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JP2019000966A - Abrasive wheel - Google Patents

Abrasive wheel Download PDF

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Publication number
JP2019000966A
JP2019000966A JP2017119717A JP2017119717A JP2019000966A JP 2019000966 A JP2019000966 A JP 2019000966A JP 2017119717 A JP2017119717 A JP 2017119717A JP 2017119717 A JP2017119717 A JP 2017119717A JP 2019000966 A JP2019000966 A JP 2019000966A
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JP
Japan
Prior art keywords
annular groove
grinding wheel
adhesive
grindstone
grinding
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
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JP2017119717A
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Japanese (ja)
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JP6987434B2 (en
Inventor
裕俊 星川
Hirotoshi Hoshikawa
裕俊 星川
木原　智治
Tomoharu Kihara
智治 木原
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Disco Corp
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Disco Abrasive Systems Ltd
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Priority to JP2017119717A priority Critical patent/JP6987434B2/en
Priority to KR1020180066758A priority patent/KR102508740B1/en
Publication of JP2019000966A publication Critical patent/JP2019000966A/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

【課題】 研削加工中に研削ホイールから砥石が脱落したり、或いは脱落せずに破損したりすることを防止できる研削ホイールを提供することである。
【解決手段】 自由端面とホイールマウントへの装着面とを有する環状基台と、該環状基台の該自由端面に環状に形成された環状溝と、該環状溝内に充填された接着剤によって該環状溝に固着された複数の砥石とを含む研削ホイールであって、該環状溝は一対の側壁と頂面とにより画成され、該側壁は、該自由端面から該頂面に向かって末広がり形状をしている。
【選択図】図３PROBLEM TO BE SOLVED: To provide a grinding wheel capable of preventing a grindstone from falling off from a grinding wheel during grinding or being damaged without falling off.
An annular base having a free end surface and a mounting surface to a wheel mount, an annular groove formed annularly on the free end surface of the annular base, and an adhesive filled in the annular groove A grinding wheel including a plurality of grindstones fixed to the annular groove, wherein the annular groove is defined by a pair of side walls and a top surface, and the side walls extend from the free end surface toward the top surface. It has a shape.
[Selection] Figure 3

Description

本発明は、半導体ウェーハ等の被加工物を研削するための研削装置に装着される研削ホイールに関する。   The present invention relates to a grinding wheel mounted on a grinding apparatus for grinding a workpiece such as a semiconductor wafer.

ＩＣ、ＬＳＩ等の数多くのデバイスが表面に形成され、且つ個々のデバイスが互いに交差する複数の分割予定ライン（ストリート）によって区画された半導体ウェーハは、研削装置によって裏面が研削されて所定の厚みに加工された後、切削装置（ダイシング装置）によって分割予定ラインを切削して個々のデバイスチップに分割され、分割されたデバイスチップは携帯電話、パソコン等の各種電子機器に利用されている。   A semiconductor wafer that is formed on the surface with a number of devices such as IC, LSI, etc., and that is partitioned by a plurality of division lines (streets) where each device intersects each other, the back surface is ground to a predetermined thickness by a grinding machine. After being processed, the line to be divided is cut by a cutting device (dicing device) to be divided into individual device chips, and the divided device chips are used in various electronic devices such as mobile phones and personal computers.

ウェーハの裏面を研削する研削工程では、公知の研削装置を使用し、研削装置のスピンドルの先端（下端）に固定されたホイールマウントに研削ホイールを装着して、粗研削及び仕上げ研削を経てウェーハは所定の厚さまで薄化される（例えば、特開２０００−２８８８８１号公報参照）。   In the grinding process to grind the backside of the wafer, a known grinding device is used, a grinding wheel is attached to a wheel mount fixed to the tip (lower end) of the spindle of the grinding device, and the wafer is subjected to rough grinding and finish grinding. The thickness is reduced to a predetermined thickness (see, for example, Japanese Patent Application Laid-Open No. 2000-288888).

研削加工に使用する研削ホイールは、ホイール基台と該ホイール基台の自由端面に形成された環状溝中に配設された複数の砥石とから構成されており、環状溝内に接着剤を充填し、その後各砥石を環状溝内に挿入して固定する。   A grinding wheel used for grinding is composed of a wheel base and a plurality of grindstones arranged in an annular groove formed on the free end surface of the wheel base, and an adhesive is filled in the annular groove. Then, each grindstone is inserted into the annular groove and fixed.

特開２０００−２８８８８１号公報JP 2000-288888 A

然し、従来の研削ホイールでは、環状溝と砥石との隙間が僅かなため、接着剤が十分充填されていない場合、接着不良となり、そのまま研削加工を実施すると、研削加工中に砥石が脱落したり、破損したりする問題がある。   However, in the conventional grinding wheel, since the gap between the annular groove and the grinding wheel is small, if the adhesive is not sufficiently filled, adhesion will be poor, and if the grinding process is performed as it is, the grinding stone may fall off during the grinding process. There is a problem that damages.

本発明はこのような点に鑑みてなされたものであり、その目的とするところは、研削加工中に研削ホイールから砥石が脱落したり、或いは脱落せずに破損したりすることを防止できる研削ホイールを提供することである。   The present invention has been made in view of the above points, and an object of the present invention is grinding capable of preventing the grinding wheel from falling off from the grinding wheel during grinding or from being damaged without falling off. Is to provide a wheel.

本発明によると、自由端面とホイールマウントへの装着面とを有する環状基台と、該環状基台の該自由端面に環状に形成された環状溝と、該環状溝内に充填された接着剤によって該環状溝に固着された複数の砥石とを含む研削ホイールであって、該環状溝は一対の側壁と頂面とにより画成され、該側壁は、該自由端面から該頂面に向かって末広がり形状をしていることを特徴とする研削ホイールが提供される。   According to the present invention, an annular base having a free end surface and a mounting surface to a wheel mount, an annular groove formed in an annular shape on the free end surface of the annular base, and an adhesive filled in the annular groove A grinding wheel including a plurality of grindstones secured to the annular groove by the annular groove, the annular groove being defined by a pair of side walls and a top surface, the side walls from the free end surface toward the top surface. A grinding wheel characterized by having a divergent shape is provided.

好ましくは、該環状溝の頂面は、該頂面の幅より小さい幅を有し、該環状溝に連通する該複数の砥石を固着するための環状の接着剤溜まり部を更に備える。好ましくは、前記各砥石の側面又は頂面は、接着剤との接着力を向上させるための凹凸形状を有している。好ましくは、前記各砥石は、接着剤が入り込むための両側面を貫通する複数の貫通孔を有している。好ましくは、前記各砥石の側面又は頂面には、接着剤溜まり部が形成されている。   Preferably, the top surface of the annular groove further includes an annular adhesive reservoir for fixing the plurality of grindstones having a width smaller than the width of the top surface and communicating with the annular groove. Preferably, the side surface or the top surface of each of the grindstones has an uneven shape for improving the adhesive force with the adhesive. Preferably, each said grindstone has a some through-hole which penetrates the both sides | surfaces for an adhesive agent to enter. Preferably, an adhesive reservoir is formed on the side surface or top surface of each grindstone.

本発明の研削ホイールによると、環状溝の側壁が自由端面から頂面に向かって末広がり形状に形成されているので、十分な量の接着剤によって砥石を環状溝中に強固に固着できる。   According to the grinding wheel of the present invention, the side wall of the annular groove is formed in a divergent shape from the free end surface toward the top surface, so that the grindstone can be firmly fixed in the annular groove with a sufficient amount of adhesive.

更に、砥石の側面や頂面には、接着剤との接着力を向上させるための凹凸形状や接着剤が充填される貫通孔又は接着剤溜まり部が形成されていることで、接着剤により砥石をさらに強固に固着できる。   Furthermore, the side surface and the top surface of the grindstone are provided with a concavo-convex shape for improving the adhesive force with the adhesive and a through-hole or an adhesive reservoir portion filled with the adhesive, so that the grindstone can be filled with the adhesive. Can be firmly fixed.

研削装置の斜視図である。It is a perspective view of a grinding device. 研削ホイールの底面側斜視図である。It is a bottom side perspective view of a grinding wheel. 図３（Ａ）は第１実施形態に係る研削ホイールの図２の３Ａ−３Ａ線断面図、図３（Ｂ）は第２実施形態に係る研削ホイールの図２の３Ａ−３Ａ線断面図である。3A is a cross-sectional view of the grinding wheel according to the first embodiment taken along line 3A-3A in FIG. 2, and FIG. 3B is a cross-sectional view of the grinding wheel according to the second embodiment taken along line 3A-3A in FIG. is there. 図４（Ａ）は第２実施形態の砥石の斜視図、図４（Ｂ）は図４（Ａ）に示す第２実施形態の砥石を固着した第３実施形態の研削ホイールの図２の３Ａ−３Ａ線断面図である。4A is a perspective view of the grindstone of the second embodiment, and FIG. 4B is 3A of FIG. 2 of the grinding wheel of the third embodiment to which the grindstone of the second embodiment shown in FIG. 4A is fixed. FIG. 図５（Ａ）は第３実施形態の砥石の斜視図、図５（Ｂ）は図５（Ａ）に示す第３実施形態の砥石を固着した第４実施形態の研削ホイールの図２の３Ａ−３Ａ線断面図である。5A is a perspective view of the grindstone of the third embodiment, and FIG. 5B is 3A of FIG. 2 of the grinding wheel of the fourth embodiment to which the grindstone of the third embodiment shown in FIG. 5A is fixed. FIG. 図６（Ａ）は第４実施形態の砥石の斜視図、図６（Ｂ）は図６（Ａ）に示す第４実施形態の砥石を固着した第５実施形態の研削ホイールの図２の３Ａ−３Ａ線断面図である。6A is a perspective view of the grindstone of the fourth embodiment, and FIG. 6B is 3A of FIG. 2 of the grinding wheel of the fifth embodiment to which the grindstone of the fourth embodiment shown in FIG. 6A is fixed. FIG. 図７（Ａ）は第５実施形態の砥石の斜視図、図７（Ｂ）は図７（Ａ）に示す第５実施形態の砥石を固着した第６実施形態の研削ホイールの図２の３Ａ−３Ａ線断面図である。7A is a perspective view of the grindstone of the fifth embodiment, and FIG. 7B is 3A of FIG. 2 of the grinding wheel of the sixth embodiment to which the grindstone of the fifth embodiment shown in FIG. 7A is fixed. FIG. 図８（Ａ）は第６実施形態の砥石の斜視図、図８（Ｂ）は図８（Ａ）に示す第６実施形態の砥石を固着した第７実施形態の研削ホイールの図２の３Ａ−３Ａ線断面図である。8A is a perspective view of the grindstone of the sixth embodiment, and FIG. 8B is 3A of FIG. 2 of the grinding wheel of the seventh embodiment to which the grindstone of the sixth embodiment shown in FIG. 8A is fixed. FIG.

以下、本発明の実施形態を図面を参照して詳細に説明する。図１を参照すると、本発明実施形態の研削ホイール２４を装着した研削装置２の外観斜視図が示されている。４は研削装置２のベースであり、ベース４の後方にはコラム６が立設されている。コラム６には、上下方向に伸びる一対のガイドレール８が固定されている。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, an external perspective view of a grinding apparatus 2 equipped with a grinding wheel 24 of an embodiment of the present invention is shown. Reference numeral 4 denotes a base of the grinding apparatus 2, and a column 6 is erected on the rear side of the base 4. A pair of guide rails 8 extending in the vertical direction is fixed to the column 6.

一対のガイドレール８に沿って研削ユニット（研削手段）１０が上下方向に移動可能に装着されている。研削ユニット１０は、スピンドルハウジング１２と、スピンドルハウジング１２を保持する支持部１４を有しており、支持部１４が一対のガイドレール８に沿って上下方向に移動する移動基台１６に取り付けられている。   A grinding unit (grinding means) 10 is mounted along the pair of guide rails 8 so as to be movable in the vertical direction. The grinding unit 10 includes a spindle housing 12 and a support portion 14 that holds the spindle housing 12, and the support portion 14 is attached to a moving base 16 that moves up and down along a pair of guide rails 8. Yes.

研削ユニット１０は、スピンドルハウジング１２中に回転可能に収容されたスピンドル１８と、スピンドル１８を回転駆動するモータ２０と、スピンドル１８の先端に固定されたホイールマウント２２と、ホイールマウント２２に着脱可能に装着された研削ホイール２４とを含んでいる。   The grinding unit 10 includes a spindle 18 rotatably accommodated in a spindle housing 12, a motor 20 that rotationally drives the spindle 18, a wheel mount 22 fixed to the tip of the spindle 18, and a detachable attachment to the wheel mount 22. And a mounted grinding wheel 24.

研削装置２は、研削ユニット１０を一対の案内レール８に沿って上下方向に移動するボールねじ３０とパルスモータ３２とから構成される研削ユニット送り機構３４を備えている。パルスモータ３２を駆動すると、ボールねじ３０が回転し、移動基台１６に装着された研削ユニット１０が上下方向に移動される。   The grinding apparatus 2 includes a grinding unit feed mechanism 34 including a ball screw 30 and a pulse motor 32 that move the grinding unit 10 in the vertical direction along the pair of guide rails 8. When the pulse motor 32 is driven, the ball screw 30 rotates and the grinding unit 10 mounted on the moving base 16 is moved in the vertical direction.

ベース４の上面には凹部４ａが形成されており、この凹部４ａにチャックテーブル機構３６が配設されている。チャックテーブル機構３６はチャックテーブル３８を有し、図示しない移動機構によりウェーハ着脱位置Ａと、研削ユニット１０に対向する研削位置Ｂとの間でＹ軸方向に移動される。４０，４２は蛇腹である。ベース４の前方側には、研削装置２のオペレータが研削条件等を入力する操作パネル４４が配設されている。   A recess 4a is formed on the upper surface of the base 4, and a chuck table mechanism 36 is disposed in the recess 4a. The chuck table mechanism 36 has a chuck table 38 and is moved in the Y-axis direction between a wafer attachment / detachment position A and a grinding position B facing the grinding unit 10 by a moving mechanism (not shown). 40 and 42 are bellows. An operation panel 44 is provided on the front side of the base 4 so that an operator of the grinding apparatus 2 can input grinding conditions and the like.

図２を参照すると、本発明第１実施形態の研削ホイール２４の底面側斜視図が示されている。研削ホイール２４は、環状基台２６と、環状基台２６の自由端面２６ａ（図３参照）に形成された環状溝２７中に挿入され、環状溝２７中に充填された接着剤３１により環状溝２７中に固着された複数の砥石（研削砥石）２８とから構成される。   Referring to FIG. 2, a bottom perspective view of the grinding wheel 24 of the first embodiment of the present invention is shown. The grinding wheel 24 is inserted into an annular base 26 and an annular groove 27 formed on a free end surface 26 a (see FIG. 3) of the annular base 26, and an annular groove is formed by an adhesive 31 filled in the annular groove 27. 27 and a plurality of grindstones (grinding grindstones) 28 fixed in 27.

以下、図３乃至図８を参照して、本発明の各種実施形態に係る研削ホイールについて詳細に説明する。図３（Ａ）を参照すると、第１実施形態に係る研削ホイール２４の図２の３Ａ−３Ａ線断面図が示されている。   Hereinafter, with reference to FIG. 3 thru | or FIG. 8, the grinding wheel which concerns on various embodiment of this invention is demonstrated in detail. Referring to FIG. 3A, a cross-sectional view taken along line 3A-3A in FIG. 2 of the grinding wheel 24 according to the first embodiment is shown.

研削ホイール２４の環状基台２６は、自由端面２６ａと装着面２６ｂを有しており、複数のねじにより環状基台２６の装着面２６ｂでホイールマウント２２に着脱可能に固定される。   The annular base 26 of the grinding wheel 24 has a free end surface 26a and a mounting surface 26b, and is detachably fixed to the wheel mount 22 on the mounting surface 26b of the annular base 26 by a plurality of screws.

環状基台２６の自由端面２６ａには、断面逆台形状の環状溝２７が形成されている。環状溝２７は、一対の側壁２７ａと頂面２７ｂを有しており、側壁２７ａは自由端面２６ａから頂面２７ｂに向かって末広がりに形成されている。   An annular groove 27 having an inverted trapezoidal cross section is formed on the free end surface 26 a of the annular base 26. The annular groove 27 has a pair of side walls 27a and a top surface 27b, and the side walls 27a are formed so as to extend from the free end surface 26a toward the top surface 27b.

砥石２８を固定するには、環状溝２７内に接着剤３１を充填し、その後砥石２８を環状溝２７内に挿入し、接着剤３１により砥石２８を環状溝２７内に固着する。好ましくは、接着剤３１としては、エポキシ樹脂が使用されるが、接着剤３１はエポキシ樹脂に限定されるものではない。   In order to fix the grindstone 28, the adhesive 31 is filled in the annular groove 27, and then the grindstone 28 is inserted into the annular groove 27, and the grindstone 28 is fixed in the annular groove 27 with the adhesive 31. Preferably, an epoxy resin is used as the adhesive 31, but the adhesive 31 is not limited to an epoxy resin.

本実施形態の研削ホイール２４によると、環状溝２７の側壁２７ａが環状基台２６の自由端面２６ａから環状溝２７の頂面２７ｂに向かって末広がり形状をしているため、環状溝２７内に十分な量の接着剤３１を充填することができ、十分な量の接着剤３１により砥石２８を強固に固着することができる。   According to the grinding wheel 24 of the present embodiment, the side wall 27a of the annular groove 27 has a shape that spreads from the free end surface 26a of the annular base 26 toward the top surface 27b of the annular groove 27. A sufficient amount of the adhesive 31 can be filled, and the grindstone 28 can be firmly fixed by a sufficient amount of the adhesive 31.

これを接着剤３１のアンカー効果と称する。このアンカー効果により、被加工物の研削加工中に砥石２８が環状基台２６の環状溝２７から脱落したり、脱落せずとも砥石２８が破損したりすることを防止できる。   This is referred to as the anchor effect of the adhesive 31. By this anchor effect, it is possible to prevent the grindstone 28 from dropping from the annular groove 27 of the annular base 26 during the grinding of the workpiece, or the grindstone 28 from being damaged without being dropped.

図３（Ｂ）を参照すると、本発明第２実施形態の研削ホイール２４Ａの図２の３Ａ−３Ａ線断面図が示されている。本実施形態の研削ホイール２４Ａは、図３（Ａ）に示した第１実施形態の研削ホイール２４に環状の接着剤溜まり部３３を付加したものである。接着剤溜まり部３３は、環状溝２７の頂面２７ｂに連通するように形成されており、頂面２７ｂの幅より小さい幅を有している。   Referring to FIG. 3B, a sectional view taken along the line 3A-3A in FIG. 2 of the grinding wheel 24A according to the second embodiment of the present invention is shown. The grinding wheel 24A of the present embodiment is obtained by adding an annular adhesive reservoir 33 to the grinding wheel 24 of the first embodiment shown in FIG. The adhesive reservoir 33 is formed so as to communicate with the top surface 27b of the annular groove 27, and has a width smaller than the width of the top surface 27b.

接着剤溜まり部３３の形状は、図示のような断面長方形状、又は正方形状、台形状或いは逆台形状の何れでもよい。接着剤溜まり部３３を環状溝２７の頂面２７ｂの幅内に複数形成するようにしてもよい。   The shape of the adhesive reservoir 33 may be rectangular as shown in the figure, square, trapezoid, or inverted trapezoid. A plurality of adhesive reservoirs 33 may be formed within the width of the top surface 27 b of the annular groove 27.

本実施形態の研削ホイール２４Ａによると、第１実施形態の研削ホイール２４の効果に加えて、接着剤溜まり部３３中に充填された接着剤３１により、砥石２８をより強固に環状溝２７中に固着することができる。   According to the grinding wheel 24A of the present embodiment, in addition to the effect of the grinding wheel 24 of the first embodiment, the grindstone 28 is more firmly placed in the annular groove 27 by the adhesive 31 filled in the adhesive reservoir 33. It can be fixed.

図４（Ａ）を参照すると、本発明第２実施形態の砥石２８Ａの斜視図が示されている。本実施形態の砥石２８Ａは、両側面２８ａに複数の溝３５を有している。即ち、砥石２８Ａは側面２８ａに凹凸形状を有している。   Referring to FIG. 4A, a perspective view of a grindstone 28A according to a second embodiment of the present invention is shown. The grindstone 28A of the present embodiment has a plurality of grooves 35 on both side surfaces 28a. That is, the grindstone 28A has an uneven shape on the side surface 28a.

図４（Ｂ）は図４（Ａ）に示した第２実施形態の砥石２８Ａを環状溝２７中に固着した、第３実施形態の研削ホイール２４Ｂの図２の３Ａ−３Ａ線断面図である。本実施形態では、砥石２８Ａが側面２８ａに複数の溝３５を有しているため、接着剤３１が溝３５中に充填されて、より強固に砥石２８Ａを環状溝２７中に固着することができる。   4B is a cross-sectional view taken along the line 3A-3A in FIG. 2 of the grinding wheel 24B of the third embodiment in which the grindstone 28A of the second embodiment shown in FIG. 4A is fixed in the annular groove 27. FIG. . In the present embodiment, since the grindstone 28A has a plurality of grooves 35 on the side surface 28a, the adhesive 31 is filled in the grooves 35, and the grindstone 28A can be more firmly fixed in the annular groove 27. .

図５（Ａ）を参照すると、本発明第３実施形態の砥石２８Ｂの斜視図が示されている。本実施形態の砥石２８Ｂは、頂面２８ｂに複数の溝３７を有している。   Referring to FIG. 5A, a perspective view of a grindstone 28B according to a third embodiment of the present invention is shown. The grindstone 28B of this embodiment has a plurality of grooves 37 on the top surface 28b.

図５（Ｂ）は図５（Ａ）に示した第３実施形態の砥石２８Ｂを環状溝２７中に固着した、本発明第４実施形態の研削ホイール２４Ｃの図２の３Ａ−３Ａ線に沿った断面図を示している。   FIG. 5B is along the line 3A-3A in FIG. 2 of the grinding wheel 24C of the fourth embodiment of the present invention in which the grindstone 28B of the third embodiment shown in FIG. 5A is fixed in the annular groove 27. FIG.

本実施形態の研削ホイール２４Ｃでは、砥石２８Ｂの頂面２８ｂに複数の溝３７が形成されているため、これらの溝３７中に接着剤３１が入り込むので、図３（Ａ）に示した実施形態に比較して、より強固に砥石２８Ｂを環状溝２７中に固着することができる。   In the grinding wheel 24C of this embodiment, since the plurality of grooves 37 are formed on the top surface 28b of the grindstone 28B, the adhesive 31 enters into these grooves 37. Therefore, the embodiment shown in FIG. Compared to the above, the grindstone 28B can be firmly fixed in the annular groove 27.

図６（Ａ）を参照すると、本発明第４実施形態の砥石２８Ｃの斜視図が示されている。本実施形態の砥石２８Ｃは、両側面２８ａを貫通する複数の貫通孔３９を有している。   Referring to FIG. 6A, a perspective view of a grindstone 28C according to a fourth embodiment of the present invention is shown. The grindstone 28C of the present embodiment has a plurality of through holes 39 that penetrate both side surfaces 28a.

図６（Ｂ）は図６（Ａ）に示した砥石２８Ｃを環状溝２７内に固着した、本発明第５実施形態の研削ホイール２４Ｄの図２の３Ａ−３Ａ線に沿う断面図を示している。本実施形態の研削ホイール２４Ｄでは、複数の貫通孔３９内に接着剤３１が充填されるため、図３（Ａ）に示した実施形態に比較して、より強固に砥石２８Ｃを環状溝２７内で固着することができる。   6B shows a cross-sectional view taken along the line 3A-3A in FIG. 2 of the grinding wheel 24D of the fifth embodiment of the present invention in which the grindstone 28C shown in FIG. 6A is fixed in the annular groove 27. FIG. Yes. In the grinding wheel 24D of the present embodiment, since the adhesive 31 is filled in the plurality of through holes 39, the grindstone 28C is more firmly placed in the annular groove 27 than in the embodiment shown in FIG. It can be fixed with.

図７（Ａ）を参照すると、本発明第５実施形態の砥石２８Ｄの斜視図が示されている。本実施形態の砥石２８Ｄは、側面２８ａに複数の接着剤溜まり部４１を有している。   Referring to FIG. 7A, a perspective view of a grindstone 28D according to a fifth embodiment of the present invention is shown. The grindstone 28D of the present embodiment has a plurality of adhesive reservoirs 41 on the side surface 28a.

図７（Ｂ）は、図７（Ａ）に示した砥石２８Ｄを環状溝２７中に固着した本発明第６実施形態の研削ホイール２８Ｅの図２の３Ａ−３Ａ線斜視図が示されている。本実施形態の研削ホイール２４Ｅでは、砥石２８Ｄの側面２８ａに形成した接着剤溜まり部４１中に接着剤３１が侵入するため、図３（Ａ）に示した実施形態の研削ホイール２４に比較して、より強固に砥石２８Ｄを環状溝２７中で固着することができる。   FIG. 7B is a perspective view taken along line 3A-3A in FIG. 2 of the grinding wheel 28E of the sixth embodiment of the present invention in which the grindstone 28D shown in FIG. 7A is fixed in the annular groove 27. . In the grinding wheel 24E of the present embodiment, the adhesive 31 penetrates into the adhesive reservoir 41 formed on the side surface 28a of the grindstone 28D. Therefore, compared with the grinding wheel 24 of the embodiment shown in FIG. The grindstone 28D can be more firmly fixed in the annular groove 27.

図８（Ａ）を参照すると、本発明第６実施形態の砥石２８Ｅの斜視図が示されている。本実施形態の砥石２８Ｅは、頂面２８ｂに複数の接着剤溜まり部４３を有している。   Referring to FIG. 8A, a perspective view of a grindstone 28E according to a sixth embodiment of the present invention is shown. The grindstone 28E of this embodiment has a plurality of adhesive reservoirs 43 on the top surface 28b.

図８（Ｂ）は図８（Ａ）に示した砥石２８Ｅを環状溝２７中に固着した第７実施形態の研削ホイール２４Ｆの図２の３Ａ−３Ａ線断面図を示している。本実施形態の研削ホイール２４Ｆでは、砥石２８Ｅの頂面２８ｂに形成した複数の接着剤溜まり部４３中に接着剤３１が充填されるため、図３（Ａ）に示した実施形態の研削ホイール２４に比較して、より強固に砥石２８Ｅを環状溝２７中に固着することができる。   8B shows a cross-sectional view taken along the line 3A-3A in FIG. 2 of the grinding wheel 24F of the seventh embodiment in which the grindstone 28E shown in FIG. 8A is fixed in the annular groove 27. FIG. In the grinding wheel 24F of the present embodiment, the adhesive 31 is filled into the plurality of adhesive reservoirs 43 formed on the top surface 28b of the grindstone 28E, and therefore the grinding wheel 24 of the embodiment shown in FIG. Compared to the above, the grindstone 28E can be firmly fixed in the annular groove 27.

２ 研削装置
１０ 研削ユニット
２４ 研削ホイール
２６ 環状基台
２７ 環状溝
２８ 砥石（研削砥石）
３１ 接着剤
３３，４１ 接着剤溜まり部
３５，３７ 溝
３８ チャックテーブル
３９ 貫通孔 2 Grinding device 10 Grinding unit 24 Grinding wheel 26 Annular base 27 Annular groove 28 Grinding wheel (grinding wheel)
31 Adhesives 33, 41 Adhesive reservoir 35, 37 Groove 38 Chuck table 39 Through hole

Claims (5)

自由端面とホイールマウントへの装着面とを有する環状基台と、該環状基台の該自由端面に環状に形成された環状溝と、該環状溝内に充填された接着剤によって該環状溝に固着された複数の砥石とを含む研削ホイールであって、
該環状溝は一対の側壁と頂面とにより画成され、
該側壁は、該自由端面から該頂面に向かって末広がり形状をしていることを特徴とする研削ホイール。 An annular base having a free end surface and a mounting surface to the wheel mount, an annular groove formed in an annular shape on the free end surface of the annular base, and an adhesive filled in the annular groove. A grinding wheel including a plurality of fixed grindstones,
The annular groove is defined by a pair of side walls and a top surface,
The grinding wheel according to claim 1, wherein the side wall has a divergent shape from the free end surface toward the top surface. 該環状溝の頂面には、該頂面の幅より小さい幅を有し、該環状溝に連通する該複数の砥石を固着するための環状の接着剤溜まり部を更に備える請求項１記載の研削ホイール。   2. The annular groove according to claim 1, further comprising an annular adhesive reservoir for fixing the plurality of grindstones having a width smaller than the width of the top surface and communicating with the annular groove on the top surface of the annular groove. Grinding wheel. 前記各砥石の側面又は頂面は、接着剤との接着力を向上させるための凹凸形状を有している請求項１記載の研削ホイール。   The grinding wheel according to claim 1, wherein a side surface or a top surface of each of the grindstones has a concavo-convex shape for improving an adhesive force with an adhesive. 前記各砥石は、接着剤が入り込むための両側面を貫通する複数の貫通孔を有している請求項１記載の研削ホイール。   2. The grinding wheel according to claim 1, wherein each of the grindstones has a plurality of through holes penetrating both side surfaces for allowing an adhesive to enter. 前記各砥石の側面又は頂面には、接着剤との接着力を向上させるための接着剤溜まり部が形成されている請求項１記載の研削ホイール。   The grinding wheel according to claim 1, wherein an adhesive reservoir portion for improving an adhesive force with the adhesive is formed on a side surface or a top surface of each grindstone.
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