JP2018186059A - Water-cooled low-pressure mercury lamp irradiation device - Google Patents

Abstract

An object of the present invention is to provide a novel water-cooled low-pressure mercury lamp irradiation device that shortens the lighting standby time as compared with a conventional lamp. The water-cooled low-pressure mercury lamp irradiation device is a water-cooled low-pressure mercury lamp illuminating device having a lamp base to which a low-pressure mercury lamp is attached, and a water-cooling block connected to the lamp base by a heat transfer member. A fan that generates an air flow that passes around the low-pressure mercury lamp, and directs the air around the lamp that has become hot at the start of lighting to the lamp base and / or the water-cooled block. Are sending out. [Selection] Figure 2A

Description

  The present invention relates to a water-cooled low-pressure mercury lamp irradiation apparatus.

  The low-pressure mercury lamp is a lamp that uses arc discharge in which mercury vapor during lighting is 100 Pa or less. A water-cooled low-pressure mercury lamp irradiation apparatus using this lamp is mainly used for surface cleaning / modification of a substrate.

Japanese Patent Laid-Open No. 3-62446 “Discharge Tube Cooling Device” (Publication Date: March 18, 1991) Applicant: Toshiba Lighting & Technology Corporation JP 2011-71020 "Low-pressure mercury lamp apparatus and its coldest part temperature control method" (release date 2011.04.07) Applicant: Iwasaki Electric Co., Ltd.

  The luminous efficiency of the low-pressure mercury lamp is determined by the coldest part temperature of the lamp located near the water cooling block. While the lamp is lit, the lamp can be turned on with high illuminance by cooling the water cooling block and maintaining the coldest temperature of the lamp at a predetermined temperature (35 to 45 ° C.). On the other hand, when starting the lamp operation, light irradiation starts immediately because the lamp illuminance is not stable for 10 minutes from when the lamp coldest part temperature rises from room temperature to a predetermined temperature and the luminous efficiency stabilizes. Thus, various processing operations cannot be performed, and a standby state is entered. That is, during this time, the low-pressure mercury lamp results in wasted time and power consumption.

  Therefore, an object of the present invention is to provide a novel water-cooled low-pressure mercury lamp irradiating device that shortens the lighting standby time as compared with a conventional lamp.

  In view of the above object, a water-cooled low-pressure mercury lamp irradiating apparatus according to the present invention includes a lamp base to which a low-pressure mercury lamp is attached, and a water-cooled low-pressure mercury lamp having a water-cooling block connected to the lamp base so that heat can be transferred. A lighting device comprising a fan that generates an air flow that passes around the low-pressure mercury lamp, and the air around the lamp that has become hot at the start of lighting is supplied to the lamp base and the water-cooled block or It sends out to either of them.

  Furthermore, the water-cooled low-pressure mercury lamp illuminating device further includes a heat sink connected to the lamp base or the water-cooling block so as to be able to transfer heat, and the air around the lamp that has become hot at the start of lighting is supplied to the lamp base. The water cooling block and / or the heat sink may be sent out.

  Furthermore, a water-cooled low-pressure mercury lamp illuminating device according to the present invention houses a lamp base to which a low-pressure mercury lamp is attached, a water-cooling block connected to the lamp base so that heat can be transferred, and the lamp base and the water-cooling block. A water-cooled low-pressure mercury lamp illuminating device having a processing chamber, the exhaust means for forcibly exhausting installed in the processing chamber, and the reflux for returning a part of the exhaust flow from the exhaust means to the processing chamber And the air around the lamp, which has become high at the start of lighting, is sent out to the lamp base and / or the water cooling block by the reflux means.

  Further, the water-cooled low-pressure mercury lamp illuminating device further includes a heat sink connected to the lamp base or the water-cooling block so as to be able to transfer heat, and the reflux means has a high temperature around the lamp at the start of lighting. May be delivered toward the lamp base, the water cooling block and / or the heat sink.

  Furthermore, in the lighting method of the water-cooled low-pressure mercury lamp illuminating device according to the present invention, the water-cooled low-pressure mercury lamp illuminating device is connected to a lamp base to which a low-pressure mercury lamp is attached and to the lamp base so as to be able to transfer heat. A water-cooling block, a fan that generates an air flow passing around the low-pressure mercury lamp, a processing chamber that houses the lamp base, the water-cooling block, and the fan, and a forced exhaust that is installed in the processing chamber A water-cooled low-pressure mercury lamp illuminator having an exhaust means. In the initial state, the lamp is turned off, the fan is turned off, the water cooling block is turned off, the exhaust means is turned off, and the lamp is turned on, the fan is turned on, and the exhaust means is turned on When the lamp base reaches a predetermined temperature, the lamp base is turned on. In the lighting stage, the fan base is turned off and the water cooling block is turned on. To start the water supply.

  Furthermore, in the lighting method of the water-cooled low-pressure mercury lamp illuminating device according to the present invention, the water-cooled low-pressure mercury lamp illuminating device is connected to a lamp base to which a low-pressure mercury lamp is attached and to the lamp base so as to be able to transfer heat. A water cooling block, a processing chamber for housing the lamp base and the water cooling block, an exhaust means for forcibly evacuating installed in the processing chamber, and a part of the exhaust flow from the exhaust means is returned to the processing chamber. A water-cooled low-pressure mercury lamp illuminating device having a recirculation means for performing the operation. In the initial state, the lamp is turned off, the circulation means is shut off, the water cooling block is turned off, the exhaust means is turned off. The reflux means is opened, and when the lamp base reaches a predetermined temperature, it proceeds to the lighting stage. To start the water supply of the click.

  ADVANTAGE OF THE INVENTION According to this invention, compared with the conventional lamp, the novel water-cooling type low pressure mercury lamp irradiation apparatus which shortened lighting waiting time can be provided.

FIG. 1A is a diagram for explaining a block for one lamp constituting a conventional water-cooled low-pressure mercury lamp irradiation apparatus. FIG. 1B is a diagram for explaining the relationship between a conventional water-cooled low-pressure mercury lamp irradiation device (consisting of three lamp blocks), an object to be irradiated (workpiece), and a conveyor that conveys the object. FIG. 1C is also a diagram for explaining the relationship between a conventional water-cooled low-pressure mercury lamp irradiation device (consisting of three lamp blocks), an object to be irradiated (workpiece), and a conveyor that conveys the object. FIG. 2A is a diagram for explaining the characteristic points of the water-cooled low-pressure mercury lamp irradiation device according to the first embodiment. FIG. 2B is a diagram illustrating a feature point of a modification of the water-cooled low-pressure mercury lamp irradiation device 10a according to the first embodiment. FIG. 3 is a diagram for explaining the characteristic points of the water-cooled low-pressure mercury lamp irradiation apparatus according to the second embodiment. FIG. 4 is a diagram for explaining the characteristic points of the water-cooled low-pressure mercury lamp irradiation device according to the third embodiment. FIG. 5 is a flowchart for explaining a lighting method of the water-cooled low-pressure mercury lamp irradiation apparatus according to the first to third embodiments. FIG. 6 is an air flow and lamp-based temperature profile at normal SP = 20 [mm] during the experiment of Table 1. FIG. 7 is an air flow and lamp base temperature profile in a comparison of the width and width of the lamp-conveyor spacing SP performed in the first embodiment during the experiment of Table 1.

  Hereinafter, embodiments of a water-cooled low-pressure mercury lamp irradiation apparatus according to the present invention will be described in detail with reference to the accompanying drawings. In the figure, the same reference numerals are assigned to the same elements, and duplicate descriptions are omitted.

[Water-cooled low-pressure mercury lamp irradiation device]
FIG. 1A is a diagram for explaining a block 10a for one lamp constituting a conventional water-cooled low-pressure mercury lamp irradiation apparatus (not shown). 1B and 1C are diagrams for explaining the relationship between a conventional water-cooled low-pressure mercury lamp irradiation device (consisting of three lamp blocks) 100, an object to be irradiated (workpiece) 16, and a conveyor 14 that conveys the object. It is. Here, in order to make it easy to understand the relationship between each component, in the figure, the axis direction of the lamp (in the case of a U-shaped lamp, the lamp leg) is the X direction, and the lamp juxtaposition direction when a plurality of lamps are juxtaposed is shown. The direction perpendicular to the Y direction and the XY plane is taken as the Z direction. The same applies to the other figures.

  As shown in FIG. 1A, a U-shaped low-pressure mercury lamp 2 is attached to a lamp base 4 that supports the lamp. The low-pressure mercury lamp 2 is not limited to a U shape. It may be I-shaped, M-shaped, or the like. The lamp base 2 is connected to a water-cooled block (also referred to as “water-cooled board”) 8 so as to be capable of good heat transfer by using appropriate connection means such as a mounting screw 6. Here, “connected so that heat transfer is possible” means that the lamp base 2 and the water cooling block 8 have a low heat resistance and a good heat transfer relationship. For example, it includes a case where the connection is made by close contact or pressure bonding without any intervening, a case where the connection is made through an extremely short distance, a case where a good heat transfer member is disposed and connected. A water circulation path (not shown) is formed inside the water cooling block 8, and the cooling water supplied from the water supply port 8 a is discharged from the drain port 8 b along this circulation path, and passes through the water cooling block. It is cooling.

  The coldest part of the lamp 2 has the coldest part. The coldest part of the lamp that is lit is always cooled by the water cooling block 8 via the lamp base 4, and the coldest part temperature of the lamp is predetermined in order to exhibit high luminous efficiency. Temperature (about 43 ° C).

  1B is a cross-sectional view taken along the axis of the lamp (in the case of a U-shaped lamp, the lamp leg), and FIG. 1C is a cross-sectional view taken along the plane perpendicular to the lamp axis. The lamp illumination device 10 is configured by a three-lamp block in which three blocks 100a for one lamp shown in FIG. 1A are incorporated. The water cooling block 8 may be one in which individual blocks are connected in parallel, or may be integrated for three lamps as shown in the figure.

  The lamp base 4 is connected to the water cooling block 8, and the lamp 2 is attached to the lamp base 4. The upper side of the lamp 2 is covered with a mirror (reflecting plate) 12. The mirror 12 generally has a flat shape or a shape that surrounds the periphery of the lamp in a semicircular shape, and its end is bent depending on the light distribution. The main body of the lamp base 8 is made of a metal having good thermal conductivity. The lamp illumination device 10 includes the water cooling block 8, the lamp base 4, the lamp 2, and the mirror 12 as main components.

  A conveyor 14 is disposed so as to convey an object (work) 16 to be irradiated below the lamp illumination device 10. When viewed from the lamp 2, the conveyor 14 is disposed so as to enter the effective light emitting area.

  The lamp illumination device 10, the workpiece 16, and the conveyor 14 are accommodated in a processing device chamber 18 that is substantially sealed.

Since ozone generated by the irradiation process is heavier than air, a chamber exhaust pipe 18 c is attached to the center of the bottom surface of the chamber 18. An ozone decomposition catalyst 21 and a blower 22 are attached in series in the middle of the chamber exhaust pipe 18c. The blower 22 keeps the inside of the chamber at a negative pressure by always performing an exhaust action while the lamp is lit. Ozone generated during the UV-O ₃ cleaning process by irradiation is processed by the ozone decomposition catalyst 21 and exhausted from the exhaust pipe 18 c by the blower 22. For this reason, ozone does not leak from the chamber 18 to the outside.

  As shown in FIG. 1C, the workpiece 16 is carried into the chamber from the carry-in port 18 a of the chamber 18, and is directly irradiated from the lamp 2 and reflected from the mirror 12 while being conveyed below the lamp illumination device 10 by the conveyor 14. In response, it is carried out of the chamber through the carry-out port 18b.

  The above is the conventional water-cooled low-pressure mercury lamp irradiation apparatus 100 and its usage. Hereinafter, the water-cooled low-pressure mercury lamp irradiating devices 10, 20, and 30 according to the first to third embodiments will be described with a focus on differences from the conventional device 100, and description of the same points will be omitted.

[First Embodiment]
FIG. 2A and FIG. 2B are views for explaining the characteristic points of the water-cooled low-pressure mercury lamp irradiation device 10 according to the first embodiment. The water-cooled low-pressure mercury lamp irradiation device 10 is different from the conventional water-cooled low-pressure mercury lamp irradiation device 100 shown in FIG. 1B in that an axial fan 26 is installed in the chamber 18 in the distal direction of the lamp 2. . In addition, the axial fan 26 is not limited to this, The other means which has a ventilation function may be sufficient.

  Before the lamp 2 is turned on, the water cooling block 2 is not supplied with water and is at room temperature (for example, 27 ° C.). Therefore, the coldest part temperature of the lamp is also room temperature. When the lamp 2 is turned on, the lamp itself rapidly rises (in about 1 to 2 minutes) to reach 100 to 200 ° C. In order to use the heat generated by the lamp during the lighting start period (for example, several ten minutes), an air flow is generated along the periphery of the lamp 2 by the axial fan 26, and the warmed air flow 17h is converted into the water cooling block 8 Then, spray the lamp base 4 to warm it. The axial fan 26 only needs to be able to generate an air flow (for example, a wind speed of 1 to 5 m / min.) Of a slight wind. If the wind speed is too high, the negative pressure in the chamber is broken, and the outside air is sucked in, so that the temperature of the air flow is expected to decrease. Compared to a conventional lamp, the time required for the lamp coldest part temperature to reach a predetermined temperature (about 43 ° C.) is shortened by heating the air-flow / water-cooling block 8.

  When the lighting start period elapses, the air flow of the axial fan 26 is stopped, the water cooling block 2 is started to supply water and cooled, and the lamp coldest part temperature is maintained at a predetermined temperature (about 43 ° C.). Enable lighting with high illuminance.

  FIG. 2B is a diagram for explaining a feature point of the modification 10a of the water-cooled low-pressure mercury lamp irradiation device according to the first embodiment. Here, the axial fan 26 is installed not at the front end of the lamp 2 but at the lower portion of the chamber 18, for example. By blowing air toward the lamp 2 from below, the periphery of the lamp 2 is surrounded by the mirror 12, so that the air flow 17h along the periphery of the lamp 2 can be generated in the same manner, and the same effect can be obtained. can get.

  The effects of the water-cooled low-pressure mercury lamp irradiation device 20 according to the first embodiment will be described later together with the illumination devices of the second and third embodiments.

[Second Embodiment]
FIG. 3 is a diagram for explaining the characteristic points of the water-cooled low-pressure mercury lamp irradiation device 20 according to the second embodiment. Compared with the water-cooled low-pressure mercury lamp irradiation apparatus 10 and 10a according to the first embodiment shown in FIGS. 2A and 2B, the water-cooled low-pressure mercury lamp irradiation apparatus 20 has a heat sink 32 attached to the lamp base 4. It is different in point. The heat sink 32 is not intended for a normal heat dissipation action, but is used here for the purpose of absorbing heat from a warmed air flow, and contributes to the temperature rise of the lamp base 4. In order to improve the heat absorption performance, a heat sink with fins is preferable.

  In order to utilize the heat generated by the lamp 2 during the lighting period, an air flow is generated along the periphery of the lamp 2 by the axial fan 26, and the warmed air flow 17 h is directed toward the water cooling block 8 and the lamp base 4. Blowing. The heat sink 32 efficiently absorbs heat from the warmed air flow 17h, warms the connected water cooling block 8 and the lamp base 4, and further increases the time for the lamp coldest temperature to reach a predetermined temperature (about 43 ° C.). It is shortened.

  The effects of the water-cooled low-pressure mercury lamp irradiation device 20 according to the second embodiment will be described later together with the illumination devices of the first and third embodiments.

[Third Embodiment]
FIG. 4 is a diagram for explaining the characteristic points of the water-cooled low-pressure mercury lamp irradiation device 30 according to the third embodiment. Compared to the water-cooled low-pressure mercury lamp irradiation device 20 according to the second embodiment, the water-cooled low-pressure mercury lamp irradiation device 30 removes the axial fan 26 and exhausts air from the blower 22 installed in the middle of the exhaust pipe 18c. A difference is that a part of the flow is divided and blown into the chamber through the reflux pipe 18d. The reflux pipe 18d is provided with a branch valve 18e for opening and closing the pipe.

  The recirculated air flow has the same effect as the air flow generated by the axial fan 26, is warmed by the heat generated by the lamp 2, and blows the warmed air flow 17 h toward the water cooling block 8 and the lamp base 4. .

  The effect of the water-cooled low-pressure mercury lamp irradiation device 30 according to the third embodiment is different from the first and second embodiments in that the axial flow fan 26 can be omitted, but other effects, that is, a warmed air flow, 17 h is sprayed on the water-cooling block 8 and the lamp base 4 and heated to shorten the time for the lamp coldest part temperature to reach a predetermined temperature.

[Lamp lighting method of each embodiment]
FIG. 5 is a flowchart for explaining a lighting method of the water-cooled low-pressure mercury lamp irradiation devices 10, 20, and 30 according to the first to third embodiments.

Step S1 is an initial state before the lamp is turned on. Here, the lamp is OFF, the axial fan is OFF, the water supply of the water cooling block is shut off, and the blower is OFF.
Step S2 is a lamp lighting start stage. Here, the lamp is turned on, the axial fan 26 is turned on and air blowing is started (in the third embodiment, the branch valve 18e is opened), and the blower is turned on.
In step S3, it is determined whether or not the temperature of the lamp base 4 has reached a predetermined temperature (for example, around 43 ° C.). If the predetermined temperature has been reached, the process proceeds to step S4. If not, the lamp lighting start stage in step S2 is maintained. Note that the determination criterion in the step is not limited to the temperature of the lamp base 4. For example, as shown in Table 1 and FIG. 6, with respect to a specific lamp lighting device, the time for the temperature of the lamp base 4 to reach a predetermined temperature is obtained in advance by experiment, and when the time has elapsed since the lamp lighting, step S4 The time may be used as a reference.
Step S4 is a lamp lighting stage. Here, the axial fan is OFF (the branch valve 18e is closed in the third embodiment), and water supply to the water cooling block is started.

[Effect of the embodiment]
The effect of the above embodiment was verified by experiment. The specifications of the low-pressure mercury lamp used in the experiment are as follows.

Lamp 2 U-tube length L = 590mm, tube outer diameter D = 20mm, tube pitch p = 35mm of two legs of U-tube, pitch P = 100mm of juxtaposed U-tubes,
Table 1 shows that in the first embodiment Fe and the second embodiment Se, (1) the temperature Ta ° C of the heated air flow, and (2) the lamp base is brought to a predetermined temperature (43 ° C in the experiment) by this air flow. It is the result of measuring the arrival time t [min.]. As the air flow temperature Ta, a temperature measured in the vicinity of the lamp base was adopted, and the lamp base temperature Bt was measured by a thermocouple installed at the center of the three-lamp block.
Furthermore, the sample-to-conveyor interval SP was 20 mm, but SP = 10 mm was measured only for the first embodiment Fe.
In the above experiment, the comparative example was a conventional technique.

  From Table 1, at normal SP = 20 [mm], the air flow temperature Ta is compared with 43 [° C.] of no wind (conventional technology Pa), and air (first embodiment Fe) and air + heat sink (first In the second embodiment Se), the temperature is raised to 70 [° C.]. That is, it can be seen that the heat generated by the lamp is effectively transferred to the air flow Ta around the lamp.

  When lighting is started, the lamp itself generates heat, and the coldest part temperature of the lamp rises. Similarly, the temperature around the lamp also rises. With no wind (prior art Pa), the time t for the lamp base temperature Tb to reach 43 ° C. is 13 minutes. In the air blowing (first embodiment Fe), the ratio (herein referred to as “shortening rate”) when the no-wind state was 100 [%] was 79 [%] when shortened to t = 10 minutes. Similarly, in ventilation + heat sink (second embodiment Se), the time was shortened to t = 8.5 minutes, and the shortening rate was 65 [%]. That is, in the first embodiment Fe and the second embodiment Se, the air flow at the warmed temperature Ta effectively raises the temperature of the lamp base 4 in a short time compared to no wind (conventional technology Pa). You can see that it has reached [℃].

  In the first embodiment Fe, the comparison between the ramp-conveyer interval SP is also made. Compared with normal 20 [mm] (SP20), 10 [mm] (SP10) with a narrow interval increases the air flow temperature Ta from 70 to 80 by 10 [° C], and the lamp base temperature Tb is 43 ° C. The time t [min.] To reach is reduced from 10 to 9 by 1 [min.]. That is, it can be seen that by reducing the interval SP, the air flow around the lamp rises faster, and as a result, the lamp base temperature Tb also rises faster.

  FIG. 6 is a profile of the air flow temperature Ta and the lamp base temperature Tb at the normal interval SP20 during the experiment of Table 1. According to FIG. 6, the difference between the lamp base temperature Tb and the air flow temperature Ta is relatively small in the case of no wind (prior art Pa).

  On the other hand, in the ventilation (first embodiment Fe) and the ventilation + heat sink (second embodiment Se), the difference between the lamp base temperature Bt and the air flow temperature Ta is very large. It can be seen that the rise is very fast (about 3-4 minutes). Here, there is an effect that the lamp itself rapidly rises in temperature (about 1 to 2 minutes) to reach 100 to 200 ° C.

  When air blowing (first embodiment Fe) and air blowing + heat sink (second embodiment Se) are compared, there is no difference in the temperature transition of the air flow temperature Ta. Regarding the lamp base temperature Bt, the temperature increase rate of the blower + heat sink (second embodiment Se) is increased, although it is slight.

  FIG. 7 is a profile of the air flow temperature Ta and the lamp base temperature Bt in the comparison of the width and narrowness of the lamp-conveyor spacing SP performed in the first embodiment during the experiment of Table 1. Here, it can be seen that the temperature increase rate of the ambient temperature Ta of the lamp base is faster in SP10 that is relatively narrow compared to the normal interval SP20. As a result, due to the influence of warmer airflow, the lamp base temperature Bt is slightly higher when the lamp-conveyor interval SP is relatively narrow (SP = 10 mm), but the temperature rise rate is faster.

[Application examples and others]
(1) An example in which the axial fans 26 and 26a are installed in the first embodiment, an example in which a heat sink is further attached in the second embodiment, and a return from the blower 22 in place of the axial fan 26 in the third embodiment The example in which the means 18d is provided has been described.

However, the combination of each embodiment is arbitrary. For example, the following embodiment may be used.
In place of the axial fan 26 of the first embodiment, a reflux means 18d from the blower 22 may be provided.
In place of the axial fan 26 of the second embodiment, a reflux means 18d from the blower 22 may be provided.
In any application example, the air flow from the recirculation means 18d may be blown into the chamber from the position of the axial flow fan 26a of the modification shown in FIG. 2B.

[Summary]
The embodiments of the low-pressure mercury lamp lighting apparatus according to the present invention have been described above, but these are examples for understanding the present invention and do not limit the scope of the present invention. Additions, deletions, modifications, and improvements that can be easily made by those skilled in the art with respect to these embodiments are within the scope of the present invention. The technical scope of the present invention is defined by the description of the appended claims.

2: Lamp, Low-pressure mercury lamp, 4: Lamp base, 8: Water-cooled block, 8a: Water supply port, 8b: Drain port, 10: Water-cooled low-pressure mercury lamp irradiation device, 10a: Modification of water-cooled low-pressure mercury lamp irradiation device , 12: mirror, reflector, 14: conveyor, 16: irradiated object, workpiece, 17h: air flow, 18: chamber, processing device chamber, 18a: carry-in port, 18b: carry-out port, 18c: chamber exhaust pipe, 18d : Reflux pipe, reflux means, 18e: branch valve, 20: water-cooled low-pressure mercury lamp irradiation device, 21: ozone decomposition catalyst, 22: blower, 26: axial fan, 26a: axial fan, 30: water-cooled low-pressure mercury Lamp irradiation device, 32: heat sink, 100: water-cooled low-pressure water

Claims (6)

A lamp base fitted with a low-pressure mercury lamp;
In a water-cooled low-pressure mercury lamp illuminating device having a water-cooling block connected to the lamp base so as to transfer heat,
A fan that generates an air flow that passes around the low-pressure mercury lamp, and directs the air around the lamp that has become hot at the start of lighting to the lamp base and / or the water-cooling block. A water-cooled low-pressure mercury lamp lighting device. The water-cooled low-pressure mercury lamp lighting device according to claim 1, further comprising:
A heat sink connected to the lamp base or the water cooling block so as to be capable of transferring heat, and air around the lamp that has become hot at the start of lighting is directed toward the lamp base, the water cooling block and / or the heat sink. A water-cooled low-pressure mercury lamp lighting device. A lamp base fitted with a low-pressure mercury lamp;
A water cooling block connected to the lamp base in a heat transferable manner;
In the water-cooled low-pressure mercury lamp illuminating device having the lamp base and a processing chamber for housing the water-cooling block,
An exhaust means for forcibly exhausting installed in the processing chamber;
A recirculation unit that recirculates a part of the exhaust flow from the exhaust unit to the processing chamber, and the recirculation unit causes the air around the lamp that has become high temperature at the start of lighting to flow to the lamp base and the water cooling block or the A water-cooled low-pressure mercury lamp illuminator that sends out to either. The water-cooled low-pressure mercury lamp lighting device according to claim 3, further comprising:
A heat sink connected to the lamp base or the water cooling block so as to transfer heat;
The reflux means is a water-cooled low-pressure mercury lamp illuminating device that sends out air around the lamp, which has become high at the start of lighting, toward the lamp base, the water-cooling block and / or the heat sink. In the lighting method of the water-cooled low-pressure mercury lamp lighting device,
The water-cooled low-pressure mercury lamp illuminating device generates a lamp base to which a low-pressure mercury lamp is attached, a water-cooling block connected to the lamp base so as to be capable of transferring heat, and an air flow passing around the low-pressure mercury lamp. A water-cooled low-pressure mercury lamp illuminating device having a fan, the lamp base, the water-cooling block, a processing chamber for housing the fan, and an exhaust means for forcibly exhausting installed in the processing chamber;
In the initial state, the lamp is turned off, the fan is turned off, the water supply block of the water cooling block is turned off, and the exhaust means is turned off.
At the lighting start stage, the lamp is turned on, the fan is turned on, and the exhaust means is turned on.
When the lamp base reaches a predetermined temperature, it proceeds to the lighting stage,
A lighting method in which, in the lighting stage, fan OFF and water supply of the water cooling block are started. In the lighting method of the water-cooled low-pressure mercury lamp lighting device,
The water-cooled low-pressure mercury lamp illuminating device includes a lamp base to which a low-pressure mercury lamp is attached, a water-cooling block connected to the lamp base so that heat can be transferred, a processing chamber that houses the lamp base and the water-cooling block, A water-cooled low-pressure mercury lamp illuminator having exhaust means forcibly exhausting installed in the processing chamber and reflux means for returning a part of the exhaust flow from the exhaust means to the processing chamber;
In the initial state, the lamp is turned off, the reflux means is cut off, the water cooling block is turned off, and the exhaust means is turned off.
At the lighting start stage, the lamp is turned on, the exhaust means is turned on, and the reflux means is opened.
When the lamp base reaches a predetermined temperature, it proceeds to the lighting stage,
In the lighting step, the lighting method is such that the circulation of the reflux means and the water cooling block are started.