JP2018190885A - Separation device and separation method - Google Patents

Abstract

An object of the present invention is to provide a separation device and a separation method that can increase the distance between adherends attached to an adhesive sheet without breaking the adhesive sheet. Kind Code: A1 A plurality of holding members holding ends of an adhesive sheet having a plurality of adherends or a plurality of divided adherends adhered to at least one of one surface AS1 and the other surface AS2. Holding means 20 and separation means 30 for relatively moving the holding means 20 holding the end of the adhesive sheet AS to apply tension to the adhesive sheet AS to increase the mutual distance between the adherends CP; Are reciprocating movements by a first movement in which the holding means 20 is relatively moved in the extension direction for increasing the mutual interval between the adherends CP and a second movement in which the holding means 20 is relatively moved in the anti-expansion direction opposite to the expansion direction. , And the interval between the adherends CP is increased. [Selection diagram] Fig. 1

Description

  The present invention relates to a separation device and a separation method.

  2. Description of the Related Art Conventionally, a separation device that increases the interval between a plurality of adherends attached to an adhesive sheet is known (see, for example, Patent Document 1).

JP 2007-103649 A

  However, in the conventional spacing device as described in Patent Document 1, a force is applied to the first sheet 13 (adhesive sheet) only in the direction in which the mutual distance between the chips C (adhered bodies) increases. Part of the adhesive sheet (for example, a part of the adhesive sheet that is in contact with the boundary of the first ring frame 12 or a part of the adhesive sheet that is in contact with the corner of the expand table 3) in order to extend the mutual spacing of the attachments. Alternatively, when the stress applied to the entire surface is increased, the adhesive sheet breaks, and there is a disadvantage that it is impossible to widen the interval between the adherends.

  An object of the present invention is to provide a separation device and a separation method that can widen the interval between adherends attached to the adhesive sheet without breaking the adhesive sheet.

  The present invention employs the configurations described in the claims.

According to the present invention, by repeating the reciprocating movement, it is possible to widen the mutual interval of the adherends while relaxing the stress applied to part or all of the adhesive sheet, and without breaking the adhesive sheet, the adhesive sheet The mutual space | interval of the to-be-adhered body affixed on can be expanded.
Further, if a stress measuring means is provided, the stress applied to a part or all of the adhesive sheet can be prevented from exceeding the stress at which the adhesive sheet breaks, and the adhesive sheet can be securely bonded without breaking the adhesive sheet. The mutual space | interval of the to-be-adhered body stuck on the sheet | seat can be expanded.
Further, by performing relative movement in the expansion direction after the stress applied to the adhesive sheet by the separating means reaches a predetermined lower limit value, it is possible to widen the mutual interval between the adherends after the stress is reliably relaxed.
Moreover, if a detection means is provided, the mutual space | interval of a to-be-adhered body can be extended to a desired space | interval.

The top view of the separation apparatus which concerns on embodiment of this invention. (A)-(D) is operation | movement explanatory drawing of the separation apparatus which concerns on embodiment of this invention. (A), (B) is explanatory drawing of the other example of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in this embodiment, when viewed from the direction of the arrow BD parallel to the Y axis, and when the direction is indicated without giving a reference figure, “up” is the “down” direction of the Z axis. Is the opposite direction, “left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the arrow direction of the Y axis, and “rear” is the opposite direction.

  The separation device 10 of the present invention includes a plurality of holding means 20 that holds the end of the adhesive sheet AS having a plurality of adherends CP affixed to one surface AS1, and a holding means that holds the end of the adhesive sheet AS. 20 is moved relative to each other to apply tension to the adhesive sheet AS to widen the interval between the adherends CP, the mutual interval between the adherends CP, the overall aggregate shape of the adherends CP, and the like. Detecting means 40 such as a detectable camera or projector, various sensors such as an optical sensor or a sound wave sensor, and a stress measuring means 50 capable of measuring stress applied to the adhesive sheet AS are provided.

  The holding unit 20 includes a rotation motor 21 as a driving device supported by the separation unit 30 and an upper holding member 22 supported by the output shaft 21A.

  The separation means 30 includes a linear motor 31 as a driving device and a lower holding member 32 supported by the slider 31A and supporting the rotating motor 21 on the upper surface side.

  The stress measuring means 50 includes a stress measuring device 51 using an infrared camera, X-ray, laser, optical fiber or the like.

The operation of the above separating apparatus 10 will be described.
First, a user (hereinafter simply referred to as a “user”) of the separation device 10 has an operation panel or the like for the separation device 10 in which each member stands by at an initial position indicated by a solid line in FIGS. The upper limit value of the stress that does not break the adhesive sheet AS even if it is added to the adhesive sheet AS, and the lower limit value of the stress applied to the adhesive sheet AS released from the upper limit value through an operating means (not shown) such as a personal computer After inputting, input a signal to start automatic operation. Thereafter, when an operator or a conveying means (not shown) such as a driving device or a conveyor places the adhesive sheet AS to which a plurality of adherends CP are attached on the lower holding member 32, the holding means 20 causes each rotation motor 21 to move. Driven, and the end portion of the adhesive sheet AS is held by the upper holding member 22 and the lower holding member 32 as indicated by a two-dot chain line in FIG.

  Next, the separation means 30 drives each linear motor 31, and as shown in FIG. 2B, the holding means 20 is relatively moved, and tension is applied to the adhesive sheet AS to widen the mutual interval of the adherend CP. Perform relative movement in the expansion direction. At this time, the adhesive sheet AS extends while being stressed. However, if the stress exceeds a predetermined value, the adhesive sheet AS will break. Therefore, the separation means 30 in the present embodiment has the first movement for relatively moving the holding means 20 in the extending direction that increases the mutual interval of the adherend CP, and the holding means 20 in the anti-expanding direction that is opposite to the expanding direction. The reciprocating movement by the second movement for relative movement (hereinafter, this movement is also simply referred to as “reciprocating movement”) is repeated, and the mutual interval between the adherends CP is increased. That is, when the stress measuring means 50 detects that the stress applied to the adhesive sheet AS has reached the previously inputted upper limit value during the first movement, the separating means 30 performs the second operation as shown in FIG. Move. Then, when the stress measuring means 50 detects that the stress applied to the adhesive sheet AS has reached the previously inputted lower limit value during the second movement, the separating means 30 is first as shown in FIG. Move. Thereafter, the separating means 30 repeats the reciprocating movement, and confirms that the mutual interval between the adherends CP and the overall aggregate shape of the adherends CP become a predetermined interval or a predetermined overall aggregate shape. If the detection means 40 detects, the drive of each linear motor 31 will be stopped.

  In addition, when the mutual space | interval of the to-be-adhered body CP is expanded as mentioned above, each to-be-adhered body CP may not spread to the predetermined space | interval by the distortion | strain etc. of adhesive sheet AS. Therefore, based on the detection result of the detection means 40, the separation means 30 drives each linear motor 31, and each holding means 20 is individually moved so that the mutual interval between the adherends CP becomes a predetermined interval. . In this case also, the separating means 30 may repeat reciprocating movement.

  When all the adherend CP or a predetermined amount of the adherend CP are removed from the adhesive sheet AS by an adherend takeout means (not shown) such as a pickup device or a conveyance device, the separating means 30 causes each linear motor 31 to move. After driving and returning each slider 31A to the initial position, the holding means 20 drives the rotating motor 21 to return the upper holding member 22 to the initial position. Next, the operator or a conveying means (not shown) removes the adhesive sheet AS left on the lower holding member 32, and thereafter the same operation as described above is repeated.

  According to the spacing device 10 as described above, by repeating the reciprocating movement, it is possible to widen the mutual interval of the adherend CP while relaxing the stress applied to a part or all of the adhesive sheet AS. The mutual space | interval of the to-be-adhered body CP affixed on the said adhesive sheet AS can be expanded, without making it fracture | rupture.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the holding means is capable of holding the end of an adhesive sheet having a plurality of adherends attached to at least one of one side and the other side, it is in light of technical common sense at the beginning of the application, There is no limitation as long as it is within the technical scope (other means and steps are the same).

As shown in FIG. 3 (A), the separation device of the present invention is outside the adherend adhesion region CE to which the plurality of adherends CP on the holding means 20 and the adhesive sheet AS are affixed. The contact means 60 that contacts the adhesive sheet AS inside the held region HE held by the means 20 and the holding means 20 and the contact means 60 that hold the end of the adhesive sheet AS are moved relative to each other to adhere It is good also as the separation apparatus 10A provided with the separation means 30A which expands the mutual space | interval of CP, the detection means 40, and the stress measurement means 50. FIG.
In addition, in the separation device 10A, components having the same configuration and the same function as the separation device 10 are denoted by the same reference numerals as those of the separation device 10, and the description of the configuration is omitted, and the operation description is simplified.

The separation means 30A includes a linear motion motor 33 as a driving device supported on the base plate BP, and a lower holding member 34 supported by the output shaft 33A and supporting the rotation motor 21 on the upper surface side.
The contact means 60 includes a cylindrical contact member 61 supported on the base plate BP.

  In such a separation device 10 </ b> A, when the adhesive sheet AS to which a plurality of adherends CP are attached is placed on the lower holding member 34 in the same manner as the separation device 10, the holding means 20 causes the rotation motor 21 to move. As shown by the two-dot chain line in FIG. 3A, the upper holding member 22 and the lower holding member 34 hold the end of the adhesive sheet AS. In addition, as shown in FIG. 3, the ring-shaped frame RF is affixed to the edge part of adhesive sheet AS, However, The said frame RF does not need to be. Next, the separating means 30A drives the linear motor 33, and as shown in FIG. 3B, the holding means 20 is lowered to move the holding means 20 and the abutting means 60 relative to each other, and tension is applied to the adhesive sheet AS. To increase the mutual distance between adherends CP. Also at this time, the separating means 30A repeats reciprocating movement in the same manner as the separating device 10, and the mutual interval of the adherends CP, the overall aggregate shape of the adherends CP, and the like are set at a predetermined interval or a predetermined whole. When the detection means 40 detects that the shape is a typical collective shape, the driving of the linear motor 33 is stopped. Then, when the adherend CP is removed from the adhesive sheet AS by the adherend takeout means (not shown), each means drives each driving device to return each member to the initial position, and then the lower holding member 34. The adhesive sheet AS left above is removed, and thereafter the same operation as described above is repeated.

  The effect similar to the separation apparatus 10 can be acquired also by such a separation apparatus 10A.

The holding means 20 may be configured to hold the end of the adhesive sheet AS in which a plurality of adherends CP are attached to the other surface AS2, or both the one surface AS1 and the other surface AS2. A configuration in which the end of the adhesive sheet AS is held by gripping means such as a chuck or a chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, or a driving device may be used.
In the case of the separation device 10, the holding means 20 may be constituted by two bodies, for example, the holding means 20 that moves to the right as one body and the holding means 20 that moves to the left as one body. For example, you may comprise three or more bodies which move to the right, left, and other directions.
In the case of the separation device 10A, the holding means 20 may be one or two or more.

The separation means 30 and 30A may be a single number instead of a plurality. In this case, for example, the separation apparatus 10 supports two holding means 20 one by one by two sliders of one linear motor, and adherend CP The mutual interval of the adherend CP may be increased only in one axial direction (for example, the X-axis direction or the Y-axis direction).
The separating means 30 may be configured to increase the mutual interval in directions of three or more axes (for example, the X-axis direction, the Y-axis direction, and other axial directions), for example, a plurality of holding means 20 moved in the X-axis direction. Each of which is moved in the Y-axis direction (a plurality of holding means 20 moved in the Y-axis direction are each moved in the X-axis direction). Even in a configuration that cannot operate so that the mutual interval between the body CPs becomes a predetermined interval, or a configuration in which the overall collective shape of each adherend CP becomes a predetermined interval or a predetermined overall collective shape Good.
The separation means 30A moves the abutment means 60 while stopping or moving the retention means 20, thereby moving the retention means 20 and the abutment means 60 relative to each other and applying tension to the adhesive sheet AS. You may increase the mutual space | interval of CP.
The separation means 30, 30A, for example, sets the speed of the first movement and the speed of the second movement to the same speed, and adjusts the time of the first movement and the second movement (the separation device is operated via an operation means not shown by the user). 10 and 10A), and the time of the first movement and the time of the second movement are set to the same time, and the speed of the first movement and the speed of the second movement are adjusted (the operation means is not shown by the user via an operation means not shown). The distance between the first movement and the second movement may be repeated so that the distance of the first movement becomes larger than the distance of the second movement. The time and speed may be any value and can be arbitrarily determined by the user.
The separation means 30 and 30A may be driven by an operator operating buttons and levers to drive the linear motor 31 and the linear motion motor 33. In this case, for example, the detection result by the stress measurement means 50 is monitored or detected. When the detection result displayed on the display reaches the upper limit value, the operator operates the button or lever to perform the second movement. When the detection result displayed on the display unit reaches the lower limit value, the operator operates the button, lever, or the like to perform the first movement or displays the detection result by the detection unit 40 on the display unit. The operator may drive the linear motor 31 and the linear motion motor 33 so that the detection result displayed on the display device has a predetermined value.

  The detection means 40 may be visually observed by an operator. For example, in the case of the separation device 10, the operator visually observes the mutual distance between the adherends CP, or the entire adherend CP. The linear motor 31 may be driven by operating a button, a lever, or the like so that the general collective shape is similar to the overall collective shape of the base. The devices 10 and 10A may not be provided.

  The stress measuring means 50 may be a torque sensor built in or provided in the linear motor 31 or the linear motion motor 33, or a load cell or pressure sensor provided between the slider 31A of the linear motor 31 and the lower holding member 32, A load cell, a pressure sensor, or the like provided between the output shaft 33A of the linear motor 33 and the lower holding member 34 may be used as long as the stress applied to the adhesive sheet AS can be measured. 10, 10A may not be provided.

  The abutting means 60 may employ an abutting member 61 having other shapes such as a cylinder, a prism, an ellipse, etc., in addition to a rectangular tube shape, an elliptic cylinder shape, and the like.

The separation devices 10 and 10A may perform an adhesive strength reduction process in which the adhesive strength of the adhesive sheet AS is reduced before removing the adherend CP from the adhesive sheet AS. In this case, for example, as the adhesive sheet AS, Adopting the adhesive sheet AS with an adhesive layer whose adhesive strength is reduced by ultraviolet rays, X-rays, infrared rays or the like as predetermined energy on one surface of the base sheet is adopted. What is necessary is just to provide the energy provision means which provides predetermined energy, such as a line | wire and infrared rays.
The upper limit value and lower limit value of the stress applied to the adhesive sheet AS may be any value and can be arbitrarily determined by the user.

The material, type, shape and the like of the adhesive sheet AS and the adherend CP in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend CP may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, and other shapes. The adhesive sheet AS may be a pressure sensitive adhesive, a heat sensitive adhesive, or the like. It may be in an adhesive form. Furthermore, the adhesive sheet AS is, for example, a single layer having only an adhesive layer, having an intermediate layer between the base material and the adhesive layer, or having a cover layer on the upper surface of the base material. Further, it may be a so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer. Such a double-sided adhesive sheet has a single-layer or multi-layer intermediate layer, Further, it may be a single layer or multiple layers without an intermediate layer. Examples of the adherend CP include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, semiconductor chip, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wooden plates, It may be a single substance such as a resin, or may be a composite formed by two or more of them, and can be a target of a member or an article in any form. Note that the adhesive sheet AS can be read in a functional or application manner, and can be any information such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording layer forming resin sheet. Sheets, films, tapes, etc. may be used.
A plurality of adherends CP may exist in advance on the adhesive sheet AS, or may be divided into a plurality of parts when the external force is applied by the separating means 30, 30A, other mechanisms, or by hand, and the like on the adhesive sheet AS. It is also possible to divide into a plurality such that there are a plurality. As the adherend CP which is divided into a plurality of parts, for example, a semiconductor wafer, a substrate or the like is irradiated with a laser to form a fragile weak layer such as a line or lattice on the semiconductor wafer or the substrate. In addition, when the tension is applied to the adhesive sheet AS, or when an external force is applied directly or indirectly to the semiconductor wafer, the substrate, or the like, the adhesive sheet AS becomes a plurality of adherends CP, for example, Cut the resin or glass plate with a cutter blade, and form a cut or perforation line that does not penetrate the front or back of the resin or glass plate, etc. It is not limited at all, such as the one that becomes a plurality of adherends CP by applying tension to AS or applying external force directly or indirectly to resin or glass plate. .

  The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, a combination of them directly or indirectly can be adopted.

DESCRIPTION OF SYMBOLS 10, 10A ... Separating device 20 ... Holding means 30, 30A ... Separating means 40 ... Detection means 50 ... Stress measuring means 60 ... Abutting means AS ... Adhesive sheet AS1 ... One side AS2 ... Other side CE ... Adherence to adherend Area CP ... Adherent HE ... Holding area

Claims (7)

A plurality of holding means for holding the end of the adhesive sheet to which a plurality of adherends or a plurality of adherends to be divided are affixed to at least one of the one surface and the other surface;
A separation unit that relatively moves the holding unit that holds the end portion of the adhesive sheet, applies tension to the adhesive sheet, and widens the interval between the adherends;
The separation means includes a first movement for relatively moving the holding means in an extending direction that increases the interval between the adherends, and a second movement for relatively moving the holding means in an anti-expansion direction that is opposite to the expansion direction. A separation apparatus characterized by widening the mutual interval between the adherends while repeating reciprocating movement. Holding means for holding an end of an adhesive sheet to which a plurality of adherends or a plurality of adherends to be divided are affixed to at least one of one surface and the other surface;
Contact means that contacts the adhesive sheet outside the adherend adhesion area to which the plurality of adherends are attached in the adhesive sheet, and inside the held area held by the holding means;
A separation unit that relatively moves the holding unit that holds the end of the adhesive sheet and the contact unit, applies tension to the adhesive sheet, and widens the interval between the adherends;
The separating means includes a first movement for relatively moving the holding means and the abutting means in an extending direction that widens the interval between the adherends, and an anti-expanding direction that is opposite to the expanding direction. A separation apparatus characterized in that the mutual interval between the adherends is widened while repeating reciprocation by the second movement for relatively moving the contact means.   Stress measuring means capable of measuring stress applied to the adhesive sheet, and the spacing means that the stress applied to the adhesive sheet reaches a predetermined upper limit during relative movement in the expansion direction. 3. The separation device according to claim 1, wherein the separation device performs relative movement in an anti-expansion direction when detected.   Stress measuring means capable of measuring stress applied to the adhesive sheet, and the spacing means measures that the stress applied to the adhesive sheet has reached a predetermined lower limit during relative movement in the anti-expansion direction. 4. A separating apparatus according to claim 1, wherein when the means detects the relative movement, the relative movement in the expansion direction is performed.   The separation device according to any one of claims 1 to 4, further comprising detection means for detecting a mutual interval between the adherends. A holding step of holding an end portion of an adhesive sheet to which a plurality of adherends or a plurality of adherends to be divided are affixed to at least one of one surface and the other surface with a plurality of holding means;
A separation step of relatively moving the holding means holding the edge of the adhesive sheet, and applying tension to the adhesive sheet to widen the interval between the adherends,
In the separation step, a first movement for relatively moving the holding means in an expansion direction that widens the interval between the adherends, and a second movement for relatively moving the holding means in an anti-expansion direction opposite to the expansion direction. A separation method characterized by widening the interval between the adherends while repeating reciprocating movement. A holding step of holding the end of the adhesive sheet on which at least one of the one surface and the other surface is affixed with a plurality of adherends or a plurality of adherends that are divided and held by a holding means;
A contact means for contacting the adhesive sheet outside the adherend adhesion region to which the plurality of adherends in the adhesive sheet are affixed, and inside the held region held by the holding means; and A separation step of relatively moving the holding means holding the edge of the adhesive sheet, and applying tension to the adhesive sheet to widen the interval between the adherends,
The separating step includes a first movement for relatively moving the holding means and the abutting means in an extending direction that widens the interval between the adherends, and the holding means and the abutting direction in an anti-expanding direction opposite to the expanding direction. A separation method characterized by widening the interval between the adherends while repeating reciprocation by a second movement for relatively moving the contact means.

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