JP2019158441A - Inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection device capable of maintaining a positional relationship at a constant distance suitable for inspection even while traveling. SOLUTION: A traveling unit 20 which is attached to a support unit SU and travels in contact with a floor surface FL to be inspected is adjusted in height by a posture adjusting unit 40 to inspect the device and the device while traveling. Even if the positional relationship with the target changes, the posture of the inspection unit 30 with respect to the floor surface FL is adjusted accordingly, and the state of the positional relationship suitable for inspection by the terahertz wave TW, which is the measured wave from the inspection unit 30, is obtained. maintain. [Selection diagram] Fig. 1

Description

  The present invention relates to an inspection apparatus that inspects a state of an inspection object using, for example, an electromagnetic wave in a terahertz wavelength band (hereinafter referred to as a terahertz wave) as a measurement wave.

  The surface and the inside of the inspection object have been inspected using various electromagnetic waves, but terahertz waves, which are a type of electromagnetic wave, can be inspected inside by passing under dirt and coatings. Application to deterioration inspection of tunnels, bridges and oil tanks is expected. However, the wavelength of the terahertz wave is longer than that of a light wave such as infrared light, and has a property of being diffracted and spread, so that the degree of occurrence of defocusing with respect to a change in distance increases. Therefore, in order to inspect the deterioration state of the infrastructure structure as described above, the distance relationship satisfies a certain requirement, specifically, the infrastructure structure is determined from the transmission position and reception position of the terahertz wave. It is necessary that the control to maintain a high accuracy so that the distance to the position of the detection target or inspection target such as the coated surface portion in the object is constant, and further, while performing such control, It is necessary to perform inspection while traveling in the infrastructure structure, that is, while traveling on the inspection target.

  On the other hand, as an inspection method using terahertz waves, for example, a configuration in which the distance from a sample (measurement object) to be inspected placed on a mounting table is kept constant by a distance adjustment mechanism using a prism is used. Is known (see Patent Document 1). However, with the configuration of Patent Document 1, it is not possible to perform inspection while traveling.

  In addition, although not using a terahertz wave, an underground exploration device is known as a traveling type inspection device using position change detection (see Patent Document 2). In the underground exploration device of Patent Document 2, it is described that, when it is detected that the position change is detected as being separated from the ground, an erroneous measurement is avoided by interrupting the exploration operation. However, even if such a technique is used, it is not always possible to maintain a highly accurate positional relationship with respect to an inspection target required for terahertz waves.

Japanese Patent Laid-Open No. 2006-90314 JP 2006-317445 A

  The present invention has been made in view of the above points, and an object of the present invention is to provide an inspection apparatus capable of maintaining a positional relationship that is a constant distance suitable for inspection even while traveling. .

  In order to achieve the above object, an inspection apparatus according to the present invention includes a traveling unit that is attached to a support unit and travels in contact with an inspection target, and an inspection unit that is supported by the support unit and transmits a measurement wave toward the inspection target. And a posture adjustment unit that adjusts the posture of the inspection unit so that the distance from the inspection unit to the inspection target is within the inspectable range by adjusting the height of the traveling unit.

  In the inspection apparatus, the positional relationship between the inspection apparatus itself and the inspection object changes with traveling by adjusting the height of the traveling part attached to the support part and traveling in contact with the inspection object in the posture adjustment unit. Even so, since the posture of the inspection unit with respect to the inspection object can be adjusted accordingly, it is possible to maintain a suitable positional relationship in the inspection using the measurement wave from the inspection unit. For example, the distance between the inspection unit and the inspection object can be kept constant. In this case, for example, when a terahertz wave or the like is used as the measurement wave, it is possible to suppress the spread of the measurement wave transmitted from the inspection unit and form a narrow spot diameter that is sufficiently condensed at the position of the inspection target. .

  In a specific aspect of the present invention, the posture adjustment unit adjusts the height of the traveling unit from the contact point with the inspection target to the attachment point to the support unit. In this case, the distance from the inspection unit to the inspection object can be reliably adjusted by adjusting the height of the above portion.

  In another aspect of the present invention, the posture adjustment unit adjusts the position so that the distance from the emission position of the measurement wave from the inspection unit to the outside of the apparatus and the inspection target is maintained within a predetermined range. In this case, the distance from the inspection unit to the inspection object can be adjusted by the position adjustment.

  In still another aspect of the present invention, the attitude adjustment unit adjusts the angle of the measurement wave transmitted from the inspection unit so that the direction with respect to the inspection target is maintained within a predetermined range. In this case, the distance and direction from the inspection unit to the inspection object can be adjusted by the angle adjustment.

  In still another aspect of the present invention, the posture adjustment unit includes a displacement meter that is provided at a predetermined position according to the traveling direction of the traveling by the traveling unit and measures a change in the distance from the inspection target at the predetermined position. The posture of the inspection unit is adjusted according to the change measured by the displacement meter. In this case, the displacement can be adjusted while capturing the change in distance.

  In still another aspect of the present invention, the displacement meter includes an electromagnetic wave emission side displacement meter provided on the front side in the traveling direction at a position where the measurement wave from the inspection unit is emitted to the outside of the apparatus. In this case, it is possible to capture a change in the distance in the forward direction of the inspection unit.

  In still another aspect of the present invention, the displacement meter includes a traveling unit side displacement meter provided on the front side in the traveling direction of the traveling unit. In this case, it is possible to capture a change in distance in the traveling direction of the traveling unit.

  In still another aspect of the present invention, the traveling unit includes a front contact portion that configures the front side with the inspection unit interposed in the traveling direction, and a rear contact portion that configures the rear side. In this case, the posture of the inspection unit can be adjusted by adjusting the contact portions provided on the front and rear sides of the inspection unit.

  In still another aspect of the present invention, the traveling unit is configured by wheels or an endless track traveling on the ground. In this case, it is possible to reliably adjust the posture while maintaining the state of being installed on the ground.

  In still another aspect of the present invention, the support portion is a pedestal portion of a carriage, and the inspection portion is provided on the lower surface side of the pedestal portion, and transmits a measurement wave downward. In this case, it is possible to perform measurement toward the lower surface while supporting and fixing each portion in the pedestal portion.

  In still another aspect of the present invention, the terahertz inspection apparatus transmits a terahertz wave as a measurement wave in the inspection unit. In this case, the surface and the inside of the inspection target can be accurately inspected by the terahertz wave.

It is a conceptual side view for demonstrating an example about the inspection apparatus which concerns on embodiment. It is a key map for explaining an example about an inspection part. (A) is a conceptual diagram for demonstrating the characteristic of a terahertz wave, (B) is a conceptual diagram for demonstrating the condensing state of a terahertz wave. (A)-(G) are the conceptual diagrams which show an example about driving | running | working operation | movement of an inspection apparatus. It is a graph shown about the distance and height of each part corresponding to the operation | movement shown in FIG. It is a conceptual top view for demonstrating attitude | position adjustment. It is a flowchart for demonstrating an example of a series of measurement operation | movement by a test | inspection apparatus. It is a conceptual front view for demonstrating the test | inspection part of a modification. It is a notional side view for demonstrating the inspection apparatus of one modification.

  Hereinafter, an example of an inspection apparatus according to an embodiment will be described with reference to FIG. FIG. 1 is a diagram illustrating an example of a schematic configuration of an inspection apparatus. The inspection apparatus 100 as one aspect of the present embodiment is provided with wheels or tires constituting the traveling unit 20 and is attached to a plate-like support unit SU serving as a pedestal unit by attaching a handle part HD, It has a structure, and it is inspected by transmitting a measurement wave toward the inspection object and receiving a component reflected by the inspection object while traveling by the tire. In the illustrated example, a terahertz wave TW of a predetermined wavelength band as a measurement wave is transmitted downward to irradiate the coated floor surface FL to be inspected.

  In order to perform the inspection as described above, the inspection apparatus 100 includes the main body portion 10 attached to the support portion SU, the above-described tire, and the like in addition to the support portion SU and the handle portion HD described above. With. Among these, the main body portion 10 measures a change in the distance between the inspection unit 30 that transmits the terahertz wave TW as a measurement wave, the posture adjustment unit 40 that adjusts the posture of the inspection unit 30, and the inspection apparatus 100 and the inspection target. And a main control unit 80 for controlling the operation of each unit. Further, in the illustrated example, the traveling unit 20 is configured by a plurality of wheels or tires so as to travel in contact with the floor surface FL to be inspected and attached to the support unit SU. In other words, in the illustrated example, the traveling unit 20 includes a plurality of contact portions 20F and 20B that are wheels or tires, and travels on the floor surface FL. Here, of the contact portions 20F and 20B, the one located on the front side with respect to the traveling direction indicated by the arrow D1 is referred to as the front side contact portion 20F, and the one located on the rear side is referred to as the rear side contact portion 20B. . The traveling unit 20 is a four-wheel system including a pair of front contact parts 20F and 20F and a pair of rear contact parts 20B and 20B, as will be described later with reference to FIG. 6, for example. Further, as described above, in the illustrated trolley-shaped inspection apparatus 100, the support unit SU is a pedestal part of the trolley, and the inspection unit 30 is provided on the lower surface side of the support unit SU that is the pedestal part. A terahertz wave TW is transmitted downward. That is, the inspection apparatus 100 inspects the state of the floor surface FL by performing measurement by injecting the terahertz wave TW toward the lower surface while supporting and fixing each part of the main body portion 10 in the support unit SU as a pedestal unit. It is supposed to be.

  Further, as shown in the figure, the traveling direction of the inspection apparatus 100 indicated by the arrow D1 is the Z direction, and the vertical direction, that is, the direction toward the floor surface FL is the Y direction in a plane perpendicular to the Z direction. The horizontal direction, which is a direction orthogonal to both of the Y directions, is taken as the X direction. In the figure, the downward direction, which is the direction in which the terahertz wave TW is transmitted (emitted), is the + Y direction.

  Hereinafter, the details of each part which constitutes inspection device 100 are explained. First, in the main body portion 10, the inspection unit 30 includes a transmission unit Tx that transmits the terahertz wave TW, a reception unit Rx that receives the reflection component RW reflected by the inspection target, a half mirror, and the like. It includes a beam splitter BS that transmits and reflects TW, a galvanometer mirror GM as a scanning mirror, and a lens LS that transmits scanning light from the galvanometer mirror GM to the outside of the apparatus. The terahertz wave TW is transmitted while being condensed from the lens LS toward the floor surface FL to be inspected, that is, in the + Y direction.

  In the case of illustration, the inspection unit 30 is sandwiched between the front side contact portion 20F constituting the front side and the rear side contact portion 20B constituting the rear side in the traveling direction indicated by the arrow D1 in the traveling unit 20. Exists in position.

  Hereinafter, with reference to FIG. 2, a configuration example of each unit of the above-described inspection unit 30 will be described in more detail.

  First, the transmitter Tx is an electromagnetic wave transmitter that transmits, for example, a terahertz wave TW having a frequency band of 0.1 to 2 THz, that is, a wavelength band of 150 to 3000 μm, with the direction of the optical axis AX as the center of the traveling direction. is there.

  The receiving unit Rx is an electromagnetic wave receiving device or an electromagnetic wave measuring device capable of receiving a component in the wavelength band of the terahertz wave TW. The receiving unit Rx receives the reflection component RW reflected from the floor surface FL, which is the detection target, of the terahertz wave TW. In the drawing, one receiving unit Rx is used, but the receiving side may be configured by a plurality of receiving units, or may be configured by including a plurality of light receiving elements in one receiving unit Rx. is there. By using a plurality, it is possible to more accurately grasp the change state of the reflection component RW.

  In addition, the beam splitter BS is configured by, for example, a half mirror, and a transmission / reflection surface formed by the half mirror is disposed on the optical axis AX of the transmitter Tx so as to be inclined by 45 ° with respect to the optical axis AX. The receiving unit Rx is disposed at a position symmetrical to the transmitting unit Tx with respect to the beam splitter BS, and the component of the reflected component RW is acquired by receiving the component of the return light reflected by the beam splitter BS. .

  The galvanometer mirror GM is arranged on the optical axis AX at a certain distance from the transmitter Tx, and rotates (swings) about one axis around an axis orthogonal to the optical axis AX, for example. . That is, scanning in the uniaxial direction of the terahertz wave TW is performed. The scanning direction can be variously set depending on the arrangement of the optical system, but typically, the scanning is performed in the horizontal direction perpendicular to the traveling direction (Z direction) shown in FIG. 1, that is, the X direction. Conceivable.

  The lens LS is disposed between the galvanometer mirror GM and the floor surface FL so as to emit the scanning light from the galvanometer mirror GM toward the floor surface FL, which is a detection target outside the apparatus.

Returning to FIG. 1, in the main body portion 10, the posture adjustment unit 40 includes a front-side height adjustment unit 40 </ b> F that adjusts the height of the front-side contact unit 20 </ b> F in the traveling unit 20, and a rear side in the traveling unit 20. It is comprised with the back side height adjustment part 40B which adjusts the height of the contact part 20B. Each height adjustment part 40F and 40B is comprised by a hydraulic cylinder etc., for example, and the height of each contact part 20F and 20B with respect to the support part SU is enabled. That is, the posture adjustment unit 40 can individually adjust the heights of the contact portions 20F and 20B, that is, the traveling unit 20, from the contact point with the floor surface FL to be inspected to the attachment point to the support unit SU. In the following, for the description of height adjustment, as illustrated in FIG., The distance from the rotation center XXa anterior contact portion 20F to the upper surface SUa of the support portion SU and the height H _f, the rotation of the rear-side contact portion 20B the distance from the center XXb to the top surface SUa and the height _{H b.} That is, the front-side height adjustment unit 40F, the height adjustment, change the value of the height H _f, rear height adjustment unit 40B changes the value of the height H _b. Since the height of the traveling unit 20 can be adjusted by the height adjusting units 40F and 40B constituting the posture adjusting unit 40, the posture adjusting unit 40 can move from the inspection unit 30 to the floor surface FL to be inspected. The posture of the inspection unit 30 is adjusted so that the distance is within the inspectable range.

Next, in the main body portion 10, the displacement meter 60 is a traveling unit side displacement meter, and the first traveling unit side displacement meter 60F provided in the immediate front of the front contact portion 20F in the traveling direction, and the traveling direction. Is provided with a second traveling portion side displacement meter 60B provided immediately in front of the rear side contact portion 20B. Furthermore, the displacement meter 60 includes an electromagnetic wave emission-side displacement meter 60L provided in a position in front of the inspection unit 30 in the traveling direction and provided at a position where the terahertz wave TW from the inspection unit 30 is emitted to the outside of the inspection device 100. Configured. Each displacement meter 60F, 60B, 60L is composed of, for example, an infrared sensor or the like, and measures the distance to the floor surface FL by capturing a reflection component of infrared light irradiated in the + Y direction. That is, each displacement meter 60F, 60B, 60L measures the distance to the floor surface FL. In this case, each displacement meter 60F, 60B, 60L is provided immediately in front in the traveling direction of each corresponding part, so that the displacement of each part during traveling can be measured in advance. In the following, as shown in FIG, the measurement result of the first running portion side displacement gauge 60F and the distance d _f, the measurement result obtained by the second driving unit side displacement gauge 60B and the distance d _b, the electromagnetic wave emission side displacement meter the measurement results of 60L and the distance _{d l.}

  Finally, the main control unit 80 of the main body portion 10 is configured by a CPU or the like, and controls the operation of each unit. In particular, in this embodiment, the travel control unit 81 that controls the travel of the inspection apparatus 100, and the attitude And a posture control unit 82 that controls the posture of the inspection unit 30 with respect to the inspection object by adjusting the height of the adjustment unit 40.

  The traveling control unit 81 appropriately operates a power supply device (not shown) and the traveling unit 20 to enable autonomous traveling. That is, in the illustrated example, the handle 100 is attached to the support unit SU in the inspection apparatus 100 and can be driven by a human hand. However, the driving control is provided by appropriately including a drive source. Under the control of the part 81, it is possible to travel autonomously.

  The posture control unit 82 controls each part of the posture adjustment unit 40 to control the posture of the inspection unit 30 located between the front contact unit 20F and the rear contact unit 20B constituting the rear side. Adjustable. For example, the attitude control unit 82 is connected to the displacement meters 60F, 60B, and 60L, and acquires measurement results at the displacement meters 60F, 60B, and 60L, that is, information on the presence or absence of displacement. Accordingly, the posture control unit 82 performs the height adjustment by the posture adjustment unit 40 so as to cancel the change in the distance based on the notified presence / absence of the displacement, whereby the floor surface FL to be inspected from the inspection unit 30. The posture is controlled so that the distance up to is within the inspectable range. In addition, the attitude control unit 82 includes a level 82a and detects whether or not the inspection unit 30 is horizontal. In the case of the illustrated configuration, it can be determined whether or not the inspection unit 30 is horizontal by detecting whether or not the support unit SU to which the inspection unit 30 is attached is in a horizontal state.

  With the configuration as described above, the inspection apparatus 100 can inspect the floor surface FL using the terahertz wave TW. That is, in the inspection apparatus 100, the terahertz wave TW is transmitted from the transmission unit Tx of the inspection unit 30 toward the floor surface FL, and the reflection component RW reflected by the floor surface FL is received by the reception unit Rx of the inspection unit 30. Thus, as shown partially enlarged in the figure, not only the fine irregularities TP on the surface that cannot be seen by the eyes, but also the floor surface FL constituted by applying the coating film PF on the metal plate MP. It is possible to detect rust RU generated inside. At this time, further, in the present embodiment, the posture adjustment unit 40, the displacement meter 60, and the like cooperate, so that, for example, when there is a step SP on the floor surface FL to be inspected, the inspection unit The 30 postures can always maintain a constant distance with respect to the floor surface FL. The floor surface FL to be inspected is configured by applying the coating film PF on the metal plate MP as described above, and a portion such as a step SP is formed by a seam or the like of the metal plate MP. If the distance from the inspection unit 30 to the floor surface FL changes due to such a level difference, the inspection in the inspection unit 30 may be affected, particularly when terahertz waves are used. , It will have characteristics that increase the possibility of being affected.

  Hereinafter, the characteristics of the terahertz wave and the like will be described with reference to FIG. A terahertz wave generally has a characteristic of generating a diffraction phenomenon that spreads as it progresses. In this respect, the characteristics are different from those of infrared light having linearity. For example, as shown in FIG. 3A, when a terahertz wave TW is transmitted with the extending direction of the optical axis AX as a central direction, diffraction occurs even if the light is parallelized by a lens LS or the like. It does not look like an ideal light beam IM that keeps parallel as indicated by the broken line, but gradually spreads and does not converge. Therefore, for example, as shown in FIG. 3B, even if the lens LS is used to collect the terahertz wave TW as an emission component from the light source, the spot of the terahertz wave TW in the direction along the direction of the optical axis AX. The allowable range DD1 in which the diameter is kept small enough to be suitable for measurement inspection is very limited. In other words, the inspection possible range in the inspection unit 30 is limited. In particular, it is considered that the influence of the diffraction phenomenon is large in an electromagnetic wave on the low frequency side in which the frequency in the wavelength band is 0.1 to 2 THz.

  On the other hand, in the present embodiment, as described above, the posture adjustment unit 40 allows the inspection unit 30 to adjust the distance to the floor surface FL to be inspected within the inspectable range. That is, in the present embodiment, for example, in FIG. 1, the distance HH from the lower surface (back surface) SUb of the support unit SU to which the inspection unit 30 is attached to the floor surface FL to be inspected is within the inspectable range. It is very important to maintain, and this is achieved by adjustment or the like in the posture adjustment unit 40. In other words, the posture adjustment unit 40 adjusts the position so that the distance from the position of the terahertz wave TW emitted from the inspection unit 30 to the outside of the inspection apparatus 100 and the floor surface FL is kept within a predetermined range.

Hereinafter, an example of the traveling operation of the inspection apparatus 100 will be described with reference to FIG. 4 (A) to 4 (G) are conceptual diagrams illustrating an example of the running operation of the inspection apparatus. Here, as shown in the figure, a case will be described in which the height changes due to the presence of the step SP in front of the traveling direction of the inspection apparatus 100. In FIG. 4, to simplify the explanation, it is assumed that a step SP having a certain height exists in a part of the flat floor surface FL, but the same applies to the case of other shapes. Operation is possible. FIG. 5 is a graph showing how the distances d _f , d _b , d _l and the heights H _f , H _b correspond to the operations shown in FIGS. 4 (A) to 4 (G).

First, as shown in FIG. 4A, in the inspection apparatus 100, the first traveling unit side displacement meter 60F provided immediately in front of the front contact portion 20F reaches the step SP of the floor surface FL. doing, by the amount of the height of the step SP, the value of the distance d _f becomes smaller (see FIG. 5).

Posture control unit 82 of the inspection device 100 detects change in the distance d _f, after a predetermined distance move, starts the operation of pulling the front contact portion 20F. Specifically, as a premise, the distance from the first traveling unit side displacement meter 60F to the front side contact unit 20F is already known in the traveling direction (Z direction), and the distance corresponding to this is moved. together, raise the front contact portion 20F upward (-Y side), i.e., adjusted to a value of the height H _f decreases. As described above, the support unit SU is kept horizontal and the distance from the inspection unit 30 to the floor surface FL is maintained.

When the pulling up of the front side contact portion 20F is completed, the state as shown in FIG. 4 (B) is obtained, and when further progressing, the electromagnetic wave emission side displacement meter 60L provided immediately in front of the inspection portion 30 is now stepped. by reaching in the SP, the amount corresponding to the height of the step SP, the value of the distance d _l is small (see FIG. 5).

When the posture control unit 82 detects a change in the distance _dl , the movement of the front-side contact unit 20F and the rear-side contact unit 20B is performed after the predetermined distance of movement to lift the entire apparatus except the traveling unit 20, that is, the support unit SU. To start. Specifically, as a premise, first, the distance from the electromagnetic wave emission side displacement meter 60L to the emission position of the terahertz wave TW in the inspection unit 30 is known in the traveling direction (Z direction), and it moves by a distance corresponding thereto. Accordingly, the support portion SU is pulled up (−Y side), that is, the front side contact portion 20F and the rear side contact portion 20B are pulled down to increase the values of the heights H _f and H _b , and the distance d Adjust so that the value of _l is the same as before the change. As described above, the support unit SU is horizontal, and the distance from the inspection unit 30 to the floor surface FL (step SP) is maintained. The value of the distance d _l is fit to be the same as before the change, it will be the value of the distance d _f which was smaller back to the same state as before the change (see Fig. 5). Further, the values of the height H _f also go back to the same state as before the change (ibid). About height _Hb , it becomes larger than the case of FIG. 4 (A) (same as above).

When the lifting of the support unit SU is completed, the state as shown in FIG. 4C is obtained. When the support unit SU is further advanced, the first traveling unit side displacement meter 60F is now ahead of the end of the step SP of the floor surface FL. by reaching the, for example, by the amount of the height of the step SP, the value of the distance d _f is increased (see FIG. 5).

Posture control unit 82 detects a change in the distance d _f, after a predetermined distance move, starts the operation to lower the front side contact portion 20F. More specifically, the front contact portion 20F is moved downward (+ Y side) as it moves by a distance corresponding to the distance from the known first traveling portion side displacement meter 60F to the front contact portion 20F. lowering, i.e., adjusted to a value of the height H _f increases (see FIG. 5). As described above, the support unit SU is horizontal, and the distance from the inspection unit 30 to the floor surface FL (step SP) is maintained.

When the lowering of the front side contact portion 20F is completed, the state as shown in FIG. 4D is obtained, and when further progressing, the electromagnetic wave emission side displacement meter 60L now reaches the end of the step SP. , by the amount of the height of the step SP, the value of the distance d _l is increased (see FIG. 5).

When the posture control unit 82 detects a change in the distance _dl , the movement of the front side contact unit 20F and the rear side contact unit 20B is performed after the predetermined distance of movement so as to lower the entire apparatus except the traveling unit 20, that is, the support unit SU. To start. More specifically, the support unit SU is lowered downward (+ Y side) as it moves by a distance corresponding to the distance from the known electromagnetic wave emission side displacement meter 60L to the injection position of the inspection unit 30, that is, The front side contact portion 20F and the rear side contact portion 20B are pulled up to reduce the values of the heights H _f and H _{b so that} the value of the distance d _l is adjusted to be the same as before the change. As described above, the support unit SU is kept horizontal and the distance from the inspection unit 30 to the floor surface FL is maintained. The distance the value of d _l is fit to be the same as before the change, large which has been a distance d _f, go back to the same state as before the change the value of d _b (Id.).

When the lowering of the support unit SU is completed, the state as shown in FIG. 4E is obtained. When the support unit SU is further advanced, the second travel unit side displacement meter 60B provided immediately in front of the rear side contact unit 20B is reached. but by reaching the step SP floor FL, by the amount of the height of the step SP, the value of the distance d _b is less (see FIG. 5).

Posture control unit 82 detects a change in the distance d _b, after a predetermined distance move, starts the operation of pulling up the rear-side contact portion 20B. Specifically, as a premise, the distance from the second traveling unit side displacement meter 60B to the rear side contact unit 20B is known in the traveling direction (Z direction), and the distance corresponding to this is moved. At the same time, the rear side contact portion 20B is pulled upward (−Y side), that is, the height _Hb is adjusted to be small. As described above, the support unit SU is kept horizontal and the distance from the inspection unit 30 to the floor surface FL is maintained.

When the lifting of the rear side contact portion 20B is completed, the state as shown in FIG. 4 (F) is obtained. When the rear side contact portion 20B is further advanced, this time, the second traveling portion side displacement meter 60B arrives before the end of the step SP. doing, by the amount of the height of the step SP, the value of the distance d _b is greater (see Figure 5).

Posture control unit 82 detects a change in the distance d _b, after a predetermined distance move, starts the operation to lower the rear contact portion 20B. More specifically, the rear contact portion 20B is moved downward (+ Y side) in accordance with the movement of the distance corresponding to the distance from the known second traveling portion side displacement meter 60B to the rear contact portion 20B. Pull down, that is, adjust so that the value of the height _Hb increases. As described above, the support unit SU is kept horizontal and the distance from the inspection unit 30 to the floor surface FL is maintained.

  When the lowering of the rear side contact portion 20B is completed, the state shown in FIG. 4G is obtained, and the inspection apparatus 100 continues traveling while further inspecting as necessary.

  FIG. 6 is a conceptual plan view for explaining posture adjustment. In the above description, the description has been given focusing on the posture in the traveling direction (Z direction), but the posture can also be adjusted in the horizontal direction that is perpendicular to the traveling direction and horizontal, that is, the X direction. That is, as shown in the figure, the traveling unit 20 is a four-wheeled system including a pair of front side contact portions 20F and 20F and a pair of rear side contact portions 20B and 20B, and each contact portion 20F, 20F, 20B, It can have a pair of front side height adjustment parts 40F and 40F which adjust the height of 20B, respectively, and a pair of back side height adjustment parts 40B and 40B. As a result, the control of the posture control unit 82 can cope with, for example, a case where there are different steps on the left and right with respect to the traveling direction.

  In the case of the above configuration, the posture adjustment unit 40 can adjust the angle of the inspection unit 30 with respect to the floor surface FL to be inspected so that the orientation is maintained within a predetermined range. The distance and direction to the inspection object can be adjusted. That is, the orientation of the inspection unit 30 with respect to the floor surface FL can be maintained within a predetermined range. In performing the inspection by transmitting and receiving the terahertz wave TW, it is important to keep the distance from the inspection unit 30 to the floor surface FL constant as described above, and the direction in which the terahertz wave TW is emitted along with this. In other words, it is also important to maintain the plate-like support unit SU that supports the inspection unit 30 in a state parallel to the horizontal XZ plane. In the present embodiment, the attitude adjustment unit 40 can also adjust the angle as described above, so that the matter can be dealt with.

  Hereinafter, an example of a series of measurement operations performed by the inspection apparatus 100 according to the present embodiment will be described with reference to the flowchart of FIG.

  First, in the inspection apparatus 100, for example, a measurement range such as a range of the floor surface FL to be inspected is set (step S1). When the measurement range is set in step S1, the inspection apparatus 100 starts moving for inspection of the floor surface FL (step S2).

  Here, the inspection apparatus 100 performs distance measurement by the displacement meter 60 together with the inspection of the floor surface FL (step S3). That is, distance measurement by the displacement meter 60 is performed in step S3 in accordance with the movement in step S2. The main control unit 80 of the inspection apparatus 100 calculates the height of the traveling unit 20 to be adjusted based on the distance measured in step S3 as the posture control unit 82 (step S4), and the result of step S4 is calculated. Based on this, the posture adjustment unit 40 is caused to adjust the height (step S5). Further, the main control unit 80 as the posture control unit 82 confirms the level by the level 82a (step S6), and if the level is within the specified range (step S7: Yes), the posture of the inspection unit 30 is The intensity of the reflection component RW received by the inspection unit 30 is measured as being in the correct state (step S8). That is, the inspection result in the inspection unit 30 is stored as measurement data to be adopted. On the other hand, if it is determined in step S7 that the level is not within the specified range (step S7: No), the operation from step S4 is repeated based on the measured level. That is, the height of the traveling unit 20 is calculated again to correct based on the measured levelness (step S4), and the height adjustment based on the result of step S4 is further performed by the posture adjustment unit 40. (Step S5), the level by the level 82a is confirmed (Step S6). The above operation is repeated until the level is within the specified range (step S7: Yes).

  When the intensity measurement is performed in step S8, the inspection apparatus 100 confirms whether or not the inspection has been completed for all the measurement ranges of the floor surface FL set in step S1 (step S9). (Step S9: No), the operation from Step S2 is continued, and if completed (Step S9: Yes), the operation is terminated.

  Hereinafter, with reference to FIG. 8, a modification of the inspection unit in the inspection apparatus will be described. FIG. 8 is a conceptual front view of an inspection apparatus 100 according to a modification. The inspection unit 230 according to this modification includes a transmission unit Tx, a reception unit Rx, a beam splitter BS, a galvano mirror GM, and a lens LS, as well as a plurality of reflection mirror units MR and an absorber AB. The plurality of reflecting mirrors MR bend the optical path of the terahertz wave TW as appropriate to direct it in a desired direction. On the other hand, the absorber AB is disposed with an inclination of 45 ° with respect to the beam splitter BS. Thereby, the absorber AB absorbs the component reflected by the beam splitter BS among the components emitted from the transmitter Tx and directed to the beam splitter BS, thereby suppressing the generation of stray light and the like.

  In the illustrated example, the galvano mirror GM scans in the uniaxial direction in the scanning direction SC1, and this direction coincides with the X direction. That is, scanning is performed in the horizontal direction (lateral direction) perpendicular to the traveling direction (Z direction).

  As described above, in the present embodiment, in the inspection apparatus 100, the traveling unit 20 that is attached to the support unit SU and travels in contact with the floor surface FL to be inspected is increased in the posture adjustment unit 40. By adjusting the height, even if the positional relationship between the apparatus and the inspection object changes as the vehicle travels, the posture of the inspection unit 30 relative to the floor surface FL can be adjusted accordingly. Therefore, terahertz that is a measurement wave from the inspection unit 30 It is possible to maintain a suitable positional relationship in the inspection by the wave TW. For example, in the case of the above configuration, the distance between the inspection unit 30 and the floor surface FL can be kept constant. As a result, even if a terahertz wave TW whose range that can be inspected is likely to be limited due to its characteristics as a measurement wave, the spread of the terahertz wave TW transmitted from the inspection unit 30 is suppressed and the light is sufficiently condensed at the position of the floor surface FL. A narrow spot diameter can be formed.

[Others]
The present invention is not limited to the above embodiment, and can be implemented in various modes without departing from the scope of the invention.

  First, in the said embodiment, although the driving | running | working part 20 shall be comprised with a some wheel and tire, not only this but a various thing is applicable. For example, as shown in a modified example in FIG. 9, an endless track (crawler, or caterpillar) is applied as the traveling unit 320 of the inspection apparatus 100, and the posture adjustment unit 340 corresponding to the height adjustment of the traveling unit 320 is used. It is possible to adopt it. In addition, various things that can be adjusted in height and that can run, such as adopting a plurality of movable leg portions, can be employed.

  In addition, other modes of the displacement meter 60 and the inspection unit 30 may be considered. For example, a part of the displacement meter 60 may be omitted by utilizing the fact that the arrangement of each part, that is, the positional relationship is known. In addition, when there are multiple traveling directions, for example, when it is possible to travel not only forward but also backward, it is also possible to provide a displacement meter according to the traveling direction and switch the displacement meter to be used according to the traveling direction. It is done.

  In the above embodiment, the wavelength band of the terahertz wave TW is assumed to be a band having a frequency of 0.1 to 2 THz. However, the present invention is not limited to this and includes various terahertz wavelength bands. be able to. In particular, it is considered that the present application can be used for a band including a band where the influence of diffraction is large.

  In the above embodiment, a galvanometer mirror is used as the scanning type reflection member. However, the present invention is not limited to this, and various types such as an electromagnetic drive type, an electrostatic type, a piezoelectric type, and a thermal type are available. It is possible to apply one that drives the light reflecting surface of the driving method.

  DESCRIPTION OF SYMBOLS 10 ... Main-body part, 20 ... Running part, 20B ... Back side contact part, 20F ... Front side contact part, 20F ... Back side contact part, 30 ... Inspection part, 40 ... Posture adjustment part, 40F, 40B ... Height adjustment part 60 ... Displacement meter, 60F, 60B ... Traveling portion side displacement meter, 60L ... Electromagnetic wave emission side displacement meter, 80 ... Main control portion, 81 ... Traveling control portion, 82 ... Attitude control portion, 82a ... Level, 100 ... Inspection Device: 230 ... Inspection unit, 320: Traveling unit, 340 ... Attitude adjustment unit, AB ... Absorber, AX ... Optical axis, BS ... Beam splitter, D1 ... Arrow, DD1 ... Allowable range, df, db, dl ... Distance, FL ... Floor surface, GM ... Galvano mirror, HD ... Hand part, HH ... Distance, IM ... Light, LS ... Lens, MP ... Metal plate, MR ... Reflection mirror part, PF ... Coating, RU ... Rust, RW ... Reflective component, Rx ... receiving unit, SC1 ... scanning direction, P ... step, SU ... support portion, SUa ... top, SUb ... lower surface, TP ... unevenness, TW ... terahertz wave, Tx ... transmitter unit, XXa, XXb ... center of rotation

Claims (11)

A traveling unit that is attached to the support unit and travels in contact with the inspection object;
An inspection unit that is supported by the support unit and transmits a measurement wave toward an inspection target; and
An inspection apparatus comprising: an attitude adjustment unit that adjusts an attitude of the inspection unit so that a distance from the inspection unit to an inspection object is within an inspectable range by adjusting a height of the traveling unit.   The said posture adjustment part is an inspection apparatus of Claim 1 which adjusts the height from the contact location with a test object to the attachment location to the said support part about the said traveling part.   3. The position adjustment unit according to claim 1, wherein the posture adjustment unit adjusts a position so that a distance from an emission position of the measurement wave from the inspection unit to the inspection target is maintained within a predetermined range. 4. The inspection device described in 1.   The said posture adjustment part is an inspection apparatus as described in any one of Claims 1-3 which adjusts an angle so that the direction with respect to a test object may be kept within the predetermined range about the measurement wave transmitted from the said test | inspection part. A displacement meter is provided at a predetermined position according to the traveling direction of the traveling by the traveling unit, and measures a change in distance from the inspection target at the predetermined position,
The inspection apparatus according to claim 1, wherein the attitude adjustment unit adjusts the attitude of the inspection unit according to a change measured by the displacement meter.   The inspection apparatus according to claim 5, wherein the displacement meter includes an electromagnetic wave emission side displacement meter provided on the front side in the traveling direction at an emission position of the measurement wave from the inspection unit to the outside of the apparatus.   The inspection device according to any one of claims 5 and 6, wherein the displacement meter includes a traveling unit side displacement meter provided on a front side in the traveling direction of the traveling unit.   The said traveling part contains the front side contact part which comprises the front side on both sides of the said test | inspection part about the advancing direction, and the back side contact part which comprises the back side. Inspection equipment.   The inspection device according to any one of claims 1 to 8, wherein the traveling unit includes wheels or an endless track that travels on the ground. The support part is a pedestal part of a carriage,
The inspection device according to any one of claims 1 to 9, wherein the inspection unit is provided on a lower surface side of the pedestal unit and transmits a measurement wave downward.   The inspection apparatus according to claim 1, wherein the inspection unit is a terahertz inspection apparatus that transmits a terahertz wave as a measurement wave.

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