JP2018008464A - Lamination device and lamination method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lamination device and a lamination method with extremely high accuracy in laminating positions.SOLUTION: Provided is a lamination device 1 which includes: a first stage 2 which holds a first member 100 horizontally; a second stage 20 which supports a second member 200 underneath the first member 100; and a control part. The second stage 20 includes: a lamination-start side support stage 5 which supports an end part of the second member 200 including a lamination-start end 200a; and a lamination-end side support stage 3 which supports the other parts of the second member 200. The control part: elevates only the lamination-start side support stage 5 to bring the end part of the second member 200 closer to the first member 100 than the other parts; then aligns positions of both members 100 and 200 by performing fine adjustment of the positions of the second stages 3 and 5; and thereafter elevates the second stages 3 and 5 entirely to priorly laminate the end part of the second member 200 to the first member 100.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a pasting apparatus and a pasting method for pasting a relatively thin second member in the form of a film or sheet that also constitutes a display device to a first member constituting a display device such as a liquid crystal display or an organic EL display.

  In the manufacturing process of a display device such as a liquid crystal display or an organic EL display, a sticking device is used to stick a relatively thin second member (for example, a polarizing film) in the form of a film or sheet to the relatively thick first member. Has been. Conventionally, various types of pasting apparatuses have been known. For example, Patent Document 1 discloses a pasting apparatus that employs a so-called “roller pasting system”.

  As illustrated in FIG. 11, a pasting apparatus 300 </ b> A described in Patent Document 1 includes a plurality of free rollers 304 on which a first member 301 is placed, and a first member that holds the first member 301 by suction above the free rollers 304. A holding stage 303; a second holding stage 305 that sucks and holds the second member 302 so that the adhesive surface is exposed below the free roller 304; and adhesive rollers 306 and 307 provided on the downstream side in the transport direction. Yes. Further, the second holding stage 305 can tilt around the shaft 305a.

  In this sticking device 300A, the second member 302 is stuck to the first member 301 in the following procedure. That is, after the first member 301 is moved to a predetermined position by the first holding stage 303, the second holding stage 305 is tilted so that the sticking end of the second member 302 is in contact with the first member 301. After that, the first holding stage 303 is retracted and the application rollers 306 and 307 approach each other, so that the first member 301 and the second member 302 are sandwiched (FIG. 11 (B)). Thereafter, the application roller 306 rotates counterclockwise and the application roller 307 rotates clockwise, whereby the second member 302 is attached to the first member 301 (FIG. 11C).

Japanese Patent Laying-Open No. 2005-7748 (particularly FIG. 10)

  By the way, with the increase in the density of pixels of the display device, in recent years, the pasting device is required to paste the second member to the first member with very high positional accuracy of 10 μm or less (preferably 5 μm or less). It has become to. In addition, the film-like or sheet-like second member may be curled due to the influence of residual stress or moisture absorption during production.

  For this reason, in the conventional pasting apparatus 300A, as shown in FIG. 12, the pasting end of the curled second member 302 is stuck at a position shifted from a predetermined position, and the required high positional accuracy may not be satisfied. there were. Since the degree of curl varies from sheet to sheet, it is extremely difficult to cancel the effect of curl by adjusting the position of the first member 301 or the second member 302 in advance in consideration of the degree of curl. It is difficult to.

  In the pasting apparatus 300B shown in FIG. 13 in which the positional relationship between the first holding stage 303 and the second holding stage 305 is reversed upside down, similarly to the pasting apparatus 300A, a problem of misalignment due to the curl of the second member 302 occurs. To do. Further, in the sticking device 300B, the second member 302 is curled by its own weight, so it is much more difficult to cancel the influence of the curl by adjusting the position of the first member 301 or the second member 302 in advance. .

  This invention is made | formed in view of the said situation, The place made into the subject is providing the sticking apparatus and the sticking method with very high sticking position accuracy.

  In order to solve the above-mentioned problem, the pasting method according to the present invention is a method of pasting a rectangular second member having a pasting end and a pasting end facing the pasting end from the pasting end to the pasting end with respect to the first member. A first attaching step for holding the first member horizontally; and a second step for horizontally supporting the second member below the first member so as to be opposed to the first member. A step, a third step of raising the end including the sticking end of the second member and bringing the end of the second member closer to the first member than the other part of the second member; 4th process affixed on 1 member, 5th process which presses the said edge part of a 2nd member with a sticking roller from the downward direction, the other end part of a 2nd member is lowered | hung, and the sticking termination side of a 2nd member is lowered | hung The 6th process which inclines and the above-mentioned others of the 2nd member by moving a sticking roller horizontally A seventh step of attaching the portion to the first member, and after sequentially executing the first to fourth steps, the fifth and sixth steps are executed in random order, and then the seventh step is executed. It is configured.

  The affixing method further includes an alignment step of the first member and the second member that is performed between the third step and the fourth step. In the fourth step, the second member is maintained while maintaining the posture of the second member. It is preferable to be configured to raise the entire two members.

  The sticking method further includes an alignment step of the first member and the second member, which is performed between the second step and the third step, and maintains the posture of the second member in the fourth step. The entire second member may be raised.

  Or the said sticking method further includes the positioning process of the 1st member and 2nd member performed between a 2nd process and a 3rd process, and a 4th process is performed by performing a 3rd process. You may be comprised so that.

  When the first member has translucency, the attaching method recognizes the position of the first alignment mark attached to the first member with an optical camera arranged above the first member, and Recognizing the position of the second alignment mark attached to the second member over the first member, and adjusting the position of the first member or the second member based on the positional relationship between the first alignment mark and the second alignment mark May be configured to perform the alignment step.

  In addition, it is preferable that the said separation method WHEREIN: The separation distance of the up-down direction of the 1st member and the 2nd member after performing a 2nd process is 0.5 mm-1.0 mm.

  In order to solve the above-mentioned problem, a first pasting device according to the present invention pastes a rectangular second member having a pasting end and a pasting end facing the pasting end from the pasting end to the first member. A sticking device for sticking to the end, wherein a first stage that holds the first member horizontally and a first member held on the first stage are spaced below and opposed to the first member. A second stage for supporting the second member; and a control unit. The second stage includes a start-side support stage for supporting an end including the start end of the second member, and another part of the second member. A control unit that raises only the sticking side support stage of the second stage, thereby bringing the end of the second member closer to the first member than the other parts. Then fine-tune the position of the first or second stage. By doing so, the first member and the second member are aligned, and then the whole of the second stage is raised so that the end of the second member precedes the other part. It is configured to be pasted on.

  Moreover, in order to solve the said subject, the 2nd sticking apparatus which concerns on this invention attaches the rectangular 2nd member which has a sticking end and the sticking end facing this sticking end with respect to the 1st member. It is the sticking apparatus which sticks from the sticking terminal to the sticking end, Comprising: The 1st stage of holding the 1st member horizontally, and the 1st member of the 1st member so that it may be spaced apart and opposed to the 1st member held on the 1st stage The 2nd stage which supports the 2nd member in the lower part, and a control part are provided, the 2nd stage has the sticking side support stage which supports the end including the sticking end of the 2nd member, and other of the 2nd member And a control unit that finely adjusts the position of the first stage or the second stage to align the first member and the second member, and then the second stage. Raise only the stage support side stage Thus, the end portion of the second member is moved closer to the first member than the other portion, and then the entire second stage is raised, whereby the end portion of the second member is moved to the other portion. It is configured to be attached to the first member in advance.

  Moreover, in order to solve the said subject, the 3rd sticking apparatus which concerns on this invention attaches the rectangular 2nd member which has a sticking end and the sticking end facing this sticking end with respect to the 1st member. It is the sticking apparatus which sticks from the sticking terminal to the sticking end, Comprising: The 1st stage of holding the 1st member horizontally, and the 1st member of the 1st member so that it may be spaced apart and opposed to the 1st member held on the 1st stage The 2nd stage which supports the 2nd member in the lower part, and a control part are provided, the 2nd stage has the sticking side support stage which supports the end including the sticking end of the 2nd member, and other of the 2nd member And a control unit that finely adjusts the position of the first stage or the second stage to align the first member and the second member, and then the second stage. Raise only the stage support side stage More, and the end portion of the second member is configured to be pasted to the first member prior to the other portions.

  When the first member has translucency, the first to third sticking devices further include, for example, an optical camera arranged above the first stage, and the optical camera has translucency. The first alignment mark attached to the first member is photographed through the first stage having the first stage, and the second alignment mark attached to the second member is photographed through the first stage having translucency and the first member. The control unit may be configured to finely adjust the position of the first stage or the second stage based on the positional relationship between the first alignment mark and the second alignment mark photographed by the optical camera.

  In addition, it is preferable that the 2nd stage of the said 1st-3rd sticking apparatus supports a 2nd member so that it may oppose a 1st member below 0.5 mm-1.0 mm of a 1st member.

  ADVANTAGE OF THE INVENTION According to this invention, the sticking apparatus and sticking method with a very high sticking position accuracy can be provided.

It is a side view which shows the schematic structure of the sticking apparatus which concerns on this invention. It is a top view of (A) 1st member and (B) 2nd member bonded by the sticking apparatus which concerns on this invention. It is a control block diagram of the sticking device concerning the present invention. It is a figure which shows an example of the sticking operation | movement of the sticking apparatus based on this invention performed in order of (A)-> (B)-> (C). It is a figure which shows an example of the sticking operation | movement of the sticking apparatus based on this invention performed in order of (A)-> (B)-> (C) following the operation | movement shown in FIG.4 (C). It is a figure which shows an example of the sticking operation | movement of the sticking apparatus based on this invention performed in order of (A)-> (B)-> (C) following the operation | movement shown in FIG.5 (C). It is a figure for demonstrating position alignment of the 1st member and the 2nd member by the sticking apparatus which concerns on this invention. It is a figure which shows another example of the sticking operation | movement of the sticking apparatus based on this invention performed in order of (A)-> (B)-> (C). It is a figure which shows another example of the sticking operation | movement of the sticking apparatus based on this invention performed in order of (A)-> (B)-> (C) following the operation | movement shown in FIG.8 (C). It is a figure which shows another example of the sticking operation | movement of the sticking apparatus based on this invention performed in order of (A)-> (B) following the operation | movement shown in FIG.9 (C). It is a figure which shows the sticking operation | movement of the conventional sticking apparatus performed in order of (A)-> (B)-> (C). It is a figure for demonstrating the problem of the conventional sticking apparatus. It is a figure for demonstrating the problem of another conventional sticking apparatus.

  Hereinafter, embodiments of a sticking device and a sticking method according to the present invention will be described with reference to the accompanying drawings.

  FIG. 1 shows a sticking device 1 according to the present invention. The sticking device 1 sticks a rectangular second member 200 having a sticking end 200a and a sticking end 200b facing the sticking end 200a from the sticking end 200a to a relatively thick first member 100 having translucency. It is an apparatus for pasting over the terminal end 200b. As shown in the figure, the sticking apparatus 1 includes a first stage 2, a sticking unit 21 including a second stage 20 (3, 5) disposed below the first stage 2, an optical camera unit 22, and a sticking unit position adjustment. -Elevating means 13 and sticking unit traveling means 14 are provided.

  The 1st stage 2 consists of resin which has translucency. The first stage 2 has a horizontal holding surface 2a. A plurality of suction nozzles 2b connected to the pump 31 (see FIG. 3) are opened on the holding surface 2a. During the pasting operation, the first stage 2 continues to suck and hold the first member 100 by the holding surface 2a.

  The affixing unit 21 includes a unit base 12 and a second stage 20. And the 2nd stage 20 is comprised by the sticking side stage 5 which supports the edge part including the sticking end 200a of the 2nd member 200, and the sticking end side stage 3 which supports the other part of the 2nd member 200. ing. The other part of the second member 200 can be said to be the majority of parts including the pasting end 200b.

  The pasting stage 3 of the second stage 20 has a horizontal support surface 3a. A plurality of suction nozzles 3b connected to the pump 31 are opened on the support surface 3a. During the pasting operation, the pasting stage 3 continues to support the second member 200 by the support surface 3a. However, the suction nozzle 3b stops operating during the pasting operation.

  The pasting end stage 3 is attached to the unit base 12 via the pasting stage stage tilting means 4. Thanks to this, the pasting stage 3 can be tilted around the Y axis with the unit base 12 as a reference.

  The sticking side stage 5 of the second stage 20 has a horizontal support surface 5a. A plurality of suction nozzles 5b connected to the pump 31 are opened on the support surface 5a. Until the middle of the pasting operation, the pasting side stage 5 continues to support the second member 200 by the support surface 5a.

  The pasting unit 21 includes a pasting side stage support unit 6, a guide 7 provided on one side thereof extending in the Z direction, a pasting side stage retracting unit 8 that supports the pasting side stage support unit 6, and a unit base. It further includes a guide 9 provided in the base 12 and extending in the X direction. The sticking side stage 5 is slidably attached to the guide 7. Further, the sticking side stage retracting means 8 is slidably attached to the guide 9. In addition, the sticking side stage support part 6 and the guide 7 comprise the sticking side stage raising / lowering means.

  In the initial state shown in FIG. 1, the support surface 3a of the sticking side stage 3 and the support surface 5a of the sticking side stage 5 are in the same horizontal plane. In other words, the two support surfaces 3a and 5a have the same position (height) in the Z direction.

  The pasting unit 21 further includes a pasting roller 10 and a pasting roller lifting / lowering means 11 provided on the unit base 12. When the sticking roller lifting / lowering means 11 expands / contracts, the sticking roller 10 attached to the upper end thereof moves up and down.

  The sticking unit traveling means 14 is slidably attached to a guide 15 provided in the base 18 and extending in the X direction. The pasting unit running means 14 supports the unit base 12 of the pasting unit 21 via the pasting unit position adjusting / lifting means 13. Therefore, when the pasting unit traveling means 14 moves in the X direction along the guide 15, the entire pasting unit 21 including the second stage 20 (3, 5) and the pasting roller 10 moves in the X direction. Further, when the sticking unit position adjustment / lifting means 13 is operated, the whole sticking unit 21 moves in the Y direction, the whole sticking unit 21 rotates in the θ direction, or the whole sticking unit 21 moves up and down.

  The optical camera unit 22 includes four optical cameras (16a, 16b, 17a, 17b) arranged above the first stage 2. Among these, the cameras 16a and 17a (hereinafter referred to as “pasting side cameras”) are arranged above the end part on the pasting end 200a side and spaced apart from each other in the Y direction. Further, the cameras 16b and 17b (hereinafter referred to as “the pasting end camera”) are arranged above the end on the pasting end 200b side and spaced apart from each other in the Y direction.

  As shown in FIG. 2A, hollow circle-shaped first alignment marks M1 are attached to the four corners of the first member 100, respectively. Further, as shown in FIG. 5B, one dot-like second alignment mark M2 is attached to each of the four corners of the second member 200 at a position corresponding to the first alignment mark M1. A rectangle can be drawn by connecting the centers of the adjacent first alignment marks M1. Similarly, a rectangle can be drawn by connecting the centers of the adjacent second alignment marks M2.

  As described above, the first stage 2 has translucency. Therefore, each camera 16a, 16b, 17a, 17b can photograph the first alignment mark M1 attached to the first member 100 through the first stage 2. Further, as described above, the first member 100 also has translucency. Therefore, each camera 16a, 16b, 17a, 17b can also photograph the second alignment mark M2 attached to the second member 200 through the first stage 2 and the first member 100.

  As will be described later, the sticking device 1 is configured so that the first member 100 and the second member 200 are based on the positional relationship between the first alignment mark M1 and the second alignment mark M2 photographed by the cameras 16a, 16b, 17a, and 17b. Perform alignment. The cameras 16a, 16b, 17a, and 17b may be movable in the X direction and the Y direction in order to align the various first members 100 and second members 200 with different positions of the alignment marks M1 and M2. preferable.

  In FIG. 3, the control block diagram of the sticking apparatus 1 is shown. As shown in the figure, the control unit 30 provided in the sticking apparatus 1 includes (1) control of a pump 31 connected to the first stage 2 and the second stage 20, and (2) lifting and lowering of the sticking side stage 5. And (3) control related to tilting of the pasting end stage 3, (4) control related to raising and lowering of the sticking roller 10, and (5) control relating to position adjustment and raising and lowering of the sticking unit 21. Here, the control unit 30 can individually control the operations of the suction nozzles 2b, 3b, and 5b via the pump 31. Moreover, the control part 30 utilizes the imaging | photography result of the optical camera unit 22 when performing control (5).

  Subsequently, an attaching operation of the attaching device 1 will be described with reference to FIGS. 4 to 6. In these drawings, some components and reference numerals are omitted. The same applies to FIGS.

  In FIG. 4A, the first member 100 conveyed from the previous step is set at a predetermined position on the horizontal holding surface 2a of the first stage 2, and the horizontal level of the second stage 20 (3, 5) is set. The initial state where the 2nd member 200 conveyed from the previous process was set in the predetermined position of support surfaces 3a and 5a is shown. This state is equivalent to the state shown in FIG.

  FIG. 4B shows a state in which the entire pasting unit 21 including the second stage 20 (3, 5) and the pasting roller 10 is raised by operating the pasting unit position adjusting / lifting means 13. In this state, the vertical distance D between the first member 100 and the second member 200 is 1 mm.

  In FIG. 4C, only the sticking side stage 5 is raised by operating the sticking side stage elevating means 6, 7, and the end portion including the sticking end 200 a of the second member 200 is made more than other parts. Also shows a state of being close to the first member 100. In this state, the vertical distance D between the first member 100 and the second member 200 is 0.5 mm. The reason why they are brought close to each other is to perform the alignment described later in a state where the pasting operation is started, that is, in a state where the distance between the two is as close as possible.

  FIG. 5A shows a state in which the first alignment mark M1 attached to the first member 100 and the second alignment mark M2 attached to the second member 200 are photographed by the cameras 16a, 16b, 17a, and 17b. Is shown. The photographing result is sent from each camera 16a, 16b, 17a, 17b to the control unit 30. And the control part 30 operates the sticking unit position adjustment / lifting means 13 and / or the sticking unit traveling means 14 as necessary, and eliminates the positional deviation of the second member 200 with respect to the first member 100. In other words, the control unit 30 aligns the first member 100 and the second member 200 based on the positional relationship between the first alignment mark M1 and the second alignment mark M2.

  The control unit 30 performs alignment by the method shown in FIG.

  First, the control unit 30 draws a rectangle having apexes at the positions of the four first alignment marks M1 obtained from the imaging result, and a line L1a connecting the centers of the opposing long sides and the opposing short sides. A line L1b connecting the centers of the two lines and an intersection C1 of the lines L1a and L1b are obtained (see FIG. 3A). Next, the control unit 30 draws a rectangle having apexes at the positions of the four second alignment marks M2 obtained from the imaging results, and a line L2a that connects the centers of the opposing long sides and the opposing short. A line L2b connecting the centers of the sides and an intersection C2 of the lines L2a and L2b are obtained (see FIG. 5B).

  And when the position shift has arisen in the intersection C1 and the intersection C2, the control part 30 operates the sticking unit position adjustment and raising / lowering means 13 and / or the sticking unit running means 14 to operate the whole sticking unit 21 as Y. The position of the intersection C2 is made to coincide with the position of the intersection C1 by moving in the direction and / or the X direction. Further, when the angle formed between the line L1a and the line L2a is not 0 °, the control unit 30 operates the pasting unit position adjustment / lifting means 13 to rotate the whole pasting unit 21 in the θ direction, Close this to 0 °.

  In order to increase the accuracy of alignment, it is preferable that the imaging of the alignment marks M1 and M2 and the alignment based on the result are performed a plurality of times.

  FIG. 5 (B) shows that the entire pasting unit 21 is raised by operating the pasting unit position adjustment / lifting means 13 and the end portion including the pasting end 200a of the second member 200 precedes other portions. A state of being attached to the first member 100 is shown. Since only the entire sticking unit 21 is raised directly above, no displacement occurs between the first member 100 and the second member 200 during the transition to the state shown in FIG.

  FIG. 5C shows a state where the sticking side stage 5 is retracted by operating the sticking side stage elevating means 6 and 7 and the sticking side stage retracting means 8. The end of the second member 200 supported by the sticking side stage 5 is firmly attached to the first member 100 via an adhesive layer (not shown) provided on one of the first member 100 and the second member 200. Since it is stuck, even if the sticking side stage 5 is retracted, the end portion does not fall off.

  FIG. 6A shows a state where the sticking roller 10 is raised by operating the sticking roller lifting / lowering means 11 and the part supported by the sticking side stage 5 is pressed by the sticking roller 10. . At this time, it is preferable that the control part 30 controls the sticking roller raising / lowering means 11 so that the reaction force from the second member 200 is within a predetermined range.

  FIG. 6B shows a state in which the pasting end stage 3 is tilted by operating the pasting end stage tilting means 4. By tilting the pasting end stage 3, the posture of the second member 200 becomes a gently curved posture with less stress.

  FIG. 6C shows a state in which the entire pasting unit 21 is moved in the X direction by operating the pasting unit traveling means 14. By this movement, the second member 200 is attached to the first member 100.

  Thus, according to the sticking device and the sticking method of the present invention, the first member is in a state very close to the state when a part of the second member 200 is attached to the first member 100 prior to the other part. By aligning the position of the 100 and the second member 200, it is possible to improve the pasting position accuracy.

  In addition, the sticking apparatus and the sticking method which concern on this invention are not limited to said structure.

For example, the sticking device according to the present invention may perform the sticking operation shown in FIGS. This pasting operation is different from the pasting operation shown in FIGS. 4 to 6 in the following points.
FIG. 8B: By operating the sticking unit position adjustment / lifting means 13, the separation distance D of the entire sticking unit 21 including the second stage 20 (3, 5) and the sticking roller 10 becomes 0.5 mm. To raise.
FIG. 8C: Alignment is performed in a state where the second member 200 is not in a state where a part of the second member 200 is closer to the first member 100 than in other parts, but in a state where the posture of the second member 200 is straight.
FIG. 9A: When only the sticking side stage 5 is lifted by operating the sticking side stage elevating means 6 and 7, the end including the sticking end 200a of the second member 200 precedes the other part. And being attached to the first member 100.
FIG. 9C and FIG. 10A: Tilt the pasting side stage 3 before pressing the part supported by the pasting side stage 5 with the pasting roller 10.

  Further, the alignment of the first member 100 and the second member 200 may be performed by a method different from the method shown in FIG.

  Furthermore, in the alignment of the first member 100 and the second member 200, the position of the first stage 2 (first member 100) may be finely adjusted instead of the pasting unit 21 (second member 200).

  Moreover, the 1st stage 2 does not need to have translucency. In this case, a through hole is formed immediately below each camera 16a, 16b, 17a, 17b so that each camera 16a, 16b, 17a, 17b can photograph the first member 100 and the second member 200 through the through hole. There is a need.

  Further, the separation distance D can be changed within a range of 0.5 mm to 1.0 mm. If the separation distance D exceeds this upper limit, there is a high possibility that a positional deviation will occur between the position alignment and the time when a part of the second member 200 is attached to the first member 100. On the other hand, if the separation distance D is less than this lower limit, the possibility that the first member 100 and the second member 200 contact each other unintentionally increases.

  Further, the shapes and positions of the alignment marks M1, M2 can be arbitrarily changed. However, the shapes of the first alignment mark M1 and the second alignment mark M2 are preferably different. Further, the position of the first alignment mark M1 and the position of the second alignment mark M2 need to correspond to each other.

DESCRIPTION OF SYMBOLS 1 Pasting apparatus 2 1st stage 2a Holding surface 3 Pasting end side stage 3a Support surface 4 Pasting end side stage tilting means 5 Pasting side stage 5a Support surface 6 Pasting side stage support part (pasting side stage raising / lowering means)
7 Guide (Standing means for lifting and closing the stage)
8 Pasting side stage retracting means 9 Guide 10 Sticking roller 11 Sticking roller lifting / lowering means 12 Unit base 13 Sticking unit position adjusting / lifting means 14 Sticking unit running means 15 Guides 16a, 17a Sticking side cameras 16b, 17b 18 Base 20 Second stage 21 Affixing unit 22 Optical camera unit

Claims (11)

For the first member, it is a pasting method in which a rectangular second member having a pasting end and a pasting end facing the pasting end is pasted from the pasting end to the pasting end,
A first step of holding the first member horizontally;
A second step of horizontally supporting the second member below the first member so as to face the first member apart from the first member;
A third step of raising the end of the second member including the sticking end to be closer to the first member than the other part of the second member;
A fourth step of attaching the end of the second member to the first member in advance;
A fifth step of pressing the end of the second member with a sticking roller from below;
A sixth step of lowering the pasting terminal side of the second member and inclining the other part of the second member;
A seventh step of sticking the other part of the second member to the first member by horizontally moving the sticking roller;
And, after the first to fourth steps are sequentially executed, the fifth and sixth steps are executed in random order, and then the seventh step is executed. A step of aligning the first member and the second member, which is performed between the third step and the fourth step;
In the fourth step, the entire second member is raised while maintaining the posture of the second member.
The sticking method according to claim 1. A step of aligning the first member and the second member, which is performed between the second step and the third step;
In the fourth step, the entire second member is raised while maintaining the posture of the second member.
The sticking method according to claim 1. A step of aligning the first member and the second member, which is performed between the second step and the third step;
The sticking method according to claim 1, wherein the fourth step is executed by executing the third step. The first member has translucency;
The optical camera disposed above the first member recognizes the position of the first alignment mark attached to the first member, and the second alignment attached to the second member over the first member. Recognizing the position of the mark, and adjusting the position of the first member or the second member based on the positional relationship between the first alignment mark and the second alignment mark; The sticking method as described in any one of Claims 2-4 characterized by the above-mentioned. The vertical distance between the first member and the second member after the second step is performed is 0.5 mm to 1.0 mm. 6. The sticking method according to one item. For the first member, a pasting device for pasting a rectangular second member having a pasting end and a pasting end facing the pasting end from the pasting end to the pasting end,
A first stage for holding the first member horizontally;
A second stage that supports the second member below the first member so as to face the first member held by the first stage in a spaced manner;
A control unit;
With
The second stage includes a pasting side support stage that supports an end including the pasting end of the second member, and a pasting side support stage that supports the other part of the second member,
The controller raises only the sticking side support stage of the second stage, thereby bringing the end of the second member closer to the first member than the other part, and then By finely adjusting the position of one stage or the second stage, the first member and the second member are aligned, and then the whole of the second stage is raised, thereby the second member. The affixing device characterized in that the end part is affixed to the first member prior to the other part. For the first member, a pasting device for pasting a rectangular second member having a pasting end and a pasting end facing the pasting end from the pasting end to the pasting end,
A first stage for holding the first member horizontally;
A second stage that supports the second member below the first member so as to face the first member held by the first stage in a spaced manner;
A control unit;
With
The second stage includes a pasting side support stage that supports an end including the pasting end of the second member, and a pasting side support stage that supports the other part of the second member,
The control unit finely adjusts the position of the first stage or the second stage to align the first member and the second member, and then supports the start side of the second stage. By raising only the stage, the end of the second member is brought closer to the first member than the other part, and then the whole second stage is raised to raise the second member. The affixing device characterized in that the end part is affixed to the first member prior to the other part. For the first member, a pasting device for pasting a rectangular second member having a pasting end and a pasting end facing the pasting end from the pasting end to the pasting end,
A first stage for holding the first member horizontally;
A second stage that supports the second member below the first member so as to face the first member held by the first stage in a spaced manner;
A control unit;
With
The second stage includes a pasting side support stage that supports an end including the pasting end of the second member, and a pasting side support stage that supports the other part of the second member,
The control unit finely adjusts the position of the first stage or the second stage to align the first member and the second member, and then supports the start side of the second stage. A pasting device for pasting the end of the second member on the first member prior to the other portion by raising only the stage. The first member has translucency,
An optical camera disposed above the first stage;
The optical camera photographs the first alignment mark attached to the first member through the first stage having translucency, and the first stage having translucency and the first member through the first member. Photograph the second alignment mark attached to the second member,
The control unit finely adjusts a position of the first stage or the second stage based on a positional relationship between the first alignment mark and the second alignment mark photographed by the optical camera. The sticking device according to any one of claims 7 to 9. 11. The second stage according to claim 7, wherein the second stage supports the second member so as to face the first member below 0.5 mm to 1.0 mm of the first member. The sticking device according to any one of the above.

Images