JP2018029043A - Flash lamp device and flash lamp unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a flash lamp device capable of outputting pulse light with a high peak and short width.SOLUTION: A flash lamp device (100) includes: flash lamp unit (1) having a plurality of flash lamps (10) connected in parallel and at least one trigger wire (11) adjacently arranged along each of the plurality of flash lamps; and a lighting device (2) having a power storage element (22), a coil (23) inserted and connected to a current path from the power storage element to the flash lamp unit, and a start circuit (24) for applying trigger voltage for making the plurality of the flash lamps simultaneously induce dielectric breakdown to at least one trigger wire.SELECTED DRAWING: Figure 1A

Description

  The present invention relates to a flash lamp device and a flash lamp unit.

  The flash lamp device of Patent Document 1 includes a flash lamp, a capacitor for supplying energy to the flash lamp, a coil connected between the capacitor and the flash lamp, a trigger electrode wound around the flash lamp, and a trigger. A trigger circuit connected to the electrode is provided. When the trigger circuit applies a high voltage to the trigger electrode while the capacitor is charged, the flash lamp is broken down and a current from the capacitor is supplied. As a result, a pulsed lamp current determined by the capacitance of the capacitor and the inductance of the coil flows through the flash lamp, and flashing is performed.

  The heat treatment apparatus disclosed in Patent Document 2 further includes a semiconductor switching element such as an IGBT connected in series to the flash lamp in the configuration as described above, and the semiconductor switching element is turned on / off at a predetermined pulse width and pulse interval. As a result, a pulse current having a width corresponding to the ON period of the semiconductor switching element is input to the flash lamp, and an object to be processed is irradiated with a light pulse corresponding to the pulse current. That is, the lamp current and the pulse width of the output light are adjusted by adjusting the ON period of the semiconductor switching element.

Japanese Patent No. 4140279 JP 2009-70948 A

  In the apparatus of Patent Document 1, it is difficult to generate a lamp current consisting of a pulse having a high peak and a short width, and therefore it is impossible to realize high-temperature and short-time flash irradiation on the irradiated object. For example, although it is possible to increase the capacitor charging voltage to generate a high peak pulse current and output light, there is a problem of so-called self-breakdown that causes flash lamp breakdown during capacitor charging. End up. In addition, it is possible to increase the peak of the pulse current by reducing the resistance of the flash lamp, but in order to reduce the resistance of the flash lamp, it is necessary to increase the lamp diameter and shorten the lamp length as a restriction on the lamp structure. As a result, the lamp irradiation range is narrowed, making it difficult to irradiate a large area. The peak of the pulse current can also be increased by increasing the capacitance of the capacitor, but at the same time, the pulse width, that is, the base of the pulse waveform is expanded, and excessive heating of the irradiated object is a problem as will be described in detail later. It becomes.

  Further, in the device of Patent Document 2, since a semiconductor switching element is inserted in the lamp current path, it is difficult to increase the capacity of the device (high voltage and large current) from the viewpoint of procurement of parts of the semiconductor switching element and cost. There is a problem. For example, when a lamp voltage of several k to several tens of kV and a lamp current of 100 A or more are required, a semiconductor switching element having such a withstand voltage and current capacity is difficult to obtain in the market or very expensive. It becomes. As described above, a configuration in which a semiconductor switching element is included in the lamp current path can theoretically generate a pulse current having a high peak and a short width, but it is not practical depending on the output specification of the flash lamp device. There is a case.

  Accordingly, an object of the present invention is to provide a flash lamp device capable of outputting pulse light having a high peak and a short width, and a lamp unit suitable for the flash lamp device.

  A flash lamp device according to a first embodiment of the present disclosure includes: a plurality of flash lamps connected in parallel; a flash lamp unit having at least one trigger line disposed in close proximity along each of the plurality of flash lamps; A coil having a start-up circuit for applying a trigger voltage for simultaneously causing dielectric breakdown of a plurality of flash lamps to at least one trigger line; and a coil inserted and connected in a current path from the storage element to the flash lamp unit Device.

  A flash lamp device according to a second embodiment of the present disclosure includes a plurality of flash lamps connected in parallel and a flash lamp unit having at least one trigger line disposed in close proximity along each of the plurality of flash lamps, and a magnetic pulse. A lighting device having a compression circuit, a control unit for starting the operation of the magnetic pulse compression circuit, and a starting means for applying a trigger voltage for simultaneously breaking down a plurality of flash lamps at a predetermined timing to at least one trigger line; Is provided.

  According to the flash lamp device of the first and second embodiments, the flash lamp unit is configured such that energy from the lighting device is simultaneously input to a plurality of flash lamps connected in parallel. Accordingly, it is possible to reduce the impedance of the flash lamp unit and to supply a plurality of flash lamps with a high peak and short width pulse current, whereby the flash lamp device outputs high peak and short width pulse light. It becomes possible.

  A flash lamp unit according to a third embodiment of the present disclosure includes a plurality of straight tubular flash lamps arranged in parallel with each other and having electrodes at one end and the other end, respectively, and a plurality of flash lamps one to one. A plurality of trigger lines arranged in close proximity to each other and not included in a region defined by the plurality of flash lamps and the irradiation direction of the plurality of flash lamps, and a plurality of one end sides of the plurality of flash lamps A first wiring commonly connected to the plurality of electrodes, a second wiring commonly connected to the plurality of electrodes on the other end side of the plurality of flash lamps, and a holding member that holds the plurality of flash lamps. .

  According to the above configuration, a plurality of flash lamps can be handled as one lamp structure, and workability in installing a plurality of flash lamps is improved. In addition, a plurality of trigger lines are arranged in close proximity to each of the plurality of flash lamps so as not to be included in the irradiation direction, so that the plurality of flash lamps connected in parallel are simultaneously turned on. Even in the configuration, the trigger line does not interfere with irradiation. That is, the trigger line itself does not become a shadow in irradiation, and a high irradiation amount is ensured.

  Here, in the cross section perpendicular to the longitudinal direction of the flash lamp, the trigger line corresponding to the outermost flash lamp among the plurality of flash lamps is on the circumference of the outermost flash lamp, and the first end of the rear direction end. It is preferable to arrange in a range from the position of 1 to the second position rotated 90 degrees in a direction away from the flash lamp adjacent to the outermost flash lamp. Thereby, the separation distance between the trigger lines is increased, and the interference between the trigger lines is minimized. Further, the distance between the trigger line and the flash lamp that do not correspond is increased, and the one-to-one relationship between the trigger line and the flash lamp is enhanced. Therefore, a reliable lamp start is promoted by an equal action from the trigger line to the corresponding flash lamp.

  A flash lamp unit according to a fourth embodiment of the present disclosure includes a plurality of straight tubular flash lamps arranged parallel to each other, each having an electrode at one end and the other end, and adjacent flash lamps among the plurality of flash lamps In between, at least one trigger line disposed close to both of the adjacent flash lamps, a first wiring commonly connected to a plurality of electrodes on one end side of the plurality of flash lamps, and other flash lamps A second wiring commonly connected to the plurality of electrodes on the end side; and a holding member for holding the plurality of flash lamps.

  According to the above configuration, a plurality of flash lamps can be handled as one lamp structure, and workability in installing a plurality of flash lamps is improved. In addition, the number of trigger lines can be less than or equal to the number of flash lamps, especially when the number of trigger lines is less than the number of flash lamps, compared to the case where the trigger lines are arranged one-on-one on the flash lamp. This is advantageous in terms of cost. Further, since the trigger line is substantially accommodated in the circumscribed shape of the plurality of flash lamps in the cross section perpendicular to the longitudinal direction of the flash lamp, high space efficiency can be obtained.

  Further, the plurality of flash lamps are composed of three flash lamps, at least one trigger line is composed of one trigger line, and one trigger line is formed in a cross section perpendicular to the longitudinal direction of the plurality of flash lamps. It may be arranged in an area surrounded by three flash lamps. As a result, the three flash lamps can be started with the minimum number of trigger lines, which is more advantageous in terms of cost.

  Further, as the fifth mode, the third mode and the fourth mode may be merged. In this case, the flash lamp units are arranged in parallel to each other, and electrodes are respectively provided at one end and the other end. A plurality of straight tubular flash lamps, and a region that is adjacently disposed in a one-to-one correspondence with a part of the plurality of flash lamps and that is defined by a plurality of flash lamps and an irradiation direction of the plurality of flash lamps At least one first trigger line arranged so as not to be included in at least one of the adjacent flash lamps between the adjacent flash lamps of the plurality of flash lamps. The second trigger line, the first wiring commonly connected to the plurality of electrodes on one end side of the plurality of flash lamps, and the plurality of flash lines. Comprising a second wiring connected in common to the plurality of electrodes of the other end of Sshuranpu, and a holding member for holding a plurality of flash lamps. As described above, the trigger lines can be appropriately arranged according to various arrangements of the flash lamps.

  The flash lamp units according to the third to fifth embodiments are suitable for simultaneously lighting a plurality of flash lamps connected in parallel. Therefore, these flash lamp units are suitably applied as the flash lamp units of the flash lamp devices of the first and second embodiments.

1 is a circuit diagram of a flash lamp device according to a first embodiment. FIG. It is a circuit diagram which shows an example of the starting circuit in a flash lamp apparatus. It is a figure explaining operation | movement of the flash lamp apparatus by 1st Embodiment. It is a figure explaining operation | movement of the flash lamp apparatus by 1st Embodiment. It is a circuit diagram of the flash lamp apparatus by 2nd Embodiment. It is a figure explaining operation | movement of the flash lamp apparatus by 2nd Embodiment. It is a circuit diagram of the flash lamp apparatus by the other example of 2nd Embodiment. It is a circuit diagram which shows an example of the lighting device in 2nd Embodiment. It is a circuit diagram which shows an example of the lighting device in 2nd Embodiment. It is a circuit diagram which shows an example of the lighting device in 2nd Embodiment. It is a circuit diagram which shows an example of the lighting device in 2nd Embodiment. It is a circuit diagram which shows an example of the lighting device in 2nd Embodiment. It is a figure which shows the flash lamp unit by 3rd Embodiment. It is sectional drawing which shows the flash lamp unit of the other example of 3rd Embodiment. It is sectional drawing which shows the flash lamp unit of the other example of 3rd Embodiment. It is a figure which shows the flash lamp unit by 4th Embodiment. It is sectional drawing which shows the flash lamp unit of the other example of 4th Embodiment. It is sectional drawing which shows the flash lamp unit of the other example of 4th Embodiment. It is sectional drawing which shows the flash lamp unit of the other example of 4th Embodiment. It is sectional drawing which shows the flash lamp unit by 5th Embodiment.

  A flash lamp device according to an embodiment described below is used in a process of peeling a flexible organic EL substrate from a glass substrate or the like, for example. Specifically, a flexible organic EL substrate is formed on the glass substrate before this peeling step. This is because the organic EL substrate (which will later become a flexible organic EL substrate) is very flexible, and therefore it is necessary to perform mounting processing of circuit components and the like on the organic EL substrate on a shape-stable glass substrate. . After the organic EL substrate is formed on the glass substrate, the organic EL substrate and the glass substrate are irradiated with pulses from the glass substrate side by a flash lamp. In response to this pulse irradiation, stress is generated between the two substrates due to the difference in thermal expansion coefficient between the organic EL substrate and the glass substrate, and the coupling between the two is released by this stress. Then, the organic EL substrate is peeled from the glass substrate in such a state where the bond is released, and the flexible organic EL substrate is completed.

  Here, in the pulse irradiation by the flash lamp, when the peak of the light pulse is not sufficiently high, that is, when the peak value of the pulse waveform of the lamp current is not sufficiently high, the coupling between the two substrates is not released. Even if the peak of the light pulse is sufficiently high, if the pulse width is wide, that is, if the half-value width, 1 / 3-value width, etc. of the pulse waveform of the lamp current is large, the coupling between the two substrates is released. There is a possibility that the circuit elements in the organic EL substrate may be damaged by the excessive irradiation heat continued after the peak. Therefore, in the step of peeling the organic EL substrate from the glass substrate, it is desirable to generate a light pulse having a high peak and a short width, that is, a pulse waveform of a lamp current corresponding to the pulse. The flash lamp devices according to the following embodiments realize such a lamp current and light output with a pulse waveform.

<First Embodiment>
FIG. 1A shows a flash lamp device 100 according to a first embodiment of the present invention. The flash lamp device 100 includes a flash lamp unit 1 (hereinafter referred to as “lamp unit 1”) and a lighting device 2 for supplying power to the lamp unit 1. The lamp unit 1 includes a plurality of flash lamps (hereinafter referred to as “lamps”) connected in parallel. In this example, the lamp unit 1 includes three lamps 10a, 10b and 10c and corresponding trigger lines 11a, 11b and 11c.

  In the lamp unit 1, the lamps 10a, 10b, and 10c connected in parallel are the same lamp, and are suitable for flash discharge such as a xenon lamp. The trigger wires 11a, 11b, and 11c are made of conductive metal wires, and are arranged close to the lamps 10a, 10b, and 10c, respectively, and a trigger voltage is applied from the starting circuit 24. The trigger lines 11a, 11b, and 11c are arranged so as not to short-circuit each other. In the following description, the entire lamps 10a, 10b, and 10c (and lamps 10e to 10j in the embodiments described later) may be generically named or a part thereof may be referred to as the lamp 10. In addition, the trigger lines 11a, 11b, and 11c (and trigger lines 11e to 11g in the embodiments described later) may be collectively referred to as a trigger line 11, or a part thereof may be referred to as the trigger line 11. Electrons are supplied into the discharge space by the respective potential differences in the discharge space of each trigger line 11 and the corresponding lamp 10, and the start of the lamp 10 is promoted.

  The lighting device 2 includes a charging circuit 21, a power storage element 22, a coil 23, a starting circuit 24, a control unit 25, and a voltage detection circuit 26. The charging circuit 21 is a DC power supply circuit. For example, when an AC power supply such as a commercial power supply is input, the charging circuit 21 is, for example, a full-wave rectifier that performs full-wave rectification of the AC voltage, a smoothing capacitor that smoothes the full-wave rectified output, and a smoothing voltage that is AC at high frequency. It includes a full bridge circuit for conversion, a step-up transformer for stepping up the AC conversion output, and a rectifier circuit for rectifying the secondary output of the step-up transformer.

  The power storage element 22 stores the boosted output from the charging circuit 21. In the present embodiment, a capacitor (for example, an oil capacitor) is shown as the power storage element 22, but the power storage element may be an electric double layer capacitor, a battery, an electrolytic capacitor, or the like (hereinafter also referred to as “capacitor 22”).

  The coil 23 is inserted and connected on the lamp current path from the capacitor 22 to the lamp unit 1. The coil 23 is a circuit element that is normally connected to adjust the pulse waveform of the lamp current flowing from the capacitor 22 to the lamps 10a, 10b, and 10c.

  When the lamp 10 is turned on, the starting circuit 24 generates a high voltage pulse in the trigger lines 11a, 11b, and 11c in accordance with a starting signal from the control unit 25, and causes the lamps 10a, 10b, and 10c to break down almost simultaneously. The starting circuit 24 includes three sets of the same pulse generation circuits 24a, 24b, and 24c. Each of the pulse generation circuits 24a to 24c has a transformer 241 and a primary winding 241p of the transformer 241 as illustrated in FIG. 1B. A capacitor 242 and a switch element 243 connected in series, and a voltage source 244 and a resistor 245 for charging the capacitor 242 are included. The secondary winding 241s of the transformer 241 in each of the pulse generation circuits 24a to 24c is connected to the trigger lines 11a, 11b, and 11c, respectively. In each of the pulse generation circuits 24a to 24c, when the switch element 243 is turned on while the capacitor 242 is charged, a primary pulse voltage is generated in the primary winding 241p by the discharge current from the capacitor 242. The primary pulse voltage is boosted according to the turns ratio of the transformer 241, and the boosted secondary pulse voltage generated in the secondary winding 241 s is applied to the corresponding trigger line 11.

  In the present embodiment, three sets of pulse generation circuits 24a, 24b, and 24c are connected to three trigger lines 11a, 11b, and 11c, respectively, but one set of pulse generation circuits includes three triggers. It is good also as a structure connected in common with respect to line 11a, 11b, and 11c. In this case, in FIG. 1B, the wiring from the secondary winding 241s is branched to the three trigger lines 11. Further, as will be described later in the fourth and fifth embodiments, the number of trigger wires 11 connected may be less than the number of lamps 10 connected.

  The control unit 25 controls the charging circuit 21 and the starting circuit 24. For example, when receiving a lighting command from the outside of the apparatus, the control unit 25 outputs a charging start signal to the charging circuit 21 to charge the capacitor 22. For example, when the charging voltage of the capacitor 22 detected by the voltage detection circuit 26 including a voltage dividing resistor (high resistance element) reaches a predetermined value, the charging circuit 21 stops charging and outputs a charging completion signal to the control unit 25. . Alternatively, the voltage detection value by the voltage detection circuit 26 is directly input to the control unit 25, and when the voltage detection value reaches a predetermined value, the control unit 25 outputs a charge completion signal to the charging circuit 21 for charging. The operation may be stopped. When receiving or outputting the charge completion signal, the control unit 25 outputs a start signal to the start circuit 24 and simultaneously operates the start circuits 24a to 24c (that is, turns on the respective switch elements 243 at the same time).

  When the capacitor 22 is charged by the charging circuit 21 and the lamps 10a, 10b, and 10c are broken down by the starting voltage from the starting circuit 24 and the trigger wires 11a, 11b, and 11c, the energy of the capacitor 22 is passed through the coil 23. The lamp unit 1 is turned on and flashing is performed.

  Here, the lamp current when the three lamps 10a to 10c are connected in parallel in the lamp unit 1 as in this embodiment, and when only one lamp 10 is connected in the lamp unit 1 as a comparative example. Compare The impedance of each lamp 10 is Z, the total lamp current of the three lamps 10a to 10c in the present embodiment is i3, and the lamp current of one lamp 10 in the comparative example is i1. In any case, it is assumed that the charging voltage of the capacitor 22 is E and the capacitance is C.

If the impedance of the coil 23 is ignored, when the capacitor 22 is discharged,
i1 = E / Z × e ^{−t / CZ}
i3 = E / (Z / 3) × e ^{−3t / CZ}
Holds. Therefore, in this assumption, referring to the value of t = 0, the peak value of the lamp current i3 is three times the peak value of the lamp current i1. Focusing on the exponent part of e, the time constant of the lamp current i3 is one third of the time constant of the lamp current i1. Therefore, it can be seen that the pulsed light emitted from the lamp unit 1 of the present embodiment is relatively steeper than the pulsed light emitted from the lamp unit of the comparative example. Actually, the coil 23 has impedance that contributes to pulse waveform adjustment, the capacitor 22 also has internal resistance, and the impedance Z of the lamp 10 is not a perfect resistor (generally a negative resistance). ) And the like, the relationship between the lamp currents i1 and i3 is not as described above, but the tendency that the lamp current i3 is steeple with respect to the lamp current i1 is sufficiently obtained.

Hereinafter, when only one lamp 10 is connected in the lamp unit 1 (Comparative Example C ₁ ), when two lamps 10 are connected (Example P ₂ ), and when three lamps 10 are connected ( for example P _3), it shows the measurement results in the case that has actually lighting the lamp unit 1. In the measurement, the charging voltage E of the capacitor 22 is 3.6 kV, the capacitance C is 300 μF, and the inductance of the coil 23 is 70 μH.

FIG. 2 shows the measurement results of Comparative Example C ₁ , Example P ₂ and Example P ₃ as line C 1, line P ₂ and line P ₃ , respectively. The horizontal axis in FIG. 2 is time, and the vertical axis is current. The peak value of the lamp current is about 1.3 kA in Comparative Example C ₁ (Line C1), about 2.1 kA in Example P ₂ (Line P2), and about 2 in Example P ₃ (Line P3). 0.5 kA. The half widths of the pulses on the lines C1, P2 and P3 were about 0.52 msec, 0.42 msec and 0.42 msec, respectively. Moreover, the 1/3 value widths of the pulses on the lines C1, P2 and P3 were about 0.72 msec, 0.51 msec and 0.50 msec, respectively. Thus, by connecting the plurality of lamps 10 in the lamp unit 1 in parallel, the pulse can be narrowed compared to the case where the single lamp 10 is connected.

3 shows for comparison, as a virtual lamp current waveform, respectively lines P12 and line P13 in the case where the reduced to the same 1.3kA as Comparative Example C ₁ of the peak value in the line P2 and P3. The horizontal and vertical axes in FIG. 3 are the same as those in FIG. A decrease in the peak value of the lamp current is obtained by a decrease in the charging voltage E. As can be seen from the expressions of the current values i1 and i3, the lamp current is proportional to the charging voltage E. Therefore, the lines P12 and P13 are obtained by simply reducing the lines P2 and P3 in the vertical axis direction, respectively (therefore, The half width and 1/3 value width of the line P12 are the same as those of the line P2, and the half value width and 1/3 value width of the line P13 are the same as those of the line P3).

In FIG. 3, particularly focusing on 0.5 msec and thereafter, a considerable amount of gradually decreasing current continues in line C1, whereas this gradually decreasing current is greatly reduced in line P12 and further reduced in line P13. I understand that. That is, as compared with Comparative Example C _1, according to Example P ₂ and P _3, so that the excess residual heat after the heating by the current peak of the irradiation target object can be prevented.

  As described above, the flash lamp device 100 of this embodiment includes the lamp unit 1 and the lighting device 2. The lamp unit 1 includes a plurality of lamps 10 connected in parallel, and a trigger line 11 disposed close to each other along each of the plurality of lamps 10. The lighting device 2 is started to apply a trigger voltage to the trigger wire 11 to simultaneously break down the capacitor 22, the coil 23 inserted and connected to the current path from the capacitor 22 to the lamp unit 1, and the plurality of lamps 10. A circuit 24 is included. Thus, the lamp unit 1 is configured such that the energy from the lighting device 2 (capacitor 22) is simultaneously input to the plurality of lamps 10 connected in parallel. Therefore, the impedance of the lamp unit 1 can be reduced, and a high peak and short width pulse current can be applied to the lamp 10, whereby the flash lamp device 100 outputs a high peak and short width pulse light. Can do. Accordingly, in the production of the flexible organic EL substrate, the organic EL substrate can be peeled from the glass substrate without damaging the circuit elements of the organic EL substrate, and the productivity of the flexible organic EL substrate is increased.

<Second Embodiment>
In the first embodiment, the configuration in which the lamp current is directly generated from the power storage element in the lighting device is shown, but in the present embodiment, the configuration in which the lamp current is generated from the magnetic pulse compression circuit is shown.

  FIG. 4 shows a flash lamp device 101 according to the second embodiment. The flash lamp device 101 includes the lamp unit 1 and the lighting device 3, and the configuration of the lighting device 3 is different from the configuration of the lighting device 2 of the first embodiment. In the present embodiment, the same components as those of the flash lamp device 100 of the first embodiment are denoted by the same reference numerals, and redundant description is omitted.

  The lighting device 3 includes a magnetic pulse compression circuit 30, a control unit 40, and a starting means 50. The magnetic pulse compression circuit 30 includes a charging circuit 31, a storage element 32, a transformer 33, a switch element 34, a saturable inductor 35-0 to 35-n, and capacitors 36-1 to 36-n + 1 (in this embodiment, n = 2). The final stage capacitor 36-n + 1 (that is, the capacitor 36-3) may be referred to as a capacitor 36p.

  The charging circuit 31 charges the storage element 32 in response to a charging start signal from the control unit 40. The storage element 32 may be an oil capacitor, an electric double layer capacitor, a battery, an electrolytic capacitor, or the like. The charging circuit 31 is provided with a voltage detection circuit (not shown) that detects the charging voltage of the storage element 32, and is configured to stop charging when the charging voltage reaches a set value. Further, the charging circuit 31 may output a charging completion signal to the control unit 40 in response to the completion of charging of the storage element 32.

  The transformer 33 is a step-up transformer having a primary winding 33p and a secondary winding 33s. The switch element 34 is a semiconductor switch such as an IGBT. The saturable inductor 35-0 is a so-called magnetic switch. When the time integral value of the applied voltage across the both ends exceeds a predetermined value (characteristic value), the saturable inductor 35-0 is saturated and the impedance is sharply reduced. The storage element 32, the saturable inductor 35-0, the primary winding 33p, and the switch element 34 are connected to form a loop. The saturable inductor 35-0 is for reducing switching loss when the switch element 34 is on (by forming a phase difference between the voltage and current applied to the switch element 34). Can be omitted.

  The saturable inductors 35-1 and 35-2 have the same function as the saturable inductor 35-0. Capacitors 36-1, 36-2, and 36-3 (36p) are, for example, film capacitors. In addition, the capacitor 36-1, the saturable inductor 35-1, and the capacitor 36-2 are connected to form a series circuit (hereinafter referred to as “first closed loop”), and the capacitor 36-2, the saturable inductor 35- 2 and the capacitor 36-3 (36p) are connected to form a series circuit (hereinafter referred to as “second closed loop”). The capacitor 36-1 is connected in parallel to the secondary winding 33s of the transformer 33, and the capacitor 36-2 is connected to a connection node between the saturable inductor 35-1 and the saturable inductor 35-2. Generalizing this continuous configuration, for 1 ≦ k ≦ n and 1 ≦ n, the capacitor 36-k, the saturable inductor 35-k, and the capacitor 36-k + 1 constitute a closed loop, and the capacitor 36-k and the saturable state. The saturable inductor 35-k + 1 is connected to the connection node of the inductor 35-k. In the present embodiment, n = 2, but n may be 1 or 3 or more.

  The control unit 40 includes a charge control unit 41 and a switch control unit 42. The control unit 40 includes a CPU (not shown), a memory, and an input / output interface. The CPU includes a charge control unit 41 and a switch control unit 42. And each component in the control part 40 is comprised in the aspect which can exchange data or a signal via a suitable bus | bath.

  The charging control unit 41 outputs a charging start signal to the charging circuit 31 and instructs the start of the charging operation. The switch control unit 42 controls on / off of the switch element 34. For example, the switch control unit 42 turns on the switch element 34 with a predetermined time width in accordance with the charge completion signal input from the charging circuit 31 (via the charge control unit 41 or directly). Alternatively, the switch control unit 42 sets the switch element 34 at a predetermined interval (for example, an interval based on the conveyance speed of the production line that conveys the glass substrate and the organic EL substrate) at a predetermined timing after completion of charging, and the predetermined value. You may make it turn on in the time width of.

  After the storage element 32 is charged and the switch element 34 is turned on, when the integrated value of the voltage across the saturable inductor 35-0 exceeds the characteristic value, the impedance sharply decreases, and the charge of the storage element 32 is saturated. It is discharged via the inductor 35-0, the primary winding 33p of the transformer 33 and the switch element 34. Thereby, energy is transmitted from the primary winding 33p to the secondary winding 33s, and the voltage of the power storage element 32 is boosted according to the turn ratio of the secondary winding 33s to the primary winding 33p.

  The starting means 50 simultaneously applies a trigger voltage for causing dielectric breakdown of the lamps 10a to 10c to the trigger lines 11a to 11c at a predetermined timing. The starting means 50 can take various forms, which will be described later. Also in this embodiment, the number of trigger lines 11 may be less than the number of lamps 10 (see the fourth and fifth embodiments).

  FIG. 5 is a diagram for explaining the operation of the lighting device 3, in which each part current is shown in the upper stage, each part voltage is shown in the lower stage, and the horizontal axis is time. In FIG. 5, the voltage and current of the capacitor 36-1 are indicated by V1 and I1, respectively, the voltage and current of the capacitor 36-2 are indicated by V2 and I2, respectively, and the voltage and current of the capacitor 36p are indicated by V3 and I3, respectively.

  First, at time t0, the switch element 34 is turned on, and the boosted voltage is charged in the capacitor 36-1 based on the energy transmitted to the secondary winding 33s. In this process, a slight current can also flow through the saturable inductor 35-1 in the non-saturated state (that is, in the high impedance state) to the capacitor 36-2.

  When the voltage of the capacitor 36-1 reaches near the peak at time t1, the integral value of the voltage across the saturable inductor 35-1 exceeds the characteristic value, the saturable inductor 35-1 is saturated, and the impedance thereof becomes steep. descend. It is assumed that the characteristic value of the saturable inductor 35-1 is selected in consideration of the boosted voltage by the transformer 33, the charging speed of the capacitor 36-1, and the like. In response to a decrease in the impedance of the saturable inductor 35-1, the energy of the capacitor 36-1 is discharged to the capacitor 36-2 via the saturable inductor 35-1. The pulse waveforms of the voltage V2 and the current I2 at this time are based on the resonance action of the saturable inductor 35-1, the capacitor 36-1, and the capacitor 36-2 in the first closed loop. In this process, a small amount of current can also flow through the saturable inductor 35-2 in the non-saturated state (that is, in the high impedance state) in the capacitor 36p.

  When the voltage of the capacitor 36-2 reaches near the peak at time t2, the integrated value of the voltage across the saturable inductor 35-2 exceeds the characteristic value, the saturable inductor 35-2 is saturated, and the impedance thereof becomes steep. descend. It is assumed that the characteristic value of the saturable inductor 35-2 is selected in consideration of the boosted voltage by the transformer 33, the charging speed of the capacitor 36-2, and the like. Due to the drop in impedance of the saturable inductor 35-2, the energy of the capacitor 36-2 is discharged to the capacitor 36p via the saturable inductor 35-2. The pulse waveforms of the voltage V3 and the current I3 at this time are based on the resonance action of the saturable inductor 35-2, the capacitor 36-2, and the capacitor 36p in the second closed loop.

Here, the impedance and time constant τ ₂ of the second closed loop when the saturable inductor 35-2 is saturated are smaller than the impedance and time constant τ ₁ of the first closed loop when the saturable inductor 35-1 is saturated. Designed to be Here, when the series combined capacitance of the capacitors 36-k and 36-k + 1 is C _k , the inductance of the saturable inductor 35-k is L _k, and the stray inductance of this loop is L _x , the time constant τ of this closed loop _k is τ _k = π × {(L _k + L _x ) × C _k } ^1/2 . Therefore, the lighting device 3 is designed such that the time constant τ decreases as the closed loop at the rear stage (that is, as k increases). By setting the time constant τ, the pulse waveform of the current Ik + 1 (for example, the current I3) is narrower and steeper than the pulse waveform of the current Ik (for example, the current I2), and has a higher peak and shorter length. It will have a pulse width.

  At any time after time t2, when the trigger voltage is applied to the trigger wires 11a, 11b and 11c by the starting means 50 and the lamps 10a, 10b and 10c are broken down, the voltage V3 and the current I3 are substantially reduced. A pulse waveform is applied to the lamp unit 1 and energized.

  The magnetic pulse compression circuit 30 may have a circuit configuration shown in FIG. In the example shown in FIG. 6, the magnetic pulse compression circuit 30 includes a charging circuit 31, a storage element 32, a switch element 34, a coil 37, saturable inductors 15-1 to 15-n and capacitors 16-1 to 16-n + 1. . In this example, n = 2 is also shown, but n = 1 or n ≧ 3 may be possible. The storage element 32, the switch element 34, the coil 37, and the capacitor 36-1 are connected in series to form a loop. The configuration and operation of the rear stage side of the capacitor 36-1 (that is, the saturable inductors 35-1 to 35-2 and the capacitors 36-1 to 36p) are the same as those described above with reference to FIG. The switch element 34 is ON / OFF controlled by the switch control unit 42 in the same manner as the configuration of FIG. According to this configuration, since the current of the switch element 34 is limited due to the impedance of the coil 37, the switch element 34 includes a semiconductor switch element such as a transistor (eg, MOSFET, bipolar transistor, IGBT) having a relatively small current capacity. Can be used.

With reference to FIGS. 7A-7E, various examples of the starting means 50 are shown below.
In the example shown in FIG. 7A, the base end of each trigger line 11 is electrically connected to the connection node between the capacitor 36-2 and the saturable inductors 35-1 and 35-2, and the termination is opened. In this example, the starting means 50 can be regarded as a wiring from each trigger line 11 to the connection node. The voltage of each trigger line 11 is equal to the voltage V2 shown in FIG.

  Alternatively, the base end of each trigger line 11 may be electrically connected to a connection node between the capacitor 36p and the saturable inductor 35-2, and the termination may be opened. In this case, the voltage of the trigger line 11 is equal to the voltage V3 shown in FIG. Which connection configuration is adopted may be determined as appropriate in consideration of matching between the timing of voltage application to the trigger line 11 and the timing of the discharge start of the lamp 10. With these configurations, the starting means 50 having a simple configuration is realized.

  In the example shown in FIG. 7B, the capacitor 36-2 includes a series circuit (capacitor voltage dividing circuit) of capacitors 36a and 36b. The series combined capacity of the capacitors 36a and 36b is assumed to be equal to the combined capacity of the capacitor 36-2 in each of the above embodiments. Each trigger line 11 is electrically connected to a connection node (that is, a voltage dividing point) between the capacitors 36a and 36b, and is terminated. Also in this example, the starting means 50 can be regarded as a wiring from each trigger line 11 to the connection node. In this case, the voltage of the trigger line 11 is equal to the divided value of the voltage V2 shown in FIG. The capacitance ratio between the capacitor 36a and the capacitor 36b is appropriately determined in consideration of the voltage required for the dielectric breakdown of the lamp 10. The capacitor 36-1 or 36p may be configured by a capacitor voltage dividing circuit, and each trigger line 11 may be electrically connected to this voltage dividing point. By optimizing the voltage dividing ratio of the capacitor voltage dividing circuit, the discharge start voltage of the lamp 10 can be set to a desired value, and the design flexibility of the lamp unit 1 and the lighting device 3 is increased.

  In the example shown in FIG. 7C, the starting means 50 includes the starting circuit 24 described in the first embodiment, and supplies a predetermined high-pressure pulse for starting the lamp to the trigger line 11 when operated. The control unit 40 includes a charge control unit 41, a switch control unit 42, and a delay activation unit 43. The delay activation unit 43 activates (activates) the start circuit 24 after delaying a predetermined time after the switch control unit 42 turns on the switch element 34. The predetermined time is appropriately determined in consideration of the operation time constant of the lighting device 3 and the operation time constant of the starting circuit 24 as shown in FIG. This makes it possible to arbitrarily adjust the trigger timing for starting the lamp, and the design flexibility of the lighting device 3 is increased.

  In the example illustrated in FIG. 7D, the starting unit 50 includes a starting circuit 24, a detection capacitor 51, and a starting circuit 52. The detection capacitor 51 is connected in series with the capacitor 36-2, and the capacitor 36-2 and the detection capacitor 51 constitute a capacitor voltage dividing circuit. The capacitance of the detection capacitor 51 is about several hundred to several thousand times the capacitance of the capacitor 36-2. Therefore, the series combined capacity of the capacitor 36-2 and the detection capacitor 51 approximates the capacity of the capacitor 36-2, and the impedance and time constant in the loop including the detection capacitor 51 are not substantially affected by the insertion of the detection capacitor 51. .

  The starting circuit 52 starts (activates) the starting circuit 24 when the detection voltage generated in the detection capacitor 51, that is, the divided voltage detection value of the voltage V2 shown in FIG. 5 exceeds a predetermined value. In this example, the detection capacitor 51 is connected in series to the capacitor 36-2 (k = 2). However, in consideration of the time constant of the start circuit 52 or the start circuit 24, the capacitor 36-1 (k = 1), the detection capacitor 51 may be connected in series. In other words, the time constants of the start circuit 52 and the start circuit 24 are designed so that the lamp start is at an appropriate timing regardless of whether the detection capacitor 51 is connected to the capacitor 36-2 or 36-1. Is done. As a result, the lamp start timing is synchronized with the charging timing of the capacitor 36-k and the detection capacitor 51 constituting the closed loop for pulse compression, and the lamp start at a highly accurate timing becomes possible.

  In the example shown in FIG. 7E, the starter 50 includes a starter circuit 24, a starter circuit 52, an auxiliary winding 35s of a saturable inductor 35-1, and a diode 53. The voltage (current) generated in the auxiliary winding 35 s is rectified by the diode 53 and input to the starting circuit 52. It is assumed that the auxiliary winding 35s is provided with such a polarity that the diode 53 is turned on when the charge of the capacitor 36-1 is discharged to the capacitor 36-2.

  The starting circuit 52 operates the starting circuit 24 when the input voltage, that is, a voltage proportional to the current I1 shown in FIG. 5, exceeds a predetermined value. In this example, the auxiliary winding 35s is provided in the saturable inductor 35-1 (k = 1). However, in consideration of the time constant of the starting circuit 52 or the starting circuit 24, the saturable inductor 35- 2 (k = 2). In other words, even if the auxiliary winding 35s is connected to either the saturable inductor 35-1 or 35-2, the time constants of the start circuit 52 and the start circuit 24 are set so that the lamp start is at an appropriate timing. Etc. are designed. As a result, the lamp starting timing is synchronized with the saturation timing of the saturable inductor 35-k constituting the closed loop for pulse compression, and the lamp starting at a highly accurate timing becomes possible.

  As described above, the flash lamp device 101 of the present embodiment includes the lamp unit 1 and the lighting device 3 including a magnetic pulse compression circuit. The lamp unit 1 includes a plurality of lamps 10 connected in parallel and a plurality of lamps 10. A trigger line 11 is disposed along each of the lamps 10 in close proximity. The lighting device 3 includes a magnetic pulse compression circuit 30, a control unit 40 that starts the operation of the magnetic pulse compression circuit 30, and a start that applies a trigger voltage to the trigger line 11 for causing dielectric breakdown of the plurality of lamps 10 at a predetermined timing. Means 50 are included. Also in the present embodiment, as in the first embodiment, the impedance of the lamp unit 1 can be reduced, and a pulse current having a high peak and a short width can be supplied to the lamp 10, thereby the flash lamp device 101. Can output pulsed light with a high peak and a short width. Further, according to the present embodiment, since the pulse can be narrowed as compared with the case where the lamp unit 1 is configured by one lamp 10, the number of closed loops in the magnetic pulse compression circuit 30 (that is, the above-described value). n) can be reduced.

<< Third to Fifth Embodiments >>
As 3rd-5th embodiment of this invention, the lamp unit 1 suitable for use with the flash lamp apparatus 100 and 101 of said each embodiment is shown. In the present embodiment, in particular, the arrangement relationship between the lamp 10 and the trigger line 11 is illustrated. Each of the lamps 10 is a straight tube lamp. Each of the trigger lines 11 is a bar-shaped trigger line, and is arranged close to the lamp 10 in various manners. Each of the trigger wires 11 only needs to be fixed to the lamp 10 to be disposed in proximity by bonding with an adhesive, binding with a wire, pressing from another member, or the like.

  In the following drawings, for convenience of explanation, the longitudinal direction of the lamp (lamp axis direction) is defined as the z-axis, the lamp irradiation direction is defined as the y-axis negative direction, and the direction perpendicular to the z-axis and the y-axis is defined as x. Define as axis. Also, the left direction in each figure is the x-axis negative direction, and the right direction in each figure is the x-axis positive direction. Further, the lower side of each figure is referred to as the y-axis negative direction or the irradiation direction, and the upper side of each figure is referred to as the y-axis positive direction or the back direction. However, the direction in each drawing does not limit the installation direction in actual implementation, and the drawing is not necessarily according to dimensions. Moreover, in each embodiment, the same code | symbol is attached | subjected to the substantially same member, and the overlapping description is abbreviate | omitted.

<Third Embodiment>
FIG. 8 shows a lamp unit 1 according to the third embodiment. FIG. 8 shows an xz plan view of the lamp unit 1 viewed from the back direction (y-axis positive direction) on the left side, and an xy cross-sectional view taken along line AA in the xz plan view on the right side. The lamp unit 1 includes lamps 10a, 10b, and 10c, trigger wires 11a, 11b, and 11c, wirings 12 and 13, and bases 14 and 15 (holding members). In the present embodiment, the lamp 10 and the trigger line 11 correspond one to one. Therefore, the number of lamps 10 and the number of trigger lines 11 are the same.

  The lamps 10a to 10c are arranged in parallel to each other along the z-axis direction, and the lamp axes (centers of the lamp cross-sectional circles) are linearly arranged in the x-axis direction in the xy cross section. One ends of the lamps 10 a to 10 c are fixed by the base 14, and the other ends are fixed by the base 15. The lamps 10a to 10c may be in contact with each other or may be separated from each other.

  The wiring 12 is commonly connected to one electrode (not shown) of each of the lamps 10 a to 10 c in the base 14 and is drawn out from the base 14. Similarly, the wiring 13 is connected in common to the other electrode (not shown) of each of the lamps 10 a to 10 c in the base 15 and is drawn out from the base 15. The wirings 12 and 13 are connected to appropriate nodes of the lighting device 2 or 3 when the lamp unit 1 is attached to the flash lamp device 100 or 101.

  The bases 14 and 15 are, for example, metal covers. The base 14 holds and fixes one end side of the lamps 10a to 10c, and electrically connects the electrodes on one end side of the lamps 10a to 10c to each other. The base 15 holds and fixes the other ends of the lamps 10a to 10c, and electrically connects the electrodes on the other ends of the lamps 10a to 10c to each other.

  The trigger lines 11a to 11c are arranged close to the back side of the lamps 10a to 10c, respectively. The trigger wires 11a to 11c are in a state where insulation from the metal portions of the other trigger wires 11, the wiring 12 and the base 14 is maintained via the vicinity of one end of each of the lamps 10a to 10c (or mutual electromagnetic fields). With the influence minimized, the trigger lines 11 a ′, 11 b ′ and 11 c ′ are drawn from the inside of the base 14. The trigger lines 11 a ′ to 11 c ′ may be drawn outside the base 14. The terminal ends of the trigger wires 11a to 11c are opened near the other ends of the lamps 10a to 10c. The trigger lines 11a ′ to 11c ′ are the same as the trigger lines 11a to 11c on the electric circuit, and will be described in the first and second embodiments when the lamp unit 1 is attached to the flash lamp device 100 or 101. Connected to an appropriate node of the lighting device 2 or 3.

  As described above, the trigger wire 11 is preferably disposed on the back side of the lamp 10. In other words, the trigger line 11 is preferably not arranged in a region defined by the lamp 10 and its irradiation direction. Thereby, the fall of the irradiation amount by the shadow of trigger line 11 itself can be prevented.

  In FIG. 8, the trigger lines 11 a to 11 c are arranged at the rear direction ends of the lamps 10 a to 10 c (that is, directly above the y-axis positive direction with respect to the lamp axis) in the xy section. The arrangement of 11c is not limited to this. For example, as shown in FIG. 9A, the trigger line 11a (11c) corresponding to the outermost lamp 10a (10c) among the plurality of lamps 10 on the circumference of the outermost lamp 10a (10c) in the xy section. Further, it may be arranged in a range from a position directly above the rear end to a horizontal position rotated 90 degrees in a direction away from the lamp 10b adjacent to the outermost lamp 10a (10c). That is, in this example, the trigger line 11a is in the range of the x-axis negative direction and the y-axis positive direction with respect to the lamp axis of the lamp 10a, and the trigger line 11c is the x-axis positive direction and y of the lamp axis of the lamp 10c. It is in the range of the positive axis direction. The positional relationship between the trigger line 11b and the lamp 10b in FIG. 9A is the same as that shown in FIG.

  As a result, the distance between the trigger lines 11 is increased, so that interference between the trigger lines 11 is minimized. Further, as the separation distance between the trigger lines 11 increases, the separation distance between the trigger line 11 and the lamp 10 (that is, the trigger line 11a and the lamp 10b and the trigger line 11c and the lamp 10b) that do not correspond to each other increases. The one-to-one relationship between 10 and each trigger line 11 is strengthened. Therefore, a reliable lamp start is realized by an equal action from the trigger line 11 to the corresponding lamp 10.

  In FIG. 8, the lamps 10a to 10c are linearly arranged in the xy section, but the arrangement of the lamps 10 is not limited to this. For example, as illustrated in FIG. 9B, the lamps 10a to 10c may be arranged in a wedge shape having a vertex in the back direction in the xy cross section (in other words, a triangular shape having a bottom in the irradiation direction). In this case, the arrangement of the trigger lines 11a to 11c with respect to each of the lamps 10a to 10c may be the same as the arrangement shown in FIG. 9A.

  In the configuration shown in FIG. 8, the number of pairs of lamps 10 and trigger lines 11 is not limited to 3, and may be 2 or 4 or more. 9A and 9B, the lamp 10a and the trigger line 11a and the lamp 10c and the trigger line 11c are the outermost pairs, and a plurality of pairs of lamps 10b and the trigger lines 11b are arranged in the x-axis direction therebetween. Also good.

  As described above, the lamp unit 1 of the present embodiment is arranged in parallel with each other, and each of the plurality of straight tube lamps 10 each having an electrode at one end and the other end, and each of the plurality of lamps 10 is one-to-one. Corresponding to the plurality of lamps 10 and a plurality of trigger lines 11 disposed so as not to be included in a region defined by the irradiation directions of the plurality of lamps 10 and the plurality of lamps 10, and one end side of the plurality of lamps 10 Wiring 12 commonly connected to the plurality of electrodes, wiring 13 commonly connected to the plurality of electrodes on the other end side of the plurality of lamps 10, and holding members (bases 14 and 15 for holding the plurality of lamps 10). ).

  According to this configuration, the plurality of lamps 10 can be handled as one lamp structure, and workability in installing the plurality of lamps 10 is improved. Further, since the plurality of trigger lines 11 are arranged adjacent to each other in a one-to-one correspondence with each of the plurality of lamps 10 and are not included in the irradiation direction, the plurality of lamps 10 are turned on simultaneously. However, the trigger line 11 does not interfere with irradiation. That is, the trigger line itself does not become a shadow in irradiation, and a high irradiation amount is ensured. Such a lamp unit 1 is preferably applied to the flash lamp devices 100 and 101 of the first and second embodiments in which a plurality of lamps 10 connected in parallel are used.

<Fourth Embodiment>
FIG. 10 shows a lamp unit 1 according to the fourth embodiment. FIG. 10 shows an xz plan view of the lamp unit 1 viewed from the back direction (y-axis positive direction) on the left side, and an xy cross-sectional view taken along line BB in the xz plan view on the right side. The lamp unit 1 includes lamps 10a, 10b and 10c, a trigger wire 11, lamp wires 12a, 12b, 12c, 13a, 13b and 13c, wirings 12 and 13, and a glass tube 16 (holding member). In the present embodiment, in principle, each trigger line 11 is disposed between adjacent lamps 10. Accordingly, the number of lamps 10 is equal to or less than the number of trigger lines 11.

  The lamps 10a to 10c are arranged in parallel along the z axis, and are arranged so that the lamp axis forms a triangle (preferably an equilateral triangle) in the xy section. The lamps 10a to 10c are inserted into a cylindrical glass tube 16 having both ends opened. The lamps 10 a to 10 c are arranged so that the outer periphery thereof is in contact with the inner wall of the glass tube 16. In other words, for example, the glass tube 16 is dimensioned to hold and fix the lamps 10a to 10c inside by friction of a contact portion with the lamps 10a to 10c.

  Note that the glass tube 16 is not necessarily cylindrical. The glass tube 16 only needs to be configured such that the inner wall thereof is in contact with each of the lamps 10a to 10c, and has a triangular prism shape (for example, a cross section of which forms a regular triangle), and a shape in which the edge portion of the triangular prism is rounded (for example, The cross section may be a regular triangle with rounded corners) or other polygonal column shape. In this example, the length of the glass tube 16 in the z-axis direction is shorter than the length of the lamp 10 in the z-axis direction, but the length of the glass tube 16 in the z-axis direction is greater than or equal to the length of the lamp 10 in the z-axis direction. It may be. Furthermore, bases 14 and 15 may be used instead of the glass tube 16 as a holding member for holding the lamps 10a to 10c.

  The lamp lines 12a, 12b, and 12c are connected to one electrode (not shown) of each of the lamps 10a, 10b, and 10c and coupled to one wiring 12. Similarly, the lamp lines 13a, 13b, and 13c are connected to the other electrode (not shown) of each of the lamps 10a, 10b, and 10c and coupled to one wiring 13. The wirings 12 and 13 are connected to appropriate portions of the lighting device 2 or 3 when the lamp unit 1 is attached to the flash lamp device 100 or 101.

  The trigger line 11 is disposed in a region defined by the lamps 10a, 10b, and 10c in the xy cross section. Preferably, the trigger line 11 is configured to be located at the center of gravity of an equilateral triangle formed by the lamp axes of the lamps 10a, 10b, and 10c in the xy section. When the outer diameter of the trigger wire 11 is smaller than the diameter of the inner circumscribed circle of the lamps 10a, 10b, and 10c (that is, when the trigger wire 11 does not contact all of the lamps 10a to 10c), for example, the trigger wire 11 is It may have a coating (not shown) so that the outer periphery of the coating circumscribes each of the lamps 10a to 10c. The base end of the trigger line 11 is in a state where insulation between the lamp lines 12a to 12c and the wiring 12 is maintained via the vicinity of one end of the lamps 10a to 10c (or in a state where the influence of the electromagnetic field is minimized. ) It is pulled out of the glass tube 16 as the trigger wire 11 '. The end of the trigger line 11 is opened near the other ends of the lamps 10a to 10c. The trigger line 11 ′ is the same as the trigger line 11 on the electric circuit, and when the lamp unit 1 is attached to the flash lamp device 100 or 101, the lighting device 2 described in the first and second embodiments or Connected to three appropriate nodes.

  As a modification of the present embodiment, an example of a lamp unit having an xy cross section as shown in FIGS. 11A to 11C is also possible. 11A and 11B includes three lamps 10a, 10b, and 10c and two trigger lines 11d and 11e. The lamp unit 1 illustrated in FIG. 11C includes three lamps 10a, 10b, and 10c and three trigger lines 11d, 11e, and 11f. Illustration of the glass tube 16 is omitted.

  In the example shown in FIG. 11A, the lamps 10a to 10c are arranged so that the lamp axes are linearly arranged in the x-axis direction in the xy section. In the example shown in FIG. 11B, the lamps 10a to 10c are arranged so that the lamp axis forms a triangle in the xy section. In any case, the trigger line 11d is disposed close to the rear side region in the region between the lamps 10a and 10b, and the trigger line 11e is disposed on the rear side in the region between the lamp 10b and the playing card 10c. It is placed close to the area. In the configuration shown in FIG. 11A, n = 3 is shown where n and n−1 are the number of lamps 10 and the number of trigger lines 11, respectively, where n = 2 or n ≧ 4. Also good.

  In the example shown in FIG. 11C, the lamps 10a to 10c are arranged so that the lamp axis forms an equilateral triangle in the xy section. The arrangement of the trigger lines 11d and 11e is the same as the arrangement in FIG. 11B. The trigger line 11f is disposed close to both the lamps 10c and 10a in the region on the irradiation surface side in the region between the lamps 10c and 10a in the xy section. In this case, it is necessary to consider the influence of the trigger line 11f on the irradiation amount in the irradiation direction. However, the arrangement of the three trigger lines 11 with respect to the three lamps 10 is symmetric, and the starting condition in each lamp 10 is More equalized.

  According to the present embodiment described above, the lamp unit 1 includes a plurality of straight tube lamps 10 arranged in parallel to each other and each having an electrode at one end and the other end, and adjacent lamps among the plurality of lamps 10. In between, at least one trigger line 11 disposed close to both of the adjacent lamps, wiring 12 commonly connected to a plurality of electrodes on one end side of the plurality of lamps 10, and the other end side of the plurality of lamps 10 Wiring 13 commonly connected to the plurality of electrodes and a holding member (glass tube 16 or bases 14 and 15) for holding the plurality of flash lamps.

  According to this configuration, the plurality of lamps 10 can be handled as one lamp structure, and workability in installing the plurality of lamps 10 is improved. In addition, the number of trigger lines 11 can be made equal to or less than the number of lamps 10, and particularly when the number of trigger lines 11 is less than the number of lamps 10, the trigger lines 11 are arranged one-on-one on the lamps 10. It is advantageous in terms of cost compared to the case. Further, since the trigger wire 11 is substantially accommodated in the circumscribed shape of the plurality of lamps 10 in the cross section perpendicular to xy, high space efficiency can be obtained. Such a lamp unit 1 is preferably applied to the flash lamp devices 100 and 101 of the first and second embodiments in which a plurality of lamps 10 connected in parallel are used.

  In addition, the plurality of lamps 10 includes three lamps 10, at least one trigger line 11 includes one trigger line 11, and one trigger line 11 is formed by three lamps 10 in the xy section. Arranged in a defined area. According to this configuration, the three lamps 10 can be started with only one trigger line 11, which is the most advantageous in terms of cost. The starting circuit 24 or the starting means 50 is simplified not only in the lamp unit 1 but also in the lighting devices 2 and 3, and the flash lamp devices 100 and 101 as a whole are advantageous in terms of cost.

<Fifth Embodiment>
FIG. 12 shows an xy cross section of the lamp unit 1 according to the fifth embodiment, which is a combination of the third embodiment and the fourth embodiment. The lamp unit 1 includes lamps 10a to 10j and trigger lines 11a to 11g. The structure near the end of the lamp 10 is the same as that of the third embodiment. That is, the lamp unit 1 is connected in common to a plurality of electrodes 12 (not shown) connected to a plurality of electrodes on one end side of the plurality of lamps 10 and a plurality of electrodes on the other end side of the plurality of lamps 10. Assume that the wiring 13 (not shown) and bases 14 and 15 (not shown) as holding members for holding both ends of the plurality of lamps 10 are provided.

  The lamps 10a to 10j are arranged in parallel to each other in the z-axis direction. In the xy cross section, the lamps 10a to 10c, the lamps 10e to 10g, and the lamps 10h to 10j each form a triangle. From another viewpoint, in the xy section, the lamps 10a, 10c, 10d, 10f, 10g, and 10j are arranged in the front stage with respect to the irradiation direction, and the remaining lamps 10b, 10e, and 10i are arranged in the rear stage with respect to the irradiation direction. Is done.

  The lamp 10a has a trigger line 11a, the lamp 10b has a trigger line 11b, the lamps 10c and 10d have a trigger line 11c, the lamp 10e has a trigger line 11d, the lamps 10f and 10g have a trigger line 11e, A trigger line 11f is disposed in the vicinity of 10h, and a trigger line 11g is disposed in the vicinity of the lamp 10j. In the xy cross section, the trigger wires 11b, 11d, and 11f are arranged at the rear end of the lamps 10b, 10e, and 10h, respectively, and the trigger wires 11a and 11g are arranged at the back side and the outside of the lamps 10a and 10j, respectively (third See embodiment). In addition, in the xy cross section, the trigger line 11c is disposed in a back side region between the lamps 10c and 10d, and the trigger line 11e is disposed in a back side region between the lamps 10f and 10g (first). 4 embodiment). It should be understood by those skilled in the art that the arrangement of the lamp 10 and the trigger line 11 is not limited to the example of FIG.

  According to this embodiment, the lamp unit 1 is arranged in parallel to each other, and each of the lamp units 1 has a pair of straight tube lamps 10 each having an electrode at one end and the other end, and a part of the lamps 10. A plurality of lamps 10 and at least one first trigger line 11 arranged so as not to be included in a region defined by the irradiation direction of the plurality of lamps 10 Among the other lamps, at least one second trigger line disposed in proximity to both of the adjacent lamps 10 between the remaining adjacent lamps, and the wiring and the holding member are provided. Thus, various combinations are possible in the arrangement of the trigger line 11 with respect to the lamp 10. Such a lamp unit 1 is preferably applied to the flash lamp devices 100 and 101 of the first and second embodiments in which a plurality of lamps 10 connected in parallel are used.

<Modification>
Although preferred embodiments of the present invention have been described above, the present invention can be modified into various modes as shown below, for example.

(1) Addition of reflector In the third to fifth embodiments, a reflector may be provided on the back side of the lamp unit 1. For example, a reflector may connect and fix the base 14 and the base 15. In this case, the reflecting plate constitutes a part of the holding member. Further, a metal coating as a reflection film or a metal plate as a reflection plate may be provided on the rear side wall surface of the glass tube 16.

(2) Change of light source and application of flash lamp device In each of the above embodiments, it is assumed that the flash lamp devices 100 and 101 having the lamp 10 which is a xenon lamp are used in the peeling process of the flexible organic EL substrate. On the other hand, the lamp 10 may be another type of lamp as long as it is a lamp for flashing (flash lighting). Further, the flash lamp device of the present invention can be applied to other uses such as an ultraviolet curing (curing) device as long as it requires high peak and short-width pulsed light.

DESCRIPTION OF SYMBOLS 1 Flash lamp unit 2, 3 Lighting device 10, 10a-10j Flash lamp 11, 11a-11g Trigger wire 12, 13 Wiring 14, 15 Base (holding member)
16 Glass tube (holding member)
22 Storage element 23 Coil 24 Start circuit 30 Magnetic pulse compression circuit 40 Control unit 50 Start means 100, 101 Flash lamp device

Claims (9)

A flash lamp device,
A flash lamp unit having a plurality of flash lamps connected in parallel and at least one trigger line disposed closely along each of the plurality of flash lamps;
A power storage element, a coil inserted and connected in a current path from the power storage element to the flash lamp unit, and a trigger voltage for simultaneously causing dielectric breakdown of the plurality of flash lamps are applied to the at least one trigger line. A flash lamp device comprising a lighting device having a starting circuit. A flash lamp device,
A flash lamp unit having a plurality of flash lamps connected in parallel and at least one trigger line disposed closely along each of the plurality of flash lamps;
A magnetic pulse compression circuit; a control unit for starting the operation of the magnetic pulse compression circuit; and a starting means for applying a trigger voltage for simultaneously causing dielectric breakdown of the plurality of flash lamps to the at least one trigger line at a predetermined timing. And a lighting device having a lighting device. A flash lamp unit,
A plurality of straight tubular flash lamps arranged parallel to each other, each having an electrode at one end and the other end;
A plurality of triggers arranged close to each of the plurality of flash lamps in a one-to-one correspondence and not included in an area defined by the plurality of flash lamps and an irradiation direction of the plurality of flash lamps. Lines and,
A first wiring commonly connected to the plurality of electrodes on the one end side of the plurality of flash lamps;
A second wiring commonly connected to the plurality of electrodes on the other end side of the plurality of flash lamps;
A flash lamp unit comprising a holding member for holding the plurality of flash lamps.   In a cross section perpendicular to the longitudinal direction of the plurality of flash lamps, a trigger line corresponding to the outermost flash lamp of the plurality of flash lamps is located on the circumference of the outermost flash lamp at the end in the back direction. 4. The flash lamp unit according to claim 3, wherein the flash lamp unit is disposed in a range between a first position and a second position rotated 90 degrees in a direction away from a flash lamp adjacent to the outermost flash lamp. A flash lamp unit,
A plurality of straight tubular flash lamps arranged parallel to each other, each having an electrode at one end and the other end;
At least one trigger line disposed between adjacent flash lamps of the plurality of flash lamps in close proximity to both of the adjacent flash lamps;
A first wiring commonly connected to the plurality of electrodes on the one end side of the plurality of flash lamps;
A second wiring commonly connected to the plurality of electrodes on the other end side of the plurality of flash lamps;
A flash lamp unit comprising a holding member for holding the plurality of flash lamps.   The plurality of flash lamps are composed of three flash lamps, the at least one trigger line is composed of one trigger line, and the one trigger line in a cross section perpendicular to the longitudinal direction of the plurality of flash lamps. The flash lamp unit according to claim 5, wherein the flash lamp unit is arranged in a region defined by the three flash lamps. A flash lamp unit,
A plurality of straight tubular flash lamps arranged parallel to each other, each having an electrode at one end and the other end;
The flash lamps are arranged close to each other in a one-to-one correspondence with a part of the plurality of flash lamps, and are not included in an area defined by an irradiation direction of the plurality of flash lamps and the plurality of flash lamps. At least one first trigger line;
At least one second trigger line disposed between both adjacent flash lamps between the adjacent flash lamps of the plurality of flash lamps;
A first wiring commonly connected to the plurality of electrodes on the one end side of the plurality of flash lamps;
A second wiring commonly connected to the plurality of electrodes on the other end side of the plurality of flash lamps;
A flash lamp unit comprising a holding member for holding the plurality of flash lamps. A flash lamp device,
A flash lamp unit according to any one of claims 3 to 7,
A power storage element, a coil inserted and connected to a current path from the power storage element to the flash lamp unit, and a start for applying a trigger voltage for causing dielectric breakdown of the plurality of flash lamps to the at least one trigger line A flash lamp device comprising a lighting device having a circuit. A flash lamp device,
A flash lamp unit according to any one of claims 3 to 7,
A magnetic pulse compression circuit; a controller for starting the operation of the magnetic pulse compression circuit; and a starting means for applying a trigger voltage for causing dielectric breakdown of the plurality of flash lamps to the at least one trigger line at a predetermined timing. A flash lamp device comprising a lighting device.

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