JP2019089008A - Nozzle and coating application device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily remove air bubbles contained in a coating liquid flowing in a flow path. SOLUTION: The nozzle of the embodiment is included in the coating liquid by communicating with a first nozzle main body having a flow path communicating with the discharge port for discharging the coating liquid and flowing the coating liquid, and communicating with the flow path. A degassing passage for discharging air bubbles is provided, and the second nozzle main body facing the first nozzle main body is included. [Selection diagram] Fig. 3

Description

  The present invention relates to a nozzle and a coating apparatus.

  Fine patterns such as wirings, electrodes and color filters are formed on a glass substrate constituting a display panel such as a liquid crystal display. For example, such a pattern is formed by a method such as photolithography. In the photolithography method, a coating step of applying a resist material to a substrate, an exposure step of exposing a film formed of the resist material after coating (hereinafter referred to as "resist film"), and a development of developing a resist film after the exposure step Including the steps.

  For example, in the coating process, a coating apparatus provided with a nozzle for discharging a coating liquid is used. For example, Patent Document 1 discloses a nozzle provided with a manifold for spreading a coating solution supplied from a supply hole to the outside in the left-right direction (width direction) orthogonal to the discharge direction.

JP, 2014-188436, A

  By the way, when air bubbles mix in the coating liquid which flows through the inside of a channel, streaky unevenness resulting from the air bubbles may occur in the coating film. In particular, when a high viscosity liquid is used as the coating liquid, it becomes difficult to remove air bubbles contained in the coating liquid.

  In view of the above circumstances, the present invention has an object to provide a nozzle capable of easily removing air bubbles contained in a coating liquid flowing in a flow path. In addition, it is an object of the present invention to provide a coating apparatus capable of forming a high quality coating film by suppressing the occurrence of streaks by providing such a nozzle.

  The nozzle according to one aspect of the present invention is in communication with the first nozzle main body provided with a flow path communicating with the discharge port for discharging the application liquid and circulating the application liquid, and is contained in the application liquid in communication with the flow path A degassing passage for discharging air bubbles is provided, and a second nozzle body facing the first nozzle body is included.

  According to this configuration, the degassing passage is provided in the second nozzle main body facing the first nozzle body provided with the flow passage, so that the coating liquid in the flow passage can be smoothly circulated toward the degassing passage. be able to. Therefore, air bubbles contained in the coating liquid flowing in the flow path can be easily removed. In addition, the setting freedom of the degassing passage can be improved and the nozzle can be made compact. In addition, since the formation regions of the flow passage and the degassing passage are dispersed into the first nozzle body and the second nozzle body, the strength and rigidity balance of the entire nozzle can be secured.

In the above-described nozzle, the second nozzle body may be provided with a supply passage for supplying the coating liquid to the flow passage.
According to this configuration, each of the degassing passage and the supply passage is provided in the second nozzle body, whereby each of the degassing piping connected to the degassing passage and the supply piping connected to the supply passage is provided on one side of the nozzle Can be consolidated. Therefore, compared with the case where each of a degassing path and a feed path is provided in a mutually different nozzle main part, wiring of various piping can be simplified.

In the above nozzle, the supply path may be located at a central portion of the first nozzle body in the longitudinal direction of the elongated first nozzle body.
According to this configuration, the coating liquid can be easily filled in the entire area of the flow path as compared to the case where the supply path is disposed at the end of the first nozzle body in the longitudinal direction of the long first nozzle body.

In the above nozzle, the flow path may include a dispersion path in communication with the supply path for dispersing the coating liquid supplied from the supply path, and the degassing path may be in communication with the dispersion path. .
According to this configuration, it is possible to easily remove air bubbles contained in the coating liquid flowing in the dispersion path through the supply path.

In the above-mentioned nozzle, the dispersion path is inclined so as to be positioned on the upper side as it goes from the communication portion with the supply path to the end side of the first nozzle body in the longitudinal direction of the long first nozzle body. It is demarcated by an inclined part and a downward extending part which bends and extends downward from an end of the inclined part in a longitudinal direction of the first nozzle body, and the degassing passage is constituted by the inclined part and the downward extension. It may be connected closer to the bending part with the part.
According to this configuration, since the highest position on the inner wall of the dispersion path is the position of the bent portion, there is no portion in the dispersion path in which the air bubbles contained in the coating liquid stay, and the air bubbles are inclined portion and downward extension portion Floats by buoyancy toward the bends of the Therefore, air bubbles contained in the coating liquid flowing in the dispersion path can be effectively removed.

In the above nozzle, the dispersion path is formed in a straight line along the longitudinal direction of the long first nozzle body, and the degassing path is an end of the dispersion path in the longitudinal direction of the first nozzle body It may be connected to a unit.
According to this configuration, since the dispersion path is formed in a straight line, the flow of the coating liquid is smoothly performed without any delay, and there is no part where air bubbles contained in the coating liquid are retained in the dispersion path. Head towards the end of the distribution path. Therefore, air bubbles contained in the coating liquid flowing in the dispersion path can be effectively removed.

In the above nozzle, the dispersion path has a symmetrical shape in the longitudinal direction of the first nozzle body with reference to the central position of the first nozzle body in the longitudinal direction of the elongated first nozzle body. May be
According to this configuration, since the flow of the coating liquid to the inside of the dispersion path can be generated on both sides in the longitudinal direction of the first nozzle body, the bubbles are directed to both ends of the dispersion path. Therefore, air bubbles contained in the coating liquid flowing in the dispersion path can be more effectively removed.

In the above-mentioned nozzle, a connecting member for connecting the first nozzle main body and the second nozzle main body is provided on the surface of the first nozzle main body and the second nozzle main body opposite to the discharge port. It is also good.
According to this configuration, the nozzle can be reinforced without obstructing the discharge of the coating liquid.

In the above nozzle, the second nozzle body may be provided with an adjustment mechanism capable of adjusting the width of the discharge port.
According to this configuration, the width of the discharge port can be adjusted without being in the way of the flow path.

In the above-described nozzle, the adjustment mechanism may include a plurality of adjustment members aligned in the longitudinal direction of the long second nozzle body.
According to this configuration, the width of the discharge port can be locally adjusted in the longitudinal direction of the long second nozzle body.

In the above-mentioned nozzle, the interval between two adjacent adjustment members may be narrower toward the end of the second nozzle body in the longitudinal direction of the second nozzle body.
By the way, when the first nozzle body and the second nozzle body are connected at the end portions in the longitudinal direction, the end portions (the intervals between the two adjacent adjustment members are equally spaced in the longitudinal direction of the second nozzle body) It may be difficult to adjust the width of the discharge port at the connecting portion). On the other hand, according to this configuration, the distance between the two adjacent adjustment members is narrower toward the end of the second nozzle body in the longitudinal direction of the second nozzle body, whereby the first nozzle body and the second nozzle body can be obtained. Even when the end portions in the longitudinal direction are connected to each other, the width of the discharge port can be easily adjusted at the end portion.

  A coating apparatus according to an aspect of the present invention includes a substrate transfer unit that transfers a substrate, and a coating unit that includes the nozzle and that applies a coating liquid to the transferred substrate from the nozzle. .

  According to this configuration, by providing the above-described nozzle, it is possible to provide a coating apparatus capable of forming a high quality coating film while suppressing the occurrence of streaks.

  According to the present invention, it is possible to provide a nozzle capable of easily removing air bubbles contained in the coating liquid flowing in the flow path. In addition, by providing such a nozzle, it is possible to provide a coating apparatus capable of forming a high quality coating film while suppressing the occurrence of uneven streaks.

BRIEF DESCRIPTION OF THE DRAWINGS The perspective view of the coating device which concerns on 1st embodiment. The front view of the coating device which concerns on 1st embodiment. The disassembled perspective view of the nozzle which concerns on 1st embodiment. The front view of the nozzle concerning a first embodiment. FIG. 5 is a view including a V-V cross section of FIG. 4. The bottom view of the nozzle concerning a first embodiment. The figure for demonstrating the effect | action of the nozzle which concerns on 1st embodiment. The disassembled perspective view of the nozzle which concerns on 2nd embodiment. The front view of the nozzle concerning a second embodiment. The figure containing the XX cross section of FIG. The figure for demonstrating the effect | action of the nozzle which concerns on 2nd embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. A predetermined direction in a horizontal plane is taken as an X direction, a direction orthogonal to the X direction in a horizontal plane is taken as a Y direction, and a direction (that is, a vertical direction) orthogonal to each of the X and Y directions is taken as a Z direction.

First Embodiment
<Applying device>
As shown in FIG. 1, the coating device 1 is a device that applies a coating liquid to the substrate 5. For example, the substrate 5 is a glass substrate used for a liquid crystal panel or the like. The substrate 5 has a rectangular plate shape. The coating apparatus 1 includes a substrate transport unit 2 that transports a substrate 5, an application unit 3 that applies a coating liquid, and a management unit 4 that manages the application unit 3.

<Substrate Transport Unit>
The substrate transport unit 2 has a longitudinal direction in the Y direction. The substrate transfer unit 2 transfers the substrate 5 in the Y direction. The Y direction is the substrate transport direction in the coating apparatus 1.
The substrate transfer unit 2 includes a gantry 7, a stage 8 and a transfer mechanism 9.

<Mountain>
The gantry 7 has a length in the Y direction. The gantry 7 supports the stage 8 and the transport mechanism 9. For example, the gantry 7 is placed on the floor surface.
The gantry 7 includes a gantry body 7a positioned at the center in the X direction, a first gantry side 7b positioned on the −X direction side of the gantry body 7a, and a second gantry side positioned on the + X direction side of the gantry body 7a. And 7c.

The gantry body 7 a supports the stage 8.
The first gantry side 7 b and the second gantry side 7 c support the transport mechanism 9. Each of the first gantry side 7b and the second gantry side 7c is provided with a pair of grooves 7d and 7e (see FIG. 2) extending in the Y direction.

  As shown in FIG. 2, the pair of grooves 7 d and 7 e are arranged side by side in the X direction. Hereinafter, of the pair of grooves 7d and 7e, the groove 7d located inside in the X direction is also referred to as "inner groove 7d", and the groove 7e located outside in the X direction is also referred to as "outer groove 7e". The inner groove 7d is located above the outer groove 7e. The inner groove 7d is located closer to the stage 8 than the outer groove 7e.

<Transporting mechanism>
The transport mechanism 9 transports the substrate 5 in the Y direction. The transport mechanism 9 is provided one by one on each of the first gantry side 7 b and the second gantry side 7 c. The transport mechanisms 9 are provided in a pair on both sides of the stage 8. The pair of transport mechanisms 9 are line symmetrical with respect to the center of the stage 8 in the X direction.

As shown in FIG. 1, the transport mechanism 9 includes a slider 9 a, a substrate holding portion 9 b for holding the substrate 5, and a rail 9 c extending in the Y direction on the side of the stage 8.
For example, the slider 9a incorporates a linear motor (not shown). The slider 9a is configured to move along the rail 9c by the drive of the linear motor.

As shown in FIG. 2, the substrate holding unit 9 b holds the side edge of the substrate 5 in the X direction in a cantilever manner. The substrate holding portion 9 b holds a portion of the substrate 5 that protrudes outside the stage 8 in the X direction.
The substrate holding portion 9 b is provided at an end of the slider 9 a on the stage 8 side. As shown in FIG. 1, a plurality of (for example, four in the present embodiment) substrate holding portions 9 b are provided side by side in the Y direction. For example, the substrate holding portion 9b may be provided with a suction pad (not shown) that holds the substrate 5 by suction.

  The rails 9c are provided at upper ends of the first gantry side 7b and the second gantry side 7c on the stage 8 side.

Each transport mechanism 9 can transport the substrate 5 independently. Therefore, different substrates 5 can be held by the transport mechanism 9 on the side of the first gantry side 7 b and the transport mechanism 9 on the side of the second gantry side 7 c. As a result, since the substrates 5 can be alternately transported by the transport mechanisms 9, throughput (for example, the transport speed of the substrate per unit time) can be improved.
In addition, when conveying the board | substrate which has about half the area of the said board | substrate 5, since the board | substrate can be hold | maintained 1 each at 2 sheets by 2 conveyance mechanisms 9, making two conveyance mechanisms 9 translate in the Y direction Thus, two substrates can be transported simultaneously.

<Coating section>
As shown in FIG. 1, the application unit 3 includes a portal frame 10, a nozzle 50, a sensor 15, a supply unit 20, and a waste solution unit 30.

<Gate frame>
As shown in FIG. 2, the portal frame 10 includes a pair of columnar support members 10 a extending in the Z direction, and a bridge member 10 b extending in the X direction and passing between the pair of support members 10 a.
Each pillar member 10a is supported by the first gantry side 7b and the second gantry side 7c, respectively.

  Both ends of the bridging member 10b in the X direction are connected to the upper ends of the pair of support members 10a. Thus, the portal frame 10 is provided to straddle the stage 8 in the X direction. The bridge member 10b is movable in the Z direction with respect to the column member 10a (movable in the direction of arrow u in FIG. 2). For example, the cross-linking member 10 b may be provided with a slider capable of moving the cross-linking member 10 b up and down with respect to the pair of support members 10 a.

The portal frame 10 is connected to a frame moving mechanism 11. The frame moving mechanism 11 includes a rail member 12 extending in the Y direction and a drive mechanism 13.
The rail members 12 are provided one by one in the outer groove 7e of the first gantry side 7b and the second gantry side 7c.
The drive mechanism 13 is connected to the portal frame 10. The application unit 3 is movable in the Y direction (the arrow n direction in FIG. 1) along the rail member 12 by the drive of the drive mechanism 13.

<Nozzle>
As shown in FIG. 2, the nozzle 50 has a long shape having a length in the X direction (the arrow v direction in the drawing). The nozzle 50 is a slit nozzle. The nozzle 50 is detachably attached to the lower end portion (the end portion on the −Z direction side) of the bridge member 10 b of the portal frame 10.

<Sensor>
A plurality of (for example, three in the present embodiment) sensors 15 are provided along the X direction at the lower end portion of the bridging member 10b. The sensor 15 measures the distance (the distance in the Z direction) between the nozzle tip 51a and the opposite surface (for example, the upper surface of the substrate 5 disposed below the nozzle 50) facing the nozzle tip 51a.

<Supply unit>
As shown in FIG. 1, the supply unit 20 includes a pump 21 capable of supplying the coating liquid to the nozzle 50 and a supply source 22 capable of supplying the coating liquid to the pump 21.

  The supply source 22 includes a storage tank 22a that stores the coating liquid. A pipe 24 capable of introducing an inert gas such as nitrogen gas is connected to the storage tank 22a. The pipe 24 is connected to the pressurization source 23 via a valve (not shown). By controlling the opening and closing of the valve, the pressure in the storage tank 22a is adjusted. The supply source 22 supplies a predetermined amount of coating liquid to the pump 21 by adjusting the pressure in the storage tank 22a.

  For example, as a coating solution, a liquid for forming a resin substrate, an interlayer insulating film, and the like is used. In the present embodiment, a liquid containing a polyimide having a viscosity of about 1 to 10 Pa · s is used as the coating liquid. Generally, a liquid material for forming a TFT, a liquid crystal layer and the like used in a liquid crystal display device has a viscosity of 0.01 Pa · s or less. Therefore, the liquid containing polyimide has a high viscosity as compared with the liquid for forming the TFT, the liquid crystal layer, and the like. A liquid other than the liquid containing polyimide may be used as the coating liquid. For example, as a coating solution, a chemical solution (liquid) such as a photoresist may be used.

  The supply unit 20 includes a plurality of pipes 24 to 26 which form a supply path (flow path) of the coating liquid. As described above, the coating solution flows from the source 22 toward the nozzle 50. Hereinafter, in the direction in which the coating liquid flows, the supply source 22 side may be referred to as “upstream side”, and the nozzle 50 side may be referred to as “downstream side”. The supply source 22 is connected to the nozzle 50 via the pipe 25, the pump 21 and the supply pipe 26 in order from the upstream side.

<Waste liquid part>
The waste liquid portion 30 includes a first waste liquid bottle 31 and a second waste liquid bottle 32 for storing the waste liquid from the nozzle 50. The first waste liquid bottle 31 and the second waste liquid bottle 32 are separated in the longitudinal direction of the nozzle 50 with the supply unit 20 interposed therebetween. To each of the first waste liquid bottle 31 and the second waste liquid bottle 32, a first waste liquid pipe 33 and a second waste liquid pipe 34, which form a waste liquid path (flow path) of the coating liquid, are connected. The waste fluid from the nozzle 50 flows toward the first waste fluid bottle 31 and the second waste fluid bottle 32 respectively through the first waste fluid piping 33 and the second waste fluid piping 34.

<Management department>
The management unit 4 manages the nozzles 50 so that the discharge amount of the coating liquid discharged onto the substrate 5 becomes constant. As shown in FIG. 1, the management unit 4 is provided on the −Y direction side with respect to the application unit 3. The management unit 4 includes a preliminary discharge mechanism 41, a dip tank 42, a nozzle cleaning device 43, a housing 44 and a holding member 45.

The preliminary ejection mechanism 41 preliminarily ejects the coating liquid. For example, the preliminary ejection mechanism 41 is provided at a position closest to the nozzle 50 in a state where the coating unit 3 is disposed in the coating processing area.
Inside the dip tank 42, a solvent such as thinner is stored.

  The nozzle cleaning device 43 rinses the vicinity of the discharge port 60 (see FIG. 2) of the nozzle 50. The nozzle cleaning device 43 includes a cleaning mechanism that moves in the X direction, and a moving mechanism (both not shown) that move the cleaning mechanism.

The accommodating portion 44 accommodates the preliminary discharge mechanism 41, the dip tank 42 and the nozzle cleaning device 43.
As shown in FIG. 2, the length of the housing portion 44 in the X direction is smaller than the distance between the support members 10 a of the portal frame 10. The portal frame 10 is movable in the Y direction across the housing portion 44 above the housing portion 44. In a state where the portal frame 10 is moved to the upper side of the housing portion 44, the nozzle 50 can approach the preliminary discharge mechanism 41 in the housing portion 44, the dip tank 42, and the nozzle cleaning device 43 (see FIG. 1).

As shown in FIG. 2, the holding member 45 supports the both ends of the housing portion 44 in the X direction from below.
The holding member 45 is connected to the management unit moving mechanism 46. The management unit moving mechanism 46 includes a rail member 47 extending in the Y direction and a drive mechanism 48.
One rail member 47 is provided in each of the inner grooves 7d of the first gantry side 7b and the second gantry side 7c.
The drive mechanism 48 is connected to the holding member 45. The management unit 4 is movable in the Y direction (the arrow m direction in FIG. 1) along the rail member 47 by the drive of the drive mechanism 48.

<Nozzle details>
As shown in FIG. 4, the nozzle 50 has a long nozzle body 51, a connecting member 52 provided on the upper end of the nozzle body 51, and a longitudinal direction of the nozzle body 51 (hereinafter also referred to as “nozzle longitudinal direction”). And a pair of side plates 53, 54 provided at both ends of the In FIG. 1 and FIG. 2, the connecting member 52 is illustrated in a simplified manner.

  In the cross-sectional view of FIG. 5, the nozzle body 51 is provided with a lower projecting portion that protrudes so as to be located lower toward the center in the Y direction. A discharge port 60 for discharging a coating liquid is formed at the lower end (hereinafter referred to as "nozzle tip 51a") of the lower protrusion. The discharge port 60 extends in the longitudinal direction of the nozzle.

  As shown in FIG. 5, the nozzle main body 51 includes a discharge port 60 for discharging the application liquid, a flow path 61 communicating with the discharge port 60, and a discharge connection path 69 connecting the discharge port 60 and the flow path 61. , A degassing passage 62 (see FIG. 4) communicating with the flow passage 61, a supply passage 63 for supplying the coating liquid to the flow passage 61, and a recessed groove 72 for adjusting the width of the discharge port 60. It is done.

  As shown in FIG. 5, the nozzle body 51 includes a first nozzle body 55 and a second nozzle body 56. The first nozzle body 55 and the second nozzle body 56 are disposed to face each other in the Y direction across a shim (not shown). The nozzle body 51 makes the surface 55f (the inner surface in the Y direction) of the first nozzle body 55 face the surface 56f (the inner surface in the Y direction) of the second nozzle body 56, and the first nozzle body 55 and the second nozzle It assembles in the state which clamped shim (not shown) with the main body 56. As shown in FIG.

<First nozzle body>
As shown in FIG. 3, the first nozzle body 55 is an elongated member extending in the nozzle longitudinal direction. The longitudinal direction of the first nozzle body 55 coincides with the longitudinal direction of the nozzle. Hereinafter, the longitudinal direction of the first nozzle main body 55 is also referred to as “the nozzle longitudinal direction”.

  For example, the first nozzle body 55 is formed of a metal material such as stainless steel. As shown in FIG. 5, in the first nozzle body 55, a recess 55 a that constitutes the flow path 61 in the nozzle 50 is provided on the surface 55 f (inner surface in the Y direction) facing the second nozzle body 56. That is, the flow path 61 is provided in the first nozzle body 55.

As shown in FIG. 4, the flow path 61 includes an inlet 61a communicating with the supply channel 63 and supplied with the coating liquid, and a dispersion channel 64 for dispersing the coating liquid supplied to the inlet 61a.
The inlet portion 61 a is a communication portion that connects the supply path 63 and the dispersion path 64. The inlet portion 61 a is disposed at the central position in the longitudinal direction of the nozzle at the upper and lower central portions of the nozzle body 51.

As shown in FIG. 4, the dispersion path 64 is inclined from the inlet 61 a toward the end of the first nozzle body 55 in the longitudinal direction of the nozzle such that the dispersion path 64 is inclined upward and inclined in the longitudinal direction of the nozzle The lower extension 66 is defined by extending downward from the end of the portion 65.
The dispersion path 64 has a symmetrical shape in the longitudinal direction of the nozzle based on the central position of the first nozzle body 55 in the longitudinal direction of the nozzle.

<Second nozzle body>
As shown in FIG. 3, the second nozzle body 56 is an elongated member extending in the nozzle longitudinal direction. The longitudinal direction of the second nozzle body 56 coincides with the longitudinal direction of the nozzle. Hereinafter, the longitudinal direction of the second nozzle main body 56 is also referred to as “the nozzle longitudinal direction”.

  For example, the second nozzle body 56 is formed using a metal material such as stainless steel. The second nozzle body 56 is formed using the same material as the first nozzle body 55. In the second nozzle body 56, a surface 56f (inner surface in the Y direction) facing the first nozzle body 55 is flat. The second nozzle main body 56 is provided with a plurality of (for example, three in the present embodiment) through holes 56 a constituting the supply passage 63 and the degassing passage 62 in the nozzle 50. That is, the supply passage 63 and the degassing passage 62 are provided in the second nozzle body 56.

  As shown in FIG. 5, the supply passage 63 has a linear shape extending in the thickness direction (Y direction) of the second nozzle body 56. As shown in FIG. 4, the supply path 63 is located at the central portion of the first nozzle body 55 in the nozzle longitudinal direction. A supply pipe 26 (see FIG. 1) is connected to the supply path 63. The supply passage 63 is in communication with the inlet 61 a of the first nozzle body 55.

  As shown in FIG. 4, a pair of degassing passages 62 are provided apart from each other in the longitudinal direction of the nozzle. The pair of degassing passages 62 are located at both ends of the first nozzle body 55 in the nozzle longitudinal direction. Hereinafter, of the pair of degassing passages 62, the degassing passage 62a located at the first end of the second nozzle body 56 in the longitudinal direction of the nozzle is referred to as “first degassing passage 62a”, and second ends of the second nozzle body 56 The degassing passage 62b located in the part is also referred to as "second degassing passage 62b".

  As shown in FIG. 3, each of the first degassing passage 62 a and the second degassing passage 62 b has a linear shape extending in the thickness direction (Y direction) of the second nozzle body 56. As shown in FIG. 4, each of the first degassing passage 62 a and the second degassing passage 62 b is in communication with the dispersing passage 64 of the first nozzle body 55. The first degassing passage 62 a is connected closer to the bent portion 67 of the inclined portion 65 and the lower extending portion 66 at the first end portion of the first nozzle body 55. The second degassing passage 62 b is connected closer to the bending portion 67 of the inclined portion 65 and the lower extending portion 66 at the second end of the first nozzle body 55. A first waste liquid pipe 33 (see FIG. 1) is connected to the first degassing passage 62a. A second waste liquid pipe 34 (see FIG. 1) is connected to the second degassing passage 62b.

  As shown in FIG. 3, in the second nozzle body 56, a recessed groove 72 is provided below the supply passage 63 and the degassing passage 62. As shown in FIG. 5, the recessed groove 72 is recessed inward in the Y direction from the outer surface of the second nozzle body 56 in the Y direction. As shown in FIG. 3, the recessed groove 72 has a linear shape extending in the nozzle longitudinal direction.

<Internal structure of nozzle body>
In the cross-sectional view of FIG. 5, in the nozzle main body 51, a space surrounded by the recess 55a of the first nozzle main body 55 and the surface 56f of the second nozzle main body 56 becomes a flow path 61. In the cross-sectional view of FIG. 5, a gap formed between the surface 55 f of the first nozzle main body 55 and the surface 56 f of the second nozzle main body 56 and formed between the flow passage 61 and the discharge port 60 is The discharge connection path 69 is formed.

The discharge port 60 is an opening formed at the -Z side end of the flow path 61 in a state where the first nozzle body 55, the second nozzle body 56, and the shim (not shown) are combined. The discharge port 60 is formed in a slit shape along the longitudinal direction of the nozzle.
For example, the dimension of the discharge port 60 in the nozzle longitudinal direction may be smaller than the dimension of the substrate 5 (see FIG. 2) in the X direction. Thereby, the application of the coating liquid to the peripheral region of the substrate 5 can be suppressed.

  As shown in FIG. 5, in the nozzle main body 51, the lowest position P1 on the inner wall of the flow passage 61 is formed to be lower than the connection position P2 between the discharge connection passage 69 and the flow passage 61. Inside the nozzle body 51, an acute angle portion 55b having an acute angle at a connection position P2 between the discharge connection path 69 and the flow path 61 is provided. The acute angle portion 55 b feeds the coating liquid in the flow path 61 to the discharge connection path 69 while cutting out the coating liquid.

  The acute angle portion 55 b is configured by a surface 55 f of the first nozzle body 55 that constitutes the discharge connection path 69 and a part of the inner wall surface of the flow path 61. For example, the angle A1 of the acute angle portion 55b is preferably set in the range of 15 ° or more and 90 ° or less. As a result, it becomes possible to feed the coating liquid to the discharge connection path 69 while cutting out the coating liquid at the acute angle portion 55 b. From the viewpoint of effectively cutting out the coating solution, the angle A1 of the acute angle portion 55b is more preferably set in the range of 20 ° or more and 40 ° or less.

<Connection member>
As shown in FIG. 5, the connecting member 52 is provided on the surface (upper surface) of the nozzle body 51 opposite to the discharge port 60. The connecting member 52 connects the first nozzle body 55 and the second nozzle body 56. As shown in FIG. 4, the connecting member 52 is an elongated member extending in the nozzle longitudinal direction. For example, the connecting member 52 is formed using a metal material such as stainless steel. The connection member 52 is formed using the same material as the nozzle body 51.

  The connecting member 52 is a top plate in the form of a rectangular plate having the same outer shape as the outer shape of the upper surface of the nozzle body 51. As shown in FIG. 3, through holes 52 h penetrating the connecting member 52 in the thickness direction are provided at each of four corners of the connecting member 52. At the corners of the upper surfaces of the first nozzle body 55 and the second nozzle body 56, female screw portions 55m, 56m are provided at positions corresponding to the respective through holes 52h. For example, the first nozzle body is obtained by inserting a bolt (not shown) into each through hole 52h of the connecting member 52 and screwing it to the female screw portions 55m and 56m of the first nozzle body 55 and the second nozzle body 56. 55 and the second nozzle body 56 can be connected. The supply unit 20 and the waste solution unit 30 are provided on the top surface of the connecting member 52 (see FIG. 2).

<Side plate>
As shown in FIG. 4, the pair of side plates 53 and 54 are located at both ends of the nozzle body 51 in the nozzle longitudinal direction. Hereinafter, of the pair of side plates 53 and 54, the side plate 53 located at the first end of the nozzle body 51 in the longitudinal direction of the nozzle is referred to as “first side plate 53”, and the side located at the second end of the nozzle body 51 The plate 54 is also referred to as a "second side plate 54".

  As shown in FIG. 3, each of the first side plate 53 and the second side plate 54 has the same shape as the outline of the cross section of the nozzle body 51 as viewed in the Y direction. For example, each of the first side plate 53 and the second side plate 54 is formed using a metal material such as stainless steel.

The first side plate 53 is a plate member that closes the flow path 61 and the first end side of the recessed groove 72.
The second side plate 54 is a plate member that closes the flow path 61 and the second end side of the recessed groove 72.

<Adjustment mechanism>
As shown in FIG. 6, the second nozzle body 56 is provided with an adjustment mechanism 70 capable of adjusting the width of the discharge port 60. In FIG. 6, the end of the nozzle body 51 on the side of the second side plate 54 is shown. Although not shown, the end of the nozzle body 51 on the side of the first side plate 53 also has the same configuration as the end on the side of the second side plate 54, so the description will be omitted.

  The adjustment mechanism 70 includes a plurality of adjustment members 71 aligned in the nozzle longitudinal direction. As shown in FIG. 5, each adjustment member 71 is located at a position overlapping the recessed groove 72 in the Z direction. Each adjustment member 71 is disposed at a position avoiding the supply passage 63 and the degassing passage 62 (see FIG. 4). For example, the adjustment member 71 is an adjustment screw.

  For example, by rotating the adjustment member 71, the side wall surface of the recessed groove 72 can be pressed to adjust the width of the discharge port 60. As shown in FIG. 6, the distance between the two adjacent adjustment members 71 is narrower toward the end of the second nozzle body 56 in the longitudinal direction of the nozzle. That is, the plurality of adjustment members 71 are arranged to be closer to the end side of the second nozzle body 56 in the longitudinal direction of the nozzle. The plurality of adjustment members 71 are arranged at equal intervals in portions other than both end portions of the second nozzle main body 56 in the nozzle longitudinal direction (portions near the center in the nozzle longitudinal direction).

<Coating operation>
An example of the coating operation of the coating device 1 will be described.
As shown in FIG. 1, first, in the coating operation of the coating apparatus 1, the substrate 5 is carried onto the stage 8.
Next, the coating solution is applied while transporting the substrate 5 using the transport mechanism 9.
And the board | substrate 5 which apply | coated the coating liquid is carried out. Such an operation is alternately performed using the pair of transport mechanisms 9.

  For example, after the substrate 5 carried onto the stage 8 is held by the substrate holding portion 9b, the slider 9a is moved in the Y direction along the rail 9c. The substrate 5 moves in the Y direction with the movement of the slider 9a.

  When the front end of the substrate 5 in the transport direction reaches the position of the discharge port 60 (see FIG. 2) of the nozzle 50, the coating liquid is discharged from the discharge port 60 of the nozzle 50 toward the substrate 5. The discharge of the coating liquid is performed while the relative position between the discharge port 60 and the upper surface of the substrate 5 is changed by transporting the substrate 5 by the slider 9 a in a state where the position of the nozzle 50 is fixed.

<Function of nozzle>
FIG. 7 is a view for explaining the operation of the nozzle 50 according to the first embodiment. In FIG. 7, the illustration of the connecting member 52, the supply unit 20, the waste solution unit 30, and the like is omitted.
The coating liquid is supplied to the nozzle 50 through the supply pipe 26 connected to the nozzle 50 using the pump 21 shown in FIG. As shown in FIG. 7, the coating liquid is supplied from the supply pipe 26 (see FIG. 1) into the flow path 61 through the supply path 63 and the inlet 61a. The coating liquid supplied into the flow path 61 is quickly filled on both end sides of the flow path 61 in the longitudinal direction of the nozzle.

  The application liquid is pressurized by the pump 21 (see FIG. 1), and thus is pushed out toward the discharge connection path 69. In FIG. 7, the coating liquid extruded toward the discharge connection path 69 is denoted by a symbol LA, and the coating liquid extruded toward the degassing path 62 is represented by a symbol LB.

  At this time, the nozzle 50 is formed such that the lowest position P1 on the inner wall of the flow path 61 is lower than the connection position P2 between the discharge connection path 69 and the flow path 61 in the cross-sectional view of FIG. Therefore, when the inside of the flow path 61 is not pressurized, the application liquid hardly flows into the discharge connection path 69. Therefore, the coating liquid supplied into the flow path 61 is first filled over the entire area of the flow path 61 without immediately flowing into the discharge connection path 69, and then flows into the discharge connection path 69 after the internal pressure is increased. It will be. Therefore, the difference in the discharge amount of the application liquid is unlikely to occur in the entire region of the discharge port 60 in the nozzle longitudinal direction, and the application liquid can be applied uniformly.

By the way, the coating liquid used in the present embodiment has thixotropy. Therefore, when a shear (strain) is applied to the coating solution, the polymer chains of the coating solution are extended, and the polymer chains that are entangled are unwound to reduce the resistance (viscosity).
In general, when the shear is increased, the polymer chain is broken at various places (structural destruction) and the viscosity is further reduced. Since the polymer chains once cut are not easily recovered, the viscosity remains for a while even after the removal of the shear. In particular, when a coating solution having a high viscosity is used as the coating solution, a problem arises that the coating amount varies in size.

  On the other hand, as shown in FIG. 5, the nozzle 50 of the present embodiment is provided with an acute angle portion 55b at the connection position P2 between the discharge connection path 69 and the flow path 61. The acute angle portion 55b feeds the coating solution toward the discharge connection path 69 while cutting out the coating solution. The above-described shear is not given to the coating solution cut out by the acute angle portion 55b, and therefore, it is possible to perform coating without applying the shear to the coating solution. That is, in the nozzle 50 of the present embodiment, it is not necessary to consider the thixotropic property of the coating liquid.

  Furthermore, as described above, in the nozzle 50, the lowest position P1 on the inner wall of the flow path 61 is formed to be lower than the connection position P2 between the discharge connection path 69 and the flow path 61. The pressure of the coating solution filled in the passage 61 tends to increase. The increased pressure preferably pushes the coating liquid toward the degassing passage 62, so that it is possible to easily obtain the cutting-out effect by the above-described acute-angled portion 55b. Further, the increased pressure described above can accelerate the discharge of air bubbles together with the coating liquid LB as shown in FIG.

  The coating liquid LB flows in the degassing passage 62 in this manner, and is discharged to the waste liquid bottles 31, 32 through the waste liquid pipes 33, 34 (see FIG. 1). The waste liquid pipes 33 and 34 also function as a degassing pipe for circulating air bubbles contained in the coating liquid LB.

  On the other hand, the pump 21 (see FIG. 1) for supplying the coating liquid into the flow path 61 pressurizes the coating liquid in the flow path 61, and this pressurization pushes the coating liquid into the discharge connection path 69. The coating liquid LA pushed out to the discharge connection path 69 is discharged from the discharge port 60 in a state where the above-described shear is not given by being cut out by the acute angle portion 55 b. Therefore, according to the present embodiment, it is possible to perform the application in which the occurrence of unevenness is suppressed without considering the thixotropic property of the coating liquid LA.

  As described above, the air bubbles contained in the coating liquid are discharged to the outside through the degassing passage 62, so that the coating liquid LA from which the air bubbles have been suitably removed is discharged from the discharge port 60.

  In the nozzle 50, since the supply path 63 and the degassing path 62 are respectively formed in a straight line, the flow of the coating liquids LA and LB as described above is smoothly performed without any delay.

  As shown in FIG. 1, the coating liquid discharged from the nozzle 50 is coated on the substrate 5 as the substrate 5 moves. That is, when the substrate 5 passes under the discharge port 60 (see FIG. 2) for discharging the coating, a coating film is formed on a predetermined region of the substrate 5.

  As described above, the nozzle 50 of the present embodiment communicates with the first nozzle main body 55 provided with the flow path 61 communicating with the discharge port 60 for discharging the application liquid and circulating the application liquid, and communicates with the flow path 61 A degassing passage 62 for discharging air bubbles contained in the liquid is provided, and a second nozzle body 56 facing the first nozzle body 55 is included.

  According to this configuration, the degassing passage 62 is provided in the second nozzle main body 56 facing the first nozzle main body 55 in which the flow passage 61 is provided, whereby the coating liquid in the flow passage 61 is transferred to the degassing passage 62. It can be distributed smoothly. Therefore, air bubbles contained in the coating liquid flowing in the flow path 61 can be easily removed. In addition, the setting freedom of the degassing passage 62 can be improved and the nozzle 50 can be made compact. In addition, since the formation regions of the flow path 61 and the degassing path 62 are dispersed into the first nozzle main body 55 and the second nozzle main body 56, it is possible to ensure the strength / rigidity balance of the entire nozzle 50.

Further, the second nozzle main body 56 is provided with the supply path 63 for supplying the application liquid to the flow path 61, thereby achieving the following effects.
According to this configuration, the degassing passage 62 and the supply passage 63 are provided in the second nozzle main body 56, so that the waste liquid pipes 33 and 34 connected to the degassing passage 62 and the supply connected to the supply passage 63 are provided. Each of the pipes 26 can be integrated on one side of the nozzle 50. Therefore, compared with the case where each of the degassing path 62 and the supply path 63 is provided in a mutually different nozzle main body, wiring of various piping can be simplified.

  Further, the supply passage 63 is located at the central portion of the first nozzle main body 55 in the nozzle longitudinal direction, so that the supply passage 63 is disposed at the end of the first nozzle main body 55 in the nozzle longitudinal direction. Thus, the coating solution can be easily filled in the entire area of the channel 61.

  Further, the flow path 61 includes a dispersion path 64 in communication with the supply path 63 and dispersing the coating liquid supplied from the supply path 63. The degassing path 62 is in communication with the dispersion path 64 so that the supply path Air bubbles contained in the coating solution flowing in the dispersion path 64 through the air passage 63 can be easily removed.

Further, the dispersion path 64 is an inclined portion 65 inclined so as to be positioned on the upper side toward the end side of the first nozzle main body 55 in the longitudinal direction of the nozzle from the communication portion with the supply path 63; The deaeration passage 62 is demarcated by a lower extension 66 that extends in a downward direction from the end of the lower portion 65, and the deaeration passage 62 is connected closer to the bend 67 of the slope 65 and the lower extension 66. , Produces the following effects.
According to this configuration, since the highest position on the inner wall of the dispersion path 64 is the position of the bending portion 67, there is no portion in the dispersion path 64 in which the air bubbles contained in the coating liquid are stagnated. It floats toward the bending portion 67 with the extending portion 66 by buoyancy. Therefore, air bubbles contained in the coating liquid flowing in the dispersion path 64 can be effectively removed.

Further, the dispersion path 64 has a symmetrical shape in the longitudinal direction of the first nozzle body 55 based on the central position of the first nozzle body 55 in the longitudinal direction of the nozzle, thereby achieving the following effects.
According to this configuration, since the flow of the coating liquid to the inside of the dispersion path 64 can be generated on both sides in the nozzle longitudinal direction, the bubbles are directed to both ends of the dispersion path 64. Therefore, air bubbles contained in the coating liquid flowing in the dispersion path 64 can be more effectively removed.

In addition, a connecting member 52 for connecting the first nozzle main body 55 and the second nozzle main body 56 is provided on the surface opposite to the discharge port 60 of the first nozzle main body 55 and the second nozzle main body 56. The nozzle 50 can be reinforced without disturbing the discharge of the coating liquid.
In addition, since the connecting member 52 is a top plate having a rectangular plate shape having the same outer shape as the outer shape of the upper surface of the nozzle main body 51, the following effects can be obtained. The upper surface of the connecting member 52 can be used as an installation space for the supply unit 20 and the waste solution unit 30.
By the way, as shown in FIG. 2, when the connecting member 52 is provided on the upper side of the nozzle 50 and the bridging member 10 b is provided on one surface side (−Y direction side) of the nozzle 50, various pipes are routed. It can be complicated. On the other hand, according to this configuration, by providing the degassing passage 62 and the supply passage 63 in the second nozzle main body 56, the waste liquid pipes 33 and 34 and the supply passage 63 connected to the degassing passage 62 are provided. Each of the supply pipings 26 to be connected can be integrated on the other surface side (+ Y direction side) of the nozzle 50. Therefore, routing of various piping can be simplified. In addition, shortening and diameter expansion of the full length of various piping extended from the installation space of the upper surface of connecting member 52 can be attained. In addition, since it is not necessary to provide the connecting member 52 with holes or the like for arranging various pipes, the strength and rigidity of the connecting member 52 can be secured.

  Further, the adjustment mechanism 70 capable of adjusting the width of the discharge port 60 is provided in the second nozzle main body 56, so that the width of the discharge port 60 can be adjusted without being in the way of the flow path 61. it can.

  Further, the adjustment mechanism 70 can adjust the width of the discharge port 60 locally in the longitudinal direction of the nozzle by including the plurality of adjustment members 71 aligned in the longitudinal direction of the nozzle.

Further, the distance between the two adjacent adjustment members 71 is narrower toward the end of the second nozzle main body 56 in the longitudinal direction of the nozzle, thereby achieving the following effects.
By the way, when the first nozzle body 55 and the second nozzle body 56 are connected at the end portions in the nozzle longitudinal direction, it is assumed that the two adjacent adjustment members 71 are equally spaced in the longitudinal direction of the second nozzle body 56 It may be difficult to adjust the width of the discharge port 60 at the end portion (connection portion). On the other hand, according to this configuration, the distance between the two adjacent adjustment members 71 is narrower toward the end of the second nozzle body 56 in the nozzle longitudinal direction, so that the first nozzle body 55 and the second nozzle body 56 can be Even when the end portions in the longitudinal direction are connected to each other, the width of the discharge port 60 can be easily adjusted at the end portion.

  The coating apparatus 1 of the present embodiment includes a substrate transport unit 2 for transporting the substrate 5, and a coating unit 3 including the nozzle 50 and coating the substrate 5 to be transported with the coating liquid from the nozzle 50.

  According to this configuration, by providing the nozzle 50, it is possible to provide the coating apparatus 1 capable of suppressing the occurrence of streaks and forming a high quality coating film.

Second Embodiment
The second embodiment is different from the first embodiment in the structure of the nozzle in the coating apparatus. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

<Nozzle details>
As shown in FIG. 9, the nozzle 250 according to the second embodiment includes a long nozzle body 251, a connecting member 52 provided on the upper end of the nozzle body 251, and a pair of nozzles provided on both ends in the longitudinal direction of the nozzle. And a side plate 53, 54.

  As shown in FIG. 10, in the nozzle main body 251, a discharge port 60 for discharging the application liquid, a flow path 261 communicating with the discharge port 60, and a discharge connection path 69 connecting the discharge port 60 and the flow path 261. , A degassing passage 62 communicating with the flow passage 261 (see FIG. 9), a supply passage 63 for supplying the application liquid to the flow passage 261, and a recessed groove 72 for adjusting the width of the discharge port 60. It is done.

  In the first nozzle main body 55, a recessed portion 255a that constitutes a flow path 261 in the nozzle 250 is provided on the surface 55f (inner side surface in the Y direction) facing the second nozzle main body 56. That is, the flow path 261 is provided in the first nozzle body 55.

As shown in FIG. 9, the flow path 261 includes a dispersion path 264 which communicates with the supply path 63 and disperses the coating liquid supplied from the supply path 63.
The dispersion path 264 is formed in a straight line along the longitudinal direction of the nozzle. The dispersion path 264 has a symmetrical shape in the longitudinal direction of the nozzle based on the central position of the first nozzle body 55 in the longitudinal direction of the nozzle.

  As shown in FIG. 8, in the second nozzle main body 56, a surface 56f (inner surface in the Y direction) facing the first nozzle main body 55 is flat. The second nozzle main body 56 is provided with a plurality of (for example, three in the present embodiment) through holes 56 a constituting the supply passage 63 and the degassing passage 62 in the nozzle 250. That is, the supply passage 63 and the degassing passage 62 are provided in the second nozzle body 56.

  As shown in FIG. 10, the supply path 63 has a linear shape extending in the thickness direction (Y direction) of the second nozzle main body 56. As shown in FIG. 9, the supply path 63 is located at the central portion of the first nozzle body 55 in the nozzle longitudinal direction. The supply passage 63 is in communication with the central longitudinal portion of the dispersion passage 264 of the first nozzle body 55.

  As shown in FIG. 8, each of the first degassing passage 62 a and the second degassing passage 62 b has a linear shape extending in the thickness direction (Y direction) of the second nozzle body 56. Each of the first degassing passage 62 a and the second degassing passage 62 b is in communication with the end of the dispersing passage 264 of the first nozzle body 55. The first degassing passage 62 a is connected to the dispersing passage 264 at the first end of the first nozzle body 55. The second degassing passage 62 b is connected to the dispersing passage 264 at the second end of the first nozzle body 55.

  In the nozzle main body 251, the lowest position P1 on the inner wall of the flow passage 261 is formed to be lower than the connection position P2 between the discharge connection passage 69 and the flow passage 261. Inside the nozzle main body 251, an acute angle portion 55b is provided at the connection position P2 between the discharge connection path 69 and the flow path 261. The acute angle portion 55 b feeds the coating liquid in the flow path 261 to the discharge connection path 69 while cutting out the coating liquid.

<Function of nozzle>
FIG. 11 is a view for explaining the operation of the nozzle 250 according to the second embodiment. In FIG. 11, the illustration of the connection member 52, the supply unit 20, the waste solution unit 30, and the like is omitted.
The coating liquid is supplied to the nozzle 250 through the supply pipe 26 connected to the nozzle 250 using the pump 21 shown in FIG. As shown in FIG. 11, the coating liquid is supplied from the supply pipe 26 (see FIG. 1) into the flow path 261 through the supply path 63. The coating solution supplied into the flow path 261 is quickly filled on both end sides of the flow path 261 in the longitudinal direction of the nozzle.

  The application liquid is pressurized by the pump 21 (see FIG. 1), and thus is pushed out toward the discharge connection path 69. In FIG. 11, the coating liquid extruded toward the discharge connection path 69 is indicated by a symbol LA, and the coating liquid extruded toward the degassing path 62 is indicated by a symbol LB.

  At this time, the nozzle 250 is formed so that the lowest position P1 on the inner wall of the flow path 261 is lower than the connection position P2 between the discharge connection path 69 and the flow path 261 in the cross-sectional view of FIG. Therefore, if the inside of the flow path 261 is not pressurized, it becomes difficult for the coating liquid to flow into the discharge connection path 69. Therefore, the coating liquid supplied into the flow path 261 is first filled over the entire area of the flow path 261 without flowing into the discharge connection path 69, and then flows into the discharge connection path 69 after the internal pressure is increased. It will be. Therefore, the difference in the discharge amount of the application liquid is unlikely to occur in the entire region of the discharge port 60 in the nozzle longitudinal direction, and the application liquid can be applied uniformly.

  As shown in FIG. 10, the nozzle 250 of this embodiment is provided with an acute angle portion 55b at the connection position P2 between the discharge connection path 69 and the flow path 261, so coating is performed without applying shear to the coating liquid. Is possible. That is, also in the nozzle 250 of the present embodiment, it is not necessary to consider the thixotropic property of the coating liquid.

  Furthermore, as described above, in the nozzle 250, the lowest position P1 on the inner wall of the flow path 261 is formed to be lower than the connection position P2 between the discharge connection path 69 and the flow path 261. The pressure of the coating solution filled in the passage 261 tends to increase. The increased pressure preferably pushes the coating liquid toward the degassing passage 62, so that it is possible to easily obtain the cutting-out effect by the above-described acute-angled portion 55b. In addition, the increased pressure described above can accelerate the discharge of air bubbles together with the coating liquid LB as shown in FIG.

  The coating liquid LB flows in the degassing passage 62 in this manner, and is discharged to the waste liquid bottles 31, 32 through the waste liquid pipes 33, 34 (see FIG. 1). The waste liquid pipes 33 and 34 also function as a degassing pipe for circulating air bubbles contained in the coating liquid LB.

  On the other hand, the pump 21 (see FIG. 1) for supplying the coating liquid L into the flow path 261 pressurizes the coating liquid in the flow path 261, and this pressurization pushes the coating liquid into the discharge connection path 69. The coating liquid LA pushed out to the discharge connection path 69 is discharged from the discharge port 60 in a state where the above-described shear is not given by being cut out by the acute angle portion 55 b. Therefore, according to the present embodiment, it is possible to perform the application in which the occurrence of unevenness is suppressed without considering the thixotropic property of the coating liquid LA.

  As described above, the air bubbles contained in the coating liquid are discharged to the outside through the degassing passage 62, so that the coating liquid LA from which the air bubbles have been suitably removed is discharged from the discharge port 60.

  In the nozzle 250, since the supply passage 63 and the degassing passage 62 are respectively formed in a straight line, the flow of the coating liquids LA and LB as described above is smoothly performed without any delay.

As described above, according to the present embodiment, the dispersion path 264 is formed linearly along the nozzle longitudinal direction, and the degassing path 62 is connected to the end of the dispersion path 264 in the nozzle longitudinal direction. The following effects are achieved.
According to this configuration, since the dispersion path 264 is formed in a straight line, the flow of the coating liquid is smoothly performed without any delay, so there is no part where air bubbles contained in the coating liquid stay in the dispersion path 264. , Bubbles are directed to the end of the dispersion path 264. Therefore, air bubbles contained in the coating liquid flowing in the dispersion path 264 can be effectively removed.

The shapes, combinations, and the like of the constituent members shown in the above-described example are merely examples, and various modifications can be made based on design requirements and the like.
For example, in the above-mentioned embodiment, although the example which arranged the feed way 63 in the central part of the 1st nozzle body 55 in the nozzle longitudinal direction was mentioned and explained, it does not restrict to this. For example, the supply path 63 may be disposed at the end of the first nozzle body 55 in the longitudinal direction of the nozzle.

  In the above embodiment, the dispersion path 64 has been described by giving an example having a symmetrical shape in the longitudinal direction of the first nozzle body 55 based on the central position of the first nozzle body 55 in the nozzle longitudinal direction. Not limited to this. For example, the dispersion path 64 may have an asymmetrical shape in the longitudinal direction of the first nozzle body 55 based on the central position of the first nozzle body 55 in the nozzle longitudinal direction.

  In the said embodiment, although the example which provided the connection member 52 in the upper surface of the nozzle main body 51 was mentioned and demonstrated, it does not restrict to this. For example, the connecting member 52 may not be provided on the upper surface of the nozzle body 51. For example, the upper surface of the nozzle body 51 may be used as an installation space for the supply unit 20 and the waste solution unit 30.

  Although the said embodiment gave and demonstrated the example which a pair of side plate 53,54 is provided in the both ends of the nozzle main body 51 in a nozzle longitudinal direction, it does not restrict to this. For example, the side plates may not be provided at both ends of the nozzle body 51 in the nozzle longitudinal direction.

  Although the said embodiment gave and demonstrated the example which provided the adjustment mechanism 70 which can adjust the width | variety of the discharge port 60 in the 2nd nozzle main body 56, it does not restrict to this. For example, the adjustment mechanism 70 may not be provided in the second nozzle body 56. For example, the adjustment mechanism 70 may be provided to the first nozzle body 55. For example, a plurality of shims having different thicknesses may be prepared, and the width of the discharge port 60 may be adjusted by replacing the shims.

  In the said embodiment, although the example provided with the slider in which the bridge member 10b can be vertically moved with respect to a pair of support | pillar member 10a was mentioned and demonstrated to the bridge | crosslinking member 10b, it does not restrict to this. For example, the stage 8 may be provided with raising and lowering pins capable of raising and lowering the substrate 6.

  In addition, each component described as an embodiment or its modification in the above can be combined suitably in the range which does not deviate from the meaning of the present invention, and some components of a plurality of combined components It is possible not to use as appropriate.

  DESCRIPTION OF SYMBOLS 1 ... Application apparatus 2 ... Board | substrate conveyance part 3 ... Application part 5 ... Board | substrate 50, 250 ... Nozzle 52 ... Connection member 55 ... 1st nozzle main body 56 ... 2nd nozzle main body 60 ... Discharge port 61, 261 ... Flow path 62 ... Removal Air passage 63: Supply passage 64, 264: Dispersed passage 65: Inclined portion 66: Downward extension portion 67: Bent portion 70: Adjustment mechanism 71: Adjustment member

Claims (12)

A first nozzle main body provided with a flow path communicating with a discharge port for discharging the coating liquid and circulating the coating liquid;
A nozzle comprising: a degassing path which is communicated with the flow path and discharges bubbles contained in the coating liquid, and includes a second nozzle body facing the first nozzle body. The nozzle according to claim 1, wherein the second nozzle body is provided with a supply path for supplying the coating liquid to the flow path. The nozzle according to claim 2, wherein the supply path is located at a central portion of the first nozzle body in a longitudinal direction of the elongated first nozzle body. The flow path is
And a dispersion path in communication with the supply path for dispersing the coating liquid supplied from the supply path,
The nozzle according to claim 2, wherein the degassing passage is in communication with the dispersion passage. The dispersion path is
An inclined portion which is inclined to be positioned on the upper side as it goes from the communication portion with the supply path to the end side of the first nozzle body in the longitudinal direction of the long first nozzle body;
And a downwardly extending portion which is bent and extended downward from the end of the inclined portion in the longitudinal direction of the first nozzle body,
The nozzle according to claim 4, wherein the degassing passage is connected to a bent portion of the inclined portion and the downward extending portion. The dispersion path is formed in a straight line along the longitudinal direction of the long first nozzle body,
The nozzle according to claim 4, wherein the degassing passage is connected to an end of the dispersion passage in a longitudinal direction of the first nozzle body. The dispersion path has a symmetrical shape in the longitudinal direction of the first nozzle body based on the central position of the first nozzle body in the longitudinal direction of the elongated first nozzle body. The nozzle according to any one of the preceding claims. A connecting member for connecting the first nozzle main body and the second nozzle main body is provided on the surface of the first nozzle main body and the second nozzle main body opposite to the discharge port. The nozzle according to any one of the preceding claims. The nozzle according to any one of claims 1 to 8, wherein an adjustment mechanism capable of adjusting the width of the discharge port is provided in the second nozzle body. The nozzle according to claim 9, wherein the adjustment mechanism includes a plurality of adjustment members aligned in the longitudinal direction of the elongated second nozzle body. The nozzle according to claim 10, wherein a distance between two adjacent adjustment members is narrower toward an end side of the second nozzle body in a longitudinal direction of the second nozzle body. A substrate transfer unit for transferring a substrate;
A coating apparatus comprising: the nozzle according to any one of claims 1 to 11; and a coating unit that applies a coating liquid from the nozzle to the substrate being transported.

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