JP2018129383A - Sheet sticking device and sticking method - Google Patents

Abstract

A sheet sticking device capable of adjusting the length of a buffer area and correcting meandering of a raw sheet without enlarging the size of the device is provided. A sheet sticking device (10) includes feeding means (20) for feeding an original sheet (RS) having a release sheet (RL) temporarily attached to an original adhesive sheet (AS), and a cut (CU) at a cutting position (AP) in the original adhesive sheet (AS). A sheet forming means 30 for forming an adhesive sheet AS1 on the inner side of an insert CU and an unnecessary sheet US on the outer side, and a sheet for peeling off the unnecessary sheet US and sending the adhesive sheet AS1 supported by the release sheet RL to a sticking position BP. The sheet feeding means 40 includes a feeding means 40 and a sticking means 50 for sticking the adhesive sheet AS1 at the sticking position BP to the adherend WF. An original fabric length adjusting means 43 for adjusting the length of the original fabric RS up to the sticking position BP and correcting meandering of the original fabric RS based on the detection result of the detection means 42 is provided. [Selection drawing] Fig. 1

Description

  The present invention relates to a sheet sticking apparatus and a sticking method.

  Conventionally, by providing a closed loop-shaped cut at a predetermined cutting position on a strip-shaped original adhesive sheet temporarily attached to a release sheet, an adhesive sheet having a predetermined shape is formed inside the cut, and the adhesive sheet is There is known a sheet sticking device that presses and sticks to an adherend at the sticking position (see, for example, Patent Document 1). In this sheet sticking device, the dancer roller adjusts the original fabric from the cutting position to the pasting position (hereinafter, the raw fabric located between the cutting position and the pasting position is also simply referred to as “buffer area”) to a desired length. doing.

JP 2007-317886 A

  However, in the conventional sheet sticking apparatus as described in Patent Document 1, when the raw material is meandering, the meandering correction cannot be performed by the dancer roller, so that it is necessary to provide a configuration for correcting the meandering separately. There is an inconvenience that the apparatus becomes large.

  An object of the present invention is to provide a sheet sticking apparatus and a sticking method capable of adjusting the length of a buffer region and correcting a meandering of a raw material without increasing the size of the apparatus.

  The present invention employs the configurations described in the claims.

  According to the present invention as described above, it is possible to adjust the length of the buffer area and correct the meandering of the raw material without increasing the size of the apparatus.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. Operation | movement explanatory drawing of a sheet sticking apparatus.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the front side in FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis and “down” is the opposite direction, “ The “left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the front direction in FIG. 1 parallel to the Y axis, and “rear” is the opposite direction.

In FIG. 1, the sheet sticking device 10 is provided with a feeding means 20 for feeding a raw fabric RS in which a release sheet RL is temporarily attached to a strip-like original adhesive sheet AS, and a predetermined cutting position on the original adhesive sheet AS fed by the feeding means 20. A closed loop cut CU is provided at the AP, the adhesive sheet AS1 having a predetermined shape is formed inside the cut CU, and an unnecessary sheet US is formed outside the cut CU. The sheet feeding means 40 that peels the US from the release sheet RL and sends the adhesive sheet AS1 supported by the release sheet RL to a predetermined sticking position BP, and the adhesive sheet AS1 sent to the sticking position BP by the sheet feeding means 40 An adhering means 50 for pressing and adhering to a semiconductor wafer (hereinafter also simply referred to as “wafer”) WF as an adherend, a decompression pump, a vacuum ejector, etc. The wafer WF and a support means 60 having a suction capable of holding the support surface 61 by indicated no decompression means.
The original adhesive sheet AS includes a base sheet BS and an adhesive AD layer laminated on one surface of the base sheet BS, and a release sheet RL is temporarily attached to the other surface of the base sheet BS by pseudo-adhesion. ing.

  The feeding means 20 is driven by a rotation motor 21A as a drive device, and is driven by a support roller 21 that supports the original fabric RS, a guide roller 22 that guides the original fabric RS, and a rotation motor 23A as a drive device. And a first collection roller 23 that collects the unnecessary sheet US peeled by the sheet feeding means 40.

  The sheet forming means 30 supports a cutter blade 31A as a cutting means for forming a cut CU that passes through the original adhesive sheet AS and does not pass through the release sheet RL, and is driven by a rotation motor 32 as a driving device. 31 and an impression cylinder 33 that is positioned on the release sheet RL side of the original fabric RS and rotates in synchronization with the cutter roller 31.

The sheet feeding means 40 includes a peeling roller 41 as a peeling means for peeling the unnecessary sheet US from the peeling sheet RL, an imaging means such as a camera and a projector, various sensors such as an optical sensor and an ultrasonic sensor, and the like. The detection means 42 for detecting the meandering of the original fabric RS and the original fabric RS (buffer region) from the cutting position AP to the pasting position BP are adjusted to a desired length, and the original fabric is based on the detection result of the detection means 42. An original length adjustment means 43 for correcting the meandering of the RS, a frame 44B supported by a first slider 44A of a linear motor 44 as a driving device, and a rotating motor 45A as a driving device supported by the frame 44B. A driving roller 45 that rotates, a pinch roller 46 that sandwiches the release sheet RL between the drive roller 45, and a guide that guides the release sheet RL. And over La 47, driven by the rotation motor 48A as the driving device, and a second collection roller 48 for collecting the release liner RL.
The material length adjusting means 43 is a pair of rotary bearings supported by first and second linear motors 43A and 43B as a driving device arranged in front and rear, and sliders 43C and 43D, and having a self-aligning function. 43E and 43F (see FIG. 2A), a rotating shaft 43G supported at both ends by the pair of rotating bearings 43E and 43F, and an adjustment roller 43H supported by the rotating shaft 43G.

  The sticking means 50 includes a linear motion motor 51 as a driving device supported by the second slider 44C of the linear motor 44, and a pressing roller 52 as a pressing member supported by the output shaft 51A.

The procedure for sticking the adhesive sheet AS1 to the wafer WF in the sheet sticking apparatus 10 will be described.
First, with respect to the sheet sticking apparatus 10 in the state indicated by the solid line in FIG. 1 in which each member is arranged at the initial position, an operator of the sheet sticking apparatus 10 (hereinafter simply referred to as “worker”) is indicated by a solid line in FIG. The raw fabric RS is set as shown. Next, after the operator inputs the size of the adhesive sheet AS1 formed by the cutter blade 31A and the interval between the adjacent adhesive sheets AS1 through an operation means (not shown) such as an operation panel or a personal computer, an automatic operation signal is input. Enter. Then, the feeding means 20 and the sheet feeding means 40 are provided with a buffer so that the cutter blade 31A does not bite into the original adhesive sheet AS when the adhesive sheet AS1 is located at the application position BP regardless of the size of the adhesive sheet AS1, for example. Adjust the length of the area.

  At this time, when the buffer area is lengthened, the feeding means 20 and the sheet feeding means 40 drive the rotation motors 21A and 23A and the first and second linear motors 43A and 43B, as shown by the two-dot chain line in FIG. The sliders 43C and 43D are moved rightward by the same distance while making the buffer area longer, and the original fabric RS is bent by contact with the adjustment roller 43H. On the other hand, when the buffer area is shortened from the state indicated by the two-dot chain line in FIG. 1, for example, the feeding means 20 and the sheet feeding means 40 replace the rotation motors 21A and 23A and the first and second linear motors 43A and 43B with the buffer area. The slider 43C, 43D is moved to the left by the same distance while shortening the buffer area, and the bending angle of the original fabric RS due to contact with the adjustment roller 43H is reduced. The contact between the adjustment roller 43H and the original fabric RS is released.

  Next, in a state where the adjustment roller 43H is positioned as indicated by a solid line in FIG. 1, the feeding means 20, the sheet forming means 30, and the sheet feeding means 40 are the rotation motors 21A and 23A, the rotation motor 32, and the rotation motor 45A. 48A is driven, the raw fabric RS is fed out, and the cutter roller 31 and the impression cylinder 33 are rotated in synchronization therewith. Thereby, the cutter blade 31A provides the cut sheet CU in the original adhesive sheet AS, thereby forming the adhesive sheet AS1 and the unnecessary sheet US, and the first recovery roller 23 and the second recovery roller 48 are separated from the unnecessary sheet US and peeling. While collecting the sheet RL, the adhesive sheet AS1 is fed leftward. Thereafter, when it is detected by an imaging means such as a camera or a detection means (not shown) such as an optical sensor that the leading adhesive sheet AS1 in the feeding direction DA1 is located, the feeding means 20, the sheet forming means 30 and the sheet The feed means 40 stops driving the rotation motors 21A and 23A, the rotation motor 32, and the rotation motors 45A and 48A, and enters a standby state.

  Here, until the adhesive sheet AS1 reaches the sticking position BP, the sheet feeding means 40 drives the detecting means 42, and the original fabric RS meanders, for example, the original fabric RS is shown by a solid line in FIG. When the detecting means 42 detects that the traveling direction DB proceeds in the left front direction indicated by the two-dot chain line from the feeding direction DA1 parallel to the X axis shown, the sheet feeding means 40 is the first during the feeding of the original fabric RS. The linear motor 43A is driven, the slider 43C is moved to the right, and the adjustment roller 43H is brought into contact with the release sheet RL with the rotating shaft 43G inclined in the XY direction in plan view as shown in FIG. Then, as shown in the figure, the meandering of the raw fabric RS is corrected so that the traveling direction DB coincides with the feeding direction DA1. On the other hand, when the detection means 42 detects that the raw material RS has meandered in the direction opposite to the direction indicated by the two-dot chain line in FIG. 2A, the sheet feeding means 40 drives the second linear motor 43B, and the slider 43D. Is moved to the right, and the rotation axis 43G of the adjustment roller 43H is tilted in the -XY direction in plan view in the direction opposite to that shown in FIG. By correcting the meandering, the adhesive sheet AS1 can be accurately positioned at the sticking position BP.

  Next, as shown in FIG. 1, when a transfer unit (not shown) such as a manual or articulated robot or a belt conveyor places the wafer WF on the support surface 61 of the support unit 60, the support unit 60 uses a decompression unit (not shown). Driven to hold the wafer WF by suction. Thereafter, the sticking means 50 drives the linear motor 51 and lowers the pressing roller 52, and then the sheet feeding means 40 drives the linear motor 44 and moves the pressing roller 52 to the right. As shown by the two-dot chain line, the adhesive sheet AS1 is pressed and stuck to the wafer WF. Next, the sticking means 50 and the sheet feeding means 40 drive the linear motor 51 and the linear motor 44 to return the pressing roller 52 to the initial position. Thereafter, the sheet feeding means 40 drives the linear motor 44 and the rotation motor 45A, moves the frame 44B to the right, and peels the release sheet RL from the adhesive sheet AS1.

  Next, in a state where the sheet feeding means 40 locks the driving roller 45, the feeding means 20, the sheet forming means 30, and the sheet feeding means 40 are the rotation motors 21A, 23A, the rotation motor 32, the linear motor 44, and the rotation motor. 48A is driven to return the frame 44B to the initial position, and the cutter blade 31A forms a new adhesive sheet AS1 and an unnecessary sheet US, and the first recovery roller 23 and the second recovery roller 48 use the unnecessary sheet US and the release sheet. While collecting RL, the leading adhesive sheet AS1 in the feeding direction DA1 is positioned at the pasting position BP. Then, the support unit 60 stops driving the decompression unit (not shown), and the transfer unit (not shown) transfers the wafer WF having the adhesive sheet AS1 attached thereto to the next process, and thereafter the same operation as described above is repeated.

  According to the embodiment as described above, the length adjustment of the buffer area and the correction of the meandering of the raw fabric RS can be performed without increasing the size of the apparatus.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of some or all of such restrictions is included in this invention.

  For example, the feeding means 20 may feed the original fabric in which the release sheet RL is temporarily attached to the surface on the adhesive AD layer side of the original adhesive sheet AS. In this case, instead of the sticking means 50, for example, a peeling means may be used. It is only necessary to provide a pasting means for folding the release sheet RL to peel the adhesive sheet AS1 and pressing and sticking the adhesive sheet AS1 to the wafer WF.

  The sheet forming means 30 does not form the adhesive sheet AS1 having the same shape as the wafer WF, but forms a different shape, forms a larger one than the wafer WF, or forms a smaller one than the wafer WF. May be.

  The detection means 42 may detect meandering of the raw material RS existing from the support roller 21 to the peeling roller 41, or a plurality of detection means 42 may be provided at a desired position.

When correcting the meandering of the original fabric RS, the original fabric length adjusting means 43 moves both the sliders 43C and 43D by different distances in the same direction or both by different distances by the same distance or different distances. The rotation shaft 43G of the adjustment roller 43H may be tilted.
The material length adjusting means 43 is used in combination with the first and second linear motors 43A and 43B to provide a structure for moving both ends of the rotating shaft 43G up and down, and by moving the adjusting roller 43H up and down, the buffer area May be corrected by tilting the rotation shaft 43G.
When the detection means 42 detects meandering of the original fabric RS during the feeding of the original fabric RS, the original fabric length adjusting unit 43 is positioned at the pasting position BP by the feeding without correcting the meandering during the feeding. You may correct | amend at the time of re-feeding after adhesive sheet AS1 sticking.

Instead of or in combination with the linear motion motor 51 that raises and lowers the pressing roller 52, a configuration for raising and lowering the support means 60 may be provided to bring the wafer WF closer to the adhesive sheet AS1.
The position of the pressing roller 52 may be fixed, or the adhesive sheet AS1 and the support means 60 may be moved while moving the pressing roller 52, and the adhesive sheet AS1 may be attached to the wafer WF.

  In addition, the material, type, shape, and the like of the adhesive sheet AS1 and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS1 may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, or other shapes, or may be of an adhesive form such as pressure sensitive adhesive or heat sensitive adhesive, When the heat-sensitive adhesive sheet AS1 is employed, it may be bonded by an appropriate method such as providing a heating means such as an appropriate coil heater or a heat pipe for heating the adhesive sheet. In addition, such an adhesive sheet AS1 is, for example, a single layer having only an adhesive layer, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. The double-sided adhesive sheet comprises a single-layer or multi-layer intermediate layer. It may be a single layer or a multilayer having no intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS1 is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the feeding means is capable of feeding the original fabric in which the release sheet is temporarily attached to the belt-like original adhesive sheet, it is limited in view of the technical common sense at the beginning of the application and within the technical scope. (Description of other means and processes is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).
In the above-described embodiment, when rollers are employed, a drive device that rotationally drives each roller may be provided, or the surface of each roller may be configured with a member capable of elastic deformation such as rubber or resin. In addition, each roller may be constituted by a member that does not elastically deform, or when a pressing means or pressing member such as a pressing roller or a pressing head is employed, instead of or in combination with those exemplified above, a roller , A pressing member made of a round bar, blade material, rubber, resin, sponge, etc., or a structure of pressing by blowing air such as air or gas, or a pressing means or pressing member The part may be composed of a member that can be elastically deformed, such as rubber or resin, or may be composed of a member that is not elastically deformed, and when a peeling means or a peeling member is employed, a plate-like member, Consists of round bars, rollers, etc. Alternatively, when a structure that supports or holds a supported member such as a supporting (holding) means or a supporting (holding) member is employed, a gripping means such as a mechanical chuck or a chuck cylinder, coulomb force, adhesion A configuration in which a supported member is supported (held) by an agent, an adhesive, magnetic force, Bernoulli adsorption, a drive device, or the like may be employed, and when a cutting means or a cutting blade is employed, the configuration exemplified above Instead or in combination, cutting blades, laser cutters, ion beams, thermal power, heat, water pressure, heating wires, cutting members such as spraying of gas or liquid, etc., or a combination of appropriate driving equipment You may make it cut | disconnect by moving a cutting member.

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 20 Feeding means 30 Sheet forming means 40 Sheet feeding means 42 Detection means 43 Original fabric length adjusting means 50 Pasting means AP Cutting position AS Original adhesive sheet AS1 Adhesive sheet BP Pasting position CU Cut RL Release sheet RS Original fabric US Unnecessary sheet WF Wafer (Substrate)

Claims (2)

A feeding means for feeding out the original fabric in which the release sheet is temporarily attached to the strip-shaped original adhesive sheet;
The raw adhesive sheet fed out by the feeding means is provided with a closed loop-shaped cut at a predetermined cutting position, and an adhesive sheet having a predetermined shape is formed inside the cut, and an unnecessary sheet is formed outside the cut. Sheet forming means,
Sheet feeding means for peeling the unnecessary sheet from the release sheet and feeding the adhesive sheet supported by the release sheet to a predetermined application position;
A sticking means for pressing and sticking the adhesive sheet sent to the sticking position to the adherend by the sheet feeding means;
The sheet feeding means adjusts the length of the original fabric from the cutting position to the application position to a desired length and detects the meander of the original fabric, and based on the detection result of the detection means And a sheet length adjusting means for correcting the meandering of the sheet. A feeding step of feeding out the original fabric in which the release sheet is temporarily attached to the belt-like raw adhesive sheet;
Forming a closed loop-shaped cut at a predetermined cutting position on the unrolled original adhesive sheet, forming a predetermined shaped adhesive sheet inside the cut, and forming an unnecessary sheet outside the cut Process,
A sheet feeding step of peeling the unnecessary sheet from the release sheet and sending the adhesive sheet supported by the release sheet to a predetermined application position;
A sticking step of pressing and sticking the adhesive sheet sent to the sticking position to an adherend at a predetermined sticking position;
The sheet feeding step includes a detection step of detecting the meander of the original fabric, and an original length adjustment means adjusts the length of the original fabric from the cutting position to the application position to a desired length, and the detection A sheet pasting method, comprising: an original length adjustment step of correcting the meandering of the original fabric based on a detection result of the step.