JP2019075112A - Individual flow rate controller for a plurality of valve units - Google Patents

Abstract

To accurately control flow rate fluctuation of a manifold connecting a plurality of valve units to a common pipe.SOLUTION: A flow rate of cooling water and a permitted fluctuation range 42 of each of valve units 12 are defined, the flow rate of cooling water discharged from an individual pipe 16 is detected, and upon detection of great flow rate fluctuation, a flow rate setting part 34 sets optimum valve opening and a valve opening control part 36 drives a driving motor 28 into rotation and adjusts valve opening. After the flow rate fluctuation detection, a timing control part 30 controls timing of the valve opening adjustment. Delaying the timing of the valve opening adjustment by predetermined time prevents control variation caused by simultaneously adjusting opening of all the valve units 12 upon the detection of the great flow rate fluctuation.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an individual flow control device which individually and optimally controls the flow rate of cooling water discharged by a plurality of valve units constituting a manifold.

  For example, in a semiconductor control device, piping of cooling water for cooling each part of the device is disposed in a complicated manner. The amount of cooling water supplied to each part of the device is various. Patent Document 1 describes a technique relating to a manifold in which a flow meter is installed in each system in order to monitor fluctuations in the amount of cooling water supplied from the common pipe to each part of the apparatus through the plurality of branch pipes (Patent Document 1) ).

Japanese Patent Application Publication No. 2007-56975

The known prior art has the following problems to be solved.
Manually operated valves are attached to the manifold branch pipes as described above. While watching the flow meter, the attendant operates the valve to adjust the amount of cooling water supplied to each branch pipe to an optimum value. When the entire semiconductor device operates normally, these valves are rarely operated. However, when stopping the operation of any device, the cooling water supplied to the device may be stopped.

  A common water pressure is supplied to the common piping of the manifold. The cooling water is distributed to each branch pipe. Here, when one of the branch piping valves is closed or the closed valve is opened, the water pressure flowing into the other branch piping may greatly fluctuate. And, the coolant flow rate of any branch piping may deviate from the set value.

In this case, the person in charge checks the flow rate of each branch pipe and operates the valve to adjust the water volume. However, the adjustment operation is not easy because the adjustment of the valve of each branch piping affects the amount of water discharged from the other branch piping. If the person in charge is absent or the adjustment operation takes time, for example, the amount of cooling water in any of the branch pipes may be insufficient to cause a problem.
The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide an individual flow control device which individually and optimally controls the flow rates of cooling water discharged from a plurality of branch pipes constituting a manifold. Do.

The following configurations are means for solving the above-mentioned problems.
<Configuration 1>
A plurality of valve units are connected to a common piping, and the discharge flow rate of the cooling water discharged from the common piping toward the individual piping is adjusted by a valve element provided inside each valve unit,
A control unit is provided for controlling the opening degree of the valve body for each valve unit,
Each control unit is
A flow rate detector that detects the flow rate of the cooling water discharged from the individual piping;
A storage device storing a target value of the flow rate of the cooling water to be discharged from the individual pipe and a fluctuation allowable range of the flow rate of the cooling water;
When the flow rate of the cooling water discharged from the individual piping detected by the flow rate detector deviates from the fluctuation allowable range, it is monitored as it is for a predetermined time T1 and when it still deviates from the fluctuation allowable range, cooling A flow rate setting unit for setting a valve opening degree for correcting the flow rate of water to be within a fluctuation allowable range;
A drive motor that rotationally drives the valve body through the conduction mechanism to adjust the valve opening degree;
A valve opening control unit that controls the drive motor to adjust the valve opening set by the flow rate setting unit;
Even if the valve opening degree is adjusted by the valve opening degree control unit set by the flow rate setting unit, if the flow rate of the cooling water still deviates from the fluctuation allowable range, the process newly waits for a predetermined time T2, A separate flow control device for a plurality of valve units constituting a manifold, characterized by comprising a timing control unit 30 which requests the valve opening control unit to adjust the valve opening set by the flow rate setting unit again. .

<Configuration 2>
A plurality of valve units are connected to a common pipe, and the flow rate of the cooling water flowing from the individual pipes toward the common pipe is adjusted by the valve element provided inside each valve unit,
A control unit is provided for controlling the opening degree of the valve body for each valve unit,
Each control unit is
A flow rate detector that detects the flow rate of the cooling water flowing from the individual pipe to the common pipe;
A storage device storing a target value of the flow rate of the cooling water to be flowed from the individual pipe toward the common pipe and a fluctuation allowable range of the flow rate of the cooling water;
When the flow rate of the cooling water flowing from the individual pipe to the common pipe detected by the flow rate detector deviates from the fluctuation allowable range, it is monitored as it is for a predetermined time T1 and still deviates from the fluctuation allowable range A flow rate setting unit for setting a valve opening degree for correcting the flow rate of the cooling water to fall within the fluctuation allowable range when the
A drive motor that rotationally drives the valve body through the conduction mechanism to adjust the valve opening degree;
A valve opening control unit that controls the drive motor to adjust the valve opening set by the flow rate setting unit;
Even if the valve opening degree is adjusted by the valve opening degree control unit set by the flow rate setting unit, if the flow rate of the cooling water still deviates from the fluctuation allowable range, the process newly waits for a predetermined time T2, A separate flow control device for a plurality of valve units constituting a manifold, characterized by comprising a timing control unit 30 which requests the valve opening control unit to adjust the valve opening set by the flow rate setting unit again. .
<Configuration 3>
When a plurality of valve units connected to the common piping execute the adjustment of the valve opening in duplicate, the time T2 is set to be equal to or longer than the time for the adjusted flow to stabilize for a predetermined time An individual flow control device of a plurality of valve units according to the constitution 1 or 2, which constitutes a manifold.
<Configuration 4>
The standby time T2 for the flow rate setting unit to control the flow rate again is set individually for each valve unit in accordance with the flow rate or water pressure to be controlled. Individual flow control device of a plurality of valve units according to any of the above.

<Effects of configurations 1 and 2>
When the valves of any one of the valve units are opened or shut off, the timing of valve adjustment of each other valve unit is properly controlled. Recovery is possible.
<Effect of Configuration 3>
After all the valve units complete the first flow adjustment first and then the water pressure fluctuation settles and becomes stable, then the valve units that detect that the adjustment is insufficient are controlled to readjust the flow, which is wasteful. Readjustment can be suppressed.
<Effect of Configuration 4>
The waiting time from the adjustment of the flow rate fluctuation to the readjustment of the flow rate can be set to different values depending on the cooling water flow rate controlled by the valve unit and the degree of water pressure applied thereto.

(A) is an external appearance perspective view of the manifold of Example 1, (b) is a functional block diagram of the one part. FIG. 2 is a longitudinal cross-sectional view of the main part of the manifold of Example 1; It is explanatory drawing of the operation example of the timing control part of said apparatus. (A) is an explanatory view of a characteristic operation example of the timing control unit of the above apparatus, and (b) is a comparative example. FIG. 7 is an example of a piping diagram using the manifold of Example 1; FIG. 16 is an example of a piping diagram using the manifold of Example 2; FIG. 7 is a functional block diagram of a valve unit of Example 2; FIG. 7 is a longitudinal cross-sectional view of the main part of the manifold of Example 2;

Fig.1 (a) is an external appearance perspective view of the manifold which implemented this invention, (b) is a functional block diagram of the one part. Moreover, FIG. 2 is a longitudinal cross-sectional view of the principal part.
As shown in FIG. 1A, in the manifold of the embodiment, ten valve units 12 are connected to a common pipe 14, for example. Each valve unit 12 detects the flow rate of the cooling water discharged by the flow rate detector 11, respectively, and the opening degree of the valve is automatically adjusted by the dedicated control unit 10. The vertical sectional view of the valve unit 12 is shown on the right side of the drawing of FIG. 1 (b), and the block diagram of the control unit 10 is shown on the left side thereof.

  As shown in FIG. 1 (b), the valve unit 12 includes a valve body 20 and a housing 18. The valve body 20 rotates the screw portion 24 to increase or decrease the opening area of the flow path closed by the tapered portion 22. Thereby, the cooling water of the set flow rate can be discharged through the individual pipe 16.

  The valve body 20 is rotated by the drive motor 28 through the conduction mechanism 26. A microcomputer is incorporated in the control unit 10. The microcomputer includes a known CPU and a storage device, and functions as a flow rate setting unit 34, a valve opening control unit 36, and a timing control unit 30. The flow rate detector 11 is for detecting the flow rate of the cooling water discharged from the individual pipe 16 and is a known mechanical or electrical water quantity detection device. In the storage device of the microcomputer, a target value 43 of the coolant flow rate and a fluctuation allowable range 42 are stored.

  The target value 43 of the coolant flow rate is numerical data specifying the value that each valve unit 12 should discharge from the individual pipe. For example, 5 liters per minute is set. The fluctuation allowable range 42 is numerical data indicating how much flow fluctuation is permitted for the specified cooling water flow rate 40. For example, it sets so that it may be plus / minus 0.5 liter every minute. These numerical values are preset for each valve unit 12.

  The flow rate setting unit 34 reads the target value 43 of the coolant flow rate from the storage device at the time of activation of the device, and transmits a signal indicating the valve opening degree in the initial state to the valve opening degree control unit 36. The valve opening control unit 36 receives this signal and controls the drive motor 28 to set the amount of cooling water discharged from the individual pipe 16 to a set value. This process is performed for all valve units 12 when the device is started.

  For example, when the valve of one of the valve units 12 (for example, V3 in FIG. 2) is closed or opened after the device starts operating, the other valve units 12 (V1, V2, V4, V5,. The flow rate of the cooling water of the individual piping 16 of · · · fluctuates. The flow rate detector 11 monitors the flow rate of the cooling water discharged from the individual pipe 16, detects its fluctuation, and outputs it to the flow rate setting unit 34. The flow rate setting unit 34 refers to the fluctuation allowable range 42 stored in the storage device, and controls the valve opening degree control unit 36 to adjust the valve opening degree when the fluctuation of the flow rate deviates from the allowable range. Output a signal.

  For example, the flow rate setting unit 34 compares the detected flow rate of the cooling water discharged from the individual pipe 16 with the preset target value 43 of the cooling water flow rate, and adjusts the valve opening degree to adjust the difference. Calculate the adjustment amount of For example, if the valve is rotated 60 degrees clockwise, it is calculated that this difference can be made zero.

  It is assumed that a constant amount of cooling water is supplied from the common piping 14 at a constant water pressure. When the valve of one of the valve units 12 is closed, the flow velocity of the cooling water discharged from the individual piping 16 of the other valve units 12 is increased, and the discharge flow rate per unit time is increased accordingly. At this time, the valve opening degree for restoring the flow rate discharged from the individual pipe 16 may be calculated from the relationship between the flow rate before the change in flow rate and the flow rate after the change in flow rate.

  When the above calculation result is input from the flow rate setting unit 34 to the valve opening control unit 36, the valve opening control unit 36 rotationally drives the drive motor 28. The rotation of the drive motor 28 is transmitted to the valve body 20 through the conduction mechanism 26, and the valve opening degree is changed according to the adjustment amount.

  When general feedback control is performed, the target value 43 is set, the flow rate of discharge from the individual pipe 16 is monitored, and the flow rate detection and adjustment are repeated without increasing or decreasing the opening of the valve. Should be close to the target value 43. However, when all the valve units 12 connected to the common pipe 14 perform such control all at once, the respective valves affect each other to repeat adjustment, and it takes a long time to reach the optimum value. . When the adjustment operation time of the valve unit 12 and the control unit 10 is long in a manifold having a large number of individual pipes, wasteful power is consumed and also the durability of the movable part is affected.

  For example, if control units 10 of all valve units 12 are connected to a network, calculation processing is performed by a server etc., adjustment amounts are calculated at once and coordinated control is performed, but optimum control becomes possible, but the structure is complicated. And the cost increases. As in the present invention, when all the valve units 12 and the control units 10 are independent, for example, the number of connection of the valve units 12 as shown in FIG. 1 can be increased or decreased freely without restriction. There is. The following control is performed to take advantage of this effect.

FIG. 3 is an explanatory view of an operation example of the timing control unit of the above apparatus.
The vertical axis of this figure shows the flow rate of the cooling water, and the horizontal axis shows the elapsed time. For example, it is assumed that the flow rate changes at time t1 for some reason. Here, first, it waits for time T1 until time t2. The reason for this control is that, if any valve responds with a temporary fluctuation, the other valves also react under the influence thereof, and a flutter occurs wastefully. This can also be said to be an inherent control method of the plurality of valve units 12 that receive the supply of cooling water from the common pipe 14.

  On the other hand, when the steady state deviating from the fluctuation allowable range again at time t3 and waiting for T1 continues, the flow rate of the cooling water is adjusted to fall within the fluctuation allowable range. do. In the example of the figure, the fluctuation is almost settled after time t4. When the flow rate fluctuates in the increasing direction, the flow rate may be lowered excessively in an attempt to reduce the flow rate greatly. However, if the amount of cooling water supplied is below a certain level, the device to be cooled is not sufficiently cooled, which causes a major problem. Therefore, it is preferable to set a lower limit value of the amount of cooling water and to control so as not to fall below this.

FIG. 4A is an explanatory view of a characteristic operation example of the timing control unit of the above apparatus, and FIG. 4B is a comparative example.
The most characteristic operation of the control unit 10 of the present invention will be specifically described with reference to this figure. The format of this figure is similar to that of FIG. For example, assume that another valve is closed at time t1. As a result, the flow rate of the cooling water increased rapidly. Here, first, it waits for time T1 until time t2. It is as control of FIG.

  Then, if it is detected that the flow rate of the cooling water deviates from the fluctuation allowable range even after T1 time is calculated, at time t2, calculation is performed from the difference between the detected water amount of the cooling water and the target value, Adjust the valve opening to lower the flow rate by W1. Although this W1 is an adjustment amount up to the target value, it may be within the fluctuation allowable range.

  At this time, since the other valve units 12 affected also adjust the valve opening degree, the coolant flow rate fluctuates irregularly for a while. That is, each valve unit 12 executes the adjustment of the valve opening in duplicate. Therefore, even if the valve opening degree is adjusted to lower the flow rate by W1, it may not reach the fluctuation allowable range. Here, it waits for time T2 from time t2 to time t3. The standby time T2 may be set to a time until the adjusted flow rate stabilizes for a predetermined time, for example, T3. In this example, the process waits for time T3 until time t4.

  If the first flow rate adjustment of all the valve units connected to the common pipe is almost completed, the flow rate detector 11 detects the cooling water flow rate again at time t4. Then, calculation is performed from the difference between the flow rate and the target value, and the valve opening degree is adjusted so as to lower the flow rate by W2. Here, as shown in FIG. (A), the flow rate falls within the fluctuation tolerance range.

  That is, after the flow rate setting unit 34 performs the flow rate adjustment for the first time, the standby time T2 for controlling the flow rate again is almost complete when the first flow rate adjustment for all valve units connected to the common pipe 14 is performed. It is considered best to set at a certain level or more for the time until the flow rate stabilizes. If the response of each control unit 10 is fast, this waiting time can be set sufficiently short, so that there is no problem in the cooling performance.

  By the control as described above, it becomes possible to stabilize, in the shortest time, the fluctuation of the flow rate occurring in the other valve units by opening and closing any valve of the manifold in which a large number of valve units are connected to the common piping. The above standby times T1 and T2 may be common to all valve units, but can be different values according to the flow rate of the cooling water controlled by the valve unit and the degree of the water pressure applied thereto. For example, it may be set individually according to the flow rate of the valve unit, or according to the water pressure applied to the individual pipe, or according to the structure, diameter, etc. of the individual pipe.

  In the above-described embodiment, when the cooling water is discharged from the common piping toward the individual piping, the fluctuation of the water pressure flowing into each individual piping is suppressed. This principle can also be applied to the case where cooling water flows from the target equipment to which the cooling water is supplied through the individual piping to the common piping.

FIGS. 5 and 6 show examples of piping systems for cooling various target devices.
In the example of FIG. 5, the cooling water pumped from the cooling water tank 44 using the pump 45 is supplied to the plurality of valve units 12 already described through the common pipe 14 after passing through the filter 46. The cooling water supplied from the valve unit 12 to the target device 47 through the individual piping 16 is returned to the cooling water tank 44 when the cooling is completed. Although the cooling water flows from the common pipe 14 through the valve unit 12 into the flow rate detector 11 in this figure, the cooling water flows from the common pipe 14 through the flow rate detector 11 into the valve unit 12 in a reversed arrangement. I do not care.

  On the other hand, in the example of FIG. 6, the cooling water pumped from the cooling water tank 44 using the pump 45 is branched after passing through the filter 46 and supplied to the target device 47. The flow rate detector 11 and the valve unit 12 are provided downstream of the target device 47. The cooling water that has passed through the valve unit 12 flows into the common pipe 14. Then, the cooling water is returned to the cooling water tank 44 from the common pipe 14. Although the cooling water flows from the target device 47 through the flow rate detector 11 into the valve unit 12 in this figure, the cooling water may flow from the target device 47 through the valve unit 12 into the flow rate detector 11 by reversing the arrangement. I do not care.

  In the example of FIG. 6, the flow rate of the cooling water on the downstream side of each target device 47 is monitored by the flow rate detector 11, and it is confirmed whether the cooling water is normally supplied to each target device 47. Can. The second embodiment is a manifold provided on the downstream side of a plurality of target devices 47, and the flow rate is adjusted in the same manner as the first embodiment.

  The direction of the flow of the cooling water in the valve unit 12 in this case is shown by the arrow in FIG. Moreover, in FIG. 8, the direction of the flow of the cooling water which flows in into the common piping 14 from the valve unit 12 was shown by the arrow. That is, the amount of cooling water flowing from the target device 47 through the individual pipe 16 is detected by the flow rate detector 11, and the flow rate is adjusted by the valve unit 12 to flow into the common pipe 14.

  Here, when the flow rate of any one of the individual pipes 16 changes suddenly, the water flowing inside the common pipe 14 may be suddenly pressurized or may receive a negative pressure. The water pressure fluctuation of the cooling water inside the common piping 14 may affect the individual piping 16 connected thereto, and may cause a flow fluctuation due to the back pressure.

  In order to prevent this, the same control as in the first embodiment is performed. First, the storage device stores the target value 43 of the flow rate of the cooling water to flow from the individual pipe 16 toward the common pipe 14 and the fluctuation allowable range 42 of the flow rate of the cooling water. Then, the flow rate of the cooling water flowing from the individual pipe 16 to the common pipe 14 detected by the flow rate detector 11 is monitored.

  When this flow rate deviates from the fluctuation allowable range 42, monitoring is continued as it is for a fixed time T1. If the deviation is still outside the fluctuation tolerance range 42, the flow rate of the cooling water is corrected so as to fall within the fluctuation tolerance range 42. In this way, it is possible to minimize the influence of the rapid fluctuation of the amount of cooling water flowing from the individual pipe 16 toward the common pipe 14 on other pipes.

DESCRIPTION OF SYMBOLS 10 control unit 11 flow rate detector 12 valve unit 14 common piping 16 individual piping 18 housing 20 valve body 22 taper part 24 screw part 26 conduction mechanism 28 drive motor 30 timing control part 32 valve drive part 34 flow rate setting part 36 valve opening degree control Part 42 Fluctuation allowable range 43 Target value 44 Cooling water tank 45 Pump 46 Filter 47 Target equipment

Claims (4)

A plurality of valve units are connected to a common piping, and the discharge flow rate of the cooling water discharged from the common piping toward the individual piping is adjusted by a valve element provided inside each valve unit,
A control unit is provided for controlling the opening degree of the valve body for each valve unit,
Each control unit is
A flow rate detector that detects the flow rate of the cooling water discharged from the individual piping;
A storage device storing a target value of the flow rate of the cooling water to be discharged from the individual pipe and a fluctuation allowable range of the flow rate of the cooling water;
When the flow rate of the cooling water discharged from the individual piping detected by the flow rate detector deviates from the fluctuation allowable range, it is monitored as it is for a predetermined time T1 and when it still deviates from the fluctuation allowable range, cooling A flow rate setting unit for setting a valve opening degree for correcting the flow rate of water to be within a fluctuation allowable range;
A drive motor that rotationally drives the valve body through the conduction mechanism to adjust the valve opening degree;
A valve opening control unit that controls the drive motor to adjust the valve opening set by the flow rate setting unit;
Even if the valve opening degree is adjusted by the valve opening degree control unit set by the flow rate setting unit, if the flow rate of the cooling water still deviates from the fluctuation allowable range, the process newly waits for a predetermined time T2, A separate flow control device for a plurality of valve units constituting a manifold, characterized by comprising a timing control unit 30 which requests the valve opening control unit to adjust the valve opening set by the flow rate setting unit again. . A plurality of valve units are connected to a common pipe, and the flow rate of the cooling water flowing from the individual pipes toward the common pipe is adjusted by the valve element provided inside each valve unit,
A control unit is provided for controlling the opening degree of the valve body for each valve unit,
Each control unit is
A flow rate detector that detects the flow rate of the cooling water flowing from the individual pipe to the common pipe;
A storage device storing a target value of the flow rate of the cooling water to be flowed from the individual pipe toward the common pipe and a fluctuation allowable range of the flow rate of the cooling water;
When the flow rate of the cooling water flowing from the individual pipe to the common pipe detected by the flow rate detector deviates from the fluctuation allowable range, it is monitored as it is for a predetermined time T1 and still deviates from the fluctuation allowable range A flow rate setting unit for setting a valve opening degree for correcting the flow rate of the cooling water to fall within the fluctuation allowable range when the
A drive motor that rotationally drives the valve body through the conduction mechanism to adjust the valve opening degree;
A valve opening control unit that controls the drive motor to adjust the valve opening set by the flow rate setting unit;
Even if the valve opening degree is adjusted by the valve opening degree control unit set by the flow rate setting unit, if the flow rate of the cooling water still deviates from the fluctuation allowable range, the process newly waits for a predetermined time T2, A separate flow control device for a plurality of valve units constituting a manifold, characterized by comprising a timing control unit 30 which requests the valve opening control unit to adjust the valve opening set by the flow rate setting unit again. .
  When a plurality of valve units connected to the common piping execute the adjustment of the valve opening in duplicate, the time T2 is set to be equal to or longer than the time for the adjusted flow to stabilize for a predetermined time The individual flow control device of a plurality of valve units according to claim 1 or 2, which constitutes a manifold characterized in that.   4. The manifold according to claim 1, wherein the standby time T2 for the flow rate setting unit to control the flow rate again is set individually for each valve unit according to the flow rate or water pressure to be controlled. Individual flow control device of a plurality of valve units according to any of the above.

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