JP2019030062A - Drive device - Google Patents

Abstract

To suppress upsizing of a drive device that separately controls multiple dielectric bodies, or a drive device that separately controls sections of a dielectric body.SOLUTION: The drive device includes a power source and multiple drive circuits. The multiple drive circuits are each configured to receive power supply from the power source. The multiple drive circuits each include an actuator and a first switch circuit. The actuator has a dielectric body and first and second electrodes provided on the dielectric body. The first switch circuit is provided between the power source and the first electrode.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a drive device.

  Japanese Patent Laying-Open No. 2003-174205 (Patent Document 1) discloses a driving device including a plurality of dielectrics. In this driving apparatus, a plurality of power sources are provided, and different power sources are connected to each of the plurality of dielectrics. By controlling the voltage of each power supply individually, this drive device can individually control the drive of each dielectric (see Patent Document 1).

JP 2003-174205 A

  In a driving device including a plurality of dielectrics, if a plurality of power supplies are provided as in Patent Document 1 to control each dielectric individually, the driving device becomes large. Further, there may be a case where it is desired to control driving for each part of the dielectric. Even in such a case, if different power sources are connected to each part in order to control each part individually, a plurality of power sources are used, so that the drive device becomes large.

  The present invention has been made to solve such a problem, and an object thereof is to individually control each of a plurality of dielectrics or to individually control each part of the dielectrics. In a drive device, it is suppressing the enlargement of a drive device.

  A drive device according to an aspect of the present invention includes a power supply and a plurality of drive circuits. Each of the plurality of drive circuits is configured to receive power supply from a power source. Each of the plurality of drive circuits includes an actuator and a first switch circuit. The actuator includes a dielectric and first and second electrodes provided on the dielectric. The first switch circuit is provided between the power supply and the first electrode.

  In this drive device, in each of the plurality of drive circuits, a first switch circuit is provided between the power supply and the first electrode. According to this drive device, each actuator can be individually controlled by controlling on / off (closing / opening) of the first switch circuit even if different power sources are not provided for each of the plurality of drive circuits. can do. That is, according to this drive device, since it is not necessary to provide different power sources for each of the plurality of drive circuits, it is possible to suppress an increase in size of the drive device.

  A drive device according to another aspect of the present invention includes a power supply, a dielectric, and a plurality of drive circuits. Each of the plurality of drive circuits is configured to supply power from a power source to the dielectric. Each of the plurality of drive circuits includes first and second electrodes and a first switch circuit. The first and second electrodes are provided on the dielectric. The first switch circuit is provided between the power supply and the first electrode.

  In this drive device, in each of the plurality of drive circuits, a first switch circuit is provided between the power supply and the first electrode. According to this drive device, each part of the dielectric can be controlled by controlling on / off of the first switch circuit even if a different power source is not connected to each of the plurality of first electrodes provided on the dielectric. Can be controlled individually. That is, according to this drive device, since it is not necessary to provide different power sources for each of the plurality of drive circuits, it is possible to suppress an increase in size of the drive device.

  Preferably, these driving devices further include a control circuit. The control circuit is configured to control the first switch circuit. The control circuit controls the first switch circuit so as to be in the closed state, and then sets the first switch circuit so as to be in the open state before the period for maintaining the voltage between the first and second electrodes ends. Control.

  An actuator having a dielectric can hold an electric charge without continuing to apply a voltage. Therefore, even if the first switch circuit is opened before the period for maintaining the voltage between the first and second electrodes ends, the voltage between the first and second electrodes does not decrease immediately. In the driving device according to the present invention, after the first switch circuit is closed, the first switch circuit is opened before the period for maintaining the voltage between the first and second electrodes is completed. . Therefore, according to these drive devices, power consumption can be reduced compared to the case where the first switch circuit is kept closed until the period for maintaining the voltage between the first and second electrodes ends. Can do.

  More preferably, in these driving devices, the control circuit has a predetermined condition that the voltage between the first and second electrodes can be considered to have decreased before the period for maintaining the voltage between the first and second electrodes ends. When it is established, the first switch circuit is controlled so as to be closed again.

  In the actuator having a dielectric, the voltage gradually decreases after the application of the voltage is stopped. Therefore, when a long time elapses after the application of the voltage is stopped, the voltage of the actuator is not sufficient. In the driving device according to the present invention, when a predetermined condition (for example, the elapse of a predetermined time since the first switch circuit is opened) that satisfies that the voltage between the first and second electrodes has decreased is satisfied, One switch circuit is closed again. Therefore, according to these drive devices, it is possible to suppress the voltage between the first and second electrodes from falling below a necessary minimum level in the period in which the voltage between the first and second electrodes is maintained.

  Preferably, in these driving devices, the second electrode is connected to the ground. Each of the plurality of drive circuits further includes a second switch circuit connected in parallel to the actuator or the dielectric. The second switch circuit is provided between the first switch circuit and the ground.

  According to these driving devices, the electric charge held by the dielectric can be discharged by closing the second switch circuit.

  More preferably, in these drive devices, the control circuit is configured to control the second switch circuit. The control circuit controls the first and second switch circuits so that the first and second switch circuits are not simultaneously closed.

  In these drive devices, the first and second switch circuits are not simultaneously closed. Therefore, according to these drive devices, a short circuit between the power source and the ground can be suppressed.

  More preferably, in these drive devices, each of the plurality of drive circuits further includes a third switch circuit provided between the second electrode and the ground. The control circuit is configured to control the third switch circuit. The control circuit controls the third switch circuit so that the third switch circuit is also opened when the first and second switch circuits are opened.

  In these driving devices, a third switch circuit is provided between the second electrode and the ground. If the first and second switch circuits are in an open state and the third switch circuit is in a closed state, the power source is a high voltage power source and the distance between the contacts of the first switch circuit is short. Sparks may occur between the contacts of the first switch circuit. In the drive device according to the present invention, when the first and second switch circuits are opened, the third switch circuit is also opened. Therefore, according to these driving devices, when the first and second switch circuits are opened, the dielectric is in a floating state between the power supply and the ground, and therefore sparks are generated in the first switch circuit. The possibility can be reduced.

  ADVANTAGE OF THE INVENTION According to this invention, the enlargement of a drive device can be suppressed in the drive device which controls each of several dielectrics individually, or the drive device which controls each site | part of a dielectric material separately.

FIG. 3 is a diagram showing a circuit configuration of a drive device according to the first embodiment. It is a timing chart which shows an example of operation of a drive. It is a flowchart which shows the process sequence of switching control of a switch circuit. FIG. 6 is a diagram showing a circuit configuration of a driving device according to a second embodiment. It is a figure which shows the circuit structure of the drive device by which what combined the low voltage source, the high voltage amplifier, and the signal source was used for the power supply. It is a timing chart which shows an example of operation of a drive in a modification. In FIG. 1, it is a figure which shows the example in which the switch circuit was added between the electrode and the ground.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding portions are denoted by the same reference numerals and description thereof will not be repeated.

[1. Embodiment 1]
<1-1. Circuit configuration of drive device>
FIG. 1 is a diagram showing a circuit configuration of drive device 10 according to the first embodiment. As shown in FIG. 1, the drive device 10 includes drive circuits 20 and 30, a variable high-voltage power supply 40, and a control circuit 50. In the drive device 10, one variable high-voltage power supply 40 supplies power to each of the drive circuits 20 and 30.

  The drive circuit 20 includes an actuator 22 and switch circuits S1 and D1. The actuator 22 includes a dielectric 24 and electrodes 26 and 28.

  The dielectric 24 is made of an elastomer material having flexibility and high dielectric constant, such as acrylic, urethane, and silicone. The dielectric 24 expands and contracts when a voltage is applied (when charged). By using the expansion and contraction of the dielectric 24, the driving device 10 drives the driving target.

  Each of the electrodes 26 and 28 has elasticity and is provided on the surface of the dielectric 24. The electrodes 26 and 28 are provided at positions facing each other across the dielectric 24. The electrode 26 is electrically connected to the switch circuits S1 and D1 through the node N2. The electrode 28 is electrically connected to the ground G1 and the switch circuit D1 via nodes N4 and N3. The electrodes 26 and 28 are not necessarily provided at positions facing each other with the dielectric 24 interposed therebetween. The electrodes 26 and 28 may be provided on the same surface of the dielectric 24, for example. That is, the electrodes 26 and 28 may be provided on the dielectric 24.

  Each of the switch circuits S1 and D1 is a circuit configured to open and close an electric circuit. Each of the switch circuits S1 and D1 is configured by a semiconductor switch such as a reed switch, a reed relay, or a transistor, for example.

  One terminal of the switch circuit S1 is connected to the variable high-voltage power supply 40 via the node N1, and the other terminal is connected to the switch circuit D1 and the electrode 26 via the node N2. One terminal of the switch circuit D1 is connected to the switch circuit S1 and the electrode 26 via the node N2, and the other terminal is connected to the ground G1 via N3 and the electrode 28 via the nodes N3 and N4. It is connected to the.

  When the switch circuit S1 is closed while the switch circuit D1 is open, the voltage of the variable high-voltage power supply 40 is applied to the actuator 22 and the actuator 22 is charged. Thereafter, when the switch circuit S1 is opened while the switch circuit D1 is opened, the voltage of the actuator 22 (voltage between the electrodes 26 and 28) is maintained. In this case, the voltage of the actuator 22 is not completely maintained, and decreases at a moderate pace. When the switch circuit D1 is closed while the switch circuit S1 is open, the charge stored in the actuator 22 is discharged. As described above, in the driving device 10, the operation of the actuator 22 (expansion / contraction of the dielectric 24) can be controlled by controlling the charge / discharge of the actuator 22 through the control of the switch circuits S <b> 1 and D <b> 1.

  The drive circuit 30 has the same configuration as that of the drive circuit 20, and includes an actuator 32 and switch circuits S2 and D2. The actuator 32 has the same configuration as the actuator 22, and the switch circuits S2 and D2 have the same configuration as the switch circuits S1 and D1, respectively. The dielectric 34 and the electrodes 36 and 38 have the same configuration as the dielectric 24 and the electrodes 26 and 28, respectively. Thus, since the drive circuit 30 has the same configuration as the drive circuit 20, the description of the details of the drive circuit 30 will not be repeated.

  The variable high voltage power source 40 is a high voltage power source whose voltage is variable. The variable high voltage power supply 40 is configured to change the voltage in accordance with a command value transmitted from the control circuit 50.

  The control circuit 50 includes a CPU (Central Processing Unit) and a memory (not shown), and is based on a program stored in the memory (hereinafter also referred to as “internal memory”) and information from each sensor (not shown). Each circuit of the driving device 10 (for example, variable high voltage power supply 40, switch circuits S1, D1, S2, D2) is controlled. It can be said that the program stored in the internal memory is a control program for controlling the operation of the actuators 22 and 32.

  The control circuit 50 is configured to transmit, for example, a command value for changing the voltage of the variable high voltage power supply 40 to the variable high voltage power supply 40. The command value transmitted from the control circuit 50 to the variable high-voltage power supply 40 is determined according to a program stored in the internal memory, for example.

  The control circuit 50 is configured to individually control the opening / closing of each of the switch circuits S1, S2, D1, and D2, for example, according to a program stored in the internal memory.

  For example, the control circuit 50 can apply the voltage of the variable high-voltage power supply 40 to the actuator 22 by controlling the switch circuit S1 so that the switch circuit S1 is closed while the switch circuit D1 is open. it can. Further, the control circuit 50 can apply the voltage of the variable high-voltage power supply 40 to the actuator 32 by controlling the switch circuit S2 so that the switch circuit S2 is closed while the switch circuit D2 is opened. it can.

  Thus, in drive device 10 according to the first embodiment, drive circuits 20 and 30 are provided with switch circuits S1 and S2, respectively, and control circuit 50 controls switch circuits S1 and S2 individually. Even if the drive circuits 20 and 30 are not provided with individual power supplies, the actuators 22 and 32 can be individually controlled. A specific control processing procedure of each switch circuit will be described in detail later.

<1-2. Example of operation of drive device>
FIG. 2 is a timing chart showing an example of the operation of the driving device 10. Referring to FIG. 2, the horizontal axis indicates time. In the vertical axis, the upper three indicate an operation example of the drive circuit 20, and the lower three indicate an operation example of the drive circuit 30. More specifically, the vertical axis indicates the state of the switch circuit S1, the state of the switch circuit D1, the voltage of the actuator 22, the state of the switch circuit S2, the state of the switch circuit D2, and the voltage of the actuator 32 from above.

  Referring to the operation example of the drive circuit 20 shown in FIG. 2 (upper three), at time t0, both the switch circuits S1 and D1 are open, and the voltage of the actuator 22 is V0 (0 V). .

  When the switch circuit S1 is closed according to the control of the control circuit 50 at time t1, the voltage (V2) of the variable high voltage power supply 40 is applied to the actuator 22, and the voltage of the actuator 22 (voltage between the electrodes 26 and 28) is It rises to V2. Thereafter, even when the switch circuit S1 is opened at time t1A, the voltage of the actuator 22 is maintained at V2.

  The period from time t1 to t1A is a period sufficient for the voltage of the actuator 22 to rise to V2. The period from time t1 to t1A is shorter than the period during which the voltage of the actuator 22 is maintained at V2 in accordance with the program stored in the internal memory. Not only the switch circuit S1, but also each of the switch circuits D1, S2, and D2 is opened after a certain period of time after being closed. In the following description, the description will not be repeated for the fact that each switch circuit is closed and then opened after a certain period of time.

  When the switch circuit D1 is closed at time t3, the electric charge held in the actuator 22 is discharged, and the voltage of the actuator 22 decreases to V0.

  When the switch circuit S1 is closed at time t4, the voltage of the actuator 22 rises to V2. Thereafter, a long time has elapsed, and at time t6, the voltage of the actuator 22 has dropped to V1. This is because, as described above, the voltage of the actuator 22 does not decrease immediately after the switch circuit S1 is opened, but decreases at a moderate pace.

  In this example, one period during which the voltage of the actuator 22 is maintained at V2 is from time t4 to t8. However, at time t6, the voltage of the actuator 22 has already dropped from V2 to V1. If the switch circuit S1 is kept open between times t4 and t8, the voltage of the actuator 22 may fall below the minimum required level.

  In the first embodiment, the control circuit 50 switches the switch circuits S1, S2 if a predetermined time has elapsed from the opening of the switch circuits S1, S2 before the period for maintaining the voltages of the actuators 22, 32 ends. Are each closed again. The predetermined time is a time during which the voltage of the actuators 22 and 32 can be considered to be lowered, and is determined in advance.

  In this example, the predetermined time arrives at time t7. When the switch circuit S1 is closed again at time t7, the voltage of the variable high-voltage power supply 40 is again applied to the actuator 22, and the voltage of the actuator 22 rises from V1 to V2.

  Thereafter, when the switch circuit D1 is closed at time t8, the voltage of the actuator 22 decreases to V0.

  Next, referring to the operation example (the lower three) of the drive circuit 30 shown in FIG. 2, at time t0, both the switch circuits S2 and D2 are open, and the voltage of the actuator 32 is V0. .

  When the switch circuit S2 is closed under the control of the control circuit 50 at time t2, the voltage of the variable high-voltage power supply 40 is applied to the actuator 32, and the voltage of the actuator 32 (voltage between the electrodes 36 and 38) rises to V2. To do.

  Thereafter, when the switch circuit D2 is closed at time t5, the electric charge held in the actuator 32 is discharged, and the voltage of the actuator 32 decreases to V0.

  Thus, in drive device 10 according to the first embodiment, control circuit 50 controls switch circuits S1 and S2 to be in the closed state, and then the period for maintaining the voltages of actuators 22 and 32 ends. Before (for example, in a short period of time t1 to t1A), the switch circuits S1 and S2 are controlled so as to be opened.

  Therefore, according to the driving device 10, it is possible to reduce power consumption as compared with the case where the switch circuits S1 and S2 are maintained in the closed state until the period for maintaining the voltages of the actuators 22 and 32 ends.

  In the driving device 10 according to the first embodiment, the control circuit 50 determines that the voltage of the actuators 22 and 32 is reduced before the period for maintaining the voltages of the actuators 22 and 32 ends (switch circuit). When a predetermined time elapses from the opening of S1 and S2, the switch circuits S1 and S2 are controlled so as to be closed again.

  Therefore, according to the driving device 10, it is possible to suppress the voltage of the actuators 22 and 32 from falling below the minimum required level during the period in which the voltages of the actuators 22 and 32 are maintained.

<1-3. Control processing procedure>
FIG. 3 is a flowchart showing a procedure for opening / closing control of the switch circuits S1, D1. The processing shown in this flowchart is repeatedly executed by the control circuit 50 during the operation of the driving device 10. The opening / closing control of the switch circuits S2, D2 is also executed in parallel with the opening / closing control of the switch circuits S1, D1. Since the switching control of the switch circuits S2 and D2 is the same as the switching control of the switch circuits S1 and D1 (except that the switch circuits S1 and D1 are replaced by the switch circuits S2 and D2, respectively), the description will not be repeated. The charge / discharge timing of each actuator is not necessarily the same because it follows a program stored in the internal memory.

  Referring to FIG. 3, control circuit 50 determines whether or not the charging timing of actuator 22 has arrived in accordance with a program stored in the internal memory (step S100). If it is determined that the charging timing has arrived (YES in step S100), control circuit 50 controls switch circuit S1 such that switch circuit S1 is closed (step S110). The control circuit 50 controls the switch circuit S1 so that the switch circuit S1 is opened after a lapse of a certain time (before the period for maintaining the voltage of the actuator 22 ends) (step S120).

  On the other hand, when it is determined in step S100 that the charging timing has not arrived (NO in step S100), the process proceeds to step S130.

  Thereafter, the control circuit 50 determines whether or not the discharge timing of the actuator 22 has arrived according to the program stored in the internal memory (step S130). If it is determined that the discharge timing has arrived (YES in step S130), control circuit 50 controls switch circuit D1 so that switch circuit D1 is closed (step S140). The control circuit 50 controls the switch circuit D1 so that the switch circuit D1 is opened after a predetermined time has elapsed (step S150).

  On the other hand, when it is determined in step S130 that the discharge timing has not arrived (NO in step S130), the process proceeds to step S160.

  Thereafter, the control circuit 50 determines whether or not a predetermined time (a time during which the voltage of the actuator 22 has decreased) has elapsed since the opening of the switch circuit S1 before the period for maintaining the voltage of the actuator 22 ends. (Step S160). If it is determined that a predetermined time has elapsed since opening of switch circuit S1 (YES in step S160), control circuit 50 controls switch circuit S1 so that switch circuit S1 is closed again (step S170). The control circuit 50 controls the switch circuit S1 so that the switch circuit S1 is opened after a lapse of a certain time (step S180).

  On the other hand, if it is determined in step S160 that the predetermined time has not elapsed since the opening of switch circuit S1 (NO in step S160), the process proceeds to return.

  As can be seen from the contents shown in this flowchart, both the switch circuits S1 and D1 are not simultaneously closed. Therefore, according to the driving device 10, it is possible to suppress a short circuit between the variable high-voltage power supply 40 and the ground G1.

<1-4. Features>
As described above, in drive device 10 according to the first embodiment, drive circuits 20 and 30 are provided with switch circuits S1 and S2, respectively. The control circuit 50 individually controls the switch circuits S1 and S2, so that the actuators 22 and 32 can be individually controlled even if the drive circuits 20 and 30 are not provided with individual power supplies. .

[2. Second Embodiment]
In the first embodiment, the drive circuits 20 and 30 are provided with the dielectrics 24 and 34, respectively, and voltage application to each of the dielectrics 24 and 34 is individually controlled. However, the object to be controlled individually does not need to be a voltage application to each dielectric. In the second embodiment, a plurality of electrodes are provided on each surface of the dielectric, and energization to each of the plurality of electrodes is individually controlled. Thereby, in a dielectric material, the operation | movement of each site | part in which the electrode was provided can be controlled separately. Here, the description will focus on the configuration different from that of the first embodiment, and the description of the same configuration will not be repeated.

<2-1. Circuit configuration of drive device>
FIG. 4 shows a circuit configuration of drive device 10A according to the second embodiment. As shown in FIG. 4, the driving apparatus 10A includes a dielectric 60A and driving circuits 20A and 30A.

  The drive circuit 20A includes electrodes 26A and 28A, and the drive circuit 30A includes electrodes 36A and 38A. The electrodes 26A and 36A are provided at different parts on the same surface of the dielectric 60A, and the electrodes 28A and 38A are provided at different parts on the same surface of the dielectric 60A. The electrodes 26A and 28A are provided at positions facing each other across the dielectric 60A, and the electrodes 36A and 38A are provided at positions facing each other across the dielectric 60A.

  The electrode 26A is electrically connected to the switch circuits S1 and D1 via the node N2. The electrode 28A is electrically connected to the ground G1 and the switch circuit D1 through the nodes N4 and N3. The electrode 36A is connected to the switch circuits S2 and D2 via the node N5. The electrode 38A is electrically connected to the switch circuit D2 through N6, and is electrically connected to the ground G1 through nodes N6, N4, and N3.

  The electrodes 26A and 28A are not necessarily provided at positions facing each other with the dielectric 60A interposed therebetween, and the electrodes 36A and 38A are not necessarily provided at positions facing each other with the dielectric 60A interposed therebetween. For example, all of the electrodes 26A, 28A, 36A, and 38A may be provided on the same surface of the dielectric 60A. That is, the electrodes 26A, 28A, 36A, and 38A need only be provided on the dielectric 60A.

  In addition, separate ground electrodes (electrodes 28A and 38A) are not necessarily provided in each of the drive circuits 20A and 30A, and a common ground electrode may be used in the drive circuits 20A and 30A. In this case, a common ground electrode is included in each of the drive circuits 20A and 30A.

<2-2. Control processing procedure>
The processing procedure of the open / close control of the switch circuits S1, D1, S2, D2 in the drive device 10A is the same as that in the first embodiment. For example, the opening / closing control processing of the switch circuits S1, D1 is executed according to the flowchart shown in FIG.

  Thus, in drive device 10A according to the second embodiment, drive circuits 20A and 30A are provided with switch circuits S1 and S2, respectively, and control circuit 50 controls switch circuits S1 and S2 individually. The operation of each part of the dielectric 60A can be individually controlled.

[3. Modified example]
Although the first and second embodiments have been described above, the present invention is not limited to the first and second embodiments, and various modifications can be made without departing from the gist thereof. Hereinafter, modified examples will be described. However, the following modifications can be combined as appropriate.

<3-1>
In the first and second embodiments, the number of driving circuits included in the driving device is two. However, the number of drive circuits included in the drive device is not limited to two. For example, the driving device may include three or more driving circuits.

<3-2>
In the first and second embodiments, when a predetermined time has elapsed since the opening of the switch circuits S1 and S2, a predetermined condition is established that allows the voltage of the actuator or the dielectric to be considered to have decreased. However, the predetermined condition is not limited to this. For example, the driving device may include a voltage sensor that detects the voltage of the actuator or the dielectric, and the predetermined condition may be satisfied when the output of the voltage sensor falls below a predetermined value.

<3-3>
In the first and second embodiments, power is supplied to each drive circuit by the variable high-voltage power supply 40. However, the power supply to each drive circuit may be performed by another power source. For example, the power supply of each drive circuit does not necessarily have to be variable and may not have a high voltage. For example, the power source of each drive circuit may be a combination of a low voltage source, a high voltage amplifier, and a signal source.

  FIG. 5 is a diagram illustrating a circuit configuration of a driving device 10B in which a combination of a low voltage source, a high voltage amplifier, and a signal source is used as a power source. As shown in FIG. 5, the drive device 10B includes drive circuits 20B and 30B, a low voltage source 42B, a signal source 44B, a high voltage amplifier 46B, and a control circuit 50B.

  The drive circuit 20B includes a switch circuit SB1 and an actuator 22, and the drive circuit 30B includes a switch circuit SB2 and an actuator 32. The actuator 22 is provided between the switch circuit SB1 and the ground G1, and the actuator 32 is provided between the switch circuit SB2 and the ground G1. The switch circuit SB1 is provided between the high voltage amplifier 46B and the actuator 22, and the switch circuit SB2 is provided between the high voltage amplifier 46B and the actuator 32.

  The high voltage amplifier 46B is configured to amplify the input voltage from the low voltage source 42B and output a high voltage indicating the waveform of the input signal from the signal source 44B. The control circuit 50B is configured to control the output signal waveform of the signal source 44B, the output voltage of the high voltage amplifier 46B, and the opening / closing of the switch circuits SB1 and SB2.

  FIG. 6 is a timing chart showing an example of the operation of the driving device 10B. Referring to FIG. 6, the horizontal axis indicates time, and the vertical axis indicates from the top the output of high voltage amplifier 46B, the state of switch circuit SB1, the voltage of actuator 22, the state of switch circuit SB2, and the voltage of actuator 32. .

  Referring to the operation example of the drive circuit 20B shown in FIG. 6 (the state of the switch circuit SB1 and the voltage of the actuator 22), at time t10, the switch circuit SB1 is in the open state, and the voltage of the actuator 22 is V0.

  When the switch circuit SB1 is closed at time t11, the output voltage of the high-voltage amplifier 46B is V2, so the voltage of the actuator 22 is V2. When the switch circuit SB1 is closed at time t14, the output voltage of the high-voltage amplifier 46B is V0, so the voltage of the actuator 22 is V0. When the switch circuit SB1 is closed at time t15, the output voltage of the high-voltage amplifier 46B is V3, so the voltage of the actuator 22 is V3.

  Next, referring to an operation example of the drive circuit 30B shown in FIG. 6 (the state of the switch circuit SB2 and the voltage of the actuator 32), at time t10, the switch circuit SB2 is in an open state, and the voltage of the actuator 32 is V0. It is.

  When the switch circuit SB2 is closed at time t12, the output voltage of the high-voltage amplifier 46B is V2, so the voltage of the actuator 32 is V2. When the switch circuit SB2 is closed at time t13, the output voltage of the high-voltage amplifier 46B is V4, so the voltage of the actuator 32 is V4. When the switch circuit SB2 is closed at time t16, the output voltage of the high voltage amplifier 46B is V1, so the voltage of the actuator 32 is V1.

  Thus, by using a combination of a low voltage source, a high voltage amplifier and a signal source as a power source, the voltage applied to each of the actuators 22 and 32 can be changed with high responsiveness.

<3-4>
In the first and second embodiments, no switch circuit is provided between the electrodes 28 and 38 and the ground G1, and between the electrodes 28A and 38A and the ground G1. However, a switch circuit may be provided between the electrodes 28 and 38 and the ground G1, and between the electrodes 28A and 38A and the ground G1.

  FIG. 7 is a diagram showing an example in which a switch circuit is added between the electrodes 28 and 38 and the ground G1 in FIG. As shown in FIG. 7, the drive device 10C includes drive circuits 20C and 30C. In the drive circuit 20C, a switch circuit S13 is provided between the electrode 28 and the switch circuit D1 and the ground G1. In the drive circuit 30C, a switch circuit S23 is provided between the electrode 38 and the switch circuit D2 and the ground G1.

  Focusing on the drive circuit 20C, if the distance between the contacts of the switch circuit S1 is short when the switch circuits S1 and D1 are open and the switch circuit S13 is closed, the switch circuit S1 There is a possibility that a spark occurs between the contact points. In the driving device 10C, when the switch circuits S1 and D1 are opened, the control circuit 50C also opens the switch circuit S13. Therefore, according to the driving device 10C, when the switch circuits S1 and D1 are opened, the actuator 22 is in a floating state between the variable high-voltage power supply 40 and the ground G1, so that spark is generated in the switch circuit S1. The possibility can be reduced. The same control is performed for the switch circuit S23.

  10, 10A, 10B, 10C drive device, 20, 20A, 20B, 20C, 30, 30A, 30B, 30C drive circuit, 22, 32 actuator, 24, 34, 60A dielectric, 26, 26A, 28, 28A, 36 , 36A, 38, 38A electrode, 40 variable high voltage power supply, 42B low voltage source, 44B signal source, 46B high voltage amplifier, 50, 50B, 50C control circuit, S1, S2, S13, S23, SB1, SB2, D1, D2 Switch circuit, G1 ground, N1, N2, N3, N4, N5, N6 nodes.

Claims (12)

Power supply,
A plurality of drive circuits each configured to receive power from the power source;
Each of the plurality of drive circuits includes:
An actuator having a dielectric and first and second electrodes provided on the dielectric;
A drive device comprising: a first switch circuit provided between the power source and the first electrode. A control circuit configured to control the first switch circuit;
The control circuit controls the first switch circuit so as to be in a closed state and then opens the first switch circuit so as to be in an open state before a period for maintaining the voltage between the first and second electrodes is completed. The driving device according to claim 1, wherein the driving device controls one switch circuit.   If the predetermined condition that the voltage between the first and second electrodes is considered to have dropped before the period for maintaining the voltage between the first and second electrodes is completed, the control circuit again The drive device according to claim 2, wherein the first switch circuit is controlled to be in a closed state. The second electrode is connected to ground;
Each of the plurality of drive circuits further includes a second switch circuit connected in parallel to the actuator,
4. The drive device according to claim 1, wherein the second switch circuit is provided between the first switch circuit and the ground. 5. The control circuit is configured to control the second switch circuit;
5. The drive device according to claim 4, wherein the control circuit controls the first and second switch circuits so that the first and second switch circuits are not simultaneously closed. 6. Each of the plurality of drive circuits further includes a third switch circuit provided between the second electrode and the ground,
The control circuit is configured to control the third switch circuit;
6. The control circuit according to claim 5, wherein when the first and second switch circuits are opened, the control circuit controls the third switch circuit so that the third switch circuit is opened. Drive device. Power supply,
A dielectric,
A plurality of drive circuits each configured to supply power from the power source to the dielectric;
Each of the plurality of drive circuits includes:
First and second electrodes provided on the dielectric;
A drive device comprising: a first switch circuit provided between the power source and the first electrode. A control circuit configured to control the first switch circuit;
The control circuit controls the first switch circuit so as to be in a closed state and then opens the first switch circuit so as to be in an open state before a period for maintaining the voltage between the first and second electrodes is completed. The drive device according to claim 7, which controls one switch circuit.   If the predetermined condition that the voltage between the first and second electrodes is considered to have dropped before the period for maintaining the voltage between the first and second electrodes is completed, the control circuit again The drive device according to claim 8, wherein the first switch circuit is controlled to be in a closed state. The second electrode is connected to ground;
Each of the plurality of driving circuits further includes a second switch circuit connected in parallel to the dielectric,
10. The drive device according to claim 7, wherein the second switch circuit is provided between the first switch circuit and the ground. 11. The control circuit is configured to control the second switch circuit;
The drive device according to claim 10, wherein the control circuit controls the first and second switch circuits so that the first and second switch circuits are not simultaneously closed. Each of the plurality of drive circuits further includes a third switch circuit provided between the second electrode and the ground,
The control circuit is configured to control the third switch circuit;
The control circuit according to claim 11, wherein when the first and second switch circuits are opened, the control circuit controls the third switch circuit so that the third switch circuit is opened. Drive device.