JP2019054096A - Processing device and method of using the processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily acquire information on a coping method for an operator by an operator. A processing device including a processing unit for processing a workpiece, a camera unit for capturing an image of the workpiece to obtain a captured image, a display unit, and a control unit, the control unit comprising: Has a trouble detection unit and a trouble information storage unit, the trouble detection unit has a function of detecting the occurrence of a trouble using a captured image, the trouble information storage unit, a captured image, The control unit has a function of accumulating trouble countermeasure information including a trouble countermeasure, and the control unit includes the captured image and the plurality of trouble countermeasure information when the trouble detector detects occurrence of trouble. And a function of displaying an image selection screen including the captured image on the display unit, and a function of displaying a troubleshooting measure included in the troubleshooting information including the selected captured image on the display unit. [Selection diagram]

Description

  The present invention relates to a processing apparatus for processing a workpiece and a method of using the processing apparatus.

  In the manufacturing process of device chips used in electronic devices such as mobile phones and computers, grid-like division planned lines called streets are set on the surface of a wafer made of a semiconductor such as silicon. Devices such as an IC (Integrated Circuit) and an LSI (Large Scale Integration) are formed in each region defined by the division lines on the surface of the wafer. Thereafter, the back surface of the wafer is thinned by grinding or the like, and when the wafer is divided along the planned dividing line, individual device chips can be formed.

  The wafer is ground by a grinding apparatus. The grinding apparatus includes a chuck table that holds a wafer, and a grinding wheel that faces the chuck table. When the chuck table for holding a wafer and the grinding wheel are rotated about respective rotation axes that are substantially parallel to each other, and the grinding wheel is lowered and brought into contact with the wafer, the wafer is ground.

  Further, the wafer is divided by a cutting apparatus having a cutting unit. The cutting unit includes a spindle serving as a rotation axis and a cutting blade attached to one end of the spindle. When the cutting blade is rotated by rotating the spindle and the rotating cutting blade is cut along the planned dividing line of the wafer to cut the wafer, the wafer is divided.

  Further, the wafer may be divided by a laser processing apparatus having a laser processing unit. A laser beam having a wavelength that can be transmitted through the wafer is irradiated from the laser processing unit along the division line to the wafer to be condensed inside the wafer, and a modified layer is formed by multiphoton absorption. Then, when cracks are extended from the modified layer to the front and back of the wafer, the wafer is divided. Alternatively, the wafer may be divided by forming a groove by irradiating the surface of the wafer with a laser beam having a wavelength absorbed by the wafer along the division line.

  These processing apparatuses are equipped with various sensors. In the processing apparatus, the processing is performed while constantly monitoring whether the processing is performed as planned. When the occurrence of a trouble is detected by the sensor, the processing apparatus notifies an operator (operator) of the processing apparatus that a trouble has been detected. The operator identifies the content of the trouble and implements a trouble countermeasure to solve the trouble.

  A skilled operator has deep knowledge about various troubles and countermeasures, and when a trouble is detected, the cause of the trouble can be specified accurately and an appropriate trouble countermeasure can be quickly implemented. On the other hand, an inexperienced operator takes time to identify the cause of the trouble, and sometimes selects a countermeasure for the trouble.

  Then, when the occurrence of trouble is detected, a processing apparatus has been developed in which information related to the trouble is transmitted to the manufacturer of the processing apparatus via a communication line or the like, and the manufacturer proposes a countermeasure for the trouble ( Patent Document 1). In addition, in order to improve the operation ability of the processing apparatus and trouble handling ability of an inexperienced operator, a processing for displaying a video that educates the operation method of the processing apparatus and countermeasures for troubles, etc. on the display unit provided in the processing apparatus An apparatus was developed (see Patent Document 2).

JP 2009-187259 A JP 2010-49466 A

  However, since information related to trouble often includes confidential information of the user of the processing device, the user refuses to connect the processing device to the communication line or report the information to the manufacturer of the processing device. There is a case. Information such as the image of the workpiece and the set processing conditions is particularly important and often cannot be submitted to the manufacturer of the processing apparatus.

  When the information is not provided to the manufacturer of the processing apparatus, the manufacturer cannot provide explanations using the information even when proposing countermeasures to the user of the processing apparatus. In some cases, countermeasures cannot be properly communicated. In addition, even when an inexperienced operator is trained with a video, the manufacturer cannot create educational materials such as a video according to the individual circumstances of the user of the processing apparatus unless the information can be used. The educational effect cannot be expected.

  The present invention has been made in view of such a problem, and an object of the present invention is to provide a machining apparatus in which an operator of a machining apparatus can easily acquire information on a countermeasure for trouble when a trouble occurs.

  According to one aspect of the present invention, a chuck table that holds a workpiece, a processing unit that processes the workpiece held by the chuck table, and a workpiece that is held by the chuck table are photographed. A processing apparatus comprising a camera unit that acquires a captured image, an input unit that is used to input an instruction, a display unit, and a control unit that controls each component, the control unit including a trouble detection unit, A trouble information storage unit, and the trouble detection unit detects the occurrence of trouble using a captured image obtained by photographing the workpiece processed by the processing unit with the camera unit. The trouble information storage unit includes a captured image indicating the occurrence of the trouble and a trouble countermeasure for solving the trouble indicated in the captured image. The trouble shooting unit has a function to store trouble shooting information, and when the trouble detecting unit detects the occurrence of trouble, the control unit stores a captured image used for detecting the occurrence of trouble and the trouble information storing unit. A function for causing the display unit to display an image selection screen including captured images respectively included in the plurality of stored troubleshooting information, and a plurality of the troubleshooting information displayed on the image selection screen. A trouble reading information including a picked-up image selected from the picked-up image by the input unit from the trouble information storage unit, and a function for causing the display unit to display the trouble solving information included in the trouble picking information. A featured processing device is provided.

  In one aspect of the present invention, the input unit may be used for editing the trouble countermeasure information stored in the trouble information storage unit. Further, in one aspect of the present invention, the trouble detection unit is configured such that the position or quality of the groove formed along the planned division line set on the surface of the workpiece by the processing unit, or the internal reforming layer The occurrence of trouble may be detected by acquiring information on the position or quality using a captured image acquired by the camera unit.

  The method of using the machining apparatus according to any one of claims 1 to 3, wherein a plurality of pieces of trouble countermeasure information are accumulated in the trouble information accumulation unit, wherein the workpiece held on the chuck table is A processing step for processing by the processing unit; and a detection step for detecting the occurrence of a trouble using the captured image by capturing the captured image of the workpiece before or during the processing step. When the occurrence of a trouble is detected in the detection step, the captured image used for detecting the occurrence of the trouble and the plurality of trouble countermeasure information stored in the trouble information storage unit, respectively A display step for displaying an image selection screen including the captured image on the display unit, and detection of the occurrence of the trouble from the captured image included in each of the plurality of troubleshooting information. A trouble countermeasure information selection step for selecting the captured image showing the trouble closest to the trouble shown in the captured image, and the trouble countermeasure included in the trouble countermeasure information including the selected captured image. Another aspect of the present invention is a method of using a processing apparatus, comprising a trouble countermeasure display step for displaying on a display unit.

  The processing apparatus which concerns on 1 aspect of this invention is provided with the control unit which has a trouble detection part and a trouble information storage part. The trouble detection unit has a function of detecting the occurrence of a trouble using a captured image obtained by photographing the workpiece processed by the processing unit with the camera unit. The trouble information storage unit has a function of storing a plurality of trouble countermeasure information including a captured image indicating the occurrence of a trouble and a trouble countermeasure for solving the trouble indicated in the captured image.

  When the occurrence of a trouble is detected, for example, a skilled operator examines the content of the trouble, formulates a trouble countermeasure, and inputs the trouble countermeasure to the processing apparatus using the input unit. In the processing apparatus, the trouble countermeasure is implemented, and trouble shooting information including the captured image indicating the occurrence of the trouble and the trouble countermeasure is accumulated in the trouble information storage unit.

  When a plurality of trouble countermeasure information is accumulated in the trouble information accumulating unit, when the occurrence of a new trouble is detected from the captured image thereafter, the captured image and the captured image included in the accumulated trouble countermeasure information Can be displayed on the display unit. Then, for example, even an inexperienced operator selects a captured image showing a trouble that has occurred from the captured images displayed on the image selection screen, so that trouble handling associated with the selected captured image can be performed. You can know how.

  Since the captured image included in the trouble countermeasure information is an image of the workpiece captured by the camera unit of the processing apparatus, it is easy for an inexperienced operator to select an image. Therefore, it is possible to implement the trouble countermeasure that can appropriately deal with the trouble.

  Therefore, according to the present invention, there is provided a machining apparatus that allows an operator of the machining apparatus to easily acquire information on a countermeasure for trouble when trouble occurs.

It is a perspective view which shows a cutting device typically. It is a figure which shows typically an example of the information accumulate | stored in a trouble information storage part. FIG. 3A is a diagram schematically showing an image selection screen, and FIG. 3B is a diagram schematically showing a trouble countermeasure information display screen.

  Embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. The processing apparatus according to the present embodiment is, for example, a grinding apparatus, a cutting apparatus, or a laser processing apparatus that processes a workpiece such as a semiconductor wafer. FIG. 1 is a perspective view schematically showing a cutting apparatus 2 which is an example of a processing apparatus according to the present embodiment. Hereinafter, a case where the processing apparatus is the cutting apparatus 2 will be described as an example.

  The cutting device 2 includes a base 4 that supports each component. A rectangular opening 4a is formed at the front corner of the base 4, and a cassette support base 6 that moves up and down is provided in the opening 4a. A cassette 8 that houses a plurality of frame units 1 is placed on the upper surface of the cassette support 6. In FIG. 1, only the outline of the cassette 8 is shown for convenience of explanation.

  The frame unit 1 includes an annular frame 3, an adhesive tape 5 stretched on an opening of the annular frame 3, and a workpiece 7 supported on the upper surface of the adhesive tape 5. The workpiece 7 is, for example, a circular wafer made of a semiconductor material such as silicon, and the surface side is divided into a central device region and an outer peripheral surplus region surrounding the device region. The device region is further divided into a plurality of regions by division lines (streets) arranged in a lattice pattern, and devices such as ICs and LSIs are formed in each region.

  An adhesive tape 5 having a diameter larger than that of the workpiece 7 is attached to the back side of the workpiece 7. An outer peripheral portion of the adhesive tape 5 is fixed to the annular frame 3. That is, the workpiece 7 is supported by the annular frame 3 via the adhesive tape 5.

  The workpiece 7 may be other than a circular wafer made of a semiconductor material such as silicon, and the material, shape, structure, etc. of the workpiece 7 are not limited. For example, a rectangular substrate made of a material such as ceramics, resin, or metal can be used as the workpiece 7. There are no restrictions on the type, quantity, and arrangement of devices.

  The cutting device 2 is provided with a transport mechanism (not shown) for taking out the frame unit 1 accommodated in the cassette 8 placed on the cassette support 6 and placing the frame unit 1 on a chuck table 14 described later. It has been. According to the transport mechanism, the frame unit 1 can be accommodated in the cassette 8 after the cutting process is completed.

  A rectangular opening 4b that is long in the X-axis direction (front-rear direction, processing feed direction) is formed on the side of the cassette support base 6. In the opening 4b, there are provided an X-axis moving table 10, an X-axis moving mechanism (not shown) for moving the X-axis moving table 10 in the X-axis direction, and a dustproof and splash-proof cover 12 that covers the X-axis moving mechanism. .

  The X-axis movement mechanism includes a pair of X-axis guide rails (not shown) parallel to the X-axis direction, and the X-axis movement table 10 is slidably attached to the X-axis guide rails. A nut portion (not shown) is provided on the lower surface side of the X-axis moving table 10, and an X-axis ball screw (not shown) parallel to the X-axis guide rail is screwed to the nut portion.

  An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw. By rotating the X-axis ball screw with the X-axis pulse motor, the X-axis moving table 10 moves in the X-axis direction along the X-axis guide rail.

  A chuck table 14 for holding the frame unit 1 is provided above the X-axis moving table 10. A porous member is disposed on the upper surface of the chuck table 14, and the upper surface of the porous member serves as a holding surface 14 a that holds the frame unit 1. The chuck table 14 includes a clamp 14b that clamps the frame unit 1 placed on the holding surface 14a on the outer peripheral portion.

  The porous member is connected to a suction source (not shown) through a suction path (not shown) formed inside the chuck table 14. When the frame unit 1 is placed on the holding surface 14a and the suction source is operated to apply a negative pressure to the frame unit 1 through the suction path and the porous member, the frame unit 1 is sucked and held on the chuck table 14. Is done.

  The chuck table 14 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis perpendicular to the holding surface 14a. The chuck table 14 is processed and fed in the X-axis direction by the above-described X-axis moving mechanism. That is, the X-axis movement mechanism constitutes a machining feed unit.

  A transport unit (not shown) for transporting the frame unit 1 described above to the chuck table 14 is provided at a position close to the opening 4b. For example, the frame unit 1 transported by the transport unit is placed on the holding surface 14a of the chuck table 14 so that the upper surface side is exposed upward. Moreover, this conveyance unit conveys the frame unit 1 after a cutting process to the below-mentioned washing | cleaning unit 50. FIG.

  A gate-type support structure 24 for supporting the two sets of cutting units 22a and 22b is disposed on the upper surface of the base 4 so as to straddle the opening 4b. Two sets of cutting unit moving mechanisms 26 for moving the cutting units 22a and 22b in the Y-axis direction (left and right direction, index feed direction) and the Z-axis direction are provided on the upper front surface of the support structure 24.

  Each cutting unit moving mechanism 26 is commonly provided with a pair of Y-axis guide rails 28 arranged in front of the support structure 24 and parallel to the Y-axis direction. A Y-axis moving plate 30 constituting each cutting unit moving mechanism 26 is slidably attached to the Y-axis guide rail 28.

  A nut portion (not shown) is provided on the back side (rear side) of each Y-axis moving plate 30, and a Y-axis ball screw 32 parallel to the Y-axis guide rail 28 is screwed into each nut portion. Has been. A Y-axis pulse motor 34 is connected to one end of each Y-axis ball screw 32. When the Y-axis ball motor 32 is rotated by the Y-axis pulse motor 34, the Y-axis moving plate 30 moves in the Y-axis direction along the Y-axis guide rail 28.

  A pair of Z-axis guide rails 36 parallel to the Z-axis direction are provided on the surface (front surface) of each Y-axis moving plate 30. A Z-axis moving plate 38 is slidably attached to the Z-axis guide rail 36.

  A nut portion (not shown) is provided on the back surface side (rear surface side) of each Z-axis moving plate 38, and a Z-axis ball screw 40 parallel to the Z-axis guide rail 36 is screwed into each nut portion. Has been. A Z-axis pulse motor 42 is connected to one end of each Z-axis ball screw 40. When the Z-axis ball screw 40 is rotated by the Z-axis pulse motor 42, the Z-axis moving plate 38 moves in the Z-axis direction along the Z-axis guide rail 36.

  Cutting units 22a and 22b are provided below the respective Z-axis moving plates 38. The cutting units 22a and 22b include an annular cutting blade attached to one end of a spindle that serves as a rotating shaft. The cutting units 22 a and 22 b are provided with a cutting fluid supply means for supplying a cutting fluid to the frame unit 1 held by the cutting blade and the chuck table 14. The cutting fluid is, for example, pure water.

  A camera unit (imaging unit) 48 that images the workpiece 7 and the like is provided at a position adjacent to the cutting units 22a and 22b. If the Y-axis moving plate 30 is moved in the Y-axis direction by each cutting unit moving mechanism 26, the cutting units 22a and 22b and the imaging camera 48 are indexed and fed in the Y-axis direction. Further, if the Z-axis moving plate 38 is moved in the Z-axis direction by each cutting unit moving mechanism 26, the cutting units 22a and 22b and the imaging camera 48 are moved up and down.

  A circular opening 4c is formed at a position opposite to the opening 4a with respect to the opening 4b. A cleaning unit 50 for cleaning the frame unit 1 and the like after cutting is provided in the opening 4c.

  The cleaning unit 50 provided inside the opening 4 c includes a cleaning table 52 that holds the frame unit 1, and a cleaning nozzle 54 that discharges the cleaning liquid to the frame unit 1 from above the frame unit 1 held on the cleaning table 52. And comprising. The cleaning liquid is pure water, for example.

  The cutting device 2 includes a display unit 18, an input unit (not shown), and a control unit 16 that controls each component of the cutting device 2. The control unit 16 includes a trouble detection unit 16a and a trouble information storage unit 16b. The trouble detection unit 16a detects the occurrence of a trouble by using a captured image obtained by photographing the cut workpiece 7 with the camera unit 48.

  For example, a kerf (cutting groove) formed by cutting along the planned division line is recognized from the captured image, and the width, chipping size, and center line of the kerf from the center line of the planned division line are recognized. Measure deviation (called kerf-off center). An allowable range is set for these measured values. For example, when a deviation of the measured value from the allowable range is confirmed, the trouble detecting unit 16a detects the occurrence of a trouble.

  In addition, when there is a problem in photographing the workpiece 7 by the camera unit 48 and the kerf cannot be properly recognized from the captured image, it is not possible to detect the occurrence of cutting trouble using the captured image. Accordingly, the trouble detection unit 16a detects this as the occurrence of a trouble even when the kerf cannot be properly recognized from the captured image.

  Furthermore, the trouble detection unit 16a may detect the occurrence of a trouble using a captured image obtained by photographing the workpiece 7 before being cut by the camera unit 48. Even before the workpiece 7 is processed, by photographing the workpiece 7 with the camera unit 48, for example, when a trouble related to the alignment between the workpiece 7 and the cutting units 22a and 22b occurs. The occurrence of the trouble can be detected.

  The display unit 18 displays the processing conditions and the processing status of the workpiece 7. Further, when the trouble detection unit 16a detects the occurrence of the trouble, the control unit 16 notifies the operator of the cutting apparatus 2 of the occurrence of the trouble, and the display unit 18 is used to detect the trouble. A captured image is displayed.

  The input unit is used when an operator or the like of the cutting device 2 inputs various instructions to the cutting device 2. The input unit is, for example, a keyboard or a mouse used in a PC, and may be a touch panel provided in the display unit 18. The display unit 18 is a liquid crystal panel, for example. The input unit edits trouble countermeasure information 56 (described later) stored in the trouble information storage unit 16b, or edits a trouble countermeasure display screen 76 (described later) displayed on the display unit 18. Also used for.

  When a trouble occurs, the operator of the cutting apparatus 2 identifies the cause of the trouble and formulates a countermeasure for the trouble. Then, the trouble countermeasure is input to the cutting device 2 by the input unit.

  The trouble information accumulating unit 16b accumulates trouble countermeasure information including a trouble countermeasure input by the input unit after the trouble detecting unit 16a detects a trouble and a captured image used for detecting the trouble. It has the function to do. FIG. 2 is a diagram schematically showing an example of the trouble countermeasure information 56 stored in the trouble information storage unit 16b.

  As shown in FIG. 2, each trouble countermeasure information 56 includes a captured image 58 that indicates the occurrence of a trouble and a trouble countermeasure 60 that eliminates the trouble. Further, the trouble countermeasure information 56 may include information such as the trouble classification 62 and the trouble details 64. The trouble information storage unit 16b stores a plurality of trouble countermeasure information 56 relating to various types of troubles.

  The trouble countermeasure information 56 stored in the trouble information storage unit 16b may be edited by the operator of the cutting device 2 using the input unit, and the operator of the cutting device 2 can edit the trouble countermeasure information 56 regardless of the occurrence of the trouble. You may create using an input unit.

  Further, trouble countermeasure information 56 other than the captured image may be input to the trouble information storage unit 16b in advance for typical troubles by the manufacturer of the cutting device 2. Then, when a trouble is detected by the trouble detection unit 16a, the operator of the cutting apparatus 2 can deal with the trouble by selecting the trouble countermeasure information 56 including the appropriate trouble countermeasure 60. Further, the trouble countermeasure information 56 can be completed by associating the captured image used for detecting the trouble with the trouble countermeasure 60.

  Further, the trouble countermeasure information 56 including a schematic diagram instead of the captured image 58 for a typical trouble may be input to the trouble information storage unit 16b by a manufacturer of the cutting device 2 in advance. Then, for example, when occurrence of a trouble is detected by the trouble detection unit 16a, the schematic diagram showing the same trouble as the trouble is selected, and the schematic diagram is replaced with a captured image 58 in which the workpiece is reflected. Thus, the trouble countermeasure information 56 can be easily completed. Further, the trouble countermeasure 60 can be acquired from the trouble countermeasure information 56 including the schematic diagram.

  The control unit 16 has a function of causing the display unit 18 to display an image selection screen when the trouble detection unit 16a detects the occurrence of a trouble. FIG. 3A is a diagram schematically illustrating an example of the image selection screen 66 displayed on the display unit 18. The image selection screen 66 includes a captured image 58a used for the detection and a captured image 58 included in each of the plurality of trouble countermeasure information 56 stored in the trouble information storage unit 16b.

  The image selection screen 66 includes, for example, a detected trouble classification 62, trouble details 64, a measured value 68 such as a kerf detected from the captured image 58a, an allowable range of the measured value 68, May be further displayed. The operator of the cutting device 2 obtains information about the trouble that has occurred from these various types of information displayed on the image selection screen 66.

  Further, the operator of the cutting apparatus 2 selects the captured image 58 showing the trouble closest to the trouble shown in the captured image 58 a from the captured image 58 displayed on the image selection screen 66. For example, an appropriate captured image 58 is selected by operating the cursor 70, the scroll bar 74, etc. using the input unit, and the icon 72 for displaying the trouble countermeasure display screen is pressed. Then, the display unit 18 displays a trouble countermeasure display screen 76 shown in FIG.

  On the trouble countermeasure display screen 76, the trouble countermeasure information 56 including the captured image 58 selected on the image selection screen 66 among the trouble countermeasure information 56 stored in the trouble information storage unit 16b is expanded. Is displayed. The trouble countermeasure display screen 76 displays, for example, an outline 78 of the trouble countermeasure, a detailed explanation 80 of the trouble countermeasure, and a captured image 58a used for detecting the trouble. That is, the trouble countermeasure 60 is proposed to the operator of the cutting device 2 by the trouble countermeasure display screen 76.

  In the cutting device 2 according to the present embodiment, when the trouble detection unit 16a detects a trouble, even an inexperienced operator uses the captured image 58 in which the workpiece 7 is captured to appropriately deal with the trouble from the trouble information storage unit 16b. Information on the measure 60 can be easily obtained. For example, when an experienced operator creates the trouble countermeasure information 56 and stores it in the trouble information storage unit 16b, an inexperienced operator can deal with the trouble using the knowledge of the skilled operator.

  Next, the usage method of the cutting device 2 which concerns on this embodiment is demonstrated. An example will be described in which the kerf cannot be detected from the acquired captured image when the workpiece 7 having a kerf (cutting groove) formed by cutting with the cutting device 2 is photographed by the camera unit 48. The trouble information storage unit 16b of the cutting apparatus 2 stores a plurality of trouble countermeasure information 56 in advance.

  In the method of use, first, a processing step is performed in which the workpiece 7 held on the chuck table 14 of the cutting device 2 is processed by the cutting units 22a and 22b (processing units).

  In this processing step, the frame unit 1 accommodated in the cassette 8 on the cassette support base 6 is taken out and conveyed by the conveyance mechanism (not shown) of the cutting device 2 and placed on the holding surface 14 a of the chuck table 14. When the suction source of the chuck table 14 is operated to apply a negative pressure to the frame unit 1, the frame unit 1 is sucked and held by the chuck table 14.

  Next, cutting of the workpiece 7 is performed. First, when the cutting blades are rotated by rotating the spindles of the cutting units 22a and 22b, the cutting blades are positioned at a predetermined height, and the chuck table 14 is processed and fed in the machining feed direction, the rotating cutting blades are rotated. Comes into contact with the workpiece 7 and the workpiece 7 is cut.

  In the middle of the processing step, a detection step is performed in which the workpiece 7 is photographed to obtain a captured image 58a and a trouble is detected using the captured image 58a. The control unit 16 causes the camera unit 48 to photograph the surface of the workpiece 7 and acquire the captured image 58a. The captured image 58 a is sent to the trouble detection unit 16 a of the control unit 16.

  In the trouble detection unit 16a, for example, the kerf (cutting groove) reflected in the workpiece 7 in the captured image 58a is recognized, and the width, chipping size, kerf-off center, etc. of the kerf are measured, and the measured value The occurrence of trouble is detected when the value is not within the allowable range. In addition, when a captured image 58a in which the kerf cannot be properly recognized is acquired by mistakenly setting the output of the illumination for photographing provided in the camera unit 48, as in the captured image 58a illustrated in FIG. The trouble detector 16a detects the occurrence of a trouble.

  When a trouble is detected in the detection step, a display step for displaying an image selection screen 66 as shown in FIG. 3A on the display unit 18 is performed. The image selection screen 66 is a screen including the captured image 58a and the captured images 58 respectively included in the plurality of trouble countermeasure information 56 stored in the trouble information storage unit 16b.

  Next, the captured image 58 showing the trouble closest to the trouble shown in the captured image 58a used for the detection of the trouble from the captured image 58 included in each of the plurality of trouble countermeasure information 56 is displayed. Perform the troubleshooting information selection step to be selected. The operator selects an appropriate captured image 58 by operating the cursor 70 and the scroll bar 74 using the input unit on the image selection screen 66 displayed on the display unit 18, and displays the trouble countermeasure 60. The icon 72 is pressed.

  For example, the operator who has confirmed the captured image 58a shown in FIG. 3A recognizes that the captured image 58a is an image in which the colors of the kerf and other portions are similar. Then, the operator selects, from the captured image 58 displayed on the image selection screen 66, a captured image 58 in which the colors of the kerf and other portions are similar.

  Next, a trouble countermeasure display step for displaying the trouble countermeasure 60 included in the trouble countermeasure information 56 including the selected captured image 58 on the display unit 18 is performed. When the icon 72 on the image selection screen 66 is pressed, a trouble countermeasure display screen 76 illustrated in FIG. 3B is displayed on the display unit 18. On the trouble countermeasure display screen 76, as information included in the trouble countermeasure information 56, a trouble countermeasure outline 78, a detailed explanation 80 of the trouble countermeasure, and the like are displayed.

  Specifically, the trouble countermeasure display screen 76 indicates that the illumination of the camera unit 48 is inappropriate as the cause of the occurrence of the trouble. More specifically, the output of the two illuminations (epi-illumination and oblique illumination) used at the time of photographing by the camera unit 48 is too large, and the kerf that should be imaged darker than the surroundings becomes too bright. It was suggested that was not detected properly. And the adjustment of illumination is proposed as the trouble countermeasure 60 for acquiring the captured image which can detect a kerf appropriately.

  As shown in FIG. 3B, the trouble countermeasure display screen 76 displays, for example, past cases included in the trouble countermeasure information 56 and the improvement status after the trouble countermeasure 60 is implemented. In many cases, the operator implements the troubleshooting 60 based on such information. For example, the output of the epi-illumination and oblique illumination is lowered, and the camera unit 48 takes a picture again. Then, an appropriate captured image 58a with a dark kerf can be obtained, and the trouble is solved.

  In the present embodiment, one aspect of the present invention has been described by taking as an example a case where a detection step is performed in the middle of the processing step to detect the formed kerf 84 to detect a trouble. Furthermore, a trouble related to the alignment between the wafer 1 and the cutting units 22a and 22b may be detected by performing a detection step before performing the processing step.

  Further, in the present embodiment, one aspect of the present invention has been described by taking as an example the case where the kerf 84 cannot be detected from the captured image 58a because the camera illumination setting is incorrect. In order to solve the trouble, the case where the trouble countermeasure 60 included in the trouble countermeasure information 56 at the top of the table shown in FIG. However, the cutting device 2 according to the present embodiment can cope with all other troubles.

  For example, the trouble countermeasure information 56 in the second row of the table shown in FIG. 2 is information relating to a trouble in which the kerf 84 formed between two adjacent devices 82 cannot be detected by photographing with the camera unit 48. In this case, the cause of the trouble is that the setting of the mask area 88 set at the time of photographing is wrong. Therefore, the second-stage trouble countermeasure information 56 includes a trouble countermeasure 60 that appropriately adjusts the mask area 88. Here, the mask area 88 is an area indicated by oblique lines in the second stage captured image 58.

  The color of the kerf 84 shown in the captured image 58 may change depending on the depth or the like, and the color of the kerf 84 may hinder recognition of the edge of the kerf 84. Therefore, a mask region 88 is set so as to overlap with the kerf 84 so that the kerf 84 in a portion other than the vicinity of the edge is not shown. However, if the mask area 88 is erroneously set so as to include an edge, the edge is hidden and cannot be recognized properly, so that a countermeasure is required.

  The trouble countermeasure information 56 in the third row of the table shown in FIG. 2 is also information on a trouble in which the kerf 84 cannot be detected by photographing with the camera unit 48. In this case, the focus adjustment performed at the time of photographing is inappropriate, and the captured image 58a is out of focus. The camera unit 48 is used for, for example, the alignment of the cutting units 22a and 22b in addition to the detection of a trouble. However, the height position of the target detected during the alignment is greatly different from the height position of the edge of the kerf 84. There is a case.

  In this case, when the kerf 84 is to be checked during the cutting process, the focal height of the camera unit 48 must be greatly changed. When the camera unit 48 captures a predetermined target, the height of the camera unit 48 is automatically adjusted within a predetermined range so that the camera unit 48 is focused on the target. However, if the in-focus height exists outside the predetermined range, the adjustment fails. Therefore, the trouble countermeasure 60 included in the trouble countermeasure information 56 includes a proposal for changing the range (focus adjustment amount).

  The trouble countermeasure information 56 in the fourth row of the table shown in FIG. 2 is also information on a trouble in which the kerf 84 cannot be detected by photographing with the camera unit 48. There is a problem that the area where the kerf 84 is captured is small. Therefore, the trouble countermeasure 60 included in the trouble countermeasure information 56 includes a proposal to change the position for checking the kerf 84.

  The trouble countermeasure information 56 in the fifth row of the table shown in FIG. 2 is information relating to the trouble detected in the detected kerf 84 that the size of chipping (chip) exceeds the allowable range. However, in this case, the trouble is that a TEG (Test Element Group) 90 existing in the planned division line 86 is mistakenly recognized as chipping. The trouble countermeasure 60 included in the trouble countermeasure information 56 includes a proposal for acquiring captured images in which the TEG 90 and the calf 84 are different in color by adjusting the illumination of the camera.

  The trouble countermeasure information 56 in the sixth row of the table shown in FIG. 2 is also information related to the trouble detected that the detected chipping size of the kerf 84 exceeds the allowable range. In this case, although captured images having different color views of the TEG 90 and the kerf 84 can be acquired, shooting is performed in an area where the TEG 90 is concentrated, and thus the kerf 84 is not properly detected. . Therefore, the trouble countermeasure 60 included in the trouble countermeasure information 56 includes a proposal to change the position for checking the kerf 84.

  The trouble countermeasure information 56 in the seventh row of the table shown in FIG. 2 is information related to troubles detected as being unable to properly align the cutting units 22a and 22b. For the alignment, a key pattern 92 selected from patterns formed on the workpiece 7 is used.

  However, when the key pattern 92 has a circular or annular shape, the orientation of the key pattern 92 in the captured image 58 does not change substantially even when the workpiece 7 is rotated. In this case, since the alignment cannot be properly performed even if the key pattern 92 is used, the trouble countermeasure 60 included in the trouble countermeasure information 56 includes a proposal to change the set key pattern 92.

  The trouble countermeasure information 56 in the eighth row of the table shown in FIG. 2 is information relating to troubles detected as being unable to properly perform the alignment of the cutting units 22a and 22b. This is because the set key pattern 92 cannot be detected because the illumination of the camera unit 48 is incorrectly adjusted. The trouble countermeasure 60 included in the trouble countermeasure information 56 includes a proposal for appropriately adjusting the illumination of the camera unit 48.

  As described above, the cutting apparatus 2 according to the present embodiment includes the trouble information storage unit 16b that can store various trouble countermeasure information 56. Therefore, even if an inexperienced operator detects a trouble, an appropriate trouble can be obtained. Countermeasure 60 can be implemented.

  In addition, this invention is not limited to description of said embodiment, A various change can be implemented. For example, in the above-described embodiment, the case where an appropriate troubleshooting countermeasure is implemented in the cutting device 2 has been described, but one aspect of the present invention is not limited thereto. For example, the processing apparatus according to one embodiment of the present invention may be a laser processing apparatus that performs laser processing on the workpiece 7 or a grinding apparatus that grinds the workpiece 7.

  In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented without departing from the scope of the object of the present invention.

DESCRIPTION OF SYMBOLS 1 Frame unit 3 Frame 5 Adhesive tape 7 Work piece 2 Cutting apparatus 4 Base 4a, 4b, 4c Opening 6 Cassette support stand 8 Cassette 10 X-axis moving table 12 Dust-proof drip-proof cover 14 Chuck table 14a Holding surface 14b Clamp 16 Control Unit 16a Trouble detection unit 16b Trouble information storage unit 18 Display unit 22a, 22b Cutting unit 24 Support structure 26 Cutting unit moving mechanism 28 Y-axis guide rail 30 Y-axis moving plate 32 Y-axis ball screw 34 Y-axis pulse motor 36 Z-axis guide rail 38 Z-axis moving plate 40 Z-axis ball screw 42 Z-axis pulse motor 48 Camera unit 50 Cleaning unit 52 Cleaning table 54 Cleaning nozzle 56 Trouble countermeasure information 58, 58a Captured image 60 Trouble countermeasure 62 G 64 Troubleshooting Details 66 Image Selection Screen 68 Measurement Value 70 Cursor 72 Icon 74 Scroll Bar 76 Troubleshooting Screen 78 Overview of Troubleshooting 80 Detailed Description of Troubleshooting 82 Device 84 Calf 86 Scheduled Line 88 Mask area 90 TEG
92 key pattern

Claims (4)

A chuck table that holds the workpiece, a processing unit that processes the workpiece held on the chuck table, a camera unit that captures a captured image by photographing the workpiece held on the chuck table, A processing apparatus comprising an input unit used for inputting instructions, a display unit, and a control unit for controlling each component,
The control unit has a trouble detection unit and a trouble information storage unit,
The trouble detection unit has a function of detecting the occurrence of a trouble using a captured image obtained by photographing the workpiece processed by the processing unit with the camera unit,
The trouble information accumulating unit has a function of accumulating a plurality of trouble countermeasure information including a captured image indicating occurrence of trouble and a trouble countermeasure for solving the trouble indicated in the captured image,
The control unit is
When the trouble detection unit detects the occurrence of a trouble, a captured image used for detection of the occurrence of the trouble, and a captured image included in each of the plurality of trouble countermeasure information stored in the trouble information storage unit, A function for displaying an image selection screen including
Trouble countermeasure information including the captured image selected by the input unit from the captured images displayed in the image selection screen and included in the plurality of trouble countermeasure information is read from the trouble information storage unit and included in the trouble countermeasure information A processing apparatus having a function of displaying a trouble countermeasure on the display unit.   2. The processing apparatus according to claim 1, wherein the input unit is used for editing the trouble countermeasure information stored in the trouble information storage unit.   The trouble detection unit includes information on the position or quality of a groove formed by the processing unit along a planned division line set on the surface of the workpiece, or information on the position or quality of an internal modified layer. The processing apparatus according to claim 1, wherein an occurrence of a trouble is detected by using a captured image acquired by the apparatus. The method of using a machining apparatus according to any one of claims 1 to 3, wherein a plurality of trouble countermeasure information is accumulated in the trouble information accumulation unit,
A processing step of processing the workpiece held by the chuck table with the processing unit;
Before or during the processing step, capturing the captured object to obtain the captured image, and detecting the occurrence of trouble using the captured image;
When the occurrence of trouble is detected in the detection step, the captured image used for detecting the occurrence of the trouble and the imaging included in each of the plurality of trouble countermeasure information stored in the trouble information storage unit A display step for displaying an image selection screen including the image on the display unit;
Trouble countermeasure information for selecting, from the captured images included in each of the plurality of trouble countermeasure information, the captured image in which the trouble closest to the trouble indicated in the captured image used to detect the occurrence of the trouble is selected. A selection step;
A trouble countermeasure display step of displaying the trouble countermeasure included in the trouble countermeasure information including the selected captured image on a display unit.