JP2019089044A - Glass plate manufacturing method - Google Patents

Abstract

To provide a glass plate having excellent surface quality in such a manner that adhesion of a fine particle onto a surface of the glass plate is prevented or suppressed as much as possible.SOLUTION: This glass plate manufacturing method comprises: a cleaning process S2 in which first liquid 19, 20 is supplied to a glass plate G, thereby cleaning the glass plate G; and a drying process S3 in which a gas 26 is blown to the glass plate G which is introduced into a drying treatment chamber 12 and is transported on a prescribed transport path L in the drying treatment chamber 12, thereby removing the first liquid 19, 20 from the glass plate G. In a state that second liquid 32 is located at a bottom of the drying treatment chamber 12, the gas 26 is blown to the glass plate G, thereby performing draining and drying.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a method for producing a glass plate, and more particularly to a technique for preventing adhesion of fine particles to the surface of the glass plate when the glass plate is removed by washing the glass plate and then drying the glass plate.

  For example, when manufacturing a glass plate including a glass substrate for a liquid crystal display, the glass plate cut out from a molded glass plate (formed plate) is subjected to processing such as end face processing, and then the glass plate is washed. At the same time, the cleaning liquid adhering to the surface of the glass plate at the time of cleaning is removed by blowing air with an air knife or the like (liquid removal) to dry the glass plate (see, for example, Patent Document 1) . In addition, after passing through these series of operations, the presence or absence of foreign substances remaining (adhering) on the obtained glass plate is inspected.

JP 2014-38914 A

  As described above, in the inspection step, the presence or absence of foreign matter such as glass powder adhering to the surface of the glass plate is inspected, and the number of foreign matter may be measured. Here, the foreign matter to be measured is classified into a plurality of levels according to its size, and among them, the foreign matter of the minimum level (less than 1.0 μm) (hereinafter, referred to simply as fine particles in the present specification). ) Tend to be detected. It is difficult to completely remove this kind of fine particles before the inspection step, and for example, as described in Patent Document 1, even if the surface of the glass plate is washed and then it is drained and dried by an air knife. Among the glass plates after drying, there were those in which an extremely large number of fine particles were attached to the surface. As a matter of course, the adhesion of the fine particles is a factor that reduces the surface quality of the glass plate, so the adhesion of the fine particles should be avoided.

  In view of the above circumstances, in the present specification, it is a technical problem to be solved by the present invention to provide a glass plate excellent in surface quality by reducing adhesion of fine particles to the surface of the glass plate.

  The solution to the above problems is achieved by the method for producing a glass sheet according to the present invention. That is, in this manufacturing method, the first liquid is supplied to the glass plate to wash the glass plate, and the glass plate carried in the drying processing chamber and transported on a predetermined transport path in the drying processing chamber. And a drying step of removing the first liquid from the glass plate, wherein the glass plate is formed in a state where the second liquid is disposed at the bottom of the drying processing chamber. It is characterized by the point which blows a gas on.

  As a result of investigating the relationship between the air flow and the behavior of the fine particles in the drying processing chamber when the present inventor performs the above-described cleaning and draining and drying, the following findings have been obtained. That is, when the drying after the cleaning described above is carried out in the drying processing chamber, the glass plate carried into the drying processing chamber is drained (cleaning liquid or rinse) by a gas blowing device such as an air knife disposed in the drying processing chamber. Removal of liquid etc.) is performed. At this time, the gas supplied from the gas blowing device to the glass plate causes turbulent flow in the drying processing chamber, and this turbulent flow is removed from the surface of the glass plate together with the first liquid (cleaning liquid etc.) It was found that the fine particles that had settled to the bottom of the chamber soak up. From the above, it is inferred that the adhesion of the fine particles to the surface of the glass plate is due to the irregular flow (turbulence) generated in the drying processing chamber by the blowing of the gas onto the glass plate.

  The present invention has been made based on the above findings, and in performing cleaning and drying of the glass plate with the first liquid, the glass plate in a state in which the second liquid for capture is disposed at the bottom of the drying processing chamber. I tried to blow the gas. As described above, the fine particles removed from the glass plate together with the cleaning liquid and the like are removed by performing the liquid removal by blowing the gas under the environment where the second liquid is disposed at the bottom of the drying processing chamber to be set in the dry environment , By the second liquid. Therefore, even if the turbulent flow resulting from the blowing of the gas occurs in the drying processing chamber, the settled fine particles hardly get on the turbulent flow and fly up. Therefore, it is possible to provide a glass plate excellent in surface quality by reducing adhesion of fine particles while drying the glass plate efficiently by removing the cleaning solution in the drying processing chamber. In addition, since the second liquid is supplied to the bottom of the drying treatment chamber, the opportunity for the glass plate to come into contact with the second liquid can be eliminated as much as possible. Therefore, it is possible to prevent, as much as possible, the deterioration of the surface quality of the glass plate caused by disposing the second liquid in the drying processing chamber. In addition, as means other than the capture by the second liquid, for example, after exhausting the gas in the drying processing chamber and passing the exhausted gas through a predetermined filter to remove particulates, a means for returning it back to the drying processing chamber is also considered. However, with this method, a large amount of exhaust capacity is required, and complicated exhaust systems and high cost can not be avoided. On the other hand, according to the particle capturing means of the present invention, the adhesion of the particles to the surface of the glass plate can be reduced only by maintaining the state in which the second liquid is disposed at the bottom of the drying processing chamber. It is not necessary equipment. As mentioned above, according to this invention, it becomes possible to improve the surface quality of a glass plate, avoiding cost increase. In addition, a 1st liquid means the liquid supplied to a glass plate at a washing | cleaning process, and in below-mentioned embodiment, a washing | cleaning liquid and a rinse liquid correspond to a 1st liquid.

  Moreover, in the manufacturing method of the glass plate which concerns on this invention, you may spray gas on a glass plate in the state by which the bottom part in a drying process chamber is covered with a 1st liquid and a 2nd liquid.

  By covering the bottom in the drying processing chamber with the first liquid and the second liquid in this manner, fine particles settled in the drying processing chamber can be captured without leakage and reliably. In addition, it is possible to reliably prevent the second liquid from rising due to the influence of turbulent flow or the like and touching the glass plate. As mentioned above, according to this structure, a glass plate can be dried, reducing adhesion of the microparticles | fine-particles to a glass plate further.

  In the method of manufacturing a glass plate according to the present invention, the second liquid may be pure water.

  It is general that the drying processing room manages the cleanliness higher than the cleaning processing room. Therefore, by using pure water as the second liquid, the fine particles floating and settling in the atmosphere are captured without deteriorating the cleanliness of the atmosphere in the drying processing room, and the adhesion to the surface of the glass plate is reduced. It becomes possible.

  In the method of manufacturing a glass plate according to the present invention, the second liquid disposed at the bottom may be replaced by supplying the second liquid into the drying processing chamber and discharging the second liquid out of the drying processing chamber.

  Thus, by replacing the liquid disposed at the bottom of the drying processing chamber, the captured microparticles can be discharged together with the second liquid. Thereby, the cleanliness of the drying processing chamber can be maintained in a high state.

  As described above, according to the present invention, it is possible to provide a glass plate excellent in surface quality by reducing adhesion of fine particles to the surface of the glass plate.

It is a flowchart which shows the procedure of the manufacturing method of the glass plate which concerns on 1st embodiment of this invention. It is a side view of the washing and drying device of the glass board concerning a first embodiment of the present invention. It is a side view of the washing and drying apparatus of the glass plate used for comparison with this invention. It is a side view of the washing and drying device of the glass board concerning a second embodiment of the present invention. It is AA sectional drawing of the washing-drying apparatus shown in FIG.

  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. 1 to 3.

  In the method of manufacturing a glass plate according to the present embodiment, as shown in FIG. 1, a processing step S1 of performing predetermined processing on the glass plate, a cleaning step S2 of cleaning the glass plate subjected to the predetermined processing, and cleaning And drying step S3 of drying the glass plate by removing the cleaning liquid adhering to the glass plate, and inspection step S4 of inspecting the presence or absence of foreign matter such as fine particles adhering to the surface of the glass plate after drying. In the processing step S1, the end face of the glass plate is processed, for example, by a grindstone. As a pre-process of processing process S1, you may provide the cutting process which cuts out the glass plate of a desired size from a shaping | molding original plate. The following description will focus on the washing step S2 and the drying step S3.

  FIG. 2 is a side view showing the overall configuration of the washing and drying apparatus 10 used in the washing step S2 and the drying step S3. As shown in FIG. 2, the cleaning and drying apparatus 10 includes a cleaning processing chamber 11 and a drying processing chamber 12, and the transport path L of the glass plate G crosses the cleaning processing chamber 11 and the drying processing chamber 12. Provided. In this case, transport apparatuses 13 and 14 for transporting the glass sheet G along the transport path L are disposed in the cleaning processing chamber 11 and the drying processing chamber 12. Each of the transfer devices 13 and 14 is configured by, for example, a roller conveyor.

  In the present embodiment, the cleaning processing chamber 11 has a first cleaning chamber 15 and a second cleaning chamber 16. Among these, the first cleaning chamber 15 has a cleaning roller 17 that rubs the surfaces Ga and Ga of the glass plate G to remove dirt such as foreign matter attached to the surfaces Ga and Ga. In the present embodiment, the pair of upper and lower cleaning rollers 17 is disposed at a position facing each other via the conveyance path L of the glass sheet G. The cleaning roller 17 may be one in which the contact portion with the glass plate G is formed of an elastic material such as a sponge, or may be formed by a brush. In the former case, the cleaning roller 17 is a sponge roller, and in the latter case, the cleaning roller 17 is a brush roller.

  Further, in the first cleaning chamber 15, a cleaning solution supply device 18 is disposed. In this case, the direction and width of the supply port (not shown) of the cleaning liquid supply device 18 so that the cleaning liquid 19 (first liquid) is supplied to the entire surface Ga of the glass plate G passing on the transport path L. Direction dimensions, supply flow rate, etc. are set. Here, the “width direction” in the present specification refers to a direction coincident with the width direction of the glass sheet G transported on the transport path L. In addition, for example, pure water can be used as the cleaning solution 19, and a detergent, a surfactant, alkaline ionized water, sodium hypochlorite, etc. may be added as needed.

  The second cleaning chamber 16 is located downstream of the first cleaning chamber 15 on the transport path L, and the surfaces Ga and Ga of the glass plate G carried from the first cleaning chamber 15 into the second cleaning chamber 16 It has the rinse liquid supply apparatus 21 which supplies the rinse liquid (rinse liquid) 20 which is one liquid. Also in this case, the direction and width direction dimension of the supply port (not shown) of the rinse liquid supply device 21 so that the rinse liquid 20 is supplied to the entire surface Ga, Ga of the glass plate G passing above the transport path L. Supply flow rate etc. are set. As the rinse solution 20, it is possible to use a known type of rinse liquid such as pure water.

  The cleaning solution 19 supplied to the glass plate G flows down to the bottom portion 15 a of the first cleaning chamber 15. Therefore, although not shown, the bottom portion 15a is provided with a drain port for draining the cleaning solution 19 that has flowed out, in the bottom portion 15a. Further, the cleaning liquid 19 and the rinse liquid 20 supplied to the glass plate G flow down to the bottom portion 16 a of the second cleaning chamber 16. Therefore, although not shown, the bottom portion 16a is provided with a drain port for draining the cleaning solution 19 and the rinse liquid 20, which flow down, in the bottom portion 16a.

  The drying processing chamber 12 has a liquid removal chamber 22 and a first drying chamber 23 located downstream of the liquid removal chamber 22 on the transport path L. In the present embodiment, the drying processing chamber 12 further includes a second drying chamber 24 on the downstream side of the transport path L than the first drying chamber 23. A partition 25 is provided between the liquid removal chamber 22 and the first drying chamber 23. This limits the flow of the atmosphere or the like of the liquid removal chamber 22 into the first drying chamber 23. Since the cleaning solution 19 and the rinse solution 20 supplied in the cleaning step remain on the glass plate G carried into the solution removal chamber 22, the rinse solution 20 and the like are removed at the bottom 22 a of the solution removal chamber 22. run down. For this reason, the bottom 22 a of the liquid removal chamber 22 is covered with the rinse liquid 20 or the like to be in a wet state. Under the present circumstances, although illustration is abbreviate | omitted, you may provide the drain port for draining the rinse solution 20 grade which flows down in the bottom part 22a.

  In the first drying chamber 23, a gas spraying device 27 for spraying a predetermined gas 26 (for example, clean dry air etc.) toward the surfaces Ga and Ga of the glass plate G carried into the first drying chamber 23 is provided. It is arranged. In the present embodiment, the gas spraying device 27 is a pair of upper and lower air knives 28, and the transport path L of the glass sheet G is located between the pair of air knives 28, 28. Here, the dimension in the width direction of the supply port 28 a of each air knife 28 is set to such a size that the gas 26 can be sprayed over the entire surface Ga, Ga of the glass plate G passing between the pair of air knives 28, 28. Further, the angle of the supply port 28a of each air knife 28 is set to such a size that the gas 26 can be sprayed onto the surface Ga of the glass plate G from the first drying chamber 23 side toward the liquid removal chamber 22 side. In the illustrated example, the gas 26 is sprayed to the surfaces Ga and Ga of the glass plate G at a position closer to the liquid removal chamber 22 than the boundary position between the liquid removal chamber 22 and the first drying chamber 23 (the position of the partition 25). The pair of air knives 28, 28 are disposed so that the gas 26 is sprayed on the surface Ga at the boundary position between the liquid removing chamber 22 and the first drying chamber 23 (between the upper and lower partitions 25, 25). A pair of air knives 28, 28 may be disposed in

  A partition 29 is provided between the first drying chamber 23 and the second drying chamber 24. As a result, the internal space of the first drying chamber 23 and the internal space of the second drying chamber 24 are partitioned, so that the atmosphere or the like of the first drying chamber 23 is limited to flow into the second drying chamber 24. For this reason, the cleanliness of the second drying chamber 24 can be made higher than the cleanliness of the first drying chamber 23.

  In the second drying chamber 24, a gas spraying device 30 for spraying a predetermined gas 26 toward the surfaces Ga and Ga of the glass plate G carried into the second drying chamber 24 is disposed. In the present embodiment, the gas spraying device 30 is a pair of upper and lower air knives 31 and 31, and the transport path L of the glass sheet G is located between the pair of air knives 31 and 31. Here, the dimension in the width direction of the supply port 31 a of each air knife 31 is set to such a size that the gas 26 can be sprayed over the entire surface Ga, Ga of the glass plate G passing between the pair of air knives 31, 31. Further, the angle of the supply port 31a of each air knife 31 is set to a size that allows the gas 26 to be sprayed onto the surface Ga of the glass plate G from the second drying chamber 24 side toward the first drying chamber 23 side. The angle of the supply port 31 a of each air knife 31 may be the same as or different from the angle of the supply port 28 a of each air knife 28 in the first drying chamber 23. In the illustrated example, the gas 26 is applied to the surfaces Ga and Ga of the glass plate G at a position closer to the first drying chamber 23 than the boundary position (the position of the partition 29) between the first drying chamber 23 and the second drying chamber 24. A pair of air knives 31, 31 are arranged to be sprayed, but the gas 26 is sprayed on the surface Ga at the boundary position between the first drying chamber 23 and the second drying chamber 24 (between the upper and lower partitions 29, 29). A pair of air knives 31, 31 may be arranged to be able to Alternatively, the pair of air knives 31 and 31 may be arranged such that the gas 26 is blown to the surface Ga at a position closer to the second drying chamber 24 than the boundary position.

  At the bottom 23 a of the first drying chamber 23 and the bottom 24 a of the second drying chamber 24, a liquid 32 (second liquid) for capturing particles is disposed. In the present embodiment, the bottom 23 a of the first drying chamber 23 and the bottom 24 a of the second drying chamber 24 are covered with the layered liquid 32. The liquid 32 is not a drop of the first liquid such as the rinse liquid 20 remaining on the glass plate G, but is separately supplied to the bottom 23 a of the first drying chamber 23 and the bottom 24 a of the second drying chamber 24. It is a thing.

  As the liquid 32 for trapping fine particles, any kind of liquid can be used as long as the fine particles 33 can be captured. For example, various pure waters such as ion exchanged water, distilled water, industrial pure water, etc. is there. Alternatively, a surfactant may be added to the liquid 32 for the purpose of further improving the trapping ability of the microparticles 33. Specifically, one obtained by adding a surfactant to the above-described pure water may be used as the liquid 32.

  Next, an example of the washing step S2 and the drying step S3 using the washing and drying apparatus 10 configured as described above will be described together with the operation and effects of the present invention.

(S2) Cleaning Step In this step, the glass plate G which has been subjected to predetermined processing (at least one or more of end surface processing, surface treatment, etc.) in the processing step S1 is washed and dried so that the most upstream side of the transport path L is located. When carried into the first cleaning chamber 15 of the apparatus 10, the cleaning apparatus 19 supplies the cleaning solution 19 from the cleaning solution supply apparatuses 18 and 18 toward the surfaces Ga and Ga of the glass plate G transported on the transport path L by the transport apparatus 13. . As a result, the surfaces Ga and Ga of the glass plate G become wet with the cleaning liquid 19. Then, the glass sheet G in this state is conveyed to the pair of cleaning rollers 17 located on the downstream side of the cleaning liquid supply devices 18, and the surfaces Ga of the glass sheet G are rubbed with the cleaning rollers 17. . As a result, foreign substances such as fine particles 33 attached to the surfaces Ga and Ga are scraped off. After that, the glass plate G is carried into the second cleaning chamber 16 by the transfer device 13. In the second cleaning chamber 16, the rinse liquid 20 is supplied from the rinse liquid supply device 21 toward the surfaces Ga and Ga of the glass plate G conveyed on the conveyance path L by the conveyance device 13. , Ga wash away the cleaning solution 19 and foreign matter. After that, the glass plate G is discharged by the transfer device 13 out of the second cleaning chamber 16.

(S3) Drying Step Subsequently, the glass plate G discharged to the outside of the second cleaning chamber 16 by the transfer device 13 is subsequently carried into the drying processing chamber 12 by the transfer device 14, more precisely, into the liquid removal chamber 22. Then, the gas 26 is sprayed from the pair of air knives 28 and 28 as the gas spraying device 27 toward the surfaces Ga and Ga of the glass plate G immediately before being carried from the liquid removal chamber 22 to the first drying chamber 23. As a result, the rinse liquid 20 (also a small amount of the washing liquid 19 in some cases) remaining on the surfaces Ga and Ga of the glass plate G and the foreign matter containing the fine particles 33 are blown away. The blown particles 33 settle toward the bottom 22 a of the drainage chamber 22 or the bottom 23 a of the first drying chamber 23.

  The glass sheet G thus drained is subsequently conveyed in the first drying chamber 23 by the conveying device 14, and the surface of the glass sheet G immediately before being carried from the first drying chamber 23 to the second drying chamber 24. A gas 26 is blown toward Ga and Ga from a pair of air knives 31 and 31 as the gas blowing device 30. As a result, foreign substances including the rinse liquid 20 and the like and the particles 33 remaining on the surfaces Ga and Ga of the glass plate G are blown away. The blown particles 33 settle toward the bottom 23 a of the first drying chamber 23 or the bottom 24 a of the second drying chamber 24. As described above, the surfaces Ga and Ga of the glass plate G are in a dry state by removing the rinse solution 20 and the like and the foreign matter containing the fine particles 33.

  Here, for example, as shown in FIG. 3, in the case where the liquid 32 is not disposed in the first drying chamber 23 and the second drying chamber 24 of the drying processing chamber 12, on the upstream side of the air knives 28, 28, Most of the rinse liquid 20 and the like supplied to the glass plate G flows down, so that the rinse liquid 20 and the like only slightly flow downstream of the air knives 28 and 28. Therefore, most of the bottom 23a of the first drying chamber 23 and the bottom 24a of the second drying chamber 24 are in a dry state.

  The fine particles 33 blown off with the rinse liquid 20 and the like by the pair of air knives 28, 28 (31, 31) settle, and do not contact with the liquid 32 on the bottom 23a of the first drying chamber 23 or in the second drying chamber 24. Deposit on the bottom 24a. On the other hand, when the gas 26 is blown toward the glass plate G from the pair of air knives 28, 28 (31, 31), turbulence 34 is caused in the first drying chamber 23 or the second drying chamber 24. is there. The turbulent flow 34 blows away from the surfaces Ga and Ga of the glass plate G, so that the fine particles 33 on the bottoms 23 a and 24 a in the dry state fly up and reattach to the surfaces Ga and Ga of the glass plate G.

  On the other hand, in the method of manufacturing a glass plate according to the present invention, the gas 26 is sprayed to the glass plate G in a state where the liquid 32 is disposed at the bottom of the drying processing chamber 12 (see FIG. 2). In this case, the bottom of the drying processing chamber 12 is wetted by the liquid 32. For this reason, when the fine particles 33 are removed from the glass plate G and sedimented, they are captured by the liquid 32. Therefore, even if the turbulent flow 34 (see FIG. 3) due to the blowing of the gas 26 is generated in the first drying chamber 23 or the second drying chamber 24, the settled fine particles 33 are less likely to fly up by the turbulent flow 34. Become. Therefore, it is possible to provide the glass plate G excellent in surface quality by reducing the adhesion of the fine particles 33 while removing the cleaning solution 19 and the rinse solution 20 efficiently and draining and drying the glass plate G. . Further, since the liquid 32 for capturing the fine particles 33 is disposed at the bottom of the drying processing chamber 12, the opportunity for the glass plate G and the liquid 32 to be in contact can be eliminated as much as possible. Therefore, it is possible to prevent, as much as possible, the deterioration of the surface quality of the glass plate G caused by disposing the liquid 32 in the drying processing chamber 12. Further, according to this method, the adhesion of the particles 33 can be reduced only by disposing the liquid 32 at the bottom of the drying processing chamber 12, so that simple equipment is required. As mentioned above, according to this invention, it becomes possible to improve the surface quality of the glass plate G, avoiding cost increase.

  Further, in the present embodiment, the bottom of the liquid removal chamber 22 is covered with the rinse liquid 20 or the like, and the bottoms 23a and 24a of the first and second drying chambers 23 and 24 are covered with the liquid 32 (see FIG. 2) . Therefore, the bottom of the drying processing chamber 12 is covered with the first liquid (the cleaning liquid 19 and the rinse liquid 20) and the second liquid 32, and the fine particles 33 precipitated in the bottom of the drying processing chamber 12 are not leaked. And it can be captured reliably. From the above, it is possible to drain and dry the glass plate G while further reducing the adhesion of the fine particles 33 to the glass plate G. Therefore, the surface quality of the glass plate G can be improved without variation.

(S4) Inspection Step The glass plate G subjected to the cleaning and drying as described above is transported to the inspection step, and the presence and number of foreign substances remaining on the surface Ga of the glass plate G are measured and evaluated by a predetermined inspection device. The measurement of the presence and the number of foreign substances also includes the measurement of the number of microparticles 33. Then, for example, if the number of particles 33 (the number per unit area) measured is equal to or less than the threshold value, it is transported to the packing and shipping process as satisfying the shipping standard.

  As mentioned above, although 1st embodiment of this invention was described, of course, the manufacturing method of the glass plate which concerns on this invention is not limited to the form of the said illustration. The manufacturing method can take various forms within the scope of the present invention.

  FIG. 4 is a side view showing the overall configuration of a washing and drying apparatus 40 according to a second embodiment of the present invention. The washing and drying apparatus 40 is different from the first embodiment shown in FIG. 2 in that the first and second drying chambers 23 and 24 are provided with a configuration for replacing the liquid 32. Specifically, one or more supply ports 41 for supplying the liquid 32 onto the bottom portion 23a are provided below the side portions of the first drying chamber 23, and the liquid 32 is discharged to the bottom portion 23a. One or more exhaust ports 42 are provided. The discharge port 42 is connected to the filtration device 43, and the liquid 32 discharged from the discharge port 42 to the outside of the first drying chamber 23 is filtered by the filtration device 43. Then, as shown in FIG. 5, the liquid 32 from which foreign matter such as fine particles 33 and the like has been removed by filtration is pressure-fed by the pump 44 toward the supply port 41, and is again supplied onto the bottom 23a. Similar to the first drying chamber 23, the second drying chamber 24 is also provided with an exchange structure of the liquid 32 including the supply port 41, the outlet 42, the filtering device 43, and the pump 44. The arrangement of the filtration device 43 and the pump 44 may be interchanged. In other words, after the liquid 32 discharged from the pump 44 is allowed to pass through the filtration device 43, it is supplied onto the bottom 23a through the supply port 41. It is also good.

  As described above, by replacing the liquid 32 supplied to the bottom of the first and second drying chambers 23 and 24, it is possible to discharge the particulates 33 captured together with the liquid 32. Thereby, the cleanliness of the first and second drying chambers 23 and 24 can be maintained in a high state. In particular, as shown in FIG. 5, the liquid 32 is circulated and supplied onto the bottom portion 23a (24a) by the exchange structure including the supply port 41 and the discharge port 42, and the filtering device 43 and the pump 44. With the limited amount of equipment and the amount of liquid 32, the cleanliness of the first and second drying chambers 23, 24 can be maintained at a high level.

  In addition, as an arrangement | positioning form of the liquid 32, it is not limited to the form arrange | positioned in the layer illustrated in FIG. 2 etc. For example, the liquid 32 may be arranged in a spotted manner by spraying the liquid 32 in the form of droplets onto the bottom of the drying processing chamber 12. Alternatively, the liquid 32 may be disposed in a layered manner by spraying the liquid drop 32 in the bottom of the drying processing chamber 12. In order to further reduce the adhesion of the fine particles 33 to the glass plate G, it is preferable to arrange the liquid 32 in a layer form. Further, the arrangement area of the liquid 32 may be an area in the dry state (an area where the first liquid such as the rinse liquid 20 does not flow) in the bottom of the drying processing chamber 12.

  When the bottom of the drying processing chamber 12 is covered with the first liquid and the second liquid, the bottom 22a of the liquid removal chamber 22 is covered with the first liquid such as the rinse liquid 20 as in the above embodiment. It is not limited to the form which covers the bottom 23a of the first drying room 23 and the bottom 24a of the second drying room 24 with the second liquid 32. For example, a part or all of the bottom of the drying processing chamber 12 may be covered with a mixture of the first liquid and the second liquid 32.

10, 40 Cleaning and Drying Device 11 Cleaning Processing Chamber 12 Drying Processing Chamber 13, 14 Conveying Device 15 First Cleaning Chamber 16 Second Cleaning Chamber 17, 17 Cleaning Roller 18 Cleaning Liquid Supply Device 19 Cleaning Liquid (First Liquid)
20 Rinsing fluid (first fluid)
21 rinse liquid supply device 22 liquid removing chamber 23 first drying chamber 23a bottom 24 second drying chamber 24a bottom 25 partition 26 gas 27, 30 gas sprayer 28, 31 air knife 32 liquid (second liquid)
33 fine particles 34 turbulent flow 41 supply port 42 outlet 43 filtration device 44 pump G glass plate Ga surface L transport path

Claims (4)

Supplying a first liquid to the glass plate to wash the glass plate;
A drying step of blowing a gas onto a glass plate carried into a drying treatment chamber and conveyed on a predetermined conveyance path in the drying treatment chamber to remove the first liquid from the glass plate Method,
The manufacturing method of the glass plate which sprays the said gas on the said glass plate in the state by which the 2nd liquid is arrange | positioned at the bottom part of the said drying process chamber.   The manufacturing method of the glass plate of Claim 1 which sprays the said gas on the said glass plate in the state by which the bottom part in the said drying process chamber is covered with the said 1st liquid and the said 2nd liquid.   The method according to claim 1, wherein the second liquid is pure water.   The glass plate according to any one of claims 1 to 3, wherein the second liquid disposed in the bottom portion is replaced by supplying the second liquid into the drying processing chamber and discharging the second liquid out of the drying processing chamber. Manufacturing method.

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