JP2017150040A - Aluminum alloy-ceramic composite material and manufacturing method of aluminum alloy-ceramic composite material - Google Patents
Aluminum alloy-ceramic composite material and manufacturing method of aluminum alloy-ceramic composite material Download PDFInfo
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Abstract
Description
本発明は、アルミニウム合金−セラミックス複合材およびアルミニウム合金−セラミックス複合材の製造方法に関する発明である。 The present invention relates to an aluminum alloy-ceramic composite material and a method for producing an aluminum alloy-ceramic composite material.
近年、基材となる金属に、セラミックスの繊維や粒子等を強化材とする金属−セラミックス複合材が注目されている。特に、アルミニウム合金−セラミックス複合材(以下、アルミニウム合金−セラミックス複合材を、単に複合材という場合がある。)は、アルミニウムやアルミニウム合金などの基材となる金属が有する強度、延性、靭性、成形性および熱伝導性等と、強化材である炭化ケイ素、窒化アルミ、アルミナなどの繊維や粒子からなるセラミックスが有する剛性、耐摩耗性、低熱膨張性等とを併せもつために、主に放熱用途の製品、例えば軽量化、高熱伝導、低熱膨張などが要求される輸送用機器部品、電子部品等、特に半導体素子の作動熱を放散させるための放熱基板に利用されてきている。 In recent years, metal-ceramic composite materials that use ceramic fibers, particles, and the like as reinforcing materials have attracted attention as the base metal. In particular, an aluminum alloy-ceramic composite material (hereinafter, an aluminum alloy-ceramic composite material may be simply referred to as a composite material) has strength, ductility, toughness, and molding of a base metal such as aluminum or aluminum alloy. Mainly used for heat dissipation because it combines the strength and heat conductivity of the ceramics made of fibers and particles such as silicon carbide, aluminum nitride, and alumina, which are reinforcing materials. Products, for example, transportation equipment parts, electronic parts, and the like, which are required to be lighter, have higher thermal conductivity, lower thermal expansion, etc., in particular, have been used as heat dissipation boards for dissipating operating heat of semiconductor elements.
このような複合材に関連する先行技術の一例が、下記特許文献1〜3に開示されている。特許文献1に開示された複合材の製造方法は、「強化材であるセラミックス粉末またはセラミックス繊維にTiO2粉末、MgO粉末、TiC粉末またはTiN粉末の少なくとも1種を添加し、それを混合したセラミックス粉末またはセラミックス繊維でプリフォームを形成し、そのプリフォームにマトリックスである溶融したアルミニウムまたはアルミニウム合金を窒素雰囲気中にて非加圧で浸透させる」、複合材の製造方法である。かかる特許文献1の製造方法によれば、「TiO2粉末などの粉末をプリフォーム中に含ませれば、アルミニウムまたはアルミニウム合金の浸透を改善することができる」、と記載されている。 Examples of prior art related to such composite materials are disclosed in Patent Documents 1 to 3 below. The manufacturing method of the composite material disclosed in Patent Document 1 is “ceramics obtained by adding at least one of TiO 2 powder, MgO powder, TiC powder, or TiN powder to ceramic powder or ceramic fiber as a reinforcing material, and mixing them. This is a method for producing a composite material, in which a preform is formed from powder or ceramic fibers, and molten aluminum or aluminum alloy as a matrix is infiltrated into the preform in a nitrogen atmosphere without pressure. According to the manufacturing method of Patent Document 1, it is described that “if a powder such as TiO 2 powder is included in the preform, the permeation of aluminum or aluminum alloy can be improved”.
また、特許文献2に開示された複合材の製造方法は、「セラミックス粉末でプリフォームを形成し、そのプリフォームに溶融したアルミニウム合金を窒素雰囲気中で非加圧で浸透させる金属−セラミックス複合材料の製造方法において、該セラミックス粉末が、チタニア粉末を1〜3質量%含有するアルミナ系のセラミックス粉末であり、該アルミニウム合金が、Al−Mg系のアルミニウム合金である」、複合材の製造方法である。かかる特許文献2の製造方法によれば、「加工面に存在する500μm以上のポアの数が大幅に減少する複合材料が得られる」、と記載されている。 Further, the method for producing a composite material disclosed in Patent Document 2 is “a metal-ceramic composite material in which a preform is formed from ceramic powder, and an aluminum alloy melted in the preform is permeated in a nitrogen atmosphere without pressure. In this manufacturing method, the ceramic powder is an alumina-based ceramic powder containing 1 to 3% by mass of titania powder, and the aluminum alloy is an Al—Mg-based aluminum alloy. ” is there. According to the manufacturing method of Patent Document 2, it is described that “a composite material can be obtained in which the number of pores of 500 μm or more present on the processed surface is significantly reduced”.
さらに、特許文献3に開示された複合材は、「炭化ケイ素のセラミックス粒子多孔体の孔内にアルミニウムを主成分とするマトリックスが充填された構造のSiC/Al系複合材料であって、前記マトリックスには、金属アルミニウムとアルミナのほかに、アルミニウム−チタン系化合物及びアルミニウム−ジルコニウム系化合物の少なくとも一方が含まれている、SiC/Al系複合材料」である。そして、特許文献3には、当該複合材の製造方法として、「(a)チタニア(TiO2)及びジルコニア(ZrO2)の少なくとも一方の含浸促進材と炭化ケイ素粉末とを、炭化ケイ素に対する含浸促進材の粒径比が1/10以下、炭化ケイ素に対する含浸促進材の体積比が0.15以上となるように混合した混合粉末を作製するか又は該混合粉末を成形してプリフォームにする工程と、(b)前記混合粉末又は前記プリフォームをアルミニウム又はアルミニウム合金と接触させた状態で、減圧下又は非加圧の不活性ガス雰囲気下で1000℃以上に加熱することにより、アルミニウム又はアルミニウム合金を前記混合粉末又は前記プリフォームに含浸させて含浸体とする工程と、(c)前記含浸体を冷却することによりSiC/Al系複合材料を得る工程と、を含むSiC/Al系複合材料の製法」が、開示されている。 Further, the composite material disclosed in Patent Document 3 is “a SiC / Al based composite material having a structure in which a matrix mainly composed of aluminum is filled in pores of ceramic particles of silicon carbide. Is a SiC / Al composite material containing at least one of an aluminum-titanium compound and an aluminum-zirconium compound in addition to metallic aluminum and alumina. In Patent Document 3, as a method for producing the composite material, “(a) at least one impregnation promoting material of titania (TiO 2 ) and zirconia (ZrO 2 ) and silicon carbide powder are used to promote the impregnation of silicon carbide. A step of producing a mixed powder mixed so that the particle size ratio of the material is 1/10 or less and the volume ratio of the impregnation promoting material to silicon carbide is 0.15 or more, or molding the mixed powder into a preform And (b) aluminum or aluminum alloy by heating to 1000 ° C. or higher under reduced pressure or non-pressurized inert gas atmosphere in a state where the mixed powder or the preform is in contact with aluminum or an aluminum alloy. Impregnating the mixed powder or the preform into an impregnated body, and (c) cooling the impregnated body to produce a SiC / Al-based composite. And a method for producing a SiC / Al composite material including a step of obtaining a composite material.
ここで、例えば複合材の一つの用途である放熱基板を例としてあげると、半導体素子の高性能化や高パワーデバイス化(例えば、インバータモジュール用)などに伴い、当該放熱基板に搭載される半導体素子や絶縁基板と同程度の6〜10(ppm/K)の範囲の低い熱膨張率を有するとともに、半導体素子が発生する熱を、放熱基板を介し冷却体等へより早く逃がすため、より高い熱伝導率を有する放熱基板が要請されている。しかしながら、上記特許文献1〜3に開示された複合材または複合材の製造方法により得られた複合材は、より高い熱伝導率を有する放熱基板を具現することが困難であり、上記要請に十分に対応することができなかった。 Here, for example, a heat dissipation substrate, which is one application of a composite material, takes a semiconductor mounted on the heat dissipation substrate as the performance of a semiconductor element becomes higher and / or the power device becomes higher (for example, for an inverter module). It has a low coefficient of thermal expansion in the range of 6 to 10 (ppm / K), which is the same as that of the element and the insulating substrate, and the heat generated by the semiconductor element is released faster to the cooling body etc. via the heat dissipation substrate. There is a demand for a heat dissipation substrate having thermal conductivity. However, the composite material disclosed in Patent Documents 1 to 3 or the composite material obtained by the method for manufacturing a composite material is difficult to implement a heat dissipation substrate having higher thermal conductivity, and is sufficient for the above request. Could not cope with.
本発明は、上記要請を鑑みてなされた発明であり、その目的は、所定の熱膨張率を有しつつ高い熱伝導率を有するアルミニウム合金−セラミックス複合材およびそのようなアルミニウム合金−セラミックス複合材を製造するために好適な製造方法を提供することである。 The present invention has been made in view of the above demands, and its object is to provide an aluminum alloy-ceramic composite material having a predetermined thermal expansion coefficient and a high thermal conductivity, and such an aluminum alloy-ceramic composite material. It is providing the suitable manufacturing method in order to manufacture.
上記目的を達成する本発明の一つの態様は、Si:2.5〜13質量%、Mg:1〜8質量%、残部Alおよび不可避不純物元素からなる基地と、前記基地中に分散した複数個のSiC粒子とを有し、前記SiC粒子は、面積率が50〜75%であり、円相当粒径分布がd10:25〜100μm、d50:75〜200μm、d90:130〜320μmであり、Fe、Ti、NiおよびVの元素のうち少なくも1つの元素からなる化合物粒子を前記基地中に有し、前記化合物粒子で形成される直径が5μm以上の凝集部の面積率は0.3〜1.0%である、アルミニウム合金−セラミックス複合材である。 One aspect of the present invention that achieves the above object is that a base composed of Si: 2.5 to 13% by mass, Mg: 1 to 8% by mass, the balance Al and inevitable impurity elements, and a plurality of bases dispersed in the base The SiC particles have an area ratio of 50 to 75%, a circle-equivalent particle size distribution of d10: 25 to 100 μm, d50: 75 to 200 μm, d90: 130 to 320 μm, and Fe particles , Ti, Ni, and V have compound particles composed of at least one element in the matrix, and the area ratio of the agglomerated portion formed by the compound particles having a diameter of 5 μm or more is 0.3 to 1 This is an aluminum alloy-ceramic composite that is 0.0%.
上記アルミニウム合金−セラミックス複合材において、前記凝集部のうち直径が5μm以上の凝集部の平均径が5〜15μmであることが望ましく、加えて、前記凝集部のうち直径が5μm以上の凝集部の最大径が20μm以下であることが更に望ましい。 In the aluminum alloy-ceramic composite material, it is desirable that an average diameter of the aggregated portions having a diameter of 5 μm or more among the aggregated portions is 5 to 15 μm, and in addition, of the aggregated portions having a diameter of 5 μm or more. More preferably, the maximum diameter is 20 μm or less.
さらに加えて、円相当径が10μm以上の気孔の面積率が1.5%以下であることが望ましい。 In addition, the area ratio of pores having an equivalent circle diameter of 10 μm or more is desirably 1.5% or less.
上記アルミニウム−セラミックス複合材によれば、熱伝導率が180〜240W/m・K、熱膨張率が6〜10ppm/Kである複合材を構成することができる。 According to the aluminum-ceramic composite material, a composite material having a thermal conductivity of 180 to 240 W / m · K and a thermal expansion coefficient of 6 to 10 ppm / K can be configured.
上記複合材を製造するのに好適な本発明に係る製造方法は、D10:30〜120μm、D50:90〜250μm、D90:160〜400μmの粒度分布を有するSiC粒子からなる成形用粉を成形し、SiC粒子の体積率が50〜75体積%のプリフォームを形成するプリフォーム成形工程と、前記プリフォームに、Si:2.5〜13質量%、Mg:1〜8質量%、残部がAlおよび不可避不純物元素からなるアルミニウム合金溶湯を大気雰囲気下で浸透させて浸透体を形成する浸透工程と、前記浸透体を冷却してアルミニウム合金溶湯を凝固させる冷却工程と、を有し、前記成形用粉およびアルミニウム溶湯は、双方合わせてFe、Ti、NiまたはVを総量で0.36〜0.90質量%含む、アルミニウム合金−セラミックス複合材の製造方法、である。 The production method according to the present invention suitable for producing the composite material comprises molding a molding powder comprising SiC particles having a particle size distribution of D10: 30 to 120 μm, D50: 90 to 250 μm, and D90: 160 to 400 μm. A preform forming step for forming a preform having a volume fraction of SiC particles of 50 to 75% by volume, and Si: 2.5 to 13% by mass, Mg: 1 to 8% by mass, and the balance being Al. And a permeation step of forming an infiltrated body by infiltrating the molten aluminum alloy composed of inevitable impurity elements in an air atmosphere, and a cooling step for solidifying the molten aluminum alloy by cooling the infiltrated body. The aluminum alloy-ceramic composite in which the powder and the molten aluminum both contain Fe, Ti, Ni or V in a total amount of 0.36 to 0.90% by mass. The method of manufacture is,.
なお、上記製造方法において、D10:50〜150μm、D50:100〜300μm、D90:170〜450μmの粒度分布を有するSiC粒子からなる第1の原料粉 100質量部に対し、D10:5〜20μm、D50:10〜40μm、D90:15〜60μmの粒度分布を有するSiC粒子からなる第2の原料粉 を1〜20質量部、混合して混合粉を得る混合工程を有し、前記プリフォーム形成工程では、前記混合工程で得られた混合粉を前記成形用粉として使用することが望ましい。 In addition, in the said manufacturing method, D10: 5-20 micrometers with respect to 100 mass parts of 1st raw material powder which consists of SiC particle | grains which have a particle size distribution of D10: 50-150 micrometers, D50: 100-300 micrometers, D90: 170-450 micrometers, The preform forming step includes a mixing step of mixing 1 to 20 parts by mass of a second raw material powder composed of SiC particles having a particle size distribution of D50: 10 to 40 μm and D90: 15 to 60 μm to obtain a mixed powder. Then, it is desirable to use the mixed powder obtained in the mixing step as the molding powder.
本発明により、低熱膨張率を有しつつ高い熱伝導率を有するアルミニウム合金−セラミックス複合材およびそのようなアルミニウム合金−セラミックス複合材を製造するために好適な製造方法が提供される。 The present invention provides an aluminum alloy-ceramic composite material having a low thermal expansion coefficient and a high thermal conductivity, and a production method suitable for producing such an aluminum alloy-ceramic composite material.
以下、本発明について、その実施形態および実施例に基づき図面を参照しつつ説明する。ここで、図1は、本発明の実施例1に係るアルミニウム合金−セラミックス複合材の切断面の一例を示すミクロ組織写真である。図2は、実施例1の組織をEDXにより分析した結果のうちAl、SiおよびC各元素の像を示す図である。図3は、実施例1の組織をEDXにより分析した結果のうちOおよびMgの像を示す図である。図4は、実施例1の組織をEDXにより分析した結果のうちFe、TiおよびNiの各元素の像を示す図である。図5は、本発明に係る凝集部の定義を説明するための概念図である。なお、図2〜4は、上記のとおり各元素のEDX分析結果をグレースケールで示しており、黒色、灰色、白色の順で元素の含有量が増加していることを示している。 Hereinafter, the present invention will be described based on the embodiments and examples with reference to the drawings. Here, FIG. 1 is a microstructure photograph showing an example of a cut surface of an aluminum alloy-ceramic composite material according to Example 1 of the present invention. FIG. 2 is a diagram showing images of each element of Al, Si, and C among the results of analyzing the structure of Example 1 by EDX. FIG. 3 is a diagram showing images of O and Mg among the results of analyzing the structure of Example 1 by EDX. FIG. 4 is a diagram showing images of Fe, Ti, and Ni elements among the results of analyzing the structure of Example 1 by EDX. FIG. 5 is a conceptual diagram for explaining the definition of the aggregation portion according to the present invention. In addition, FIGS. 2-4 has shown the EDX analysis result of each element in gray scale as above-mentioned, and has shown that element content is increasing in order of black, gray, and white.
本発明に係る複合材10は、図1に示すように、Si:2.5〜13質量%、Mg:1〜8質量%、残部Alおよび不可避不純物元素からなる基地12と、前記基地12中に分散した複数個のSiC粒子11とを有し、前記SiC粒子11は、面積率が50〜75%であり、円相当粒径分布がd10:25〜100μm、d50:75〜200μm、d90:130〜320μmであり、Fe、Ti、NiおよびVの元素のうち少なくも1つの元素からなる化合物粒子を前記基地12中に有し、前記化合物粒子で形成される直径が5μm以上の凝集部13の面積率は0.3〜1.0%である複合材である。かかる複合材によれば、上記のように所定の割合で化合物粒子を含有させることにより、6〜10ppm/Kの範囲の低い熱膨張率を有し、かつ高い熱伝導率を有する複合材が具現される。
As shown in FIG. 1, the
上述した構成から明らかであるが、本発明に係る複合材とは、アルミニウム合金からなる基地中に、所定の粒径分布のSiC粒子が所定の面積率で分散された部材のことを指すが、例えば弾性率を調整する目的で、下記する本化合物元素を含まない化合物粒子(例えばSiO2等)を添加してもよい。以下、本発明に係る複合材の構成要素について、詳細に説明する。 As is apparent from the configuration described above, the composite material according to the present invention refers to a member in which SiC particles having a predetermined particle size distribution are dispersed at a predetermined area ratio in a base made of an aluminum alloy. For example, for the purpose of adjusting the elastic modulus, the following compound particles not containing the present compound element (for example, SiO 2 ) may be added. Hereinafter, components of the composite material according to the present invention will be described in detail.
(基地)
複合材の基地を構成するアルミニウム合金の組成の限定理由は、下記のとおりである。Siが2.5質量%未満だと、基地組織を構成するアルミニウム合金の強度が低くなり、総合的に複合材の強度が低下するおそれがある。一方で、13質量%を超えると、凝固時に初晶Siが晶出して複合材の強度が低下するおそれがある。また、Mgが1質量%未満だと、下記詳述する浸透工程においてプリフォームにアルミニウム合金溶湯が十分に浸透せず、気孔面積率が増加し、複合材の強度が低下するおそれがある。一方で、Mgが8質量%を超えると熱伝導率が低下するおそれがある。
(base)
The reasons for limiting the composition of the aluminum alloy constituting the base of the composite material are as follows. When Si is less than 2.5% by mass, the strength of the aluminum alloy constituting the base structure is lowered, and the strength of the composite material may be lowered comprehensively. On the other hand, if it exceeds 13% by mass, primary Si may crystallize during solidification and the strength of the composite material may decrease. On the other hand, when Mg is less than 1% by mass, the molten aluminum alloy does not sufficiently permeate into the preform in the permeation process described in detail below, which may increase the pore area ratio and reduce the strength of the composite material. On the other hand, when Mg exceeds 8 mass%, there exists a possibility that thermal conductivity may fall.
(SiC粒子)
SiC粒子の円相当粒径分布は、d10:25〜100μm、d50:75〜200μm、d90:130〜320μmであることが望ましい。その理由は、以下のとおりである。SiC粒子のd10〜d90がいずれも下限未満となると、気孔面積率が高くなり、複合材の強度が低下するおそれがある。一方で、d10〜d90がいずれも上限を超えると、同様に複合材の強度が低下するおそれがある。なお、「d10」、「d50」および「d90」とは、SiC粒子の円相当粒径分布の面積基準の累積分布における、10%累積粒径、50%累積粒径、90%累積粒径のことを指す。
(SiC particles)
The equivalent-circle particle size distribution of the SiC particles is desirably d10: 25 to 100 μm, d50: 75 to 200 μm, and d90: 130 to 320 μm. The reason is as follows. When d10 to d90 of the SiC particles are less than the lower limit, the pore area ratio is increased, and the strength of the composite material may be reduced. On the other hand, if all of d10 to d90 exceed the upper limit, the strength of the composite material may similarly decrease. “D10”, “d50”, and “d90” are the 10% cumulative particle size, 50% cumulative particle size, and 90% cumulative particle size in the area-based cumulative distribution of the equivalent particle size distribution of SiC particles. Refers to that.
SiC粒子の面積率は、50%未満の場合および75%超える場合いずれにおいても、基地とSiC粒子の配分のバランスが悪く、放熱用途の部材として要求される特性である熱的特性(熱伝導率、熱膨張率等)、機械的特性(強度、剛性、靱性等)のいずれかを満足できない可能性がある。よって、SiC粒子の面積率は50〜75%が望ましい。なお、SiC粒子の面積率とは、観察する視野の全体の面積に対し、当該視野に存在するSiC粒子の面積の割合のことを指す。 The area ratio of the SiC particles is less than 50% and more than 75%, and the balance between the distribution of the base and the SiC particles is poor, and the thermal characteristics (thermal conductivity which is a characteristic required as a member for heat radiation use) , Thermal expansion coefficient, etc.) and mechanical properties (strength, rigidity, toughness, etc.) may not be satisfied. Therefore, the area ratio of SiC particles is desirably 50 to 75%. The area ratio of SiC particles refers to the ratio of the area of SiC particles existing in the visual field to the entire area of the visual field to be observed.
なお、SiC粒子の結晶構造は多形であるが、本発明に係る複合材に使用するSiC粒子としては、結晶型が4H以上のSiC粒子を使用することが好ましく、熱伝導率を低下させる不純物(例えば、Fe、Mg、Mn、Al、B等)の含有量が少ない、好ましくは500ppm以下のSiC粒子を使用することが望ましい。 Although the crystal structure of the SiC particles is polymorphic, as the SiC particles used in the composite material according to the present invention, it is preferable to use SiC particles having a crystal type of 4H or more, and impurities that lower the thermal conductivity. It is desirable to use SiC particles having a low content (for example, Fe, Mg, Mn, Al, B, etc.), preferably 500 ppm or less.
(本化合物粒子、凝集部)
本発明に係る化合物粒子(以下、この化合物粒子を本化合物粒子という場合がある。)は、Fe、Ti、NiおよびVの元素(以下、これらの元素を本化合物元素と言う場合がある。)のうち少なくとも1つの元素からなる化合物(以下、この化合物を本化合物という場合がある。)、具体的には酸化物(FeO、TiO2、NiO等)、窒化物(AlN、TiN等)、炭化物(TiC等)、酸窒化物または炭窒化物などで構成されている。ここで、本化合物粒子は、その全てが本化合物で構成されている必要はなく、粒子の断面視において、概ね50%以上の面積が本化合物で占められていればよい。つまり、SiC粒子の外周部にも本化合物元素を含む層が形成される場合もあるが、SiC粒子の断面視における当該層の面積は、厚くてもたかだか20%程度に過ぎない。このように外周部に薄い本化合物元素を含む層が形成されたSiC粒子は、本発明で定義する本化合物粒子からは除外され、SiC粒子と見なされる。なお、上記化合物粒子は、例えば、EDX(Energy dispersive X−ray spectrometry:エネルギー分散型X線分析)により特定することができる。具体的には、図2〜4に示すように、EDXにより本化合物元素(Fe、Ti、NiおよびV)および本化合物元素と結合するO、NおよびCその他の元素をマッピングし、本化合物元素とO、NまたはC等が重複する粒子を本化合物粒子として特定することができる。
(This compound particle, agglomerated part)
The compound particles according to the present invention (hereinafter, the compound particles may be referred to as the present compound particles) are elements of Fe, Ti, Ni, and V (hereinafter, these elements may be referred to as the present compound elements). Of these compounds (hereinafter, this compound may be referred to as this compound), specifically oxides (FeO, TiO 2 , NiO, etc.), nitrides (AlN, TiN, etc.), carbides (TiC or the like), oxynitride, carbonitride, or the like. Here, it is not necessary that all of the present compound particles are composed of the present compound, and it is sufficient that an area of approximately 50% or more is occupied by the present compound in a sectional view of the particles. That is, a layer containing the present compound element may be formed on the outer peripheral portion of the SiC particle, but the area of the layer in the cross-sectional view of the SiC particle is only about 20% at most. Thus, the SiC particle in which the thin layer containing the present compound element is formed on the outer peripheral portion is excluded from the present compound particle defined in the present invention, and is regarded as the SiC particle. In addition, the said compound particle | grain can be identified by EDX (Energy dispersive X-ray spectroscopy: Energy dispersive X-ray analysis), for example. Specifically, as shown in FIGS. 2 to 4, the present compound element (Fe, Ti, Ni and V) and O, N and C other elements bonded to the present compound element are mapped by EDX, and the present compound element is mapped. Can be identified as the present compound particles.
本発明に係る複合材の1つの特徴は、上記本化合物粒子で構成された凝集部のうち、直径が5μm以上の凝集部を面積率が0.3〜1.0%で、基地中に配置することにある。ここで直径が5μm未満の凝集部は、熱伝導率および熱膨張率に影響を及ぼさないので、対象とする本化合物粒子の凝集部の直径は5μm以上に限定する。また、凝集部の面積率が0.3%未満、1.0%を超える場合には、いずれも熱伝導率が低下するので、面積率は、0.3〜1.0%であることが望ましい。本発明に係る複合材によれば、上記した構成要素の複合効果により、熱膨張率が6〜10ppm/K、熱伝導率が180W/m・K以上の複合材を具現することができる。なお、本発明に係る凝集部13とは、複合体の断面の概念図である図5に示すように、複数の本化合物粒子13aが寄り集まった部分のことを指し、具体的には隣接する粒子間の間隙Sが1μm以下である本化合物粒子13aの集合部分のことを言う。また、当該凝集部13の直径Lとは、図示するように、凝集部13を内包する最小円の直径のことを言う。
One feature of the composite material according to the present invention is that, among the agglomerated parts composed of the compound particles, the agglomerated parts having a diameter of 5 μm or more are arranged in the base with an area ratio of 0.3 to 1.0%. There is to do. Here, the agglomerated part having a diameter of less than 5 μm does not affect the thermal conductivity and the coefficient of thermal expansion, so the diameter of the agglomerated part of the target compound particles is limited to 5 μm or more. In addition, when the area ratio of the agglomerated part is less than 0.3% and exceeds 1.0%, the thermal conductivity is lowered in all cases, and therefore the area ratio may be 0.3 to 1.0%. desirable. According to the composite material according to the present invention, a composite material having a thermal expansion coefficient of 6 to 10 ppm / K and a thermal conductivity of 180 W / m · K or more can be realized by the composite effect of the above-described constituent elements. In addition, as shown in FIG. 5 which is a conceptual diagram of a cross section of the composite, the
加えて、より高い熱伝導率を有する複合材を構成するためには、前記凝集部のうち直径が5μm以上の凝集部の平均径が5〜15μmであることが望ましく、前記凝集部のうち直径が5μm以上の化合物粒子の最大径が20μm以下であることがより好ましい。 In addition, in order to construct a composite material having a higher thermal conductivity, it is desirable that the average diameter of the aggregated portions having a diameter of 5 μm or more among the aggregated portions is 5 to 15 μm, and the diameter of the aggregated portions is More preferably, the maximum diameter of the compound particles having a diameter of 5 μm or more is 20 μm or less.
さらに本発明に係る複合材は、上記のように適切な範囲で配合された基地、SiC粒子および本化合物粒子で構成されているので、円相当径が10μm以上の気孔の面積率(気孔面積率)が1.5%以下と低くなる。なお、気孔の面積率の下限値は複合材の特性という面では0(つまり、円相当径が10μm以上の気孔が存在しない)であっても良いが、工業生産上妥当な費用で複合材を提供するという面から0.1%以上であることが好ましい。 Furthermore, since the composite material according to the present invention is composed of the base, SiC particles, and the present compound particles blended in an appropriate range as described above, the area ratio (pore area ratio) of pores having an equivalent circle diameter of 10 μm or more. ) Is as low as 1.5% or less. The lower limit value of the area ratio of the pores may be 0 in terms of the characteristics of the composite material (that is, pores having an equivalent circle diameter of 10 μm or more do not exist), but the composite material may be used at a reasonable cost in industrial production. It is preferable that it is 0.1% or more from the surface of providing.
上記した複合材の製造方法は、特段限定されず、例えば粉末法や加圧浸透法などを適用して製造することができるが、本発明に係る製造方法、すなわち、
(1)D10:30〜120μm、D50:90〜250μm、D90:160〜400μmの粒度分布を有するSiC粒子からなる成形用粉を成形し、SiC粒子の体積率が50〜75体積%のプリフォームを形成するプリフォーム成形工程と、
(2)前記プリフォームに、Si:2.5〜13質量%、Mg:1〜8質量%、残部がAlおよび不可避不純物元素からなるアルミニウム合金溶湯を大気雰囲気下で浸透させて浸透体を形成する浸透工程と、
(3)前記浸透体を冷却してアルミニウム合金溶湯を凝固させる冷却工程と、
を有し、
前記成形用粉およびアルミニウム溶湯は、双方合わせてFe、Ti、NiまたはV(本化合物元素)を総量で0.36〜0.90質量%含むアルミニウム合金−セラミックス複合材の製造方法を適用し、製造することが好ましい。
The manufacturing method of the composite material described above is not particularly limited and can be manufactured by applying, for example, a powder method or a pressure infiltration method, but the manufacturing method according to the present invention, that is,
(1) A molding powder composed of SiC particles having a particle size distribution of D10: 30 to 120 μm, D50: 90 to 250 μm, D90: 160 to 400 μm, and a volume fraction of SiC particles is 50 to 75% by volume. Forming a preform, and
(2) The preform is infiltrated with a molten aluminum alloy composed of Si: 2.5 to 13% by mass, Mg: 1 to 8% by mass, and the balance of Al and inevitable impurity elements in an air atmosphere to form a permeation body. An infiltration process to
(3) a cooling step of cooling the permeate to solidify the molten aluminum alloy;
Have
The molding powder and the molten aluminum are both applied with a method for producing an aluminum alloy-ceramic composite material containing Fe, Ti, Ni or V (present compound element) in a total amount of 0.36 to 0.90 mass%, It is preferable to manufacture.
かかる複合材の製造方法によれば、上記所定の粒度分布を有するSiC粒子からなる成形用粉を用いて、50〜75体積%のプリフォームをプリフォーム形成工程で形成し、浸透工程および冷却工程を経て複合材を形成することにより、低い熱膨張率と高い熱伝導率を併せもつ複合材が具現される。より具体的には、本発明に係る複合材の製造方法は、上記所定の範囲に規定された粒度分布の成形用粉を使用することにより、複合材中に分散させるSiC粒子が高い密度で充填され、熱伝導率を高め、かつ低い熱膨張率が具現される。さらに、成形用粉およびアルミニウム溶湯中の本化合物元素を、双方合わせて総量で0.36〜0.90質量%に限定する、換言すれば成形用粉およびアルミニウム溶湯中に含まれる本化合物粒子の含有量を所定の範囲に規定することにより、熱伝導率をさらに向上せしめているのである。加えて、本発明に係る複合材の製造方法では、プリフォームへのアルミニウム合金溶湯の浸透を大気雰囲気下で行うので、浸透工程における圧力制御や雰囲気制御などの操作が不要となり、低コストで複合材を形成することができるので好ましい。 According to such a method for producing a composite material, a molding powder composed of SiC particles having the predetermined particle size distribution is used to form a preform of 50 to 75% by volume in the preform forming step, and the infiltration step and the cooling step. By forming a composite material through the above, a composite material having both a low thermal expansion coefficient and a high thermal conductivity is realized. More specifically, in the method for producing a composite material according to the present invention, the SiC particles to be dispersed in the composite material are filled with a high density by using a molding powder having a particle size distribution defined in the predetermined range. Thus, the thermal conductivity is increased and a low thermal expansion coefficient is realized. Further, the present compound elements in the molding powder and molten aluminum are both limited to a total amount of 0.36 to 0.90 mass%, in other words, the present compound particles contained in the molding powder and molten aluminum. By defining the content within a predetermined range, the thermal conductivity is further improved. In addition, in the method for producing a composite material according to the present invention, since the molten aluminum alloy is infiltrated into the preform in an air atmosphere, operations such as pressure control and atmosphere control in the infiltration process are not required, and the composite material is manufactured at low cost. Since a material can be formed, it is preferable.
なお、プリフォーム成形工程で使用される成形用粉は、上記所定の粒度分布および本化合物元素含有量になるよう調整されたものであれば、特にその製造方法は限定されない。しかしながら、D10:50〜150μm、D50:100〜300μm、D90:170〜450μmの粒度分布を有するSiC粒子からなる第1の原料粉100質量部に対し、D10:5〜20μm、D50:10〜40μm、D90:15〜60μmの粒度分布を有するSiC粒子からなる第2の原料粉を1〜20質量部、混合して混合粉を得る混合工程を有し、前記プリフォーム形成工程では、前記混合工程で得られた混合粉を前記成形用粉として使用することが望ましい。以下、好ましい態様である混合工程を含む製造方法を例として、本発明に係る製造方法について詳述する。 In addition, if the powder for shaping | molding used at a preform shaping | molding process is adjusted so that it may become the said predetermined particle size distribution and this compound element content, the manufacturing method in particular will not be limited. However, D10: 5 to 20 μm, D50: 10 to 40 μm with respect to 100 parts by mass of the first raw material powder composed of SiC particles having a particle size distribution of D10: 50 to 150 μm, D50: 100 to 300 μm, D90: 170 to 450 μm. , D90: 1 to 20 parts by mass of a second raw material powder composed of SiC particles having a particle size distribution of 15 to 60 μm, and a mixing step for obtaining a mixed powder. In the preform forming step, the mixing step It is desirable to use the mixed powder obtained in the above as the molding powder. Hereinafter, the manufacturing method according to the present invention will be described in detail by taking a manufacturing method including a mixing step as a preferred embodiment as an example.
(混合工程)
混合工程は、所定の粒度分布を有するSiC粒子からなる第1の原料粉(D10:50〜150μm、D50:100〜300μm、D90:170〜450μm)に第2の原料粉(D10:5〜20μm、D50:10〜40μm、D90:15〜60μm)を、所定割合で混合して成形用粉を得る工程である。ここで、「D10」、「D50」および「D90」とは、JIS Z 8825:2013に準拠して粒度分布を測定したときの体積基準の累積分布における、10%累積粒子径、50%累積粒子径、90%累積粒子径のことを指す。第1の原料粉および第2の原料粉において、D10〜D90がいずれも下限未満となると微細なSiC粒子の割合が多くなり、浸透工程におけるプリフォームへのアルミニウム合金溶湯の浸透が進み難く、気孔の面積率が高くなり、熱伝導率が低下するおそれがある。一方で、第1の原料粉および第2の原料粉において、D10〜D90がいずれも上限を超えると粗大なSiC粒子の割合が多くなり、同様に熱伝導率が低下するおそれがある。
(Mixing process)
In the mixing step, the first raw material powder (D10: 50 to 150 μm, D50: 100 to 300 μm, D90: 170 to 450 μm) made of SiC particles having a predetermined particle size distribution is added to the second raw material powder (D10: 5 to 20 μm). , D50: 10-40 μm, D90: 15-60 μm) at a predetermined ratio to obtain a molding powder. Here, “D10”, “D50” and “D90” are 10% cumulative particle diameter and 50% cumulative particle in the volume-based cumulative distribution when the particle size distribution is measured in accordance with JIS Z 8825: 2013. Diameter, 90% cumulative particle diameter. In the first raw material powder and the second raw material powder, when D10 to D90 are both less than the lower limit, the proportion of fine SiC particles increases, and the penetration of the molten aluminum alloy into the preform in the infiltration process is difficult to proceed. There is a risk that the area ratio of the metal will increase and the thermal conductivity will decrease. On the other hand, in the first raw material powder and the second raw material powder, when D10 to D90 both exceed the upper limit, the ratio of coarse SiC particles increases, and the thermal conductivity may similarly decrease.
第1の原料粉と第2の原料粉との配合比は、第1の原料粉100質量部に対し第2の原料粉を1〜20質量部とすることが望ましい。そして、この配合比で、上記粒度分布を有する第1および第2の原料粉を混合し、所定の粒度分布を有する成形用粉(D10:40〜120μm、D50:80〜300μm、D90:100〜500μm)を形成し、当該成形用粉で所定のプリフォームを形成することにより、所望の水準の熱膨張率および熱伝導率を有する複合材を得ることができるのである。 The mixing ratio of the first raw material powder and the second raw material powder is preferably 1 to 20 parts by mass of the second raw material powder with respect to 100 parts by mass of the first raw material powder. Then, at this blending ratio, the first and second raw material powders having the above particle size distribution are mixed, and a molding powder having a predetermined particle size distribution (D10: 40 to 120 μm, D50: 80 to 300 μm, D90: 100 to 500 μm) and forming a predetermined preform with the molding powder, a composite material having a desired level of thermal expansion coefficient and thermal conductivity can be obtained.
本発明に係る複合材の製造方法では、成形用粉およびアルミニウム溶湯に含まれる本化合物元素(Fe、Ti、NiおよびV)の総量を、双方合わせて0.06〜0.60質量%とすることを一つの特徴としている。ここで、成形用粉を主体的に構成するSiC粒子自身も微量ながら本化合物元素(Fe、Ti、Ni、V)を含んでいるが、結晶型が4H以上のSiC粒子に含む本化合物元素の総量はたかだか500ppm程度である。つまり、成形用粉に含まれる本化合物元素は、SiC粒子にほぼ含まれず、SiC粒子以外に、本化合物元素を含む化合物(酸化物、窒化物、炭化物、酸窒化物または炭窒化物)粒子または本化合物元素からなる金属粒子という形態で存在しているのである。 In the method for producing a composite material according to the present invention, the total amount of the present compound elements (Fe, Ti, Ni and V) contained in the molding powder and the molten aluminum is 0.06 to 0.60 mass% in total. This is one of the characteristics. Here, although the SiC particles themselves that mainly constitute the molding powder contain a small amount of this compound element (Fe, Ti, Ni, V), the compound element contained in the SiC particles having a crystal type of 4H or more. The total amount is at most about 500 ppm. That is, the present compound element contained in the molding powder is not substantially contained in the SiC particles, and in addition to the SiC particles, compound (oxide, nitride, carbide, oxynitride or carbonitride) particles containing the present compound element or It exists in the form of metal particles composed of this compound element.
上記のような含有量で本化合物元素を含む成形用粉の形成方法は、特段限定されない。特に、成形用粉に含まれる、本化合物元素を含む化合物粒子または金属粒子は、成形用粉を主として構成するSiC粒子に対し比較的粒径の小さな粒子であるので、例えば成形用粉を分級処理し、微粒のみを取り除いても良い。この分級処理は、成形用粉の原料である、混合工程前の第1の原料粉または第2の原料粉に各々施しても良い。 The forming method of the molding powder containing the present compound element with the content as described above is not particularly limited. In particular, the compound particles or metal particles containing the present compound element contained in the molding powder are particles having a relatively small particle size relative to the SiC particles mainly constituting the molding powder. For example, the molding powder is classified. However, only fine particles may be removed. This classification treatment may be applied to the first raw material powder or the second raw material powder before the mixing step, which is the raw material of the molding powder.
本発明に係る混合工程では、上記以外の操作は特に限定されない。例えば、成形用粉のみでは成形後のプリフォームの強度が不足するのであれば、バインダ(結合剤)や分散剤などを混合工程で混合粉に添加してもよい。バインダを添加する場合には、成形用粉を100質量部としたとき、SiO2を0〜0.5質量部含む水溶液を使用することが望ましい。ここでSiO2が0質量部の場合の水溶液とは、SiO2を含まない水溶液、すなわち水である。SiO2を含む水溶液の場合には、SiO2源として市販のコロイダルシリカ、水ガラス等を使用することができる。 In the mixing step according to the present invention, operations other than those described above are not particularly limited. For example, a binder (binder) or a dispersant may be added to the mixed powder in the mixing step if the strength of the preform after molding is insufficient with only the molding powder. When the binder is added, it is desirable to use an aqueous solution containing 0 to 0.5 parts by mass of SiO 2 when the molding powder is 100 parts by mass. Here, the aqueous solution when SiO 2 is 0 part by mass is an aqueous solution not containing SiO 2 , that is, water. In the case of an aqueous solution containing SiO 2 can be used commercially available colloidal silica, water glass or the like as a SiO 2 source.
第1の原料粉および第2の原料粉の混合方法は、特に限定されず、慣用される周知の湿式または乾式混合装置を使用することができる。例えば、上記のようにバインダとして水溶液を添加する場合には、例えばボールミルやミキサーなどの各種の湿式混合装置を使用することができる。 The method for mixing the first raw material powder and the second raw material powder is not particularly limited, and a well-known wet or dry mixing apparatus that is commonly used can be used. For example, when an aqueous solution is added as a binder as described above, various wet mixing apparatuses such as a ball mill and a mixer can be used.
(プリフォーム成形工程)
プリフォーム成形工程では、上記混合工程で得られた混合粉を成形し、粒子体積率が50〜75体積%であるプリフォームを形成する。このプリフォームは、25〜50体積%を占める多数の細孔を有する多孔質体であり、浸透工程では、この細孔を満たすようにアルミニウム合金溶湯が浸透する。なお、アルミニウム合金溶湯の浸透を円滑に進め気孔面積率の低い複合材を得るためには、平均細孔径は10〜45μmであることが好ましく、さらに細孔の比表面積は0.15mm2/g以下であることが望ましい。
(Preform molding process)
In the preform molding step, the mixed powder obtained in the mixing step is molded to form a preform having a particle volume ratio of 50 to 75% by volume. This preform is a porous body having a large number of pores occupying 25 to 50% by volume, and in the permeation step, the molten aluminum alloy penetrates so as to fill the pores. In order to smoothly penetrate the molten aluminum alloy and obtain a composite material having a low pore area ratio, the average pore diameter is preferably 10 to 45 μm, and the specific surface area of the pores is 0.15 mm 2 / g. The following is desirable.
プリフォームの成形方法は、特に限定されず、例えば周知の加圧法、押出法、射出法または泥漿鋳込み法など湿式や乾式の各種の成形方法を使用することができる。例えば、上記のようにバインダとして水溶液を混合粉に添加してスラリーとした場合には、当該スラリーを成形型の開口部よりキャビティに供給し、加圧して充填し、適度に固めた後に抜型する方法で成形すればよい。なお、単に成形しただけの成形体でも十分な強度を有する場合には、成形体をプリフォームとして浸透工程に供すればよい。一方で、成形体のままでは強度が不足する場合には、成形体に加熱(焼成)処理を施し、十分な強度を有する焼成体または仮焼体を形成し、これらをプリフォームとして浸透工程に供すればよい。 The preform molding method is not particularly limited, and various wet and dry molding methods such as a known pressure method, extrusion method, injection method, and mud casting method can be used. For example, when an aqueous solution is added to the mixed powder as a binder to form a slurry as described above, the slurry is supplied to the cavity from the opening of the mold, filled by pressurization, and solidified appropriately and then removed. What is necessary is just to shape | mold by the method. In addition, what is necessary is just to use for a osmosis | permeation process by using a molded object as a preform, even if the molded object only formed is sufficient. On the other hand, when the strength of the molded body is insufficient, the molded body is subjected to a heating (firing) treatment to form a fired body or calcined body having sufficient strength, and these are used as a preform for the infiltration step. You may provide.
(浸透工程)
本発明に係る浸透工程は、上記プリフォーム成形工程で形成されたプリフォームに、凝固後には基地となるアルミニウム合金溶湯を大気雰囲気下で浸透させる。ここで、「大気雰囲気下」とは、大気圧下(非加圧・非減圧)で大気(空気)中という意味である。本発明に係る浸透工程では、このように大気雰囲気中で処理されるので、鋳造法、粉末冶金法または加圧浸透法のように大掛かりな装置を必要とせず、低コストで複合材を製造することが可能となる。加えて、本発明に係る大気雰囲気下の浸透法によれば、上記のようにプリフォームを形成する成形用粉およびアルミニウム溶湯中の本化合物元素の双方合わせた下限値を限定しているので、当該本化合物元素で構成される本化合物粒子の存在によりプリフォームの細孔にアルミニウム合金溶湯がより円滑に浸透される。その結果、複合材を構成するSiC粒子等とアルミニウム合金との間に大きな気孔が生じにくく、両者の間の熱伝達ロスが少ないので、高い熱伝導率を有する複合材を得ることができる。
(Penetration process)
In the infiltration step according to the present invention, the preform formed in the preform molding step is infiltrated with an aluminum alloy molten metal that becomes a base after solidification in an air atmosphere. Here, “under atmospheric atmosphere” means in the atmosphere (air) under atmospheric pressure (non-pressurized / non-depressurized). In the infiltration process according to the present invention, since it is processed in the air atmosphere as described above, a large-scale apparatus such as a casting method, a powder metallurgy method or a pressure infiltration method is not required, and a composite material is manufactured at a low cost. It becomes possible. In addition, according to the infiltration method in the air atmosphere according to the present invention, since the lower limit combined with both the compounding powder in the molding powder and the molten aluminum forming the preform as described above, Due to the presence of the present compound particles composed of the present compound element, the molten aluminum alloy penetrates more smoothly into the pores of the preform. As a result, large pores are not easily formed between the SiC particles and the like constituting the composite material and the aluminum alloy, and the heat transfer loss between the two is small, so that a composite material having high thermal conductivity can be obtained.
浸透工程で使用するアルミニウム合金溶湯は、上記のように成形用粉と併せ本化合物元素の量を限定したうえで、Si:2.5〜13質量%、Mg:1〜8質量%、残部Alおよび不可避不純物元素からなる溶湯であることが好ましい。Siが2.5質量%未満だと、基地組織を構成するアルミニウム合金の強度が低くなり、総合的に複合材の強度が低下するおそれがある。一方で、13質量%を超えると、凝固時に初晶Siが晶出して複合材の強度が低下するおそれがある。また、Mgが1質量%未満だと浸透工程においてプリフォームにアルミニウム合金溶湯が十分に浸透せず、複合材の強度が低下するおそれがある。一方で、Mgが8質量%を超えると熱伝導率が低下するおそれがある。 As described above, the molten aluminum alloy used in the infiltration step is limited to the amount of the present compound element together with the molding powder, and then Si: 2.5 to 13% by mass, Mg: 1 to 8% by mass, and the balance Al And a molten metal composed of inevitable impurity elements. When Si is less than 2.5% by mass, the strength of the aluminum alloy constituting the base structure is lowered, and the strength of the composite material may be lowered comprehensively. On the other hand, if it exceeds 13% by mass, primary Si may crystallize during solidification and the strength of the composite material may decrease. On the other hand, if Mg is less than 1% by mass, the molten aluminum alloy does not sufficiently permeate into the preform in the infiltration step, and the strength of the composite material may be reduced. On the other hand, when Mg exceeds 8 mass%, there exists a possibility that thermal conductivity may fall.
不可避不純物元素としてはMn、Sr、Sn、P、Cr、Cu、Znなどの元素も、溶解原材料等に由来する不可避的な不純物元素として混入する。このため、これらの元素も、基本的にはJIS規格等に沿った各不純物の許容含有量とすればよいが、本発明の目的を阻害しない含有範囲であれば有意な量を含むことは許容される。また本発明の目的に対してさらに好ましい効果を奏する不純物元素は、これを積極的に付加し含有させることを妨げるものではない。 As inevitable impurity elements, elements such as Mn, Sr, Sn, P, Cr, Cu, and Zn are also mixed as inevitable impurity elements derived from dissolved raw materials. For this reason, these elements may basically have an allowable content of each impurity in accordance with JIS standards, etc., but it is allowable to include a significant amount within a content range that does not impair the object of the present invention. Is done. Moreover, the impurity element which has a more preferable effect with respect to the object of the present invention does not prevent the active addition and inclusion thereof.
なお、アルミニウム合金溶湯の溶解方法や溶湯処理方法は特段限定されない。例えば、アルミニウム合金溶湯に溶存する水素量を減少させることは、複合材に含まれる気孔を抑制する点で有効である。具体的には、アルミニウム合金溶湯に適度な流量のアルゴンガスを吹き込む方法や、フラックス処理の投入フラックス量や処理時間を適当に選ぶ方法などにより、溶存水素量を低減することができる。 In addition, the melting method and molten metal processing method of an aluminum alloy molten metal are not specifically limited. For example, reducing the amount of hydrogen dissolved in the molten aluminum alloy is effective in suppressing pores contained in the composite material. Specifically, the amount of dissolved hydrogen can be reduced by a method of blowing an argon gas at an appropriate flow rate into the molten aluminum alloy or a method of appropriately selecting an input flux amount and a treatment time for the flux treatment.
(冷却工程)
上記浸透工程後、プリフォームの細孔にアルミニウム合金溶湯が浸透してなる浸透体を冷却し、アルミニウム合金溶湯を凝固させる冷却工程を行い、複合材を形成する。浸透体の冷却方法は特段限定されず、例えば大気中で徐冷してもよいし、適宜な冷やし金のうえに浸透体を載置して急冷してもよい。また、凝固時における引け巣の発生を抑制するため、浸透体の必要な個所に溶湯補給部を配置してもよい。
(Cooling process)
After the permeation step, a composite material is formed by cooling a permeation body in which the molten aluminum alloy penetrates into the pores of the preform and solidifying the molten aluminum alloy. The method for cooling the penetrating body is not particularly limited, and for example, it may be gradually cooled in the air, or may be rapidly cooled by placing the penetrating body on an appropriate cooling metal. In addition, in order to suppress the occurrence of shrinkage cavities during solidification, a molten metal replenishment unit may be disposed at a necessary portion of the penetrant.
(実施例および比較例)
次に、本発明の具体的な実施例と比較例を、以下に表と図面を参照しつつ示す。但し本発明はこれらに限定されるものではない。また、特に断りのない製造条件および測定条件は、表に示す各実施例と比較例との両者に共通である。
(Examples and Comparative Examples)
Next, specific examples and comparative examples of the present invention will be described below with reference to tables and drawings. However, the present invention is not limited to these. Further, production conditions and measurement conditions without particular notice are common to both the examples and comparative examples shown in the table.
(成形用粉)
表1に示すように、所定の粒度分布(D10、D50、D90)を有する第1の原料粉および第2の原料粉を準備し、第1の原料粉100質量部に対し所定の配合比で第2の原料粉を混合し(混合工程)、実施例に使用する型番A〜E、比較例に使用する型番F〜Iの成形用粉を得た。なお、第1の原料粉、第2の原料粉および成形用粉の粒度分布および成形用粉に含まれる本化合物元素(Fe、Ti、NiおよびV)の割合(質量%)は表1に示すとおりである。なお、粒度分布の測定方法はJIS Z8825:2013に準拠し、日機装株式会社製マイクロトラック(型式:MT3100II)で測定した。また、成形用粉中における本化合物元素の割合は、島津製作所製ICP発光分光分析装置(型式:ICPS−8000)により測定した。
(Molding powder)
As shown in Table 1, a first raw material powder and a second raw material powder having a predetermined particle size distribution (D10, D50, D90) are prepared, and at a predetermined mixing ratio with respect to 100 parts by mass of the first raw material powder. The second raw material powder was mixed (mixing step) to obtain molding powders of model numbers A to E used in the examples and model numbers F to I used in the comparative examples. Table 1 shows the particle size distribution of the first raw material powder, the second raw material powder and the molding powder, and the ratio (mass%) of the present compound elements (Fe, Ti, Ni and V) contained in the molding powder. It is as follows. In addition, the measuring method of a particle size distribution was based on JIS Z8825: 2013, and measured with the Nikkiso Co., Ltd. microtrack (model | form: MT3100II). Moreover, the ratio of this compound element in the powder for shaping | molding was measured with the Shimadzu Corporation ICP emission-spectral-analysis apparatus (model | form: ICPS-8000).
(実施例1)
上記混合工程で得られた100gの成形用粉Aに対し、さらにケイ酸ソーダ(富士化学製、2号)と水とを体積比で1:2に希釈した水溶液を4.5mlの割合で添加し、その後3分間撹拌し混合してスラリーを得た。
Example 1
To the 100 g of molding powder A obtained in the mixing step, an aqueous solution obtained by further diluting sodium silicate (manufactured by Fuji Chemical, No. 2) and water at a volume ratio of 1: 2 is added at a ratio of 4.5 ml. And then stirred and mixed for 3 minutes to obtain a slurry.
キャビティ形状が縦50mm、横150mm、深さ50mmのMCナイロン製の成形型にスラリーを充填して成形後、炭酸ガスを通気させてスラリーを硬化させた後に抜型し、加熱炉に挿入して800℃で2時間加熱処理(保持)して焼成し、プリフォームを得た(プルフォーム成形工程)。実施例1のプリフォームのSiC粒子体積率、すなわち外形の体積に占めるSiC粒子の割合は、表2に示すように、61.0%であった。このSiC粒子体積率は、作製したプリフォームの質量を、上記成形型のキャビティ体積とSiCの密度との積で除して求めた。 MC nylon molds with a cavity shape of 50 mm long, 150 mm wide, and 50 mm deep are filled with the slurry, molded, carbon dioxide gas is passed through to harden the slurry, and then removed from the mold. The preform was obtained by heat treatment (holding) at 2 ° C. for 2 hours and firing (pull foam molding step). As shown in Table 2, the volume fraction of SiC particles in the preform of Example 1, that is, the ratio of SiC particles in the volume of the outer shape was 61.0%. This SiC particle volume fraction was obtained by dividing the mass of the produced preform by the product of the cavity volume of the mold and the density of SiC.
表2に示すように、Si:9質量%、Mg:4.5質量%、本化合物元素の総量:0.27質量%、残部Alおよび不可避不純物元素からなるアルミニウム合金溶湯を、黒鉛るつぼからなる保持炉中において830℃に保持し、当該保持されたアルミニウム合金溶湯浴中に、上記成形工程で得られたプリフォームを、大気雰囲気下(非加圧)で30分間保持し、アルミニウム合金溶湯を浸透させた(浸透工程)。なお、プリフォームを溶湯浴に浸漬する前に予め溶湯の脱水素処理を行った。脱水素処理はアルゴンガスを溶湯に吹き込む方法により行った。浸透工程が完了した後、アルミニウム合金溶湯が浸透したプリフォームを溶湯浴から取り出し、冷却して複合材を得た(冷却工程)。 As shown in Table 2, Si: 9% by mass, Mg: 4.5% by mass, the total amount of the present compound element: 0.27% by mass, and the aluminum alloy melt composed of the balance Al and inevitable impurity elements are composed of a graphite crucible. Hold at 830 ° C. in a holding furnace, hold the preform obtained in the molding step in the held molten aluminum alloy bath for 30 minutes in an atmospheric atmosphere (non-pressurized), Penetration (penetration process). In addition, before the preform was immersed in the molten metal bath, the molten metal was dehydrogenated in advance. The dehydrogenation treatment was performed by blowing argon gas into the molten metal. After the infiltration step was completed, the preform infiltrated with the molten aluminum alloy was taken out of the molten bath and cooled to obtain a composite material (cooling step).
得られた各実施例および比較例の複合材の、組織形態(基地面積率、SiC粒子の円相当平均粒径および粒径分布、本化合物粒子の凝集部の面積率、直径、最大径、円相当径10μm以上の気孔面積率)、密度、曲げ強度、曲げ弾性率、線膨張係数および室温における熱伝導率の測定は、下記の方法で行った。 The resulting composite material of each Example and Comparative Example, the morphology (base area ratio, SiC particle equivalent circle average particle diameter and particle size distribution, area ratio of the agglomerated portion of the compound particles, diameter, maximum diameter, circle The pore area ratio with an equivalent diameter of 10 μm or more), density, bending strength, bending elastic modulus, linear expansion coefficient, and thermal conductivity at room temperature were measured by the following methods.
組織形態は、次のようにして求めた。まず、SEM(Scanning Electron Microscope:走査型電子顕微鏡)により250倍で拡大した任意の5視野について上記のようにEDX分析を行った。そして、下記のように同定したSiC粒子の面積を、各視野全体の面積で除することによりSiC粒子の面積率を求めた。そして、5視野の平均値をSiC粒子面積率とした。実施例1のSiC粒子面積率は、表3に示すように、60.8%であった。 The organization form was determined as follows. First, EDX analysis was performed as described above for any five visual fields magnified by 250 times with a SEM (Scanning Electron Microscope). And the area ratio of the SiC particle was calculated | required by remove | dividing the area of the SiC particle identified as follows by the area of each whole visual field. And the average value of 5 visual fields was made into the SiC particle area ratio. As shown in Table 3, the SiC particle area ratio of Example 1 was 60.8%.
SiC粒子は、EDX分析で、SiとCがともに検出される粒子をSiC粒子と同定し、画像解析装置(旭化成エンジニアリング社製、商品名「A像くん」、以下の画像解析で同じ)で、5視野ごとに円相当粒径、粒径分布(d10、d50、d90)を求め、5視野の平均値を円相当粒径分布(d10、d50、d90)とした。実施例1のSiC粒子のd10は73μm、d50は111μm、d90は162μmであった。 For SiC particles, particles in which both Si and C are detected by EDX analysis are identified as SiC particles, and an image analysis device (Asahi Kasei Engineering Co., Ltd., trade name “A image kun”, the same in the following image analysis), The equivalent circle particle size and particle size distribution (d10, d50, d90) were obtained for each of the five fields of view, and the average value of the five fields of view was defined as the circle equivalent particle size distribution (d10, d50, d90). The SiC particles of Example 1 had d10 of 73 μm, d50 of 111 μm, and d90 of 162 μm.
本化合物粒子は、図2〜4に示すように、EDX分析で、本化合物元素(Fe、Ti、NiまたはV)とO、NまたはCがともに検出される粒子を本化合物粒子と同定した。なお、各実施例および比較例に含まれるVは、EDX分析でTiと同一場所で検出されるため、VのEDX分析結果の表示は省略している。そして、画像解析装置で、隣接する粒子間の間隙が1μm以下の本化合物粒子を選択して凝集部を確認し、当該凝集部の直径を求め、同定された凝集部のうち直径が5μm以上の凝集部の面積を算出し、5視野の平均値を凝集部の面積率(%)とした。また、直径が5μm以上の凝集部の平均径は5視野の平均値と、最大径は5視野の最大値とした。成形用粉およびアルミニウム合金溶湯中に含まれる本化合物元素の総量が0.38質量%であった実施例1の直径が5μm以上の凝集部の面積率(以下、単に凝集部の面積率と言う場合がある。平均径および最大径について同じ。)は、表3に示すように、0.6%、平均径は10μm、最大径は14μmであった。 As shown in FIGS. 2 to 4, the present compound particles were identified as the present compound particles by EDX analysis in which particles of the present compound element (Fe, Ti, Ni or V) and O, N or C were detected. In addition, since V contained in each Example and a comparative example is detected in the same place as Ti by EDX analysis, the display of the EDX analysis result of V is abbreviate | omitted. Then, in the image analyzer, the present compound particles having a gap between adjacent particles of 1 μm or less are selected to confirm the agglomerated part, the diameter of the agglomerated part is obtained, and the diameter of the identified agglomerated part is 5 μm or more. The area of the agglomerated part was calculated, and the average value of the five fields was defined as the area ratio (%) of the agglomerated part. Further, the average diameter of the agglomerated part having a diameter of 5 μm or more was the average value of 5 visual fields, and the maximum diameter was the maximum value of 5 visual fields. The area ratio of the agglomerated part having a diameter of 5 μm or more in Example 1 in which the total amount of the present compound element contained in the molding powder and the molten aluminum alloy was 0.38% by mass (hereinafter simply referred to as the area ratio of the agglomerated part) As shown in Table 3, the average diameter and the maximum diameter were 0.6%, the average diameter was 10 μm, and the maximum diameter was 14 μm.
気孔面積率は次のようにして求めた。得られた複合材の断面において、光学顕微鏡で100倍に拡大した任意の5視野を観察した。それぞれの視野について、製品特性(強度、熱伝導率など)に影響を与える円相当径で直径10μm以上の気孔とそれ以外の部分とに2値化し、画像解析装置で気孔の面積率を測定した。測定した5視野の気孔面積率の平均値を円相当径10μm以上の気孔面積率とした。実施例1の複合材の気孔面積率は、表3に示すように、0.6%であった。 The pore area ratio was determined as follows. In the cross section of the obtained composite material, arbitrary five visual fields magnified 100 times with an optical microscope were observed. For each field of view, binarized into pores with an equivalent circle diameter of 10 μm or more that affect product characteristics (strength, thermal conductivity, etc.) and other parts, and the area ratio of the pores was measured with an image analyzer. . The average value of the pore area ratios of the five visual fields thus measured was defined as the pore area ratio having an equivalent circle diameter of 10 μm or more. As shown in Table 3, the pore area ratio of the composite material of Example 1 was 0.6%.
JISZ8807:2012規定の固体比重測定方法に準じて幾何学的測定により求めた、実施例1の複合材の密度は、表4に示すように2.92×103kg/m3であった。曲げ強度は、得られた複合材から45mm×4mm×3mmに切り出した試験片をインストロン万能試験機(インストロン社製、5565型、最大荷重5kN)にてJIS R1601:2008に準拠した3点曲げ試験により測定した。実施例1の複合材の曲げ強度は、表4に示すように、300MPaであった。 As shown in Table 4, the density of the composite material of Example 1 obtained by geometric measurement in accordance with the solid specific gravity measurement method specified in JISZ8807: 2012 was 2.92 × 10 3 kg / m 3 . Bending strength is 3 points according to JIS R1601: 2008 using a test piece cut out of 45 mm × 4 mm × 3 mm from the obtained composite material with an Instron universal testing machine (Instron, model 5565, maximum load 5 kN). It was measured by a bending test. As shown in Table 4, the bending strength of the composite material of Example 1 was 300 MPa.
線膨張係数は、得られた複合材から5mm×5mm×15mmに切り出した試験片を熱機械分析装置(Netzsch社製、形式:TMA4000)によりJIS R1618:2002に準拠した方法で測定した。実施例1の複合材の線膨張係数は、8ppm/Kであった。 The linear expansion coefficient was measured by a method based on JIS R1618: 2002 using a thermomechanical analyzer (manufactured by Netzsch, model: TMA4000) for a test piece cut out to 5 mm × 5 mm × 15 mm from the obtained composite material. The linear expansion coefficient of the composite material of Example 1 was 8 ppm / K.
熱伝導率を算出するために必要な密度は次のようにして求めた。得られた複合材から20mm×20mm×20mmに切り出した試験片について、室温において質量を測定し、この質量から、上記試験片と同一寸法の体積に相当する量の工業用精製水の室温における質量を除した値を密度とした。 The density required for calculating the thermal conductivity was determined as follows. About the test piece cut out to 20 mm x 20 mm x 20 mm from the obtained composite material, the mass was measured at room temperature, and from this mass, the mass of industrial purified water in an amount corresponding to the volume of the same dimension as the test piece was measured at room temperature. The value obtained by dividing was taken as the density.
室温における熱伝導率は、得られた複合材から直径10mm×厚さ3.0mmに切り出した円板状の試験片を、レーザーフラッシュ法(Nezsch社製熱拡散率測定装置、型式:NFL−447型)を用いて25℃±1℃における熱拡散率と比熱を測定し、この両者の積と上記で求めた密度との積を室温における熱伝導率とした。実施例1の複合材の熱伝導率は208W/m・Kであった。 The thermal conductivity at room temperature was determined by measuring a disk-shaped test piece cut out from the obtained composite material into a diameter of 10 mm and a thickness of 3.0 mm using a laser flash method (thermal diffusivity measuring device manufactured by Nezsch, model: NFL-447). Mold) was used to measure the thermal diffusivity and specific heat at 25 ° C. ± 1 ° C., and the product of the product of both and the density determined above was defined as the thermal conductivity at room temperature. The thermal conductivity of the composite material of Example 1 was 208 W / m · K.
(実施例2)
実施例2では、表1に示す成形用粉Bを使用し、表2に示すように、SiC体積率が61.5%の成形体を成形した点、およびアルミニウム合金溶湯がSi:11.8質量%、Mg:1.3質量%および本化合物元素:0.25質量%である点以外は、実施例1と同様にして複合材を製造した。実施例2の複合材のSiC粒子の面積率は61.5%であり、SiC粒子のd10・d50・d90は、各々、29μm、79μm、138μmであった。また、成形用粉およびアルミニウム合金溶湯中に含まれる本化合物元素の総量が0.38質量%であった実施例2の凝集部の面積率は1.0%、平均径は11μm、最大径は15μmであった。さらに、気孔面積率は1.4%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.85×103kg/m3、320MPa、9ppm/Kおよび189W/m・Kあった。
(Example 2)
In Example 2, the molding powder B shown in Table 1 was used, and as shown in Table 2, a molded body having a SiC volume ratio of 61.5% was formed, and the molten aluminum alloy was Si: 11.8. A composite material was produced in the same manner as in Example 1, except that the mass%, Mg: 1.3 mass%, and the present compound element: 0.25 mass%. The area ratio of the SiC particles of the composite material of Example 2 was 61.5%, and the d10 · d50 · d90 of the SiC particles were 29 μm, 79 μm, and 138 μm, respectively. Further, the area ratio of the agglomerated part of Example 2 in which the total amount of the present compound element contained in the molding powder and the molten aluminum alloy was 0.38% by mass was 1.0%, the average diameter was 11 μm, and the maximum diameter was It was 15 μm. Furthermore, the pore area ratio is 1.4%, and the density, bending strength, linear expansion coefficient and thermal conductivity at room temperature are 2.85 × 10 3 kg / m 3 , 320 MPa, 9 ppm / K and 189 W / There was m · K.
(実施例3)
実施例3では、表1に示す成形用粉Cを使用し、表2に示すように、SiC体積率が70.1%の成形体を成形した点、およびアルミニウム合金溶湯がSi:12質量%、Mg:4.5質量%および本化合物元素:0.28質量%である点以外は、実施例1と同様にして複合材を製造した。実施例3の複合材のSiC粒子の面積率は68.5%であり、SiC粒子のd10・d50・d90は、各々、77μm、174μm、281μmであった。また、成形用粉およびアルミニウム合金溶湯中に含まれる本化合物元素の総量が0.37質量%であった実施例3の凝集部の面積率は0.3%、平均径は7μm、最大径は10μmであった。さらに、気孔面積率は0.3%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.96×103kg/m3、250MPa、6.5ppm/Kおよび223W/m・Kであった。
(Example 3)
In Example 3, the molding powder C shown in Table 1 was used, and as shown in Table 2, a molded body having a SiC volume fraction of 70.1% was formed, and the molten aluminum alloy was Si: 12% by mass. A composite material was produced in the same manner as in Example 1, except that Mg: 4.5% by mass and the present compound element: 0.28% by mass. The area ratio of the SiC particles of the composite material of Example 3 was 68.5%, and d10, d50, and d90 of the SiC particles were 77 μm, 174 μm, and 281 μm, respectively. Further, the area ratio of the agglomerated part of Example 3 in which the total amount of the present compound element contained in the molding powder and the molten aluminum alloy was 0.37% by mass was 0.3%, the average diameter was 7 μm, and the maximum diameter was It was 10 μm. Furthermore, the pore area ratio is 0.3%, and the density, bending strength, linear expansion coefficient, and thermal conductivity at room temperature are 2.96 × 10 3 kg / m 3 , 250 MPa, 6.5 ppm / K and It was 223 W / m · K.
(実施例4)
実施例4では、表1に示す成形用粉Dを使用し、表2に示すように、SiC体積率が58.0%の成形体を成形した点、およびアルミニウム合金溶湯がSi:6質量%、Mg:7.6質量%および本化合物元素:0.28質量%である点以外は、実施例1と同様にして複合材を製造した。実施例4の複合材のSiC粒子の面積率は58.0%であり、SiC粒子のd10・d50・d90は、各々、80μm、112μm、159μmであった。また、成形用粉およびアルミニウム合金溶湯中に含まれる本化合物元素の総量が0.37質量%であった実施例4の凝集部の面積率は0.7%、平均径は12μm、最大径は18μmであった。さらに、気孔面積率は0.9%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.91×103kg/m3、280MPa、9.5ppm/Kおよび200W/m・Kであった。
Example 4
In Example 4, the molding powder D shown in Table 1 was used, and as shown in Table 2, a molded body having a SiC volume fraction of 58.0% was formed, and the aluminum alloy melt was Si: 6% by mass. A composite material was produced in the same manner as in Example 1, except that Mg: 7.6% by mass and the present compound element: 0.28% by mass. The area ratio of the SiC particles of the composite material of Example 4 was 58.0%, and d10, d50, and d90 of the SiC particles were 80 μm, 112 μm, and 159 μm, respectively. Further, the area ratio of the agglomerated part of Example 4 in which the total amount of the present compound element contained in the molding powder and the molten aluminum alloy was 0.37% by mass was 0.7%, the average diameter was 12 μm, and the maximum diameter was 18 μm. Furthermore, the pore area ratio is 0.9%, and the density, bending strength, linear expansion coefficient, and thermal conductivity at room temperature are 2.91 × 10 3 kg / m 3 , 280 MPa, 9.5 ppm / K and It was 200 W / m · K.
(実施例5)
実施例5では、表1に示す成形用粉Eを使用し、表2に示すように、SiC体積率が54.0%の成形体を成形した点、およびアルミニウム合金溶湯がSi:3.5質量%、Mg:4.5質量%および本化合物元素:0.31質量%である点以外は、実施例1と同様にして複合材を製造した。実施例5の複合材のSiC粒子の面積率は56.9%であり、SiC粒子のd10・d50・d90は、各々、40μm、85μm、137μmであった。また、成形用粉およびアルミニウム合金溶湯中に含まれる本化合物元素の総量が0.8質量%であった実施例5の凝集部の面積率は1.0%、平均径は15μm、最大径は20μmであった。さらに、気孔面積率は1.3%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.90×103kg/m3、310MPa、8.5ppm/Kおよび190W/m・Kであった。
(Example 5)
In Example 5, the molding powder E shown in Table 1 was used, and as shown in Table 2, a molded body having a SiC volume fraction of 54.0% was formed, and the molten aluminum alloy was Si: 3.5. A composite material was produced in the same manner as in Example 1 except that the mass%, Mg: 4.5 mass%, and the present compound element: 0.31 mass%. The area ratio of SiC particles of the composite material of Example 5 was 56.9%, and d10 · d50 · d90 of the SiC particles were 40 μm, 85 μm, and 137 μm, respectively. The area ratio of the agglomerated part of Example 5 in which the total amount of the present compound element contained in the molding powder and the molten aluminum alloy was 0.8% by mass was 1.0%, the average diameter was 15 μm, and the maximum diameter was It was 20 μm. Furthermore, the pore area ratio is 1.3%, and the density, bending strength, linear expansion coefficient and thermal conductivity at room temperature are 2.90 × 10 3 kg / m 3 , 310 MPa, 8.5 ppm / K and It was 190 W / m · K.
(比較例1)
比較例1では、表2に示すように、SiC体積率が49.4%の成形体を成形した点以外は、成形用粉Aを用いた実施例1と同様にして複合材を製造した。比較例1の複合材のSiC粒子の面積率は49.1%であり、SiC粒子のd10・d50・d90は、各々、80μm、115μm、168μmであった。また、比較例1の凝集部の面積率は0.9%、平均径は15μm、最大径は18μmであった。さらに、気孔面積率は1.3%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.88×103kg/m3、245MPa、11.3ppm/Kおよび184W/m・Kであった。
(Comparative Example 1)
In Comparative Example 1, as shown in Table 2, a composite material was produced in the same manner as in Example 1 using the molding powder A except that a molded body having a SiC volume ratio of 49.4% was molded. The area ratio of SiC particles of the composite material of Comparative Example 1 was 49.1%, and d10, d50, and d90 of the SiC particles were 80 μm, 115 μm, and 168 μm, respectively. The area ratio of the agglomerated part in Comparative Example 1 was 0.9%, the average diameter was 15 μm, and the maximum diameter was 18 μm. Furthermore, the pore area ratio is 1.3%, and the density, bending strength, linear expansion coefficient and thermal conductivity at room temperature are 2.88 × 10 3 kg / m 3 , 245 MPa, 11.3 ppm / K and It was 184 W / m · K.
(比較例2)
比較例2では、表2に示すように、SiC体積率が76.8%の成形体を成形した点以外は、成形用粉Aを用いた実施例1と同様にして複合材を製造した。比較例2の複合材のSiC粒子の面積率は76.2%であり、SiC粒子のd10・d50・d90は、各々、64μm、109μm、172μmであった。また、比較例2の凝集部の面積率は1.3%、平均径は14μm、最大径は17μmであった。さらに、気孔面積率は2.4%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.85×103kg/m3、240MPa、5.8ppm/Kおよび169W/m・Kであった。
(Comparative Example 2)
In Comparative Example 2, as shown in Table 2, a composite material was manufactured in the same manner as in Example 1 using the molding powder A except that a molded body having a SiC volume ratio of 76.8% was molded. The area ratio of SiC particles of the composite material of Comparative Example 2 was 76.2%, and d10, d50, and d90 of the SiC particles were 64 μm, 109 μm, and 172 μm, respectively. The area ratio of the agglomerated part in Comparative Example 2 was 1.3%, the average diameter was 14 μm, and the maximum diameter was 17 μm. Furthermore, the pore area ratio is 2.4%, and the density, bending strength, linear expansion coefficient and thermal conductivity at room temperature are 2.85 × 10 3 kg / m 3 , 240 MPa, 5.8 ppm / K and It was 169 W / m · K.
(比較例3)
比較例3では、表1に示す成形用粉Fを使用し、表2に示すように、SiC体積率が68.9%の成形体を成形した点、およびアルミニウム合金溶湯がSi:12質量%、Mg:2.5質量%および本化合物元素:0.25質量%である点以外は、実施例1と同様にして複合材を製造した。比較例3の複合材のSiC粒子の面積率は68.9%であり、SiC粒子のd10・d50・d90は、各々、10μm、71μm、127μmであった。また、成形用粉およびアルミニウム合金溶湯中に含まれる本化合物元素の総量が0.36質量%であった比較例3の凝集部の面積率は0.8%、平均径は11μm、最大径は18μmであった。さらに、気孔面積率は7.8%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.80×103kg/m3、220MPa、7ppm/Kおよび159W/m・Kであった。
(Comparative Example 3)
In Comparative Example 3, the molding powder F shown in Table 1 was used, and as shown in Table 2, a molded body having a SiC volume ratio of 68.9% was formed, and the molten aluminum alloy was Si: 12% by mass. A composite material was produced in the same manner as in Example 1, except that Mg: 2.5 mass% and the present compound element: 0.25 mass%. The area ratio of the SiC particles of the composite material of Comparative Example 3 was 68.9%, and the d10 · d50 · d90 of the SiC particles were 10 μm, 71 μm, and 127 μm, respectively. Further, the area ratio of the agglomerated part of Comparative Example 3 in which the total amount of the present compound element contained in the molding powder and the molten aluminum alloy was 0.36% by mass was 0.8%, the average diameter was 11 μm, and the maximum diameter was 18 μm. Furthermore, the pore area ratio was 7.8%, and the density, bending strength, linear expansion coefficient and thermal conductivity at room temperature were 2.80 × 10 3 kg / m 3 , 220 MPa, 7 ppm / K and 159 W / m · K.
(比較例4)
比較例4では、表1に示す成形用粉Gを使用し、表2に示すように、SiC体積率が54.0%の成形体を成形した点、およびアルミニウム合金溶湯がSi:9質量%、Mg:4.4質量%および本化合物元素:0.25質量%である点以外は、実施例1と同様にして複合材を製造した。比較例4の複合材のSiC粒子の面積率は54.0%であり、SiC粒子のd10・d50・d90は、各々、163μm、272μm、340μmであった。また、成形用粉およびアルミニウム合金溶湯中に含まれる本化合物元素の総量が0.4質量%であった比較例4の凝集部の面積率は0.6%、平均径は16μm、最大径は21μmであった。さらに、気孔面積率は0.7%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.88×103kg/m3、120MPa、9.8ppm/Kおよび184W/m・Kであった。
(Comparative Example 4)
In Comparative Example 4, the molding powder G shown in Table 1 was used, and as shown in Table 2, a molded body having a SiC volume ratio of 54.0% was formed, and the molten aluminum alloy was Si: 9% by mass. A composite material was produced in the same manner as in Example 1, except that Mg: 4.4% by mass and the present compound element: 0.25% by mass. The area ratio of SiC particles of the composite material of Comparative Example 4 was 54.0%, and d10 · d50 · d90 of the SiC particles were 163 μm, 272 μm, and 340 μm, respectively. Further, the area ratio of the agglomerated part of Comparative Example 4 in which the total amount of the present compound element contained in the molding powder and the molten aluminum alloy was 0.4% by mass was 0.6%, the average diameter was 16 μm, and the maximum diameter was It was 21 μm. Further, the pore area ratio is 0.7%, and the density, bending strength, linear expansion coefficient and thermal conductivity at room temperature are 2.88 × 10 3 kg / m 3 , 120 MPa, 9.8 ppm / K and It was 184 W / m · K.
(比較例5)
比較例5では、表1に示す成形用粉Hを使用し、表2に示すように、SiC体積率が61.3%の成形体を成形した点、およびアルミニウム合金溶湯がSi:8.8質量%、Mg:4.3質量%および本化合物元素:0.30質量%である点以外は、実施例1と同様にして複合材を製造した。比較例5の複合材のSiC粒子の面積率は60.8%であり、SiC粒子のd10・d50・d90は、各々、73μm、111μm、162μmであった。また、成形用粉およびアルミニウム合金溶湯中に含まれる本化合物元素の総量が0.34質量%であった比較例5の凝集部の面積率は0.25%、平均径は4μm、最大径は6μmであった。さらに、気孔面積率は5.2%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.82×103kg/m3、250MPa、8.2ppm/Kおよび167W/m・Kであった。
(Comparative Example 5)
In Comparative Example 5, the molding powder H shown in Table 1 was used, and as shown in Table 2, a molded body having a SiC volume ratio of 61.3% was formed, and the molten aluminum alloy was Si: 8.8. A composite material was produced in the same manner as in Example 1, except that the mass%, Mg: 4.3 mass%, and the present compound element: 0.30 mass%. The area ratio of SiC particles of the composite material of Comparative Example 5 was 60.8%, and d10 · d50 · d90 of the SiC particles were 73 μm, 111 μm, and 162 μm, respectively. Further, the area ratio of the agglomerated part of Comparative Example 5 in which the total amount of the present compound element contained in the molding powder and the molten aluminum alloy was 0.34% by mass was 0.25%, the average diameter was 4 μm, and the maximum diameter was It was 6 μm. Further, the pore area ratio is 5.2%, and the density, bending strength, linear expansion coefficient and thermal conductivity at room temperature are 2.82 × 10 3 kg / m 3 , 250 MPa, 8.2 ppm / K and It was 167 W / m · K.
(比較例6)
比較例6では、表1に示す成形用粉Iを使用し、表2に示すように、SiC体積率が61.0%の成形体を成形した点、およびアルミニウム合金溶湯のSi:9.2質量%、Mg:4.6質量%および本化合物元素:0.32質量%である点以外は、実施例1と同様にして複合材を製造した。比較例6の複合材のSiC粒子の面積率は60.8%であり、SiC粒子のd10・d50・d90は、各々、73μm、111μm、162μmであった。また、成形用粉およびアルミニウム合金溶湯中に含まれる本化合物元素の総量が1.11質量%であった比較例6の凝集部の面積率は1.6%、平均径は22μm、最大径は34μmであった。さらに、気孔面積率は0.4%であり、密度、曲げ強度、線膨張係数および室温における熱伝導率は、各々、2.92×103kg/m3、300MPa、7.8ppm/Kおよび175W/m・Kであった。
(Comparative Example 6)
In Comparative Example 6, the molding powder I shown in Table 1 was used, and as shown in Table 2, a molded body having a SiC volume ratio of 61.0% was formed, and the aluminum alloy melt Si: 9.2 A composite material was produced in the same manner as in Example 1, except that the mass%, Mg: 4.6 mass%, and the present compound element: 0.32 mass%. The area ratio of SiC particles of the composite material of Comparative Example 6 was 60.8%, and d10 · d50 · d90 of the SiC particles were 73 μm, 111 μm, and 162 μm, respectively. Further, the area ratio of the agglomerated part of Comparative Example 6 in which the total amount of the present compound element contained in the molding powder and the molten aluminum alloy was 1.11% by mass was 1.6%, the average diameter was 22 μm, and the maximum diameter was It was 34 μm. Furthermore, the pore area ratio is 0.4%, and the density, bending strength, linear expansion coefficient, and thermal conductivity at room temperature are 2.92 × 10 3 kg / m 3 , 300 MPa, 7.8 ppm / K and It was 175 W / m · K.
上記実施例および比較例の結果から明らかなように、本発明の範囲内である実施例1〜5では、低い熱膨張係数と高い熱伝導率とが両立した複合材を得ることができた。一方で、本発明の範囲外である比較例1〜3、5および6では、熱膨張係数が高い、または熱伝導率が低かった。また、比較例4では、熱膨張係数は低く、熱伝導率も高いものの、曲げ強度が著しく低いことが判った。
As is clear from the results of the above Examples and Comparative Examples, in Examples 1 to 5 which are within the scope of the present invention, a composite material having both a low thermal expansion coefficient and a high thermal conductivity could be obtained. On the other hand, in Comparative Examples 1-3, 5, and 6, which are outside the scope of the present invention, the thermal expansion coefficient was high or the thermal conductivity was low. In Comparative Example 4, it was found that although the thermal expansion coefficient was low and the thermal conductivity was high, the bending strength was extremely low.
10 アルミニウム合金−セラミックス複合材
11 SiC粒子
12 基地
13 凝集部
13a 本化合物粒子
14 気孔
DESCRIPTION OF
Claims (7)
前記SiC粒子は、面積率が50〜75%であり、円相当粒径分布がd10:25〜100μm、d50:75〜200μm、d90:130〜320μmであり、
Fe、Ti、NiおよびVの元素のうち少なくも1つの元素からなる化合物粒子を前記基地中に有し、前記化合物粒子で形成される直径が5μm以上の凝集部の面積率が0.3〜1.0%である、アルミニウム合金−セラミックス複合材。 Si: 2.5 to 13% by mass, Mg: 1 to 8% by mass, balance Al and inevitable impurity elements, and a plurality of SiC particles dispersed in the matrix,
The SiC particles have an area ratio of 50 to 75%, a circle-equivalent particle size distribution of d10: 25 to 100 μm, d50: 75 to 200 μm, d90: 130 to 320 μm,
The matrix has compound particles composed of at least one of the elements Fe, Ti, Ni and V, and the area ratio of the agglomerated portion formed of the compound particles and having a diameter of 5 μm or more is 0.3 to 1.0% aluminum alloy-ceramic composite.
前記プリフォームに、Si:2.5〜13質量%、Mg:1〜8質量%、残部がAlおよび不可避不純物元素からなるアルミニウム合金溶湯を大気雰囲気下で浸透させて浸透体を形成する浸透工程と、
前記浸透体を冷却してアルミニウム合金溶湯を凝固させる冷却工程と、
を有し、
前記成形用粉およびアルミニウム溶湯は、双方合わせてFe、Ti、NiまたはVを総量で0.36〜0.90質量%含む、アルミニウム合金−セラミックス複合材の製造方法。 D10: 30 to 120 μm, D50: 90 to 250 μm, D90: 160 to 400 μm, forming a molding powder composed of SiC particles to form a preform having a volume fraction of SiC particles of 50 to 75% by volume. A preform molding process;
A permeation step of forming a permeation body by impregnating the preform with an aluminum alloy melt consisting of Si: 2.5 to 13% by mass, Mg: 1 to 8% by mass, and the balance being Al and inevitable impurity elements in the atmosphere. When,
A cooling step of cooling the permeation body to solidify the molten aluminum alloy;
Have
The said forming powder and aluminum molten metal are both the manufacturing method of an aluminum alloy-ceramics composite material which contains Fe, Ti, Ni, or V in total 0.36-0.90 mass%.
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| CN108588519A (en) * | 2018-05-14 | 2018-09-28 | 张家口新叶电缆有限公司 | A kind of composite strengthening conducting alloy material and preparation method thereof |
| CN113718142A (en) * | 2021-09-13 | 2021-11-30 | 河南科技大学 | Double-scale hybrid particle reinforced aluminum matrix composite material for automobile and preparation method thereof |
| CN117943528A (en) * | 2024-01-17 | 2024-04-30 | 北方工业大学 | A method for preparing near-net-shape high-volume aluminum-based composite materials by pressureless infiltration |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108588519A (en) * | 2018-05-14 | 2018-09-28 | 张家口新叶电缆有限公司 | A kind of composite strengthening conducting alloy material and preparation method thereof |
| CN113718142A (en) * | 2021-09-13 | 2021-11-30 | 河南科技大学 | Double-scale hybrid particle reinforced aluminum matrix composite material for automobile and preparation method thereof |
| CN117943528A (en) * | 2024-01-17 | 2024-04-30 | 北方工业大学 | A method for preparing near-net-shape high-volume aluminum-based composite materials by pressureless infiltration |
| WO2025152521A1 (en) * | 2024-01-17 | 2025-07-24 | 北方工业大学 | Near-net-shape fabrication method for high-volume-fraction aluminum matrix composite |
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