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JP2017163060A - Thermocompression bonding apparatus and thermocompression bonding method - Google Patents

Thermocompression bonding apparatus and thermocompression bonding method Download PDF

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JP2017163060A
JP2017163060A JP2016047709A JP2016047709A JP2017163060A JP 2017163060 A JP2017163060 A JP 2017163060A JP 2016047709 A JP2016047709 A JP 2016047709A JP 2016047709 A JP2016047709 A JP 2016047709A JP 2017163060 A JP2017163060 A JP 2017163060A
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thermocompression bonding
hot air
circuit board
thermocompression
circuit component
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永福 秀喜
Hideki Eifuku
秀喜 永福
宏典 宗像
Hironori Munakata
宏典 宗像
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Panasonic Intellectual Property Management Co Ltd
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Panasonic Intellectual Property Management Co Ltd
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Abstract

【課題】設備をコンパクトな構造に維持しつつ、接合箇所の加熱温度の温度分布を均一化して熱圧着不良を低減することができる熱圧着装置および熱圧着方法を提供することを目的とする。【解決手段】回路基板2(第1の部材)に回路部品3(第2の部材)を熱圧着により接合するに際し、回路部品3を回路基板2に熱圧着する熱圧着ツール8を有する熱圧着ヘッド7と、熱圧着ツール8が回路部品3を回路基板2に熱圧着しているときに回路部品3と回路基板2の接合箇所とその周辺部に温風を吹きつける第1の温風ノズル21、第2の温風ノズル22より成る温風供給部とを備えた構成の熱圧着装置1を用い、回路部品3と回路基板2の接合箇所とその周辺部に温風を吹きつけながら、熱圧着ツール8で回路部品3を回路基板2に押圧する。【選択図】図1An object of the present invention is to provide a thermocompression bonding apparatus and a thermocompression bonding method capable of reducing the thermocompression-bonding failure by uniformizing the temperature distribution of the heating temperature at the joining portion while maintaining the equipment in a compact structure. When a circuit component (second member) is joined to a circuit board (first member) by thermocompression bonding, the thermocompression bonding tool has a thermocompression bonding tool for thermocompression bonding the circuit component to the circuit board. The first hot air nozzle that blows hot air on the joint portion of the circuit component 3 and the circuit board 2 and the periphery thereof when the head 7 and the thermocompression bonding tool 8 are thermocompression bonding the circuit component 3 to the circuit board 2. 21. Using the thermocompression bonding apparatus 1 having a configuration including a hot air supply unit composed of the second hot air nozzle 22, while blowing hot air to the junction between the circuit component 3 and the circuit board 2 and its peripheral portion, The circuit component 3 is pressed against the circuit board 2 with the thermocompression bonding tool 8. [Selection] Figure 1

Description

本発明は、リジッド基板などの第1の部材にフレキシブル基板などの第2の部材を熱圧着により接合する熱圧着装置および熱圧着方法に関するものである。   The present invention relates to a thermocompression bonding apparatus and a thermocompression bonding method for joining a second member such as a flexible substrate to a first member such as a rigid substrate by thermocompression bonding.

携帯端末などの小型・高実装密度の電子機器には、個々の機能モジュールをフィルム状のフレキシブル基板を介してリジッド基板に設けられた主電子回路に接続する構成が一般に用いられる。このフレキシブル基板に設けられた端子をリジッド基板の回路電極に接続する方法として、熱圧着ヘッドによってフレキシブル基板をリジッド基板に対して押圧しながら加熱することにより、端子と電極とを半田や異方性導電材によって接合する熱圧着が広く用いられている(例えば特許文献1参照)。特許文献1に示す先行技術には、熱圧着ヘッドに個別に温度制御が可能な複数のヒータおよび温度センサを備え、温度センサの検出結果に基づいて複数のヒータを制御することにより、熱圧着ヘッドにおける温度分布を平坦化する例が記載されている。   Generally, a configuration in which individual functional modules are connected to a main electronic circuit provided on a rigid board via a film-like flexible board is used for a small-sized and high mounting density electronic device such as a portable terminal. As a method of connecting the terminals provided on the flexible board to the circuit electrodes of the rigid board, the terminal and the electrode are soldered or anisotropically heated by pressing the flexible board against the rigid board with a thermocompression bonding head. Thermocompression bonding using a conductive material is widely used (see, for example, Patent Document 1). In the prior art shown in Patent Document 1, a thermocompression bonding head is provided with a plurality of heaters and temperature sensors capable of individually controlling the temperature, and by controlling the plurality of heaters based on the detection result of the temperature sensor. An example of flattening the temperature distribution in is described.

特開2000−277893号公報JP 2000-277893 A

しかしながら上述の先行技術には、熱圧着における圧着部分の温度のばらつきを簡便な構成で有効に低減させる上で、以下に述べるような難点があった。すなわち、熱圧着においては熱圧着ヘッドが備えた圧着ツールからの接触熱伝導によって接合箇所を加熱する構成となっていることから、圧着過程においては接合箇所は加熱されるとともに周囲への熱伝導による放熱で温度が低下する。この放熱による温度低下は、リジッド基板やフレキシブル基板における熱容量に応じてその度合いが異なる。このため、接合箇所の周辺の電極や部品の配置などによって熱容量の分布が不均一な場合には、同一の圧着ツールによって加熱されている接合箇所において加熱温度にばらつきが生じることが避けられない。   However, the above-described prior art has the following drawbacks in effectively reducing the temperature variation of the crimped part in the thermocompression bonding with a simple configuration. That is, in the thermocompression bonding, since the joining portion is heated by contact heat conduction from the crimping tool provided in the thermocompression bonding head, the joining portion is heated and heat conduction to the surroundings in the crimping process. The temperature decreases due to heat dissipation. The degree of the temperature decrease due to the heat radiation varies depending on the heat capacity of the rigid substrate or the flexible substrate. For this reason, when the distribution of heat capacity is non-uniform due to the arrangement of electrodes and components around the joint, it is inevitable that the heating temperature varies at the joint that is heated by the same crimping tool.

上述の先行技術では、熱圧着ヘッドにおける温度分布を平坦化することは可能であるものの、接合箇所の周辺の熱容量の分布が不均一な場合には、加熱対象である接合箇所の加熱温度を均一にすることの困難さは解消されない。さらに上述の先行技術では、ヒータや温度センサを複数備える必要があることから熱圧着ヘッドや圧着ツールをコンパクトな構造とすることが難しく、小型・高密度実装の部品を対象とする熱圧着装置に適応させることが困難である。このように、上述の先行技術を含め、従来技術においては熱圧着ヘッドなどの設備をコンパクトな構造に維持しつつ、接合箇所の加熱温度の温度分布を均一化して熱圧着不良を低減することが難しいという課題があった。   In the above-described prior art, it is possible to flatten the temperature distribution in the thermocompression bonding head. However, when the distribution of the heat capacity around the bonding portion is not uniform, the heating temperature of the bonding portion to be heated is uniform. The difficulty of making it is not solved. Furthermore, since it is necessary to provide a plurality of heaters and temperature sensors in the above-described prior art, it is difficult to make the thermocompression bonding head and the crimping tool compact, and the thermocompression bonding apparatus is intended for small and high-density mounting parts. It is difficult to adapt. As described above, in the prior art including the above-described prior art, it is possible to reduce the thermocompression failure by uniformizing the temperature distribution of the heating temperature of the joining portion while maintaining the equipment such as the thermocompression bonding head in a compact structure. There was a difficult problem.

そこで本発明は、設備をコンパクトな構造に維持しつつ、接合箇所の加熱温度の温度分布を均一化して熱圧着不良を低減することができる熱圧着装置および熱圧着方法を提供することを目的とする。   Therefore, the present invention has an object to provide a thermocompression bonding apparatus and a thermocompression bonding method that can reduce the thermocompression failure by uniformizing the temperature distribution of the heating temperature at the joining portion while maintaining the equipment in a compact structure. To do.

本発明の熱圧着装置は、第1の部材に第2の部材を熱圧着にて接合する熱圧着装置であって、第2の部材を第1の部材に熱圧着する熱圧着ツールを有する熱圧着ヘッドと、前記熱圧着ツールが第2の部材を第1の部材に熱圧着しているときに第2の部材と第1の部材の接合箇所とその周辺部に温風を吹きつける温風供給部とを備えた。   The thermocompression bonding apparatus of the present invention is a thermocompression bonding apparatus that joins a second member to a first member by thermocompression bonding, and has a thermocompression bonding tool for thermocompression bonding the second member to the first member. Warm air that blows warm air on the joint between the second member and the first member and its peripheral part when the crimping head and the thermocompression bonding tool are thermocompression bonding the second member to the first member And a supply unit.

本発明の熱圧着方法は、第1の部材に第2の部材を熱圧着にて接合する熱圧着方法であって、第2の部材と第1の部材の接合箇所とその周辺部に温風を吹きつけながら、熱圧着ツールで第2の部材を第1の部材に押圧する。   The thermocompression bonding method of the present invention is a thermocompression bonding method in which a second member is joined to a first member by thermocompression bonding, and hot air is applied to a joining portion of the second member and the first member and its peripheral portion. While spraying, the second member is pressed against the first member with a thermocompression bonding tool.

本発明によれば、設備をコンパクトな構造に維持しつつ、接合箇所の加熱温度の温度分布を均一化して熱圧着不良を低減することができる。   ADVANTAGE OF THE INVENTION According to this invention, the temperature distribution of the heating temperature of a joining location can be equalize | homogenized and thermocompression-bonding defect can be reduced, maintaining an installation in a compact structure.

本発明の一実施の形態の熱圧着装置の構成を示す斜視図The perspective view which shows the structure of the thermocompression bonding apparatus of one embodiment of this invention. 本発明の一実施の形態の熱圧着装置による熱圧着の対象となる電子部品の斜視図The perspective view of the electronic component used as the object of the thermocompression bonding by the thermocompression bonding apparatus of one embodiment of this invention 本発明の一実施の形態の熱圧着方法を示す動作説明図Operation explanatory diagram showing a thermocompression bonding method of an embodiment of the present invention

次に本発明の実施の形態を図面を参照して説明する。まず図1を参照して熱圧着装置1の構造を説明する。熱圧着装置1は、第1の部材としての回路基板2に第2の部材としての回路部品3を熱圧着にて接合する機能を有するものである。この熱圧着により、図2に示す電子部品4が製造される。電子部品4は、複数の部品5が予め半田接合により実装された回路基板2の縁部に、回路部品3の接続端部を半田もしくは半田を含む接合材料6を介して重ね合わせて接合箇所3aとした構成となっている(図3参照)。   Next, embodiments of the present invention will be described with reference to the drawings. First, the structure of the thermocompression bonding apparatus 1 will be described with reference to FIG. The thermocompression bonding apparatus 1 has a function of joining a circuit component 3 as a second member to a circuit board 2 as a first member by thermocompression bonding. The electronic component 4 shown in FIG. 2 is manufactured by this thermocompression bonding. The electronic component 4 has a joint portion 3a in which a connection end portion of the circuit component 3 is overlapped with solder or a bonding material 6 containing solder on an edge portion of the circuit board 2 on which a plurality of components 5 are previously mounted by solder bonding. (See FIG. 3).

図1に示すように、熱圧着装置1は、基台11の上面に基板保持部12および部品保持部15を第1方向に配置し、回路基板2を回路部品3に熱圧着する熱圧着ツール8およびカメラ10を備えた熱圧着ヘッド7を基板保持部12の上方に配設した構成となっている。ここで第1方向は、作業者が基板保持部12や部品保持部15に対して回路基板2や回路部品3の出し入れを行う方向であり、ここでは第1方向における作業者側(図1において右手前側)を前側と定義している。   As shown in FIG. 1, the thermocompression bonding apparatus 1 is a thermocompression bonding tool in which a substrate holding part 12 and a component holding part 15 are arranged on the upper surface of a base 11 in a first direction, and the circuit board 2 is thermocompression bonded to the circuit component 3. 8 and a thermocompression bonding head 7 provided with a camera 10 are arranged above the substrate holding part 12. Here, the first direction is a direction in which the operator inserts and removes the circuit board 2 and the circuit component 3 with respect to the board holding unit 12 and the component holding unit 15. Here, the operator side in the first direction (in FIG. 1). The right front side) is defined as the front side.

熱圧着ヘッド7はヘッド駆動部7aによって駆動され、これにより熱圧着ツール8はバックアップ部13に下受けされたフレキシブル基板より成る回路部品3に対して昇降する。そして熱圧着ツール8が回路部品3の端部に設定された接合箇所3a(図2、図3参照)に当接することにより、回路部品3を回路基板2に対して加圧する。ヘッド駆動部7aには熱圧着ツール8を加熱するための加熱機構が内蔵されており、回路基板2に回路部品3を熱圧着する際には、この加熱機構により熱圧着ツール8を介して回路部品3を加熱し、この熱が接合材料6に伝達されることにより熱圧着による接合が行われる。なお、熱圧着ヘッド7を下降させる代わりに、基板保持部12、部品保持部15を上昇させるような構成であってもよい。   The thermocompression bonding head 7 is driven by the head driving unit 7 a, whereby the thermocompression bonding tool 8 moves up and down with respect to the circuit component 3 made of a flexible substrate received by the backup unit 13. Then, the circuit component 3 is pressed against the circuit board 2 by the thermocompression-bonding tool 8 coming into contact with the joining portion 3 a (see FIGS. 2 and 3) set at the end of the circuit component 3. The head driving unit 7a has a built-in heating mechanism for heating the thermocompression bonding tool 8. When the circuit component 3 is thermocompression bonded to the circuit board 2, the heating mechanism is used to connect the circuit via the thermocompression bonding tool 8. The component 3 is heated, and this heat is transmitted to the bonding material 6 to perform bonding by thermocompression bonding. In addition, the structure which raises the board | substrate holding | maintenance part 12 and the component holding | maintenance part 15 instead of lowering | hanging the thermocompression-bonding head 7 may be sufficient.

熱圧着ツール8の下方には、シート保持部(図示省略)によって巻回保持されたシート9が、熱圧着ツール8の長手方向(第1方向と直交する方向)に送給可能に配置されている。シート9は、熱圧着ツール8による回路部品3の圧着時に熱圧着ツール8の圧着面と回路部品3の上面との間に介在し(図3参照)、熱圧着動作時にはみ出した接合材料6が付着することによる熱圧着ツール8の汚損を防止する。   Below the thermocompression bonding tool 8, a sheet 9 wound and held by a sheet holding unit (not shown) is arranged so as to be fed in the longitudinal direction (direction perpendicular to the first direction) of the thermocompression bonding tool 8. Yes. The sheet 9 is interposed between the crimping surface of the thermocompression bonding tool 8 and the upper surface of the circuit component 3 when the circuit component 3 is crimped by the thermocompression bonding tool 8 (see FIG. 3). The fouling of the thermocompression bonding tool 8 due to adhesion is prevented.

熱圧着装置1における基板保持部12は回路基板2を載置するステージであり、回路基板2において圧着の対象となる接続箇所を下面側から下受けするとともに、回路基板2の位置を保持する機能を有するものである。本実施の形態においては、基板保持部12は、バックアップ部13、基板支持部14aおよび複数の基板ガイド部14bを組み合わせて構成されている。バックアップ部13は回路基板2において回路部品3と接合される接合箇所3a(図3参照)に対応する接続端部を下面側から下受けするとともに、この接続端部を熱圧着のために加熱する機能を有している。部品保持部15は、回路部品3が所定位置に載置される部品ステージ18を、部品ステージ移動機構16によって移動する移動ベース17に保持させた構成となっている。   The substrate holding part 12 in the thermocompression bonding apparatus 1 is a stage on which the circuit board 2 is placed. The circuit board 2 has a function of receiving a connection portion to be crimped from the lower surface side and holding the position of the circuit board 2. It is what has. In the present embodiment, the substrate holding unit 12 is configured by combining a backup unit 13, a substrate support unit 14a, and a plurality of substrate guide units 14b. The backup unit 13 receives the connection end corresponding to the joint portion 3a (see FIG. 3) to be joined to the circuit component 3 on the circuit board 2 from the lower surface side, and heats the connection end for thermocompression bonding. It has a function. The component holding unit 15 has a configuration in which a component stage 18 on which the circuit component 3 is placed at a predetermined position is held by a moving base 17 that is moved by a component stage moving mechanism 16.

部品ステージ18および基板支持部14aの上方には、それぞれ第1の温風ノズル21および第2の温風ノズル22が配置されている。第1の温風ノズル21、第2の温風ノズル22は、温風発生装置(図示省略)により発生した温風を、先端部に設けられた吹出口21a、22a(図3参照)から加熱対象部位に吹き付ける機能を有している。本実施の形態では、第1の温風ノズル21、第2の温風ノズル22は、基板支持部14aに支持された回路基板2の接続端部に部品ステージ18に載置された回路部品3の接続端部を重ねた接合箇所3a(図3参照)およびその周辺部に、温風を吹き付けることができるような配設姿勢で熱圧着装置1に配置されている。   A first hot air nozzle 21 and a second hot air nozzle 22 are arranged above the component stage 18 and the substrate support portion 14a, respectively. The first hot air nozzle 21 and the second hot air nozzle 22 heat the hot air generated by the hot air generator (not shown) from the air outlets 21a and 22a (see FIG. 3) provided at the tip. It has a function to spray on the target part. In the present embodiment, the first hot air nozzle 21 and the second hot air nozzle 22 are the circuit component 3 placed on the component stage 18 at the connection end of the circuit board 2 supported by the substrate support portion 14a. Are arranged in the thermocompression bonding apparatus 1 in such a disposition posture that hot air can be blown to the joint portion 3a (see FIG. 3) where the connection end portions are overlapped and the periphery thereof.

すなわち第1の温風ノズル21、第2の温風ノズル22および図示しない温風発生装置は、熱圧着装置1に設けられた温風供給部を構成する。そしてこの温風供給部は、熱圧着装置1による熱圧着動作において、熱圧着ヘッド7の熱圧着ツール8が第2の部材である回路部品3を第1の部材である回路基板2に熱圧着しているときに、この熱圧着動作と同時に回路部品3と回路基板2の接合箇所3aとその周辺部に温風を吹きつける。本実施の形態に示す例では、第1の温風ノズル21、第2の温風ノズル22の2つの温風ノズルが、熱圧着ヘッド7を挟むように配置されており、接合箇所3aを2方向から効率よく加熱することが可能となっている。   That is, the first hot air nozzle 21, the second hot air nozzle 22, and a hot air generator (not shown) constitute a hot air supply unit provided in the thermocompression bonding apparatus 1. In this hot air supply unit, in the thermocompression bonding operation by the thermocompression bonding apparatus 1, the thermocompression bonding tool 8 of the thermocompression bonding head 7 thermocompresses the circuit component 3 as the second member to the circuit board 2 as the first member. At the same time, simultaneously with this thermocompression bonding operation, hot air is blown to the joint portion 3a between the circuit component 3 and the circuit board 2 and its peripheral portion. In the example shown in the present embodiment, the two hot air nozzles of the first hot air nozzle 21 and the second hot air nozzle 22 are arranged so as to sandwich the thermocompression bonding head 7, and the joining location 3 a is 2 It is possible to efficiently heat from the direction.

なお温風供給部としては、接合箇所3aとその周辺部へ向けて温風を噴出する少なくとも1つの温風ノズルを有していればよい。このように温風供給部を備えることにより、接合箇所3aとその周辺部は接合箇所3aに当接した熱圧着ツール8からの接触熱伝達による加熱に加えて、第1の温風ノズル21、第2の温風ノズル22により吹き付けられる温風によってより均一に加熱される。   In addition, as a warm air supply part, what is necessary is just to have at least 1 warm air nozzle which ejects warm air toward the joining location 3a and its peripheral part. Thus, by providing the warm air supply part, in addition to the heating by the contact heat transfer from the thermocompression bonding tool 8 which contact | joined the joining location 3a and its peripheral part contact | abutted to the joining location 3a, the 1st hot air nozzle 21, It is heated more uniformly by the hot air blown by the second hot air nozzle 22.

次に図3を参照して、上述構成の熱圧着装置1によって、第1の部材である回路基板2に第2の部材である回路部品3を熱圧着にて接合する熱圧着方法について説明する。熱圧着動作においては、図3(a)に示すように、バックアップ部13によって下受けされた回路基板2の接続端部に、回路部品3の接続端部を半田またはクリーム半田や半田入り樹脂など半田を含む接合材料6を介して重ねて接合箇所3aとする。回路基板2には予め複数の部品5が半田接合により実装された状態にある(図2参照)。このとき、接合箇所3aの直上には熱圧着ツール8が位置しており、接合箇所3aと熱圧着ツール8の圧着面との間にはシート9が介在している。そして熱圧着ツール8を挟んで配置された第1の温風ノズル21、第2の温風ノズル22は、吹出口21a、22aを接合箇所3aおよびその周辺部に向けた姿勢で位置している。   Next, a thermocompression bonding method for joining the circuit component 3 as the second member to the circuit board 2 as the first member by thermocompression bonding with the thermocompression bonding apparatus 1 having the above-described configuration will be described with reference to FIG. . In the thermocompression bonding operation, as shown in FIG. 3 (a), the connection end of the circuit component 3 is soldered to the connection end of the circuit board 2 received by the backup unit 13, solder, cream solder, soldered resin, or the like. It overlaps with the joining material 6 containing solder, and it is set as the joining location 3a. A plurality of components 5 are mounted in advance on the circuit board 2 by solder bonding (see FIG. 2). At this time, the thermocompression bonding tool 8 is located immediately above the joint location 3 a, and the sheet 9 is interposed between the joint location 3 a and the crimping surface of the thermocompression bonding tool 8. And the 1st warm air nozzle 21 and the 2nd warm air nozzle 22 which are arrange | positioned on both sides of the thermocompression-bonding tool 8 are located in the attitude | position which orient | assigned the blower outlets 21a and 22a to the junction location 3a and its peripheral part. .

熱圧着が開始されると、図3(b)に示すように、熱圧着ツール8を下降させて(矢印a)、回路部品3の接合箇所3aとの間にシート9を介在させた状態で、熱圧着ツール8の圧着面によって接合箇所3aを押圧しながら加熱する。この加熱とともに、第1の温風ノズル21、第2の温風ノズル22を作動させて、回路基板2と回路部品3との接合箇所3aとその周辺部に温風を吹き付けながら(矢印b)、熱圧着ツール8で回路部品3を回路基板2に対して押圧する。この温風の吹き付けにより、熱圧着ツール8の加熱面を介して伝達される熱が、回路基板2や回路部品3を介して放熱されることによる加熱ロスが生じる場合にあっても、温風の吹きつけによる周辺部全体の加熱によって接合箇所3aの各部位における温度分布を均一にすることが可能となる。   When the thermocompression bonding is started, the thermocompression bonding tool 8 is lowered (arrow a) and the sheet 9 is interposed between the joint part 3a of the circuit component 3 as shown in FIG. Then, the joint 3a is heated while being pressed by the pressure contact surface of the thermocompression bonding tool 8. Along with this heating, the first hot air nozzle 21 and the second hot air nozzle 22 are operated, and hot air is blown to the joint portion 3a between the circuit board 2 and the circuit component 3 and its peripheral portion (arrow b). Then, the circuit component 3 is pressed against the circuit board 2 with the thermocompression bonding tool 8. Even when the heat transmitted by the hot air blowing through the heating surface of the thermocompression bonding tool 8 is dissipated through the circuit board 2 or the circuit component 3, a heating loss occurs. It becomes possible to make uniform the temperature distribution in each part of the joint part 3a by heating the whole peripheral part by spraying.

すなわち回路基板2や回路部品3においては部品や回路パターンの偏在に起因して回路基板2や回路部品3の領域によって熱容量の分布が不均一となっている場合が多い。このような場合には、熱圧着ツール8の加熱面によって加熱される接合箇所3aから熱伝導によって放熱される熱量は接合箇所3aの部位によってばらつき、接合箇所3a内において温度分布の不均一を招く。このような場合にあっても、接合箇所3aとその周辺部に温風を吹き付けることにより、接合箇所3aを包含する周辺領域における放熱による加熱ロスを補うことができ、上述の不均一な放熱に起因する加熱温度のばらつきを防止することが可能となる。したがって、接合箇所3aの各部位における温度分布の不均一に起因する接合不良を低減することができる。   That is, in the circuit board 2 and the circuit component 3, the distribution of the heat capacity is often uneven depending on the area of the circuit board 2 and the circuit component 3 due to the uneven distribution of the components and circuit patterns. In such a case, the amount of heat dissipated by the heat conduction from the joint portion 3a heated by the heating surface of the thermocompression bonding tool 8 varies depending on the portion of the joint portion 3a, resulting in uneven temperature distribution in the joint portion 3a. . Even in such a case, it is possible to compensate for the heat loss due to heat radiation in the peripheral area including the joint portion 3a by blowing warm air on the joint portion 3a and the peripheral portion thereof. It is possible to prevent the variation in the heating temperature caused. Therefore, it is possible to reduce bonding defects due to uneven temperature distribution in each part of the bonding part 3a.

このとき、第1の温風ノズル21、第2の温風ノズル22から吹き付けられる温風の温度は、接合材料6に用いられる半田の融点よりも高温に設定するのが好ましい。温風の温度を半田の融点よりも高温に設定する場合は、接合箇所3aの近傍に位置する部品5と回路基板2を接合している半田を溶融させない温度に設定する必要がある。これにより、温風による加熱によって回路基板2に既に半田接合により実装された部品5の半田が溶融して回路基板2から外れる等の不具合を防止することができる。   At this time, the temperature of the hot air blown from the first hot air nozzle 21 and the second hot air nozzle 22 is preferably set higher than the melting point of the solder used for the bonding material 6. When the temperature of the hot air is set to be higher than the melting point of the solder, it is necessary to set the temperature so as not to melt the solder joining the component 5 and the circuit board 2 located in the vicinity of the joining portion 3a. As a result, it is possible to prevent problems such as the solder of the component 5 already mounted on the circuit board 2 by solder bonding by melting with the hot air being melted and coming off from the circuit board 2.

上記説明したように、本実施の形態に示す熱圧着装置および熱圧着方法においては、回路基板2に回路部品3を熱圧着する熱圧着ツール8を有する熱圧着ヘッド7に加えて、熱圧着ツール8が回路部品3を回路基板2に熱圧着しているときに回路部品3と回路基板2の接合箇所3aとその周辺部に温風を吹きつける温風供給部を備えるようにしている。   As described above, in the thermocompression bonding apparatus and the thermocompression bonding method shown in the present embodiment, in addition to the thermocompression bonding head 7 having the thermocompression bonding tool 8 for thermocompression bonding the circuit component 3 to the circuit board 2, the thermocompression bonding tool. When the circuit component 3 is thermocompression-bonded to the circuit board 2, a hot air supply unit that blows warm air to the joint part 3 a of the circuit component 3 and the circuit board 2 and its peripheral part is provided.

これにより、熱圧着ヘッドに個別に温度制御が可能な複数のヒータおよび温度センサを備え、温度センサの検出結果に基づいて複数のヒータを制御する構成の先行技術における課題、すなわち熱圧着ヘッドや圧着ツールをコンパクトな構造とすることが難しく、小型・高密度実装の部品を対象とする熱圧着装置に適応させることが困難であるという課題を解消して、設備をコンパクトな構造に維持しつつ、接合箇所の加熱温度の温度分布を均一化して熱圧着不良を低減することが可能となっている。   As a result, the thermocompression bonding head is provided with a plurality of heaters and temperature sensors capable of individually controlling the temperature, and a problem in the prior art of a configuration in which a plurality of heaters are controlled based on the detection result of the temperature sensor, that is, the thermocompression bonding head While solving the problem that it is difficult to make the tool a compact structure and it is difficult to adapt it to a thermocompression bonding device for small and high-density mounting parts, while maintaining the equipment in a compact structure, It is possible to make the temperature distribution of the heating temperature at the joint portion uniform and reduce the thermocompression bonding failure.

本発明の熱圧着装置および熱圧着方法は、設備をコンパクトな構造に維持しつつ、接合箇所の加熱温度の温度分布を均一化して熱圧着不良を低減することができるという効果を有し、リジッド基板などの第1の部材にフレキシブル基板などの第2の部材を接合する分野において有用である。   The thermocompression bonding apparatus and the thermocompression bonding method of the present invention have the effect that the temperature distribution of the heating temperature at the joint portion can be made uniform by reducing the thermocompression failure while maintaining the equipment in a compact structure. This is useful in the field of joining a second member such as a flexible substrate to a first member such as a substrate.

1 熱圧着装置
2 回路基板
3 回路部品
3a 接合箇所
6 接合材料
7 熱圧着ヘッド
8 熱圧着ツール
21 第1の温風ノズル
22 第2の温風ノズル
DESCRIPTION OF SYMBOLS 1 Thermocompression bonding apparatus 2 Circuit board 3 Circuit component 3a Joining location 6 Joining material 7 Thermocompression-bonding head 8 Thermocompression-bonding tool 21 1st hot air nozzle 22 2nd hot air nozzle

Claims (5)

第1の部材に第2の部材を熱圧着にて接合する熱圧着装置であって、
第2の部材を第1の部材に熱圧着する熱圧着ツールを有する熱圧着ヘッドと、
前記熱圧着ツールが第2の部材を第1の部材に熱圧着しているときに第2の部材と第1の部材の接合箇所とその周辺部に温風を吹きつける温風供給部とを備えた、熱圧着装置。
A thermocompression bonding apparatus for joining a second member to a first member by thermocompression bonding,
A thermocompression bonding head having a thermocompression bonding tool for thermocompression bonding the second member to the first member;
When the thermocompression bonding tool is thermocompression bonding the second member to the first member, a joining portion of the second member and the first member and a hot air supply unit that blows hot air around the peripheral portion are provided. A thermocompression bonding device.
前記温風供給部は、前記接合箇所と前記周辺部へ向けて温風を噴出する少なくとも1つの温風ノズルを有する、請求項1記載の熱圧着装置。   2. The thermocompression bonding apparatus according to claim 1, wherein the hot air supply unit includes at least one hot air nozzle that ejects hot air toward the joining portion and the peripheral part. 少なくとも2個の前記温風ノズルが前記熱圧着ヘッドを挟むように配置されている、請求項2記載の熱圧着装置。   The thermocompression bonding apparatus according to claim 2, wherein at least two of the hot air nozzles are arranged so as to sandwich the thermocompression bonding head. 第1の部材に第2の部材を熱圧着にて接合する熱圧着方法であって、
第2の部材と第1の部材の接合箇所とその周辺部に温風を吹きつけながら、熱圧着ツールで第2の部材を第1の部材に押圧する、熱圧着方法。
A thermocompression bonding method in which a second member is joined to a first member by thermocompression bonding,
A thermocompression bonding method in which the second member is pressed against the first member with a thermocompression bonding tool while blowing warm air to the joining portion of the second member and the first member and its peripheral portion.
第1の部材と第2の部材は半田もしくは半田を含む接合材料で接合され、
前記温風の温度は前記半田の融点よりも高い、請求項4記載の熱圧着方法。
The first member and the second member are joined with solder or a joining material containing solder,
The thermocompression bonding method according to claim 4, wherein a temperature of the hot air is higher than a melting point of the solder.
JP2016047709A 2016-03-11 2016-03-11 Thermocompression bonding apparatus and thermocompression bonding method Pending JP2017163060A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107755838A (en) * 2017-11-20 2018-03-06 山东共达电声股份有限公司 Thermal compression welding device and thermal compression welding method
CN109277687A (en) * 2018-10-10 2019-01-29 苏州宏瑞达新能源装备有限公司 A junction box welding device
CN120306875A (en) * 2025-06-05 2025-07-15 深圳市杰迈精密自动化有限公司 Hot pressing welding device and welding method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107755838A (en) * 2017-11-20 2018-03-06 山东共达电声股份有限公司 Thermal compression welding device and thermal compression welding method
CN109277687A (en) * 2018-10-10 2019-01-29 苏州宏瑞达新能源装备有限公司 A junction box welding device
CN120306875A (en) * 2025-06-05 2025-07-15 深圳市杰迈精密自动化有限公司 Hot pressing welding device and welding method thereof

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