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JP2018096729A - Sensor coil unit for position detection device - Google Patents

Sensor coil unit for position detection device Download PDF

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Publication number
JP2018096729A
JP2018096729A JP2016238967A JP2016238967A JP2018096729A JP 2018096729 A JP2018096729 A JP 2018096729A JP 2016238967 A JP2016238967 A JP 2016238967A JP 2016238967 A JP2016238967 A JP 2016238967A JP 2018096729 A JP2018096729 A JP 2018096729A
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Prior art keywords
coil
magnetic core
coil unit
detection circuit
sensor
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高橋 司
Tsukasa Takahashi
司 高橋
加藤 剛
Takeshi Kato
剛 加藤
信章 五来
Nobuaki Gorai
信章 五来
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Hitachi Astemo Ltd
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Hitachi Automotive Systems Ltd
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Abstract

【課題】 本発明は、実装面積の省スペース化によって、回転角及び位置検出装置のセンサのコイルユニットの小型化を実現するものである。【解決手段】本発明のコイルユニットは、側面もしくは磁性体コア中央の開口部より、コイル線もしくは端子付コイル線等を引き回して内側方向から、検出回路の入力段(端子、パッド等の検出回路へのコイル出力の入力接点)へ接続した実装構造とする。【選択図】図1An object of the present invention is to reduce the size of a coil unit of a sensor of a rotation angle and position detection device by reducing the mounting area. In the coil unit of the present invention, a coil wire or a coil wire with a terminal or the like is routed from the side surface or the opening in the center of the magnetic core, and the input stage of the detection circuit (detection circuit such as terminals, pads, etc.) is routed from the inside direction. The mounting structure is connected to the input contact of the coil output to ). [Selection drawing] Fig. 1

Description

本発明は回転軸の角度位置と径方向位置を計測するためのセンサを備えた測定システム及びそれを備えた磁気軸受、同期モータに係わり、特に能動形磁気軸受を使用する高速回転機に好適な測定システム及びそれを備えた磁気軸受、同期モータに関する。   The present invention relates to a measurement system including a sensor for measuring the angular position and the radial position of a rotating shaft, a magnetic bearing including the sensor, and a synchronous motor, and is particularly suitable for a high-speed rotating machine using an active magnetic bearing. The present invention relates to a measurement system, a magnetic bearing including the measurement system, and a synchronous motor.

能動形磁気軸受を有し、同期モータで駆動される高速回転機には回転軸の6つの自由度に対応して、6つのセンサが必要である。一つは同期モータのための回転角センサであり、残りの5つは磁気軸受のための変位センサである。通常、磁気軸受用の変位センサとしては渦電流式、あるいは誘導形のギャップセンサが用いられる。同期モータ用の回転角センサとしては、レゾルバ、光学センサ、誘導センサ、容量センサ、磁気抵抗センサが用いられる。   A high-speed rotating machine having an active magnetic bearing and driven by a synchronous motor requires six sensors corresponding to the six degrees of freedom of the rotating shaft. One is a rotation angle sensor for a synchronous motor, and the remaining five are displacement sensors for a magnetic bearing. Usually, an eddy current type or inductive gap sensor is used as a displacement sensor for a magnetic bearing. As the rotation angle sensor for the synchronous motor, a resolver, an optical sensor, an induction sensor, a capacitance sensor, and a magnetoresistive sensor are used.

特許3351310号Patent 3351310 特願2016-036557Japanese Patent Application 2016-036557

文献1乃至2に記載されている回転角センサ及び位置検出装置のセンサは、2つの偏心したセンサターゲットと2つのステータコイルユニットから構成されており、ステータコイルユニットから発振器、加算器及び減算器等の検出回路を含むシステムへの接続において、構造上コイル線の引き回し等から実装面積を要する配置であった。   The rotation angle sensor and the position detection device sensor described in Documents 1 and 2 are composed of two eccentric sensor targets and two stator coil units. From the stator coil unit, an oscillator, an adder, a subtractor, etc. In connection to the system including the detection circuit, the arrangement requires a mounting area due to the routing of the coil wire.

本発明は、実装面積の省スペース化によって、回転角及び位置検出装置のセンサのコイルユニットの小型化を実現するものである。   The present invention realizes downsizing of the coil unit of the sensor of the rotation angle and position detection device by saving the mounting area.

本発明のコイルユニットは、例えば、磁性体コアと、コイルが取付けられるコイル取付け部と、を備え、前記コイル取付け部は複数有し、この磁性体コアとコイルの実装に関して、小型化を実現し得る構造として、側面もしくは磁性体コア中央の開口部より、コイル線もしくは端子付コイル線等を引き回して内側方向から、検出回路の入力段(端子、パッド等の検出回路へのコイル出力の入力接点)へ接続した実装構造とすることで、コイル外側への実装スペースを低減して、回転角センサの体格そのものの小型化を達成する。   The coil unit of the present invention includes, for example, a magnetic core and a coil mounting portion to which the coil is mounted. The coil unit has a plurality of coil mounting portions, and the magnetic core and the coil are mounted in a small size. As a structure to be obtained, the coil wire or terminal-attached coil wire is routed from the side or the opening in the center of the magnetic core, and the input stage of the detection circuit (the input contact of the coil output to the detection circuit such as the terminal and pad) from the inside direction ) To reduce the mounting space on the outside of the coil and achieve a reduction in the size of the rotation angle sensor itself.

本発明に依れば、コイル線を内側に引き回して、接続できるため、外側へのコイル線引き回しによる実装面積の膨大を低減できるため、小型化を実現できる。   According to the present invention, since the coil wire can be routed inward and connected, enormous mounting area due to the coil wire routed outward can be reduced, so that downsizing can be realized.

なお、上記した以外の課題、構成及び効果は、以下の実施形態の説明により明らかにされる。   Problems, configurations, and effects other than those described above will be clarified by the following description of the embodiments.

本発明に係る参照コイルとセンシングコイルの磁性体コアの構成図である。It is a block diagram of the magnetic body core of the reference coil and sensing coil which concern on this invention. 本発明に係る磁性体コアの誘導コイルの側面実装構造である。It is the side surface mounting structure of the induction coil of the magnetic body which concerns on this invention. 本発明に係る磁性体コアの誘導コイルの開口孔による中央実装構造である。It is the center mounting structure by the opening hole of the induction coil of the magnetic body core which concerns on this invention. 本発明に係る磁性体コアの誘導コイルの開口孔による誘導コイルのPCBコイル基板と駆動回路基板を有した実装構造である。1 is a mounting structure having a PCB coil substrate of an induction coil and a drive circuit substrate by an opening hole of an induction coil of a magnetic core according to the present invention. 本発明に係る参照コイルとセンシングコイルの差分を検出する回路の構成図である。It is a block diagram of the circuit which detects the difference of the reference coil which concerns on this invention, and a sensing coil.

以下、本発明に係る実施例を、図面を用いて説明する。なお、各図において、同一の構造である部分については、同一の符号を付け、説明を省略する。   Embodiments according to the present invention will be described below with reference to the drawings. In addition, in each figure, about the part which is the same structure, the same code | symbol is attached | subjected and description is abbreviate | omitted.

図1乃至図2を用いて、本実施例に係るコイルユニットの構成について説明する。図1は、本実施例に係るコイルユニット1の構成図である。図1において、コイルユニット1は、磁性体コア2と被測定物7の参照面8A、センシング面8Bに面した参照コイル3と、センシングコイル4を備えている。コイルユニット1の底面9と被測定物7の参照面8A及びセンシング面8Bに対して、空隙1の5及び空隙2の6を持って、平行に配置される。図示しないが、空隙1の5及び空隙2の6は、例えば、被測定物7が偏心円若しくは楕円構造の回転体となる構造のときに回転したときの被測定物7の角度位置に応じて、空隙1の5及び空隙2の6は同一の空隙及び差のある空隙に変化するような構造を持っている。空隙1の5及び空隙2の6は空間、樹脂、非磁性ガラス、非磁性セラミックス、非磁性金属などの透磁率が低い材料からなる。   The configuration of the coil unit according to the present embodiment will be described with reference to FIGS. FIG. 1 is a configuration diagram of a coil unit 1 according to the present embodiment. In FIG. 1, a coil unit 1 includes a magnetic core 2, a reference surface 8A of an object to be measured 7, a reference coil 3 facing the sensing surface 8B, and a sensing coil 4. With respect to the bottom surface 9 of the coil unit 1, the reference surface 8 </ b> A and the sensing surface 8 </ b> B of the object 7 to be measured, the air gap 1 and the air gap 2 6 are arranged in parallel. Although not shown in the drawings, the gap 1 5 and the gap 2 6 depend on, for example, the angular position of the object 7 when the object 7 is rotated when the object 7 is a rotating body having an eccentric or elliptical structure. The gap 1 5 and the gap 2 6 have structures that change to the same gap and a gap having a difference. The gap 1 5 and the gap 2 6 are made of a material having a low magnetic permeability such as space, resin, nonmagnetic glass, nonmagnetic ceramics, and nonmagnetic metal.

図2におけるスリット付磁性体コア9は側面スリット9A、9B、9C、9Dを施した形状である。図2(a)はハウジング12に側面スリット磁性体コア9に巻かれた参照コイル3及びセンシングコイル4を搭載した構成であり、参照コイル及びセンシングコイル線11を側面スリット9A、9B、9C、9Dより這いまわして、コネクタ端子10に半田等で接続した構造である。図2(b)は参照コイル及びセンシングコイル線11をコネクタ端子等のハーネス13の端子にかしめ、溶着、半田等で接続した構造である。図示しないが、参照コイル3及びセンシングコイル4のコイル線の先端に端子付のコイル線として、コネクタ等のハーネス13の接続部に圧入等で接続した構造としても良い。   The magnetic core 9 with slits in FIG. 2 has a shape with side slits 9A, 9B, 9C, 9D. FIG. 2A shows a configuration in which the reference coil 3 and the sensing coil 4 wound around the side slit magnetic core 9 are mounted on the housing 12. The reference coil and the sensing coil wire 11 are connected to the side slits 9A, 9B, 9C, and 9D. In other words, the connector terminal 10 is connected with solder or the like. FIG. 2B shows a structure in which the reference coil and the sensing coil wire 11 are caulked to a terminal of a harness 13 such as a connector terminal and connected by welding, soldering, or the like. Although not shown, a structure may be adopted in which coil wires with terminals are connected to the tips of the coil wires of the reference coil 3 and the sensing coil 4 and are connected to a connection portion of the harness 13 such as a connector by press fitting or the like.

図3は前記図2の磁性体コア9に対して、中央部に開口孔14A及び15Aを設けた開口型磁性体コアA14及び開口型磁性体コアB15をハウジング12に実装した構造である。尚、開口孔の形状は、実装時の参照コイル及びセンシングコイル線11の這いまわしにおいて、14A及び15Aの形状に限定されるものではなく、開口部は単一乃至複数の開口を持った実装に適した形状となる。図3(a)はハウジング12に磁性体コア14に巻かれた参照コイル3及びセンシングコイル4を搭載した構成であり、参照コイル及びセンシングコイル線11を開口孔14Aより這いまわして、コネクタ端子10に半田等で接続した構造である。図3(a)は前記図2(b)の如く、ハーネス13に接続しても良い。   FIG. 3 shows a structure in which an opening type magnetic body core A14 and an opening type magnetic body core B15 provided with opening holes 14A and 15A in the center are mounted on the housing 12 with respect to the magnetic core 9 of FIG. Note that the shape of the opening hole is not limited to the shape of 14A and 15A when the reference coil and the sensing coil wire 11 are mounted at the time of mounting, and the opening is for mounting with a single or a plurality of openings. It becomes a suitable shape. FIG. 3A shows a configuration in which the reference coil 3 and the sensing coil 4 wound around the magnetic core 14 are mounted on the housing 12, and the reference coil and the sensing coil wire 11 are wound around the opening hole 14 </ b> A to connect the connector terminal 10. It is the structure connected to soldering etc. 3 (a) may be connected to the harness 13 as shown in FIG. 2 (b).

図3(b)はハウジング12に磁性体コア15に巻かれた参照コイル3及びセンシングコイル4を搭載した構成であり、コネクタ端子17と磁性体コア15の間にセラミック等の絶縁板16を設けて、開口孔15Aにコネクタ端子17を通して、ハウジング12の底部で参照コイル3及びセンシングコイル4のコイル線11と半田等で接続した構造であり、前記図2(a)に対して、磁性体コア15の内側方向からのコイル線接続により、外側方向への実装面積の膨大を低減したことで、小型化を図り、コンパクト化した構造である。   FIG. 3B shows a configuration in which the reference coil 3 and the sensing coil 4 wound around the magnetic core 15 are mounted on the housing 12, and an insulating plate 16 such as a ceramic is provided between the connector terminal 17 and the magnetic core 15. Thus, the connector terminal 17 is passed through the opening hole 15A and connected to the reference coil 3 and the coil wire 11 of the sensing coil 4 at the bottom of the housing 12 with solder or the like. Compared to FIG. By connecting the coil wires from the inner direction of 15, the enormous mounting area in the outer direction is reduced, so that the size is reduced and the structure is made compact.

図4(a)は前記図3(b)の磁性体コア15を用いて、ハウジング12の底部に配置した参照及びセンシングのPCBコイル基板20に磁性体コア15を挿入し、検出回路基板18との間に絶縁板19を設けて、開口孔15Aを通して、PCBコイル基板20と検出回路基板18を接続端子18Aで接続した構造である。   4 (a) uses the magnetic core 15 of FIG. 3 (b) to insert the magnetic core 15 into the reference and sensing PCB coil substrate 20 arranged at the bottom of the housing 12, In this structure, an insulating plate 19 is provided between the PCB coil substrate 20 and the detection circuit substrate 18 through the opening hole 15A.

図4(b)は前記図4(a)の開口孔15Aを設けない無開口磁性体コア24を用いて、ハウジング12の底部に配置した参照及びセンシングのPCBコイル基板20に磁性体コア21を挿入し、検出回路基板23との間に絶縁板22を設けて、磁性体コア21の側面でPCBコイル基板20と検出回路基板23を接続端子23Aで接続した構造である。尚、前記図4(a)及び(b)でPCBコイル基板20と検出回路基板23を接続する接続端子23Aの位置は、前記図4(a)及び(b)の位置に限定されるものではなく、コイル基板20のPCBコイル形状による影響が大きく、搭載性、実装性等から構成の変更が可能である。   FIG. 4B shows the magnetic core 21 placed on the reference and sensing PCB coil substrate 20 disposed at the bottom of the housing 12 by using the non-open magnetic core 24 without the opening hole 15A shown in FIG. The insulating plate 22 is inserted between the detection circuit board 23 and the PCB coil board 20 and the detection circuit board 23 are connected to each other at the side surface of the magnetic core 21 through the connection terminals 23A. 4 (a) and 4 (b), the position of the connection terminal 23A for connecting the PCB coil board 20 and the detection circuit board 23 is not limited to the position shown in FIGS. 4 (a) and 4 (b). In addition, the influence of the PCB coil shape of the coil substrate 20 is great, and the configuration can be changed in terms of mountability and mountability.

また、図5は検出回路基板18及び23の検出回路の一例を示し、図2乃至図4までの参照コイル3及びセンシングコイル4のコイル線と検出回路の接続は接続領域24の24A、24B、24Cが接続点であり、領域24はコイルユニット1を表している。   5 shows an example of the detection circuit of the detection circuit boards 18 and 23, and the connection of the reference coil 3 and the sensing coil 4 and the detection circuit of FIG. 2 to FIG. Reference numeral 24 </ b> C is a connection point, and a region 24 represents the coil unit 1.

参照コイル3とセンシングコイル4は、抵抗104Aと抵抗104B及び参照−センシングコイルバランス調整ボリューム105によりブリッジ回路106の構成となっている。     The reference coil 3 and the sensing coil 4 are configured as a bridge circuit 106 by a resistor 104A, a resistor 104B, and a reference-sensing coil balance adjustment volume 105.

ブリッジ回路106は上流にある発振器101より交流励磁を受ける。参照コイル8Aとセンシングコイル8Bは、それぞれの被測定物4との空隙7A、7Bによりインダクタンスが変化し、ひいてはそれぞれのインピーダンスが変化する。参照コイル8Aのインピーダンスとセンシングコイル8Bのインピーダンスの中間電圧と、抵抗104Aと抵抗104B及び参照−センシングコイルバランス調整ボリューム105の合成抵抗との中間電圧を差動増幅回路108のオペアンプ107へ入力してその差分を検出する。     The bridge circuit 106 receives AC excitation from the oscillator 101 located upstream. The inductances of the reference coil 8A and the sensing coil 8B change due to the gaps 7A and 7B between the measured object 4 and the impedance, respectively. The intermediate voltage between the impedance of the reference coil 8A and the impedance of the sensing coil 8B, and the combined voltage of the resistors 104A and 104B and the reference-sensing coil balance adjustment volume 105 is input to the operational amplifier 107 of the differential amplifier circuit 108. The difference is detected.

オペアンプ108の出力は、発振器101からの同期信号110を受けて検波する検波回路111のオペアンプ109へ入力される。オペアンプ109の出力は、基準電圧112を抵抗113とオフセット調整ボリューム114で分圧された電圧と共に出力117をオフセットするオフセット回路116のオペアンプ115へ入力される。     The output of the operational amplifier 108 is input to the operational amplifier 109 of the detection circuit 111 that receives and detects the synchronization signal 110 from the oscillator 101. The output of the operational amplifier 109 is input to the operational amplifier 115 of the offset circuit 116 that offsets the output 117 together with the voltage obtained by dividing the reference voltage 112 by the resistor 113 and the offset adjustment volume 114.

以上の回路構成にする事により、被測定物7の任意の位置において、参照−センシングコイルバランス調整ボリューム105により、オペアンプ107の出力が0となるように調整し、参照コイル8Aとセンシングコイル8Bの個別バラツギのキャンセルを行う事が出来る。また、オフセット回路116のオフセット調整ボリューム114や、発振器101の周波数調整ボリューム102やゲイン調整ボリューム103を調整することにより、出力117を調整する事が出来る。     With the above circuit configuration, the reference-sensing coil balance adjustment volume 105 adjusts the output of the operational amplifier 107 to 0 at an arbitrary position of the DUT 7, and the reference coil 8 </ b> A and the sensing coil 8 </ b> B are adjusted. Individual variation can be canceled. Further, the output 117 can be adjusted by adjusting the offset adjustment volume 114 of the offset circuit 116, the frequency adjustment volume 102, and the gain adjustment volume 103 of the oscillator 101.

なお、本発明は上記した各実施例に限定されるものではなく、単数または複数コイル等の様々な変形例が含まれる。例えば、上記した実施例は本発明を分かりやすく説明するために詳細に説明したものであり、必ずしも全ての構成を備えるものに限定されるものではない。また、ある実施例又は変更例の構成の一部を他の実施例又は変更例の構成に置き換えることが可能であり、また、ある実施例又は変更例の構成に他の実施例又は変更例の構成を加えることも可能である。また、各実施例又は変更例の構成の一部について、他の構成の追加・削除・置換をすることが可能である。   In addition, this invention is not limited to each above-mentioned Example, Various modifications, such as a single or multiple coil, are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations. In addition, a part of the configuration of one embodiment or modification can be replaced with the configuration of another embodiment or modification, and the configuration of another embodiment or modification can be replaced with the configuration of one embodiment or modification. It is also possible to add a configuration. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment or modification.

1…コイルユニット
2,21…磁性体コア
3…参照コイル
4…センシングコイル
5…空隙1
6…空隙2
7…被測定物
8A…参照面
8B…センシング面
9…スリット付磁性体コア
9A,9B,9C,9D…側面スリット
10,17…端子コネクタ
11…コイル線
12…ハウジング
13…ハーネス
14…開口型磁性体コアA
14A,15A…開口孔
15…開口型磁性体コアB
16,19,22…絶縁板
18,23…検出回路基板
20…PCBコイル基板
23A…接続端子
24…接続領域
24A,24B,24C…接続点
100…検出回路
101…発振器
102…周波数調整ボリューム
103…ゲイン調整ボリューム
104A…抵抗1
104B…抵抗2
105…参照−センシングコイルバランス調整ボリューム
106…ブリッジ回路
107…オペアンプ1
108…差動増幅回路
109…オペアンプ2
110…同期信号
111…検波回路
112…基準電圧
113…抵抗
114…オフセット調整ボリューム
115…オペアンプ3
116…オフセット回路
117…出力
DESCRIPTION OF SYMBOLS 1 ... Coil unit 2,21 ... Magnetic body core 3 ... Reference coil 4 ... Sensing coil 5 ... Air gap 1
6 ... Gap 2
7 ... object to be measured 8A ... reference surface 8B ... sensing surface 9 ... magnetic core with slits 9A, 9B, 9C, 9D ... side slits 10, 17 ... terminal connector 11 ... coil wire 12 ... housing 13 ... harness 14 ... opening type Magnetic core A
14A, 15A ... Opening hole 15 ... Opening type magnetic core B
16, 19, 22 ... Insulating plate 18, 23 ... Detection circuit board 20 ... PCB coil board 23A ... Connection terminal 24 ... Connection area 24A, 24B, 24C ... Connection point 100 ... Detection circuit 101 ... Oscillator 102 ... Frequency adjustment volume 103 ... Gain adjustment volume 104A ... resistance 1
104B ... resistance 2
105: Reference-Sensing coil balance adjustment volume 106 ... Bridge circuit 107 ... Operational amplifier 1
108: Differential amplifier circuit 109: Operational amplifier 2
DESCRIPTION OF SYMBOLS 110 ... Synchronization signal 111 ... Detection circuit 112 ... Reference voltage 113 ... Resistance 114 ... Offset adjustment volume 115 ... Operational amplifier 3
116: Offset circuit 117 ... Output

Claims (4)

被測定物に所定の空隙をもって取り付けられるコイルユニットであって、
前記被測定物を検出するセンサの磁性体コアは磁性体コアの側面スリット部から誘導コイルを這いまわして、検出回路の接続端子またはハーネス等の信号入力段に接続される構造を有したコイルユニット。
A coil unit attached to a device under test with a predetermined gap,
The magnetic core of the sensor for detecting the object to be measured is a coil unit having a structure in which an induction coil is wound from a side slit portion of the magnetic core and connected to a signal input stage such as a connection terminal of a detection circuit or a harness .
被測定物に所定の空隙をもって取り付けられるコイルユニットであって、
前記被測定物を検出するセンサの磁性体コアは、開口部を伴う磁性体コアの開口孔から誘導コイルを配線し、接続端子またはハーネス等の信号入力段に接続される構造を有したコイルユニット。
A coil unit attached to a device under test with a predetermined gap,
The magnetic core of the sensor for detecting the object to be measured is a coil unit having a structure in which an induction coil is wired from an opening of the magnetic core with an opening and connected to a signal input stage such as a connection terminal or a harness. .
請求項2に記載のコイルユニットであって、
前記構造は、開口孔を伴う磁性体コアの開口孔に接続端子を通して、磁性体コアを実装するハウジング底部で磁性体コアを挿入したPCBコイル基板等と検出回路基板とを接続する構造を有したコイルユニット。
The coil unit according to claim 2,
The structure has a structure in which the detection circuit board is connected to the PCB coil substrate or the like in which the magnetic core is inserted at the bottom of the housing on which the magnetic core is mounted through the connection terminal through the opening of the magnetic core with the opening. Coil unit.
請求項2に記載のコイルユニットであって、
前記構造は、磁性体コアの側面で接続端子を通して、磁性体コアを実装するハウジング底部で磁性体コアを挿入したPCBコイル基板と駆動回路基板とを接続する構造を有したコイルユニット。
The coil unit according to claim 2,
The structure is a coil unit having a structure in which a PCB coil board having a magnetic core inserted therein and a drive circuit board are connected to each other through a connection terminal on a side surface of the magnetic core at the bottom of a housing on which the magnetic core is mounted.
JP2016238967A 2016-12-09 2016-12-09 Sensor coil unit for position detection device Pending JP2018096729A (en)

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CN117110658A (en) * 2023-05-08 2023-11-24 南通众兴磁业有限公司 Magnetic core electrical property detection equipment and detection method

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JP2004245808A (en) * 2003-02-12 2004-09-02 Sanki Sangyo:Kk Differential transformer
JP2009048902A (en) * 2007-08-21 2009-03-05 Omron Corp Proximity sensor
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JP2000173425A (en) * 1998-12-07 2000-06-23 Koyo Electronics Ind Co Ltd Proximity switch
JP2000321011A (en) * 1999-05-14 2000-11-24 Hosiden Corp Magnetic detector, thickness detector and level detector of magnetic body
JP2003019104A (en) * 2001-07-06 2003-01-21 Olympus Optical Co Ltd Insertion tube detecting probe
JP2004245808A (en) * 2003-02-12 2004-09-02 Sanki Sangyo:Kk Differential transformer
JP2009048902A (en) * 2007-08-21 2009-03-05 Omron Corp Proximity sensor
JP2010101633A (en) * 2008-10-21 2010-05-06 Minebea Co Ltd Rotation detection device
WO2016140149A1 (en) * 2015-03-05 2016-09-09 日立オートモティブシステムズ株式会社 Position detection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117110658A (en) * 2023-05-08 2023-11-24 南通众兴磁业有限公司 Magnetic core electrical property detection equipment and detection method

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