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JP2018144138A - Surface-coated cutting tool having hard coating layer excellent in wear resistance and chipping resistance - Google Patents

Surface-coated cutting tool having hard coating layer excellent in wear resistance and chipping resistance Download PDF

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JP2018144138A
JP2018144138A JP2017040081A JP2017040081A JP2018144138A JP 2018144138 A JP2018144138 A JP 2018144138A JP 2017040081 A JP2017040081 A JP 2017040081A JP 2017040081 A JP2017040081 A JP 2017040081A JP 2018144138 A JP2018144138 A JP 2018144138A
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大 宮下
Masaru Miyashita
大 宮下
龍 市川
Ryo Ichikawa
龍 市川
翔太 近藤
Shota KONDO
翔太 近藤
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Mitsubishi Materials Corp
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Abstract

【課題】高速高送り加工でも、優れた靭性、耐チッピング性、耐摩耗性を発揮する。【解決手段】硬質被覆層が(a)組成は(Ti1−xAlx)(CyN1−y)0.70≦x≦0.95、0≦y<0.005(b)上部層は、基体表面の法線に対する{100}面の法線がなす傾斜角のうち、法線方向に対して0〜45度の傾斜角を0.25度のピッチ区分で度数集計し、2〜12度に最高ピークが存在し、2〜12度の度数合計が度数全体の45%以上で、下部層は、基体表面の法線に対する{111}面の法線がなす傾斜角のうち、法線方向に対して0〜45度の傾斜角を0.25度のピッチ区分で度数集計し、2〜12度に最高ピークが存在し、2〜12度の度数合計が度数全体の45%以上で、(c)上部層と下部層の平均膜厚が、0.5〜10μmであり、(d)切れ刃稜線部で下部層が露出している、表面被覆切削工具。【選択図】図5[PROBLEMS] To exhibit excellent toughness, chipping resistance, and wear resistance even in high-speed and high-feed processing. A hard coating layer has a composition (a) (Ti1-xAlx) (CyN1-y) 0.70 ≦ x ≦ 0.95, 0 ≦ y <0.005 (b) The upper layer is formed on the surface of the substrate. Of the inclination angles formed by the normal of the {100} plane with respect to the normal line, the inclination angle of 0 to 45 degrees with respect to the normal direction is tabulated with a pitch division of 0.25 degrees, and the highest peak at 2 to 12 degrees And the total frequency of 2 to 12 degrees is 45% or more of the entire frequency, and the lower layer is in the normal direction of the inclination angle formed by the normal of the {111} plane with respect to the normal of the substrate surface. (C) The tilt angle of 0 to 45 degrees is counted in the pitch division of 0.25 degrees, the highest peak is present at 2 to 12 degrees, and the total frequency of 2 to 12 degrees is 45% or more of the entire frequency. The average thickness of the upper layer and the lower layer is 0.5 to 10 μm, and (d) the surface layer in which the lower layer is exposed at the edge of the cutting edge. Cutting tools. [Selection] Figure 5

Description

この発明は、炭素鋼、合金鋼や鋳鉄等を、高熱発生を伴い、刃先に高負荷が作用する高速高送り条件で切削加工した場合に、硬質被覆層が優れた耐チッピング性を備え、長期の使用にわって優れた耐摩耗性を発揮する表面被覆切削工具(以下、被覆工具という)に関するものである。 The present invention provides a hard coating layer with excellent chipping resistance when carbon steel, alloy steel, cast iron, etc. are machined under high-speed and high-feed conditions in which a high load acts on the cutting edge with high heat generation. The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits excellent wear resistance.

切削工具の切削性能の改善を目的として、従来、炭化タングステン(以下、WCで示す)基超硬合金、炭窒化チタン(以下、TiCNで示す)基サーメットあるいは立方晶窒化ホウ素(以下、cBNで示す)基超高圧焼結体で構成された基体(以下、これらを総称して基体という)の表面に、硬質被覆層として、Ti−Al系の複合窒化物層を蒸着法により被覆形成した被覆工具があり、これらは、優れた耐摩耗性を発揮することが知られている。
前記従来のTi−Al系の複合窒化物層を被覆形成した被覆工具は、比較的耐摩耗性に優れるものの、高速切削条件で用いた場合にチッピング等の異常損耗を発生しやすいことから、硬質被覆層の改善についての種々の提案がなされている。
Conventionally, for the purpose of improving the cutting performance of cutting tools, tungsten carbide (hereinafter referred to as WC) based cemented carbide, titanium carbonitride (hereinafter referred to as TiCN) based cermet or cubic boron nitride (hereinafter referred to as cBN). ) A coated tool in which a Ti-Al based composite nitride layer is formed as a hard coating layer on the surface of a substrate (hereinafter collectively referred to as a substrate) composed of a super-high pressure sintered body by vapor deposition. These are known to exhibit excellent wear resistance.
Although the conventional coated tool formed by coating the conventional Ti-Al based composite nitride layer is relatively excellent in wear resistance, it is hard to cause abnormal wear such as chipping when used under high-speed cutting conditions. Various proposals for improving the coating layer have been made.

例えば、特許文献1には、工具基体表面の組成式:(Ti1−xAl)(C1−y)の複合炭窒化物層について、EBSDにより該層の縦断面を解析したとき、(1){111}面の法線がなす傾斜角のうち2〜12度の範囲にあるものの度数分布が傾斜角度数分布全体の45%以上、(2)基体界面から前記複合炭窒化物層へ0.1〜0.5μmの範囲をFE−SEMの観察により、構成元素であるTi、Al、CおよびNの構成原子共有格子点の分布を算出して、該構成原子共有格子点間に構成原子を共有しない格子点がN個存在するときをΣN+1で表すと、Σ5の分布割合が30%以上かつ該Σ5に分布のピークがある、被覆工具が記載されている。 For example, in Patent Document 1, when a longitudinal cross section of a composite carbonitride layer of the composition formula: (Ti 1-x Al x ) (C y N 1-y ) on the tool base surface is analyzed by EBSD (1) The frequency distribution of the tilt angle formed by the normal of the {111} plane in the range of 2 to 12 degrees is 45% or more of the entire tilt angle number distribution, and (2) the composite carbonitride from the substrate interface. The distribution of constituent atomic shared lattice points of Ti, Al, C, and N, which are constituent elements, is calculated by FE-SEM observation in the range of 0.1 to 0.5 μm to the layer, When N lattice points that do not share constituent atoms are represented by ΣN + 1, a coated tool is described in which the distribution ratio of Σ5 is 30% or more and the distribution peak exists in Σ5.

また、特許文献2には、TiNからなる第一単位層とTi1−xAlN(0.6≦x≦0.9)からなる第二単位層とが交互に積層され、該第二単位層は(111)面に配向している被覆工具が記載されている。 In Patent Document 2, a first unit layer made of TiN and a second unit layer made of Ti 1-x Al x N (0.6 ≦ x ≦ 0.9) are alternately laminated, A coated tool in which the unit layer is oriented in the (111) plane is described.

さらに、特許文献3には、工具基体表面にTiとAlの周期的な組成変化が存在する上部層と周期的な組成変化が存在しない下部層を含み、前記上部層は、組成式:(Ti1−xAl)(C1−y)で表したとき、0.70≦x≦0.95であってI(200)/I(111)>10であり、前記下部層は組成式:(Ti1−uAl)(C1−v)で表したとき、0≦u<0.70であって0≦v≦0.005、I(200)/I(111)<3であり工具基体表面から上部層に向かってuが順次増加する、被覆工具が記載されている。 Further, Patent Document 3 includes an upper layer in which a periodic composition change of Ti and Al exists on the tool base surface and a lower layer in which no periodic composition change exists, and the upper layer has a composition formula: (Ti 1- xAl x ) (C y N 1-y ), 0.70 ≦ x ≦ 0.95 and I (200) / I (111)> 10, and the lower layer is composed of When expressed by the formula: (Ti 1-u Al u ) (C v N 1-v ), 0 ≦ u <0.70 and 0 ≦ v ≦ 0.005, I (200) / I (111) A coated tool is described in which <3 and u increases sequentially from the tool substrate surface to the upper layer.

特開2014−24131号公報JP 2014-24131 A 特開2015−52133号公報Japanese Patent Laying-Open No. 2015-52133 特開2016−168669号公報JP 2006-168669 A

近年の切削加工における省力化および省エネ化の要求は強く、これに伴い、切削加工は一段と高速高送り化、高効率化の傾向にあって加工時の負荷は高まっており、被覆工具には、より一層、耐チッピング性、耐欠損性、耐剥離性等の耐異常損傷性が求められるとともに、長期の使用にわって優れた耐摩耗性が求められている。
しかし、前記特許文献1に記載された被覆工具では、{111}面の法線がなす傾斜角のうち2〜12度の範囲にあるものの度数分布が傾斜角度数分布全体の45%以上とすることにより、耐チッピング性の向上を図っているが、高速高送り加工では、耐チッピング性が不十分となる虞がある。
In recent years, there has been a strong demand for energy saving and energy saving in cutting, and along with this, cutting has become a trend toward higher speed, higher feed and higher efficiency. Further, abnormal damage resistance such as chipping resistance, chipping resistance, and peeling resistance is required, and excellent wear resistance is required for long-term use.
However, in the coated tool described in Patent Document 1, the frequency distribution of the tilt angle formed by the normal of the {111} plane is in the range of 2 to 12 degrees is 45% or more of the entire tilt angle number distribution. Therefore, the chipping resistance is improved, but the chipping resistance may be insufficient in high-speed and high-feed machining.

また、特許文献2に記載された被覆工具は、合金鋼の乾式ミーリング加工において優れた耐摩耗性を示すものの、高速高送りのような厳しい乾式のミーリング加工では耐チッピング性が十分とはいえず工具寿命が短くなる。   Moreover, although the coated tool described in Patent Document 2 shows excellent wear resistance in dry milling of alloy steel, it cannot be said that chipping resistance is sufficient in severe dry milling such as high speed and high feed. Tool life is shortened.

さらに、特許文献3に記載された被覆工具は、下部層のAl原子%が工具基体表面から上部層に向かって順次増加するため被覆層の耐剥離性に優れるものの、上部層が(100)配向のために高速高送り加工では、耐摩耗性が不十分となる可能性が否定できない。   Furthermore, the coated tool described in Patent Document 3 has excellent peeling resistance of the coating layer because Al atom% of the lower layer sequentially increases from the surface of the tool base toward the upper layer, but the upper layer has (100) orientation. For this reason, in high-speed and high-feed machining, the possibility of insufficient wear resistance cannot be denied.

そこで、本発明は、炭素鋼、鋳鉄、合金鋼等の高速高送り等に供した場合であっても、優れた靭性を備え、長期の使用にわたって優れた耐チッピング性、耐摩耗性を発揮する被覆工具を提供することを目的とする。   Therefore, the present invention provides excellent toughness and excellent chipping resistance and wear resistance over a long period of use even when subjected to high-speed and high-feeding such as carbon steel, cast iron and alloy steel. The object is to provide a coated tool.

本発明者らは、少なくともTiとAlの複合窒化物または複合炭窒化物(以下、「(Ti1−xAl)(C1−y)」で示すことがある)を含む硬質被覆層を形成した被覆工具の耐チッピング性、耐摩耗性の改善をはかるべく、鋭意研究を重ねた結果、次のような知見を得た。 We have a hard coating comprising at least a composite nitride or composite carbonitride of Ti and Al (hereinafter sometimes referred to as “(Ti 1-x Al x ) (C y N 1-y )”). As a result of intensive studies to improve the chipping resistance and wear resistance of the coated tool in which the layer was formed, the following knowledge was obtained.

まず、本発明者らは、(Ti1−xAl)(C1−y)からなる硬質被覆層において、結晶配向を変化させたときの耐チッピング性と耐摩耗性について検討したところ、{100}面の法線方向に配向の(Ti1−xAl)(C1−y)は耐チッピング性に優れ、他方、{111}面の法線方向に配向の(Ti1−xAl)(C1−y)層は耐摩耗性に優れていることを見出した。
一方、被覆工具において切れ刃稜線部(刃先稜線部)には耐チッピングが求められ、切れ刃稜線部以外には耐摩耗性が求められている。
そこで、切れ刃稜線部には{100}面の法線方向に配向の(Ti1−xAl)(C1−y)層を設け、切れ刃稜線部以外には{111}面の法線方向に配向の(Ti1−xAl)(C1−y)層を設けることにより、高速高送り加工であっても耐チッピング性と耐摩耗性を両立することができるとの知見を得た。
First, the present inventors have examined chipping resistance and wear resistance when the crystal orientation is changed in a hard coating layer made of (Ti 1-x Al x ) (C y N 1-y ). , (Ti 1-x Al x ) (C y N 1-y ) oriented in the normal direction of the {100} plane is excellent in chipping resistance, while (Ti 1-x Al x ) is oriented in the normal direction of the {111} plane (Ti It has been found that the 1-x Al x ) (C y N 1-y ) layer is excellent in wear resistance.
On the other hand, chipping resistance is required for the cutting edge ridge line portion (cutting edge ridge line portion) in the coated tool, and wear resistance is required for portions other than the cutting edge ridge line portion.
Therefore, a (Ti 1-x Al x ) (C y N 1-y ) layer oriented in the normal direction of the {100} plane is provided on the cutting edge ridge, and the {111} plane other than the cutting edge ridge normal by providing orientation (Ti 1-x Al x) (C y N 1-y) layer in a direction, it is possible to achieve both chipping resistance and wear resistance even speed and high feed machining of And gained knowledge.

また、前記知見の実現のためには、CVD法により{100}面の法線方向に配向の(Ti1−xAl)(C1−y)層を設け、その上に{111}面の法線方向に配向の(Ti1−xAl)(C1−y)層を設け、切れ刃稜線部のみにブラスト処理を実施して、{100}面の放線方向に配向の(Ti1−xAl)(C1−y)層を露出させればよいことを見出した。 In order to realize the above knowledge, a (Ti 1-x Al x ) (C y N 1-y ) layer oriented in the normal direction of the {100} plane is provided by CVD, and {111 } plane normal direction to the orientation of the (Ti 1-x Al x) (C y N 1-y) layer is provided, by carrying out blasting only cutting edge line portion, the actinomycetes direction of {100} plane It has been found that the oriented (Ti 1-x Al x ) (C y N 1-y ) layer may be exposed.

さらに、被覆工具表面の(Ti1−xAl)(C1−y)層をブラスト加工により平滑化すると、耐溶着性が向上することも併せて知見した。 Furthermore, when smoothed by blasting (Ti 1-x Al x) (C y N 1-y) layer of the coated tool surface, and finding also together be welding resistance are improved.

本発明は、前記各知見に基づいてなされたものであって、
「(1)炭化タングステン基超硬合金、炭窒化チタン基サーメットまたは立方晶窒化ホウ素基超高圧焼結体のいずれかで構成された工具基体の表面に、硬質被覆層を有する表面被覆切削工具において、
(a)前記硬質被覆層は、立方晶構造のTiとAlの複合炭窒化物層からなり、その平均組成を、
組成式:(Ti1−xAl)(C1−y
で表した場合、Al含有割合xおよびC含有割合y(但し、x、yは何れも原子比)は、それぞれ、0.70≦x≦0.95、0≦y<0.005を満足し、
(b)前記複合炭窒化物層は、上部層と下部層からなり、
前記上部層は、電子線後方散乱回折装置を用いて個々の結晶粒の結晶方位を、前記TiとAlの複合炭窒化物層の縦断面方向から解析し、前記基体表面の法線方向に対する前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定した場合、前記傾斜角のうち、前記法線方向に対して0〜45度の範囲内にある傾斜角を0.25度のピッチ毎に区分して各区分内に存在する度数を集計したとき、2〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜12度の範囲内に存在する度数の合計が、傾斜角度数分布における度数全体の45%以上の割合を示し、
前記下部層は、電子線後方散乱回折装置を用いて個々の結晶粒の結晶方位を、前記TiとAlの複合炭窒化物層の縦断面方向から解析し、前記基体表面の法線方向に対する前記結晶粒の結晶面である{100}面の法線がなす傾斜角を測定した場合、前記傾斜角のうち、前記法線方向に対して0〜45度の範囲内にある傾斜角を0.25度のピッチ毎に区分して各区分内に存在する度数を集計したとき、2〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜12度の範囲内に存在する度数の合計が、傾斜角度数分布における度数全体の45%以上の割合を示し、
(c)前記上部層と前記下部層の平均膜厚が、ともに、0.5〜10μmであり、
(d)切れ刃稜線部において下部層が露出していること、
を特徴とする表面被覆切削工具。
(2)工具厚さ方向に対して垂直方向の前記下部層の露出幅が0.01mmを超え、0.5mm未満であることを特徴とする(1)に記載の表面切削工具。
(3)前記上部層の平均膜厚が前記下部層の平均膜厚よりも薄いことを特徴とする(1)または(2)に記載の表面被覆切削工具。
(4)前記上部層および前記下部層の結晶粒径が100〜3000nmで、結晶粒径アスペクト比が2〜10であることを特徴とする(1)〜(3)のいずれかに記載の表面被覆切削工具。
(5)前記下部層が露出している部分の表面粗さ(Ra)が0.5μm未満であることを特徴とする(1)〜(4)のいずれかに記載の表面被覆切削工具。」
である。
The present invention has been made based on the above findings,
“(1) In a surface-coated cutting tool having a hard coating layer on the surface of a tool base composed of any of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, or cubic boron nitride-based ultrahigh-pressure sintered body ,
(A) The hard coating layer is composed of a composite carbonitride layer of Ti and Al having a cubic structure, and the average composition is
Composition formula: (Ti 1-x Al x ) (C y N 1-y )
In this case, the Al content ratio x and the C content ratio y (where x and y are atomic ratios) satisfy 0.70 ≦ x ≦ 0.95 and 0 ≦ y <0.005, respectively. ,
(B) The composite carbonitride layer is composed of an upper layer and a lower layer,
The upper layer analyzes the crystal orientation of each crystal grain from the longitudinal cross-sectional direction of the composite carbonitride layer of Ti and Al using an electron beam backscattering diffractometer, and the normal direction of the substrate surface When the inclination angle formed by the normal line of the {111} plane, which is the crystal plane of the crystal grain, is measured, an inclination angle in the range of 0 to 45 degrees with respect to the normal direction is set to 0. When the frequency existing in each section is counted by dividing every 25 degrees pitch, the highest peak exists in the inclination angle section in the range of 2 to 12 degrees, and it exists in the range of 2 to 12 degrees. The sum of the frequencies to be displayed indicates a ratio of 45% or more of the total frequencies in the tilt angle frequency distribution,
The lower layer analyzes the crystal orientation of each crystal grain using an electron beam backscattering diffractometer from the longitudinal cross-sectional direction of the composite carbonitride layer of Ti and Al, and the normal direction of the substrate surface When the inclination angle formed by the normal line of the {100} plane, which is the crystal plane of the crystal grain, is measured, an inclination angle in the range of 0 to 45 degrees with respect to the normal direction is set to 0. When the frequency existing in each section is counted by dividing every 25 degrees pitch, the highest peak exists in the inclination angle section in the range of 2 to 12 degrees, and it exists in the range of 2 to 12 degrees. The sum of the frequencies to be displayed indicates a ratio of 45% or more of the total frequencies in the tilt angle frequency distribution,
(C) The average film thicknesses of the upper layer and the lower layer are both 0.5 to 10 μm,
(D) the lower layer is exposed at the cutting edge ridge line portion;
A surface-coated cutting tool characterized by
(2) The surface cutting tool according to (1), wherein an exposed width of the lower layer in a direction perpendicular to the tool thickness direction is more than 0.01 mm and less than 0.5 mm.
(3) The surface-coated cutting tool according to (1) or (2), wherein an average film thickness of the upper layer is thinner than an average film thickness of the lower layer.
(4) The surface according to any one of (1) to (3), wherein the upper layer and the lower layer have a crystal grain size of 100 to 3000 nm and a crystal grain size aspect ratio of 2 to 10. Coated cutting tool.
(5) The surface-coated cutting tool according to any one of (1) to (4), wherein the surface roughness (Ra) of the portion where the lower layer is exposed is less than 0.5 μm. "
It is.

本発明は、耐チッピング性と耐摩耗性を高次元で両立させることができ、高速高送り加工においても工具寿命を延ばすことができるという顕著な効果を奏するものである。   The present invention has a remarkable effect that both chipping resistance and wear resistance can be achieved at a high level, and the tool life can be extended even in high-speed high-feed machining.

図1−a、図1−bは、硬質被覆層を構成する(Ti1−xAl)(C1−y)層における結晶粒の結晶面である{100}面および{100}面の法線が、基体表面の法線に対してなす傾斜角の概略説明図である。1-a and 1-b show {100} planes and {100} planes which are crystal planes of crystal grains in the (Ti 1-x Al x ) (C y N 1-y ) layer constituting the hard coating layer. It is a schematic explanatory drawing of the inclination angle which the normal line of a surface makes with respect to the normal line of a base surface. 図2−a、図2−bは、硬質被覆層を構成する(Ti1−xAl)(C1−y)層における結晶粒の結晶面である{111}面および{111}面の法線が、基体表面の法線に対してなす傾斜角の概略説明図である。FIG. 2A and FIG. 2B show {111} planes and {111} planes that are crystal planes of crystal grains in the (Ti 1-x Al x ) (C y N 1-y ) layer constituting the hard coating layer. It is a schematic explanatory drawing of the inclination angle which the normal line of a surface makes with respect to the normal line of a base surface. 本発明被覆工具の下部層について測定した{100}面の傾斜角度数分布のグラフの一例である。It is an example of the graph of the inclination angle number distribution of the {100} plane measured about the lower layer of this invention coated tool. 本発明被覆工具の上部層について測定した{111}面の傾斜角度数分布のグラフの一例である。It is an example of the graph of the inclination angle number distribution of the {111} plane measured about the upper layer of this invention coated tool. 本発明の被覆工具の硬質被覆層の厚さ方向断面模式図である。It is a thickness direction cross-section schematic diagram of the hard coating layer of the coating tool of this invention.

次に、本発明の被覆工具の硬質被覆層について、より詳細に説明する。   Next, the hard coating layer of the coated tool of the present invention will be described in more detail.

TiとAlの複合炭窒化物層((Ti1−xAl)(C1−y))の平均組成
前記複合炭窒化物層は、組成式:(Ti1−xAl)(C1−y)で表した場合、AlのTiとAlの合量に占める平均含有割合x、および、CのCとNの合量に占める平均含有割合y(但し、x、yはいずれも原子比)は、それぞれ、0.70≦x≦0.95、0≦y<0.005を満足するように組成を制御する。
その理由は、Alの平均含有割合xが0.70未満であると、(Ti1−xAl)(C1−y)層は耐酸化性に劣り、合金鋼等の高速高送りに供した場合には、耐摩耗性が十分でない。一方、Alの平均含有割合xが0.95より大きくなると、硬さに劣る六方晶の析出量が増大し硬さが低下するため、耐摩耗性が低下する。したがって、Alの平均含有割合xは、0.70≦x≦0.95と定めた。
また、(Ti1−xAl)(C1−y)層に含まれるC成分の平均含有割合yは、0≦y<0.005の範囲の微量であるとき、潤滑性が向上することによって切削時の衝撃を緩和し、結果として(Ti1−xAl)(C1−y)層の耐チッピング性、耐欠損性が向上する。一方、C成分の平均含有割合yが0≦y<0.005の範囲を逸脱すると、(Ti1−xAl)(C1−y)層の靭性が低下するため耐チッピング性、耐欠損性が低下し好ましくない。したがって、Cの平均含有割合yは、0≦y<0.005と定めた。
なお、Cの含有割合には、意図的にガス原料としてCを含むガスを用いなくても含まれる不可避的なCの含有割合を除外しており、不可避的なCの含有割合を差し引いた値をyとして求めた。
Composite carbonitride layer of Ti and Al ((Ti 1-x Al x) (C y N 1-y)) the average composition the composite carbonitride layer of the composition formula: (Ti 1-x Al x ) ( C y N 1-y ), the average content ratio x in the total amount of Ti and Al in Al and the average content ratio y in the total amount of C and N in C (where x and y are In either case, the atomic ratio) controls the composition so as to satisfy 0.70 ≦ x ≦ 0.95 and 0 ≦ y <0.005, respectively.
The reason is that if the average content ratio x of Al is less than 0.70, the (Ti 1-x Al x ) (C y N 1-y ) layer is inferior in oxidation resistance, and high-speed, high-feed such as alloy steel When it is used, the wear resistance is not sufficient. On the other hand, when the average content ratio x of Al is larger than 0.95, the amount of hexagonal crystals inferior in hardness increases and the hardness decreases, so that the wear resistance decreases. Therefore, the average content ratio x of Al was determined as 0.70 ≦ x ≦ 0.95.
Further, when the average content ratio y of the C component contained in the (Ti 1-x Al x ) (C y N 1-y ) layer is a minute amount in the range of 0 ≦ y <0.005, the lubricity is improved. alleviate the impact during cutting by chipping resistance of the resulting (Ti 1-x Al x) (C y N 1-y) layer, chipping resistance is improved. On the other hand, if the average content ratio y of the C component departs from the range of 0 ≦ y <0.005, the toughness of the (Ti 1-x Al x ) (C y N 1-y ) layer is reduced, so chipping resistance, It is not preferable because the fracture resistance is lowered. Therefore, the average content ratio y of C was determined as 0 ≦ y <0.005.
In addition, the content rate of C excludes the inevitable content rate of C contained without intentionally using a gas containing C as a gas raw material, and is a value obtained by subtracting the inevitable content rate of C. Was determined as y.

TiとAlの複合炭窒化物層((Ti1−xAl)(C1−y))の下部層
前記複合炭窒化物層((Ti1−xAl)(C1−y))の下部層について、電子線後方散乱回折装置(以下、EBSDという)を用いて個々の結晶粒の結晶方位を、その縦断面方向から解析し、基体表面の法線(断面研磨面における基体表面と垂直な方向)に対する前記結晶粒の結晶面である{100}面の法線がなす傾斜角(図1−a、図1−b参照)を測定した場合、前記傾斜角のうち、前記法線方向に対して0〜45度の範囲内にある傾斜角を0.25度のピッチ毎に区分して各区分内に存在する度数を集計したとき、2〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜12度の範囲内に存在する度数の合計が、傾斜角度数分布における度数全体の45%以上の割合となる傾斜角度数分布形態を示すならば、前記TiとAlの複合炭窒化物層からなる硬質被覆層は、立方晶構造を維持したままで高硬度を有し、しかも、前記傾斜角度数分布形態によって靭性を向上させる。
なお、EBSDを用いて個々の結晶粒の結晶方位を解析する際に、基体表面の法線に対する傾斜角が12度より大きい結晶面は{100}配向しているとみなすことができず、硬度が低下するため、{100}配向が強く、かつ硬度が低下しない範囲が0〜12度までであることから、測定によって度数を求める傾斜角区分の範囲を0〜12度と定めた。
Composite carbonitride layer of Ti and Al ((Ti 1-x Al x) (C y N 1-y)) lower layer and the composite carbonitride layer of ((Ti 1-x Al x ) (C y N 1 -Y )) For the lower layer, the crystal orientation of each crystal grain is analyzed from the longitudinal section direction using an electron beam backscattering diffractometer (hereinafter referred to as EBSD), and the normal of the substrate surface (cross-section polished surface) When the inclination angle (see FIGS. 1A and 1B) formed by the normal line of the {100} plane that is the crystal plane of the crystal grain is measured with respect to the direction perpendicular to the substrate surface in FIG. When the inclination angle within the range of 0 to 45 degrees with respect to the normal direction is divided into pitches of 0.25 degrees and the frequencies existing in each section are counted, the range of 2 to 12 degrees is obtained. The highest peak exists in the inclination angle section of the above, and the total of the frequencies existing in the range of 2 to 12 degrees However, the hard coating layer composed of the composite carbonitride layer of Ti and Al maintained a cubic structure if the gradient angle distribution form is 45% or more of the entire frequency in the gradient angle distribution. It has high hardness as it is, and the toughness is improved by the inclined angle number distribution form.
When analyzing the crystal orientation of individual crystal grains using EBSD, a crystal plane having an inclination angle larger than 12 degrees with respect to the normal of the substrate surface cannot be regarded as being {100} oriented, and the hardness Since the range where the {100} orientation is strong and the hardness is not lowered is 0 to 12 degrees, the range of the inclination angle section for obtaining the power by measurement is set to 0 to 12 degrees.

ここで、前記下部層の平均層厚は、0.5μm未満では長期の使用にわたっての耐チッピング性を十分確保することができず、一方、その平均層厚が10μmを超えると、高熱発生を伴う高速断続切削で熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚は0.5〜10μmと定めた。   Here, if the average layer thickness of the lower layer is less than 0.5 μm, sufficient chipping resistance over a long period of time cannot be ensured. On the other hand, if the average layer thickness exceeds 10 μm, high heat generation occurs. Since it becomes easy to cause thermoplastic deformation by high-speed interrupted cutting and this causes uneven wear, the average layer thickness is determined to be 0.5 to 10 μm.

TiとAlの複合炭窒化物層((Ti1−xAl)(C1−y))の上部層
上部層についても、EBSDを用いて前記下部層と同様の方法と処理によって、{111}面の法線がなす傾斜角(図2−a、2−b参照)を測定し、0〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記0〜12度の範囲内に存在する度数の合計が、傾斜角度数分布における度数全体の45%以上の割合となる傾斜角度数分布形態を示すならば、前記TiとAlの複合窒化物または複合炭窒化物層からなる硬質被覆層は、高硬度を有して耐チッピング性に優れ、しかも、前記傾斜角度数分布形態によって硬質被覆層と基体との密着性が飛躍的に向上する。
なお、EBSDを用いて個々の結晶粒の結晶方位を解析する際に、基体表面の法線に対する傾斜角が12度より大きい結晶面は{111}配向しているとみなすことができず、硬度が低下するため、{111}配向が強く、かつ硬度が低下しない範囲が0〜12度までであることから、測定によって度数を求める傾斜角区分の範囲を0〜12度と定めた。
For the upper layer upper layer of the composite carbonitride layer of Ti and Al ((Ti 1-x Al x ) (C y N 1-y )), the same method and treatment as the lower layer using EBSD, The inclination angle (see FIGS. 2-a and 2-b) formed by the normal of the {111} plane is measured, and the highest peak exists in the inclination angle section within the range of 0 to 12 degrees, and the above 0 to 12 degrees. Ti and Al composite nitride or composite carbonitride layer if the total number of frequencies existing in the range of is an inclination angle number distribution form with a ratio of 45% or more of the entire frequency in the inclination angle frequency distribution The hard coating layer made of is excellent in chipping resistance with high hardness, and the adhesion between the hard coating layer and the substrate is dramatically improved by the inclined angle number distribution form.
When analyzing the crystal orientation of each crystal grain using EBSD, a crystal plane with an inclination angle larger than 12 degrees with respect to the normal of the substrate surface cannot be regarded as being {111} oriented, and the hardness Since the range where the {111} orientation is strong and the hardness does not decrease is from 0 to 12 degrees, the range of the inclination angle section for obtaining the frequency by measurement was set to 0 to 12 degrees.

ここで、前記上部層の平均層厚は、0.5μm未満では、長期の使用にわたっての耐摩耗性を十分確保することができず、一方、その平均層厚が10μmを超えると、高熱発生を伴う高速高送り加工で熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚は0.5〜10μmと定めた。
なお、上部層の平均層厚は下部層の平均層厚よりも薄いが好ましい。その理由は、下部層の平均層厚の方が厚いと切れ刃稜線部耐チッピング性がより向上するためである。
Here, if the average layer thickness of the upper layer is less than 0.5 μm, sufficient wear resistance over a long period of time cannot be ensured. On the other hand, if the average layer thickness exceeds 10 μm, high heat generation occurs. The accompanying high-speed high-feed processing makes it easier to cause thermoplastic deformation, which causes uneven wear, so the average layer thickness was determined to be 0.5 to 10 μm.
The average layer thickness of the upper layer is preferably thinner than the average layer thickness of the lower layer. The reason is that the chipping resistance of the cutting edge ridge line portion is further improved when the average layer thickness of the lower layer is thicker.

切れ刃稜線部の下部層の露出
本発明では、切れ刃稜線部とは、すくい面と逃げ面とをそれぞれ直線で近似した場合に、当該直線が交差する領域をいい、上部層が除去され、図5に示すようにlaの長さで下部層が露出している。工具厚さ方向に対して垂直方向の下部層の露出幅が、0.01mmを超え0.5mm未満であることが好ましい。その理由は、0.01mm以下であると露出幅が不十分で耐チッピング性の向上が望めない場合があり、0.5mm以上であると露出幅が多くなり耐摩耗性が不十分な場合が起こり得るためである。
また、切れ刃稜線部の表面粗さ(Ra)は、0.5μm未満であることが好ましい。その理由は、0.5μm未満であると耐溶着性がより一層向上するためである。
表面粗さはJIS B0601:2001に準拠し、カットオフ値:0.08mm、基準長さ:0.8mm、走査速度:0.1mm/秒にてレーザー式表面粗さ測定器を用いて測定した値とする。
Exposing the lower layer of the cutting edge ridge line In the present invention, the cutting edge ridge line part is an area where the straight line intersects when the rake face and the flank face are approximated by straight lines, and the upper layer is removed, As shown in FIG. 5, the lower layer is exposed with a length of la. The exposed width of the lower layer in the direction perpendicular to the tool thickness direction is preferably more than 0.01 mm and less than 0.5 mm. The reason is that if it is 0.01 mm or less, the exposed width may be insufficient and an improvement in chipping resistance may not be expected. If it is 0.5 mm or more, the exposed width may increase and the wear resistance may be insufficient. This is possible.
Moreover, it is preferable that the surface roughness (Ra) of a cutting edge ridgeline part is less than 0.5 micrometer. The reason is that the welding resistance is further improved when the thickness is less than 0.5 μm.
The surface roughness was measured using a laser surface roughness measuring instrument in accordance with JIS B0601: 2001 at a cutoff value of 0.08 mm, a reference length of 0.8 mm, and a scanning speed of 0.1 mm / second. Value.

上部層および下部層の結晶粒径とアスペクト比
上部層および下部層の結晶粒径は、100〜3000nmであることが好ましく、結晶粒径アスペクト比は2〜10が好ましい。その理由は、結晶粒径が100nm未満であると粒界滑りを抑制する効果が十分ではないときがあり、3000nmを超えると層内のゆがみが大きくなり硬さが低下することがあるためである。
また、結晶粒径アスペクト比は、2未満であると十分な柱状組織となっていないため、アスペクト比の小さな等軸結晶の脱落を招くことがあり、十分な耐摩耗性を発揮することが出来ないときがある。また、10を超えると結晶粒そのものの強度を保つことができず、耐チッピング性が低下する虞があるため好ましくない。
ここで、結晶粒径とアスペクト比は、上部層および下部層の厚さ方向の断面(縦断面)をSEMにて幅100μm、高さは各層全体を含む範囲で観察した際に、各結晶粒について粒子径の最も長い長さを長軸とし前記長軸と直行する方向の最大長さを結晶粒径とし、前記長軸を結晶粒径で除した値の観察範囲での平均値とする。
Crystal grain size and aspect ratio of upper layer and lower layer The crystal grain size of the upper layer and lower layer is preferably 100 to 3000 nm, and the crystal grain size aspect ratio is preferably 2 to 10. The reason is that if the crystal grain size is less than 100 nm, the effect of suppressing grain boundary slip may not be sufficient, and if it exceeds 3000 nm, the distortion in the layer may increase and the hardness may decrease. .
Also, if the crystal grain size aspect ratio is less than 2, a sufficient columnar structure is not obtained, so that equiaxed crystals with a small aspect ratio may fall off, and sufficient wear resistance can be exhibited. There is no time. On the other hand, if it exceeds 10, the strength of the crystal grains themselves cannot be maintained, and the chipping resistance may be lowered.
Here, the crystal grain size and the aspect ratio are obtained by observing a cross section (longitudinal cross section) in the thickness direction of the upper layer and the lower layer with a SEM in a range including a width of 100 μm and a height including the entire layers. The longest particle diameter is the major axis, the maximum length in the direction perpendicular to the major axis is the crystal grain size, and the average value in the observation range of the value obtained by dividing the major axis by the crystal grain size.

なお、下部層の下に下部層と基体界面との接着を向上させるために、必要に応じて公知の例えば、Alの含有率を基体側から表面側に漸次変化させたAlTiCN層や、公知のTiN層、TiCN層等の下地層を設けてもよい。   In order to improve the adhesion between the lower layer and the substrate interface under the lower layer, for example, a known AlTiCN layer in which the Al content is gradually changed from the substrate side to the surface side as necessary, An underlayer such as a TiN layer or a TiCN layer may be provided.

上部層、下部層および切れ刃稜線部の露出部の製造方法
本発明の製造方法は、概略次のとおりである。
1.通常の製法により超硬合金基体を製造する。
2.次に、この超硬合金基体上に、必要に応じて下地層を成膜する。
3.続いて、通常のCVD装置を用いて、2段階の成膜を行う。その際、NH/(TiCl+AlCl)を変化させることにより配向性に差異を生じさせる。
3−1.第1段階の成膜(下部層の成膜)
例えば、反応ガス組成(容量%)
TiCl 0.1〜0.8%、AlCl 0.5〜1.5%、NH 0.8〜4.5%、C 0〜1%、N 0〜10.0%、Ar 0〜10%、残りH
反応雰囲気温度: 700〜900 ℃、
反応雰囲気圧力: 2〜5 kPa、
という条件下で蒸着することによって、0.70≦x≦0.95、0≦y<0.005(但し、x、yは何れも原子比)を満足し、また、基体表面の法線方向に対して{100}面の法線がなす傾斜角を測定した傾斜角度数分布において、2〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜12度の範囲内に存在する傾斜角度数分布の割合が45%以上である本発明の立方晶構造の(Ti1−xAl)(C1−y)層からなる硬質被覆層(下部層)を形成することができる。
3−2.第2段階の成膜(上部層の成膜)
例えば、反応ガス組成(容量%)
TiCl0.1〜0.8%、AlCl 0.5〜1.5%、NH 0.8〜4.5%、C 0〜1%、N 0〜10.0%、Ar 0〜10%、残りH
反応雰囲気温度: 700〜900 ℃、
反応雰囲気圧力: 2〜5 kPa、
という条件下で蒸着することによって、0.70≦x≦0.95、0≦y<0.005(但し、x、yは何れも原子比)を満足し、また、基体表面の法線方向に対して{111}面の法線がなす傾斜角を測定した傾斜角度数分布において、2〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜12度の範囲内に存在する傾斜角度数分布の割合が45%以上である本発明の立方晶構造の(Ti1−xAl)(C1−y)層からなる硬質被覆層(上部層)を形成することができる。
4.切れ刃稜線部での下部層の露出
切れ刃稜線部の上部層の除去は、種々の方法があるが、例えば、Alを用いたウエットブラストによる方法が望ましい。
Manufacturing method of exposed part of upper layer, lower layer and cutting edge ridge line part The manufacturing method of the present invention is roughly as follows.
1. A cemented carbide substrate is manufactured by a normal manufacturing method.
2. Next, a base layer is formed on the cemented carbide substrate as necessary.
3. Subsequently, a two-stage film formation is performed using a normal CVD apparatus. At that time, the orientation is changed by changing NH 3 / (TiCl 4 + AlCl 3 ).
3-1. First stage deposition (lower layer deposition)
For example, reaction gas composition (volume%)
TiCl 4 0.1~0.8%, AlCl 3 0.5~1.5 %, NH 3 0.8~4.5%, C 2 H 4 0~1%, N 2 0~10.0% , Ar 0-10%, remaining H 2
Reaction atmosphere temperature: 700 to 900 ° C.
Reaction atmosphere pressure: 2 to 5 kPa,
Is satisfied under the conditions of 0.70 ≦ x ≦ 0.95 and 0 ≦ y <0.005 (where x and y are atomic ratios), and the normal direction of the substrate surface In the inclination angle number distribution in which the inclination angle formed by the normal of the {100} plane is measured, the highest peak is present in the inclination angle section within the range of 2 to 12 degrees, and within the range of 2 to 12 degrees. A hard coating layer (lower layer) composed of a (Ti 1-x Al x ) (C y N 1-y ) layer having a cubic structure according to the present invention having a tilt angle number distribution ratio of 45% or more is formed. can do.
3-2. Second stage deposition (upper layer deposition)
For example, reaction gas composition (volume%)
TiCl 4 0.1~0.8%, AlCl 3 0.5~1.5 %, NH 3 0.8~4.5%, C 2 H 4 0~1%, N 2 0~10.0% , Ar 0-10%, remaining H 2
Reaction atmosphere temperature: 700 to 900 ° C.
Reaction atmosphere pressure: 2 to 5 kPa,
Is satisfied under the conditions of 0.70 ≦ x ≦ 0.95 and 0 ≦ y <0.005 (where x and y are atomic ratios), and the normal direction of the substrate surface In the inclination angle distribution in which the inclination angle formed by the normal of the {111} plane is measured, the highest peak is present in the inclination angle section within the range of 2 to 12 degrees, and within the range of 2 to 12 degrees. A hard coating layer (upper layer) composed of a (Ti 1-x Al x ) (C y N 1-y ) layer having a cubic structure according to the present invention having a tilt angle number distribution ratio of 45% or more is formed. can do.
4). Exposure of the lower layer at the cutting edge ridge line portion There are various methods for removing the upper layer of the cutting edge ridge line portion. For example, a method by wet blasting using Al 2 O 3 is desirable.

次に、本発明の被覆工具を実施例により具体的に説明する。   Next, the coated tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、TaC粉末、NbC粉末、Cr粉末およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、ISO規格SEEN1203AFSNのインサート形状をもったWC基超硬合金製の工具基体A〜Cをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, TaC powder, NbC powder, Cr 3 C 2 powder and Co powder all having an average particle diameter of 1 to 3 μm are prepared, and these raw material powders are blended as shown in Table 1. Blended into the composition, added with wax, mixed in a ball mill in acetone for 24 hours, dried under reduced pressure, pressed into a compact of a predetermined shape at a pressure of 98 MPa, and the compact was 1370 in a vacuum of 5 Pa. Vacuum sintered at a predetermined temperature within a range of ˜1470 ° C. for 1 hour, and after sintering, manufacture tool bases A to C made of WC-base cemented carbide with ISO standard SEEN1203AFSN insert shape, respectively. did.

次に、これらの工具基体A〜Cの表面に、通常のCVD装置を用い、まず、表2に示される条件で、下部層である所定の組成を有する(Ti1−xAl)(C1−y)層を目標層厚になるまで蒸着形成した後、同じく表2に示される条件で上部層である所定の組成を有する(Ti1−xAl)(C1−y)層を形成し、その後、表5で示された条件にてAlを用いたウエットブラスト法により切れ刃稜線部の上部層を除去して、表6に示される本発明被覆工具1〜10を製造した。
なお、本発明被覆工具8〜10については、表4で示される形成条件で表6に示される下地層を形成した。
Next, a normal CVD apparatus is used on the surfaces of these tool bases A to C, and first, under the conditions shown in Table 2, the lower layer has a predetermined composition (Ti 1-x Al x ) (C after depositing form y N 1-y) layer to a target layer thickness, also in the conditions shown in Table 2 having a predetermined composition is an upper layer (Ti 1-x Al x) (C y N 1- y ) layer is formed, and then the upper layer of the cutting edge ridge is removed by wet blasting using Al 2 O 3 under the conditions shown in Table 5, and the coated tool of the present invention shown in Table 6 1-10 were manufactured.
In addition, about this invention coated tool 8-10, the base layer shown in Table 6 was formed on the formation conditions shown in Table 4.

また、比較の目的で、同じく工具基体A〜Cの表面に、通常のCVD装置を用い、表3に示される条件で、比較例の(Ti1−xAl)(C1−y)層を目標層厚で蒸着形成、その後、表5で示された条件にてAlを用いたウエットブラスト法により切れ刃稜線部の上部層を除去して、表7に示される比較被覆工具1〜10を製造した。なお、表7において、「切れ刃稜線部の幅(mm)」の欄が「−」のものは、切れ刃稜線部において下部層の露出がないものを示す。
また、本発明被覆工具8〜10については、表4で示される形成条件で表7に示される下地層を形成した。
Further, for the purpose of comparison, (Ti 1-x Al x ) (C y N 1-y ) of the comparative example is also used on the surfaces of the tool bases A to C under the conditions shown in Table 3 using a normal CVD apparatus. ) The layer was formed by vapor deposition with the target layer thickness, and then the upper layer of the cutting edge ridge was removed by the wet blasting method using Al 2 O 3 under the conditions shown in Table 5, and the comparison shown in Table 7 was made. Coated tools 1-10 were produced. In Table 7, “-” in the “width of the cutting edge ridge line portion (mm)” column indicates that the lower layer is not exposed in the cutting edge ridge line portion.
Moreover, about this invention coated tool 8-10, the base layer shown in Table 7 was formed on the formation conditions shown in Table 4.

本発明被覆工具1〜10、比較例被覆工具1〜10の各構成層の断面を、走査電子顕微鏡を用いて測定し、観察視野内の5点の層厚を測って平均して平均層厚を求めたところ、いずれも表6および表7に示される目標平均層厚と実質的に同じ平均層厚を示した。
次いで、前記の本発明被覆工具1〜10の硬質被覆層について、硬質被覆層の平均Al含有割合x、平均C含有割合y、基体表面の法線方向に対する{100}面の法線がなす傾斜角についての傾斜角度数分布における2〜12度の範囲内に存在する度数の割合(α)、および、基体表面の法線方向に対する{111}面の法線がなす傾斜角についての傾斜角度数分布における2〜12度の範囲内に存在する度数の割合(β)を測定した。
The cross-section of each constituent layer of the invention-coated tools 1 to 10 and the comparative example-coated tools 1 to 10 is measured using a scanning electron microscope, and the average layer thickness is measured by averaging the five layer thicknesses within the observation field of view. As a result, the average layer thickness substantially the same as the target average layer thickness shown in Tables 6 and 7 was obtained.
Next, with respect to the hard coating layers of the above-mentioned coated tools 1 to 10 of the present invention, the average Al content ratio x, the average C content ratio y of the hard coating layer, and the inclination formed by the normal of the {100} plane with respect to the normal direction of the substrate surface The ratio (α) of the frequency existing in the range of 2 to 12 degrees in the tilt angle number distribution for the angle, and the tilt angle number for the tilt angle formed by the normal of the {111} plane with respect to the normal direction of the substrate surface The ratio (β) of the frequency existing in the range of 2 to 12 degrees in the distribution was measured.

なお、前記それぞれの具体的な測定法は次のとおりである。
硬質被覆層の平均Al含有割合x、平均C含有割合yについては、二次イオン質量分析(SIMS:Secondary‐Ion‐Mass‐Spectroscopy)により求めた。イオンビームを試料表面側から70μm×70μmの範囲に照射し、スパッタリング作用によって放出された成分について深さ方向の濃度測定を行った。平均Al含有割合x、平均C含有割合yは深さ方向の平均値を示す。
The specific measuring methods for each of the above are as follows.
The average Al content ratio x and the average C content ratio y of the hard coating layer were determined by secondary ion mass spectrometry (SIMS): Secondary-Ion-Mass-Spectroscope. The ion beam was irradiated in the range of 70 μm × 70 μm from the sample surface side, and the concentration in the depth direction was measured for the components emitted by the sputtering action. The average Al content ratio x and the average C content ratio y indicate average values in the depth direction.

また、硬質被覆層の傾斜角度数分布については、立方晶構造のTiとAlの複合炭窒化物層からなる硬質被覆層の断面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に70度の入射角度で15kVの加速電圧の電子線を1nAの照射電流で、前記断面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に照射し、電子後方散乱回折像装置を用いて、工具基体と水平方向に長さ100μmにわたり硬質被覆層について0.1μm/stepの間隔で、基体表面の法線(断面研磨面における基体表面と垂直な方向)に対して、前記結晶粒の結晶面である{100}面と{111}面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより、2〜12度の範囲内に存在する度数の割合(α)および(β)を求めた。
なお、図3、4に、本発明被覆工具について測定した{100}面と{111}面の傾斜角度数分布グラフの一例をそれぞれ示す。
In addition, regarding the inclination angle number distribution of the hard coating layer, the column of the field emission scanning electron microscope with the cross section of the hard coating layer made of a composite carbonitride layer of Ti and Al having a cubic structure as a polished surface Each crystal grain having a cubic crystal lattice existing in the measurement range of the cross-sectional polished surface is irradiated with an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees on the polished surface with an irradiation current of 1 nA. Irradiate and use an electron backscatter diffraction imaging apparatus, the normal surface of the substrate surface (perpendicular to the substrate surface on the cross-section polished surface) at an interval of 0.1 μm / step with respect to the hard substrate over a length of 100 μm in the horizontal direction from the tool substrate. The tilt angle formed by the normal lines of the {100} plane and the {111} plane, which are crystal planes of the crystal grains, and, based on the measurement result, 0 of the measured tilt angles. Measurements in the range of ~ 45 degrees By dividing the inclination angle into pitches of 0.25 degrees and counting the frequencies existing in each section, the ratios (α) and (β) of the frequencies existing in the range of 2 to 12 degrees are obtained. It was.
FIGS. 3 and 4 show examples of the distribution graph of the inclination angle numbers of the {100} plane and {111} plane measured for the coated tool of the present invention.

次いで、比較例被覆工具1〜10についても、本発明被覆工具1〜10と同様にして、硬質被覆層の平均Al含有割合x、平均C含有割合y、基体表面の法線方向に対する{100}面と{111}面の法線がなす傾斜角についての傾斜角度数分布における2〜12度の範囲内に存在する度数の割合(α)と(β)を測定した。
表6、表7にその結果を示す。
Subsequently, also about the comparative example coated tools 1-10, similarly to this invention coated tools 1-10, the average Al content rate x of the hard coating layer, the average C content rate y, {100} with respect to the normal direction of the substrate surface The ratios (α) and (β) of the frequencies existing in the range of 2 to 12 degrees in the tilt angle number distribution with respect to the tilt angle formed by the normal of the surface and the {111} plane were measured.
Tables 6 and 7 show the results.

次に、前記の各種の被覆工具をいずれもカッタ径125mmの工具鋼製カッタ先端部に固定治具にてクランプした状態で、本発明被覆工具1〜10、比較例被覆工具1〜10について、以下に示す、合金鋼の高速高送り切削の一種である乾式高速正面フライス、センターカット切削加工試験を実施し、切刃の逃げ面摩耗幅を測定した。寿命基準は逃げ面摩耗幅が0.20mmとした。
被削材: JIS・SCM440幅100mm、長さ400mmのブロック材
回転速度: 943 min−1
切削速度: 380 m/min、
切り込み: 1.5 mm、
一刃送り量: 0.4 mm/刃、
切削時間: 5分
表8に、前記切削試験の結果を示す。また、比較被覆工具に関しては、切削時間5分以下で寿命となったものは、寿命に達した切削時間を記載した。
Next, for the present invention coated tools 1 to 10 and comparative example coated tools 1 to 10 in a state where all of the various coated tools are clamped to a tool steel cutter tip portion having a cutter diameter of 125 mm by a fixing jig, A dry high-speed face mill, which is a kind of high-speed high-feed cutting of alloy steel, and a center-cut cutting test shown below were performed, and the flank wear width of the cutting blade was measured. The life criterion was a flank wear width of 0.20 mm.
Work material: Block material of JIS / SCM440 width 100mm, length 400mm
Rotational speed: 943 min −1 ,
Cutting speed: 380 m / min,
Cutting depth: 1.5 mm,
Single blade feed rate: 0.4 mm / tooth,
Cutting time: 5 minutes Table 8 shows the results of the cutting test. Moreover, regarding the comparative coated tool, the tool that reached the end of its life after the cutting time of 5 minutes or less described the cutting time that reached the end of the life.

表6〜8に示される結果から、本発明被覆工具1〜10は、立方晶構造の(Ti1−xAl)(C1−y)層が成膜され、上部層と下部層からなり、
前記上部層は、電子線後方散乱回折装置を用いて個々の結晶粒の結晶方位を、前記TiとAlの複合炭窒化物層の縦断面方向から解析し、基体表面の法線方向に対する前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定した場合、前記傾斜角のうち、法線方向に対して0〜45度の範囲内にある傾斜角を0.25度のピッチ毎に区分して各区分内に存在する度数を集計したとき、2〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜12度の範囲内に存在する度数の合計が、傾斜角度数分布における度数全体の45%以上の割合を示し、
前記下部層は、電子線後方散乱回折装置を用いて個々の結晶粒の結晶方位を、前記TiとAlの複合炭窒化物層の縦断面方向から解析し、基体表面の法線方向に対する前記結晶粒の結晶面である{100}面の法線がなす傾斜角を測定した場合、前記傾斜角のうち、法線方向に対して0〜45度の範囲内にある傾斜角を0.25度のピッチ毎に区分して各区分内に存在する度数を集計したとき、2〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜12度の範囲内に存在する度数の合計が、傾斜角度数分布における度数全体の45%以上の割合を示し、
前記上部層と前記下部層の逃げ面全体の平均膜厚が、ともに、0.5〜10μmであり、
さらに、切れ刃稜線部において下部層が露出しているから、合金鋼の高速高送り切削加工において優れた耐チッピング性、耐摩耗性を発揮する。
これに対して、本発明の発明特定事項を一つでも満足しない比較例被覆工具1〜10については、いずれも、硬質被覆層にチッピング、欠損、剥離等の異常損傷が発生するばかりか、比較的短時間で使用寿命に至ることが明らかである。
From the results shown in Table 6-8, the present invention coated tool 1-10, (Ti 1-x Al x ) (C y N 1-y) layer of the cubic structure is deposited, an upper layer and a lower layer Consists of
The upper layer analyzes the crystal orientation of each crystal grain from the longitudinal cross-sectional direction of the composite carbonitride layer of Ti and Al using an electron beam backscattering diffractometer, and the crystal with respect to the normal direction of the substrate surface When the inclination angle formed by the normal of the {111} plane, which is the crystal plane of the grain, is measured, the inclination angle within the range of 0 to 45 degrees with respect to the normal direction is 0.25 degrees. When the frequencies existing in each section are tabulated for each pitch, the highest peak exists in the inclination angle section in the range of 2 to 12 degrees and the frequency in the range of 2 to 12 degrees Indicates a ratio of 45% or more of the entire frequency in the inclination angle frequency distribution,
The lower layer analyzes the crystal orientation of individual crystal grains from the longitudinal cross-sectional direction of the composite carbonitride layer of Ti and Al using an electron beam backscattering diffractometer, and the crystal with respect to the normal direction of the substrate surface When the inclination angle formed by the normal of the {100} plane which is the crystal plane of the grain is measured, the inclination angle within the range of 0 to 45 degrees with respect to the normal direction is 0.25 degrees among the inclination angles. When the frequencies existing in each section are tabulated for each pitch, the highest peak exists in the inclination angle section in the range of 2 to 12 degrees and the frequency in the range of 2 to 12 degrees Indicates a ratio of 45% or more of the entire frequency in the inclination angle frequency distribution,
The average film thickness of the entire flank of the upper layer and the lower layer is both 0.5 to 10 μm,
Furthermore, since the lower layer is exposed at the edge portion of the cutting edge, it exhibits excellent chipping resistance and wear resistance in high-speed high-feed cutting of alloy steel.
On the other hand, for the comparative coated tools 1 to 10 that do not satisfy even one of the invention-specific matters of the present invention, all of the hard coating layers are not only damaged abnormally such as chipping, chipping, peeling, etc. It is clear that the service life is reached in a short time.

上述のように、この発明の被覆工具は、合金鋼の高速高送り切削加工ばかりでなく、各種の被削材の被覆工具として用いることができ、しかも、長期の使用にわたって優れた耐チッピング性、耐摩耗性を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。
As described above, the coated tool of the present invention can be used as a coated tool for various work materials as well as high-speed high-feed cutting of alloy steel, and has excellent chipping resistance over a long period of use. Since it exhibits wear resistance, it can satisfactorily meet the demands for higher performance of cutting devices, labor saving and energy saving of cutting, and cost reduction.

Claims (5)

炭化タングステン基超硬合金、炭窒化チタン基サーメットまたは立方晶窒化ホウ素基超高圧焼結体のいずれかで構成された工具基体の表面に、硬質被覆層を有する表面被覆切削工具において、
(a)前記硬質被覆層は、立方晶構造のTiとAlの複合炭窒化物層からなり、その平均組成を、
組成式:(Ti1−xAl)(C1−y
で表した場合、Al含有割合xおよびC含有割合y(但し、x、yは何れも原子比)は、それぞれ、0.70≦x≦0.95、0≦y<0.005を満足し、
(b)前記複合炭窒化物層は、上部層と下部層からなり、
前記上部層は、電子線後方散乱回折装置を用いて個々の結晶粒の結晶方位を、前記TiとAlの複合炭窒化物層の縦断面方向から解析し、前記基体表面の法線方向に対する前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定した場合、前記傾斜角のうち、前記法線方向に対して0〜45度の範囲内にある傾斜角を0.25度のピッチ毎に区分して各区分内に存在する度数を集計したとき、2〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜12度の範囲内に存在する度数の合計が、傾斜角度数分布における度数全体の45%以上の割合を示し、
前記下部層は、電子線後方散乱回折装置を用いて個々の結晶粒の結晶方位を、前記TiとAlの複合炭窒化物層の縦断面方向から解析し、前記基体表面の法線方向に対する前記結晶粒の結晶面である{100}面の法線がなす傾斜角を測定した場合、前記傾斜角のうち、前記法線方向に対して0〜45度の範囲内にある傾斜角を0.25度のピッチ毎に区分して各区分内に存在する度数を集計したとき、2〜12度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜12度の範囲内に存在する度数の合計が、傾斜角度数分布における度数全体の45%以上の割合を示し、
(c)前記上部層と前記下部層の平均膜厚が、ともに、0.5〜10μmであり、
(d)切れ刃稜線部において下部層が露出していること、
を特徴とする表面被覆切削工具。
In a surface-coated cutting tool having a hard coating layer on the surface of a tool base composed of any of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, or cubic boron nitride-based ultrahigh pressure sintered body,
(A) The hard coating layer is composed of a composite carbonitride layer of Ti and Al having a cubic structure, and the average composition is
Composition formula: (Ti 1-x Al x ) (C y N 1-y )
In this case, the Al content ratio x and the C content ratio y (where x and y are atomic ratios) satisfy 0.70 ≦ x ≦ 0.95 and 0 ≦ y <0.005, respectively. ,
(B) The composite carbonitride layer is composed of an upper layer and a lower layer,
The upper layer analyzes the crystal orientation of each crystal grain from the longitudinal cross-sectional direction of the composite carbonitride layer of Ti and Al using an electron beam backscattering diffractometer, and the normal direction of the substrate surface When the inclination angle formed by the normal line of the {111} plane, which is the crystal plane of the crystal grain, is measured, an inclination angle in the range of 0 to 45 degrees with respect to the normal direction is set to 0. When the frequency existing in each section is counted by dividing every 25 degrees pitch, the highest peak exists in the inclination angle section in the range of 2 to 12 degrees, and it exists in the range of 2 to 12 degrees. The sum of the frequencies to be displayed indicates a ratio of 45% or more of the total frequencies in the tilt angle frequency distribution,
The lower layer analyzes the crystal orientation of each crystal grain using an electron beam backscattering diffractometer from the longitudinal cross-sectional direction of the composite carbonitride layer of Ti and Al, and the normal direction of the substrate surface When the inclination angle formed by the normal line of the {100} plane, which is the crystal plane of the crystal grain, is measured, an inclination angle in the range of 0 to 45 degrees with respect to the normal direction is set to 0. When the frequency existing in each section is counted by dividing every 25 degrees pitch, the highest peak exists in the inclination angle section in the range of 2 to 12 degrees, and it exists in the range of 2 to 12 degrees. The sum of the frequencies to be displayed indicates a ratio of 45% or more of the total frequencies in the tilt angle frequency distribution,
(C) The average film thicknesses of the upper layer and the lower layer are both 0.5 to 10 μm,
(D) the lower layer is exposed at the cutting edge ridge line portion;
A surface-coated cutting tool characterized by
工具厚さ方向に対して垂直方向の前記下部層の露出幅が0.01mmを超え、0.5mm未満であることを特徴とする請求項1に記載の表面切削工具。   The surface cutting tool according to claim 1, wherein an exposed width of the lower layer in a direction perpendicular to the tool thickness direction is more than 0.01 mm and less than 0.5 mm. 前記上部層の平均膜厚が前記下部層の平均膜厚よりも薄いことを特徴とする請求項1または2に記載の表面被覆切削工具。 The surface-coated cutting tool according to claim 1, wherein an average film thickness of the upper layer is thinner than an average film thickness of the lower layer. 前記上部層および前記下部層の結晶粒径が100〜3000nmで、結晶粒径アスペクト比が2〜10であることを特徴とする請求項1〜3のいずれか一項に記載の表面被覆切削工具。 The surface-coated cutting tool according to any one of claims 1 to 3, wherein the upper layer and the lower layer have a crystal grain size of 100 to 3000 nm and a crystal grain size aspect ratio of 2 to 10. . 前記下部層が露出している部分の表面粗さ(Ra)が0.5μm未満であることを特徴とする請求項1〜4のいずれか一項に記載の表面被覆切削工具。 The surface-coated cutting tool according to any one of claims 1 to 4, wherein a surface roughness (Ra) of a portion where the lower layer is exposed is less than 0.5 µm.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019005855A (en) * 2017-06-26 2019-01-17 三菱マテリアル株式会社 Surface coated cutting tool whose hard coating layer exhibits excellent chipping resistance
JP6750789B1 (en) * 2019-04-17 2020-09-02 住友電工ハードメタル株式会社 Cutting tools
WO2020213259A1 (en) * 2019-04-17 2020-10-22 住友電工ハードメタル株式会社 Cutting tool
JP2022030402A (en) * 2020-08-07 2022-02-18 三菱マテリアル株式会社 Surface-coated cutting tool

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019005855A (en) * 2017-06-26 2019-01-17 三菱マテリアル株式会社 Surface coated cutting tool whose hard coating layer exhibits excellent chipping resistance
JP6750789B1 (en) * 2019-04-17 2020-09-02 住友電工ハードメタル株式会社 Cutting tools
WO2020213259A1 (en) * 2019-04-17 2020-10-22 住友電工ハードメタル株式会社 Cutting tool
US11007580B2 (en) 2019-04-17 2021-05-18 Sumitomo Electric Hardmetal Corp. Cutting tool
JP2022030402A (en) * 2020-08-07 2022-02-18 三菱マテリアル株式会社 Surface-coated cutting tool
JP7541279B2 (en) 2020-08-07 2024-08-28 三菱マテリアル株式会社 Surface-coated cutting tools

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