JP2018112479A - Appearance inspection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify a system configuration of a visual inspection system. An visual inspection system according to an embodiment includes an annular lighting device in which 12 lighting regions are arranged in a ring shape, and an imaging device that images an object to be inspected illuminated by the lighting device. The inspection device includes a lighting device and an inspection device connected to the imaging device, and the inspection device includes a lighting control unit that controls lighting and extinguishing of each of the 12 lighting areas according to a plurality of preset lighting patterns. , An image acquisition unit that acquires a plurality of captured images of an object to be inspected illuminated by a plurality of illumination patterns from an imaging device, a plurality of captured images, and by performing image processing on the plurality of captured images. It includes one or more processed images generated, and a detection processing unit that detects an abnormality in the appearance of the object to be inspected by using at least one of the processed images. [Selection diagram] Fig. 1

Description

  Embodiments described herein relate generally to an appearance inspection system.

  2. Description of the Related Art Conventionally, a technique for detecting an abnormality that appears in the appearance of an object to be inspected is known. In such a technique, in order to detect an abnormality in the appearance of the object to be inspected, a plurality of lights that illuminate the object to be inspected are installed, the objects to be inspected illuminated from various directions by the plurality of lights are imaged, A technique is used in which a captured image in which an abnormality appears clearly is acquired from a plurality of captured images obtained by imaging.

JP 2002-310935 A

  However, in the conventional method as described above, since it is necessary to install a plurality of lights, the system configuration tends to be large and complicated.

  Therefore, one of the problems of the embodiment is to simplify the system configuration of the appearance inspection system.

  An appearance inspection system according to an embodiment includes an annular illumination device configured by arranging twelve illumination areas in an annular shape, an imaging device that captures an object to be inspected illuminated by the illumination device, and the illumination device And an inspection device connected to the imaging device. The inspection device includes an illumination control unit that controls lighting and extinction of each of the 12 illumination areas according to a plurality of preset illumination patterns, and an imaging device. An image acquisition unit that acquires a plurality of captured images obtained by capturing the inspected objects illuminated by a plurality of illumination patterns, a plurality of captured images, and 1 generated by performing image processing on the plurality of captured images And a detection processing unit that detects an abnormality in the appearance of the object to be inspected using at least one of the processed images.

FIG. 1 is an exemplary block diagram illustrating an overall configuration of an appearance inspection system according to an embodiment. FIG. 2 is an exemplary diagram illustrating a configuration of the illumination device according to the embodiment. FIG. 3 is an exemplary diagram illustrating a first illumination pattern that may be used in the embodiment. FIG. 4 is an exemplary diagram illustrating a captured image captured corresponding to the first illumination pattern in the embodiment. FIG. 5 is an exemplary diagram illustrating a second illumination pattern that may be used in the embodiment. FIG. 6 is an exemplary diagram illustrating a captured image captured corresponding to the second illumination pattern in the embodiment. FIG. 7 is an exemplary diagram showing a third illumination pattern that may be used in the embodiment. FIG. 8 is an exemplary diagram showing a fourth illumination pattern that may be used in the embodiment. FIG. 9 is an exemplary diagram showing a fifth illumination pattern that can be used in the embodiment. FIG. 10 is an exemplary diagram illustrating a captured image captured corresponding to the fifth illumination pattern in the embodiment. FIG. 11 is an exemplary diagram showing a sixth illumination pattern that can be used in the embodiment. FIG. 12 is an exemplary diagram illustrating a captured image captured corresponding to the sixth illumination pattern in the embodiment. FIG. 13 is an exemplary diagram showing a seventh illumination pattern that can be used in the embodiment. FIG. 14 is an exemplary diagram illustrating a captured image captured corresponding to the seventh illumination pattern in the embodiment. FIG. 15 is an exemplary diagram showing an eighth illumination pattern that can be used in the embodiment. FIG. 16 is an exemplary diagram illustrating a captured image captured corresponding to the eighth illumination pattern in the embodiment. FIG. 17 is an exemplary diagram showing a ninth illumination pattern that can be used in the embodiment. FIG. 18 is an exemplary diagram illustrating a captured image captured corresponding to the ninth illumination pattern in the embodiment. FIG. 19 is an exemplary diagram showing a tenth illumination pattern that can be used in the embodiment. FIG. 20 is an exemplary diagram illustrating a captured image captured corresponding to the tenth illumination pattern in the embodiment. FIG. 21 is an exemplary diagram showing an eleventh illumination pattern that can be used in the embodiment. FIG. 22 is an exemplary diagram showing a twelfth illumination pattern that can be used in the embodiment. FIG. 23 is an exemplary diagram showing a pattern selection screen according to the embodiment. FIG. 24 is an exemplary diagram showing an image selection screen according to the embodiment. FIG. 25 is an exemplary flowchart showing a series of processes that can be executed in the embodiment. FIG. 26 is an exemplary diagram showing a thirteenth illumination pattern that can be used in the embodiment. FIG. 27 is an exemplary diagram illustrating a captured image captured corresponding to the thirteenth illumination pattern in the embodiment.

  Hereinafter, an appearance inspection system according to an embodiment will be described. The appearance inspection system according to the embodiment has various configurations for inspecting appearance abnormality (defects) appearing on the surface of an object to be inspected. In addition, the structure of embodiment described below and the effect | action and result (effect) which are brought about by the said structure are an example to the last, Comprising: It is not restricted to the following description content.

  FIG. 1 is an exemplary block diagram illustrating an overall configuration of an appearance inspection system according to an embodiment. As shown in FIG. 1, the appearance inspection system according to the embodiment includes an illumination device 10, an imaging device 20, and a PC (Personal Computer) 30. The PC 30 is an example of an “inspection apparatus”.

  The illuminating device 10 is connected to an illumination power source 40, and irradiates light from above on an object to be inspected 60 placed on a table 50 or the like based on electric power supplied from the illumination power source 40. The illumination device 10 is configured in an annular shape having a center Ax. That is, the illumination device 10 is provided with the opening 11 around the center Ax.

  Further, on the side of the illumination device 10 facing the object 60 to be inspected, a recess 12 is provided that is recessed from the outer peripheral side of the illumination device 10 toward the inner periphery side (center Ax side) on the opposite side to the object 60 to be inspected. ing. The concave portion 12 is configured by an inclined portion that is inclined from the end portion on the outer peripheral side of the illumination device 10 toward the end portion on the inner peripheral side toward the opposite side of the device under test 60. Thereby, the illuminating device 10 is provided with respect to the surface (upper surface) of the inspected object 60 from a plurality of light sources 14 (not shown in FIG. 1, refer to FIG. 2 described later) provided in the inclined portion (recessed portion 12). It is possible to irradiate light obliquely (see arrow D). In addition, in order to demonstrate later the detailed structure of the illuminating device 10, further description is abbreviate | omitted here.

  The imaging device 20 is a camera that images the inspected object 60 illuminated by the illumination device 10. Then, the imaging device 20 outputs the captured image of the inspected object 60 as a captured image. In the example of FIG. 1, the imaging device 20 is disposed above the opening 11 of the lighting device 10. Thereby, the imaging device 20 receives the reflected light, which is the light from the illumination device 10 reflected by the surface of the object 60 to be inspected, through the opening 11.

  By the way, conventionally, an abnormality in the appearance of the inspection object 60 may not have a specific direction. In such a case, in order to acquire a captured image in which abnormality appears clearly, a plurality of captured images obtained by setting a plurality of illuminations that illuminate the inspected object 60 and capturing the inspected object 60 illuminated from various directions. Therefore, a method of selecting a desired captured image may be used. However, in such a conventional method, since it is necessary to install a plurality of illuminations, the system configuration tends to be large and complicated.

  Therefore, in the embodiment, the illumination device 10 is configured as follows, so that the object 60 can be illuminated from various directions with a single illumination.

  FIG. 2 is an exemplary diagram illustrating a configuration of the illumination device 10 according to the embodiment. More specifically, FIG. 2 is a view of the illumination device 10 as viewed from the side facing the device under test 60, that is, from the side of the recess 12 that emits light. As described above, the lighting device 10 is configured in an annular shape in which the opening 11 is provided around the center Ax. Therefore, in the embodiment, the recess 12 is also configured in a similar annular shape.

  As shown in FIG. 2, the illumination device 10 is configured by arranging 12 illumination regions 13 </ b> A to 13 </ b> L in an annular shape. Each of the illumination regions 13A to 13L corresponds to a region in which the concave portion 12 that is a portion facing the object 60 to be inspected in the illumination device 10 is equally divided into 12 at equal angular intervals (30 degree intervals) with respect to the center Ax.

  In the recess 12, a plurality of light sources 14 are arranged side by side along both the radial direction and the circumferential direction. In the example of FIG. 2, for each of the illumination regions 13 </ b> A to 13 </ b> L, two light sources 14 arranged along the circumferential direction inside the radial direction, and three arranged along the circumferential direction outside the radial direction. The light source 14 is provided. Thereby, in embodiment, it is comprised so that each illumination area | region 13A-13L can irradiate the light of the same light quantity, respectively. In FIG. 2, only the light source 14 in the illumination area 13A is shown, and the light sources 14 in the other illumination areas 13B to 13L are not shown.

  Here, in the embodiment, each of the illumination areas 13A to 13L is configured to be able to be turned on and off individually under the control of the PC 30 (details will be described later). Thereby, in embodiment, it becomes possible to implement | achieve light to the to-be-inspected object 60 from various directions with the single illuminating device 10. FIG. As a result, even when an abnormality in the appearance of the inspected object 60 does not have directionality, it is possible to easily obtain a captured image in which the abnormality appears clearly.

  Returning to FIG. 1, the PC 30 is connected to the imaging device 20 and is connected to the illumination device 10 via the illumination power supply 40. The PC 30 includes the same hardware as a normal computer such as a processor and a memory. The processor of the PC 30 implements the following functional configuration by reading and executing various computer programs stored in the memory.

  That is, the PC 30 includes an image acquisition unit 31, an image processing unit 32, a detection processing unit 33, a display processing unit 34, an input reception unit 35, and an illumination control unit 36 as functional configurations. In the embodiment, some or all of these functional configurations may be realized by dedicated hardware.

  The image acquisition unit 31 is connected to the imaging device 20 and acquires a captured image output by the imaging device 20. The image processing unit 32 generates a processed image obtained by performing predetermined image processing (details will be described later) on the captured image acquired by the image acquisition unit 31. The detection processing unit 33 detects an abnormality in the appearance of the inspected object 60 based on the captured image acquired by the image acquisition unit 31, the processed image generated by the image processing unit 32, and the like.

  The display processing unit 34 controls image output to the display 70 connected to the PC 30. The input receiving unit 35 receives a user (inspector) operation input performed via the input device 80 connected to the PC 30. The illumination control unit 36 is connected to the illumination power source 40 and controls the illumination device 10 by controlling the illumination power source 40.

  Here, in the embodiment, the illumination control unit 36 is configured to individually control lighting and extinction of each of the 12 illumination areas 13A to 13L according to a plurality of preset illumination patterns. Hereinafter, examples of a plurality of illumination patterns will be specifically described with reference to the drawings.

(First lighting pattern)
FIG. 3 is an exemplary diagram illustrating a first illumination pattern that may be used in the embodiment. As shown in FIG. 3, the first illumination pattern is an illumination pattern that lights all of the 12 illumination regions 13A to 13L at the same time.

  FIG. 4 is an exemplary diagram illustrating a captured image captured corresponding to the first illumination pattern in the embodiment. As shown in FIG. 4, according to the first illumination pattern, it is possible to obtain a captured image in which the entire inspection object 60 is illuminated substantially uniformly.

(Second illumination pattern)
FIG. 5 is an exemplary diagram illustrating a second illumination pattern that may be used in the embodiment. As shown in FIG. 5, the second illumination pattern is an illumination pattern in which only 6 (blocks corresponding to half) of the 12 illumination regions 13A to 13L are turned on and the others are turned off.

  In the second illumination pattern, the positions of the illumination regions 13A to 13L that are turned on (turned off) can be changed as appropriate. In FIG. 5, (a) a pattern for lighting only the blocks of the illumination areas 13A to 13C and 13J to 13L, (b) a pattern for lighting only the blocks of the illumination areas 13A to 13F, and (c) an illumination area 13D to Four patterns of a pattern for lighting only the 13I block and a pattern for lighting only the blocks of the illumination areas 13G to 13L are illustrated.

  In the second illumination pattern, the four patterns described above are sequentially switched in the order of (a), (b), (c), and (d), for example. Thereby, in the 2nd illumination pattern, seeing from the direction (normal line direction) where the rough irradiation direction of light is orthogonal to the surface of to-be-inspected object 60, arrow X2a direction, arrow X2b direction, arrow X2c direction, It switches sequentially in the order of the arrow X2d direction. Note that the pattern switching order is not limited to the order of (a), (b), (c), and (d), and can be changed as appropriate.

  FIG. 6 is an exemplary diagram illustrating a captured image captured corresponding to the second illumination pattern in the embodiment. 6A is a captured image of the inspected object 60 illuminated with the pattern of FIG. 5A, and FIG. 6B is illuminated with the pattern of FIG. 5B. It is a captured image of the inspected object 60. 6C is a captured image of the inspected object 60 illuminated with the pattern of FIG. 5C, and FIG. 6D is illuminated with the pattern of FIG. It is the captured image of the to-be-inspected object 60.

(Third lighting pattern)
FIG. 7 is an exemplary diagram showing a third illumination pattern that may be used in the embodiment. As shown in FIG. 7, the third illumination pattern is a simplification of the second illumination pattern (see FIG. 5) described above. More specifically, the third illumination pattern sequentially switches two patterns: (a) a pattern similar to (b) in FIG. 5 and (b) a pattern similar to (d) in FIG. Illumination pattern.

  According to the third illumination pattern, the inspected object 60 can be sequentially illuminated from the directions of the arrows X2b and X2d, which are directions facing each other when viewed from a direction (normal direction) orthogonal to the surface of the inspected object 60. it can. Note that the captured image obtained by the third illumination pattern is the same as the captured image shown in FIGS. 6B and 6D described above, and a description thereof will be omitted here.

(4th lighting pattern)
FIG. 8 is an exemplary diagram showing a fourth illumination pattern that may be used in the embodiment. As shown in FIG. 8, the fourth illumination pattern is a simplification of the second illumination pattern (see FIG. 5), similar to the third illumination pattern described above. More specifically, in the fourth illumination pattern, two patterns of (a) a pattern similar to (a) in FIG. 5 and (b) a pattern similar to (c) in FIG. 5 are sequentially switched. Illumination pattern.

  According to the fourth illumination pattern, the inspection object 60 is a direction facing each other when viewed from a direction (normal direction) orthogonal to the surface of the inspection object 60, and in a direction different from the third illumination pattern. Illumination can be sequentially performed from a certain arrow X2a direction and an arrow X2c direction. Note that the captured image obtained by the fourth illumination pattern is the same as the captured image illustrated in FIGS. 6A and 6C, and thus description thereof is omitted here.

(Fifth illumination pattern)
FIG. 9 is an exemplary diagram showing a fifth illumination pattern that can be used in the embodiment. As shown in FIG. 9, the fifth illumination pattern is an illumination pattern in which only four of the twelve illumination areas 13A to 13L (block corresponding to one third) are turned on and the others are turned off. It is.

  In the fifth illumination pattern, the positions of the illumination regions 13A to 13L that are turned on (turned off) can be changed as appropriate. In FIG. 9, (a) a pattern for lighting only the blocks in the illumination areas 13A to 13D, (b) a pattern for lighting only the blocks in the illumination areas 13E to 13H, and (c) only a block in the illumination areas 13I to 13L. Three patterns are illustrated as an example of a pattern for lighting up.

  In the fifth illumination pattern, the three patterns described above are sequentially switched in the order of, for example, (a), (b), and (c). Thereby, in the 5th illumination pattern, when the rough irradiation direction of light sees from the direction (normal line direction) orthogonal to the surface of to-be-inspected object 60, it is the direction of arrow X5a, arrow X5b, arrow X5c, It switches in order of. Note that the pattern switching order is not limited to the order of (a), (b), and (c), and can be changed as appropriate.

  FIG. 10 is an exemplary diagram illustrating a captured image captured corresponding to the fifth illumination pattern in the embodiment. 10A is a captured image of the inspected object 60 illuminated with the pattern of FIG. 9A, and FIG. 10B is illuminated with the pattern of FIG. 9B. FIG. 10C shows a captured image of the inspection object 60 illuminated by the pattern of FIG. 9C.

(Sixth illumination pattern)
FIG. 11 is an exemplary diagram showing a sixth illumination pattern that can be used in the embodiment. As shown in FIG. 11, the sixth illumination pattern is an illumination pattern in which only three of the twelve illumination areas 13A to 13L (block corresponding to a quarter) are turned on and the others are turned off. It is.

  In the sixth illumination pattern, the positions of the illumination regions 13A to 13L that are turned on (turned off) can be changed as appropriate. In FIG. 11, (a) a pattern for lighting only the blocks in the illumination areas 13A to 13C, (b) a pattern for lighting only the blocks in the illumination areas 13D to 13F, and (c) only a block in the illumination areas 13G to 13I. There are four patterns, for example, a pattern for lighting up and (d) a pattern for lighting only the blocks in the illumination areas 13J to 13L.

  In the sixth illumination pattern, the four patterns described above are sequentially switched in the order of (a), (b), (c), and (d), for example. Thereby, in the sixth illumination pattern, when the rough irradiation direction of light is viewed from the direction (normal direction) orthogonal to the surface of the inspection object 60, the arrow X6a direction, the arrow X6b direction, the arrow X6c direction, It switches sequentially in the order of the arrow X6d direction. Note that the pattern switching order is not limited to the order of (a), (b), (c), and (d), and can be changed as appropriate.

  FIG. 12 is an exemplary diagram illustrating a captured image captured corresponding to the sixth illumination pattern in the embodiment. 12A is a captured image of the inspected object 60 illuminated with the pattern of FIG. 11A, and FIG. 12B is illuminated with the pattern of FIG. 11B. It is a captured image of the inspected object 60. 12 (c) is a captured image of the inspected object 60 illuminated with the pattern of FIG. 11 (c), and FIG. 12 (d) is illuminated with the pattern of FIG. 11 (d). It is the captured image of the to-be-inspected object 60.

(Seventh illumination pattern)
FIG. 13 is an exemplary diagram showing a seventh illumination pattern that can be used in the embodiment. As shown in FIG. 13, the seventh illumination pattern is an illumination pattern in which only two of the twelve illumination regions 13A to 13L (block corresponding to one sixth) are turned on and the others are turned off. It is.

  In the seventh illumination pattern, the positions of the illumination regions 13A to 13L that are turned on (turned off) can be changed as appropriate. FIG. 13 includes (a) a pattern in which only the blocks in the illumination areas 13A and 13B are lit, (b) a pattern in which only the blocks in the illumination areas 13C and 13D are lit, and (f) the illumination areas 13K and 13L. A pattern for lighting only the block is illustrated. In FIG. 13, the patterns (c) to (e) between (b) and (f) are omitted, but the patterns (c) to (e) are respectively ( This is a pattern in which the blocks lit in the patterns b) to (d) are sequentially shifted clockwise. Therefore, in the seventh illumination pattern, there are six patterns (a) to (f).

  In the seventh illumination pattern, the above-described six patterns are sequentially switched in the order of (a), (b),..., (F), for example. Thereby, in the seventh illumination pattern, when the rough irradiation direction of light is viewed from the direction (normal direction) orthogonal to the surface of the inspection object 60, the direction of the arrow X7a, the direction of the arrow X7b, ..., the arrow X7f It switches in order of direction. The pattern switching order is not limited to the order of (a), (b),..., (F), and can be changed as appropriate.

  FIG. 14 is an exemplary diagram illustrating a captured image captured corresponding to the seventh illumination pattern in the embodiment. 14A is a captured image of the inspected object 60 illuminated with the pattern of FIG. 13A, and FIG. 14B is illuminated with the pattern of FIG. 13B. FIG. 14F shows a captured image of the inspection object 60 illuminated by the pattern of FIG. 13F.

(Eighth lighting pattern)
FIG. 15 is an exemplary diagram showing an eighth illumination pattern that can be used in the embodiment. As shown in FIG. 15, the eighth illumination pattern is an illumination pattern in which only one of the 12 illumination areas 13A to 13L (a block corresponding to 1/12) is turned on and the other is turned off. It is.

  In the eighth illumination pattern, the positions of the illumination regions 13A to 13L that are turned on (turned off) can be changed as appropriate. FIG. 15 illustrates (a) a pattern in which only the illumination area 13A is lit, (b) a pattern in which only the illumination area 13B is lit, and (l) a pattern in which only the illumination area 13L is lit. Yes. In FIG. 15, the patterns (c) to (k) between (b) and (l) are not shown, but the patterns (c) to (k) are respectively ( It is a pattern in which blocks lit in the patterns b) to (j) are sequentially shifted clockwise. Accordingly, in the eighth illumination pattern, there are twelve patterns (a) to (l).

  In the eighth illumination pattern, the 12 patterns described above are sequentially switched in the order of, for example, (a), (b),. Thereby, in the 8th illumination pattern, when the rough irradiation direction of light sees from the direction (normal direction) orthogonal to the surface of the to-be-inspected object 60, arrow X8a direction, arrow X8b direction, ..., arrow X81 It switches in order of direction. The order of pattern switching is not limited to the order of (a), (b),..., (L), and can be changed as appropriate.

  FIG. 16 is an exemplary diagram illustrating a captured image captured corresponding to the eighth illumination pattern in the embodiment. 16A is a captured image of the inspected object 60 illuminated with the pattern of FIG. 15A, and FIG. 16B is illuminated with the pattern of FIG. 15B. FIG. 16 (l) is a captured image of the inspection object 60 illuminated by the pattern of FIG. 15 (l).

  In the second to eighth illumination patterns described above, the 12 illumination areas 13A to 13L are divided into a plurality of blocks, and the plurality of blocks are turned on one by one to thereby change the direction of the light illuminating the object 60 to be inspected. It is a pattern that changes one direction at a time. However, in the embodiment, it is possible to simultaneously illuminate the inspected object 60 from two or more different directions by using the following illumination pattern.

(9th lighting pattern)
FIG. 17 is an exemplary diagram showing a ninth illumination pattern that can be used in the embodiment. As shown in FIG. 17, the ninth illumination pattern is two blocks each corresponding to a quarter of the twelve illumination regions 13A to 13L, and is located at a position sandwiching the center Ax. Is an illumination pattern in which is turned on at the same time and the others are turned off.

  In the ninth illumination pattern, the positions of the illumination regions 13A to 13L that are turned on (turned off) can be changed as appropriate. FIG. 17 includes (a) a pattern in which the blocks of the illumination areas 13A to 13C and the blocks of the illumination areas 13G to 13I are turned on simultaneously, and (b) a block of the illumination areas 13D to 13F and the illumination areas 13J to 13L. Two patterns are illustrated, that is, a pattern for simultaneously lighting the blocks.

  According to the ninth illumination pattern, it is possible to obtain a state in which light is irradiated simultaneously from two directions sandwiching the center Ax when viewed from a direction (normal direction) orthogonal to the surface of the inspection object 60. More specifically, according to the pattern of FIG. 17A, a state in which light is simultaneously irradiated in the directions of the arrow X6a and the arrow X6c is obtained. According to the pattern of FIG. A state in which light is simultaneously irradiated in the direction and the arrow X6d direction is obtained. Therefore, according to the 9th illumination pattern, compared with the illumination pattern like the 6th illumination pattern (refer FIG. 11) which acquires the information for one direction by one imaging, it is more by one imaging. Information (information for two directions) can be obtained.

  Note that FIG. 17 illustrates, as an example, a case where the two patterns described above are sequentially switched in the order of (a) and (b). However, the order of switching patterns is not limited to the order of (a) and (b), and may be in reverse order.

  FIG. 18 is an exemplary diagram illustrating a captured image captured corresponding to the ninth illumination pattern in the embodiment. 18A is a captured image of the inspected object 60 illuminated with the pattern of FIG. 17A, and FIG. 18B is illuminated with the pattern of FIG. 17B. It is a captured image of the inspected object 60. As shown in FIG. 18, according to the ninth illumination pattern, for example, a sixth illumination pattern (FIG. 11 and FIG. 11) that lights only one block corresponding to a quarter of the 12 illumination regions 13A to 13L. Compared to FIG. 12), a brighter captured image can be obtained.

(Tenth illumination pattern)
FIG. 19 is an exemplary diagram showing a tenth illumination pattern that can be used in the embodiment. As shown in FIG. 19, the tenth illumination pattern is two blocks each corresponding to one sixth of the twelve illumination areas 13A to 13L, and is located at a position sandwiching the center Ax. Is an illumination pattern in which is turned on at the same time and the others are turned off.

  In the tenth illumination pattern, the positions of the illumination regions 13A to 13L that are turned on (turned off) can be changed as appropriate. FIG. 19 includes (a) a pattern in which the blocks of the illumination areas 13A and 13B and the blocks of the illumination areas 13G and 13H are turned on simultaneously, and (b) the blocks of the illumination areas 13C and 13D and the illumination areas 13I and 13J. Three patterns are illustrated, that is, a pattern in which the blocks are simultaneously lit, and a pattern in which (c) the blocks in the illumination areas 13E and 13F and the blocks in the illumination areas 13K and 13L are lit simultaneously.

  Similarly to the ninth illumination pattern described above, the tenth illumination pattern also allows light to be simultaneously emitted from two directions sandwiching the center Ax when viewed from the direction orthogonal to the surface of the object 60 (normal direction). The irradiated state is obtained. More specifically, according to the pattern of FIG. 19A, a state in which light is simultaneously irradiated in the directions of the arrows X7a and X7d can be obtained. Similarly, according to the pattern of FIG. 19B, a state in which light is simultaneously irradiated in the directions of the arrows X7b and X7e is obtained. According to the pattern of FIG. 19C, the directions of the arrows X7c and A state in which light is simultaneously irradiated in the direction of the arrow X7f is obtained. Therefore, according to the tenth illumination pattern, for example, more in one imaging compared to an illumination pattern such as a seventh illumination pattern (see FIG. 13) that obtains information for one direction in one imaging. Information (information for two directions) can be obtained.

  FIG. 19 illustrates, as an example, a case where the above-described three patterns are sequentially switched in the order of (a), (b), and (c). However, the order of pattern switching is not limited to the order of (a), (b), and (c), and can be changed as appropriate.

  FIG. 20 is an exemplary diagram illustrating a captured image captured corresponding to the tenth illumination pattern in the embodiment. 20A is a captured image of the inspected object 60 illuminated with the pattern of FIG. 19A, and FIG. 20B is illuminated with the pattern of FIG. 19B. FIG. 20C illustrates a captured image of the inspection object 60 illuminated by the pattern illustrated in FIG. 19C. As shown in FIG. 20, according to the tenth illumination pattern, the seventh illumination pattern (FIG. 14) in which only one block corresponding to one sixth of the 12 illumination regions 13 </ b> A to 13 </ b> L is lit. A captured image brighter than (see) is obtained.

  In the ninth and tenth illumination patterns described above, at least two of the twelve illumination areas 13A to 13L that are provided at positions where the center Ax of the annular illumination device 10 is sandwiched from both sides in the radial direction are simultaneously turned on. This is a pattern in which the others are turned off. That is, the ninth and tenth illumination patterns described above are sandwiching patterns in which light is irradiated simultaneously from two directions that sandwich the center Ax. However, in the embodiment, it is also possible to simultaneously irradiate light from two or more directions by using the following illumination pattern.

(Eleventh illumination pattern)
FIG. 21 is an exemplary diagram showing an eleventh illumination pattern that can be used in the embodiment. As shown in FIG. 21, the eleventh illumination pattern is three blocks each corresponding to one sixth of the twelve illumination areas 13A to 13L, and is in a symmetrical position with respect to the center Ax. More specifically, it is an illumination pattern in which three blocks provided at intervals of 120 degrees around the center Ax are turned on simultaneously and the others are turned off.

  In the eleventh illumination pattern, the positions of the illumination regions 13A to 13L that are turned on (turned off) can be changed as appropriate. FIG. 21 includes (a) a pattern in which the blocks of the illumination areas 13A and 13B, the blocks of the illumination areas 13E and 13F, and the blocks of the illumination areas 13I and 13J are lit simultaneously, and (b) the illumination areas 13C and 13D. Two patterns are illustrated, that is, a pattern in which the blocks in the illumination areas 13G and 13H and the blocks in the illumination areas 13K and 13L are turned on simultaneously.

  According to the eleventh illumination pattern, it is possible to obtain a state in which light is simultaneously irradiated in three equal directions with respect to the center Ax when viewed from a direction (normal direction) orthogonal to the surface of the inspection object 60. More specifically, according to the pattern of FIG. 21A, a state in which light is simultaneously irradiated in the direction of the arrow X7a, the direction of the arrow X7c, and the direction of the arrow X7e is obtained, and the pattern of FIG. Accordingly, it is possible to obtain a state in which light is simultaneously irradiated in the arrow X7b direction, the arrow X7d direction, and the arrow X7f direction. Therefore, according to the eleventh illumination pattern, more information (information in three directions) can be obtained by one imaging as compared with the seventh illumination pattern (see FIG. 13) described above, for example.

  FIG. 21 illustrates, as an example, a case where the two patterns described above are sequentially switched in the order of (a) and (b). However, the order of switching patterns is not limited to the order of (a) and (b), and may be in reverse order.

(Twelfth illumination pattern)
FIG. 22 is an exemplary diagram showing a twelfth illumination pattern that can be used in the embodiment. As shown in FIG. 22, the twelfth illumination pattern is four blocks each corresponding to one-twelfth of the twelve illumination areas 13A to 13L, and is in a symmetrical position with respect to the center Ax. More specifically, it is an illumination pattern in which four blocks provided at intervals of 90 degrees around the center Ax are turned on at the same time and the others are turned off.

  In the twelfth illumination pattern, the positions of the illumination regions 13A to 13L that are turned on (turned off) can be changed as appropriate. In FIG. 22, (a) a pattern in which the block of the illumination area 13A, the block of the illumination area 13D, the block of the illumination area 13G, and the block of the illumination area 13J are simultaneously turned on, and (b) the illumination area 13B A pattern for lighting simultaneously a block, a block of the illumination area 13E, a block of the illumination area 13H, and a block of the illumination area 13K, (c) a block of the illumination area 13C, a block of the illumination area 13F, and an illumination area Three patterns of the 13I block and the pattern for lighting the block of the illumination area 13L at the same time are illustrated.

  According to the twelfth illumination pattern, it is possible to obtain a state in which light is simultaneously irradiated in four equal directions with respect to the center Ax when viewed from a direction (normal direction) orthogonal to the surface of the inspection object 60. More specifically, according to the pattern of FIG. 22A, a state in which light is simultaneously irradiated in the arrow X8a direction, the arrow X8d direction, the arrow X8g direction, and the arrow X8j direction is obtained. Similarly, according to the pattern of FIG. 22B, a state in which light is irradiated simultaneously in the direction of the arrow X8b, the direction of the arrow X8e, the direction of the arrow X8h, and the direction of the arrow X8k is obtained. According to the pattern, it is possible to obtain a state in which light is simultaneously irradiated in the arrow X8c direction, the arrow X8f direction, the arrow X8i direction, and the arrow X81 direction. Therefore, according to the twelfth illumination pattern, for example, more in one imaging compared to an illumination pattern such as an eighth illumination pattern (see FIG. 15) that obtains information for one direction in one imaging. (Information for four directions) can be obtained.

  FIG. 22 illustrates, as an example, a case where the three patterns described above are sequentially switched in the order of (a), (b), and (c). However, the order of pattern switching is not limited to the order of (a), (b), and (c), and can be changed as appropriate.

  Thus, in the embodiment, a plurality of illumination patterns as described above are set in advance. Then, the illumination control unit 36 individually controls lighting and extinguishing of each of the 12 illumination areas 13A to 13L according to the plurality of illumination patterns as described above.

  By the way, in embodiment, the inspector can select suitably the illumination pattern used for an actual test | inspection from several preset illumination patterns. That is, in the embodiment, the display processing unit 34 displays a pattern selection screen 2300 as described below on the display 70, and the input reception unit 35 receives an inspector's selection operation on the pattern selection screen 2300. . The selection operation is input via the input device 80.

  FIG. 23 is an exemplary diagram showing a pattern selection screen 2300 according to the embodiment. As shown in FIG. 23, the pattern selection screen 2300 has a region 2301 in which a list of a plurality of preset illumination patterns is displayed. The inspector can select at least one illumination pattern to be actually executed by the illumination control unit 36 by selecting a desired illumination pattern from the list displayed in the area 2301 using the input device 80. .

  In the example of FIG. 23, two areas 2302 and 2303 are provided in addition to the area 2301 in which a list of a plurality of illumination patterns is displayed. In the area 2302, for example, a captured image corresponding to the illumination pattern selected in the area 2301 is displayed, and in the area 2303, for example, an explanation of the illumination pattern selected in the area 2301 is displayed.

  Returning to FIG. 1, when an illumination pattern is selected on the pattern selection screen 2300, the image acquisition unit 31 acquires a plurality of captured images captured according to the selected illumination pattern from the imaging device 20. Then, the image processing unit 32 performs predetermined image processing on the plurality of captured images acquired by the image acquisition unit 31, and generates one or more processed images. Note that the predetermined image processing is, for example, a combining process for combining a plurality of images, and the processed image is a combined image in which one or more of the plurality of captured images are combined.

  In the embodiment, the appearance abnormality of the inspected object 60 is detected based on at least one of the plurality of captured images and one or more processed images. That is, the detection processing unit 33 according to the embodiment uses the photometric stereo method and information on the surface shape of the inspection object 60 using at least one of a plurality of captured images and one or more processed images. And an abnormality in the appearance of the inspected object 60 is detected based on the calculation result.

  Here, it is desirable that the image used for abnormality detection by the detection processing unit 33 is a captured image and a composite image in which the abnormality clearly appears. Therefore, in the embodiment, the inspector can visually check all the captured images and composite images obtained by the above processing, and the inspector can select an image suitable for abnormality detection by the detection processing unit 33. It has become.

  That is, in the embodiment, the display processing unit 34 displays an image selection screen 2400 as described below on the display 70, and the input reception unit 35 receives an inspector's selection operation on the image selection screen 2400. . And the detection process part 33 detects abnormality of the to-be-inspected object 60 using the 1 or more image selected by the said selection operation. The selection operation is input via the input device 80.

  FIG. 24 is an exemplary diagram showing an image selection screen 2400 according to the embodiment. As shown in FIG. 24, the image selection screen 2400 is provided with a plurality of small areas 2401. In the embodiment, a plurality of captured images and one or more composite images are displayed in a list by the plurality of small regions 2401. Then, the inspector visually confirms the images displayed in each of the plurality of small areas 2401 and selects one or more images in which the abnormality is most clearly expressed using the input device 80.

  Next, the operation of the PC 30 according to the embodiment will be described in more detail.

  FIG. 25 is an exemplary flowchart showing a series of processes that can be executed in the embodiment.

  As shown in FIG. 25, in the embodiment, in S1, the display processing unit 34 displays a pattern selection screen 2300 including an area 2301 on which a plurality of preset illumination patterns are displayed on the display 70.

  In S <b> 2, the input reception unit 35 receives an illumination pattern selection operation by the inspector. The illumination pattern selection operation is an operation of selecting at least one illumination pattern that is actually executed by the illumination control unit 36 from a plurality of illumination patterns displayed in the area 2301 of the pattern selection screen 2300.

  In step S <b> 3, the input reception unit 35 determines whether the illumination pattern selection operation on the pattern selection screen 2300 has been completed. If it is determined in S3 that the illumination pattern selection operation has not yet been completed, the process returns to S2. On the other hand, if it is determined in S3 that the illumination pattern selection operation has been completed, the process proceeds to S4.

  In S <b> 4, the illumination control unit 36 turns on the illumination areas 13 </ b> A to 13 </ b> L (at least a part thereof) according to one pattern included in the illumination pattern selected on the pattern selection screen 2300. In S <b> 5, the image acquisition unit 31 causes the imaging device 20 to capture an image and acquires a captured image from the imaging device 20. In S <b> 6, the illumination control unit 36 turns off the illumination areas 13 </ b> A to 13 </ b> L (at least a part thereof) that was lit in S <b> 4.

  In S <b> 7, the illumination control unit 36 determines whether captured images corresponding to all patterns included in the illumination pattern selected on the pattern selection screen 2300 have been acquired. If it is determined in S7 that captured images corresponding to all patterns have not been acquired, the process returns to S4. On the other hand, if it is determined in S7 that captured images corresponding to all patterns have been acquired, the process proceeds to S8.

  In S <b> 8, the image processing unit 32 generates one or more composite images based on the plurality of captured images acquired by the image acquisition unit 31. In S <b> 9, the display processing unit 34 displays on the display 70 an image selection screen 2400 on which a list of a plurality of captured images and one or more composite images is displayed. The plurality of captured images and one or more composite images are displayed in a plurality of small areas 2401 provided on the image selection screen 2400.

  In S10, the input receiving unit 35 receives an image selection operation by the inspector. The image selection operation is an operation of selecting an image to be subjected to an abnormality inspection by the detection processing unit 33 from a plurality of images (captured image and composite image) displayed on the image selection screen 2400.

  In step S <b> 11, the input reception unit 35 determines whether the image selection operation on the image selection screen 2400 has been completed. If it is determined in S11 that the image selection operation has not yet been completed, the process returns to S10. On the other hand, if it is determined in S11 that the image selection operation has been completed, the process proceeds to S12.

  In S12, the detection processing unit 33 uses the image selected on the image selection screen 2400 to detect an abnormality in the appearance of the inspection object 60 by the photometric stereo method. The detection result is output to the display 70, for example. Thus, the inspection process in the embodiment is completed.

  As described above, in the embodiment, the PC 30 includes the illumination control unit 36, the image acquisition unit 31, and the detection processing unit 33 that are configured as follows. The illumination control unit 36 controls lighting and extinguishing of each of the twelve illumination areas 13A to 13L according to a plurality of preset illumination patterns. The image acquisition unit 31 acquires a plurality of captured images obtained by imaging the inspected object 60 illuminated by the plurality of illumination patterns from the imaging device 20. The detection processing unit 33 uses at least one of a plurality of captured images and one or more processed images (composite images) generated by performing image processing on the plurality of captured images. An abnormality in the appearance of the inspection object 60 is detected. Thereby, the to-be-inspected object 60 can be illuminated from various directions with the single illuminating device 10 provided with 12 illumination area | regions 13A-13L. As a result, for example, it is not necessary to provide a plurality of lights in order to illuminate the inspected object 60 from various directions, so that the configuration of the appearance inspection system can be simplified.

  Here, in the embodiment, the inspected object 60 is illuminated from various directions by the 12 illumination regions 13A to 13L. Since the number 12 is a number that can be divided by 2, 3, or 4, the twelve illumination regions 13A to 13L not only illuminate the inspected object 60 from only one direction, but also inspect the inspected object 60. A state in which the object 60 is illuminated from two different directions simultaneously, a state in which the object 60 is simultaneously illuminated from three different directions, and a state in which the object 60 is simultaneously illuminated from four different directions can also be realized. Therefore, according to the 12 illumination areas 13A to 13L, the inspected object 60 can be imaged under more conditions, so that a larger number of captured images used for the inspection can be acquired. As a result, the inspection accuracy can be improved.

  More specifically, in the embodiment, as described above, a plurality of preset illumination patterns are provided at positions symmetrical with respect to the center Ax of the illumination device 10 among the 12 illumination regions 13A to 13L. It includes a symmetrical pattern in which at least two of them are turned on simultaneously. The symmetrical pattern includes a sandwiching pattern in which at least two of the twelve illumination regions 13A to 13L that are provided at positions sandwiching the center Ax of the illumination device 10 from both sides in the radial direction are turned on simultaneously. According to these symmetrical patterns and sandwiching patterns, more information (information for 2 to 4 directions) can be obtained by one imaging.

  In the embodiment, as described above, the display process of displaying the pattern selection screen 2300 on the display 70 for causing the inspector to select an illumination pattern to be executed by the illumination control unit 36 from the plurality of illumination patterns. Part 34 is provided. Thereby, the selection operation of the illumination pattern performed by the illumination device 10 can be performed more easily.

  In the embodiment, as described above, the display processing unit 34 includes a list of a plurality of captured images and one or more processed images, and performs a detection process to detect an abnormality in the appearance of the inspected object 60. An image selection screen 2400 for causing the inspector to select an image to be used by the unit 33 from the list is displayed on the display 70. Thereby, selection operation of the image used as the object of the abnormality detection process by the detection process part 33 can be performed more easily.

  The program executed by the PC 30 described above is an installable or executable file, and is a computer such as a CD-ROM, a flexible disk (FD), a CD-R, or a DVD (Digital Versatile Disk). Provided in a state of being recorded on a recording medium that can be read by the user.

  The inspection program executed by the PC 30 described above may be provided by being stored on a computer connected to a network such as the Internet and downloaded via the network. That is, the inspection program executed by the PC 30 described above may be provided or distributed via a network such as the Internet.

  As mentioned above, although embodiment of this invention was described, embodiment mentioned above is shown as an example and is not intending limiting the range of invention. The above-described novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. The above-described embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  For example, in the above-described embodiment, an example in which the number of illumination areas is 12 has been described. However, in the embodiment, the number of illumination areas may be less than 12 or more than 12. If the number of illumination areas is set to an even number, it is possible to realize a pinching pattern that illuminates the object to be inspected so as to be pinched from two directions. In this case, if the number of objects to be inspected is a multiple of 4, it is possible to realize a symmetrical pattern that illuminates the objects to be inspected evenly from four directions. Furthermore, if the number of illumination areas is set to a multiple of 3, it is possible to realize a symmetric pattern that illuminates the object to be inspected evenly from three directions. Note that the number 12, which is the number of illumination areas in the embodiment, is not only a multiple of 2 to 4, but also a multiple of 6, so according to the embodiment, the object to be inspected is illuminated equally from six directions. Symmetric patterns can also be realized.

  Furthermore, in the above-described embodiment, the following illumination patterns may be used in addition to the first to twelfth illumination patterns.

(13th lighting pattern)
FIG. 26 is an exemplary diagram showing a thirteenth illumination pattern that can be used in the embodiment. As shown in FIG. 26, the thirteenth illumination pattern is two blocks each corresponding to a quarter of the twelve illumination areas 13A to 13L, and is located at a position sandwiching the center Ax. Are illuminated at the same time, and the positions of the two blocks that have been lit are moved gradually (continuously along the circumferential direction).

  More specifically, the thirteenth illumination pattern includes (a) a pattern in which the blocks of the illumination areas 13A to 13C and the blocks of the illumination areas 13G to 13I are lit simultaneously, and (b) a block of the illumination areas 13B to 13D. And a pattern for simultaneously lighting the blocks of the illumination areas 13H to 13J, (c) a pattern for simultaneously lighting the blocks of the illumination areas 13C to 13E and the blocks of the illumination areas 13I to 13K, and (d) illumination A pattern for lighting the blocks of the areas 13D to 13F and the blocks of the lighting areas 13J to 13L at the same time, and (e) lighting the blocks of the lighting areas 13E to 13G and the blocks of the lighting areas 13K, 13L, and 13A at the same time Pattern to be performed, (f) blocks of illumination areas 13F to 13H, and illumination areas 13L, 13A and 13B And it includes a pattern of lighting the block, at the same time, the six patterns.

  Here, in the thirteenth illumination pattern shown in FIG. 26, the above six patterns (a) to (f) are continuously switched in this order. Thus, in the thirteenth illumination pattern, the intensity of light emitted from the illumination device 10 is periodically (in a sine wave form) both temporally and spatially along the circumferential direction of the illumination device 10. Change.

  FIG. 27 is an exemplary diagram illustrating a captured image captured corresponding to the thirteenth illumination pattern in the embodiment. 27A to 27F are captured images of the inspected object 61 illuminated with the patterns of FIGS. 26A to 26F, respectively. As shown in (a) to (f) of FIG. 27, according to the thirteenth illumination pattern, the intensity of light emitted from the illumination device 10 changes periodically, so that the illumination device 10 is illuminated. Similarly, the light / dark pattern of the reflected light from the inspected object 61 also periodically changes.

DESCRIPTION OF SYMBOLS 10 Illumination device 12 Recessed part 13A-13L Illumination area 14 Light source 20 Imaging device 30 PC (inspection device)
DESCRIPTION OF SYMBOLS 31 Image acquisition part 32 Image processing part 33 Detection processing part 34 Display processing part 36 Illumination control part 60, 61 Inspected object 70 Display (display part)
2300 Pattern selection screen 2400 Image selection screen

Claims (10)

An annular illumination device configured by arranging 12 illumination regions in an annular shape;
An imaging device for imaging the object illuminated by the illumination device;
An inspection device connected to the illumination device and the imaging device;
With
The inspection device includes:
An illumination control unit that controls lighting and extinction of each of the 12 illumination areas according to a plurality of preset illumination patterns;
An image acquisition unit that acquires a plurality of captured images obtained by imaging the inspected objects illuminated by the plurality of illumination patterns from the imaging device;
An abnormality in the appearance of the object to be inspected is detected using at least one of the plurality of captured images and one or more processed images generated by performing image processing on the plurality of captured images. A detection processing unit to
An appearance inspection system comprising: The one or more processed images include a composite image in which one or more of the plurality of captured images are combined.
The appearance inspection system according to claim 1. The plurality of illumination patterns include a symmetrical pattern for simultaneously lighting at least two illumination areas provided at symmetrical positions with respect to the center of the annular illumination device.
The visual inspection system according to claim 1 or 2. The symmetrical pattern includes a sandwiching pattern for simultaneously lighting at least two illumination regions provided at positions sandwiching the center of the annular illumination device from both sides in the radial direction.
The appearance inspection system according to claim 3. A display processing unit that displays on the display unit a pattern selection screen for causing the user to select an illumination pattern to be executed by the illumination control unit from the plurality of illumination patterns;
The illumination control unit controls lighting and extinguishing of each of the 12 illumination areas according to an illumination pattern selected on the pattern selection screen among the plurality of illumination patterns.
The appearance inspection system according to any one of claims 1 to 4. An image including a list of the plurality of captured images and the one or more processed images, and for allowing a user to select an image to be used by the detection processing unit to detect an abnormality in the appearance from the list. A display processing unit for displaying a selection screen on the display unit;
The detection processing unit detects an abnormality in the appearance using an image selected on the image selection screen;
The appearance inspection system according to any one of claims 1 to 5. On the side of the annular illumination device that faces the object to be inspected, an annular recess that is recessed from the outer peripheral side to the inner peripheral side of the annular illumination device on the side opposite to the object to be inspected is provided. And
The 12 illumination areas are constituted by a plurality of light sources provided in the annular recess.
The appearance inspection system according to any one of claims 1 to 6. The plurality of light sources are arranged side by side along a radial direction and a circumferential direction of the annular recess.
The appearance inspection system according to claim 7. Each of the twelve illumination regions corresponds to a region in which the portion of the annular illumination device facing the object to be inspected is equally divided into 12 at equal angular intervals with respect to the center of the annular illumination device. ,
The appearance inspection system according to any one of claims 1 to 8. An annular illumination device configured by arranging a plurality of illumination areas in an annular shape;
An imaging device for imaging the object illuminated by the illumination device;
An inspection device connected to the illumination device and the imaging device;
With
The inspection device includes:
According to a plurality of preset illumination patterns, an illumination control unit that controls turning on and off each of the plurality of illumination areas;
An image acquisition unit that acquires a plurality of captured images obtained by imaging the inspected objects illuminated by the plurality of illumination patterns from the imaging device;
An abnormality in the appearance of the object to be inspected is detected using at least one of the plurality of captured images and one or more processed images generated by performing image processing on the plurality of captured images. A detection processing unit to
An appearance inspection system comprising: