JP2018001386A - Peeling tool for turn table cloth - Google Patents

Abstract

A turntable cloth peeling jig capable of easily peeling a cloth from a turntable is provided. A turntable cloth peeling jig (10) has a cylindrical shape and is arranged inside a winding cylinder (11) having a slit extending in the axial direction of the cylinder formed on the outer circumference of the cylinder (11). A cloth clamping member 12 for clamping the outer peripheral edge of the cloth inserted into the slit; an extension bar 13 attached to one end of the winding cylinder 11 so as to extend coaxially; an engaging portion 14 that engages with a rotating jig 15 for rotating the winding cylinder 11; and a handle 16 of the [Selection diagram] Fig. 1

Description

  The present invention relates to a turntable cloth peeling jig used to peel a cloth attached to a turntable.

  In the manufacturing process of a semiconductor wafer, a polishing apparatus is used to flatten and mirror the surface of the semiconductor wafer. This type of polishing apparatus has a turntable and a top ring that rotate at independent rotation speeds. The surface of a semiconductor wafer held on the top ring is a surface of a cloth (polishing surface) affixed on the turntable. This is polished while supplying the abrasive liquid.

  By the way, the cloth on the turntable is firmly bonded onto the turntable so that the cloth is not peeled off when the semiconductor wafer is polished. For this reason, when the cloth is worn and needs to be replaced with a new cloth, a strong force is required to peel off the cloth.

  Patent Documents 1 and 2 disclose conventional turntable cloth peeling jigs. In this peeling jig, a winding cylinder is rotated using a ratchet handle.

Japanese Patent Laid-Open No. 10-217148 Japanese Patent Laid-Open No. 10-217149

  However, in the conventional peeling jigs disclosed in Patent Documents 1 and 2, since the ratchet handle is directly engaged with one end of the winding cylinder at least when the winding of the cross is started, the ratchet hand is used in the polishing room. Will be placed inside. Since a large number of peripheral devices such as a dresser, an atomizer, a top ring, and an abrasive nozzle are installed in the polishing room in advance, the ratchet handle may interfere with the peripheral devices when the ratchet handle is swung.

  Therefore, with the conventional peeling jig, if the cloth is peeled until just before the ratchet handle interferes with the peripheral device, the turntable is rotated until the ratchet handle does not interfere with the peripheral device, and the ratchet handle interferes with the peripheral device. It was necessary to repeat the work of peeling off the turntable cloth until just before, and the work was complicated.

  Also, in order to support the winding cylinder from swinging or tilting when swinging the ratchet handle, the adhesive surface of the turntable cloth wound around the winding cylinder is attached to the hand holding the ratchet handle. There was no other way than holding it with the opposite hand, and the glove fitted in that hand stuck to the adhesive surface, making it difficult to work.

  The present invention has been made in consideration of the above points. The objective of this invention is providing the peeling jig | tool of the cloth for turntables which can peel a cloth easily from a turntable.

The peeling jig for the turntable cloth according to the present invention is:
A winding cylinder having a cylindrical shape and having a slit formed on its outer periphery extending in the axial direction of the cylinder;
A cross clamping member that is disposed inside the winding cylinder and clamps an outer peripheral edge of the cloth inserted into the slit;
An extension bar attached to one end of the winding cylinder so as to extend coaxially;
An engaging portion that is provided at a distal end portion of the extension bar and engages with a rotating jig for rotating the winding cylinder;
A handle provided to the engaging portion for supporting the winding cylinder when rotating the rotating jig;
Is provided.

  According to the present invention, when rotating the rotating jig, by supporting the handle with the hand opposite to the hand having the rotating jig, without touching the adhesive surface of the cloth wound around the winding cylinder, The posture and position of the winding cylinder can be kept constant. Accordingly, the cloth can be easily peeled off from the turntable without the winding cylinder swinging or tilting due to the rotation of the rotating jig. In addition, since the rotating jig and the handle are attached to the distal end portion of the extension bar, when rotating the rotating jig, they can be protruded outside the polishing room. In this case, the rotating jig can be rotated without interfering with peripheral devices in the polishing room to continuously peel off the cloth, and the work of rotating the turntable many times in the middle becomes unnecessary.

  In the turntable cloth peeling jig according to the present invention, the engaging portion may be a geared wrench that reduces the rotational torque of the rotating jig.

  According to such an aspect, the force required to rotate the rotating jig is reduced, and the cloth can be more easily and reliably peeled from the turntable.

  In the turntable cloth peeling jig according to the present invention, the cloth holding member includes an upper member and a lower member for holding the outer peripheral edge of the cloth from above and below, and surfaces of the upper member and the lower member facing each other. May be provided with teeth that can mesh with each other.

  According to such an aspect, the cloth is firmly fixed to the cloth clamping member by being sandwiched between the teeth of the upper member and the teeth of the lower member, and the cloth is crossed during the rotation of the winding cylinder. It can prevent falling off from the clamping member.

  In the turntable cloth peeling jig according to the present invention, the cloth holding member includes an upper member and a lower member for holding the outer peripheral edge of the cloth from above and below, and either the upper member or the lower member. The pin may be provided with a pin that pierces the cross when the outer peripheral edge of the cross is sandwiched, and a pin insertion hole into which the pin is inserted may be formed on the other.

  According to such an aspect, since the pin breaks through the cross, the cross is firmly fixed to the cross holding member, and the cross can be prevented from falling off the cross holding member during the rotation of the winding cylinder.

  In the turntable cloth peeling jig according to the present invention, the axial length of the extension bar may be longer than the axial length of the winding cylinder.

  ADVANTAGE OF THE INVENTION According to this invention, the peeling jig | tool of the cloth for turntable which can peel a cloth easily from a turntable can be provided.

FIG. 1 is a schematic view showing a state in which a peeling jig according to an embodiment of the present invention is arranged on a turntable. FIG. 2 is an exploded perspective view of the peeling jig shown in FIG. FIG. 3 is an enlarged perspective view showing a cross holding member of the peeling jig shown in FIG. FIG. 4 is a longitudinal sectional view of the cloth holding member shown in FIG. FIG. 5 is an enlarged perspective view showing a winding cylinder of the peeling jig shown in FIG. FIG. 6 is a perspective view of the winding cylinder shown in FIG. 5 as seen from different angles. FIG. 7 is an internal front view showing a state in which a cross clamping member is arranged inside the winding cylinder. FIG. 8 is an internal side view showing a state in which the cross clamping member is arranged inside the winding cylinder. FIG. 9 is a schematic diagram for explaining a method of using the peeling jig shown in FIG. FIG. 10 is a schematic diagram for explaining a method of using the peeling jig shown in FIG.

  Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Note that, in the drawings attached to the present specification, for the sake of easy understanding of the drawings, the scale and the vertical / horizontal dimension ratio are appropriately changed and exaggerated from those of the actual ones.

  FIG. 1 is a schematic view showing a state in which a peeling jig according to an embodiment of the present invention is arranged on a turntable. FIG. 2 is an exploded perspective view of the peeling jig shown in FIG.

  As shown in FIGS. 1 and 2, the peeling jig 10 includes a winding cylinder 11 having a cylindrical shape, a cross clamping member 12 disposed inside the winding cylinder 11, and one end of the winding cylinder 11. The attached extension bar 13, the engaging part 14 provided at the tip of the extension bar 13, a rotating jig 15 that engages with the engaging part 14, and a handle 16 are provided. Hereinafter, each component will be described.

  FIG. 3 is an enlarged perspective view showing the cross holding member 12. FIG. 4 is a longitudinal sectional view of the cross clamping member 12.

  As shown in FIGS. 3 and 4, the cross clamping member 12 includes an upper member 21 and a lower member 22, and two fixing screws 23 and 24 for fixing the upper member 21 and the lower member 22. .

  Of these, the upper member 21 is made of metal and has an elongated flat plate shape, and through holes 21c through which the fixing screws 23 and 24 are inserted are formed in the vicinity of both ends in the longitudinal direction. Further, a sandwiching portion 21 a that protrudes in a tongue-like shape is provided at the center of one side of the upper member 21. Teeth 21b made up of a number of parallel concave and convex grooves are formed on the lower surface of the sandwiching portion 21a. Further, a confirmation hole 25 penetrating vertically is formed in the center of the upper surface of the sandwiching portion 21a.

  On the other hand, the lower member 22 is made of metal and has an elongated flat plate shape, and screwing holes 22c to be screwed with the fixing screws 23 and 24 are formed in the vicinity of both ends in the longitudinal direction. Further, a sandwiching portion 22 a that protrudes in a tongue-like shape is provided at the center of one side of the lower member 22. Teeth 22b made up of a number of parallel concave and convex grooves are formed on the upper surface of the sandwiched portion 22a. The teeth 21b of the upper member 21 and the teeth 22b of the lower member 22 can be engaged with each other.

  In the illustrated example, the fixing screws 23 and 24 are formed in a so-called thumbscrew type so that their heads can be directly rotated by fingers.

  FIG. 5 is an enlarged perspective view showing the winding cylinder 11. 6 is a perspective view of the winding cylinder 11 as seen from an angle different from that in FIG. FIG. 7 is an internal front view showing a state in which the cross clamping member 12 is disposed inside the winding cylinder 11. FIG. 8 is an internal side view showing a state in which the cross clamping member 12 is disposed inside the winding cylinder 11.

  As shown in FIGS. 5 to 8, the take-up cylinder 11 is made of metal and has a cylindrical shape, and an internal cavity thereof has an inner diameter capable of accommodating the cross clamping member 12.

  On the outer periphery of the winding cylinder 11, one long slit 11 a extending along the axial direction of the cylinder is formed. In addition, a rectangular hole-shaped extension bar mounting portion 11 b is provided at the central portion of one end surface of the winding cylinder 11.

  As shown in FIGS. 1 and 2, the extension bar 13 is made of metal and has a bar shape, and is attached to the extension bar attaching portion 11 b of the winding cylinder 11 so as to extend coaxially. In the illustrated example, the length of the extension bar 13 is longer than the length in the longitudinal direction of the winding cylinder 11, and when the winding cylinder 11 is positioned at the center of the turntable 51, the tip of the extension bar 13 is the polishing room 52. (See FIG. 1).

  An engaging portion 14 that engages with a rotating jig 15 for rotating the winding cylinder 11 is provided at the distal end portion of the extension bar 13.

  In the present embodiment, a geared wrench (also referred to as a power wrench or a booster wrench) having a planetary gear mechanism is used as the engaging portion 14 so that the rotational torque of the rotating jig 15 can be reduced. Yes. The gear reduction ratio is 4, for example.

  Specifically, for example, a ratchet handle is used as the rotating jig 15. Hereinafter, the “ratchet handle” may be described with reference numeral 15.

  As shown in FIGS. 1 and 2, the engaging portion 14 is provided with a handle 16 for supporting the take-up cylinder 11 when the ratchet handle 15 is swung.

  Next, the usage method of the peeling jig | tool 10 which consists of such a structure is demonstrated.

  First, as shown in FIG. 9, the door 53 of the polishing room 52 of the polishing apparatus 50 is opened, and a part of the outer peripheral edge of the disc-shaped cross 55 attached to the upper surface of the turntable 51 is slightly peeled off. It is. The part where the cloth 55 is peeled off is sandwiched between the teeth 21b of the upper member 21 and the teeth 22b of the lower member 22 of the cloth holding member 12 (see FIGS. 3 and 4).

  Next, the fixing screws 23, 24 are inserted into the through holes 21 c of the upper member 21 and screwed into the screwing holes 22 c of the lower member 22, so that between the teeth 21 b of the upper member 21 and the teeth 22 b of the lower member 22. The cross 55 is firmly sandwiched between the two. At this time, both the clamping part 21a of the upper member 21 and the clamping part 22a of the lower member 22 protrude from the attachment positions of the fixing screws 23 and 24 toward the cross 55, so that the length dimension of the cross clamping member 12 is, for example, Even if the length is shortened, the cross 55 does not contact the fixing screws 23 and 24 and cannot be sufficiently inserted between the clamping portion 21a of the upper member 21 and the clamping portion 22a of the lower member 22, and the clamping is ensured. Can be done.

  Further, as shown in FIG. 3, since the clamped cross 55 can be seen from the confirmation hole 25 formed in the upper member 21, it is immediately determined how much the cross 55 is inserted into the cross clamp member 12. can do.

  Next, the cross holding member 12 that holds the cross 55 is inserted into the take-up cylinder 11. At this time, the cross 55 is inserted into the slit 11 a of the winding cylinder 11.

  As described above, the outer peripheral edge of the cloth 55 is fixed to the cloth holding member 12, and the work of setting the cloth holding member 12 in the take-up cylinder 11 is performed on the cloth on the front side of the operator as shown in FIG. It may be performed, or may be performed on the cross on the other side of the worker (not shown). As shown in FIG. 9, it is better to work on the cloth on the near side of the worker.

  Next, the turntable 51 is rotated in the direction of arrow A in FIG. 9, and one end of the winding cylinder 11 on the extension bar mounting portion 11 b side is directed to the opened door 53 side. Then, as shown in FIG. 10, the extension bar 13 is inserted into the polishing room 52 and attached to the extension bar attaching portion 11 b of the winding cylinder 11. At this time, the engaging portion 14 at the distal end of the extension bar 13 protrudes outside the polishing room 52, and the handle 16 and the ratchet handle 15 attached to the engaging portion 14 are connected to the polishing room. 52 is positioned outside.

  Next, when the ratchet handle 15 is swung with the other hand while the handle 16 is supported by one hand, the winding cylinder 11 is rotated in one direction (the direction of arrow B in FIG. 10), and the winding is performed. A cross 55 is wound around the outer periphery of the cylinder 11. This operation can be easily and reliably performed with a weak force by the lever principle.

  By the way, as mentioned in the column of the problem to be solved by the invention, in the conventional peeling jig, the ratchet handle is directly engaged with one end of the winding cylinder at least at the start of winding. There is a possibility that the ratchet handle may interfere with peripheral devices when swinging. Therefore, with the conventional peeling jig, if the cross is peeled until just before the ratchet handle interferes with the peripheral device, the turntable is rotated until the ratchet handle does not interfere with the peripheral device, and the ratchet handle interferes with the peripheral device. It was necessary to repeat the work of peeling off the turntable cloth until just before, and the work was complicated.

  Further, in the conventional peeling jig, in order to support the winding cylinder so that it does not swing or tilt when the ratchet handle is swung, the adhesive surface of the turntable cloth wound around the winding cylinder is used. There was no other way than to hold it with the hand opposite to the hand holding the ratchet handle, and the gloves fitted in that hand stuck to the adhesive surface, making it difficult to work.

  On the other hand, according to the present embodiment, when the ratchet handle 15 is swung, the cross 55 wound around the winding cylinder 11 is supported by supporting the handle 16 with a hand opposite to the hand holding the ratchet handle 15. The posture and position of the take-up cylinder 11 can be kept constant without touching the adhesive surface. Thereby, the cross 55 can be easily peeled off from the turntable 51 without the take-up cylinder 11 swinging or tilting due to the swinging of the ratchet handle 15.

  Further, according to the present embodiment, since the ratchet handle 15 and the handle 16 are provided at the distal end portion of the extension bar 13, when the ratchet handle 15 is swung, they are protruded outside the polishing room 52. It is possible to keep. In this case, the ratchet handle 15 can be swung without interfering with peripheral devices in the polishing room 52, and the cloth 55 can be continuously peeled off. It becomes unnecessary.

  Further, according to the present embodiment, since the engaging portion 14 is a geared wrench that reduces the rotational torque of the ratchet handle 15, the force required to turn the ratchet handle 15 is reduced, and the turntable 51 is crossed to the cross 55. Can be more easily and reliably peeled off.

  Further, according to the present embodiment, the cross 55 is sandwiched between the teeth 21b of the upper member 21 of the cross clamping member 12 and the teeth 22b of the lower member 22, so that the cross 55 is firmly attached to the cross clamping member 12. It is fixed, and it is possible to prevent the cloth 55 from falling off the cloth holding member 12 during the rotation of the winding cylinder 11.

  As mentioned above, although embodiment of this invention was described in detail, this invention is not limited to this embodiment, For example, the following modifications are possible.

  In the embodiment described above, the teeth 21b and 22b made of concave and convex grooves are provided on the clamping portions 21a and 22a of the upper member 21 and the lower member 22, respectively. Instead, when the outer peripheral edge of the cross 55 is clamped on one side A pin for breaking through the cross 55 may be provided, and a pin insertion hole into which the pin is inserted may be formed on the other side. Further, it may be a sandwiching surface having another structure (for example, a member having a friction surface is attached), and in some cases, the teeth 21b and 22b, pins, and the like made of uneven grooves may not be provided.

  In the above embodiment, the cross clamping member 12 and the take-up cylinder 11 are separate members, but they may be integrated. That is, for example, two adjacent tongue pieces are protruded from the inner peripheral surface of the winding cylinder, the end of the cross inserted through the slit is sandwiched between the tongue pieces, and then the tongue pieces are pressed together with screws or the like. You may do it.

  In the embodiment described above, the cloth holding member 12 and the take-up cylinder 11 are both made of metal, but may be made of a material other than metal.

  In the above embodiment, the thumbscrews are used as the fixing screws 23 and 24, but it goes without saying that screws having other shapes may be used. The upper member 21 and the lower member 22 are not necessarily fixed by the fixing screws 23 and 24, but may be other fixing means such as bolts and nuts. Further, if one end of the upper member 21 and the lower member 22 has a hinge structure, one fixing screw 23, 24 may be attached to the opposite side of the hinge structure.

  In the above embodiment, the ratchet handle is used as a rotating jig for rotating the winding cylinder 11. However, a rotating jig having another shape structure such as a circular handle may be used.

  Moreover, in the said embodiment, although the peeling jig | tool 10 was used in order to peel the cloth 55 for turntables, you may use it in order to peel a vinyl flooring and a wallpaper cloth.

DESCRIPTION OF SYMBOLS 10 Separation jig 11 Winding cylinder 11a Slit 11b Extension bar attaching part 12 Cross clamping member 13 Extension bar 14 Engagement part 15 Ratchet handle (rotating jig)
16 handle 21 upper member 21a clamping part 21b tooth 21c screwing hole 22 lower member 22a clamping part 22b tooth 22c screwing hole 23 fixing screw 24 fixing screw 25 confirmation hole 50 polishing apparatus 51 turntable 52 polishing room 53 door 55 cross

Claims (5)

A winding cylinder having a cylindrical shape and having a slit formed on its outer periphery extending in the axial direction of the cylinder;
A cross clamping member that is disposed inside the winding cylinder and clamps an outer peripheral edge of the cloth inserted into the slit;
An extension bar attached to one end of the winding cylinder so as to extend coaxially;
An engaging portion that is provided at a distal end portion of the extension bar and engages with a rotating jig for rotating the winding cylinder;
A handle provided to the engaging portion for supporting the winding cylinder when rotating the rotating jig;
A turntable cloth peeling jig characterized by comprising: 2. The turntable cloth peeling jig according to claim 1, wherein the engaging portion is a geared wrench that reduces the rotational torque of the rotating jig. The cross clamping member has an upper member and a lower member that clamp the outer peripheral edge of the cross from above and below,
The turntable cloth peeling jig according to claim 1 or 2, wherein teeth that can mesh with each other are provided on surfaces of the upper member and the lower member that face each other. The cross clamping member has an upper member and a lower member that clamp the outer peripheral edge of the cross from above and below,
One of the upper member and the lower member is provided with a pin that pierces the cross when the outer peripheral edge of the cross is sandwiched, and the other has a pin insertion hole into which the pin is inserted. The stripping jig for a turntable cloth according to any one of claims 1 to 3. 5. The turntable cloth peeling jig according to claim 1, wherein an axial length of the extension bar is longer than an axial length of the take-up cylinder.