JP2019086362A - Laser device and method for adjusting gain of laser device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser device capable of suppressing deterioration of driving characteristics when rotating a laser beam emission direction in a predetermined direction, and a gain adjusting method for the laser device. A laser tracker 10 is a first motor 161 that rotates a laser interferometer 14 that emits laser light and a laser interferometer 14 based on an input drive command about a first axis and a second axis. And the second motor 171 and the first encoder 162 and the second encoder 172 that detect the rotation angle of the laser interferometer 14, and the first motor 161 and the second motor by the drive command to rotate the laser light source to the origin position at a constant speed. The laser is controlled by the gain setting means 155 that sets the gain from the rotation speed of the laser interferometer when the 171 is driven, and the first motor 161 and the second motor 171 based on the gain set by the gain setting means 155. A first control unit 151 and a second control unit 152 for rotating the interferometer are provided. [Selection diagram] Fig. 2

Description

  The present invention relates to a laser apparatus for emitting laser light and a gain adjustment method of the laser apparatus, and more particularly, to a laser tracker for causing a laser light to track a target and a gain adjustment method thereof.

Conventionally, a laser apparatus (for example, a laser tracker etc.) which irradiates a laser beam to a target is known (for example, refer to patent documents 1).
The laser device described in Patent Document 1 is a laser tracker that emits a laser beam to a retroreflector provided on a moving body, and changes the irradiation direction of the laser beam so as to track the moving body.
Specifically, this laser tracker is reflected by a laser interferometer, a two-axis rotation mechanism that directs the optical axis direction of the laser beam (emission light) output from the laser interferometer in an arbitrary direction, and a retroreflector. And a detection sensor that detects an optical axis deviation of the return light (reflected light). The laser tracker detects the deviation between the emitted light and the incident light by the detection sensor, performs feedback control of the two-axis rotation mechanism so that the emitted light and the incident light are coaxial, and emits the light to the center of the retroreflector Track so that is illuminated.

JP, 2009-229066, A

By the way, in the laser device in which the emission direction of the laser beam is controlled to be rotated around the rotation axis by the rotation shaft mechanism, the friction coefficient of the bearing of the rotation axis gradually changes due to aging or the like. In such a case, the rotational speed at the time of inputting a predetermined drive signal to the motor of the rotation mechanism also changes, so there is a problem that the drive characteristics at the time of rotating the emission direction of the laser light in the predetermined direction deteriorate.
In particular, in the laser tracker as described in Patent Document 1, it is necessary to control the emission direction of the laser light so as to track the retroreflector. However, for example, when the coefficient of friction of the bearing becomes low, the irradiation position of the laser beam moves beyond the retroreflector, and when the coefficient of friction becomes high, the irradiation position of the laser beam can not catch up with the movement of the retroreflector, Tracking performance is degraded. For this reason, in the conventional laser tracker, in order to solve such a problem, the operator samples the speed signal related to the rotational speed of the laser interferometer that is detected when the two-axis rotation mechanism is step-driven. It was necessary to manually adjust the gain of the drive control system of the two-axis rotation mechanism by confirming the signal waveform.

  An object of the present invention is to provide a laser device capable of suppressing a decrease in drive characteristics when rotating the emission direction of laser light in a predetermined direction, and a method of adjusting the gain of the laser device.

  The laser apparatus according to the present invention comprises: a laser light source for emitting a laser beam; an angle adjustment means for rotating the laser light source about a predetermined reference axis based on an input drive command; and the reference axis Angle detection means for detecting the rotation angle of the laser light source from the home position, and the laser light source when the drive command for rotating the laser light source to the home position at a predetermined constant speed is output to the angle adjustment means A gain setting unit configured to set a gain from the rotational speed of the motor, and a control unit configured to control the rotation of the laser light source by the angle adjustment unit based on the gain set by the gain setting unit. .

In the present invention, the laser device includes the laser light source and the angle adjusting means for rotating the laser light source about the reference axis, and the control means is the angle adjusting means based on the gain set by the gain setting means. Control the rotation of the laser light source. Then, the gain setting means sets the gain based on the rotational speed of the laser light source when performing the origin detection operation of rotating the laser light source to the home position at a constant drive speed.
That is, in a laser apparatus which emits laser light at a predetermined angle, the emission angle of the laser light source by the angle adjustment means is usually detected by the angle detection means, and the irradiation direction of the laser light is adjusted to a desired direction. In such a laser device, before the direction control of the laser light, in order to detect the origin position of the angle detection means (for example, a rotary encoder or the like), an origin detection operation of moving the laser light source to the origin position is performed. In the present invention, when performing such an origin detection operation, a drive signal for rotating the laser light source at a constant speed is output to the angle adjustment means, and the gain is calculated based on the rotation speed of the laser light source at that time. adjust. That is, in the origin detection operation, the gain is decreased when the detected rotational speed is faster than the instructed speed, and the gain is increased when the detected rotational speed is lower than the instructed speed.
Thereby, for example, even when the change in the coefficient of friction occurs in the rotation shaft of the angle adjustment means for rotating the laser light source due to aging and the bearing thereof, the change in the coefficient of friction is dealt with before the control of the laser light direction. Thus, the gain of the drive control system of the angle adjustment means can be adjusted to an appropriate value, and a decrease in drive characteristics when rotating the emission direction of the laser light in a predetermined direction can be suppressed.

  In the laser device according to the present invention, the angle adjusting means has a first axis as the reference axis and a second axis intersecting the first axis, and rotates the laser light source about the first axis as a rotation center. And a second angle adjustment means for rotating the laser light source about the second axis, wherein the gain setting means is based on a rotation speed of the laser light source about a first axis. Preferably, a gain for the first angle adjustment means is set, and a gain for the second angle adjustment means is set based on a rotational speed of the laser light source about a second axis.

In the present invention, the angle adjustment means is a two-axis rotation mechanism whose center of rotation is the first axis and the second axis, and the emission direction of the laser light source can be aligned with any direction in the three-dimensional space. In the present invention, the gain setting means sets gains for each of the first angle adjustment means for rotating the laser light source about the first axis and the second angle adjustment means for rotating the laser light source about the second axis. Do.
For this reason, even if the variation of the coefficient of friction in the bearing configuration of the rotating shaft in the first angle adjusting means and the variation of the coefficient of friction in the bearing configuration of the rotating shaft in the second angle adjusting means are different from each other, the respective coefficients of friction It is possible to set an appropriate gain corresponding to the change of.

In the laser apparatus according to the present invention, the laser light source is a laser interferometer that measures a distance from the interference of the laser light emitted to the target and the laser light reflected from the target, The laser interferometer is an optical axis detection sensor that detects an amount of deviation of the optical axis between the emitted light that is laser light emitted from the laser interferometer and the reflected light that is the laser light reflected by the target. It is preferable that the control unit controls the driving of the angle adjustment unit such that the amount of deviation becomes equal to or less than a predetermined value.
In the present invention, the amount of deviation of the optical axis between the laser light (emitted light) emitted from the laser light source and the laser light (reflected light) reflected from the target is detected, and the control means has a predetermined amount of deviation. The drive of the angle adjustment means is controlled so as to be as follows. In such a laser device, the laser light from the laser light source can be traced to the target.
As described above, in the case of moving the laser light so as to track the target, if the friction coefficient of each bearing mechanism of the angle adjusting means due to aging changes, the tracking performance to the target is degraded. On the other hand, in the present invention, when the origin detection operation is performed, the gain relating to the drive control system of the angle adjustment means is set to an optimal value, thereby achieving tracking performance when tracking the target with laser light. It can be improved.

In the laser apparatus according to the present invention, preferably, the control means outputs the drive command for moving the laser light source to the home position at a predetermined constant speed when the power is turned on, to the angle adjusting means.
In the present invention, when the power supply of the laser device is turned on, the control means carries out the origin detection operation, and the gain is set based on the rotational speed around each axis of the angle adjustment means detected at that time. That is, in the present invention, an appropriate gain is set each time the power of the laser device is turned on, and the deterioration of the drive characteristic of the angle adjusting means due to the aged deterioration can be more reliably suppressed.

A gain adjustment method of a laser device according to the present invention comprises: a laser light source for emitting a laser beam; an angle adjustment means for rotating the laser light source about a predetermined reference axis based on an input drive command; And a method of adjusting the gain of a laser apparatus comprising: angle detection means for detecting a rotation angle of the laser light source from an origin position set to an axis, wherein the laser light source is rotated to the origin position at a predetermined constant speed. Setting a gain based on the amount of change in angle per unit time detected by the angle detection means in the origin detection step of detecting the origin by outputting the drive command to the angle adjustment means to detect the origin; Performing a gain setting process.
In the present invention, as in the above invention, when the origin is detected by the origin detection step (origin detection operation), the angle is detected based on the amount of change in angle per unit time (that is, the rotation speed) detected by the angle detection means. The gain of the drive control system of the adjustment means is set. Therefore, in the bearing mechanism of the rotating shaft of the angle adjusting means, even when the change of the friction coefficient due to aging or the like occurs, the appropriate gain corresponding to the change of the friction coefficient is adjusted before the direction control of the laser light. It is possible to suppress the deterioration of the drive characteristics when rotating the emission direction of the laser light in a predetermined direction.

The figure which shows schematic structure of the laser tracker of 1st embodiment. The figure which shows the control structure of the laser tracker of 1st embodiment. 6 is a flowchart showing a gain adjustment method in the laser tracker of the first embodiment. The flow chart which shows speed signal passing response evaluation and gain adjustment processing. The flowchart which shows the gain adjustment method in the laser tracker of 2nd embodiment.

First Embodiment
Hereinafter, a first embodiment of the present invention will be described.
[Device configuration]
FIG. 1 is a view showing a schematic configuration of a laser tracker 10 of the present embodiment. FIG. 2 is a schematic view showing a control configuration of the laser tracker 10 of the present embodiment.
In FIG. 1, the laser tracker 10 of the present embodiment corresponds to the laser device of the present invention, and the laser tracker 10 tracks the dynamic position of a target 31 supported so as to move freely in a three-dimensional space. , Measuring the three-dimensional position, and measuring the distance from the laser tracker 10 to the target 31. The target 31 is supported via a head 30 by a movement mechanism (not shown) which can move in three dimensions. As a specific example of such a mechanism, for example, a machine tool, a three-dimensional measuring device or the like in which a main shaft moves three-dimensionally with respect to a table may be mentioned.
The target 31 is a retroreflector and is attached to the head 30. The target 31 may be another retroreflector.

The laser tracker 10 has a base 11, a first support 12, a second support 13, a laser interferometer 14, and a controller 15.
The base 11 is mounted (or fixed) on a stage 32 such as, for example, a machine tool or a three-dimensional measurement device.
The first support portion 12 is rotatably supported by the first rotation mechanism 16 (see FIG. 2) with respect to the base 11 with the first axis L1 (reference axis) as the center of rotation. The first axis L1 is, for example, an axis orthogonal to the top surface of the stage 32.
The second support portion 13 is rotatably supported by the second rotation mechanism 17 (see FIG. 2) with respect to the first support portion 12 with the second axis L2 (reference axis) as a rotation center. The second axis L2 is an axis that intersects (orthogonal to in the present embodiment) the first axis L1.
The intersection of the first axis L1 and the second axis L2 is a measurement reference point M by the laser tracker 10.

The first rotation mechanism 16 is, as shown in FIG. 2, a first motor 161 constituting the angle adjusting means and the first angle adjusting means of the present invention, and a first encoder 162 constituting the angle detecting means of the present invention; It is comprised including. In addition, the first rotation mechanism 16 has a first bearing mechanism 163 that rotatably supports the first support 12 with respect to the base 11.
The first motor 161 is a motor that rotates the first support 12 around the first axis L1. The first encoder 162 is, for example, a rotary encoder, and detects the rotation angle (azimuth θ) of the first support 12 from the first origin position (θ = 0 °).
Similarly, the second rotation mechanism 17 is configured to include a second motor 171 constituting the angle adjustment means of the present invention and the second angle adjustment means, and a second encoder 172 constituting the angle detection means of the present invention. Be done. In addition, the second rotation mechanism 17 includes, for example, a second bearing mechanism 173 that rotatably supports the second support 13 with respect to the first support 12.
The second motor 171 is a motor that rotates the second support portion 13 about the second axis L2. The second encoder 172 is, for example, a rotary encoder, and detects the rotation angle (elevation angle φ) of the second support 13 from the second origin position (φ = 0 °).

The laser interferometer 14 is supported by the second support portion 13 and emits laser light (emission light) toward the direction (azimuth θ, elevation φ) specified by the two rotation mechanisms 16 and 17. The laser light (reflected light) retroreflected by the light source is received, and the change in the distance between the measurement reference point M and the target 31 is measured from the interference between the irradiated light and the reflected light.
The laser interferometer 14 also includes an optical axis detection sensor 141 (see FIG. 2) that detects the main optical axis of the emitted light and the main optical axis of the reflected light. As this optical axis detection sensor 141, for example, a sensor with a conventional configuration described in Japanese Patent Application Laid-Open No. 2007-309677 can be used, and each of the emitted light and the reflected light is detected by the semitransparent mirror as a light spot position It is possible to exemplify a configuration in which the element is reflected and the light spot position detecting element detects the amount of deviation from the position of the spot position of the emitted light and the position of the spot position of the reflected light.

As shown in FIG. 2, the control unit 15 includes a first control unit 151 and a second control unit 152 which are connected to the optical axis detection sensor 141. The first control unit 151 and the second control unit 152 correspond to the control means of the present invention, and the first control unit 151 and the second control unit 152 are configured such that the shift amount of the optical axis between the emitted light and the reflected light detected by the optical axis detection sensor becomes zero. The first motor 161 and the second motor 171 are feedback controlled.
In addition, a first programmable gain amplifier (hereinafter referred to as a first PGA 153) is provided between the first control unit 151 and the first motor 161, and between the second control unit 152 and the second motor 171. A second programmable gain amplifier (hereinafter referred to as a second PGA 154) is provided.

Furthermore, the control unit 15 includes gain setting means 155 for setting the gains of the first PGA 153 and the second PGA 154.
The gain setting means 155 samples the velocity signal output from the first encoder 162 and the velocity signal output from the second encoder 172 in the origin detection operation, and evaluates these velocity signals as a velocity signal transient response. And set the gain based on the evaluation result. Details of the method of setting the gain by the gain setting unit 155 will be described later.

[Gain adjustment method in laser tracker 10]
Next, a gain adjustment method in the above-described laser tracker 10 will be described.
FIG. 3 is a flowchart showing a gain adjustment method in the present embodiment.
In the laser tracker 10 of the present embodiment, for example, when the power is turned on by the operation of the operator, the control unit 15 switches the drive mode of the laser tracker 10 to the initialization mode (step S1), and detects the origin (origin Start the detection process).
In this origin detection operation, the control unit 15 moves the angle (azimuth θ and elevation φ) of the laser interferometer 14 toward the origin position (θ ₀ , φ ₀ ) (= (0 °, 0 °)). (Step S2). At this time, the control unit 15 outputs, to the first motor 161 and the second motor 171, a drive command to rotate the laser interferometer 14 at a preset constant speed (reference speed). The reference speed in the azimuthal direction driven by the first motor 161 (first reference speed) and the reference speed in the elevation direction driven by the second motor 171 (second reference speeds) are different from each other. It may be.

  Next, the gain setting means 155 performs sampling of the velocity signal (velocity signal transient response) in the rotational movement of the laser interferometer 14 in step S2 (step S3). The sampling of the velocity signal transient response can be obtained, for example, by counting the number of pulses per unit time (angle change amount) of the detection signal output from the first encoder 162 or the second encoder 172. The velocity signal transient response of the angular velocity in the azimuth direction can be detected based on the detection signal from the first encoder 162, and the velocity signal transient response of the angular velocity in the elevation direction can be detected based on the detection signal from the second encoder 172. The sampled speed signal transient response is stored in a storage circuit such as a memory (not shown) provided in the control unit 15.

After that, when the azimuth angle θ of the laser interferometer 14 becomes θ = θ ₀ (= 0 °) and the elevation angle φ becomes φ = φ ₀ (= 0 °), it is assumed that the origin is detected, the first motor 161 and The driving of the second motor 171 is stopped, that is, the movement of the laser interferometer 14 is stopped (step S4).

Then, the gain setting means 155 reads out the velocity signal transient response stored in the memory, evaluates the transient response, and sets the gain (step S5; gain setting step). FIG. 4 is a flow chart showing a method of evaluating the speed signal transient response.
In step S5, the gain setting means 155 first determines whether the velocity signal transient response overshoots (step S51).
When it is determined Yes in step S51, the friction coefficient of the first bearing mechanism 163 of the first rotation mechanism 16 and the second bearing mechanism 173 of the second rotation mechanism 17 is small, and the rotation speed of the laser interferometer 14 is However, since the speed is higher than the reference speed, the gain is decreased (step S52).

On the other hand, when it is determined No in step S51, the gain setting unit 155 determines whether the time constant of the speed signal transient response becomes equal to or more than a predetermined value (step S53).
When it is determined Yes in step S53, the friction coefficient of the bearing (not shown) in the first rotation mechanism 16 is large, and the time until the rotational speed of the laser interferometer 14 reaches the reference speed is lengthened. Therefore, the gain is increased (step S54).
If it is determined No in step S53, the gain is not changed, assuming that the gain set by the current first PGA 153 or second PGA 154 is an optimal value (step S55).

The evaluation of the above-mentioned velocity signal transient response is performed in both the azimuth direction and the elevation direction. That is, the gain of the first PGA 153 is set by determining the velocity signal transient response in the azimuth direction based on the detection signal output from the first encoder 162. For example, when the velocity signal transient response in the azimuth direction overshoots, the gain of the first PGA 153 is decreased by a preset value. When the time constant of the velocity signal transient response in the azimuth direction is equal to or greater than a predetermined value, the gain of the first PGA 153 is increased by a preset value.
Further, the determination of the velocity signal transient response in the elevation direction based on the detection signal output from the second encoder 172 similarly sets the gain of the second PGA 154.

After the above, in step S5, the control unit 15 determines whether or not the gain has been changed (step S6). When it is determined Yes in step S6 (gain change is present), the control unit 15 drives the first motor 161 and the second motor 171 by, for example, a preset drive amount to set the laser interferometer 14 to a predetermined position. It is moved (step S7), and the process returns to step S2. That is, the origin detection operation is performed again, and it is determined whether the set gain is optimal based on the speed signal transient response sampled at that time.
By repeatedly performing the above process until it is determined as No in step S6, the gain related to the drive control of the first rotation mechanism 16 and the second rotation mechanism 17 is set to the lowest value. Then, if it is determined No in step S6, the origin detected in step S4 is determined as the origin (step S8), and the initialization mode is ended (step S9).

[Operation and effect of this embodiment]
In the laser tracker 10 of the present embodiment, the laser interferometer 14 is moved at a constant reference speed in the origin detection operation of detecting the origin position by rotating the laser interferometer 14 to the origin position. Then, the gain setting means 155 decreases the gain when the velocity signal transient response in the origin position detection operation overshoots, and increases the gain when the time constant of the velocity signal transient response is long. As a result, in the first bearing mechanism 163 of the first rotation mechanism 16 and the second bearing mechanism 173 of the second rotation mechanism 17, even if the variation of the friction coefficient due to aging or the like occurs, the influence is optimally canceled. Control gain can be set. Therefore, the fall of the tracking performance at the time of making the target 31 track by the laser tracker 10 can be suppressed.

  In the present embodiment, the gain setting unit 155 sets the gain of the first PGA 153 by the speed signal transient response based on the detection signal from the first encoder 162 that detects the rotation angle in the azimuth direction. Also, the gain of the second PGA 154 is set by the speed signal transient response based on the detection signal output from the second encoder 172 that detects the rotation angle in the elevation direction. As a result, the gain for drive control of the first motor 161 corresponding to the azimuth direction and the gain for drive control of the second motor 171 corresponding to the elevation direction can be appropriately set.

  In the present embodiment, the control unit 15 switches the operation mode to the initialization mode when the power is turned on, and performs the origin detection operation. Therefore, the gain of the drive control system of the first rotation mechanism 16 or the second rotation mechanism 17 can be set to an optimal value before the tracking process of causing the laser tracker 10 to track the target 31. In addition, since gain adjustment is performed each time when the power is turned on, deterioration in tracking performance due to aging deterioration can be reliably suppressed.

Second Embodiment
Next, a second embodiment of the present invention will be described.
In the first embodiment described above, the gain adjustment is performed based on the velocity signal transient response after moving the laser interferometer 14 to the origin position in steps S2 to S4. On the other hand, the present embodiment is different from the first embodiment in that gain adjustment is performed after step S2 to step S4.
In addition, since the laser tracker 10 of this embodiment has a structure similar to 1st embodiment mentioned above, detailed description of each structure is abbreviate | omitted. Also in the following description, the same components are denoted by the same reference numerals, and the description thereof is omitted or simplified.

FIG. 5 is a flowchart showing a gain adjustment method of the laser tracker 10 of the present embodiment.
As shown in FIG. 5, in the present embodiment, as in the first embodiment, when the laser tracker 10 is powered on, the control unit 15 switches the operation mode to the initialization mode in step S1, and step S2 As shown in FIG. 5, the laser interferometer 14 is rotationally moved toward the home position at a constant reference speed. Also, as shown in step S3, a speed signal transient response from the start of movement is detected.

Furthermore, in the present embodiment, the control unit 15 measures an elapsed time from the start of movement in step S2. Then, the control unit 15 determines whether or not a predetermined time has elapsed from step S2 (step S11).
If it is determined Yes in step S11, the movement of the laser interferometer 14 is temporarily stopped (step S12), and gain adjustment by evaluation of the speed signal transient response shown in step S5 (steps S51 to S55 of the first embodiment) Conduct. After that, the process returns to step S2, and the laser interferometer 14 is moved again to the origin position from the position where it has been temporarily stopped, and the velocity signal transient response is detected.
Further, in step S11, when the determination is No, the control unit 15 determines whether the origin position is detected (step S13), and when the determination in step S13 is No, the process returns to step S11. .
That is, in the present embodiment, movement and pause are periodically repeated until the laser interferometer 14 moves to the home position, and gain adjustment based on the speed signal transient response detected each time the pause is performed is performed. Be done.

  On the other hand, if it is determined Yes in step S13, the processes of steps S4 to S9 are performed as in the first embodiment. That is, evaluation and gain adjustment of the velocity signal transient response detected between the position at which the motor was temporarily stopped in step S12 and the home position are finally performed.

  Although the example shown in FIG. 5 shows an example in which the laser interferometer 14 is moved to an arbitrary position in step S7 and gain adjustment processing is repeated again when it is determined in step S6 that gain change is present. It is not restricted to this. In the present embodiment, since the gain adjustment is performed by periodically evaluating the speed signal transient response a plurality of times, the processes of steps S6 and S7 may be omitted.

[Operation and effect of this embodiment]
In the present embodiment, in the origin detection operation, the gain adjustment is performed by periodically repeating the rotation and stop of the laser interferometer 14. In this case, for example, as compared with the case where the gain adjustment is performed after moving the laser interferometer 14 to the origin position, the laser can be converged to the optimum gain earlier, and the time for the gain adjustment can be shortened.

[Modification]
The present invention is not limited to the embodiment described above, and modifications and the like of the range in which the object of the present invention can be achieved are included in the present invention.
For example, in the above embodiment, as the laser device of the present invention, a device for tracking the laser light with respect to the target 31 and measuring the distance between the target 31 and the measurement reference point M is illustrated, but it is not limited thereto.
For example, a laser tracking device that does not have a length measurement function and only tracks the target 31 may be used. That is, instead of the laser interferometer 14 of the above embodiment, a laser tracking sensor having a laser light source for emitting laser light and an optical axis detection sensor for detecting the amount of deviation between the emitted light and the reflected light may be used. .

  Moreover, although the structure which rotates the laser interferometer 14 by azimuth angle (theta) and elevation angle (phi) was illustrated in the said embodiment by the biaxial rotation mechanism, it is not limited to this. For example, when the target 31 is displaced only in the azimuthal direction, the second rotation mechanism 17 may not be provided to rotationally move the laser interferometer 14 in the elevation direction. In this case, the laser interferometer 14 may be rotated at a constant speed in the origin detection operation for detecting the first origin position, and the gain may be set by the speed signal transient response at that time.

In the above embodiment, the control unit 15 switches the initialization mode to the operation mode at power on to perform the origin detection operation, and shows an example of adjusting the gain based on the speed signal transient response at that time. It is not limited to.
For example, when the origin detection operation for detecting the origin position is instructed by the operation of the operator, the same processing as that of the above embodiment may be performed to perform the gain adjustment. In this case, it is possible to cope with the change in the friction coefficient of each of the rotation mechanisms 16 and 17 due to the long-term use of the laser tracker 10.

  INDUSTRIAL APPLICABILITY The present invention can be used for a laser device, a laser tracker, and the like that change the emission direction of a laser beam by rotating a laser light source for emitting a laser beam or a laser interferometer around a rotation axis.

  DESCRIPTION OF SYMBOLS 10 ... Laser tracker (laser apparatus), 11 ... Base, 12 ... 1st support part, 13 ... 2nd support part, 14 ... Laser interferometer (laser light source), 15 ... Control part, 16 ... 1st rotation mechanism, 17 ... second rotation mechanism, 31 ... target, 141 ... optical axis detection sensor, 151 ... first control unit (control means), 152 ... second control unit (control means), 153 ... first PGA, 154 ... second PGA , 155: gain setting means, 161: first motor (angle adjustment means, first angle adjustment means), 162: first encoder (angle detection means), 163: first bearing mechanism, 171: second motor (angle adjustment) Means, second angle adjusting means) 172: second encoder (angle detecting means) 173: second bearing mechanism L1: first axis (reference axis) L2: second axis (reference axis)

Claims (5)

A laser light source for emitting laser light;
Angle adjustment means for rotating the laser light source about a predetermined reference axis based on the input drive command;
Angle detection means for detecting a rotation angle of the laser light source from an origin position set to the reference axis;
Gain setting means for setting a gain from the rotational speed of the laser light source when the drive command for rotating the laser light source to the home position at a predetermined constant speed is output to the angle adjustment means;
A control unit configured to control the rotation of the laser light source by the angle adjustment unit based on the gain set by the gain setting unit. In the laser device according to claim 1,
The angle adjustment means has a first axis as the reference axis and a second axis intersecting the first axis, and rotates the laser light source about the first axis as a rotation center, And second angle adjusting means for rotating the laser light source about the second axis as a rotation center,
The gain setting means sets a gain for the first angle adjusting means based on the rotational speed of the laser light source about the first axis, and the second angle based on the rotational speed of the laser light source about the second axis. A laser device characterized by setting a gain for the adjusting means. In the laser device according to claim 2,
The laser light source is a laser interferometer that measures the distance from the laser light emitted to the target and the laser light reflected from the target to the target,
The said laser interferometer is an optical axis detection sensor which detects deviation | shift amount of the optical axis of the emitted light which is a laser beam radiate | emitted from the said laser interferometer, and the reflected light which is a laser beam reflected by the said target, Equipped with
The control device controls the drive of the angle adjustment device such that the amount of displacement is equal to or less than a predetermined value. The laser device according to any one of claims 1 to 3.
The laser device, wherein the control means outputs the drive command to move the laser light source to the home position at a predetermined constant speed when the power is turned on. Laser light source for emitting laser light, angle adjustment means for rotating the laser light source about a predetermined reference axis based on an input drive command, and the laser from an origin position set to the reference axis A gain adjustment method of a laser device comprising: angle detection means for detecting a rotation angle of a light source;
An origin detection step of detecting the origin by outputting the drive command for rotating the laser light source to the origin position at a predetermined constant speed to the angle adjustment unit;
A gain setting step of setting a gain based on an angle change amount per unit time detected by the angle detection means in the origin point detection step;
And adjusting the gain of the laser device.

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