JP2018008216A - Coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating device capable of uniformly coating a coating liquid on a base material.SOLUTION: A coating device 1 according to the present embodiment comprises a carrying part 11 for carrying a base material, a discharge part for discharging a coating liquid to one surface of the carried base material, a supply part 13 for supplying the coating liquid to the discharge part and a control part 31 for quickening or delaying the timing for starting or finishing an increase-decrease in a supply quantity by the supply part 13, for a predetermined time more than the timing for starting or finishing ascent-descent of a carrying speed by the carrying part 11, by executing control for ascending-descending the carrying speed by the carrying part 11 and control for increasing-decreasing the supply quantity per unit time by the supply part 13.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a coating apparatus that coats a base material with a coating liquid.

Before the coating for manufacturing the product is performed, an experimental coating for obtaining various parameters (for example, a set value of the internal pressure of the die) is performed.
First, the coating apparatus supplies a small amount of coating liquid to the die while conveying the substrate at a low speed. At this time, experimental coating is performed.
Next, the coating apparatus increases the supply speed of the coating liquid at the same time as increasing the conveyance speed of the base material.
Next, the coating apparatus supplies a large amount of coating liquid to the die while conveying the substrate at high speed. At this time, coating for manufacturing a product is performed.

Conventionally, there has been proposed a coating apparatus that keeps the internal pressure of a die at a set value when coating is performed at a constant rate (see Patent Document 1).
The coating apparatus described in Patent Document 1 detects the internal pressure of the die and adjusts the separation distance between the die and the substrate according to the deviation between the detection result and the set value. The larger the separation distance, the smaller the internal pressure of the die. If the internal pressure of the die is constant, the film thickness of the coating solution applied to the substrate becomes uniform in the transport direction.

Japanese Patent No. 2932247

By the way, the conventional coating apparatus has the problem that the coating liquid applied to the base material during raising / lowering of the conveyance speed has a non-uniform film thickness.
One reason for this is that the die and the pump that supplies the coating liquid to the die are separated. The longer the two are separated, the later the timing at which the supply amount at the die increases or decreases from the timing at which the pump increases or decreases the supply amount. Therefore, even if the increase / decrease in the conveyance speed and the increase / decrease in the supply amount by the pump are performed simultaneously, the conveyance speed of the base material and the supply amount in the die cannot be made to correspond. In the state where the substrate conveyance speed does not correspond to the supply amount in the die, the internal pressure of the die varies significantly. When the internal pressure of the die fluctuates significantly, it is difficult to make the internal pressure of the die constant by adjusting the separation distance between the die and the substrate by the method described in Patent Document 1.

  This invention is made | formed in view of such a situation, The main objective is to provide the coating apparatus which can apply | coat a coating liquid uniformly to a base material.

  The coating apparatus according to the present embodiment includes a transport unit that transports the base material, a discharge unit that discharges the coating liquid onto one surface of the transported base material, and a supply unit that supplies the coating liquid to the discharge unit. Performing a control to raise and lower the transport speed in the transport unit and a control to increase and decrease the supply amount per unit time in the supply unit, and the timing to start or end the increase and decrease of the supply amount in the supply unit, And a control unit that accelerates or delays the conveyance unit by a predetermined time from the timing at which the increase / decrease of the conveyance speed is started or ended.

  In the coating apparatus according to the present embodiment, the control unit increases the supply amount to the supply unit when increasing the conveyance speed to the conveyance unit, and supplies the supply unit when decreasing the conveyance speed to the conveyance unit. The timing at which the supply amount is decreased and the increase / decrease in the supply amount is started a predetermined time earlier than the timing at which the increase / decrease in the transport speed is started.

  In the coating apparatus according to the present embodiment, the control unit causes the supply unit to finish increasing the supply amount when the transport unit finishes increasing the transport speed, and causes the transport unit to decrease the transport speed. In the case of ending, the supply unit ends the decrease in the supply amount, and the timing at which the increase / decrease in the supply amount is ended is advanced by a predetermined time from the timing at which the increase / decrease in the conveyance speed is completed.

In the present embodiment, the control unit starts the increase / decrease of the supply amount per unit time (hereinafter simply referred to as supply amount) from the timing at which the transfer unit starts to increase or decrease the transfer speed. Is also advanced or delayed by a predetermined time. Alternatively, the control unit advances or delays the timing at which the supply unit ends the increase / decrease of the supply amount by a predetermined time than the timing at which the transport unit finishes raising / lowering the transport speed.
As a result, even if the conveyance speed is being raised or lowered, the conveyance speed of the base material corresponds to the supply amount in the discharge unit. If both correspond, the remarkable fluctuation | variation of the internal pressure of a discharge part is suppressed.

  In the present embodiment, when the transport unit increases (or decreases) the transport speed, the supply amount is increased (or decreased) in the supply unit prior to the start (or decrease) of the transport speed. start. At this time, the increase (or decrease) in the conveyance speed of the base material can be associated with the increase (or decrease) in the supply amount in the discharge unit.

  In this embodiment, when the transport unit finishes the increase (or decrease) in the transport speed, the supply unit increases (or decreases) the supply amount prior to the end of the increase (or decrease) in the transport speed. ). At this time, the increase (or decrease) in the conveyance speed of the base material can be associated with the increase (or decrease) in the supply amount in the discharge unit.

  In the case of the coating apparatus according to the present embodiment, the transport speed of the base material can be made to correspond to the supply amount in the discharge section even while the transport speed is being raised or lowered. Therefore, the remarkable fluctuation | variation of the internal pressure of a discharge part can be suppressed. Accordingly, the coating liquid can be uniformly applied to the substrate.

It is explanatory drawing which shows typically the structure of the coating apparatus which concerns on embodiment. It is a block diagram which shows the structure of the control system of a coating device. It is a characteristic view which shows the relationship between elapsed time, a conveyance speed, and rotation speed. It is a flowchart which shows the procedure of the coating process performed with a coating apparatus. It is a flowchart which shows the procedure of the coating process performed with a coating apparatus. It is a flowchart which shows the procedure of the coating process performed with a coating apparatus.

  Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments thereof.

Drawing 1 is an explanatory view showing typically composition of a coating device concerning an embodiment.
FIG. 2 is a block diagram showing the configuration of the control system of the coating apparatus.
In the figure, 1 is a coating apparatus. The coating apparatus 1 coats the coating liquid in a film shape on one surface of the belt-shaped substrate 2 to be conveyed. For this purpose, the coating apparatus 1 includes a transport unit 11, a discharge unit 12, a supply unit 13, an adjustment unit 14, an internal pressure detection unit 15, a film thickness detection unit 16, and a control device 3.

The transport unit 11 includes a backup roll 111, a roll motor 112, and a roll drive unit 113.
The base material 2 is wound around the backup roll 111. As the backup roll 111 rotates, the base material 2 is transported in its longitudinal direction.
The roll motor 112 rotates the backup roll 111. The number of rotations of the roll motor 112 can be changed in a plurality of steps or steplessly. The greater the number of rotations of the roll motor 112, the higher the transport speed for transporting the substrate 2.
In the present embodiment, the time difference between the timing at which the number of rotations of the roll motor 112 changes and the timing at which the conveyance speed of the substrate 2 changes is so small that it can be ignored.
The roll driving unit 113 drives the roll motor 112 by supplying power to the roll motor 112.

The discharge unit 12 is, for example, a slot die coater type die. The discharge part 12 is provided with a discharge port for discharging the coating liquid.
The discharge unit 12 is disposed below the backup roll 111 so that the discharge port faces the backup roll 111 and is spaced apart from the peripheral surface of the backup roll 111 by an appropriate length.
The discharge unit 12 discharges the coating liquid onto one surface of the base material 2 wound around the backup roll 111. As a result, the coating liquid is applied in a film form on one surface of the substrate 2.
The substrate 2 after coating is unloaded from the coating apparatus 1 and then loaded into and unloaded from a drying apparatus (not shown). As a result, the coating solution applied to the substrate 2 is dried.

The supply unit 13 includes a tank 131, a pump 132, a supply pipe 133, and a pump drive unit 134.
A coating liquid is stored in the tank 131.
The pump 132 has a pump motor 13a. As the pump motor 13a rotates, the pump 132 transfers the coating liquid stored in the tank 131.
The supply pipe 133 connects the discharge unit 12 and the pump 132. The coating liquid transferred by the pump 132 flows into the discharge unit 12 through the supply pipe 133. The coating liquid that has flowed into the discharge unit 12 is discharged from the discharge port of the discharge unit 12.
The pump drive unit 134 drives the pump motor 13a by supplying power to the pump motor 13a.

By the way, the number of rotations of the pump motor 13a (hereinafter referred to as the number of rotations of the pump 132) can be changed in a plurality of steps or steplessly. The larger the number of revolutions of the pump 132, the larger the supply amount from the pump 132.
The time difference between the timing at which the rotation speed of the pump 132 is changed and the timing at which the supply amount at the discharge unit 12 is changed is the time difference between the timing at which the rotation speed of the roll motor 112 is changed and the timing at which the conveyance speed of the substrate 2 is changed. In comparison, it is too large to ignore. One reason for this is that the supply pipe 133 is interposed between the pump 132 and the discharge unit 12, so that rapid increase or decrease in the supply amount in the discharge unit 12 is hindered.

  What inhibits the rapid increase / decrease in the supply amount in the discharge unit 12 is, for example, the inertial force of the coating liquid existing in the supply pipe 133 or the pressure loss (resistance) of a filter (not shown) existing in the supply pipe 133. ). When the supply pipe 133 is made of a flexible material, the temporary expansion (or contraction) of the supply pipe 133 accompanying the increase (or decrease) in the supply quantity from the pump 132 causes the supply quantity in the discharge unit 12 to quickly increase. Disturbs the increase or decrease.

  The adjustment unit 14 adjusts the separation distance between the discharge unit 12 and one surface of the substrate 2. For this purpose, the adjustment unit 14 brings the discharge unit 12 into contact with and away from the surface of the base member 2 perpendicularly.

The internal pressure detection unit 15 detects the internal pressure of the discharge unit 12 (that is, the pressure of the coating liquid in the discharge unit 12).
The film thickness detector 16 detects the film thickness of the coating liquid applied to the substrate 2.
Generally, when the internal pressure is constant, the film thickness is uniform in the transport direction. Here, the constant internal pressure means that the detected value of the internal pressure is within an allowable range including the set value of the internal pressure. Moreover, the film thickness being uniform means that the detected value of the film thickness is within an allowable range including the set value of the film thickness. The set value of the film thickness and the permissible ranges of the internal pressure and the film thickness are given in advance as coating conditions. For example, the allowable range of film thickness is ± 1 μm (after drying).

The control device 3 includes a control unit 31, a storage unit 32, a display unit 33, and an operation unit 34.
The control unit 31 is a control center of the coating apparatus 1 and executes various processes according to a computer program. For example, the control unit 31 controls the operation of the adjustment unit 14. As a result, the separation distance between the discharge unit 12 and one surface of the substrate 2 is changed.
The control unit 31 is given detection results of the internal pressure detection unit 15 and the film thickness detection unit 16.

The storage unit 32 uses a nonvolatile storage device. The storage unit 32 stores a computer program that the control unit 31 should follow. The storage unit 32 stores information that the control unit 31 should refer to.
The control unit 31 refers to information stored in the storage unit 32 (for example, a table indicating the relationship between the conveyance speed and the rotation speed of the roll motor 112), and determines the rotation speed of the roll motor 112 via the roll driving unit 113. Increase or decrease. As a result, the conveyance speed of the base material 2 is changed.
The control unit 31 refers to information stored in the storage unit 32 (for example, a table indicating the relationship between the supply amount and the rotation speed of the pump 132), and increases or decreases the rotation speed of the pump 132 via the pump drive unit 134. . As a result, the supply amount of the coating liquid is changed.

The display unit 33 includes, for example, a liquid crystal display panel. The operation unit 34 has, for example, hard keys. The operator visually recognizes the display unit 33 and operates the operation unit 34.
The display unit 33 and the operation unit 34 may be configured using a touch panel.

FIG. 3 is a characteristic diagram showing the relationship between the elapsed time, the conveyance speed, and the rotation speed.
3 represents the elapsed time t, and the vertical axis represents the conveyance speed V of the base material 2 or the rotational speed N of the pump 132.
The thick solid line is a line graph showing the relationship between the elapsed time and the conveyance speed.
The thin solid line is a line graph showing the relationship between the elapsed time and the rotational speed according to the present embodiment.
A two-dot chain line is a line graph showing a conventional relationship between elapsed time and rotational speed.

In the figure, each of VL and VH indicates the conveyance speed (VL <VH). The conveyance speeds VL and VH are predetermined values (for example, 5 m / s and 30 m / s).
In the figure, each of NL and NH indicates the rotational speed (NL <NH). The rotation speeds NL and NH are predetermined values (for example, 50 rpm and 800 rpm).

In the figure, t1, t2,..., T8 each indicate a timing. Timings t1, t2,..., T8 indicate a later timing as the number included in the code is larger. Each timing is a time or an elapsed time from the time when an operator performs a predetermined operation on the operation unit 34.
In the figure, T1, T2,..., T4 each indicate a time difference and are based on the following formulas (1) to (4).
T1 = t2−t1 (1)
T2 = t4−t3 (2)
T3 = t6−t5 (3)
T4 = t8−t7 (4)

  The transport speed of the base material 2 is constant at the transport speed VL from timing t2 to a constant acceleration from timing t2 to timing t4, and is constant at the transport speed VH from timing t4 to timing t6. It decreases at a constant acceleration until t8, and is constant at the conveyance speed VL after timing t8.

  The rotational speed of the pump 132 in the present embodiment is constant at the rotational speed NL from timing t1 to increase at a constant rate from timing t1 to timing t3, and is constant at the rotational speed NH from timing t3 to timing t5. It decreases at a constant acceleration from timing t5 to timing t7, and is constant at the rotational speed NL after timing t7. That is, the timing at which the rotation speed of the pump 132 is changed is earlier than the timing at which the conveyance speed of the substrate 2 is changed.

  On the other hand, the rotational speed of the conventional pump 132 is constant at the rotational speed NL from timing t2 to increase at a constant rate from timing t2 to timing t4, and constant at the rotational speed NH from timing t4 to timing t6. It decreases at a constant acceleration from t6 to timing t8, and is constant at the rotational speed NL after timing t8. That is, the timing at which the rotational speed of the pump 132 is changed and the timing at which the conveyance speed of the substrate 2 is changed are simultaneous.

In order to simplify the explanation, in this embodiment, the time difference T, the acceleration AV when the conveyance speed is increased, and the acceleration AN when the rotation speed is increased are based on the following equations (5) to (7). .
T = T1 = T2 = T3 = T4 (5)
AV = (VH−VL) / (t4−t2) (6)
=-(VL-VH) / (t8-t6)
AN = (NH−NL) / (t3−t1) (7)
=-(NL-NH) / (t7-t5)
= (NH-NL) / (t4-t2)
=-(NL-NH) / (t8-t6)

4 to 6 are flowcharts showing the procedure of the coating process executed by the coating apparatus 1.
As shown in FIG. 4, the control unit 31 accepts input of various parameters (S11). The control unit 31 in S11 causes the display unit 33 to display various parameter input instructions.
After executing the process of S <b> 11 by the control unit 31, the operator inputs various parameters using the operation unit 34. At this time, the parameters to be input by the operator are the conveyance speeds VL and VH, the rotation speeds NL and NH, and the accelerations AV and AN.

The control unit 31 determines whether or not various parameters have been input (S12). If the parameters have not yet been input (NO in S12), the process of S12 is executed again.
When various parameters are input (YES in S12), the control unit 31 controls the operation of the supply unit 13 so that the pump 132 rotates at a constant rotation speed NL (S13). Moreover, the control part 31 controls operation | movement of the conveyance part 11 so that the base material 2 may be conveyed with the fixed conveyance speed VL (S14).

  Further, the control unit 31 causes the display unit 33 to display the detection results of the internal pressure detection unit 15 and the film thickness detection unit 16 (that is, the detection values of the internal pressure and the film thickness) (S15). After executing the process of S15, the control unit 31 repeats the display of each detection value at a predetermined time interval until the coating process is completed.

After executing the process of S15 by the control unit 31, the operator determines whether the separation distance between the discharge unit 12 and one surface of the base material 2 is too long or too short based on the detected value of the film thickness, and determines the determination result. Based on this, the operation unit 34 is operated. The control unit 31 controls the operation of the adjustment unit 14 according to the operation of the operation unit 34. As a result, the separation distance between the discharge unit 12 and one surface of the substrate 2 is adjusted. When the separation distance between the discharge unit 12 and one surface of the substrate 2 changes, the film thickness or the internal pressure changes. As described above, the operator experimentally obtains an internal pressure value at which the film thickness becomes a predetermined value, and inputs the obtained value to the control unit 31. The control unit 31 uses the input value as the set value of the internal pressure.
Since the procedure for obtaining the set value of the internal pressure is the same as a known procedure, illustration is omitted.

The control unit 31 receives input of the time difference T and timings t4 and t6 (S16). In S16, the control unit 31 causes the display unit 33 to display input instructions for the time difference T and the timings t4 and t6. The operator inputs the time difference T and the timings t4 and t6 using the operation unit 34.
The control unit 31 determines whether or not the time difference T and the timings t4 and t6 have been input (S17). If not yet input (NO in S17), the control unit 31 executes the process of S17 again.
When the time difference T and the timings t4 and t6 are input (YES in S17), the control unit 31 calculates the timings t1 to t3, t5, t7, and t8 based on the equations (1) to (7) (S18). ).
In addition, the timing which the control part 31 receives in S17 is not limited to timing t4 and t6, For example, timing t2 and t8 may be sufficient. In this case, the control unit 31 calculates timings t1, t3 to t7 in S18.

Next, the control unit 31 determines whether or not the timing t1 has been reached (S19). If the timing t1 has not yet been reached (NO in S19), the process returns to S19.
When the timing t1 is reached (YES in S19), the control unit 31 controls the operation of the supply unit 13 so that the rotational speed of the pump 132 increases with the acceleration AN (S20).

Next, as shown in FIG. 5, the control unit 31 determines whether or not the timing t2 has been reached (S31). If the timing t2 has not yet been reached (NO in S31), the process returns to S31.
When the timing t2 is reached (YES in S31), the control unit 31 controls the operation of the transport unit 11 so that the transport speed of the base material 2 increases with the acceleration AV (S32).

Next, the control unit 31 determines whether or not the timing t3 has been reached (S33). If the timing t3 has not yet been reached (NO in S33), the process returns to S33.
When the timing t3 is reached (YES in S33), the rotational speed of the pump 132 has reached the rotational speed NH. The control unit 31 controls the operation of the supply unit 13 so that the pump 132 rotates at a constant rotational speed NH (S34).

Next, the control unit 31 determines whether or not the timing t4 has been reached (S35). If the timing t4 has not yet been reached (NO in S35), the process returns to S35.
When the timing t4 is reached (YES in S35), the conveyance speed of the base material 2 has reached the conveyance speed VH. The control unit 31 controls the operation of the transport unit 11 so as to transport the substrate 2 at a constant transport speed VH (S36).
After executing the process of S36, the control unit 31 compares the detected value of the internal pressure with the set value until it determines YES in S37 described later, and controls the operation of the adjusting unit 14 based on the comparison result. As a result, the internal pressure of the discharge unit 12 is kept constant.
Since the procedure for keeping the internal pressure constant is the same as a known procedure, illustration is omitted.

Next, the control unit 31 determines whether or not the timing t5 has been reached (S37). If the timing t5 has not yet been reached (NO in S37), the process returns to S37.
When the timing t5 is reached (YES in S37), the control unit 31 controls the operation of the supply unit 13 so that the rotational speed of the pump 132 decreases with the acceleration AN (S38).

Next, the control unit 31 determines whether or not the timing t6 has been reached (S39). If the timing t6 has not yet been reached (NO in S39), the process returns to S39.
When the timing t6 is reached (YES in S39), the control unit 31 controls the operation of the transport unit 11 so that the transport speed of the base material 2 is decreased at the acceleration AV (S40).

Next, as shown in FIG. 6, the control unit 31 determines whether or not the timing t7 has been reached (S51). If the timing t7 has not yet been reached (NO in S51), the process returns to S51.
When the timing t7 is reached (YES in S51), the rotational speed of the pump 132 reaches the rotational speed NL. The control unit 31 controls the operation of the supply unit 13 so that the pump 132 rotates at a constant rotation speed NL (S52).

Next, the control unit 31 determines whether or not the timing t8 has been reached (S53). If the timing t8 has not yet been reached (NO in S53), the process returns to S53.
When the timing t8 is reached (YES in S53), the conveyance speed of the base material 2 has reached the conveyance speed VL. The control unit 31 controls the operation of the transport unit 11 so as to transport the substrate 2 at a constant transport speed VL (S54).

The control unit 31 receives an input of a command to continue or end the coating process (S55). In S55, the control unit 31 causes the display unit 33 to display an instruction input instruction. The operator inputs a continuation command or an end command using the operation unit 34.
The control unit 31 determines whether or not a continuation command has been input (S56). If no continuation command has been input (NO in S56), the control unit 31 determines whether or not an end command has been input (S57). If the end command has not been input (NO in S57), the control unit 31 returns the process to S56.

When the continuation command is input (YES in S56), the control unit 31 returns the process to S16.
When the end command is input (YES in S57), the control unit 31 controls the operations of the transport unit 11 and the supply unit 13 so that the roll motor 112 and the pump 132 are stopped (S58), and ends the coating process. .

The time difference T is, for example, 0.5 seconds. The operator starts the production of the product after experimentally obtaining the time difference T.
The operator inputs appropriate numerical values as the time difference T and timings t4 and t6 when the control unit 31 executes the process of S16. At this time, the period between timings t4 and t6 is short.
Thereafter, the operator observes the change in the internal pressure displayed on the display unit 33.

If the change in the internal pressure is out of the allowable range, the operator inputs a continuation command when the control unit 31 executes the process of S55, and then when the control unit 31 executes the process of S16 again, A numerical value different from the previous time is input as the time difference T, and timings t4 and t6 are input. Also at this time, the period between timings t4 and t6 is short.
On the other hand, if the change in the internal pressure is within the allowable range, the operator inputs a continuation command when the control unit 31 executes the process of S55, and then the control unit 31 executes the process of S16 again. Sometimes, the same numerical value as the previous time is input as the time difference T, and the timings t4 and t6 are input. At this time, the period between timings t4 and t6 is a long time. As a result, the coating for manufacturing the product is performed.

  Note that the control unit 31 may accept an input of a re-input command for the time difference T after the processing of S17 is completed. If the worker finds that the change in the internal pressure is outside the allowable range before reaching the timing t8, the worker inputs a re-input command. When a re-input command is input, the control unit 31 interrupts the coating process, controls the operation of the supply unit 13 so that the pump 132 rotates at a constant rotational speed NL, and conveys the base material 2 at a constant level. The operation of the transport unit 11 is controlled to transport at the speed VL. Thereafter, the control unit 31 resumes the coating process from S16.

  In the coating apparatus 1 as described above, the control unit 31 sets the timing for starting to increase or decrease the supply amount of the coating liquid (that is, timings t1 and t5) to the timing for starting to raise and lower the conveyance speed (that is, timings t2 and t6). ) Earlier than a predetermined time (ie, time difference T). Further, the control unit 31 sets the timing for finishing the increase / decrease in the supply amount of the coating liquid (that is, timings t3 and t7) to a predetermined time (that is, timing t4 and t8) than the timing for finishing the increase / decrease of the conveyance speed (that is, timings t4 and t8) Advance time difference T).

When the coating apparatus 1 is used, the film thickness of the part coated at a constant speed (that is, the part where the film thickness is uniform when the conventional coating apparatus is used) is uniform.
Further, when the coating apparatus 1 is used, the film thickness of the part coated during the increase / decrease of the conveyance speed (that is, the part where the film thickness is non-uniform when the conventional coating apparatus is used) becomes uniform. . For example, the film thickness after drying is 0.8 μm ± 0.4 μm. Therefore, the yield is improved.
This is because the conveyance speed of the base material 2 and the supply amount in the discharge unit 12 can be made to correspond by making the timing t1, t5 a time difference T earlier than the timing t2, t6. As a result, the internal pressure of the discharge unit 12 can be made constant. Therefore, the film thickness can be made uniform.

The hardware configuration of the coating apparatus 1 is the same as the hardware configuration of the conventional coating apparatus. In other words, the coating apparatus 1 can be easily obtained by changing the software of the conventional coating apparatus. Therefore, the manufacturing cost of the coating apparatus 1 is low.
The parameter to be set for the coating process by the coating apparatus 1 is one more than the conventional parameter. However, since the number of procedures for obtaining the time difference T only increases, there is no possibility that the workability of the worker is remarkably deteriorated.

  The controller 31 may be configured to decrease (or increase) the supply amount when increasing (or decreasing) the conveyance speed. In this case, the control unit 31 ends the decrease (or increase) in the supply amount when the increase (or decrease) in the conveyance speed is ended.

  Further, the control unit 31 may be configured to delay the timing for starting the increase / decrease in the supply amount by a predetermined time from the timing for starting the increase / decrease in the conveyance speed. However, in the experiment using the coating apparatus 1, the result that the timing at which the increase / decrease in the supply amount starts earlier than the timing at which the increase / decrease in the conveyance speed is started is easy to make the film thickness uniform. .

  The control unit 31 may be configured to delay the timing for ending the increase / decrease in the supply amount by a predetermined time from the timing for ending the increase / decrease in the conveyance speed. When providing a time difference between the timing for starting the increase / decrease in the supply amount and the timing for starting the increase / decrease in the conveyance speed, the control unit 31 sets the timing for ending the increase / decrease in the supply amount and the timing for ending the increase / decrease in the conveyance speed. It may be configured to match.

  The embodiment disclosed this time is to be considered as illustrative in all points and not restrictive. The scope of the present invention is not intended to include the above-described meanings, but is intended to include meanings equivalent to the claims and all modifications within the scope of the claims.

DESCRIPTION OF SYMBOLS 1 Coating apparatus 11 Conveyance part 12 Discharge part 13 Supply part 2 Base material 31 Control part

Claims (3)

A transport unit for transporting the substrate;
A discharge unit for discharging the coating liquid onto one surface of the substrate to be conveyed;
A supply unit for supplying a coating liquid to the discharge unit;
The conveyance unit performs control for increasing and decreasing the conveyance speed in the conveyance unit and control for increasing and decreasing the supply amount per unit time in the supply unit, and starts and ends the increase and decrease of the supply amount in the supply unit. And a control unit for advancing or delaying the conveying speed by a predetermined time from the timing of starting or ending the raising / lowering of the conveying speed. The controller is
When increasing the transport speed to the transport unit, increase the supply amount to the supply unit, and when decreasing the transport speed to the transport unit, decrease the supply amount to the supply unit,
2. The coating apparatus according to claim 1, wherein a timing at which the increase / decrease of the supply amount is started a predetermined time earlier than a timing at which the increase / decrease of the conveyance speed is started. The controller is
When the conveyance unit finishes increasing the conveyance speed, the supply unit terminates the increase in supply amount, and when the conveyance unit terminates the decrease in conveyance speed, the supply unit terminates the decrease in supply amount,
The coating apparatus according to claim 1 or 2, wherein a timing for ending the increase / decrease in the supply amount is advanced by a predetermined time from a timing for ending the increase / decrease in the conveyance speed.

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