JP2017003565A - Carbon nanotube standard blackbody furnace equipment - Google Patents
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Abstract
【課題】空洞の底部へのカーボンナノチューブの表面処理基板の設置を容易にしたカーボンナノチューブ標準黒体炉装置を提供する。
【解決手段】所定温度に温度制御される炉内に設けられた空洞と、該空洞の底部に配置されたカーボンナノチューブの表面処理をした基板を備えたカーボンナノチューブ標準黒体炉装置であって、前記空洞は空洞筒部と空洞底部が着脱自在に構成され、前記基板の配置を空洞底部側から行えるようにしたことを特徴とする。
【選択図】図１A carbon nanotube standard blackbody furnace apparatus that facilitates the installation of a carbon nanotube surface treatment substrate at the bottom of a cavity.
A carbon nanotube standard blackbody furnace apparatus comprising a cavity provided in a furnace whose temperature is controlled to a predetermined temperature, and a substrate subjected to a surface treatment of carbon nanotubes disposed at the bottom of the cavity, The cavity is configured such that a cavity cylinder part and a cavity bottom part are detachable, and the substrate can be arranged from the cavity bottom side.
[Selection] Figure 1
Description
本発明は、非接触式温度計を校正するための比較炉として用いる高放射率で波長依存性のないカーボンナノチューブ標準黒体放射源装置に関し、特に、カーボンナノチューブ基板の空洞底部への取付け構造に関する。 The present invention relates to a high emissivity and wavelength-independent carbon nanotube standard black body radiation source device used as a comparative furnace for calibrating a non-contact thermometer, and more particularly, to a structure for mounting a carbon nanotube substrate to the bottom of a cavity. .
サーモグラフィをはじめとした産業界でニーズの高い波長１０μｍ付近の赤外放射温度計は１００℃から１０００℃程度の広い温度範囲において高精度な校正が求められている。一方でこの温度範囲において国家標準である放射温度計の波長は１.６μｍや０.９μｍであるため、これらの国家標準放射温度計で波長の異なる１０μｍ帯の赤外放射温度計を高精度校正するための比較校正技術が必要となる。このように波長の異なる非接触式温度計を校正するための比較炉としては、炉内の空洞の実効放射率が限りなく１であることが必要不可欠である。空洞の放射率を限りなく１に近づけるには、空洞が均熱であること、空洞の固有放射率が高いことが必要となる。
一方で、垂直配向した高品質なカーボンナノチューブ（以下、カーボンナノチューブを「ＣＮＴ」と略記することがある）の成膜技術が比較的容易に実施できるようになり、このＣＮＴは紫外から遠赤外までの広い波長範囲で放射率が０.９８程度と極めて高く、波長依存性がほとんどないことが知られている（非特許文献１参照）。
そこで、本発明者等は、垂直配向のＣＮＴは広い波長範囲で放射率が０.９８程度と極めて高く、波長依存性がほとんどないが、ＣＮＴをそのまま黒体として使用したのでは波長の異なる非接触温度計を校正する比較炉としては放射率や面内温度分布の点で不十分であることに鑑み、ＣＮＴと空洞（温度可変黒体炉）を組み合わせ、ＣＮＴの黒さを空洞でサポートし、放射率を限りなく１に近づけ、波長の異なる温度計を校正する比較炉を構成し性能評価をおこなった結果、空洞にＣＮＴ基板を配置するだけで異なる波長帯の放射温度計の比較校正が高精度に校正可能であり、空洞長さも従来技術の半分以下でも波長依存性がないことが判明し、既に、特許文献１として、炉内に設置した空洞と、前記炉内の温度を可変に調整して前記空洞の温度分布を均一化する温度制御手段を備えた温度標準用の黒体炉装置であって、前記空洞の底部にカーボンナノチューブの表面処理をした基板を配置したカーボンナノチューブ標準黒体炉装置を出願している。
Infrared radiation thermometers near the wavelength of 10 μm, which are highly needed in the industry, including thermography, are required to be calibrated with high accuracy in a wide temperature range of about 100 ° C. to 1000 ° C. On the other hand, the radiation thermometer, which is the national standard in this temperature range, has a wavelength of 1.6 μm and 0.9 μm. In order to do this, a comparative calibration technique is required. Thus, as a comparative furnace for calibrating non-contact type thermometers having different wavelengths, it is essential that the effective emissivity of the cavity in the furnace is 1 as much as possible. In order to make the cavity emissivity as close to 1 as possible, the cavity must be soaked and the intrinsic emissivity of the cavity must be high.
On the other hand, it becomes possible to carry out a film formation technique of high-quality carbon nanotubes (hereinafter, carbon nanotubes may be abbreviated as “CNT”) that are vertically aligned relatively easily. It is known that the emissivity is as high as about 0.98 in a wide wavelength range up to and has almost no wavelength dependency (see Non-Patent Document 1).
Therefore, the present inventors have found that the vertically aligned CNT has an extremely high emissivity of about 0.98 over a wide wavelength range and has almost no wavelength dependence. However, if the CNT is used as it is as a black body, the wavelength is different. In view of the lack of emissivity and in-plane temperature distribution as a comparative furnace for calibrating contact thermometers, CNTs and cavities (temperature-variable blackbody furnaces) are combined to support the blackness of CNTs with cavities. As a result of performing a performance evaluation by constructing a comparative furnace that calibrates thermometers with different wavelengths by bringing the emissivity as close to 1 as possible, comparative calibration of radiation thermometers with different wavelength bands is possible simply by placing a CNT substrate in the cavity. It is possible to calibrate with high accuracy, and it has been found that the cavity length is less than half that of the prior art and has no wavelength dependency. As Patent Document 1, the cavity installed in the furnace and the temperature in the furnace can be varied. Adjust the temperature of the cavity Filed a carbon black standard black body furnace device with a temperature standard black body furnace device having a temperature control means for uniforming the temperature distribution, wherein a substrate having a carbon nanotube surface treatment disposed at the bottom of the cavity. ing.
図５は、本発明者等が先に出願した特許文献１のカーボンナノチューブ標準黒体炉装置を説明するための図であり、図５の右上図は、特許文献１の発明のＣＮＴの表面処理をしたグラファイト基板および比較例としてのグラファイト基板のみを空洞底部に配置した状態を説明しており、左上図は、ＣＮＴの表面処理をしたグラファイト基板（左）とＣＮＴ無しのグラファイト基板のみ（右）とを示している。空洞底部（Ｌ＝４００ｍｍの一番奥）にグラファイト基板のみを置いて輝度温度を異なる波長の放射温度計（１.６μｍと５μｍと１０μｍ）で比較し、またグラファイト基板の代わりに、ＣＮＴの表面処理をしたグラファイト基板を置いて輝度温度を異なる波長の放射温度計（１.６μｍと５μｍと１０μｍ）で比較したグラフは、横軸が放射温度計の波長を示し、縦軸が輝度温度（の温度差）を示す。グラファイト基板を底部に置いた結果が▲で、ＣＮＴの表面処理をしたグラファイト基板を底部に置いた結果が●であり、波長１.６μｍ、５μｍ、１０μｍの放射温度計では、いずれもグラファイト基板のときよりもＣＮＴの表面処理をしたグラファイト基板を置いたときの方が、輝度温度がそれぞれ約０.１℃、０.４℃、０.８℃上昇している。このことから本発明のＣＮＴの表面処理をしたグラファイト基板を入れた●の方が、輝度温度が大幅に上昇することがわかる。すなわち、ＣＮＴの表面処理をしたグラファイト基板を空洞底部に配置するだけで空洞の放射率が格段に上がったことが確認できる。 FIG. 5 is a diagram for explaining the carbon nanotube standard blackbody furnace apparatus of Patent Document 1 previously filed by the present inventors, and the upper right diagram of FIG. 5 shows the surface treatment of the CNT of the invention of Patent Document 1 Explains the state in which only the graphite substrate with the graphite and the graphite substrate as a comparative example are arranged at the bottom of the cavity. The upper left figure shows only the graphite substrate with the CNT surface treatment (left) and the graphite substrate without the CNT (right). It shows. Only the graphite substrate is placed at the bottom of the cavity (L = 400mm deep), and the brightness temperature is compared with radiation thermometers with different wavelengths (1.6μm, 5μm, and 10μm). The graph in which the processed graphite substrate is placed and the brightness temperature is compared with radiation thermometers of different wavelengths (1.6 μm, 5 μm, and 10 μm), the horizontal axis indicates the wavelength of the radiation thermometer, and the vertical axis indicates the brightness temperature (of Temperature difference). The result of placing the graphite substrate on the bottom is ▲, and the result of placing the graphite substrate with the CNT surface treatment on the bottom is ●, and in radiation thermometers with wavelengths of 1.6 μm, 5 μm, and 10 μm, The brightness temperature rises by about 0.1 ° C., 0.4 ° C., and 0.8 ° C., respectively, when the graphite substrate subjected to the CNT surface treatment is placed. From this, it can be seen that the luminance temperature is significantly increased in the case where the graphite substrate subjected to the surface treatment of the CNT of the present invention is inserted. In other words, it can be confirmed that the emissivity of the cavity is remarkably increased only by arranging the graphite substrate subjected to the CNT surface treatment at the bottom of the cavity.
本発明者等が先に出願した特許文献１のカーボンナノチューブ標準黒体炉装置によりＣＮＴ表面処理基板を空洞底部に配置するだけで驚くべき放射率性能の向上が達成されたが、しかしながら、特許文献１の装置では、空洞の開口は前方にしかないため、奥行きの深い空洞前方開口から空洞底部に基板を出し入れせざるを得ず、ＣＮＴの表面処理をした基板の表面は非常に脆いため基板の出し入れを基板の表面を損なうことなく行うことが非常に困難であった。
また、カーボンナノチューブは炭素からなるため、高温では燃焼する性質があり、使用温度範囲が３００℃〜１０００℃程度では、基板に表面処理をしたＣＮＴが燃焼するため、放射率性能が次第に劣化するという問題があった。
さらに、基板に表面処理をしたＣＮＴの燃焼による放射率の劣化は、輝度温度の低下をまねき、正しい温度値を知ることができなくなり、標準用の黒体炉としては致命的となるものであり、放射率の劣化を簡便に知る手段が必要であった。
A surprising improvement in emissivity performance was achieved simply by placing the CNT surface-treated substrate at the bottom of the cavity by the carbon nanotube standard blackbody furnace apparatus of Patent Document 1 previously filed by the present inventors. In the apparatus 1, since the cavity opening is only at the front, the substrate must be taken in and out from the deep cavity front opening to the bottom of the cavity, and the surface of the substrate subjected to the CNT surface treatment is very fragile, so that the substrate is taken in and out. It was very difficult to carry out without damaging the surface of the substrate.
In addition, since carbon nanotubes are made of carbon, they have the property of burning at high temperatures, and when the operating temperature range is about 300 ° C. to 1000 ° C., CNTs that have been surface-treated on the substrate burn, so that the emissivity performance gradually deteriorates. There was a problem.
Furthermore, the deterioration of emissivity due to the combustion of CNTs that have been surface-treated on the substrate leads to a decrease in luminance temperature, making it impossible to know the correct temperature value, which is fatal for a standard blackbody furnace. Therefore, a means for easily knowing the deterioration of the emissivity was necessary.
上記従来技術の問題点を解決するために、本発明では、空洞底部を空洞筒部に着脱自在に構成して、空洞底部側から簡単にＣＮＴ表面処理基板を設置できるようにし、また、ＣＮＴの高温での燃焼をできるだけ防ぐために、空洞全体をガス雰囲気中で使用できるように構成し、さらに、放射率の劣化を知るために簡便な空洞放射率評価装置を設置した点に特徴を有するものである。
すなわち、本発明は、標準黒体炉装置用の空洞であって、該空洞の底部にはカーボンナノチューブ表面処理基板が配置され、前記空洞は空洞筒部と空洞底部が着脱自在に構成され、前記基板の配置を空洞底部側から行えるようにしたことを特徴とする。
また、本発明は、標準黒体炉装置用の所定温度に温度制御された標準黒体炉であって、空洞を内部に載置するためのパージユニット１と、パージユニット１内に炉後方から希ガスを供給する希ガス供給装置を設けてパージユニット１内を希ガス雰囲気にするとともに、標準黒体炉前方開口部に設けたパージユニット２と、パージユニット２に希ガスを供給する希ガス供給装置を設け、パージユニット２の開口部内周に設けた筒状部材から開口に向けて希ガスを噴出してパージユニット２の開口からの大気の侵入を防止し、前記パージユニット１およびパージユニット２内の希ガス雰囲気を維持することを特徴とする。
また、本発明は、上記標準黒体炉装置用の標準黒体炉において、前記パージユニット１と前記パージユニット２は物理的に離して設け、両者を熱的に遮断したことを特徴とする。
また、本発明は、上記標準黒体炉装置用の空洞を、上記標準黒体炉装置用の標準黒体炉のパージユニット２内に載置したことを特徴とするカーボンナノチューブ標準黒体炉装置である。
また、本発明は、カーボンナノチューブ標準黒体炉装置において、上記光源と積分球とからなる放射率評価装置を取り外し可能に設置したことを特徴とする。
また、本発明は、空洞筒部後方に空洞底部を兼用する穴あきカーボンナノチューブ表面処理基板が着脱自在に装着された標準黒体炉装置用の空洞と、
標準黒体炉装置用の所定温度に温度制御された標準黒体炉であって、
前記空洞を内部に設置するためのパージユニット（１）と、パージユニット（１）内に炉後方から希ガスを供給する希ガス供給装置を設けた標準黒体炉とからなり、
前記標準黒体炉のパージユニット（１）内に前記空洞を設置することにより、前記パージユニット（１）内に炉後方から供給された希ガスが前記穴あきカーボンナノチューブ表面処理基板の穴を通って空洞底部側から希ガス雰囲気にするよう構成されたことを特徴とするカーボンナノチューブ標準黒体炉装置である。
また、本発明は、上記カーボンナノチューブ標準黒体炉装置において、前記穴あきカーボンナノチューブ表面処理基板の穴は、基板の中心付近を避けた周辺部に設けられている貫通穴であることを特徴とする。
また、本発明は、上記カーボンナノチューブ標準黒体炉装置において、前記穴あきカーボンナノチューブ表面処理基板の穴は、基板に対して斜めに設けられている貫通穴であることを特徴とする。
また、本発明は、上記カーボンナノチューブ標準黒体炉装置において、前記穴あきカーボンナノチューブ表面処理基板の穴は、基板自体をポーラス材で構成することによるものであること特徴とする。
In order to solve the above problems of the prior art, in the present invention, the cavity bottom is configured to be detachable from the cavity cylinder so that the CNT surface treatment substrate can be easily installed from the cavity bottom side. In order to prevent combustion at high temperatures as much as possible, the entire cavity is configured to be used in a gas atmosphere, and in addition, a simple cavity emissivity evaluation device is installed to know the deterioration of emissivity. is there.
That is, the present invention is a cavity for a standard blackbody furnace apparatus, a carbon nanotube surface treatment substrate is disposed at the bottom of the cavity, and the cavity is configured such that a cavity cylinder and a cavity bottom are detachable, The substrate can be arranged from the bottom side of the cavity.
Further, the present invention is a standard blackbody furnace whose temperature is controlled to a predetermined temperature for a standard blackbody furnace apparatus, a purge unit 1 for placing a cavity inside, and a purge unit 1 from the rear of the furnace. A rare gas supply device for supplying a rare gas is provided so that the purge unit 1 has a rare gas atmosphere. The purge unit 2 is provided at the front opening of the standard black body furnace, and the rare gas is supplied to the purge unit 2. A supply device is provided, and a rare gas is ejected from the cylindrical member provided in the inner periphery of the opening of the purge unit 2 toward the opening to prevent the intrusion of air from the opening of the purge unit 2. The rare gas atmosphere in 2 is maintained.
Further, the present invention is characterized in that, in the standard black body furnace for the standard black body furnace apparatus, the purge unit 1 and the purge unit 2 are physically separated from each other and both are thermally shut off.
Further, the present invention provides a carbon nanotube standard black body furnace apparatus characterized in that the cavity for the standard black body furnace apparatus is placed in the purge unit 2 of the standard black body furnace for the standard black body furnace apparatus. It is.
In the carbon nanotube standard blackbody furnace apparatus, the present invention is characterized in that the emissivity evaluation apparatus comprising the light source and integrating sphere is detachably installed.
The present invention also provides a cavity for a standard blackbody furnace apparatus in which a perforated carbon nanotube surface treatment substrate that also serves as a cavity bottom part is detachably attached to the rear of the cavity cylinder part,
A standard blackbody furnace whose temperature is controlled to a predetermined temperature for a standard blackbody furnace apparatus,
A purge unit (1) for installing the cavity inside, and a standard blackbody furnace provided with a rare gas supply device for supplying a rare gas from the rear of the furnace into the purge unit (1),
By installing the cavity in the purge unit (1) of the standard blackbody furnace, the rare gas supplied from the rear of the furnace into the purge unit (1) passes through the hole of the perforated carbon nanotube surface treatment substrate. The carbon nanotube standard blackbody furnace apparatus is characterized in that a rare gas atmosphere is formed from the bottom side of the cavity.
Further, the present invention is characterized in that, in the carbon nanotube standard blackbody furnace apparatus, the hole of the perforated carbon nanotube surface-treated substrate is a through hole provided in a peripheral portion avoiding the vicinity of the center of the substrate. To do.
In the carbon nanotube standard blackbody furnace apparatus, the present invention is characterized in that the hole of the perforated carbon nanotube surface-treated substrate is a through hole provided obliquely with respect to the substrate.
Further, the present invention is characterized in that, in the carbon nanotube standard blackbody furnace apparatus, the hole of the perforated carbon nanotube surface-treated substrate is formed by forming the substrate itself with a porous material.
本発明の標準黒体炉装置用の空洞では、空洞底部を空洞筒部に着脱自在に構成して、空洞底部側から簡単にＣＮＴ表面処理基板を設置できるようにしたので、基板の設置および交換の操作性が向上する。
また、本発明の標準黒体炉装置用の標準黒体炉では、空洞を配置するための均熱管（パージユニット１）内に炉後方から希ガスを供給することにより、空洞内を希ガス雰囲気に保つことができ、空洞の炭素材料の燃焼を防ぐことができる。特に、空洞の底部にＣＮＴ処理基板を配置した空洞を配置する場合には、ＣＮＴ処理基板のＣＮＴの燃焼を防ぐことができ、放射率の低下を防止できる。さらに、パージユニット２を炉前方開口に設け、パージユニット２の開口部周囲に設けた焼結金属からなる筒状部材からガスを噴出して大気が空洞内に侵入するのを防止するので希ガス雰囲気を損なうことがなくＣＮＴの燃焼をより効果的に防ぐことができる。なお、本発明の標準黒体炉装置用の標準黒体炉のパージユニット１には希ガスが供給されるため、パージユニット１内に載置する空洞は希ガス雰囲気におかれ、空洞に含まれる炭素材料の燃焼が防止できる。
さらに、パージユニット１と２とを物理的に離して設けたので、両者間が熱的に断熱され、空洞を高温で使用しても炉前面に露出するパージユニット２が高温にならずパージユニット２の冷却装置が不要となる。
また、上記本発明の標準黒体炉装置用の空洞を、上記本発明の標準黒体炉装置用の標準黒体炉のパージユニット１内に載置したカーボンナノチューブ標準黒体炉装置では、空洞の底部にカーボンナノチューブの表面処理をした基板が配置されているので放射率が格段に向上し、パージユニット１および２により空洞内を希ガス雰囲気中とすることができるので、高温によるカーボンナノチューブの燃焼を防ぐことができ標準黒体炉装置としての性能の劣化を防ぐことができる。
また、本発明のカーボンナノチューブ標準黒体炉装置では、光源と積分球とからなる放射率評価装置を取り外し自在に設置したので、必要なときのみ、炉の前面に評価装置を取り付けて空洞放射率の低下を測定評価することができる。
さらに、空洞筒部後端に穴あきＣＮＴ表面処理基板を着脱自在に装着して空洞底部の機能を兼用させれば、前記穴を通って空洞の底部側から空洞内を希ガス雰囲気に保つようになるので希ガス供給量を大幅に低減できる。穴あきＣＮＴ表面処理基板の穴としては、基板に設けた貫通穴あるいは基板自体をポーラス材で構成することで達成できる。貫通穴の場合には基板に対して斜めに設けて黒体炉の正面からみて素通しとならないようにすることが好ましく、また貫通穴は基板中央部をさけて周辺部に設けることが好ましい。
In the cavity for the standard blackbody furnace apparatus of the present invention, the bottom of the cavity is configured to be detachable from the hollow cylinder so that the CNT surface treatment substrate can be easily installed from the bottom of the cavity. Improved operability.
In the standard blackbody furnace for the standard blackbody furnace apparatus of the present invention, a rare gas atmosphere is provided in the cavity by supplying a rare gas from the rear of the furnace into a soaking tube (purge unit 1) for arranging the cavity. It is possible to keep the hollow carbon material from burning. In particular, when a cavity having a CNT-treated substrate is disposed at the bottom of the cavity, CNT combustion of the CNT-treated substrate can be prevented, and a decrease in emissivity can be prevented. Further, since the purge unit 2 is provided at the furnace front opening and the gas is ejected from the cylindrical member made of sintered metal provided around the opening of the purge unit 2 to prevent the atmosphere from entering the cavity, the rare gas Combustion of CNTs can be more effectively prevented without impairing the atmosphere. In addition, since the rare gas is supplied to the purge unit 1 of the standard black body furnace for the standard black body furnace apparatus of the present invention, the cavity placed in the purge unit 1 is placed in a rare gas atmosphere and included in the cavity. Can prevent burning of carbon material.
Further, since the purge units 1 and 2 are physically separated from each other, the two are thermally insulated from each other, and even if the cavity is used at a high temperature, the purge unit 2 exposed to the front surface of the furnace does not become a high temperature. The second cooling device is not necessary.
In the carbon nanotube standard black body furnace apparatus in which the cavity for the standard black body furnace apparatus of the present invention is placed in the purge unit 1 of the standard black body furnace for the standard black body furnace apparatus of the present invention, Since the carbon nanotube surface-treated substrate is disposed at the bottom of the substrate, the emissivity is remarkably improved, and the purge units 1 and 2 can make the cavity into a rare gas atmosphere. Combustion can be prevented and performance deterioration as a standard black body furnace apparatus can be prevented.
Further, in the carbon nanotube standard blackbody furnace apparatus of the present invention, the emissivity evaluation apparatus comprising the light source and the integrating sphere is detachably installed. Therefore, the evaluation apparatus is attached to the front of the furnace only when necessary, and the cavity emissivity is set. Can be measured and evaluated.
Furthermore, if a CNT surface treatment substrate with a hole is detachably attached to the rear end of the hollow cylinder portion and also serves as a hollow bottom portion, the inside of the cavity is maintained in a rare gas atmosphere from the bottom side of the hollow through the hole. Therefore, the amount of rare gas supply can be greatly reduced. The hole in the perforated CNT surface-treated substrate can be achieved by forming a through hole provided in the substrate or the substrate itself with a porous material. In the case of a through hole, it is preferable that the through hole is provided obliquely with respect to the substrate so that it does not pass through when viewed from the front of the black body furnace.
空洞前方開口からＣＮＴ表面処理基板を空洞底部に設置する際の困難性を解消するために、本発明の標準黒体炉装置用の空洞では、空洞筒部と空洞底部を着脱自在に構成することにより、ＣＮＴ表面処理基板の設置およびＣＮＴ表面処理基板の交換を、空洞底部を空洞筒部から取り外して空洞底部側から容易に行えるようにした。
また、高温でのＣＮＴの燃焼を防止するために、本発明の標準黒体炉装置用の標準黒体炉では、空洞を収納する均熱管（図２、あるいは図３パージユニット１参照）後部の細い管に接続されたガスラインから、均熱管内部に希ガスを導入することにより空洞内を希ガス雰囲気とし、ＣＮＴ表面処理基板を配置した空洞をガス雰囲気中で使用できるようにした。なお、ＣＮＴ表面処理基板を設置した空洞以外にも、空洞に炭素材料を含むものであれば、本発明の標準黒体炉装置用の標準黒体炉により、高温による空洞の炭素材料の燃焼を防止することができ放射率の劣化を防止できる。
上記本発明の標準黒体炉装置用の空洞と上記本発明の標準黒体炉装置用の標準黒体炉を組み合わせて構成した本発明のカーボンナノチューブ標準黒体炉装置では、放射率の向上を実現でき、かつ向上した放射率性能の劣化を防止することができる。
さらに、ＣＮＴ表面処理基板のＣＮＴの劣化を評価するために従来は使用するたびに放射温度計で輝度温度をモニターしていたが、黒体炉のみをもつユーザーは、必ずしも放射温度計を持っていなく、また、放射温度計をあわせて持つことも困難であるため、本発明のカーボンナノチューブ標準黒体炉装置では、簡便に、炉の前面に、ＬＥＤ光源と可視用の安価な積分球とからなる放射率評価装置を取り外し自在に設置しておき、必要なときのみ、炉の前面に装置を取り付けて空洞放射率の低下を測定評価する。
さらに、穴あきＣＮＴ表面処理基板を用いて空洞底部を兼用させれば、パージユニット１内に炉後方から供給された希ガスは、穴あきＣＮＴ表面処理基板の穴を通って空洞内に入り空洞内を空洞底部側から希ガス雰囲気に保つので希ガス供給量の低減が図れる。穴は貫通孔あるいは基板自体をポーラスな材料で構成することによって達成できるが、貫通穴の場合には基板に対して斜めに設けて黒体炉の正面からみて素通しとならないようにすることが望ましく、また貫通穴は中心部付近を避けて設けることが望ましい。
In order to eliminate the difficulty in installing the CNT surface treatment substrate at the bottom of the cavity from the front opening of the cavity, the cavity for the standard blackbody furnace apparatus of the present invention should be configured to be detachable. Thus, the installation of the CNT surface treatment substrate and the replacement of the CNT surface treatment substrate can be easily performed from the cavity bottom side by removing the cavity bottom from the hollow cylinder.
In order to prevent CNT combustion at a high temperature, in the standard blackbody furnace for the standard blackbody furnace apparatus of the present invention, the rear of the soaking tube (see FIG. 2 or FIG. 3 purge unit 1) containing the cavity is provided. By introducing a rare gas into the soaking tube from a gas line connected to a thin tube, the inside of the cavity was made a rare gas atmosphere, and the cavity in which the CNT surface-treated substrate was arranged could be used in the gas atmosphere. In addition to the cavity where the CNT surface treatment substrate is installed, if the cavity contains a carbon material, the standard blackbody furnace for the standard blackbody furnace apparatus of the present invention can burn the cavity carbon material at a high temperature. It is possible to prevent deterioration of emissivity.
The carbon nanotube standard blackbody furnace apparatus of the present invention, which is configured by combining the cavity for the standard blackbody furnace apparatus of the present invention and the standard blackbody furnace for the standard blackbody furnace apparatus of the present invention, has improved emissivity. It can be realized and deterioration of improved emissivity performance can be prevented.
Furthermore, in order to evaluate the deterioration of the CNT on the CNT surface-treated substrate, the brightness temperature was monitored with a radiation thermometer every time it was used. However, users with only a blackbody furnace do not necessarily have a radiation thermometer. In addition, since it is difficult to have a radiation thermometer together, the carbon nanotube standard blackbody furnace apparatus of the present invention can be simply provided with an LED light source and a visible inexpensive integrating sphere on the front of the furnace. The emissivity evaluation apparatus is installed so as to be removable, and only when necessary, the apparatus is attached to the front of the furnace to measure and evaluate the decrease in the cavity emissivity.
Further, if the cavity bottom is also used by using the perforated CNT surface treatment substrate, the rare gas supplied from the rear of the furnace into the purge unit 1 enters the cavity through the hole of the perforated CNT surface treatment substrate and enters the cavity. Since the inside is maintained in a rare gas atmosphere from the bottom side of the cavity, the amount of rare gas supply can be reduced. The hole can be achieved by constructing the through hole or the substrate itself with a porous material. However, in the case of the through hole, it is desirable that the hole is provided obliquely with respect to the substrate so that it does not pass through the front of the black body furnace. In addition, it is desirable to provide the through hole so as to avoid the vicinity of the center.
（実施例１）
図１に、本発明の標準黒体炉装置用の空洞およびＣＮＴ表面処理基板を示した。本発明の空洞は、空洞筒部後端と空洞底部（固定治具）が着脱自在に構成されており、図１の例では、空洞筒部後端のねじ部と空洞底部（固定治具）のねじ部とで着脱自在に構成され、空洞後端内面の止め具と空洞底部の間にＣＮＴ表面処理基板を挟持して固定する。このように構成することにより、空洞の底部位置へのＣＮＴ表面処理基板の設置は、空洞底部を空洞筒部後端から取り外して空洞の底部側から行えるので、従来の空洞前方開口から基板を取り付け取り外しする場合に比較して格段に操作性が向上し、取り付け時のＣＮＴ表面処理面損傷等が防止できる。なお、空洞筒部、空洞底部、基板の材質は、熱膨張率が同じものである方が好ましく、例えば、いずれもグラファイト材で構成することにより熱膨張係数を一致できる。ただし、ＣＮＴ基板材料はグラファイトに限る必要はなく、高融点材料であればよい。またＣＮＴ成膜方法はアーク法やレーザーアブレーション法などの蒸着法、炭化水素等を分解してＣＮＴを製作する化学気相合成法などがあるが、ほかに耐熱温度の低い基板を用いたい場合には、ＣＮＴを他の無機耐熱基板に一旦成長させてからＣＮＴを転写させる方法もある。
図１では、空洞筒部後端と空洞底部がねじで着脱自在に構成した例を示しているが、この例に限定されるものではなく、バヨネットや、クランプ、ボルトなどでも良い。また、図１では止め具と空洞底部とで狭着してＣＮＴ表面処理基板を固定した例を示したが、これに限定されるものではなく、止め具にＣＮＴ表面処理基板を直接ボルト固定するものでも良く、あるいは空洞底部にＣＮＴ表面処理基板を直接固定するものでもよい。要は、空洞底部を空洞後端に着脱自在に構成し、ＣＮＴ表面処理基板の設置あるいは交換を空洞底部側から行えるようにしたものであればよい。
Example 1
FIG. 1 shows a cavity and a CNT surface treatment substrate for the standard blackbody furnace apparatus of the present invention. The cavity of the present invention is configured so that the rear end of the hollow cylinder part and the bottom of the cavity (fixing jig) are detachable. In the example of FIG. 1, the threaded part and the bottom of the hollow cylinder part (fixing jig) are provided. The CNT surface treatment substrate is sandwiched and fixed between a stopper on the inner surface of the rear end of the cavity and the bottom of the cavity. With this configuration, the CNT surface-treated substrate can be installed at the bottom of the cavity by removing the cavity bottom from the rear end of the cavity cylinder and starting from the bottom of the cavity. Compared with the case of detaching, the operability is remarkably improved, and damage to the CNT surface treatment surface during attachment can be prevented. In addition, it is preferable that the materials of the hollow cylinder part, the hollow bottom part, and the substrate have the same thermal expansion coefficient. However, the CNT substrate material need not be limited to graphite, and may be a high melting point material. In addition, CNT film formation methods include vapor deposition methods such as arc method and laser ablation method, and chemical vapor phase synthesis method of producing CNTs by decomposing hydrocarbons, etc. In addition, when you want to use a substrate with low heat resistance temperature There is also a method in which CNTs are once grown on another inorganic heat-resistant substrate and then transferred.
Although FIG. 1 shows an example in which the hollow cylindrical portion rear end and the hollow bottom portion are configured to be detachable with screws, the present invention is not limited to this example, and a bayonet, a clamp, a bolt, or the like may be used. In addition, FIG. 1 shows an example in which the CNT surface treatment substrate is fixed by being tightly attached to the stopper and the bottom of the cavity, but the present invention is not limited to this, and the CNT surface treatment substrate is directly bolted to the stopper. It may be a thing, or may fix a CNT surface treatment board | substrate directly to a cavity bottom part. The point is that the bottom of the cavity is configured to be detachable at the rear end of the cavity and the CNT surface treatment substrate can be installed or replaced from the bottom of the cavity.
図２は、本発明の標準黒体炉装置用の標準黒体炉に用いる均熱管を示し、均熱管の中に図１に示した空洞を入れ（後述する図３参照）、均熱管後部の細い管からなる希ガス導入口から希ガス（アルゴン、窒素等）が均熱管に導入され、空洞内は希ガス雰囲気となる。このように構成することにより、空洞内が希ガス雰囲気に保たれ、高温でのＣＮＴ表面処理基板のＣＮＴの燃焼が抑えられる。
図３は、均熱管を兼ねるパージユニット１を含む本発明の標準黒体炉装置用の標準黒体炉に、カーボンナノチューブ空洞を載置した、本発明のカーボンナノチューブ標準黒体炉装置の全体概略図であり、図３中のカーボンナノチューブ空洞には図１に示した空洞筒部後端と空洞底部が着脱自在に構成され空洞底部側からＣＮＴ表面処理基板が空洞の底部に取り付けられた空洞が用いられる。黒体炉の外壁は側部外壁と前方外壁および後方外壁で構成され、側部外壁内の前方の断熱材と後方の断熱材でムライト管を炉の略中央部に支持し、前方の断熱材と後方の断熱材との中間部分には、ムライト管と空間が空くように断熱材が配置されており、中管部分の断熱材にはヒーターが設けられており、図示しない制御装置によりムライト管内を所定温度に保つように加熱制御される。図ではムライト管としたが、この材質はムライト系セラミックスに限定されるものではなく、高温に強く、熱膨張率が小さい高温材料であればよい。ムライト管内に均熱管を兼ねるパージユニット１を配置し、パージユニット１の後部には細い管が設けられ、当該細い管から希ガスが導入され、パージユニット１内に設けられたカーボンナノチューブ空洞内をガス雰囲気にすることができ、ＣＮＴの燃焼を防ぐことができる。ムライト管後方内部には断熱材が配されており、この断熱材と後方外壁でパージユニット１の後部の細い管が支持されている。ムライト管前方開口にはパージユニット２が設けられており、パージユニット２の前方開口部周囲には焼結金属からなる筒状部材が配置されている。焼結金属の筒状部材は内部に非常に細かい穴が多数あいており、筒状部材にガスを供給することで筒状部材内周面の細かい穴から炉の前方開口部に向けてガスを大量に流すとともに、パージユニット１にもガスを供給することで圧力を上げて、外部からの空気が空洞内に侵入しないように構成されている。また、パージユニット１とパージユニット２とは物理的に離されて取り付けられており、両者は熱的に遮断されていることから、パージユニット１が１０００℃付近の高温で使用されても、パージユニット２の冷却は要さず、従来の炉前方開口部の冷却装置を省くことができる。
FIG. 2 shows a soaking tube used in a standard black body furnace for the standard black body furnace apparatus of the present invention. The cavity shown in FIG. 1 is placed in the soaking tube (see FIG. 3 described later), and the rear of the soaking tube is arranged. A rare gas (argon, nitrogen, etc.) is introduced into the soaking tube from a rare gas inlet made of a thin tube, and the inside of the cavity becomes a rare gas atmosphere. With such a configuration, the inside of the cavity is maintained in a rare gas atmosphere, and combustion of the CNTs on the CNT surface-treated substrate at a high temperature is suppressed.
FIG. 3 shows an overall schematic of the carbon nanotube standard black body furnace apparatus of the present invention in which a carbon nanotube cavity is placed in a standard black body furnace for the standard black body furnace apparatus of the present invention including the purge unit 1 also serving as a soaking tube. 3, the carbon nanotube cavity in FIG. 3 has a cavity tube rear end and a cavity bottom shown in FIG. 1 that are detachable, and a CNT surface treatment substrate is attached to the cavity bottom from the cavity bottom side. Used. The outer wall of the blackbody furnace is composed of a side outer wall, a front outer wall, and a rear outer wall. The front heat insulating material and the rear heat insulating material in the side outer wall support the mullite tube at the substantially central portion of the furnace, and the front heat insulating material. A heat insulating material is disposed in the middle portion between the heat insulating material and the rear heat insulating material so that a space is provided between the mullite tube and a heater is provided in the heat insulating material of the middle tube portion. Is controlled to be kept at a predetermined temperature. Although the mullite tube is shown in the figure, this material is not limited to mullite ceramics, and any material that is resistant to high temperatures and has a low coefficient of thermal expansion may be used. A purge unit 1 that also serves as a soaking tube is disposed in the mullite tube, and a thin tube is provided at the rear of the purge unit 1, and a rare gas is introduced from the thin tube, and inside the carbon nanotube cavity provided in the purge unit 1. A gas atmosphere can be obtained, and combustion of CNTs can be prevented. A heat insulating material is disposed in the rear of the mullite tube, and a thin tube at the rear of the purge unit 1 is supported by the heat insulating material and the rear outer wall. A purge unit 2 is provided at the front opening of the mullite tube, and a cylindrical member made of sintered metal is disposed around the front opening of the purge unit 2. The cylindrical member of sintered metal has a lot of very fine holes inside, and by supplying gas to the cylindrical member, gas is supplied from the fine hole on the inner peripheral surface of the cylindrical member toward the front opening of the furnace. While flowing in large quantities, the pressure is raised by supplying gas to the purge unit 1 so that air from the outside does not enter the cavity. In addition, since the purge unit 1 and the purge unit 2 are physically separated from each other and both are thermally shut off, even if the purge unit 1 is used at a high temperature around 1000 ° C., the purge unit 1 is purged. Cooling of the unit 2 is not necessary, and the conventional cooling device for the front opening of the furnace can be omitted.
図４は、空洞放射率評価装置を設けた本発明のカーボンナノチューブ標準黒体炉装置を説明するための概略図である。カーボンナノチューブは名前の通り、カーボンから生成されるため、希ガス雰囲気を維持し極力燃焼を抑制しているものの完全に抑制することはできず、炉の中で徐々に燃焼し、放射率が低下していく。放射率の低下は、輝度温度の低下をまねき、正しい温度値を知ることができない。そこで、使用するたびに放射温度計で輝度温度をモニターし、カーボンナノチューブの劣化を評価する必要があるが、黒体炉のみをもつユーザーは、必ずしも放射温度計を持っていなく、また、放射温度計をあわせて持つことも困難である。そこで、本発明のカーボンナノチューブ標準黒体炉装置では、簡便に、炉に、ＬＥＤ光源と可視用の安価な積分球とからなる放射率評価装置を取り外し可能に設置し、必要なときのみ、炉の前面に装置を取り付けて、放射率評価を行えるようにしたものである。図ではＬＥＤ光源としたが、ＬＥＤ以外の光源であってもよく、例えば、赤外の光源と、赤外用の積分球を用いても良い。空洞放射率を測定評価するには、図に示すように、空洞放射率評価装置を黒体炉前方開口に取り付け、ＬＥＤ光源でカーボンナノチューブ空洞の底部に配置したＣＮＴ表面処理基板を照射し、空洞からの反射光を積分球で受けて検出器で検出することで空洞放射率を測定評価し、放射率が所定値以下に低下していれば基板の交換の目安にしようとするものである。 FIG. 4 is a schematic view for explaining a carbon nanotube standard blackbody furnace apparatus of the present invention provided with a cavity emissivity evaluation apparatus. As the name suggests, carbon nanotubes are produced from carbon, so they maintain a rare gas atmosphere and suppress combustion as much as possible. However, they cannot be completely suppressed, but gradually burn in the furnace and the emissivity decreases. I will do it. A decrease in emissivity leads to a decrease in luminance temperature, and the correct temperature value cannot be known. Therefore, it is necessary to monitor the brightness temperature with a radiation thermometer every time it is used, and to evaluate the deterioration of the carbon nanotubes. However, users with only a blackbody furnace do not necessarily have a radiation thermometer. It is also difficult to have a total. Therefore, in the carbon nanotube standard blackbody furnace apparatus of the present invention, an emissivity evaluation apparatus consisting of an LED light source and an inexpensive integrating sphere is detachably installed in the furnace, and only when necessary, the furnace A device is attached to the front of the instrument so that emissivity can be evaluated. In the figure, an LED light source is used, but a light source other than an LED may be used. For example, an infrared light source and an infrared integrating sphere may be used. In order to measure and evaluate the cavity emissivity, as shown in the figure, a cavity emissivity evaluation apparatus is attached to the front opening of the black body furnace, and the LED light source irradiates the CNT surface treatment substrate placed at the bottom of the carbon nanotube cavity. The cavity emissivity is measured and evaluated by receiving reflected light from the integrating sphere with a detector and detecting it with a detector. If the emissivity drops below a predetermined value, it is intended to be used as a guide for replacing the substrate.
（実施例２）
図６〜８は、上記実施例１の変形例である実施例２を示した図である。
上記実施例１では、空洞底部で空洞が閉じられているため、パージユニット１内に炉後方から供給された希ガスは、パージユニット１と空洞の間の空間を炉前方に回り込んで空洞前方開口から空洞内に入り空洞底部に配置されたＣＮＴ表面処理基板まで行き渡り空洞内が希ガス雰囲気に保たれるのであるが、このため希ガスの供給量が多くなり、さらに、パージユニット２への希ガスの供給も必要となるため多量の希ガス供給量が要求される。そこで、希ガス供給量を低減するため、実施例２では、空洞の底部を穴あきＣＮＴ表面処理基板で兼用させ、パージユニット１内に炉後方から供給された希ガスは、パージユニット１内に載置された空洞の穴あきＣＮＴ表面処理基板の穴を通って空洞内に入り空洞内を空洞底部側から希ガス雰囲気に保つ構成にすることにより、希ガス供給量低減を実現させ、さらに、パージユニット２の必要もないためより一層の希ガス消費量の低減が図れる。
実施例２の全体構成図を示した図６が、実施例１の図３と異なる点は、実施例２では空洞底部が空洞筒部後方に着脱自在に取り付けられたカーボンナノチューブの表面処理をした穴あき基板（以下「穴あきＣＮＴ基板」ということがある）で兼用して構成される点、及び、パージユニット２とパージユニット２に希ガスを供給する装置が省かれている点の２つであり、他の構成は実施例１と共通である。空洞筒部後方への穴あきＣＮＴ表面処理基板の着脱は、図６では基板抑えリングを用いた例を示しているが、他のねじやクランプ等の着脱自在な固定手段を用いてもよい。
図７は、穴あきＣＮＴ表面処理基板の穴を説明したものであり、穴は基板に対して斜めにあけた貫通穴で構成され、基板正面からみた際に、貫通穴を素通ししてその先が見えないようにする方が効率がよい。貫通穴を素通ししてその先が見えるようにあけると放射温度計で見たときに放射率が変わってしまうため、正面から見た際に穴があいていないような状態にすることが望ましいからである。また、貫通穴をあける位置はどこでもよいが、ただし、放射温度計は基板の中心付近を見るので、中心付近を避けて貫通穴をあけることが望ましい。図８は、実際に作製した穴あきＣＮＴ表面処理基板を撮影したものであり、中心付近を避けて貫通穴をあけている。
なお、空洞筒部、基板の材質は、熱膨張率が同じものである方が好ましく、例えば、いずれもグラファイト材で構成することにより熱膨張係数を一致させることができるがこれに限定されるものではない。
また、上記では穴あきＣＮＴ表面処理基板の穴を基板に斜めに設けた貫通穴で説明したが、貫通穴に代えて基板自体をポーラス材（多孔質材）で構成することによっても貫通穴と同様な効果が得られる。ポーラス材で基板を構成する場合には、斜めに貫通穴を空けるという高度な加工が不要となる。ポーラス材としては、例えばポーラスなグラファイト材などが挙げられるが、ポーラス材であれば採用することができる。
本実施例２では、以上説明したような構成であるため、空洞が内部に載置されたパージユニット１内に炉後方から供給された希ガスは、すぐに穴あきＣＮＴ表面処理基板（空洞底部の機能を兼ねる）の穴を通って空洞内に入り空洞内を空洞底部側から希ガス雰囲気に保つ構成であるため、実施例１に比べて少ない希ガス供給量ですみ、さらに、パージユニット２も省くことができるので実施例１では必要であったパージユニット２に供給していた希ガス供給量が不要となる。また、空洞筒部の後端に穴あきＣＮＴ表面処理基板を着脱自在に装着して空洞底部を兼用するので部品点数が少なくなるとともに、実施例１と同様に、従来の有底空洞の前側から基板を空洞底部に挿入配置する場合よりも操作性が良くＣＮＴ表面処理基板の損傷も防ぐことができる。
(Example 2)
6 to 8 are diagrams showing a second embodiment which is a modification of the first embodiment.
In the first embodiment, since the cavity is closed at the bottom of the cavity, the rare gas supplied from the rear of the furnace into the purge unit 1 wraps around the space between the purge unit 1 and the cavity in front of the furnace and moves forward of the cavity. The inside of the cavity is maintained in a rare gas atmosphere through the opening to the CNT surface treatment substrate disposed at the bottom of the cavity. However, this increases the supply amount of the rare gas and further supplies the purge unit 2 to the purge unit 2. Since supply of rare gas is also necessary, a large amount of rare gas supply is required. Therefore, in order to reduce the amount of rare gas supplied, in Example 2, the bottom of the cavity is also used as a perforated CNT surface treatment substrate, and the rare gas supplied from the rear of the furnace into the purge unit 1 is contained in the purge unit 1. By providing a structure in which the inside of the cavity is maintained in the rare gas atmosphere from the bottom side of the cavity through the hole in the CNT surface treatment substrate with a hole in the placed cavity, the rare gas supply amount is reduced, and further, Since the purge unit 2 is not necessary, the amount of rare gas consumption can be further reduced.
FIG. 6 showing the overall configuration diagram of Example 2 differs from FIG. 3 of Example 1 in that the surface of the carbon nanotube in which the bottom of the cavity is detachably attached to the rear of the hollow cylinder in Example 2 was treated. There are two points, that is, a configuration in which a perforated substrate (hereinafter sometimes referred to as a “perforated CNT substrate”) is used, and a purge unit 2 and a device for supplying a rare gas to the purge unit 2 are omitted. Other configurations are the same as those in the first embodiment. For the attachment / detachment of the perforated CNT surface-treated substrate to the rear of the hollow cylindrical portion, FIG. 6 shows an example using a substrate holding ring, but other fixing means such as screws and clamps may be used.
FIG. 7 illustrates a hole in a perforated CNT surface-treated substrate. The hole is formed by a through hole that is formed obliquely with respect to the substrate. When viewed from the front of the substrate, the through hole is passed through and the tip of the hole is formed. It is more efficient not to see. If the through hole is passed through so that the tip can be seen, the emissivity will change when viewed with a radiation thermometer, so it is desirable to have no holes when viewed from the front. It is. Further, the position where the through hole is formed may be anywhere, but it is desirable that the through hole be formed avoiding the vicinity of the center because the radiation thermometer looks near the center of the substrate. FIG. 8 is a photograph of an actually produced perforated CNT surface treatment substrate, in which a through hole is formed avoiding the vicinity of the center.
In addition, it is preferable that the material of the hollow cylinder part and the substrate have the same thermal expansion coefficient. For example, the thermal expansion coefficient can be made to coincide with each other by being made of a graphite material, but the material is not limited to this. is not.
In the above description, the hole in the perforated CNT surface treatment substrate is described as a through hole provided obliquely in the substrate. However, the through hole can also be formed by forming the substrate itself with a porous material (porous material) instead of the through hole. Similar effects can be obtained. When the substrate is made of a porous material, it is not necessary to perform advanced processing such as making a through hole obliquely. Examples of the porous material include a porous graphite material, and any porous material can be used.
In the second embodiment, since the configuration is as described above, the rare gas supplied from the rear of the furnace into the purge unit 1 in which the cavity is placed is immediately perforated with the CNT surface treatment substrate (the bottom of the cavity). 2), the inside of the cavity is maintained in a rare gas atmosphere from the bottom side of the cavity, so that a rare gas supply amount is smaller than that in the first embodiment, and the purge unit 2 Therefore, the rare gas supply amount supplied to the purge unit 2 which is necessary in the first embodiment is not necessary. In addition, since the CNT surface treatment substrate with a hole is detachably attached to the rear end of the hollow cylinder portion and also serves as the hollow bottom portion, the number of components is reduced and, similarly to the first embodiment, from the front side of the conventional bottomed cavity. The operability is better than when the substrate is inserted and arranged at the bottom of the cavity, and damage to the CNT surface-treated substrate can be prevented.
本発明の標準黒体炉装置用の空洞は、空洞筒部後端と空洞底部が着脱自在に構成されており、空洞の底部位置へのＣＮＴ表面処理基板の設置は、空洞底部を空洞筒部後端から取り外して空洞の底部側から行えるので操作性が良く、ＣＮＴ表面処理基板の損傷も防ぐことができる。また、本発明の標準黒体炉装置用の標準黒体炉は、空洞を載置するパージユニット１が希ガス雰囲気に維持されるので、炭素材料を含んだ空洞に対して、炭素材料の燃焼が防止でき放射率性能の劣化を防ぐことができる。
さらに、本発明の標準黒体炉装置用の空洞と本発明の標準黒体炉装置用の標準黒体炉とを組み合わせて本発明のカーボンナノチューブ標準黒体炉装置を構成することにより、高性能な標準黒体炉を提供することができる。
さらに、空洞筒部後方に穴あきＣＮＴ表面処理基板を着脱自在に装着して空洞底部の機能を兼用させれば、希ガス供給量を大幅に低減できる。穴あきＣＮＴ表面処理基板の穴としては、基板に設けた貫通孔あるいは基板自体をポーラス材で構成することで簡便に達成できる。
The cavity for the standard blackbody furnace apparatus of the present invention is configured such that the rear end of the hollow cylinder part and the hollow bottom part are detachable, and the installation of the CNT surface treatment substrate at the position of the bottom of the hollow Since it can be removed from the rear end and performed from the bottom side of the cavity, operability is good, and damage to the CNT surface-treated substrate can be prevented. Further, in the standard blackbody furnace for the standard blackbody furnace apparatus of the present invention, the purge unit 1 for placing the cavity is maintained in a rare gas atmosphere, so that the combustion of the carbon material with respect to the cavity containing the carbon material is performed. Can be prevented and deterioration of the emissivity performance can be prevented.
Further, by combining the standard black body furnace apparatus of the present invention with the standard black body furnace apparatus of the standard black body furnace apparatus of the present invention to constitute the carbon nanotube standard black body furnace apparatus of the present invention, a high performance Standard blackbody furnace can be provided.
Furthermore, if a CNT surface treatment substrate with a hole is detachably mounted on the rear side of the hollow cylinder part and the function of the hollow bottom part is also used, the rare gas supply amount can be greatly reduced. The hole in the perforated CNT surface-treated substrate can be easily achieved by forming a through hole provided in the substrate or the substrate itself with a porous material.
Claims (9)
前記空洞は空洞筒部と空洞底部が着脱自在に構成され、前記基板の配置を空洞底部側から行えるようにしたことを特徴とする標準黒体炉装置用の空洞。 A cavity for a standard blackbody furnace apparatus, a carbon nanotube surface treatment substrate is disposed at the bottom of the cavity,
A cavity for a standard blackbody furnace apparatus, wherein the cavity is configured such that a cavity cylinder part and a cavity bottom part are detachable, and the substrate can be arranged from the cavity bottom part side.
空洞を内部に載置するためのパージユニット（１）と、パージユニット（１）内に炉後方から希ガスを供給する希ガス供給装置を設けてパージユニット（１）内を希ガス雰囲気にするとともに、
標準黒体炉前方開口部に設けたパージユニット（２）と、パージユニット（２）に希ガスを供給する希ガス供給装置を設け、パージユニット（２）の開口部内周に設けた筒状部材から開口に向けて希ガスを噴出してパージユニット（２）の開口からの大気の侵入を防止し、前記パージユニット（１）およびパージユニット（２）内の希ガス雰囲気を維持することを特徴とする標準黒体炉装置用の標準黒体炉。 A standard blackbody furnace whose temperature is controlled to a predetermined temperature for a standard blackbody furnace apparatus,
A purge unit (1) for placing the cavity inside, and a rare gas supply device for supplying a rare gas from the rear of the furnace in the purge unit (1) are provided to make the purge unit (1) a rare gas atmosphere. With
A purge unit (2) provided at the front opening of the standard black body furnace, a rare gas supply device for supplying a rare gas to the purge unit (2), and a cylindrical member provided at the inner periphery of the opening of the purge unit (2) A rare gas is ejected from the opening of the purge unit (2) to prevent air from entering through the opening of the purge unit (2), and the rare gas atmosphere in the purge unit (1) and the purge unit (2) is maintained. Standard blackbody furnace for standard blackbody furnace equipment.
標準黒体炉装置用の所定温度に温度制御された標準黒体炉であって、
前記空洞を内部に載置するためのパージユニット（１）と、パージユニット（１）内に炉後方から希ガスを供給する希ガス供給装置を設けた標準黒体炉とからなり、
前記標準黒体炉のパージユニット（１）内に前記空洞を載置することにより、前記パージユニット（１）内に炉後方から供給された希ガスが前記穴あきカーボンナノチューブ表面処理基板の穴を通って空洞底部側から希ガス雰囲気にするよう構成されたことを特徴とするカーボンナノチューブ標準黒体炉装置。 A cavity for a standard blackbody furnace apparatus in which a perforated carbon nanotube surface treatment substrate that also serves as a cavity bottom is detachably attached to the rear of the cavity cylinder part, and
A standard blackbody furnace whose temperature is controlled to a predetermined temperature for a standard blackbody furnace apparatus,
A purge unit (1) for placing the cavity inside, and a standard blackbody furnace provided with a rare gas supply device for supplying a rare gas from behind the furnace in the purge unit (1),
By placing the cavity in the purge unit (1) of the standard blackbody furnace, the rare gas supplied from the rear of the furnace into the purge unit (1) opens the hole in the perforated carbon nanotube surface treatment substrate. A carbon nanotube standard blackbody furnace device configured to pass through a rare gas atmosphere from the bottom of the cavity.
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