JP2018006118A - Photoelectron multiplier, measuring apparatus, and manufacture jig - Google Patents

Abstract

A photomultiplier tube having a novel configuration to which a thermoelectric cooling element can be easily attached is provided. A main body that receives light and outputs photoelectrons corresponding to the light as a signal, and a plate-like support provided on the main body, the main body extends in one direction and has one end thereof. An open tubular member, a heat transfer plate that closes one end of the tubular member, a sealing material that hermetically seals a joint portion between the heat transfer plate and the tubular member, and provided inside the tubular member, It has a cathode that receives light incident on the inside of the cylindrical member from the outside of the cylindrical member and emits photoelectrons, the heat transfer plate is thermally connected to the cathode, and the main body penetrates the support In addition, the heat transfer plate is provided so as to be exposed on the first main surface side of the support, and the support is made of a curable resin as a forming material and is in contact with the cylindrical member, the heat transfer plate, and the sealing material. A photomultiplier tube provided so as to cover the joint portion sealed with the sealing material. [Selection] Figure 1

Description

  The present invention relates to a photomultiplier tube, a measuring device, and a manufacturing jig.

  Conventionally, a photomultiplier tube is used in the detection part of the emission spectroscopic analyzer. In a photomultiplier tube in an emission spectroscopic analyzer, light emitted from an analysis sample is received by a cathode, and an amount of electrons (photoelectrons) correlated with light received by the photoelectric effect is emitted from the cathode. The emitted photoelectrons are sequentially amplified by a plurality of stages of dynodes and then collected by the anode. From the anode, the collected photoelectrons can be taken out as a signal current. Since the amount of light emitted from the analysis sample correlates with the amount of the analysis sample, the emission spectroscopic analyzer can detect the amount of the analysis sample based on the intensity of the signal current.

  In such a photomultiplier tube, it is known that noise is likely to be generated in the obtained signal current when the cathode receiving light becomes high due to heat generation or environmental temperature due to use. Therefore, a photomultiplier tube that employs a configuration for cooling the cathode is known as one of the purposes for improving the analysis sensitivity (see, for example, Patent Documents 1 and 2).

JP-A-9-68464 Japanese Patent Laid-Open No. 9-79905

  In the photomultiplier tubes described in Patent Documents 1 and 2, as a configuration for cooling the cathode, a thermoelectric cooling element thermally bonded to the cathode is used. The thermoelectric cooling element is provided at one end of the photomultiplier tube. However, since it is difficult to attach the thermoelectric cooling element to one end of the photomultiplier tube without impeding heat transfer, improvement has been demanded.

  The present invention has been made in view of such circumstances, and an object thereof is to provide a photomultiplier tube having a novel configuration to which a thermoelectric cooling element can be easily attached. Another object of the present invention is to provide a measuring apparatus including such a photomultiplier tube and a manufacturing jig that can easily manufacture such a photomultiplier tube.

  In order to solve the above problems, one embodiment of the present invention includes a main body that receives light and outputs photoelectrons corresponding to the light as a signal, and a plate-like support provided in the main body. The main body is hermetically sealed with a tubular member extending in one direction and having one end open, a heat transfer plate that closes the one end of the tubular member, and a joint portion between the heat transfer plate and the tubular member. And a cathode that is provided inside the tubular member, receives light incident on the inside of the tubular member from the outside of the tubular member, and emits photoelectrons, The heat transfer plate is thermally connected to the cathode, and the body is provided so as to penetrate the support and to expose the heat transfer plate on the first main surface side of the support. The support is made of a curable resin, and the cylindrical member, the heat transfer plate, and the Providing the photomultiplier tube is provided to cover the sealed the joint portion with a sealing material together with contact with the sealing material.

  In one aspect of the present invention, the support has a recess on the first main surface, the heat transfer plate is exposed on the bottom surface of the recess, and the recess has the first main surface. It is good also as a structure which includes all the said heat exchanger plates in the visual field which planarly viewed this.

  In one aspect of the present invention, the support is made of a first curable resin, is in contact with the cylindrical member, the heat transfer plate, and the sealing material, and is sealed with the sealing material. A first member provided to cover the joining portion; a second member made of a second curable resin; and a second member provided in contact with the first member; The elastic modulus may be lower than that of the second curable resin.

  In 1 aspect of this invention, it is good also as a structure which has the temperature sensor connected to the said heat exchanger plate.

  Further, according to one aspect of the present invention, the light-emitting unit that is supplied with the analysis sample and emits the analysis sample, the photomultiplier tube that receives light emitted from the analysis sample, and the photomultiplier tube include Provided is a measuring device having a facing member facing a support, and a thermoelectric cooling element sandwiched between the support and the facing member and in thermal contact with the heat transfer plate of the photomultiplier tube To do.

  In one aspect of the present invention, the opposing member may be a heat sink having a substrate that sandwiches the thermoelectric cooling element together with the support, and a plurality of fins provided on the substrate.

  In one aspect of the present invention, it has a blower provided at a position facing the facing member, and a controller that controls driving of the thermoelectric cooling element and the blower, and the photomultiplier tube is A temperature sensor connected to a heat transfer plate, the temperature sensor sends a detected signal to the control unit, and the control unit is based on the signal, either the thermoelectric cooling element and the blower or It is good also as a structure which controls both operation | movement.

  One embodiment of the present invention includes a container having an upper opening and a lid member that closes the opened portion of the container, and the lid member is an opening through which the main body of the photomultiplier tube can be inserted. The container and the lid member are covered with a hardly adhesive material at least when the container is closed with the lid member and the surface facing the internal space surrounded by the container and the lid member is covered. A manufacturing jig is provided.

  ADVANTAGE OF THE INVENTION According to this invention, the photomultiplier tube of the novel structure which can attach a thermoelectric cooling element easily can be provided. Further, it is possible to provide a measuring apparatus including such a photomultiplier tube and a manufacturing jig that can easily manufacture such a photomultiplier tube.

The perspective view shown about the photomultiplier tube concerning this embodiment. The top view of the photomultiplier tube in the visual field from the 1st main surface side. Sectional drawing of the photomultiplier part which shows the support body vicinity. The schematic model which shows the measuring device provided with the above-mentioned photomultiplier tube. Explanatory drawing of the jig | tool for manufacture used when manufacturing the photomultiplier tube mentioned above. Process drawing which shows the manufacturing process of the photomultiplier tube using the jig | tool for manufacture. Process drawing which shows the manufacturing process of the photomultiplier tube using the jig | tool for manufacture. Process drawing which shows the manufacturing process of the photomultiplier tube using the jig | tool for manufacture.

  Hereinafter, a photomultiplier tube, a measuring device, and a manufacturing jig according to an embodiment of the present invention will be described with reference to FIGS. In all the drawings below, the dimensions and ratios of the constituent elements are appropriately changed in order to make the drawings easy to see.

<Photomultiplier tube>
FIG. 1 is a perspective view showing a photomultiplier tube 1 according to this embodiment. The figure is a partial cross-sectional view showing a cross section of a part of the configuration.

  As shown in FIG. 1, the photomultiplier tube 1 of this embodiment has a main body 10 and a support 20. The main body 10 receives light and outputs photoelectrons corresponding to the light as signals. The support 20 is provided at one end of the main body 10. The photomultiplier tube 1 is a “side-on type” in which light enters from the side of the main body 10.

(Body)
The main body 10 includes a cylindrical member 11, a heat transfer plate 12, a sealing material 13, a photomultiplier 14, a cover 18, and a connection terminal 19.

  The cylindrical member 11 is a member that extends in one direction and is open at one end. At least a part of the cylindrical member 11 is light transmissive. For example, the cylindrical member 11 is a cylindrical member (glass tube) made of glass as a forming material. In the main body 10, the internal space of the cylindrical member 11 is evacuated.

  A heat transfer plate 12 that closes the end of the tubular member 11 is joined to one end of the tubular member 11. The heat transfer plate 12 is a disk-shaped member made of a metal material. The heat transfer plate 12 is thermally connected to a cathode (described later) housed in the tubular member 11. The surface 12a of the heat transfer plate 12 is a flat surface.

  A joint portion between the cylindrical member 11 and the heat transfer plate 12 is hermetically sealed with a sealing material 13. The sealing material 13 is provided around the side surface of the tubular member 11 while being in contact with both the tubular member 11 and the heat transfer plate 12. Examples of the forming material of the sealing material 13 include a silicone resin and an epoxy resin.

  The photomultiplier 14 is accommodated in the tubular member 11. The photomultiplier 14 includes a cathode 14a, a plurality of dynodes 14b, and an anode (not shown). In the figure, a photomultiplier of a type called a circular cage type is shown.

  The cathode 14a receives light incident on the inside of the cylindrical member 11 from the outside of the cylindrical member 11 having optical transparency, and emits photoelectrons. The emitted photoelectrons enter the dynode 14b.

  In the plurality of dynodes 14 b, semi-cylindrical members shown in the drawing and plate-like members (not shown) are alternately arranged in the circumferential direction of the inner periphery of the cylindrical member 11. The photoelectrons emitted from the cathode 14a enter the first dynode 14b, and a plurality of secondary electrons are emitted from the dynode 14b into which the photoelectrons have entered. The emitted secondary electrons enter the next arranged dynode 14b, and a plurality of secondary electrons are further emitted for each electron. In the plurality of dynodes 14b, photoelectrons are amplified by repeating the incidence of electrons and the emission of secondary electrons in this manner.

  The amplified secondary electrons (photoelectrons) converge to an anode (not shown). The anode that has received a large number of electrons collects photoelectrons and outputs them as electrical signals.

  In addition, the main body 10 is provided with a cylindrical cover 18 on the opposite side of the end of the cylindrical member 11 where the heat transfer plate 12 is provided.

  A plurality of connection terminals 19 protrude from the end portion on the side where the cover 18 is provided. The connection terminal 19 is connected to an external device. The electrical signal output from the anode is output to an external device via the connection terminal 19.

  In general, in a photomultiplier tube, the cathode that emits photoelectrons in response to input light tends to be hot. When the temperature of the cathode becomes high, noise easily enters the output electric signal and the S / N ratio tends to decrease. Therefore, the cathode is usually cooled in the photomultiplier tube.

  In the main body 10 described above, the cathode 14 a is thermally connected to the heat transfer plate 12. Therefore, even if the cathode 14a becomes high temperature, it is possible to cool the cathode 14a effectively by cooling the heat transfer plate 12.

  On the other hand, when the heat transfer plate 12 is cooled, the vicinity of the heat transfer plate 12 may be condensed. In the main body 10, the tubular member 11 and the heat transfer plate 12 are connected and integrated to form a space for accommodating the cathode 14 a, but when the vicinity of the heat transfer plate 12 is condensed, the tubular member 11 and There is a risk that moisture may enter the internal space from the connection portion with the heat transfer plate 12. In the main body 10, the connecting portion between the tubular member 11 and the heat transfer plate 12 is sealed with the sealing material 13, but because the internal space is vacuum, when condensation occurs in the vicinity of the heat transfer plate 12, Moisture easily enters the internal space, and the main body 10 is likely to be damaged.

  Further, when the thermoelectric cooling element is stably provided so as to be in contact with the surface of the heat transfer plate 12 for the purpose of cooling the heat transfer plate 12 of the main body 10, as in the conventional configuration shown in Patent Documents 1 and 2 described above. The plan view area of the thermoelectric cooling element is smaller than the plan view area of the heat transfer plate. In this case, since the contact area of the thermoelectric cooling element is smaller than the area of the heat transfer plate, the cooling of the heat transfer plate tends to be insufficient.

  As described above, when the main body 10 having the above-described configuration is used, various problems exist in cooling the heat transfer plate 12.

  On the other hand, in the photomultiplier tube 1 of this invention, the subject was solved by providing the support body 20 in the edge part by the side of the heat exchanger plate 12 of the main body 10. FIG.

(Support)
FIG. 2 is a plan view of the photomultiplier tube 1 in the field of view from the first main surface 20a side. FIG. 3 is a cross-sectional view of the photomultiplier tube 1 showing the vicinity of the support 20. In the following description of the support 20, reference is made to FIGS.

  The support 20 is a plate-like member provided at the end of the main body 10 on the heat transfer plate 12 side. In the figure, the support 20 is shown as having a substantially square shape in plan view. The main body 10 penetrates the support 20 and is provided so that the heat transfer plate 12 is exposed on the first main surface 20a side of the support 20.

  The support 20 is in contact with the tubular member 11, the heat transfer plate 12, and the sealing material 13, and covers a joint portion between the tubular member 11 and the heat transfer plate 12 sealed with the sealing material 13. Is provided. Thereby, the joint part sealed with the sealing material 13 will be further sealed with the support body 20, the airtightness of the main body 10 will increase, and the damage to the main body 10 can be suppressed.

  As shown in the figure, the support 20 has a concave portion 21 having a substantially square shape in plan view on the first main surface 20a. The heat transfer plate 12 is exposed on the bottom surface 21 a of the recess 21. The heat transfer plate 12 is exposed only on the bottom surface 21a. That is, in FIG. 2, the heat transfer plate 12 is disposed in a region surrounded by the contour line of the recess 21, and all of the heat transfer plate 12 is included in the recess 21.

  Furthermore, the support 20 has a groove 25 connecting the recess 21 and the side surface 20c of the support 20 on the first main surface 20a. As shown in FIG. 2, in the photomultiplier tube 1 of this embodiment, the support 20 is provided with two grooves 25.

  The support 20 is made of a curable resin as a forming material. Specifically, the support 20 is formed integrally with a first member 201 made of a first curable resin as a forming material and a second member 202 made of a second curable resin as a forming material.

The first member 201 is in contact with the cylindrical member 11, the heat transfer plate 12, and the sealing material 13, and covers a joint portion between the cylindrical member 11 and the heat transfer plate 12 sealed with the sealing material 13. Is provided.
The second member 202 is provided in contact with the first member 201.

  In this case, it is preferable that the elastic modulus of the first curable resin is lower than the elastic modulus of the second curable resin. By adopting such a configuration, even if the heat transfer plate 12 is heated and thermally expanded as compared with the case where the elastic modulus of the first curable resin is higher than that of the second curable resin, the first member 201 is heated. Is deformed and easily absorbs the displacement. As a result, a gap is less likely to occur at the interface between the heat transfer plate 12 and the support 20. Further, the deformation of the first member 201 makes it difficult for the displacement of the heat transfer plate 12 to be transmitted to the second member 202, and the damage of the second member 202 and the main body 10 can be suppressed.

  Furthermore, the sealing performance of the joint portion between the tubular member 11 sealed with the sealing material 13 and the heat transfer plate 12 is also improved, and the intrusion of moisture from the joint portion into the main body 10 can be suppressed.

  As the first curable resin, for example, a silicone resin, a mixture of a silicone resin and an epoxy resin, a urethane resin, or the like can be used.

  As the second curable resin, for example, an epoxy resin (system adhesive), an acrylic resin (system adhesive), or a phenol resin (system adhesive) can be used.

  Furthermore, a filler such as a fibrous filler or a plate-like filler may be mixed in each resin within a range not impairing the effects of the present invention.

  The first curable resin may be selected in consideration of the coefficient of thermal expansion of the material forming the heat transfer plate 12. That is, the amount of thermal expansion of the heat transfer plate 12 can be predicted from the coefficient of thermal expansion of the material forming the heat transfer plate 12 and the temperature assumed as the temperature of the heat transfer plate 12 in use. As the first member 201, even if the heat transfer plate 12 is thermally expanded to an assumed size, it is preferable that the first member 201 is deformed and can sufficiently absorb the displacement. As the first curable resin, a resin having an elastic modulus capable of realizing such a first member 201 may be selected.

  As the first curable resin and the second curable resin, those having low light transmittance are preferable. Moreover, when 1st curable resin and 2nd curable resin have light transmittance, you may add the additive which reduces light transmittance as needed. Alternatively, light shielding coating may be applied to the surface of the support 20.

  In addition, the support 20 is provided with a groove 22 that surrounds the body 10 in a closed ring shape in a plan view on the second main surface 20b opposite to the first main surface 20a.

  Furthermore, the support body 20 has a fixing hole 23 that penetrates the support body 20 in the same direction as the extending direction of the main body 10. In the figure, the fixing hole 23 is provided at the center of each side of the support 20 in plan view. An internal thread may be formed inside the fixing hole 23.

(Other configurations)
The photomultiplier tube 1 may have a temperature sensor 29 connected to the heat transfer plate 12. As shown in FIG. 3, the temperature sensor 29 is in contact with the side surface 12 b of the heat transfer plate 12 and is embedded in the support 20. Since the photomultiplier tube 1 includes the temperature sensor 29, the temperature of the heat transfer plate 12 can be measured and used as control information.

  FIG. 4 is a schematic diagram showing a measuring apparatus 100 including the photomultiplier tube 1 described above. As shown in the figure, the measuring apparatus 100 includes a light emitting unit 110, a photomultiplier tube 1, a thermoelectric cooling element 120, and a counter member 130. In FIG. 4, in order to make the drawing easier to see, a part of the configuration of the photomultiplier tube 1 is omitted and abbreviated.

  The measuring apparatus 100 includes a blower 140, a casing 150, a control unit 160, and a display unit 170. The measuring apparatus 100 can be used for the purpose of detecting a trace amount of chemical substances contained in the atmosphere as an analysis sample and measuring the amount of chemical substances contained in the atmosphere, for example.

  The light emitting unit 110 is supplied with the analysis sample and causes the analysis sample to emit light. A supply tube 111 is connected to the light emitting unit 110. From the supply pipe 111, a gas containing an analysis sample (for example, the atmosphere) and ozone are supplied. Inside the light emitting unit 110, the analysis sample and ozone react, and a small amount of light L generated is emitted to the photomultiplier tube 1.

  As the photomultiplier tube 1, the one described above is used. The photomultiplier tube 1 receives the light L emitted from the light emitting unit 110 and outputs the light L to the control unit 160 as an electrical signal.

  A thermoelectric cooling element (Peltier element) 120 is fitted in the recess 21 of the support 20 of the photomultiplier tube 1. Specifically, the heat absorption surface 120 a of the thermoelectric cooling element 120 is disposed so as to contact the surface 12 a of the heat transfer plate 12 exposed in the recess 21. Thereby, the heat exchanger plate 12 of the photomultiplier tube 1 can be cooled effectively. The wiring connected to the thermoelectric cooling element 120 is accommodated in the groove 25 of the support 20 and is preferably routed from the recess 21 to the outside of the recess 21.

  On the first main surface 20a side of the support 20 of the photomultiplier tube 1, a counter member 130 is provided. The facing member 130 is in thermal contact with at least the heat generating surface 120b of the thermoelectric cooling element 120 and supports the thermoelectric cooling element 120.

  The facing member 130 has a through hole 130a through which a fixture (bolt) 139 is inserted. The through hole 130 a is provided at a position corresponding to the fixing hole 23 of the support 20. An internal thread may be formed inside the through hole 130a.

  The fixing tool 139 is inserted into the through hole 130 a and is inserted into the fixing hole 23 of the support body 20, and the support body 20 and the opposing member 130 are screwed together. For example, as shown in FIG. 4, when the fixture 139 is inserted and screwed from the facing member 130 side, a female screw is formed inside the fixing hole 23 of the support 20, and the fixture 139 is a male screw. The internal thread of the fixing hole 23 may be engaged with and screwed. Further, when the fixture 139 is inserted and screwed from the second main surface 20b side of the support body 20, a female screw is formed inside the through hole 130a of the facing member 130, and the fixture 139 that is a male screw penetrates the fastener 139. It is preferable that the female screw inside the hole 130a is engaged and screwed. Thereby, the thermoelectric cooling element 120 can be clamped between the support body 20 and the opposing member 130, and can be fixed easily.

  In addition, when the support body 20 and the opposing member 130 are screwed together by the fixing tool 139, it is assumed that the support body 20 is deformed by a tightening force. In such a case, in order to reinforce the support 20, a reinforcing plate such as a metal plate material may be provided on the second main surface 20 b of the support 20.

  In addition, a nut may be separately prepared without providing a female screw inside the fixing hole 23 or the through hole 130a, and the support 20 and the opposing member 130 may be screwed together using the nut and the fixture 139. .

  The facing member 130 is preferably a heat sink having a substrate 131 that sandwiches the thermoelectric cooling element 120 together with the support 20 and a plurality of fins 132 provided on the substrate 131. Thereby, the heat generating surface 120b of the thermoelectric cooling element 120 can be cooled, and the cooling effect of the heat transfer plate 12 of the photomultiplier tube 1 by the thermoelectric cooling element 120 can be enhanced.

  The blower 140 is provided at a position facing the facing member 130. The blower 140 sends the wind W to the facing member 130 that is a heat sink to cool the facing member 130 with air.

  The housing 150 has light shielding properties and is fitted in the groove 22 of the support 20. By fitting the housing 150 into the groove 22, it becomes difficult for light to enter the measuring device 100 from the connection surface between the housing 150 and the support 20. Thereby, it becomes easy to reduce the light quantity of the background which the photomultiplier tube 1 detects, and it can improve a measurement precision.

  For example, the photomultiplier tube 1, the temperature sensor 29, the thermoelectric cooling element 120, and the blower 140 are connected to the control unit 160. The control unit 160 controls each component based on a signal sent from each component or an instruction input from an external input unit (not shown).

  For example, based on a signal sent from the temperature sensor 29, the control unit 160 controls the operation of the thermoelectric cooling element 120 and the blower 140 so that the heat transfer plate 12 can be cooled more easily when the heat transfer plate 12 is hot. On the contrary, the control unit 160 controls the operation of the thermoelectric cooling element 120 and the blower 140 so as to suppress cooling when the heat transfer plate 12 is at a low temperature. Thereby, appropriate temperature management becomes possible according to the temperature of the heat transfer plate 12.

  Further, the control unit 160 calculates the amount of the analysis sample based on the electrical signal supplied from the photomultiplier tube 1 and outputs it to the display unit 170.

(Manufacturing jig)
FIG. 5 is an explanatory diagram of a manufacturing jig 50 used when manufacturing the photomultiplier tube 1 described above. 5A is a schematic perspective view of the manufacturing jig 50, and FIG. 5B is a cross-sectional view taken along line Vb-Vb in FIG. 5A. The manufacturing jig 50 is a mold for the support 20 of the photomultiplier tube 1 and has a shape complementary to the support 20.

  As shown in FIGS. 5A and 5B, the manufacturing jig 50 includes a container 51 whose top is opened and a lid member 52 that closes the opened portion of the container 51. The lid member 52 is provided with an opening 521 through which the main body 10 of the photomultiplier tube 1 can be inserted.

  When the container 51 and the lid member 52 are closed with at least the lid member 52, the surface facing the internal space surrounded by the container 51 and the lid member 52 is covered with a material called “hardly adhesive material”. ing. Since manufacture is easy, it is preferable that the container 51 and the lid | cover material 52 use a difficult-to-adhere material as a forming material.

Here, the “hardly adhesive material” refers to a material having a low surface energy or a material having a low surface activity.
Examples of the hardly adhesive material that can be used as a material for forming the container 51 and the lid member 52 of the present embodiment include PTFE (polytetrafluoroethylene), PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer), PVDF (polyvinylidene). Fluororesin such as fluoride), POM (polyacetal), PA (polyamide), PC (polycarbonate), PEEK (polyetheretherketone), PPS (polyphenylene sulfide), PET (polyethylene terephthalate), and silicone resin. .

  The container 51 has a convex portion 511 on the bottom surface 51 a facing the internal space surrounded by the container 51 and the lid material 52 when the container 51 is closed with the lid material 52. The convex portion 511 has a substantially rectangular parallelepiped shape or a truncated pyramid shape. Further, between the convex portion 511 and the side wall of the container 51, a convex strip portion 513 having both ends in contact with the convex portion 511 and the side wall of the container 51 is provided.

  The convex portion 511 is provided at a position that overlaps the opening 521 when the container 51 is closed by the lid member 52. The shape of the convex portion 511 corresponds to the shape of the concave portion 21 of the support 20. Further, the shape of the ridge portion 513 corresponds to the shape of the groove 25 of the support 20.

  The convex portion 511 has a shape similar to that of the thermoelectric cooling element 120 in plan view. Further, the planar view area of the convex portion 511 is equal to or larger than the planar view area of the thermoelectric cooling element 120. The top surface 511a of the convex portion 511 is a flat surface.

  The container 51 has a plurality of height controllers 512 on the bottom surface 51a. The height controller 512 is provided at a position that does not overlap the opening 521 when the container 51 is closed by the lid member 52. The height control unit 512 supports the lid member 52 with the top surface 512 a and defines the thickness of the support 20. The height H of the height control unit 512 corresponds to the thickness of the support 20.

  The height controller 512 is a columnar structure provided at the center of each side of the bottom surface 51a. When the container 51 is closed by the lid member 52, the height controller 512 abuts on the first surface 52a of the lid member 52 facing the container 51, and controls the height of the internal space.

  The height control unit 512 is more preferably cylindrical. The height control unit 512 corresponds to the fixing hole 23 of the support 20 shown in FIG.

  The height control unit 512 may be solid, but preferably has a through hole 512b that penetrates from the back surface 51b of the bottom of the container 51 to the top surface 512a of the height control unit 512, as shown in FIG. . It is preferable that a female screw is formed inside the through hole 512b.

  On the first surface 52 a of the lid member 52, a closed annular ridge 52 b is provided. The protruding portion 52 b is provided at a position that does not interfere with the height control portion 512 when the container 51 is closed with the lid member 52. The protruding portion 52 b corresponds to the groove 22 of the support 20.

  FIGS. 6-8 is process drawing which shows the manufacturing process of the photomultiplier tube 1 using the jig | tool 50 for manufacture. 6-8, each figure (a) respond | corresponds to Fig.5 (a), and each figure (b) respond | corresponds to FIG.5 (b).

  First, as shown in FIGS. 6A and 6B, the main body 10 in which the first member 201 is previously formed around the sealing material 13 using the first curable resin described above is inserted from the opening 521. . Specifically, the main body 10 is placed on the convex portion 511 so that the surface 12 a of the heat transfer plate 12 is in contact with the top surface 511 a of the convex portion 511.

  Next, as shown in FIGS. 7A and 7B, the second curable resin is poured into the internal space of the manufacturing jig 50 from the opening 521 and cured to form the second member 202. At that time, the relative position between the main body 10 and the manufacturing jig 50 may be fixed with another jig so that the mounted main body 10 is not displaced.

  Next, as shown in FIGS. 8A and 8B, a bolt 59 is inserted from the back surface 51 b of the container 51 into the through hole 512 b, and the lid member 52 is pushed up by the bolt 59. Thereby, the cover material 52 can be easily removed. Further, the support 20 is taken out from the container 51.

  A recessed portion 21 is formed in the extracted support 20 at a position corresponding to the projected portion 511. In addition, a fixing hole 23 that is a through hole is formed at a position corresponding to the height control unit 512. In addition, a groove 25 is formed at a position corresponding to the ridge portion 513.

  Since the inside of the fixing hole 23 is a smooth cylindrical curved surface to which the shape of the outer surface of the height control unit 512 is transferred, an internal thread may be formed as necessary.

  As described above, the target photomultiplier tube 1 can be manufactured.

  Even if the second curable resin is cured inside the manufacturing jig 50 because the surface of the manufacturing jig 50 is made of a hardly adhesive material such as tetrafluoroethylene, the second curable resin is It is not firmly fixed to the manufacturing jig 50 and can be easily removed.

  In addition, in order to make it easy to take out the support 20 from the container 51, at least a part of the side wall of the container 51 may be removable.

  According to the photomultiplier tube 1 having the above configuration, a photomultiplier tube having a novel configuration to which the thermoelectric cooling element 120 can be easily attached is obtained.

  Moreover, according to the measuring apparatus 100 having the above-described configuration, since the photomultiplier tube 1 is provided, the cathode can be easily cooled by the thermoelectric cooling element 120, and high-precision measurement with less noise is possible. .

  Moreover, according to the manufacturing jig 50 having the above configuration, the photomultiplier tube 1 as described above can be easily manufactured.

  In addition, in this embodiment, although the support body 20 decided to have the recessed part 21, it is not restricted to this. Even without the recess 21, the thermoelectric cooling element 120 can be sandwiched between the support 20 and the facing member 130, and the thermoelectric cooling element 120 can be easily fixed.

  In the present embodiment, the support 20 is composed of the first member 201 having the first curable resin as the forming material and the second member 202 having the second curable resin as the forming material. Not limited to this. The support 20 may be formed of only one type of resin material.

  In the present embodiment, the support 20 is provided with the groove 22 and the housing 150 is fitted into the groove 22. However, the groove 22 may not be formed.

  Moreover, in this embodiment, although the groove | channel 25 was provided in the support body 20, the groove | channel 25 does not need to be formed.

  In this embodiment, as shown in FIGS. 6A and 6B, when the photomultiplier tube 1 is manufactured, the body 51 is closed with the lid 52 in the container 51 of the manufacturing jig 50. However, the present invention is not limited to this. The main body 10 may be erected on the top surface 511a of the convex portion 511 of the container 51 without using the lid material 52, and the lid material 52 may be covered after filling the inside of the container 51 with the second curable resin. When manufacturing in this order, it is easy to fill the second curable resin into every corner of the container 51.

  The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but it goes without saying that the present invention is not limited to such examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Photomultiplier tube, 10 ... Main body, 51 ... Container, 11 ... Cylindrical member, 12 ... Heat-transfer plate, 12a ... Surface, 13 ... Sealing material, 14a ... Cathode, 20 ... Support body, 20a ... 1st Main surface, 20b ... second main surface, 21 ... concave, 21a, 51a ... bottom surface, 22 ... groove, 23 ... fixing hole, 25 ... groove, 29 ... temperature sensor, 50 ... manufacturing jig, 51b ... back surface, 52 DESCRIPTION OF SYMBOLS ... Cover material, 100 ... Measuring apparatus, 110 ... Light emission part, 120 ... Thermoelectric cooling element, 130 ... Opposing member, 130a, 512b ... Through-hole, 131 ... Substrate, 132 ... Fin, 201 ... First member, 202 ... Second Member 511a, 512a ... Top surface, 511 ... Convex part, 512 ... Height control part, 513 ... Convex line part, 521 ... Opening part, L ... Light

Claims (8)

A main body that receives light and outputs photoelectrons corresponding to the light as a signal;
A plate-like support provided on the main body,
The main body extends in one direction and is open at one end;
A heat transfer plate for closing the one end of the tubular member;
A sealing material that hermetically seals a joint portion between the heat transfer plate and the tubular member;
A cathode that is provided inside the cylindrical member, receives light incident on the cylindrical member from the outside of the cylindrical member, and emits photoelectrons;
The heat transfer plate is thermally connected to the cathode;
The main body is provided so as to penetrate the support and to expose the heat transfer plate on the first main surface side of the support.
The support body is provided with a curable resin as a forming material, and is in contact with the tubular member, the heat transfer plate, and the sealing material, and covers the joint portion sealed with the sealing material. Photomultiplier tube. The support has a recess in the first main surface,
The heat transfer plate is exposed on the bottom surface of the recess,
2. The photomultiplier tube according to claim 1, wherein the recess includes all of the heat transfer plate in a field of view when the first main surface is viewed in plan. The support is provided using the first curable resin as a forming material, and is in contact with the cylindrical member, the heat transfer plate, and the sealing material, and covers the joint portion sealed with the sealing material. A first member,
A second curable resin as a forming material, and a second member provided in contact with the first member;
The photomultiplier tube according to claim 1 or 2, wherein an elastic modulus of the first curable resin is lower than an elastic modulus of the second curable resin.   The photomultiplier tube according to any one of claims 1 to 3, further comprising a temperature sensor connected to the heat transfer plate. A light-emitting unit that is supplied with the analysis sample and emits the analysis sample;
The photomultiplier tube according to any one of claims 1 to 4, which receives light emitted from the analysis sample;
An opposing member facing the support of the photomultiplier tube;
A thermoelectric cooling element sandwiched between the support and the opposing member and having a thermoelectric cooling element in thermal contact with the heat transfer plate of the photomultiplier tube. The opposing member includes a substrate that sandwiches the thermoelectric cooling element together with the support,
The measurement apparatus according to claim 5, wherein the measurement apparatus is a heat sink having a plurality of fins provided on the substrate. A blower provided at a position facing the facing member;
A controller that controls driving of the thermoelectric cooling element and the blower,
The photomultiplier tube has a temperature sensor connected to the heat transfer plate,
The temperature sensor sends the detected signal to the control unit,
The measurement device according to claim 5 or 6, wherein the control unit controls the operation of one or both of the thermoelectric cooling element and the blower based on the signal. A manufacturing jig used for manufacturing the photomultiplier tube according to any one of claims 1 to 4,
A container with an open top;
A lid that closes the opened portion of the container,
The lid member has an opening through which the main body of the photomultiplier tube can be inserted;
The container and the lid member are manufactured for manufacturing, in which a surface facing an internal space surrounded by the container and the lid member is covered with a hardly adhesive material when the container is closed with at least the lid member. Ingredients.

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