JP2018189521A - Laser radar device - Google Patents

Abstract

The present invention provides a laser radar device having a small size and low cost but having good performance. A laser radar device reflects a light source that outputs laser light, and a light reflecting surface that swings around a first rotation axis, and deflects the light within a certain first angle α. And a plurality of devices for scanning in a second angle range larger than the range of the first angle α by guiding the light from the deflection device 3 in different directions according to the deflection direction. The reflective surface pair 4 is provided. The first reflecting surface 7 constituting each reflecting surface pair 4 is arranged so as to surround the peristaltic reflecting surface 5 in the range of the first angle α with the first rotation axis 6 as the center, and each second reflecting surface 8 is Arranged along the first rotation axis 6. [Selection] Figure 1

Description

  The present invention relates to a laser radar device that scans while deflecting coherent light.

  In recent years, the interest in autonomous driving technology has increased due to the increased momentum to realize smart mobility. In order to realize automatic driving, it is necessary to instantly and accurately grasp the surrounding traffic environment. For this reason, development of a laser radar device capable of scanning around 360 ° has been activated.

  As such a laser radar device, for example, Patent Document 1 discloses a laser radar device capable of recognizing an object three-dimensionally around the device. In this apparatus, a light receiving sensor in which a plurality of light receiving elements are arranged two-dimensionally receives reflected light guided by a reflecting portion in a light receiving region.

  A convex mirror is arranged in the laser light projecting path from the laser diode to the external space so as to spread the laser light from the deflecting unit toward the external space. The laser beam is deflected by a deflection unit that is rotated by a motor and is irradiated to the external space. The incident position of the reflected light in the light receiving region is determined in accordance with the direction of incidence when the reflected light from the external space enters the deflecting unit.

  On the other hand, there is known an apparatus that scans a measurement object with a laser beam by deflecting the laser beam using a MEMS (Micro-Electro-Mechanical Systems) mirror (see, for example, Patent Document 3). As one of such devices, Patent Document 2 discloses a laser scanning device that covers a wide range using a plurality of light sources.

  This apparatus includes a laser light source, an optical scanning unit that scans laser light emitted from the laser light source, and light that detects reflected light that is returned by the laser light scanned by the optical scanning unit being reflected by the measurement object. A detector. Laser light emitted from the laser light source enters the optical scanning unit from a plurality of directions.

JP 2013-072770 A JP2015-025901A JP 2013-007779 A

  An object to be equipped with a laser radar device is a moving body such as a passenger car that improves mobility. For this reason, the laser radar device is required to have a simple structure, strong against vibration and vibration, small size, and low cost.

  However, according to the laser radar device of Patent Document 1, since the motor is used to rotate the deflecting unit, it is disadvantageous in terms of both weight and cost. Furthermore, since a curved mirror is used for the deflecting unit, if the curvature is not set accurately, the beam shape when the laser beam is irradiated may be distorted, and accurate scanning may not be possible.

  Further, according to the laser scanning device of Patent Document 2, since a plurality of expensive laser light sources are used, the device cost increases. Moreover, since it is necessary to make the back surface of a MEMS mirror into a mirror surface, there exists a possibility that a manufacturing process may increase and manufacturing cost may increase.

  An object of the present invention is to provide a laser radar device having good performance while being small and low in cost in view of the problems of the prior art.

The laser radar device according to the first invention is:
A light source that outputs coherent light;
A light reflecting surface that reflects light from the light source, and the light reflecting surface is swung around the first rotation axis to deflect light reflected by the light reflecting surface within a first angle range; A deflection device that outputs while
A plurality of reflecting surface pairs for scanning in a second angle range larger than the first angle range by guiding the light output from the deflecting device in different directions according to the deflection direction of the light; ,
Each reflecting surface pair includes a planar first reflecting surface that reflects light in the corresponding deflection direction from the deflecting device, and a planar second reflecting surface that reflects light reflected by the corresponding first reflecting surface. And having a surface,
Each first reflecting surface is disposed so as to surround the peristaltic reflecting surface in the first angle range centered on the first rotation axis.
Each of the second reflecting surfaces is arranged along the first rotation axis direction.

  According to the first invention, the light from one light source is output while being deflected by the deflecting device within the first angle range, and this light is guided in different directions by the plurality of reflecting surface pairs having the above-described configuration. Since the scanning is performed in the second angle range, a laser radar having good performance at a small size and at low cost without using the power of a motor or the like that increases the weight of the apparatus or a curved mirror that complicates the optical design. An apparatus can be provided.

A laser radar device according to a second invention is the first invention,
Each first reflecting surface is arranged in a direction to reflect light in a corresponding deflection direction from the deflecting device in a direction toward the first rotation axis, thereby forming a semi-cylindrical mirror group,
Each of the second reflecting surfaces constitutes a spiral columnar mirror group whose direction is changed in a spiral manner so that the second reflective surface is directed from the direction facing the semicylindrical mirror group to the opposite direction,
The direction of each first reflecting surface is such that the direction in which the light in the corresponding deflection direction from the deflecting device is reflected is located at the center of the first angle range or on both sides of the center. Are sequentially oriented along the first rotation axis direction from the peristaltic reflecting surface over those located at both ends of
The direction of each of the second reflecting surfaces changes from the minimum value to the maximum value in order from the corresponding one of the first reflecting surfaces in a plan view, from the closest to the farthest to the peristaltic reflecting surface. It is characterized by such a direction.

  According to the second invention, it is possible to easily obtain a configuration capable of scanning over the entire circumference of, for example, 360 °, which is larger than the first angle range in the light deflection direction by the deflecting device.

  In the laser radar device according to a third aspect of the present invention, in the first or second aspect, the inclination of each second reflecting surface with respect to the direction of the first rotation axis is such that the light from the corresponding first reflecting surface is the second reflecting surface. Is set so as to be reflected in a plane perpendicular to the first rotation axis direction.

  According to the third aspect, the traveling direction of the light output from the laser radar device can be aligned so as to be included in a plane perpendicular to the first rotation axis.

  According to a fourth aspect of the present invention, there is provided the laser radar apparatus according to the third aspect, wherein the path of light output from the second reflecting surfaces to the outside of the apparatus is included in the same plane perpendicular to the first rotation axis. A prism for adjusting the position in the first rotational axis direction is provided for each of the second reflecting surfaces.

  According to the fourth aspect, since the path of the light output from the laser radar device can be positioned on one plane perpendicular to the first rotation axis, scanning can be performed along the plane.

A laser radar device according to a fifth aspect of the invention is any one of the first to fourth aspects of the invention.
In addition to the first rotation axis, the deflecting device also swings the peristaltic reflection surface around the second rotation axis perpendicular to the normal of the first rotation axis and the peristaltic reflection surface. Which deflects light,
The first reflection surface and the second reflection surface have dimensions in the first rotation axis direction that can cope with peristalsis around the second rotation axis.

  According to the fifth aspect of the present invention, a three-dimensional laser radar can be realized by extending the observation region by the laser radar device in the first rotational axis direction.

  The laser radar device according to a sixth aspect of the present invention is the laser radar device according to any one of the first to fifth aspects, wherein the rotation angle of the peristaltic reflecting surface in the deflecting device is such that light does not strike between the adjacent first reflecting surfaces. A control unit that controls output of light from the light source is provided.

  According to the seventh aspect of the present invention, it is possible to prevent inconvenience in the irradiation of light by the laser radar device and the collection of information based on the light due to the light hitting between the adjacent first reflecting surfaces or the joint.

A laser radar device according to a seventh aspect of the invention is any one of the first to sixth aspects of the invention.
A beam splitter disposed between the light source and the peristaltic reflecting surface of the deflecting device;
And a light receiving device for observing a portion of the return light from the deflecting device divided by the beam splitter.

  According to the seventh aspect of the present invention, it is possible to divide the return light that has been emitted from the laser radar device and reflected by the external object and returned by the beam splitter and observed by the light receiving device.

It is a perspective view which shows the principal part of the laser radar apparatus which concerns on one Embodiment of this invention. It is a top view of the laser radar apparatus of FIG. It is a side view of the laser radar apparatus of FIG. It is a perspective view which shows a mode that the prism group was provided in the laser radar apparatus of FIG. It is a figure which shows a mode that the course of light is adjusted with one prism which comprises the prism group in FIG. It is a figure which shows a mode that the course of light is adjusted with the other one prism which comprises the prism group in FIG. It is a perspective view of the deflection | deviation apparatus used for the laser radar apparatus of FIG. It is a block diagram which shows the structure of the laser radar apparatus of FIG. It is a figure which shows the waveform of the light output from the light source of the laser radar apparatus of FIG. It is a perspective view which shows the modification of the laser radar apparatus of FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing the main part of the laser radar device of this embodiment. As shown in the figure, the laser radar device 1 includes a light source 2 that outputs coherent light, that is, laser light, a deflection device 3 that reflects light from the light source 2 while deflecting, and a deflection device 3. A plurality of reflecting surface pairs 4 for guiding light to be output in different directions corresponding to the deflection direction of the light.

  As the wavelength of the laser beam output from the light source 2, a wavelength in the range of 750 nanometers to 1.5 micrometers is selected according to the purpose of use.

  The deflecting device 3 has a peristaltic reflecting surface 5 on which light from the light source 2 is incident, and the peristaltic reflecting surface 5 is perturbed around a first rotation axis 6 perpendicular to the normal line within a certain rotation angle range. As a result, the light reflected by the peristaltic reflecting surface 5 is output while being deflected within the range of the constant first angle α (see FIG. 2). Hereinafter, description will be made using an XYZ coordinate system as shown in FIG. 1 in which the direction parallel to the normal direction of the peristaltic reflecting surface 5 in the neutral state is the positive direction of the Y axis.

  Each pair of reflecting surfaces 4 includes a planar first reflecting surface 7 that reflects light output from the deflecting device 3 and a planar second reflecting surface 8 that reflects light reflected by the first reflecting surface 7. Have.

  The first reflecting surface 7 is arranged so as to surround the peristaltic reflecting surface 5 around the peristaltic reflecting surface 5 within a range of a first angle α centered on the first rotation axis 6. The second reflecting surface 8 is disposed along the first rotation axis 6.

  More specifically, each first reflecting surface 7 is arranged so as to reflect the light in the corresponding deflection direction from the deflecting device 3 in a direction intersecting the first rotation axis 6 and having the first angle α. From the center of the range or one located on both sides of the center (first reflective surface 7a) to the one located at both ends of the range of the first angle α (first reflective surface 7b), the reflection direction of the light sequentially swings. They are arranged in a direction away from the reflecting surface 5 (inclination with respect to the first rotation axis 6). However, in FIG. 1, the example in case the 1st reflective surface 7a exists in the center of the range of the 1st angle (alpha) is shown.

  Therefore, typically, the light reflected by the first reflecting surface 7a located at the center of the range of the first angle α is incident on the second reflecting surface 8a closest to the peristaltic reflecting surface 5 and has the first angle α. The light reflected by the first reflecting surface 7 b located on both sides of the range is incident on the second reflecting surface 8 b farthest from the peristaltic reflecting surface 5.

  The direction of each second reflecting surface 8 corresponds to the change in the direction of the first reflecting surface 7 in plan view, and is the farthest (second reflecting surface 8a) from the one closest to the peristaltic reflecting surface 5 (second reflecting surface 8a). The direction in which the incident angle of light from the corresponding first reflecting surface 7 sequentially changes from the minimum value to the maximum value over the second reflecting surface 8b). Here, the plan view means a case when viewed from the positive direction of the Z axis.

  When the first reflection surface 7a located at the center of the range of the first angle α or both sides of the center is one first reflection surface 7a located at the center, corresponding to this, peristaltic reflection The second reflecting surface 8a closest to the surface 5 is constituted by a single plane. Two second reflecting surfaces 8 disposed above (the Z-axis positive direction is the upward direction) are provided corresponding to the first reflecting surfaces 7 on both sides of the first reflecting surface 7a.

  In addition, the inclination of each second reflecting surface 8 with respect to the first rotation axis 6 is such that light from the corresponding first reflecting surface 7 is reflected by the second reflecting surface 8 into a plane orthogonal to the first rotating axis 6. Is set as follows.

  FIG. 2 is a plan view of the laser radar device 1 of FIG. As shown in the figure, the first reflecting surface 7 and the second reflecting surface 8 are arranged in a target position and posture with respect to a plane parallel to the YZ plane and including the first rotation axis 6 (see FIG. 1). The The 1st reflective surface 7 is comprised as the semi-cylindrical mirror group 9 which formed each 1st reflective surface 7 inside the semi-cylindrical member. Moreover, the 2nd reflective surface 8 is comprised as the spiral columnar mirror group 10 which formed each 2nd reflective surface 8 in the columnar member.

  A beam splitter 11 is disposed between the light source 2 and the peristaltic reflecting surface 5 of the deflecting device 3. Further, a light receiving device 12 for observing a portion of the return light from the outside of the laser radar device 1 divided by the beam splitter 11 is provided.

  FIG. 3 is a side view of the laser radar device 1 of FIG. As shown in the figure, the light source 2, the beam splitter 11, and the light receiving device 12 are such that the light from the light source 2 is incident on the peristaltic reflecting surface 5 from the lower side of the semicylindrical mirror group 9 and the return light is observed. It is arranged below the semi-cylindrical mirror group 9 (in the negative direction of the Z axis) so that it can. The angle formed between the light from the light source 2 and the Y axis is about 5 to 15 ° when viewed in the YZ plane.

  In the more specific configuration example of the semi-cylindrical mirror group 9 and the spiral columnar mirror group 10 described above, the range of the rotation angle of the peristaltic reflecting surface 5 is ± 42 °, where the angle when in the neutral state is 0 °. If there is, the range of the first angle α is ± 84 ° which is twice that range. Therefore, the first reflecting surfaces 7b on both sides are arranged at ± 84 ° positions.

  In this case, 29 first reflective surfaces 7 can be provided in increments of 6 °. Correspondingly, each second reflecting surface 8 is the farthest second reflecting surface when the angle (orientation) of the second reflecting surface 8a closest to the peristaltic reflecting surface 5 is 0 ° when considered on the XY plane. It is provided so that the direction changes sequentially to ± 135 ° in increments of 9 ° over 8b. However, these numerical values are not limited to these.

  In this case, as shown in FIGS. 2 and 3, when the peristaltic reflecting surface 5 is in a neutral state and the rotation angle is 0 °, the direction is substantially 0 ° from the second reflecting surface 8a closest to the peristaltic reflecting surface 5. When light is reflected in the direction parallel to the Y-axis and the rotation angle of the peristaltic reflecting surface 5 is ± 42 °, the light is reflected in a direction of approximately 180 ° from the second reflecting surfaces 8b on the farthest sides. . Therefore, light is emitted in all directions of approximately 360 ° through the first reflecting surface 7 and the second reflecting surface 8 while the peristaltic reflecting surface 5 is once swung from one to the other.

  FIG. 4 shows a state in which the prism group 14 is provided in the laser radar device 1. As shown in the figure, around the spiral columnar mirror group 10, a path 13 of light output from each second reflecting surface 8 to the outside of the apparatus is perpendicular to the first rotation axis 6 (perpendicular to the Z axis). A prism group 14 that adjusts the position of each path 13 in the first rotation axis 6 direction (Z-axis direction) for each second reflecting surface 8 is provided so as to be included in the same plane S.

  As shown in FIGS. 5 and 6, each prism 15 constituting the prism group 14 is in accordance with a necessary adjustment amount dz in the direction of the first rotation axis 6 of the light path 13 from the corresponding second reflecting surface 8. Its shape, dimensions, arrangement and orientation are selected. The adjustment amount dz of the course 13 is different for each second reflecting surface 8 corresponding to the course 13.

  However, since the spiral columnar mirror group 10 and the semi-cylindrical mirror group 9 have symmetry as described above, the prism group 14 also has symmetry. That is, the prisms 15 having a shape that is parallel to the YZ plane and that is symmetric with respect to the plane that includes the first rotation axis 6 are arranged at symmetrical positions.

  FIG. 7 is a perspective view of the deflecting device 3. As shown in the figure, the deflection device 3 includes a mirror part 16 having a peristaltic reflecting surface 5, a first support part 17 that supports the mirror part 16, one end at the mirror part 16, and the other end at the first support part. 17 includes first piezoelectric actuators 18 a and 18 b respectively connected to the first piezoelectric actuator 18. The mirror portion 16 can be rotated around the first rotation axis 6 with respect to the first support portion 17 by piezoelectrically driving the first piezoelectric actuators 18a and 18b.

  The deflection device 3 includes a second support part 19 that supports the first support part 17, a second piezoelectric actuator 21 that has one end connected to the first support part 17 and the other end connected to the second support part 19, respectively. Is provided. By piezoelectrically driving the second piezoelectric actuator 21, the first support portion 17 can be swung around the second rotation axis 20 that intersects the first rotation axis 6 with respect to the second support portion 19.

  The deflecting device 3 is the same as that described in Patent Document 3 described above. However, the deflecting device 3 is not limited to this, and the peristaltic reflecting surface 5 is rotated around the first rotation axis 6. Other MEMS mirrors may be used as long as they have a function.

  FIG. 8 is a block diagram showing each part of the laser radar device 1. As shown in the figure, the laser radar device 1 includes a light source drive circuit 22 that drives the light source 2, a deflection device drive circuit 23 that drives the deflection device 3, and a detection circuit 24 that captures light reception data from the light reception device 12 as a detection value. And a control unit 25 for controlling them. The reflective optical system 26 is an optical system formed by the semicylindrical mirror group 9, the spiral columnar mirror group 10, and the prism group 14 described above.

  The control unit 25 controls the light source driving circuit 22 and the deflecting device driving circuit 23 in synchronism, thereby driving the light source 2 and the deflecting device 3 in synchronism, and the pulsed light as shown in FIG. Irradiate the mirror group 9. In FIG. 9, a portion indicated by a broken line is a portion corresponding to a joint portion of each first reflecting surface 7 in terms of time or position, and light is not output from the light source 2 in this portion. Thereby, it is avoided that the light from the light source 2 hits the joint portion of each first reflecting surface 7 in the semicylindrical mirror group 9.

  Note that the width of each pulse in FIG. 9 is inversely proportional to the speed at which the light from the peristaltic reflecting surface 5 scans the semicylindrical mirror group 9. When the rotation angle of the peristaltic reflecting surface 5 in the neutral state where the peristaltic reflecting surface 5 faces the positive direction of the Y axis is set to 0 °, the scanning speed decreases as the rotational angle of the peristaltic reflecting surface 5 increases. Accordingly, it is necessary to control the pulse width to be longer.

  In addition, the control unit 25 performs detection processing on the detection target object 27 by the detection circuit 24 in synchronization with the deflection device 3 for the return light from the detection target object 27. At this time, by detecting a difference between detection data by the detection circuit 24 when the light source 2 is turned on and off, it is possible to perform detection by filtering ambient light that causes noise.

  The control unit 25 associates (maps) the information on the detection object 27 detected in this way with the angle information indicating the rotation angle of the peristaltic reflection surface 5 in the deflecting device 3, and in which angle direction the detection object Whether the object 27 exists can be grasped.

  As described above, according to the present embodiment, the light from one light source 2 is output while being deflected within the range of the first angle α by the deflecting device 3, and the plurality of reflecting surfaces having the above-described configuration. By directing in the different directions in the pair 4, it is possible to scan in a larger second angle range by the light output from the deflecting device 3 while being deflected within the limited range of the first angle α.

  Therefore, since no power such as a motor that increases the weight of the apparatus or a curved mirror that complicates the optical design is used, the laser radar apparatus 1 having good performance while being small and low cost can be provided. it can.

  Further, by employing the semi-cylindrical mirror group 9 and the spiral columnar mirror group 10 described above, it is possible to scan over the entire circumference of 360 °, which is larger than the range of the first angle α in the light deflection direction by the deflecting device 3. it can.

  Further, the inclination of each second reflecting surface 8 with respect to the direction of the first rotation axis 6 is such that the light from the corresponding first reflecting surface 7 is reflected by the second reflecting surface 8 into a plane orthogonal to the direction of the first rotation axis 6. Thus, the traveling direction of the light output from the laser radar device 1 can be aligned so as to be included in a plane perpendicular to the first rotation axis 6.

  Further, the position of the path 13 in the direction of the first rotation axis 6 is set so that the path 13 of the light output from the second reflecting surface 8 to the outside of the apparatus is included in the same plane S perpendicular to the first rotation axis 6. Since the prism 15 to be adjusted is provided for each second reflecting surface 8, scanning along the plane S can be performed.

  Further, since the rotation angle of the peristaltic reflecting surface 5 in the deflecting device 3 and the light output from the light source 2 are controlled so that light does not strike between the adjacent first reflecting surfaces 7, the laser radar device 1. It is possible to prevent the occurrence of inconvenience in the irradiation of light by and the collection of information based thereon.

   FIG. 10 shows a main part of a laser radar device 30 according to a modification of the above-described embodiment. As shown in the figure, in this embodiment, in addition to the first rotation axis 6, the deflecting device 3 has a second rotation axis perpendicular to the first rotation axis 6 and the normal line of the peristaltic reflecting surface 5 in the neutral state. The light from the light source 2 is deflected by swinging the peristaltic reflecting surface 5 even around 20.

  In this case, the first reflecting surface 37 constituting the semi-cylindrical mirror group 39 and the second reflecting surface 38 constituting the spiral columnar mirror group 40 can be adapted to peristalsis around the second rotation axis 20. 1 has a longer dimension in the direction along the first rotational axis 6 than in the embodiment of FIG. That is, the first reflecting surface 37 and the second reflecting surface 38 can also reflect the light from the peristaltic reflecting surface 5 deflected by the peristaltic motion of the peristaltic reflecting surface 5 around the second rotation axis 20 without any trouble. .

  In this case, the control unit 25 causes the detection circuit 24 to detect the return light from the detection object 27 by the detection circuit 24 in synchronization with the peristalsis around the first rotation axis 6 and the second rotation axis 20 in the deflection device 3. 27 is detected. The control unit 25 converts the information on the detection object 27 detected in this way into angle information indicating each rotation angle around the first rotation axis 6 and the second rotation axis 20 of the peristaltic reflection surface 5 in the deflection device 3. Correspondingly, it can be grasped in which angle direction the detection object 27 exists.

  Thereby, the observation area by the laser radar device 1 can be expanded in the direction of the first rotation axis 6 to realize a three-dimensional laser radar.

  Although the embodiment of the present invention has been described above, the present invention is not limited to this. For example, the number of the first reflecting surfaces 7, the number of the second reflecting surfaces 8, the value of the first angle α, and the like are not limited to the above example.

  DESCRIPTION OF SYMBOLS 1,30 ... Laser radar apparatus, 2 ... Light source, 3 ... Deflection apparatus, 4 ... Reflection surface pair, 5 ... Peristaltic reflection surface, 6 ... 1st rotation axis, 7, 37 ... 1st reflection surface, 8, 38 ... 1st 2 reflective surfaces, 9, 39 ... semi-cylindrical mirror group, 10, 40 ... spiral columnar mirror group, 11 ... beam splitter, 12 ... light receiving device, 13 ... path, 14 ... prism group, 15 ... prism, 16 ... mirror part , 17 ... 1st support part, 18a, 18b ... 1st piezoelectric actuator, 19 ... 2nd support part, 20 ... 2nd axis of rotation, 21 ... 2nd piezoelectric actuator, 22 ... Light source drive circuit, 23 ... Deflection device drive circuit , 24 ... detection circuit, 25 ... control unit, 26 ... reflection optical system, 27 ... detection object.

Claims (7)

A light source that outputs coherent light;
A light reflecting surface that reflects light from the light source, and the light reflecting surface is swung around the first rotation axis to deflect light reflected by the light reflecting surface within a first angle range; A deflection device that outputs while
A plurality of reflecting surface pairs for scanning in a second angle range larger than the first angle range by guiding the light output from the deflecting device in different directions according to the deflection direction of the light; ,
Each reflecting surface pair includes a planar first reflecting surface that reflects light in the corresponding deflection direction from the deflecting device, and a planar second reflecting surface that reflects light reflected by the corresponding first reflecting surface. And having a surface,
Each first reflecting surface is disposed so as to surround the peristaltic reflecting surface in the first angle range centered on the first rotation axis.
Each of the second reflecting surfaces is arranged along the first rotation axis direction. Each first reflecting surface is arranged in a direction to reflect light in a corresponding deflection direction from the deflecting device in a direction toward the first rotation axis, thereby forming a semi-cylindrical mirror group,
Each of the second reflecting surfaces constitutes a spiral columnar mirror group whose direction is changed in a spiral manner so that the second reflective surface is directed from the direction facing the semicylindrical mirror group to the opposite direction,
The direction of each first reflecting surface is such that the direction in which the light in the corresponding deflection direction from the deflecting device is reflected is located at the center of the first angle range or on both sides of the center. Are sequentially oriented along the first rotation axis direction from the peristaltic reflecting surface over those located at both ends of
The direction of each of the second reflecting surfaces changes from the minimum value to the maximum value in order from the corresponding one of the first reflecting surfaces in a plan view, from the closest to the farthest to the peristaltic reflecting surface. The laser radar device according to claim 1, wherein the laser radar device is in such a direction.   The inclination of each second reflection surface with respect to the first rotation axis direction is such that light from the corresponding first reflection surface is reflected by the second reflection surface into a plane orthogonal to the first rotation axis direction. The laser radar device according to claim 1, wherein the laser radar device is set.   A prism that adjusts the position of the path in the first rotational axis direction so that the path of light output from the second reflecting surface to the outside of the apparatus is included in the same plane perpendicular to the first rotational axis; The laser radar device according to claim 3, wherein the laser radar device is provided for each second reflecting surface. In addition to the first rotation axis, the deflecting device also swings the peristaltic reflection surface around the second rotation axis perpendicular to the normal of the first rotation axis and the peristaltic reflection surface. Which deflects light,
The said 1st reflective surface and the said 2nd reflective surface have a dimension of the said 1st rotation axis direction which can respond also to the rocking | fluctuation around the said 2nd rotation axis line, The any one of Claims 1-4 characterized by the above-mentioned. The laser radar device according to item.   2. A control unit that controls a rotation angle of a peristaltic reflecting surface in the deflecting device and an output of light from the light source so that light does not strike between adjacent first reflecting surfaces. The laser radar device according to any one of? A beam splitter disposed between the light source and the peristaltic reflecting surface of the deflecting device;
The laser radar device according to claim 1, further comprising: a light receiving device for observing a portion of the return light from the deflecting device divided by the beam splitter.