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JP2018166201A - Substrate for imaging apparatus and imaging apparatus - Google Patents

Substrate for imaging apparatus and imaging apparatus Download PDF

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JP2018166201A
JP2018166201A JP2017227940A JP2017227940A JP2018166201A JP 2018166201 A JP2018166201 A JP 2018166201A JP 2017227940 A JP2017227940 A JP 2017227940A JP 2017227940 A JP2017227940 A JP 2017227940A JP 2018166201 A JP2018166201 A JP 2018166201A
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frame
shaped member
imaging device
frame body
body portion
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JP6908506B2 (en
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智博 鮫島
Tomohiro Samejima
智博 鮫島
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Kyocera Corp
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Abstract

【課題】 蓋体の接合強度を高められる撮像装置用基板を提供する。【解決手段】 上面に撮像素子5の搭載領域1aを有し平面視で矩形状の基体部11、および該基体部11上に設けられて前記搭載領域1aを囲む、平面視で矩形状の枠体部12を含むセラミック配線基板1と、前記枠体部12の上面に接合部材7を介して接合されており、前記セラミック配線基板1の側面よりも外側に突出する突出部2aを有している、金属から成る枠状部材2と、を備え、該枠状部材2の前記上面は、前記枠体部12の上面からの高さが、前記枠体部12の辺の中央部における高さより前記枠体部12の角部における高さの方が低い撮像装置用基板10。【選択図】 図3PROBLEM TO BE SOLVED: To provide a substrate for an image pickup apparatus capable of increasing the joint strength of a lid. SOLUTION: A base portion 11 having a mounting region 1a of an image pickup element 5 on an upper surface and having a rectangular shape in a plan view, and a frame having a rectangular shape in a plan view and surrounding the mounting region 1a provided on the base portion 11. It has a ceramic wiring board 1 including a body portion 12 and a protruding portion 2a which is joined to the upper surface of the frame body portion 12 via a joining member 7 and projects outward from the side surface of the ceramic wiring board 1. The upper surface of the frame-shaped member 2 is provided with a frame-shaped member 2 made of metal, and the height of the upper surface of the frame-shaped member 2 from the upper surface of the frame body portion 12 is higher than the height at the center of the side of the frame body portion 12. The image pickup apparatus substrate 10 having a lower height at the corners of the frame body 12. [Selection diagram] Fig. 3

Description

本発明は、例えば、CCD(Charged-Coupled Device)およびCMOS(Complementary Metal-Oxide Semiconductor)等の撮像素子を搭載する撮像装置用基板および撮像装置に関するものである。   The present invention relates to an imaging apparatus substrate and an imaging apparatus on which an imaging element such as a CCD (Charged-Coupled Device) and a CMOS (Complementary Metal-Oxide Semiconductor) is mounted.

デジタルカメラ等に用いられる撮像装置は、撮像装置用基板にCCDまたはCMOS等の撮像素子が搭載されたものが用いられている。撮像装置用基板として、撮像素子が搭載される凹部を有するセラミック配線基板に位置決め等に用いられる金属製の枠体が接合されたものがある。撮像装置用基板に撮像素子を搭載して、枠体の上面に透光性の蓋体を接合して撮像素子を気密封止することで撮像装置となる。   As an image pickup apparatus used for a digital camera or the like, an image pickup apparatus in which an image pickup element such as a CCD or a CMOS is mounted on an image pickup apparatus substrate is used. As a substrate for an imaging device, there is a substrate in which a metal frame used for positioning or the like is bonded to a ceramic wiring substrate having a recess on which an imaging element is mounted. An image pickup device is mounted on an image pickup device substrate, and a light-transmitting lid is bonded to the upper surface of the frame to seal the image pickup device in an airtight manner.

特開2010−41218号公報JP 2010-41218 A

近年、一眼レフカメラに対してよりコンパクトで扱いやすい、ミラーレス一眼デジタルカメラやコンパクトデジタルカメラに対しても高画質化の要求が高まり、大型の撮像素子が用いられるようになっている。撮像装置に対しては、大型の撮像素子を搭載しつつ小型であることが要求されるようになっている。そして、撮像素子用基板は撮像素子の搭載領域は大型化しても、それ以外はできるだけ小さくしなければならない。そのため、蓋体と撮像装置用基板との接合領域の幅(接合材の幅)が小さくなり、蓋体の接合強度が小さくなる場合があった。そして、蓋体の接合信頼性が低下すると、撮像装置においては撮像素子の信頼性が問題となる場合があった。   In recent years, there has been a growing demand for higher image quality for mirrorless single-lens digital cameras and compact digital cameras that are more compact and easier to handle than single-lens reflex cameras, and large-sized image sensors have come to be used. An imaging device is required to be small while mounting a large imaging device. And even if the mounting area of an image pick-up element enlarges, the board | substrate for image pick-up elements must make it as small as possible other than that. For this reason, the width of the bonding region between the lid and the imaging device substrate (the width of the bonding material) is reduced, and the bonding strength of the lid may be reduced. When the bonding reliability of the lid is lowered, the reliability of the imaging element may be a problem in the imaging device.

本開示の一つの態様による撮像装置用基板は、上面に撮像素子の搭載領域を有し平面視で矩形状の基体部、および該基体部上に設けられて前記搭載領域を囲む、平面視で矩形状の枠体部を含むセラミック配線基板と、前記枠体部の上面に接合部材を介して接合されており、前記セラミック配線基板の側面よりも外側に突出する突出部を有している、金属から成る枠状部材と、を備え、該枠状部材の前記上面は、前記枠体部の上面からの高さが、前記枠体部の辺の中央部における高さより前記枠体部の角部における高さの方が低い。   An imaging device substrate according to an aspect of the present disclosure includes a mounting region for an imaging element on an upper surface, a rectangular base portion in plan view, and a plan view provided on the base portion and surrounding the mounting region. A ceramic wiring board including a rectangular frame body part, and a projection part that is joined to the upper surface of the frame body part via a joining member and projects outward from the side surface of the ceramic wiring board; A frame-shaped member made of metal, and the upper surface of the frame-shaped member has a height from the upper surface of the frame body portion that is higher than a height at a central portion of the side of the frame body portion. The height at the part is lower.

本開示の一つの態様による撮像装置は、上記の撮像装置用基板と、該撮像装置用基板の前記搭載領域に搭載された撮像素子と、前記枠状部材の前記上面に接合材で接合され、前記枠状部材の開口を塞いでいる平面視で矩形状の蓋体とを備える。   An imaging device according to an aspect of the present disclosure is bonded to the imaging device substrate, the imaging element mounted on the mounting region of the imaging device substrate, and the upper surface of the frame member with a bonding material, A rectangular lid in plan view that closes the opening of the frame-shaped member.

本開示の撮像装置用基板によれば、枠状部材の上面は、枠体部の上面からの高さが、枠体部の辺の中央部における高さより枠体部の角部における高さの方が低いことから、枠状部材の上面に接合材を介して蓋体を接合した際に、蓋体の角部に位置する接合材の厚みが他の部分より厚いものとなり、蓋体の接合強度が高いものとなる。   According to the imaging device substrate of the present disclosure, the height of the upper surface of the frame-shaped member from the upper surface of the frame body portion is higher than the height at the center of the side of the frame body portion at the corner of the frame body portion. Therefore, when the lid is joined to the upper surface of the frame-like member via the joining material, the thickness of the joining material located at the corner of the lid becomes thicker than the other parts, and the lid is joined. Strength will be high.

本開示の撮像装置によれば、上記撮像装置用基板を用いていることから、蓋体の接合強度が高く、信頼性の高いものとなる。   According to the imaging apparatus of the present disclosure, since the imaging apparatus substrate is used, the lid has high bonding strength and high reliability.

(a)は撮像装置の一例を示す斜視図であり、(b)は撮像装置用基板の一例を示す斜視図である。(A) is a perspective view which shows an example of an imaging device, (b) is a perspective view which shows an example of the board | substrate for imaging devices. (a)は図1に示す撮像装置の平面図であり、(b)は撮像装置用基板の平面図である。(A) is a top view of the imaging device shown in FIG. 1, (b) is a top view of the board | substrate for imaging devices. (a)は図2(a)のA−A線における断面図であり、(b)は図2(a)のB−B線における断面図であり、(c)は図2(a)のC−C線における断面図である。2A is a cross-sectional view taken along line AA in FIG. 2A, FIG. 2B is a cross-sectional view taken along line BB in FIG. 2A, and FIG. It is sectional drawing in CC line. (a)は図3(c)におけるA部を拡大して示す断面図であり、(b)は図3(c)におけるB部を拡大して示す断面図である。(A) is sectional drawing which expands and shows the A section in FIG.3 (c), (b) is sectional drawing which expands and shows the B section in FIG.3 (c). (a)〜(c)はいずれも撮像装置の他の例を示す断面図である。(A)-(c) is sectional drawing which shows the other example of an imaging device. (a)は図3(c)の一部を厚み方向に拡大して示す断面図であり、(b)は(a)のB部を拡大して示す断面図である。(A) is sectional drawing which expands and shows a part of FIG.3 (c) in the thickness direction, (b) is sectional drawing which expands and shows the B section of (a).

以下、本開示の撮像装置について、図面を参照しながら説明する。なお、以下の説明における上下の区別は便宜的なものであり、実際に撮像装置用基板等が使用されるときの上下を限定するものではない。図1(a)は撮像装置100の一例を示す斜視図であり、図1(b)は撮像装置用基板10の一例を示す斜視図である。図2(a)は図1に示す撮像装置100の平面図であり、図2(b)は撮像装置用基板10の平面図である。図3(a)は図2(a)のA−A線における断面図であり、図3(b)は図2(a)のB−B線における断面図であり、図3(c)は図2(a)のC−C線における断面図である。図4(a)は図3(c)におけるA部を拡大して示す断面図であり、図4(b)は図3(c)におけるB部を拡大して示す断面図である。   Hereinafter, an imaging apparatus according to the present disclosure will be described with reference to the drawings. In addition, the distinction between the upper and lower sides in the following description is for convenience, and does not limit the upper and lower sides when the imaging device substrate or the like is actually used. FIG. 1A is a perspective view illustrating an example of the imaging apparatus 100, and FIG. 1B is a perspective view illustrating an example of the imaging apparatus substrate 10. FIG. 2A is a plan view of the imaging apparatus 100 shown in FIG. 1, and FIG. 2B is a plan view of the imaging apparatus substrate 10. 3A is a cross-sectional view taken along line AA in FIG. 2A, FIG. 3B is a cross-sectional view taken along line BB in FIG. 2A, and FIG. It is sectional drawing in the CC line of Fig.2 (a). 4A is an enlarged cross-sectional view showing an A portion in FIG. 3C, and FIG. 4B is an enlarged cross-sectional view showing a B portion in FIG. 3C.

撮像装置100は、図1〜図3に示す例のように、撮像装置用基板10と、撮像素子5と、蓋体3とを含んでいる。   The imaging apparatus 100 includes the imaging apparatus substrate 10, the imaging element 5, and the lid 3 as in the example illustrated in FIGS. 1 to 3.

撮像装置用基板10は、上面に撮像素子5の搭載領域1aを有し平面視で矩形状の基体部11、および基体部11上に設けられて搭載領域1aを囲む、平面視で矩形状の枠体部12を含むセラミック配線基板1と、枠体部12の上面に接合部材7で接合された、開口部を有する板状の金属から成る枠状部材2とを備えている。枠状部材2はセラミック配線基板1の側面よりも外側に突出する突出部2aを有している。セラミック配線基板1の基体部11の上面と枠体部12とで形成される凹部の底面に搭載領域1aが位置している。   The imaging device substrate 10 has a mounting area 1a for the imaging element 5 on the upper surface, a rectangular base portion 11 in plan view, and a rectangular shape in plan view that is provided on the base portion 11 and surrounds the mounting area 1a. A ceramic wiring substrate 1 including a frame body portion 12 and a frame-shaped member 2 made of a plate-like metal having an opening portion bonded to the upper surface of the frame body portion 12 by a bonding member 7 are provided. The frame-like member 2 has a protruding portion 2 a that protrudes outward from the side surface of the ceramic wiring substrate 1. The mounting region 1 a is located on the bottom surface of the recess formed by the upper surface of the base body portion 11 and the frame body portion 12 of the ceramic wiring substrate 1.

撮像素子5は撮像装置用基板10の搭載領域1aに搭載されており、蓋体3が枠状部材2の上面に接合されることで、セラミック配線基板1の凹部および枠状部材2の開口が塞がれ、撮像素子5が封止されている。蓋体3は、枠状部材2の上面に接合材4で接合されている。より詳細には、蓋体3の下面の外縁部および側面の下面側と枠状部材2の上面の開口に沿った領域とが接合材4で接合されている。   The imaging element 5 is mounted on the mounting area 1 a of the imaging device substrate 10, and the lid 3 is joined to the upper surface of the frame-shaped member 2, so that the concave portion of the ceramic wiring substrate 1 and the opening of the frame-shaped member 2 are formed. The image sensor 5 is sealed. The lid 3 is bonded to the upper surface of the frame-shaped member 2 with a bonding material 4. More specifically, the outer edge portion of the lower surface of the lid 3 and the lower surface side of the side surface and the region along the opening of the upper surface of the frame-shaped member 2 are bonded by the bonding material 4.

そして、図3および図4に示す例のように、撮像装置用基板10の枠状部材2の上面は、枠体部12の上面からの高さが、枠体部12の辺の中央部における高さHsより枠体部12の角部における高さHcの方が低くなっている。   3 and FIG. 4, the upper surface of the frame-like member 2 of the imaging device substrate 10 has a height from the upper surface of the frame body portion 12 at the center of the side of the frame body portion 12. The height Hc at the corners of the frame body 12 is lower than the height Hs.

枠状部材2の上面は、枠体部12の上面からの高さが、枠体部12の辺の中央部における高さHsより枠体部12の角部における高さHcの方が低いことから、枠状部材2の上面に接合材4を介して蓋体3を接合した際に、蓋体3の角部に位置する接合材4の厚みTcsが、蓋体3の辺の中心部に位置する接合材4の厚みTssより厚いものとなる。接合
材4に加わる応力は、蓋体3中心からの距離の遠い角部において最も大きくなりやすいので、接合材4の厚みが厚いことで応力が緩和されるので、角部における接合強度が高められ、蓋体3の接合強度および接合信頼性が高いものとなる。なお、枠体部12の平面視の形状が長方形である場合は、枠体部12の角部における枠状部材2の上面の高さHcは、枠体部12の辺のうち、少なくとも長辺の中央部における枠状部材2の上面の高さより低いものであればよく、枠状体12の短辺の中央部における枠状部材2の上面の高さと同じであってもよい。
The height of the upper surface of the frame-shaped member 2 from the upper surface of the frame body portion 12 is lower than the height Hc at the corners of the frame body portion 12 than the height Hs at the center of the side of the frame body portion 12. Therefore, when the lid 3 is joined to the upper surface of the frame-like member 2 via the joining material 4, the thickness Tcs of the joining material 4 positioned at the corner of the lid 3 is at the center of the side of the lid 3. It becomes thicker than the thickness Tss of the bonding material 4 positioned. Since the stress applied to the bonding material 4 is most likely to increase at the corner portion far from the center of the lid 3, the stress is relieved by increasing the thickness of the bonding material 4, so that the bonding strength at the corner portion is increased. The bonding strength and bonding reliability of the lid 3 are high. When the shape of the frame body 12 in plan view is a rectangle, the height Hc of the upper surface of the frame-shaped member 2 at the corner of the frame body 12 is at least the long side of the sides of the frame body 12. As long as it is lower than the height of the upper surface of the frame-shaped member 2 at the center, the height of the upper surface of the frame-shaped member 2 at the center of the short side of the frame 12 may be the same.

図5(a)〜図5(c)は、いずれも撮像装置の他の例を示す断面図である。また、図6も撮像装置の断面図であり、図3(c)における枠状部材2の形状をわかりやすくするために、図5(a)〜図5(c)と同様に、蓋体1とセラミック配線基板1との間の部分を厚み方向に誇張して示した図である。また、図6に示す撮像装置100においては、図3に示す例に対して、接合部材7の配置についても変更している。いずれの例も、枠状部材2の上面が、枠体部12の上面からの高さが、枠体部12の辺の中央部における高さHsより枠体部12の角部における高さHcの方が低くなっている。   5A to 5C are cross-sectional views illustrating other examples of the imaging apparatus. FIG. 6 is also a cross-sectional view of the imaging apparatus, and in order to make the shape of the frame-like member 2 in FIG. 3 (c) easy to understand, the lid 1 is similar to FIGS. 5 (a) to 5 (c). It is the figure which exaggerated and showed the part between a ceramic wiring board 1 in the thickness direction. Moreover, in the imaging device 100 shown in FIG. 6, the arrangement of the joining member 7 is also changed with respect to the example shown in FIG. In any example, the upper surface of the frame-shaped member 2 is such that the height from the upper surface of the frame body portion 12 is higher than the height Hs at the center of the side of the frame body portion 12. Is lower.

図5(a)に示す例では、枠状部材2の上面は、枠状体12の角部の上方において高さが低くなる段差を有している。言い換えれば、枠状部材2は、枠状体12の角部より外側の部分(枠状部材2の角部)の厚みがそれ以外の部分(中央部)より薄いことで、枠体部12の角部における高さHcが辺部における高さHsより低くなっている。   In the example shown in FIG. 5A, the upper surface of the frame-shaped member 2 has a step whose height is lowered above the corner portion of the frame-shaped body 12. In other words, the frame-shaped member 2 has a thickness of a portion outside the corner portion of the frame-shaped body 12 (corner portion of the frame-shaped member 2) thinner than the other portion (center portion). The height Hc at the corner is lower than the height Hs at the side.

図5(b)に示す例は、図5(a)に対して、厚みの厚い中央部と厚みの薄い角部との間が傾斜しており、枠状部材2の上面は、辺の中央部から角部にかけて徐々に高さが低くなっている。このような構成であると、接合材4の厚みが辺の中央部から角部にかけて徐々に厚みが厚くなることで、応力が角部付近でも分散されやすくなるので、より接合強度および接合信頼性が高い撮像装置100となる。傾斜面に隣接する角部を丸めた形状とすると、より接合材4内に応力が集中し難くなるのでより信頼性の高いものとなる。   The example shown in FIG. 5B is inclined with respect to FIG. 5A between the thick central portion and the thin corner portion, and the upper surface of the frame-shaped member 2 is the center of the side. The height gradually decreases from the corner to the corner. With such a configuration, since the thickness of the bonding material 4 gradually increases from the central portion of the side to the corner portion, stress is easily dispersed even in the vicinity of the corner portion, so that the bonding strength and bonding reliability are further increased. The imaging device 100 having a high value. If the corners adjacent to the inclined surface are rounded, the stress is less likely to be concentrated in the bonding material 4, so that the reliability is higher.

図5(c)に示す例では、枠状部材2の上面は、辺の中央部が凸の湾曲面となっており、枠状部材2の厚みの変化がよりなだらかになっている。そのため、応力がより分散されて集中する部分がなくなるので、より接合強度および接合信頼性が高い撮像装置100となる。   In the example shown in FIG. 5C, the upper surface of the frame-shaped member 2 has a curved surface with a convex central portion of the side, and the change in the thickness of the frame-shaped member 2 is more gentle. Therefore, there is no portion where stress is more dispersed and concentrated, so that the imaging device 100 with higher joint strength and joint reliability is obtained.

なお、図5(a)、図5(b)のように、辺の中央部が平坦となっていると、平坦な中央部に沿って蓋体3を枠体2に接着することで、撮像素子5の上面に蓋体3を容易に平行に配置しやすくなるので、撮像装置100の組立が容易になる。   As shown in FIGS. 5A and 5B, when the central portion of the side is flat, the lid 3 is bonded to the frame body 2 along the flat central portion, thereby imaging. Since it becomes easy to arrange the lid 3 on the upper surface of the element 5 in parallel, the imaging apparatus 100 can be easily assembled.

図5(c)に示す例では枠状部材2の上面だけが凸の湾曲面となっているのに対して、図6に示す例は、枠状部材2が上側に凸に反っていることで上面が凸の湾曲面となっている。この場合には、プレス加工で作製した枠状部材2は量産性に優れるために、製造コスト抑えつつ応力が集中しない構造とすることができる。なお、枠状部材2のセラミック配線基板1の側面からはみ出した突出部2aは、セラミック配線基板1と重なる部分に比べて反りが小さいもしくは、図6に示す例のように搭載領域1aとほぼ平行な平坦になっていると、枠状部材2の位置精度が高まる。   In the example shown in FIG. 5C, only the upper surface of the frame-shaped member 2 is a convex curved surface, whereas in the example shown in FIG. 6, the frame-shaped member 2 is warped upward. The upper surface is a convex curved surface. In this case, since the frame-shaped member 2 manufactured by press work is excellent in mass productivity, it can be made a structure in which stress is not concentrated while manufacturing cost is suppressed. Note that the protrusion 2a protruding from the side surface of the ceramic wiring board 1 of the frame-like member 2 is less warped than the portion overlapping the ceramic wiring board 1, or substantially parallel to the mounting region 1a as in the example shown in FIG. If it is flat, the positional accuracy of the frame-shaped member 2 is increased.

図3および図6に示す例のように、枠状部材2が、全体が上側に凸に沿った形状である場合には、枠状部材2とセラミック配線基板1の枠体部12との間に位置する接合部材7の厚みは、接合材4の厚み分布とは逆になる。すなわち、接合部材7は、枠体部12の角部の上における厚みTcbが枠体部12の辺の中央部の上における厚みTsbより薄くなる。これは、枠状部材2とセラミック配線基板1との間に発生する熱応力が大きくなるセ
ラミック配線基板1の角部の上に位置する接合部材7の厚みTcbが薄くなるということである。
As in the example shown in FIGS. 3 and 6, when the frame-shaped member 2 has a shape along the convex upward, the space between the frame-shaped member 2 and the frame body portion 12 of the ceramic wiring board 1. The thickness of the bonding member 7 located in the position is opposite to the thickness distribution of the bonding material 4. That is, in the joining member 7, the thickness Tcb on the corner portion of the frame body portion 12 is thinner than the thickness Tsb on the center portion of the side of the frame body portion 12. This means that the thickness Tcb of the bonding member 7 located on the corner portion of the ceramic wiring board 1 where the thermal stress generated between the frame-like member 2 and the ceramic wiring board 1 increases is thin.

これに対して、図6に示す例では、枠状部材2の下面とセラミック配線基板1の上面が接合材7で接合されているのに加えて、枠状部材2の突出部2aの下面とセラミック配線基板1の側面とが接合部材7で接合されている。このような構成とすることで、枠状部材2とセラミック配線基板1の接合強度がより高くなる。これにより、例えば、撮像装置100を使用している間に繰り返し加わる熱応力によって接合部材7にクラックなどが発生する可能性が低減され、信頼性が高い撮像装置100となる。   On the other hand, in the example shown in FIG. 6, in addition to the lower surface of the frame-shaped member 2 and the upper surface of the ceramic wiring substrate 1 being bonded by the bonding material 7, the lower surface of the protruding portion 2 a of the frame-shaped member 2 The side surface of the ceramic wiring substrate 1 is joined by a joining member 7. By setting it as such a structure, the joining strength of the frame-shaped member 2 and the ceramic wiring board 1 becomes higher. Thereby, for example, the possibility that a crack or the like occurs in the bonding member 7 due to thermal stress repeatedly applied while the imaging device 100 is used is reduced, and the imaging device 100 with high reliability is obtained.

撮像装置100は、このような撮像装置用基板10と、撮像装置用基板10の搭載領域1aに搭載された撮像素子5と、枠状部材2の上面に接合材4で接合され、枠状部材2の開口を塞いでいる平面視で矩形状の蓋体3と、を備えている。撮像装置100において、接合材4は、蓋体3の角部における厚みTcsが蓋体3の辺の中央部における厚みTssより厚いものである。そのため、蓋体3の接合強度が高く、信頼性の高いものとなる。   The imaging apparatus 100 is joined to the imaging apparatus substrate 10, the imaging element 5 mounted on the mounting area 1 a of the imaging apparatus substrate 10, and the upper surface of the frame-shaped member 2 with the bonding material 4. And a rectangular lid body 3 in a plan view that closes the two openings. In the imaging device 100, the bonding material 4 is such that the thickness Tcs at the corner of the lid 3 is thicker than the thickness Tss at the center of the side of the lid 3. Therefore, the bonding strength of the lid 3 is high and the reliability is high.

セラミック配線基板1は、セラミック材料から成る、基体部11および枠体部12と、配線導体13とを含んでいる。基体部11と枠体部12とは焼成によって一体的に形成されているものである。基体部11は、平面視において矩形状を有する平板状の部分である。また、基体部11は、上面に撮像素子5の搭載領域1aを有しており、この搭載領域1aは、例えば、基体部11の上面の中央領域に位置している。枠体部12は、例えば、基体部11の平面形状に対応した形状および寸法を有しており、基体部11の搭載領域1aに対応した開口部を有している。基体部11および枠体部12は、例えば、セラミック材料から成る絶縁層が積層されたものである。図3に示す例においては、基体部1は2層の絶縁層から成り、枠体部12は3層の絶縁層から成るものであるが、絶縁層の層数はこれに限られるものではない。   The ceramic wiring board 1 includes a base body portion 11 and a frame body portion 12 and a wiring conductor 13 made of a ceramic material. The base part 11 and the frame part 12 are integrally formed by firing. The base portion 11 is a flat plate portion having a rectangular shape in plan view. In addition, the base portion 11 has a mounting area 1 a for the imaging element 5 on the upper surface, and the mounting area 1 a is located, for example, in a central area on the upper surface of the base portion 11. The frame body portion 12 has, for example, a shape and dimensions corresponding to the planar shape of the base body portion 11, and has an opening corresponding to the mounting region 1 a of the base body portion 11. The base part 11 and the frame part 12 are formed by laminating insulating layers made of a ceramic material, for example. In the example shown in FIG. 3, the base portion 1 is composed of two insulating layers, and the frame portion 12 is composed of three insulating layers. However, the number of insulating layers is not limited to this. .

基体部11および枠体部12は、セラミック材料から成り、その例は、酸化アルミニウム(アルミナ:Al23)質焼結体または窒化アルミニウム(AlN)質焼結体等である。セラミック配線基板1の基体部11および枠体部12が酸化アルミニウム質焼結体からなる場合は、セラミック配線基板1は、機械強度が高いために反りが発生しにくく、また、適度な熱伝導率を有しているので、撮像素子5から発生する熱を外部に放散しやすいものとなる。したがって、セラミック配線基板1が酸化アルミニウム質焼結体からなる場合には、セラミック配線基板1は、機械強度、熱伝導率、また、コスト的にも好ましいものになる。 The base part 11 and the frame part 12 are made of a ceramic material, and examples thereof include an aluminum oxide (alumina: Al 2 O 3 ) sintered body or an aluminum nitride (AlN) sintered body. When the base body portion 11 and the frame body portion 12 of the ceramic wiring board 1 are made of an aluminum oxide sintered body, the ceramic wiring board 1 is less likely to warp due to its high mechanical strength, and has an appropriate thermal conductivity. Therefore, it is easy to dissipate the heat generated from the image sensor 5 to the outside. Therefore, when the ceramic wiring board 1 is made of an aluminum oxide sintered body, the ceramic wiring board 1 is preferable in terms of mechanical strength, thermal conductivity, and cost.

配線導体13は、撮像素子5との電気的な接続さらに外部回路との接続のためのものである。配線導体13は、例えば、搭載領域1aに隣接して配列され、撮像素子5の電極5aとボンディングワイヤ6等で接続される接続パッド、基体部1の下面に設けられた外部電極およびこれらを電気的に接続するために絶縁層間に設けられた内部配線および絶縁層を貫通して上下の配線を接続する貫通導体等を含む。図3に示す例においては、枠体部12が内側に段差部を有しており、枠体部12の段差部の上面から基体部11の下面にかけて配線導体13が設けられている。枠体部12を段差部のないものとして、基体部11の上面の搭載領域1aに隣接する領域から基体部11の下面にかけて配線導体13を設けることもできる。   The wiring conductor 13 is for electrical connection with the image sensor 5 and connection with an external circuit. For example, the wiring conductor 13 is arranged adjacent to the mounting region 1a, and is connected to the electrode 5a of the image pickup device 5 and the bonding wire 6 or the like, the external electrode provided on the lower surface of the base portion 1, and the electrical connection between them. In order to make a connection, an internal wiring provided between insulating layers, a through conductor that connects the upper and lower wirings through the insulating layer, and the like are included. In the example shown in FIG. 3, the frame body portion 12 has a stepped portion inside, and the wiring conductor 13 is provided from the upper surface of the stepped portion of the frame body portion 12 to the lower surface of the base body portion 11. It is also possible to provide the wiring conductor 13 from a region adjacent to the mounting region 1 a on the upper surface of the base portion 11 to the lower surface of the base portion 11 with the frame body portion 12 having no stepped portion.

配線導体13は、例えば、タングステン、モリブデン、銅、銀等の金属粉末を用いたメタライズ層として形成される。配線導体13の露出する表面には、配線導体13の保護および撮像素子5との接続のためのボンディングワイヤあるいは外部回路との接続のためのはんだ等との接合性を向上させるために、例えば、ニッケルおよび金のめっき被膜を形成
することができる。
The wiring conductor 13 is formed as a metallized layer using a metal powder such as tungsten, molybdenum, copper, or silver. In order to improve the bondability to the exposed surface of the wiring conductor 13 with the bonding wire for protection of the wiring conductor 13 and the connection with the imaging element 5 or the solder for connection with an external circuit, for example, Nickel and gold plating films can be formed.

セラミック配線基板1の基体部11および枠体部12が、例えば、酸化アルミニウム質焼結体から成る場合であれば、以下のようにして作製することができる。まず、アルミナ(Al23)またはシリカ(SiO2)、カルシア(CaO)、マグネシア(MgO)等
の原料粉末に適当な有機溶剤、溶媒等を添加混合して泥漿状とし、これを周知のドクターブレード法またはカレンダーロール法等を用いてシート状に成形して絶縁層となるセラミックグリーンシート(以下、グリーンシートともいう)を得ることができる。
If the base body portion 11 and the frame body portion 12 of the ceramic wiring substrate 1 are made of, for example, an aluminum oxide sintered body, they can be manufactured as follows. First, an appropriate organic solvent, solvent, etc. are added to and mixed with raw material powders such as alumina (Al 2 O 3 ) or silica (SiO 2 ), calcia (CaO), magnesia (MgO), etc. A ceramic green sheet (hereinafter also referred to as a green sheet) that is formed into a sheet shape by using a doctor blade method or a calender roll method and becomes an insulating layer can be obtained.

セラミックグリーンシートの表面に配線導体13用の導体ペーストを印刷して配線導体パターンを形成する。貫通導体を設ける場合は、導体ペーストの印刷に先立って、グリーンシートに貫通孔を形成しておき、この貫通孔を導体ペーストで充填しておく。導体ペーストは、上記したような金属粉末と有機溶剤やバインダー等の有機成分とを混練して作製することができる。   A conductor paste for the wiring conductor 13 is printed on the surface of the ceramic green sheet to form a wiring conductor pattern. When the through conductor is provided, a through hole is formed in the green sheet prior to the printing of the conductor paste, and the through hole is filled with the conductor paste. The conductor paste can be prepared by kneading the metal powder as described above and an organic component such as an organic solvent or a binder.

その後、配線導体パターンが形成されたグリーンシートを複数枚積層して積層体を作製し、この積層体を、例えば、約1600(℃)の温度で焼成することによりセラミック配線基板1が製作される。   Thereafter, a plurality of green sheets on which wiring conductor patterns are formed are laminated to produce a laminate, and the laminate is fired at a temperature of, for example, about 1600 (° C.), whereby the ceramic wiring substrate 1 is produced. .

枠状部材2は、接合部材7を介してセラミック配線基板1の枠体部12の上面に接合されている。例えば、鉄ニッケル合金またはステンレス等の金属材料からなり、枠体部12の開口と同じかそれ以上の大きさの開口を有する板状のものである。枠状部材2は、平面視で枠状部材2の開口内に枠体部12の開口部が位置するように配置されている。また、枠状部材2は、平面透視でセラミック配線基板1からはみ出した部分、セラミック配線基板1の側面よりも外側に突出する突出部2aを有している。   The frame-shaped member 2 is bonded to the upper surface of the frame body portion 12 of the ceramic wiring substrate 1 via the bonding member 7. For example, it is made of a metal material such as iron-nickel alloy or stainless steel, and has a plate shape having an opening having the same size as or larger than the opening of the frame body portion 12. The frame-shaped member 2 is disposed so that the opening of the frame body 12 is positioned in the opening of the frame-shaped member 2 in plan view. Further, the frame-like member 2 has a portion protruding from the ceramic wiring substrate 1 in a plan view, and a protruding portion 2 a that protrudes outward from the side surface of the ceramic wiring substrate 1.

また、枠状部材2は、図1〜図3に示す例のように、筐体等の光学部材との位置合わせを行なうために複数の位置合わせ穴2bを有しており、また、取り付け用部材としての機能を有している。この位置合わせ穴2bは、突出部2aに設けられている。なお、位置合わせ穴2bの個数、形状、位置等は、筐体等の光学部材等の構成等を考慮して適宜設定される。   Moreover, the frame-like member 2 has a plurality of alignment holes 2b for alignment with optical members such as a housing as in the examples shown in FIGS. It has a function as a member. This alignment hole 2b is provided in the protrusion 2a. Note that the number, shape, position, and the like of the alignment holes 2b are appropriately set in consideration of the configuration of an optical member such as a housing.

また、位置合わせ穴2bを基準として撮像素子5の位置を決めて搭載領域1aに接合すると、撮像素子5と撮像装置10の上方に設けられる筐体等の光学部品に位置合わせ穴2bを介して高精度に配置することができるようになるので、カメラ装置の光学系の精度を高めることができるようになるので、組立後の調整を少なくできるようになる。   Further, when the position of the image sensor 5 is determined with reference to the alignment hole 2b and joined to the mounting area 1a, the optical element such as a housing provided above the image sensor 5 and the image pickup apparatus 10 is positioned via the alignment hole 2b. Since it can arrange | position with high precision, since the precision of the optical system of a camera apparatus can be raised now, it becomes possible to reduce the adjustment after an assembly.

また、図に示したような位置合わせ穴2bのような枠状部材2を貫通する孔ではなく、枠状部材2の外周部に切欠きを設けてもよい。また、枠状部材2は図1〜図3に示す例では、外形は長方形状であるが、これに限られるものではなく、例えば長方形の辺の一部が突出した形状、すなわち辺より幅の小さい突出部2aを有していてもよい。また、図1〜図3に示す例における枠状部材2は、平面視が長方形状のセラミック配線基板1の一対の短辺のそれぞれの側面より外側に突出する突出部2aを有しているが、長辺から突出する突出部2aを有していてもよい。このように、枠状部材2の形状は、配線基板1および撮像装置100が取り付けられる筐体等の光学部材等の構成等を考慮して適宜設定される。   Moreover, you may provide a notch in the outer peripheral part of the frame-shaped member 2 instead of the hole which penetrates the frame-shaped member 2 like the alignment hole 2b as shown in the figure. In the example shown in FIGS. 1 to 3, the outer shape of the frame-shaped member 2 is a rectangular shape, but the shape is not limited to this. You may have the small protrusion part 2a. Moreover, although the frame-shaped member 2 in the example shown in FIGS. 1-3 has the protrusion part 2a which protrudes outside from each side surface of a pair of short side of the ceramic wiring board 1 of planar view rectangular shape. In addition, it may have a protruding portion 2a protruding from the long side. As described above, the shape of the frame-like member 2 is appropriately set in consideration of the configuration of an optical member or the like such as a housing to which the wiring board 1 and the imaging device 100 are attached.

枠状部材2は、例えば、金属板をプレス打ち抜き加工することよって基本的な枠状金属板にすることで行なわれる。このときに突出部2aおよび位置合わせ穴2bも同時に形成することができる。枠状部材2の上面を、枠体部12の上面からの高さが、枠体部12の辺の中央部における高さHsより枠体部12の角部における高さHcの方が低い板状とす
るには、例えば、以下のようにして行なう。図5(a)および図5(b)に示す例のような、枠状部材2の上面が段差を有するものである場合は、例えば、上面を研削加工してもよいし、プレス加工によって角部を押しつぶしてもよい。図5(c)に示す例のような、枠状部材2の上面における辺の中央部が凸の湾曲面となっている場合は、上面を研削加工してもよいし、プレス加工によって上面全体を凸曲面にしてもよい。図6に示す例のように枠状部材2が上側に凸に反っている場合は、上面を凸面に、下面を凹面に研削加工してもよいし、プレス加工によって全体を湾曲させてもよい。あるいは、金属板をプレス加工する際にスプリングバックが押さえられる引張成形プレス加工とし、枠体の金型を辺中央部が角部に比べて凸に反るような形状としてもよい。
The frame-shaped member 2 is performed, for example, by forming a basic frame-shaped metal plate by press punching a metal plate. At this time, the protruding portion 2a and the alignment hole 2b can be formed simultaneously. The upper surface of the frame-shaped member 2 is a plate whose height from the upper surface of the frame body portion 12 is lower than the height Hs at the center of the side of the frame body portion 12 at the corner H of the frame body portion 12. For example, the following is performed. When the upper surface of the frame-like member 2 has a step as in the example shown in FIGS. 5A and 5B, for example, the upper surface may be ground, or the corners may be formed by pressing. The part may be crushed. When the central part of the side on the upper surface of the frame-shaped member 2 is a convex curved surface as in the example shown in FIG. 5 (c), the upper surface may be ground, or the entire upper surface may be formed by pressing. May be a convex curved surface. When the frame-like member 2 is warped upward as in the example shown in FIG. 6, the upper surface may be ground into a convex surface, and the lower surface may be ground into a concave surface, or the whole may be curved by pressing. . Or it is good also as a tension-molding press process by which a spring back is hold | suppressed when pressing a metal plate, and it is good also as a shape where a side center part warps convexly compared with a corner | angular part.

また、枠状部材2は、黒染めまたは無光沢ニッケルめっき等を用いて、黒色系もしくは光の反射率が小さい暗色系の色に表面を色加工することによって、腐食防止の効果が得られ、また、不要光等の光学的な影響を抑制することができる。すなわち、枠状部材2は、上面または下面の表面に色加工することによって、枠状部材2に入射する不要光を吸収することができる。また、枠状部材2は、光の入射側である上面および撮像素子5の周辺部で反射された光が入射する下面に色加工がされていることが好ましい。   Further, the frame-like member 2 is obtained by using a black dyeing or matte nickel plating to color the surface to a black color or a dark color having a low light reflectance, thereby obtaining a corrosion prevention effect. Moreover, optical influences such as unnecessary light can be suppressed. That is, the frame-shaped member 2 can absorb unnecessary light incident on the frame-shaped member 2 by color-processing the surface of the upper surface or the lower surface. Further, the frame-like member 2 is preferably color-processed on the upper surface on the light incident side and the lower surface on which the light reflected by the peripheral portion of the imaging element 5 is incident.

枠状部材2は、接合部材7によって枠体部12の上面、すなわちセラミック配線基板1の上面に接合されている。接合部材7は、例えば樹脂接着剤、銀−銅ろう等のろう材を用いることができる。ろう材が活性金属を含む活性ろう材である場合には、枠体部12に直接接合することができ、ろう材が活性金属を含まないものである場合は、枠体部12上にメタライズ層を設けることで接合することができる。接合部材7が樹脂接着剤である場合には、樹脂接着剤は、例えば、耐湿性あるいは接合強度の観点から、後述する接合材4と同様に緻密な3次元網目構造を有するエポキシ樹脂を主成分とし、硬化剤、充填材を適宜配合するものを用いることができる。液状の樹脂接着剤を枠状部材2の下面とセラミック配線基板1の上面とで挟まれる部位に塗布等で配置し、150℃程度で加熱して樹脂接着剤を硬化させることで樹脂接着剤である接合部材7によって枠状部材2をセラミック配線基板1の上面に接合することができる。また、接合部材7が活性ろう材である場合には、銀銅ろう材となる粉末にTi等の活性金属粉を数%程度添加し、可塑剤や溶剤を加え混練することで活性ろう材ペーストを作製し、印刷による塗布等の方法で枠状部材2の下面とセラミック配線基板1の上面とで挟まれる部位に配置し、真空中でろう材が溶融する温度まで加熱して冷却して硬化させることで活性ろう材である接合部材7によって枠状部材2をセラミック配線基板1の上面に接合することができる。このとき、接着剤または活性ろう材ペーストの塗布位置、塗布量等の塗布条件の調節、あるいは加熱時間や加熱の際に加える加重等の加熱条件を調節することで、図6に示す例のように、突出部2aの下面と配線基板1の側面とを接着剤または活性ろう材で接合することができる。   The frame-shaped member 2 is bonded to the upper surface of the frame body portion 12, that is, the upper surface of the ceramic wiring substrate 1 by the bonding member 7. For the joining member 7, for example, a brazing material such as a resin adhesive or silver-copper brazing can be used. When the brazing material is an active brazing material containing an active metal, it can be joined directly to the frame body portion 12, and when the brazing material does not contain an active metal, a metallized layer is formed on the frame body portion 12. It can join by providing. When the joining member 7 is a resin adhesive, the resin adhesive is mainly composed of, for example, an epoxy resin having a dense three-dimensional network structure, similar to the joining material 4 described later, from the viewpoint of moisture resistance or joining strength. It is possible to use a material that contains a curing agent and a filler as appropriate. A liquid resin adhesive is disposed on the portion sandwiched between the lower surface of the frame-shaped member 2 and the upper surface of the ceramic wiring substrate 1 by coating or the like, and is heated at about 150 ° C. to cure the resin adhesive. The frame-shaped member 2 can be bonded to the upper surface of the ceramic wiring substrate 1 by a certain bonding member 7. Further, when the joining member 7 is an active brazing material, an active brazing material paste is obtained by adding about several percent of an active metal powder such as Ti to a powder that becomes a silver-copper brazing material, and kneading by adding a plasticizer or a solvent. Is placed in a region sandwiched between the lower surface of the frame-like member 2 and the upper surface of the ceramic wiring substrate 1 by a method such as application by printing, and is cured by heating to a temperature at which the brazing filler metal melts in a vacuum. By doing so, the frame-like member 2 can be joined to the upper surface of the ceramic wiring substrate 1 by the joining member 7 which is an active brazing material. At this time, by adjusting the application conditions such as the application position and application amount of the adhesive or the active brazing paste, or by adjusting the heating conditions such as the heating time and the weight applied at the time of heating, as in the example shown in FIG. In addition, the lower surface of the protruding portion 2a and the side surface of the wiring substrate 1 can be joined with an adhesive or an active brazing material.

蓋体3は、枠状部材2の開口部を塞ぐように枠状部材2に接合材4を介して接合され、これにより撮像素子5が気密封止されている。枠状部材2の開口部より外側の部分と重なる、蓋体3の下面の外縁部が接合される。蓋体3は、可視光を透過する材料、例えば、ソーダガラスまたはホウケイ酸ガラス等の透明なガラス材料であり、光の透過率の高いガラス材料が好ましい。また、蓋体3として、水晶板を用いることができる。水晶板は、α線やβ線の放射線の放出がほとんど無く、撮像素子5のS/Nが低下しにくいので、水晶板を蓋体3として用いた撮像装置10は、高品位の画像を得ることができる。   The lid 3 is joined to the frame-like member 2 via a joining material 4 so as to close the opening of the frame-like member 2, whereby the image sensor 5 is hermetically sealed. The outer edge portion of the lower surface of the lid 3 that overlaps the portion outside the opening of the frame-like member 2 is joined. The lid 3 is a material that transmits visible light, for example, a transparent glass material such as soda glass or borosilicate glass, and a glass material with high light transmittance is preferable. A quartz plate can be used as the lid 3. Since the quartz plate emits almost no radiation of α rays or β rays, and the S / N of the imaging element 5 is hardly lowered, the imaging device 10 using the quartz plate as the lid 3 obtains a high-quality image. be able to.

なお、枠状部材2は、接合材4による応力緩和が効果的に行われるように、蓋体3に加わる応力を低減して変形を抑制するために、その上面に接合される蓋体3に近い熱膨張係数を有する材料を用いることができる。例えば、蓋体3がソーダガラスである場合には、ソーダガラスの熱膨張係数(線熱膨張係数が約9.0×10-6/℃)に近い熱膨張係数を持つ枠状部材2の材料として、SUS430(熱膨張係数約10.4×10-6/℃)または
50アロイ(熱膨張係数約9.8×10-6/℃)を用いることができる。また、蓋体3がD263ガラス(ホウケイ酸ガラス、SCHOTT製)である場合には、D263ガラスの熱膨張係数(線熱膨張係数が約7.2×10-6/℃)に近い熱膨張係数を持つ枠状部材2の材料として、45アロイ(熱膨張係数約7.1×10-6/℃)または42アロイ(熱膨張係数約4.6×10-6/℃)を用いることができる。また、蓋体3が水晶板である場合には、水晶板の熱膨張係数(線熱膨張係数が約11×10-6/℃)に近い熱膨張係数を持つ枠状部材2の材料として、SUS430(熱膨張係数約10.4×10-6/℃)や50アロイ(熱膨張係数約9.8×10-6/℃)を用いることができる。なお、50アロイ、45アロイまたは42アロイは、鉄にニッケルを配合した合金である。
Note that the frame-like member 2 is attached to the lid 3 bonded to the upper surface thereof in order to reduce stress applied to the lid 3 and suppress deformation so that stress relaxation by the bonding material 4 is effectively performed. A material having a close thermal expansion coefficient can be used. For example, when the lid 3 is soda glass, the material of the frame-shaped member 2 having a thermal expansion coefficient close to that of soda glass (linear thermal expansion coefficient is about 9.0 × 10 −6 / ° C.). SUS430 (thermal expansion coefficient is about 10.4 × 10 −6 / ° C.) or 50 alloy (thermal expansion coefficient is about 9.8 × 10 −6 / ° C.) can be used. When the lid 3 is D263 glass (borosilicate glass, manufactured by SCHOTT), the thermal expansion coefficient close to that of D263 glass (linear thermal expansion coefficient is about 7.2 × 10 −6 / ° C.). As a material of the frame-like member 2 having 45, 45 alloy (thermal expansion coefficient: about 7.1 × 10 −6 / ° C.) or 42 alloy (thermal expansion coefficient: about 4.6 × 10 −6 / ° C.) can be used. . Further, when the lid 3 is a quartz plate, as a material of the frame-like member 2 having a thermal expansion coefficient close to that of the quartz plate (linear thermal expansion coefficient is approximately 11 × 10 −6 / ° C.), SUS430 (thermal expansion coefficient of about 10.4 × 10 −6 / ° C.) or 50 alloy (thermal expansion coefficient of about 9.8 × 10 −6 / ° C.) can be used. In addition, 50 alloy, 45 alloy, or 42 alloy is an alloy which mix | blended nickel with iron.

また、枠状部材2と蓋体3とは、封止材としても機能する接合材4で互いに接合されている。接合材4は、例えば、樹脂接着剤から成る。樹脂接着剤は、耐湿性あるいは接合強度の観点から、緻密な3次元網目構造を有するエポキシ樹脂を主成分とすることができる。樹脂接着剤は、例えば、ビスフェノールA型エポキシ樹脂、ビスフェノールA変性エポキシ樹脂、ビスフェノールF型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、特殊ノボラック型エポキシ樹脂、フェノール誘導体エポキシ樹脂、ビフェノール骨格型エポキシ樹脂等のエポキシ樹脂であり、これらのエポキシ樹脂に、イミダゾール系、アミン系、リン系、ヒドラジン系、イミダゾールアダクト系、アミンアダクト系、カチオン重合系またはジシアンジアミド系等の硬化剤を添加したもので構成されている。なお、接合材4は、2種以上のエポキシ樹脂を混合して用いてもよい。   Further, the frame-like member 2 and the lid 3 are joined to each other by a joining material 4 that also functions as a sealing material. The bonding material 4 is made of, for example, a resin adhesive. The resin adhesive can be mainly composed of an epoxy resin having a dense three-dimensional network structure from the viewpoint of moisture resistance or bonding strength. Resin adhesives include, for example, bisphenol A type epoxy resin, bisphenol A modified epoxy resin, bisphenol F type epoxy resin, phenol novolac type epoxy resin, cresol novolac type epoxy resin, special novolac type epoxy resin, phenol derivative epoxy resin, biphenol skeleton Epoxy resins such as type epoxy resins, which are added with curing agents such as imidazole, amine, phosphorus, hydrazine, imidazole adduct, amine adduct, cationic polymerization, or dicyandiamide. It consists of Note that the bonding material 4 may be a mixture of two or more epoxy resins.

また、接合材4は、蓋体3と枠状部材2との熱膨張係数差による応力を緩和するために、弾性率が低い材料を用いることができる。接合材4は、例えば、樹脂接着剤100質量%に充填剤として、例えばアクリル系ゴム粒子等を外添加で50(%)以下程度添加することで弾性率を5GPa以下としたものを用いることができる。   Moreover, in order to relieve the stress due to the difference in thermal expansion coefficient between the lid 3 and the frame-like member 2, the bonding material 4 can be made of a material having a low elastic modulus. As the bonding material 4, for example, a material having an elastic modulus of 5 GPa or less by adding about 50 (%) or less of externally added acrylic rubber particles or the like as a filler to 100% by mass of the resin adhesive is used. it can.

枠状部材2と蓋体3とを、上述の樹脂接着剤からなる接合材4を用いて接合する方法は例えば以下のようなものである。まず、スクリーン印刷等の従来公知の手法を用いて、枠状部材2の開口部の周囲もしくは蓋体3の外周縁部の全周に樹脂接着材を形成して、枠状部材2と蓋体3とを接合する。そして、熱または紫外線等を用いて樹脂接着剤を硬化させることで、枠状部材2と蓋体3とが接合材4を介して接合されることになる。   A method of joining the frame-like member 2 and the lid 3 using the joining material 4 made of the above-described resin adhesive is, for example, as follows. First, using a conventionally known method such as screen printing, a resin adhesive is formed around the opening of the frame-shaped member 2 or the entire periphery of the outer peripheral edge of the lid 3, and the frame-shaped member 2 and the lid 3 is joined. The frame-shaped member 2 and the lid 3 are bonded via the bonding material 4 by curing the resin adhesive using heat or ultraviolet rays.

撮像素子5は、例えば、CMOSまたはCCD等であり、図1〜図3に示す例のように、セラミック配線基板1の搭載領域1aに搭載されるとともに撮像装置用基板10の配線導体13に電気的に接続されている。撮像素子5は、搭載領域1aに接着材等を介して固定され、ボンディングワイヤで基体部11に設けられた配線導体13に電気的に接続されている。なお、撮像素子5は、フリップチップ方式で基体部11に搭載されていてもよい。   The imaging element 5 is, for example, a CMOS or a CCD, and is mounted on the mounting region 1a of the ceramic wiring substrate 1 and electrically connected to the wiring conductor 13 of the imaging device substrate 10 as in the example shown in FIGS. Connected. The image sensor 5 is fixed to the mounting region 1a via an adhesive or the like, and is electrically connected to the wiring conductor 13 provided on the base portion 11 with a bonding wire. Note that the image sensor 5 may be mounted on the base body 11 by a flip chip method.

本発明は以上の実施の形態の例に限定されるものではなく、本発明の要旨を逸脱しない範囲内で種々の変更および改良が可能である。   The present invention is not limited to the embodiments described above, and various modifications and improvements can be made without departing from the scope of the present invention.

1・・・セラミック配線基板
1a・・・搭載領域
11・・・基体部
12・・・枠体部
13・・・配線導体
2・・・枠状部材
2a・・・突出部
2b・・・位置合わせ穴
3・・・蓋体
4・・・接合材
5・・・撮像素子
5a・・・電極
6・・・ボンディングワイヤ
7・・・接合部材
10・・・撮像装置用基板
100・・・撮像装置
DESCRIPTION OF SYMBOLS 1 ... Ceramic wiring board 1a ... Mounting area | region 11 ... Base | substrate part 12 ... Frame body part 13 ... Wiring conductor 2 ... Frame-shaped member 2a ... Protrusion part 2b ... Position Matching hole 3 ... Lid 4 ... Bonding material 5 ... Imaging element 5a ... Electrode 6 ... Bonding wire 7 ... Joining member 10 ... Substrate for imaging device 100 ... Imaging apparatus

Claims (7)

上面に撮像素子の搭載領域を有し平面視で矩形状の基体部、および該基体部上に設けられて前記搭載領域を囲む、平面視で矩形状の枠体部を含むセラミック配線基板と、
前記枠体部の上面に接合部材を介して接合されており、前記セラミック配線基板の側面よりも外側に突出する突出部を有している、金属から成る枠状部材と、
を備えており、
該枠状部材の前記上面は、前記枠体部の上面からの高さが、前記枠体部の辺の中央部における高さより前記枠体部の角部における高さの方が低い撮像装置用基板。
A ceramic wiring board having a mounting area for the imaging element on the upper surface and having a rectangular base in plan view, and a rectangular frame body in plan view provided on the base and surrounding the mounting area;
A frame-shaped member made of metal, which is bonded to the upper surface of the frame body portion via a bonding member, and has a protruding portion protruding outward from the side surface of the ceramic wiring board;
With
For the imaging device, the upper surface of the frame-shaped member is lower in height from the upper surface of the frame body portion than in a central portion of the side of the frame body portion at a corner portion of the frame body portion. substrate.
前記枠状部材の前記上面は、前記辺の中央部から前記角部にかけて徐々に高さが低くなっている請求項1に記載の撮像装置用基板。   The imaging device substrate according to claim 1, wherein the height of the upper surface of the frame-like member gradually decreases from a central portion of the side to the corner portion. 前記枠状部材の前記上面は、辺の中央部が凸の湾曲面である請求項2に記載の撮像装置用基板。   The imaging device substrate according to claim 2, wherein the upper surface of the frame-shaped member is a curved surface having a convex central portion of a side. 前記枠状部材は上側に凸に反っている請求項3に記載の撮像装置用基板。   The imaging device substrate according to claim 3, wherein the frame-shaped member is warped upward. 前記枠状部材の突出部の下面と前記セラミック配線基板の側面とが前記接合部材で接合されている請求項1乃至請求項4のいずれかに記載の撮像装置用基板。   The imaging device substrate according to claim 1, wherein a lower surface of the projecting portion of the frame-shaped member and a side surface of the ceramic wiring substrate are joined by the joining member. 請求項1乃至請求項5のいずれかに記載の撮像装置用基板と、該撮像装置用基板の前記搭載領域に搭載された撮像素子と、前記枠状部材の前記上面に接合材で接合され、前記枠状部材の開口を塞いでいる平面視で矩形状の蓋体とを備えている撮像装置。   The imaging device substrate according to any one of claims 1 to 5, an imaging device mounted on the mounting region of the imaging device substrate, and the upper surface of the frame-shaped member are bonded with a bonding material, An image pickup apparatus comprising: a lid having a rectangular shape in a plan view that closes an opening of the frame-shaped member. 前記接合材は、前記蓋体の角部における厚みが前記蓋体の辺の中央部における厚みより厚い請求項6に記載の撮像装置。   The imaging apparatus according to claim 6, wherein the bonding material has a thickness at a corner portion of the lid body larger than a thickness at a central portion of the side of the lid body.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013027669A1 (en) * 2011-08-22 2013-02-28 京セラ株式会社 Optical semiconductor device
JP2013243339A (en) * 2012-04-27 2013-12-05 Canon Inc Electronic component, electronic module, and manufacturing method of these
JP2014192492A (en) * 2013-03-28 2014-10-06 Kyocera Corp Package for storing electronic element and electronic device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013027669A1 (en) * 2011-08-22 2013-02-28 京セラ株式会社 Optical semiconductor device
JP2013243339A (en) * 2012-04-27 2013-12-05 Canon Inc Electronic component, electronic module, and manufacturing method of these
JP2014192492A (en) * 2013-03-28 2014-10-06 Kyocera Corp Package for storing electronic element and electronic device

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