JP2018150591A - Mask manufacturing apparatus and mask manufacturing method - Google Patents

Abstract

A mask manufacturing apparatus is provided that prevents distortion or the like from occurring when tension is applied to a mask sheet. A first holding part (22) holding one end of a mask sheet between a first fixed grip part and a first movable grip part, and a second fixed grip part and a second movable grip part holding the other end of the mask sheet. and a tensioning section that moves the first and second clamping sections away from each other to apply a first tension or a second tension that is greater than the first tension to the mask sheet. Then, in a state in which one end and the other end of the mask sheet are temporarily fixed by the first clamping portion and the second clamping portion, the first tension is applied to the mask sheet to apply the first tension to the first fixed grip portion and the second fixed grip portion. The second tension is applied in a state in which one end and the other end of the mask sheet are clamped by a correction section that corrects the posture of the mask sheet and the first clamping section and the second clamping section with a clamping force stronger than that of the temporary fixing. and a mounting portion for mounting the mask sheet to the mask frame. [Selection drawing] Fig. 1

Description

  The present invention relates to a mask manufacturing apparatus for manufacturing a metal mask and a mask manufacturing method using the mask manufacturing apparatus.

  Conventionally, when manufacturing a metal mask that is used when vacuum-depositing an organic light emitting layer in an organic EL device manufacturing process, a thin metal plate to which a certain tension is applied is attached to a frame (metal mask frame) by a clamp mechanism. 2. Description of the Related Art A metal thin plate frame pasting apparatus is known (for example, see Patent Document 1).

JP 2004-31335 A

  By the way, in the frame pasting apparatus (mask manufacturing apparatus) described in Patent Document 1 and the like, one end of a metal thin plate (metal mask sheet) is held by one clamp, and the other end of the metal mask sheet is held by the other clamp. Tension is applied to the metal mask sheet by sandwiching and pulling them in directions away from each other. However, when at least one of the one end portion and the other end portion of the metal mask sheet is sandwiched with the posture shifted and tension is applied to the metal mask sheet, the metal mask sheet is distorted, bent, or wrinkled. Therefore, the metal mask sheet is attached to the metal mask frame in a state in which the metal mask sheet is distorted, bent or wrinkled, and the accuracy of the manufactured metal mask is deteriorated.

  An object of the present invention is to provide a mask manufacturing apparatus and a mask manufacturing method using the mask manufacturing apparatus that can prevent the occurrence of distortion and the like when tension is applied to a metal mask sheet.

  The mask manufacturing apparatus of the present invention is a mask manufacturing apparatus for manufacturing a metal mask by attaching a metal mask sheet to a metal mask frame, and includes a first fixed grip portion and a first movable grip portion, and the first mask. A movable grip portion is moved relative to the first fixed grip portion, and a first clamping portion that clamps one end portion of the metal mask sheet between the first fixed grip portion and the first movable grip portion, and a second fixed portion A grip portion and a second movable grip portion, wherein the second movable grip portion is moved relative to the second fixed grip portion, and the other end portion of the metal mask sheet is moved to the second fixed grip portion and the second fixed grip portion. The metal mask sheet is moved by moving the second sandwiching portion sandwiched between the two movable grip portions, and the first sandwiching portion and the second sandwiching portion in a direction away from each other. A tension portion that applies a first tension or a second tension greater than the first tension, and one end portion of the metal mask sheet are temporarily fixed by the first clamping portion, and the other end portion of the metal mask sheet is the second tension portion. In a state of being temporarily fixed by the sandwiching portion, the first tension is applied to the metal mask sheet at the tension portion to correct the posture of the metal mask sheet with respect to the first fixed grip portion and the second fixed grip portion. The correction unit and one end of the metal mask sheet are clamped by the first clamping unit with a clamping force stronger than that of temporary fixing, and the other end of the metal mask sheet is clamped by the second clamping unit with a clamping force stronger than that of temporary fixing. An attachment portion for attaching the metal mask sheet, to which the second tension is applied in the tension portion, to the metal mask frame in a state of being sandwiched. .

  In the mask manufacturing apparatus according to the present invention, the first fixed grip portion includes a first suction portion, the second fixed grip portion includes a second suction portion, and one end portion of the metal mask sheet includes the first suction portion. The other end of the metal mask sheet is temporarily fixed by being adsorbed to the second adsorbing part.

  Further, in the mask manufacturing apparatus of the present invention, the first adsorption unit includes a first porous adsorbent, and a first suction unit that sucks one end of the metal mask sheet through the first porous adsorbent. The second adsorbing part includes a second porous adsorbing material and a second sucking part for sucking the other end of the metal mask sheet through the second porous adsorbing material. To do.

  In addition, the mask manufacturing apparatus of the present invention includes a first air cylinder and a first electropneumatic regulator that adjusts the pressure of compressed air supplied to the first air cylinder to a first pressure or a second pressure different from the first pressure. A second air cylinder, and a second electropneumatic regulator that adjusts the pressure of the compressed air supplied to the second air cylinder to a third pressure or a fourth pressure different from the third pressure. When the correction is performed by the correction unit, the clamping unit moves the first movable grip portion with respect to the first fixed grip portion by the air pressure of the first air cylinder adjusted to the first pressure in the first electropneumatic regulator. The first air cylinder adjusted to the second pressure in the first electropneumatic regulator when temporarily attaching one end portion of the metal mask sheet and attaching by the attachment portion The first movable grip portion is moved with respect to the first fixed grip portion by air pressure of the metal mask, and one end portion of the metal mask sheet is clamped with a clamping force stronger than temporary fixing, and the second clamping portion is the correction unit. When the correction is performed, the second movable grip portion is moved relative to the second fixed grip portion by the air pressure of the second air cylinder adjusted to the third pressure in the second electropneumatic regulator, and the metal mask The other end portion of the seat is temporarily fixed, and when the attachment portion is attached, the second movable grip portion is attached to the second movable grip portion by the air pressure of the second air cylinder adjusted to the fourth pressure in the second electropneumatic regulator. 2 It moves with respect to a fixed grip part, The other end part of the said metal mask sheet | seat is clamped with the clamping force stronger than temporary fixation.

  In the mask manufacturing apparatus of the present invention, the first pressure and the third pressure are the same, and the second pressure and the fourth pressure are the same.

  The mask manufacturing method of the present invention is a mask manufacturing method for manufacturing a metal mask, wherein the first holding step of temporarily fixing one end portion of the metal mask sheet in the first holding portion, and the second holding portion in the first holding portion. A second temporary fixing step of temporarily fixing the other end of the metal mask sheet; and one end of the metal mask sheet temporarily fixed in the first temporary fixing step and the metal temporarily fixed in the second temporary fixing step. A first tension is applied to the metal mask sheet by moving the other end portion of the mask sheet away from each other, and the posture of the metal mask sheet with respect to the first sandwiching portion and the second sandwiching portion is corrected. A clamping force stronger than the temporary fixing in the first temporary fixing step, the correcting step and one end portion of the metal mask sheet whose posture is corrected in the correcting step The first clamping step of clamping in the first clamping unit, and the other end portion of the metal mask sheet whose posture has been corrected in the correction step with a clamping force stronger than the temporary fixing in the second temporary fixing step. The second clamping step of clamping in the two clamping portions, the one end portion of the metal mask sheet clamped in the first clamping step, and the other end portion of the metal mask sheet clamped in the second clamping step are separated from each other A tension applying step for applying a second tension larger than the first tension to the metal mask sheet by moving the metal mask sheet, and the metal mask sheet to which the second tension is applied in the tension applying step. And an attaching process to be attached to.

  Further, in the mask manufacturing method of the present invention, the first temporary fixing step includes a first fixed grip portion including a first porous adsorbent and a first suction portion, and a first end portion of the metal mask sheet is placed on the first fixed grip portion. A first step of sucking one end portion of the metal mask sheet placed on the first fixed grip portion in the first placing step through the first porous adsorbent in the first placing step; A first adsorption step for adsorbing the first porous adsorbent on the second fixed grip portion including the second porous adsorbent and the second suction portion. A second placing step of placing the other end portion of the sheet; and the second porous adsorbent for the other end portion of the metal mask sheet placed on the second fixed grip portion in the second placing step. By the second suction part through Characterized in that it comprises a second adsorption step of adsorbing to said second porous adsorbent.

  In the mask manufacturing method of the present invention, the first temporary fixing step may be configured such that the first movable grip portion is changed to the first fixed grip portion by the air pressure of the first air cylinder adjusted to the first pressure in the first electropneumatic regulator. The second movable grip portion is moved by the second air cylinder adjusted to the third pressure in the second electropneumatic regulator by temporarily fixing one end portion of the metal mask sheet. Is moved relative to the second fixed grip portion, the other end portion of the metal mask sheet is temporarily fixed, and the first clamping step is adjusted to a second pressure different from the first pressure in the first electropneumatic regulator. The first movable grip portion is moved with respect to the first fixed grip portion by the air pressure of the first air cylinder, and the second end of the metal mask sheet is clamped, and the second The holding step moves the second movable grip portion with respect to the second fixed grip portion by the air pressure of the second air cylinder adjusted to a fourth pressure different from the third pressure in the second electropneumatic regulator. The other end of the metal mask sheet is sandwiched.

  The mask manufacturing method of the present invention is characterized in that the first pressure and the third pressure are the same, and the second pressure and the fourth pressure are the same.

  ADVANTAGE OF THE INVENTION According to this invention, the mask manufacturing method which can prevent generation | occurrence | production of distortion etc. when a tension | tensile_strength is provided to a metal mask sheet, and the mask manufacturing method using this mask manufacturing apparatus can be provided.

It is a front view which shows schematic structure of the metal mask manufacturing apparatus which concerns on 1st Embodiment. It is a top view which shows schematic structure of the metal mask manufacturing apparatus concerning 1st Embodiment. It is a figure which shows the metal mask manufactured by the metal mask manufacturing apparatus concerning 1st Embodiment. It is a figure which shows the structure of the 1st clamping apparatus which concerns on 1st Embodiment. It is a block diagram which shows the system configuration | structure of the metal mask manufacturing apparatus which concerns on 1st Embodiment. It is a figure for demonstrating the attitude | position correction | amendment of a metal mask sheet in 1st Embodiment. It is a flowchart for demonstrating the metal mask manufacturing method using the metal mask manufacturing apparatus which concerns on 1st and 2nd embodiment. It is a figure which shows the structure of the 1st clamping apparatus which concerns on 2nd Embodiment. It is a figure which shows the structure of the fixed grip part which concerns on 2nd Embodiment. It is a figure for demonstrating the attitude | position correction | amendment of a metal mask sheet in 2nd Embodiment. It is a figure for demonstrating temporary fixation and fixation of a metal mask sheet in 2nd Embodiment.

  Hereinafter, with reference to the drawings, regarding a mask manufacturing apparatus according to a first embodiment of the present invention, a metal mask for manufacturing a metal mask used when vacuum-depositing an organic light emitting layer in an organic EL element manufacturing process A manufacturing apparatus will be described as an example. FIG. 1 is a front view showing a schematic configuration of a metal mask manufacturing apparatus according to the first embodiment, and FIG. 2 is a plan view showing a schematic configuration of the metal mask manufacturing apparatus according to the first embodiment. In the following description, the XYZ orthogonal coordinate system shown in FIG. 1 is set, and the positional relationship of each member will be described with reference to this orthogonal coordinate system. The XY plane is set to a plane parallel to the horizontal plane on which the metal mask manufacturing apparatus is placed, and the Z axis is set to the vertical direction.

  The metal mask manufacturing apparatus 2 is an apparatus for manufacturing a metal mask 16 (see FIG. 3) by attaching a strip-shaped metal mask sheet 18 (see FIG. 3) to a frame-shaped metal mask frame 20 (see FIG. 3). The table unit 4, the first clamping device 6, the guide rails 8 a and 8 b, the second clamping device 10, the guide rails 12 a and 12 b, and the base 14 are provided.

  The table part 4 is a rectangular flat plate, and the metal mask frame 20 is placed so as to be parallel to the XY plane. The first clamping device 6 is a device for clamping one end portion (the end portion on the + X direction side) of the belt-shaped metal mask sheet 18, and the guide rails 8 a and 8 b move the first clamping device 6 in the ± Y direction. Support slidable. The second holding device 10 is a device for holding the other end portion (the end portion on the −X direction side) of the metal mask sheet 18, and the guide rails 12 a and 12 b move the second holding device 10 in the ± Y direction. Support slidable. The first clamping device 6 is disposed on the + X direction side of the table unit 4, and the second clamping device 10 is disposed on the −X direction side of the table unit 4 so as to face each other. The 1st clamping apparatus 6 and the 2nd clamping apparatus 10 comprise the correction apparatus which correct | amends the attitude | position in the XY plane of the metal mask sheet 18 by giving 1st tension | tensile_strength to the metal mask sheet 18 as a pair of sets. The 1st clamping apparatus 6 and the 2nd clamping apparatus 10 give the 1st tension | tensile_strength or 2nd tension | tensile_strength to the metal mask sheet | seat 18 by moving the 1st clamping apparatus 6 and the 2nd clamping apparatus 10 in the direction which mutually spaces apart. Constituting a tensioning device. The first tension and the second tension are different tensions, and the second tension is larger than the first tension.

  FIG. 3 is a diagram illustrating a metal mask manufactured by the metal mask manufacturing apparatus 2 according to the embodiment. As shown in FIG. 3, the metal mask 16 is manufactured by sequentially sticking both ends of a plurality of metal mask sheets 18 to two opposite sides constituting a frame-shaped metal mask frame 20 by the metal mask manufacturing apparatus 2. It is used when vacuum-depositing an organic material in the manufacturing process of the organic EL element.

  FIG. 4 is a diagram illustrating a configuration of the first clamping device 6 according to the embodiment. As shown in FIG. 4, the first clamping device 6 includes a clamping unit 22, an air cylinder 28, an electropneumatic regulator 30, a linear motion cam 32, a follower roller 34, a ball screw 36, a ball nut 37, a motor 38, and a linear A guide rail 58 is provided.

  The sandwiching portion 22 has a fixed grip portion 24 and a movable grip portion 26. The fixed grip 24 has a clamping surface 24a (see FIG. 6) that is parallel to the XY plane and exposed in the + Z direction. The movable grip portion 26 has a sandwiching surface that is parallel to the XY plane and exposed in the −Z direction, and is configured to be movable in the ± Z direction with respect to the fixed grip portion 24. The sandwiching portion 22 moves the movable grip portion 26 in the −Z direction with respect to the fixed grip portion 24, so that one end portion (the end on the + X direction side) of the metal mask sheet 18 placed on the sandwiching surface 24 a of the fixed grip portion 24. Are clamped between the clamping surface 24 a of the fixed grip portion 24 and the clamping surface of the movable grip portion 26.

  The electropneumatic regulator 30 adjusts the pressure of the compressed air supplied to the air cylinder 28 to be the first pressure or the second pressure. The first pressure and the second pressure are different pressures. In this embodiment, the first pressure is smaller than the second pressure. When compressed air adjusted to the first pressure or the second pressure in the electropneumatic regulator 30 is supplied to the air cylinder 28, the linear cam 32 moves a predetermined amount in the −X direction based on the air pressure of the air cylinder 28. The movable grip portion 26 moves through the follower roller 34 by a predetermined amount in the −Z direction based on the movement amount of the linear cam 32. When the compressed air in the air cylinder 28 is discharged, the linear cam 32 moves in the + X direction and returns to the original position, and the movable grip portion 26 moves in the + Z direction via the follower roller 34. Return to the original position. That is, the movable grip portion 26 moves with respect to the fixed grip portion 24 by the air pressure of the air cylinder 28.

  The amount of movement of the direct acting cam 32 and the movable grip portion 26 when the air pressure in the air cylinder 28 is the first pressure is the same as the amount of movement of the direct acting cam 32 and the movable grip portion when the air pressure in the air cylinder 28 is the second pressure. 26 is smaller than the moving amount. Therefore, when the air pressure in the air cylinder 28 is the first pressure, the clamping unit 22 temporarily fixes one end of the metal mask sheet 18 with the first clamping force, and when the air pressure in the air cylinder 28 is the second pressure, One end of the metal mask sheet 18 is fixed with a second clamping force stronger than the first clamping force.

  The motor 38 rotates the ball screw 36. A ball nut 37 is attached to the end of the ball screw 36 on the −X direction side. The linear guide rail 58 supports the holding portion 22, the air cylinder 28, the electropneumatic regulator 30, the linear motion cam 32, the follower roller 34, and the ball nut 37 so as to be slidable in the ± X directions. Therefore, when the ball screw 36 is rotated, the clamping part 22, the air cylinder 28, the electropneumatic regulator 30, the linear motion cam 32, the follower roller 34, and the ball nut 37 (hereinafter referred to as the clamping part 22 or the like) are integrated. And move in the ± X direction along the linear guide rail 58.

  As shown in FIG. 1, the second clamping device 10 includes a clamping part 42, an air cylinder 44, an electropneumatic regulator 56 (see FIG. 5), a linear motion cam 46, a follower roller 48, a ball screw 50, a ball nut 52, A motor 54 and a linear guide rail 64 are provided. The configurations of the clamping unit 42, the air cylinder 44, the electropneumatic regulator 56, the linear motion cam 46, the follower roller 48, the ball screw 50, the ball nut 52, the motor 54, and the linear guide rail 64 of the second clamping device 10 are as follows: The center line in the longitudinal direction (Y direction) of the table part 4 is axisymmetric, and the clamping part 22, the air cylinder 28, the electropneumatic regulator 30, the linear motion cam 32, and the follower roller 34 of the first clamping apparatus 6 shown in FIG. The configurations of the ball screw 36, the ball nut 37, the motor 38, and the linear guide rail 58 are the same.

  The clamping unit 42 of the second clamping device 10 fixes the other end (the end on the −X direction side) of the metal mask sheet 18 placed on the clamping surface 43a (see FIG. 6) of the fixed grip unit 43. It is clamped between the clamping surface 43a of the grip part 43 and the clamping surface of the movable grip part. Further, the electropneumatic regulator 56 of the second clamping device 10 adjusts the pressure of the compressed air supplied to the air cylinder 44 so as to become the third pressure or the fourth pressure. When the air pressure in the air cylinder 44 is the third pressure, the amount of movement of the linear cam 46 and the movable grip portion is the amount of movement of the linear cam 46 and the movable grip portion when the air pressure in the air cylinder 44 is the fourth pressure. Smaller than. Therefore, when the air pressure in the air cylinder 44 is the third pressure, the clamping unit 42 temporarily fixes the other end of the metal mask sheet 18 with the third clamping force, and the air pressure in the air cylinder 44 is the fourth pressure. The other end of the metal mask sheet 18 is fixed with a fourth clamping force stronger than the third clamping force. In this embodiment, the first pressure and the third pressure are the same, and the first clamping force and the third clamping force are the same, but they may not be the same. In this embodiment, the second pressure and the fourth pressure are the same, and the second clamping force and the fourth clamping force are the same, but they need not be the same.

  FIG. 5 is a block diagram showing a system configuration of the metal mask manufacturing apparatus 2. As shown in FIG. 5, the metal mask manufacturing apparatus 2 includes a control unit 40 that comprehensively controls each part of the metal mask manufacturing apparatus 2, particularly each part of the first clamping device 6 and each part of the second clamping device 10. Yes. The control unit 40 is connected to the motor 38 of the first clamping device 6 and the electropneumatic regulator 30. The controller 40 is connected to the motor 54 and the electropneumatic regulator 56 of the second holding device 10.

  The control unit 40 controls driving of the electropneumatic regulators 30 and 56. In other words, the control unit 40 adjusts the pressure of the compressed air supplied from the electropneumatic regulator 30 to the air cylinder 28 so as to be the first pressure or the second pressure, whereby the metal by the clamping unit 22 of the first clamping device 6 is obtained. The clamping force at one end of the mask sheet 18 is adjusted to be the first clamping force or the second clamping force. Similarly, the control unit 40 adjusts the pressure of the compressed air supplied from the electropneumatic regulator 56 to the air cylinder 44 so as to be the third pressure (= first pressure) or the fourth pressure (= second pressure). Thus, the clamping force of the other end portion of the metal mask sheet 18 by the clamping unit 42 of the second clamping device 10 becomes the third clamping force (= first clamping force) or the fourth clamping force (= second clamping force). Adjust to.

  In addition, the control unit 40 is configured so that the metal mask sheet 18 is temporarily fixed to the first clamping device 6 and the second clamping device 10 with the first clamping force or fixed with the second clamping force. By controlling the drive of the motor 38 and the motor 54 of the second clamping device 10, the clamping unit 22 of the first clamping device 6 is moved in the + X direction and the clamping unit 42 of the second clamping device 10 is moved in the -X direction. Then, the first tension or the second tension is applied to the metal mask sheet 18.

  In the metal mask manufacturing apparatus 2 according to the first embodiment, the attitude of the metal mask sheet 18 in the XY plane is corrected before the metal mask sheet 18 is attached to the metal mask frame 20. For example, as shown in FIG. 6A, it is assumed that one end portion of the metal mask sheet 18 is placed on the clamping surface 24a of the fixed grip portion 24 in a state in which the posture is shifted. In this state, when the metal mask sheet 18 is sandwiched between the sandwiching portions 22 and 42 and tension is applied to the metal mask sheet 18, the metal mask sheet 18 is distorted, bent, and wrinkled. Similarly, even when the other end or both end portions of the metal mask sheet 18 are sandwiched with their postures shifted, if the metal mask sheet 18 is tensioned, the metal mask sheet 18 is distorted, bent, or wrinkled. Arise. That is, when tension is applied to the metal mask sheet 18 without correcting the posture of the metal mask sheet 18, the metal mask sheet 18 is distorted, bent, or wrinkled. Therefore, the control unit 40 temporarily fixes one end of the metal mask sheet 18 with the clamping unit 22 of the first clamping device 6 and temporarily fixes the other end of the metal mask sheet 18 with the clamping unit 42 of the second clamping device 10. In this state, by applying a first tension to the metal mask sheet 18 in the tension device constituted by the first clamping device 6 and the second clamping device 10 (see the arrow in FIG. 6A), the fixed grip portion 24 and the posture of the metal mask sheet 18 with respect to the fixed grip portion 43 are corrected (see FIG. 6B).

  In this embodiment, the temporary fixing means that the portion where the metal mask sheet 18 is held is clamped so that the metal mask sheet 18 can move in the XY plane when the first tension is applied to the metal mask sheet 18. Refers to the state of being. Further, in this embodiment, the term “fixed” means that even when a second tension stronger than the first tension is applied to the metal mask sheet 18, the portion where the metal mask sheet 18 is sandwiched moves within the XY plane. It refers to the state of being pinched so as not to.

  Next, a metal mask manufacturing method for manufacturing the metal mask 16 in the metal mask manufacturing apparatus 2 according to the first embodiment will be described with reference to the drawings. FIG. 7 is a flowchart for explaining processing when the metal mask sheet 18 is attached to the metal mask frame 20 in the metal mask manufacturing apparatus 2.

  First, the control unit 40 temporarily fixes both ends of the metal mask sheet 18 (step S1). Specifically, the control unit 40 controls the drive of the electropneumatic regulator 30 so that the pressure of the compressed air supplied to the air cylinder 28 becomes the first pressure. The compressed air adjusted to the first pressure by the electropneumatic regulator 30 is supplied to the air cylinder 28, and the movable grip portion 26 moves by a predetermined amount in the −Z direction with respect to the fixed grip portion 24 by the air pressure of the air cylinder 28. Then, one end portion of the metal mask sheet 18 placed on the sandwiching surface 24 a of the fixed grip portion 24 is sandwiched between the sandwiching surface of the movable grip portion 26 and the sandwiching surface 24 a of the fixed grip portion 24, thereby forming the sandwiching portion 22. Temporarily fixed. Similarly, the control unit 40 controls the driving of the electropneumatic regulator 56 so that the pressure of the compressed air supplied to the air cylinder 44 becomes the third pressure (= first pressure). The compressed air adjusted to the third pressure by the electropneumatic regulator 56 is supplied to the air cylinder 44, and the movable grip part of the clamping part 42 is -Z direction with respect to the fixed grip part 43 of the clamping part 42 by the air pressure of the air cylinder 44. Move a predetermined amount. The other end portion of the metal mask sheet 18 placed on the sandwiching surface 43 a of the fixed grip portion 43 is sandwiched between the sandwiching surface of the movable grip portion and the sandwiching surface 43 a of the fixed grip portion 43, thereby causing the sandwiching portion 42 to Temporarily fixed.

  When both ends of the metal mask sheet 18 are temporarily fixed in step S1, the control unit 40 applies a first tension to the metal mask sheet 18 and corrects the posture of the metal mask sheet 18 (step S2). Specifically, the control unit 40 controls the drive of the motor 38 so that the first tension is applied to the metal mask sheet 18 and rotates the ball screw 36. As the ball screw 36 rotates, the clamping portion 22 and the like move together in the + X direction along the linear guide rail 58. Similarly, the control unit 40 controls the drive of the motor 54 so that the first tension is applied to the metal mask sheet 18 and rotates the ball screw 50. As the ball screw 50 rotates, the clamping part 42, the air cylinder 44, the electropneumatic regulator 56, the linear motion cam 46, the follower roller 48, and the ball nut 52 (hereinafter referred to as the clamping part 42, etc.) are integrated. And move in the −X direction along the linear guide rail 64.

  When the sandwiching part 22 and the like move in the + X direction and the sandwiching part 42 and the like move in the −X direction, one end of the metal mask sheet 18 sandwiched by the sandwiching part 22 and the metal mask sheet 18 sandwiched by the sandwiching part 42 The other end moves in a direction away from each other, and a first tension is applied to the metal mask sheet 18. When the first tension is applied to the metal mask sheet 18 whose both ends are temporarily fixed, for example, as shown in FIG. 6A, both ends of the metal mask sheet 18 are temporarily fixed in a state where the posture is shifted. Even in this case, the posture of the metal mask sheet 18 with respect to the fixed grip portion 24 and the fixed grip portion 43 is corrected as shown in FIG.

  When the posture of the metal mask sheet 18 is corrected in step S2, the control unit 40 fixes both ends of the metal mask sheet 18 with a clamping force stronger than the temporary fixing in step S1 (step S3). Specifically, the control unit 40 controls the drive of the electropneumatic regulator 30 so that the pressure of the compressed air supplied to the air cylinder 28 becomes the second pressure. Similarly, the control unit 40 controls the driving of the electropneumatic regulator 56 so that the pressure of the compressed air supplied to the air cylinder 44 becomes the fourth pressure (= second pressure). The compressed air adjusted to the second pressure by the electropneumatic regulator 30 is supplied to the air cylinder 28, and the movable grip portion 26 moves by a predetermined amount in the −Z direction with respect to the fixed grip portion 24 by the air pressure of the air cylinder 28, One end portion of the mask sheet 18 is fixed by the sandwiching portion 22. Similarly, the compressed air adjusted to the third pressure by the electropneumatic regulator 56 is supplied to the air cylinder 44, and the movable grip part of the clamping part 42 is moved relative to the fixed grip part 43 of the clamping part 42 by the air pressure of the air cylinder 44. The metal mask sheet 18 is moved by a predetermined amount in the −Z direction, and the other end portion of the metal mask sheet 18 is fixed by the clamping portion 42.

  When both ends of the metal mask sheet 18 are fixed in step S3, the control unit 40 moves the first holding device 6 and the second holding device 10 in the Y direction (step S4). That is, the control unit 40 moves the first holding device 6 along the guide rails 8a and 8b, and moves the second holding device 10 along the guide rails 12a and 12b, so that the metal mask sheet 18 is moved to the metal mask. It is moved to a predetermined position on the frame 20 (position to be attached to the metal mask frame 20).

  Next, the control unit 40 applies a second tension larger than the first tension applied in step S2 to the metal mask sheet 18 (step S5). Specifically, the control unit 40 controls the drive of the motor 38 so that the second tension is applied to the metal mask sheet 18 and rotates the ball screw 36. As the ball screw 36 rotates, the clamping portion 22 and the like move together in the + X direction along the linear guide rail 58. Similarly, the control unit 40 controls the drive of the motor 54 so that the second tension is applied to the metal mask sheet 18 and rotates the ball screw 50. As the ball screw 50 rotates, the clamping portion 42 and the like move together in the −X direction along the linear guide rail 64. When the sandwiching part 22 and the like move in the + X direction and the sandwiching part 42 and the like move in the −X direction, one end of the metal mask sheet 18 sandwiched by the sandwiching part 22 and the metal mask sheet 18 sandwiched by the sandwiching part 42 The other end moves in a direction away from each other, and second tension is applied to the metal mask sheet 18.

  Next, the metal mask sheet 18 to which the second tension is applied in step S5 is attached to the metal mask frame 20 (step S6). For example, both end portions of the metal mask sheet 18 are attached to two opposite sides constituting the frame-shaped metal mask frame 20 by welding or the like. The control unit 40 repeats the processes of steps S1 to S6 until the predetermined number of metal mask sheets 18 are attached to the metal mask frame 20. By attaching a predetermined number of metal mask sheets 18 to the metal mask frame 20, the metal mask 16 as shown in FIG. 3 is manufactured.

  According to the metal mask manufacturing apparatus 2 and the method of manufacturing the metal mask 16 according to the first embodiment, before attaching the metal mask sheet 18 to the metal mask frame 20, both ends of the metal mask sheet 18 are held at the sandwiching portions 22 and 42. The position of the metal mask sheet 18 is corrected by temporarily fixing the portion. Therefore, when the metal mask sheet 18 is attached to the metal mask frame 20 by applying a second tension to the metal mask sheet 18, the metal mask sheet 18 is not deformed, bent, or wrinkled, and the metal mask sheet 18 is not deformed. 20 can be attached with high accuracy.

  Next, a metal mask manufacturing apparatus according to a second embodiment of the present invention will be described with reference to the drawings. In addition, about the metal mask manufacturing apparatus based on this 2nd Embodiment, the same code | symbol is used for the structure same as the structure of the metal mask apparatus 2 shown in FIG. 1, The illustration and description are abbreviate | omitted. In the following description, an XYZ orthogonal coordinate system similar to that shown in FIG. 1 is set, and the positional relationship of each part will be described with reference to this orthogonal coordinate system.

  Similar to the metal mask manufacturing apparatus 2 according to the first embodiment, the metal mask manufacturing apparatus according to the second embodiment is used when the organic light emitting layer is vacuum-deposited in the manufacturing process of the organic EL element. 8 is replaced with the 1st clamping apparatus 60 as shown in FIG. 8 instead of the 1st clamping apparatus 6 (refer FIG. 4) which concerns on 1st Embodiment. As shown in FIG. 8, the first clamping device 60 includes a clamping unit 62, an air cylinder 28, an electropneumatic regulator 30, a linear motion cam 32, a follower roller 34, a ball screw 36, a ball nut 37, a motor 38, and a linear A guide rail 58 is provided.

  The clamping part 62 has a fixed grip part 63, a movable grip part 26, and a suction part 66. FIG. 9 is a perspective view showing the configuration of the fixed grip portion 63. As shown in FIG. 9, the fixed grip 63 has a clamping surface 63a that is parallel to the XY plane and exposed in the + Z direction. In the same manner as the clamping unit 22 according to the first embodiment, the clamping unit 62 uses one end of the metal mask sheet 18 placed on the clamping surface 63a of the fixed grip unit 63 as the clamping surface 63a of the fixed grip unit 63. The movable grip portion 26 is held between the holding surfaces. One end of the metal mask sheet 18 is fixed by being clamped by the clamping unit 62.

  Moreover, the fixed grip part 63 of the clamping part 62 is comprised including the porous pad which has many holes 65 in the clamping surface 63a. The suction part 66 of the clamping part 26 sucks one end of the metal mask sheet 18 in the −Z direction through the hole 65 of the porous pad. When the one end portion of the metal mask sheet 18 is sucked by the suction portion 66, it is adsorbed on the sandwiching surface 63a (porous pad). One end of the metal mask sheet 18 is temporarily fixed by being adsorbed on the clamping surface 63a by the clamping unit 62.

  The suction unit 66 is connected to the control unit 40 (not shown), and the control unit 40 controls driving of the suction unit 66. That is, the control unit 40 controls the suction force by the suction unit 66 to cause the one end portion of the metal mask sheet 18 to be adsorbed on the clamping surface 63 a (porous pad) of the fixed grip unit 63 in the clamping unit 62. The porous pad and suction portion 66 provided in the fixed grip portion 63 constitutes an adsorption device that adsorbs one end portion of the metal mask sheet 18 to the holding surface 63 a of the fixed grip portion 63.

  The metal mask manufacturing apparatus according to the second embodiment has the same configuration as the first clamping apparatus 60 instead of the second clamping apparatus 10 (see FIG. 1) according to the first embodiment. A second clamping device (not shown) is provided. That is, the structure of each part of the 2nd clamping apparatus which concerns on 2nd Embodiment is set as the line symmetry of the longitudinal direction (Y direction) of the table part 4, and each part of the 1st clamping apparatus 60 shown in FIG. The configuration is the same. In addition, the clamping part 68 (refer FIG. 10) of the 2nd clamping apparatus which concerns on 2nd Embodiment uses the other end part of the metal mask sheet 18 mounted in the clamping surface 70a of the fixed grip part 70 as a fixed grip part. It fixes by pinching with the clamping surface 70a of 70, and the clamping surface of a movable grip part. Further, the sandwiching portion 68 is temporarily fixed by adsorbing the other end portion (end portion on the −X direction side) of the metal mask sheet 18 on the sandwiching surface 70 a (see FIG. 10) of the fixed grip portion 70.

  In the metal mask manufacturing apparatus according to the second embodiment, the attitude of the metal mask sheet 18 in the XY plane is corrected before the metal mask sheet 18 is attached to the metal mask frame 20. For example, as shown in FIG. 10A, it is assumed that one end portion of the metal mask sheet 18 is placed on the clamping surface 63a of the fixed grip portion 63 in a state where the posture is shifted. In this state, when the metal mask sheet 18 is sandwiched between the sandwiching portions 62 and 68 and tension is applied to the metal mask sheet 18, the metal mask sheet 18 is distorted, bent, and wrinkled. Similarly, even when the other end or both end portions of the metal mask sheet 18 are sandwiched with their postures shifted, if the metal mask sheet 18 is tensioned, the metal mask sheet 18 is distorted, bent, or wrinkled. Arise. That is, when tension is applied to the metal mask sheet 18 without correcting the posture of the metal mask sheet 18, the metal mask sheet 18 is distorted, bent, or wrinkled.

  Therefore, the control unit 40 holds the one end portion of the metal mask sheet 18 on the holding surface of the fixed grip portion 63 so that the metal mask sheet 18 can move in the XY plane when the first tension is applied to the metal mask sheet 18. Adsorbed on 63a and temporarily fixed. Similarly, the control unit 40 moves the other end of the metal mask sheet 18 so that the metal mask sheet 18 can move in the XY plane when the first tension is applied to the metal mask sheet 18. Adsorbed onto the clamping surface 70a and temporarily fixed. In addition, when the one end part of the metal mask sheet 18 is temporarily fixed, as shown in FIG. 11A, the one end part of the metal mask sheet 18 is not sandwiched between the movable grip part 26 and the fixed grip part 63. When the other end portion is also temporarily fixed, it is not sandwiched between the movable grip portion (not shown) of the sandwiching portion 68 and the fixed grip portion 70. And the control part 40 gives the 1st tension | tensile_strength to the metal mask sheet | seat 18 in the tension | tensile_strength apparatus comprised by the 1st clamping apparatus 60 and the 2nd clamping apparatus in the state which fixed the both ends of the metal mask sheet 18 ( 10A and 11A), the posture of the metal mask sheet 18 with respect to the fixed grip portion 63 and the fixed grip portion 70 is corrected (see FIG. 10B).

  Further, as shown in FIG. 11B, the control unit 40 clamps and fixes one end portion of the metal mask sheet 18 with the movable grip portion 26 and the fixed grip portion 63, and the movable grip (not shown) of the clamping portion 68. After the other end portion of the metal mask sheet 18 is clamped and fixed by the portion and the fixed grip portion 70, the second tension is applied to the metal mask sheet 18 in the tension device configured by the first clamping device 60 and the second clamping device. (See the arrow in FIG. 11B), and the metal mask sheet 18 is attached to the metal mask frame 20.

  Next, a metal mask manufacturing method for manufacturing the metal mask 16 in the metal mask manufacturing apparatus 2 according to the second embodiment will be described. The metal mask manufacturing method according to the second embodiment will be described with reference to the flowchart of FIG. 7 used when the metal mask manufacturing method according to the first embodiment is described.

  First, the control unit 40 temporarily fixes both end portions of the metal mask sheet 18. Specifically, the control unit 40 controls the driving of the suction unit 66 so that one end of the metal mask sheet 18 is adsorbed onto the holding surface 63 a of the fixed grip unit 63. One end portion of the metal mask sheet 18 placed on the holding surface 63a of the fixed grip portion 63 is temporarily fixed to the holding portion 62 by being sucked by the suction portion 66 through the numerous holes 65 of the porous pad. . Similarly, the control unit 40 controls driving of a suction unit (not shown) of the second clamping device in order to attract the other end of the metal mask sheet 18 onto the clamping surface 70a of the fixed grip unit 70. The other end portion of the metal mask sheet 18 placed on the clamping surface 70a of the fixed grip portion 70 is temporarily fixed to the clamping portion 68 by being sucked by the suction portion through a number of holes of the porous pad.

  When both ends of the metal mask sheet 18 are temporarily fixed in step S1, the control unit 40 applies a first tension to the metal mask sheet 18 and corrects the posture of the metal mask sheet 18 (step S2). Note that the operation for correcting the attitude of the metal mask sheet 18 is the same as the operation in step S2 of the metal mask manufacturing method according to the first embodiment, and thus the description thereof is omitted.

  When the attitude of the metal mask sheet 18 is corrected in step S <b> 2, the control unit 40 controls the driving of the motors 38 and 54 to release the first tension applied to the metal mask sheet 18, and the suction unit 66. And the suction of the both ends of the metal mask sheet 18 by the suction device is released by controlling the driving of the suction part (not shown) of the sandwiching part 68. Thereafter, the control unit 40 fixes both ends of the metal mask sheet 18 (step S3). When both ends of the metal mask sheet 18 are fixed in step S3, the control unit 40 moves the first holding device 60 and the second holding device in the Y direction (step S4). And the control part 40 provides the 2nd tension | tensile_strength larger than the 1st tension | tensile_strength provided in step S2 to the metal mask sheet 18 (step S5), and attaches the metal mask sheet 18 to the metal mask frame 20 (step S6). The specific operation in steps S3 to S6 is the same as the operation in steps S3 to S6 of the metal mask manufacturing method according to the first embodiment, and thus description thereof is omitted. The control unit 40 repeats the processes of steps S1 to S6 until the predetermined number of metal mask sheets 18 are attached to the metal mask frame 20. By attaching a predetermined number of metal mask sheets 18 to the metal mask frame 20, the metal mask 16 as shown in FIG. 3 is manufactured.

  According to the metal mask manufacturing apparatus and the method of manufacturing the metal mask 16 according to the second embodiment, before attaching the metal mask sheet 18 to the metal mask frame 20, both end portions of the metal mask sheet 18 at the holding portions 62 and 68. Is adsorbed onto the clamping surfaces 63a and 70a of the fixed grip portions 63 and 70 to apply a first tension to the metal mask sheet 18, thereby correcting the posture of the metal mask sheet 18. Therefore, when the metal mask sheet 18 is attached to the metal mask frame 20 by applying a second tension to the metal mask sheet 18, the metal mask sheet 18 is not deformed, bent, or wrinkled, and the metal mask sheet 18 is not deformed. 20 can be attached with high accuracy.

  DESCRIPTION OF SYMBOLS 2 ... Metal mask manufacturing apparatus, 4 ... Table part, 6,60 ... 1st clamping apparatus, 8a, 8b ... Guide rail, 10 ... 2nd clamping apparatus, 12a, 12b ... Guide rail, 14 ... Base, 16 ... Metal Mask, 18 ... Metal mask sheet, 20 ... Metal mask frame, 22,42,62,68 ... Nipping part, 24,43,63,70 ... Fixed grip part, 26 ... Moving grip part, 28,44 ... Air cylinder, 30, 56 ... Electro-pneumatic regulator, 32, 46 ... Linear motion cam, 34, 48 ... Follower roller, 36, 50 ... Ball screw, 37, 52 ... Ball nut, 38, 54 ... Motor, 40 ... Controller, 58 64 ... Linear guide rails, 65 ... Holes, 66 ... Suction part.

Claims (9)

A mask manufacturing apparatus for manufacturing a metal mask by attaching a metal mask sheet to a metal mask frame,
A first fixed grip portion; and a first movable grip portion, wherein the first movable grip portion is moved relative to the first fixed grip portion, and one end portion of the metal mask sheet is moved to the first fixed grip portion. A first clamping part that is clamped by the first movable grip part;
A second fixed grip portion; and a second movable grip portion, wherein the second movable grip portion is moved relative to the second fixed grip portion, and the other end portion of the metal mask sheet is moved to the second fixed grip portion. And a second clamping part that is clamped by the second movable grip part,
A tension portion that applies a first tension or a second tension greater than the first tension to the metal mask sheet by moving the first sandwiching portion and the second sandwiching portion in directions away from each other;
One end portion of the metal mask sheet is temporarily fixed by the first sandwiching portion, and the other end portion of the metal mask sheet is temporarily fixed by the second sandwiching portion, and the second portion of the metal mask sheet is temporarily fixed to the metal mask sheet by the tension portion. A correction unit that corrects a posture of the metal mask sheet with respect to the first fixed grip unit and the second fixed grip unit by applying one tension;
In a state where one end portion of the metal mask sheet is clamped by the first clamping portion with a clamping force stronger than that of temporary fixing, and the other end portion of the metal mask sheet is clamped by the second clamping portion with a clamping force stronger than that of temporary fixing. An attachment portion for attaching the metal mask sheet to which the second tension is applied in the tension portion to the metal mask frame;
A mask manufacturing apparatus comprising: The first fixed grip portion includes a first suction portion,
The second fixed grip portion includes a second suction portion,
One end of the metal mask sheet is temporarily fixed by being sucked by the first suction part, and the other end of the metal mask sheet is temporarily fixed by being sucked by the second suction part. The mask manufacturing apparatus according to claim 1. The first adsorption part includes a first porous adsorbent and a first suction part that sucks one end of the metal mask sheet through the first porous adsorbent,
The said 2nd adsorption | suction part is equipped with the 2nd porous adsorption material and the 2nd suction part which attracts | sucks the other end part of the said metal mask sheet | seat via the said 2nd porous adsorption material. 2. The mask manufacturing apparatus according to 2. A first air cylinder;
A first electropneumatic regulator that adjusts the pressure of the compressed air supplied to the first air cylinder to a first pressure or a second pressure different from the first pressure;
A second air cylinder;
A second electropneumatic regulator that adjusts the pressure of the compressed air supplied to the second air cylinder to a third pressure or a fourth pressure different from the third pressure;
When the correction by the correction unit, the first clamping unit moves the first movable grip unit by the air pressure of the first air cylinder adjusted to the first pressure by the first electropneumatic regulator. Moved relative to the part, temporarily fixed one end of the metal mask sheet,
At the time of attachment by the attachment portion, the first movable grip portion is moved relative to the first fixed grip portion by the air pressure of the first air cylinder adjusted to the second pressure in the first electropneumatic regulator, Clamping one end of the metal mask sheet with a clamping force stronger than temporary fixing;
When the correction by the correction unit, the second sandwiching unit moves the second movable grip unit to the second fixed grip by the air pressure of the second air cylinder adjusted to the third pressure by the second electropneumatic regulator. The other end of the metal mask sheet is temporarily fixed,
At the time of attachment by the attachment portion, the second movable grip portion is moved relative to the second fixed grip portion by the air pressure of the second air cylinder adjusted to the fourth pressure in the second electropneumatic regulator, The mask manufacturing apparatus according to claim 1, wherein the other end portion of the metal mask sheet is clamped with a clamping force stronger than temporary fixing.   The mask manufacturing apparatus according to claim 4, wherein the first pressure and the third pressure are the same, and the second pressure and the fourth pressure are the same. A mask manufacturing method for manufacturing a metal mask,
A first temporary fixing step of temporarily fixing one end of the metal mask sheet in the first clamping unit;
A second temporary fixing step of temporarily fixing the other end of the metal mask sheet in the second clamping unit;
By moving one end portion of the metal mask sheet temporarily fixed in the first temporary fixing step and the other end portion of the metal mask sheet temporarily fixed in the second temporary fixing step in a direction in which they are separated from each other. A correction step of applying a first tension to the metal mask sheet and correcting an attitude of the metal mask sheet with respect to the first sandwiching portion and the second sandwiching portion;
A first clamping step of clamping the one end portion of the metal mask sheet, the posture of which has been corrected in the correction step, in the first clamping portion with a clamping force stronger than the temporary fixing in the first temporary fixing step;
A second clamping step of clamping the other end portion of the metal mask sheet whose posture has been corrected in the correction step with the second clamping portion with a clamping force stronger than the temporary fixing in the second temporary fixing step;
By moving the one end portion of the metal mask sheet sandwiched in the first sandwiching step and the other end portion of the metal mask sheet sandwiched in the second sandwiching step to be separated from each other, the metal mask sheet A tension applying step of applying a second tension greater than the first tension;
An attaching step of attaching the metal mask sheet to which the second tension is applied in the tension applying step to a metal mask frame;
The mask manufacturing method characterized by including. The first temporary fixing step includes
A first placement step of placing one end of the metal mask sheet on a first fixed grip portion including a first porous adsorbent and a first suction portion;
In the first placement step, the first porous part is sucked by the first suction part through the first porous adsorbent to suck one end of the metal mask sheet placed on the first fixed grip part. A first adsorbing step for adsorbing to the adsorbent material,
The second temporary fixing step includes
A second placing step of placing the other end of the metal mask sheet on a second fixed grip portion including a second porous adsorbent and a second suction portion;
In the second placement step, the second suction portion sucks the other end portion of the metal mask sheet placed on the second fixed grip portion by the second suction portion through the second porous adsorbent. The mask manufacturing method according to claim 6, further comprising a second adsorption step of adsorbing the porous adsorbent. In the first temporary fixing step, the first movable grip portion is moved relative to the first fixed grip portion by the air pressure of the first air cylinder adjusted to the first pressure in the first electropneumatic regulator, and the metal mask sheet Temporarily fix one end,
In the second temporary fixing step, the second movable grip portion is moved relative to the second fixed grip portion by the air pressure of the second air cylinder adjusted to the third pressure in the second electropneumatic regulator. Temporarily fix the other end,
In the first clamping step, the first movable grip portion is moved against the first fixed grip portion by the air pressure of the first air cylinder adjusted to a second pressure different from the first pressure in the first electropneumatic regulator. And sandwiching one end of the metal mask sheet,
In the second clamping step, the second movable grip portion is moved against the second fixed grip portion by the air pressure of the second air cylinder adjusted to a fourth pressure different from the third pressure in the second electropneumatic regulator. The mask manufacturing method according to claim 6, wherein the other end of the metal mask sheet is clamped.   9. The mask manufacturing method according to claim 8, wherein the first pressure and the third pressure are the same, and the second pressure and the fourth pressure are the same.

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