JP2017170410A - Method for manufacturing functional film - Google Patents
Method for manufacturing functional film Download PDFInfo
- Publication number
- JP2017170410A JP2017170410A JP2016062277A JP2016062277A JP2017170410A JP 2017170410 A JP2017170410 A JP 2017170410A JP 2016062277 A JP2016062277 A JP 2016062277A JP 2016062277 A JP2016062277 A JP 2016062277A JP 2017170410 A JP2017170410 A JP 2017170410A
- Authority
- JP
- Japan
- Prior art keywords
- functional film
- film
- metal oxide
- metal
- polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title abstract description 18
- 230000004888 barrier function Effects 0.000 claims abstract description 20
- 239000002243 precursor Substances 0.000 claims description 26
- 229910044991 metal oxide Inorganic materials 0.000 claims description 25
- 150000004706 metal oxides Chemical class 0.000 claims description 25
- 229920000642 polymer Polymers 0.000 claims description 23
- 239000002904 solvent Substances 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 21
- 229920005575 poly(amic acid) Polymers 0.000 claims description 14
- 229920001721 polyimide Polymers 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 8
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- 150000003839 salts Chemical class 0.000 claims description 7
- 239000004642 Polyimide Substances 0.000 claims description 6
- 150000004703 alkoxides Chemical class 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 150000004696 coordination complex Chemical class 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 9
- 229920006254 polymer film Polymers 0.000 abstract description 8
- 238000000576 coating method Methods 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 48
- 239000010410 layer Substances 0.000 description 22
- 239000007789 gas Substances 0.000 description 18
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- 239000000243 solution Substances 0.000 description 14
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- 239000003054 catalyst Substances 0.000 description 2
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- 150000004820 halides Chemical class 0.000 description 1
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- 238000002156 mixing Methods 0.000 description 1
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- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004634 thermosetting polymer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
本発明は、機能性フィルムの製造方法に関し、特に、ガスバリア性フィルムにおいて、良好なガスバリア性を有するとともに、高価な真空設備を用いるスパッタ工程などの工程が不要であり、簡便かつ低コストで製造できる製造方法に関するものである。 The present invention relates to a method for producing a functional film, and in particular, a gas barrier film has good gas barrier properties and does not require a step such as a sputtering step using expensive vacuum equipment, and can be produced simply and at low cost. It relates to a manufacturing method.
機能性フィルムは、ポリマーフィルム表面に目的とする機能に応じて様々な薄膜層を成膜してなるものである。このような機能性フィルムは、液晶ディスプレイや有機ELディスプレイ等の表示装置、半導体装置、太陽電池等にガスバリア性フィルム、光学フィルタや反射防止フィルム等のフィルムとして利用されている。 The functional film is formed by forming various thin film layers on the surface of the polymer film according to the intended function. Such a functional film is used as a film such as a gas barrier film, an optical filter, or an antireflection film in display devices such as liquid crystal displays and organic EL displays, semiconductor devices, and solar cells.
例えば、ガスバリア性フィルムは、ポリマーフィルムの表面に水蒸気等に対するガスバリア性を発現する金属や金属酸化物から構成される層を成膜してなる。このようなガスバリア性層は、ポリマーフィルム上にプラズマ化学気相蒸着法により金属酸化物膜を形成する方法が開示されている(特許文献1)。また、ポリマーフィルム上に無機前駆体化合物を塗布して塗膜を形成し、該塗膜に対し、エキシマランプを用いて真空紫外線を照射することにより無機化合物膜を形成する方法が開示されている(特許文献2)。 For example, a gas barrier film is formed by forming a layer composed of a metal or metal oxide that exhibits gas barrier properties against water vapor or the like on the surface of a polymer film. For such a gas barrier layer, a method is disclosed in which a metal oxide film is formed on a polymer film by plasma chemical vapor deposition (Patent Document 1). Also disclosed is a method of forming an inorganic compound film by applying an inorganic precursor compound on a polymer film to form a coating film, and irradiating the coating film with vacuum ultraviolet rays using an excimer lamp. (Patent Document 2).
しかし、特許文献1に開示されたプラズマ化学気相蒸着法は、無機化合物の膜形成に大型の真空設備が必要となり、加えて膜形成の生産速度が遅く、製造コストを低減することが難しい。特許文献2に開示された方法でも、ポリマーフィルムに塗布、乾燥する工程に加え、真空紫外線を照射する工程を要するため、工程や必要な設備が多くなることなどが課題である。 However, the plasma-enhanced chemical vapor deposition method disclosed in Patent Document 1 requires a large vacuum facility for forming a film of an inorganic compound. In addition, the production speed of the film formation is slow, and it is difficult to reduce the manufacturing cost. Even in the method disclosed in Patent Document 2, a process of applying vacuum ultraviolet rays is required in addition to a process of applying and drying the polymer film, and therefore, there are problems such as an increase in processes and necessary facilities.
すなわち、本発明の課題は、優れた性能を有するとともに、大型の真空設備や多くの工程が不要であり、簡便かつ低コストで製造できる機能性フィルムの製造方法を提供することにある。 That is, the subject of this invention is providing the manufacturing method of the functional film which has the outstanding performance, and a large-sized vacuum installation and many processes are unnecessary, and can be manufactured simply and at low cost.
これらの課題を解決するため、本発明者はポリマーフィルムと機能性層を同時に形成することにより、大型の真空設備や特別な処理を必要とせず、さらに簡便なプロセスで優れたガスバリア性フィルムを製造できる方法を見い出し、発明を完成するに至った。 In order to solve these problems, the present inventor can produce an excellent gas barrier film by a simpler process by forming a polymer film and a functional layer at the same time without requiring a large vacuum facility or special treatment. We have found a method that can be used to complete the invention.
すなわち、本発明は、フィルムの少なくとも一方の面に金属酸化物層を有する機能性フィルムの製造方法であって、ポリマー、溶媒、および金属酸化物層前駆体を含む混合物を支持体に塗布後、溶媒の除去および金属酸化物層前駆体の硬化を行うことを特徴とする機能性フィルムの製造方法に関する。 That is, the present invention is a method for producing a functional film having a metal oxide layer on at least one surface of the film, and after applying a mixture containing a polymer, a solvent, and a metal oxide layer precursor to a support, The present invention relates to a method for producing a functional film, which comprises removing a solvent and curing a metal oxide layer precursor.
好ましい実施態様は、溶媒の除去および金属酸化物層前駆体の硬化を同時に行うことを特徴とする、上記の機能性フィルムの製造方法に関する。 A preferred embodiment relates to the method for producing a functional film described above, wherein the solvent is removed and the metal oxide layer precursor is simultaneously cured.
好ましい実施態様は、機能性フィルムがガスバリア性フィルムであることを特徴とする、上記の機能性フィルムの製造方法に関する。 A preferred embodiment relates to the above-described method for producing a functional film, wherein the functional film is a gas barrier film.
好ましい実施態様は、金属酸化物層前駆体が溶媒に可溶であり、かつポリマーに不溶であることを特徴とする、上記の機能性フィルムの製造方法に関する。 A preferred embodiment relates to the method for producing a functional film described above, wherein the metal oxide layer precursor is soluble in a solvent and insoluble in a polymer.
好ましい実施態様は、金属酸化物層前駆体がポリシラザン化合物、金属アルコキシド、金属塩、または金属錯体の少なくともいずれか1つであることを特徴とする、上記の機能性フィルムの製造方法に関する。 A preferred embodiment relates to the method for producing a functional film described above, wherein the metal oxide layer precursor is at least one of a polysilazane compound, a metal alkoxide, a metal salt, or a metal complex.
好ましい実施態様は、ポリマーがポリイミドまたはポリアミック酸の少なくともいずれか1つを含むことを特徴とする、上記の機能性フィルムの製造方法に関する。 A preferred embodiment relates to the above-described method for producing a functional film, wherein the polymer contains at least one of polyimide and polyamic acid.
本発明の機能性フィルムの製造方法によると、ポリマーフィルムの形成と同時に機能性層を形成することで工程を簡略化できる。加えて真空装置や塗工装置等が不要となる。これらにより、簡便な製造プロセスで優れた性能を発現する機能性フィルムが得られる。 According to the method for producing a functional film of the present invention, the process can be simplified by forming the functional layer simultaneously with the formation of the polymer film. In addition, a vacuum device or a coating device is not necessary. By these, the functional film which expresses the outstanding performance with a simple manufacturing process is obtained.
本発明の実施の形態について、以下に説明する。ただし、本発明はこれに限定されるものではなく、記述した範囲内で種々の変形を加えた態様で実施できる。 Embodiments of the present invention will be described below. However, this invention is not limited to this, It can implement in the aspect which added the various deformation | transformation within the described range.
なお、本明細書において特記しない限り、数値範囲を表す「A〜B」は、「A以上(Aを含みかつAより大きい)、B以下(Bを含みかつBより小さい)」を意味する。 Unless otherwise specified in the present specification, “A to B” representing a numerical range means “A or more (including A and greater than A)” and “B or less (including B and less than B)”.
本発明の機能性フィルムの製造方法は、ポリマー、溶媒、および金属酸化物層前駆体を含む混合物を支持体に塗布後、溶媒の除去および金属酸化物層前駆体の硬化を行うことで、フィルムの少なくとも一方の面に金属酸化物層を有する機能性フィルムの製造方法である。 The method for producing a functional film of the present invention comprises: applying a mixture containing a polymer, a solvent, and a metal oxide layer precursor to a support; then removing the solvent and curing the metal oxide layer precursor; This is a method for producing a functional film having a metal oxide layer on at least one surface thereof.
<機能性フィルム>
本発明における機能性フィルムとは基材となるフィルムの機能を向上することができれば特に制限されない。例えば、ガスバリア性フィルムやハードコートフィルムなどの機能性を例示することができる。
<Functional film>
The functional film in the present invention is not particularly limited as long as it can improve the function of the film serving as the base material. For example, functionalities such as a gas barrier film and a hard coat film can be exemplified.
<ポリマー>
本発明の製造方法において用いるフィルムに含まれるポリマーは、特に限定されず、熱可塑性ポリマー、熱硬化性ポリマーや光硬化性ポリマーなどを例示できる。より具体的には、シクロオレフィン系ポリマー、ポリカーボネート、ポリエステル、ポリアミド、ポリイミド、ポリアミド−イミド又はポリエステル−イミド等の各種ポリマーを挙げることができる。これらのポリマーは、いずれか一種類を単独で使用しても良いし、異なるポリマー2種類以上の混合物として使用してもよい。その中でも、高耐熱性、高強度を有するポリイミドが特に好ましい。
<Polymer>
The polymer contained in the film used in the production method of the present invention is not particularly limited, and examples thereof include a thermoplastic polymer, a thermosetting polymer, and a photocurable polymer. More specifically, various polymers such as a cycloolefin polymer, polycarbonate, polyester, polyamide, polyimide, polyamide-imide, or polyester-imide can be exemplified. Any one of these polymers may be used alone, or a mixture of two or more different polymers may be used. Among these, polyimide having high heat resistance and high strength is particularly preferable.
ポリイミドは、ポリアミック酸を前駆体として得られる。ポリアミック酸は、芳香族ジアミン(以下、ジアミンともいう)と芳香族酸二無水物(以下、酸二無水物ともいう)とを反応させて得られる。より具体的には、通常、芳香族ジアミンと芳香族酸二無水物とを、実質的に等モル量となるように有機溶媒中に溶解させて、得られた溶液を、制御された温度条件下で、酸二無水物とジアミンとの重合が完了するまで撹拌することによって製造される。このようにして得られたポリアミック酸を含む溶液は、通常5重量%〜35重量%、より好ましくは10重量%〜30重量%の濃度で得られる。この範囲の濃度である場合に適切な分子量と溶液粘度となり、フィルム等へ成形することが容易なポリマー溶液を得ることが可能となる。 Polyimide is obtained using polyamic acid as a precursor. The polyamic acid is obtained by reacting an aromatic diamine (hereinafter also referred to as diamine) and an aromatic dianhydride (hereinafter also referred to as acid dianhydride). More specifically, usually, the aromatic diamine and the aromatic dianhydride are dissolved in an organic solvent so as to have a substantially equimolar amount, and the resulting solution is subjected to controlled temperature conditions. Under stirring until the polymerization of acid dianhydride and diamine is complete. The solution containing the polyamic acid thus obtained is usually obtained at a concentration of 5 wt% to 35 wt%, more preferably 10 wt% to 30 wt%. When the concentration is in this range, an appropriate molecular weight and solution viscosity are obtained, and a polymer solution that can be easily formed into a film or the like can be obtained.
芳香族ジアミンは、特に限定されるものではないが、例えば、3,3’−ジアミノジフェニルエーテル、3,4’−ジアミノジフェニルエーテル、4,4’−ジアミノジフェニルエーテル、2,2−ビス{4−(4−アミノフェノキシ)フェニル}プロパン、2,2−ビス{4−(4−アミノフェノキシ)フェニル}ヘキサフルオロプロパン、ビス{4−(3−アミノフェノキシ)フェニル}スルホン、ビス{4−(4−アミノフェノキシ)フェニル}スルホン、1,3−ビス(3−アミノフェノキシ)ベンゼン、1,3−ビス(4−アミノフェノキシ)ベンゼン、1,4−ビス(4−アミノフェノキシ)ベンゼン、3,3’−ジアミノベンゾフェノン、4,4’−ジアミノベンゾフェノン、3,3’−ジクロロベンジジン、3,3’−ジメチルベンジジン、2,2’−ジメチルベンジジン、3,3’−ジメトキシベンジジン、2,2’−ジメトキシベンジジン、1,4−ジアミノベンゼン(p−フェニレンジアミン)、1,3−ジアミノベンゼン(m−フェニレンジアミン)、4、4’−ジアミノジフェニルスルホン、3、3’−ジアミノジフェニルスルホン、9、9−ビス(4−アミノフェニル)フルオレン、4、4’−(1,4−フェニレンビス(1−メチルエチリデン))ビスアニリン、4、4’−(1,3−フェニレンビス(1−メチルエチリデン))ビスアニリン、4、4’−ジアミノベンズアニリド等、またはこれらの2種類以上の組み合わせを挙げることができる。 The aromatic diamine is not particularly limited. For example, 3,3′-diaminodiphenyl ether, 3,4′-diaminodiphenyl ether, 4,4′-diaminodiphenyl ether, 2,2-bis {4- (4 -Aminophenoxy) phenyl} propane, 2,2-bis {4- (4-aminophenoxy) phenyl} hexafluoropropane, bis {4- (3-aminophenoxy) phenyl} sulfone, bis {4- (4-amino Phenoxy) phenyl} sulfone, 1,3-bis (3-aminophenoxy) benzene, 1,3-bis (4-aminophenoxy) benzene, 1,4-bis (4-aminophenoxy) benzene, 3,3′- Diaminobenzophenone, 4,4'-diaminobenzophenone, 3,3'-dichlorobenzidine, 3,3'-dimethyl Rubenzidine, 2,2'-dimethylbenzidine, 3,3'-dimethoxybenzidine, 2,2'-dimethoxybenzidine, 1,4-diaminobenzene (p-phenylenediamine), 1,3-diaminobenzene (m-phenylenediamine) ), 4,4′-diaminodiphenylsulfone, 3,3′-diaminodiphenylsulfone, 9,9-bis (4-aminophenyl) fluorene, 4,4 ′-(1,4-phenylenebis (1-methylethylidene) )) Bisaniline, 4,4 ′-(1,3-phenylenebis (1-methylethylidene)) bisaniline, 4,4′-diaminobenzanilide, or a combination of two or more of these.
芳香族酸二無水物も、特に限定されるものではないが、例えば、3,3’,4,4’−ベンゾフェノンテトラカルボン酸二無水物、2,2’,3,3’−ベンゾフェノンテトラカルボン酸二無水物、4,4’−オキシジフタル酸二無水物、3,4’−オキシフタル酸二無水物、エチレンビス(トリメリット酸モノエステル酸無水物)、ビスフェノールAビス(トリメリット酸モノエステル酸無水物)、ピロメリット酸二無水物、2,3,6,7−ナフタレンテトラカルボン酸二無水物、1,4,5,8−ナフタレンテトラカルボン酸二無水物、3,3’,4,4’−ジフェニルスルホンテトラカルボン酸二無水物、3,3’,4,4’−ジメチルジフェニルシランテトラカルボン酸二無水物、3,3’,4,4’−テトラフェニルシランテトラカルボン酸二無水物、1,2,3,4−フランテトラカルボン酸二無水物、4,4’−ビス(3,4−ジカルボキシフェノキシ)ジフェニルプロパン二無水物、4,4’−ヘキサフルオロイソプロピリデンジフタル酸無水物、3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物、p−フェニレンビス(トリメリット酸モノエステル無水物)、p−フェニレンジフタル酸無水物等の芳香族テトラカルボン酸二無水物等、またはこれらの2種類以上の組み合わせを挙げることができる。 The aromatic dianhydride is not particularly limited, and for example, 3,3 ′, 4,4′-benzophenone tetracarboxylic dianhydride, 2,2 ′, 3,3′-benzophenone tetracarboxylic Acid dianhydride, 4,4'-oxydiphthalic dianhydride, 3,4'-oxyphthalic dianhydride, ethylene bis (trimellitic acid monoester acid anhydride), bisphenol A bis (trimellitic acid monoester acid) Anhydride), pyromellitic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, 3,3 ′, 4 4'-diphenylsulfonetetracarboxylic dianhydride, 3,3 ', 4,4'-dimethyldiphenylsilane tetracarboxylic dianhydride, 3,3', 4,4'-tetraphenylsilane Carboxylic dianhydride, 1,2,3,4-furantetracarboxylic dianhydride, 4,4′-bis (3,4-dicarboxyphenoxy) diphenylpropane dianhydride, 4,4′-hexafluoro Isopropylidene diphthalic anhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride, p-phenylenebis (tri Merit acid monoester anhydride), aromatic tetracarboxylic dianhydride such as p-phenylenediphthalic anhydride, or a combination of two or more of these.
なお、芳香族ジアミンと芳香族酸二無水物とは、実質的に等モル量となるように反応させればよく、添加の順序、モノマーの組み合わせおよび組成は特に限定されるものではない。 The aromatic diamine and the aromatic dianhydride may be reacted so as to have a substantially equimolar amount, and the order of addition, the combination of monomers, and the composition are not particularly limited.
ポリアミック酸を製造するための重合用溶媒として用いられる有機溶媒は、芳香族ジアミン成分、芳香族酸二無水物成分、および得られるポリアミック酸を溶解するものであれば、特に限定されるものではない。重合用溶媒として、例えば、N,N−ジメチルホルムアミド、N,N−ジエチルホルムアミド、N−メチル−2−ピロリドン、N,N−ジメチルアセトアミド等を用いれば、得られるポリアミック酸の溶液をそのまま、フィルム化に用いるポリアミック酸溶液(ワニス)とすることができる。 The organic solvent used as the polymerization solvent for producing the polyamic acid is not particularly limited as long as it dissolves the aromatic diamine component, the aromatic dianhydride component, and the resulting polyamic acid. . If, for example, N, N-dimethylformamide, N, N-diethylformamide, N-methyl-2-pyrrolidone, N, N-dimethylacetamide or the like is used as a polymerization solvent, the resulting polyamic acid solution is used as it is as a film. It can be set as the polyamic acid solution (varnish) used for chemical conversion.
ポリアミック酸を製造するための反応温度は特に制限されないが、−10℃〜+50℃であることが好ましい。かかる範囲内であることにより、良好な反応速度で反応が進み、生産性に優れるため好ましい。また、反応時間も特に限定されるものではないが、通常数分〜数時間である。 The reaction temperature for producing the polyamic acid is not particularly limited, but is preferably −10 ° C. to + 50 ° C. Within such a range, the reaction proceeds at a good reaction rate and is excellent in productivity, which is preferable. The reaction time is not particularly limited, but is usually from several minutes to several hours.
ポリイミドは、ポリアミック酸を熱処理(熱キュア法ともいう)または硬化剤と混合して熱処理(化学キュア法ともいう)して、イミド化したポリマーである。硬化剤とは、脱水剤および触媒を含む趣旨である。ここで脱水剤とは、ポリアミド酸に対する脱水閉環剤であれば特に限定されるものではないが、例えば、脂肪族酸無水物、芳香族酸無水物、N,N’−ジアルキルカルボジイミド、低級脂肪族ハロゲン化物、ハロゲン化低級脂肪族酸無水物、アリールスルホン酸ジハロゲン化物、チオニルハロゲン化物等を挙げることができる。これらは単独で用いてもよいし、2種類以上を適宜組み合わせて用いてもよい。これらの中でも、脂肪族酸無水物または芳香族酸無水物を特に好適に用いることができる。 Polyimide is a polymer imidized by heat treatment (also referred to as a thermal cure method) or a heat treatment (also referred to as a chemical cure method) by mixing polyamic acid with a curing agent. The curing agent is intended to include a dehydrating agent and a catalyst. Here, the dehydrating agent is not particularly limited as long as it is a dehydrating ring-closing agent for polyamic acid. For example, aliphatic acid anhydride, aromatic acid anhydride, N, N′-dialkylcarbodiimide, lower aliphatic Listed are halides, halogenated lower aliphatic acid anhydrides, aryl sulfonic acid dihalides, thionyl halides, and the like. These may be used alone or in appropriate combination of two or more. Among these, aliphatic acid anhydrides or aromatic acid anhydrides can be particularly preferably used.
触媒としては、ポリアミド酸に対する脱水剤の脱水閉環作用を促進する効果を有する成分であれば特に限定されるものではないが、具体的には、例えば、脂肪族3級アミン、芳香族3級アミン、複素環式3級アミン等を挙げることができる。これらの中でも、例えば、イミダゾール、ベンズイミダゾール、イソキノリン、キノリン、ジエチルピリジンまたはβ−ピコリン等の含窒素複素環化合物が特に好ましく用いられる。 The catalyst is not particularly limited as long as it is a component having an effect of promoting the dehydrating and ring-closing action of the dehydrating agent on the polyamic acid. Specifically, for example, an aliphatic tertiary amine, an aromatic tertiary amine, and the like. And heterocyclic tertiary amines. Among these, for example, nitrogen-containing heterocyclic compounds such as imidazole, benzimidazole, isoquinoline, quinoline, diethylpyridine, and β-picoline are particularly preferably used.
<溶媒>
本発明の製造方法において用いる溶媒は、ポリマーとガスバリア性物質前駆体を溶解できるものであればよく、使用するポリマー及びガスバリア性物質前駆体に応じて適宜選択することができる。具体的には、例えば、クロロホルム、ジクロロメタン、四塩化炭素、ジクロロエタン、テトラクロロエタン、トリクロロエチレン、テトラクロロエチレン、クロロベンゼン、o−ジクロロベンゼン等のハロゲン化炭化水素類、フェノール、p−クロロフェノール等のフェノール類、メタノール、エタノール等のアルコール類、ベンゼン、トルエン、キシレン、メトキシベンゼン、1,2−ジメトキシベンゼン等の芳香族炭化水素類、アセトン、酢酸エチル、t−ブチルアルコール、グリセリン、エチレングリコール、トリエチレングリコール、エチレングリコールモノメチルエーテル、ジエチレングリコールジメチルエーテル、プロピレングリコール、ジプロピレングリコール、2−メチル−2,4−ペンタンジオール、エチルセルソルブ、ブチルセルソルブ、2−ピロリドン、N−メチル−2−ピロリドン、ピリジン、トリエチルアミン、ジメチルホルムアミド、ジメチルアセトアミド、アセトニトリル、ブチロニトリル、メチルイソブチルケトン、メチルエーテルケトン、シクロヘキサン、シクロペンタノン、二硫化炭素、水等を用いることができる。これら溶媒は、1種又は2種以上を適宜に組み合わせて使用することができる。
<Solvent>
The solvent used in the production method of the present invention may be any solvent as long as it can dissolve the polymer and the gas barrier substance precursor, and can be appropriately selected according to the polymer to be used and the gas barrier substance precursor. Specifically, for example, halogenated hydrocarbons such as chloroform, dichloromethane, carbon tetrachloride, dichloroethane, tetrachloroethane, trichloroethylene, tetrachloroethylene, chlorobenzene, o-dichlorobenzene, phenols such as phenol and p-chlorophenol, methanol , Alcohols such as ethanol, aromatic hydrocarbons such as benzene, toluene, xylene, methoxybenzene, 1,2-dimethoxybenzene, acetone, ethyl acetate, t-butyl alcohol, glycerin, ethylene glycol, triethylene glycol, ethylene Glycol monomethyl ether, diethylene glycol dimethyl ether, propylene glycol, dipropylene glycol, 2-methyl-2,4-pentanediol, ethyl cellosolve, Use tilselsolve, 2-pyrrolidone, N-methyl-2-pyrrolidone, pyridine, triethylamine, dimethylformamide, dimethylacetamide, acetonitrile, butyronitrile, methyl isobutyl ketone, methyl ether ketone, cyclohexane, cyclopentanone, carbon disulfide, water, etc. be able to. These solvents can be used alone or in combination of two or more.
<金属酸化物層前駆体>
本発明の製造方法において用いる金属酸化物層前駆体は、熱、光等のエネルギーを与えることにより酸素や水等と反応し、金属酸化物層に変化するものであれば特に限定なく使用することでき、目的の機能性に応じて適宜選択することができる。具体的には、例えば、ポリシラザン化合物、金属アルコキシド、金属塩、有機金属錯体等を用いることができる。これらガスバリア性物質前駆体は、1種又は2種以上を適宜に組み合わせて使用することもできる。
<Metal oxide layer precursor>
The metal oxide layer precursor used in the production method of the present invention is not particularly limited as long as it reacts with oxygen, water, etc. by applying energy such as heat and light, and changes into a metal oxide layer. And can be appropriately selected according to the target functionality. Specifically, for example, polysilazane compounds, metal alkoxides, metal salts, organometallic complexes, and the like can be used. These gas barrier substance precursors can be used alone or in combination of two or more.
本発明の金属酸化物前駆体は、溶媒に可溶であるとともに、ポリマーに不溶であることが好ましい。金属酸化物前駆体は、溶媒に可溶であるとは、金属酸化物前駆体が溶媒に溶媒和している状態を指す。また、金属酸化物前駆体がポリマーに不溶であるとは、ポリマー分子と金属酸化物前駆体が溶媒和しない状態を指す。 The metal oxide precursor of the present invention is preferably soluble in a solvent and insoluble in a polymer. The metal oxide precursor being soluble in a solvent means a state in which the metal oxide precursor is solvated in the solvent. In addition, that the metal oxide precursor is insoluble in the polymer refers to a state where the polymer molecule and the metal oxide precursor are not solvated.
ポリシラザン化合物はヒドロキシル基を有する物質と反応して二酸化ケイ素を生成する物質である。例えば、一般式(SiR4R5NR6)(ただし、R4〜R6はそれぞれ独立に、水素原子、炭素数1〜8の炭化水素基、炭素数1〜8の置換炭化水素基)で表される構造であるが、中でも一般式(SiH2NH)で表されるペルヒドロポリシラザンが好ましい。ポリシラザン化合物は有機溶媒に溶解した溶液状態で市販されているなど入手が容易であり、市販品等をそのままガスバリア性物質前駆体を含むガスバリアー層形成用塗布液として使用することができる。ポリシラザン溶液の市販品としては、AZエレクトロニックマテリアルズ株式会社製のアクアミカ(登録商標)NN120−10、NN120−20、NAX120−20、NN110、NN310、NN320、NL110A、NL120A、NL120−20、NL150A、NP110、NP140、SP140等が挙げられる。 A polysilazane compound reacts with a substance having a hydroxyl group to produce silicon dioxide. For example, in the general formula (SiR 4 R 5 NR 6 ) (wherein R 4 to R 6 are each independently a hydrogen atom, a hydrocarbon group having 1 to 8 carbon atoms, or a substituted hydrocarbon group having 1 to 8 carbon atoms). Among them, perhydropolysilazane represented by the general formula (SiH 2 NH) is preferable. The polysilazane compound is easily available because it is commercially available in the form of a solution dissolved in an organic solvent, and a commercially available product or the like can be used as it is as a coating solution for forming a gas barrier layer containing a gas barrier substance precursor. As a commercial item of polysilazane solution, AZ Electronic Materials Co., Ltd. Aquamica (registered trademark) NN120-10, NN120-20, NAX120-20, NN110, NN310, NN320, NL110A, NL120A, NL120-20, NL150A, NP110 NP140, SP140 and the like.
金属アルコキシドはアルコール(R−OH)の水素原子を金属で置換した化合物である 。例えば、一般式(R1)n−x−M−(OR2)x (ただしR1、R2はそれぞれ独立に、炭素数1〜8の有機基、Mは金属原子。xは2〜4であり、nは2〜4である)で表されるものである。金属原子としてはSi、Ti、Al、Zr等を挙げることができる。 A metal alkoxide is a compound in which a hydrogen atom of an alcohol (R—OH) is substituted with a metal. For example, the general formula (R 1) n-x -M- (OR 2) x ( provided that R 1, R 2 are each independently an organic group having 1 to 8 carbon atoms, M is a metal atom .x 2-4 And n is 2 to 4). Examples of metal atoms include Si, Ti, Al, and Zr.
金属MがSiである(R1)n−x−Si−(OR2)xとしては、テトラメトキシシラン、テトラエトキシシラン、テトラプロポキシシラン、テトラブトキシシラン、メチルトリメトキシシラン、メチルトリエトキシシラン、ジメチルジメトキシシラン、ジメチルジエトキシシラン等を挙げることができる。 Metal M is Si as the (R 1) n-x -Si- (OR 2) x, tetramethoxysilane, tetraethoxysilane, tetrapropoxysilane, tetrabutoxysilane, methyltrimethoxysilane, methyltriethoxysilane, Examples thereof include dimethyldimethoxysilane and dimethyldiethoxysilane.
金属MがZrである(R1)n−x−Zr−(OR2)xとしては、テトラメトキシジルコニウム、テトラエトキシジルコニウム、テトライソプロポキシジルコニウム、テトラブトキシジルコニウム等を挙げることができる。
金属MがTiである(R1)n−x−Ti−(OR2)xとしては、テトラメトキシチタニウム、テトラエトキシチタニウム、テトライソプロポキシチタニウム、テトラブトキシチタニウム等を挙げることができる。
Examples of (R 1 ) n -x-Zr- (OR 2 ) x in which the metal M is Zr include tetramethoxyzirconium, tetraethoxyzirconium, tetraisopropoxyzirconium, and tetrabutoxyzirconium.
Metal M is Ti as the (R 1) n-x -Ti- (OR 2) x, can be exemplified tetramethoxysilane titanium, tetraethoxy titanium, tetraisopropoxy titanium, tetrabutoxy titanium and the like.
金属MがAlである(R1)n−x−Al−(OR2)xとしては、テトラメトキシアルミニウム、テトラエトキシアルミニウム、テトライソプロポキシアルミニウム、テトラブトキシアルミニウム等を挙げることができる。 Metal M is Al as the (R 1) n-x -Al- (OR 2) x, can be exemplified tetramethoxysilane aluminum, tetraethoxy aluminum, tetraisopropoxy aluminum, tetrabutoxy aluminum.
これら金属アルコキシドは、1種又は2種以上を適宜に組み合わせて使用することができる。 These metal alkoxides can be used alone or in combination of two or more.
金属塩は、金属陽イオンと陰イオンがイオン結合した化合物である。例えば、金属の硝酸塩、硫酸塩、リン酸塩、炭酸塩、酢酸塩および蓚酸塩などが挙げられる。より具体的には、熱、光等のエネルギーを与えることで酸化物、窒化物または酸窒化物が形成できる金属塩であれば、特に制限なく本発明に使用できる。これらの金属塩を構成する金属元素としては、特に制限されないが、Al、Ti、Siからなる群から選択される少なくとも一種を含むことが好ましい。また、金属塩の中で、特に硝酸塩を用いることが好ましい。硝酸塩は分解温度が低く、水酸化物を経由せずに結晶水の脱離過程と同時に酸化物形成が進行する。 A metal salt is a compound in which a metal cation and an anion are ion-bonded. For example, metal nitrates, sulfates, phosphates, carbonates, acetates, oxalates and the like can be mentioned. More specifically, any metal salt capable of forming an oxide, nitride or oxynitride by applying energy such as heat and light can be used in the present invention without any particular limitation. Although it does not restrict | limit especially as a metal element which comprises these metal salts, It is preferable that at least 1 type selected from the group which consists of Al, Ti, and Si is included. Of the metal salts, nitrate is particularly preferable. Nitrate has a low decomposition temperature, and oxide formation proceeds simultaneously with the desorption process of crystal water without passing through hydroxide.
有機金属錯体は、例えば、アセチルアセトン錯体などのβ−ジケトン錯体類が挙げられる。これらのアセチルアセトン錯体は、末端メチル基の代わりにトリフルオロプロピル基が導入されていてもよい。これら各種有機金属錯体は、1種又は2種以上を適宜に組み合わせて使用することができる。 Examples of the organometallic complex include β-diketone complexes such as an acetylacetone complex. In these acetylacetone complexes, a trifluoropropyl group may be introduced instead of the terminal methyl group. These various organometallic complexes can be used alone or in combination of two or more.
<機能性フィルムの製造>
本発明の製造方法に関しては、例えば、ポリマー、溶媒および金属酸化物層前駆体の混合溶液を支持体(例えば、金属、セラミック、ポリマー製のロールまたはベルト)の表面上に流延して、好ましくは約10μm〜2000μm、特に好ましくは20μm〜1000μm程度の均一な厚みの金属酸化物層前駆体含有ポリマー溶液膜を形成する。次いで、熱風、赤外線等の熱源を利用して加熱し、溶媒の除去と金属酸化物層前駆体の硬化を同時に行うことにより、機能性フィルムを形成する。なお、この際、加熱ではなく、紫外線などを照射して硬化しても良い。また、機能性フィルムは、長尺であることが望ましい。
<Manufacture of functional film>
Regarding the production method of the present invention, for example, a mixed solution of a polymer, a solvent and a metal oxide layer precursor is preferably cast on the surface of a support (for example, a metal, ceramic, polymer roll or belt) Forms a polymer solution film containing a metal oxide layer precursor having a uniform thickness of about 10 μm to 2000 μm, particularly preferably about 20 μm to 1000 μm. Subsequently, it heats using heat sources, such as a hot air and infrared rays, and a functional film is formed by performing removal of a solvent, and hardening of a metal oxide layer precursor simultaneously. In this case, curing may be performed by irradiating ultraviolet rays or the like instead of heating. Moreover, it is desirable that the functional film is long.
以下、本発明を実施例により具体的に説明するが、本発明は実施例によって限定されるものではない。 EXAMPLES Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited by an Example.
(水蒸気透過度測定)
フィルムのガスバリア性を評価するため、水蒸気透過度を測定した。測定には、DELTAPERM(TECHNOLOX社製)を用い、雰囲気温度40℃、湿度90%の条件下で水蒸気透過度を測定した。本装置の測定上限は10g/m2/dayであるため、それ以上の値の場合はOVERと表記する。
(Water vapor permeability measurement)
In order to evaluate the gas barrier properties of the film, the water vapor permeability was measured. For measurement, DELTAPERRM (manufactured by TECHNOLOX) was used, and the water vapor transmission rate was measured under conditions of an atmospheric temperature of 40 ° C. and a humidity of 90%. Since the upper limit of measurement of this apparatus is 10 g / m 2 / day, a value higher than that is expressed as OVER.
(合成例1)
N,N−ジメチルホルムアミド(DMF)中で、ピロメリット酸二無水物、4,4’−ジアミノジフェニルエーテル、p−フェニレンジアミンのモル比が4/3/1の割合になるように重合し、ポリアミド酸溶液を得た。
(Synthesis Example 1)
Polymerized in N, N-dimethylformamide (DMF) so that the molar ratio of pyromellitic dianhydride, 4,4′-diaminodiphenyl ether, and p-phenylenediamine is 4/3/1. An acid solution was obtained.
(実施例1)
合成例1で調整したポリアミド酸溶液に、無水酢酸、イソキノリン、DMFからなる硬化剤と金属酸化物層前駆体としてポリシラザン溶液(NN110−20:メルクパフォーマンスマテリアルズ合同会社製無触媒型キシレン溶媒20%濃度品)を混合して混合樹脂溶液とし、コンマコーターを用いてアルミ箔上に塗布した。その後、110℃×75秒で乾燥させ、自己支持性を有したゲルフィルムを得た。このゲルフィルムをアルミ箔から引き剥がした後、フィルム両端部をピンで把持し、炉内で熱処理を行なった。第一の熱処理は275℃×25秒で乾燥させ、膜厚12.5μmのガスバリア性ポリイミドフィルムを得た。得られたフィルムの水蒸気透過度を測定した結果を表1に示す。
Example 1
A polysilazane solution (NN110-20: non-catalytic xylene solvent 20% manufactured by Merck Performance Materials LLC) was added to the polyamic acid solution prepared in Synthesis Example 1 as a curing agent composed of acetic anhydride, isoquinoline and DMF, and a metal oxide layer precursor. Concentration product) was mixed to obtain a mixed resin solution, which was applied onto the aluminum foil using a comma coater. Thereafter, it was dried at 110 ° C. for 75 seconds to obtain a gel film having self-supporting properties. After this gel film was peeled off from the aluminum foil, both ends of the film were held with pins and heat-treated in a furnace. The first heat treatment was dried at 275 ° C. × 25 seconds to obtain a gas barrier polyimide film having a thickness of 12.5 μm. The results of measuring the water vapor permeability of the obtained film are shown in Table 1.
(実施例2)
金属酸化物層前駆体としてテトラエトキシシラン(和光純薬製)を混合した以外は実施例1と同様の方法でガスバリア性ポリイミドフィルムを得た。得られたフィルムの水蒸気透過度を測定した結果を表1に示す。
(Example 2)
A gas barrier polyimide film was obtained in the same manner as in Example 1 except that tetraethoxysilane (manufactured by Wako Pure Chemical Industries) was mixed as the metal oxide layer precursor. The results of measuring the water vapor permeability of the obtained film are shown in Table 1.
(比較例1)
金属酸化物層前駆体を塗布しない以外は実施例1と同様の方法でポリイミドフィルムを得た。得られたフィルムの水蒸気透過度を測定した結果を表1に示す。
(Comparative Example 1)
A polyimide film was obtained in the same manner as in Example 1 except that the metal oxide layer precursor was not applied. The results of measuring the water vapor permeability of the obtained film are shown in Table 1.
実施例1と比較例1、実施例2と比較例1の対比からわかるように、容易なプロセスによりガスバリア性が向上していることから優れた機能性フィルムを製造できることがわかる。 As can be seen from the comparison between Example 1 and Comparative Example 1 and Example 2 and Comparative Example 1, it can be seen that an excellent functional film can be produced because the gas barrier property is improved by an easy process.
Claims (6)
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