JP2018013738A - Magnification observation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnification observation device that can easily acquire an image of an observation object according to a user's request.SOLUTION: An observation object S is placed on a stage 121. A light projection part 140 selectively irradiates the observation object S with rays of light in a plurality of emission directions different from each other. A plurality of pieces of original image data showing images of the observation object S when the observation object S is irradiated with the rays of light in the plurality of emission direction are created by an imaging part 132. Thumbnail image data corresponding respectively to the plurality of original image data are created. A plurality of thumbnail images of the observation object S based on the plurality of thumbnail image data created by the imaging part 132 are displayed on a display part 430.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a magnification observation apparatus that magnifies and observes an observation object.

  In order to magnify and observe an observation object, a magnifying observation apparatus may be used (see, for example, Patent Document 1). In the microscope system described in Patent Document 1, bright-field illumination light and dark-field illumination light are applied to a specimen on a stage through an objective lens. Here, bright field illumination light is illumination light emitted in a direction parallel to the optical axis of the objective lens, and dark field illumination light is illumination light emitted in a direction inclined with respect to the optical axis of the objective lens. . The observation light reflected by the sample enters the image pickup device through the imaging lens, and the sample is imaged.

JP 2013-72971 A

  In the microscope system described in Patent Document 1, the illumination intensity of one illumination light is relatively reduced according to the ratio of the exposure time for bright-field illumination light and the exposure time for dark-field illumination light. Thereby, the intensity | strength of bright field illumination light and the intensity | strength of dark field illumination light are arrange | equalized. As a result, Patent Document 1 describes that it is possible to observe a sample at the most suitable illumination intensity when observing a sample irradiated with bright field illumination light and dark field illumination light simultaneously. . In addition, the user can intuitively adjust the ratio of the illumination intensity between the bright field illumination light and the dark field illumination light from the image with the illumination intensity optimized.

  However, appropriate imaging conditions such as illumination intensity vary depending on the shape and material of the observation object. Therefore, it is difficult for an unskilled user to acquire an image captured under appropriate imaging conditions. In addition, there may be cases where the imaging conditions are not appropriate afterwards. In such a case, it is necessary to image the observation object again under different imaging conditions, which increases the burden on the user.

  An object of the present invention is to provide a magnifying observation apparatus that can easily acquire an image of an observation object according to a user's request.

  (1) The magnifying observation apparatus according to the present invention selectively irradiates light on a stage on which an observation object is placed and a plurality of different emission directions to the observation object placed on the stage. And a plurality of image data indicating images of the observation target when the light from the plurality of emission directions is irradiated to the observation target, respectively. And an image display unit that displays a plurality of images based on a plurality of image data generated by the image pickup unit.

  In the magnification observation apparatus, an observation object is placed on a stage, and light in a plurality of emission directions is selectively irradiated to the observation object on the stage. A plurality of pieces of image data indicating images of the observation object when the light in the plurality of emission directions is respectively irradiated on the observation object are generated. A plurality of images based on the generated plurality of image data are displayed on the display unit.

  The plurality of image data respectively correspond to light in a plurality of emission directions. The image of the observation object changes according to the shape of the observation object and the emission direction of the light applied to the observation object. Therefore, the user can easily identify an appropriate image corresponding to the shape and material of the observation object from the plurality of images of the observation object displayed on the display unit. Thereby, the user can easily obtain an image of the observation object according to his / her request.

  In addition, since a plurality of image data corresponding to light in a plurality of emission directions is generated, it is not necessary to repeat imaging of the observation object while adjusting the light emission direction. Therefore, the burden on the user can be reduced.

  (2) The display unit may display an index indicating the light emission direction corresponding to each image at a position corresponding to the image. In this case, the user can easily identify the light emission direction corresponding to each image by visually recognizing the index together with the plurality of images.

  (3) It is obtained when it is assumed that light in a virtual emission direction different from the plurality of emission directions is irradiated on the observation object by combining at least a part of the plurality of image data generated by the imaging unit. The image processing apparatus further includes a data generation unit that generates image data indicating an image of the observation target to be performed, and the display unit converts the image based on the image data generated by the data generation unit into a plurality of image data generated by the imaging unit. It may be displayed together with a plurality of images based on it.

  In this case, the display unit displays a plurality of images respectively corresponding to a larger number of emission directions than the emission direction of the light actually irradiated to the observation object. Therefore, the user can easily identify an image more suitable for observation from a larger number of images displayed on the display unit.

  (4) The magnification observation apparatus further includes a selection unit that selects any of a plurality of images displayed by the display unit based on a user's operation, and the display unit displays the plurality of images before selection by the selection unit. Displayed in the first mode, and when any of the plurality of images displayed in the first mode is selected by the selection unit, the selected image is displayed in a second mode different from the first mode. The image displayed in the second mode may be larger in at least one of the area and the resolution than the image displayed in the first mode before selection by the selection unit.

  In this case, the user selects a desired image from the plurality of images displayed in the first mode, and thus the observation object is selected in more detail based on the selected image displayed in the second mode. Can be observed.

  (5) The magnification observation apparatus is responsive to an instruction from the image processing instruction unit and an image processing instruction unit that instructs image processing for an image displayed in the second mode based on a user operation. And an image processing unit that performs image processing instructed on the image displayed in the second mode, and the display unit simultaneously displays the image before the image processing by the image processing unit and the image after the image processing by the image processing unit. It may be displayed.

  In this case, the user can instruct desired image processing while comparing the image before image processing and the image after image processing. Therefore, an image more suitable for observation can be easily acquired.

  (6) The magnifying observation apparatus further includes an objective lens, and the imaging unit receives a light from the observation object via the objective lens to generate a plurality of image data. A first light projecting portion having a plurality of light emission regions arranged on the rotation target around the optical axis and provided so as to surround the optical axis of the objective lens, and light in a plurality of emission directions are applied to the observation target A switching unit that switches light emission states in a plurality of light emission regions so as to be irradiated may be included.

  In this case, the light emission state in the plurality of light emission regions of the first light projecting unit is switched by the switching unit. Thereby, it is possible to selectively irradiate the observation target with light in a plurality of different emission directions with a simple configuration and simple control.

  (7) The light projecting device further includes a second light projecting unit that irradiates the observation target with the first light from a position closer to the optical axis of the objective lens than the first light projecting unit, and the switching unit includes: The emission state of the first light in the second light projecting unit is further switched, and the imaging unit further generates image data indicating an image of the observation object when the first light is irradiated on the observation object, The display unit may further display an image based on the image data generated corresponding to the first light.

  In this case, the second light projecting unit irradiates the observation object with the first light from a position closer to the optical axis of the objective lens than the first light projecting unit. In the image of the observation object when the first light is irradiated, the surface of the observation object is more uneven than the image of the observation object when the light is irradiated from the first light projecting unit. It is clearly shown. Thereby, the user compares the image of the observation object when the light in the emission direction different from the first light is irradiated with the image in which the unevenness of the surface of the observation object is more clearly shown. However, an image more suitable for observation can be identified.

  (8) The light projecting device is further disposed to face the imaging unit with the observation object interposed therebetween, further includes a third light projecting unit that irradiates the observation target with the second light, and the switching unit includes the first light projecting unit. The emission state of the second light in the third light projecting unit is further switched, and the imaging unit further generates and displays image data indicating an image of the observation target when the second light is irradiated on the observation target. The unit may further display an image based on the image data generated corresponding to the second light.

  In this case, the third light projecting unit irradiates the observation target with the second light, and the imaging unit receives the light transmitted through the observation target. In the image of the observation object when the second light is irradiated, the internal structure of the observation object is shown. Accordingly, the user is more suitable for observation while comparing the image of the observation object when the light in the emission direction different from the second light is irradiated and the image showing the internal structure of the observation object. Images can be identified.

  According to the present invention, it is possible to easily acquire an image of an observation object according to a user's request.

It is a schematic diagram which shows the structure of the magnification observation apparatus which concerns on the 1st Embodiment of this invention. It is a block diagram which shows the structure of the control apparatus of FIG. It is the perspective view and top view which show the structure of a light projection part. It is a schematic diagram which shows the external appearance perspective view of a measurement head, and the structure of a lens-barrel part. It is a figure which shows the structural example of a focus drive part. It is a block diagram which shows the structure of the arithmetic processing part of FIG. It is a figure which shows the polar coordinate system defined on the mounting surface of a stage. It is a schematic diagram for demonstrating the basic operation | movement of the magnification observation apparatus when multiple illumination imaging is instruct | indicated. It is a figure which shows the example of a display of an observation screen. It is a schematic diagram for demonstrating the processing content when the image of an observation target object is updated in response to designation | designated of the virtual emission direction of light. It is a figure which shows the example in which a light icon is displayed on a main display area and a sub display area, respectively. It is a figure which shows the other example of a display of an observation screen. It is a figure which shows the other example of a display of an observation screen. It is a figure which shows the other structural example for designating the virtual emission direction of light. It is a figure which shows the other structural example for designating the virtual emission direction of light. It is a figure which shows the other structural example for designating the virtual emission direction of light. It is a flowchart which shows an example of a multiple illumination imaging process. It is a flowchart which shows an example of the image generation process for a display. It is a flowchart which shows an example of the image generation process for a display. It is a conceptual diagram of a depth synthetic | combination process. It is a figure which shows mask image data visually. It is a flowchart which shows an example of a depth synthetic | combination process. It is a flowchart which shows an example of a depth synthetic | combination process. It is a flowchart which shows an example of a depth synthetic | combination process. It is a flowchart which shows the other example of a depth synthetic | combination process. It is a flowchart which shows the other example of a depth synthetic | combination process. It is a flowchart which shows the other example of a depth synthetic | combination process. It is a flowchart which shows an example of DR adjustment processing. It is a flowchart which shows an example of DR adjustment processing. It is a flowchart which shows the other example of DR adjustment processing. It is a flowchart which shows the other example of DR adjustment processing. It is a figure which shows an example of the display state of the observation screen during a preview process. It is a figure which shows an example of the display state of the observation screen during a preview process. It is a flowchart which shows an example of a preview process. It is a figure which shows an example of the display state of the observation screen during an image adjustment process. It is a figure which shows an example of the initial screen of the magnification observation apparatus which concerns on 2nd Embodiment. It is a figure which shows the example of 1 display of a process selection screen. It is a schematic diagram which shows the structure of the magnification observation apparatus which concerns on the 3rd Embodiment of this invention. It is a figure which shows the example of a display of the observation screen after the multiple illumination imaging process which concerns on 3rd Embodiment. It is a figure which shows an example of the display state of the observation screen in the preview process which concerns on 3rd Embodiment. It is a schematic diagram which shows the structure of the magnification observation apparatus which concerns on the 4th Embodiment of this invention. It is a figure which shows the example of a display of the observation screen after the multiple illumination imaging process which concerns on 4th Embodiment. It is a figure which shows an example of the display state of the observation screen in the preview process which concerns on 4th Embodiment. It is a schematic diagram which shows the modification of a light projection part.

[1] First Embodiment (1) Configuration of Magnification Observation Device (a) Measurement Head Hereinafter, a magnification observation device according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing the configuration of the magnification observation apparatus according to the first embodiment of the present invention. As shown in FIG. 1, the magnification observation device 1 includes a measurement head 100 and a processing device 200. The measurement head 100 is a microscope, for example, and includes a stand unit 110, a stage device 120, a lens barrel unit 130, a light projecting unit 140, and a control board 150.

  The stand unit 110 has an L-shaped longitudinal section and includes an installation unit 111, a holding unit 112, and a focus driving unit 113. The installation part 111 and the holding part 112 are made of, for example, resin. The installation unit 111 has a horizontal flat plate shape and is installed on the installation surface. The holding part 112 is provided so as to extend upward from one end of the installation part 111.

  Stage device 120 includes a stage 121 and a stage drive unit 122. The stage 121 is provided on the upper surface of the installation unit 111. An observation object S is placed on the stage 121. Two directions orthogonal to each other within a plane (hereinafter referred to as a placement surface) on the stage 121 on which the observation object S is placed are defined as an X direction and a Y direction, which are indicated by arrows X and Y, respectively. The direction of the normal line orthogonal to the mounting surface of the stage 121 is defined as the Z direction and is indicated by the arrow Z. A direction rotating around an axis parallel to the Z direction is defined as a θ direction, and is indicated by an arrow θ.

  The stage drive unit 122 includes an actuator (not shown) such as a stepping motor. The stage drive unit 122 moves the stage 121 in the X direction, the Y direction, the Z direction, or rotates it in the θ direction based on the drive pulse given by the control board 150. Further, the user can manually move the stage 121 in the X direction, the Y direction, or the Z direction, or rotate it in the θ direction.

  The lens barrel 130 includes a lens unit 131 and an imaging unit 132 and is disposed above the stage 121. The lens unit 131 can be replaced with another lens unit according to the type of the observation object S. The lens unit 131 includes an objective lens 131a and a plurality of lenses (not shown). The optical axis A1 of the objective lens 131a is parallel to the Z direction. The imaging unit 132 includes, for example, a CMOS (complementary metal oxide semiconductor) camera. The imaging unit 132 may include other cameras such as a CCD (charge coupled device) camera.

  The lens barrel part 130 is attached to the holding part 112 by the focus driving part 113 of the stand part 110. The focus driving unit 113 includes an actuator (not shown) such as a stepping motor. The focus driving unit 113 moves the lens unit 131 in the direction of the optical axis A1 (Z direction) of the objective lens 131a based on the driving pulse given by the control board 150. As a result, the focal position of the light that has passed through the lens unit 131 changes in the Z direction. The user can also manually move the lens unit 131 in the direction of the optical axis A1 of the objective lens 131a.

  The light projecting unit 140 is integrally attached to the lens unit 131 so as to surround the optical axis A1 of the objective lens 131a. Thereby, the positional relationship between the light projecting unit 140 and the lens unit 131 can be uniquely determined. Moreover, since it is not necessary to add a member for holding the light projecting unit 140 to the magnification observation apparatus 1, the magnification observation apparatus 1 can be made compact. An optical axis A2 (FIG. 3 described later) of the light projecting unit 140 is substantially the same as the optical axis A1 of the objective lens 131a.

  The light projecting unit 140 irradiates the observation object S on the stage 121 with light in a plurality of emission directions. The light reflected above the stage 121 by the observation object S is collected and imaged by the lens unit 131 and then received by the imaging unit 132. The imaging unit 132 generates image data based on pixel data corresponding to the amount of light received by each pixel. Each of the plurality of pieces of image data generated by the imaging unit 132 when the light projecting unit 140 irradiates the observation object S with light in a plurality of emission directions is referred to as original image data. The imaging unit 132 gives the generated plurality of original image data to the control device 400.

  The control board 150 is provided in the holding unit 112 of the stand unit 110, for example, and is connected to the focus driving unit 113, the stage driving unit 122, and the imaging unit 132. The control board 150 controls the operations of the focus driving unit 113 and the stage driving unit 122 based on the control by the processing apparatus 200. A control signal is input from the control device 400 to the imaging unit 132. The plurality of original image data generated by the imaging unit 132 is sequentially supplied to the processing device 200 via the cable 203.

(B) Processing Device The processing device 200 includes a housing 210, a light generation unit 300, and a control device 400. The housing 210 houses the light generation unit 300 and the control device 400. The light generation unit 300 is optically connected to the light projecting unit 140 of the measurement head 100 by the fiber unit 201. The fiber unit 201 includes a plurality of optical fibers (not shown).

  The light generation unit 300 includes a light source 310 and a light shielding unit 320. The light source 310 is, for example, an LED (light emitting diode). The light source 310 may be another light source such as a halogen lamp. The light blocking unit 320 is disposed between the light source 310 and the fiber unit 201 so that the light emitted from the light source 310 can be partially blocked. The light emitted from the light source 310 passes through the light blocking unit 320 and enters the fiber unit 201. Thereby, light is emitted from the light projecting unit 140 of the measuring head 100 through the fiber unit 201.

  FIG. 2 is a block diagram showing a configuration of the control device 400 of FIG. As shown in FIG. 2, the control device 400 includes a control unit 410, a storage unit 420, a display unit 430, an operation unit 440 and a communication unit 450. The control unit 410 includes, for example, a CPU (Central Processing Unit). The storage unit 420 includes, for example, a ROM (read only memory), a RAM (random access memory), or an HDD (hard disk drive). In the present embodiment, control unit 410 and storage unit 420 are realized by a personal computer.

  Control unit 410 includes drive control unit 500 and arithmetic processing unit 600. The storage unit 420 stores a system program. The storage unit 420 is used for processing various data and storing various data given from the control unit 410. The functions of the drive control unit 500 and the arithmetic processing unit 600 are realized by the control unit 410 executing a system program stored in the storage unit 420.

  The drive control unit 500 includes a light projection control unit 510, an imaging control unit 520, a focus control unit 530, and a stage control unit 540. The light projection control unit 510 is connected to the light generation unit 300 in FIG. 1 through the cable 202 and controls the operation of the light generation unit 300. The imaging control unit 520, the focus control unit 530, and the stage control unit 540 are connected to the control board 150 of the measurement head 100 in FIG.

  The imaging control unit 520, the focus control unit 530, and the stage control unit 540 control the operations of the imaging unit 132, the focus driving unit 113, and the stage driving unit 122 through the control board 150, respectively. In addition, the imaging control unit 520 sequentially gives a plurality of original image data generated by the imaging unit 132 to the arithmetic processing unit 600.

  The arithmetic processing unit 600 is based on at least one of the acquired plurality of original image data, and the observation object to be obtained when it is assumed that the light in the emission direction designated by the user is irradiated on the observation object S Display image data indicating the image of S can be generated. Details of the arithmetic processing unit 600 will be described later. The plurality of original image data acquired by the arithmetic processing unit 600 and the generated display image data are stored in the storage unit 420.

  The display unit 430 is configured by, for example, an LCD (liquid crystal display) panel. Display unit 430 may be configured by another display unit such as an organic EL (electroluminescence) panel. Display unit 430 displays image data or the like based on image data stored in storage unit 420 or image data generated by arithmetic processing unit 600. The operation unit 440 includes a pointing device such as a mouse, a touch panel, a trackball or a joystick, and a keyboard, and is operated by a user to give an instruction or the like to the control device 400. The operation unit 440 may include a jog shuttle in addition to the pointing device and the keyboard, or may include a dial-shaped operation unit in which the center of rotation for moving the lens barrel unit 130 and the stage 121 in the vertical direction is directed in the horizontal direction. But you can.

  Communication unit 450 includes an interface for connecting control device 400 to a network. In the example of FIG. 1, an external device 2 having a display function is connected to the network. The control device 400 can transmit image data to the external device 2 having a display function via the communication unit 450. The user of the external device 2 can acquire image data stored in a general-purpose image file format from the control device 400 via the communication unit 450 and display an image based on the image data on the external device 2. .

(C) Projecting Unit FIGS. 3A and 3B are a perspective view and a plan view showing the configuration of the projecting unit 140, respectively. As shown in FIG. 3A, the light projecting unit 140 includes a holding member 141 and a plurality of optical fibers 142. The holding member 141 is made of, for example, a resin and has a cylindrical shape. The outer diameter of the holding member 141 in plan view is smaller than the dimension of the stage 121 in FIG. The holding member 141 is disposed so as to surround the optical axis A1 of the objective lens 131a of FIG.

  The holding member 141 is formed with a plurality of through holes 141a penetrating from the upper surface to the lower surface. The plurality of through holes 141a are arranged at substantially equal intervals, and are positioned rotationally symmetrically about the optical axis A1 of the objective lens 131a. The plurality of optical fibers 142 are respectively inserted into the plurality of through holes 141a. As a result, the plurality of optical fibers 142 are integrally held by the holding member 141. The light incident portion and the light emitting portion of each optical fiber 142 are located on the upper surface and the lower surface of the holding member 141, respectively. Thereby, the light emitting part 140o is formed on the lower surface of the holding member 141.

  The plurality of optical fibers 142 are arranged on one circumference around the optical axis A1 of the objective lens 131a. Therefore, the distances from the optical axis A1 of the objective lens 131a to the emitting portions of the plurality of optical fibers 142 are substantially equal. The angle formed by the line connecting the emission part of each optical fiber 142 and the center of the stage 121 with respect to the optical axis A1 of the objective lens 131a is an acute angle. In the present embodiment, the holding member 141 integrally holds the plurality of optical fibers 142, whereby the positional relationship between the plurality of optical fibers 142 is easily maintained.

  As shown in FIG. 3B, the annular light emitting portion 140o of the light projecting portion 140 is approximately equally divided into a plurality (four in this example) of regions 140A, 140B, 140C, and 140D. The plurality of regions 140A to 140D are arranged rotationally symmetrically about the optical axis A1 of the objective lens 131a. The plurality of regions 140 </ b> A to 140 </ b> D include substantially the same number of emission portions of the optical fibers 142.

  Incident portions of the plurality of optical fibers 142 are optically connected to the light generation unit 300 of the processing apparatus 200 by the fiber unit 201 of FIG. Thereby, the light emitted from the light generation unit 300 enters the incident portions of the plurality of optical fibers 142 from the upper surface of the holding member 141, and passes through the emission portions of the plurality of optical fibers 142. It is emitted from 140o. That is, light is emitted from each of the regions 140A to 140D when the optical fiber 142 included in each of the regions 140A to 140D emits light from the light emitting unit 140o.

  1 includes a mask having a plurality of opening patterns respectively corresponding to the regions 140A to 140D of the light projecting unit 140. The light emitted from the light source 310 in FIG. 1 passes through any one of the opening patterns of the light shielding unit 320 and enters the fiber unit 201. The light projection control unit 510 in FIG. 2 switches the regions 140 </ b> A to 140 </ b> D that emit light in the light projecting unit 140 by switching the opening pattern of the light shielding unit 320 that transmits light. Thereby, the light projecting unit 140 can emit light from the entire regions 140A to 140D and can selectively emit light from any of the regions 140A to 140D.

  As described above, the light projecting unit 140 can irradiate the observation object S with light having different emission directions. The light emitted simultaneously from the entire areas 140A to 140D is called ring illumination, and the light emitted from any one of the areas 140A to 140D is called directional illumination. In the present embodiment, light projecting unit 140 can selectively emit either ring illumination or four directional illuminations. Therefore, the imaging unit 132 in FIG. 1 can generate five original image data indicating the observation object S when the ring illumination and the four directional illuminations are respectively irradiated on the observation object S.

  2 can display the image of the observation object S based on the five original image data generated by the imaging unit 132 in a selectable manner on the display unit 430 of FIG. 1 (preview processing).

  Further, the arithmetic processing unit 600 performs processing according to the user's adjustment instruction for the image of the observation object S, and can simultaneously display the pre-processing and post-processing images on the display unit 430 (image adjustment processing). ).

  The four directional illuminations are lights respectively emitted from four positions (regions 140A to 140D) that are different by about 90 ° in the θ direction around the optical axis A1 of the objective lens 131a, and the optical axis A1 of the objective lens 131a. It is rotationally symmetric about the center. Therefore, each directional illumination is biased with respect to the optical axis A1 of the objective lens 131a. The four directional illuminations are emitted with respect to the optical axis A1 of the objective lens 131a in different directions. The light amounts of the four directional illuminations are substantially equal to each other. The irradiation angles of the four directional illuminations with respect to the optical axis A1 of the objective lens 131a are not uniform depending on the θ direction.

  On the other hand, the ring illumination is light that is not polarized with respect to the optical axis A1 of the objective lens 131a, and its center substantially coincides with the optical axis A1 of the objective lens 131a. Therefore, the ring illumination is emitted substantially in the direction of the optical axis A1 of the objective lens 131a. The ring illumination has a substantially uniform light amount distribution around the optical axis A1 of the objective lens 131a, and the light amount of the ring illumination is substantially equal to the sum of the light amounts of the four directional illuminations. That is, the light amount of the ring illumination is about four times the light amount of each directional illumination. The irradiation angle of the ring illumination with respect to the optical axis A1 of the objective lens 131a is more uniform in the θ direction.

  Thus, in the present embodiment, the plurality of regions 140A to 140D are arranged rotationally symmetrically about the optical axis A1 of the objective lens 131a. Thereby, when the display image data is generated by calculation based on a plurality of original image data, the calculation can be simplified.

  In the present embodiment, the optical fiber 142 is provided as a light emitting member in each of the regions 140A to 140D of the light projecting unit 140, but the present invention is not limited to this. A light source such as an LED may be provided as a light emitting member in each of the regions 140 </ b> A to 140 </ b> D of the light projecting unit 140. In this case, the light generator 300 is not provided in the processing apparatus 200. In this configuration, light is emitted from each of the regions 140A to 140D when one or more light sources provided in each of the regions 140A to 140D emit light.

  Further, in the present embodiment, the light projecting unit 140 is provided with the regions 140A to 140D that emit four lights, but the present invention is not limited to this. The light projecting unit 140 may be provided with a region for emitting three or less or five or more lights.

  In the present embodiment, a plurality of light emitting members (optical fibers 142) are arranged on one circumference centered on the optical axis A1 of the objective lens 131a, but the present invention is not limited to this. The plurality of light emitting members may be arranged on two or more concentric circles centered on the optical axis A1 of the objective lens 131a. Furthermore, in this Embodiment, although several light emission member is arrange | positioned in each area | region 140A-140D, this invention is not limited to this. One light emitting member may be disposed in each of the regions 140A to 140D.

(D) Lens barrel portion FIGS. 4A and 4B are an external perspective view of the measuring head 100 and a schematic diagram showing the configuration of the lens barrel portion 130, respectively. As shown in FIG. 4A, the measuring head 100 includes an inclination mechanism 101 for inclining the lens barrel 130 with respect to the stage 121. The tilt mechanism 101 supports the upper part of the holding part 112 with respect to the lower part of the holding part 112 in a plane orthogonal to the Y direction. Thereby, the tilt mechanism 101 can tilt the lens barrel 130 with respect to the stage 121 around the tilt center 130c. In FIG. 4B, the tilted barrel portion 130 is indicated by a one-dot chain line.

  The stage 121 moves in the Z direction so that the surface of the observation object S is positioned at substantially the same height as the inclined center 130c of the lens barrel 130 based on the control by the stage controller 540 in FIG. Therefore, even when the lens barrel 130 is tilted, a eucentric relationship is maintained in which the visual field of the imaging unit 132 does not move, and a desired observation region of the observation object S is prevented from deviating from the visual field of the imaging unit 132. Can do.

  As shown in FIG. 4B, the lens barrel unit 130 includes a lens unit 131, an imaging unit 132, and a tilt sensor 133. The imaging unit 132 receives light from the observation object S placed on the placement surface of the stage 121 through the lens unit 131 based on control by the imaging control unit 520 in FIG. 2 and generates original image data. To do.

  The imaging control unit 520 controls the light reception time, gain, timing, and the like of the imaging unit 132. For example, the imaging control unit 520 adjusts the light reception time when each directional illumination is irradiated based on the light reception time when the ring illumination is irradiated. In this example, as described above, since the light amount of the ring illumination is about four times the light amount of each directional illumination, the imaging control unit 520 receives the light reception time at the time of irradiation of each directional illumination. Adjust to 4 times the light reception time.

  According to this control, the imaging unit 132 can generate original image data at a higher speed than in the case of independently adjusting the light receiving time during irradiation of each directional illumination. Moreover, the brightness of the image at the time of ring illumination irradiation and the image at the time of irradiation of each directional illumination can be easily made substantially equal. In this example, the control contents of the imaging unit 132 at the time of irradiation with a plurality of directional illuminations are the same.

  In addition, the imaging unit 132 can generate a plurality of original image data in a state where a plurality of light reception times are changed by the imaging control unit 520. The arithmetic processing unit 600 of FIG. 2 generates image data with an adjusted dynamic range by selectively combining a plurality of original image data generated in a state where a plurality of light reception times of the imaging unit 132 are changed. (DR (dynamic range) adjustment processing).

  The tilt angle of the optical axis A1 of the objective lens 131a with respect to the Z direction (hereinafter referred to as the tilt angle of the lens barrel 130) is detected by the tilt sensor 133, and an angle signal corresponding to the tilt angle is a control board 150 in FIG. Is output. The control board 150 gives the angle signal output from the tilt sensor 133 to the arithmetic processing unit 600 via the cable 203 and the imaging control unit 520 of FIG. The arithmetic processing unit 600 calculates the tilt angle of the lens barrel 130 based on the angle signal. The tilt angle calculated by the arithmetic processing unit 600 can be displayed on the display unit 430 in FIG.

  According to the configuration described above, planar observation and tilt observation of the observation object S placed on the placement surface of the stage 121 can be selectively performed. During planar observation, the optical axis A1 of the objective lens 131a is parallel to the Z direction. That is, the inclination angle of the lens barrel 130 is 0 °. On the other hand, during tilt observation, the optical axis A1 of the objective lens 131a is tilted with respect to the Z direction. Further, the user can observe the observation object S in a state where the lens barrel 130 is detached from the stand 110 of FIG. 1 and is fixed by hand or other fixing members. In the following description, planar observation of the observation object S is performed.

(E) Focus Drive Unit The focus control unit 530 in FIG. 2 is arranged so that the focal position of light from the observation object S that has passed through the lens unit 131 changes in the Z direction relative to the observation object S. 1 focus driving unit 113 is controlled. Accordingly, the imaging unit 132 in FIG. 1 can generate a plurality of original image data indicating the observation object S whose positions are different in the Z direction.

  In this process, the user can specify a range in which the focus driving unit 113 moves in the Z direction. When the movement range is designated, the focus control unit 530 controls the focus driving unit 113 so that the focal position of the light changes in the Z direction within the designated movement range. Thereby, the imaging unit 132 can generate a plurality of original image data indicating the observation object S having different positions in the Z direction in a short time.

  In addition, the arithmetic processing unit 600 can determine the degree of focus for each pixel with respect to each of the plurality of original image data indicating the observed object S whose positions are different in the Z direction. The focus control unit 530 can adjust the focus driving unit 113 so that the focus of the imaging unit 132 matches a specific portion of the observation object S based on the determination result of the degree of focus by the arithmetic processing unit 600 ( Autofocus processing). Furthermore, the arithmetic processing unit 600 generates image data focused on all parts of the observation object S by selectively combining a plurality of original image data for each pixel based on the determination result of the degree of focus. (Depth synthesis processing).

  FIG. 5 is a diagram illustrating a configuration example of the focus driving unit 113. In the present embodiment, the light projecting unit 140 is attached to the lens unit 131. As indicated by a dotted line in FIG. 5, the lens unit 131 is moved in the Z direction by the focus driving unit 113 integrally with the light projecting unit 140. Further, as indicated by a one-dot chain line in FIG. 5, the stage 121 is moved in the Z direction by the stage driving unit 122 in FIG. Thus, the lens unit 131, the light projecting unit 140, and the stage 121 are relatively movable in the Z direction.

  When the positional relationship in the Z direction among the observation object S, the lens unit 131, and the light projecting unit 140 changes, the elevation angle of the light source that illuminates the observation object S (see FIG. 9 described later) changes.

  In the example of FIG. 5, the light projecting unit 140 is provided integrally with the lens barrel unit 130, but the present invention is not limited to this. The light projecting unit 140 may be detachably attached to the barrel unit 130 as a unit. In this case, it is preferable that the lens unit 131 or the light projecting unit 140 be provided with a positioning mechanism for maintaining a constant angular relationship between the light projecting unit 140 and the lens unit 131 in the θ direction.

(F) Arithmetic Processing Unit FIG. 6 is a block diagram showing a configuration of the arithmetic processing unit 600 of FIG. As illustrated in FIG. 6, the arithmetic processing unit 600 includes a data generation unit 610, a focus determination unit 620, a calculation unit 630, and a condition setting unit 640.

  The data generation unit 610 generates display image data based on at least one of the plurality of original image data generated by the imaging unit 132 of FIG. Further, the data generation unit 610 performs DR adjustment processing, depth synthesis processing, preview processing, image adjustment processing, or the like on the image data in accordance with a user instruction.

  When the focus control unit 530 in FIG. 2 performs the autofocus process, the focus determination unit 620 performs the focus degree for each pixel for each of a plurality of original image data generated by the movement of the focus driving unit 113 in the Z direction. Determine. Further, the focus determination unit 620 determines the degree of focus for each pixel with respect to a plurality of original image data when the data generation unit 610 performs depth synthesis processing.

  The calculation unit 630 calculates the tilt angle of the lens barrel 130 in FIG. 4 based on the angle signal output from the tilt sensor 133 in FIG. Further, the calculation unit 630 displays the calculated tilt angle of the lens barrel unit 130 on the display unit 430 in FIG. 2 in accordance with a user instruction. Furthermore, the calculation unit 630 calculates the position of the stage 121 in FIG. 1 based on a position signal output from a position sensor (not shown) provided on the stage 121. Further, the calculation unit 630 displays the calculated position of the stage 121 on the display unit 430 in FIG. 2 in accordance with a user instruction.

  The condition setting unit 640 includes an imaging condition setting unit 641 and an illumination condition setting unit 642. The imaging condition setting unit 641 sets imaging conditions according to a user instruction. In addition, the condition setting unit 640 stores imaging information indicating the set imaging conditions in the storage unit 420 of FIG. The imaging conditions include, for example, the light reception time of the imaging unit 132 in FIG. 1, whether or not DR adjustment processing is performed, whether or not depth synthesis processing is performed, and the range of the focal position of light in the Z direction. The drive control unit 500 in FIG. 2 controls the operations of the measurement head 100 and the light generation unit 300 in FIG. 1 based on the imaging conditions set by the imaging condition setting unit 641.

  The illumination condition setting unit 642 sets the illumination condition according to a user instruction. Also, the illumination condition setting unit 642 causes the storage unit 420 to store illumination information corresponding to the set illumination condition. The illumination condition includes a virtual emission direction of light with respect to the observation object S. The data generation unit 610 generates display image data based on the illumination conditions set by the illumination condition setting unit 642 and stores the display image data in the storage unit 420. A method for instructing illumination conditions by the user will be described later.

(2) Basic operation of magnifying observation apparatus (a) Contents of basic operation On the mounting surface of the stage 121, a position where the optical axis A1 of the objective lens 131a intersects is called a reference point. The observation object S is placed on the stage 121 so that the observation object portion is located on the reference point. In this state, the position of the lens unit 131 (FIG. 1) in the Z direction is adjusted so that the objective lens 131a is focused on at least a part of the observation object S. Further, the stage 121 is adjusted in the X direction and the Y direction so that a desired portion of the observation object S can be observed. Furthermore, imaging conditions such as the light reception time and white balance of the imaging unit 132 are adjusted.

  In the following description, in order to distinguish the above four directional illuminations, the light emitted from each of the regions 140A, 140B, 140C, and 140D of the light projecting unit 140 is referred to as the first directional illumination and the second directional illumination, respectively. These are called directional illumination, third directional illumination, and fourth directional illumination. Further, in the following description, the traveling direction of the combined light beam when the plurality of light beams forming the ring illumination are combined in vector is referred to as a ring emission direction. The ring emission direction is a direction perpendicular to the mounting surface of the stage 121. Further, when a plurality of light beams forming the first directional illumination are combined in a vector manner, the traveling direction of the combined light rays is referred to as a first emission direction, and a plurality of light beams forming the second directional illumination are formed. When the light beams are combined in a vector manner, the traveling direction of the combined light beam is referred to as a second emission direction. Further, when a plurality of light beams forming the third directional illumination are combined in a vector manner, the traveling direction of the combined light beams is referred to as a third emission direction, and a plurality of light beams forming the fourth directional illumination are formed. In the case where the light beams are combined in a vector manner, the traveling direction of the combined light beam is referred to as a fourth emission direction.

  Here, the reference point is set as the origin on the placement surface of the stage 121 so that the emission direction or emission position of the light when irradiating the observation object S placed on the reference point can be identified. Define the polar coordinate system to be used. FIG. 7 is a diagram showing a polar coordinate system defined on the mounting surface of the stage 121. As shown in FIG. 7, the reference point on the placement surface of the stage 121 is defined as the origin O. As shown by a thick solid line in FIG. 7, the azimuth angle is defined in a counterclockwise direction around the origin O in a state where the mounting surface of the stage 121 is viewed from above. In this example, the direction from the origin O toward one side of the magnification observation apparatus 1 is defined as the reference angle (0 °) of the azimuth angle.

  A point Q is assumed on the placement surface or at an arbitrary position above the placement surface. In this case, the angle between the straight line connecting the point Q and the origin O and the placement surface is defined as the elevation angle of the point Q, as indicated by a thick dashed line in FIG. When the point Q is on the placement surface, the elevation angle of the point Q is 0 °. When the point Q is above the placement surface and on the optical axis A1, the elevation angle of the point Q is 90 °. In FIG. 7, the azimuth angle on the mounting surface of the stage 121 is shown every 90 °. In the following description, when describing an arbitrary position above the mounting surface of the stage 121 or the direction of light irradiated on the observation object S, the “elevation angle” and “ “Azimuth” is used as appropriate.

  In this example, the central portions of the regions 140A, 140B, 140C, and 140D of the light projecting unit 140 are arranged at azimuth angles of 45 °, 135 °, 225 °, and 315 °, respectively, with the optical axis A1 as the center. In addition, arrangement | positioning of the light projection part 140 is not limited to said example. For example, the central portions of the regions 140A, 140B, 140C, and 140D may be arranged at azimuth angles of 0 °, 90 °, 180 °, and 270 °, respectively, about the optical axis A1. The sequential imaging of the observation object S using the ring illumination and the first to fourth directional illuminations is called multiple illumination imaging.

  Each component of the magnifying observation apparatus 1 performs the following basic operation in response to a multiple illumination imaging instruction from the user. FIG. 8 is a schematic diagram for explaining the basic operation of the magnifying observation apparatus 1 when multiple illumination imaging is instructed. FIGS. 8A to 8E show changes in illumination irradiated to the observation object S in time series. 8A to 8E, the region of the light projecting unit 140 that emits light is indicated by a thick solid line, and the ring emission direction and the first to fourth emission directions are indicated by thick solid arrows. . FIGS. 8F to 8J show images SI of the observation object S when the illumination objects S in FIGS. 8A to 8E are irradiated. In the following description, the display portion of the observation target S in the image on which the observation target S is displayed is referred to as a target partial image sp.

  As shown in FIG. 8A, the observation object S is first irradiated with ring illumination, and the observation object S is imaged. In this case, the first to fourth directional illuminations are simultaneously and uniformly applied to each part of the observation object S from all the regions 140A to 140D surrounding the optical axis A1 of the objective lens 131a. Thereby, as shown in FIG. 8 (f), in the image SI of the observation object S imaged with ring illumination, the shadow due to the shape of the observation object S hardly occurs in the target partial image sp. Therefore, the surface state of the portion of the observation object S facing upward can be observed almost entirely.

  Next, as shown in FIG. 8B, the observation object S is irradiated with only the first directional illumination, and the observation object S is imaged. As shown in FIG. 8G, in the image SI of the observation object S imaged with the first directional illumination, the first emission direction and the shape of the observation object S are included in a part of the target partial image sp. Accordingly, a shadow SH is generated from the 45 ° azimuth position to the 225 ° azimuth position. Thereby, the uneven | corrugated | grooved part in the observation target S is strongly emphasized in the 1st output direction.

  Next, as shown in FIG. 8C, only the second directional illumination is irradiated on the observation object S, and the observation object S is imaged. As shown in FIG. 8 (h), in the image SI of the observation object S imaged by the second directional illumination, the second emission direction and the unevenness of the observation object S are formed on a part of the object partial image sp. Accordingly, a shadow SH is generated from the position of the azimuth angle of 135 ° toward the position of the azimuth angle of 315 °. Thereby, the uneven | corrugated | grooved part in the observation target object S is emphasized strongly in a 2nd output direction.

  Next, as shown in FIG. 8D, the observation object S is irradiated with only the third directional illumination, and the observation object S is imaged. As shown in FIG. 8 (i), in the image SI of the observation object S imaged with the third directional illumination, the third emission direction and the unevenness of the observation object S are included in a part of the object partial image sp. Accordingly, a shadow SH is generated from the 225 ° azimuth position to the 45 ° azimuth position. Thereby, the uneven | corrugated | grooved part in the observation target S is strongly emphasized in the 3rd output direction.

  Next, as shown in FIG. 8E, the observation object S is irradiated with only the fourth directional illumination, and the observation object S is imaged. As shown in FIG. 8 (j), in the image SI of the observation object S imaged by the fourth directional illumination, the fourth emission direction and the unevenness of the observation object S are included in a part of the object partial image sp. Accordingly, a shadow SH is generated from the 315 ° azimuth position to the 135 ° azimuth position. Thereby, the uneven | corrugated | grooved part in the observation target S is strongly emphasized in the 4th emission direction.

  When a plurality of original image data is stored in the storage unit 420, thumbnail image data corresponding to each original image data is generated by thinning out some pixel data from each original image data. The obtained thumbnail image data is stored in the storage unit 420. A plurality of thumbnail image data stored in the storage unit 420 is used in a preview process or the like to be described later.

  The series of operations described above are automatically performed when the control unit 410 in FIG. 1 executes the system program stored in the storage unit 420 as described later, but is manually performed based on the user's operation. May be.

  When the multiple illumination imaging is completed, an observation screen is displayed on the display unit 430 in FIG. FIG. 9 is a diagram illustrating a display example of the observation screen. As shown in FIG. 9, a function display area 431 is set at the top of the observation screen 430A. In the function display area 431, a depth synthesis button b1, a DR adjustment button b2, a preview button b5, an adjustment button b6, and a save button b7 are displayed.

  The user can operate each button displayed in the function display area 431 using the operation unit 440 of FIG. Details of processing executed by operating the depth synthesis button b1, the DR adjustment button b2, the preview button b5, the adjustment button b6, and the save button b7 will be described later.

  As shown in FIG. 9, the main display area 432 and the sub display area 433 are set to be arranged on the left and right below the function display area 431. The main display area 432 has a larger area than the function display area 431 and the sub display area 433. In the initial state, one of the plurality of images SI based on the plurality of original image data generated by the immediately preceding multiple illumination imaging is displayed over substantially the entire main display area 432. In this example, an image SI (see FIGS. 8B and 8G) of the observation object S when the first directional illumination is irradiated is displayed in the main display area 432.

  In the sub display area 433, an emission direction designation column 433a and an emission direction display column 433b are displayed. In the emission direction designation field 433a, an object position image ss0 indicating the position of the observation object S on the placement surface is displayed. In addition, a light icon ss1 indicating the emission position of light with respect to the observation object S when the observation object S is viewed from a position above the light projecting unit 140 is superimposed on the object position image ss0.

  In this case, the relative positional relationship between the target partial image sp of the observation target object S and the light icon ss1 on the target object position image ss0 is the observation target object S in order to obtain the image SI displayed in the main display region 432. This corresponds to the emission direction of light to be irradiated to the light (hereinafter referred to as a virtual light emission direction). As the object position image ss0, for example, a thumbnail image corresponding to ring illumination can be used.

  The user uses the operation unit 440 in FIG. 2 to move the light icon ss1 in FIG. 9 relative to the target partial image sp of the observation target object S on the target object position image ss0. The virtual emission direction of light can be easily specified while grasping the specific emission position.

  When the virtual emission direction of light is designated by the user, the image SI of the observation object S displayed in the main display area 432 is irradiated with light in the designated emission direction. It is updated to the image SI of the observation object S to be obtained when assumed. The update process of the image SI is executed by the data generation unit 610 in FIG.

  In the emission direction display field 433b, an image indicating a reference point on the placement surface is displayed as a reference point image ss2, and a virtual hemispheric image covering the reference point on the stage 121 is stereoscopically displayed as a hemispheric image ss3. Is displayed. On the hemispherical image ss3, an image indicating the light emission position corresponding to the virtual light emission direction designated by the light icon ss1 is displayed as the emission position image ss4.

  Further, a straight line is displayed so as to connect the emission position image ss4 and the reference point image ss2 on the hemispherical image ss3. In this case, the direction from the emission position image ss4 to the reference point image ss2 on the straight line indicates the light emission direction specified by the light icon ss1. By visually recognizing the reference point image ss2, the hemispherical image ss3, and the emission position image ss4 displayed in the emission direction display field 433b, the user can easily and accurately determine the virtual emission direction of the light specified by the light icon ss1. Can be recognized.

  The magnification observation apparatus 1 may be configured to be selectable as illumination that uses only a part of the ring illumination and the first to fourth directional illuminations for multiple illumination imaging. When multiple illumination imaging is performed using only part of the ring illumination and the first to fourth directional illuminations, the range of the emission direction that can be specified by the light icon ss1 may be limited.

  In this case, in the hemispherical image ss3, the range of the emission direction that can be designated by the light icon ss1 in the emission direction designation column 433a may be displayed so as to be distinguishable from the range of the emission direction that cannot be designated. For example, when the specifiable emission direction range is limited to a specific azimuth angle range, the color of the portion corresponding to the specifiable azimuth range and the portion corresponding to the non-specifiable azimuth range The display mode may be different. Thereby, the user can easily recognize the range of the emission direction that can be specified by the light icon ss1. Alternatively, the hemispherical image ss3 may display only the range of the emission direction that can be specified by the light icon ss1 instead of the above example.

  In this example, a virtual hemisphere that covers the reference point is displayed three-dimensionally as a hemispherical image ss3 in the emission direction display field 433b, but the present invention is not limited to this. In the emission direction display field 433b, a planar hemisphere image obtained by viewing a virtual hemisphere covering the reference point from above and a side hemisphere image obtained by viewing the virtual hemisphere from one side may be displayed. In this case, the reference point image ss2 and the emission position image ss4 may be displayed on the planar hemisphere image. Further, the reference point image ss2 and the emission position image ss4 may be displayed on the side hemisphere image.

  FIG. 10 is a schematic diagram for explaining the processing contents when the image SI of the observation object S is updated in response to the designation of the virtual emission direction of light.

  In the magnifying observation apparatus 1, a predetermined plane coordinate system is defined for the object position image ss0 displayed in the sub display area 433 of FIG. Further, as shown in FIG. 10A, on the object position image ss0 of FIG. 9, the ring illumination and the emission of light corresponding to the first, second, third and fourth emission directions, respectively. Points PA, PB, PC, PD, and PE indicating positions are set in advance.

  The positions of the points PA to PE are set based on the relative positional relationship between the light projecting unit 140 and the stage 121, for example. In this example, the point PA is located at the center of the object position image ss0, and the points PB, PC, PD, and PE are arranged at equiangular intervals on a concentric circle centered on the point PA.

  The control unit 410 detects the position (coordinates) of the light icon ss1 on the object position image ss0 at a predetermined cycle, and displays the image SI of the observation object S corresponding to the position of the light icon ss1 in FIG. It is displayed in the display area 432.

  For example, when the light icon ss1 is positioned on the point PA in FIG. 10A, the control unit 410 displays the image SI in FIG. 8F corresponding to the ring emission direction in the main display region 432 in FIG. . Further, the control unit 410 displays the image SI of FIG. 8G corresponding to the first emission direction in the main display area 432 of FIG. 9 when the light icon ss1 is positioned on the point PB of FIG. When the light icon ss1 is positioned on the point PC in FIG. 10A, the image SI in FIG. 8H corresponding to the second emission direction is displayed in the main display area 432 in FIG. Furthermore, the control unit 410 displays the image SI of FIG. 8I corresponding to the third emission direction in the main display region 432 of FIG. 9 when the light icon ss1 is positioned on the point PD of FIG. When the light icon ss1 is positioned on the point PE in FIG. 10A, the image SI in FIG. 8J corresponding to the fourth emission direction is displayed in the main display area 432 in FIG.

  When the light icon ss1 is at a position different from the points PA to PE, the control unit 410 generates an image SI of the observation object S to be displayed in the main display area 432 according to the following procedure.

  As illustrated in FIG. 10A, when the light icon ss1 is at a position different from the points PA to PE, the control unit 410 calculates a distance between each point PA to PE and the light icon ss1. In addition, the control unit 410 extracts a predetermined number of points (three points in this example) from the plurality of points PA to PE in order of short calculated distance. In the example of FIG. 10A, the distance d1 between the light icon ss1 and the point PB is the shortest, the distance d2 between the light icon ss1 and the point PA is the second shortest, and the light icon ss1 and the point PC Is the third shortest distance d3. Therefore, the control unit 410 extracts points PA, PB, and PC.

  Subsequently, the control unit 410 combines the original image data corresponding to the point PA, the original image data corresponding to the point PB, and the original image data corresponding to the point PC based on the distances d1, d2, and d3. To decide.

  The composition ratio is, for example, a ratio of reciprocals of the values of the distances d1, d2, and d3. In this case, the composition ratio becomes higher as the original image data corresponds to a point having a short distance from the light icon ss1, and becomes lower as the original image data corresponding to a point far from the light icon ss1. In the example of FIG. 10B, the composition ratios of the original image data corresponding to the point PA, the original image data corresponding to the point PB, and the original image data corresponding to the point PC are 30%, 50%, and 20%, respectively. It has been decided.

  The control unit 410 synthesizes three original image data respectively corresponding to the points PA, PB, and PC based on the determined composition ratio. Specifically, for each original image data, the control unit 410 multiplies the value (pixel value) of all pixel data of the original image data by the composition ratio, and synthesizes the three original image data after the multiplication. Image data is generated. Thereafter, the control unit 410 displays an image SI based on the generated display image data in the main display area 432 of FIG.

  FIG. 10C shows an example of an image SI displayed in the main display area 432 corresponding to the position of the light icon ss1 in FIG. In the image SI shown in FIG. 10C, the three original image data respectively corresponding to the points PA, PB, and PC are combined so that the uneven portion in the observation object S becomes the light icon ss1 shown in FIG. Is strongly emphasized in the virtual emission direction of light specified by.

  As described above, the image data of the image SI displayed in the main display area 432 includes the plurality of original image data generated after the completion of the multiple illumination imaging and the virtual emission direction of the light specified by the user. Is generated based on Therefore, even when the virtual emission direction of light designated by the user continuously changes, a plurality of image data corresponding to the designated emission direction corresponds to the processing capability of the control unit 410. Produced almost continuously at speed. In addition, images SI based on the plurality of generated image data are continuously displayed. Therefore, substantially the same image as the image (moving image) obtained when imaging is continuously performed while changing the position of the illumination is reproduced on the main display region 432 in a pseudo manner. As a result, the user visually recognizes the image SI on the main display area 432 while designating the virtual light emission direction, whereby the observation object S is irradiated with light in the designated emission direction in real time. I feel like you are.

  In the above example, the control unit 410 extracts three points from the points PA to PE corresponding to the ring illumination and the first to fourth directional illuminations, and three originals corresponding to the extracted three points. The composition ratio of the image data is determined, but the present invention is not limited to this. The control unit 410 may determine the composition ratio for the five original image data respectively corresponding to all the points PA to PE, and may compose the five original image data based on the determined composition ratio.

  9 may be displayed on the observation screen 430A of FIG. 9 in which a composition ratio input field for inputting a composition ratio for a plurality of original image data obtained by performing multiple illumination imaging using the operation unit 440 in FIG. In this case, the control unit 410 may synthesize part or all of the plurality of original image data based on the value input by the user in the synthesis rate input field.

  On the observation screen 430A in FIG. 9, the light icon ss1 is superimposed and displayed on the object position image ss0 displayed in the sub display area 433. In the present embodiment, in addition to the light icon ss1 on the object position image ss0, the light icon ss1 may be superimposed on the image SI displayed on the main display area 432. FIG. 11 is a diagram illustrating an example in which the light icon ss1 is displayed in the main display area 432 and the sub display area 433, respectively.

  In this case, the above points PA to PE are also set on the image SI of the observation object S. For example, the user moves one of the light icon ss1 on the image SI of the observation object S and the light icon ss1 on the object position image ss0 on the observation screen 430A using the operation unit 440 of FIG. be able to.

  When the light icon ss1 on the object position image ss0 is moved, the control unit 410 generates display image data in the same procedure as the example described with reference to FIG. 10, and the generated display image is displayed. The image SI based on the data is displayed in the main display area 432. At this time, the control unit 410 adjusts the position of the light icon ss1 on the image SI so as to move to a position corresponding to the position of the light icon ss1 on the object position image ss0.

  When the light icon ss1 on the image SI of the observation target S is moved, the control unit 410 is based on the positional relationship between the position of the light icon ss1 on the image SI and the points PA to PE set in the image SI. Display image data is generated, and an image SI based on the generated display image data is displayed in the main display area 432. At this time, the control unit 410 adjusts the position of the light icon ss1 on the object position image ss0 so as to move to a position corresponding to the position of the light icon ss1 on the image SI.

  According to the example of FIG. 11, the user can designate a virtual light emission direction using a desired light icon ss1 of the two light icons ss1. In the example of FIG. 11, the two optical icons ss1 do not necessarily have to be displayed at the same time. For example, when various buttons displayed on the observation screen 430A, the light icon ss1, and the like are operated by the pointer, one of the two light icons ss1 depending on the position of the pointer on the observation screen 430A. Only ss1 may be displayed on the observation screen 430A. Specifically, when the mouse pointer is positioned on the main display area 432, only the light icon ss1 on the image SI of the observation object S is displayed, and the light icon ss1 on the object position image ss0 is displayed. It does not have to be. When the mouse pointer is positioned on the sub display area 433, only the light icon ss1 on the object position image ss0 is displayed, and the light icon ss1 on the image SI of the observation object S is not displayed. Good.

  Note that the light icon ss1 on the object position image ss0 may be displayed regardless of the position of the mouse pointer. Thereby, the user can easily grasp the virtual emission position of the light.

  A specific example of the change in the observation screen 430A when the virtual emission direction of light is designated by the light icon ss1 in a state where the observation screen 430A of FIG. 9 is displayed on the display unit 430 will be described.

  FIG. 12 is a diagram showing another display example of the observation screen 430A. In FIG. 12, in order to facilitate understanding of the following description, the five points PA to PE of FIG. 10A are shown on the object position image ss0 displayed in the emission direction designation column 433a.

  As indicated by a dotted line in the emission direction designation column 433a of FIG. 12, for example, the optical icon ss1 is moved from the position of the point PB to the position between the points PB and PE on the concentric circle of the point PA where the points PB to PE are arranged. In this case, the control unit 410 generates display image data by synthesizing a part of the original image data among the plurality of original image data respectively corresponding to the points PA to PE as in the above example. In addition, the control unit 410 displays the image SI of the observation object S based on the generated display image data in the main display region 432.

  In the image SI displayed in the main display area 432 of FIG. 12, the uneven portion of the observation object S is strongly emphasized in the virtual emission direction of light designated by the light icon ss1 in the emission direction designation column 433a. .

  The virtual light emission direction includes components of an azimuth angle and an elevation angle. In this example, the light icon ss1 is moved on a concentric circle of the point PA where the points PB to PE are arranged. The user can designate the azimuth angle of the virtual light emission direction by moving the light icon ss1 so as to rotate with respect to the center of the object position image ss0 on the object position image ss0. As a result, the azimuth angle in the virtual light emission direction is changed to the azimuth angle designated by the light icon ss1. Thus, the user can designate the azimuth angle of the virtual light emission direction as a desired direction by operating the light icon ss1. As a result, in the image SI displayed in the main display region 432, the direction in which the uneven portion of the observation object S is emphasized can be easily changed to the θ direction.

  FIG. 13 is a diagram showing still another display example of the observation screen 430A. Also in FIG. 13, the five points PA to PE in FIG. 10A are shown on the object position image ss0 displayed in the emission direction designation column 433a, as in the example of FIG. As indicated by a dotted line in the emission direction designation column 433a in FIG. 13, the light icon ss1 is moved so as to approach the point PA from the position indicated in the emission direction designation column 433a in FIG. In this case, the control unit 410 generates display image data by synthesizing a part of the original image data among the plurality of original image data respectively corresponding to the points PA to PE as in the above example. In addition, the control unit 410 displays the image SI of the observation object S based on the generated display image data in the main display region 432.

  In the image SI displayed in the main display region 432 of FIG. 13, the uneven portion in the observation object S is emphasized weaker than the image SI displayed in the main display region 432 of FIG.

  In this example, the light icon ss1 is moved from the concentric circle where the points PB to PE are arranged around the point PA toward the point PA. The user can designate the elevation angle from the placement surface in the virtual light emission direction by moving the light icon ss1 closer to or away from the center of the object position image ss0 on the object position image ss0. . As a result, the elevation angle from the placement surface in the virtual emission direction of the light is changed to the elevation angle specified by the light icon ss1. Thus, the user can designate the elevation angle in the virtual light emission direction as a desired angle by operating the light icon ss1. As a result, in the image SI displayed in the main display region 432, the degree of emphasis of the uneven portion in the observation object S can be easily changed.

  In the above example, the main display area 432 for displaying the image SI based on the display image data and the sub display area 433 for operating the light icon ss1 are set on the observation screen 430A of the display unit 430. The Thereby, the image SI of the observation object S and the light icon ss1 do not overlap. Therefore, the image SI of the observation object S and the light icon ss1 are easy to visually recognize.

  The user operates the save button b7 in FIG. 9 using the operation unit 440 in FIG. 2 in a state where the virtual light emission direction of the image SI of the observation object S is designated as a desired direction. In this case, the display image data of the image SI displayed in the main display area 432 is stored in the storage unit 420 together with a plurality of data related to the display image data. The plurality of data includes a plurality of original image data related to the display image data, a plurality of thumbnail image data, imaging information, illumination information, lens information, and the like.

  Here, the configuration for designating the virtual emission direction of light is not limited to the above example. 14 to 16 are diagrams illustrating other configuration examples for designating a virtual emission direction of light.

  In the example of FIG. 14, the sub display area 433 of FIG. 9 is not set on the observation screen 430A, and the light icon ss1 is superimposed on the image SI of the observation object S displayed in the main display area 432. In this case, the above points PA to PE are set on the image SI of the observation object S. The control unit 410 generates display image data based on the positional relationship between the light icon ss1 on the image SI and the set points PA to PE, and the main display area using the image SI based on the generated display image data. The display of 432 is updated. Since the user can more intuitively operate the light icon ss1 on the image SI, the virtual emission direction of light can be specified more easily.

  With respect to the example of FIG. 14, the user can designate the azimuth angle of the virtual light emission direction by moving the light icon ss1 to rotate about the center of the image SI on the image SI. Further, the user can designate the elevation angle from the placement surface in the virtual light emission direction by moving the light icon ss1 closer to or away from the center of the image SI on the image SI.

  In the example of FIG. 15, the sub display area 433 of FIG. 9 is not set on the observation screen 430 </ b> A, and the position adjustment bar 432 a extending in the left-right direction and the upper and lower positions on the image SI of the observation object S displayed in the main display area 432 A position adjustment bar 432b extending in the direction is displayed. In addition, a light icon ss5 is displayed on the position adjustment bar 432a so as to be movable in the left-right direction on the position adjustment bar 432a. Further, a light icon ss6 is displayed on the position adjustment bar 432b so as to be movable in the vertical direction on the position adjustment bar 432b.

  The light icon ss5 indicates the position (coordinates) in the horizontal direction on the image SI, and the light icon ss6 indicates the position (coordinates) in the vertical direction on the image SI. Also in this example, the above points PA to PE are set on the image SI of the observation object S as in the example of FIG. The control unit 410 generates display image data based on the positional relationship between the positions on the image SI specified by the light icons ss5 and ss6 and the points PA to PE, and the image SI based on the generated display image data. The display of the main display area 432 is updated. The user can designate the virtual emission direction of light by operating the light icons ss5 and ss6 on the image SI.

  With respect to the example of FIG. 15, the user can designate the azimuth angle of the virtual light emission direction by moving the position on the image SI specified by the light icons ss5 and ss6 so as to rotate. Further, the user designates the elevation angle from the placement surface in the virtual light emission direction by moving the position on the image SI specified by the light icons ss5 and ss6 closer to or away from the center of the image SI. be able to. In the example of FIG. 9 described above, a plurality of indexes having the same functions as the position adjustment bars 432a and 432b and the light icons ss5 and ss6 of FIG. 15 are displayed on the sub display area 433 instead of the single light icon ss1. May be displayed.

  In the example of FIG. 16, the sub display area 433 of FIG. 9 is not set on the observation screen 430A, and five switch icons ss7 are displayed on the image SI of the observation object S displayed in the main display area 432. Also in this example, the above points PA to PE are set on the image SI of the observation object S as in the example of FIG. The five switch icons ss7 are located on the points PA to PE, respectively, and correspond to the ring illumination and the first to fourth directional illuminations, respectively.

  Each switch icon ss7 is displayed to be switchable between an on state and an off state. In this case, the control unit 410 may generate display image data based on one or a plurality of images SI corresponding to the switch icon ss7 in the on state. For example, it is assumed that the switch icon ss7 located at the center of the image SI and the switch icon ss7 located at the upper right of the image SI are turned on and all the remaining switch icons ss7 are turned off. In this case, the control unit 410 may generate display image data by combining two original image data corresponding to the points PA and PB.

  When the plurality of switch icons ss7 are arranged in the same manner as the light emission positions corresponding to the ring emission direction and the first to fourth emission directions, the user sets the light emission position in the light projecting unit 140 on the image SI. It can be easily grasped.

  With respect to the example of FIG. 16, the user can designate the azimuth angle of the virtual light emission direction by switching the on state and the off state of the four switch icons ss7 surrounding the center of the image SI, for example. In addition, the user switches the on state and the off state of the switch icon ss7 located at the center of the image SI, and switches the on state and the off state of the four switch icons ss7 to display the virtual light emission direction. The elevation angle from the surface can be specified. In this case, although the elevation angle pattern that can be specified is small, the elevation angle can be specified only by the operation of turning on / off the switch.

  In addition to the examples of FIGS. 9 and 11 to 16, as a configuration for designating a virtual light emission direction, an azimuth angle input field in which an azimuth angle and an elevation angle of the virtual light emission direction can be input, and An elevation angle input field may be displayed on the observation screen 430A. In this case, the user may designate the virtual emission direction of light by designating the azimuth angle and the elevation angle using the azimuth angle input field and the elevation angle input field.

  In the above example, one of the plurality of images SI based on the plurality of original image data generated by the immediately preceding multiple illumination imaging is displayed in the main display region 432 of the observation screen 430A in the initial state after the completion of the multiple illumination imaging. Although displayed, the present invention is not limited to this. In the magnifying observation apparatus 1, for example, the virtual light emission direction corresponding to the image SI to be displayed in the initial state may be designated in advance before the multiple illumination imaging is started. Alternatively, the virtual light emission direction corresponding to the image SI to be displayed in the initial state in advance may be designated in advance by the manufacturer when the magnification observation apparatus 1 is shipped from the factory. Further, until the user's operation is accepted, the emission direction of the virtual light corresponding to the image SI gradually changes in the main display region 432 of the observation screen 430A in the initial state after the completion of the multiple illumination imaging. An image (moving image) in which the emission direction with respect to the image SI changes smoothly may be displayed.

  In this case, when the multiple illumination imaging is completed, the control unit 410 sets the emission direction specified based on the virtual light emission direction specified in advance and the plurality of original image data generated by the multiple illumination imaging. Corresponding display image data is generated. In addition, the control unit 410 displays an image SI based on the generated display image data in the main display area 432.

(B) Example of Multiple Illumination Imaging Process The system program stored in the storage unit 420 in FIG. 2 includes a multiple illumination imaging program and a display image generation program. The control unit 410 in FIG. 2 performs the multiple illumination imaging process and the display image generation process by executing the multiple illumination imaging program and the display image generation program. The series of basic operations described above is realized by the multiple illumination imaging process and the display image generation process. Thereby, even when the user is not skilled, the original image data can be easily generated.

  FIG. 17 is a flowchart illustrating an example of the multiple illumination imaging process. The multiple illumination imaging process is started in response to an instruction for multiple illumination imaging by the user. When the multi-illumination imaging process is started, the control unit 410 irradiates the observation object S with ring illumination according to preset imaging conditions, and images the observation object S with the imaging unit 132 (step S101). Original image data generated by imaging is stored in the storage unit 420.

  Next, the control unit 410 sets i to 1 (step S102). Here, i indicates a number of a plurality of directional illuminations. Subsequently, the control unit 410 irradiates the observation object S with i-th directional illumination, and images the observation object S by the imaging unit 132 (step S103). Original image data obtained by imaging is stored in the storage unit 420.

  Next, the control unit 410 determines whether i is 4 (step S104). If i is not 4, the control unit 410 updates i to i + 1 (step S105), and returns to the process of step S103.

  In step S104, when i is 4, the control unit 410 generates a plurality of thumbnail image data respectively corresponding to the plurality of original image data (step S106). The plurality of generated thumbnail image data is stored in the storage unit 420. Thereby, the multiple illumination imaging process ends.

  In the above description, when it is not necessary to display the thumbnail image on the display unit 430, the process of step S106 may be omitted. Thereby, the processing time is shortened.

  In the above description, some processes may be performed at other times. For example, the process of step S101 may be executed after the processes of steps S102 to S105.

(C) Example of Display Image Generation Process FIGS. 18 and 19 are flowcharts illustrating an example of the display image generation process. In the present embodiment, control unit 410 starts display image generation processing after the end of multiple illumination imaging processing.

  First, the control unit 410 causes the main display area 432 of the display unit 430 to display the image SI of the observation object S based on arbitrary original image data among the plurality of original image data generated by the multiple illumination imaging process (step S201). ). In addition, the control unit 410 displays the object position image ss0 and the light icon ss1 on the emission direction designation field 433a of the display unit 430 (step S202). Further, the control unit 410 displays the reference point image ss2, the hemispherical image ss3, and the emission position image ss4 on the emission direction display field 433b of the display unit 430 (step S203).

  Thereafter, the control unit 410 determines whether or not the light icon ss1 has been operated (step S204). When the light icon ss1 is not operated, the control unit 410 proceeds to the process of step S210 described later.

  When the light icon ss1 is operated, the control unit 410 updates the display of the light icon ss1 and the emission position image ss4 in response to the operation of the light icon ss1 (step S205). Further, the control unit 410 recognizes that the virtual emission direction of light is designated by the operation of the light icon ss1 (step S206), and the designated emission direction is the ring emission direction or the first to fourth emission directions. It is determined whether or not any of them (step S207). The determination process in step S207 is executed based on the positional relationship between the points PA to PE set on the object position image ss0 and the light icon ss1.

  When the designated emission direction is either the ring emission direction or the first to fourth emission directions, the control unit 410 uses the original image data corresponding to the designated emission direction as display image data, and displays the display image data. The image SI of the observation object S based on the image data for use is displayed in the main display area 432 of the display unit 430 (step S208). Thereafter, the control unit 410 proceeds to the process of step S210 described later.

  In step S207, when the designated emission direction is neither the ring emission direction nor the first to fourth emission directions, the control unit 410 determines the composition ratio of the plurality of original image data based on the designated emission direction. Calculate (step S209). The calculation process of step S209 is executed based on the positional relationship between the points PA to PE set on the object position image ss0 and the light icon ss1, as in the process of step S207.

  Thereafter, the control unit 410 generates display image data by combining a plurality of original image data based on the combining ratio calculated in step S209, and the image SI of the observation object S based on the display image data. Is displayed in the main display area 432 of the display unit 430 (step S210).

  In the present embodiment, the user can instruct the end of observation of the observation object S by operating the operation unit 440 of FIG. After the process in step S209, the control unit 410 determines whether or not an instruction to end observation of the observation object S has been issued (step S211). When the end of observation of the observation object S is instructed, the control unit 410 ends the display image generation process. On the other hand, when the end of observation of the observation object S is not instructed, the control unit 410 returns to the process of step S204.

  In the display image generation processing of FIGS. 18 and 19, the control unit 410 calculates at least one of the azimuth angle and elevation angle of the designated virtual light emission direction during or after the processing of step S209. May be. In this case, the control unit 410 may cause the display unit 430 to display at least one of the calculated azimuth angle and elevation angle. Thereby, the user can easily recognize information on the virtual emission direction of the designated light.

  In the display image generation process, the image SI of the observation object S based on arbitrary original image data among the plurality of original image data generated by the multiple illumination imaging process in the process of step S201 is displayed on the display unit 430. However, the present invention is not limited to this. In the process of step S201, the control unit 410 may cause the display unit 430 to display an image SI based on original image data corresponding to predetermined illumination (for example, ring illumination) instead of arbitrary original image data. . Or the control part 410 may abbreviate | omit the process of step S201.

  In the above example, the display image generation process is executed after the end of the multiple illumination imaging process, but the present invention is not limited to this. When the multiple illumination imaging process is executed continuously or intermittently at a constant period, the display image generation process may be executed in parallel with the multiple illumination imaging process. In this case, the display image generation process can be executed based on the latest plurality of original image data stored in the storage unit 420 by the immediately preceding multiple illumination imaging process.

  In the magnifying observation apparatus 1 according to the present embodiment, the user can specify a part of a plurality of original image data stored in the storage unit 420 using the operation unit 440 of FIG. In this case, the control unit 410 may read the designated original image data and perform display image generation processing based on the read original image data in response to the designation of the original image data by the user.

(3) Depth synthesis process (a) Processing content The user operates the depth synthesis button b1 in FIG. 9 using the operation unit 440 in FIG. 2 to instruct the control unit 410 in FIG. Can be given.

  In the depth synthesis process, it is preferable that the range of the focal position of the light in the Z direction and the movement pitch of the focal position are set in advance as imaging conditions for the depth synthesis process. In this case, since the focus driving unit 113 in FIG. 1 does not need to change the focus position of the light within an excessively large range, a plurality of original image data can be generated at high speed. The imaging condition is set based on, for example, the operation of the operation unit 440 in FIG. 2 by the user. The range of the focal position of light in the Z direction and the movement pitch of the focal position may be automatically set according to the magnification of the objective lens 131a used for imaging. In the following description, it is assumed that the imaging conditions for the depth synthesis process are set in advance.

  FIG. 20 is a conceptual diagram of the depth synthesis process. FIG. 20A shows the positional relationship among the lens unit 131, the light projecting unit 140, and the stage 121. In this example, the lens unit 131 is moved in the Z direction integrally with the light projecting unit 140 while the stage 121 is stationary. In this case, positions H1 to Hj (j is a natural number) in the Z direction to which the lens unit 131 (objective lens 131a) should move based on the range of the focal position of light in the Z direction and the movement pitch of the focal position specified in advance. Is determined.

  In the depth synthesis process, the observation object S is imaged using the ring illumination and the first to fourth directional illuminations with the lens unit 131 positioned at each of the positions H1 to Hj. Accordingly, a plurality (j) of original image data corresponding to the positions H1 to Hj is generated using the ring illumination and the first to fourth directional illuminations. FIG. 20B shows a plurality of images SI of the observation object S corresponding to the positions H1 to Hj for each illumination.

  The degree of focus for each pixel is determined for each of a plurality of original image data obtained by imaging using ring illumination. Based on the determination result of the degree of focus, a plurality of original image data is selectively combined. Thereby, depth composite image data in which all parts of the observation object S irradiated with ring illumination are focused is generated. Further, based on a plurality of original image data corresponding to each directional illumination and mask image data described later, depth composite image data corresponding to each directional illumination is generated. An image based on the depth composite image data is referred to as a depth composite image. FIG. 20B shows a plurality of depth composite images SF of the observation object S corresponding to the ring illumination and the first to fourth directional illuminations, respectively.

  The control unit 410 executes display image generation processing based on a plurality of depth synthesized image data generated by the depth synthesis processing instead of the plurality of original image data. Thereby, the user can easily display on the display unit 430 the depth composite image SF of the observation object S to be obtained when it is assumed that the observation object S is irradiated with light from a desired direction.

  In the above-described depth synthesis process, a plurality of original image data respectively corresponding to the positions H1 to Hj is generated for each illumination. An operation button for instructing only the generation of a plurality of original image data may be displayed on the observation screen 430A in FIG. When only the generation of the plurality of original image data is instructed, the control unit 410 only receives the generation of the plurality of original image data, and then receives the designation by the user regarding the position of the focal point in the Z direction. The display image generation processing may be executed using a plurality of original image data corresponding to the position in the direction.

  In the above-described depth synthesis processing, mask image data is generated when depth synthesized image data corresponding to ring illumination is generated, and each of the first to fourth directional illuminations is handled using the generated mask image data. A plurality of depth composite image data to be generated is generated. The mask image data will be described.

  Each of the plurality of original image data generated in the process of imaging the observation object S while changing the position of the lens barrel 130 and the stage 121 in the Z direction includes the light focal positions H1 to Hj in the Z direction. Corresponding numbers are given. The data generation unit 610 in FIG. 6 generates mask image data indicating the correspondence between each pixel of the depth composite image data corresponding to the ring illumination and the number of the original image data.

  FIG. 21 is a schematic diagram visually showing mask image data. Each small square in FIG. 21 corresponds to each pixel data of the depth composite image data corresponding to the ring illumination. In addition, the number assigned to each square is the pixel value of the pixel data generated at which of the focal positions H1 to Hj of the light in the Z direction in the pixel corresponding to the square, that is, saturated. The number of the original image data from which data indicating which focal position of the light has the highest luminance value is extracted. That is, in the example of FIG. 21, the upper left pixel data is extracted from the original image data at the light focal position H12, and the lower right pixel data is extracted from the original image data at the light focal position H85. Show.

  The data generation unit 610 generates depth composite image data corresponding to each of the first to fourth directional illuminations based on the generated mask image data. In this case, when the focus determination unit 620 in FIG. 6 generates the depth composite image data corresponding to each of the first to fourth directional illuminations, the focus determination unit determines the focus degree for each pixel with respect to the original image data. There is no need. Thereby, the depth synthesis process can be speeded up.

  In the above description, the depth composite image data is generated first for each of the ring illumination and the first to fourth directional illuminations, and display image data is generated based on the plurality of generated depth composite image data. However, the present invention is not limited to this. A plurality of display image data respectively corresponding to the plurality of positions H1 to Hj in the Z direction are generated based on the virtual emission direction of light designated by the user, and the generated plurality of display image data are generated. Based on this, depth composite image data for display may be generated. In this case, mask image data is not necessary.

  In the above description, the mask image data is generated based on the image data when the ring illumination is emitted, but the present invention is not limited to this. Mask image data may be generated based on each of the image data when the ring illumination is emitted and the image data when the directional illumination is emitted. Moreover, the mask image data when the directional illumination is emitted may be generated for each of the plurality of directional illuminations. This configuration is useful when the optimum position in the Z direction is different due to the difference in the amount of light between the ring illumination and the directional illumination.

(B) Example of Depth Synthesis Process The system program stored in the storage unit 420 in FIG. 2 includes a depth synthesis program. The control unit 410 in FIG. 2 performs a depth synthesis process by executing a depth synthesis program.

  22, FIG. 23 and FIG. 24 are flowcharts showing an example of the depth synthesis process. The controller 410 moves the lens unit 131 to the lower limit position (step S301). Next, the control unit 410 irradiates the observation object S with ring illumination by the light projecting unit 140 and images the observation object S by the imaging unit 132 (step S302). In addition, the control unit 410 assigns a number corresponding to the position of the lens unit 131 in the Z direction to the generated original image data (step S303). Subsequently, the control unit 410 determines whether or not the lens unit 131 has moved to the upper limit position (step S304).

  In step S304, when the lens unit 131 has not moved to the upper limit position, the control unit 410 moves the lens unit 131 upward by a predetermined amount (a preset movement pitch) (step S305). Thereafter, the control unit 410 returns to the process of step S302. The control unit 410 repeats the processes of steps S302 to S305 until the lens unit 131 moves to the upper limit position.

  When the lens unit 131 has moved to the upper limit position in step S304, the control unit 410 determines the degree of focus for each pixel for each original image data corresponding to ring illumination (step S306). Next, the control unit 410 generates depth combined image data corresponding to ring illumination by combining the pixel data of the plurality of original image data based on the determination result of the in-focus level (step S307). Further, the control unit 410 generates mask image data indicating the correspondence between each pixel of the combined image data and the number of the original image data, and stores the mask image data in the storage unit 420 (step S308).

  Thereafter, the control unit 410 moves the lens unit 131 to the lower limit position (step S309). Next, control unit 410 sets i to 1 (step S310). Here, i indicates a number of a plurality of directional illuminations. Subsequently, the control unit 410 irradiates the observation object S with the i-th directional illumination by the light projecting unit 140 and images the observation object S by the imaging unit 132 (step S311). In addition, the control unit 410 gives a number corresponding to the position of the lens unit 131 in the Z direction to the generated original image data (step S312). Subsequently, the control unit 410 determines whether or not the lens unit 131 has moved to the upper limit position (step S313).

  In step S313, when the lens unit 131 has not moved to the upper limit position, the control unit 410 moves the lens unit 131 upward by a predetermined amount (a preset movement pitch) (step S314). Thereafter, the control unit 410 returns to the process of step S311. Until the lens unit 131 moves to the upper limit position, the control unit 410 repeats the processes of steps S311 to S314.

  In step S313, when the lens unit 131 moves to the upper limit position, the control unit 410 combines the pixel data of the plurality of original image data based on the mask image data stored in the storage unit 420, so that the i th Depth composite image data corresponding to the directional illumination is generated (step S315).

  Next, the control unit 410 determines whether i is 4 (step S316). In step S316, when i is not 4, the control unit 410 updates i to i + 1 (step S317). Further, the control unit 410 moves the lens unit 131 to the lower limit position (step S318). Thereafter, the control unit 410 returns to the process of step S311. Control unit 410 repeats the processing of steps S311 to S318 until i becomes 4. Accordingly, a plurality of original image data corresponding to each of the first to fourth directional illuminations is generated, and depth composite image data corresponding to each of the first to fourth directional illuminations is generated. . In step S316, when i is 4, the control part 410 complete | finishes a process.

  In the above description, some processes may be performed at other times. For example, the processes in steps S306 to S308 may be executed in parallel with steps S309 to S314. Further, the process of step S315 corresponding to the i-th directional illumination may be performed in parallel with steps S311 to S314 corresponding to the (i + 1) -th directional illumination. In these cases, the depth synthesis process can be speeded up.

  Or the process of step S306-S308 may be performed after the process of step S309-S314. Further, the process of step S315 corresponding to the i-th directional illumination may be executed after the processes of steps S311 to S314 corresponding to the (i + 1) -th directional illumination.

(C) Another Example of Depth Combining Process FIGS. 25, 26, and 27 are flowcharts illustrating another example of the depth synthesizing process. The controller 410 moves the lens unit 131 to the lower limit position (step S321). Next, the control unit 410 irradiates the observation object S with ring illumination by the light projecting unit 140 and images the observation object S by the imaging unit 132 (step S322). Further, the control unit 410 assigns a number corresponding to the position of the lens unit 131 in the Z direction to the generated original image data (step S323).

  Subsequently, the control unit 410 sets i to 1 (step S324). Here, i indicates a number of a plurality of directional illuminations. Thereafter, the control unit 410 irradiates the observation object S with the i-th directional illumination by the light projecting unit 140 and images the observation object S by the imaging unit 132 (step S325). In addition, the control unit 410 assigns a number corresponding to the position of the lens unit 131 in the Z direction to the generated original image data (step S326). Next, the control unit 410 determines whether i is 4 (step S327).

  If i is not 4 in step S327, control unit 410 updates i to i + 1 (step S328). Thereafter, the control unit 410 returns to the process of step S325. Control unit 410 repeats the processing of steps S325 to S328 until i becomes 4. Thereby, a plurality of original image data corresponding to each of the first to fourth directional illuminations is generated. In step S327, when i is 4, the control unit 410 determines whether or not the lens unit 131 has moved to the upper limit position (step S329).

  If the lens unit 131 has not moved to the upper limit position in step S329, the control unit 410 moves the lens unit 131 upward by a predetermined amount (step S330). Thereafter, the control unit 410 returns to the process of step S322. Until the lens unit 131 moves to the upper limit position, the control unit 410 repeats the processes of steps S322 to S330.

  In step S329, when the lens unit 131 moves to the upper limit position, the control unit 410 determines the degree of focus for each pixel for each original image data corresponding to the ring illumination (step S331). Next, the control unit 410 generates depth combined image data corresponding to ring illumination by combining the pixel data of the plurality of original image data based on the determination result of the in-focus level (step S332). In addition, the control unit 410 generates mask image data indicating the correspondence between each pixel of the combined image data and the number of the original image data, and stores the mask image data in the storage unit 420 (step S333).

  Subsequently, control unit 410 sets i to 1 again (step S334). Thereafter, the control unit 410 combines the pixel data of the plurality of original image data based on the mask image data stored in the storage unit 420 to generate depth combined image data corresponding to the i-th directional illumination. (Step S335).

  Next, the control unit 410 determines whether i is 4 (step S336). In step S316, when i is not 4, the control unit 410 updates i to i + 1 (step S337). Thereafter, the control unit 410 returns to the process of step S335. Control unit 410 repeats the processing of steps S335 to S337 until i becomes 4. Thereby, depth composite image data corresponding to each of the first to fourth directional illuminations is generated. In step S336, when i is 4, the control unit 410 ends the process.

  In the above description, some processes may be performed at other times. For example, part of the processing of steps S331 to S337 may be executed in parallel with steps S321 to S330. In this case, the depth synthesis process can be speeded up. Moreover, the process of step S322, S323 may be performed after the process of step S324-S328.

  In one example and other examples of the above-described depth synthesis processing, the lens unit 131 is moved to the upper limit position by a predetermined amount after being moved to the lower limit position as the initial position, but the present invention is not limited to this. In the depth synthesis process, after the lens unit 131 is moved to the upper limit position as the initial position, it may be moved downward by a predetermined amount to the lower limit position.

  In the above description, a plurality of original image data respectively corresponding to the positions H1 to Hj are combined as the depth combining process, but the present invention is not limited to this. A plurality of original image data respectively corresponding to the positions H1 to Hj may be used independently without being synthesized.

  For example, based on the determination result by the focus determination unit 620 in FIG. It may be extracted from the image data. In this case, display image data indicating an image with a high degree of focus as a whole is rapidly generated based on a plurality of original image data extracted corresponding to each of the ring illumination and the first to fourth directional illuminations. Can be generated.

(4) DR adjustment processing (a) Processing content The user gives an instruction for DR adjustment processing to the arithmetic processing unit 600 by operating the DR adjustment button b2 in FIG. 9 using the operation unit 440 in FIG. Can do.

  In the DR adjustment process, an observation object when each of the ring illumination and the first to fourth directional illuminations is irradiated in a state where the light reception time of the imaging unit 132 is changed to a plurality of predetermined values. S is imaged. Accordingly, a plurality of original image data corresponding to each of the ring illumination and the first to fourth directional illuminations is generated by the data generation unit 610 of FIG. The overall pixel value of each original image data generated when the light receiving time of the imaging unit 132 is short is relatively small, and the overall pixel value of each original image data generated when the light receiving time of the imaging unit 132 is long. Is relatively large.

  A plurality of original image data corresponding to ring illumination is synthesized by the data generation unit 610. Thereby, the dynamic range of the original image data corresponding to ring illumination can be adjusted. Similarly, a plurality of original image data corresponding to each directional illumination is synthesized by the data generation unit 610. Thereby, the dynamic range of the original image data corresponding to each directional illumination can be adjusted.

  Here, the adjustment of the dynamic range includes expansion and reduction of the dynamic range. By combining a plurality of original image data so as to expand the dynamic range, it is possible to reduce blackout and halation from the image. On the other hand, by synthesizing a plurality of original image data so as to reduce the dynamic range, the difference in image density increases. Thereby, the unevenness | corrugation of the observation target object S which has a smooth surface can be observed precisely.

  In the above description, the original image data is synthesized first so that the dynamic range is adjusted for each of the ring illumination and the first to fourth directional illuminations, and for display based on a plurality of synthesized original image data Although image data is generated, the present invention is not limited to this. Display image data is first generated based on a plurality of original image data for each light reception time of the imaging unit 132, and the display image data generated for each light reception time of the imaging unit 132 is adjusted so that the dynamic range is adjusted. It may be synthesized.

(B) Example of DR Adjustment Process The system program stored in the storage unit 420 in FIG. 2 includes a DR adjustment program. The control unit 410 in FIG. 2 performs a DR adjustment process by executing a DR adjustment program.

  28 and 29 are flowcharts illustrating an example of the DR adjustment processing. The control unit 410 sets the light reception time of the imaging unit 132 to a predetermined initial value (step S401). In this state, the control unit 410 irradiates the observation object S with the ring illumination by the light projecting unit 140 and images the observation object S by the imaging unit 132 (step S402). Subsequently, the control unit 410 determines whether or not the observation object S has been imaged during all desired light receiving times of the imaging unit 132 in a state where the ring illumination is irradiated (step S403).

  In step S403, when the observation object S is not imaged in all desired light reception times of the imaging unit 132, the control unit 410 sets the light reception time of the imaging unit 132 to a predetermined value (step). S404). Thereafter, the control unit 410 returns to the process of step S402. The control unit 410 repeats the processes of steps S402 to S404 until the observation object S is imaged during all desired light reception times of the imaging unit 132.

  In step S403, when the observation object S is imaged during all desired light reception times of the imaging unit 132, the control unit 410 synthesizes a plurality of original image data corresponding to the generated ring illumination (step S405). . Thereby, the dynamic range of the original image data corresponding to ring illumination is adjusted.

  Thereafter, control unit 410 sets i to 1 (step S406). Here, i indicates a number of a plurality of directional illuminations. Next, the control unit 410 sets the light reception time of the imaging unit 132 to a predetermined initial value (step S407). In this state, the control unit 410 irradiates the observation object S with the i-th directional illumination by the light projecting unit 140 and images the observation object S by the imaging unit 132 (step S408). Subsequently, the control unit 410 determines whether or not the observation object S has been imaged during all desired light reception times of the imaging unit 132 in a state where the i-th directional illumination is irradiated (step S409).

  In step S409, when the observation object S is not imaged at all desired light reception times of the imaging unit 132, the control unit 410 sets the light reception time of the imaging unit 132 to a predetermined next value (step S409). S410). Thereafter, the control unit 410 returns to the process of step S408. The control unit 410 repeats the processes of steps S408 to S410 until the observation object S is imaged at all desired light reception times of the imaging unit 132.

  In step S409, when the observation object S is imaged during all desired light reception times of the imaging unit 132, the control unit 410 generates a plurality of original image data corresponding to the generated i-th directional illumination. Are synthesized (step S411). Thereby, the dynamic range of the original image data corresponding to the i-th directional illumination is adjusted.

  Next, the control unit 410 determines whether i is 4 (step S412). In step S412, if i is not 4, the control unit 410 updates i to i + 1 (step S413). Thereafter, the control unit 410 returns to the process of step S407. Control unit 410 repeats the processing of steps S407 to S413 until i becomes 4. Thereby, a plurality of original image data corresponding to each of the first to fourth directional illuminations is generated and combined so that the dynamic range is adjusted. In step S412, if i is 4, the control unit 410 ends the process.

  In the above description, some processes may be performed at other times. For example, the process in step S405 may be executed in parallel with the processes in steps S406 to S413. Further, the process of step S411 corresponding to the i-th directional illumination may be performed in parallel with steps S407 to S410 corresponding to the (i + 1) -th directional illumination. In these cases, the DR adjustment process can be speeded up.

  Or the process of step S401-S405 may be performed after the process of step S406-S413. Further, the process of step S411 corresponding to the i-th directional illumination may be executed after the processes of steps S407 to S410 corresponding to the (i + 1) -th directional illumination.

(C) Another Example of DR Adjustment Processing FIGS. 30 and 31 are flowcharts showing another example of the DR adjustment processing. The control unit 410 sets the light reception time of the imaging unit 132 to a predetermined initial value (step S421). In this state, the control unit 410 irradiates the observation object S with the ring illumination by the light projecting unit 140 and images the observation object S by the imaging unit 132 (step S422).

  Subsequently, the control unit 410 sets i to 1 (step S423). Here, i indicates a number of a plurality of directional illuminations. Thereafter, the control unit 410 irradiates the observation object S with the i-th directional illumination by the light projecting unit 140 and images the observation object S by the imaging unit 132 (step S424).

  Next, the control unit 410 determines whether i is 4 (step S425). If i is not 4 in step S425, control unit 410 updates i to i + 1 (step S426). Thereafter, the control unit 410 returns to the process of step S424. Control unit 410 repeats the processing of steps S424 to S426 until i becomes 4. Thereby, a plurality of original image data corresponding to each of the first to fourth directional illuminations is generated. Subsequently, the control unit 410 determines whether or not the observation object S has been imaged during all desired light reception times of the imaging unit 132 (step S427).

  In step S427, when the observation object S is not imaged in all desired light reception times of the imaging unit 132, the control unit 410 sets the light reception time of the imaging unit 132 to a predetermined value (step). S428). Thereafter, the control unit 410 returns to the process of step S422. The control unit 410 repeats the processes of steps S422 to S428 until the observation object S is imaged at all desired light reception times of the imaging unit 132.

  In step S427, when the observation object S is imaged during all desired light reception times of the imaging unit 132, the control unit 410 adjusts the dynamic range of the plurality of original image data corresponding to the generated ring illumination. (Step S429). Thereby, the dynamic range of the original image data corresponding to ring illumination is adjusted.

  Thereafter, control unit 410 sets i to 1 again (step S430). Next, the control unit 410 combines a plurality of original image data corresponding to the generated i-th directional illumination (step S431). Thereby, the dynamic range of the original image data corresponding to the i-th directional illumination is adjusted. Subsequently, the control unit 410 determines whether i is 4 (step S432).

  In step S432, when i is not 4, the control unit 410 updates i to i + 1 (step S433). Thereafter, the control unit 410 returns to the process of step S431. Control unit 410 repeats the processes of steps S431 to S433 until i becomes 4. Thereby, a plurality of original image data corresponding to each of the first to fourth directional illuminations are combined so that the dynamic range is adjusted. In step S432, when i is 4, the control unit 410 ends the process.

  In the above description, some processes may be performed at other times. For example, part of the processing of steps S429 to S433 may be performed in parallel with the processing of steps S421 to S428. In this case, the DR adjustment process can be speeded up. Further, the process of step S422 may be executed after the processes of steps S423 to S426. Furthermore, the process of step S429 may be executed after the processes of steps S430 to S433.

(5) Preview Processing (a) Specific Contents of Preview Processing The user gives an instruction for preview processing to the control unit 410 by operating the preview button b5 in FIG. 9 using the operation unit 440 in FIG. be able to.

  FIG. 32 is a diagram illustrating an example of a display state of the observation screen 430A during the preview process. When a preview instruction is given by the user, the control unit 410 displays a plurality of thumbnail images SU based on the plurality of thumbnail image data stored in the storage unit 420 in a selectable manner in the main display area 432.

  In addition, the control unit 410 displays an index indicating the emission direction of the light corresponding to the thumbnail image SU at a position near each thumbnail image SU in the main display area 432. As this index, in this example, a character string indicating the name of the illumination corresponding to the light emission direction is displayed, and a character string indicating the azimuth angle of the light emission direction irradiated on the observation object S is written in parentheses. Is displayed.

  In this case, the user can easily compare the plurality of thumbnail images SU while grasping the correspondence between the plurality of thumbnail images SU and the ring illumination and the first to fourth directional illuminations. Therefore, the user can easily identify an image suitable for observation from the plurality of thumbnail images SU.

  The user can select one of a plurality of thumbnail images SU displayed in the main display area 432 using the operation unit 440 of FIG. In this case, in response to the selection of the thumbnail image SU, the control unit 410 displays the image SI of the observation object S corresponding to the selected thumbnail image SU over the entire main display area 432. In this way, the display state of the observation screen 430A returns to the basic display state similar to the example of FIG. 9, and the preview process ends.

  In the present embodiment, the area of the image SI (see FIG. 9 etc.) of the observation object S displayed in the main display area 432 after the preview process is larger than the area of each thumbnail image SU before selection in the preview process. Further, the resolution of the image SI (see FIG. 9 and the like) of the observation object S displayed in the main display area 432 after the preview process is larger than the resolution of each thumbnail image SU before selection in the preview process.

  Accordingly, the user selects a thumbnail image SU suitable for observation from the plurality of thumbnail images SU, and then performs more detailed observation based on the image SI of the observation object S corresponding to the selected thumbnail image SU. Can do.

  In the preview processing, together with five thumbnail images SU corresponding to the ring illumination and the first to fourth directional illuminations, light in an emission direction different from the ring emission direction and the first to fourth emission directions is observed. A thumbnail image of the observation object S to be obtained when it is assumed that the object S is irradiated may be displayed in a selectable manner. In the following description, this thumbnail image is called a virtual thumbnail image.

  In this case, the control unit 410 generates a plurality of thumbnail image data corresponding to each of the plurality of original image data in the above-described plurality of illumination imaging processes, and then stores the plurality of thumbnail image data corresponding to the plurality of original image data in advance. Virtual thumbnail image data representing each virtual thumbnail image SV is generated based on the determined virtual emission direction of light.

  Specifically, the control unit 410 generates a plurality of thumbnail image data based on a predetermined virtual emission direction of light, as in the case of generating a display image data by combining a plurality of original image data. A composite ratio is determined for at least a part of the plurality of thumbnail image data, and a plurality of thumbnail image data are combined at the determined composite ratio. Thereby, virtual thumbnail image data is generated.

  FIG. 33 is a diagram illustrating an example of a display state of the observation screen 430A during the preview process. In the example of FIG. 33, a plurality of virtual thumbnail images SV are displayed together with five thumbnail images SU corresponding to the ring illumination and the first to fourth directional illuminations, respectively.

  When one virtual thumbnail image SV is selected in the display state of FIG. 33, display image data corresponding to the emission direction is based on the virtual emission direction of light corresponding to the selected virtual thumbnail image SV. Generated based on a plurality of original image data. An image SI of the observation object S based on the generated display image data is displayed in the main display area 432. Therefore, the user can easily identify images more suitable for observation by visually recognizing the plurality of thumbnail images SU and the plurality of virtual thumbnail images SV.

  In the example of FIGS. 32 and 33, all of the plurality of thumbnail images SU respectively corresponding to the plurality of original image data are displayed in a list in the preview process, but the present invention is not limited to this. In the preview process, a plurality of thumbnail images SU corresponding to at least a plurality of original image data may be displayed on the display unit 430. For example, the plurality of thumbnail images SU may be displayed so as to be sequentially switched at a constant cycle. . In this case, the size of the area of the thumbnail image SU before selection in the preview process may be the same as the size of the area of the image SI of the observation object S displayed in the main display area 432 after the preview process.

  In the above example, a plurality of thumbnail images SU are used as a plurality of images displayed in the main display area 432 during the preview process, but the present invention is not limited to this. A plurality of images SI based on a plurality of original image data may be displayed in the main display area 432 during the preview process.

(B) Example of Preview Process The system program stored in the storage unit 420 in FIG. 2 includes a preview program. The control unit 410 in FIG. 2 performs a preview process by executing a preview program.

  FIG. 34 is a flowchart illustrating an example of the preview process. The preview process is started in response to a preview process instruction from the user. When the preview process is started, the control unit 410 displays a plurality of thumbnail images SU based on the plurality of thumbnail image data in a list on the main display area 432 of the display unit 430 (step S701). In addition, the control unit 410 displays an index indicating the light emission direction corresponding to the vicinity of each thumbnail image SU displayed on the display unit 430 (step S702).

  Subsequently, the control unit 410 determines whether one thumbnail image SU is selected from the plurality of thumbnail images SU (step S703). When the thumbnail image SU is selected, the control unit 410 displays the image SI of the observation object S on the display unit 430 in a manner different from the thumbnail image SU based on the original image data corresponding to the selected thumbnail image SU. It is displayed on the display area 432 (step S704).

  That is, the control unit 410 causes the display unit 430 to display the image SI of the observation object S based on the original image data with a larger area and a larger resolution than the selected thumbnail image SU. Thereafter, the control unit 410 ends the preview process.

  In the present embodiment, the user can instruct the end of the preview process by operating the operation unit 440 of FIG. If the thumbnail image SU is not selected in step S703, the control unit 410 determines whether or not the end of the preview process has been instructed (step S705).

  When the end of the preview process is not instructed, the control unit 410 returns to the process of step S703. On the other hand, when the end of the preview process is instructed, the control unit 410 returns the display state of the display unit 430 to the state immediately before the start of the preview process (step S706), and ends the preview process.

  If virtual thumbnail image data corresponding to the virtual thumbnail image SV is stored in the storage unit 420 in advance, the control unit 410 displays the virtual thumbnail image SV together with the plurality of thumbnail images SU in step S701. May be displayed. In this case, when the virtual thumbnail image SV is selected in step S703, the control unit 410 may cause the display unit 430 to display the image SI of the observation target S corresponding to the selected virtual thumbnail image SV.

(6) Image Adjustment Processing The user can give an instruction for image adjustment processing to the control unit 410 by operating the adjustment button b6 in FIG. 9 using the operation unit 440 in FIG.

  FIG. 35 is a diagram illustrating an example of a display state of the observation screen 430A during the image adjustment process. When the user instructs an image adjustment process, the control unit 410 displays two images SI of the observation object S that have been displayed in the main display area 432 in the main display area 432 side by side. Here, one of the two images SI is called an original image SI1, and the other is called an adjusted image SI2. Further, the control unit 410 displays a determination button b8 in the main display area 432.

  The user can instruct adjustments such as brightness, contrast, and contour enhancement for the adjusted image SI2 by operating the operation unit 440 of FIG. Accordingly, the control unit 410 performs processing according to the adjustment instruction from the user for the adjustment image SI2.

  Thereafter, the user operates the determination button b8 using the operation unit 440 in a state where desired processing is performed on the adjustment image SI2. Thereby, the display of the original image SI1 on the observation screen 430A is finished, and the adjustment image SI2 is displayed over almost the entire main display area 432.

  In this case, the user can easily obtain an image more suitable for observation by performing an adjustment operation while comparing the original image SI1 that has not been adjusted and the adjusted image SI2 that has been adjusted.

  Here, the above-described image adjustment process includes a process of changing the direction of light applied to the observation object S. For example, by operating the operation unit 440 in FIG. 2, the user can designate the light emission direction to the observation object S as a direction different from the light emission direction corresponding to the original image SI1. . In this case, the control unit 410 generates an image corresponding to the newly specified light emission direction by imaging the observation target S while irradiating the observation target S with light from the specified direction.

  Accordingly, an image of the observation object S corresponding to an arbitrary emission direction is displayed on the display unit 430 as the original image SI1, and an image of the observation object S acquired after designating a new emission direction as the adjustment image SI2 May be displayed on the display unit 430. As a result, the user can observe the image change before and after the change of the light emission direction while comparing them on one screen.

(7) Effect In the magnification observation apparatus 1 according to the present embodiment, a plurality of original image data corresponding to the ring illumination and the first to fourth directional illuminations are generated by the plurality of illumination imaging processes. Also, a plurality of thumbnail image data respectively corresponding to the plurality of original image data is generated. In the preview process, a plurality of thumbnail images SU based on the generated plurality of thumbnail image data are displayed on the display unit 430.

  The plurality of thumbnail image data correspond to ring illumination and first to fourth directional illumination, respectively. The thumbnail image SU of the observation object S changes according to the shape of the observation object S and the emission direction of the light applied to the observation object. Therefore, the user can easily identify an appropriate thumbnail image SU corresponding to the shape and material of the observation object S from the plurality of thumbnail images SU of the observation object S displayed on the display unit 430.

  Further, according to the preview process, the user operates the operation unit 440 to select a desired thumbnail image SU from the plurality of thumbnail images SU of the observation object S displayed on the display unit 430. Can do. Thereby, the image SI of the original image data corresponding to the selected thumbnail image SU is displayed on the display unit 430 with a larger area and larger resolution than the thumbnail image SU. Therefore, the user can observe the observation object S in more detail.

[2] Second Embodiment A magnification observation apparatus according to a second embodiment of the present invention will be described while referring to differences from the magnification observation apparatus 1 according to the first embodiment. In the magnifying observation apparatus 1 according to the present embodiment, in order to instruct execution of a plurality of types of processing including the above-described multiple illumination imaging processing on the initial screen of the display unit 430 before the multiple illumination imaging processing is executed. Multiple buttons are displayed. The user can cause the control unit 410 to execute processing corresponding to the operated button by operating any of the plurality of buttons displayed on the initial screen.

  FIG. 36 is a diagram illustrating an example of an initial screen of the magnification observation apparatus according to the second embodiment. As shown in FIG. 36, a function display area 431, a main display area 432, and a sub display area 433 are set in the initial screen 430B, as in the observation screen 430A in FIG.

  In this example, it is assumed that the observation target object S is placed on the stage 121 and the observation target object S is irradiated with ring illumination. In this state, the image SI of the observation object S acquired by the imaging unit 132 is displayed in the function display area 431 of the initial screen 430B.

  In the function display area 431 of FIG. 36, a plurality of illumination imaging buttons b90, a plurality of buttons b91, and an optimum image selection button b92 are displayed. The multiple illumination imaging button b90 corresponds to the multiple illumination imaging process described above. The user can instruct the control unit 410 to execute the multiple illumination imaging process and the display image generation process by operating the multiple illumination imaging button b90 using the operation unit 440 of FIG. In this case, the control unit 410 executes the multiple illumination imaging process of FIG. 17 and the display image generation process of FIGS. 18 and 19 in response to an instruction from the user.

  The plurality of buttons b91 correspond to a plurality of different types of processing. These multiple types of processing include, for example, depth synthesis processing, DR adjustment processing, halation component removal processing, smoothing processing, contour enhancement processing, and tone correction processing. The user can instruct the control unit 410 to execute processing corresponding to the operated button by operating one of the plurality of buttons b91 using the operation unit 440 of FIG. In this case, the control unit 410 executes the instructed process.

  The optimum image selection button b92 corresponds to a plurality of predetermined processes including a plurality of illumination imaging processes. The optimum image selection button b92 in this example corresponds to all the processes corresponding to the plurality of illumination imaging buttons b90 and the plurality of buttons b91, respectively. The user can instruct the control unit 410 to execute a plurality of types of processing by operating the optimum image selection button b92 using the operation unit 440 of FIG.

  When the optimum image selection button b92 is operated by the user, the control unit 410 executes a plurality of types of processing corresponding to the optimum image selection button b92. Thereafter, the control unit 410 generates one thumbnail image data corresponding to the process based on one or a plurality of image data generated by executing each process. Further, the control unit 410 causes the display unit 430 to display a process selection screen based on the generated thumbnail image data corresponding to the plurality of types of processes.

  FIG. 37 is a diagram illustrating a display example of the process selection screen. As illustrated in FIG. 37, the process selection screen 430C includes a plurality of image buttons b20 and b21 that respectively correspond to a plurality of types of processes executed by the control unit 410. Each image button b20, b21 includes a thumbnail image SR based on the thumbnail image data generated by the processing corresponding to the button. Further, each image button b20, b21 is assigned a character string indicating processing corresponding to the button.

  In this state, the user can selectively operate the image buttons b20 and b21 including the desired thumbnail image SR while visually recognizing the plurality of thumbnail images SR respectively corresponding to the plurality of types of processing. Accordingly, the control unit 410 displays the image SI of the observation object S acquired by the processing corresponding to the operated image buttons b20 and b21 on, for example, the observation screen 430A in FIG. In this case, the user can easily identify an image suitable for observation from the thumbnail images SR corresponding to a plurality of types of processing.

  Here, in the example of FIG. 37, the image button b20 corresponds to the multiple illumination imaging process. When the image button b20 of FIG. 37 is selected by the user, the control unit 410 may execute the preview process of FIG. In this case, for example, as illustrated in FIG. 32, the control unit 410 may display a list of a plurality of thumbnail images SU corresponding to the ring illumination and the first to fourth directional illuminations on the display unit 430, respectively. Accordingly, the user can easily compare the plurality of thumbnail images SU while grasping the correspondence between the plurality of thumbnail images SU and the ring illumination and the first to fourth directional illuminations.

[3] Third Embodiment A magnification observation apparatus according to a third embodiment of the present invention will be described while referring to differences from the magnification observation apparatus 1 according to the first embodiment. FIG. 38 is a schematic diagram showing the configuration of the magnification observation apparatus according to the third embodiment of the present invention. As shown in FIG. 38, in the magnifying observation device 1 according to the present embodiment, the measurement head 100 further includes a light projecting unit 160. The light projecting unit 160 includes a half mirror 161.

  The lens unit 131 is configured to hold the light projecting unit 160 inside. The light projecting unit 160 is disposed in the lens unit 131 in a state where the light reflecting surface of the half mirror 161 is inclined by about 45 ° with respect to the optical axis A1 of the objective lens 131a so that the reflecting surface faces obliquely downward. The light projecting unit 160 is optically connected to the light generation unit 300 of the processing apparatus 200 through a part of the optical fiber (not shown) of the fiber unit 201.

  The light blocking unit 320 of the light generating unit 300 has a plurality of opening patterns respectively corresponding to the regions 140A to 140D of the light projecting unit 140 of FIG. 3 and has an opening pattern corresponding to the light projecting unit 160. The light projecting control unit 510 in FIG. 2 can enter light into the light projecting unit 140 as in the first embodiment by switching the opening pattern of the light shielding unit 320 that allows light to pass through. Light can be incident on 160. The behavior of the light incident on the light projecting unit 140 is the same as the behavior of the light incident on the light projecting unit 140 in the first embodiment.

  The light incident on the light projecting unit 160 is reflected downward by the half mirror 161, is emitted downward along the optical axis A <b> 1 of the objective lens 131 a, and is applied to the observation object S. The light emitted from the light projecting unit 160 is called coaxial epi-illumination. The light applied to the observation object S is reflected upward, passes through the half mirror 161 and the lens unit 131 of the light projecting unit 160, and is guided to the imaging unit 132.

  According to said structure, the light projection part 160 can irradiate the observation object S from the position nearer to the optical axis A1 of the objective lens 131a than the light projection part 140. FIG. Therefore, the coaxial epi-illumination is bright-field illumination emitted in a direction parallel to the optical axis A1 of the objective lens 131a, and the ring illumination is dark-field illumination emitted in a direction inclined with respect to the optical axis A1 of the objective lens 131a. Become. By irradiating the observation object S with the coaxial epi-illumination, the surface unevenness and the difference in the material of the observation object S can be imaged more clearly. Note that it is also possible to irradiate the observation object S with light from the light projecting units 140 and 160 at the same time.

  The imaging control unit 520 in FIG. 2 controls the light reception time, gain, timing, and the like of the imaging unit 132 during irradiation with coaxial epi-illumination. In the present embodiment, the coaxial epi-illumination is performed after the ring illumination and the first to fourth directional illuminations. The imaging control unit 520 adjusts the light reception time during the irradiation of the coaxial epi-illumination by performing automatic exposure based on the average brightness value of the original image data corresponding to the ring illumination generated previously. The light reception time at the time of irradiation of the coaxial epi-illumination may be adjusted to a desired value by the user.

  The imaging unit 132 further generates original image data indicating the observation object S when the coaxial incident illumination is irradiated onto the observation object S. The generated original image data corresponding to the coaxial incident illumination is stored in the storage unit 420. In addition, the storage unit 420 stores imaging information that further indicates imaging conditions such as the presence or absence of execution of the coaxial epi-illumination and the light reception time during the coaxial epi-illumination.

  In addition to the original image data corresponding to the ring illumination and the directional illumination stored in the storage unit 420, the data generation unit 610 in FIG. 6 further displays image data based on the original image data corresponding to the coaxial incident illumination. Is generated. Specifically, the data generation unit 610 synthesizes some or all of the plurality of original image data respectively corresponding to ring illumination, directional illumination, and coaxial epi-illumination at a rate determined by the illumination conditions specified by the user. To do. The generated display image data is stored in the storage unit 420.

  In the multiple illumination imaging process according to the present embodiment, the observation object S is imaged using the coaxial epi-illumination after the observation object S is imaged using the ring illumination and the first to fourth directional illuminations. Thereby, a plurality (six in this example) of original image data respectively corresponding to the ring illumination, the first to fourth directional illuminations, and the coaxial incident illumination are generated.

  When the multiple illumination imaging process is completed, the observation screen 430A is displayed on the display unit 430. FIG. 39 is a diagram illustrating a display example of the observation screen 430A after the multiple illumination imaging process according to the third embodiment. As shown in FIG. 39, an epi-illumination button b11 is displayed in the function display area 431 in addition to the plurality of buttons b1, b2, b5 to b7.

  The user operates the epi-illumination button b11 using the operation unit 440 of FIG. Accordingly, the user can instruct that display image data should be generated using the original image data corresponding to the coaxial epi-illumination.

  When it is instructed to use original image data corresponding to the coaxial epi-illumination, the sub-display area 433 combines the original image data corresponding to the coaxial epi-illumination with other original image data (hereinafter referred to as an epi-image ratio). .) Is displayed as a bar 433c and a slider 433d.

  The user can designate the incident image ratio by operating the slider 433d. In the example of FIG. 39, the incident image ratio is specified to be higher as the slider 433d approaches the left end of the bar 433c, and the incident image ratio is specified to be lower as the slider 433d approaches the right end of the bar 433c.

  When the incident image ratio is designated, the control unit 410 performs a plurality of original images based on the designated incident image ratio in addition to the designated emission direction in the process of step S209 of FIG. 19 in the display image generation process. Calculate the composition ratio of the data.

  For example, the control unit 410 first calculates the composition ratio of the original image data corresponding to each of the ring illumination and the first to fourth directional illuminations based on the designated emission direction. Thereafter, when the designated incident image ratio is t (t is a number from 0 to 100)%, the control unit 410 sums up a plurality of composite ratios of the ring illumination and the first to fourth directional illuminations. Of the original image data corresponding to each of the ring illumination and the first to fourth directional illuminations is corrected so that becomes (100−t)%.

  Display image data is generated by combining a plurality of original image data based on the plurality of combining ratios calculated as described above, and the observation object S includes a component of the original image data corresponding to the coaxial incident illumination. The image SI is displayed in the main display area 432.

  According to the image SI of the original image data corresponding to the coaxial epi-illumination, the surface of the observation object S is compared with the image SI of the original image data corresponding to each of the ring illumination and the first to fourth directional illuminations. It is possible to observe the unevenness and the difference in material more accurately.

  Therefore, the user can easily acquire the image SI of the observation object S according to the purpose of observation by operating the epi-illumination button b11 and the slider 433d in FIG.

  A thumbnail image SU corresponding to the coaxial epi-illumination may be displayed in the main display area 432 in the preview process. FIG. 40 is a diagram illustrating an example of a display state of the observation screen 430A during the preview process according to the third embodiment. As shown in FIG. 40, in this example, a plurality of thumbnail images SU respectively corresponding to ring illumination, coaxial epi-illumination, and first to fourth directional illuminations are displayed together with a character string indicating the name of the corresponding illumination. It is displayed in area 432. Accordingly, the user can easily identify an image suitable for observation from a plurality of thumbnail images SU from a number of images.

[4] Fourth Embodiment A magnification observation apparatus according to the fourth embodiment of the present invention will be described while referring to differences from the magnification observation apparatus 1 according to the first embodiment. FIG. 41 is a schematic diagram showing a configuration of a magnification observation apparatus according to the fourth embodiment of the present invention. As shown in FIG. 41, in the magnifying observation apparatus 1 according to the present embodiment, the measurement head 100 further includes a light projecting unit 170. The light projecting unit 170 includes a mirror 171. The magnification observation apparatus 1 further includes a fiber unit 204. The fiber unit 204 includes a plurality of optical fibers (not shown). The light projecting unit 170 may be built in the installation unit 111 of the stand unit 110.

  The installation unit 111 of the stand unit 110 is configured to hold the light projecting unit 170 therein. The light projecting unit 170 is disposed in the installation unit 111 in a state of being inclined by about 45 ° with respect to the optical axis A1 of the objective lens 131a so that the reflection surface of the mirror 171 faces obliquely upward. Accordingly, the light projecting unit 170 faces the lens barrel unit 130 with the observation object S and the stage 121 interposed therebetween. The light projecting unit 170 is optically connected to the light generating unit 300 of the processing apparatus 200 through a part of the optical fiber (not shown) of the fiber unit 201.

  The light blocking unit 320 of the light generating unit 300 has a plurality of opening patterns respectively corresponding to the regions 140A to 140D of the light projecting unit 140 of FIG. 3 and has an opening pattern corresponding to the light projecting unit 170. The light projecting control unit 510 in FIG. 2 can enter light into the light projecting unit 140 as in the first embodiment by switching the opening pattern of the light shielding unit 320 that allows light to pass through. Light can be incident on 170. The behavior of the light incident on the light projecting unit 140 is the same as the behavior of the light incident on the light projecting unit 140 in the first embodiment.

  The light incident on the light projecting unit 170 is reflected upward by the mirror 171 and then emitted upward along the optical axis A1 of the objective lens 131a, and is irradiated onto the observation object S on the stage 121. The light emitted from the light projecting unit 170 is referred to as transmitted illumination. The light applied to the observation object S is transmitted upward, passes through the lens unit 131, and is guided to the imaging unit 132. By irradiating the observation object S with the transmitted illumination, the internal structure of the observation object S can be imaged.

  The imaging unit 132 further generates original image data indicating the observation object S when the transmission object is irradiated with the transmitted illumination. The original image data corresponding to the generated transmitted illumination is stored in the storage unit 420. In addition, imaging information that further indicates imaging conditions such as the presence or absence of execution of transmission illumination and the light reception time at the time of illumination of transmission illumination is stored in the storage unit 420.

  In addition to the original image data corresponding to the ring illumination and the directional illumination stored in the storage unit 420, the data generation unit 610 in FIG. 6 generates display image data based on the original image data corresponding to the transmitted illumination. Generate. Specifically, the data generation unit 610 synthesizes some or all of the plurality of original image data respectively corresponding to the ring illumination, the directional illumination, and the transmitted illumination at a rate determined by the illumination conditions specified by the user. . The generated display image data is stored in the storage unit 420.

  The measurement head 100 of FIG. 41 does not include the light projecting unit 160 that emits the coaxial incident illumination, but the present invention is not limited to this. The measurement head 100 in FIG. 41 may include a light projecting unit 160 similar to the light projecting unit 160 in FIG. In this case, display image data is generated based on original image data corresponding to ring illumination, directional illumination, coaxial incident illumination, and transmitted illumination.

  In the multiple illumination imaging process according to the present embodiment, the observation object S is imaged using the transmitted illumination after the observation object S is imaged using the ring illumination and the first to fourth directional illuminations. Thereby, a plurality (six in this example) of original image data corresponding to the ring illumination, the first to fourth directional illuminations, and the transmitted illumination are generated.

  When the multiple illumination imaging process is completed, the observation screen 430A is displayed on the display unit 430. FIG. 42 is a diagram illustrating a display example of the observation screen 430A after the multiple illumination imaging process according to the fourth embodiment. As shown in FIG. 42, a transparent button b12 is displayed in the function display area 431 in addition to the plurality of buttons b1, b2, b5 to b7.

  The user operates the transparent button b12 using the operation unit 440 of FIG. Accordingly, the user can instruct that display image data should be generated using original image data corresponding to transmitted illumination.

  When it is instructed to use the original image data corresponding to the transmitted illumination, the sub-display area 433 combines the original image data corresponding to the transmitted illumination with the other original image data (hereinafter referred to as the transmitted image ratio). A bar 433e and a slider 433f are displayed.

  The user can specify the transmission image ratio by operating the slider 433f. In the example of FIG. 42, the transparent image ratio is designated as the slider 433f approaches the left end of the bar 433e, and the transmission image ratio is designated as the slider 433f approaches the right end of the bar 433e.

  When the transmission image ratio is designated, the control unit 410 performs a plurality of original images based on the designated transmission image ratio in addition to the designated emission direction in the process of step S209 of FIG. 19 in the display image generation process. Calculate the composition ratio of the data.

  For example, the control unit 410 first calculates the composition ratio of the original image data corresponding to each of the ring illumination and the first to fourth directional illuminations based on the designated emission direction. Thereafter, when the specified transmission image ratio is u (where u is a number from 0 to 100)%, the control unit 410 sums a plurality of combined ratios of the ring illumination and the first to fourth directional illuminations. Of the original image data corresponding to each of the ring illumination and the first to fourth directional illuminations is corrected so that becomes (100-u)%.

  Display image data is generated by combining a plurality of original image data based on the plurality of combining ratios calculated as described above, and the observation object S including the components of the original image data corresponding to the transmitted illumination is generated. The image SI is displayed in the main display area 432. When the observation object S is formed of a material that transmits light, the internal structure of the observation object S appears clearly in the image SI of the original image data corresponding to the transmitted illumination.

  Therefore, the user can easily acquire the image SI of the observation object S according to the purpose of observation by operating the transparent button b12 and the slider 433f of FIG.

  In the preview process, the thumbnail image SU corresponding to the transmitted illumination may be displayed in the main display area 432. FIG. 43 is a diagram illustrating an example of a display state of the observation screen 430A during the preview process according to the fourth embodiment. As shown in FIG. 43, in this example, a plurality of thumbnail images SU respectively corresponding to ring illumination, transmitted illumination, and first to fourth directional illuminations are displayed together with a character string indicating the name of the corresponding illumination. 432 is displayed. Accordingly, the user can easily identify an image suitable for observation from a plurality of thumbnail images SU from a number of images.

  As described above, when the measurement head 100 of FIG. 41 includes the light projecting unit 160 of FIG. 38, in the multiple illumination imaging process, a plurality of rings corresponding to ring illumination, directional illumination, coaxial epi-illumination, and transmitted illumination respectively. Original image data may be generated. In this case, on the observation screen 430A, the epi-illumination button b11, the bar 433c and the slider 433d in FIG. 39 and the transmission button b12, the bar 433e and the slider 433f in FIG. 42 may be displayed at the same time. Thereby, the degree of freedom of adjustment for the image SI of the observation object S displayed in the main display area 432 is improved.

[5] Other Embodiments (1) In the above embodiment, after a plurality of original image data respectively corresponding to a plurality of illuminations are generated, a plurality of original images are generated according to the illumination conditions designated by the user. Display image data is generated based on the image data, but the present invention is not limited to this. The lighting conditions may be specified first by the user. In this case, the original image data necessary for generating the display image data to be generated based on the designated illumination condition is determined.

  Therefore, in the present embodiment, only the illumination corresponding to the necessary original image data is irradiated on the observation object. Thereby, only the necessary original image data is generated. According to this configuration, no other illumination is irradiated on the observation object S, and unnecessary original image data is not generated. Thereby, display image data can be generated at high speed.

  (2) In the above embodiment, it is preferable that the regions 140A to 140D of the light projecting unit 140 are arranged rotationally symmetrically about the optical axis A1 of the objective lens 131a, but the present invention is not limited to this. The regions 140 </ b> A to 140 </ b> D of the light projecting unit 140 may not be arranged rotationally symmetrically about the optical axis A <b> 1 of the objective lens 131 a.

  (3) In the above embodiment, when display image data is generated by combining a plurality of original image data, one of the plurality of original image data is the original image data corresponding to the ring illumination. However, the present invention is not limited to this. The original image data corresponding to the ring illumination is not used for the synthesis, and the display image data is obtained by synthesizing some or all of the plurality of original image data respectively corresponding to the directional illumination, the coaxial incident illumination, and the transmitted illumination. May be generated.

  (4) In the above embodiment, display image data is generated by combining a plurality of original image data, but the present invention is not limited to this. Display image data may be generated by selecting one of the plurality of generated original image data. In this configuration, it is preferable that a larger number of original image data is generated. In this case, more accurate display image data can be generated. Accordingly, in order to be able to generate a larger number of original image data, a larger number of light emission regions may be provided, or a light emission member may be provided so that light can be emitted from a larger number of positions. Alternatively, a single light emitting member may be provided to be movable to a plurality of emitting positions.

  (5) In the above embodiment, the light projecting unit 140 has a cylindrical shape, but the present invention is not limited to this. The light projecting unit 140 may have a shape other than the cylindrical shape. FIG. 44 is a schematic diagram showing a modification of the light projecting unit 140. In the example of FIG. 44, the light projecting unit 140 has, for example, a hemispherical shape, and a plurality of light sources 142a are provided so that light in a plurality of emission directions can be irradiated onto an observation target from an arbitrary position on the inner surface of the light projecting unit 140. It is done. In this case, it becomes easy to generate display image data from a single original image data without combining a plurality of original image data. In this configuration, it is more preferable that the amount of light in each emission direction can be individually adjusted.

  (6) In the above-described embodiment, in the display image generation process, when the virtual emission direction of light is newly designated by the user, the image SI of the observation object S displayed on the display unit 430 is displayed. The image SI corresponding to the light in the designated emission direction is switched, but the present invention is not limited to this.

  When a virtual emission direction of light is newly designated by the user, the image SI of the observation object S based on the display image data before update and the observation object S based on the display image data after update The image SI may be displayed on the display unit 430 at the same time. In this case, the user can compare the image SI of the observation object S before designating the emission direction with the image SI of the observation object S after designation. Therefore, an appropriate image SI can be easily identified by observing the observation object S while designating a virtual light emission direction. Examples of simultaneously displaying the image SI before and after the update include displaying the image SI before and after the update side by side or displaying the image SI before and after the update in a superimposed manner.

  (7) In the above embodiment, the control unit 410 of the magnifying observation apparatus 1 executes a multiple illumination imaging process, a display image generation process, a depth synthesis process, a DR adjustment process, a preview process, an image adjustment process, and the like. The present invention is not limited to this. The control unit 410 only needs to execute a plurality of illumination imaging processes and a preview process among the plurality of processes described above, and executes part or all of the display image generation process, the depth synthesis process, the DR adjustment process, and the image adjustment process. It does not have to be.

[6] Correspondence relationship between each constituent element of claim and each part of the embodiment Hereinafter, an example of correspondence between each constituent element of the claim and each part of the embodiment will be described. It is not limited.

  In the above embodiment, the observation object S is an example of the observation object, the stage 121 is an example of the stage, and the ring illumination and the first to fourth directional illuminations are examples of light in a plurality of emission directions. Yes, the light projecting units 140, 160, 170, the fiber units 201, 204, and the light generating unit 300 are examples of the light projecting device, the image capturing unit 132 is an example of the image capturing unit, and the display unit 430 is an example of the display unit. Yes, the magnification observation apparatus 1 is an example of a magnification observation apparatus.

  In addition, the data generation unit 610 is an example of a data generation unit, the display unit 430 and the operation unit 440 are examples of a selection unit, the thumbnail image SU is an example of an image displayed in the first mode, and a thumbnail image An image SI corresponding to SU and having an area and resolution larger than that of the thumbnail image is an example of an image displayed in the second mode.

  Further, the display unit 430 and the operation unit 440 are examples of an image processing instruction unit, the data generation unit 610 is an example of an image processing unit, the objective lens 131a is an example of an objective lens, and the region 140A of the light projecting unit 140 is displayed. ˜140D is an example of a plurality of light emitting areas, the light projecting unit 140 is an example of a first light projecting unit, and the light shielding unit 320 is an example of a switching unit.

  Further, the coaxial epi-illumination is an example of the first light, the light projecting unit 160 is an example of the second light projecting unit, the transmitted illumination is an example of the second light, and the light projecting unit 170 is the third light. It is an example of the light projection part.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used for various magnification observation apparatuses.

DESCRIPTION OF SYMBOLS 1 Magnification observation apparatus 2 External apparatus 100 Measuring head 101 Inclination mechanism 110 Stand part 111 Installation part 112,114 Holding part 113 Focus drive part 120 Stage apparatus 121 Stage 122 Stage drive part 130 Lens barrel part 130c Inclination center 131 Lens unit 131a Objective lens 132 Image pickup unit 133 Inclination sensor 140, 160, 170 Projection unit 140A to 140D Region 140o Light emission unit 141 Holding member 141a Through hole 141b Protrusion unit 142 Optical fiber 142a Light source 150 Control substrate 161 Half mirror 171 Mirror 200 Processing device 201, 204 Fiber unit 202, 203 Cable 210 Case 300 Light generation unit 310 Light source 320 Light blocking unit 400 Control device 410 Control unit 420 Storage unit 421 Header area 42 Data area 422A General-purpose data area 422B Metadata area 430 Display unit 430A Observation screen 430B Initial screen 430C Processing selection screen 431 Function display area 432 Main display areas 432a and 432b Position adjustment bar 433 Sub display area 433a Outgoing direction designation field 433b Outgoing direction display Field 433c, 433e Bar 433d, 433f Slider 440 Operation unit 500 Drive control unit 510 Light projection control unit 520 Imaging control unit 530 Focus control unit 540 Stage control unit 600 Arithmetic processing unit 610 Data generation unit 620 Focus determination unit 630 Calculation unit 640 Condition setting unit 641 Imaging condition setting unit 642 Illumination condition setting unit 650 Editing unit 660 Report creation unit A1, A2 Optical axis b1 Depth synthesis button b2 DR adjustment button b5 Preview button b6 Adjustment button 7 Save button b8 Enter button b11 Incident button b12 Transparent button b20, b21 Image button b90 Multiple illumination imaging button b91 button b92 Optimal image selection button d1-d3 Distance H1-Hj Position O Origin PA-PE, Q point S Observation object SF Depth composite image SH Shadow SI image SI1 Original image SI2 Adjusted image sp Target partial image ss0 Target object position image ss1, ss5, ss6 Light icon ss2 Reference point image ss3 Hemisphere image ss4 Ejection position image ss7 Switch icon SU, SR Thumbnail image SV Virtual Thumbnail image

Claims (8)

A stage on which an observation object is placed;
A light projecting device configured to selectively irradiate light in a plurality of different emission directions with respect to the observation object placed on the stage;
An imaging unit that receives light from the observation target and generates a plurality of image data indicating images of the observation target when the light in the plurality of emission directions is respectively irradiated on the observation target;
A magnification observation apparatus comprising: a display unit that displays a plurality of images based on the plurality of image data generated by the imaging unit. The magnification observation apparatus according to claim 1, wherein the display unit displays an index indicating an emission direction of light corresponding to each image at a position corresponding to the image. Obtained when it is assumed that light in a virtual emission direction different from the plurality of emission directions is irradiated on the observation object by combining at least a part of the plurality of image data generated by the imaging unit. A data generation unit for generating image data indicating an image of an observation object to be observed;
The magnification observation apparatus according to claim 1, wherein the display unit displays an image based on the image data generated by the data generation unit together with a plurality of images based on the plurality of image data generated by the imaging unit. . A selection unit that selects any of a plurality of images displayed by the display unit based on a user's operation;
The display unit displays the plurality of images before selection by the selection unit in a first mode, and when any of the plurality of images displayed in the first mode is selected by the selection unit , Displaying the selected image in a second aspect different from the first aspect,
The image displayed in the second mode has at least one of area and resolution larger than that of the image displayed in the first mode before selection by the selection unit. The magnification observation apparatus according to one item. An image processing instruction unit for instructing image processing for an image displayed in the second mode based on a user's operation;
An image processing unit that performs image processing instructed on the image displayed in the second mode in response to an instruction from the image processing instruction unit;
The magnification observation apparatus according to claim 4, wherein the display unit simultaneously displays an image before image processing by the image processing unit and an image after image processing by the image processing unit. An objective lens,
The imaging unit generates the plurality of image data by receiving light from the observation object through the objective lens,
The light projecting device is:
A first light projecting portion provided so as to surround the optical axis of the objective lens, and having a plurality of light emitting regions arranged on a rotation target around the optical axis of the objective lens;
The switching part as described in any one of Claims 1-5 including the switching part which switches the emission state of the light in these light emission area | regions so that the observation target object may be irradiated with the light of these emission directions. Observation device. The light projecting device further includes a second light projecting unit that irradiates the observation target with the first light from a position closer to the optical axis of the objective lens than the first light projecting unit,
The switching unit further switches the emission state of the first light in the second light projecting unit,
The imaging unit further generates image data indicating an image of the observation object when the observation object is irradiated with the first light,
The magnification observation apparatus according to claim 6, wherein the display unit further displays an image based on image data generated corresponding to the first light. The light projecting device further includes a third light projecting unit that is disposed so as to face the imaging unit with the observation object interposed therebetween, and that irradiates the observation object with the second light,
The switching unit further switches the emission state of the second light in the third light projecting unit,
The imaging unit further generates image data indicating an image of the observation object when the second light is irradiated onto the observation object;
The magnification observation apparatus according to claim 6 or 7, wherein the display unit further displays an image based on image data generated corresponding to the second light.

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