JP2019146364A - Piezoelectric drive device, robot, electronic component conveying device, printer, and projector - Google Patents

Abstract

To provide a piezoelectric drive device that can stably detect a drive state, and a robot, an electronic component conveying device, a printer, and a projector including the piezoelectric drive device.SOLUTION: A piezoelectric drive device comprises: a first member; a second member that is provided movably or rotatably relative to the first member; a member to be driven that is arranged on the first member; a piezoelectric actuator that is arranged on the second member and transmits, to the member to be driven, a driving force to move or rotate the first member relative to the second member; an optical scale that is arranged on one of the first member and the second member and has a conductive optical pattern connected to a reference potential; and a sensor that is arranged on the other of the first member and the second member and receives transmitted light or reflected light from the optical scale.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a piezoelectric drive device, a robot, an electronic component transport device, a printer, and a projector.

  A piezoelectric driving device that drives a driven member by a driving force of a piezoelectric actuator including a piezoelectric element is known. For example, the driving device described in Patent Document 1 is movable by friction between a fixed base, a movable body supported to be movable with respect to the fixed base, a sliding member fixed to the movable body, and the sliding member. An ultrasonic motor for moving the body and the fixed base relative to each other. Here, a scale is fixed to the movable body, and an encoder is fixed to the fixed base, and the ultrasonic motor is controlled in accordance with a displacement signal output from the encoder.

JP 2011-147266 A

  In the driving device described in Patent Document 1, there is a problem that wear powder generated when the ultrasonic motor is driven may adhere to the scale due to electrostatic force, which may reduce the position detection accuracy of the encoder.

A piezoelectric driving device according to an application example of the present invention includes a first member,
A second member provided to be movable or rotatable relative to the first member;
A driven member disposed on the first member;
A piezoelectric actuator that is disposed on the second member and transmits a driving force to the driven member for moving or rotating the first member relative to the second member;
An optical scale having a conductive optical pattern disposed on one of the first member and the second member and connected to a reference potential;
A sensor disposed on the other of the first member and the second member and receiving transmitted light or reflected light from the optical scale.

It is sectional drawing which shows the piezoelectric drive device which concerns on 1st Embodiment of this invention. FIG. 2 is a view (partially omitted) of the piezoelectric drive device shown in FIG. 1 viewed from the Z-axis direction. It is a top view of the piezoelectric actuator with which the piezoelectric drive device shown in FIG. 1 is provided. It is a figure for demonstrating operation | movement of the piezoelectric actuator shown in FIG. It is a top view of the optical scale with which the piezoelectric drive apparatus shown in FIG. 1 is provided. It is sectional drawing of the optical scale shown in FIG. It is sectional drawing which shows the other example of installation of the optical scale shown in FIG. It is sectional drawing which shows the piezoelectric drive device which concerns on 2nd Embodiment of this invention. FIG. 9 is a view (partially omitted) of the piezoelectric drive device shown in FIG. 8 viewed from the Z-axis direction. It is a perspective view which shows schematic structure of the piezoelectric drive device (piezoelectric drive unit) which concerns on 3rd Embodiment of this invention. It is a perspective view which shows embodiment of the robot of this invention. It is a perspective view which shows embodiment of the electronic component conveying apparatus of this invention. 1 is a perspective view illustrating an embodiment of a printer of the present invention. It is a schematic diagram showing an embodiment of a projector of the present invention.

  Hereinafter, a piezoelectric drive device, a robot, an electronic component transport device, a printer, and a projector of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

1. Piezoelectric Drive Device <First Embodiment>
FIG. 1 is a cross-sectional view showing a piezoelectric drive device according to a first embodiment of the present invention. FIG. 2 is a view (partially omitted) of the piezoelectric drive device shown in FIG. 1 viewed from the Z-axis direction. FIG. 3 is a plan view of a piezoelectric actuator provided in the piezoelectric driving device shown in FIG. FIG. 4 is a diagram for explaining the operation of the piezoelectric actuator shown in FIG.

  In FIG. 2, illustration of a part of each of the drive unit 5 and the detection unit 6 and the second member 3 is omitted for convenience of explanation. In the following description, for convenience of explanation, the X axis, the Y axis, and the Z axis, which are three axes orthogonal to each other, are used as appropriate. In each figure, the tip side of the arrow indicating these axes is “+”, and the base side is “−”. A direction parallel to the X axis is referred to as “X axis direction”, a direction parallel to the Y axis is referred to as “Y axis direction”, and a direction parallel to the Z axis is referred to as “Z axis direction”. Further, a plane parallel to both the X axis and the Y axis (a plane in which the normal is in the Z axis direction) is an “XY plane”, and a plane parallel to both the X axis and the Z axis (the normal is in the Y axis direction). Plane) is referred to as "XZ plane". A plane parallel to both the Y axis and the Z axis (a plane in which the normal line is in the X axis direction) is referred to as a “YZ plane”.

  A piezoelectric drive device 1 shown in FIG. 1 includes a first member 2, a second member 3, and a guide mechanism 4 that guides the second member 3 so as to move relative to the first member 2 in the X-axis direction. And a drive unit 5 that moves the second member 3 relative to the first member 2 in the X-axis direction, and a relative movement of the second member 3 relative to the first member 2 in the X-axis direction. And a detector 6 (encoder).

  The first member 2 and the second member 3 are each made of, for example, a metal material, a ceramic material, or the like, and have a substantially plate-like overall shape along the XY plane. Moreover, although the external shape in the planar view of the 1st member 2 and the 2nd member 3 is respectively a rectangle (square) in illustration, it is not limited to this, For example, other polygons, such as a pentagon, circular, It may be oval.

  Here, as shown in FIG. 1, a concave portion 23 and a convex portion 24 are formed on one surface (the upper side in FIG. 1) of the first member 2. And the bottom face of the recessed part 23 comprises the installation surface 21 in which the driven member 51 of the drive part 5 mentioned later is installed. Further, the top surface of the convex portion 24 constitutes an installation surface 22 on which an optical scale 61 of the detection unit 6 described later is installed. In addition, the recessed part 23 and the convex part 24 should just be provided as needed, and may be abbreviate | omitted.

  As described above, the concave surface 23 and the convex portion 24 are formed on one surface (the upper side in FIG. 1) of the first member 2, so that the installation surfaces 21 and 22 having different heights along the XY plane are formed. Is formed. As shown in FIG. 2, the recessed part 23 is extended along the X-axis direction, and the installation surface 21 is also extended along the X-axis direction in connection with this. Moreover, the convex part 24 is extended along the X-axis direction, and the installation surface 22 is also extended along the X-axis direction in connection with this.

  As shown in FIG. 1, a concave portion 31 that is open to the opposite side of the first member 2 is formed on one surface (the upper side in FIG. 1) of the second member 3. The second member 3 is formed with holes 32 and 33 that open to the bottom surface of the recess 31 and pass through in the thickness direction (Z-axis direction) of the second member 3. A piezoelectric actuator 52 of the drive unit 5 described later is inserted into the hole 32. Further, a sensor 62 of the detection unit 6 described later is inserted into the hole 33.

  A structure 34 (convex portion) that protrudes toward the first member 2 is provided on the other surface (lower side in FIG. 1) of the second member 3. As shown in FIG. 2, the structure 34 is formed so as to surround an optical scale 61 and a sensor 62 of the detection unit 6 described later over the entire circumference when viewed from the Z-axis direction. Here, a concave portion 35 that is open to the first member 2 side is formed inside the structure 34. In this recess 35, an optical scale 61 and a sensor 62 of the detection unit 6 described later are housed. Note that the structure 34 and the recess 35 may be provided as necessary and may be omitted.

  The guide mechanism 4 is a linear motion bearing and is disposed between the first member 2 and the second member 3 described above as shown in FIG. The guide mechanism 4 includes a pair of sliders 41, a pair of rails 42 provided corresponding to the pair of sliders 41, and a plurality of balls 43 provided between the slider 41 and the rails 42. And having.

  Each of the pair of rails 42 is disposed extending along the X-axis direction, and is fixed to the second member 3 using screws or the like. Each of the pair of sliders 41 is movable along the corresponding rail 42, and is fixed to the first member 2 using, for example, screws. Moreover, the slider 41, the rail 42, and the ball | bowl 43 are comprised so that the relative movement in directions other than the X-axis direction of the 1st member 2 and the 2nd member 3 may be controlled (restricted). The slider 41, the rail 42, and the ball 43 may be configured to restrict (limit) relative movement of the first member 2 and the second member 3 in the X-axis direction within a predetermined range. Further, instead of the ball 43, a roller that rolls between the slider 41 and the rail 42 may be used.

  The drive unit 5 includes a driven member 51 installed on the first member 2, a plurality (three in the figure) of piezoelectric actuators 52 that transmit driving force to the driven member 51, and a plurality of piezoelectric actuators 52. A plurality of (three in the drawing) support members 53 that support the two members 3.

  The driven member 51 is installed on the installation surface 21 of the first member 2 described above, and is fixed to the first member 2 using, for example, an adhesive. The driven member 51 has a plate shape or a sheet shape, and is made of a material having a relatively high wear resistance such as a ceramic material. Further, the driven member 51 extends along the X-axis direction as shown in FIG.

  The plurality of piezoelectric actuators 52 are arranged side by side along the X-axis direction. As shown in FIG. 3, the piezoelectric actuator 52 includes a vibration part 521, a support part 522, a pair of connection parts 523 connecting them, and a protrusion part 524 protruding from the vibration part 521. doing.

  The vibration part 521 has a plate shape along the XZ plane. The vibrating portion 521 has a longitudinal shape extending along the Z-axis direction. The vibrating unit 521 includes a piezoelectric element 5215 disposed along the longitudinal direction of the vibrating unit 521 at the center of the vibrating unit 521 in the width direction (X-axis direction), and the width of the vibrating unit 521 with respect to the piezoelectric element 5215. Two piezoelectric elements 5211 and 5212 arranged along the longitudinal direction of the vibration part 521 on one side of the direction, and in the longitudinal direction of the vibration part 521 on the other side in the width direction of the vibration part 521 with respect to the piezoelectric element 5215 And two piezoelectric elements 5213 and 5214 which are arranged along.

  Although not shown, such a vibrating section 521 includes, for example, two substrates such as a silicon substrate, a piezoelectric material such as lead zirconate titanate (PZT) disposed between these substrates, and the front and back surfaces of the piezoelectric material. A plurality of electrodes appropriately provided (more specifically, a plurality of individual electrodes provided on one surface corresponding to the piezoelectric elements 5211 to 5214 and the other common to the piezoelectric elements 5211 to 5214) One common electrode provided on the surface). Here, each of the support portion 522 and the pair of connection portions 523 includes, for example, two substrates formed integrally with the two substrates included in the vibration unit 521 described above. In addition, in the support portion 522, for example, an insulating spacer having a thickness equivalent to that of the piezoelectric body included in the vibration portion 521 is interposed between the two substrates.

  At one end (the lower end in FIG. 3) in the longitudinal direction (Z-axis direction) of the vibration part 521, a protruding part 524 protrudes from the center in the width direction. . The protrusion 524 is made of, for example, a material having excellent wear resistance, such as ceramics, and is joined to the vibration part 521 with an adhesive or the like. The protrusion 524 has a function of transmitting the vibration of the vibration part 521 to the driven member 51 by frictional sliding. Note that the shape of the protruding portion 524 is not limited to the shape shown in the drawing as long as the driving force of the vibrating portion 521 can be transmitted to the driven member 51.

  The support member 53 is made of, for example, a metal material or a ceramic material, and is fixed to the second member 3 using, for example, a screw. The support member 53 is attached to the support portion 522 described above via an elastic member (not shown) such as a silicon leaf spring. For example, the elastic member is attached to the support portion 522 with an adhesive or the like, and is fixed to the support member 53 with a screw or the like.

  The piezoelectric actuator 52 included in the driving unit 5 as described above operates when a driving signal having a predetermined frequency is appropriately input to the piezoelectric elements 5211 to 5215 from a circuit unit (not shown). For example, the phase difference between the drive signal to the piezoelectric elements 5211 and 5214 and the drive signal to the piezoelectric elements 5212 and 5213 is 180 °, and the drive signal to the piezoelectric elements 5211 and 5214 and the drive signal to the piezoelectric element 5215 are By setting the phase difference to −90 ° to + 90 °, as shown in FIG. 4, due to the expansion and contraction of each of the piezoelectric elements 5211 to 5215, the vibration part 521 bends and vibrates in an S-shape, thereby causing the tip of the protrusion 524 to Moves elliptically in the direction indicated by arrow α in the figure. As a result, the driven member 51 repeatedly receives a driving force from the protruding portion 524 in one direction (the direction indicated by the arrow β in the figure). Thereby, the 1st member 2 and the 2nd member 3 move relatively in the X-axis direction.

  When the first member 2 and the second member 3 are moved relatively in the X-axis direction in the direction opposite to that shown in FIG. 4, a drive signal obtained by inverting the drive signal described above by 180 ° is used. That's fine.

  The detection unit 6 is an optical linear encoder. The detection unit 6 includes an optical scale 61 installed on the first member 2, a sensor 62 that detects movement of the optical scale 61, a substrate 63 that supports the sensor 62 with respect to the second member 3, and Have

  The optical scale 61 is installed on the installation surface 22 of the first member 2 described above, and is fixed to the first member 2 using, for example, an adhesive. Here, as will be described later, the optical scale 61 has a conductive optical pattern 72 (scale), and the optical pattern 72 is electrically connected to the first member 2 serving as a reference potential. . Thereby, it can reduce that the optical pattern 72 of the optical scale 61 charges, As a result, it can reduce that foreign materials, such as abrasion powder mentioned later, adhere to the optical pattern 72. The optical scale 61 will be described later in detail.

  Although not shown, the sensor 62 includes a light emitting element such as a semiconductor laser that irradiates light to the optical scale 61 and a light receiving element such as a photodiode that receives reflected light from the optical scale 61.

  The board 63 is a wiring board, for example, and is fixed to the second member 3 using screws or the like. The substrate 63 is installed on the surface of the second member 3 on the concave portion 31 side, supports the sensor 62, and is electrically connected to the sensor 62. Here, the board | substrate 63 is arrange | positioned toward the 1st member 2 side so that the surface in which the sensor 62 is installed so that the sensor 62 may be penetrated by the hole 33 mentioned above.

  In the detection unit 6 as described above, the waveform of the output signal of the light receiving element of the sensor 62 according to the relative movement state (position, movement speed, etc.) of the second member 3 with respect to the first member 2 in the X-axis direction. Changes. Therefore, based on the output signal of the light receiving element, the relative movement state of the second member 3 with respect to the first member 2 in the X-axis direction can be detected.

(Detailed description of optical scale)
FIG. 5 is a plan view of an optical scale provided in the piezoelectric driving device shown in FIG. 6 is a cross-sectional view of the optical scale shown in FIG. FIG. 7 is a cross-sectional view showing another installation example of the optical scale shown in FIG.

  The optical scale 61 shown in FIG. 5 has a plate-like base material 71, and on one surface thereof, as a pattern that can detect the movement amount, movement speed, and the like of the optical scale 61 in the X-axis direction, An optical pattern 72 in which the first regions 721 and the second regions 722 are alternately arranged along the axial direction is formed.

  Here, the first region 721 and the second region 722 of the optical pattern 72 respectively extend along the Y-axis direction in plan view. Further, in plan view, the widths of the first region 721 and the second region 722 are constant over the Y-axis direction. Further, the shape of the base material 71 in plan view is a rectangle having the long side in the X-axis direction.

  As shown in FIG. 6, the optical scale 61 of the present embodiment includes a plate-like (disk-like) base material 71, a resin layer 73 that is patterned and provided on the upper surface of the base material 71, and A region in which the resin layer 73 is provided in a plan view constitutes a first region 721 and is between the first regions 721 in a plan view. A region where the resin layer 73 is not provided constitutes a second region 722. Accordingly, the upper surface of the portion of the metal film 74 that overlaps the resin layer 73 is the surface of the first region 721 and constitutes the reflective surface 741. Further, the upper surface of the portion of the metal film 74 that does not overlap the resin layer 73 is the surface of the second region 722 and constitutes the reflective surface 742.

  A plurality of convex portions 711 are provided on one surface (the upper side in FIG. 6) of the base material 71. Each convex portion 711 has a pyramid shape (quadrangular pyramid shape), and has four inclined surfaces 711 a inclined at an inclination angle θ with respect to the plate surface of the base material 71. The inclination angle θ is not particularly limited as long as the reflecting surface 742 of the metal film 74 can reflect light in a direction different from the reflecting surface 741. For example, the base 71 is made of single crystal silicon as described later. In this case, it is about 55 ° (theoretical value). In the present embodiment, the plurality of convex portions 711 are arranged over the entire area of one surface of the base material 71, but the present invention is not limited thereto. For example, the convex portions 711 are disposed in the region immediately below the resin layer 73. It may be omitted. However, by arranging the plurality of convex portions 711 over the entire area of one surface of the base material 71, when forming the plurality of convex portions 711, there is an advantage that positioning of the formation region is not necessary and it is simple. .

  In the drawing, the plurality of convex portions 711 are equal in size and regularly arranged, but may be different in size from each other or randomly arranged. In addition, each convex portion 711 has a quadrangular shape in plan view, and the plurality of convex portions 711 have the same orientation in plan view. Here, the plurality of convex portions 711 may face in any direction in plan view, but in the present embodiment, the plurality of second regions 722 face in the same direction.

  Such a substrate 71 may be made of any material, but is preferably made of a crystal material capable of anisotropic etching, such as single crystal silicon, silicon carbide, and quartz. Thereby, the inclined surface 711a as described above can be formed easily and with high accuracy. Then, the reflective surface 742 (second surface) of the second region 722 can be formed by using the inclined surface 711a which is a crystal surface of the crystal material.

  Moreover, it is preferable that the base material 71 has electroconductivity. Thereby, the optical pattern 72 can be connected to the reference potential via the substrate 71. When the substrate 71 is insulative, in order to connect the optical pattern 72 to the reference potential, a metal film or the like is provided on the surface of the substrate 71 to provide conductivity, or the optical pattern 72 is applied to the reference potential. It is only necessary to provide wiring connected to the.

  The crystal material used for the substrate 71 is preferably single crystal silicon. Single crystal silicon is cheaper than other crystal materials and can be easily processed with high accuracy. Therefore, since the base 71 of the optical scale 61 is made of single crystal silicon, there is an advantage that the cost and accuracy of the optical scale 61 can be easily reduced. Further, the single crystal silicon substrate has conductivity. Therefore, by using a single crystal silicon substrate as the base material 71, the optical pattern 72 and the first member 2 can be electrically connected via the base material 71. In this respect, an inexpensive single crystal silicon substrate contains impurities and has high conductivity compared to a pure single crystal silicon substrate, and thus is suitable as the base material 71.

  In particular, the plane orientation of the single crystal silicon used for the substrate 71 is preferably (100). Thereby, by using the [100] plane, the structure formed in the second region 722 can be a regular square pyramid. Further, by using such single crystal silicon, it is possible to form an optical scale 61 suitable not only for a linear encoder but also for a rotary encoder as in a third embodiment described later. Further, the amount of light reflected by the second region 722 of the optical scale 61 formed using single crystal silicon and received by the light receiving portion of the sensor 62 is 3 with respect to the amount of light from the light source portion of the sensor 62. % Or less.

  Thus, when the base material 71 is comprised by the crystal material which can be anisotropically etched, the reflective surface 742 (2nd surface) of the metal film 74 is a crystal surface (inclined surface 711a) of the crystal material used for the base material 71. ) Is preferably provided. Thereby, it is possible to easily form the reflection surface 742 (second surface) with little variation in the inclination angle θ with respect to the reflection surface 741 (first surface).

  The resin layer 73 is disposed on one surface (the upper side in FIG. 6) of the base material 71. In the present embodiment, as described above, since the plurality of convex portions 711 are arranged over the entire area of one surface of the base material 71, there are a plurality of convex portions 711 immediately below the resin layer 73. The resin layer 73 has a shape corresponding to the shape of the first region 721 in plan view. Further, the upper surface of the resin layer 73 is a flat surface along the plate surface of the substrate 71. In the cross section shown in FIG. 6, the side surface of the resin layer 73 is orthogonal to the upper surface of the resin layer 73, but may be inclined with respect to the upper surface of the resin layer 73. From the viewpoint of easily defining the width of 741, it is preferable that the side surface is formed so that the width of the resin layer 73 becomes smaller toward the base material 71 side.

  Such a resin layer 73 is configured using a photosensitive resin. Such a photosensitive resin is not particularly limited, and examples thereof include photosensitive polyimide resins, epoxy resins, and copolymers thereof. Such a photosensitive resin may be either a positive type or a negative type, but the dimensional accuracy of the reflecting surface 741 can be increased by making the corner portion formed by the upper surface and the side surface of the resin layer 73 a right angle or an acute angle. In view of the above and the environmental reliability, the negative type is preferable. As described above, since the photosensitive resin is a negative type, it is easy to form the first region 721 with high accuracy as compared with the case where the photosensitive resin is a positive type. The constituent material of the resin layer 73 may include materials other than the above-described photosensitive resin, for example, fillers, pigments, various additives, and the like.

  The thickness t1 of the resin layer 73 is preferably larger than the height h of the convex portion 711 described above. Thereby, even if the some convex part 711 is provided directly under the resin layer 73, the flatness of the reflective surface 741 can be improved. In particular, the ratio t1 / h of the thickness t1 of the resin layer 73 and the height h of the convex portion 711 is preferably 2 or more, 12 or less, more preferably 2 or more and 10 or less, and 2 or more and 4 or less. More preferably it is. Thereby, when forming the resin layer 73 on the base material 71, even if it is a case where the resin layer 73 is formed on the some convex part 711, making it difficult to be influenced by the shape of the said some convex part 711. The resin layer 73 having a flat surface can be formed without performing a flattening process such as CMP (chemical mechanical polishing).

  The metal film 74 is disposed on the base material 71 and the resin layer 73. The upper surface (surface opposite to the base material 71) of the metal film 74 constitutes the surfaces of the first region 721 and the second region 722 as described above. In the present embodiment, the metal film 74 is disposed not only on the resin layer 73 but also on a portion of the base material 71 where the resin layer 73 is not disposed, but the metal film 74 and the base material 71 are electrically connected. The metal film 74 may not be disposed on the base material 71 as long as the connection can be achieved. In this case, the surface of the base material 71 (more specifically, the inclined surface 711a of the convex portion 711) constitutes the surface of the second region 722. However, since the metal film 74 is disposed on the surface of the second region 722, the light reflectance of the second region 722 can be increased regardless of the constituent material of the base material 71. The desired reflection characteristics of the two regions 722 are easily obtained. In this embodiment, the metal film 74 is disposed not only on the upper surface of the resin layer 73 but also on the side surface of the resin layer 73, but the metal film 74 is disposed on the side surface of the resin layer 73. It does not have to be.

  As a constituent material of such a metal film 74, it is sufficient that the reflection surfaces 741 and 742 can obtain desired reflection characteristics, and various metal materials can be used. For example, aluminum, copper, iron, nickel, titanium, Examples thereof include metals such as tungsten or alloys (composite materials) containing these metals. The thickness t2 (film thickness) of the metal film 74 is not particularly limited, but is preferably 10 nm to 1000 nm, and more preferably 20 nm to 50 nm.

  As described above, the optical scale 61 has the plate-like base material 71 on which the optical pattern 72 is provided. Here, the optical pattern 72 includes a first region 721 which is a region where a resin layer 73 obtained by patterning a photosensitive resin is provided on the substrate 71 and a region where the resin layer 73 on the substrate 71 is not provided. And the second regions 722 are alternately arranged. In addition, the surface of the first region 721 is mainly configured by a reflective surface 741 that is a first surface whose normal is the thickness direction of the base material 71. On the other hand, the surface of the second region 722 is mainly configured by a reflection surface 742 that is a second surface inclined with respect to the reflection surface 741. A metal film 74 is provided on each surface of the first region 721 and the second region 722.

  Here, “the first region 721 is mainly composed of the reflective surface 741 (first surface)” means that the area occupation ratio of the reflective surface 741 (first surface) in the first region 721 in a plan view. It means 50% or more (preferably 70% or more, more preferably 90% or more). Further, “the second region 722 is mainly composed of the reflective surface 742 (second surface)” means that the area occupation ratio of the reflective surface 742 (second surface) in the second region 722 is 50 in plan view. % Or more (preferably 70% or more, more preferably 90% or more). In addition, the second region 722 may include a surface having the normal direction of the thickness direction of the base material 71 as in the case of the reflective surface 741, but in this case, the surface in the second region 722 in plan view. As long as the area occupancy ratio of the reflective surface 741 (first surface) in the first region 721 is smaller.

  According to such an optical scale 61, the first region 721 is mainly composed of the reflective surface 741 whose normal is the thickness direction of the base material 71, and the second region 722 is inclined with respect to the reflective surface 741. Therefore, the sensor 62 selectively receives only the light reflected by the first region 721 by making the directions of the light reflected by the first region 721 and the second region 722 different from each other. The light can be received by the unit. Therefore, it is not necessary to configure the base material 71 with a transparent material, and the degree of freedom in selecting the material of the base material 71 can be increased. As a result, a material that is cheaper and excellent in workability can be used. In addition, the difference in the amount of light received by the light receiving unit of the sensor 62 between the state where the first region 721 is irradiated with light and the state where the light is not applied can be increased, and as a result, the detection accuracy can be increased. More specifically, the amount of light received by the light receiving unit of the sensor 62 in a state where light is applied to the first region 721 is set to 57% or more with respect to the amount of light from the light source unit of the sensor 62, and the second region The amount of light received by the light receiving unit of the sensor 62 in a state where light is irradiated on the light beam 722 can be set to 5% or less with respect to the amount of light from the light source unit of the sensor 62.

  On the other hand, for example, if the second region 722 is configured by a flat surface having a normal line parallel to the normal line of the first region 721 (reflecting surface 741), a process of reducing light reflection on the flat surface. (For example, roughening to be an uneven surface mainly composed of curved surfaces in order to scatter light, blackening to increase light absorption, etc.), the reflectance in the second region 722 Is difficult to reduce sufficiently (5% or less). Therefore, in the state where the light from the light source unit of the sensor 62 is irradiated on the second region 722, the amount of light reflected by the second region 722 and incident on the light receiving unit of the sensor 62 cannot be sufficiently reduced. .

  Further, according to the optical scale 61, the resin layer 73 included in the first region 721 is arranged on the substrate 71 by being patterned and includes a photosensitive resin. One region 721 can be formed with high accuracy. And since the metal film 74 (part of the reflective surface 741) which the 1st area | region 721 has is arrange | positioned on the resin layer 73 and comprised with the metal material, the light reflectivity of the 1st area | region 721 can be improved. . Thus, since the 1st field 721 has resin layer 73 and metal film 74, detection accuracy can be raised also at this point.

  The optical scale 61 is not limited to the configuration described above as long as the optical pattern 72 has conductivity, and may be, for example, an optical pattern formed on a metal plate.

  The optical scale 61 as described above is installed on the installation surface 22 of the first member 2 described above, and is fixed to the installation surface 22 by the adhesive 25. That is, the adhesive 25 is interposed between the base 71 of the optical scale 61 and the installation surface 22, and the optical scale 61 is fixed to the installation surface 22 by the adhesive force of the adhesive 25. Yes. The first member 2 has conductivity and is connected to a reference potential (for example, a ground potential).

  Here, the base 71 of the optical scale 61 is in partial contact with the installation surface 22. Thereby, the base material 71 and the 1st member 2 are electrically connected. In the present embodiment, the installation surface 22 is provided with a plurality of convex portions 221, and the tips of the convex portions 221 are in contact with the base material 71.

  Thus, the first member 2 or the second member 3 (the first member 2 in the present embodiment) has the installation surface 22 on which the optical scale 61 is installed, and the installation surface 22 has the convex portion 221. Thereby, even if the optical scale 61 is joined to the installation surface 22 by the adhesive 25, the installation surface 22 and the optical scale 61 can be easily brought into contact with each other. And the optical scale 61 and the 1st member 2 can be electrically connected by making the installation surface 22 and the optical scale 61 contact. In addition, the installation surface 22 is provided with a concave portion 222 due to the presence of the plurality of convex portions 221, and the concave portion 222 constitutes an escape portion that allows the adhesive 25 to escape. Further, such convex portions 221 and concave portions 222 also have a function of increasing the adhesive force of the adhesive 25 by an anchor effect. Such convex portions 221 and concave portions 222 can be formed by, for example, plasting, etching, machining, or the like. Further, the surface roughness Ra of the installation surface 22 having such convex portions 221 and concave portions 222 is not particularly limited, but is preferably 0.01 μm or more and 1000 μm or less.

  The adhesive 25 is not particularly limited as long as it can join the optical scale 61 and the first member 2, and various adhesives can be used. Epoxy, urethane, acrylic, and the like It is preferable to use a conductive adhesive in which a conductive material such as metal particles is mixed in the composition. That is, the optical scale 61 is preferably joined to the first member 2 or the second member 3 (the first member 2 in the present embodiment) via the adhesive 25 that is a conductive adhesive. Thus, the optical scale 61 is joined to the first member 2 or the second member 3 (first member 2 in the present embodiment), and the installation surface 22 and the optical scale 61 are electrically connected via the adhesive 25. can do.

  When the adhesive 25 is a conductive adhesive, the convex portions 221 and the concave portions 222 as described above may be omitted. Further, as shown in FIG. 7, when the insulating film 26 such as a resist film is provided on the surface of the base material 71, a part of the insulating film 26 is removed and the conductive adhesive is passed through the part. What is necessary is just to join the base material 71 and the 1st member 2 through the adhesive agent 25 which is.

  As described above, the piezoelectric driving device 1 includes the first member 2, the second member 3 provided so as to be movable relative to the first member 2, and the target disposed on the first member 2. A driving member 51, a piezoelectric actuator 52 disposed on the second member 3, which transmits a driving force for moving the first member 2 relative to the second member 3 to the driven member 51; the first member 2; An optical scale 61 having a conductive optical pattern 72 disposed on one of the second members 3 (first member 2 in this embodiment) and connected to a reference potential, and the first member 2 and the second member And the sensor 62 that receives the transmitted light or reflected light from the optical scale 61. The sensor 62 is disposed on the other of the three members (the second member 3 in this embodiment).

  According to such a piezoelectric driving device 1, since the optical pattern 72 of the optical scale 61 is conductive and connected to the reference potential, it is possible to reduce the charging of the optical pattern 72. Therefore, it is possible to reduce the abrasion powder generated in the region where the driven member 51 and the piezoelectric actuator 52 are in contact with the optical pattern 72. As a result, the drive state can be detected stably.

Second Embodiment
FIG. 8 is a sectional view showing a piezoelectric driving device according to the second embodiment of the present invention. FIG. 9 is a view (partially omitted) of the piezoelectric drive device shown in FIG. 8 viewed from the Z-axis direction. In the following description, the present embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted. 8 and 9, the same reference numerals are given to the same configurations as those in the above-described embodiment.

  The piezoelectric drive device 1A shown in FIG. 8 can rotate the first member 8, the second member 9, and the second member 9 relative to the first member 8 around an axis aZ parallel to the Z axis. The supporting bearing 4A, the drive unit 5A for rotating the second member 9 relative to the first member 8 around the axis aZ, and the relative relative to the first member 8 about the axis aZ of the second member 9 6A (encoder) for detecting a typical rotation.

  Here, the relative rotation angle range of the first member 8 and the second member 9 around the axis aZ may be limited to a predetermined angle of 360 ° or less, or 360 ° or more. Also good. When this angle range is 360 ° or more, that is, when the first member 8 and the second member 9 are relatively rotatable around the axis aZ, the piezoelectric driving device 1A is used as a rotary piezoelectric motor. it can.

  The first member 8 and the second member 9 are each made of, for example, a metal material, a ceramic material, or the like. As shown in FIG. 9, the outer shape of the first member 8 in a plan view is a circle, and the outer shape of the second member 9 in a plan view is a rectangle (square). However, these outer shapes are not limited to this. .

  Here, as shown in FIG. 8, a concave portion 83 and a convex structure 86 are formed on one surface (the upper side in FIG. 8) of the first member 8. And the bottom face of the recessed part 83 comprises the installation surface 81 in which the driven member 54 of the drive part 5A mentioned later is installed. The structure 86 has an annular shape so as to surround the outer periphery of the recess 83. An installation surface 82 on which an optical scale 64 of the detection unit 6A described later is installed is provided on one surface (the upper side in FIG. 8) of the first member 8 outside the structure 86. . In addition, the recessed part 83 and the structure body 86 should just be provided as needed, and may be abbreviate | omitted.

  In this way, the installation surfaces 81 and 82 having different heights are formed on one surface (the upper side in FIG. 8) of the first member 8 by forming the recess 83. The first member 8 is formed with a hole 84 that opens in the bottom surface of the recess 83 and penetrates in the thickness direction (Z-axis direction) of the first member 8 with the axis aZ as the center. As shown in FIG. 9, the outer shapes of the recess 83 and the hole 84 each have a circular shape centered on the axis aZ when viewed from the Z-axis direction (hereinafter also referred to as “plan view”). Accordingly, the installation surface 81 has an annular shape centered on the axis aZ in plan view. The installation surface 82 has an annular shape centered on the axis aZ in plan view.

  In addition, as shown in FIG. 8, the outer peripheral surface 85 of the first member 8 has a reduced diameter portion 851 having a small width (diameter), and is smaller than the reduced diameter portion 851 on the + Z-axis direction side with respect to the reduced diameter portion 851. And an enlarged diameter portion 852 having a large width (diameter). In addition, although the external shape in the planar view of the 1st member 8 is circular in illustration, it is not limited to this, For example, other polygons, such as a quadrangle | tetragon and a pentagon, an ellipse, etc. may be sufficient. Further, the hole 84 may be provided as necessary and may be omitted.

  As shown in FIG. 8, a concave portion 91 opened to the first member 8 side is opened on one surface (the upper side in FIG. 8) of the second member 9, and the first member 8 is opened to the opposite side. And a hole 93 that is open on both bottom surfaces of the recesses 91 and 92 and penetrates the second member 9 in the thickness direction (Z-axis direction). The recess 91 has a circular shape in plan view, and the first member 8 described above is inserted into the recess 91.

  As shown in FIG. 8, the bearing 4 </ b> A is disposed between the first member 8 and the second member 9 described above. The bearing 4A includes an inner ring 44, an outer ring 45, and a plurality of balls 46 provided therebetween.

  The inner ring 44 is fitted and fixed to the outer peripheral surface 85 (the reduced diameter portion 851) of the first member 8 described above. The outer ring 45 is fitted and fixed to the inner peripheral surface of the concave portion 91 of the second member 9 described above. Further, the inner ring 44, the outer ring 45, and the ball 46 are configured to restrict (limit) relative movement of the first member 8 and the second member 9 in directions other than the rotation direction around the axis aZ. . Instead of the ball 46, a roller that rolls between the inner ring 44 and the outer ring 45 may be used.

  As shown in FIG. 8, the drive unit 5 </ b> A includes a driven member 54 installed on the first member 8, and a plurality (three in FIG. 9) of piezoelectric actuators 52 that transmit driving force to the driven member 54. A plurality of (three) support members 55 that support the plurality of piezoelectric actuators 52 with respect to the second member 3.

  The driven member 54 is installed on the installation surface 81 of the first member 8 described above, and is fixed to the first member 8 using, for example, an adhesive. Further, as shown in FIG. 9, the driven member 54 has an annular shape centering on the axis aZ in plan view. Here, like the driven member 51 described above, the driven member 54 has a plate shape or a sheet shape, and is made of a relatively high wear resistance material such as a ceramic material. The shape of the driven member 54 in plan view is not limited to the illustrated shape (annular shape), and for example, a part in the circumferential direction may be missing depending on the movable range of the piezoelectric driving device 1A.

  The plurality of support members 55 are provided corresponding to the plurality of piezoelectric actuators 52, and the plurality of piezoelectric actuators 52 are arranged along the same circumference around the axis aZ. And each support member 55 is being fixed to each of the support part 522 (refer FIG. 3) and the 2nd member 9 using a screw etc., for example. Here, the support member 55 is made of, for example, a metal material, a ceramic material, or the like, like the support member 53 described above. Note that the arrangement of the plurality of piezoelectric actuators 52 of the drive unit 5A is not limited to the arrangement shown in the figure. For example, the plurality of piezoelectric actuators 52 may not be arranged at equiangular intervals on the same circumference centered on the axis aZ.

  The piezoelectric actuator 52 of the driving unit 5A as described above operates in the same manner as the piezoelectric actuator 52 of the driving unit 5 described above, thereby applying a driving force to the driven member 54, and causing the first member 8 and the second member 9 to move. Rotate relatively around the axis aZ.

  The detection unit 6A includes an optical scale 64 installed on the first member 8, a sensor 62 that detects movement of the optical scale 64, and a substrate that supports the sensor 62 with respect to the second member 9 (not shown). And).

  The optical scale 64 is installed on the installation surface 82 of the first member 8 described above, and is fixed to the first member 8 using, for example, an adhesive. The optical scale 64 can be configured in the same manner as the optical scale 61 described above. Here, like the optical scale 61 of the first embodiment described above, the optical scale 64 has a conductive optical pattern (not shown), and the optical pattern is a first member 8 that serves as a reference potential. Are electrically connected. Thereby, it can reduce that the optical pattern of the optical scale 64 charges, As a result, it can reduce that foreign materials, such as abrasion powder mentioned later, adhere to the said optical pattern. However, in the optical pattern of the optical scale 64, the first region and the second region are alternately arranged along the circumferential direction around the axis aZ. The optical scale 64 has an annular shape centered on the axis aZ in plan view. Note that the planar view shape of the optical scale 64 is not limited to the illustrated shape (annular shape), and for example, a part in the circumferential direction may be missing depending on the movable range of the piezoelectric driving device 1A.

  In the detection unit 6A as described above, the output signal of the light receiving element of the sensor 62 depends on the relative rotation state (rotation position, angular velocity, etc.) of the second member 9 around the axis aZ with respect to the first member 8. The waveform changes. Therefore, based on the output signal of the light receiving element, it is possible to detect the relative rotational state of the second member 9 around the axis aZ with respect to the first member 8.

  As described above, the piezoelectric drive device 1 </ b> A is disposed on the first member 8, the second member 9 provided to be rotatable relative to the first member 8, and the first member 8. A driven member 54, a piezoelectric actuator 52 disposed on the second member 9, and transmitting a driving force for rotating the first member 8 relative to the second member 9 to the driven member 54, and the first member 8 and second member 9 (first member 8 in this embodiment), optical scale 64 having conductive optical pattern 75 connected to a reference potential, first member 8 and second member 9. The sensor 62 is disposed on the other of the two members 9 (the second member 9 in the present embodiment) and receives transmitted light or reflected light from the optical scale 64.

  According to such a piezoelectric driving device 1A, since the optical pattern 75 of the optical scale 64 is conductive and connected to the reference potential, it is possible to reduce the charging of the optical pattern 75. Therefore, it is possible to reduce the abrasion powder generated in the region where the driven member 54 and the piezoelectric actuator 52 are in contact with the optical pattern 75. As a result, the drive state can be detected stably.

<Third Embodiment>
FIG. 10 is a perspective view showing a schematic configuration of a piezoelectric driving device (piezoelectric driving unit) according to the third embodiment of the present invention. In the following description, the present embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted. In FIG. 10, the same reference numerals are given to the same configurations as those in the above-described embodiment.

  The piezoelectric drive device 10 shown in FIG. 10 drives in the X-axis direction (the direction indicated by the arrow X1 in the drawing), the Y-axis direction (the direction indicated by the arrow Y1 in the drawing), and the Z-axis (the direction indicated by the arrow θ1 in the drawing). It is a piezoelectric drive unit which performs. The piezoelectric driving device 10 includes a piezoelectric driving device 1X (first piezoelectric driving device) that performs driving in the X-axis direction, a piezoelectric driving device 1Y (second piezoelectric driving device) that performs driving in the Y-axis direction, and a Z A piezoelectric driving device 1θ (third piezoelectric driving device) that drives around the axis, and these are connected side by side along the Z-axis direction.

  Here, each of the piezoelectric drive devices 1X and 1Y is the piezoelectric drive device 1 of the first embodiment described above. However, the posture of the piezoelectric driving device 1Y in the XY plane is 90 ° different from that of the piezoelectric driving device 1X. Here, the second member 3 of the piezoelectric driving device 1Y is fixed to the first member 2 of the piezoelectric driving device 1X using, for example, a screw, a bolt / nut, or the like so as to have the above-described posture. The second member 3 of the piezoelectric driving device 1Y may be configured integrally with the first member 2 of the piezoelectric driving device 1X.

The piezoelectric drive device 1θ is the piezoelectric drive device 1A of the second embodiment described above. Here, the first member 2 of the piezoelectric driving device 1Y described above is fixed to the second member 9 using, for example, screws, bolts / nuts, or the like. In addition, the 2nd member 9 may be comprised integrally with the 1st member 2 of the piezoelectric drive device 1Y mentioned above.
Also according to the third embodiment as described above, the detection of the driving state can be stably performed.

2. Next, an embodiment of the robot of the present invention will be described.

FIG. 11 is a perspective view showing an embodiment of the robot of the present invention.
A robot 1000 shown in FIG. 11 is a so-called 6-axis robot, and is used to perform operations such as feeding, removing, transporting and assembling precision equipment and components (objects) constituting the same, for example.

  The robot 1000 includes a base 1010 fixed to a floor and a ceiling, an arm 1020 that is rotatably connected to the base 1010, an arm 1030 that is rotatably connected to the arm 1020, and a arm 1030 that is rotatably connected. Arm 1040, arm 1050 pivotally connected to arm 1040, arm 1060 pivotally connected to arm 1050, arm 1070 pivotally connected to arm 1060, and these arms 1020, 1030, 1040, 1050, 1060, and 1070. Further, the arm 1070 is provided with a hand connection unit, and an end effector 1090 corresponding to an operation to be executed by the robot 1000 is attached to the hand connection unit.

  Moreover, the piezoelectric drive device 1A of the second embodiment described above is mounted as a piezoelectric motor on all or a part of each joint. The arms 1020, 1030, 1040, 1050, 1060, and 1070 are rotated by driving the piezoelectric driving device 1A. The driving of the piezoelectric driving device 1A is controlled by the control unit 1080.

  The robot 1000 as described above includes the piezoelectric driving device 1A. According to such a robot 1000, the piezoelectric driving device 1A can perform high-accuracy driving using a detection result of a stable driving state. Therefore, the characteristics of the robot 1000 can be improved by using the driving characteristics of the piezoelectric driving device 1A.

3. Next, an embodiment of the electronic component conveying device of the present invention will be described.

FIG. 12 is a perspective view showing an embodiment of the electronic component carrying apparatus of the present invention.
An electronic component transport apparatus 2000 shown in FIG. 12 is applied to an electronic component inspection apparatus, and includes a base 2100 and a support base 2200 disposed on the side of the base 2100. Further, on the base 2100, the upstream stage 2110 on which the electronic component Q to be inspected is placed and transported in the Y-axis direction, and the inspected electronic component Q is placed and transported in the Y-axis direction. A downstream stage 2120 and an inspection table 2130 that is located between the upstream stage 2110 and the downstream stage 2120 and inspects the electrical characteristics of the electronic component Q are provided. Examples of the electronic component Q include semiconductors, semiconductor wafers, display devices such as CLD and OLED, crystal devices, various sensors, ink jet heads, various MEMS devices, and the like.

  The support table 2200 is provided with a Y stage 2210 that can move in the Y-axis direction with respect to the support table 2200, and the Y stage 2210 can move in the X-axis direction with respect to the Y stage 2210. A stage 2220 is provided. The X stage 2220 is provided with an electronic component holder 2230 that can move in the Z-axis direction with respect to the X stage 2220.

  In addition, the electronic component holding unit 2230 includes the piezoelectric driving device 10 described above and a holding unit 2233 that holds the electronic component Q. Here, the piezoelectric drive device 10 is used as a positioning unit that performs minute positioning. The second member 3 of the piezoelectric driving device 1X included in the piezoelectric driving device 10 is fixed to the X stage 2220 (see FIG. 10). The holding portion 2233 is fixed to the first member 8 of the piezoelectric driving device 1θ included in the piezoelectric driving device 10 (see FIG. 10).

  The electronic component transport device 2000 as described above includes the piezoelectric driving device 10 (1, 1A). According to such an electronic component conveying apparatus 2000, the piezoelectric driving apparatus 10 (1, 1A) can perform high-accuracy driving using a detection result of a stable driving state. Therefore, the characteristics of the electronic component transport apparatus 2000 can be improved by using the driving characteristics of the piezoelectric driving device 10 (1, 1A).

4). Printer FIG. 13 is a perspective view showing an embodiment of a printer of the present invention.
A printer 3000 shown in FIG. 13 is an ink jet recording type printer. The printer 3000 includes an apparatus main body 3010 and a printing mechanism 3020, a paper feed mechanism 3030, and a control unit 3040 provided inside the apparatus main body 3010.

  The apparatus main body 3010 is provided with a tray 3011 for installing the recording paper P, a paper discharge port 3012 for discharging the recording paper P, and an operation panel 3013 such as a liquid crystal display.

  The printing mechanism 3020 includes a head unit 3021, a carriage motor 3022, and a reciprocating mechanism 3023 that reciprocates the head unit 3021 by the driving force of the carriage motor 3022. The head unit 3021 includes a head 3021a that is an ink jet recording head, an ink cartridge 3021b that supplies ink to the head 3021a, and a carriage 3021c on which the head 3021a and the ink cartridge 3021b are mounted. The reciprocating mechanism 3023 includes a carriage guide shaft 3023a that supports the carriage 3021c so as to be able to reciprocate, and a timing belt 3023b that moves the carriage 3021c on the carriage guide shaft 3023a by the driving force of the carriage motor 3022. Yes.

  The paper feeding mechanism 3030 includes a driven roller 3031 and a driving roller 3032 that are in pressure contact with each other, and a piezoelectric driving device 1A (piezoelectric motor) that is a paper feeding motor that drives the driving roller 3032.

  The control unit 3040 controls the printing mechanism 3020, the paper feeding mechanism 3030, and the like based on print data input from a host computer such as a personal computer.

  In such a printer 3000, the paper feed mechanism 3030 intermittently feeds the recording paper P one by one to the vicinity of the lower portion of the head unit 3021. At this time, the head unit 3021 reciprocates in a direction substantially orthogonal to the feeding direction of the recording paper P, and printing on the recording paper P is performed.

  The printer 3000 as described above includes the piezoelectric driving device 1A. According to such a printer 3000, the piezoelectric driving device 1A can perform high-precision driving using a detection result of a stable driving state. Therefore, the characteristics of the printer 3000 can be improved by using the driving characteristics of the piezoelectric driving device 1A.

5. Projector FIG. 14 is a schematic diagram showing an embodiment of a projector of the present invention.

  The projector 4000 shown in FIG. 14 includes a light source 4100R that emits red light, a light source 4100G that emits green light, a light source 4100B that emits blue light, lens arrays 4200R, 4200G, and 4200B, and a transmissive liquid crystal light valve. (Light modulation unit) 4300R, 4300G, 4300B, cross dichroic prism 4400, projection lens (projection unit) 4500, and piezoelectric drive device 10 described above are included.

  Light emitted from the light sources 4100R, 4100G, and 4100B is incident on the liquid crystal light valves 4300R, 4300G, and 4300B via the lens arrays 4200R, 4200G, and 4200B. Each of the liquid crystal light valves 4300R, 4300G, and 4300B modulates incident light according to image information.

  The three color lights modulated by the liquid crystal light valves 4300R, 4300G, and 4300B are incident on the cross dichroic prism 4400 and synthesized. The light synthesized by the cross dichroic prism 4400 enters a projection lens 4500 that is a projection optical system. The projection lens 4500 enlarges an image formed by the liquid crystal light valves 4300R, 4300G, and 4300B and projects the enlarged image onto a screen (display surface) 4600. Thus, a desired image is displayed on the screen 4600. Here, the projection lens 4500 is supported by the piezoelectric driving device 10, and the position and orientation can be changed (positioning) by driving the piezoelectric driving device 10. Thereby, the shape and size of the image projected on the screen 4600 can be adjusted.

  In the above-described example, a transmissive liquid crystal light valve is used as the light modulation unit, but a light valve other than liquid crystal may be used, or a reflective light valve may be used. Examples of such a light valve include a reflective liquid crystal light valve and a digital micromirror device. Further, the configuration of the projection optical system is appropriately changed depending on the type of light valve used. Further, the projector may be a scanning projector that displays an image of a desired size on the display surface by scanning light on a screen.

  As described above, the projector 4000 includes the piezoelectric driving device 10 (1, 1A). According to such a projector 4000, the piezoelectric driving device 10 (1, 1A) can perform high-accuracy driving using a detection result of a stable driving state. Therefore, the characteristics of the projector 4000 can be improved by using the driving characteristics of the piezoelectric driving device 10 (1, 1A).

  As described above, the piezoelectric driving device, the robot, the electronic component conveying device, the printer, and the projector of the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this, and the configuration of each unit is as follows. Any structure having a similar function can be substituted. In addition, any other component may be added to the present invention. Moreover, you may combine each embodiment suitably.

  In the above-described embodiment, the configuration in which the piezoelectric driving device is applied to a robot, an electronic component conveying device, a printer, and a projector has been described. However, the piezoelectric driving device can be applied to various other electronic devices. Further, when used in a printer, the piezoelectric drive device is not limited to a drive source for a paper feed roller of the printer, and can be applied to, for example, a drive source for an inkjet head of a printer.

  In the above-described embodiment, the case where the reflective optical encoder is used has been described as an example. However, a transmissive optical encoder may be used. In this case, the light emitting element and the light receiving element included in the sensor are arranged so as to sandwich the optical scale. And a sensor receives the transmitted light from an optical scale.

DESCRIPTION OF SYMBOLS 1 ... Piezoelectric drive device, 1A ... Piezoelectric drive device, 1X ... Piezoelectric drive device, 1Y ... Piezoelectric drive device, 1 (theta) ... Piezoelectric drive device, 2 ... 1st member, 3 ... 2nd member, 4 ... Guide mechanism, 4A ... Bearing DESCRIPTION OF SYMBOLS 5 ... Drive part, 5A ... Drive part, 6 ... Detection part, 6A ... Detection part, 8 ... 1st member, 9 ... 2nd member, 10 ... Piezoelectric drive device, 21 ... Installation surface, 22 ... Installation surface, 23 ... concave part, 24 ... convex part, 25 ... adhesive, 26 ... insulating film, 31 ... concave part, 32 ... hole, 33 ... hole, 34 ... structure, 35 ... concave part, 41 ... slider, 42 ... rail, 43 ... ball , 44 ... inner ring, 45 ... outer ring, 46 ... ball, 51 ... driven member, 52 ... piezoelectric actuator, 53 ... support member, 54 ... driven member, 55 ... support member, 61 ... optical scale, 62 ... sensor, 63 ... Substrate, 64 ... Optical scale, 71 ... Base material, 72 ... Optical pattern 73 ... resin layer, 74 ... metal film, 75 ... optical pattern, 81 ... installation surface, 82 ... installation surface, 83 ... recess, 84 ... hole, 85 ... outer peripheral surface, 86 ... structure, 91 ... recess, 92 ... Recessed portion, 93 ... hole, 221 ... convex portion, 222 ... recessed portion, 521 ... vibrating portion, 522 ... support portion, 523 ... connecting portion, 524 ... projecting portion, 711 ... convex portion, 711a ... inclined surface, 721 ... first region 722 ... second region 741 ... reflecting surface 742 ... reflecting surface 851 ... reduced diameter portion 852 ... expanded diameter portion 1000 ... robot 1010 ... base 1020 ... arm 1030 ... arm 1040 ... arm 1050 ... arm, 1060 ... arm, 1070 ... arm, 1080 ... control unit, 1090 ... end effector, 2000 ... electronic component transfer device, 2100 ... base, 2110 ... upstream stage, 2120 ... downstream side Stage, 2130 ... Inspection table, 2200 ... Supporting table, 2210 ... Y stage, 2220 ... X stage, 2230 ... Electronic component holding unit, 2233 ... Holding unit, 3000 ... Printer, 3010 ... Main body, 3011 ... Tray, 3012 ... Exhaust Paper mouth, 3013 ... operation panel, 3020 ... printing mechanism, 3021 ... head unit, 3021a ... head, 3021b ... ink cartridge, 3021c ... carriage, 3022 ... carriage motor, 3023 ... reciprocating mechanism, 3023a ... carriage guide shaft, 3023b ... Timing belt, 3030 ... paper feeding mechanism, 3031 ... driven roller, 3032 ... drive roller, 3040 ... control unit, 4000 ... projector, 4100B ... light source, 4100G ... light source, 4100R ... light source, 4200B ... lens array, 42 0G ... lens array, 4200R ... lens array, 4300B ... liquid crystal light valve, 4300G ... liquid crystal light valve, 4300R ... liquid crystal light valve, 4400 ... cross dichroic prism, 4500 ... projection lens, 4600 ... screen, 5211 ... piezoelectric element, 5212 ... Piezoelectric element, 5213 ... piezoelectric element, 5214 ... piezoelectric element, 5215 ... piezoelectric element, P ... recording paper, Q ... electronic component, X1 ... arrow, Y1 ... arrow, aZ ... axis, h ... height, t1 ... thickness, t2: thickness, α ... arrow, β ... arrow, θ ... inclination angle, θ1 ... arrow

Claims (13)

A first member;
A second member provided to be movable or rotatable relative to the first member;
A driven member disposed on the first member;
A piezoelectric actuator that is disposed on the second member and transmits a driving force to the driven member for moving or rotating the first member relative to the second member;
An optical scale having a conductive optical pattern disposed on one of the first member and the second member and connected to a reference potential;
A piezoelectric drive device comprising: a sensor disposed on the other of the first member and the second member and receiving transmitted light or reflected light from the optical scale. The optical scale has a plate-like substrate on which the optical pattern is provided,
The optical pattern includes a first region which is a region where a resin layer obtained by patterning a photosensitive resin is provided on the base material, and a second region which is a region where the resin layer is not provided on the base material. Are lined up alternately,
The surface of the first region is mainly composed of a first surface whose normal is the thickness direction of the base material,
The surface of the second region is mainly composed of a second surface inclined with respect to the first surface,
2. The piezoelectric driving device according to claim 1, wherein a metal film is provided on a surface of each of the first region and the second region.   The piezoelectric driving device according to claim 2, wherein the base material is made of a crystal material capable of anisotropic etching.   The piezoelectric drive device according to claim 3, wherein the crystal material is single crystal silicon.   The piezoelectric drive device according to claim 4, wherein the plane orientation of the single crystal silicon is (100).   The piezoelectric driving device according to claim 3, wherein the second surface is provided along a crystal surface of the crystal material.   The piezoelectric drive device according to claim 2, wherein the base material has conductivity. The first member or the second member has an installation surface on which the optical scale is installed,
The piezoelectric drive device according to claim 1, wherein the installation surface has a convex portion.   9. The piezoelectric driving device according to claim 1, wherein the optical scale is bonded to the first member or the second member via a conductive adhesive. 10.   A robot comprising the piezoelectric drive device according to claim 1.   An electronic component conveying device comprising the piezoelectric driving device according to claim 1.   A printer comprising the piezoelectric drive device according to claim 1.   A projector comprising the piezoelectric drive device according to claim 1.

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