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JP2019037450A - Fluid sterilizer - Google Patents

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JP2019037450A
JP2019037450A JP2017161273A JP2017161273A JP2019037450A JP 2019037450 A JP2019037450 A JP 2019037450A JP 2017161273 A JP2017161273 A JP 2017161273A JP 2017161273 A JP2017161273 A JP 2017161273A JP 2019037450 A JP2019037450 A JP 2019037450A
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ultraviolet light
receiving unit
light
fluid
light receiving
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JP6875958B2 (en
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真也 渡邊
Shinya Watanabe
真也 渡邊
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Nikkiso Co Ltd
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Abstract

【課題】モニタリングの精度を高めた流体殺菌装置を提供する。【解決手段】流体殺菌装置10は、殺菌対象の流体が流れる処理流路12と、処理流路12内の流体に向けて紫外光を照射する光源14と、光源14と処理流路12の間に設けられ、光源14からの紫外光が入射する入射面31と、処理流路12内に向けて紫外光Aが出射する出射面32とを有する窓部材30と、窓部材30の出射面32とは異なる面から出射する紫外光Bを受光するよう配置される受光部16と、を備える。【選択図】図1PROBLEM TO BE SOLVED: To provide a fluid sterilizer having improved monitoring accuracy. A fluid sterilizer 10 is located between a processing flow path 12 through which a fluid to be sterilized flows, a light source 14 that irradiates ultraviolet light toward the fluid in the processing flow path 12, and a light source 14 and the processing flow path 12. A window member 30 having an incident surface 31 on which ultraviolet light from the light source 14 is incident, an emitting surface 32 on which ultraviolet light A is emitted toward the inside of the processing flow path 12, and an emitting surface 32 of the window member 30. A light receiving unit 16 is provided so as to receive ultraviolet light B emitted from a surface different from the above. [Selection diagram] Fig. 1

Description

本発明は、流体殺菌装置に関し、特に、紫外光を照射して流体を殺菌する技術に関する。   The present invention relates to a fluid sterilizer, and more particularly to a technique for sterilizing a fluid by irradiating ultraviolet light.

紫外光には殺菌能力があることが知られており、医療や食品加工の現場などでの殺菌処理に紫外光を照射する装置が用いられている。また、水などの流体に紫外光を照射することで、流体を連続的に殺菌する装置も用いられている。このような装置として、例えば、処理槽の内部に直管状の紫外線ランプと円筒状のランプスリーブとを設け、処理槽内の被処理水に紫外線を照射する紫外線照射装置が挙げられる。紫外線ランプの照度は紫外線モニタを用いて計測され、紫外線モニタと紫外線ランプの間に石英ガラス等で形成される透過窓が設けられる(例えば、特許文献1参照)。   It is known that ultraviolet light has a sterilizing ability, and an apparatus for irradiating ultraviolet light is used for sterilization treatment in medical or food processing sites. In addition, an apparatus for continuously sterilizing a fluid by irradiating a fluid such as water with ultraviolet light is also used. As such an apparatus, for example, an ultraviolet irradiation apparatus that includes a straight tubular ultraviolet lamp and a cylindrical lamp sleeve inside the treatment tank and irradiates the water to be treated in the treatment tank with ultraviolet rays. The illuminance of the ultraviolet lamp is measured using an ultraviolet monitor, and a transmission window formed of quartz glass or the like is provided between the ultraviolet monitor and the ultraviolet lamp (for example, see Patent Document 1).

特開2011−183295号公報JP 2011-183295 A

紫外線モニタで計測される光量は、処理槽内の流体の紫外線透過率やモニタ前方の透過窓への汚れの付着による透過率低下などの影響を受けてしまい、光源自体の光強度を適切に測定することが難しい場合がある。   The amount of light measured by the UV monitor is affected by the UV transmittance of the fluid in the processing tank and the decrease in transmittance due to dirt on the transmission window in front of the monitor. It may be difficult to do.

本発明はこうした課題に鑑みてなされたものであり、その例示的な目的のひとつは、光源のモニタリング精度を高めた流体殺菌装置を提供することにある。   The present invention has been made in view of these problems, and one of exemplary purposes thereof is to provide a fluid sterilization apparatus with improved light source monitoring accuracy.

本発明のある態様の流体殺菌装置は、殺菌対象の流体が流れる処理流路と、処理流路内の流体に向けて紫外光を照射する光源と、光源と処理流路の間に設けられ、光源からの紫外光が入射する入射面と、処理流路内に向けて紫外光が出射する出射面とを有する窓部材と、窓部材の出射面とは異なる面から出射する紫外光を受光するよう配置される受光部と、を備える。   A fluid sterilization apparatus according to an aspect of the present invention is provided between a processing channel in which a fluid to be sterilized flows, a light source that irradiates ultraviolet light toward the fluid in the processing channel, and between the light source and the processing channel. A window member having an incident surface on which ultraviolet light from a light source is incident and an emission surface from which ultraviolet light is emitted toward the processing flow path, and ultraviolet light emitted from a surface different from the emission surface of the window member are received. A light receiving portion arranged in such a manner.

この態様によると、窓部材の出射面とは異なる面から出射する紫外光を受光するように受光部が配置されるため、処理流路内の流体の状態の影響を受けにくい態様で紫外光を計測できる。また、処理流路内に受光部が配置されて処理流路の一部が受光部の陰になることを防ぐことができ、受光部を設けることによる殺菌能力の低下を防ぐことができる。   According to this aspect, since the light receiving unit is disposed so as to receive the ultraviolet light emitted from a surface different from the emission surface of the window member, the ultraviolet light is emitted in a manner that is not easily affected by the state of the fluid in the processing channel. It can be measured. Moreover, it is possible to prevent the light receiving unit from being disposed in the processing channel and to prevent a part of the processing channel from being behind the light receiving unit, and it is possible to prevent the sterilization ability from being lowered due to the provision of the light receiving unit.

窓部材は、入射面と出射面の間に位置する側面を有してもよい。受光部は、側面から出射する紫外光を受光するよう配置されてもよい。   The window member may have a side surface located between the entrance surface and the exit surface. The light receiving unit may be arranged to receive ultraviolet light emitted from the side surface.

受光部は、入射面から出射する紫外光を受光するよう配置されてもよい。   The light receiving unit may be arranged to receive ultraviolet light emitted from the incident surface.

受光部は、光源と同一の基板上に設けられてもよい。   The light receiving unit may be provided on the same substrate as the light source.

受光部は、出射面にて窓部材の内側に向けて反射された紫外光を受光するよう配置されてもよい。   The light receiving unit may be arranged to receive the ultraviolet light reflected toward the inside of the window member at the emission surface.

窓部材は、出射面の外周に位置し、出射面に対して傾斜する傾斜面を有してもよい。受光部は、傾斜面で反射された紫外光を受光するよう配置されてもよい。   A window member may be located in the outer periphery of an output surface, and may have an inclined surface which inclines with respect to an output surface. The light receiving unit may be arranged to receive ultraviolet light reflected by the inclined surface.

窓部材は、傾斜面に設けられる反射層をさらに有してもよい。   The window member may further include a reflective layer provided on the inclined surface.

傾斜面と接するように配置されるシール部材をさらに備えてもよい。   You may further provide the sealing member arrange | positioned so that an inclined surface may be contact | connected.

処理流路内の流体中を通過した紫外光を受光するよう配置される別の受光部をさらに備えてもよい。   You may further provide another light-receiving part arrange | positioned so that the ultraviolet light which passed in the fluid in a process flow path may be received.

本発明によれば、光源のモニタリング精度を高めた流体殺菌装置を提供できる。   ADVANTAGE OF THE INVENTION According to this invention, the fluid sterilizer which improved the monitoring precision of the light source can be provided.

実施の形態に係る流体殺菌装置の構成を概略的に示す断面図である。It is sectional drawing which shows schematically the structure of the fluid sterilizer which concerns on embodiment. 変形例に係る流体殺菌装置の構成を概略的に示す断面図である。It is sectional drawing which shows schematically the structure of the fluid sterilizer which concerns on a modification. 別の変形例に係る流体殺菌装置の構成を概略的に示す断面図である。It is sectional drawing which shows schematically the structure of the fluid sterilizer which concerns on another modification.

以下、図面を参照しながら、本発明を実施するための形態について詳細に説明する。なお、説明において同一の要素には同一の符号を付し、重複する説明を適宜省略する。   Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In the description, the same elements are denoted by the same reference numerals, and repeated descriptions are omitted as appropriate.

図1は、実施の形態に係る流体殺菌装置10の構成を概略的に示す図である。流体殺菌装置10は、処理流路12と、光源14と、第1受光部16と、第2受光部17と、制御装置18と、窓部材30とを備える。流体殺菌装置10は、筐体20の内部に区画される処理流路12を流れる流体に紫外光を照射して殺菌処理を施すために用いられる。   FIG. 1 is a diagram schematically showing a configuration of a fluid sterilizer 10 according to an embodiment. The fluid sterilizer 10 includes a processing flow path 12, a light source 14, a first light receiving unit 16, a second light receiving unit 17, a control device 18, and a window member 30. The fluid sterilizer 10 is used to sterilize the fluid flowing through the processing flow path 12 partitioned inside the housing 20 by irradiating ultraviolet light.

筐体20は、第1端部21と、第2端部22と、側壁23と、流出管26と、流入管27とを有する。側壁23は、第1端部21から第2端部22に向けて軸方向に延びる。第1端部21の近傍には流出管26が設けられ、第2端部22の近傍には流入管27が設けられる。流出管26および流入管27は、側壁23から径方向外側に延びる。   The housing 20 includes a first end 21, a second end 22, a side wall 23, an outflow pipe 26, and an inflow pipe 27. The side wall 23 extends in the axial direction from the first end 21 toward the second end 22. An outflow pipe 26 is provided in the vicinity of the first end 21, and an inflow pipe 27 is provided in the vicinity of the second end 22. The outflow pipe 26 and the inflow pipe 27 extend radially outward from the side wall 23.

筐体20の材質は特に問わないが、少なくとも筐体20の内面25が紫外光に対する耐久性および反射率が高い材料であることが好ましい。筐体20の内面25は、例えば、ポリテトラフルオロエチレン(PTFE)などのフッ素系樹脂やアルミニウム(Al)などの金属材料で構成されることが好ましい。   The material of the housing 20 is not particularly limited, but at least the inner surface 25 of the housing 20 is preferably a material having high durability against ultraviolet light and high reflectance. The inner surface 25 of the housing 20 is preferably made of, for example, a fluorine resin such as polytetrafluoroethylene (PTFE) or a metal material such as aluminum (Al).

光源14は、第1端部21に設けられる。光源14は、基板15に実装され、筐体20の軸方向に紫外光を照射するように配置される。光源14からの紫外光の大部分は、窓部材30の入射面31に入射し、窓部材30を通過して出射面32から出射される。窓部材30を介して照射される紫外光Aは、筐体20の内面25で反射されながら筐体20の軸方向に処理流路12の内部を進む。   The light source 14 is provided at the first end 21. The light source 14 is mounted on the substrate 15 and arranged to irradiate ultraviolet light in the axial direction of the housing 20. Most of the ultraviolet light from the light source 14 enters the entrance surface 31 of the window member 30, passes through the window member 30, and exits from the exit surface 32. The ultraviolet light A irradiated through the window member 30 travels inside the processing channel 12 in the axial direction of the housing 20 while being reflected by the inner surface 25 of the housing 20.

光源14は、紫外光を発する発光素子であり、いわゆるUV−LED(Ultra Violet-Light Emitting Diode)である。光源14は、発光の中心波長またはピーク波長が約200nm〜350nmの範囲に含まれ、殺菌効率の高い波長である260nm〜290nm付近の紫外光を発することが好ましい。このような紫外光LEDとして、例えば、窒化アルミニウムガリウム(AlGaN)を用いたものが知られている。   The light source 14 is a light emitting element that emits ultraviolet light, and is a so-called UV-LED (Ultra Violet-Light Emitting Diode). It is preferable that the light source 14 emits ultraviolet light having a central wavelength or peak wavelength of light emission in the range of about 200 nm to 350 nm and having a high bactericidal efficiency in the vicinity of 260 nm to 290 nm. As such an ultraviolet light LED, for example, one using aluminum gallium nitride (AlGaN) is known.

第1受光部16および第2受光部17は、光源14からの紫外光を受光する。第1受光部16および第2受光部17は、例えば、紫外光の強度計測が可能なフォトダイオードなどの光量センサを含み、受光した紫外光の光量に関する情報を制御装置18に送信する。   The first light receiving unit 16 and the second light receiving unit 17 receive ultraviolet light from the light source 14. The first light receiving unit 16 and the second light receiving unit 17 include, for example, a light amount sensor such as a photodiode capable of measuring the intensity of ultraviolet light, and transmits information related to the amount of received ultraviolet light to the control device 18.

第1受光部16は、窓部材30の出射面32とは異なる面から出射する紫外光の一部を計測するように配置され、窓部材30の側面33からの紫外光Bを計測可能となる位置に配置される。第2受光部17は、窓部材30の出射面32から出射された後、処理流路12を流れる流体を通過した紫外光Aの一部を計測するよう配置される。第2受光部17は、第2端部22に設けられ、筐体20の第2端部22に到達する紫外光を計測可能となる位置に配置される。第2受光部17は、側壁23に設けられてもよい。   The first light receiving unit 16 is arranged to measure a part of the ultraviolet light emitted from a surface different from the emission surface 32 of the window member 30, and can measure the ultraviolet light B from the side surface 33 of the window member 30. Placed in position. The second light receiving unit 17 is arranged to measure a part of the ultraviolet light A that has passed through the fluid flowing through the processing flow path 12 after being emitted from the emission surface 32 of the window member 30. The second light receiving unit 17 is provided at the second end 22 and is disposed at a position where the ultraviolet light reaching the second end 22 of the housing 20 can be measured. The second light receiving unit 17 may be provided on the side wall 23.

窓部材30は、処理流路12と光源14の間に設けられる。窓部材30は、第1端部21の近傍の凹部24に嵌め込まれ、シール部材28により凹部24との隙間が密閉される。窓部材30は、紫外光の透過率が高い材料で構成されることが好ましく、石英(SiO)やサファイア(Al)、非晶質のフッ素系樹脂などで構成される。 The window member 30 is provided between the processing flow path 12 and the light source 14. The window member 30 is fitted into the recess 24 in the vicinity of the first end 21, and the gap with the recess 24 is sealed by the seal member 28. The window member 30 is preferably made of a material having high ultraviolet light transmittance, and is made of quartz (SiO 2 ), sapphire (Al 2 O 3 ), amorphous fluorine-based resin, or the like.

窓部材30は、入射面31と、出射面32と、側面33とを有する。入射面31は、光源14に対向する主面であり、光源14からの紫外光Aが入射する。出射面32は、入射面31と反対側の主面であり、窓部材30を透過した紫外光Aが処理流路12に向けて出射する。側面33は、入射面31と出射面32の間に位置し、筐体20の凹部24に接する。   The window member 30 has an incident surface 31, an exit surface 32, and a side surface 33. The incident surface 31 is a main surface facing the light source 14, and the ultraviolet light A from the light source 14 is incident thereon. The exit surface 32 is a main surface opposite to the entrance surface 31, and the ultraviolet light A that has passed through the window member 30 exits toward the processing channel 12. The side surface 33 is located between the entrance surface 31 and the exit surface 32 and contacts the recess 24 of the housing 20.

窓部材30の入射面31には、光源14からの紫外光の反射を防ぐための反射防止膜(ARコート)が設けられてもよい。また、窓部材30の出射面32の一部には、窓部材30を透過した紫外光の一部を第1受光部16に向けて反射させるための部分反射膜(HRコート)が設けられてもよい。部分反射膜は、出射面32の中央付近を避けて設けられることが好ましく、出射面32の外周付近であって第1受光部16に向かって紫外光が反射する箇所に限定的に設けられることが好ましい。   The incident surface 31 of the window member 30 may be provided with an antireflection film (AR coating) for preventing reflection of ultraviolet light from the light source 14. Further, a partial reflection film (HR coat) for reflecting a part of the ultraviolet light transmitted through the window member 30 toward the first light receiving unit 16 is provided on a part of the emission surface 32 of the window member 30. Also good. The partial reflection film is preferably provided so as to avoid the vicinity of the center of the emission surface 32, and is provided in a limited area near the outer periphery of the emission surface 32 and where the ultraviolet light is reflected toward the first light receiving unit 16. Is preferred.

制御装置18は、第1受光部16および第2受光部17からの光量情報をモニタする。制御装置18は、例えば、第1受光部16からの光量情報が所定の閾値を下回る場合、光源14の出力強度が閾値以上となるように光源14の駆動電流を増加させる。制御装置18は、第2受光部17からの光量に基づいて光源14の駆動電流を調整してもよく、第2受光部17の光量情報が所定の閾値以上となるように光源14の駆動電流を調整してもよい。制御装置18は、光源14の駆動電流を増加させたにも拘わらず、依然として所定の閾値を下回る場合、所望の殺菌効果が実現できない旨を示すアラート情報を出力してもよい。   The control device 18 monitors light amount information from the first light receiving unit 16 and the second light receiving unit 17. For example, when the light amount information from the first light receiving unit 16 is lower than a predetermined threshold, the control device 18 increases the drive current of the light source 14 so that the output intensity of the light source 14 is equal to or higher than the threshold. The control device 18 may adjust the driving current of the light source 14 based on the light amount from the second light receiving unit 17, and the driving current of the light source 14 so that the light amount information of the second light receiving unit 17 is equal to or greater than a predetermined threshold. May be adjusted. The control device 18 may output alert information indicating that a desired sterilizing effect cannot be realized when the driving current of the light source 14 is increased but still falls below a predetermined threshold value.

以上の構成によれば、流体殺菌装置10は、処理流路12を流れる流体に紫外光を照射して殺菌処理を施す。光源14からの紫外光は、第1受光部16および第2受光部17により受光され、制御装置18によりモニタされる。第1受光部16により受光される紫外光は、窓部材30の内部を伝搬して側面33から出射される紫外光Bであり、例えば、出射面32において窓部材30の内側に反射される内部反射光である。第1受光部16は、主に処理流路12を通過しない紫外光を検知するため、処理流路12の流体に影響を受けにくい態様で紫外光をモニタする。一方、第2受光部17は、処理流路12を通過した紫外光を検知するため、処理流路12の流体に影響される態様で紫外光をモニタする。   According to the above configuration, the fluid sterilizer 10 performs sterilization by irradiating the fluid flowing through the processing flow path 12 with ultraviolet light. Ultraviolet light from the light source 14 is received by the first light receiving unit 16 and the second light receiving unit 17 and monitored by the control device 18. The ultraviolet light received by the first light receiving unit 16 is the ultraviolet light B that propagates through the window member 30 and is emitted from the side surface 33. For example, the interior reflected on the inside of the window member 30 at the emission surface 32. Reflected light. Since the first light receiving unit 16 mainly detects the ultraviolet light that does not pass through the processing channel 12, the first light receiving unit 16 monitors the ultraviolet light in a manner that is not easily affected by the fluid in the processing channel 12. On the other hand, the second light receiving unit 17 monitors the ultraviolet light in a manner that is influenced by the fluid in the processing channel 12 in order to detect the ultraviolet light that has passed through the processing channel 12.

本実施の形態によれば、第1受光部16および第2受光部17を設けることにより、流体の影響を受けていない紫外光と、流体の影響を受けた紫外光の双方を検知でき、流体殺菌装置10のモニタリング精度を高めることができる。第1受光部16の検出結果は、1)窓部材30の透過率変化、2)窓部材30の表面反射率変化、3)光源14の出力低下、4)受光素子の受光感度変化の影響を受ける。一方、第2受光部17の検出結果は、上述の1)〜4)に加えて、5)処理流路12を流れる流体の透過率変化と、6)筐体20の内面25の反射率変化の影響を受ける。したがって、第1受光部16と第2受光部17の検出結果を比較することで、上述の5)および6)の影響を切り分けることができ、処理流路12を流れる流体の状態や内面25の汚れの状態等を検出できる。また、処理流路12の途中に受光部が配置されない構成を実現できるため、処理流路12の一部が受光部の陰となって照射効率が低下するのを防ぐことができる。   According to the present embodiment, by providing the first light receiving unit 16 and the second light receiving unit 17, it is possible to detect both ultraviolet light that is not affected by the fluid and ultraviolet light that is affected by the fluid. The monitoring accuracy of the sterilizer 10 can be increased. The detection results of the first light receiving unit 16 are: 1) change in transmittance of the window member 30, 2) change in surface reflectance of the window member 30, 3) decrease in output of the light source 14, and 4) influence of change in light receiving sensitivity of the light receiving element. receive. On the other hand, the detection result of the second light receiving unit 17 includes, in addition to the above 1) to 4), 5) a change in the transmittance of the fluid flowing through the processing channel 12, and 6) a change in the reflectance of the inner surface 25 of the housing 20. Affected by. Therefore, by comparing the detection results of the first light receiving unit 16 and the second light receiving unit 17, the effects of the above 5) and 6) can be separated, and the state of the fluid flowing through the processing flow path 12 and the inner surface 25 The state of dirt can be detected. In addition, since a configuration in which the light receiving unit is not disposed in the middle of the processing flow path 12 can be realized, it is possible to prevent a reduction in irradiation efficiency due to a part of the processing flow path 12 being behind the light receiving unit.

図2は、変形例に係る流体殺菌装置10の構成を概略的に示す断面図である。本変形例では、第1受光部16が光源14と同一の基板15に実装され、窓部材30の入射面31から出射される紫外光Bを受光するように配置される点で上述の実施の形態と相違する。本変形例において、第1受光部16は、出射面32において窓部材30の内側に反射された後、入射面31から出射する紫外光Bを受光するように配置される。入射面31の全面に反射防止膜が設けられてもよいし、出射面32の一部であって第1受光部16に向かって紫外光が反射する箇所に部分的に反射膜が設けられてもよい。   FIG. 2 is a cross-sectional view schematically showing a configuration of the fluid sterilization apparatus 10 according to the modification. In this modification, the first light receiving unit 16 is mounted on the same substrate 15 as the light source 14 and is arranged to receive the ultraviolet light B emitted from the incident surface 31 of the window member 30. It differs from the form. In the present modification, the first light receiving unit 16 is disposed so as to receive the ultraviolet light B emitted from the incident surface 31 after being reflected inside the window member 30 on the emission surface 32. An antireflection film may be provided on the entire surface of the incident surface 31, or a reflective film may be partially provided at a part of the emission surface 32 where ultraviolet light is reflected toward the first light receiving unit 16. Also good.

第1受光部16は、入射面31にて反射された紫外光を受光してもよい。この場合、第1受光部16に向かって紫外光が反射する入射面31の一部に部分反射膜が設けられ、入射面31の他の部分に反射防止膜が設けられてもよい。その他、第1受光部16に向かう紫外光が反射する入射面31の一部に反射防止膜を設けず、入射面31のそれ以外の部分に反射防止膜を設けてもよい。本変形例においても、上述の実施の形態と同様の効果を奏することができる。   The first light receiving unit 16 may receive the ultraviolet light reflected by the incident surface 31. In this case, a partial reflection film may be provided on a part of the incident surface 31 where the ultraviolet light is reflected toward the first light receiving unit 16, and an antireflection film may be provided on the other part of the incident surface 31. In addition, the antireflection film may not be provided on a part of the incident surface 31 where the ultraviolet light directed toward the first light receiving unit 16 is reflected, and the antireflection film may be provided on the other part of the incident surface 31. Also in this modification, the same effect as the above-mentioned embodiment can be produced.

図3は、別の変形例に係る流体殺菌装置10の構成を概略的に示す断面図である。本変形例では、窓部材30に傾斜面34が設けられ、傾斜面34で反射された紫外光を第1受光部16が受光するように配置される点で上述の実施の形態と相違する。   FIG. 3 is a cross-sectional view schematically showing a configuration of a fluid sterilizer 10 according to another modification. The present modification is different from the above-described embodiment in that the window member 30 is provided with an inclined surface 34 and is arranged so that the first light receiving unit 16 receives ultraviolet light reflected by the inclined surface 34.

窓部材30は、傾斜面34を有する。傾斜面34は、出射面32の外周に位置し、出射面32と側面33で構成される角部を隅切りすることで形成可能である。傾斜面34は、出射面32に対して傾斜しており、その傾斜角は20〜70度程度であり、典型的には30〜60度程度である。傾斜面34は、図示する例において出射面32の全周にわたって形成されるが、出射面32の外周の一部にのみ形成されてもよい。側面33が設けられず、入射面31と出射面32の間に傾斜面34のみが形成されてもよい。   The window member 30 has an inclined surface 34. The inclined surface 34 is located on the outer periphery of the emission surface 32, and can be formed by cutting a corner formed by the emission surface 32 and the side surface 33. The inclined surface 34 is inclined with respect to the emission surface 32, and the inclination angle is about 20 to 70 degrees, typically about 30 to 60 degrees. The inclined surface 34 is formed over the entire circumference of the emission surface 32 in the illustrated example, but may be formed only on a part of the outer periphery of the emission surface 32. The side surface 33 is not provided, and only the inclined surface 34 may be formed between the entrance surface 31 and the exit surface 32.

傾斜面34には反射層36が設けられる。反射層36は、紫外光に対して高反射となるように構成され、例えば、アルミニウム薄膜や誘電体多層膜などで構成される。反射層36を設けることにより、第1受光部16に向かう紫外光の光量を増やし、計測精度を高めることができる。   A reflective layer 36 is provided on the inclined surface 34. The reflection layer 36 is configured to be highly reflective with respect to ultraviolet light, and is formed of, for example, an aluminum thin film or a dielectric multilayer film. By providing the reflective layer 36, the amount of ultraviolet light directed to the first light receiving unit 16 can be increased, and the measurement accuracy can be increased.

シール部材28は、窓部材30の傾斜面34と接するように配置される。その結果、シール部材28は、光源14から見て傾斜面34の反射層36の裏側に隠れるように配置される。シール部材28を反射層36の裏側に配置することにより、光源14からシール部材28に向かう紫外光を反射層36で遮蔽し、紫外光によるシール部材28の劣化を軽減できる。   The seal member 28 is disposed so as to contact the inclined surface 34 of the window member 30. As a result, the seal member 28 is arranged so as to be hidden behind the reflective layer 36 of the inclined surface 34 when viewed from the light source 14. By disposing the seal member 28 on the back side of the reflective layer 36, the ultraviolet light traveling from the light source 14 toward the seal member 28 is shielded by the reflective layer 36, and deterioration of the seal member 28 due to the ultraviolet light can be reduced.

以上、本発明を実施例にもとづいて説明した。本発明は上記実施の形態に限定されず、種々の設計変更が可能であり、様々な変形例が可能であること、またそうした変形例も本発明の範囲にあることは、当業者に理解されるところである。   In the above, this invention was demonstrated based on the Example. It is understood by those skilled in the art that the present invention is not limited to the above-described embodiment, and various design changes are possible, and various modifications are possible, and such modifications are within the scope of the present invention. It is a place.

上述の実施の形態では、光源14が配置される第1端部21を流出側とし、反対側の第2端部22を流入側とした。さらなる変形例においては、第1端部21を流入側とし、第2端部22を流出側としてもよい。   In the above-described embodiment, the first end 21 where the light source 14 is disposed is the outflow side, and the opposite second end 22 is the inflow side. In a further modification, the first end 21 may be the inflow side and the second end 22 may be the outflow side.

上述の実施の形態では、第1受光部16と第2受光部17を組み合わせる構成とした。さらなる変形例では、第2受光部17を設けずに第1受光部16のみを設ける構成としてもよい。   In the above-described embodiment, the first light receiving unit 16 and the second light receiving unit 17 are combined. In a further modification, only the first light receiving unit 16 may be provided without providing the second light receiving unit 17.

上述の変形例では、窓部材30の傾斜面34に反射層36を設ける構成とした。さらなる変形例においては、傾斜面34に反射層36を設けず、傾斜面34の界面における屈折率差を利用して紫外光を第1受光部16に向けて反射させるよう構成してもよい。   In the above-described modification, the reflective layer 36 is provided on the inclined surface 34 of the window member 30. In a further modification, the reflective layer 36 may not be provided on the inclined surface 34, and the ultraviolet light may be reflected toward the first light receiving unit 16 using the refractive index difference at the interface of the inclined surface 34.

上述の実施の形態では、水などの流体に紫外光を照射して殺菌処理を施すための装置として説明した。変形例においては、紫外光の照射により流体に含まれる有機物を分解させる浄化処理に本装置を用いてもよい。   In the above-mentioned embodiment, it demonstrated as an apparatus for irradiating ultraviolet rays to fluids, such as water, and performing a sterilization treatment. In a modified example, this apparatus may be used for a purification process for decomposing an organic substance contained in a fluid by irradiation with ultraviolet light.

10…流体殺菌装置、12…処理流路、14…光源、15…基板、16…第1受光部、17…第2受光部、28…シール部材、30…窓部材、31…入射面、32…出射面、33…側面、34…傾斜面、36…反射層。   DESCRIPTION OF SYMBOLS 10 ... Fluid sterilizer, 12 ... Processing flow path, 14 ... Light source, 15 ... Board | substrate, 16 ... 1st light-receiving part, 17 ... 2nd light-receiving part, 28 ... Seal member, 30 ... Window member, 31 ... Incident surface, 32 ... exiting surface, 33 ... side surface, 34 ... inclined surface, 36 ... reflective layer.

Claims (9)

殺菌対象の流体が流れる処理流路と、
前記処理流路内の流体に向けて紫外光を照射する光源と、
前記光源と前記処理流路の間に設けられ、前記光源からの紫外光が入射する入射面と、前記処理流路内に向けて紫外光が出射する出射面とを有する窓部材と、
前記窓部材の前記出射面とは異なる面から出射する紫外光を受光するよう配置される受光部と、を備えることを特徴とする流体殺菌装置。
A treatment flow path through which the fluid to be sterilized flows;
A light source that irradiates ultraviolet light toward the fluid in the processing channel;
A window member provided between the light source and the processing channel, and having an incident surface on which ultraviolet light from the light source is incident, and an exit surface from which ultraviolet light is emitted toward the processing channel;
A fluid sterilizer comprising: a light receiving portion arranged to receive ultraviolet light emitted from a surface different from the emission surface of the window member.
前記窓部材は、前記入射面と前記出射面の間に位置する側面を有し、
前記受光部は、前記側面から出射する紫外光を受光するよう配置されることを特徴とする請求項1に記載の流体殺菌装置。
The window member has a side surface located between the entrance surface and the exit surface,
The fluid sterilizer according to claim 1, wherein the light receiving unit is arranged to receive ultraviolet light emitted from the side surface.
前記受光部は、前記入射面から出射する紫外光を受光するよう配置されることを特徴とする請求項1に記載の流体殺菌装置。   The fluid sterilizer according to claim 1, wherein the light receiving unit is arranged to receive ultraviolet light emitted from the incident surface. 前記受光部は、前記光源と同一の基板上に設けられることを特徴とする請求項3に記載の流体殺菌装置。   The fluid sterilizer according to claim 3, wherein the light receiving unit is provided on the same substrate as the light source. 前記受光部は、前記出射面にて前記窓部材の内側に向けて反射された紫外光を受光するよう配置されることを特徴とする請求項1から4のいずれか一項に記載の流体殺菌装置。   5. The fluid sterilization according to claim 1, wherein the light receiving unit is disposed so as to receive ultraviolet light reflected toward the inside of the window member on the emission surface. apparatus. 前記窓部材は、前記出射面の外周に位置し、前記出射面に対して傾斜する傾斜面を有し、
前記受光部は、前記傾斜面で反射された紫外光を受光するよう配置されることを特徴とする請求項3または4に記載の流体殺菌装置。
The window member is located on the outer periphery of the emission surface and has an inclined surface inclined with respect to the emission surface,
The fluid sterilizer according to claim 3, wherein the light receiving unit is arranged to receive ultraviolet light reflected by the inclined surface.
前記窓部材は、前記傾斜面に設けられる反射層をさらに有することを特徴とする請求項6に記載の流体殺菌装置。   The fluid sterilizer according to claim 6, wherein the window member further includes a reflective layer provided on the inclined surface. 前記傾斜面と接するように配置されるシール部材をさらに備えることを特徴とする請求項7に記載の流体殺菌装置。   The fluid sterilizer according to claim 7, further comprising a seal member disposed so as to be in contact with the inclined surface. 前記処理流路内の流体中を通過した紫外光を受光するよう配置される別の受光部をさらに備えることを特徴とする請求項1から8のいずれか一項に記載の流体殺菌装置。   The fluid sterilizer according to any one of claims 1 to 8, further comprising another light receiving unit arranged to receive ultraviolet light that has passed through the fluid in the processing channel.
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