JP2019067848A - Substrate transfer apparatus and substrate processing apparatus provided with substrate transfer apparatus - Google Patents

Abstract

To provide a substrate transfer apparatus and a substrate processing apparatus capable of properly transporting a substrate even when a substrate with large warpage is transported.SOLUTION: A substrate transfer apparatus includes a plurality of lower rollers 11 for transporting a substrate 100 by being rotated in a state of being in contact with the lower surface of the substrate and a pair of wedge-shaped rollers 12 fixed at positions outside both ends of the substrate. Further, the substrate transfer apparatus includes a plurality of upper rollers 21 fixed at positions above the vicinity of both ends of the substrate and above the lower roller 11. The distance between the upper end of the lower roller 11 and the lower end of the upper roller 21 is equal to or greater than the thickness of the substrate.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a substrate transfer apparatus for transferring a substrate by a plurality of rollers, and a substrate processing apparatus provided with the substrate transfer apparatus.

  In a transport apparatus for transporting a substrate by a plurality of rollers, when the thickness of the substrate to be transported is as thin as 0.3 mm to 0.7 mm, the substrate has a shape along a plurality of rollers by its own weight, which is necessary for transporting the substrate. You can get grip. In addition, in the case where it is necessary to obtain a gripping force more reliably, a transport mechanism is employed which sandwiches and transports the substrate from above and below. Patent Document 1 discloses a substrate transport apparatus that transports a substrate by nipping the substrate between an end portion supporting roller and a loading roller. In addition, Patent Document 2 discloses a chemical processing apparatus that transports the inside of a chemical by holding a substrate between a pair of pinch rollers.

JP, 2011-116523, A JP 2008-85119 A

  A substrate used in a semiconductor package (Panel Level Package) to which the latest package technology is applied has a thickness of about 2 mm, and the maximum amount of warpage is about 15 mm. Therefore, when such a substrate is held from above and below, the substrate is damaged. In addition, it is difficult to correct the warp itself of such a substrate, and when such a substrate is placed on a plurality of rollers and conveyed, the gripping force by the rollers is insufficient and the conveyance is appropriate. It becomes impossible to execute.

  FIG. 11 is a front view showing a state in which the substrate 100 with large warpage is conveyed by the conveyance device having a plurality of rollers 91. As shown in FIG. In addition, in this figure, the state which looked at board | substrate 100 grade | etc., From the front side is shown.

  The transfer device includes a plurality of rollers 91 fixed to the drive shaft 90 at a constant pitch, and both ends in the direction (horizontal direction in FIG. 11) orthogonal to the transfer direction of the substrate 100 transferred by the rollers 91. And a wedge-shaped roller 92 having an outer shape larger than that of the roller 91. Here, the wedge-shaped roller 92 is for restricting the position of the substrate 100 in the direction orthogonal to the transfer direction by contacting the edges on both sides of the substrate 100 in the direction orthogonal to the transfer direction of the substrate 100. is there.

  As shown in this figure, when the substrate 100 in which a large amount of warping occurs such that the lower side is convex is placed on the roller 91 and conveyed, the contact area between the substrate 100 and the roller 91 is reduced. The lack of force makes it difficult to transport the substrate 100 properly. Further, when the substrate 100 having a large warpage is placed on the roller 91 and conveyed, as shown by a broken line in FIG. 11, the end edge of the substrate 100 in the direction orthogonal to the conveyance direction of the substrate 100 is tilted. It will be arrange | positioned above the upper end of the wedge-shaped roller 92, and it will become impossible to control the position of the board | substrate 100 in the direction orthogonal to the conveyance direction.

  The present invention has been made to solve the above-described problems, and it is an object of the present invention to provide a substrate transfer apparatus and a substrate processing apparatus capable of properly transferring a substrate even when transferring a substrate with large warpage. I assume.

  The invention according to claim 1 is a substrate transfer apparatus for transferring a rectangular substrate in the horizontal direction, wherein the plurality of lower rollers transfer the substrate by rotating in a state of being in contact with the lower surface of the substrate; An upper roller disposed in the vicinity of both ends in a direction orthogonal to the transport direction of the substrate transported by the lower roller, the upper roller rotating in synchronization with the lower roller; The distance between the lower roller and the lower end of the upper roller may be equal to or larger than the thickness of the substrate.

  The invention according to claim 2 is, in the invention according to claim 1, disposed at a position outside the both ends in the direction orthogonal to the conveyance direction of the substrate conveyed by the lower roller, and the lower roller It further comprises a vertical roller having a large outer diameter.

  The invention according to claim 3 is the invention according to claim 2, wherein the upper roller and the wedge-shaped roller are disposed at the same position in the conveyance direction of the substrate conveyed by the lower roller. .

  According to a fourth aspect of the present invention, in the second aspect, the lower roller and the wedge-shaped roller are fixed to the same drive shaft and rotate in synchronization with each other.

  According to a fifth aspect of the present invention, in the second aspect, the upper roller is disposed above the lower roller, and the lower end of the upper roller and the upper end of the wedge-shaped roller are It is arranged at substantially the same height position.

  The invention according to claim 6 is a substrate transfer apparatus for transferring a rectangular substrate in a horizontal direction, wherein a plurality of lower drives are disposed at a constant pitch along the transfer direction of the substrate and rotate in synchronization with each other. A plurality of lower rollers each of which is fixed to the shaft and the plurality of lower drive shafts and which transports the substrate by rotating in a state of being in contact with the lower surface of the substrate; The outer diameter is larger than that of the plurality of lower rollers, each being fixed at a position outside both ends in a direction orthogonal to the transport direction of the substrate with respect to every other lower drive shaft with respect to the transport direction of the substrate. And a plurality of upper drive shafts disposed above the lower drive shaft to which the wedge roller is fixed, the plurality of upper drive shafts rotating in synchronization with the plurality of lower drive shafts, and the plurality of upper sides Orthogonal to the transport direction of the substrate on the drive shaft A plurality of upper rollers respectively fixed at the upper side near both ends of the direction, and a distance between an upper end of the plurality of lower rollers and a lower end of the plurality of upper rollers is a distance greater than the thickness of the substrate It is characterized by

  The invention according to claim 7 is a substrate processing apparatus comprising a treatment liquid supply mechanism for supplying a treatment liquid to a substrate, and the substrate transfer apparatus according to any one of claims 1 to 6.

  According to the first to seventh aspects of the present invention, the substrate can be properly transported by reliably bringing the substrate into contact with the lower roller by the action of the upper roller.

  According to the invention of the second and fifth aspects, the edge of the substrate in the direction orthogonal to the conveyance direction can be prevented from rising by the action of the upper roller, and it is orthogonal to the conveyance direction in the substrate By regulating the position of the direction by the wedge roller, it is possible to transport the substrate properly.

FIG. 1 is a schematic partial side view of a substrate processing apparatus to which a substrate transfer apparatus according to the present invention is applied. FIG. 1 is a partial front schematic view of a substrate processing apparatus to which a substrate transfer apparatus according to the present invention is applied. It is a top view which shows the lower side roller 11, a vertical roller 12, etc. It is a top view which shows the upper side roller 21 grade | etc.,. It is a perspective view which shows arrangement | positioning of the lower side roller 11, the wedge-shaped roller 12, and the upper side roller 21. FIG. It is a perspective view which shows the state which conveys the board | substrate 100 which does not have curvature by the board | substrate conveyance apparatus which concerns on this invention. It is a perspective view which shows the state which conveys the board | substrate 100 which the curvature which becomes downward convex produced by the board | substrate conveyance apparatus which concerns on this invention. It is a front view which shows the state which conveys the board | substrate 100 which the curvature which becomes downward convex produced by the board | substrate conveyance apparatus which concerns on this invention. It is a perspective view which shows the state which conveys the board | substrate 100 which the curvature which becomes convex upwards produced by the board | substrate conveyance apparatus which concerns on this invention. It is a front view which shows the state which conveys the board | substrate 100 which the curvature which becomes convex upwards produced by the board | substrate conveyance apparatus which concerns on this invention. FIG. 10 is a front view showing a state in which the substrate 100 with large warpage is transported by a transport device having a plurality of rollers 91.

  Hereinafter, embodiments of the present invention will be described based on the drawings. FIG. 1 is a schematic partial side view of a substrate processing apparatus to which a substrate transfer apparatus according to the present invention is applied, and FIG. 2 is a schematic partial front view thereof. FIG. 3 is a plan view showing the lower roller 11, the wedge-shaped roller 12, and the like. FIG. 4 is a plan view showing the upper roller 21 and the like. FIG. 5 is a perspective view showing the arrangement of the lower roller 11, the wedge roller 12 and the upper roller 21. As shown in FIG. In FIGS. 1 to 4, illustration of the drive gears 13 and 23 is omitted.

  The substrate transfer apparatus transfers the processing liquid to the substrate 100 by transferring the rectangular substrate 100 in the horizontal direction in the processing liquid 42 stored in the processing tank 41, and processes the substrate 100. Substrate processing apparatus.

  The substrate transfer device is disposed at a constant pitch along the transfer direction of the substrate 100 (in the left-right direction in FIG. 1, in the direction perpendicular to the paper surface in FIG. A plurality of lower drive shafts 10 that rotate in synchronization with each other in a pivotally supported state, and a plurality of lower drive shafts 10 fixed to a fixed pitch, and in contact with the lower surface of the substrate 100 The plurality of lower rollers 11 for transporting the substrate 100 by rotating at the same time and the lower drive shaft 10 for every other lower drive shaft 10 with respect to the transport direction of the substrate 100 in the plurality of lower drive shafts 10. A pair of wedge-shaped rollers 12 fixed respectively at positions outside of both ends in a direction orthogonal to the transport direction (a direction perpendicular to the paper surface in FIG. 1, a left-right direction in FIG. 2, and a left-right direction in FIG. 3) , Each under And a drive gear 13 which is disposed at a position of the left and right ends of the drive shaft 10.

  In addition, the substrate transfer apparatus is disposed above the lower drive shaft 10 to which the wedge-shaped roller 12 is fixed, and rotates in synchronization with the plurality of lower drive shafts 10 in a state of being supported by the side plate 31. A position above the lower roller 11 and in the vicinity of both ends of the plurality of upper drive shafts 20 and both ends of the plurality of upper drive shafts 20 in the direction orthogonal to the transport direction of the substrate 100 A plurality of upper rollers 21 fixed in position and a drive gear 23 disposed at the left and right ends of each upper drive shaft 20 are provided.

  Among the plurality of upper rollers 21, a pair of upper rollers 21 disposed near both ends of the upper drive shaft 20 is fixed near the both ends of the lower drive shaft 10, and the lower side aligned in the transport direction of the substrate 100. It is arranged above the lower rollers 11 of every other one of the rollers 11. Further, among the plurality of upper rollers 21, the pair of upper rollers 21 disposed near both ends of the upper drive shaft 20 is disposed at the same position as the wedge roller 12 with respect to the conveyance direction of the substrate 100. It will be.

  The drive gear 13 and the drive gear 23 are connected to a gear drive mechanism having a drive motor (not shown) and rotate in synchronization with each other. Thereby, the lower drive shaft 10 and the upper drive shaft 20 rotate in synchronization with each other.

  The lower drive shafts 10 are arranged such that the lower rollers 11 are close to each other in the transport direction of the substrate 100. Thus, the substrate 100 can be supported from the lower side without a gap, and the substrate 100 can be suitably transported. Further, since the wedge-shaped rollers 12 having an outer diameter larger than that of the lower roller 11 (approximately equal to the outer diameter of the lower roller 11) are disposed on every other lower drive shaft 10, the lower drive shaft The lower roller 11 and the vertical roller 12 can be synchronously driven by the drive of 10, and the lower rollers 11 and the vertical rollers 12 can be arranged close to each other. Become.

  The lower roller 11 is entirely immersed in the treatment liquid 42 stored in the treatment tank 41. Therefore, the upper end of the lower roller 11 is disposed below the liquid surface of the treatment liquid 42. On the other hand, the upper roller 21 is immersed in the processing solution in a region about half below it. Therefore, the lower end of the lower roller 11 is disposed below the liquid level of the treatment liquid 42. Then, the outer diameters of the lower roller 11 and the upper roller 21 and the lower drive shaft 10 are set so that the distance between the upper end of the lower roller 11 and the lower end of the upper roller 21 is equal to or greater than the thickness of the substrate 100. And the arrangement of the upper drive shaft 20 are determined.

  Since the distance between the upper end of the lower roller 11 and the lower end of the upper roller 21 is greater than the thickness of the substrate 100, the substrate 100 is nipped by the upper end of the lower roller 11 and the upper roller 21. There is nothing to do. The distance between the upper end of the lower roller 11 and the lower end of the upper roller 21 is placed on the lower roller 11 when warpage in the downward direction with respect to the substrate 100 occurs as described later. The lower end of the upper roller 21 abuts against both ends of the substrate 100 in the direction perpendicular to the conveyance direction of the substrate 100 to be conveyed, and the upper roller 21 presses the both ends of the substrate 100. Is preferred.

  That is, the distance between the upper end of the lower roller 11 and the lower end of the upper roller 21 is equal to or greater than the thickness of the substrate 100 and abuts against both ends of the substrate 100 in which the warp in the downward direction is convex. , Is a distance for pressing both ends of the substrate 100.

  Further, as shown in FIGS. 1 and 2, the outer diameters of the upper roller 21 and the wedge roller 12 are arranged such that the lower end of the upper roller 21 and the upper end of the wedge roller 12 are disposed at substantially the same height position. And the arrangement of the lower drive shaft 10 and the upper drive shaft 20 are determined.

  FIG. 6 is a perspective view showing a state in which a substrate 100 without warpage is conveyed by the substrate conveyance device according to the present invention.

  As shown in FIG. 6, in the case where the substrate 100 is not warped, the substrate 100 is conveyed with the entire lower surface thereof supported by the plurality of lower rollers 11. Then, the edge of the substrate 100 abuts on the wedge-shaped roller 12 in the direction orthogonal to the transport direction of the substrate 100, whereby the position thereof is regulated. Therefore, the substrate 100 can be transported in the processing liquid 42 without causing the substrate 100 to meander.

  FIG. 7 is a perspective view showing a state in which a substrate 100 in which a downward warp is generated by the substrate transfer apparatus according to the present invention is transferred, and FIG. 8 is a front view thereof. In FIG. 8, illustration of the drive gears 13 and 23 is omitted.

  As shown in FIGS. 7 and 8, in the case where the substrate 100 is warped so that the lower portion is convex, the substrate 100 is separated from the lower roller 11 at both ends in the direction orthogonal to the transport direction. Become. For this reason, the contact area between the substrate 100 and the lower roller 11 is reduced, so that the gripping force of the lower roller 11 is insufficient, and it becomes difficult to transport the substrate 100 properly. In addition, when the substrate 100 having a large warpage is placed on the lower roller 11 and conveyed, as shown by the broken line in FIG. 11, the substrate 100 is tilted and the direction orthogonal to the conveyance direction of the substrate 100 is obtained. Since the edge is disposed above the upper end of the wedge-shaped roller 12, it becomes impossible to regulate the position of the substrate 100 in the direction orthogonal to the transport direction.

  However, in the substrate transfer apparatus according to the present invention, the upper roller 21 is disposed at a position inside the wedge-shaped roller 12 at the edge of the substrate 100 and at a position above the lower roller 11. Thus, the edge of the substrate 100 abuts on the upper roller 21. As a result, the entire substrate 100 is pressed toward the lower roller 11, the gripping force by the lower roller 11 is increased, and the substrate 100 can be properly transported. At this time, as shown in FIG. 1, since the lower end portion of the upper roller 21 is immersed in the treatment liquid 42, it is possible to convey the entire substrate 100 in the state of being immersed in the treatment liquid 42.

  Further, as shown by the broken line in FIG. 11, even if the edge of the substrate 100 in the direction orthogonal to the transport direction of the substrate 100 is moved above the upper end of the wedge-shaped roller 12 due to the tilting of the substrate 100, the substrate 100 moves. It is regulated by the upper roller 21. Therefore, the position of the substrate 100 in the direction orthogonal to the transport direction is appropriately regulated.

  At this time, the outer diameters of the lower roller 11 and the upper roller 21 and the lower drive shaft 10 are set such that the distance between the upper end of the lower roller 11 and the lower end of the upper roller 21 is equal to or greater than the thickness of the substrate 100. Since the arrangement of the upper drive shaft 20 is determined, the edge of the substrate 100 is not held between the upper end of the lower roller 11 and the lower end of the upper roller 21. Therefore, even in the case of transporting the warped substrate 100, it is possible to prevent the substrate 100 from being damaged.

  FIG. 9 is a perspective view showing a state in which a substrate 100 having a warped upward convex is transferred by the substrate transfer apparatus according to the present invention, and FIG. 10 is a front view thereof. In FIG. 10, the illustration of the drive gears 13 and 23 is omitted.

  As shown in FIGS. 9 and 10, when the substrate 100 is warped to be convex upward, the substrate 100 is separated from the lower roller 11 at the central portion in the direction orthogonal to the transport direction. Become. Also in this case, since the contact area between the substrate 100 and the lower roller 11 is reduced, the gripping force by the lower roller 11 is insufficient, and it becomes difficult to transport the substrate 100 properly.

  However, in the substrate transfer apparatus according to the present invention, since the upper roller 21 is disposed also above the central portion of the substrate 100, the central portion of the substrate 100 abuts on the upper roller 21. As a result, both ends of the substrate 100 are pressed toward the lower roller 11, the gripping force by the lower roller 11 is increased, and the substrate 100 can be properly transported. Also at this time, as shown in FIG. 1, since the lower end portion of the upper roller 21 is immersed in the treatment liquid 42, it is possible to convey the entire substrate 100 immersed in the treatment liquid 42. Become.

  In the case where the substrate 100 used in the semiconductor package is transported when the substrate 100 is warped in such a way that the upper side is convex as described above, the device region formed above the substrate 100 is the upper roller 21 and It will abut. For this reason, it is preferable that the upper roller 21 be movable in the axial direction of the upper drive shaft 20 so that the upper roller 21 abuts the region between the device portions on the upper surface of the substrate 100.

  As described above, according to the substrate transfer apparatus of the present invention, the substrate 100 can be properly transferred by reliably bringing the substrate 100 into contact with the lower roller 11 by the action of the upper roller 21. Become. Further, the action of the upper roller 21 can prevent rising of the edge in the direction orthogonal to the conveyance direction of the substrate 100, and the position of the substrate 100 in the direction orthogonal to the conveyance direction is regulated by the wedge roller 12. By doing this, the substrate 100 can be transported properly.

10 lower drive shaft 11 lower roller 12 vertical roller 13 drive gear 20 upper drive shaft 21 upper roller 23 drive gear 41 treatment tank 42 treatment liquid 100 substrate

Claims (7)

In a substrate transfer apparatus for transferring a rectangular substrate in the horizontal direction,
A plurality of lower rollers for transporting the substrate by rotating in a state of being in contact with the lower surface of the substrate;
An upper roller which is disposed above both ends in the direction orthogonal to the transport direction of the substrate transported by the lower roller, and rotates in synchronization with the lower roller;
Equipped with
The distance between the upper end of the lower roller and the lower end of the upper roller is equal to or greater than the thickness of the substrate. In the substrate transfer apparatus according to claim 1,
The substrate transfer apparatus further comprising a wedge-shaped roller disposed at a position outside the both ends in a direction orthogonal to the transfer direction of the substrate transferred by the lower roller and having an outer diameter larger than that of the lower roller. In the substrate transfer apparatus according to claim 2,
The substrate transfer device, wherein the upper roller and the wedge-shaped roller are disposed at the same position in the transfer direction of the substrate transferred by the lower roller. In the substrate transfer apparatus according to claim 2,
The lower roller and the wedge-shaped roller are fixed to the same drive shaft and rotate in synchronization with each other. In the substrate transfer apparatus according to claim 2,
The upper roller is disposed above the lower roller,
A substrate transfer apparatus, wherein the lower end of the upper roller and the upper end of the wedge-shaped roller are disposed at substantially the same height position. In a substrate transfer apparatus for transferring a rectangular substrate in the horizontal direction,
A plurality of lower drive shafts disposed at a constant pitch along the transport direction of the substrate and rotating in synchronization with each other;
A plurality of lower rollers each of which is fixed to the plurality of lower drive shafts and which conveys the substrate by rotating in a state of being in contact with the lower surface of the substrate;
The plurality of lower drive shafts are fixed at positions outside of both ends of the lower drive shaft in a direction orthogonal to the transfer direction of the substrate with respect to every other lower drive shaft with respect to the transfer direction of the substrates in the plurality of lower drive shafts. A vertical roller having an outer diameter larger than the lower roller;
A plurality of upper drive shafts disposed above the lower drive shaft to which the wedge-shaped roller is fixed and rotating in synchronization with the plurality of lower drive shafts;
A plurality of upper rollers respectively fixed in the vicinity of both ends of the plurality of upper drive shafts in the direction orthogonal to the transport direction of the substrate;
Equipped with
A substrate transfer apparatus, wherein a distance between upper ends of the plurality of lower rollers and lower ends of the plurality of upper rollers is equal to or larger than a thickness of the substrate. A processing liquid supply mechanism that supplies the processing liquid to the substrate;
A substrate transfer apparatus according to any one of claims 1 to 6,
A substrate processing apparatus comprising:

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