difference in contact angle depending on the region is provided depending on the presence or absence of the concavo-convex structure. It is also described that a water repellent surface treatment or a hydrophilic surface treatment is performed.
Further, Patent Document 2 discloses a droplet guide structure in which a contact angle in water conversion is increased by forming a concavo-convex structure with a structure period of 400 nm or less, thereby increasing the contact angle in terms of water compared to a flat surface. Are disclosed.

JP 2005-331410 A JP 2006-257249 A

In the droplet transport device described in Patent Document 1, a difference in contact angle is provided between the structure non-formation region and the contact angle of the structure non-formation region by the formation of the uneven structure of the order of several μm. Therefore, it is difficult to obtain a large droplet driving force.
In the droplet guide structure described in Patent Document 2, a contact angle difference is provided by utilizing a phenomenon that a contact angle in terms of water becomes larger than that of a flat surface by forming an uneven structure having a structure period of 400 nm or less. However, in order to sufficiently increase the contact angle in order to obtain a large driving force, it is necessary to increase the structure height. For example, in the production by resin molding using the nanoimprint method, the resin filling defect or the structure There is concern about the yield drop due to collapse.

  Furthermore, when the uneven structure described in Patent Document 1 or Patent Document 2 is used, for example, on the surface of a three-dimensional object, the uneven structure is applied on a flexible film substrate by applying a known resin molding technique such as a nanoimprint method. It is conceivable to form a structure and affix it to a three-dimensional object. However, an adhesive for bonding the film base and the three-dimensional object is required, and when the adhesive deteriorates, the surface of the three-dimensional object is uneven. There is a concern that the film substrate having the structure peels off.

In addition, in order to increase the durability against physical impact such as scratch resistance, when the uneven structure is formed on a resin with high hardness and the three-dimensional object is curved, it follows the curvature of the surface of the three-dimensional object When trying to do so, there is a concern that cracks occur in the high-level resin having the concavo-convex structure, and a sufficient function cannot be expressed.
In view of the above problems, an object of the present invention is to provide a film plate used for forming a droplet transport structure for transporting droplets on the surface of a three-dimensional object, and a droplet transport structure using the film plate. It is in providing the manufacturing method of.

The film plate according to one aspect of the present invention has a surface defined at least in the first section and the second section where the concavo-convex structure is formed,
In the first section, a first aggregate composed of convex parts and concave parts having at least an average distance Pa between centers of the concavo-convex structure in the first section of 100 nm or more and 400 nm or less is formed,
In the second section, a second aggregate composed of convex parts and concave parts having at least an average distance Pb between the centers of the concavo-convex structures in the second section of 1 μm or more and 100 μm or less is formed,
A droplet transport structure having a contact angle in water equivalent of the first compartment larger than that in water equivalent of the second compartment is formed on the flexible substrate.

Here, in the film plate, the area ratio of the bottom surface of the concave portion formed in the first section in the droplet transport structure portion is larger than the area ratio of the upper surface of the convex section formed in the first section. May be larger.
In the film plate, the average height Ha of the convex portions of the first aggregate in the droplet transport structure portion is equal to or less than the average value Pa of the center-to-center distance of the concavo-convex structure formed in the first section. Yes,
The average height Hb of the convex portions of the second aggregate may be higher than the average height Ha.
In the film plate, the average height Ha in the droplet transport structure may be 15 nm or more and 100 nm or less.

Further, in the film plate, at least a third aggregate including a convex portion and a concave portion is formed on the upper surface of the convex portion formed in the second section in the droplet transport structure portion, and the third aggregate The average value of the center-to-center distance Pc of the concavo-convex structure may be 100 nm or more and 400 nm or less.
Further, in the film plate, in a cross-sectional view of a region where the first section and the second section are adjacent to each other in the droplet transport structure, the upper surface of the first assembly and the upper surface of the third assembly The position in the thickness direction may be the same.

Further, in the film plate, in a cross-sectional view of a region where the first section and the second section are adjacent to each other in the droplet transport structure, the bottom surface of the first assembly and the bottom surface of the third assembly The position in the thickness direction may be the same.
Moreover, in the said film plate, the uneven structure formed in the said 1st division and 2nd division in the said droplet conveyance structure part may be comprised with the photocurable resin containing a fluorine.
In the droplet transport structure, the uneven structure formed in the first compartment and the second compartment in the droplet transport structure may be composed of a photocurable resin mixed with siloxane oil. .

In addition, the method for manufacturing a droplet transport structure according to an aspect of the present invention includes at least a step of applying a photocurable resin to the surface of a three-dimensional object that forms the droplet transport structure;
The step of pressing the droplet transport structure portion of the film plate according to any one of claims 1 to 9 to a photocurable resin coated on the surface of the three-dimensional object;
Irradiating light and curing the photocurable resin;
And a step of releasing the film plate from the surface of the cured three-dimensional object.

Moreover, the manufacturing method of the droplet transportation structure part by the other aspect of this invention applies a photocurable resin to the said droplet transportation structure part of the film plate in any one of Claims 1-9 at least. Process,
A step of closely adhering the surface of the three-dimensional object and the coated photocurable resin;
Irradiating light and curing the photocurable resin;
And a step of releasing the film plate from the cured photocurable resin.

  According to one aspect of the present invention, the contact angle in water conversion is reduced by the structure formed in the first section, while the contact angle in water conversion is increased by the structure formed in the second section. The contact angle difference between the compartment and the second compartment can be increased, and the driving force of the droplet can be increased. Moreover, since the structural height of the convex structure formed in the first section is sufficiently low, it is possible to suppress a decrease in yield even in the production by resin molding using the nanoimprint method, for example.

It is a top view of the droplet transportation structure part concerning one embodiment of the present invention. It is sectional drawing of the droplet transport structure part which concerns on one Embodiment of this invention. It is sectional drawing of the droplet transport structure part which concerns on one Embodiment of this invention. It is sectional drawing of the droplet transport structure part which concerns on one Embodiment of this invention. 1 is a structural design diagram of one embodiment of the present invention.

Embodiments for carrying out the present invention will be described with reference to the drawings. In the following description, an interface exists between the substrate and the droplet transport structure, but the droplet transport structure may be formed of the same material as the substrate. For example, a reflection layer that reflects incident light or a printing layer for expressing a specific pattern may be provided between the portions.
[Design of droplet transport structure]
Since the film plate of the present embodiment is used to form a droplet transport structure for transporting droplets on the surface of a three-dimensional object or the like, the structure formed on the film plate has a droplet transport described below. Inverted structure of the droplet transport structure for

  FIG. 1 is a plan view of a droplet transport structure 11 according to an embodiment of the present invention. In FIG. 1, the droplet transporting structure 11 is divided (defined) into at least two of a first section and a second section. The droplet transport structure 11 is designed such that the occupied area ratio of the first section and the second section gradually increases or decreases with respect to the Y direction. For example, in FIG. 1A, the boundary line between the first section and the second section is designed to be two sides having the same length of an isosceles triangle, but the occupied area of the first section and the second section The ratio may be increased or decreased gradually, and is not limited to the design. Further, the boundary line between the first section and the second section may be formed in an oblique direction on the XY plane. However, in the manufacturing method of the droplet transporting structure portion 11 described later, in a microscopic view, FIG. As shown in (b), a design in which each of the first section and the second section occupies each section partitioned into a matrix composed of a quadrangle having each vertex of 90 ° is more preferable. However, in this case, if the length of an arbitrary side of the quadrilateral forming the matrix is about 500 μm, for example, there is a possibility that sufficient driving force for transporting droplets of the same size may not be obtained. The length of any side of the quadrilateral needs to be 200 μm or less, more preferably 100 μm or less. When the length of an arbitrary side of the quadrilateral is set to 100 μm or less, a droplet having a size that can be visually recognized by a human can be substantially transported.

  In the present embodiment, the driving force necessary for transporting the droplets is realized by the contact angle difference in water conversion between the first section and the second section, and the contact angle difference is further formed by the structure formed on the surface. Realize. Therefore, structures are formed on the surfaces of the first section and the second section, respectively, but in order to realize the contact angle difference, structures according to different design rules are formed. FIG. 2 is a cross-sectional view of the droplet transport structure. In the present embodiment, a concavo-convex structure including a convex portion and a concave portion is formed in both the first section and the second section, and FIG. 2A shows a cross-sectional structure at the boundary.

  FIG. 2B is a cross-sectional view of the structure formed in the first section. In the first section, a concavo-convex structure having a relatively small contact angle in terms of water is formed. Specifically, it is a first aggregate of convex or concave structures arranged in a square array or a hexagonal array, and the structure period is preferably 400 nm or less. By making the structural period 400 nm or less, in addition to the effect of making the contact angle relatively low, for example, optical effects such as prevention of iridescent spectral reflection by first-order diffracted light and prevention of Fresnel reflection may be imparted. it can. In the case of a square arrangement, the structure period indicates only the period in the vertical and horizontal directions. Furthermore, the concavo-convex structure formed in the first section may not have periodicity, but in that case, the average value of the distance between the centers of the structures is preferably 400 nm or less. Therefore, in the concavo-convex structure formed in the first section of the present embodiment, the center-to-center distance Pa of the convex or concave structure is preferably 400 nm or less. On the other hand, if the center-to-center distance Pa of the convex or concave structure is less than 100 nm, it becomes difficult to form the structure on the film plate, and the center-to-center distance Pa of the convex or concave structure is 100 nm or more. Therefore, in the first aggregate having a convex or concave structure formed in the first section, the center-to-center distance Pa of the structure is more preferably in the range of 100 nm to 400 nm.

  In the concavo-convex structure in which the center-to-center distance Pa of the convex or concave structure is 100 nm or more and 400 nm or less, the contact angle in terms of water becomes relatively low by increasing the ratio of the top surface area to the bottom surface area. Therefore, in the first aggregate having a convex or concave structure formed in the first section, it is preferable that the ratio of the area of the structure bottom to the area of the structure top is greater than 0.5.

  In the first assembly having a convex or concave structure formed in the first section, if the distance in the Z direction between the top surface and the bottom surface is defined as the structural height Ha, the aspect ratio of the structure increases as the structural height Ha increases. Therefore, in the manufacturing method of the droplet transporting structure 11 described later, there is a concern about the collapse of the structure at the time of mold release in the formation of the structure on the film plate, and the center-to-center distance Pa of the convex or concave structure is 100 nm. The contact angle in terms of water on the surface on which the concavo-convex structure in the range of 400 nm or less is formed is relatively large. Therefore, the structure height Ha is preferably smaller than ½ of the average value Pa of the center-to-center distance of the convex or concave structure. However, if the structural height Ha is extremely small, the effect of reducing the contact angle in water conversion by the concavo-convex structure cannot be obtained, so the structural height Ha is more preferably 15 nm or more. Therefore, by setting the structural height Ha of the concavo-convex structure formed in the first section to be in the range of 15 nm or more and 100 nm or less, a suitable structural design is achieved in both functional and manufacturing aspects.

  FIG.2 (c) is sectional drawing of the structure formed in a 2nd division. A structure in which the contact angle in terms of water is relatively large is formed in the second section. Specifically, the second aggregate of convex structures arranged in a square array or a hexagonal array is basically used, and the structure period is preferably 1 μm or more and 100 μm or less. Further, the second aggregate of the convex structure formed in the second section may not have periodicity. In this case, the average value Pb of the inter-structure distance is preferably 1 μm or more and 100 μm or less, and 5 μm. As mentioned above, 20 micrometers or less are more preferable.

  In the second aggregate of convex structures formed in the second section, the higher the structural height Hb of the convex structure, the relatively larger the contact angle in terms of water. The structural height Hb is preferably higher than the structural height Ha of the first aggregate having a convex or concave structure formed in at least the first section, and more preferably 500 nm or more. However, when the structure height Hb is larger than the average value Pb of the inter-structure distance, the aspect ratio of the structure is increased. Therefore, in the formation of the structure on the film plate, there is a concern about the collapse of the structure at the time of releasing. .

  In order to relatively increase the contact angle in terms of water in the second section, at least the upper surface of the convex structure formed in the second section, a convex shape having a center-to-center distance Pc of 100 nm or more and 400 nm or less, Alternatively, it is preferable to form a third aggregate having a concave structure. The structure C may be the droplet transport structure 12 on the bottom surface of the convex structure formed in the second section (FIG. 3). The third assembly having the convex or concave structure may have the same design as the first assembly having the convex or concave structure formed in the first section, but the structure height Hc of the third assembly is More preferably, it is higher than one aggregate structure height Ha. In the third aggregate, the ratio of the area of the top surface of the structure to the area of the bottom surface of the structure is preferably small, and the ratio of the area of the top surface of the structure to the area of the bottom surface of the structure is small. It is good also as the droplet transport structure part 13 which is a forward taper structure with an inclination (FIG. 4). The forward taper structure is a structure suitable for mold release in forming a structure on a film plate.

[Film plate manufacturing method]
As a film plate manufacturing method, for example, polyethylene, polyethylene, or the like by a known technique such as a nanoimprint method from an original plate produced by substrate processing using a known fine processing technique such as lithography using charged particle beam or light, or plasma etching Terephthalate, polyethylene naphthalate, polypropylene, polycarbonate, polyvinyl chloride, polyvinylidene chloride, polyvinyl alcohol, polystyrene, polyvinyl alcohol, polyacrylonitrile, ethylene vinyl acetate copolymer, ethylene-vinyl alcohol copolymer, ethylene-methacrylic acid It is preferable to transfer the structure to a resin on a flexible base material (a flexible base material) made of a copolymer, nylon or the like. It is preferable that any one of photo-curing property, thermosetting property, or thermoplastic property is applied to the resin. Further, when forming the droplet transport structure 11 on the surface of a three-dimensional object to be described later, it is preferable that the resin material has releasability with respect to the material constituting the droplet transport structure 11, particularly the film plate. When a photocurable resin is applied to the photocurable resin, it is more preferable to use a photocurable resin containing fluorine or a photocurable resin mixed with siloxane oil.

  As the structure formed on the original plate, either the same design as the droplet transport structure 11 or its inverted structure can be applied depending on the number of times of transfer from the original plate in the film plate manufacturing method. The resin structure formed on the film plate is an inverted structure of the droplet transport structure 11.

  The microfabrication technology applied to the master fabrication, particularly the nanoimprint master fabrication using charged particle beam lithography and plasma etching substrate processing technology, has a fine structure in order to prevent the shape of the fine structure from changing in a later process. Is formed first, and a structure having a large size may be formed sequentially while protecting the substrate with a resist or the like. For example, the first aggregate formed in the area corresponding to the first section and the third aggregate formed in the area corresponding to the second section have the same design, or the first aggregate formed in the first section When the structural height Ha is equal to the structural height Hc of the third aggregate formed in the second section, the first aggregate and the third aggregate are collectively formed on the substrate as the original plate. Subsequently, the region corresponding to the second section may be etched by masking the region other than the region to be etched of the structure B with a resist, and each step of substrate processing by charged particle beam lithography and plasma etching is performed in 2 steps. A cycle may be carried out. When the structural height Ha of the first aggregate formed in the first section is different from the structural height Hc of the third aggregate formed in the second section, it is necessary to produce each aggregate in separate cycles. For this reason, the above-described steps may be performed for 3 cycles.

  In this way, since the outside of the processing region is protected and processed by masking, at least the position in the thickness direction of the original substrate for nanoimprinting is the same in the region that is not etched in all the cycles of the substrate processing. That is, at least the top surfaces of the concavo-convex structure forming the first aggregate and the third aggregate formed on the nanoimprint original plate have the same position in the thickness direction of the nanoimprint original plate. Accordingly, the droplet transport structure formed by transferring from the nanoimprint master is formed on the bottom surface of the first assembly having the convex or concave structure formed on the first section and on the second section. The position of the bottom surface of the third aggregate having the convex structure is the same in the thickness direction, and the droplet transporting structure formed by the transfer is used as a duplicate plate. The positions of the upper surface of the concavo-convex structure forming the aggregate and the third aggregate are the same in the thickness direction of the nanoimprint original plate. A driving force for transporting droplets by a contact angle difference in terms of water can be obtained regardless of whether the droplet transporting structure portion is formed on the nanoimprint original plate or the droplet transporting structure portion having the inverted structure.

  In the charged particle beam drawing process, the amount of resist dissolved in the development process can be adjusted by modulating the exposure amount. By using the technique, it is possible to form all the structures at the same time even if the structures have different structure heights. Furthermore, if an electroforming process is performed on the structure formed on the resist, it is also possible to produce a nanoimprint master plate in which an inverted structure of the structure formed on the resist is formed on the surface of a metal material such as nickel. It is. In the charged particle beam lithography process in which the exposure amount is modulated, the position in the thickness direction of the original plate for nanoimprinting is the same in a region where the charged particle beam is not exposed.

  In the step of forming the first aggregate formed in the first section, the second aggregate formed in the second section, and the resist structure of the third aggregate by the charged particle beam drawing process, Alternatively, one of the outer angles is designed as a polygon having a 90 ° angle, and the boundary line between the first and second zones is formed from a quadrangle whose vertex is 90 ° as shown in FIG. By adopting a design in which each of the first and second sections occupies each section divided into a matrix shape, for example, by applying a variable-shaped charged particle beam drawing apparatus, it is possible to produce a high-throughput master. Become.

[Method of manufacturing a droplet transport structure on the surface of a three-dimensional object]
As a manufacturing method of the droplet transport structure part 11 to the three-dimensional object surface, for example, a photocurable resin is applied to the three-dimensional object surface, and the photocuring is performed by applying the structural surface of the film plate to the three-dimensional object surface. After pressing the photocurable resin against the curable resin and curing the photocurable resin by light irradiation, the film plate is released from the surface of the three-dimensional object, or the photocurable resin is applied to the structural surface of the film plate, Is preferably adhered to the surface of the three-dimensional object, and after curing the photocurable resin by light irradiation, the film plate is preferably released from the surface of the three-dimensional object. The photocurable resin may be replaced with, for example, a thermosetting resin, and a resin effect method using heat may be applied. However, when using the film plate of this embodiment, the photocurable resin is used from the viewpoint of heat resistance. Is preferably used.
In order to form the droplet transporting structure 11 so as to follow the surface of the three-dimensional object, it is possible to appropriately optimize the design of the original plate produced in the film plate manufacturing process.

  Hereinafter, an embodiment of the present invention will be described. First, in order to prepare a master plate for nanoimprinting, a silicon substrate is prepared, and a resist FEP-171 (manufactured by FUJIFILM Electronics Materials) for charged particle beam tourism is applied to the silicon substrate surface by spin coating, followed by drying by baking. Went. The resist film thickness after baking was 150 nm. Subsequently, a charged particle beam was irradiated onto a region 21 having Lx of 7.5 cm and Ly of 5 cm shown in FIG. 5A on the silicon substrate on which the resist film was formed. An enlarged view of FIG. 5 (a) is FIG. 5 (b), and a pattern having a design in which Ph is 280 nm and Dh is 200 nm is drawn. After the drawing process, the silicon substrate was taken out, developed with baking and 2.38% tetramethylammonium hydroxide aqueous solution. In the region 21 irradiated with the charged particle beam in the drawing process, the silicon substrate exposed with silicon was etched by inductively coupled plasma in which sulfur hexafluoride and perfluorocyclobutane were introduced at a ratio of 1: 5. . The depth of silicon processed in the etching process was 40 nm. The remaining resist was peeled off, and a resist FEP-171 for charged particle beam tourism was applied to the silicon substrate on which the pattern of FIG. 5A was formed on the surface by spin coating, followed by drying by baking. The resist film thickness after baking was 1 μm. Subsequently, a charged particle beam was irradiated onto the region 22 shown in FIG. 5C on the silicon substrate on which the resist film was formed. An enlarged view of FIG. 5 (c) is FIG. 5 (d), and a pattern with a design in which Ph is 10 μm and Dh is 5 μm is drawn. After the drawing process, the silicon substrate was taken out, developed with baking and 2.38% tetramethylammonium hydroxide aqueous solution. In the region 22 irradiated with the charged particle beam in the drawing process, the silicon substrate exposed with silicon was etched by inductively coupled plasma in which sulfur hexafluoride and perfluorocyclobutane were introduced at a ratio of 1: 5. . The depth of silicon processed in the etching process was 1.5 μm. The remaining resist was peeled off, and OPTOOL HD-1100 (manufactured by Daikin Industries) was applied to the surface to obtain a master plate for nanoimprinting.

  Next, an appropriate amount of an ultraviolet curable resin is discharged onto the surface of the nanoimprint original plate, and an easy-adhesion surface of Cosmo Shine A4100 (manufactured by Toyobo Co., Ltd.) is placed facing the surface of the nanoimprint original plate. As a result, a film plate was obtained in which an inverted structure of the droplet transport structure portion of the original master for nanoimprint made of ultraviolet curable resin was formed on the easy adhesion surface side of the Shine A4100.

  Subsequently, an ultraviolet curable resin having releasability with respect to the ultraviolet curable resin on the surface of the replication plate is applied on a silicon substrate, and the surface on which the structure of the replication plate for nanoimprint is formed is the surface of the silicon substrate. Inverted structure of the droplet transport structure part of the replication plate for nanoimprint on the surface of the ultraviolet curable resin applied on the silicon substrate by roller pressure and ultraviolet irradiation, that is, the master plate for nanoimprint A silicon substrate having the same structure as that shown in FIG. 5E was obtained.

In the silicon substrate on which the same structure as the droplet transport structure of the original nanoimprint plate was formed, the contact angle of water in the flat region where the structure was not formed was 113 °. On the other hand, the contact angle of water in the region 31 shown in FIG. 5 (e) is 153 °, and the contact angle of water in the region 32 shown in FIG. 5 (e) is 44 °. It was confirmed that droplets were transported from 31 toward the region 32.
As mentioned above, although embodiment of this invention was explained in full detail, actually, it is not restricted to said embodiment, Even if there is a change of the range which does not deviate from the summary of this invention, it is included in this invention.

  The droplet transport structure for transporting droplets according to the present embodiment is capable of transporting water droplets attached to the surface in a specific direction. Since it is possible to prevent a decrease in light transmittance, application to the panel surface for solar power generation is expected.

11, 12, 13 ... droplet transport structure 21, 22 ... charged particle beam irradiation area 31, 32 ... area

Claims (11)

At least a surface is defined in the first section and the second section where the concavo-convex structure is formed,
In the first section, a first aggregate composed of convex parts and concave parts having at least an average distance Pa between centers of the concavo-convex structure in the first section of 100 nm or more and 400 nm or less is formed,
In the second section, a second aggregate composed of convex parts and concave parts having at least an average distance Pb between the centers of the concavo-convex structures in the second section of 1 μm or more and 100 μm or less is formed,
A film plate, wherein a droplet transport structure having a contact angle in water equivalent of the first section larger than the contact angle in water equivalent of the second section is formed on a flexible substrate.   2. The film according to claim 1, wherein an area ratio of a bottom surface of the concave portion formed in the first section in the droplet transport structure is larger than an area ratio of an upper surface of the convex section formed in the first section. Edition. The average height Ha of the convex portions of the first aggregate in the droplet transporting structure portion is equal to or less than the average value Pa of the center-to-center distance of the concavo-convex structure formed in the first partition,
The film plate according to claim 1 or 2, wherein the average height Hb of the convex portions of the second aggregate is higher than the average height Ha.   The film plate according to any one of claims 1 to 3, wherein the average height Ha of the droplet transporting structure is 15 nm or more and 100 nm or less.   At least a third aggregate composed of convex portions and concave portions is formed on the upper surface of the convex portion formed in the second section in the droplet transporting structure portion, and the center-to-center distance Pc of the concave-convex structure of the third aggregate is set. The film plate according to any one of claims 1 to 4, wherein the average value is 100 nm or more and 400 nm or less.   In a cross-sectional view of a region where the first section and the second section are adjacent to each other in the droplet transport structure, the top surface of the first assembly and the top surface of the third assembly are in the same position in the thickness direction. The film plate according to any one of claims 1 to 5.   In a cross-sectional view of a region where the first section and the second section are adjacent to each other in the droplet transport structure, the bottom surface of the first assembly and the bottom surface of the third assembly are in the same position in the thickness direction. The film plate according to any one of claims 1 to 5.   The concavo-convex structure formed in the first section and the second section in the droplet transporting structure section is made of a photocurable resin containing fluorine. The film version described.   The concavo-convex structure formed in the first section and the second section in the droplet transporting structure section is composed of a photocurable resin mixed with siloxane oil. The film version described in 1. At least a step of applying a photocurable resin to the surface of the three-dimensional object forming the droplet transport structure; and
The step of pressing the droplet transport structure portion of the film plate according to any one of claims 1 to 9 to a photocurable resin coated on the surface of the three-dimensional object;
Irradiating light and curing the photocurable resin;
And a step of releasing the film plate from the cured three-dimensional object surface. At least a step of applying a photocurable resin to the droplet transport structure of the film plate according to any one of claims 1 to 9,
A step of closely adhering the surface of the three-dimensional object and the coated photocurable resin;
Irradiating light and curing the photocurable resin;
And a step of releasing the film plate from the cured photocurable resin.

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