JP2018511760A - Hydraulic cylinder with integrated booster pump - Google Patents

Abstract

A hydraulic cylinder provided with a booster pump is provided. A hydraulic cylinder includes a first main body section divided into an upper cylinder and a lower cylinder so as to operate at a low air pressure when the load is low, and a second main body section with a high pressure increase ratio when the load is high. The booster pump arrange | positioned so that fluid communication with the 1st main-body part is provided. [Selection] Figure 1

Description

  The present invention relates to a hydraulic cylinder, and more particularly to a hydraulic cylinder integrally provided with a booster pump.

  Generally, a booster pump device has a structure in which a booster pump is attached to a hydraulic oil storage tank to operate only the booster pump, and is operated only by the booster pump even at the bottom load. For this reason, the operation of the piston rod of the cylinder is delayed, which has a drawback of consuming a lot of energy.

  The hydraulic pressure intensifier (Patent Document 1) is designed to advance the piston rod at a high speed when the load is low, and to output a high output when the load is high, and operates the piston rod only once with a booster. It is like that. Therefore, it is necessary to manufacture a cylinder for each cylinder.

Korean Patent Registration No. 10-0704958

  It is an object of the present invention to provide a hydraulic apparatus integrally including a booster pump that operates with a low pressure increase ratio when the hydraulic cylinder is under low load and a high pressure increase ratio when the hydraulic cylinder is under high load. .

  In order to achieve the above-described object, a hydraulic cylinder integrally provided with a booster pump according to the present invention includes a first pneumatic working chamber on a lower side and a first hydraulic working chamber on an upper side, and an operating piston in the inside. And a first pneumatic passage is formed below the first pneumatic working chamber, a second pneumatic passage is formed above the first pneumatic working chamber, and adjacent to the upper side of the first hydraulic working chamber. The first hydraulic passage and the lower cylinder having a small-diameter hole in the upper part; a pressure-increasing piston and a slide-type piston are disposed therein; An upper cylinder in which two hydraulic working chambers are formed, a second pneumatic working chamber is formed on the upper side, and a second hydraulic passage is formed on the lower side of the second hydraulic working chamber; Intercommunication with the 3rd pneumatic passage and the 2nd pneumatic working room which mutually communicate is possible A sixth pneumatic passage that is opened and closed, a fifth pneumatic passage that is opened and closed by two check valves, and a fourth compressed air discharge passage that discharges compressed air in the internal space are formed, and the flow of the compressed air is disposed in the internal space. A first master valve provided at the upper end of the second pneumatic working chamber of the upper cylinder; a third pneumatic working chamber, a third hydraulic working chamber, and a fourth hydraulic working chamber. A pump piston is disposed therein, the pump piston forms a backward pneumatic working chamber on the lower side, a forward pneumatic working chamber is formed on the upper side, and the third pneumatic working chamber has a lower part Is provided with a second valve rod that is opened and closed by the contact of the ninth pneumatic passage and the pump piston, and a first valve rod that is opened and closed by the contact of the pump piston is provided at an upper portion thereof, and the third hydraulic working chamber is a third check valve. By A third hydraulic passage that is opened and closed, a fourth hydraulic passage that is opened and closed by a fourth check valve are formed inside, a fourth hydraulic passage that is opened and closed by a fifth check valve, and a sixth check A second main body part having a sixth hydraulic passage opened and closed by a valve formed therein; and an eleventh air pressure passage and a ninth air passage communicating with the forward pneumatic working chamber through the first valve rod therein; A tenth pneumatic passage communicating with the pressure passage; a seventh pneumatic passage enabling mutual communication with the third pneumatic working chamber; and a twelfth air communicating with the first valve rod in the internal space of the second master valve. A pressure passage and a thirteenth pneumatic passage that allows inflow of compressed air in the internal space of the second master valve is formed, and includes a second valve spool that is disposed in the internal space and controls the flow of the compressed air; Provided at the upper end of the pneumatic working chamber A second master valve.

  In the present invention, the operating piston is preferably composed of an operating rod, a piston ring, and a guide rod.

  The piston ring may be disposed between the first pneumatic passage and the second pneumatic passage.

  The slide type piston is preferably arranged so as to be slidable along the length direction of the piston rod of the pressure increasing piston, and the slide type piston is preferably elastically supported by the pressure increasing piston by a spring.

  The piston rod of the pump piston preferably extends movably into the third pneumatic working chamber, the third hydraulic working chamber, and the fourth hydraulic working chamber.

  The fourth hydraulic passage and the sixth hydraulic passage may be connected to be able to communicate with the second hydraulic passage, and the third hydraulic passage and the fifth hydraulic passage may be connected to be able to communicate with the first hydraulic passage.

  Preferably, the first valve rod includes a first pressure spring, and the second valve rod includes a second pressure spring.

  The second body portion may include an eighth pneumatic passage for supplying compressed air to the second valve rod, and a fourteenth compressed air discharge passage for discharging compressed air through the second valve rod.

  The upper cylinders can be arranged in a row in fluid communication with the upper side of the lower cylinder.

  The booster piston of the upper cylinder is preferably arranged coaxially with the working piston of the lower cylinder.

  The upper cylinder can be arranged parallel to the lower cylinder.

  The booster piston of the upper cylinder is preferably arranged on both axes with the working piston of the lower cylinder.

  The fifth pneumatic passage preferably includes two check valves that can be opened and closed individually by a flow of air in the forward or reverse direction of the air pressure.

  The features and advantages of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings.

  Prior to this, the terms and words used in the specification and claims should not be construed as ordinary and dictionary meaning, and the inventor will explain his invention in the best possible manner. Therefore, it should be interpreted as a meaning and a concept consistent with the technical idea of the present invention based on the principle that the concept of the term can be appropriately defined.

  As described above, according to the description of the present invention, since the present invention operates compressed air according to low load and high load and consumes only an appropriate amount of energy, a hydraulic cylinder capable of achieving an energy saving effect is provided. become.

  Since the present invention generates less heat than existing hydraulic pumps, the hydraulic oil storage space can be reduced and a compact structure can be designed. Further, the present invention is configured to continuously provide a high output in order to alleviate the pressure pulsation phenomenon.

  Hereinafter, a hydraulic cylinder integrally provided with a booster pump according to the present invention will be described in detail with reference to the accompanying drawings.

  Advantages, features, and methods of achieving the same of the present invention will be clarified through embodiments described later in detail with reference to the accompanying drawings. In this specification, the same reference numerals denote the same or similar components throughout the specification by attaching reference symbols to the components of each drawing. In addition, when there is a possibility that a specific description of a known technique related to the present specification may obscure the gist of the present invention, a detailed description thereof will be omitted.

  A hydraulic cylinder integrally provided with a booster pump according to a preferred embodiment of the present invention has the following configuration.

  Referring to FIG. 1, a hydraulic cylinder according to a preferred embodiment of the present invention is arranged in a first body portion (no reference numeral) partitioned into an upper cylinder and a lower cylinder, and arranged in fluid communication with the first body portion. The second main body 30 is provided, that is, a booster pump. Here, the first main body section divides the cylinder up and down. The upper cylinder 20 is provided with a pressure increasing piston P2 fitted with a spring S, while the lower cylinder 10 is provided with an operating piston P1. ing. In particular, in the hydraulic cylinder according to a preferred embodiment of the present invention, the operating piston P1 and the pressure increasing piston P2 are arranged on the same line, and the lower cylinder 10 and the upper cylinder 20 are arranged in a line.

  Specifically, the lower cylinder 10 is formed with a first pneumatic working chamber 110 on the lower side and a first hydraulic working chamber 120 on the upper side, and has a small-diameter hole 121 on the upper part thereof. The lower cylinder 10 has a first pneumatic passage H1 adjacent to the lower side, a first hydraulic passage W1 adjacent to the upper side, and a second pneumatic pressure between the first pneumatic passage H1 and the first hydraulic passage W1. A passage H2 is formed. The operating piston P1 includes an operating rod P1-1, a piston ring P1-2, and a guide rod P1-3. Preferably, the piston ring P1-2 is disposed between the first pneumatic passage H1 and the second pneumatic passage H2. The first pneumatic working chamber 110 is formed with a backward pneumatic working chamber 110a in the lower portion and a forward pneumatic working chamber 110b in the upper portion by the piston ring P1-2. That is, the first pneumatic passage H1 communicates with the backward-traveling pneumatic working chamber 110a, and the second pneumatic passage H2 communicates with the forward-traveling pneumatic working chamber 110b. Of course, the first hydraulic passage W1 communicates with the first hydraulic working chamber 120.

  The upper cylinder 20 is disposed on the upper side of the lower cylinder 10 and is provided so as to be in fluid communication via a hole 121 of the lower cylinder 10. As shown in the figure, the upper cylinder 20 has a pressure-increasing piston P2 disposed therein, a second hydraulic working chamber 220 is formed in the lower portion, and a second pneumatic working chamber 210 is formed in the upper portion. The second hydraulic working chamber 220 and the second pneumatic working chamber 210 are partitioned into a slide type piston P3. The second hydraulic passage W2 communicates with the second hydraulic working chamber 220 and is disposed below the bottom dead center of the slide type piston P3.

  As described above, the upper cylinder 20 includes the pressure increasing piston P <b> 2 in the internal space that defines the second pneumatic working chamber 210 and the second hydraulic working chamber 220. The pressure-increasing piston P2 includes a piston rod P2-1 extending in the length direction at the bottom. The piston rod P2-1 is movably provided in the first hydraulic working chamber 120 and the second hydraulic working chamber 220 through the hole 121 of the lower cylinder 10. The free end of the piston rod P2-1 is accessible in the guide rod P1-3 of the working piston P1. Preferably, the piston rod P2-1 includes a slide type piston P3 that is slidable along the length direction of the piston rod P2-1. The slide type piston P3 is provided on the pressure increasing piston P2 via a spring S.

  In particular, the upper end of the upper cylinder 20 includes a first master valve 250 that controls the compressed air to flow into and / or out of the second pneumatic working chamber 210. The first master valve 250 can control the flow of compressed air using the first valve spool 260 as a control means. The first master valve 250 includes a third pneumatic passage H3, a fourth compressed air discharge passage H4, and a sixth pneumatic passage H6 that are selectively opened and closed via the first valve spool 260, while two check valves are provided. A fifth pneumatic passage H5 that is opened and closed by 261 and 262 is provided. Here, the fifth pneumatic passage H5 of the first master valve 250 includes two check valves 261 and 262 so as to be able to be individually opened and closed along the flow direction of the pneumatic fluid (forward direction and reverse direction). For example, the second check valve 262 can be opened and the first check valve 261 can be closed so that the forward flow of discharging the internal air of the first master valve 250 to the outside is possible. Also, unlike this, the second check valve 262 can be closed and the first check valve 261 can be opened so that the reverse air can be flown into the internal space of the first master valve 250. . The sixth pneumatic passage H6 is formed to communicate between the first master valve 250 and the second pneumatic working chamber 210.

  The second main body 30 is provided side by side with the first main body having the first hydraulic working chamber 120 and the second hydraulic working chamber 220 so as to be in fluid communication with the third pneumatic working chamber 310 and the third hydraulic working. A chamber 320 and a fourth hydraulic working chamber 330 are formed inside. The third pneumatic working chamber 310 is formed with a backward pneumatic working chamber 310a in the lower portion and a forward pneumatic working chamber 310b in the upper portion by the pump piston P4. That is, the ninth pneumatic passage H9 communicates with the backward-traveling pneumatic working chamber 310a, and the eleventh pneumatic passage H11 communicates with the forward-operating pneumatic working chamber 310b.

  The second main body 30 includes a pump piston P4 disposed in an internal space defined by the third pneumatic working chamber 310, the third hydraulic working chamber 320, and the fourth hydraulic working chamber 330, and the pump piston P4 is disposed at a lower portion. A piston rod P4-1 is provided that extends in the length direction and is movably provided in the third pneumatic working chamber 310, the third hydraulic working chamber 320, and the fourth hydraulic working chamber 330. The free end of the piston rod P4-1 extends in the length direction so as to penetrate the fourth hydraulic working chamber 330.

  In particular, the upper end portion of the second main body 30 includes a second master valve 350 that controls the compressed air to flow into and / or out of the third pneumatic working chamber 310. The second master valve 350 uses the second valve spool 360 as a control means, and includes a seventh air pressure passage H7, a tenth air pressure passage H10, an eleventh air pressure passage H11, a twelfth air pressure passage H12, In addition, the flow of the compressed air can be controlled by selectively opening and closing the thirteenth pneumatic passage H13. The second master valve 350 further includes a first valve rod 370 that is disposed on the upper side of the third pneumatic working chamber 310 and can be opened by pressurization by the reverse drive of the pump piston P4. The first valve rod 370 is interposed between the seventh pneumatic passage H7, the twelfth pneumatic passage H12, and the upper side of the third pneumatic working chamber 310. The first valve rod 370 is provided with a first pressurizing spring 371 at the upper stage thereof, compressed air flowing into the seventh pneumatic passage H7, compressed air flowing into the twelfth pneumatic passage H12, or pump piston P4. Through the pressurization, the seventh pneumatic passage H7 and the twelfth pneumatic passage H12 can communicate with each other or be closed. At the same time, the second main body 30 includes a second valve rod 380 that is disposed below the third pneumatic working chamber 310 and can be opened by pressurization by the forward drive of the pump piston P4. The second valve rod 380 is interposed between the eighth pneumatic passage H8, the fourteenth compressed air discharge passage H14, and the lower side of the third pneumatic operation chamber 310. The second valve rod 380 opens and closes the fourteenth compressed air discharge passage H14 through the pressurization of the compressed air flowing into the eighth pneumatic passage H8 and / or the pump piston P4 with the second pressurizing spring 381 attached to the lower stage thereof. can do.

  Specifically, the second main body 30 is configured so that the second master valve 350 and the reverse pneumatic working chamber 310a of the third pneumatic working chamber 310 can communicate with each other in fluid communication with the second master valve 350. H10 is formed, and a ninth pneumatic passage H9 is formed below the third pneumatic working chamber 310. The second master valve 350 can receive compressed air in the internal space via the thirteenth pneumatic passage H13.

  The eleventh pneumatic passage H11 is formed so that the internal space of the second master valve 350 and the forward pneumatic working chamber 310b of the third pneumatic working chamber 310 can communicate with each other.

  The second main body 30 includes a third hydraulic passage W3 and a fourth hydraulic passage W4 formed so that the hydraulic oil flows into and out of the third hydraulic working chamber 320, and the hydraulic oil flows into the fourth hydraulic working chamber 330. A fifth hydraulic passage W5 and a sixth hydraulic passage W6 are formed to be inserted. In the hydraulic cylinder according to the present invention, a fourth check valve 322 is disposed between the second hydraulic passage W2 of the second hydraulic working chamber 220 and the fourth hydraulic passage W4 of the third hydraulic working chamber 320, so that the second hydraulic operation is performed. The chamber 220 and the third hydraulic working chamber 320 can be opened and closed so as to allow fluid communication. In the hydraulic cylinder according to the present invention, a sixth check valve 332 is disposed between the second hydraulic passage W2 of the second hydraulic working chamber 220 and the sixth hydraulic passage W6 of the fourth hydraulic working chamber 330, and the second The hydraulic working chamber 220 and the fourth hydraulic working chamber 330 can be opened and closed so as to allow fluid communication.

  In the hydraulic cylinder according to the present invention, a third check valve 321 is disposed between the first hydraulic passage W1 of the first hydraulic working chamber 120 and the third hydraulic passage W3 of the third hydraulic working chamber 320, so that the first hydraulic operation is performed. The chamber 120 and the third hydraulic working chamber 320 can be opened and closed so as to allow fluid communication.

  In the hydraulic cylinder according to the present invention, the fifth check valve 331 is disposed between the first hydraulic passage W1 of the first hydraulic working chamber 120 and the fifth hydraulic passage W5 of the fourth hydraulic working chamber 330, and the first The hydraulic working chamber 120 and the fourth hydraulic working chamber 330 can be opened and closed so as to allow fluid communication.

  Hereinafter, driving of a hydraulic cylinder according to a preferred embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a view showing the inside of a hydraulic cylinder according to the present invention when the piston is retracted. The reverse compressed air flows into the reverse pneumatic working chamber 110a of the first pneumatic working chamber 110 through the first pneumatic passage H1 to move the working piston P1 backward, and through the third pneumatic passage H3. Thus, the first valve spool 260 is operated in the internal space of the first master valve 250. The compressed air in the second pneumatic working chamber 210 is discharged to the fourth compressed air discharge passage H4 through the sixth pneumatic passage H6.

  At this time, the pressure increasing piston P2 moves backward by the spring force of the spring S.

  FIG. 2 is a view showing a high-speed forward operation when the hydraulic cylinder according to the present invention is under low load, and the forward compressed air operation of the first pneumatic working chamber 110 is performed when the forward compressed air passes through the second pneumatic passage H2. The working piston P1 is advanced by being introduced into the chamber 110b.

  FIG. 3 is a view showing a low speed forward operation at high load of the hydraulic cylinder according to the present invention, in which compressed air presses the first valve spool 260 through the fifth pneumatic passage H5 and the first check valve 261 and is in an opened state. It flows into the second pneumatic working chamber 210 along the sixth pneumatic passage H6.

  The compressed air that has flowed into the second pneumatic working chamber 210 moves the pressure-increasing piston P3 forward so that the working piston P1 moves forward at a low pressure at a high pressure.

  FIG. 4 is a view showing a forward movement state of the pump piston in the hydraulic cylinder in the low-speed forward movement state under high load. The compressed air that has flowed into the thirteenth pneumatic passage H13 moves the second valve spool 360 of the second master valve 350, passes through the eleventh pneumatic passage H11, and the third pneumatic operating chamber 310, particularly the forward pneumatic operation. It flows into the chamber 310b. The compressed air that has flowed into the forward pneumatic working chamber 310b of the third pneumatic working chamber 310 eventually advances the pump piston P4.

  Further, the compressed air inside the reverse working hydraulic pressure chamber 310a is discharged to the outside through the ninth pneumatic passage H9, the tenth pneumatic passage H10, and the second valve spool 360. If it is selectable, the compressed air flowing out of the second main body through the second valve spool 360 passes through the muffler (no reference numeral) and is discharged. The hydraulic oil in the third hydraulic working chamber 320 flows into the first hydraulic working chamber 120 via the third hydraulic passage W3 and the first hydraulic passage W1, and drives the working piston P1 forward. At this time, the hydraulic oil in the second hydraulic working chamber 220 is stored in the fourth hydraulic working chamber 330 by opening the sixth check valve 332 while flowing in the second main body through the second hydraulic passage W2. The

  FIG. 5 is a diagram showing a reverse state of the pump piston in the hydraulic cylinder in the low-speed forward operation state under high load. The compressed air flowing into the thirteenth pneumatic passage H13 moves the second valve spool 360 of the second master valve 350, passes through the tenth pneumatic passage H10 and the ninth pneumatic passage H9, and enters the third pneumatic working chamber 310. Into the reverse backward hydraulic working chamber 310a. The compressed air that has flowed into the reverse pneumatic working chamber 310a of the third pneumatic working chamber 310 moves the pump piston P4 backward.

  FIG. 6 is a longitudinal sectional view of a hydraulic cylinder according to the present invention driven by a low-speed forward operation under a high load, and shows a forward state of the pump piston.

  FIG. 7 is a longitudinal sectional view showing the backward movement of the hydraulic cylinder according to the present invention.

  FIG. 8 is a longitudinal sectional view showing a hydraulic cylinder according to another embodiment of the present invention. A hydraulic cylinder according to another embodiment of the present invention has a similar structure as a modification of the hydraulic cylinder shown in FIGS. 1 to 7 except for the arrangement state of the pressure increasing piston P2 and the operating piston P1. Yes. Therefore, descriptions of similar or identical components are omitted to assist in a clear understanding of the present invention.

  As shown in FIG. 8, in a hydraulic cylinder according to another embodiment of the present invention, the working piston P1 and the boosting piston P2 are arranged non-coaxially or on both axes, and the lower cylinder 10 and the upper cylinder 20 are arranged in a line. Without parallel arrangement. Of course, the lower cylinder 10 and the upper cylinder 20 should be connected so as to be in fluid communication.

  As described above, the hydraulic cylinder in which the lower cylinder 10 and the upper cylinder 20 are arranged in parallel is generally installed as compared with the first main body portion extending in the length direction in a single shape shown in FIGS. Energy efficiency can be improved while reducing the height and providing a more compact structure.

  As described above, the present invention has been described in detail through specific embodiments, but this is for specifically describing the present invention, and a hydraulic cylinder integrally provided with a booster pump according to the present invention is described in these implementations. Of course, the present invention is not limited to the embodiments, and modifications and improvements can be made by those having ordinary knowledge in the art within the technical idea of the present invention.

  All simple variations and modifications of the present invention belong to the scope of the present invention, and it is obvious that the specific protection scope of the present invention belongs to the appended claims.

1 is a longitudinal sectional view schematically showing an internal configuration of a hydraulic cylinder integrally provided with a booster pump according to a preferred embodiment of the present invention. It is a longitudinal cross-sectional view of the hydraulic cylinder which concerns on this invention driven by high-speed advance operation | movement at the time of low load. It is a longitudinal cross-sectional view of the hydraulic cylinder based on this invention driven by low-speed advance operation | movement at the time of high load. It is a longitudinal cross-sectional view of the hydraulic cylinder based on this invention driven by the low speed advance operation at the time of high load, and shows the advance state of a pump piston. It is a longitudinal cross-sectional view of the hydraulic cylinder based on this invention driven by the low-speed advance operation at the time of high load, and shows the reverse drive state of a pump piston. It is a longitudinal cross-sectional view of the hydraulic cylinder based on this invention driven by the low speed advance operation at the time of high load, and shows the advance state of a pump piston. It is a longitudinal cross-sectional view which shows the backward movement operation | movement of the hydraulic cylinder which concerns on this invention. It is a longitudinal cross-sectional view of the hydraulic cylinder which concerns on other embodiment of this invention.

DESCRIPTION OF SYMBOLS 10 Lower cylinder 20 Upper cylinder 30 2nd main-body part 110 1st pneumatic working chamber 120 1st hydraulic working chamber 210 2nd pneumatic working chamber 220 2nd hydraulic working chamber 250 1st master valve 260 1st valve spool 310 3rd Pneumatic working chamber 320 Third hydraulic working chamber 330 Fourth hydraulic working chamber 350 Second master valve 360 Second valve spool 370 First valve rod 380 Second valve rod P1 Working piston P2 Boosting piston P3 Slide piston P4 Pump piston

Claims (13)

A first pneumatic working chamber 110 is provided on the lower side and a first hydraulic working chamber 120 is provided on the upper side, and an operating piston P1 is disposed therein, and a first pneumatic passage H1 is provided below the first pneumatic working chamber 110. Is formed, a second pneumatic passage H2 is formed above the first pneumatic working chamber 110, and a small-diameter hole 121 is formed adjacent to the upper side of the first hydraulic working chamber 120 and the first hydraulic passage W1. A lower cylinder 10 comprising:
A pressure-increasing piston P2 and a slide type piston P3 are disposed therein, and a second hydraulic working chamber 220 connected to the hole 121 in fluid communication with the lower side is formed by the slide type piston P3. An upper cylinder 20 in which a second pneumatic working chamber 210 is formed and a second hydraulic passage W2 is formed below the second hydraulic working chamber 220;
A third pneumatic passage H3 that communicates with the first pneumatic passage H1, a sixth pneumatic passage H6 that enables mutual communication with the second pneumatic operation chamber 210, two check valves 261, A first pneumatic spool H5 that is opened and closed by the H.262 and a fourth compressed air discharge passage H4 that discharges the compressed air in the internal space and is arranged in the internal space to control the flow of the compressed air. 260, a first master valve 250 provided at the upper end of the second pneumatic working chamber 210 of the upper cylinder 20;
A third pneumatic working chamber 310, a third hydraulic working chamber 320, and a fourth hydraulic working chamber 330 are provided, and a pump piston P4 is disposed therein, and the reverse piston working chamber is moved downward by the pump piston P4. 310a is formed, the forward pneumatic working chamber 310b is formed on the upper side, and the third pneumatic working chamber 310 is opened and closed by the contact of the ninth pneumatic passage H9 and the pump piston P4 at the lower part thereof. The valve rod 380 includes a first valve rod 370 that is opened and closed by contact with the pump piston P4, and the third hydraulic operating chamber 320 includes a third hydraulic passage W3 that is opened and closed by a third check valve 321. A fourth hydraulic passage W4 opened and closed by the fourth check valve 322 is formed inside, and the fourth hydraulic working chamber 330 is opened and closed by the fifth check valve 331. The second main body 30 having a sixth hydraulic passage W6 opened and closed by a sixth check valve 332 formed therein, and the forward movement through the first valve rod 370 therein. The eleventh pneumatic passage H11 communicating with the pneumatic working chamber 310b, the tenth pneumatic passage H10 communicating with the ninth pneumatic passage H9, and the third pneumatic working chamber 310 enabling the mutual communication. A seventh pneumatic passage H7, a twelfth pneumatic passage H12 communicating with the first valve rod 370 in the inner space of the second master valve 350, and a second passage permitting the inflow of compressed air into the inner space of the second master valve 350. 13 is formed in the internal space and includes a second valve spool 360 that controls the flow of compressed air, and is provided at the upper end of the third pneumatic working chamber 310. Hydraulic cylinder with integrated booster pump, characterized in that it comprises a; Sutabarubu 350.   2. The hydraulic cylinder integrally having the booster pump according to claim 1, wherein the operating piston P <b> 1 includes an operating rod P <b> 1-1, a piston ring P <b> 1-2, and a guide rod P <b> 1-3.   3. The hydraulic cylinder integrally provided with the booster pump according to claim 2, wherein the piston ring P1-2 is disposed between the first pneumatic passage H1 and the second pneumatic passage H2.   The slide type piston P3 is slidably disposed along the length direction of the piston rod P2-1 of the pressure increasing piston P2. The slide type piston P3 is elastically supported by the pressure increasing piston P2 by a spring S. A hydraulic cylinder integrally provided with the booster pump according to claim 1.   The piston rod P4-1 of the pump piston P4 extends movably into the third pneumatic working chamber 310, the third hydraulic working chamber 320, and the fourth hydraulic working chamber 330. A hydraulic cylinder provided integrally with the booster pump according to claim 1. The fourth hydraulic passage W4 and the sixth hydraulic passage W6 are connected to be able to communicate with the second hydraulic passage W2.
2. The hydraulic cylinder integrally provided with the booster pump according to claim 1, wherein the third hydraulic passage W <b> 3 and the fifth hydraulic passage W <b> 5 are connected to the first hydraulic passage W <b> 1 so as to communicate with each other. The first valve rod 370 includes a first pressure spring 371,
The hydraulic cylinder according to claim 1, wherein the second valve rod (380) includes a second pressure spring (381).   The second main body 30 includes an eighth pneumatic passage H8 that supplies compressed air to the second valve rod 380, and a fourteenth compressed air discharge passage H14 that discharges compressed air through the second valve rod 380. A hydraulic cylinder integrally provided with the booster pump according to claim 1.   The hydraulic cylinder as claimed in claim 1, wherein the upper cylinder (20) is arranged in a row so as to be in fluid communication with the upper side of the lower cylinder (10).   The hydraulic cylinder integrally provided with the booster pump according to claim 9, wherein the pressure increasing piston P <b> 2 of the upper cylinder 20 is arranged coaxially with the operating piston P <b> 1 of the lower cylinder 10.   The hydraulic cylinder as claimed in claim 1, wherein the upper cylinder (20) is arranged in parallel with the lower cylinder (10).   The hydraulic cylinder integrally provided with the booster pump according to claim 11, wherein the pressure increasing piston P2 of the upper cylinder 20 is arranged on both axes with the operating piston P1 of the lower cylinder 10.   2. The booster pump according to claim 1, wherein the fifth pneumatic passage H <b> 5 includes the two check valves 261 and 262 so that the fifth pneumatic passage H <b> 5 can be individually opened and closed by a flow of air flow in a forward direction or a reverse direction. Integrated hydraulic cylinder.

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