JP2017003324A - Radiation thermometer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a radiation thermometer capable of measuring a temperature at a local position at high speed. SOLUTION: A probe 10 arranged on an object, a light detection unit 20, an optical transmission path 30 arranged between the probe 10 and the light detection unit 20, and a light intensity detected by the light detection unit 20. A radiant thermometer 1 including a control unit 40 that calculates the temperature of an object based on the above, and the probe 10 has a structure that shields a predetermined ratio or more of light having a predetermined wavelength or less incident on the inside from the outside. A radiation generating material component 12 that emits radiated light by being heated and one end of an optical transmission path 30 that guides the radiated light from the radiating light generating material component 12 to the light detection unit 20 are arranged. It is configured to include a holding portion 11. [Selection diagram] Fig. 1

Description

  The present invention relates to a radiation thermometer that measures temperature, for example, and more particularly to a radiation thermometer that measures the temperature at a mounting position or a local position in a vacuum region, a flue, a combustion process, or an internal combustion engine (engine) in a semiconductor manufacturing apparatus. .

  In recent years, it has been required to measure the temperature of an object that operates at a high temperature, such as a combustion chamber of an engine (internal combustion engine).

Here, FIG. 4 is a schematic configuration diagram illustrating an example of an engine. One direction horizontal to the ground is defined as an X direction, a direction horizontal to the ground and perpendicular to the X direction is defined as a Y direction, and a direction perpendicular to the X direction and the Y direction is defined as a Z direction.
The engine 50 includes, for example, an aluminum cylinder (cylinder) 51, a piston 52 slidable in the Z direction and the −Z direction in the cylinder 51, and a crankshaft (illustrated) connected to the piston 52 via a connecting rod 53. And an ECU 60.

The intake port and the exhaust port are formed in the head of the cylinder 51, and the intake port and the exhaust port communicate with the combustion chamber. The intake port is connected to the intake passage 54, and an intake valve 56 for opening and closing the intake port with respect to the combustion chamber is provided between the intake port and the combustion chamber. The exhaust port is connected to the exhaust passage 55, and an exhaust valve 57 for opening and closing the exhaust port with respect to the combustion chamber is provided between the exhaust port and the combustion chamber.
Although not shown, the combustion chamber is provided with an injector for injecting fuel into the combustion chamber, an ignition plug for igniting the air-fuel mixture in the combustion chamber, and the like.

  The ECU 60 is provided in the vicinity of the crankshaft and receives information from various sensors such as a rotation sensor that detects the crank position and crank angular velocity as measurement information, and controls the fuel injection amount and ignition timing of the engine 50.

  According to such an engine 50, an intake process is performed in which intake gas from the intake passage 54 is drawn into the combustion chamber via the intake valve 56 as the piston 52 descends. After the intake process, the intake valve 56 is closed, and a compression process is performed in which the air-fuel mixture in which fuel is injected into the intake air is compressed in the combustion chamber by the rise of the piston 52 that has reached bottom dead center. When the piston 52 rises to near the top dead center, a combustion process is performed by ignition of the air-fuel mixture at a predetermined timing. Then, when the piston 52 lowered by the combustion pressure rises again, the exhaust valve 57 is opened, and an exhaust process is performed in which the combustion gas in the combustion chamber is discharged as exhaust gas through the exhaust valve 57 to the exhaust passage 55. Is called. A series of four processes including the intake process, the compression process, the combustion process, and the exhaust process constitute one cycle.

  In order to measure the temperature of such an engine 50, for example, a thermocouple is used. However, since the temperature and pressure in the combustion chamber during the combustion cycle change dynamically at high speed, the response speed is several msec to several tens msec even with a thermocouple having a small diameter of several tens of μm. The temperature could not be measured in detail. That is, 1.8 ° C. in an engine 50 of 6000 r / m. A. In order to measure each temperature, a response speed of 0.05 msec is required.

On the other hand, as an optical temperature sensor that can measure the temperature of an object that operates at a high temperature at high speed (0.05 msec), a radiation thermometer that detects the temperature of the object by detecting the emitted light of the object or 2 Color light sensors are disclosed (see, for example, Patent Document 1 and Patent Document 2).
FIG. 5 is a partial cross-sectional schematic configuration diagram showing an example of a probe related to a conventional radiation thermometer. A radiation thermometer (wavelength distribution type two-color thermometer) 101 includes a probe 110, a light detection unit 120, an optical fiber (optical transmission line) 30 disposed between the probe 110 and the light detection unit 120, and And a control unit 140 including a microcomputer and a PC.

  The probe 110 includes a cylindrical housing 11 made of SUS that does not transmit light. A substantially disk-shaped sapphire window (transparent part) 112 is joined to one end of the cylindrical housing 11 via a sealing structure such as a gasket, an O-ring, or brazing, and the cylindrical housing. One end portion of the optical fiber 30 is attached to the other end portion (holding portion) of the body 11.

  For example, such a probe 110 has a through hole (screw hole) formed on the side wall of the cylinder 51 by a measurer or the like, and is inserted into the through hole in the X direction and attached. Thereby, the radiated light radiated in the −X direction is guided from the sapphire window 112 into the housing 11, and the radiated light guided into the housing 11 enters the optical fiber 30.

  The optical fiber 30 is, for example, a tube having a diameter of 0.2 mm and a length of 1 m to 10 m. The optical fiber 30 can transmit light in the axial direction, and light incident from one end passes through the inside and exits from the other end. It is supposed to be.

The light detection unit 120 includes, for example, a photodiode (light detector) 21 that converts the light intensity I into an electric signal, and a spectroscope 122. The spectroscope 122 includes a rectangular parallelepiped housing 122a, a diffractive optical element 122b is disposed inside the housing 122a, and the other end of the optical fiber 30 is attached to a side wall of the housing 122a. In such a light detection unit 120, the diffractive optical element 122b is controlled by the control unit 140, so that the radiated light in the wavelength region (λ _{1 to} Λ _{1 to} Λ _{2 to} λ ₂ ) that has passed through the optical fiber 30 is transmitted. wavelength lambda ₁ of the inner, lambda ₂ of light is respectively guided to the photodiode 21, the photodiode 21 receives the wavelength lambda _1, lambda ₂ of the light intensity _I 1, _{I 2,} respectively.

The control unit 140 is composed of a microcomputer and a PC. The function processed by the control unit 140 will be described as a block. The acquisition unit 40a that acquires an electrical signal (light intensity I) from the photodiode 21, and the first wavelength and a calculation unit 140b for calculating the temperature at predetermined time intervals (e.g., 0.05 msec) lambda ₁ of the light intensity _{I 1} and the second wavelength lambda dichroism using ₂ of the light intensity _{I 2.}

JP 2010-139349 A JP-A-8-226854

In the probe 110 as described above, the radiated light entering the field of view of the sapphire window 112 enters the optical fiber 30. Specifically, in the case of a diesel engine, emitted light from generated soot particles enters the optical fiber 30, and in the case of a gasoline engine, emitted light from dummy particles enters the optical fiber 30. Therefore, in the radiation thermometer 101 as described above, the average temperature of the gas (all particles) existing in the −X direction region of the probe 110 is calculated. Therefore, the temperature at the local position in the engine 50 can be measured. There was a problem that it was not possible.
Therefore, an object of the present invention is to provide a radiation thermometer capable of measuring the temperature at a local position at high speed.

  In order to solve the above-mentioned problems, the present inventor has intensively studied a radiation thermometer that can measure the temperature at a local position at a high speed. Therefore, instead of detecting the emitted light (combustion light emission) from soot particles, dummy particles, etc., use a probe with a structure that does not transmit the combustion light emission from the inside of the combustion chamber, and use a synchrotron radiation generating material component with a high emissivity. It was found that the probe was attached to the probe, or that the probe was formed of a synchrotron radiation-generating substance, and the probe was attached at a desired position.

  That is, the radiation thermometer according to the present invention includes a probe arranged on an object, a light detection unit, an optical transmission path arranged between the probe and the light detection unit, and the light detection unit. A radiation thermometer including a controller that calculates the temperature of the object based on the detected light intensity, wherein the probe shields a predetermined ratio or more of light having a predetermined wavelength or less incident from the outside to the inside; A synchrotron radiation generating material component that emits synchrotron radiation when heated, and one end of the optical transmission path that guides the synchrotron radiation from the synchrotron radiation generating material component to the photodetection unit And a holding part in which the part is arranged.

Here, the “predetermined wavelength” is determined by the type of the radiation generating material (light intensity distribution emitted from the radiation generating material) in order to accurately calculate the temperature of the object from the detected light intensity. Any wavelength.
In addition, “predetermined ratio” means the kind of synchrotron radiation generating substance in order to accurately calculate the temperature of the object from the detected light intensity so that the combustion luminescence from the inside of the combustion chamber or the like does not become noise. It is an arbitrary ratio determined by (the magnitude of the light intensity emitted from the synchrotron radiation generating material).

  As described above, according to the radiation thermometer of the present invention, the temperature is calculated from the intensity of the radiated light from the radiated light generating material component provided in the probe. And the temperature at the local position can be measured at high speed.

(Means and effects for solving other problems)
In the invention described above, the predetermined wavelength may be 15 μm, and the predetermined ratio may be 95%.
In the above invention, the probe includes a cylindrical casing to be attached to the object, and the casing and the emitted light generating material component are light having a predetermined wavelength or less incident from the outside to the inside. Is formed of a material that shields a predetermined ratio or more, and the emitted light generating substance component is disposed at the front end of the housing, and the holding portion is disposed at the rear end of the housing. You may make it.

In the above invention, the synchrotron radiation generating material component is a plate made of alumina ceramics, or the synchrotron radiation generating material component is coated on a transparent component that transmits light of a predetermined wavelength or less. Alternatively, a black body paint film may be used.
Further, in the above invention, the probe includes a cylindrical housing for attaching to the object, and the housing shields a predetermined ratio or more of light having a predetermined wavelength or less incident from the outside to the inside. The synchrotron radiation generating material component is formed at the front end of the casing, and the holding section is positioned at the rear end of the casing. A shielding component that shields a predetermined ratio or more of light having a predetermined wavelength or less incident on the inside from the outside may be arranged in front of the component.

  In the above invention, the synchrotron radiation generating material component is a cylindrical body having a front surface to be attached to the object, and the synchrotron radiation generating material component has a predetermined wavelength or less incident from the outside to the inside. It may be made of a material that shields a predetermined proportion or more of light, and the holding portion may be arranged at the rear end portion of the cylindrical body.

  According to the above-described radiation thermometer of the present invention, even if the object is such that impurities (dust, particles, etc.) are generated, the impurity that blocks the radiated light between the radiant light generating material component and the optical transmission line Can be prevented completely.

Moreover, in said invention, you may make it the thickness of the said synchrotron radiation generating material component be 10 micrometers or less.
In the invention described above, the optical transmission line may be an optical fiber or a space.

  Furthermore, in the present invention, the light detection unit may include a spectroscope and a light detector.

The partial cross section schematic block diagram which shows the probe of the radiation thermometer which concerns on 1st embodiment of this invention. The schematic block diagram similar to FIG. 1 which shows the probe which concerns on 2nd embodiment of this invention. The schematic block diagram similar to FIG. 1 which shows the probe which concerns on 3rd embodiment of this invention. The schematic block diagram which shows an example of an engine. The partial cross section schematic block diagram which shows an example of the probe which concerns on the conventional radiation thermometer.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments described below, and it goes without saying that various aspects are included without departing from the spirit of the present invention.

<First embodiment>
FIG. 1 is a partial sectional schematic configuration diagram showing an example of a probe of a radiation thermometer according to the first embodiment of the present invention. In addition, the same code | symbol is attached | subjected about the thing similar to the conventional radiation thermometer 101 mentioned above.
A radiation thermometer (energy intensity type monochromatic thermometer) 1 includes a probe 10, a light detection unit 20, an optical fiber (optical transmission line) 30 disposed between the probe 10 and the light detection unit 20, and a microcomputer. And a control unit 40 composed of a PC.

The probe 10 includes a cylindrical housing 11. And the housing | casing 11 is formed with the material which shields the predetermined ratio or more of the light below the predetermined wavelength which injects into the inside from the outside.
As the material of the casing, a material that shields light of 15 μm or less is preferable, and a material that shields light of all wavelengths is more preferable. Further, it is preferable to block 95% or more of light having a predetermined wavelength or less, and it is more preferable to block 100% of light having a predetermined wavelength or less. Examples of such a material include SUS.

The synchrotron radiation generating material component 12 is a disk-shaped body having a diameter larger than the inner diameter of the housing 11 and smaller than the outer diameter of the housing 11 so as to block one end portion of the cylindrical housing 11. Are joined to each other through a sealing structure such as a gasket, an O-ring, and brazing (a structure for preventing inflow).
Although the thickness of the said disk-shaped object is not specifically limited, It is preferable that it is 10 micrometers or less, and it is more preferable that it is 5 micrometers or less.
Further, the material of the synchrotron radiation generating material component is preferably one that radiates radiation in a wavelength region (λ _{1 to} Λ to λ ₂ ) including a predetermined wavelength Λ by heating. Moreover, what shields the light of 15 micrometers or less is preferable, and what shields the light of all the wavelengths is more preferable. Furthermore, it is preferable to block 95% or more of light having a predetermined wavelength or less, and it is more preferable to block 100% of light having a predetermined wavelength or less. Examples of such a material include alumina ceramics.

Such a probe 10 is attached to a through hole formed at a desired position on the side wall of the cylinder 51 by, for example, a measurer. As a result, the radiated light having a predetermined wavelength or less emitted from the particles or the like in the cylinder 51 does not enter the housing 11, and the radiated light generating material component 12 is heated, so that the wavelength region (λ ₁ ˜λ˜λ ₂ ). As a result, the radiated light in the wavelength region (λ _{1 to} Λ to λ ₂ ) radiated from the radiated light generating material component 12 enters the optical fiber 30.
The light detection unit 20 includes, for example, a photodiode (photodetector) 21 that converts the light intensity I into an electrical signal, and a filter (spectrometer) 22 that is disposed in front of the photodiode 21 and transmits light having a wavelength Λ. . In such a light detection unit 20, light having a wavelength Λ in the radiated light in the wavelength region (λ _{1 to} Λ to λ ₂ ) that has passed through the optical fiber 30 is guided to the photodiode 21 through the filter 22. The photodiode 21 receives the intensity I of light having a wavelength Λ.
The control unit 40 is composed of a microcomputer and a PC. The function processed by the control unit 40 will be described as a block. An acquisition unit 40a that acquires an electrical signal (light intensity I) from the photodiode 21, and a wavelength Λ A calculating unit 40b that calculates the temperature at a predetermined time interval (for example, 0.025 msec) by a monochromatic method using the light intensity I.

  As described above, according to the radiation thermometer 1 of the first embodiment, the temperature is calculated from the intensity I of the emitted light from the emitted light generating material component 12 provided in the probe 10, and thus the emitted light generating material component 12. Can be measured at a predetermined time interval (for example, 0.025 msec). Further, since the emitted light generating substance is specific and the amount of the emitted substance is constant (known), not soot and dummy particles, it can be accurately measured by the monochromatic method.

<Second embodiment>
FIG. 2 is a partial cross-sectional schematic configuration diagram showing an example of a probe of a radiation thermometer according to the second embodiment of the present invention. In addition, the same code | symbol is attached | subjected about the thing similar to the radiation thermometers 1 and 101 mentioned above.
The radiation thermometer (energy intensity type monochromatic thermometer) 201 includes a probe 210, a light detection unit 20, a light transmission path 230 disposed between the probe 210 and the light detection unit 20, and a microcomputer or a PC. And a control unit 40.

The probe 210 includes a cylindrical casing 11.
The sapphire window (transparent part) 112 is a disk-like body having a diameter larger than the inner diameter of the housing 11 and smaller than the outer diameter of the housing 11, and closes one end of the cylindrical housing 11. In this way, they are joined through a sealing structure such as a gasket, an O-ring, or brazing.

A radiant light generating material film (radiated light generating material component) 212 is formed on the front surface of the sapphire window 112 by applying a radiant light generating material.
The thickness of the radiation generating substance film is not particularly limited, but is preferably 10 μm or less, and more preferably 5 μm or less.

Further, the material of the synchrotron radiation generating material film is preferably a material that emits synchrotron radiation in a wavelength region (λ _{1 to} Λ to λ ₂ ) including a predetermined wavelength Λ by heating. Moreover, what shields the light of 15 micrometers or less is preferable, and what shields the light of all the wavelengths is more preferable. Furthermore, it is preferable to block 95% or more of light having a predetermined wavelength or less, and it is more preferable to block 100% of light having a predetermined wavelength or less. An example of such a material is black body paint.

  The light transmission path 230 includes a plurality of lenses, can transmit light in the axial direction, and light incident from one end is emitted from the other end.

  As described above, according to the radiation thermometer 201 of the second embodiment, the temperature is calculated from the intensity I of the emitted light from the emitted light generating material film 212 provided in the probe 210. Can be measured at a predetermined time interval (for example, 0.025 msec). In addition, since the emitted light generating substance is specific and the amount of emitted substance is constant, not soot and dummy particles, it can be accurately measured by the monochromatic method.

<Third embodiment>
FIG. 3 is a partial cross-sectional schematic configuration diagram showing an example of a radiation thermometer probe according to the third embodiment of the present invention. In addition, the same code | symbol is attached | subjected about the thing similar to the radiation thermometer 1, 101, 201 mentioned above.
A radiation thermometer (energy intensity type monochromatic thermometer) 301 includes a probe 310, a light detection unit 20, an optical fiber (optical transmission line) 30 disposed between the probe 310 and the light detection unit 20, and a microcomputer. And a control unit 40 composed of a PC.

The probe 310 includes a cylindrical housing (radiation generation material component) 311 having a front surface.
As the material of the casing, it is preferable to emit radiation in a wavelength region (λ _{1 to} Λ to λ ₂ ) including a predetermined wavelength Λ by heating. Moreover, what shields the light of 15 micrometers or less is preferable, and what shields the light of all the wavelengths is more preferable. Furthermore, it is preferable to block 95% or more of light having a predetermined wavelength or less, and it is more preferable to block 100% of light having a predetermined wavelength or less. Examples of such a material include alumina ceramics.

  One end of the optical fiber 30 is attached to the other end of the housing 311 via a cylindrical holding portion 312.

As described above, according to the radiation thermometer 301 of the third embodiment, since the temperature is calculated from the intensity I of the radiated light from the housing 311 provided in the probe 310, the cylinder 51 in which the housing 311 is disposed. It is possible to measure the temperature at the local position on the side wall at a predetermined time interval (for example, 0.025 msec). In addition, since the emitted light generating substance is specific and the amount of emitted substance is constant, not soot and dummy particles, it can be accurately measured by the monochromatic method.
<Other embodiments>
(1) In the radiation thermometer 1 described above, one end of the optical fiber 30 is attached to the other end of the housing 11, but the probe (housing) and the optical fiber seem to be integrated. It is good also as a simple structure. Moreover, you may make it the optical fiber 30 connect using an extension fiber and an adapter as needed.
(2) In the radiation thermometer 1 described above, the light detection unit 20 includes the photodiode 21. However, the light detection unit 20 may include a PMT, a pyroelectric element, or an infrared sensor. Moreover, although it was set as the structure provided with the filter 22 which permeate | transmits the light of predetermined wavelength (LAMBDA), it is good also as a structure which acquires multiple wavelengths simultaneously.

  The present invention can be used for a radiation thermometer for measuring temperature.

1 Radiation thermometer 10 Probe 11 Housing (holding part)
12 Synchrotron Radiation Generating Parts 20 Photodetector 30 Optical Fiber (Optical Transmission Line)
40 control unit 50 engine (internal combustion engine)

Claims (9)

A probe for placement on an object;
A light detection unit;
An optical transmission line disposed between the probe and the light detection unit;
A radiation thermometer comprising a control unit that calculates the temperature of the object based on the light intensity detected by the light detection unit,
The probe has a structure that shields a predetermined proportion or more of light having a predetermined wavelength or less incident on the inside from the outside, and
A synchrotron radiation component that emits synchrotron radiation when heated; and
A radiation thermometer comprising: a holding portion in which one end portion of the optical transmission path that guides the radiation light from the radiation light generating material component to the light detection portion is disposed. The predetermined wavelength is 15 μm,
The radiation thermometer according to claim 1, wherein the predetermined ratio is 95%. The probe includes a cylindrical housing for being attached to the object,
The casing and the synchrotron radiation generating material component are formed of a material that shields a predetermined ratio or more of light having a predetermined wavelength or less incident on the inside from the outside,
The said radiation | emission light generating substance component is arrange | positioned at the front-end | tip part of the said housing | casing, and the said holding | maintenance part is arrange | positioned at the rear-end part of the said housing | casing. The radiation thermometer described. The synchrotron radiation generating material component is a plate made of alumina ceramics, or
4. The radiation thermometer according to claim 3, wherein the synchrotron radiation generating material component is a black body paint film coated on a transparent component that transmits light of a predetermined wavelength or less. The probe includes a cylindrical housing for being attached to the object,
The casing is formed of a material that shields a predetermined ratio or more of light having a predetermined wavelength or less incident on the inside from the outside,
The synchrotron radiation generating material component is disposed at the front end of the housing, and the holding portion is disposed at the rear end of the housing,
The shielding part which shields more than the predetermined ratio of the light below the predetermined wavelength which injects into the inside from the outside is arrange | positioned ahead of the said radiation | emission light generating substance component, The Claim 1 or Claim 2 characterized by the above-mentioned. Radiation thermometer. The synchrotron radiation generating material component is a cylindrical body having a front surface to be attached to the object,
The synchrotron radiation generating material component is formed of a material that shields a predetermined ratio or more of light having a predetermined wavelength or less incident on the inside from the outside,
The radiation thermometer according to claim 1, wherein the holding portion is disposed at a rear end portion of the cylindrical body.   The radiation thermometer according to any one of claims 3 to 6, wherein a thickness of the synchrotron radiation generating material component is 10 µm or less.   The radiation thermometer according to claim 1, wherein the optical transmission line is an optical fiber or a space.   The radiation thermometer according to claim 1, wherein the light detection unit includes a spectroscope and a light detector.

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