JP2019090832A - Shape measuring instrument - Google Patents

Abstract

To provide a shape measuring instrument capable of avoiding collision between a stylus and a workpiece.SOLUTION: There is provided a shape measuring instrument comprising: a drive mechanism that includes a Z-axis drive mechanism provided on a strut and an X-axis drive mechanism provided in the Z-axis drive mechanism; a probe having an arm and a stylus provided at the tip of the arm; a displacement detector attached to the X-axis drive mechanism; and a control device for controlling the displacement detector and the drive mechanism. The shape measuring instrument further includes a stylus position adjustment mechanism for moving the tip position of the stylus. The control device includes: a storage unit for storing measurement data of the probe being the measurement data related to the surface shape of a measurement object obtained by moving the probe in the X-axis direction along the surface of the measurement object by the X-axis drive mechanism; and a stylus movement control unit for controlling the stylus position adjustment mechanism on the basis of the measurement data stored in the storage unit and moving the stylus to the next measurement start position.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a shape measuring machine and a control method thereof, and relates to a shape measuring machine capable of avoiding a collision between an object to be measured and a stylus, and a control method thereof.

  A measuring element having a stylus and a displacement detector are moved along the surface of the object to be measured (workpiece) to convert the amount of displacement of the stylus up and down into an electrical signal to operate a processing device such as a computer (computer There is known a shape measuring machine which measures the surface roughness of a workpiece, the surface shape of a contour or the like, and the like by reading the information (Patent Document 1).

  Generally, when measuring with a shape measuring machine, the operator visually aligns the stylus of the measuring element with the measurement position of the workpiece. Next, the stylus is automatically moved relative to the shape of the workpiece to measure the surface of the workpiece.

JP 2002-107144 A

  By the way, in recent years, the shape of the work is complicated, and the work often includes a step. When a workpiece including a level difference is measured a plurality of times by moving a stylus, there is a concern that the level difference of the workpiece may collide with the stylus.

  In a profilometer, it is also performed to measure the upper and lower surfaces inside a cylindrical workpiece using a probe having upward and downward contact. For example, when the upper surface is measured using an upward pointing stylus, the measuring element is moved in the horizontal direction when the measurement is completed. The measuring element is moved while maintaining the horizontal state, and the downward pointing stylus is aligned with the measurement start position. At this time, since the measuring element is moved while maintaining the horizontal state, there is a concern, for example, that the inner surface of the workpiece may collide with the upward stylus or the downward stylus.

  The present invention has been made in view of such circumstances, and it is an object of the present invention to provide a shape measuring machine capable of avoiding a collision between a stylus and an object to be measured, and a control method thereof.

  According to one aspect of the present invention, a shape measuring machine includes a base on which an object to be measured is placed, a support provided on the base, a Z-axis drive mechanism provided on the support and movable in the Z axis, A measuring element having a drive mechanism including an X-axis drive mechanism provided in a Z-axis drive mechanism, an arm and a stylus provided on the tip end side of the arm, and displacement detection attached to the X-axis drive mechanism Control device for controlling the displacement detector, the displacement detector, and the drive mechanism, the displacement detector having a fulcrum for supporting the arm so as to be vertically movable and a displacement reading unit for measuring the displacement of the arm; A shape measuring machine including: a stylus position adjusting mechanism for moving the tip position of the stylus, the control device storing the measurement data of the stylus, and the memory To the measurement data stored in the And a stylus movement control unit for controlling the stylus position adjusting mechanism Zui.

  Preferably, the stylus position adjusting mechanism is an arm position adjusting mechanism provided in the displacement detector.

  Preferably, the stylus position adjusting mechanism is a measuring force adjusting mechanism provided at the rear end of the arm.

  Preferably, the stylus position adjustment mechanism is the Z-axis drive mechanism.

  Preferably, the stylus position adjustment mechanism is provided on the displacement detector for adjusting the position of the arm, and the arm position adjustment mechanism, the Z-axis drive mechanism, and the arm for adjusting the measurement force of the stylus are later provided. It includes at least two of the measuring force adjustment mechanisms provided at the end.

  Preferably, the stylus consists of an upward facing stylus and a downward pointing stylus extended in the peristaltic direction of the arm.

  According to another aspect of the present invention, there is provided a control method of a profile measuring machine comprising: a probe having an arm and a stylus provided on the tip end side of the arm; and a fulcrum for supporting the arm in an up and down direction. A control method of a shape measuring machine comprising: a displacement detector having a displacement reading unit for measuring the displacement of the arm, wherein the step of aligning the stylus with a measurement start position of an object to be measured; Moving the stylus in the horizontal direction along the object to be measured, acquiring the displacement amount of the arm and the displacement amount of the displacement detector in the horizontal direction as measurement data, and storing the measurement data; Calculating a movement path for moving the stylus to the next measurement start position, and moving the stylus of the probe to the next measurement start position based on the calculated movement path information. When, Including.

  According to the present invention, it is possible to avoid the collision between the stylus and the object to be measured.

It is an external view of a shape measuring machine. It is a schematic block diagram of a measuring element, a displacement detector, and an X-axis drive mechanism. It is a block diagram showing composition of a shape measuring machine. It is a flowchart which shows the control method of a shape measuring machine. It is an explanatory view explaining operation of a measuring element in the case of measuring a work which has a level difference. It is explanatory drawing explaining operation | movement of the measuring element in the case of measuring the workpiece | work which has a level | step difference based on this embodiment. It is an explanatory view explaining operation of a measuring element in the case of measuring a cylindrical work. It is explanatory drawing explaining operation | movement of the measuring element in the case of measuring a cylindrical workpiece | work based on this embodiment.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the attached drawings. The invention is illustrated by the following preferred embodiments. Changes can be made in a number of ways without departing from the scope of the present invention, and other embodiments than the present embodiment can be used. Therefore, all the modifications within the scope of the present invention are included in the claims.

  FIG. 1 is an external view of a shape measuring machine to which the present invention is applied. The shape measuring machine 10 is a displacement that detects the displacement of the base 12 on which the object to be measured ((work, not shown) is placed, the support 14 provided on the base 12, the probe 22 and the probe 22 A detector 28 and a drive mechanism 16 for moving the probe 22 and the displacement detector 28 relative to the object to be measured are provided.

  As shown in FIG. 1, the drive mechanism 16 includes a Z-axis drive mechanism 18 provided with a support 14 and an X-axis drive mechanism 20 provided to the Z-axis drive mechanism 18. Here, the Z axis means a direction perpendicular to the horizontal plane of the base 12.

  The Z-axis drive mechanism 18 includes, for example, a rail vertically provided to the base 12 on the column 14, a slider slidable on the rail, a ball screw provided along the rail, and a motor for rotating the ball screw. And Z axis scale for detecting the movement amount of the slider. By rotating the motor, it is converted into linear motion by the ball screw, and the X-axis drive mechanism 20 attached to the slider can be made movable in the Z-axis direction. The amount of movement in the Z-axis direction (vertical direction) of the X-axis drive mechanism 20 and the displacement detector 28 described later can be measured on the Z-axis scale.

  The probe 22 includes a stylus arm 24 and a stylus 26 provided on the distal end side of the stylus arm 24. The stylus arm 24 of the probe 22 is detachably attached to an arm holder 30 projecting from the displacement detector 28. Therefore, a plurality of probes 22 can be prepared, and the probes 22 can be replaced according to the object to be measured.

  The shape measuring machine 10 includes a control device 40, an input device 42 connected to the control device 40, and a display device 44 connected to the control device 40. The operator transmits input data such as commands and setting conditions from the input device 42 to the control device 40. Further, the control device 40 displays the measurement result of the object to be measured and the like on the display device 44 as output data.

  The shape measuring machine 10 includes, for example, an operation unit 46 such as a joystick. By the operator operating the operation unit 46, the probe 22 and the displacement detector 28 can be moved manually.

  FIG. 2 is a schematic view of the probe 22, the displacement detector 28, and the X-axis drive mechanism 20. The probe 22 has a stylus arm 24 and a stylus 26 provided on the tip end side of the stylus arm 24 and processed for shape measurement. The tip side of the stylus arm 24 means the side opposite to the displacement detector 28 in the stylus arm 24 and means a portion including the tip of the stylus arm 24.

  In the present embodiment, although the stylus 26 is configured of a downward stylus extended in the peristaltic direction of the stylus arm 24, the present invention is not limited to this. Therefore, the stylus 26 can also be configured by an upward facing stylus extended in the peristaltic direction of the stylus arm 24, and also upward facing downward and downward styluses (T (Also referred to as a letter-shaped stylus).

  The displacement detector 28 is a displacement that reads the displacement of the drive connection 50, the fulcrum 52 provided on the drive connection 50, the rod-like swing arm 54 slidably supported by the fulcrum 52, and the swing arm 54. And a reading unit 56.

  In the present embodiment, the stylus arm 24 and the peristaltic arm 54 are detachably connected via the arm holder 30. Therefore, the peristaltic arm 54 and the stylus arm 24 function as one arm 32.

  The connection between the stylus arm 24 and the peristaltic arm 54 allows the fulcrum 52 to support the arm 32 so as to be able to oscillate in the vertical direction, and the displacement reading unit 56 can measure the displacement of the arm 32.

  The displacement reading unit 56 is provided between the arm holder 30 and the fulcrum 52. As described above, since the stylus arm 24 and the peristaltic arm 54 are connected via the arm holder 30, the vertical displacement of the stylus arm 24 is determined by reading the displacement of the peristaltic arm 54 by the displacement reading unit 56. It can be measured.

  As the displacement reading unit 56, a linear scale, an arc scale, a linear variable differential transformer (LVDT) or the like can be used.

  In the embodiment, the displacement reading unit 56 is provided between the arm holder 30 and the fulcrum 52, but the displacement reading unit 56 may be provided on the opposite side of the arm holder 30 with respect to the fulcrum 52.

  A measuring force adjustment mechanism 58 is provided at the rear end of the swing arm 54, that is, at the rear end of the arm 32, in order to adjust the measuring force of the stylus 26. As the measurement force adjustment mechanism 58, for example, a balance weight provided at the rear end of the arm 32 so as to be position adjustable can be mentioned. By adjusting the position of the balance weight to the distal end side or the rear end side with respect to the arm 32, the measurement force applied to the stylus 26 can be adjusted. Here, the measuring force means a pressing force with which the stylus 26 presses the workpiece during measurement.

  The tip position of the stylus 26 can be adjusted by the measurement force adjustment mechanism 58. When the measurement force is reduced by the measurement force adjustment mechanism 58, the tip position of the stylus 26 can be moved upward, and when the measurement force is increased by the measurement force adjustment mechanism 58, the tip position of the stylus 26 is downward. It can be moved. The measuring force adjusting mechanism 58 can automatically perform position adjustment.

  For example, when the measuring force adjustment mechanism 58 is a balance weight, the balance weight can be automatically adjusted in position by adopting the following configuration. For example, a rail is provided at a position parallel to the arm 32. A slider movable along the rail is provided to connect the slider and the balance weight. By moving the slider along the rail, the balance weight can be automatically moved along the axial direction of the arm 32.

  In general, the measurement force adjustment mechanism 58 is used to adjust the minute measurement force of the stylus 26 and is not used for the purpose of adjusting the tip position of the stylus 26.

  The displacement detector 28 is provided with an arm position adjustment mechanism 60 for adjusting the position of the arm 32. The arm position adjusting mechanism 60 can move the arm 32 in the up and down direction, and as a result, the arm 32 swings up and down around the fulcrum 52.

  Generally, the arm position adjusting mechanism 60 is at a predetermined position, as in the case of moving the arm 32 downward, when the arm 32 is moved upward, when the arm 32 is moved horizontally. The arm 32 is moved.

  In the present embodiment, the arm position adjusting mechanism 60 is configured to be able to adjust the arm 32 to any position, including the case of moving the arm 32 to a predetermined position.

  As the arm position adjusting mechanism 60, a combination of a U-shaped plate and a motor in a side view can be mentioned. The arm 32 is penetrated into a U-shaped plate. By driving the motor in this state, the U-shaped board is moved up and down. The arm 32 can be swung up and down with the vertical movement of the U-shaped plate. By changing the magnitude of the current applied to the motor, the arm 32 can be oscillated (or moved) up and down at any position.

  The displacement detector 28 includes a housing 62 surrounding the drive connection portion 50, the fulcrum 52, the displacement reading portion 56, the measurement force adjustment mechanism 58, and the arm position adjustment mechanism 60.

  The drive unit connecting unit 50 is a member for connecting the displacement detector 28 and the X-axis drive mechanism 20. The displacement detector 28 and the X-axis drive mechanism 20 are mutually connected via the drive unit connecting unit 50. Be done.

  The X-axis drive mechanism 20 includes a rail 70 extending in the X-axis direction, a slider 72 slidable on the rail 70, a ball screw 74 provided along the rail 70, a motor 76 for rotating the ball screw 74, and a slider 72. And an X-axis scale 78 for detecting the amount of movement of By rotating the motor 76, the ball screw 74 converts it into a linear motion, and the displacement detector 28 attached to the slider 72 can be made movable in the X-axis direction. The amount of movement of the displacement detector 28 in the X-axis direction (horizontal direction) can be measured by the X-axis scale 78.

  FIG. 3 is a block diagram showing the configuration of the shape measuring machine 10.

  The control device 40 includes a control unit 100, a processing unit 102, a storage unit 104, a measurement force adjustment unit 106, an arm position adjustment unit 108, a drive mechanism control unit 110, and a stylus movement control unit 112.

  The control unit 100 manages the entire operation of the shape measuring machine 10. An input device 42, a display device 44, and an operation unit 46 are connected to the control device 40. Input signals are transmitted from the input device 42 and the operation unit 46 to the control unit 100, and the control unit 100 executes various programs according to the input signals, and the control unit 100 receives control signals, various data, and various programs. Execute the output.

  The displacement detector 28, the X-axis scale 78, and the Z-axis scale 80 are connected to the controller 40. The processing unit 102 of the control device 40 receives measurement data from the displacement detector 28, the X-axis scale 78, and the Z-axis scale 80. The amount of displacement of the arm 32 is measured from the displacement detector 28, the amount of movement of the displacement detector 28 in the X-axis direction (horizontal direction) is measured from the X-axis scale 78, and the Z axis of the displacement detector 28 is measured from the Z-axis scale 80. The amount of movement in the direction (vertical direction) is measured and output to the processing unit 102.

  The processing unit 102 calculates trajectory information of the stylus 22 from the measurement data according to the control signal of the control unit 100, and obtains the contour shape and roughness of the workpiece. The processing unit 102 outputs the calculation result to the control unit 100. The measurement result is output from the control unit 100 to the display device 44.

  The storage unit 104 of the control device 40 stores various programs, measurement data, trajectory information of the stylus 22, and the contour shape and roughness of the workpiece. The control unit 100 executes data input / output with respect to the storage unit 104.

  The measuring force adjustment mechanism 58 and the arm position adjustment mechanism 60 are connected to the controller 40. The measurement force adjustment unit 106 of the control device 40 controls the measurement force adjustment mechanism 58 according to the control signal from the control unit 100 to adjust the measurement force of the stylus 26. Further, the arm position adjustment unit 108 of the control device 40 controls the arm position adjustment mechanism 60 according to the control signal from the control unit 100 to move the position of the arm 32 to a predetermined position.

  The control device 40 is connected to a drive mechanism 16 including a Z-axis drive mechanism 18 and an X-axis drive mechanism 20. The drive mechanism control unit 110 of the control device 40 controls the drive mechanism 16 including the Z-axis drive mechanism 18 and the X-axis drive mechanism 20 according to the control signal from the control unit 100, and the probe 22 and the displacement detector 28. Control the position of

  The stylus movement control unit 112 calculates the movement path of the stylus 26 from the measurement end position to the next measurement start position based on the measurement data stored in the storage unit 104. When calculating the movement path, the stylus movement control unit 112 calculates a movement path in which the collision between the stylus 26 and the work is avoided and the movement distance becomes short. The stylus movement control unit 112 outputs movement route information to the control unit 100.

  In the present embodiment, measurement data from the stylus when the workpiece is measured is stored in the storage unit 104. When moving the measuring element 22 after the measurement to the next measurement start position, the stylus movement control unit 112 calculates the movement path based on the measurement data. Since the probe 22 is automatically moved based on the movement path information, the probe 22 can be efficiently moved to the next measurement start position without causing the probe 22 to collide with the workpiece.

  The control unit 100 controls the stylus position adjustment mechanism based on the movement path information from the stylus movement control unit 112 to adjust the tip position of the stylus 26. That is, the stylus position adjustment mechanism is controlled by the stylus movement control unit 112 via the control unit 100.

  In the present embodiment, at least one of the Z-axis drive mechanism 18, the measuring force adjustment mechanism 58, and the arm position adjustment mechanism 60 constitutes a stylus position adjustment mechanism. As the stylus position adjustment mechanism, the Z-axis drive mechanism 18, the measuring force adjustment mechanism 58, and the arm position adjustment mechanism 60 which can be positionally adjusted at any position can be used in combination.

  FIG. 4 shows a flowchart of a control method of the form measuring machine included in the present embodiment. In the control method of the shape measuring machine, the work is mounted on the base of the shape measuring machine having the measuring element, the displacement detector, and the drive mechanism, and the measuring element is aligned with the measurement start position of the work (step S10).

  Next, measurement data is acquired and stored (step S12). In step S12, while moving the probe in the horizontal direction along the surface of the workpiece, the amount of movement of the displacement detector in the horizontal direction and the amount of displacement of the stylus in the vertical direction are acquired as measurement data, and the measurement data is obtained. Remember.

  Next, a movement route is calculated from the measurement data (step S14). In step S14, based on the measurement data, a movement path for moving the stylus to the next measurement start position is calculated.

  Finally, the probe is moved based on the information of the movement route (step S16). In step S16, the measuring element is moved to the next measurement start position based on the information on the calculated movement route.

  In the control method of the shape measuring machine of the present embodiment, since the movement path of the stylus is calculated based on the measurement data of the workpiece, the collision between the stylus and the workpiece is started, and the stylus is efficiently performed. It can be moved.

  Next, the case where a workpiece having a step is measured by the probe 22 having the downward pointing probe 26 will be described based on FIG. 5 and FIG.

  FIG. 5 shows the operation of the conventional stylus 22 in the case where the workpiece W having a step is repeatedly measured by the downward contact stylus 26. First, the operator visually aligns the tip position of the stylus 26 of the probe 22 with the measurement start position SP of the workpiece W. Thereafter, the stylus 26 of the probe 22 is automatically moved to the measurement end position EP along the shape of the workpiece W. While moving the probe 22 from the measurement start position SP to the measurement end position EP, measurement data on the surface shape of the workpiece W is acquired. A thick line on the surface of the work W virtually indicates the measurement location.

  When the probe 22 reaches the measurement end position EP, the operator visually moves the probe 22 to the next measurement start position. At this time, the probe 22 is moved at a large distance from the workpiece W so that the stylus 26 does not collide with the workpiece W.

  In the method of FIG. 5, in order to avoid the collision between the stylus 26 and the work W, the safety distance L is increased.

  FIG. 6 shows the operation of the probe 22 according to the present embodiment when the workpiece W having a step is repeatedly measured by the downward contact stylus 26.

  FIG. 6A shows a state in which the measurement of the workpiece W having a step is finished, that is, the stylus 22 is located at the measurement end position EP. While moving the probe 22 from the measurement start position SP to the measurement end position EP, measurement data on the surface shape of the workpiece W is acquired.

  FIG. 6B shows one aspect of the movement path of the stylus 26 for moving the probe 22 to the next measurement start position SP. In this aspect, the stylus 26 is automatically moved along a movement path which is separated from the measurement data of the workpiece W by a predetermined distance and which does not collide with the workpiece W. The stylus 26 moves away from the upward surface of the workpiece by a distance L1 and away from the side of the workpiece W by a distance L2. Therefore, the stylus 26 moves along the shape of the work W. By the movement of the stylus, a collision between the stylus 26 and the workpiece W can be avoided.

  FIG. 6C shows another aspect of the movement path of the stylus 26 for moving the probe 22 to the next measurement start position SP. In this embodiment, the stylus 26 is vertically moved by a distance L4 to a position separated by a fixed distance L3 from the highest point of the measurement data and then automatically moved linearly in the horizontal direction. . By the movement of the stylus, a collision between the stylus 26 and the workpiece W can be avoided.

  In particular, since the measurement data is used, it is possible to shorten the distance L4 in which the stylus 26 moves in the vertical direction while avoiding the collision between the stylus 26 and the work W.

  Although FIG. 6 describes the stylus 22 having the downward pointing stylus 26, the present invention can also be applied to a stylus having an upward pointing stylus. In the case of the upward facing stylus, with respect to the aspect of FIG. 6C, after the measurement is completed, the stylus of the stylus may be moved to a position away from the lowest point of the measurement data by a fixed distance.

  Next, based on FIG. 7 and FIG. 8 in the case of measuring the upper surface S1 and the lower surface S2 inside the bent cylindrical workpiece W with the probe 22 having the upward contact 26A and the downward contact 26B. Explain.

  As shown in FIG. 7A, first, the operator visually aligns the tip position of the upward contact probe 26A of the stylus 22 with the measurement start position SP1 of the top surface S1 inside the workpiece W. Thereafter, the upward contact probe 26A of the probe 22 is automatically moved along the shape of the upper surface S1 of the workpiece W to the measurement end position EP1. While moving the probe 22 from the measurement start position SP1 to the measurement end position EP1, measurement data regarding the surface shape of the upper surface S1 inside the workpiece W is acquired. A thick line on the upper surface S1 inside the workpiece W virtually indicates the measurement location.

  When the measurement of the upper surface S1 inside the work W is finished, the downward contact probe 26B of the stylus 22 is moved from the measurement end position EP1 of the upper surface S1 to the measurement start position SP2 of the lower surface S2.

  As shown in FIG. 7B, in the operation of the conventional measuring element 22, when the measurement of the upper surface S1 is finished, the arm 32 of the measuring element 22 is moved in the horizontal direction at the measurement end position EP1. When arm 32 is made horizontal and probe 24 is moved to measurement start position SP2 of lower surface S2, the lower surface S2 of workpiece W and downward contact probe 26B of probe 22 collide with each other at the bending portion of cylindrical workpiece W There was a case to do.

  FIG. 8 is a view of the measuring element 22 according to this embodiment in the case of measuring the upper surface S1 and the lower surface S2 inside the bent cylindrical work W with the measuring element 22 having the upward contact 26A and the downward contact 26B. It shows the operation.

  FIG. 8A shows a state in which the measurement of the top surface S1 inside the cylindrical workpiece W is finished, as in FIG. 7A.

  FIG. 8B shows one aspect of the movement path of the upward contact stylus 26A and the downward contact stylus 26B for moving the probe 22 from the measurement end position EP1 to the next measurement start position SP2. . In this aspect, the upward contact stylus 26A and the downward contact stylus 26B are automatically moved in a movement path away from the top surface S1 by a fixed distance L5 from the measurement data of the workpiece W. The upward contact stylus 26A and the downward contact stylus 26B move along the shape of the upper surface S1 of the workpiece W. By this movement, it is possible to avoid the collision between the upward contact stylus 26A and the downward contact stylus 26B and the upper surface S1 or the lower surface S2 inside the workpiece W.

  Next, in the present embodiment, at least one of the Z-axis drive mechanism 18, the measurement force adjustment mechanism 58, and the arm position adjustment mechanism 60 constitutes a stylus position adjustment mechanism. The stylus position adjustment mechanism can be configured to include at least two of the Z-axis drive mechanism 18, the measurement force adjustment mechanism 58, and the arm position adjustment mechanism 60. Each mechanism and its combination will be described based on FIG. 1, FIG. 2 and FIG.

  When adjusting the tip position of the stylus using the Z-axis drive mechanism 18, since the profile measuring machine 10 already has the Z-axis drive mechanism 18, there is no need to add a new mechanism.

  When the Z-axis drive mechanism 18 is used as the stylus position adjustment mechanism, the entire displacement detector 28 is moved up and down, so the tip of the stylus 26 can be moved stably.

  In addition, when the Z-axis drive mechanism 18 is used, the movement of the stylus 26 is only the movement in the vertical direction along the Z-axis direction, which facilitates control.

  When the measuring force adjustment mechanism 58 is used as a stylus position adjustment mechanism, the tip of the stylus 26 can be moved quickly. Therefore, even when the displacement detector 28 is moved quickly by the drive mechanism 16, the position of the tip of the stylus 26 can be controlled by following the movement of the displacement detector 28.

  When the arm position adjustment mechanism 60 is used as the stylus position adjustment mechanism, the position of the arm 32 can be finely adjusted, so that the tip of the stylus 26 can be moved near the workpiece.

  When the Z-axis drive mechanism 18 and the arm position adjustment mechanism 60 are used in combination as the stylus position adjustment mechanism, the arm 32 can be fixed by the arm position adjustment mechanism 60, so that the tip of the stylus 26 is restrained from fluttering. Thus, the Z-axis drive mechanism 18 can be moved up and down at high speed. According to this combination, the effect when only the Z-axis drive mechanism 18 is used is not inhibited.

  When the measurement force adjustment mechanism 58 and the arm position adjustment mechanism 60 are used in combination as the stylus position adjustment mechanism, the tip of the stylus 26 is moved at high speed by the measurement force adjustment mechanism 58 up to the target position. By controlling the fine adjustment of the tip of the stylus 26 with the arm position adjustment mechanism 60 with the retract mechanism, it becomes possible to control the tip position of the stylus 26 while moving the displacement detector 28 at high speed.

  DESCRIPTION OF SYMBOLS 10 ... shape measuring machine, 12 ... base, 14 ... post | mailbox, 16 ... drive mechanism, 18 ... Z-axis drive mechanism, 20 ... X-axis drive mechanism, 22 ... probe, 24 ... stylus arm, 26 ... stylus, 26A ... upward contact stylus, 26 B ... downward contact stylus, 28 ... displacement detector, 30 ... arm holder, 32 ... arm, 40 ... control device, 42 ... input device, 44 ... display device, 46 ... operation unit, 50 ... drive unit Connecting part, 52: fulcrum, 54: peristaltic arm, 56: displacement reading part, 58: measuring force adjusting mechanism, 60: arm position adjusting mechanism, 62: housing, 70: rail, 72: slider, 74: ball screw, 76: Motor 78: X-axis scale 80: Z-axis scale 100: control unit 102: processing unit 104: storage unit 106: measuring force adjustment unit 108: arm position adjustment unit 110: drive mechanism control unit 11 ... stylus movement control unit

Claims (6)

A base on which an object to be measured is placed;
A post provided on the base,
A drive mechanism including a Z-axis drive mechanism provided on the column and movable on the Z-axis, and an X-axis drive mechanism provided on the Z-axis drive mechanism;
A probe having an arm and a stylus provided on the tip side of the arm;
A displacement detector attached to the X-axis drive mechanism, the displacement detector having a fulcrum for supporting the arm so as to be vertically movable and a displacement reading unit for measuring the displacement of the arm;
The displacement detector, and a control device that controls the drive mechanism;
A shape measuring machine comprising
A stylus position adjusting mechanism for moving the tip position of the stylus;
The control device is measurement data of the measurement element and is obtained by moving the measurement element along the surface of the measurement object in the X-axis direction by the X-axis drive mechanism. A storage unit for storing measurement data related to the surface shape, and a stylus movement for controlling the stylus position adjustment mechanism based on the measurement data stored in the storage unit to move the stylus to the next measurement start position A control unit,
Shape measuring machine equipped with   The shape measuring machine according to claim 1, wherein the stylus position adjusting mechanism is an arm position adjusting mechanism provided in the displacement detector.   The shape measuring machine according to claim 1, wherein the stylus position adjusting mechanism is a measuring force adjusting mechanism provided at a rear end of the arm.   The shape measuring machine according to claim 1, wherein the stylus position adjustment mechanism is the Z-axis drive mechanism.   The stylus position adjustment mechanism is provided in the displacement detector that adjusts the position of the arm, and the arm position adjustment mechanism, the Z-axis drive mechanism, and the rear end of the arm adjust the measurement force of the stylus. 2. A profilometer according to claim 1, comprising at least two of the provided measuring force adjustment mechanisms.   The shape measuring machine according to any one of claims 1 to 5, wherein the stylus comprises an upward stylus and a downward stylus extending in a peristaltic direction of the arm.

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