JP2018511703A - Flooding equipment for horizontal galvanic or wet chemical process lines for metal deposition on substrates - Google Patents

Abstract

The present invention is a flooding apparatus for a horizontal galvanic or wet chemical process line for the deposition of metal, in particular copper, on a substrate to be processed, comprising at least one flooding element and at least one first A flooding element, wherein the flooding element is mechanically connected to at least one first board guide element, the first board guide element being spatially arranged on the entry side of the flooding element Relates to the device. The present invention further relates to a horizontal galvanic or wet chemical process line for the deposition of metal, in particular copper, on a substrate to be processed, comprising at least a pair of such flooding devices arranged oppositely. The processing module.

Description

  The present invention relates to a flooding apparatus for horizontal galvanic or wet chemical process lines for the deposition of metals, in particular copper, on a substrate to be processed.

  The invention further relates to a processing module of a horizontal galvanic or wet chemical process line for the deposition of metals, in particular copper, on the substrate to be processed.

  The industry has been working for decades with horizontal galvanic (means by applying current) or wet chemistry (non-electrode means) for the deposition of metals, typically copper, tin or nickel, onto substrates to be processed. I already use the process line.

  In the past, the substrates being processed were relatively thick, rigid and heavy compared to the present. Now, as a result of the ongoing global technological miniaturization in the field of printed circuit boards, the marketplace can safely process substrates that are significantly thinner than anything that has been processed so far. Are increasingly demanding equipment and process lines that can. At the same time, as a result of the reduced thickness, the weight of each processed substrate is greatly reduced while the flexibility of the processed substrate is greatly increased.

  This leads to entirely new technical challenges in the transport and processing of the substrate being processed. Market requirements for substrates having thicknesses as large as 25 micrometers are not damaged by wrinkling or undesirable travel between individual transport rollers or axles below or above the transport level of the transport or process line This causes a serious problem of safely transporting a thin flexible substrate.

  Attempts in the past to avoid such poor guidance of flexible materials have been tried and the main approach has been to fix each substrate to be processed on both sides by clips, hooks or clamps.

  However, it is often difficult to run such a substrate safely through the entire process line, even if the substrate is initially fully stretched. One problem that arises with this approach is that the substrate bends after a predetermined time while still processing the substrate through the process line. This leads to undesirable qualitative metal deposition results and distribution. In the worst case, the bending effect is so strong that the substrate is wrinkled between the individual transport elements.

  Therefore, in light of the prior art, the object of the present invention is to provide an apparatus that can avoid any damage to a thin substrate processed during processing and guarantee safe transport.

  In particular, the object of the present invention is to provide an apparatus that can avoid the thin flexible substrate being able to travel between individual transfer elements that are generally arranged above and below the transfer level of the process line. It is to be.

  In addition, in particular, the problem of the present invention is that at the most dangerous sites, i.e. around the applied flooding device required to provide processing liquid in the individual processing modules of such a process line, It is an object to provide an apparatus in which a flexible thin substrate to be processed can be prevented from flowing upwards or downwards between the individual transport elements immediately after passing through the flooding device.

  In addition, the challenge is to provide an apparatus that can be installed in an existing process line without any significant effort or cost.

  These issues, and other issues that are not explicitly stated, but can be readily derived or recognized from the related art described herein by the introductory part, are all claimed in claim 1. Achieved by a flooding device having features. Appropriate modifications to the device of the invention are protected in the dependent claims 2-11. Furthermore, claim 12 provides for the treatment of a horizontal galvanic or wet chemical process line for the deposition of metals, in particular copper, on a substrate to be treated, having at least a pair of such opposed flooding devices. Includes modules. Appropriate changes to the processing modules of the invention are protected in the dependent claims 13-15.

  Accordingly, the present invention comprises at least one flooding element and at least one first substrate guide element, the flooding element being mechanically connected to the at least one first substrate guide element, The substrate guide element is spatially arranged on the entry side of the flooding element and provides a flooding device for horizontal galvanic or wet chemical process lines for the deposition of metals, in particular copper, on the substrate to be processed .

  This makes it possible to provide a flooding device that can avoid any damage to the thin substrate being processed during processing in an unthinkable manner and guarantees safe transport.

  In addition, the flooding apparatus of the present invention avoids running thin flexible substrates between individual transfer elements that are generally located above and below the transfer level of the process line.

  Furthermore, the flooding device of the present invention can be used to move up or down between individual transport elements immediately after the flexible thin substrate to be processed passes through the flooding device at the most dangerous site, i.e. around the flooding device itself. Avoid flowing.

  In addition, the apparatus of the present invention can be easily installed on existing process lines without any significant effort or cost.

  For a more complete understanding of the present invention, reference is made to the following detailed description of the invention considered in conjunction with the accompanying drawings.

1 shows a schematic side view of a processing module according to the invention comprising a pair of opposingly arranged flooding devices according to the first embodiment of the invention. 1 is a schematic side view of a processing module of the present invention comprising a pair of opposingly arranged flooding devices of the present invention according to a first embodiment of the present invention shown in FIG. Is shown. Viewed from another schematic side view of the processing module of the present invention comprising a pair of opposedly arranged flooding devices of the present invention according to the first embodiment of the present invention shown in FIG. A perspective view is shown. FIG. 2 shows a schematic top perspective view of the individual flooding device according to the first embodiment of the invention shown in FIG. 1. 4 is a schematic top view of the first, second and third substrate guiding elements of the individual inventive flooding device shown in FIG. 4 according to the first embodiment of the invention shown in FIG. FIG. Fig. 4 shows a schematic side view of a processing module of the present invention comprising a pair of opposingly arranged flooding devices of the present invention according to a second embodiment of the present invention. FIG. 6 is a schematic side view of the processing module of the present invention comprising a pair of opposedly arranged flooding devices of the present invention according to a second embodiment of the present invention shown in FIG. Is shown. FIG. 7 shows a schematic top perspective view of an individual flooding device according to a second embodiment of the invention shown in FIG. 6. Fig. 6 shows a schematic side view of a processing module of the present invention comprising a pair of opposingly arranged flooding devices of the present invention according to a third embodiment of the present invention. FIG. 9 is a schematic side view of a processing module of the present invention comprising a pair of opposingly arranged flooding devices of the present invention according to a third embodiment of the present invention shown in FIG. Is shown. FIG. 10 shows a schematic top perspective view of an individual flooding device according to a third embodiment of the invention shown in FIG. 9.

  As used herein, the term “flooding device” provides a processing liquid within a processing module of a horizontal galvanic or wet chemical process line for the deposition of metals, particularly copper, onto a substrate to be processed. It refers to the equipment required for this purpose.

  As used herein, the term “substrate guide element” refers to the transfer of a substrate being processed so that the substrate being processed does not travel between two adjacent individual transfer elements of a horizontal process line. Elements required to support the element, elements intended or intended to support the transport of the substrate being processed. Ultimately, such a substrate guide element achieves the objective of avoiding damage to the substrate being processed while passing through a horizontal process line.

  As used herein, the term “entry side” refers to the entry side of a flooding device in a horizontal process line, and the substrate to be processed is transported in the flooding device before entering the flooding device in the transport direction. After reaching the area, the substrate to be processed travels through the flooding device.

  As used herein, the term “exit side” refers to the exit side of a flooding device in a horizontal process line, and the substrate being processed is a flooding device in which the substrate to be processed has passed previously in the transport direction. After exiting, the transport area in the flooding apparatus is reached.

  In one embodiment, the flooding device further comprises at least one second substrate guide element, the flooding device being mechanically connected to the at least one second substrate guide element, and the second substrate guide The element is spatially arranged on the exit side of the flooding element.

  In one embodiment, each of the first substrate guide element and the second substrate guide element has a plurality of protrusions, and the protrusions of the first substrate guide element are arranged in the transport direction of the substrate to be processed. On the contrary, it extends in the axial direction from the flooding element, and the protrusion of the second substrate guide element extends in the axial direction from the flooding element in the transport direction of the substrate to be processed.

  The plurality of protrusions may extend in a strictly linear fashion in the axial direction in order to simplify the substrate to be processed entering or passing through, in particular entering the respective flooding device and flooding element. Can be more or less bent.

  The downward bending of the protrusions is disadvantageous by increasing the risk of damaging each substrate being processed that enters or exits the flooding element, in particular entering.

  In one embodiment, the plurality of protrusions of the first substrate guide element have a transport direction of the substrate to be processed rather than the plurality of protrusions of the second substrate guide element in the transport direction of the substrate to be processed. Conversely, it has a longer axial dimension.

  In principle, the plurality of protrusions on both sides of the flooding element can be the same length or in other words the same axial dimension. Providing a protrusion on the entry side of the flooding element with an axial dimension that is longer or longer than the protrusion on the exit side of the flooding element further limits the risk of damaging the substrate being processed. I will provide a. The entry of the flooding element is much more dangerous than the exit of the flooding element.

  The entry or exit of the flooding element in the sense of the present invention, of course, of the processing module as can be seen typically in the attached FIGS. 1, 2, 3, 6, 7, 9 and 10. , Meaning the entry of the substrate to be processed into the area between two individual flooding elements arranged opposite to each other.

  In one embodiment, each protrusion of the plurality of protrusions of the first substrate guide element and the second substrate guide element is directly connected to the flooding element and functions independently of the adjacent protrusions. To do.

  In another embodiment, each of the first substrate guide element and / or the second substrate guide element is at least one of at least two adjacent protrusions mechanically connected by at least one mechanical connection element. Has two sections.

  Each section of connected protrusions on each side of the flooding element can be individually adapted to customer needs such as specific substrate material, thickness or composition. Such a section offers the advantage of having greater flexibility to adapt the first and / or second substrate guiding elements depending on process line conditions.

  In another embodiment, all protrusions of the first substrate guide element and / or all protrusions of the second substrate guide element are provided by at least one mechanical connection element on each side of the flooding element. Mechanically connected.

  As can be seen in some of the drawings (FIGS. 2, 3, 4, 5, 7, and 8), such a case has a respective first and / or on at least one side of the flooding element. Alternatively, a kind of lattice structure of the second substrate guiding element is provided. Thereby, the first and / or second substrate guide element can be easily adapted to existing flooding elements of an already operating process line that uses the axle as a transport element. Thereby, expensive modification of the transport system can be avoided. The only requirement is the adaptation of the free space between adjacent protrusions of the first and / or second substrate guide element to the axle wheel size. Both axles and rollers are known individual transport elements of the prior art and are generally arranged below the transport level of the substrate to be processed, at least in the form of rows below the transport elements. Very often, similar upper rows of such individual transport elements are also arranged above the transport level of the substrate to be processed.

  In another embodiment of the present invention, the flooding element connects at least one third substrate connecting the first substrate guide element on the entry side of the flooding element with the second substrate guide element on the exit side of the flooding element. Further comprising a guide element, the first, second and third substrate guide elements form an attachment portion which is mechanically connected to the flooding element as an integral part.

  This provides the additional advantage that the entire attachment part consisting of the first, second and third substrate guiding elements can be removed from the respective flooding elements of the respective processing modules of the process line. This allows the attachment part to be easily replaced for maintenance or maintenance without having to remove the entire flooding device from the process line. This saves time, cost and effort.

  In one embodiment, the flooding element has at least one first step and a second step on the flooding element surface directed to the transport path of the substrate to be processed, and the process liquid is on the flooding element surface. Spill from.

  In one alternative embodiment, the first substrate guide element and / or the second substrate guide element is a continuous member, such as a sheet or plate, and the first substrate guide element is processed. The second substrate guide element extends in the axial direction from the flooding element in the transport direction of the substrate to be processed, and extends in the axial direction from the flooding element in the direction opposite to the substrate transport direction.

  This offers the advantage of being independent of the individual transport elements used in each process line. There is no free space between the two sub-elements, and the two sub-elements must be precisely manufactured so as to be adaptable to the existing transport elements of the respective process line. That is, this is an inexpensive and quick possibility to produce at least minimal substrate guidance, which damages the substrate being processed while entering or exiting each flooding element. Risk to be minimized.

  Here, the first substrate guide element preferably has a longer axial dimension, as opposed to the substrate transport direction to be processed, than the second substrate guide element in the substrate transport direction to be processed. It can be.

  Furthermore, the present invention comprises such a flooding device of the present invention in which the processing module is arranged in at least one pair as opposed to each other as described above, each flooding device comprising at least one flooding element and at least one first flooding device. And the flooding element is mechanically connected to at least the first substrate guide element, and the first substrate guide element is spatially disposed on the entry side of the flooding element. It also relates to a processing module of a horizontal galvanic or wet chemical process line for the deposition of metals, in particular copper, on the substrate to be processed.

  Such a pair of flooding devices produces a defined flow of processing liquid, which then enters the respective processing module. The flow of processing liquid can cause problems if the substrate being processed is thin and flexible. In such cases, the substrate to be processed is generally affected by the resulting processing liquid flow and travels between the first transport elements in front of or behind the respective flooding device to achieve the desired transport. Get out of the level. This problem of the prior art can be solved by the processing module.

  All the above-mentioned changes, modifications and embodiments of the flooding apparatus of the present invention can be included in such a processing module of the present invention.

  In one embodiment, each flooding element has at least one first step and a second step on the surface of the flooding element that is directed to the substrate transport path to be processed, and the process liquid is a flooding element. Escapes from the surface.

  This provides the additional advantage that the cross section of the region between two opposingly arranged flooding elements is increased in two steps in the transport direction. Here, the known venturi effect occurs and the speed of the processing liquid is reduced, which has a positive effect on the transport stability of the thin and flexible processed substrate while leaving the respective area between the two flooding elements. give.

  In one embodiment, each flooding apparatus further comprises at least one second substrate guide element, the flooding element being mechanically connected to the at least one second substrate guide element, and the second substrate. The guide elements are spatially disposed on the exit side of the flooding element, and each flooding element connects the first substrate guide element on the entry side of the flooding element with the second substrate guide element on the exit side of the flooding element. , Further comprising at least one third substrate guide element, the first, second and third substrate guide elements forming an attachment part which is mechanically connected to the flooding element as an integral part.

  In one embodiment, each of the first substrate guide element and the second substrate guide element has a plurality of protrusions, and the protrusions of the first substrate guide element are arranged in the transport direction of the substrate to be processed. Conversely, the protrusions of the second substrate guide elements extend in the axial direction from the respective flooding elements, and the protrusions of the second substrate guide elements extend in the axial direction from the respective flooding elements in the transport direction of the substrate to be processed. And / or all protrusions of the second substrate guiding element are mechanically connected by at least one mechanical connection element on each side of the flooding element.

  Thus, the present invention solves the problem of transporting thin (as large as 25 micrometers) flexible substrates to be processed through horizontal process lines without damaging the substrates. Particularly around the most dangerous areas, ie around the applied flooding device, the flexible thin processed substrate flows further upwards or downwards between the individual transport elements immediately after passing through the flooding device. It is not possible.

  The substrate guide element of the present invention may be attached to a less dangerous part of a horizontal galvanic or wet chemical process line for metal. For example, the substrate guide element can be attached to an ultrasonic device provided in a corresponding process line.

  The following non-limiting examples are provided to illustrate one embodiment of the invention and to facilitate understanding of the invention, but are intended to limit the scope of the invention as defined by the claims appended hereto. It is not intended to be limiting.

  The first embodiment is shown in FIGS. 1 to 5 below.

  Referring now to the drawings, FIG. 1 shows a schematic side view of a processing module 1 according to the invention of a horizontal galvanic or wet chemical process line for the deposition of metals, in particular copper, on a substrate to be processed. The processing module 1 has a pair of such flooding devices of the present invention arranged in opposition to each other according to the first embodiment of the present invention.

  Here, each of the two illustrated flooding devices comprises a flooding element 2 and a first substrate guide element 5, which is mechanically connected to the first substrate guide element 5, The substrate guide element 5 is spatially arranged on the entry side 8 of the flooding element 2.

  Each illustrated flooding apparatus further comprises a second substrate guide element 6, the flooding element 2 being mechanically connected to the second substrate guide element 6, the second substrate guide element 6 being spatially At the outlet side 9 of the flooding element 2.

  Further, each of the first substrate guide element 5 and the second substrate guide element 6 has a plurality of protrusions, and the protrusions of the first substrate guide element 5 are opposite to the transport direction of the substrate to be processed. Extends from the flooding element 2 in the axial direction. The protruding portion of the second substrate guide element 6 extends in the axial direction from the flooding element 2 in the transport direction of the substrate to be processed.

  In this first preferred embodiment, the plurality of protrusions of the first substrate guide element 5 are processed more than the plurality of protrusions of the second substrate guide element 6 in the transport direction of the substrate to be processed. It has a longer axial dimension than the substrate transport direction.

  Here, each protrusion of the plurality of protrusions of the second substrate guide element 6 is directly connected to the flooding element 2 and functions independently of the adjacent protrusions.

  Each flooding element 2 shown in FIG. 1 connects a first substrate guide element 5 on the entry side 8 of the flooding element 2 to a second substrate guide element 6 on the exit side 9 of the flooding element 2. A first substrate guide element 5, a second substrate guide element 6 and a third substrate guide element 4 form an attachment part which is mechanically connected to the flooding element 2 as an integral part. Yes.

  Here, the flooding element 2 has a first step portion 7a and a second step portion 7b on the surface of the flooding element 2 directed to the transport path of the substrate to be processed. Escapes from the surface.

  In order to further describe the entire processing module 1, a pair of oppositely arranged transport elements 3 are also shown on the entry side 8 and the exit side 9 of the processing module 1. As can be readily seen from FIGS. 2 and 3 below, the transport element 3 of the first preferred embodiment is an axle.

  FIG. 2 is a schematic side view of a processing module of the present invention having a pair of opposed flooding devices of the present invention according to the first embodiment of the present invention shown in FIG. FIG.

  Here, in this first embodiment of the invention, all the projections of the first substrate guiding element 5 are mechanically moved by at least one mechanical connecting element 11 on the entry side 8 of the flooding element 2. It is easy to see that it is connected to.

  Furthermore, the fixing element 10 achieves the object of detachably connecting the attachment part including the first substrate guiding element 5, the second substrate guiding element 6 and the third substrate guiding element 4 to the respective flooding element 2. It is shown. Such an attachment portion can also be used as a reinforcement to increase the overall rigidity of the flooding device when the flooding element is made from a polymer material such as polypropylene, polyvinyl chloride or polyethylene. In such a case, the attachment portion is formed from a metal or alloy such as stainless steel, titanium or nickel alloy. Such a combination of a plastic flooding element 2 and a metal attachment part is typically advantageous in a horizontal process line rinse module.

  For the sake of clarity, the respective upper row of transport elements 3 in the form of axles on both sides 8, 9 of the respective flooding device is not shown.

  FIG. 3 shows another schematic side view of the processing module of the present invention with a pair of opposingly arranged flooding devices of the present invention according to the first embodiment of the present invention shown in FIG. The perspective view seen from is shown. FIG. 3 is basically the same as FIG. 2 except that here all the transport elements 3 are shown.

  4 is a schematic top perspective view of an individual flooding device of the present invention according to the first embodiment of the present invention shown in FIG.

  Both FIGS. 4 and 5 serve the purpose of showing one attachment part comprising the first substrate guiding element 5, the second substrate guiding element 6 and the third substrate guiding element 4, respectively. In FIG. 4, each flooding element 2 is still included, whereas in FIG. 5, the flooding element 2 is excluded for illustration.

  The second embodiment is shown in FIGS. 6 to 8 below.

  FIG. 6 shows a schematic side view of a processing module 1 ′ according to the invention of a horizontal galvanic or wet chemical process line for the deposition of metals, in particular copper, on a substrate to be processed. 'Has a pair of opposingly arranged flooding devices of the present invention according to a second embodiment of the present invention.

  Here, each of the two illustrated flooding devices comprises a flooding element 2 'and a first substrate guide element 5', which is mechanically connected to the first substrate guide element 5 '. The first substrate guiding element 5 ′ is spatially arranged on the entry side 8 ′ of the flooding element 2 ′.

  Each illustrated flooding apparatus further comprises a second substrate guide element 6 ′, the flooding element 2 ′ being mechanically connected to the second substrate guide element 6 ′, and the second substrate guide element 6 ′. 'Is spatially arranged on the exit side 9' of the flooding element 2 '.

  Further, each of the first substrate guide element 5 ′ and the second substrate guide element 6 ′ has a plurality of protrusions, and the protrusions of the first substrate guide element 5 ′ are in the transport direction of the substrate to be processed. On the contrary, it extends in the axial direction from the flooding element 2 '. The protruding portion of the second substrate guide element 6 'extends in the axial direction from the flooding element 2' in the direction of transport of the substrate to be processed.

  To further illustrate the entire processing module 1 ', a pair of oppositely arranged transport elements 3' on the entry side 8 'and the exit side 9' of the processing module 1 'are also shown. As can be readily seen from FIG. 7 below, the transport element 3 'of the second preferred embodiment is an axle.

  In contrast to the first embodiment shown in FIGS. 1 to 5, there is no attachment part that can be exchanged or used as a reinforcement. In other words, this second embodiment is the case where the processing modules 1 ′ require application of higher temperatures within the respective processing modules 1 ′ or the processing modules 1 ′ are aggressive chemicals such as permanganate. Alternatively, it is preferably used when application of an oxidizing chemical is required. In these cases, the entire flooding device is made of metal, preferably stainless steel, on the one hand to provide excellent chemical resistance of the material of the flooding device and on the other hand to provide sufficient mechanical rigidity to avoid material distortion. It is formed from steel. Such distortion typically occurs when flooding devices formed from plastic materials are used at higher process liquid temperatures.

  FIG. 7 is a schematic side view of a processing module 1 ′ of the present invention having a pair of opposingly arranged flooding devices according to the second embodiment of the present invention shown in FIG. The perspective view seen from is shown.

  In this case, all the protrusions of the first substrate guide element 5 ′ and all the protrusions of the second substrate guide element 6 ′ are machined by mechanical connection elements 11 ′ on each side of the flooding element 2 ′. Connected.

  FIG. 8 is a schematic top perspective view of an individual flooding device of the present invention according to the second embodiment of the present invention shown in FIG.

  For the sake of clarity, the respective upper row of transport elements 3 'in the form of axles on both sides 8', 9 'of the respective flooding device is not shown.

  The third embodiment is shown in FIGS. 9 to 11 below.

  FIG. 9 shows a schematic side view of a processing module 1 ″ according to the invention of a horizontal galvanic or wet chemical process line for the deposition of metals, in particular copper, on a substrate to be processed. 1 ″ has a pair of such a flooding device of the present invention arranged in opposition according to a third embodiment of the present invention.

  Here, each of the two illustrated flooding devices comprises a flooding element 2 ″ and a first substrate guide element 5 ″, which is mechanically coupled to the first substrate guide element 5 ″. Connected, the first substrate guide element 5 '' is spatially arranged on the entry side 8 '' of the flooding element 2 ''.

  Each illustrated flooding device further comprises a second substrate guiding element 6 '', the flooding device 2 '' being mechanically connected to the second substrate guiding element 6 '' and the second substrate The guide element 6 '' is spatially arranged on the outlet side 9 '' of the flooding element 2 ''.

  Furthermore, the first substrate guide element 5 ″ and the second substrate guide element 6 ″ each have a plurality of protrusions, the protrusions of the first substrate guide element 5 ″ being the substrate to be processed. Contrary to the conveying direction, the flooding element 2 ″ extends in the axial direction. The protrusion of the second substrate guide element 6 "extends in the axial direction from the flooding element 2" in the direction of transport of the substrate to be processed.

  Here, the flooding element 2 ″ has a first step portion 7a ′ and a second step portion 7b ′ on the surface of the flooding element 2 ″ directed to the transport path of the substrate to be processed. Flows out of the surface of the flooding element 2 ″.

  In order to further describe the entire processing module 1 ″, a pair of oppositely arranged transport elements 3 ″ is also shown on the entry side 8 ″ and the outlet side 9 ″ of the processing module 1 ″. As can be easily seen from FIG. 10 below, the transport element 3 ″ of the first preferred embodiment is a roller, and each roller has a plurality of recesses 13. The recess can flow upward or downward (depending on whether the recess, the roller with the recess and the corresponding protrusion are located above or below the transport level of the substrate being processed). In order to minimize the amount of liquid, it serves the purpose associated with the corresponding protrusion.

  In this case, the flooding device provides a reinforcing element 12 for the flooding element 2 "that may be required to increase the stiffness if the flooding element 2" is made of plastic. A dam roller 14 is also shown for illustrative purposes.

  FIG. 10 is a schematic side view of a processing module of the present invention having a pair of opposingly arranged flooding devices of the present invention according to the third embodiment of the present invention shown in FIG. FIG.

  In this case, each protrusion of the plurality of protrusions of the first substrate guide element 5 ″ and the second substrate guide element 6 ″ is directly connected to the flooding element 2 ″, and adjacent protrusions It can be seen from FIG.

  FIG. 11 is a schematic top perspective view of each flooding device of the present invention according to the third embodiment of the present invention shown in FIG.

  While the principles of the invention have been described with reference to specific embodiments and are provided for purposes of illustration, various modifications thereof will become apparent to those skilled in the art having read this specification. Should be understood. Accordingly, it is to be understood that the invention disclosed herein is intended to cover such modifications as fall within the scope of the appended claims. The scope of the invention is limited only by the scope of the appended claims.

1, 1 ′, 1 ″ processing module 2, 2 ′, 2 ″ flooding element 3, 3 ′, 3 ″ transport element 4 third substrate guide element 5, 5 ′, 5 ″ first substrate guide Element 6, 6 ′, 6 ″ Second substrate guide element 7a, 7a ′ First step of flooding element 7b, 7b ′ Second step of flooding element 8, 8 ′, 8 ″ of flooding element Entry side 9, 9 ', 9''Outlet side of flooding element 10 Fixing element 11, 11' Mechanical connection element 12 Reinforcing element 13 Recessed part 14 Dam roller

Claims (15)

A flooding apparatus for horizontal galvanic or wet chemical process lines for the deposition of metals, in particular copper, on a substrate to be processed,
And at least one flooding element (2, 2 ′, 2 ″) and at least one first substrate guide element (5, 5 ′, 5 ″). ″) Is mechanically connected to the at least one first substrate guide element (5, 5 ′, 5 ″), the first substrate guide element (5, 5 ′, 5 ″) Is spatially arranged on the entry side (8, 8 ′, 8 ″) of the flooding element (2, 2 ′, 2 ″).   The flooding device further comprises at least one second substrate guide element (6, 6 ′, 6 ″), the flooding element (2, 2 ′, 2 ″) being the at least one second substrate. The second substrate guide element (6, 6 ′, 6 ″) is spatially connected to the guide element (6, 6 ′, 6 ″) spatially. , 2 ") on the outlet side (9, 9 ', 9").   The first substrate guide element (5, 5 ′, 5 ″) and the second substrate guide element (6, 6 ′, 6 ″) each have a plurality of protrusions, and the first substrate guide element (5, 5 ′, 5 ″) The protruding portion of the substrate guide element (5, 5 ′, 5 ″) extends in the axial direction from the flooding element (2, 2 ′, 2 ″) in the opposite direction to the transport direction of the substrate to be processed. And the protrusion of the second substrate guide element (6, 6 ′, 6 ″) is pivoted from the flooding element (2, 2 ′, 2 ″) in the transport direction of the substrate to be processed. The flooding device according to claim 1, wherein the flooding device extends in a direction.   The plurality of protrusions of the first substrate guide element (5, 5 ′, 5 ″) are formed by the second substrate guide element (6, 6 ′, 6) in the transport direction of the substrate to be processed. The flooding apparatus according to claim 3, wherein the flooding apparatus has an axial dimension that is longer than the plurality of protrusions of ″) in the direction opposite to the transport direction of the substrate to be processed.   Each protrusion of the plurality of protrusions of the first substrate guide element (5, 5 ′, 5 ″) and the second substrate guide element (6, 6 ′, 6 ″) is the flooding element. The flooding device according to claim 3 or 4, wherein the flooding device is directly connected to (2, 2 ', 2' ') and functions independently from an adjacent protrusion.   The first substrate guiding element (5, 5 ') and / or the second substrate guiding element (6, 6') are each mechanically driven by at least one mechanical connecting element (11, 11 '). 5. Flooding device according to claim 3 or 4, characterized in that it has at least one section of at least two adjacent protrusions connected.   All the protrusions of the first substrate guide element (5, 5 ′) and / or all the protrusions of the second substrate guide element (6, 6 ′) are connected to the flooding element (2, 2 ′). Flooding device according to claim 3 or 4, characterized in that it is mechanically connected by at least one mechanical connection element (11, 11 ') on each side of the.   The flooding element (2) moves the first substrate guide element (5) on the entry side (8) of the flooding element (2) from the second on the exit side (9) of the flooding element (2). At least one third substrate guide element (4) connected to the substrate guide element (6) of the first substrate guide element (5), the second substrate guide element (6) and the The third substrate guiding element (4) forms an attachment part which is mechanically connected to the flooding element (2) as an integral part. The flooding device according to the item.   The flooding element (2, 2 ″) has at least one first step (7a, 7a ′) on the surface of the flooding element (2, 2 ″) directed to the transport path of the substrate to be processed. ) And a second step (7b, 7b '), wherein process liquid flows out of the surface of the flooding element (2, 2') The flooding device according to claim 1.   The first substrate guide element (5, 5 ′, 5 ″) and / or the second substrate guide element (6, 6 ′, 6 ″) are continuous members such as sheets or plates. The first substrate guide element (5, 5 ′, 5 ″) extends in the axial direction from the flooding element (2, 2 ′, 2 ″) in the opposite direction to the transport direction of the substrate to be processed. The second substrate guide element (6, 6 ′, 6 ″) extends axially from the flooding element (2, 2 ′, 2 ″) in the transport direction of the substrate to be processed. The flooding device according to claim 1, wherein the flooding device is provided.   The first substrate guide element (5, 5 ′, 5 ″) is more than the second substrate guide element (6, 6 ′, 6 ″) in the transport direction of the substrate to be processed. The flooding apparatus according to claim 10, wherein the flooding apparatus has an axial dimension that is longer than the transport direction of the substrate to be processed. A processing module (1, 1 ′, 1 ″) for a horizontal galvanic or wet chemical process line for the deposition of metals, in particular copper, on a substrate to be processed,
12. At least a pair of opposingly arranged flooding devices according to any one of claims 1 to 11, each flooding device comprising at least one flooding element (2, 2 ', 2''), At least one first substrate guide element (5, 5 ′, 5 ″), said flooding element (2, 2 ′, 2 ″) being said at least one first substrate guide element (5). , 5 ′, 5 ″) and the first substrate guiding element (5, 5 ′, 5 ″) is spatially connected to the flooding element (2, 2 ′, 2 ″). ) On the entry side (8, 8 ′, 8 ″) of the processing module (1, 1 ′, 1 ″).   Each flooding element (2, 2 ″) has at least one first step (7a, 7a) on the surface of the flooding element (2, 2 ″) directed to the substrate transport path to be processed. Process module (13) according to claim 12, characterized in that it has a second step (7b, 7b ') and process liquid flows out of the surface of the flooding element (2, 2'). 1, 1 ').   Each flooding device further comprises at least one second substrate guide element (6), and the flooding element (2) is mechanically connected to the at least one second substrate guide element (6). The second substrate guide element (6) is spatially disposed on the outlet side (9) of the flooding element (2), and each flooding element (2) is a part of the flooding element (2). At least one third substrate connecting the first substrate guide element (5) on the entry side (8) with the second substrate guide element (6) on the outlet side (9) of the flooding element (2). Of the first substrate guide element (5) and the second substrate guide element (6). 14. Process according to claim 12 or 13, characterized in that the third substrate guiding element (4) forms an attachment part mechanically connected to the flooding element (2) as an integral part. Module (1).   The first substrate guide element (5, 5 ′) and the second substrate guide element (6, 6 ′) each have a plurality of protrusions, and the first substrate guide element (5, 5 ′). ) Extend in the axial direction from each flooding element (2, 2 ′) in the opposite direction to the transport direction of the substrate to be processed, and the second substrate guide element (6, 6 ′). The protrusions extend in the axial direction from the flooding elements (2, 2 ′) in the transport direction of the substrate to be processed, and all the first substrate guide elements (5, 5 ′) The protrusions and / or all the protrusions of the second substrate guiding element (6, 6 ') are at least one mechanical connection element on each side of the flooding element (2, 2') 11, 11 ') are mechanically connected by any one of claims processing module of claims 12 to 14 (1, 1').

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