JP2018179862A - X-RAY IMAGE DISPLAY DEVICE, X-RAY IMAGE DISPLAY METHOD, AND X-RAY IMAGE DISPLAY PROGRAM - Google Patents

Abstract

An X-ray image display device, an X-ray image display method, and an X-ray image display method that can easily display an X-ray intensity distribution under the same display conditions at any timing without the need to set display conditions for each measurement. An X-ray image viewing program is provided. A plurality of threshold values are stored in advance in a storage unit 20 in association with each element. The intensity comparison processing unit 12 reads a plurality of threshold values stored in the storage unit 20 for each element at arbitrary timing, and compares them with the X-ray intensity for each element within the measurement region. The display processing unit 13 displays the X-ray intensity distribution for each element in the measurement region in different colors or shades according to the X-ray intensity based on the comparison result by the intensity comparison processing unit 12 . [Selection drawing] Fig. 2

Description

  The present invention relates to an X-ray image display apparatus, an X-ray image display method, and an X-ray image display program for displaying an image based on a detection signal of X-rays generated by irradiating an electron beam into a measurement area on a sample surface. It is about

  In an X-ray analyzer such as an electron probe microanalyzer (EPMA), the sample may be subjected to elemental analysis by irradiating the sample with an electron beam and detecting X-rays generated from the sample by the irradiation. it can. If the electron beam is scanned in the measurement area on the sample surface, the element concentration distribution in the measurement area can be obtained, and such an analysis method is called mapping analysis (for example, Patent Document 1 and 2).

  As an aspect of mapping analysis, the X-ray intensity of each element at each pixel (each measurement position) in the measurement area is determined, and the X-ray intensity distribution for each element is displayed as an image (mapping image). is there. In this case, the X-ray intensity distribution is displayed in monochrome gradation or pseudo color by dividing the X-ray intensity into a plurality of stages and assigning appropriate gradations or colors to each stage.

  When displaying a mapping image by pseudo color, in general mapping analysis using an X-ray analyzer, the X-ray intensity of the element in each pixel is imaged in pseudo color and sequentially displayed as the measurement progresses. At this time, the threshold used in dividing the X-ray intensity into multiple stages and pseudocolorizing is automatically calculated, for example, to be equally allocated between the maximum value and the minimum value of the X-ray intensity. . Also, the mapping image for each element is displayed in order according to a default rule such as atomic number order.

Patent No. 3503124 JP, 2013-148543, A

  In general, the intensity threshold at each stage when pseudo-coloring the mapping image is adjusted so that the X-ray intensity distribution of each element is most easily understood. Usually, the task of adjusting such a threshold is performed while viewing the image after the measurement is completed. When mapping analysis is performed on the same element in a large number of measurement areas, it is desirable for all the mapping images of the same element to be pseudo-colored and displayed with the same intensity threshold value in order to compare those mapping images. In such a case, an operation of setting a threshold is performed each time measurement of each measurement area is completed.

  With regard to the order in which the mapping image for each element is displayed, when elements having correlation are to be displayed side by side, etc., they may be arbitrarily rearranged and displayed depending on the elements. Even in such a case, it is general to set the display order of the mapping image for each element after each measurement.

  The present invention has been made in view of the above situation, and it is not necessary to set display conditions for each measurement, and X-rays can easily display the mapping image under the same display conditions at any timing. An object of the present invention is to provide an image display apparatus, an X-ray image display method, and an X-ray image display program.

(1) An X-ray image display apparatus according to the present invention is an X-ray image display apparatus that displays an image based on a detection signal of X-rays generated by irradiating an electron beam into a measurement area on a sample surface. And a storage processing unit, a strength comparison processing unit, and a display processing unit. The storage unit stores a plurality of threshold values in advance in association with each element. The intensity comparison processing unit reads the plurality of threshold values stored in the storage unit for each element at an arbitrary timing, and compares the read out threshold values with the X-ray intensity for each element in the measurement region. The display processing unit displays the X-ray intensity distribution of each element in the measurement area in different colors or shades according to the X-ray intensity based on the comparison result by the intensity comparison processing unit.

  According to such a configuration, a plurality of threshold values stored in advance in the storage unit in association with the respective elements are read for each element at an arbitrary timing, and the threshold value is an X-ray for each element in the measurement region. By comparing with the intensity, the X-ray intensity distribution for each element is displayed in color or shading based on the comparison result. As described above, by reading out and using the threshold as the display condition at any timing, it is not necessary to set the threshold for each measurement, and the display of the X-ray intensity distribution with the same threshold can be easily performed at any timing. be able to.

(2) In the storage unit, the display order of each element may be stored in association with the plurality of threshold values. In this case, the display processing unit may display the X-ray intensity distribution for each element according to the display order of the elements stored in the storage unit.

  According to such a configuration, not only the threshold compared with the X-ray intensity of each element but also the display order of each element is stored in the storage unit in association with each element, and the X for each element according to the display order The line intensity distribution is displayed. Therefore, it is not necessary to set the display order as the display condition for each measurement, and the display of the X-ray intensity distribution in the same display order can be easily performed at any timing.

(3) A plurality of combinations of the plurality of threshold values for a plurality of types of elements may be stored in the storage unit. In this case, the intensity comparison processing unit may compare the plurality of threshold values in the combination selected from the plurality of combinations with the X-ray intensity of each element in the measurement region.

  According to such a configuration, the storage unit stores a plurality of combinations of a plurality of threshold values for a plurality of types of elements, and displays an X-ray intensity distribution for each element using a plurality of thresholds in an arbitrarily selected combination. be able to. That is, since it is possible to display an X-ray intensity distribution by selecting an arbitrary display pattern from a plurality of types of display patterns, it is possible to select the display pattern by which the X-ray intensity distribution of each element is most easily analyzed. Good mapping analysis can be performed.

(4) The X-ray image display apparatus further includes a threshold value calculation processing unit that automatically calculates the plurality of threshold values corresponding to each element based on the maximum value and the minimum value of the X-ray intensity of each element. It may be In this case, when the default setting is selected, the intensity comparison processing unit may compare the plurality of threshold values calculated by the threshold value calculation processing unit with the X-ray intensity for each element in the measurement area. .

  According to such a configuration, it is possible to display the X-ray intensity distribution for each element using a plurality of automatically calculated thresholds as default settings and using the thresholds of the default settings. As described above, by making it possible to select the display pattern based on the threshold of the default setting as the display pattern, the range of selection of the display pattern is expanded, so that the mapping analysis can be performed better.

(5) The X-ray image display method according to the present invention is an X-ray image display method for displaying an image based on a detection signal of X-rays generated by irradiating an electron beam into a measurement area on the surface of a sample. And an intensity comparison step and a display step. In the intensity comparison step, a plurality of threshold values stored in advance in the storage unit in association with the respective elements are read at arbitrary timing for each element, and compared with the X-ray intensity for each element in the measurement region. In the display step, the X-ray intensity distribution of each element in the measurement area is displayed in different colors or shades according to the X-ray intensity based on the comparison result in the intensity comparison step.

(6) The display order of each element may be stored in the storage unit in association with the plurality of threshold values. In this case, in the display step, the X-ray intensity distribution for each element may be displayed according to the display order of each element stored in the storage unit.

(7) The storage unit may store a plurality of combinations of the plurality of threshold values for a plurality of types of elements. In this case, in the intensity comparison step, the plurality of threshold values in the combination selected from the plurality of combinations may be compared with the X-ray intensity for each element in the measurement region.

(8) The X-ray image display method further includes a threshold value calculation step of automatically calculating the plurality of threshold values corresponding to each element based on the maximum value and the minimum value of the X-ray intensity for each element. It may be In this case, the plurality of combinations may include a combination of the plurality of thresholds calculated by the threshold calculation processing unit.

(9) An X-ray image display program according to the present invention is an X-ray image display program for displaying an image based on a detection signal of X-rays generated by irradiating an electron beam into a measurement area on the surface of a sample. And causing the computer to execute an intensity comparison step and a display step. In the intensity comparison step, a plurality of threshold values stored in advance in the storage unit in association with the respective elements are read at arbitrary timing for each element, and compared with the X-ray intensity for each element in the measurement region. In the display step, the X-ray intensity distribution of each element in the measurement area is displayed in different colors or shades according to the X-ray intensity based on the comparison result in the intensity comparison step.

  According to the present invention, it is not necessary to set display conditions for each measurement by reading out and using a threshold or display order at any timing as the display conditions, and displaying the X-ray intensity distribution under the same display conditions It can be easily performed at any timing.

It is the schematic which showed the structural example of EPMA. FIG. 1 is a block diagram showing a configuration example of an X-ray image display device according to an embodiment of the present invention. It is a figure showing a concrete example of a setting selection screen. It is the flowchart which showed the flow of the processing by the data processing part. FIG. 14 is a view showing a display example of X-ray intensity distribution, and shows a case where default setting is selected on the setting selection screen of FIG. 3; FIG. 16 is a view showing a display example of X-ray intensity distribution, and shows a case where a combination name is selected on the setting selection screen of FIG. 3;

1. Configuration Example of Electron Beam Micro Analyzer FIG. 1 is a schematic view showing a configuration example of the EPMA 100. As shown in FIG. The EPMA (electron beam micro analyzer) 100 is an apparatus for detecting and analyzing X-rays generated from the sample S by placing the sample S in the housing 1 and irradiating the sample with an electron beam. The EPMA 100 is provided with a sample holder 2, a sample stage 3, an electron beam irradiation unit 4, an EDS 5, a WDS 6, a secondary electron detector 7 and the like.

  The sample holder 2 is a member for holding a sample, and is detachable from the sample stage 3. The sample stage 3 is displaceable along two axes (X axis and Y axis) orthogonal to each other in the horizontal plane and a Z axis in the vertical direction. By controlling the displacement of the sample stage 3, it is possible to adjust the measurement area (area to which the electron beam is irradiated) on the surface of the sample S.

  The electron beam irradiation unit 4 includes an electron source 41, a condenser lens 42, an aperture 43, a scanning coil 44, an objective lens 45, and the like. The electron beam emitted from the electron source 41 is condensed by the condenser lens 42, and after the light flux is narrowed by the diaphragm 43, the surface of the sample S is irradiated with a smaller spot shape by the objective lens 45. The electron beam irradiated to the surface of the sample S is scanned in the horizontal direction (X direction and Y direction) in the measurement area by the scanning coil 44. From the surface of the sample S irradiated with the electron beam, X-rays are generated, and the X-rays enter the EDS 5 and WDS 6.

  EDS 5 is a spectrometer (energy dispersive X-ray spectrometer) for obtaining an energy spectrum of X-rays, and includes a semiconductor detector and a multi-channel analyzer (not shown). X-rays from the sample S are incident on the semiconductor detector and converted into electrical signals, and pulses of a height proportional to the energy of the incident X-rays are guided to the multi-channel analyzer. Thereby, the number of pulses can be integrated to each channel corresponding to the X-ray energy, and data of the X-ray spectrum can be acquired. The EDS 5 is removable from the outside of the housing 1 and can be additionally equipped with the EPMA 100 as in this embodiment, but can be omitted.

  The WDS 6 is a spectrometer (wavelength dispersive X-ray spectrometer) that utilizes the diffraction phenomenon of X-rays, and includes a dispersive crystal 61 and an X-ray detector 62. The X-rays from the sample S are dispersed by the dispersive crystal 61 as a dispersive element and enter the X-ray detector 62. At this time, by controlling the incident angle of the X-ray to the dispersive crystal 61, only the X-ray of the wavelength satisfying the diffraction condition of the Bragg can be detected by the X-ray detector 62, and the data of the X-ray spectrum can be acquired. . A plurality of WDSs 6 are provided in the housing 1. Thereby, the same number of elements as the number of WDS 6 can be analyzed simultaneously.

  The measurement area is a rectangular area set on the surface of the sample S, and includes a plurality of pixels (measurement positions) arranged in a matrix in the X direction and the Y direction. For each pixel in the measurement region, the X-ray intensity distribution of the element is obtained by detecting the X-ray of the wavelength corresponding to the selected element by the X-ray detector 62 of the WDS 6. The X-ray intensity is a value proportional to the X-ray intensity detected by the X-ray detector 62, and is, for example, a count value of X-rays per fixed time in the X-ray detector 62.

  The secondary electron detector 7 detects secondary electrons generated from the surface of the sample S. Based on the detection signal from the secondary electron detector 7, a secondary electron image can be obtained. However, the secondary electron detector 7 may not be provided.

2. Configuration Example of X-ray Image Display Device FIG. 2 is a block diagram showing a configuration example of an X-ray image display device 200 according to an embodiment of the present invention. The X-ray image display apparatus 200 which concerns on this embodiment displays an image based on the detection signal of the X-ray in WDS6 of EPMA100.

  Specifically, based on the data of the X-ray intensity distribution obtained by detecting the X-ray of the wavelength corresponding to the selected element by the X-ray detector 62 of WDS 6 for each pixel in the measurement region An image of the X-ray intensity distribution for each element is displayed. In the following embodiment, a case of displaying an X-ray intensity distribution image (X-ray intensity map) based on the X-ray intensity detected by the WDS 6 will be described, but the X-ray image display apparatus 200 uses EDS 5. It is also possible to display an X-ray intensity map based on the detected X-ray intensity.

  The X-ray image display apparatus 200 includes a data processing unit 10, a storage unit 20, a display unit 30, an operation unit 40, and the like. The data processing unit 10 is configured to include, for example, a central processing unit (CPU). The data processing unit 10 functions as an X-ray intensity acquisition processing unit 11, an intensity comparison processing unit 12, a display processing unit 13, a threshold value calculation processing unit 14 and the like when the CPU executes a program. The storage unit 20 is configured of, for example, a random access memory (RAM) or a hard disk. The display unit 30 is configured of, for example, a liquid crystal display. The operation unit 40 includes, for example, a keyboard and a mouse.

  The X-ray intensity acquisition processing unit 11 performs processing of acquiring data of the X-ray intensity detected by the WDS 6 of the EPMA 100. The processing by the X-ray intensity acquisition processing unit 11 may be automatically performed in real time when the X-ray intensity is detected by the WDS 6 of the EPMA 100, or the processing from the EPMA 100 to X based on the operation of the operation unit 40 by the user. It may be configured to acquire line strength data.

  The intensity comparison processing unit 12 performs processing of comparing the X-ray intensity of each element in the measurement region with a threshold value based on the data of the X-ray intensity acquired by the X-ray intensity acquisition processing unit 11. The threshold value to be compared with the measured value of the X-ray intensity is stored in advance in the storage unit 20 in association with each element. A plurality of threshold values are stored in association with each element. More specifically, a plurality of combinations of a plurality of threshold values for a plurality of types of elements are stored in the storage unit 20. By comparing these threshold values with the measured values of the X-ray intensity at each pixel in the measurement area, the measured values of the X-ray intensity at each pixel can be classified into a plurality of stages for each element.

  The plurality of threshold values stored in the storage unit 20 can be read for each element at any timing. The user operates the operation unit 40 to select an arbitrary combination from a plurality of combinations of threshold values stored in the storage unit 20. The intensity comparison processing unit 12 compares the plurality of threshold values in the selected combination with the X-ray intensity for each pixel in the measurement area.

  The display processing unit 13 causes the display unit 30 to display the X-ray intensity distribution of each element in the measurement region in different colors or shades according to the X-ray intensity based on the comparison result by the intensity comparison processing unit 12. That is, when displaying the X-ray intensity distribution for each element in the measurement area on the display unit 30, each pixel in the measurement area corresponds to the measured value of the X-ray intensity classified by comparing with the above threshold. Displayed in color or shade.

  Not only the threshold value but also the display order is stored in the storage unit 20 in association with each element. When displaying the X-ray intensity distribution for each element in the measurement region on the display unit 30, the display order is displayed according to the display order of each element stored in the storage unit 20. The display processing unit 13 may arrange and display the X-ray intensity distribution for each element in the order of display of each element on one or more display screens, or may switch the display screen according to the display order of each element Good.

  The threshold value for each element and the display order can be stored in the storage unit 20 in association with the element name by the user operating the operation unit 40 and setting in advance. Such setting can be additionally stored in the storage unit 20 or deleted by setting the user at an arbitrary timing. Further, in the storage unit 20, default settings are stored in advance separately from settings to be added or deleted by the user. In the default setting, for example, the display order is set to a specific rule such as atomic number order, and the threshold is set to be automatically determined at approximately equal intervals between the maximum value and the minimum value of the X-ray intensity. .

  The threshold calculation processing unit 14 automatically calculates a plurality of thresholds corresponding to each element based on the maximum value and the minimum value of the X-ray intensity of each element. When the default setting is selected, the threshold value calculation processing unit 14 performs processing of calculating a plurality of threshold values at substantially equal intervals between the maximum value and the minimum value of the X-ray intensity for each element. In this case, the intensity comparison processing unit 12 measures the X-ray intensity in each pixel for each element by comparing the plurality of threshold values calculated by the threshold value calculation processing unit 14 with the X-ray intensity for each element in the measurement region. Classify values into multiple levels.

3. A specific example of the setting selection screen A setting selection screen displayed on the display unit 30 by the display processing unit 13 as to which setting is selected among the setting of the threshold and the display order stored in the storage unit 20 and the default setting Can be determined.

  FIG. 3 is a view showing a specific example of the setting selection screen 300. As shown in FIG. The setting selection screen 300 includes, for example, a setting list display area 301, an elemental order display area 302, a threshold display area 303, a save key 304, a delete key 305, an OK key 306, and a cancel key 307.

  In the setting list display area 301, names (combination names 311) of a plurality of combinations set in advance as a combination of a plurality of threshold values are displayed side by side. The user operates the operation unit 40 to select an arbitrary combination name 311 displayed in the setting list display area 301, thereby storing the display order and the threshold values of a plurality of types of elements corresponding to the combination name 311. It can be read out from the unit 20 and can be displayed in the element order display area 302 and the threshold display area 303, respectively. In the example of FIG. 3, the combination name 311 “Brass_Pb” is selected.

  In the setting list display area 301, in addition to the combination name 311, the default setting 312 or the current setting 313 can be selected. The user selects one of the combination name 311, the default setting 312, and the current setting 313, and then selects the OK key 306 to display the X-ray intensity distribution on the display unit 30 with the selected setting. be able to.

  In the element order display area 302, as described above, the display order of a plurality of types of elements corresponding to the selected combination name 311 is displayed. In the setting selection screen 300, an order change key 321 is displayed in association with the element order display area 302. The user can change the display order of the selected elements by selecting one of the element names displayed in the element order display area 302 and appropriately selecting the order change key 321. After changing the display order, if the save key 304 is selected, the changed display order can be stored.

  In the threshold value display area 303, a plurality of threshold values set for the elements selected in the element order display area 302 are displayed in association with the pallet image 331. The pallet image 331 is an image representing a color or gradation corresponding to each threshold, and each pixel classified by the threshold according to the X-ray intensity is displayed in a color or gradation corresponding to the threshold in the pallet image 331 . The palette image 331 may be selected from a plurality of types of images by the user operating the operation unit 40.

  The user operates the operation unit 40 to select one of the combination names 311 displayed in the setting list display area 301 and then selects the delete key 305 to store the selected setting. It can also be deleted from the part 20. When the cancel key 307 is selected, the display of the setting selection screen 300 on the display unit 30 can be ended.

4. Flow of Processing by Data Processing Unit FIG. 4 is a flowchart showing the flow of processing by the data processing unit 10. The data processing unit 10 performs different processing when the combination name 311 is selected on the setting selection screen 300 and when the default setting 312 is selected.

  When the combination name 311 is selected on the setting selection screen 300 (Yes in step S101), the threshold value and the display order of each element corresponding to the selected combination name 311 are read from the storage unit 20 (step S102). Then, the measured value of the X-ray intensity in each pixel in the measurement area acquired by the X-ray intensity acquisition processing unit 11 is compared with the threshold value of each element read out, whereby the X-ray in each pixel for each element The measured values of the strength are classified into a plurality of levels (step S103: strength comparison step).

  Thereafter, based on the comparison result in the intensity comparison step, the X-ray intensity distribution for each element in the measurement region is displayed on the display unit 30 in a different color or gradation depending on the X-ray intensity (step S104: display step) . At this time, the X-ray intensity distribution for each element is displayed according to the read display order, and each pixel of the X-ray intensity distribution is displayed in a color or gray scale corresponding to the classified actual value of the X-ray intensity. .

  When the default setting 312 is selected on the setting selection screen 300 (Yes in step S105), the default setting is read from the storage unit 20 (step S106). Then, based on the maximum value and the minimum value of the X-ray intensity for each element, a plurality of threshold values corresponding to each element are automatically calculated (step S107: threshold value calculation step). In this case, the measured value of the X-ray intensity at each pixel in the measurement area acquired by the X-ray intensity acquisition processing unit 11 is compared with the calculated threshold value of each element, whereby X-rays at each pixel for each element The measured values of the strength are classified into a plurality of levels (step S103: strength comparison step).

  Thereafter, based on the comparison result in the intensity comparison step, the X-ray intensity distribution for each element in the measurement region is displayed on the display unit 30 in a different color or gradation depending on the X-ray intensity (step S104: display step) . At this time, the X-ray intensity distribution for each element is displayed according to the display order (for example, atomic number order) of the default setting, and each pixel of the X-ray intensity distribution has a color corresponding to the measured value of the classified X-ray intensity Displayed in gray scale.

  Such switching of the display of the X-ray intensity distribution on the display unit 30 can be performed at any timing including during measurement. For example, while the default setting 312 is selected and measurement is being performed, an arbitrary combination name 311 is selected, and the X-ray intensity by the threshold value and display order of each element corresponding to the selected combination name 311 You may switch to the display of the distribution. Conversely, while any combination name 311 is selected and measurement is being performed, the display may be switched to the display of the X-ray intensity distribution by the default setting 312 by selecting the default setting 312. In addition, when a new analysis is started, the configuration may be such that the default setting 312 is automatically returned.

5. Display Example of X-Ray Intensity Distribution FIGS. 5A and 5B are diagrams showing display examples of the X-ray intensity distribution. 5A shows a case where the default setting 312 is selected on the setting selection screen 300 of FIG. 3, and FIG. 5B shows a case where the combination name 311 is selected on the setting selection screen 300 of FIG. As shown in FIGS. 5A and 5B, the display unit 30 displays a plurality of threshold values as the threshold display region 401 together with the measurement region 400. The threshold display area 401 may include a pallet image 402 in which a plurality of thresholds are displayed in association with each other.

  In FIG. 5A, since the default setting 312 is selected, a plurality of threshold values are calculated at substantially equal intervals between the maximum value (70 couts) and the minimum value (10 counts) of the X-ray intensity. As a result, the difference in color or shade of each pixel in the measurement area 400 is displayed in an easy-to-understand manner.

  In FIG. 5B, the same X-ray intensity distribution as in FIG. 5A is displayed using a plurality of threshold values corresponding to the selected combination name 311. In this example, a plurality of threshold values are set between 41 and 145 counts. As described above, when the X-ray intensity distribution is displayed using a threshold different from the default setting 312, each pixel is displayed in a color or gradation different from the default setting 312. When mapping analysis is performed on the same element in multiple measurement areas, it may be desirable to display all the X-ray intensity distributions of the same element with the same threshold value in order to compare those X-ray intensity distributions. In such a case, instead of the default setting 312, a desired combination name 311 may be selected to display an X-ray intensity distribution as illustrated in FIG. 5B.

6. Operation and Effect (1) In the present embodiment, a plurality of threshold values stored in advance in the storage unit 20 in association with each element are read for each element at an arbitrary timing, and the threshold value is set for each element in the measurement region. By comparing with the X-ray intensity of X, the X-ray intensity distribution for each element is displayed in color or shading based on the comparison result. As described above, by reading out and using the threshold as the display condition at any timing, it is not necessary to set the threshold for each measurement, and the display of the X-ray intensity distribution with the same threshold can be easily performed at any timing. be able to.

(2) Further, in the present embodiment, not only the threshold compared with the X-ray intensity of each element but also the display order of each element is stored in the storage unit 20 in correspondence with each element. Each X-ray intensity distribution is displayed. Therefore, it is not necessary to set the display order as the display condition for each measurement, and the display of the X-ray intensity distribution in the same display order can be easily performed at any timing.

(3) In particular, in the present embodiment, a plurality of combinations of a plurality of thresholds for a plurality of elements are stored in the storage unit 20, and a plurality of arbitrarily selected combinations (the combination name 311 in FIG. 3) are used. And X-ray intensity distribution for each element can be displayed. That is, since it is possible to display an X-ray intensity distribution by selecting an arbitrary display pattern from a plurality of types of display patterns, it is possible to select the display pattern by which the X-ray intensity distribution of each element is most easily analyzed. Good mapping analysis can be performed.

(4) Further, in the present embodiment, the plurality of automatically calculated thresholds are displayed as default settings (default settings 312 in FIG. 3), and the threshold of the default settings is also used to display the X-ray intensity distribution for each element. be able to. As described above, by making it possible to select the display pattern based on the threshold of the default setting as the display pattern, the range of selection of the display pattern is expanded, so that the mapping analysis can be performed better.

7. Modified Example In the above embodiment, the case where the X-ray image display apparatus 200 is configured separately from the EPMA 100 has been described. However, the present invention is not limited to such a configuration, and the X-ray image display apparatus 200 may be integrally configured with the X-ray analyzer such as the EPMA 100.

  Although the X-ray image display apparatus 200 provided with the data processing unit 10 has been described in the above embodiment, a program (X-ray image display program) for causing a computer to function as the data processing unit 10 can be provided. . In this case, the program may be provided as stored in a storage medium, or the program itself may be provided via wired communication or wireless communication. .

Reference Signs List 1 housing 2 sample holder 3 sample stage 4 electron beam irradiation unit 5 EDS (energy dispersive X-ray spectrometer)
6 WDS (wavelength dispersive X-ray spectrometer)
7 Secondary electron detector 10 Data processing unit 11 X-ray intensity acquisition processing unit 12 Intensity comparison processing unit 13 Display processing unit 14 Threshold calculation processing unit 20 Storage unit 30 Display unit 40 Operation unit 100 EPMA (electron beam micro analyzer)
200 X-ray image display apparatus 300 setting selection screen 301 setting list display area 302 elemental order display area 303 threshold display area

Claims (9)

An X-ray image display apparatus for displaying an image based on a detection signal of X-rays generated by irradiating an electron beam into a measurement area on a sample surface, comprising:
A storage unit that stores a plurality of threshold values in advance in association with each element;
An intensity comparison processing unit that reads out the plurality of threshold values stored in the storage unit for each element at an arbitrary timing, and compares it with the X-ray intensity for each element in the measurement region;
And a display processing unit configured to display the X-ray intensity distribution for each element in the measurement area in different colors or gray levels according to the X-ray intensity based on the comparison result by the intensity comparison processing unit. X-ray image display device. In the storage unit, the display order of each element is stored in association with the plurality of threshold values,
The X-ray image display apparatus according to claim 1, wherein the display processing unit displays an X-ray intensity distribution for each element in accordance with the display order of each element stored in the storage unit. The storage unit stores a plurality of combinations of the plurality of threshold values for a plurality of types of elements,
The said intensity comparison process part compares the X-ray intensity for every element in the said measurement area with the said some threshold value in the combination selected from the said some combination, The said Claim 1 or 2 X-ray image display device. The apparatus further comprises a threshold value calculation processing unit that automatically calculates the plurality of threshold values corresponding to each element based on the maximum value and the minimum value of the X-ray intensity for each element.
When the default setting is selected, the intensity comparison processing unit compares the plurality of threshold values calculated by the threshold value calculation processing unit with the X-ray intensity of each element in the measurement area. An X-ray image display apparatus according to Item 3. An X-ray image display method for displaying an image based on a detection signal of X-rays generated by irradiating an electron beam into a measurement area on a sample surface, comprising:
An intensity comparison step of reading a plurality of threshold values stored in advance in the storage unit in association with each element at any timing and comparing the X-ray intensity for each element in the measurement area;
Displaying the X-ray intensity distribution of each element in the measurement area in different colors or gray levels according to the X-ray intensity based on the comparison result of the intensity comparison step. Image display method. In the storage unit, the display order of each element is stored in association with the plurality of threshold values,
The X-ray image display method according to claim 5, wherein in the display step, an X-ray intensity distribution for each element is displayed in accordance with the display order of each element stored in the storage unit. The storage unit stores a plurality of combinations of the plurality of threshold values for a plurality of types of elements,
The X-ray intensity for each element in the measurement area is compared with the plurality of threshold values in the combination selected from the plurality of combinations in the intensity comparison step. X-ray image display method. The method further includes a threshold calculation step of automatically calculating the plurality of threshold values corresponding to each element based on the maximum value and the minimum value of the X-ray intensity for each element,
In the intensity comparison step, when default setting is selected, the plurality of threshold values calculated in the threshold value calculation step are compared with the X-ray intensities of the elements in the measurement area. The X-ray image display method described in. An X-ray image display program for displaying an image based on a detection signal of X-rays generated by irradiating an electron beam into a measurement area on a sample surface, comprising:
An intensity comparison step of reading a plurality of threshold values stored in advance in the storage unit in association with each element at any timing and comparing the X-ray intensity for each element in the measurement area;
And causing the computer to execute a display step of displaying the X-ray intensity distribution for each element in the measurement area in different colors or gray levels according to the X-ray intensity based on the comparison result in the intensity comparison step. X-ray image display program.