JP2018190888A - Separation device and separation method - Google Patents

Abstract

To position an entire group of adherends whose mutual intervals are widened at predetermined positions. A plurality of holding members hold ends of an adhesive sheet having a plurality of adherends or a plurality of divided adherends attached to at least one of one surface AS1 and the other surface AS2. And a separating means 30 for relatively moving the holding means 20 holding the end of the adhesive sheet AS and applying tension to the adhesive sheet AS to increase the mutual distance between the adherends CP. Detecting means 40 capable of recognizing the entire group of adherends CP in which the entirety of the group of adherends CP has been expanded as a lump, and positioning at least one of the position and orientation of the entire lump of adherend CPs based on the detection result of the detecting means 40 And positioning means 50 for performing the following. [Selection diagram] Fig. 1

Description

  The present invention relates to a separation device and a separation method.

  2. Description of the Related Art Conventionally, a separation device that increases the interval between a plurality of adherends attached to an adhesive sheet is known (see, for example, Patent Document 1).

JP 2016-127124 A

  However, in the conventional separation apparatus as described in Patent Document 1, the characteristics, characteristics, properties, materials, compositions, configurations, shapes, dimensions, and weights of individual adhesive sheets, atmospheric conditions, other factors, etc. In the case where, for example, the pick-up device picks up the adherends whose mutual intervals are widened, for example, when the pick-up device picks up the adherends whose mutual intervals are widened, the entire group of strips (adhered members) whose inter-spaces are widened is not fixed at a predetermined position. However, when the entire adherend group having a wide interval is transferred to another object, the positional deviation occurs and the transfer is caused.

  An object of the present invention is to provide a separation apparatus and a separation method capable of positioning an entire adherend group with a wide mutual interval at a predetermined position.

  The present invention employs the configurations described in the claims.

  According to the present invention, it is possible to position the entire group of adherends whose mutual intervals are widened at a predetermined position.

(A) is a top view of the separation apparatus which concerns on embodiment of this invention. (B) is a side view of (A). (A)-(C) are operation | movement explanatory drawings of the separation apparatus which concerns on embodiment of this invention. (A), (B) is explanatory drawing of the other example of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in this embodiment, when viewed from the direction of the arrow BD parallel to the Y axis, and when the direction is indicated without giving a reference figure, “up” is the “down” direction of the Z axis. Is the opposite direction, “left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the arrow direction of the Y axis, and “rear” is the opposite direction.

  The separation device 10 of the present invention includes a plurality of holding means 20 that holds the end of the adhesive sheet AS having a plurality of adherends CP affixed to one surface AS1, and a holding means that holds the end of the adhesive sheet AS. 20 is moved relative to each other to apply tension to the adhesive sheet AS so as to widen the interval between the adherends CP, and a detection unit 40 that can recognize the entire adherend CP group with widened intervals as a whole. And positioning means 50 for positioning both the position and orientation of the entire group of adherend CP groups based on the detection result of the detection means 40.

  The holding unit 20 includes a rotation motor 21 as a driving device supported by the separation unit 30 and an upper holding member 22 supported by the output shaft 21A.

  The separation means 30 includes a linear motor 31 as a driving device and a lower holding member 32 supported by the slider 31A and supporting the rotating motor 21 on the upper surface side.

  The detection means 40 includes imaging means such as a camera and a projector, and detection devices 41 such as various sensors such as an optical sensor and a sound wave sensor, and the mutual interval of the adherends CP and the overall aggregate shape of the adherends CP. Etc. can be detected.

  The positioning means 50 includes a linear motor 51 as a drive device including a slider 51A that moves in the Y-axis direction, and a linear motor 52 as a drive device that is supported by the slider 51A and includes a slider 52A that moves in the X-axis direction. , A rotation motor 53 as a drive device having an output shaft 53A that is supported by the slider 52A and rotates about the Z axis, and a base table 54 that is supported by the output shaft 53A and supports the separating means 30 above. I have.

The operation of the above separating apparatus 10 will be described.
First, a user (hereinafter, simply referred to as “user”) of the separation device 10 operates with respect to the separation device 10 in which each member stands by at an initial position indicated by a solid line in FIGS. An automatic operation start signal is input via an operating means (not shown) such as a panel or a personal computer. Thereafter, when an operator or a conveying means (not shown) places the adhesive sheet AS to which a plurality of adherends CP are attached on the lower holding member 32, the holding means 20 drives each rotation motor 21, and FIG. B) As shown by the middle two-dot chain line, the upper holding member 22 and the lower holding member 32 hold the end of the adhesive sheet AS.

  Next, the separating means 30 drives each linear motor 31 to separate the holding means 20 from each other as shown in FIG. 2 (A), thereby applying tension to the adhesive sheet AS so as to reduce the mutual distance between the adherends CP. spread. At this time, the adherends CP may not be spread at a predetermined interval due to distortion of the adhesive sheet AS or the like. Therefore, the detection means 40 drives the detection device to detect the mutual interval between the adherends CP, the overall aggregate shape of the adherends CP, and the like. Next, based on the detection result of the detection means 40, the separation means 30 drives each linear motor 31, and as shown in FIG. 2 (B), the mutual interval between the adherends CP becomes a predetermined interval. Alternatively, each holding means 20 is individually moved so that the overall aggregate shape of each adherend CP is similar to the overall aggregate shape of the base. Thereby, as for each to-be-adhered body CP, the whole aggregate shape becomes a predetermined aggregate shape.

  When the overall aggregate shape of each adherend CP becomes a predetermined aggregate shape, the detection means 40 drives the detection device 41, and as shown by the two-dot chain line in FIG. Are recognized as a square area SE as a lump. When the recognition is completed, the detection means 40 includes the first center line CL1 perpendicular to the line segment L1 at the center of the line segment L1 connecting the corner parts C1 and C2 of the square area SE, and the corner part C1 of the square area SE. After obtaining the intersection with the second center line CL2 orthogonal to the line segment L2 at the center of the line segment L2 connecting C3, and recognizing the intersection as the center SC of the square area SE, the first center line CL1 and the Y axis Is also obtained.

  Thereafter, the positioning means 50 drives the rotation motor 53 to rotate the base table 54 counterclockwise by the inclination θ1 so as to cancel the inclination θ1, and the line segment L1 is parallel to the X axis (the line segment L2 is set to Y). By positioning in parallel with the axis, the orientation of the entire group of adherend CPs (rectangular area SE) is determined. Next, the positioning means 50 drives the linear motors 51 and 52 to match the center SC of the square area SE with the center AC of the spacing device 10, and as shown in FIG. Positioning of the position of the entire CP group (square area SE) is performed.

  Then, when an adhesive sheet AS is used that is applied with a predetermined energy such as ultraviolet rays, X-rays or infrared rays and whose adhesive strength is reduced, an energy applying means (not shown) capable of applying the predetermined energy. Gives predetermined energy to the adhesive sheet AS, and reduces the adhesive force of the adhesive sheet AS to the adherend CP. Next, adherend take-out means (not shown) such as a pickup device or a transport device holds each adherend CP, removes it from the adhesive sheet AS, and transports it to another process. When all the adherends CP or a predetermined amount of the adherends CP are removed from the adhesive sheet AS, each means drives each drive device to return each member to the initial position. The conveying means (not shown) removes the adhesive sheet AS left on the lower holding member 32, and thereafter the same operation as described above is repeated.

  According to the spacing device 10 as described above, the entire adherend CP group with a wide mutual interval can be positioned at a predetermined position.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the detection means can recognize the entire adherend group with a wide mutual interval as a lump, the detection means will be limited in light of the technical common sense at the beginning of the application and within the technical scope. (Other means and processes are the same).

As shown in FIG. 3 (A), the separation device of the present invention is outside the adherend adhesion region CE to which the plurality of adherends CP on the holding means 20 and the adhesive sheet AS are affixed. The abutting means 60 that abuts the adhesive sheet AS inside the holding region HE held by the means 20 and the holding means 20 and the abutting means 60 that hold the end of the adhesive sheet AS are relatively moved to move the adhesive sheet AS to the adhesive sheet AS. It is good also as the separation apparatus 10A provided with the separation means 30A, the detection means 40, and the positioning means 50 which apply tension | tensile_strength and expand the mutual space | interval of the to-be-adhered body CP.
In addition, in the separation device 10A, components having the same configuration and the same function as the separation device 10 are denoted by the same reference numerals as those of the separation device 10, and the description of the configuration is omitted, and the operation description is simplified.

The contact means 60 includes a cylindrical contact member 61 supported on the base table 54 of the positioning means 50.
The separation means 30A includes a linear motion motor 33 as a driving device supported on the base table 54, and a lower holding member 34 supported by the output shaft 33A and supporting the rotation motor 21 on the upper surface side. .

  In such a separation device 10 </ b> A, when the adhesive sheet AS to which a plurality of adherends CP are attached is placed on the lower holding member 34 in the same manner as the separation device 10, the holding means 20 causes the rotation motor 21 to move. As shown by the two-dot chain line in FIG. 3A, the upper holding member 22 and the lower holding member 34 hold the end of the adhesive sheet AS. In addition, as shown in FIG. 3, the ring-shaped frame RF is affixed to the edge part of adhesive sheet AS, However, The said frame RF does not need to be. Next, the separating means 30A drives the linear motion motor 33, lowers the holding means 20, moves the holding means 20 and the contact means 60 relative to each other, and as shown in FIG. Increase the spacing. Thereafter, in the same manner as in the separation device 10, the positioning means 50 drives the rotation motor 53 and the linear motors 51 and 52 based on the detection result of the detection means 40, and the adherend is set at a predetermined interval. Position the entire CP group. Then, when the adherend CP is removed from the adhesive sheet AS by the adherend takeout means (not shown), each means drives each driving device to return each member to the initial position, and then the lower holding member 34. The adhesive sheet AS left above is removed, and thereafter the same operation as described above is repeated.

  The effect similar to the separation apparatus 10 can be acquired also by such a separation apparatus 10A.

The holding means 20 may be configured to hold the end of the adhesive sheet AS in which a plurality of adherends CP are attached to the other surface AS2, or both the one surface AS1 and the other surface AS2. A configuration in which the end of the adhesive sheet AS is held by gripping means such as a chuck or a chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, or a driving device may be used.
In the case of the separation device 10, the holding means 20 may be constituted by two bodies, for example, the holding means 20 that moves to the right as one body and the holding means 20 that moves to the left as one body. For example, you may comprise three or more bodies which move to the right, left, and other directions.
In the case of the separation device 10A, the holding means 20 may be one or two or more.

The separation means 30 and 30A may be a single number instead of a plurality. In this case, for example, the separation apparatus 10 supports two holding means 20 one by one by two sliders of one linear motor, and adherend CP The mutual interval of the adherend CP may be increased only in one axial direction (for example, the X-axis direction or the Y-axis direction).
The separating means 30 may be configured to increase the mutual interval in directions of three or more axes (for example, the X-axis direction, the Y-axis direction, and other axial directions), for example, a plurality of holding means 20 moved in the X-axis direction. Each of which is moved in the Y-axis direction (a plurality of holding means 20 moved in the Y-axis direction are each moved in the X-axis direction). The structure which cannot operate | move so that the mutual space | interval of the body CP may become a predetermined space | interval may be sufficient.
The separation means 30A moves the abutment means 60 while stopping or moving the retention means 20, thereby moving the retention means 20 and the abutment means 60 relative to each other and applying tension to the adhesive sheet AS. You may increase the mutual space | interval of CP.
The separation means 30 and 30A may be driven by an operator operating buttons and levers to drive the linear motor 31 and the linear motion motor 33. In this case, for example, the detection result by the detection means 40 is monitored or detected by a detector. And so that the mutual distance between the adherends CP becomes a predetermined distance according to the detection result displayed on the display, or the overall collective shape of each adherend CP However, the operator may drive the linear motor 31 and the linear motor 33 so as to have a similar relationship with the overall collective shape of the base.

  The detection means 40 may be visually observed by an operator. For example, the operator visually confirms that the mutual interval between the adherends CP becomes a predetermined interval, or the overall aggregate shape of each adherend CP. The linear motors 31, 51, 52, the linear motor 33, and the rotation motor 53 are driven by operating buttons and levers so as to have a similar relationship with respect to the overall collective shape. Also good.

  The positioning means 50 may position only the position of the entire lump adherend CP group, may position only the orientation of the entire lump adherend CP group, or other than the above positioning For example, the configuration may be such that the intersection of the diagonal lines of the rectangular area SE is recognized as the center SC of the rectangular area SE, and at least one of the position and orientation of the entire lump adherend CP group (square area SE) is positioned. However, the center SC of the rectangular area SE may not be matched with the center AC of the spacing device 10, but may be matched with another predetermined reference point, and the line segments L1 and L2 may be parallel to the X axis and the Y axis. Instead, the positioning may be performed in parallel with another predetermined reference line.

  The abutting means 60 may employ an abutting member 61 having other shapes such as a cylinder, a prism, an ellipse, etc., in addition to a rectangular tube shape, an elliptic cylinder shape, and the like.

The material, type, shape and the like of the adhesive sheet AS and the adherend CP in the present invention are not particularly limited. For example, the adhesive sheet AS, the adherend CP, and the entire group of adherends CP may be a circle, an ellipse, a polygon such as a triangle or a rectangle, or other shapes. An adhesive form such as pressure adhesiveness or heat sensitive adhesiveness may be used. Also, the adhesive sheet AS is, for example, a single layer having only an adhesive layer, having an intermediate layer between the base material and the adhesive layer, or having a cover layer on the upper surface of the base material. Further, it may be a so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer. Such a double-sided adhesive sheet has a single-layer or multi-layer intermediate layer, It may be a single layer or multiple layers without an intermediate layer. Examples of the adherend CP include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, semiconductor chip, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wooden plates, It may be a single substance such as a resin, or may be a composite formed by two or more of them, and can be a target of a member or an article in any form. Note that the adhesive sheet AS can be read in a functional or application manner, and can be any information such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording layer forming resin sheet. The adhesive sheet AS may be a sheet, a film, a tape, or the like, and the adhesive strength of the adhesive sheet AS is not reduced by applying predetermined energy such as ultraviolet rays, X-rays, or infrared rays.
A plurality of adherends CP may exist in advance on the adhesive sheet AS, or may be divided into a plurality of parts when the external force is applied by the separating means 30, 30A, other mechanisms, or by hand, and the like on the adhesive sheet AS. It is also possible to divide into a plurality such that there are a plurality. As the adherend CP which is divided into a plurality of parts, for example, a semiconductor wafer, a substrate or the like is irradiated with a laser to form a fragile weak layer such as a line or lattice on the semiconductor wafer or the substrate. In addition, when the tension is applied to the adhesive sheet AS, or when an external force is applied directly or indirectly to the semiconductor wafer, the substrate, or the like, the adhesive sheet AS becomes a plurality of adherends CP, for example, Cut the resin or glass plate with a cutter blade, and form a cut or perforation line that does not penetrate the front or back of the resin or glass plate, etc. It is not limited at all, such as the one that becomes a plurality of adherends CP by applying tension to AS or applying external force directly or indirectly to resin or glass plate. .

  The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, a combination of them directly or indirectly can be adopted.

DESCRIPTION OF SYMBOLS 10, 10A ... Separation device 20 ... Holding means 30, 30A ... Separation means 40 ... Detection means 50 ... Positioning means 60 ... Contact means AS ... Adhesive sheet AS1 ... One side AS2 ... Other side CE ... Adhering body adhesion area CP: adherend HE ... holding region

Claims (4)

A plurality of holding means for holding the end of the adhesive sheet to which a plurality of adherends or a plurality of adherends to be divided are affixed to at least one of the one surface and the other surface;
A separation unit that relatively moves the holding unit that holds the end portion of the adhesive sheet, applies tension to the adhesive sheet, and widens the interval between the adherends;
Detection means capable of recognizing the whole group of adherends whose mutual interval is widened as a lump,
A separation apparatus comprising: positioning means for positioning at least one of a position and an orientation of the whole group of adherends based on a detection result of the detection means. Holding means for holding an end of an adhesive sheet to which a plurality of adherends or a plurality of adherends to be divided are affixed to at least one of one surface and the other surface;
A contact means that is outside the adherend adhesion region to which the plurality of adherends are affixed in the adhesive sheet, and that abuts the adhesive sheet inside the holding region held by the holding means;
A separation unit that relatively moves the holding unit and the contact unit that hold the end of the adhesive sheet, and applies tension to the adhesive sheet to widen the interval between the adherends;
Detection means capable of recognizing the whole group of adherends whose mutual interval is widened as a lump,
A separation apparatus comprising: positioning means for positioning at least one of a position and an orientation of the whole group of adherends based on a detection result of the detection means. A holding step of holding an end portion of an adhesive sheet to which a plurality of adherends or a plurality of adherends to be divided are affixed to at least one of one surface and the other surface with a plurality of holding means;
A separation step of relatively moving the holding means holding the edge of the adhesive sheet, and applying tension to the adhesive sheet to widen the interval between the adherends,
A detection step of recognizing the entire adherend group with a mutual interval widened as a lump;
And a positioning step of positioning at least one of the position and orientation of the entire group of adherends based on the detection result of the detection step. A holding step of holding the end of the adhesive sheet on which at least one of the one surface and the other surface is affixed with a plurality of adherends or a plurality of adherends that are divided and held by a holding means;
Contact means for contacting the adhesive sheet inside the holding area held by the holding means and outside the adherend bonding area where the plurality of adherends are pasted in the adhesive sheet; and the bonding A separation step of relatively moving the holding means holding the end of the sheet, and applying tension to the adhesive sheet to widen the interval between the adherends,
A detection step of recognizing the entire adherend group with a mutual interval widened as a lump;
And a positioning step of positioning at least one of the position and orientation of the entire group of adherends based on the detection result of the detection step.

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