JP2018094809A - Passage structure, liquid discharge head, liquid discharge device, and manufacturing method of passage structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve positioning accuracy of multiple passage members provided between members.SOLUTION: A passage structure includes: a first member having a first surface; a second member having a second surface; multiple passage members provided between the first surface and the second surface and defining passages; and elastic members which are provided in a laminated state on the multiple passage members between the first surface and the second surface and define the passages.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a flow channel structure including a flow channel through which ink, air, and the like circulate, a method for manufacturing the flow channel structure, a liquid discharge head using the flow channel structure, and a liquid discharge device.

  A liquid ejection apparatus that ejects liquid such as ink from a nozzle includes a flow path structure that is formed by stacking a plurality of flow path members in which a flow path for circulating liquid is formed, as disclosed in Patent Document 1, for example. In the flow channel structure of Patent Document 1, a plurality of flow channel members such as a first flow channel member, a second flow channel member, and a pressure chamber forming member are stacked one by one in one direction.

JP 2012-125995 A

  When a plurality of flow path members are provided between two members, depending on the arrangement position of each flow path member, the positioning accuracy of each flow path member may decrease due to variations in stacking tolerances. For example, when a plurality of flow path members formed by laminating a plurality of component parts are arranged in the width direction and arranged between two members, the stacking tolerance of the component parts in each flow path member in the thickness direction of each flow path member If there is a variation such as a dimension crossing, the positioning accuracy in the thickness direction is lowered. However, these points are not considered in Patent Document 1. In view of the above circumstances, an object of the present invention is to improve the positioning accuracy of a plurality of flow path members provided between members.

[Aspect 1]
In order to solve the above problems, a flow channel structure according to a preferred aspect (aspect 1) of the present invention includes a first member having a first surface, a second member having a second surface, and a first surface. Between the first surface and the second surface, the plurality of flow channel members defining the flow channel, and the first surface and the second surface are stacked on the plurality of flow channel members. And an elastic member to be defined. According to the above aspect, a plurality of flow path members that define a flow path (for example, a flow path of a fluid such as liquid or air) between the first surface and the second surface, and the plurality of flow path members. Therefore, even if there are variations in the dimension in the thickness direction due to stacking tolerances of the component parts in the plurality of flow path members, the tolerance in the thickness direction (stacking direction) can be reduced by elastic deformation of the elastic member. Can be absorbed. Therefore, the positioning accuracy of the plurality of flow path members provided between the first member and the second member can be improved. In addition, since the elastic member of this aspect defines the flow path, it is not necessary to increase the number of parts that define the flow path as compared with the case where the elastic member does not define the flow path. Therefore, an increase in the number of parts can be suppressed, and downsizing is also possible. In addition, the flow path of this aspect may be prescribed | regulated inside a flow path member or an elastic member, and may be prescribed | regulated between a flow path member and an elastic member, or between other structural members.

[Aspect 2]
In a preferred example (Aspect 2) of Aspect 1, there are a plurality of elastic members, and each of the elastic members is laminated on each of the flow path members. According to the above aspect, since each elastic member is laminated | stacked on each of a flow path member, arrangement | positioning can be changed by making a flow path member and an elastic member into 1 set. Therefore, the freedom degree of arrangement | positioning of a flow-path member and an elastic member can be raised.

[Aspect 3]
In a preferred example (Aspect 3) of Aspect 1 or Aspect 2, each of the plurality of flow path members includes a first base material and a second base material stacked between the first surface and the second surface, The elastic member is interposed between the first base material and the second base material. According to the above aspect, since the elastic member is interposed between the first base material and the second base material, the dimensional variation in the thickness direction due to a stacking tolerance or the like between the first base material and the second base material. Even if there exists, the tolerance of the thickness direction (lamination direction) can be absorbed by the elastic deformation of an elastic member.

[Aspect 4]
In a preferred example of aspect 3 (aspect 4), the first member and the second member are restricted from moving in the direction on the first surface with respect to the second base material, and on the first surface with respect to the first base material. Movement in the direction of is not restricted. According to the above aspect, the movement of the first member and the second member in the direction on the first surface with respect to the second base material is restricted, and the movement in the direction on the first surface with respect to the first base material. Since the first member and the second member are easily positioned, the positioning can be performed with high accuracy.

[Aspect 5]
In a preferred example (aspect 5) of any one of the aspects 1 to 3, the deformation amount of the elastic member that is fixed and deformed between the first surface and the second surface is smaller than the thickness of the elastic member after the deformation. . According to the above aspect, since the deformation amount of the elastic member that is fixed and deformed between the first surface and the second surface is smaller than the thickness of the elastic member after deformation, it is sufficient even if the elastic member is deformed. The flow path is easy to be defined while maintaining the function of the elastic member as an elastic body. If the elastic member is too strained beyond its thickness, it will be plastically deformed and will not be able to maintain its function as an elastic body, and the reaction force will be too great and other members will be warped. There is a possibility that a deviation occurs and liquid leakage occurs. In this respect, according to this aspect, even if the elastic member is deformed, it has a sufficient thickness, so that the reaction force of the elastic member does not become excessively large, and thus the occurrence of liquid leakage can be suppressed.

[Aspect 6]
In a preferred example (Aspect 6) of any one of Aspects 1 to 5, the elastic member is provided in a space in the flow path member and is displaced according to a pressure change in the space. According to the above aspect, since the elastic member is provided in the space in the flow channel member and is displaced according to the pressure change in the space, for example, the elastic member is provided in the flow channel structure using the displacement of the elastic member. A valve (such as a pressure regulating valve or a choke valve) can be operated, function as a pump, or function as a pressure buffering mechanism (damper). Therefore, according to this aspect, it is possible to provide not only a function of absorbing the variation in the stacking intersection but also a function of operating each part of the flow path structure.

[Aspect 7]
A liquid discharge head according to a preferred aspect (aspect 7) of the present invention includes a flow path structure according to any one of aspects 1 to 6, and a nozzle that discharges the liquid from the flow path structure by driving a drive element. Are provided. According to the above aspect, it is possible to provide a liquid ejection head capable of improving the positioning accuracy of a plurality of flow path members provided between the first member and the second member of the flow path structure.

[Aspect 8]
A liquid ejection apparatus according to a preferred aspect (aspect 8) of the present invention includes a conveyance mechanism that conveys a medium, and a liquid ejection head according to claim 7 that ejects liquid onto the medium. According to the above aspect, it is possible to provide a liquid ejection apparatus capable of improving the positioning accuracy of the plurality of flow path members provided between the first member and the second member of the flow path structure provided in the liquid ejection head. .

[Aspect 9]
The manufacturing method of the flow-path structure which concerns on the suitable aspect (aspect 9) of this invention WHEREIN: The 1st process which arrange | positions the several flow-path member which laminated | stacked the elastic member on the 1st member, and several 2nd members A second step of fixing to the first member via the flow path member and the elastic member. According to the above aspect, a flow channel structure including a plurality of flow channel members and an elastic member laminated on the plurality of flow channel members can be manufactured between the first member and the second member. According to this aspect, even in the first step, even if variations in the thickness direction due to stacking tolerances of the component parts occur in the plurality of flow path members, the tolerance in the thickness direction (stacking direction) is set in the second step. It can be absorbed by elastic deformation of the elastic member.

It is a block diagram of the liquid discharge apparatus which concerns on embodiment of this invention. It is an external appearance perspective view of a liquid discharge head. It is an exploded perspective view of a liquid discharge head. It is sectional drawing of a liquid discharge part. It is the top view which looked at the channel member from the upper part. It is a figure for demonstrating the manufacturing method of a flow-path structure. It is sectional drawing of the liquid discharge head which concerns on 2nd Embodiment of this invention.

<First Embodiment>
FIG. 1 is a partial configuration diagram of a liquid ejection apparatus 10 according to the first embodiment of the present invention. The liquid ejecting apparatus 10 according to the present embodiment is an ink jet printing apparatus that ejects ink, which is an example of a liquid, onto a medium 11 such as printing paper. A liquid discharge apparatus 10 shown in FIG. 1 includes a control device 12, a transport mechanism 15, a carriage 18, a liquid discharge head 20, and a pump 16. A liquid container (cartridge) 14 for storing ink is attached to the liquid ejection apparatus 10. In the present embodiment, four colors of ink I of cyan (C), magenta (M), yellow (Y), and black (K) are stored in the liquid container 14.

  The control device 12 comprehensively controls each element of the liquid ejection device 10. The transport mechanism 15 transports the medium 11 in the Y direction under the control of the control device 12. The pump 16 is an air supply device that supplies air A to the liquid discharge head 20 under the control of the control device 12. Air A is a gas used for controlling the flow path inside the liquid discharge head 20. The liquid discharge head 20 discharges the ink I supplied from the liquid container 14 onto the medium 11 under the control of the control device 12.

  The liquid discharge head 20 is mounted on the carriage 18. The liquid discharge head 20 includes a plurality of liquid discharge units 70. In the present embodiment, a case where four liquid ejection units 70 are arranged so as to be aligned along a direction X orthogonal to the Y direction that is the transport direction of the medium 11 is illustrated. However, the arrangement of the four liquid discharge units 70 is not limited to the illustrated one, and may be arranged in a staggered shape or a staggered shape, for example. Moreover, the number of the liquid discharge parts 70 is not restricted to what was illustrated. Two nozzle rows are arranged in each of the liquid ejection units 70. Each nozzle row is a set of a plurality of nozzles N arranged linearly along the Y direction.

  The carriage 18 is a structure that houses and supports the liquid ejection head 20, and is controlled in the X direction that intersects the Y direction by a moving mechanism (not shown) including a conveyance belt and a motor under the control of the control device 12. Iteratively reciprocates along In parallel with the transport of the medium 11 by the transport mechanism 15 and the reciprocating reciprocation of the carriage 18, the liquid ejection head 20 ejects the ink I onto the medium 11, thereby forming a desired image on the surface of the medium 11. However, the configurations of the transport mechanism 15 and the carriage 18 are not limited to the above examples. A direction perpendicular to the XY plane (a plane parallel to the surface of the medium 11) is hereinafter referred to as a Z direction. The discharge direction of the ink I by the liquid discharge head 20 corresponds to the Z direction.

<Liquid discharge head>
FIG. 2 is an external perspective view showing the configuration of the liquid discharge head 20, and FIG. 3 is an exploded perspective view of the liquid discharge head 20. FIG. 4 is a cross-sectional view of any one liquid ejection unit 70. FIG. 5 is a plan view of the flow path member 30 as viewed from above (from the negative side to the positive side in the Z direction). As shown in FIGS. 2 and 3, the liquid ejection head 20 includes a flow path structure 22 and a head body 23. The head main body 23 includes the four liquid ejection units 70 described above. The flow path structure 22 supplies four systems (four colors) of ink I (C, M, Y, K) from the liquid container 14 to each liquid ejection unit 70 of the head body 23.

  As shown in FIG. 4, the liquid ejection unit 70 has a pressure chamber forming substrate 72 and a vibration plate 73 arranged on one surface of the flow path forming substrate 71 by separate members or by one member, and on the other surface. It includes a head chip in which the nozzle plate 74 and the compliance portion 75 are arranged as separate members or as a single member. The plurality of nozzles N are formed on the nozzle plate 74. In addition, since the structure corresponding to each row of the nozzles N is formed in one liquid ejecting unit 70 in a substantially line symmetrical manner, the following will focus on one row of the nozzles N for convenience. The structure will be described.

  The flow path forming substrate 71 is a flat plate material that forms a flow path of ink. In the flow path forming substrate 71 of the present embodiment, an opening 712, a supply flow path 714, and a communication flow path 716 are formed. The supply channel 714 and the communication channel 716 are formed for each nozzle N, and the opening 712 is continuous over the plurality of nozzles N. The pressure chamber forming substrate 72 is a flat plate material in which a plurality of openings 722 corresponding to different nozzles N are formed. The flow path forming substrate 71 and the pressure chamber forming substrate 72 are formed of, for example, a silicon single crystal substrate.

  The compliance unit 75 in FIG. 4 is a mechanism that suppresses (absorbs) pressure fluctuations in the flow path of the liquid ejection unit 70, and includes a sealing plate 752 and a support body 754. The sealing plate 752 is a flexible film-like member, and the support 754 flows the sealing plate 752 so that the opening 712 and each supply channel 714 of the channel forming substrate 71 are closed. It fixes to the path | route formation board | substrate 71. FIG.

  A diaphragm 73 is installed on the surface of the pressure chamber forming substrate 72 in FIG. 4 opposite to the flow path forming substrate 71. The vibration plate 73 is a plate-like member that can elastically vibrate, and is configured by stacking an elastic film formed of an elastic material such as silicon oxide and an insulating film formed of an insulating material such as zirconium oxide. Is done. The diaphragm 73 and the flow path forming substrate 71 are opposed to each other with an interval inside each opening 722 formed in the pressure chamber forming substrate 72. The space sandwiched between the flow path forming substrate 71 and the diaphragm 73 inside each opening 722 functions as a pressure chamber (cavity) C that applies pressure to the ink. The plurality of pressure chambers C are arranged along the X direction.

  A plurality of piezoelectric elements 732 corresponding to different nozzles N are formed on the surface of the diaphragm 73 opposite to the pressure chamber forming substrate 72. Each piezoelectric element 732 is a laminated body in which a piezoelectric body is interposed between electrodes facing each other. As the drive signal is supplied, the piezoelectric element 732 vibrates together with the vibration plate 73, whereby the pressure in the pressure chamber C varies and the ink in the pressure chamber C is ejected from the nozzle N. Accordingly, the piezoelectric element 732 functions as a driving element that generates a driving force for ejecting ink from the nozzle N. Each piezoelectric element 732 is sealed and protected by a protective plate 76 fixed to the vibration plate 73.

  As shown in FIG. 4, a support body 77 is fixed to the flow path forming substrate 71 and the protection plate 76. The support body 77 is integrally formed by molding a resin material, for example. In the support body 77 of this embodiment, a space 772 that forms a liquid storage chamber (reservoir) R together with the opening 712 of the flow path forming substrate 71 and a supply port 774 that communicates with the liquid storage chamber R are formed. In the liquid storage chamber R, the ink introduced from the supply port 774 is stored. The ink stored in the liquid storage chamber R is distributed and filled into the pressure chambers C by the plurality of supply channels 714, and passes from the pressure chambers C to the communication channels 716 and the nozzles N to the outside (medium 11 side). ).

  The end of the individual wiring board 78 is joined to the diaphragm 73. The individual wiring board 78 is a flexible wiring board on which wiring for transmitting a drive signal and a power supply voltage to each piezoelectric element 732 is formed. One individual wiring board 78 is provided for each of the four liquid ejection units 70. Each individual wiring board 78 is connected to a circuit board 50 described later.

  As shown in FIGS. 2 and 3, the flow path structure 22 includes an upstream member 24 as a specific example of the second member, a downstream member 26 as a specific example of the first member, and a plurality of flow path members 30. Is provided. The upstream member 24 is substantially plate-like in which a flow path for introducing four systems (four colors) of ink I (C, M, Y, K) from the liquid container 14 and distributing them to the two flow path members 30 is formed. It is a structure. The upstream member 24 includes an upstream first surface (a negative surface in the Z direction) 24A and a downstream second surface (a positive surface in the Z direction) 24B opposite to the first surface 24A. Have. The first surface 24A and the second surface 24B are substantially parallel.

  The downstream side member 26 is a substantially plate-like structure in which a flow path substrate 262 having a flow path (path) for the ink I, a circuit board 50 having electric signal wiring (path), and the like are accommodated. The downstream member 26 includes an upstream first surface (a negative surface in the Z direction) 26A and a downstream second surface (a positive surface in the Z direction) 26B opposite to the first surface 26A. Have. The first surface 26A and the second surface 26B are substantially parallel.

  The flow path member 30 is a back pressure control unit (valve unit) that supplies the ink I to the downstream side member 26 while controlling the pressure. In the present embodiment, a case where two flow path members 30 having the same configuration are arranged side by side in the X direction between the first surface 26A of the downstream member 26 and the second surface 24B of the upstream member 24 is illustrated. . However, the number of the flow path members 30 arranged in the X direction is not limited to the illustrated example, and may be three or more.

  On the first surface 24A of the upstream member 24, an introduction portion 25 for introducing the ink I from the liquid container 14 and the air A from the pump 16 is formed. The introduction part 25 is formed with four ink inlets SI1 and one air inlet SA1. Four flexible pipes 252 are connected to each of the four inlets SI1, and four lines of ink I (C, M, Y, K) from the liquid container 14 are connected to the respective pipes. Each color is supplied via H.252. One flexible pipe 252 is connected to one introduction port SA1, and air A from the pump 16 is supplied through the pipe. The upstream member 24 distributes each of the four systems of ink I and air A to the two flow path members 30.

  On the first surface 26A side of the downstream member 26, a space 261 that opens to the first surface 26A is formed. The space 261 accommodates the flow path substrate 262, the circuit board 50, and the like. The flow path substrate 262 may be a single unit or may be configured by stacking a plurality of substrates. On the second surface 26 </ b> B side of the downstream side member 26, a cylindrical frame body 27 is formed so as to protrude downward (positive side in the Z direction). A space 271 communicating with the space 261 is formed in the frame body 27. Four liquid ejection portions 70 are accommodated in the space 271 of the frame body 27, and the space 271 is closed from below by a fixing plate 272. The head main body 23 according to this embodiment includes a frame body 27, a liquid discharge unit 70, and a fixed plate 272. The frame 27 may be configured separately from the downstream member 26 and attached to the downstream member 26, or may be configured integrally with the downstream member 26.

  The fixed plate 272 is a flat plate member that supports each liquid ejection unit 70, and is formed of a highly rigid metal such as stainless steel, for example. As shown in FIG. 3, the fixing plate 272 is formed with four openings 274 corresponding to the different liquid ejection units 70. Each opening 274 is a substantially rectangular through-hole that is long in the X direction in plan view from the Z direction. Each liquid ejection unit 70 is joined to the fixed plate 272 such that the nozzle N is exposed from each opening 274. The frame body 27 is provided near the center of the downstream member 26 in the X direction. As a result, the four liquid ejection portions 70 are gathered closer to the center of the downstream member 26 in the X direction.

  The flow path substrate 262 is formed with a plurality of flow paths DI protruding upward (negative side in the Z direction). Each flow path DI communicates with an ink I supply port 774 of each liquid ejection section 70 shown in FIG. In the present embodiment, a total of eight flow paths DI corresponding to two nozzle arrays formed in each of the four liquid ejection units 70 are provided. The eight flow paths DI of the present embodiment are gathered closer to the center according to the arrangement position of the liquid ejection unit 70.

  The circuit board 50 is a board provided with wiring for electrical signals such as control signals sent from the control device 12, and a drive circuit (not shown) for the piezoelectric element 732 is mounted on the circuit board 50. As shown in FIG. 3, four terminal portions 52 to which the individual wiring substrates 78 of the four liquid ejection portions 70 are respectively connected are formed on the upper surface (surface on the negative side in the Z direction) of the circuit substrate 50. . An opening 263 is formed through the flow path substrate 262 in the flow path substrate 262, and an opening 53 is formed through the circuit board 50 in the circuit board 50. The individual wiring board 78 of each liquid ejection unit 70 is inserted through the openings 263 and 53.

  The circuit board 50 is provided with four connectors 54 respectively connected to the four terminal portions 52. The four connectors 54 are respectively mounted on the upper and lower surfaces at both ends of the circuit board 50 in the X direction. The connector 54 is disposed on both the positive side and the negative side in the X direction of the side wall of the downstream member 26 so as to be exposed from the opening 264 on the side wall. Flexible wiring F is connected to each of the four connectors 54. The circuit board 50 receives an electrical signal from the control device 12 via the flexible wiring F from the connector 54, and supplies a drive signal to the piezoelectric elements 732 of the respective liquid ejection units 70 via the terminal parts 52 and the individual wiring board 78. To do. Specifically, a drive signal is generated for each piezoelectric element 732 by the drive circuit based on an electrical signal from the control device 12, and the drive signal is supplied to the piezoelectric element 732 of each liquid ejection unit 70, thereby The element 732 generates a driving force for discharging the ink I from the nozzle N.

  In addition to the opening 53, a through hole 55 is formed in the circuit board 50. Each flow path DI of the flow path substrate 262 described above communicates with the flow paths of the two flow path members 30 through the through holes 55 or the openings 53.

  As shown in FIGS. 3 and 5, each flow path member 30 includes a first base material (downstream flow path member) 32 and a second base material (upstream flow path member) 34. The second base material 34 is a substantially box-shaped member having a space 342 whose lower end (the positive side in the Z direction) is open, and the first base material 32 is a material that closes the opening of the space 342 of the second base material 34. It is a plate-shaped member. The first base material 32 and the second base material 34 are fixed by an adhesive. On the upper surface of the first base material 32 of each flow path member 30, four ink I supply ports SI2 and one air A supply port SA2 are formed. Four inks I (C, M, Y, K) distributed by the upstream member 24 are separately supplied to the four ink I supply ports SI2 of each flow path member 30.

  In the space 342 of each flow path member 30, a plurality of component parts 35, 36 and the like are stacked and accommodated. The plurality of component parts 35 and 36 are formed with a flow path for ink I and a flow path (path) for air A, and are provided with an opening / closing valve, a pressure adjusting valve, a filter, and the like. The ink I introduced from the supply port SI2 is supplied to the flow path DI of the flow path substrate 262 through the flow paths such as the component parts 35 and 36 and the second base material 34.

  Each flow path member 30 has a structure that positions the second base material 34 in the Z direction (thickness direction or stacking direction) with respect to the first surface 26A of the downstream side member 26. Specifically, as shown in FIGS. 2 and 3, the second base material 34 of each flow path member 30 is provided with four extending portions 37 extending from the side surfaces thereof. Two extending portions 37 of each flow path member 30 are arranged on each of the positive side surface and the negative side surface of the first base material 32 in the Y direction. On the upper surface (first surface 26A) of the downstream side member 26, eight projecting portions 265 projecting upward (negative side in the Z direction) from the upper surface are provided. Each projecting portion 265 is disposed to face each extending portion 37. The upper surface (the negative side surface in the Z direction) of each protrusion 265 is in contact with the lower surface (the positive side surface in the Z direction) of each extending portion 37, so that the first surface 26 </ b> A of the downstream member 26 is in contact. The second base material 34 of each flow path member 30 is positioned in the Z direction. In addition, the number of the extension parts 37 and the projection parts 265 is not restricted to what was illustrated.

  Further, each flow path member 30 has a structure that restricts movement of the upstream member 24 and the downstream member 26 in the X direction and the Y direction with respect to the second base material 34. Specifically, as shown in FIGS. 2 and 3, the upstream member 24 is formed with two through holes 242 penetrating the first surface 24A and the second surface 24B, spaced apart in the X direction. On the other hand, on the upper surface (surface on the negative side in the Z direction) of the second base material 34 of each flow path member 30, one regulation pin 31 is formed that protrudes upward from the upper surface (negative side in the Z direction). Each regulation pin 31 is inserted into each through hole 242 one by one. The restriction pin 31 does not move in the X direction and the Y direction with respect to each through-hole 242 but moves freely in the Z direction. Therefore, by inserting each regulating pin 31 into each through hole 242, movement of the upstream member 24 in the X direction and the Y direction is regulated with respect to the second base material 34, and the upstream member 24 is moved in the Z direction. Movement is not regulated. Note that the numbers of the through holes 242 and the regulation pins 31 are not limited to those illustrated.

  The second base material 34 of each flow path member 30 is provided with two extending portions 38 extending from the side surfaces. One extending portion 38 of each flow path member 30 is arranged on each of the positive side surface and the negative side surface of the second base material 34 in the Y direction. A through hole 382 is formed in each extending portion 38. On the other hand, on the upper surface (first surface 26A) of the downstream member 26 of each flow path member 30, four regulation pins 266 that protrude upward from the upper surface are formed. Each restriction pin 266 is disposed so as to face the through hole 382 of each extension portion 38, and each restriction pin 266 is inserted into each through hole 382 one by one. Each regulating pin 266 does not move in the X direction and the Y direction with respect to each through hole 382, but freely moves in the Z direction. Therefore, by inserting each regulating pin 266 into each through hole 382, the movement of the downstream member 26 in the X direction and the Y direction with respect to the second base material 34 is regulated, and the downstream member 26 has the Z direction. Movement is not regulated. Note that the numbers of the through holes 382 and the restriction pins 266 are not limited to those illustrated.

  According to this structure, the through holes 242 and 382 and the restriction pins 31 and 266 restrict the movement of the upstream member 24 and the downstream member 26 in the X direction and the Y direction with respect to the second base material 34, and the upstream The movement of the side member 24 and the downstream member 26 in the Z direction is not restricted. Accordingly, the second base material 34 of each flow path member 30 is fixed to the second surface 24B of the upstream member 24 with an adhesive or the like so that the regulation pin 31 is inserted into the through hole 242. The upstream member 24 is positioned in the X direction and the Y direction with respect to the second base material 34 of the member 30. Further, the extending portion 37 of the second base material 34 of each flow path member 30 is connected to the downstream side member so that the restricting pin 266 is inserted into the through hole 382 and the extending portion 37 is brought into contact with the protruding portion 265. 26, the downstream side member 26 is positioned in the X direction, the Y direction, and the Z direction with respect to the second base material 34 of each flow path member 30.

  In the present embodiment, the movement of the upstream member 24 and the downstream member 26 in the X direction and the Y direction is not restricted with respect to the first base material 32. If the movement of both the upstream member 24 and the downstream member 26 in the X direction and the Y direction is restricted not only with respect to the second substrate 34 but also with respect to the first substrate 32, the upstream member 24 and the downstream member 26 are difficult to position, and there is a possibility that extra stress may be generated on the joint surface between the flow path member 30 and the upstream member 24 and the joint surface between the flow path member 30 and the downstream member 26. In the present embodiment, the movement of the upstream member 24 and the downstream member 26 in the X direction and the Y direction (direction on the first surface 26A of the downstream member 26) is restricted with respect to the second base material 34, Since the movement of the upstream member 24 and the downstream member 26 in the X direction and the Y direction is not restricted with respect to the first base material 32, the upstream member 24 and the downstream member 26 are not limited to the Z direction. Positioning in the direction along the Y plane is facilitated, and positioning can be performed with high accuracy. In addition, it is possible to suppress generation of excessive stress on the joint surface between the flow path member 30 and the upstream member 24 and the joint surface between the flow path member 30 and the downstream member 26.

  In the liquid ejection head 20 having such a configuration, the two flow path members 30 that are similarly configured between the first surface 26A of the downstream member 26 and the second surface 24B of the upstream member 24 have the Z direction. They are arranged side by side in a direction (direction on the first surface 26A of the downstream side member 26) orthogonal to (thickness direction or stacking direction). Therefore, compared with the case where one large flow path member 30 is arranged, each flow path member 30 can be reduced in size, so that the component accuracy can be improved. In addition, since the number of flow paths of one flow path member 30 can be reduced, the yield of the flow path members can be improved. Since the structure of positioning and movement restriction can be made common, an increase in the number of parts can be suppressed.

  By the way, when the two flow path members 30 are arranged side by side between the downstream member 26 and the upstream member 24 as in the present embodiment, the two flow path members 30 are provided with a plurality of components 35 and 36. If there is a variation in the dimension in the thickness direction due to stacking intersections or dimension intersections, the positioning accuracy of each flow path member 30 in the thickness direction is lowered. When the positioning accuracy in the thickness direction of each flow path member 30 is lowered, for example, the upstream side member 24 is likely to be inclined or bent, so that the downstream side member 26 or the upstream side member 24 and each flow path member 30 are between each flow path member 30. There is a possibility that the sealing performance of the resin may deteriorate. For example, when a seal member (not shown) that is sealed by being crushed in the thickness direction is mounted between the second surface of the upstream member 24 and the supply ports SI2 and SA2 of each flow path member 30, If the upstream member 24 is tilted or bent, the sealing member may not be sufficiently crushed and the sealing performance may be deteriorated.

  Therefore, in each flow path structure 22 of the present embodiment, a plurality of flow path members 30 are stacked between the first surface 26A of the downstream member 26 and the second surface 24B of the upstream member 24. An elastic member 60 is provided. According to such a configuration, even if there is a variation such as a stacked intersection in the thickness direction of each flow path member 30, it can be absorbed by the elastic deformation of the elastic member 60. Therefore, the positioning accuracy of the plurality of flow path members 30 provided between the downstream side member 26 and the upstream side member 24 can be improved. According to this, since the dispersion | variation in the crossing of the thickness direction can be suppressed, it becomes difficult for the downstream member 26 or the upstream member 24 to incline or bend. For this reason, the sealing performance between the downstream member 26 or the upstream member 24 and each flow path member 30 can be greatly improved.

  In addition, if there is an error or tolerance variation in the direction along the XY plane of the plurality of flow path members 30, for example, the flow path connected to the flow path of each flow path member is in one or both of the two members. When formed, the connection surfaces of these flow paths may be displaced. In this regard, in the present embodiment, the movement of the upstream member 24 and the downstream member 26 in the X direction and the Y direction with respect to the second base material 34 by the through holes 242 and 382 and the restriction pins 31 and 266 described above. Since the movement of the upstream member 24 and the downstream member 26 in the X direction and the Y direction is not restricted with respect to the first base material 32, the upstream member 24 and the downstream member 26 are moved only in the Z direction. In addition, positioning in the direction along the XY plane is facilitated, and positioning can be performed with high accuracy. Therefore, it can suppress that the connection surface of flow paths shifts | deviates.

  FIG. 3 is a case where a plurality of elastic members 60 are provided, and illustrates a configuration in which each of the elastic members 60 is stacked on each of the flow path members 30. For example, the elastic member 60 is accommodated in the space 342 in the flow path member 30 and is laminated in the thickness direction of the component parts 35 and 36. The elastic member 60 of FIG. 3 is provided on the component 36. However, the arrangement position of the elastic member 60 is not limited to the illustrated one. According to such a configuration, since the elastic member 60 is interposed between the first base material 32 and the second base material 34, due to a stacking tolerance or the like between the first base material 32 and the second base material 34. Even if there are variations in dimensions in the thickness direction, tolerances in the thickness direction (stacking direction) can be absorbed by elastic deformation of the elastic member 60.

  Since the elastic member 60 of this embodiment is laminated in the thickness direction of the component parts 35 and 36, the elastic member 60 is also provided with ink I and air A channels (not shown). However, only one of the ink I channel and the air A channel may be formed on the elastic member 60.

  The elastic member 60 only needs to have a flow path defined therein. That is, it may be defined by forming a flow path inside the elastic member 60, or may be defined between the elastic member 60 and another component member (for example, the component 36). In this way, by defining the flow path in the elastic member 60, it is not necessary to increase the number of parts that define the flow path, compared to the case where the elastic member 60 does not define the flow path, thereby suppressing an increase in the number of parts. And can be downsized.

<Method for Manufacturing Channel Structure>
FIG. 6 is a diagram for explaining a method of manufacturing the flow path structure 22 according to the present embodiment. In the manufacturing method of the flow path structure 22, the first step of arranging the plurality of flow path members 30 in which the elastic members 60 are stacked on the downstream member 26, and the upstream member 24 are elastic with the plurality of flow path members 30. And a second step of fixing to the downstream side member 26 via the member 60. In the flow channel structure 22 shown in FIG. 6, two flow channel members 30 are prepared in which the elastic members 60 are stacked on the component parts 35 and 36 and the upstream member 24 and the downstream member 26 are fixed. In the first step, the second base material 34 of the two flow path members 30 is fixed to the downstream side member 26, and the first base material 32 is arranged without being fixed. According to this, since the downstream side member 26 can be positioned by the second base material 34, it is easier to position compared to the case where both the first base material 32 and the second base material 34 are fixed to the downstream side member 26. Therefore, positioning accuracy can be improved.

  In the flow channel structure 22 shown in FIG. 6, in the second step, the upstream member 24 is fixed to the upper side of the two flow channel members 30, so that the upstream member 24 has a plurality of flow channel members 30 and elastic members 60. And is fixed to the downstream side member 26 via. The upstream member 24 may be directly fixed to the downstream member 26.

  According to such a manufacturing method, a flow including a plurality of flow path members 30 and an elastic member 60 stacked on the plurality of flow path members 30 between the downstream side member 26 and the upstream side member 24. The road structure 22 can be manufactured. Further, in the first step, even if the thickness direction dimension variation occurs due to the stacking tolerance of the component parts in the plurality of flow path members 30, the thickness direction (stacking direction) tolerance is set to the elastic member 60 in the second step. It can be absorbed by elastic deformation.

  Hereinafter, this will be specifically described with reference to FIG. 6 is a state before the elastic member 60 is deformed, and the solid line in FIG. 6 is a state after the elastic member 60 is deformed. In FIG. 6, in the state before the elastic member 60 is deformed, the thickness of the right flow path member 30 becomes larger than the thickness of the left flow path member 30 due to variation in the thickness direction intersection. Is assumed.

  In the second step, as shown by the solid line in FIG. 6, when the upstream member 24 is fixed to each flow path member 30 so that the elastic member 60 is compressed, the upstream member 24 and the downstream member 26 are in the thickness direction. Compressed and fixed. At this time, the right elastic member 60 is deformed (compressed) more largely than the left elastic member 60, so that the thickness of each flow path member 30 becomes substantially equal. If the thickness of the elastic member 60 on the right side after bonding is H1, the deformation amount is H1 ′, the thickness of the elastic member 60 on the left side after bonding is H2, and the deformation amount is H2 ′, then H1 <H2, H1 ′> H2 ′. It is. As described above, the variation in the crossing in the thickness direction in each flow path member 30 can be absorbed by the elastic deformation of the elastic member 60.

  Further, the deformation amount H1 ′ of the left elastic member 60 deformed by fixing is smaller than the thickness H1 of the elastic member 60 after deformation, and the deformation amount H2 ′ of the right elastic member 60 deformed by fixing is equal to that after deformation. It is smaller than the thickness H2 of the elastic member 60. According to such a configuration, even if the elastic member 60 is deformed, it has a sufficient thickness, and the flow path of the ink I and the air A is easily defined while maintaining the function of the elastic member 60 as an elastic body. If the elastic member 60 is distorted more than its thickness, it will be plastically deformed and the function as an elastic body will not be maintained, and the reaction force will be too great and other members (for example, the upstream member 24) will warp. As a result, the flow path may be distorted or displaced, and ink I or air A may leak. In this respect, according to the present embodiment, even if the elastic member 60 is deformed, the elastic member 60 has a sufficient thickness so that the reaction force of the elastic member 60 does not become too large. Can be suppressed.

  In addition, arrangement | positioning of the elastic member 60 is not restricted to the case illustrated in this embodiment, Between the 1st surface 26A of the downstream member 26, and the 2nd surface 24B of the upstream member 24, several flow path member 30 is provided. Any arrangement may be used as long as it is laminated. As in the present embodiment, by stacking each of the elastic members 60 on each of the plurality of flow path members 30, the arrangement of the flow path member 30 and the elastic member 60 can be changed as one set. Therefore, the freedom degree of arrangement | positioning of the flow-path member 30 and the elastic member 60 can be raised.

Second Embodiment
A second embodiment of the present invention will be described. In addition, about the element which an effect | action and function are the same as 1st Embodiment in 2nd Embodiment, the code | symbol used by description of 1st Embodiment is diverted, and each detailed description is abbreviate | omitted suitably. FIG. 7 is a cross-sectional view showing the configuration of the liquid ejection head 20 in the second embodiment, and corresponds to the VII-VII cross-sectional view of FIG. In the second embodiment, the flow path member 30 configured not only to absorb the stacking tolerance of the elastic member 60 but also to function as an actuator for driving a valve body and the like is illustrated.

  In the flow path member 30 in FIG. 7, a flow path WI for ink I communicating with the supply port SI2 and a flow path WA for air A communicating with the supply port SA2 are formed. The flow path WI of the ink I includes an upstream flow path WI1, a downstream flow path WI2, and a discharge flow path WI3. The upstream side of the upstream channel WI1 communicates with the supply port SI2, and the downstream side of the outlet channel WI3 communicates with the outlet port DI1. The outlet port DI1 communicates with the flow path DI of the downstream side member 26. A filter FA is provided in the middle of the upstream flow path WI1, and a filter FB is also provided in the middle of the downstream flow path WI2. The filters FA and FB collect bubbles and foreign matters mixed in the ink I.

  The downstream flow path WI2 extends in the Y direction, communicates with the upstream flow path WI1 on the positive side in the Y direction, and communicates with the downstream flow path WI2 on the negative side in the Y direction. A part of the wall of the downstream flow path WI2 is composed of a flexible member 62, and a pressure receiving plate 63 is installed on the lower surface (the surface on the positive side in the Z direction) of the flexible member 62. The flexible member 62 is a thin plate (film) member made of a resin material such as polypropylene, and the pressure receiving plate 63 is a flat plate material.

  A valve body V is provided below the pressure receiving plate 63 (on the positive side in the Z direction). The valve body V is provided between the upstream channel WI1 and the downstream channel WI2, and communicates (opens) or blocks (closes) the upstream channel WI1 and the downstream channel WI2. The valve body V is provided with a spring Sp that urges the valve body V in a direction in which the upstream flow path WI1 and the downstream flow path WI2 are blocked. Therefore, when no force is acting on the valve body V, the upstream flow path WI1 and the downstream flow path WI2 are blocked. On the other hand, the upstream flow path WI1 and the downstream flow path WI2 communicate with each other by moving the valve body V to the positive side in the Z direction against the biasing force of the spring Sp.

  Such a valve body V functions as a pressure regulating valve (self-sealing valve), and the flexible member 62 functions as a diaphragm that is displaced according to the pressure (negative pressure) in the downstream flow path WI2. For example, when the pressure in the downstream flow path WI2 decreases, the flexible member 62 bends downward, and the valve body V is pushed downward by the pressure receiving plate 63. As a result, the upstream flow path WI1 and the downstream flow path WI2 communicate with each other, so that the ink I from the supply port SI2 is supplied to the liquid storage chamber R of the liquid discharge section 70 through the outlet port DI1.

  According to such a configuration, in a non-printing state, that is, in a state where ink is not consumed, the valve body V is closed even if the ink I is pumped to the upstream flow path WI1 upstream of the valve body V. Thus, the upstream channel WI1 and the downstream channel WI2 are blocked. Therefore, the ink I in the upstream flow path WI1 is not supplied to the liquid storage chamber R of the liquid ejection unit 70.

  On the other hand, when the ink I temporarily stored in the liquid storage chamber R in the printing state is ejected from the nozzle N via the pressure chamber C and the ink I is consumed, the ink in the downstream channel WI2 is discharged. As the pressure decreases, the pressure decreases and the pressure in the downstream flow path WI2 decreases. As a result, the pressure receiving plate 63 is displaced in the direction of pushing down the valve body V, so that the valve body V is opened, and the upstream flow path WI1 and the downstream flow path WI2 communicate with each other. Accordingly, the ink I in the upstream flow path WI1 is supplied to the liquid storage chamber R of the liquid ejection unit 70.

  The elastic member 60 in FIG. 7 is provided in the space W in the flow path member 30. The elastic member 60 is arranged to divide the space W into a first space W1 and a second space W2. The flow path WA of the air A communicates with the first space W1. In accordance with the pressure change in the first space W1, the elastic member 60 bends in the space W and is displaced to the positive side and the negative side in the Z direction. The elastic member 60 includes a movable part 602, a peripheral end part 604, and a connecting part 606. The peripheral end portion 604 is a portion that is fixed so as to be stacked on the component 36. The movable portion 602 is a central portion that is displaced to the positive side and the negative side in the Z direction, and is a portion that is thicker than the peripheral end portion 604 and the connecting portion 606. The connecting portion 606 is a portion that connects the movable portion 602 and the peripheral end portion 604, and is thinner than the movable portion 602 and the peripheral end portion 604 so that the movable portion 602 is easily displaced.

  The movable portion 602 in FIG. 7 is disposed opposite to the flexible member 62 on the opposite side of the downstream flow path WI2 with the flexible member 62 interposed therebetween. When the air A is introduced into the first space W1 by driving the pump 16, the pressure in the first space W1 becomes higher than that in the second space W2, and the movable portion 602 is displaced to the positive side in the Z direction. When the movable part 602 is displaced to the positive side in the Z direction, the movable part 602 can push down the flexible member 62 to forcibly close the valve body V.

  As described above, according to the flow path structure 22 of the second embodiment, the peripheral end portion 604 of the elastic member 60 is fixed so as to be laminated on the component part 36, so that it is similar to the case of the first embodiment. In addition, even if there are variations such as stacked intersections in the thickness direction of each flow path member 30, it can be absorbed by elastic deformation of the elastic member 60. Therefore, the positioning accuracy of the plurality of flow path members 30 provided between the downstream side member 26 and the upstream side member 24 can be improved.

  Furthermore, according to the flow path structure 22 of the second embodiment, the valve body V as a pressure regulating valve provided in the flow path structure 22 can be operated using the displacement of the elastic member 60. As in the second embodiment, the elastic member 60 is provided in the space W so that the elastic member 60 can be displaced. It is also possible to operate a valve (choke valve or the like), to function as a pump, or to function as a pressure buffer mechanism (damper). As described above, according to the second embodiment, the elastic member 60 can have not only the function of absorbing the variation in the stacking intersection of the flow path members 30 but also the function of operating each part of the flow path structure 22. it can.

<Modification>
Each aspect and each embodiment illustrated above can be variously modified. Specific modifications are exemplified below. Two or more aspects arbitrarily selected from the following examples can be appropriately combined as long as they do not contradict each other.

(1) In the above-described embodiment, the serial head that reciprocally reciprocates the carriage 18 on which the liquid discharge head 20 is mounted along the X direction is exemplified. However, the line head in which the liquid discharge head 20 is arranged over the entire width of the medium 11. The present invention can also be applied to.

(2) In the above-described embodiment, the piezoelectric liquid ejection head 20 using the piezoelectric element that imparts mechanical vibration to the pressure chamber is exemplified. However, a heating element that generates bubbles in the pressure chamber by heating is used. It is also possible to employ a heat-type liquid discharge head that is used.

(3) The liquid ejecting apparatus exemplified in the above-described embodiment can be employed in various apparatuses such as a facsimile apparatus and a copying machine in addition to an apparatus dedicated to printing. However, the use of the liquid ejection apparatus of the present invention is not limited to printing. For example, a liquid discharge device that discharges a solution of a color material is used as a manufacturing device that forms a color filter of a liquid crystal display device. In addition, a liquid discharge apparatus that discharges a solution of a conductive material is used as a manufacturing apparatus that forms wiring and electrodes of a wiring board.

DESCRIPTION OF SYMBOLS 10 ... Liquid discharge apparatus, 11 ... Medium, 12 ... Control apparatus, 14 ... Liquid container, 15 ... Conveyance mechanism, 16 ... Pump, 18 ... Carriage, 20 ... Liquid discharge head, 22 ... Channel structure, 23 ... Head main body 24 ... upstream member, 24A ... first surface, 24B ... second surface, 242 ... through hole, 25 ... introduction part, 252 ... piping, 26 ... downstream member, 26A ... first surface, 26B ... second surface. 261 ... space, 262 ... channel substrate, 263 ... opening, 264 ... opening, 265 ... projection, 266 ... regulator pin, 27 ... frame, 271 ... space, 272 ... fixing plate, 274 ... opening, 30 ... Channel member, 31 ... Restriction pin, 31, 266 ... Restriction pin, 32 ... First base material, 34 ... Second base material, 342 ... Space, 35, 36 ... Components, 37 ... Extension part, 38 ... Extension part, 382 ... Through hole, 50 ... Circuit board, 52 ... Terminal part 53 ... Opening part, 54 ... Connector, 55 ... Through hole, 60 ... Elastic member, 602 ... Movable part, 604 ... Peripheral end part, 606 ... Connection part, 62 ... Flexible member, 63 ... Pressure receiving plate, 70 ... Liquid Discharge unit, 71 ... flow path forming substrate, 712 ... opening, 714 ... supply flow path, 716 ... communication flow path, 72 ... pressure chamber forming substrate, 722 ... opening, 73 ... vibration plate, 732 ... piezoelectric element, 74 ... Nozzle plate, 75 ... Compliance section, 752 ... Sealing plate, 754 ... Support, 76 ... Protection plate, 77 ... Support, 772 ... Space, 774 ... Supply port, 78 ... Individual wiring board, A ... Air, C ... pressure chamber, DI ... flow path, DI1 ... outlet, F ... flexible wiring, FA, FB ... filter, H1, H2 ... thickness, H1 ', H2' ... deformation, I ... ink, N ... nozzle, R ... Liquid storage chamber, Sp ... Spring, SA1 ... Inlet port, SA2 ... Supply port, I1 ... Inlet port, SI2 ... Supply port, V ... Valve, W ... Space, W1 ... First space, W2 ... Second space, WA ... Channel, WI ... Channel, WI1 ... Upstream channel, WI2 ... Downstream channel, WI3-Derived channel.

Claims (9)

A first member having a first surface;
A second member having a second surface;
A plurality of flow path members provided between the first surface and the second surface and defining flow paths;
A flow channel structure comprising: an elastic member that is provided by being stacked on the plurality of flow channel members and defines the flow channel between the first surface and the second surface. The elastic member is plural,
The flow path structure according to claim 1, wherein each of the elastic members is laminated on each of the flow path members. Each of the flow path members includes a first base material and a second base material stacked between the first surface and the second surface,
The flow path structure according to claim 1 or 2, wherein the elastic member is interposed between the first base material and the second base material. The movement of the first member and the second member in the direction on the first surface with respect to the second base material is restricted, and the movement in the direction on the first surface with respect to the first base material is restricted. The flow path structure according to claim 3, which is not regulated. The flow path according to any one of claims 1 to 3, wherein a deformation amount of the elastic member that is fixed and deformed between the first surface and the second surface is smaller than a thickness of the elastic member after deformation. Structure. The flow path structure according to any one of claims 1 to 5, wherein the elastic member is provided in a space in the flow path member and is displaced according to a pressure change in the space. A flow path structure according to any one of claims 1 to 6;
A liquid ejection head comprising: a nozzle that ejects liquid from the flow path structure by driving a drive element. A transport mechanism for transporting the medium;
A liquid ejection apparatus comprising: the liquid ejection head according to claim 7, which ejects a liquid onto the medium. A first step of arranging a plurality of flow path members in which elastic members are laminated on the first member;
And a second step of fixing the second member to the first member via the plurality of flow path members and the elastic member.

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